JP2008116268A - Device and method for estimating hardness of dlc film - Google Patents

Device and method for estimating hardness of dlc film Download PDF

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JP2008116268A
JP2008116268A JP2006298393A JP2006298393A JP2008116268A JP 2008116268 A JP2008116268 A JP 2008116268A JP 2006298393 A JP2006298393 A JP 2006298393A JP 2006298393 A JP2006298393 A JP 2006298393A JP 2008116268 A JP2008116268 A JP 2008116268A
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dlc film
hardness
width
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JP4834514B2 (en
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Satoshi Yoshida
聡 吉田
Kentaro Komori
健太郎 小森
Kazumi Ogawa
和美 小川
Akira Hiroshima
晶 廣嶋
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Honda Motor Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a device for estimating hardness of a DLC film capable of being applied to the quality control or the like of the DLC film and estimating the hardness of the DLC film in a non-destructive manner, and to provide a method of estimating the hardness of the DLC film. <P>SOLUTION: The device 1 for estimating the hardness of the DLC film includes a laser Raman spectrometer 2 for acquiring a width of a G band waveform of the DLC film by the laser Roman spectroscopic method, a database memory means 3 for storing a database wherein the width of a G band waveform and the hardness of the DLC film based on the laser Raman spectroscopic method of the DLC film are related with each other, and an estimation means 4 for estimating the hardness of the DLC film on the basis of the width of the G band waveform of the DLC film acquired by the laser Raman spectrometer 2 and the database. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、非破壊でＤＬＣ膜の硬度を推定するＤＬＣ膜の硬度推定装置及び硬度推定方法に関する。   The present invention relates to a DLC film hardness estimation apparatus and a hardness estimation method for estimating the hardness of a DLC film in a nondestructive manner.

アモルファス構造を有するＤＬＣ（Diamond Like Carbon）膜は、極めて低い摩擦係数であり、良好な摺動性を備えると共に、非常に高い硬度を備えている。このようなＤＬＣ膜の品質管理において、例えば、ＤＬＣ膜の硬度については、マイクロビッカース硬度計等による硬度測定がされていた。この他、最近では、レーザーラマン分光法によるＤＬＣ膜のラマンスペクトルのピーク位置やピークの強度比に関する報告がされている（特許文献１、特許文献２参照）。
特許第３６１２０９８号公報 特許第３７６４７４２号公報 A DLC (Diamond Like Carbon) film having an amorphous structure has a very low coefficient of friction, a good sliding property, and a very high hardness. In quality control of such a DLC film, for example, the hardness of the DLC film has been measured by a micro Vickers hardness meter or the like. In addition, recently, reports have been made regarding the peak position of the Raman spectrum of the DLC film and the intensity ratio of the peaks by laser Raman spectroscopy (see Patent Document 1 and Patent Document 2).
Japanese Patent No. 3612098 Japanese Patent No. 3764742

しかしながら、マイクロビッカース硬度計等による硬度測定は、接触型の測定方法であり、ＤＬＣ膜の破壊を伴うため、その測定頻度に限界があり、測定方法としては好ましいものでなかった。また、ＤＬＣ膜のラマンスペクトルの波形情報から、どのようにしてＤＬＣ膜の硬度を求めるかについては、研究が進んでおらず、ラマンスペクトルに基づいて、ＤＬＣ膜の品質管理等をすることはできなかった。   However, hardness measurement using a micro Vickers hardness tester or the like is a contact-type measurement method and involves destruction of the DLC film, so that the measurement frequency is limited, which is not preferable as the measurement method. In addition, research has not progressed on how to obtain the hardness of the DLC film from the waveform information of the Raman spectrum of the DLC film, and quality control of the DLC film can be performed based on the Raman spectrum. There wasn't.

そこで、本発明は、ＤＬＣ膜の品質管理等に応用可能であり、非破壊でＤＬＣ膜の硬度を推定できるＤＬＣ膜の硬度推定装置及び硬度推定方法を提供することを課題とする。   SUMMARY OF THE INVENTION An object of the present invention is to provide a DLC film hardness estimation apparatus and a hardness estimation method that can be applied to quality control of a DLC film and that can estimate the hardness of the DLC film in a nondestructive manner.

