JP2008106889A - Microvalve and micropump using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To feed a constant trace amount of a fluid without leakage and backflow. <P>SOLUTION: In this microvalve and micropump using it, a valve element 1 is formed into a thin film planar shape from stainless steel or another metallic material, has a substantially C-shaped notch 13C formed within the planar surface, and also has a ring-shaped fixed part 11 and a flap-shaped valve part 12. In this case, the valve element 1 is preferably surface-treated with gold plating or the like. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a microvalve used in a micromachining technique such as a micropump that is used in medical equipment, chemical analysis equipment, and the like and supplies an extremely small amount of fluid, and a micropump using the same.

  In recent years, micropumps, microvalves, and the like have been put into practical use as micromachining techniques used for medical equipment and chemical analysis equipment. There are piezoelectric pumps, electrostatic pumps, motor pumps, etc., and the basic structure is almost the same, and the micropump pressurizes the pump body having a fluid inlet, flow path, and outlet, and the flow path of the pump body. The vibration member, the actuator, an inlet side valve (microvalve) for opening and closing the inlet side of the pump body, an outlet side valve (microvalve) for opening and closing the outlet side of the pump body, and the like.

In this micropump, it is required to send a small amount of fluid so that it does not leak and does not flow backward, and the valve (microvalve) often adopts a check valve structure. This type of micropump is described in Patent Document 1. This micro pump has a structure in which a silicon substrate on which a diaphragm, a flow path and a valve are formed is sandwiched between glass substrates. In order to apply a pressure to the valve portion, a heat-resistant polymer such as polyimide, polyamide, or polysilicon is used. A layer is formed to absorb non-uniformity at the contact surface between the bulb and the glass substrate by its elasticity, improve the sealing performance of the bulb, stabilize the quality as a micropump, and improve the yield. It is possible to do.
Japanese Patent Laid-Open No. 4-63973

  By the way, this type of micropump generally employs a non-metallic valve and is used to supply various fluids such as chemicals. Depending on the type of fluid, a non-metallic valve may function as a valve. There is a problem that stable operation performance cannot be obtained.

  The present invention solves such a conventional problem, and provides a highly reliable microvalve capable of sending a small amount of fluid without leakage and without flowing back, and a micropump using the microvalve. The purpose is to do.

  In order to achieve the above-described object, the microvalve of the present invention is provided between an inlet for introducing a fluid and a channel for feeding the fluid, or between a channel for feeding the fluid and an outlet for discharging the fluid. A valve seat formed and a valve body installed on the valve seat, and by opening or closing the valve body by an action of pressurizing or depressurizing the flow path, a certain small amount of fluid is directed in one direction. The valve body includes a fixed portion that is fixed to the valve seat, and a valve portion that is connected to the fixed portion and opens and closes the flow path. A notch having a substantially C-shape, a substantially U-shape, or a similar shape is formed in the plane, the fixing portion is formed in a ring shape, and the valve portion is the fixing portion. On the inside of an opening having a substantially C-shape, a substantially U-shape, or a similar shape. And summarized in that formed in the enclosed islands. In this case, an incision may be made along the inner periphery of the fixed portion at the connecting portion between the fixed portion and the valve portion. The valve body is preferably surface-treated by gold plating.

  Further, the micropump of the present invention includes an inlet through which a fluid flows, a flow path through which the fluid flows, an outlet through which the fluid flows out, between the inlet and the flow path, and the flow path and the outlet. And a microvalve that opens and closes the flow path. The microvalve is driven by the action of pressurizing or depressurizing the flow path, and a small amount of fluid flows into the inlet to The gist of the present invention is to provide a microvalve having the above-described configuration in a micropump that is sent to a channel and flows out through the outlet.

  With the above-described configuration, the microvalve of the present invention and the micropump using the microvalve can send a small amount of fluid without leaking and without backflowing with a good opening / closing operation of the microvalve. Therefore, a highly reliable microvalve and micropump can be provided.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 to 7 show first to seventh embodiments of the microvalve, particularly the valve body.

