JP2008100198A - Apparatus for treating harmful gas by using atmospheric-pressure plasma element - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a slim apparatus for treating a harmful gas by using an atmospheric-pressure plasma element, in which a large quantity of the gas, which is to be treated and is excited by plasma generated by discharging electricity, can be decomposed, synthesized or reformed and which can be used as a dry-cleaning apparatus or an ozone generation apparatus. <P>SOLUTION: The apparatus for treating the harmful gas by using the atmospheric-pressure plasma element is provided with: an external electrode formed by arranging a dielectric layer additionally onto an outer peripheral wall of a cylindrical member through which the gas to be treated can be circulated in atmospheric pressure; and an internal electrode becoming atmospheric-pressure plasma elements arranged successively inside the cylindrical member. The gas to be treated is repeatedly divided from/merged with oxygen while receiving shearing force in the cylindrical member to agitate/mix them and simultaneously the obtained mixture is conveyed to the inner peripheral wall of the cylindrical member and an open part at the rear end of the cylindrical member. Thereby, a high-frequency is applied between the external and internal electrodes to discharge electricity and generate plasma, so that the gas to be treated in the cylindrical member is decomposed, synthesized or reformed. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a harmful gas treatment using an atmospheric pressure plasma element capable of decomposing, synthesizing and modifying a harmful gas having a large flow rate such as an organic substance, a VOC or a fibrous substance which is a treatment target excited by a discharge plasma. Relates to the device.

  Conventionally, as a harmful gas processing apparatus using this kind of atmospheric pressure plasma reactor, as disclosed in, for example, Patent Document 1, a substantially sealed chamber for atmospheric pressure plasma having a pair of opposed electrodes therein. Are provided, and a transition means is provided for continuously transferring a long object to be processed between the counter electrodes in one chamber so as to be processed between the counter electrodes in the other chamber. The chambers are connected to each other through a substantially hermetic gas blocking chamber having at least two sets of blocking rollers inside, and a long object is connected between the pair of blocking rollers. There is an atmospheric pressure plasma processing apparatus configured to run in a state where it is in contact with and to be introduced from one chamber into the other chamber.

  Further, as disclosed in Patent Document 2, a reaction processing container for processing a substrate transported inside is provided, and the substrate is exposed to a first plasma generated and maintained under a pressure of about 1 atm. A high-frequency magnetic field generating unit that generates a high-frequency magnetic field for generating and maintaining the first plasma when high-frequency power is applied while processing the substrate, and is formed in the high-frequency magnetic field generating unit. There is an atmospheric pressure plasma processing apparatus configured such that the direction of the magnetic flux density of the high-frequency magnetic field is substantially perpendicular to the surface of the substrate.

  Furthermore, as disclosed in Patent Document 3, the surface treatment of the object to be processed is performed by plasma under atmospheric pressure or a pressure near the atmospheric pressure, and the surface of the object to be processed is connected to the ground. A first electrode disposed so as to be substantially orthogonal, a second electrode disposed so as to face the first electrode and forming a discharge space between the first electrode, and a matching circuit for the second electrode There is an atmospheric pressure plasma processing apparatus having a high-frequency power source that supplies high-frequency power to the second electrode and a processing gas supply means that supplies a processing gas to the discharge space.

  In addition, as disclosed in Patent Document 4, a processing gas supply means for introducing a processing gas between the electrodes, a processing gas supply means including a pair of electrodes sandwiching the processing base material under a pressure near atmospheric pressure, and a gas And a processing gas exhaust means for exhausting, and by applying a voltage, the processing substrate is subjected to plasma processing, and at least one electrode has two or more processing gas supply ports, and processing gas exhaust. There is an atmospheric pressure plasma processing apparatus in which two or more ports are provided and the processing gas supply port and the processing gas exhaust port are alternately arranged.