前記課題を解決すべく、本願発明者らは、鋭意研究を重ねた結果、ＤＬＣ膜をレーザーラマン分光装置でラマン分光測定することによって得られたラマンスペクトル（図１参照）のＧバンドのピーク位置における半値幅（図２参照）と、ＤＬＣ膜のマルテンス硬度（ＩＳＯ１４５７７−１準拠、荷重２．４５Ｎ）とが、高い相関関係（Ｒ２＝０．６２）を有するという知見を得た（図３参照）。因みに、Ｇバンドの半値幅は、ラマンスペクトルを、例えば、１５５５ｃｍ−１（カイザー）付近にピークを有するＧバンドと、１３９０ｃｍ−１付近にピークを有するＤバンドとに波形分離し、Ｇバンドのピーク強度の半値におけるＧバンド波形の幅である（図２参照）。また、発明者らは、Ｄバンドのピーク強度とＧバンドのピーク強度との比（Ｄ／Ｇ比）と、ＤＬＣ膜のマルテンス硬度とは、相関関係を有さない（Ｒ２＝０．０５）という知見も得た（図４参照）。 In order to solve the above-mentioned problems, the inventors of the present application have made extensive studies, and as a result, the peak position of the G band of the Raman spectrum (see FIG. 1) obtained by performing Raman spectroscopy measurement of the DLC film with a laser Raman spectrometer. It was found that the full width at half maximum (see FIG. 2) and the Martens hardness of the DLC film (based on ISO 14577-1, load 2.45N) have a high correlation (R 2 = 0.62) (FIG. 3). reference). Incidentally, the half width of the G band is obtained by separating the waveform of the Raman spectrum into, for example, a G band having a peak near 1555 cm −1 (Kaiser) and a D band having a peak near 1390 cm −1. It is the width of the G band waveform at the half value of the intensity (see FIG. 2). In addition, the inventors have no correlation between the ratio of the D band peak intensity to the G band peak intensity (D / G ratio) and the Martens hardness of the DLC film (R 2 = 0.05). ) Was also obtained (see FIG. 4).

このような知見に鑑み、前記課題を解決するための手段として、本発明は、レーザーラマン分光法によりＤＬＣ膜のＧバンド波形の幅を取得する、Ｇバンド波形幅取得手段と、ＤＬＣ膜のレーザーラマン分光法によるＧバンド波形の幅と、ＤＬＣ膜の硬度と、が関連付けられたデータベースと、前記Ｇバンド波形幅取得手段が取得したＤＬＣ膜のＧバンド波形の幅と、前記データベースと、に基づいて、ＤＬＣ膜の硬度を推定する推定手段と、を備えたことを特徴とするＤＬＣ膜の硬度推定装置である。   In view of such knowledge, as means for solving the above-described problems, the present invention provides G-band waveform width acquisition means for acquiring the G-band waveform width of the DLC film by laser Raman spectroscopy, and a DLC film laser. Based on the database in which the width of the G band waveform by Raman spectroscopy and the hardness of the DLC film are associated, the width of the G band waveform of the DLC film acquired by the G band waveform width acquisition unit, and the database And a DLC film hardness estimation apparatus comprising: an estimation means for estimating the hardness of the DLC film.

