JP2008089861A - Method of manufacturing optical waveguide and manufacturing equipment thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an optical waveguide comprising a radiation curable composition efficiently and at low cost in a short period of time. <P>SOLUTION: The method of manufacturing the optical waveguide includes: a step of bringing a part of a screen 4 having through-holes into contact with a part of the upper surface of a clad layer of a clad base material 2 which is composed of a substrate and the clad layer by means of a pressing means 7; a step of extruding a liquid radiation curable composition to be formed as core parts of the optical waveguide from the through-holes of the screen 4 by means of the pressing means 7 on the contact part while moving the contact part between the clad base material 2 and the screen 4; a step of transferring a core pattern 2a composed of the liquid radiation curable composition onto the clad base material 2; and a step of forming the core parts by irradiating the core pattern 2a with radiation rays to cure the core pattern 2a. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a method and a manufacturing apparatus for manufacturing an optical waveguide used for optical communication, optical information processing, and the like using a screen printing method.

In the multimedia era, optical waveguides are attracting attention as optical transmission media because of the demand for large capacity and high speed information processing in optical communication systems and computers. In recent years, in place of quartz optical waveguides, development of optical waveguides made of synthetic resins such as radiation curable resin compositions has been promoted. Synthetic resin optical waveguides are attracting attention in the field of optical interconnection as next-generation interfaces for converting electrical / optical signals by joining with light emitting / receiving elements such as surface emitting lasers and photodiodes.
Such an optical waveguide generally includes a lower clad layer 41, a core portion 42, and an upper clad layer 43 as in the optical waveguide 40 shown in FIG. 4, for example. The refractive index of the lower clad layer 41 and the upper clad layer 43 is configured to be higher than any refractive index.

In the method of manufacturing an optical waveguide, the lower clad layer and the upper clad layer of the optical waveguide are coated with a liquid radiation curable composition for forming a clad layer on a substrate, and then irradiated with radiation to form a liquid. It can be formed by curing the radiation curable composition. Examples of the application method of the liquid radiation curable composition include spin coating, dipping, spraying, bar coating, roll coating, and curtain coating. Moreover, as a printing method applicable as a coating method of a liquid radiation curable composition, the gravure printing method, the screen printing method, the inkjet printing method etc. are mentioned, for example.
Of the various printing methods described above, the screen printing method forms a pattern with a resist (plate film) on a screen made of silk, nylon, stainless steel, etc. This is a method in which printing is carried out by pressing onto the substrate with a pressing means such as a squeegee. Screen printing is an inexpensive method compared to gravure printing, etc., and because it has a low printing pressure, it can also be printed on flexible materials, and there is a build-up of ink printed on the substrate. It is excellent in that it can be printed thick and voluminous.

On the other hand, since the core portion of the optical waveguide is required to have high dimensional accuracy, a liquid radiation-curable composition is applied onto the lower cladding layer by, for example, spin coating to form a core thin film. The core thin film is irradiated (exposed) with a light through a photomask having a predetermined pattern, and a portion that is not irradiated with light is developed and removed. In addition to the above method using the photomask, the core portion of the optical waveguide is composed of, for example, a light transmitting region and a light non-transmitting region according to a predetermined pattern using the same principle as that of the liquid crystal display device (a). A method using a means for forming a mask image electro-optically; (b) using a light guide member formed by bundling a large number of optical fibers; and transmitting light through an optical fiber corresponding to a predetermined pattern in the light guide member. It can also be produced by an irradiation method, (c) a method of irradiating a photocurable resin composition while scanning a laser beam or a convergent light obtained by a condensing optical system such as a lens or a mirror. (For example, Patent Document 1).
JP 2000-66051 A

The conventional core part forming method is excellent in that the core part can be formed with high dimensional accuracy.
However, the above-described conventional methods, for example, a method using a photomask include a coating process of a core thin film, a radiation irradiation process through a photomask, a development processing process, etc. long. For this reason, development of a technique for mass-producing optical waveguides in a shorter time and efficiently is desired as a method for manufacturing optical waveguides for which demand is expected to increase.
Then, an object of this invention is to provide the manufacturing method and manufacturing apparatus of an optical waveguide which can manufacture an optical waveguide using a radiation-curable composition efficiently in a short time.