Furthermore, as disclosed in Patent Document 5, an electric field is applied between a pair of electrodes that are covered with a solid dielectric and arranged at a predetermined interval, and plasma generated between the electrodes causes A plasma processing unit for processing a substrate to be processed under atmospheric pressure, a processing gas supply unit for supplying a processing gas between the electrodes in the plasma processing unit, and the plasma processing unit and the processing gas supply unit A housing having an inlet of the substrate to be processed and an outlet of the substrate to be processed; and an upper portion of the casing in the vicinity of the inlet and outlet of the substrate to be processed and above the substrate to be processed; A gas which is provided at least in the upper part of the lower part and which blows out gas in a curtain shape across the width direction of the substrate to be processed, obliquely toward the substrate to be processed and toward the inlet side and the outlet side. There is atmospheric pressure plasma processing device including a curtain member.
JP 2004-319224 A JP 2006-024442 A JP 2006-089441 A JP 2006-097105 A JP 2006-140051 A

  However, in the conventional harmful gas processing apparatus using the atmospheric pressure plasma reactor, it is necessary to widen the space in the chamber and the reaction chamber in order to arrange the substrate, the electromagnetic radiation generation source, etc. And control of the operating pressure becomes very difficult. Moreover, the production cost is also significantly increased. Furthermore, if the concentration of the gas to be treated increases, the discharge decomposition efficiency decreases, and if the supply amount of oxygen decreases in the discharge decomposition treatment, the by-product undergoes a polymerization reaction, etc., and many products with strong odors are produced. There is a risk that it will occur.

  Therefore, the present invention was created in view of the existing circumstances as described above, and can increase the discharge decomposition efficiency even when the concentration of the gas to be processed is increased. By making it possible, the polymerization reaction of by-products can be prevented, and it can be operated continuously at low cost, and the oxygen supply to the gas to be treated is increased to promote radicalization or ionization reaction. This makes it possible to decompose, synthesize, and modify the gas to be processed excited by the discharge plasma in a large amount and easily, and it can be used as a dry cleaning device and an ozone generator. An object of the present invention is to provide a harmful gas processing apparatus using the element.

  Furthermore, from VOC gas decomposition / detoxification treatment equipment, various organic natural / organic chemical decomposition / modification treatment equipment, equipment for collecting fine particulate matter such as asbestos, or hydrocarbon-based mixed gas As a device that produces a large amount of hydrogen gas, a device that purifies and improves the working environment using ozone gas generated by oxidation reaction, or a carbon dioxide gas concentration adjustment and carbon dioxide sensor in greenhouses, greenhouses, and indoor hydroponics in agriculture It is intended to be widely applicable in various fields, such as enabling the development of a resource development / recycling apparatus by utilizing the reforming function of the apparatus or this apparatus.

  In the present invention, an external electrode in which a dielectric layer is attached to the outer peripheral wall of a cylindrical member that allows the gas to be treated to flow in an atmospheric pressure atmosphere, and the outer electrode disposed inside the cylindrical member, A cylindrical member that is provided with a continuous internal electrode that serves as an atmospheric pressure plasma element, and that is subjected to shearing force in the cylindrical member and repeatedly splitting and merging the target gas and oxygen, thereby stirring and mixing the two at the same time It is possible to decompose, synthesize, and modify the gas to be treated inside the cylindrical member by inducing discharge plasma by applying a high frequency between both electrodes by conveying it to the open part of the inner peripheral wall and the rear end. It features a harmful gas treatment device using an atmospheric pressure plasma element.

  Further, the present invention is characterized by a noxious gas treatment apparatus using an atmospheric pressure plasma element in which each of a pin-shaped first blade portion and a fin-shaped second blade portion is alternately arranged along the longitudinal direction. And

  Further, each of the first blade portion and the second blade portion is characterized by a noxious gas treatment apparatus using an atmospheric pressure plasma element arranged in a state where the phases are shifted from each other by a certain angle in the circumferential direction.

  Further, the atmospheric pressure plasma element is composed of a conical member and a cylindrical member continuously integrated therewith, and a helical linear groove is formed on the peripheral side surface in a clockwise direction, and the helical linear groove is formed. A noxious gas treatment apparatus using an atmospheric pressure plasma element in which other conical members and cylindrical members formed in a counterclockwise direction are alternately arranged along the longitudinal direction.