  FIG. 1 shows a first embodiment, and a valve body 1 includes a fixed portion 11 and a valve portion 12. In the case of this valve body 1, the entire valve body 1 is formed of a stainless steel as a metal material in a circular, thin film-like planar shape, and is substantially C-shaped in this plane (in this case, the outer shape is an arc shape, A U-shaped notch 13C is formed, the fixing part 11 is formed in a ring shape, the valve part 12 is connected to the fixing part 11, and is surrounded by a substantially C-shaped opening 13 inside the fixing part 11. In this case, the tip that extends from the inner peripheral edge of the fixed portion 11 beyond the inner center of the fixed portion 11 is formed into a semicircular flap shape (tongue piece shape). In this case, the center of the ring shape of the fixing portion 11 and the center of the tip semicircular shape of the valve portion 12 are matched. The valve body 1 is subjected to gold plating surface treatment through nickel. In this way, the fixing portion 11 is fixed along the outer periphery of seat surfaces 811 and 831 of valve seats 810 and 830, which will be described later (shown in FIG. 8), and the valve portion 12 extends from a part of the fixing portion 11, and particularly the tip. The semicircular center is arranged on the openings 812 and 832 so as to be aligned with the openings 812 and 832 in the center of the seating surfaces 810 and 830, which serve as a fluid passage, and the valve portion 12 is in contact with the openings 812 and 832. Is attached to the outer peripheral edge of the openings 812 and 832.

  FIG. 2 shows a second embodiment, and the valve body 2 includes a fixed portion 11 and a valve portion 12. The valve body 2 has substantially the same configuration as that of the first embodiment, and differs from the first embodiment in that the inner periphery of the fixing portion 11 is provided on both sides of the connecting portion 24 between the fixing portion 11 and the valve portion 12. The cut 25 is formed in an arc shape along the line. In this way, the fixing portion 11 is fixed along the outer periphery of seat surfaces 811 and 831 of valve seats 810 and 830, which will be described later (shown in FIG. 8), and the valve portion 12 extends from a part of the fixing portion 11, and particularly the tip. The semicircular center is arranged on the openings 812 and 832 so as to be aligned with the openings 812 and 832 in the center of the seating surfaces 810 and 830, which serve as a fluid passage, and the valve portion 12 is in contact with the openings 812 and 832. Is attached to the outer peripheral edge of the openings 812 and 832.

  FIG. 3 shows a third embodiment, and the valve body 3 includes a fixing portion 11 and a valve portion 12. The valve body 3 has substantially the same configuration as that of the first embodiment, and differs from the first embodiment in that the base end of the valve portion 12, that is, the connecting portion 34 between the fixed portion 11 and the valve portion 12. However, it is slightly narrower (compared to the first embodiment), and both sides of the valve portion 12 are curved inwardly on the side of the connecting portion 34 to have a constricted shape. In this way, the fixing portion 11 is fixed along the outer periphery of seat surfaces 811 and 831 of valve seats 810 and 830, which will be described later (shown in FIG. 8), and the valve portion 12 extends from a part of the fixing portion 11, and particularly the tip. The semicircular center is arranged on the openings 812 and 832 so as to be aligned with the openings 812 and 832 in the center of the seating surfaces 810 and 830, which serve as a fluid passage, and the valve portion 12 is in contact with the openings 812 and 832. Is attached to the outer peripheral edge of the openings 812 and 832.

  FIG. 4 shows a fourth embodiment. The valve body 4 includes a fixing portion 41 and a valve portion 42. In the case of this valve body 4, the entire valve body 4 is formed of stainless steel as a metal material in a circular, thin-film planar shape, and is substantially C-shaped in this plane (in this case, the outer shape is an arc, A notch 43C having a U-shape is formed, the fixing portion 41 is formed in a ring shape, the valve portion 42 is connected to the fixing portion 41, and is surrounded by an approximately C-shaped opening 43 inside the fixing portion 41. In this case, the island is formed into a rectangular flap shape (tongue piece shape) extending from the inner peripheral edge of the fixing portion 41 beyond the inner center of the fixing portion 41. The valve body 4 is subjected to gold plating surface treatment through nickel. In this way, the fixing portion 41 is fixed along the outer periphery of seat surfaces 811 and 831 of valve seats 810 and 830, which will be described later (shown in FIG. 8), and the valve portion 42 extends from a part of the fixing portion 41 and is on the distal end side. One surface of the valve portion 42 that is disposed on the openings 812 and 832 and that is in contact with the openings 812 and 832 of the valve portion 42 is aligned with the openings 812 and 832 in the center of the seating surfaces 810 and 830. Is attached to the outer peripheral edge of the openings 812 and 832.