  As a result of intensive studies to solve the above problems, the present inventor has found that the core portion of the optical waveguide can be efficiently and quickly used with the radiation curable composition according to the specific method applying the screen printing method. The present invention was completed.

That is, the present invention provides the following [1] to [5].
[1] A part of a screen having a through hole for forming a core pattern is brought into contact with a part of an upper surface of a clad base material composed of a substrate and a clad layer, which are constituent parts of an optical waveguide, by pressing means. Then, while moving the contact portion of the clad substrate and the screen, at this contact portion, the liquid radiation curable composition that becomes the core portion of the optical waveguide is pushed out from the through hole of the screen by the pressing means onto the clad substrate, The method includes a step of transferring a core pattern made of a liquid radiation curable composition onto a clad substrate, irradiating the core pattern with radiation, curing the core pattern, and forming a core portion. Manufacturing method of optical waveguide.
[2] The method for manufacturing an optical waveguide according to [1], wherein the irradiation with the radiation is performed from a back surface side opposite to the pressing unit positioned on a front surface side of the screen.
[3] The method for manufacturing an optical waveguide according to [1] or [2], wherein a screen shielding means for shielding a portion of the screen separated from the clad substrate from radiation is used.
[4] The method for manufacturing an optical waveguide according to any one of [1] to [3], wherein the pressing unit is a roller or a squeegee.
[5] An apparatus for manufacturing an optical waveguide for forming a core portion on a part of the upper surface of the clad layer of a clad base material comprising a substrate and a clad layer, which are constituent parts of the optical waveguide,
A through-hole for forming a core pattern, which is stretched over the clad base material with a clearance, is clad with a liquid radiation curable composition that becomes a core part of an optical waveguide through the through-hole. A screen for feeding on a substrate;
A portion of the screen is pressed from above the screen, moved while pressing a portion of the screen against a portion of the cladding substrate, and the liquid radiation curable composition is extruded onto the cladding substrate through the through-holes of the screen, A pressing means for transferring a core pattern made of a liquid radiation-curable composition onto the clad substrate;
Radiation irradiating means for moving with the movement of the pressing means to irradiate the core pattern with radiation;
An optical waveguide manufacturing apparatus comprising:
[6] An optical waveguide manufacturing apparatus for forming a core portion on a part of the upper surface of a clad layer of a clad base material comprising a substrate and a clad layer, which are constituent parts of the optical waveguide,
A rotatable cylindrical screen having a through hole for forming a core pattern and supplying a liquid radiation curable composition serving as a core portion of an optical waveguide onto the clad substrate through the through hole. When,
A pressing means comprising a cylindrical roller that is in linear contact with the cylindrical screen from the inside and is rotatable at the same speed as the cylindrical screen at a contact portion with the clad substrate. The liquid radiation curable composition is extruded onto a clad substrate through a through-hole of the cylindrical screen to transfer a core pattern made of the liquid radiation curable composition onto the clad substrate. Pressing means,
Guiding means capable of feeding the clad base material in one direction while sandwiching the clad base material together with the cylindrical screen;
Radiation irradiating means disposed at a fixed position for emitting radiation to the core pattern;
An optical waveguide manufacturing apparatus comprising:

According to the method for producing an optical waveguide of the present invention, the core pattern immediately after the transfer can be cured while the core pattern made of a liquid radiation-curable composition is transferred onto the clad substrate constituting the optical waveguide. Therefore, an optical waveguide can be manufactured efficiently in a short time.
According to the method for manufacturing an optical waveguide of the present invention, for example, an embedded optical waveguide used for optical interconnection can be manufactured at low cost.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIGS. 1A to 1C are diagrams schematically illustrating a method of manufacturing an optical waveguide using the screen printing apparatus 1 according to an embodiment of the present invention.
The screen device 1 has a predetermined clearance (gap) between the clad base material 2 and a clad base material 2 (which is formed by laminating a lower clad layer on a transparent substrate) as a transfer target. When the screen 4 and the clad substrate 2 are in contact with each other, the screen 4 and the clad substrate 2 are pressed and brought into contact with a part of the clad substrate 2 from above (front side) the screen 4. Then, a liquid radiation curable composition 6 is extruded from a through-hole (not shown) of the screen 4, and a core pattern (uncured core portion made of a liquid radiation curable composition) 2a is formed on the upper surface of the clad substrate 2. A horizontally moving pressing means 7 for transferring the sheet, and a position on the back side (lower position) slightly behind the pressing means 7 and opposite to the pressing means 7 with respect to the clad substrate 2. ) Horizontally moving at the same speed as the moving speed of the stage 7, and a radiation means 8 for irradiating the core pattern 2a.

  As the clad substrate 2 that is a transfer target, for example, a substrate in which a lower clad layer made of a known material is laminated on a transparent substrate made of glass, a transparent resin film, or the like can be used. When the radiation irradiating means 8 is moved above the core pattern 2a, an opaque substrate such as a silicon substrate may be used as the substrate constituting the clad substrate 2.

  In the embodiment shown in FIG. 1, the clad substrate 2 is installed on a support base 3. As the support base 3, for example, one provided with a number of suction holes (not shown) for sucking the clad substrate 2 and a suction pump (not shown) connected to the suction holes can be used. The support table 3 is made of a transparent member so as not to block the radiation irradiated from the radiation irradiation means 8 disposed below the support table 3. The support base 3 is not limited to this example as long as it can stably fix the clad substrate 2, and may be of other forms.

As the screen 4, a known screen for screen printing (having eyes that allow ink to pass through) can be used. For example, a screen made of plastic such as polyester film, a screen made of metal such as stainless steel, An appropriate type of screen such as a combined mesh type screen can be used. The thickness of the screen 4 differs depending on the material of the screen and is not particularly limited. For example, the thickness can be set to 50 to 300 μm, which is a thickness that can apply an appropriate tension to the screen 4.
The screen 4 has a through hole for forming a core pattern. This through hole is formed as follows, for example.
First, a liquid photosensitive resin composition is applied to a mesh-like screen. Next, the photosensitive resin composition applied to the screen is irradiated with radiation through a photomask having a pattern shape of the core portion of the optical waveguide to cure a part of the photosensitive resin composition. Then, when an uncured part is removed using a developing solution, a part of mesh of a screen will be exposed. The exposed portion is a through hole for forming the core pattern. The through hole is formed as a long hole (for example, a straight long hole) that matches the shape of the core portion of the optical waveguide.
In addition, what is necessary is just to use the well-known composition used by the screen printing method as a photosensitive resin composition for forming the through-hole of a screen.

In the embodiment shown in FIG. 1, the screen 4 is stretched with a predetermined clearance on the clad substrate 2 by the screen support means. As the screen support means, for example, a clamp 5a that supports one end portion of the screen 4 extending in the direction in which the pressing means 7 moves (X-axis direction in the figure), and the other end portion of the screen 4 with a predetermined force It is possible to use a constant tension device including a tension roller 5b that is supported while being pulled. In this constant tension device, the tension force of the tension roller 5b is controlled by control means such as computer equipment so that a constant tension is always applied to the screen 4 during transfer. When a constant tension is always applied to the screen 4, the core pattern 2a can be transferred onto the clad substrate 2 while maintaining high dimensional accuracy.
As the screen support means, a member having flexibility is used for the member in the direction in which the pressing means 7 moves (X-axis direction in the drawing), and the direction orthogonal to the direction in which the pressing means 7 moves (in the drawing). (The Y-axis direction) of the screen 4 may be supported by using a frame configured to lift the screen 4 so that it can be bent in the direction in which the pressing means 7 moves using a rigid member. . The screen support means is not limited to this example, and other forms may be used.