このようなＤＬＣ膜の硬度推定装置によれば、Ｇバンド波形幅取得手段によって、レーザーラマン分光法により、ＤＬＣ膜のＧバンド波形の幅を取得することができる。そして、推定手段によって、この取得したＧバンド波形の幅とデータベースとに基づいて、ＤＬＣ膜の硬度を推定することができる。すなわち、ＤＬＣ膜の硬度を、非接触かつ非破壊で推定することができる。
したがって、例えば、ＤＬＣ膜の硬度が所定硬度以上の場合、ＤＬＣ膜としての機能が保障されるというように基準を設定すれば、ＤＬＣ膜の生産性を低下させることなく、ＤＬＣ膜の品質を管理することができる。 According to such a DLC film hardness estimation apparatus, the G-band waveform width of the DLC film can be acquired by the G-band waveform width acquisition unit by laser Raman spectroscopy. Then, the hardness of the DLC film can be estimated by the estimation means based on the width of the acquired G band waveform and the database. That is, the hardness of the DLC film can be estimated in a non-contact and non-destructive manner.
Therefore, for example, if the standard is set so that the function of the DLC film is ensured when the hardness of the DLC film is equal to or higher than a predetermined hardness, the quality of the DLC film can be controlled without reducing the productivity of the DLC film. can do.

また、本発明は、ＤＬＣ膜のレーザーラマン分光法によって取得されたＧバンド波形の幅を求める第１ステップと、このＧバンド波形の幅と、Ｇバンド波形の幅とＤＬＣ膜の硬度とが予め関連付けられたデータベースと、に基づいて、ＤＬＣ膜の硬度を推定する第２ステップと、を含むことを特徴とするＤＬＣ膜の硬度推定方法である。   In the present invention, the first step of obtaining the width of the G band waveform obtained by laser Raman spectroscopy of the DLC film, the width of the G band waveform, the width of the G band waveform, and the hardness of the DLC film are determined in advance. A DLC film hardness estimation method comprising: a second step of estimating a DLC film hardness based on an associated database.

このようなＤＬＣ膜の硬度推定方法によれば、ＤＬＣ膜のレーザーラマン分光法によって取得されたＧバンド波形の幅を求め（第１ステップ）、このＧバンド波形の幅と、Ｇバンド波形の幅とＤＬＣ膜の硬度とが予め関連付けられたデータベースと、に基づいて、ＤＬＣ膜の硬度を推定することができる（第２ステップ）。   According to the hardness estimation method of the DLC film, the width of the G band waveform obtained by the laser Raman spectroscopy of the DLC film is obtained (first step), the width of the G band waveform, and the width of the G band waveform. And the hardness of the DLC film can be estimated based on a database in which the hardness of the DLC film is associated in advance (second step).

本発明によれば、ＤＬＣ膜の品質管理等に応用可能であり、非破壊でＤＬＣ膜の硬度を推定できるＤＬＣ膜の硬度推定装置及び硬度推定方法を提供することができる。   According to the present invention, it is possible to provide a DLC film hardness estimation apparatus and a hardness estimation method that can be applied to quality control of a DLC film and can estimate the hardness of the DLC film in a non-destructive manner.

以下、本発明の一実施形態について、図面を適宜参照して説明する。
図５に示す本実施形態に係るＤＬＣ膜の硬度推定装置１は、レーザーラマン分光装置２（Ｇバンド波形幅取得手段）と、データベース記憶手段３と、推定手段４とを主に備えている。 Hereinafter, an embodiment of the present invention will be described with reference to the drawings as appropriate.
The DLC film hardness estimation apparatus 1 according to the present embodiment shown in FIG. 5 mainly includes a laser Raman spectroscopic apparatus 2 (G band waveform width acquisition means), a database storage means 3, and an estimation means 4.

レーザーラマン分光装置２は、ＤＬＣ膜をレーザーラマン分光法により分析し、ラマンスペクトルを取得する装置である。また、レーザーラマン分光装置２は、取得されたラマンスペクトルを、例えば、カーブフィットし、１５５５ｃｍ−１（カイザー）付近にピークを有するＧバンドと、１３９０ｃｍ−１付近にピークを有するＤバンドと、に波形分離する装置である。さらに、レーザーラマン分光装置２は、Ｇバンドの最大ピーク強度の１／２の強度（半値）におけるＧバンドの波形の幅（半値幅）を取得し、推定手段４に出力する装置である。 The laser Raman spectroscopic device 2 is a device that analyzes a DLC film by laser Raman spectroscopy and acquires a Raman spectrum. In addition, the laser Raman spectroscopic apparatus 2 performs curve fitting on the acquired Raman spectrum, for example, to a G band having a peak near 1555 cm −1 (Kaiser) and a D band having a peak near 1390 cm −1. This is a device for waveform separation. Further, the laser Raman spectroscopic device 2 is a device that acquires the width (half width) of the G band waveform at half the maximum peak intensity of the G band (half value) and outputs it to the estimation means 4.