  FIG. 5 shows a fifth embodiment, and the valve body 5 includes a fixing portion 41 and a valve portion 42. The valve body 5 has substantially the same configuration as that of the fourth embodiment, and differs from the fourth embodiment in that the inner periphery of the fixing portion 41 is provided on both sides of the connecting portion 44 between the fixing portion 41 and the valve portion 42. A cut 45 is formed in an arc shape along the line. In this way, the fixing portion 41 is fixed along the outer periphery of seat surfaces 811 and 831 of valve seats 810 and 830, which will be described later (shown in FIG. 8), and the valve portion 42 extends from a part of the fixing portion 41 and is on the distal end side. One surface of the valve portion 42 that is disposed on the openings 812 and 832 and that is in contact with the openings 812 and 832 of the valve portion 42 is aligned with the openings 812 and 832 in the center of the seating surfaces 810 and 830. Is attached to the outer peripheral edge of the openings 812 and 832.

  FIG. 6 shows a sixth embodiment, and the valve body 6 includes a fixing portion 41 and a valve portion 42. The valve body 6 has substantially the same configuration as that of the fourth embodiment, and is different from the fourth embodiment in that the base end of the valve portion 42, that is, the connecting portion 64 between the fixed portion 41 and the valve portion 42. However, it is slightly narrower (compared to the fourth embodiment), and both sides of the valve part 42 are formed narrower on the side of the connecting part 64 and have a constricted shape. In this case, the shape of the distal end side of the valve portion 42 may be a polygonal shape such as a quadrangle, a pentagon, a hexagon, or a circle or an ellipse. In this way, the fixing portion 41 is fixed along the outer periphery of seat surfaces 811 and 831 of valve seats 810 and 830 (shown in FIG. 8), which will be described later, and the valve portion 42 extends from a part of the fixing portion 41, particularly at the tip. One of the valve portions 12 that is disposed on the openings 812 and 832 and that is in contact with the openings 812 and 832 of the valve portion 12 is aligned with the openings 812 and 832 in the center of the seating surfaces 810 and 830 that serve as a fluid passage. The surface is attached to the outer peripheral edge of the openings 812 and 832.

  FIG. 7 shows a seventh embodiment, and the valve body 7 includes a fixing portion 71 and a valve portion 72. In the case of this valve body 7, the entire valve body 7 is formed of stainless steel as a metal material into a circular, thin-film planar shape, and a plurality of substantially C-shaped cutouts 73C in this plane, in this case, the plane Four arc-shaped cutouts 73C obtained by dividing a circumference concentric with the center of the plane from a position separated from the center by a predetermined distance in the radial direction (two adjacent arc-shaped cutouts 73C are approximately C-shaped) is formed in a double shape, the fixing part 71 is formed in a ring shape, the valve part 72 is connected to the fixing part 71 via a plurality of connecting parts 76, In an island shape surrounded by an arc-shaped opening 73 (two adjacent arc-shaped openings 73 are substantially C-shaped), in this case, it is formed in a circular shape at the center of the fixing portion 71 and is configured as an elevating plug structure. Is done. The valve body 7 is subjected to gold plating surface treatment through nickel. In this way, the fixing portion 71 is fixed along the outer periphery of seat surfaces 811 and 831 of valve seats 810 and 830, which will be described later (shown in FIG. 8), and the valve portion 72 has a plurality of connecting portions 76 inside the fixing portion 71. Are arranged on the openings 812 and 832 in accordance with the openings 812 and 832 in the center of the seating surfaces 810 and 830 that serve as a fluid passage. One surface that contacts the openings 812 and 832 is attached to the outer peripheral edge of the openings 812 and 832. In the case of this valve body 7, in order to improve the adhesion of the valve portion 72, as shown in FIG. 7 (B), the other surface (with respect to one surface contacting the openings 812 and 832) is a dome. Although it is formed in a shape that bulges into a shape, this surface may be flat.

  As mentioned above, these valve bodies 1-7 are valves formed between the inlet which flows in fluid, and the flow path which sends fluid, or between the flow path which sends fluid, and the outlet which flows out fluid. It is installed in a seat and is configured as a microvalve, which opens and closes the valve body by the action of pressurizing or depressurizing the flow path, and sends a small amount of fluid in one direction. As described above, each of the valve bodies 1 to 7 is made of a stainless steel or other metal material into a thin planar shape, and substantially C-shaped notches 13C, 43C, and 73C are formed in the plane. The ring-shaped fixing portions 11, 41, 71 and the flap-shaped valve portions 12, 42, or the valve portion 72 having a circular plug structure, and the surface of the valve body was subjected to gold plating. Due to the combined effect of the above, high degree of adhesion to the valve seat (seat surface) and bending deformation (elasticity, preload) are generated in the entire valve body 7, and the airtightness or watertightness of the valve bodies 1 to 7, In addition, the good opening / closing operation of the valve portions 12, 42, 72 eliminates fluid leakage and reliably prevents backflow of fluid.