  Furthermore, the atmospheric pressure plasma element is composed of a conical member and a cylindrical member continuously integrated therewith, and has a shape in which a large number of tip bulge pins are erected radially from the peripheral side surface of the cylindrical member. A noxious gas treatment apparatus using an atmospheric pressure plasma element in which a plurality are arranged along the longitudinal direction is characterized.

  The internal electrode is formed of a shaft tube member through which cold water or cold air can circulate, and is generated by a thermoelectromotive force generated by a temperature difference between the shaft tube member and a plasma region at the tip of the internal electrode serving as a plasma element. A noxious gas treatment apparatus using an atmospheric pressure plasma element having a Seebeck effect element capable of generating power is characterized.

  Furthermore, the internal electrode is a harmful gas treatment apparatus using an atmospheric pressure plasma element having a Peltier effect element that enables the circulating fluid flowing in the axial tube member of the internal electrode to be maintained at a low temperature.

  In addition, an oxygen supply source is connected to the cylindrical member to supply excess oxygen to the gas to be processed, and the gas to be processed containing oxygen is subjected to oxidative decomposition treatment by discharge plasma in parallel with the discharge plasma reaction. A noxious gas treatment apparatus using the atmospheric pressure plasma element is characterized.

  Further, atmospheric pressure plasma that can be used as a plasma cleaning device that enables dry cleaning by spraying a gas to be processed, which has been radicalized by excitation by discharge plasma inside the cylindrical member, onto a joint portion on a resin substrate. It features a harmful gas treatment device using elements.

  In addition, the present invention is characterized by a noxious gas treatment apparatus using an atmospheric pressure plasma element in which the atmospheric pressure plasma apparatus can be used as an ozone generator.

  Further, the present invention is characterized by a noxious gas treatment apparatus using an atmospheric pressure plasma element that is made harmless with manganese oxide and collected after treatment of the gas to be treated.

  According to the present invention, the discharge decomposition efficiency can be increased even if the concentration of the gas to be processed is increased, and the by-product polymerization reaction can be prevented by enabling oxygen supply in the discharge decomposition treatment. It can be operated continuously at low cost, and the oxygen supply amount to the gas to be processed can be increased to promote radicalization or ionization reaction. As a result, the gas to be processed excited by the discharge plasma can be obtained. It can be easily decomposed, synthesized and reformed in large quantities, and can be used as a dry cleaning device, ozone generator or asbestos recovery device.

  In other words, since the internal electrode serving as the plasma element is provided with the stirring means connected to each other and the conveying means to the inner peripheral wall of the cylindrical member and the open portion at the rear, the stirring function of the processing target gas and the processing Due to the synergistic effect with the transfer function of the target gas, the processing capacity of the target gas is improved.

  In addition, these means can cause harmful gas to be swirled in the flow path by shifting the phase at a certain angle in the circumferential direction or providing grooves, and at the same time, shear force in the flow path. By repeating the division and merging, the carrier gas and the gas to be processed are efficiently stirred and mixed, and further transported to the inner peripheral wall of the cylindrical member and the open part at the rear, thereby making the plasma reaction And the oxidation reaction proceed at the same time. Therefore, the oxidative decomposition ability by the discharge plasma is remarkably enhanced.

  The internal electrode is formed of a shaft tube member through which cold water or cold air can circulate, and is generated by a thermoelectromotive force generated by a temperature difference between the shaft tube member and a plasma region at the tip of the internal electrode serving as a plasma element. Since the Seebeck effect element that enables power generation is provided, the Seebeck effect element can be effectively used as a backup power source for the plasma generation source. Therefore, an energy-saving harmful gas treatment apparatus can be easily provided.

  Furthermore, since the internal electrode has a Peltier effect element that enables a low temperature to be maintained from the circulating fluid that flows in the axial tube member of the internal electrode, the circulating fluid in the axial tube member through the Peltier effect element The cooling effect of the internal electrode improves the cooling efficiency of the internal electrode.