なお、ラマンスペクトルのカーブフィッティングは、分光学の分野で一般的に用いられる計算手法によって行うことができ、具体的には、取得されたラマンスペクトルに、ベースライン補正及びスムージングを施した後、フォークト関数によるフィッティングが行われる。スムージングは、例えば、適応化平滑法によって行うことができ、その計算時のパラメータにおいて、コンポリューション幅は１９に、偏差は０．２に、それぞれ設定される。なお、フォークト関数は、正規分布の特性関数であるガウス関数と、コーシー分布の特性関数であるローレンツ関数と、の畳み込みによって得られる関数である。   The curve fitting of the Raman spectrum can be performed by a calculation method generally used in the field of spectroscopy. Specifically, after performing baseline correction and smoothing on the acquired Raman spectrum, Function fitting is performed. Smoothing can be performed, for example, by an adaptive smoothing method. In the calculation parameters, the convolution width is set to 19 and the deviation is set to 0.2. The Forked function is a function obtained by convolution of a Gaussian function that is a characteristic function of a normal distribution and a Lorentz function that is a characteristic function of a Cauchy distribution.

このようなレーザーラマン分光装置２は、例えば、日本分光（株）製のレーザーラマン分光装置（ＮＲＳ−２１００）によって構成することができる。また、ＤＬＣ膜に照射されるレーザーとしては、例えば、波長が４８８ｎｍのアルゴン（Ａｒ）レーザーを選択し、表１に示す測定条件を採用することができる。   Such a laser Raman spectroscopic device 2 can be configured by, for example, a laser Raman spectroscopic device (NRS-2100) manufactured by JASCO Corporation. Moreover, as a laser irradiated to the DLC film, for example, an argon (Ar) laser having a wavelength of 488 nm can be selected, and the measurement conditions shown in Table 1 can be adopted.

Figure 2008116268
Figure 2008116268

なお、レーザーラマン分光法の測定条件（レーザーの種類、波長等）は、後記するデータベース記憶手段３のデータベースを作成した際と、同一の条件にする必要がある。また、Ｇバンドの最大ピーク強度の１／２の強度におけるＧバンド波形の幅（半値幅）の算出おいて、基準となるベースライン（図１、図２参照）も、データベース記憶手段３のデータベースを作成した際のベースラインと、同一に設定する必要がある。   The measurement conditions (laser type, wavelength, etc.) of laser Raman spectroscopy need to be the same as when the database storage means 3 described later is created. In addition, a baseline (see FIGS. 1 and 2) serving as a reference in calculating the width (half-value width) of the G band waveform at an intensity that is ½ of the maximum peak intensity of the G band is also the database of the database storage unit 3. It is necessary to set the same as the baseline at the time of creating.

データベース記憶手段３は、例えばハードディスクドライブやＲＡＭによって構成された記憶装置である。そして、データベース記憶手段３は、事前試験等によって求められた、ＤＬＣ膜のレーザーラマン分光法によるＧバンド波形の半値幅と、ＤＬＣ膜のマルテンス硬度と、が関連付けられたデータベース（例えば、図３に示す近似線の式）を有している。
因みに、マルテンス硬度は、ＩＳＯ１４５７７−１に準拠することで得られる硬度である。この場合において、ＤＬＣ膜を所定の寸法にカットし、適宜な硬度計を使用して、例えば５点で測定し、その平均値がマルテンス硬度とされる。 The database storage means 3 is a storage device configured by, for example, a hard disk drive or a RAM. Then, the database storage means 3 is a database (for example, as shown in FIG. 3) in which the half-value width of the G band waveform obtained by laser Raman spectroscopy of the DLC film and the Martens hardness of the DLC film are obtained by a preliminary test or the like. (Approximate line formula).
Incidentally, the Martens hardness is a hardness obtained by conforming to ISO14577-1. In this case, the DLC film is cut into a predetermined dimension, and measured using, for example, five points using an appropriate hardness meter, and the average value is the Martens hardness.