  8 to 11 show an embodiment of a micropump that employs this microvalve. In FIG. 8, the micropump 9 includes a pump case 94 having an inlet 91 through which a fluid flows, a flow path 92 through which the fluid flows, an outlet 93 through which the fluid flows out, and a piezoelectric drive system that pressurizes or depressurizes the flow path 92. The diaphragm 95, the inlet 91 and the channel 92 are provided between the micro valve 81 on the inlet 91 side which opens and closes the channel 92, and the channel 92 and the outlet 93 are provided. And a micro valve 83 on the outlet 93 side that opens and closes 92.

  In the case of the micropump 9, as shown in FIG. 9, a cylindrical pump case 94 is employed. A fluid flow path 92 is formed on one circular plane on one side of the pump case 94, and a diaphragm 95 is installed. In addition, two cylindrical recesses 910 and 930 for inserting the two bushes 901 and 903 are formed on the other circular plane on one side, and small-diameter flow holes 911 and 931 for allowing fluid to pass through the center of the bottom surface. Are formed, and the flow holes 911 and 931 are communicated with the flow path 92. In this case, a circular groove 912 is also formed around the circulation hole 911 on the bottom surface of the one recess 910. The groove 912 is formed as a minimum space that allows the behavior of the valve bodies 1 to 7 to be larger than the diameter of the flow hole 911 and smaller than the diameter of the recess 910. On the other hand, the bottom surface of the other concave portion 930 is flat (flat surface) and is formed as a seating surface 831 of the valve bodies 1 to 7. As shown in FIGS. 10 and 11, the bushes 901 and 903 inserted into the recesses 910 and 930 have fluid passages 902 and 904 through which fluid flows in and out, and are press-fitted into the recesses 910 and 930. It has a cylindrical structure. In this case, as shown in FIG. 10, the outer bottom surface of one bush 901 is planar (flat surface), and is formed as a seating surface 811 of the valve bodies 1-7. On the other hand, as shown in FIG. 11, a circular groove 905 is also formed around the fluid passage 904 on the outer bottom surface of the other bush 903. The groove 905 is formed as a minimum space that allows the behavior of the valve bodies 1 to 7 to be larger than the diameter of the flow hole 931 of the pump case 94 and smaller than the diameter of the recess 930. Thus, as shown in FIG. 8, when one bush 901 is press-fitted into one recess 910, a gap is formed between these recesses 910 (the bottom surface thereof) and the bush 901 (the bottom surface thereof). This is configured as a valve seat 810 having the outer bottom surface of the bush 901 as a seat surface 811. The bush 901 is press-fitted and fixed to the recess 910 via the valve bodies 1 to 7 to form the inlet 91, and the micro valve 81 on the inlet 91 side is interposed between the inlet 91 and the flow path 92. . Further, when the other bush 903 is press-fitted into the other concave portion 930, a gap is formed between the concave portion 930 (the bottom surface thereof) and the bush 903 (the bottom surface thereof). It is comprised as a valve seat 830. The bush 903 is press-fitted and fixed to the recess 930 via the valve bodies 1 to 7 to form the outlet 93, and the micro valve 83 on the outlet 93 side is interposed between the flow path 92 and the outlet 93. . Pipes P1 and P2 are connected to the inlet 91 (bush 901) and the outlet 93 (bush 903), respectively.

  As for the operation mode of the micropump 9, when the micropump 9 is stopped, the microvalves 81 and 83 on the inlet 91 side and the outlet 93 side are made of stainless steel or other metal material. Thus, a thin C-shaped notch 13C, 43C, 73C is formed in the plane, ring-shaped fixing portions 11, 41, 71, and a flap-shaped valve. The valve seats 810 and 830 are provided on the entire valve body from the combined effect of providing the parts 12 and 42 or the valve part 72 having a circular plug structure and further applying surface treatment to the valve bodies 1 to 7 by gold plating. High adhesion to the (seat surfaces 811 and 931) and bending deformation (elasticity, pre-pressure) are generated, and the inlet 91 and the outlet 93 are completely sealed by the airtightness or watertightness of these valve bodies 1 to 7. .