  In addition, it does not require a chamber / reaction chamber having a large space for placing a conventional substrate or electromagnetic radiation generation source, etc., and it is not necessary to control a high voltage power supply or control an operation pressure. The harmful gas treatment apparatus itself can be a smart type and can be manufactured at low cost.

  Furthermore, the apparatus according to the present invention is a VOC gas decomposing / detoxifying apparatus, a decomposing / modifying apparatus for various organic natural substances / organic chemical substances, or an apparatus for recovering fibrous substances such as asbestos, A device that generates a large amount of hydrogen gas from a carbon-based mixed gas, a working environment purification / improvement device that uses ozone gas generated by an oxidation reaction, or a carbon dioxide concentration adjustment and adjustment in greenhouses, cultivation factories, and indoor hydroponics in agriculture It can be used as a carbon dioxide sensor, and enables the development and recycling of resources by utilizing the reforming function of this device.

  The best mode for carrying out the present invention will be described below with reference to the drawings. The atmospheric pressure plasma reactor 1 according to the present invention inserts a central metal electrode surface-treated with a glass material into a glass tube, applies a high frequency between metal external electrodes outside the glass tube, and between the inner wall of the glass tube and the central electrode. A tube type plasma unit reactor is used that induces non-equilibrium plasma to bring the gas to be processed into contact with the plasma and decomposes the gas to be processed by plasma excitation and a forced contact effect on the plasma region.

  As shown in FIG. 1, the atmospheric pressure plasma reactor 1 uses an atmospheric pressure as a carrier gas, and has a heat resistance that allows a gas to be treated such as a harmful organic substance, VOC, or fibrous substance to flow along the longitudinal direction. An external electrode 2 is formed by attaching a dielectric layer to the outer peripheral wall of a cylindrical member, which is a slender and smart glass tube made of tempered glass, and a plasma element is formed inside the cylindrical member 4 of the external electrode 2. A first blade portion 3a having a pin shape (a blade shape by a pair of pins (see FIG. 2A)) and a fin shape (for example, a bamboo dragonfly, for example, a pair of blade shapes having an arbitrary twist angle) Each of the second blade portions 3b (see FIG. 2 (b)) is arranged in a state of being alternately spaced along the circumferential direction of the circumferential surface, and a shaft that allows cold water or cold air to circulate inside. By cylinder member 5 And a part electrode 3.

  In addition, the pin-shaped first blade portion 3a and the fin-shaped second blade portion 3b disposed along the longitudinal direction of the shaft tube member 5 are disposed with their phases shifted by 30 degrees in the circumferential direction. As a whole, they are spirally rotated and arranged adjacent to each other. Instead of setting this phase shift to 30 degrees, it may be set to 15 degrees, 45 degrees, or arranged in a random phase.

  The pin-shaped first blade portion 3a has a function of stirring the processing target gas, while the fin-shaped second blade portion 3b is an open portion that serves as the inner peripheral wall and the rear side of the cylindrical member. It has the function to convey to. And the processing capability of the gas to be processed is improved by setting the distance between the blade portions 3a and 3b. That is, the induction decomposition efficiency of the introduced gas to be processed into the plasma region is enhanced by the combination of the shapes of the blade portions 3a and 3b.

  Therefore, the inside of the cylindrical member 4 is used as a discharge plasma reaction space between the electrodes 2 and 3. Then, non-equilibrium plasma is induced between the electrodes 2 and 3 in the cylindrical member 4 by application of, for example, a pulse type high frequency power source having a pulse width in the range of 100 to 150 kHz, and the gas to be processed is cylindrical with oxygen. The gas to be treated is oxidatively decomposed by being sucked into the member 4 and brought into contact with plasma, and then discharged from the end opening side of the cylindrical member 4.

  That is, the carrier gas and the gas to be treated are efficiently stirred and mixed by rotating the harmful gas to be treated in the flow path and receiving the shearing force in the flow path and repeating the division and merging. The reaction and the oxidation reaction proceed simultaneously. Therefore, the oxidative decomposition treatment capability by the discharge plasma is enhanced. Then, after the processing of the processing target gas, it can be made harmless with, for example, manganese oxide and recovered.

