JP2008084054A - Substrate visual inspection equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To examine an outward appearance of a substrate highly precisely with respect to substrate visual inspection equipment. <P>SOLUTION: The equipment has: a layer image data acquisition part 1312 for acquiring layer image data in each layer of a substrate from CAD data with a feature part of a layer as a white area and a non-feature part of the layer as a black area; a multilayer structure data creation part 1314 for creating multilayer structure data on the basis of the white area and black area within a visible range in a depth direction by superimposing layer image data in each layer; a color data acquisition part 1342 for acquiring color data corresponding to a feature part of each layer from a color database 1440 on the basis of a substrate manufacturing data; an area color feature data creation part 1392 for creating area color feature data representing a color feature value in each area of the substrate on the basis of the multilayer structure data and color data; and an inspection part 1394 for inspecting the outward appearance of the substrate on the basis of picked-up image data and the area color character data of the substrate. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a substrate appearance inspection apparatus that inspects the appearance of a substrate.

  Conventionally, when manufacturing a substrate, an inspection of the appearance of the substrate (hereinafter simply referred to as “appearance inspection”) has been performed visually by an inspector. However, the visual inspection varies in inspection time and inspection accuracy depending on the ability of the inspector. Therefore, it is desired that the inspection of the appearance of the substrate should not cause variations in the inspection time and inspection accuracy due to the ability of the inspector, and that the inspection time should be shortened and the inspection accuracy improved compared to the conventional method. It was.

  Therefore, in recent years, substrate appearance inspection has been performed by an apparatus called a substrate appearance inspection apparatus (see, for example, Patent Documents 1 and 2).

  In order to shorten the time and improve the accuracy in the inspection by the substrate appearance inspection apparatus, it is necessary to reduce the number of false reports, that is, irregular inspection results. Therefore, the operator who operates the board appearance inspection apparatus reduces the number of false reports by adjusting the setting data set in the board appearance inspection apparatus. The setting data includes, for example, inspection parameters and inspection area data. The inspection parameter is data related to the inspection object, and includes, for example, substrate outline data such as the size and thickness of the substrate, and inspection accuracy data such as the number of detected defects and the size of defects. The inspection area data is data relating to each inspection area, with each internal area divided by the contour of the color pattern on the main surface of the substrate as a target area for visual inspection (hereinafter referred to as “inspection area”). There are position coordinate data of the inspection area, color feature value data of the inspection area, and the like. The main surface means one or both of the upper exposed surface (hereinafter referred to as “upper surface”) and the lower exposed surface (hereinafter referred to as “lower surface”) of the substrate on which the wiring pattern is formed. To do.

  However, in the adjustment of the setting data, highly accurate reference board data cannot be obtained from the data of one reference board. For this reason, adjustment of the setting data requires a great deal of time for the following reasons, for example.

  (1) The first reason is that, in teaching work for adjusting setting data, it takes time to perform many work carefully and accurately with manual work.

  The “teaching work” is a work for causing the computer to create setting data and setting the setting data in the board appearance inspection apparatus. Examples of the teaching work include the following first to fifth works.

  The first operation is an operation of selecting a substrate (hereinafter referred to as “reference substrate”) that is a reference for appearance inspection. This reference board may be referred to as a “golden board”. This operation is performed by manually selecting a substrate that is free from defects (scratches, uneven color, etc.) from a number of substrates to be inspected (hereinafter referred to as “inspection substrate”). .

  The second operation is an operation for causing the computer to generate inspection area data and manually setting the inspection area data in the board appearance inspection apparatus.

  The third operation is an operation of causing the substrate appearance inspection apparatus to inspect the reference substrate and collecting data of the reference substrate.

  The fourth operation is an operation for causing the computer to extract feature data (hereinafter referred to as “inspection reference feature data”) as a reference for appearance inspection from the collected data of the reference board.

  The fifth operation is a manual operation in which the inspection reference feature data is set in the board appearance inspection apparatus as a kind of inspection parameter.