  From this state, a piezoelectric element (not shown) is energized and the diaphragm 95 is vibrated, whereby the inside of the flow path 92 is depressurized or pressurized, and the microvalves 81 and 83 are driven. In this case, when the pressure in the flow path 92 is reduced, the micro valve 81 on the inlet 91 side opens (due to the pressure difference between the flow path 92 side and the inlet 91 side). In this case, the valve portions 12, 42, 72 are removed from the bottom surface of the bush 901 due to the high degree of adhesion and bending deformation (elasticity, preload) of the valve portions 12, 42, 72 to the valve seat 810 (seat surface 811). The opening 812 serving as a fluid passage of the valve seat 810 (seat surface 811) is opened by being flexibly deformed (elastically deformed) toward the flow path 92 side. On the other hand, the micro valve 83 on the outlet 93 side is closed. In this case, the valve portions 12, 42, and 72 are brought into contact with the bottom surface of the recess 930 in a pressed state, and close the opening 832 that serves as a fluid passage of the valve seat 830 (seat surface 831). Due to the behavior of each of the microvalves 81 and 83, a certain small amount of fluid flows into the fluid passage 902 of the inlet 91 and flows into the flow path 92 through the microvalve 81 on the inlet 91 side. When the fluid enters the channel 92, the pressure in the channel 92 increases (the pressure difference between the channel 92 side and the inlet 91 side gradually decreases). The valve 81 is closed (the valve portions 12, 42, 72, which are bent and deformed (elastically deformed) from the bottom surface of the bush 901 to the flow path 92 side), are elastically returned to the bottom surface of the bush 901, and the valve seat 810 (seat surface 811). The opening 812 is closed and comes into contact with the seating surface 811 in a preload state). On the other hand, when the inside of the flow path 92 is pressurized, the micro valve 83 on the outlet 93 side opens (due to the pressure difference between the flow path 92 side and the outlet 93 side). In this case, the valve portions 12, 42, 72 are removed from the bottom surface of the recess 930 due to the high degree of adhesion and bending deformation (elasticity, preload) of the valve portions 12, 42, 72 to the valve seat 830 (seat surface 831) The opening 832 serving as a fluid passage of the valve seat 830 (seat surface 831) is opened by being flexibly deformed (elastically deformed) toward the outlet 93 side. On the other hand, the micro valve 81 on the inlet 91 side is closed. In this case, the valve portions 12, 42, and 72 are brought into contact with the bottom surface of the bush 901 in a pressed state, and close the opening 812 of the valve seat 810 (seat surface 811). Due to such behavior of the microvalves 81, 83, a small amount of fluid in the flow path 92 flows through the microvalve 83 on the outlet 93 side and flows out through the fluid passage 904 in the outlet 93. When the fluid flows out from the outlet 93, the pressure in the flow path 92 decreases, and the pressure difference between the flow path 92 side and the outlet 93 side gradually decreases. 83 is closed (the valve portions 12, 42, 72, which are bent and deformed (elastically deformed) from the bottom surface of the recess 930 to the outlet 93 side), elastically return to the bottom surface of the recess 930, and the valve seat 830 (seat surface 831) is opened. 832 is closed and abuts against the seating surface 831 in a preload state). Then, by repeating the operation of the microvalves 81 and 83, a certain small amount of fluid flows into the inlet 91, flows into the flow path 92, and flows out through the outlet 93.

  As described above, according to the microvalves 81 and 83 and the micropump 9 using the microvalves 81, 83, the valve bodies 1 to 7 are formed in a thin planar shape with a stainless steel or other metal material, Then, substantially C-shaped cutouts 13C, 43C, 73C are formed in the plane, and ring-shaped fixing portions 11, 41, 71 and flap-shaped valve portions 12, 42, or a valve portion having a circular plug structure 72, and the valve elements 1 to 7 are subjected to surface treatment by gold plating, so that the entire valve body has a high degree of adhesion to the valve seats 810 and 830 (seat surfaces 811 and 831) and Bending deformability (elasticity, pre-pressure) is generated, fluid leakage is surely eliminated by the air-tightness or water-tightness of these valve bodies 1 to 7 and the favorable opening / closing operation of the valve parts 12, 42, 72, Back flow of fluid Can indeed prevent, the good behavior of the microvalve 81 and 83, no leakage of fluid certain trace, also can be sent without backflow. Therefore, the highly reliable micro valves 81 and 83 and the micro pump 9 can be provided.