  In addition, a hole (not shown) is provided at the boundary between the first blade portion 3a and the second blade portion 3b, and the hole is formed at the end of the first blade portion 3a and the end of the second blade portion 3b. The stirrer type stationary structure in which the inside of the tubular member 4 is partitioned into two flow paths by the first blade portion 3a and the second blade portion 3b by being twisted so as to be orthogonal to the portion at an angle of about 90 °. It may be formed by a mold fluid mixer.

  In the shaft cylinder member 5 of the internal electrode 3, cold water or cold air can be circulated from the opening at one end to the opening at the other end, and the internal electrode 3 has a Seebeck leading to the external electrode 2. The effect element 6 is provided, and power generation is possible by the thermoelectromotive force generated by the temperature difference between the shaft member 5 to be cooled and the plasma region in the blade portions 3a and 3b. The Seebeck effect element 6 is a well-known thermoelectric effect element that is formed by joining both ends of two different metals or semiconductors, and generates electromotive force when the two contacts are kept at different temperatures. Specifically, the axial tube member 5 of the internal electrode 3 is set to about 30 ° C., and the plasma contact outer peripheral portion at the tips of the blade portions 3a and 3b is set to about 230 to 250 ° C. A temperature difference is obtained, and the Seebeck effect element 6 generates a high-voltage current in series between the blade portions 3a and 3b.

  The axial tube member 5 of the internal electrode 3 is provided with a Peltier effect element 7, and an endothermic action is generated by the thermoelectromotive force generated by the Seebeck effect element 6 or the current generated between the blade portions 3a and 3b. In addition, the cooling effect of the internal electrode 3 itself is enhanced by absorbing heat by circulating cold water or cold air flowing through the shaft cylinder member 5 and allowing the circulating fluid to be maintained at a low temperature. The Peltier effect element 7 is a well-known thermoelectric effect element that generates or absorbs heat other than Joule heat at a contact point between two different metal or semiconductor contacts. This contributes to cooling of the circulating fluid.

  Further, a processing target gas such as nitrogen, oxygen, and helium that has been radicalized by excitation by discharge plasma inside the cylindrical member 4 is released from the end opening side of the cylindrical member 4 and is bonded to the resin-based substrate. It can also be used as a plasma cleaning device that sprays on a portion and changes the organic substance on the surface of the substrate into carbon dioxide or water to gasify it to enable dry cleaning.

  Further, by connecting an oxygen supply source (not shown) having a known structure to the cylindrical member 4, excess oxygen may be supplied to the processing target gas. Further, instead of using the pulse type high frequency power source, it is possible to use another power source. Furthermore, if a tube type plasma unit reactor in which both the electrodes 2 and 3 are 80 cm in length is installed in parallel, it will be practical.

  Further, the principle of stirring and mixing by the above-described static fluid mixer is divided into two parts each time it passes through one element of each of the pin-shaped first blade portion 3a and the fin-shaped second blade portion 3b connected to each other. Splitting action (division number N = 2 to the power of n (number of elements)) and conversion of rearranging from the central part of the cylindrical member 4 to the wall part and from the wall part to the central part along the torsion surface in the element The two fluids are effectively mixed by the action and the reversal action in which the rotation direction is changed for each element and the turbulent stirring is performed under the sudden reversal of the inertial force.

  In general, the fluid flowing in a laminar state in the cylindrical member 4 flows more quickly at the center position than at the wall surface due to the viscous force with the wall surface, and thus tends to be non-uniform during flow. Based on the mixing principle, the fluid flowing in the cylindrical member 4 is made uniform in the radial direction (the velocity gradient along the radial direction is zero). Moreover, such an atmospheric pressure plasma element can be heated for a short time, and the heat exchange efficiency, the fluid dissolution efficiency, and the like are greatly improved. Furthermore, it exhibits excellent effects as an in-line continuous reactor.