In the embodiment shown in FIG. 1, the pressing means 7 includes, for example, a squeegee 7a, a squeegee holder 7b, and a cylinder 7c that moves up and down the squeegee 7a. Further, a moving means (motor or the like; not shown) for horizontally moving the pressing means 7 in the X-axis direction in the figure is provided.
As the squeegee 7a, for example, a plate-like or cylindrical one having a contact portion extending linearly in the width direction (Y-axis direction in the drawing) of the clad substrate 2 can be used. FIG. 1 shows an example using a cylindrical squeegee 7a. The material of the squeegee 7a is not particularly limited. Specifically, even when the screen 4 is pressed against the clad substrate 2 with a predetermined pressing force, such as rubber or resin, the screen 4 is rubbed by friction. It is preferable that it is not easily damaged.
In the present embodiment, the pressing means 7 raises and lowers the squeegee 7a by, for example, a pressure-adjusted cylinder 7c, presses the squeegee 7a against the screen 4 with a predetermined pressure, and a part of the screen 4 is clad substrate 2 Contact with a part of
Next, the pressing means 7 moves horizontally in the X-axis direction in the drawing while pressing a part of the screen 4 against a part of the clad substrate 2 by the squeegee 7 a, and pushes out the radiation curable composition 6 from the through hole of the screen 4. Then, the core pattern 2 a is transferred onto the clad substrate 2.
The pressing means 7 may include a traveling rail that horizontally moves the pressing means 7 in the X-axis direction, and an angle adjusting member for adjusting the angle between the clad base material and the squeegee to be a constant angle. The pressing means is not limited to this example, and other forms may be used.

As the radiation curable composition 6 for forming the core portion of the optical waveguide, a radiation curable composition made of a known composition described in JP 2000-066051 A can be used. The viscosity of the radiation curable composition 6 is preferably a value within the range of 5 to 10,000 cps (25 ° C.). When the viscosity exceeds 10,000 cps, it may be difficult to handle the radiation curable composition or transfer a uniform core pattern. In addition, the viscosity of a radiation curable composition can be suitably adjusted with the compounding quantity of a reactive diluent or an organic solvent.
The radiation curable composition 6 is supplied onto the screen 4 from, for example, an ink supply pipe (not shown) extending in the Y-axis direction in the drawing.

In the embodiment shown in FIG. 1, the radiation irradiating means 8 moves the radiation irradiating means 8 horizontally at the same speed as the moving speed of the pressing means 7 while keeping a position slightly behind the lamp and the pressing means 7. Moving means (not shown) are provided. The radiation irradiating means 8 is movably disposed at a position where radiation can be irradiated from below the clad substrate 2 toward the core pattern 2a.
The radiation irradiating means 8 irradiates the transferred core pattern 2 a with radiation immediately after the clad substrate 2 is separated from the screen 4 by the movement of the pressing means 7. For this reason, the core part which has high dimensional accuracy can be formed, without the shape of the transferred core pattern 2a collapsing.
As the moving means of the radiation irradiating means, for example, a moving device using a motor and a traveling rail for moving the radiation irradiating means in the X-axis direction can be used. The radiation irradiating means is not limited to this example, and other forms may be used.
As the radiation, for example, visible light, ultraviolet rays, infrared rays, X-rays, α rays, β rays, γ rays, and the like can be used. As the lamp, for example, a high pressure mercury lamp, a low pressure mercury lamp, a metal halide lamp, an excimer lamp, or the like can be used. Irradiation of radiation to the core pattern 2a may be, for example, wavelength 200～390Nm, illuminance is irradiated ones 1 to 500 mW / cm ² given time, may be performed so that the amount of irradiation is 10~5000mJ / cm ² .

In the embodiment shown in FIG. 1, the screen device 1 is provided with separation means 9 that moves the screen 4 separated from the clad base 2 by the movement of the pressing means 7 in a direction away from the clad base 2. Preferably it is.
As the separation means 9, for example, an air cylinder or hydraulic pressure that pulls the screen 4 away from the clad base material 2 onto which the core pattern 2 a is transferred while pulling the screen 4 in the Z-axis direction while applying a predetermined tension. A lifting device including a cylinder such as a cylinder can be used.
By using the separating means 9, the screen 4 can be separated from the clad substrate 1 onto which the core pattern 2 a is transferred in a short time. For this reason, when the separating means 9 is used, it is possible to reliably prevent the cured body (core portion) of the screen 4 and the core pattern 2a from sticking, and to increase the dimensional accuracy of the core portion.