  In the valve bodies 1 to 7 exemplified as the first to seventh embodiments, the entire valve body is formed of a stainless steel or other metal material into a circular, thin-film planar shape. Instead of the rectangular, thin film-like planar shape, the fixing portions 11, 41, 71 may be changed to a quadrangular or other polygonal ring shape. Particularly in the first to sixth embodiments, the substantially flat C-shaped cutouts 13C and 43C are formed in the planar shape of the metal material of the valve bodies 1 to 6, and the ring-shaped fixing portions 11 and 41 and The flap-shaped valve portions 12 and 42 are provided, but instead of the substantially C-shaped notches 13C and 43C, a substantially U-shaped or substantially C-shaped or substantially similar C-shaped notch is formed, A ring-shaped fixing portion and a flap-shaped valve portion may be provided. Further, in the seventh embodiment, a plurality of substantially C-shaped cutouts 73C are formed in the planar shape of the metal material of the valve body 7, and the ring-shaped fixing portion 71 and the valve portion having a circular plug structure are formed. 72, but instead of the substantially C-shaped notch 73C, by forming a substantially U-shaped or a notch having a shape similar to the substantially C-shaped or substantially U-shaped, A rectangular or other polygonal valve may be provided.

(A) The top view which shows the structure of the microvalve in the 1st Embodiment of this invention especially the valve body (B) Side surface sectional drawing of the valve body The top view which shows the structure of the valve body especially the microvalve in the 2nd Embodiment of this invention. The top view which shows the structure of the valve body especially the microvalve in the 3rd Embodiment of this invention. (A) The top view which shows the structure of the microvalve in the 4th Embodiment of this invention especially the valve body (B) Side surface sectional drawing of the valve body The top view which shows the structure of the valve body especially the microvalve in the 5th Embodiment of this invention. The top view which shows the structure of the valve body especially the microvalve in the 6th Embodiment of this invention. (A) The top view which shows the structure of the valve body especially the microvalve in the 7th Embodiment of this invention (B) The side view of the valve body Side surface sectional drawing which shows the structure of the micropump which employ | adopted the microvalve in the 1st thru | or 7th embodiment of this invention. (A) Side view of the micropump (side view seen from above) (B) Plan view of the micropump (C) Side view of the micropump (side view seen from the side) (A) Side view of the bush constituting the inlet to the micropump (side view seen from above) (B) Plan view of the bush (C) Side view of the bush (side view seen from the side) (A) Side view of the bush constituting the outlet of the micropump (side view seen from above) (B) Plan view of the bush (C) Side view of the bush (side view seen from the side)

Explanation of symbols

1-7 Valve body 11, 41, 71 Fixing part 12, 42, 72 Valve part 13, 43, 73 Opening 13C, 43C, 73C Notch 24, 34, 54, 64 Connection part 25, 45 Notch 76 Joint part 81, 83 Microvalve 810, 830 Valve seat 811, 831 Seat surface 812, 832 Open 9 Micro pump 91 Inlet 910 Recessed part 911 Flow hole 912 Groove 92 Flow path 93 Outlet 930 Recessed part 931 Flow hole 94 Pump case 95 Diaphragm 901 Bush 902 Fluid path 90 Bush 904 Fluid passage 905 Groove P1, P2 Pipe

Claims (4)

A valve seat formed between an inlet into which a fluid flows in and a flow path through which the fluid flows, or between a flow path through which fluid flows and an outlet from which the fluid flows out, and a valve installed in the valve seat A microvalve that opens and closes the valve body by an action of pressurizing or depressurizing the flow path, and sends a small amount of fluid in one direction,
The valve body includes a fixed portion that is fixed to the valve seat, and a valve portion that is connected to the fixed portion and opens and closes the flow path.
The entire valve body is formed into a thin-film planar shape with a metal material, and a substantially C-shaped or substantially U-shaped cutout or similar notch is formed in the plane.
The fixing part is formed in a ring shape,
The microvalve is characterized in that the valve portion is formed in an island shape surrounded by an opening having a substantially C shape, a substantially U shape, or a similar shape inside the fixed portion.   The microvalve according to claim 1, wherein a cut portion is formed along an inner periphery of the fixed portion at a connecting portion between the fixed portion and the valve portion.   The microvalve according to claim 1 or 2, wherein the valve body is surface-treated by gold plating. The flow path is opened and closed between an inlet for flowing in fluid, a flow path for flowing fluid, an outlet for flowing out fluid, between the inlet and the flow path, and between the flow path and the outlet. A microvalve that drives the microvalve by an action of pressurizing or depressurizing the flow path, flows a certain small amount of fluid into the inlet, sends it to the flow path, and flows out through the outlet. In the micro pump that
A micropump comprising the microvalve according to any one of claims 1 to 3.

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