  In addition, the atmospheric pressure plasma reactor 1 according to the present invention may be used as an ozone generator, or may be used as a synthesis / reformation apparatus for a target gas other than decomposition of the target gas.

  Next, an example of use and operation of the best mode configured as described above will be described. As shown in FIG. 1, cold water or cold air is circulated in the shaft tube member 5 of the internal electrode 3 from one end opening portion to the other end opening portion, and harmful organic substances, VOC or A gas to be treated such as a fibrous substance is sucked together with a carrier gas at atmospheric pressure.

  When the carrier gas and the gas to be processed are flow controlled by the pin-shaped first blade portion 3a and the fin-shaped second blade portion 3b in the flow path of the cylindrical member 4, shearing force is generated in the flow path. In this way, division and merging are repeated, whereby the carrier gas and the gas to be treated are efficiently stirred and mixed. At this time, the pin-shaped first blade portion 3a stirs the processing target gas, and the fin-shaped second blade portion 3b transports the processing target gas to the inner peripheral wall of the cylindrical member and the end opening portion that is the rear. Let

  At the same time, a high-frequency power source is switched on between both electrodes 2 and 3 in the tubular member 4 to apply a pulse-type high frequency having a pulse width in the range of 100 to 150 kHz, for example, to induce non-equilibrium plasma, A gas to be treated mixed with oxygen is brought into contact with plasma.

  At this time, the Seebeck effect element 6 has a temperature difference (about 200 ° C.) between the shaft tube member 5 cooled to about 30 ° C. and the plasma contact outer periphery of about 230 to 250 ° C. at the tips of both blade portions 3a and 3b. ), A thermoelectromotive force is generated between the blade portions 3a and 3b, and this power is used as a reserve voltage for a high-frequency power source that is a plasma generation source.

  Further, the Peltier effect element 7 generates an endothermic action due to a thermoelectromotive force generated by the Seebeck effect element 6 or a current generated between the blade portions 3a and 3b, and heat is generated from the circulating fluid flowing in the shaft tube member 5. This enhances the cooling effect of the internal electrode 3 itself.

  As a result, the plasma reaction and the oxidation reaction of the processing target gas proceed simultaneously, and the processing target gas is subjected to oxidative decomposition processing. At this time, the gas to be processed is radicalized by excitation by the discharge plasma inside the cylindrical member 4, and after the gas to be processed is released from the end opening side at the rear of the cylindrical member 4, for example, oxidation It can be recovered by detoxification with manganese or the like.

  FIG. 3 shows another embodiment of the internal electrode 8 serving as a plasma element. Inside the cylindrical member 9, conical members 10a and 10b are formed at the ends, and internal electrodes 8a and 8b are formed by cylindrical members 11a and 11b continuously integrated therewith. A large number of spiral grooves 12 are formed on the peripheral side surfaces of the conical members 10a and 10b and the cylindrical members 11a and 11b. In the embodiment, about 20 grooves 12 are formed in a length of about 20 mm. The depth is 0.2 mm to 0.6 mm.

  FIG. 4 shows an enlarged view of the internal electrode 8a element. In the conical member 10a, the turning groove 12 is formed in the clockwise direction around the apex of the conical member 10a, and in the cylindrical member 11a, the conical member 10a is directed rearward. The spiral groove 12 is continuous in the clockwise direction.

  On the other hand, FIG. 5 shows an enlarged view of another internal electrode 8b element. In the conical member 10b, a turning groove is formed in the counterclockwise direction around the apex of the conical member 10b, and in the cylindrical member 11b, the conical member 10b is viewed from the side. The spiral groove 12 is continuous in the counterclockwise direction toward the rear.

  The internal electrodes 8a, 8b having the above-described configuration are alternately oriented along the longitudinal direction so that the conical members 10a, 10b flow in the direction in which the gas to be processed flows and the tips thereof are in contact with the front cylindrical members 11a, 11b. The internal electrode 8 is arranged.