In the embodiment shown in FIG. 1, the screen printing apparatus 1 includes screen shielding means 10 for shielding the portion of the screen 4 separated from the clad substrate 2 after transferring the core pattern 2a from radiation. Preferably it is.
As the screen shielding means 10, for example, the shielding plate 10 a is inserted between the clad substrate 2 and the screen 4 and the moving speed of the pressing means 7 is changed to the shielding plate 10 a in the X-axis direction in the figure. It is possible to use a device provided with a motor (not shown) for moving the motor. The screen shielding means is not limited to this example, and other forms may be used.
By using the screen shielding means 10, it is possible to prevent the radiation curable composition adhering to the screen 4 from being cured by irradiating the screen 4 separated from the clad substrate 2 with radiation.

The screen printing apparatus 1 can include a clad base material shielding means 11 for shielding a portion of the clad base material 2 where the core pattern 2a is not transferred from radiation.
As the shielding means 11 for the clad substrate, for example, the shielding plate 11a is inserted at the same speed as the moving speed of the shielding plate 11a inserted between the cladding substrate 2 and the radiation irradiating means 8 and the pressing means 7. A device provided with a motor (not shown) for moving in the X-axis direction can be used.

Next, a method for manufacturing an optical waveguide using the screen device 1 shown in FIG. 1 will be described.
[Core pattern transfer process]
In this step, as shown in FIGS. 1A to 1C, an upper portion of the screen 4 stretched with a predetermined clearance on the clad substrate 2 by using the horizontally moving pressing means 7. A part of the screen 4 is pressed from the surface, a part of the screen 4 is brought into contact with a part of the surface of the clad substrate 2, and the contact part between the screen 4 and the clad substrate 2 is moved by moving the pressing means 7. When the screen 4 and the clad substrate 2 are in contact, the pressing means 7 pushes the radiation curable composition 6 for forming the core portion of the optical waveguide onto the clad substrate 2 from the through hole of the screen 4. In this step, the core pattern 2a made of the radiation curable composition 6 is transferred (formed) onto the clad substrate 2.

[Curing process of core pattern]
In this step, as shown in FIGS. 1B to 1C, the core pattern 2a on the clad substrate 2 is applied to the core pattern 2a using the radiation irradiation means 8 that horizontally moves at the same speed as the movement speed of the pressing means 7. In this step, the core pattern 2a is cured by irradiating radiation to form a core portion.

[Formation process of upper cladding layer]
In this step, a liquid radiation curable composition for forming an upper clad layer is applied on the clad substrate on which the core portion is formed by a screen printing method or the like, and then irradiated with radiation to form a liquid. In this step, the radiation curable composition is cured to form an upper cladding layer. Thereby, the optical waveguide is completed.

FIG. 2 is a diagram conceptually showing a method of manufacturing an optical waveguide using the screen printing apparatus 20 according to another embodiment of the present invention.
For example, as shown in FIG. 2, a screen printing apparatus 20 used in the method of manufacturing an optical waveguide of the present invention includes a cylindrical rotary screen 21 having a through hole (not shown) for forming a core pattern, and a rotary screen. A motor (not shown) for rotating the rotary 21; a pressing means (cylindrical roller 24) rotatably accommodated inside the rotary screen 21 for pressing the rotary screen 21 from the inside to the outside; and the rotary screen A part of the clad base material 22 is sandwiched together with a part of the outer peripheral surface 21, and the guide means 25 for moving the clad base material 22 in one direction by the rotation of the rotary screen 21 is supplied from the through hole of the rotary screen 21. Radiation is applied to the core pattern 22a made of the radiation curable composition immediately after. And a radioactive radiation means 26 for morphism.