  Such teaching work has a great influence on the performance of the board appearance inspection apparatus, and therefore needs to be performed carefully and accurately. Moreover, many teaching operations are performed manually by the operator. Therefore, a great deal of time is required.

  (2) The second reason is that it takes time to obtain good inspection standard feature data in teaching work.

  In order to extract good inspection reference feature data, the operator needs to select only a substrate having no defects (scratches, color unevenness, etc.) as a reference substrate. However, in practice, the operator may select a substrate having some defects as a reference substrate. For this reason, the inspection reference feature data extracted from the collected data of one reference substrate has a large variation for each substrate and is not reliable. When the appearance inspection of the substrate is performed using the inspection reference feature data, the inspection accuracy naturally decreases.

  Therefore, the operator performs an appearance inspection of the substrate as follows in order to improve the accuracy of the inspection. In other words, the operator first selects a plurality of reference substrates from a large number of substrates, collects the data of the plurality of reference substrates by causing the substrate appearance inspection device to visually inspect the selected reference substrates. Let Next, the operator causes the computer to create average data from the collected data of the plurality of reference substrates, and to extract inspection reference feature data from the average data. As a result, the operator obtains good inspection reference feature data that suppresses variations among substrates. The operator sets the good inspection reference characteristic data obtained in this way as a kind of inspection parameter in the substrate appearance inspection apparatus, and causes the substrate appearance inspection apparatus to perform the appearance inspection of the substrate. In this way, the operator has improved the accuracy of the inspection.

  However, such work is complicated and requires a high level of skill from the operator, and thus requires a great deal of time.

  (3) The third reason is that it takes time to manually set the setting data in the board appearance inspection apparatus in the teaching work.

  As described above, the setting data includes, for example, inspection parameters and inspection area data. The operator sets the outer shape (size, thickness), inspection accuracy (number of detected defects, size of defect), etc., as inspection parameters in the substrate appearance inspection apparatus, and the upper surface of the substrate as inspection area data. The outline of the color pattern is set in the substrate visual inspection apparatus. Since these operations are performed manually, a great deal of time is required.

Moreover, in order to set the inspection area data, it is necessary to perform the following work. That is, first, the operator selects a plurality of reference substrates from among a large number of substrates, collects the data of the plurality of reference substrates by causing the substrate appearance inspection apparatus to visually inspect the selected plurality of reference substrates. Let Next, the operator causes the computer to create average data from the collected data of a plurality of reference substrates, determines the inspection area based on the difference in luminance in the average data, and creates inspection area data representing the inspection area Let Finally, the operator sets the created inspection area data in the board appearance inspection apparatus. However, the computer cannot determine an accurate inspection area only by the difference in luminance. Therefore, the operator adjusts the setting of the inspection area data as follows. That is, first, the operator operates the computer to display the image of the substrate on the display, and further, the inspection region represented by the generated inspection region data, that is, the inspection region determined based on the difference in luminance, It is displayed overlaid on the image of the substrate. Then, the operator corrects the examination area displayed on the display using a pointing device such as a mouse. In response, the computer adjusts the setting of the inspection area data.
Japanese Patent Laid-Open No. 06-348820 (FIG. 1) JP-A-11-337498 (FIG. 1)

  A conventional board appearance inspection apparatus cannot acquire highly accurate reference board data from data of a single reference board. Therefore, in order to perform a high-precision inspection, the conventional substrate appearance inspection apparatus requires an operator to perform teaching work on the following complicated substrate appearance inspection apparatus. In other words, the conventional board appearance inspection apparatus (1) work to prepare a large amount of substrates, (2) work to select a large amount of reference substrates from among a large amount of substrates, (3) collect data of a large amount of reference substrates (4) Work to sequentially create inspection area data, (5) Manual setting data to the board appearance inspection apparatus, for example, inspection parameters, inspection area data, color data corresponding to the inspection area, etc. Work and adjustment work were necessary.