  The gas to be treated is agitated by the conical members 10a and 10b and the grooves 12 formed on the internal electrodes 8a and 8b, and conveyed while being pressed against the inner peripheral wall of the cylindrical member. In addition, since the internal electrodes 8a and 8b are short in length, the induction decomposition efficiency of the gas to be processed into the plasma region can be increased, and the processing capability can be improved. Other various apparatuses, plasma reaction, oxidation reaction, and other processing means are the same as those in the first embodiment.

  The central part of the internal electrodes 8a and 8b can be water-cooled or air-cooled, as long as a temperature difference can be obtained between the inner electrodes 8a and 8b and the peripheral side surfaces of the cylindrical members 11a and 11b. Good.

  FIG. 6 shows another embodiment of the internal electrode 13 serving as a plasma element. Inside the cylindrical member 14, an internal electrode 13 including a cylindrical member 15 having a tip formed as a conical member 15 and continuously integrated therewith is disposed. From the peripheral side surface of the cylindrical member 16, a distal end bulging pin 17 made up of a large number of pins 17 a and a spherical body 17 b at the distal end is erected. The length of the pin can be appropriately changed, and various shapes of bulging portions are employed for the spherical body 17b.

  A large number of tip bulging pins 17 are erected radially from the cylindrical member 16. In the embodiment, about 24 to 36 lines are erected at equal intervals or randomly in the circumferential direction of the same line, but the present invention is not limited to this. In addition, it is also effective to form a swirling groove in the conical member 15 and / or the cylindrical member 16 at the tip as in the second embodiment. In this case, similarly to the second embodiment, the ones having different spiral directions are alternately arranged.

  As shown in FIG. 6, the internal electrode 13 having the above-described configuration is directed so that the conical member 15 is directed in the direction in which the gas to be processed flows along the longitudinal direction, and the tip thereof is in contact with the cylindrical member 16 on the front side. (Shown in the figure) or arranged with appropriate intervals. It is also effective to provide a shaft that also serves as a cooling means. The same applies to the second embodiment.

  As in the first and second embodiments, the gas to be processed is agitated by the conical member 15 and the tip bulging pin 17 formed on the internal electrode 13 and is conveyed while being pressed against the inner peripheral wall of the cylindrical member. In addition, since the length of the internal electrode 13 can be reduced to, for example, about 25 mm to 30 mm, the induction decomposition efficiency of the gas to be processed into the plasma region can be increased, and the processing capability can be improved. .

  Other various apparatuses, plasma reaction, oxidation reaction, and other processing means are the same as those in the first and second embodiments including the internal electrode cooling means.

  In addition, it can be set as the internal electrode which enables the atmospheric pressure plasma element of the said Example 1 thru | or 3 to be combined suitably, and can convey process target gas to agitation mixing and an inner peripheral wall and the edge part open part which becomes back.

BRIEF DESCRIPTION OF THE DRAWINGS The use condition of the atmospheric pressure plasma reactor in the best form for implementing this invention is shown, (a) is a front view, (b) is sectional drawing. An example of the structure of an atmospheric pressure plasma element is shown, (a) is a perspective view showing a pin-shaped first blade portion, and (b) is a perspective view showing a fin-shaped second blade portion. It is a partial cross section figure which shows the use condition of the atmospheric pressure plasma reactor in other embodiment for implementing this invention. FIG. 6 shows another embodiment of the structure of the atmospheric pressure plasma element, in which (a) is a front view showing that a spiral groove is formed in the conical member, and (b) is a spiral groove in the conical portion and the cylindrical member. It is a side view which shows having formed. (A) is a front view showing that a spiral groove is formed in a conical member in a counterclockwise direction opposite to that of FIG. b) is a side view showing that a spiral groove is formed in the conical portion and the cylindrical member in the counterclockwise direction toward the rear end opening portion. (A) is sectional drawing which shows the use condition of the atmospheric pressure plasma reactor in other embodiment for implementing this invention, (b) is front sectional drawing of the other Example of the structure of an atmospheric pressure plasma element. is there.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Atmospheric pressure plasma reactor 2 External electrode 3, 8, 8a, 8b, 13 Internal electrode 3a 1st blade | wing part 3b 2nd blade | wing part 4, 9, 14 Cylindrical member 5 Shaft cylinder member 6 Seebeck effect element 7 Peltier effect element 10a, 10b, 15 Conical members 11a, 11b, 16 Cylindrical member 12 Groove 17 Tip bulging pin 17a Pin 17b Spherical body