In the embodiment shown in FIG. 2, as the rotary screen 21, a predetermined core pattern is formed on a mesh screen fabric made of stainless steel or polyester, or on a hollow cylindrical screen made of metal such as nickel. A screen plate can be used by forming a through hole. The rotary screen 21 may be in a predetermined form depending on the size of the core pattern 22a to be printed and the type of radiation curable composition constituting the core pattern 22a.
In the embodiment shown in FIG. 2, the rotary screen 21 is rotated counterclockwise by a motor (not shown). The rotation direction of the rotary screen 21 is not particularly limited.

In the embodiment shown in FIG. 2, as the pressing means, for example, a motor for rotating the roller 24 so as to have the same speed as the rotation speed of the rotary screen 21 at the contact portion between the roller 24 and the clad substrate 22. A device provided with (not shown) can be used.
The outer surface of the roller 24 is inscribed in the rotary screen 21. The roller 24 presses the rotary screen 21 from the inside to the outside with a predetermined pressure, pushes the radiation curable composition 23 from the through hole of the rotary screen 21 onto the clad substrate 22, and then onto the clad substrate 22. The core pattern 22a is transferred.
The pressing means is not limited to a roller, and may be a plate-like squeegee, for example.

In the embodiment shown in FIG. 2, as the guiding means 25, a pair of conveying rollers 25a and 25b installed on the upstream side and the downstream side of the rotary screen 21, respectively, and a conveying belt stretched over the conveying rollers 25a and 25b. 25c and a transport device including a motor (not shown) for rotating the transport rollers 25a and 25b is used.
The guide unit 25 places the clad substrate 22 on the conveyor belt 25c, and a part of the clad substrate 22 is in contact with a part of the outer peripheral surface of the rotary screen 21 pressed outward by the roller 24. The clad substrate 22 is moved in one direction by rotating the rotary screen 21. The guide means is not limited to this example, and other forms may be used.
As in the embodiment shown in FIG. 2, a receiving base 26 can be provided at a position facing the rotary screen 21 at a contact portion between the rotary screen 21 and the clad substrate 22. The cradle 26 supports the clad substrate 22 from below the transport belt 24c. Even if the clad substrate 22 is, for example, a flexible film, the pedestal 26 is supported so as not to be slackened downward. In addition, the cradle 26 also serves as a means for shielding radiation irradiated from the radiation irradiation means 27.

In the embodiment shown in FIG. 2, the radiation irradiating means 27 is an apparatus including a lamp for irradiating radiation for curing the radiation curable composition. When the core pattern 22a immediately after being transferred onto the clad base material 22 is moved from the lower end of the rotary screen 21 by the guide means 25, the radiation irradiation means 27 is transparent to the core pattern 22a. This is for irradiating radiation from below the clad substrate 22 formed of the lower clad layer.
As the radiation and the lamp, the same radiation and lamp as those used in the embodiment shown in FIG. 1 can be used.

  In the embodiment shown in FIG. 2, the screen printing apparatus 20 includes screen shielding means 28 for shielding the portion of the rotary screen 21 separated from the clad substrate 22 after transferring the core pattern 22a from radiation. It is preferable. In this example, the screen shielding means 28 is in the form of an arc along the outer periphery of the rotary screen 21. The screen shielding means is not limited to this example, and other forms may be used.

Next, a method for manufacturing an optical waveguide using the screen device 20 shown in FIG. 2 will be described.
[Core pattern transfer process]
In this step, as shown in FIG. 2, the rotary screen 21 of the screen device 20, a motor (not shown) for rotating the rotary screen 21, and the rotary screen for pressing the rotary screen 21 from the inside to the outside. A part of the clad substrate 22 is brought into contact with a part of the outer peripheral surface of the rotary screen 21 pressed outward by the roller 24 and a rotatable pressing means (roller 24) provided inside the clad base 21. When a portion of the rotary screen 21 is brought into contact with a portion of the clad base material 22 using the guide means 25 for moving the head 22 in one direction, the rotary screen 21 and the clad base material 22 are in contact with each other. The roller 24 causes the radiation curable group to pass through the through-hole (not shown) of the rotary screen 21. Extruding the object 23 on the cladding substrate 22, on the cladding substrate 22, a step of transferring the core pattern 22a made of a radiation-curable composition 23.
As the clad substrate 22, a substrate obtained by forming a lower clad layer using a known material on a transparent substrate made of glass or the like can be used.