推定手段４は、ＣＰＵ、ＲＯＭ等によって構成され、ＤＬＣ膜の硬度推定装置１の制御を司る手段である。そして、推定手段４は、ＤＬＣ膜の硬度推定装置１が起動すると、ＲＯＭに記憶されたプログラムに従って動作し、レーザーラマン分光装置２から入力されたＤＬＣ膜のＧバンドの半値幅と、データベース記憶手段３のデータベースとに基づいて、ＤＬＣ膜のマルテンス硬度を推定し、例えば、モニタ等の表示手段に表示するようになっている。
また、このように推定されるＤＬＣ膜のマルテンス硬度に基づいて、ＤＬＣ膜の品質を管理する場合、ＤＬＣ膜が所定のマルテンス硬度を有さない場合、推定手段４が警告ランプ等の警告手段を作動させるように構成してもよい。 The estimation means 4 is constituted by a CPU, a ROM, etc., and is a means for controlling the DLC film hardness estimation apparatus 1. Then, when the DLC film hardness estimation apparatus 1 is activated, the estimation means 4 operates in accordance with a program stored in the ROM, and the GLC half band width of the DLC film input from the laser Raman spectrometer 2 and the database storage means The Martens hardness of the DLC film is estimated based on the database 3 and displayed on a display means such as a monitor.
In addition, when managing the quality of the DLC film based on the DLC film Martens hardness estimated in this way, when the DLC film does not have a predetermined Martens hardness, the estimation means 4 provides warning means such as a warning lamp. It may be configured to operate.

次に、ＤＬＣ膜の硬度推定装置１の動作と共に、ＤＬＣ膜の硬度推定方法について、図６を主に参照して説明する。ＤＬＣ膜の硬度推定方法は、レーザーラマン分光法によって取得されたＧバンド波形の半値幅を求め（第１ステップ）、この半値幅と、半値幅とＤＬＣ膜のマルテンス硬度とが予め関連付けられたデータベースと、に基づいて、ＤＬＣ膜のマルテンス硬度を推定する（第２ステップ）ことを特徴とする。
因みに、ＤＬＣ膜は、例えば、バイアス電圧とＲＦプラズマ出力とを独立で制御可能なプラズマＣＶＤ装置によって作製される。 Next, the operation of the DLC film hardness estimation apparatus 1 and the DLC film hardness estimation method will be described with reference mainly to FIG. The DLC film hardness estimation method obtains the half-value width of the G band waveform acquired by laser Raman spectroscopy (first step), and this half-value width, a database in which the half-value width and the Martens hardness of the DLC film are associated in advance. Based on the above, the Martens hardness of the DLC film is estimated (second step).
Incidentally, the DLC film is produced by, for example, a plasma CVD apparatus capable of independently controlling the bias voltage and the RF plasma output.

ステップＳ１０１において、レーザーラマン分光装置２は、ＤＬＣ膜のレーザーラマン分光法によって取得されたＧバンド波形の半値幅を求める。そして、レーザーラマン分光装置２は、この求めたＧバンドの半値幅を推定手段４に出力する。   In step S101, the laser Raman spectroscopic device 2 obtains the half width of the G band waveform acquired by laser Raman spectroscopy of the DLC film. Then, the laser Raman spectroscopic device 2 outputs the obtained half-width of the G band to the estimation unit 4.