  Therefore, such a conventional substrate appearance inspection apparatus is troublesome and requires a high level of skill from the operator. Therefore, it is necessary to spend a great deal of time to perform a high-precision inspection. was there.

  This problem reduces the inspection efficiency of the substrate appearance inspection apparatus, and further reduces the manufacturing efficiency of the substrate. In particular, this problem may require a lot of time for teaching work to the substrate visual inspection apparatus rather than the original purpose of the visual inspection of the substrate. (Hereinafter referred to as a “manufactured low-volume substrate manufacturer”). For this reason, some manufacturers of a variety of low-volume substrates give up using the substrate appearance inspection apparatus and inspect the appearance of the substrate by another method. Therefore, this problem is a factor that hinders the spread of the substrate visual inspection apparatus to a large variety of low-volume substrate manufacturers.

  In addition, the conventional substrate appearance inspection apparatus acquires captured image data of a substrate, and the colors (specifically, red (R color), green (G color), and blue (color) of each pixel of the acquired captured image data. B color gradation value) is analyzed, and each region such as a resist material, a silk material, and a pad is detected for each color from the captured image data. Then, the conventional board appearance inspection apparatus separates the image of each inspection area from the captured image data using each detected area as the inspection area, and determines whether the appearance of the board is good or bad based on the color of each separated inspection area (hereinafter referred to as the quality of the board). May be simply referred to as “appearance”). However, for example, a multilayer substrate having a complicated configuration has a large number of color types and a complicated shape of the region. Therefore, in the appearance inspection, when the configuration of the substrate is complicated, the inspection area cannot always be accurately separated only by the color analysis. If the inspection area is inaccurately separated, the inspection accuracy decreases. Therefore, the conventional board appearance inspection apparatus has a problem that the inspection region cannot always be accurately separated, and a problem that the inspection accuracy is lowered when the inspection region is incorrectly separated.

  Accordingly, an object of the present invention is to provide CAD data representing a design image of a board, board manufacturing data related to board manufacturing, and to improve the accuracy of inspection compared to the conventional technique while shortening the teaching work time. It is an object of the present invention to provide a substrate external appearance inspection apparatus that artificially creates reference substrate data serving as a reference for inspection and inspects the quality of the appearance of the substrate using the reference substrate data.

  In order to achieve the above object, according to the first aspect of the present invention, there is provided a substrate visual inspection apparatus having the following configuration.

  The substrate appearance inspection apparatus includes an imaging unit, a CAD data reading unit, a layer image data acquisition unit, a laminated structure data generation unit, a substrate manufacturing data reading unit, a color database, a color data acquisition unit, a region color feature data generation unit, and an inspection unit. And have. Here, “acquisition” means an operation of extracting data included in arbitrary data from arbitrary data, an operation of creating another data based on arbitrary data, and an arbitrary It means any one or a plurality of operations for reading data from the storage unit.

  An imaging part images the board | substrate which consists of a several layer, and acquires the picked-up image data of a board | substrate.

  The CAD data reading unit reads CAD data from CAD data storing means that stores CAD data representing a design image of the board. This CAD data is data representing a design image of the board, and is created in the process of designing the board.

  The layer image data acquisition unit uses a part formed of a specific material or a part subjected to a specific process as a characteristic part, and an area where the characteristic part exists is a first color area, for example, a white area, and Layer image data representing an image of a layer is acquired for each layer of the substrate from CAD data read by the CAD data reading unit by setting a region having no characteristic portion as a second color region, for example, a black region.

  The layered structure data creation unit creates composite layer image data by superimposing layer image data of each layer acquired by the layer image data acquisition unit, and the visible range in the depth direction differs from the created composite layer image data. Each internal area is extracted as each inspection area, and for each extracted inspection area, the composite layer image data is converted into a binary code based on the first color area and the second color area within the visible range in the depth direction. To do. Thereby, the layered structure data creating unit creates layered structure data representing the layered structure of each inspection region. Here, the “visible range” means a range from the main surface to a transparent layer under the main surface when the substrate is viewed vertically from the outside of one main surface of the substrate. Yes. “Visible range” usually has a low transmittance of copper, silk material, core material, etc., so the layer above the layer composed of these materials from the main surface (however, these copper, silk material, core material) (Including layers composed of materials, etc.).