[Curing process of core pattern]
In this step, the core pattern 22a made of the liquid radiation curable composition supplied from the rotary screen 21 is irradiated with radiation using the radiation irradiation means 27 on the clad base material 22, and the core pattern 22a is formed. It is a step of curing to form a core portion.

[Process for forming upper cladding layer]
In this step, the radiation curable composition for forming the upper clad layer is applied on the clad substrate 22 on which the core portion is formed by a screen printing method or the like, and then irradiated with radiation. Is cured to form an upper clad layer. Thereby, the optical waveguide is completed.

FIG. 3 is a diagram conceptually showing a method of manufacturing an optical waveguide using the screen printing apparatus 30 according to another embodiment of the present invention.
For example, as shown in FIG. 3, the screen printing apparatus 30 used in the method of manufacturing an optical waveguide of the present invention includes a substantially cylindrical rotary screen 31 having a through-hole (not shown) for forming a predetermined core pattern, and a rotary A motor (not shown) that rotates the screen 31 counterclockwise, a pressing means (roller 34) provided inside the rotary screen 31, and a pressure roll that faces the rotary screen 31 with the clad substrate 32 interposed therebetween. 35, a motor (not shown) for rotating the pressure roll 35 in a direction opposite to the rotary screen 31, and a transport having a pair of transport rollers 36 opposed to each other with the clad base material 32 interposed therebetween. Means and the core pattern 32a on the clad substrate 32 immediately after passing through the lower end of the rotary screen 31, Rays by irradiating, a radiation means 37 for forming the core portion.
In the embodiment shown in FIG. 3, the pressure roll 35 presses the clad base material 32 against the outer peripheral surface of the rotary screen 31 with a predetermined pressure, and the clad base material is brought into contact with the rotary screen 31 and the clad base material 32. The core pattern 32 a is transferred onto the 32. The pressure roll 35 also plays a role of moving the clad substrate 32 in one direction together with the transport roller 36.

Next, a method for manufacturing an optical waveguide using the screen device 30 shown in FIG. 3 will be described.
[Core pattern printing process]
In this step, as shown in FIG. 3, the rotary screen 31 of the screen device 30, a motor (not shown) for rotating the rotary screen, and the rotary screen 31 for pressing the rotary screen 31 from the inside to the outside. A part of the rotary screen 31 is brought into contact with a part of the clad substrate 32 by using a pressing means (roller 34) provided inside the pressure roller 35, a pressure roll 35 facing the rotary screen 31, and a conveying roller 36. When the rotary screen 31 and the clad substrate 32 are in contact with each other, the roller 34 extrudes the radiation curable composition 33 from the through hole (not shown) of the rotary screen 31 onto the clad substrate 32, and the clad substrate. The core pattern 32 a made of the radiation curable composition 33 is transferred onto the layer 32. It is a degree.
As the clad substrate 32, a substrate obtained by forming a lower clad layer using a known material on a transparent substrate made of glass or the like can be used.

[Curing process of core pattern]
In this step, the core pattern 32a on the clad substrate 32 immediately after passing through the lower end of the rotary screen 31 is irradiated with radiation using the radiation irradiating means 37 to cure the core pattern 32a and It is a process of forming.

[Formation process of upper cladding layer]
In this step, a liquid radiation curable composition for forming an upper clad layer is applied on a clad substrate on which a core portion is formed by a screen printing method or the like, and then irradiated with radiation to obtain a liquid radiation. In this step, the curable composition is cured to form an upper clad layer. Thereby, the optical waveguide is completed.