ステップＳ１０２において、推定手段４は、レーザーラマン分光装置２からのＧバンド波形の半値幅と、データベース記憶手段３のデータベース（例えば、図３に示す近似線の式）とに基づいて、ＤＬＣ膜のマルテンス硬度を推定する（図２、矢印Ａ１参照）。そして、推定手段４は、推定したＤＬＣ膜のマルテンス硬度を、例えば、液晶モニタに出力する。   In step S102, the estimating means 4 determines the DLC film based on the half-value width of the G band waveform from the laser Raman spectroscopic apparatus 2 and the database (for example, the approximate line equation shown in FIG. 3) in the database storage means 3. The Martens hardness is estimated (see FIG. 2, arrow A1). Then, the estimation unit 4 outputs the estimated Martens hardness of the DLC film to, for example, a liquid crystal monitor.

このようなＤＬＣ膜の硬度推定装置１及び推定方法によれば、主に以下の効果を得ることができる。
ＤＬＣ膜のマルテンス硬度を、ＤＬＣ膜に接触せず、非破壊で推定することができる。そして、Ｇバンドの半値幅とマルテンス硬度とは高い相関性を有するので、ＤＬＣ膜の硬度を高精度で推定することができる。 According to the DLC film hardness estimation apparatus 1 and the estimation method, the following effects can be mainly obtained.
The Martens hardness of the DLC film can be estimated non-destructively without contacting the DLC film. And since the half width of G band and the Martens hardness have a high correlation, the hardness of the DLC film can be estimated with high accuracy.

また、マルテンス硬度の測定のように、ＤＬＣ膜を破壊しないため、例えば、本発明をＤＬＣ膜の生産管理に適用した場合、硬度推定によってＤＬＣ膜の生産性が低下することはない。すなわち、マルテンス硬度の測定に際しては、測定値にばらつきが生じることもあり、測定回数の増加に伴って、ＤＬＣ膜の生産数が減少することになるが、本発明によれば、測定するＤＬＣ膜の数が増加しても、ＤＬＣ膜の生産数が低下することはない。さらに、本発明は非破壊であるので、同一のＤＬＣ膜に対して同一の箇所でも、硬度の推定を繰り返すこともできる。   Further, since the DLC film is not broken as in the case of measuring Martens hardness, for example, when the present invention is applied to the production management of the DLC film, the productivity of the DLC film is not reduced by the hardness estimation. That is, when measuring the Martens hardness, the measured value may vary, and the number of DLC films produced decreases as the number of measurements increases. According to the present invention, the DLC film to be measured is measured. However, the number of DLC films produced does not decrease even if the number increases. Furthermore, since the present invention is non-destructive, the estimation of hardness can be repeated at the same location for the same DLC film.

さらにまた、本発明に係るマルテンス硬度の推定方法を、従来のマルテンス硬度の測定や、スクラッチ試験と併用すれば、ＤＬＣ膜の物性を精密に把握することができ、そして、ＤＬＣ膜を精密に品質管理することができる。   Furthermore, if the Martens hardness estimation method according to the present invention is used in combination with the conventional Martens hardness measurement or scratch test, the physical properties of the DLC film can be accurately grasped, and the DLC film can be accurately obtained. Can be managed.

以上、本発明の好適な実施形態について説明したが、本発明は前記実施形態に限定されず、本発明の趣旨を逸脱しない範囲で、例えば次のように変更することもできる。
前記した実施形態では、ＤＬＣ膜の硬度が、マルテンス硬度である場合を例示したが、これに限定されず、例えば、ヴィッカース硬度であってもよい。 The preferred embodiment of the present invention has been described above. However, the present invention is not limited to the above-described embodiment, and can be modified as follows, for example, without departing from the spirit of the present invention.
In the above-described embodiment, the case where the hardness of the DLC film is Martens hardness is exemplified, but the present invention is not limited to this, and may be Vickers hardness, for example.

前記した実施形態では、Ｇバンド波形の幅が半値幅である場合を例示したが、これに限定されず、例えば、Ｇバンド波形の幅が、ピーク強度の３／４位置や１／４位置におけるＧバンドの幅であってもよい。   In the above-described embodiment, the case where the width of the G band waveform is a half-value width is illustrated, but the present invention is not limited to this. For example, the width of the G band waveform is 3/4 position or 1/4 position of the peak intensity. It may be the width of the G band.