Claims (11)

  An external electrode in which a dielectric layer is attached to the outer peripheral wall of a cylindrical member capable of circulating a gas to be processed in an atmospheric pressure atmosphere, and an atmospheric pressure plasma arranged inside the cylindrical member and connected to each other An internal electrode serving as an element, and the gas to be treated and oxygen are subjected to shearing force in the cylindrical member and repeatedly divided and merged so that both are stirred and mixed, and at the same time, the inner peripheral wall and the rear of the cylindrical member Atmospheric pressure characterized in that it is possible to decompose, synthesize, and reform the gas to be treated inside the cylindrical member by inducing discharge plasma by applying a high frequency between both electrodes by conveying to the open part of the end Toxic gas treatment equipment using plasma elements.   2. The atmospheric pressure plasma element according to claim 1, wherein each of the pin-shaped first blade portion and the fin-shaped second blade portion is alternately arranged along the longitudinal direction. Hazardous gas treatment equipment using.   The atmospheric pressure plasma device according to claim 2, wherein each of the first blade portion and the second blade portion is arranged in a state where the phases are shifted from each other by a certain angle in the circumferential direction. Hazardous gas treatment equipment.   The atmospheric pressure plasma element is composed of a conical member and a cylindrical member continuously integrated therewith, and a spiral linear groove is formed on the peripheral side surface in a clockwise direction, and the spiral linear groove is bent. The harmful gas processing apparatus using an atmospheric pressure plasma element according to claim 1, wherein other conical members and cylindrical members formed in a clockwise direction are alternately arranged along the longitudinal direction.   The atmospheric pressure plasma element is composed of a conical member and a cylindrical member continuously integrated therewith, and has a shape in which a large number of tip bulge pins are erected radially from the peripheral side surface of the cylindrical member, and a plurality of them The harmful gas processing apparatus using the atmospheric pressure plasma element according to claim 1, wherein the gas is disposed along the longitudinal direction.   The internal electrode is formed by a shaft tube member through which cold water or cold air can circulate, and can generate power by the thermoelectromotive force generated by the temperature difference between the shaft tube member and the plasma region at the tip of the internal electrode serving as a plasma element. The harmful gas processing apparatus using the atmospheric pressure plasma element according to any one of claims 1 to 5, wherein the Seebeck effect element is provided.   The atmospheric pressure plasma according to any one of claims 1 to 6, wherein the internal electrode has a Peltier effect element capable of maintaining a low temperature of the circulating fluid flowing in the shaft member of the internal electrode. Toxic gas treatment equipment using elements.   An oxygen supply source was connected to the cylindrical member to supply excess oxygen to the gas to be processed, and the gas to be processed containing oxygen was subjected to oxidative decomposition treatment by discharge plasma in parallel with the discharge plasma reaction. A noxious gas treatment apparatus using the atmospheric pressure plasma element according to any one of claims 1 to 7.   9. The plasma according to any one of claims 1 to 8, wherein dry processing is performed by spraying a gas to be processed, which is radicalized by excitation by discharge plasma inside the cylindrical member, onto a joint portion on a resin substrate. A noxious gas treatment apparatus using an atmospheric pressure plasma element, characterized in that it can be used as a cleaning apparatus.   A harmful gas treatment apparatus using an atmospheric pressure plasma element, wherein the atmospheric pressure plasma apparatus according to any one of claims 1 to 8 is usable as an ozone generator.   9. The noxious gas treatment apparatus using an atmospheric pressure plasma element according to any one of claims 1 to 8, wherein after the treatment of the gas to be treated, it is detoxified with manganese oxide and recovered.

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