It is explanatory drawing which shows notionally one Embodiment of the manufacturing method of the optical waveguide of this invention. It is explanatory drawing which shows notionally other embodiment of the manufacturing method of the optical waveguide of this invention. It is explanatory drawing which shows notionally other embodiment of the manufacturing method of the optical waveguide of this invention. It is sectional drawing which shows an example of an optical waveguide typically.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Screen printing apparatus 2 Clad base material 2a Core pattern 3 Support stand 4 Screen 5a Clamp 5b Tension roller 6 Radiation curable composition 7 Pressing means 7a Squeegee 7b Squeegee holder 7c Cylinder 8 Radiation irradiation means 9 Separation means 10 Screen shielding means 10a Shielding plate 11 Shielding means for clad substrate 11a Shielding plate 20 Screen printing device 21 Rotary screen 22 Cladding substrate 22a Core pattern 23 Radiation curable composition 24 Roller 25 Guide means 25a, 25b Conveying roller 25c Conveying belt 26 Receptacle 27 Radiation Irradiation means 30 Screen printing device 31 Rotary screen 32 Clad substrate 32a Core pattern 33 Radiation curable composition 34 Roller 35 Pressure roll 36 Transport roller 37 Release Line irradiation means 40 optical waveguide 41 lower cladding layer 42 the core portion 43 the upper cladding layer

Claims (6)

  A part of the screen having a through hole for forming a core pattern is brought into contact with a part of the upper surface of the clad layer of the substrate and the clad base material comprising the substrate and the clad layer, which are components of the optical waveguide, by pressing means, and the clad substrate While moving the contact portion between the material and the screen, the liquid radiation curable composition that becomes the core portion of the optical waveguide is pushed out from the through hole of the screen by the pressing means at the contact portion, onto the clad substrate. An optical waveguide comprising: a step of transferring a core pattern made of a liquid radiation curable composition onto the core, irradiating the core pattern with radiation, curing the core pattern, and forming a core portion. Production method.   The method for manufacturing an optical waveguide according to claim 1, wherein the radiation irradiation is performed from a back surface side opposite to the pressing means located on the front surface side of the screen.   3. The method of manufacturing an optical waveguide according to claim 1, wherein a screen shielding means for shielding a portion of the screen separated from the clad substrate from radiation is used.   The method for manufacturing an optical waveguide according to claim 1, wherein the pressing unit is a roller or a squeegee. An optical waveguide manufacturing apparatus for forming a core portion on a part of an upper surface of a clad base material comprising a substrate and a clad layer, which are constituent parts of the optical waveguide,
A through-hole for forming a core pattern, which is stretched over the clad base material with a clearance, is clad with a liquid radiation curable composition that becomes a core part of an optical waveguide through the through-hole. A screen for feeding on a substrate;
A portion of the screen is pressed from above the screen, moved while pressing a portion of the screen against a portion of the cladding substrate, and the liquid radiation curable composition is extruded onto the cladding substrate through the through-holes of the screen, A pressing means for transferring a core pattern made of a liquid radiation-curable composition onto the clad substrate;
Radiation irradiating means for moving with the movement of the pressing means to irradiate the core pattern with radiation;
An optical waveguide manufacturing apparatus comprising: An optical waveguide manufacturing apparatus for forming a core portion on a part of an upper surface of a clad base material comprising a substrate and a clad layer, which are constituent parts of the optical waveguide,
A rotatable cylindrical screen having a through hole for forming a core pattern and supplying a liquid radiation curable composition serving as a core portion of an optical waveguide onto the clad substrate through the through hole. When,
A pressing means comprising a cylindrical roller that is in line contact with the cylindrical screen from the inside and is rotatable at the same speed as the cylindrical screen at a contact portion with the clad substrate. The liquid radiation curable composition is extruded onto a clad substrate through a through-hole of the cylindrical screen to transfer a core pattern made of the liquid radiation curable composition onto the clad substrate. Pressing means,
Guiding means capable of feeding the clad base material in one direction while sandwiching the clad base material together with the cylindrical screen;
Radiation irradiating means disposed at a fixed position for emitting radiation to the core pattern;
An optical waveguide manufacturing apparatus comprising:

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