ＤＬＣ膜のラマンスペクトルの一例である。It is an example of the Raman spectrum of a DLC film. 図１のラマンスペクトルをＧバンドとＤバンドとに波形分離したチャートである。It is the chart which separated the waveform of the Raman spectrum of FIG. 1 into G band and D band. Ｇバンドの半値幅とマルテンス強度との関係を示すグラフである。It is a graph which shows the relationship between the half value width of G band, and a Martens intensity | strength. Ｄバンドのピーク強度／Ｇバンドのピーク強度の比（Ｄ／Ｇ比）と、マルテンス強度との関係を示すグラフである。It is a graph which shows the relationship between the ratio (D / G ratio) of the peak intensity of D band / peak intensity of G band (D / G ratio), and Martens intensity. 本実施形態に係るＤＬＣ膜の硬度推定装置の構成を示す図である。It is a figure which shows the structure of the hardness estimation apparatus of the DLC film which concerns on this embodiment. 本実施形態に係るＤＬＣ膜の硬度推定装置の動作を示すフローチャートである。It is a flowchart which shows operation | movement of the hardness estimation apparatus of the DLC film which concerns on this embodiment.

符号の説明Explanation of symbols

１ ＤＬＣ膜の硬度推定装置
２ レーザーラマン分光装置（Ｇバンド波形幅取得手段）
３ データベース記憶手段
４ 推定手段 1 DLC film hardness estimation device 2 Laser Raman spectrometer (G-band waveform width acquisition means)
3 Database storage means 4 Estimation means

Claims (2)

レーザーラマン分光法によりＤＬＣ膜のＧバンド波形の幅を取得する、Ｇバンド波形幅取得手段と、
ＤＬＣ膜のレーザーラマン分光法によるＧバンド波形の幅と、ＤＬＣ膜の硬度と、が関連付けられたデータベースと、
前記Ｇバンド波形幅取得手段が取得したＤＬＣ膜のＧバンド波形の幅と、前記データベースと、に基づいて、ＤＬＣ膜の硬度を推定する推定手段と、
を備えたことを特徴とするＤＬＣ膜の硬度推定装置。 G-band waveform width acquisition means for acquiring the width of the G-band waveform of the DLC film by laser Raman spectroscopy;
A database in which the width of the G band waveform by laser Raman spectroscopy of the DLC film and the hardness of the DLC film are associated with each other;
Estimating means for estimating the hardness of the DLC film based on the width of the G band waveform of the DLC film acquired by the G band waveform width acquiring means and the database;
An apparatus for estimating the hardness of a DLC film, comprising: ＤＬＣ膜のレーザーラマン分光法によって取得されたＧバンド波形の幅を求める第１ステップと、
このＧバンド波形の幅と、Ｇバンド波形の幅とＤＬＣ膜の硬度とが予め関連付けられたデータベースと、に基づいて、ＤＬＣ膜の硬度を推定する第２ステップと、
を含むことを特徴とするＤＬＣ膜の硬度推定方法。 A first step of determining a width of a G-band waveform acquired by laser Raman spectroscopy of a DLC film;
A second step of estimating the hardness of the DLC film based on the width of the G-band waveform and a database in which the width of the G-band waveform and the hardness of the DLC film are associated in advance;
A hardness estimation method for a DLC film, comprising:
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JP2003028802A (en) * 2001-07-12 2003-01-29 Sony Corp Method for evaluating carbon film and method for manufacturing magnetic recording medium
JP2003121364A (en) * 2001-10-12 2003-04-23 Shimadzu Corp Thin-film hardness measurement method

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JP2020067337A (en) * 2018-10-23 2020-04-30 国立研究開発法人日本原子力研究開発機構 Composition analysis method, composition analysis device, hardness calculation method and hardness calculation device
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