  The substrate manufacturing data reading unit reads the substrate manufacturing data from the substrate manufacturing data storage unit that stores the substrate manufacturing data relating to the manufacturing of the substrate. This board manufacturing data is data relating to board manufacturing and is used in the board manufacturing process. This substrate manufacturing data represents, for example, material type data indicating the type of material, layer processing data indicating the processing content of the layer being processed, material thickness data indicating the thickness of the material, and the layer configuration. Contains layer structure data.

  The color database stores color data representing colors determined according to the characteristic portions.

  The color data acquisition unit acquires color data corresponding to the characteristic portion for each layer of the substrate from the color database based on the substrate manufacturing data read by the substrate manufacturing data reading unit.

  The area color feature data creation unit performs each inspection based on the layer structure data of each inspection region created by the layer structure data creation unit and the color data corresponding to the feature portion of each layer acquired by the color data acquisition unit. A color feature value, which is a logical color gradation value of the region, is calculated, and region color feature data representing this color feature value is created. The color feature value of each inspection region becomes reference substrate data for inspecting the appearance of the substrate.

  The inspection unit detects a color gradation value which is a color feature value in measurement of each inspection region from the captured image data acquired by the imaging unit, and the region color feature data created by the region color feature data creation unit is The color feature value of each inspection area to be represented is compared with the color gradation value of each detected inspection area, and the color feature value of each inspection area and the color gradation value of each inspection area are within a predetermined error range. If the two match, the external appearance of the substrate is determined to be appropriate.

  In order to achieve the above object, according to the second aspect of the present invention, there is provided a substrate visual inspection apparatus having the following configuration.

  The substrate appearance inspection apparatus includes an imaging unit, a CAD data reading unit, a layer image data acquiring unit, a substrate manufacturing data reading unit, a material type data acquiring unit, a layer processing data acquiring unit, a material thickness data acquiring unit, and a layer configuration data acquiring unit. A color database, a color data acquisition unit, a color layer image data creation unit, a color layer image data creation unit, a color surface image data creation unit, a region color feature data creation unit, and an inspection unit.

  An imaging part images the board | substrate which consists of a several layer, and acquires the picked-up image data of a board | substrate.

  The CAD data reading unit reads the CAD data from the CAD data storing means storing CAD data created in the board design process. The CAD data is board design image data.

  The layer image data acquisition unit uses a part formed of a specific material or a part subjected to a specific process as a characteristic part, and an area where the characteristic part exists is a first color area, for example, a white area, and Layer image data representing an image of a layer is acquired for each layer of the substrate from CAD data read by the CAD data reading unit by setting a region having no characteristic portion as a second color region, for example, a black region.

  The substrate manufacturing data reading unit reads the substrate manufacturing data from the substrate manufacturing data storage unit that stores the substrate manufacturing data relating to the manufacturing of the substrate.

  The material type data acquisition unit acquires material type data representing the type of material constituting each layer of the substrate, such as a resist material, a core material, a prepreg material, a silk material, or a plating material, from the substrate manufacturing data. . In addition, the material which comprises each layer becomes a characteristic part of each layer.

  The layer processing data acquisition unit acquires layer processing data representing the processing content of the layer being processed from the substrate manufacturing data. In addition, the process part of the layer currently processed becomes a characteristic part of each layer.

  The material thickness data acquisition unit acquires material thickness data representing the thickness of the material constituting each layer of the substrate from the substrate manufacturing data.

  The layer configuration data acquisition unit acquires layer configuration data representing the configuration of each layer of the substrate from the substrate manufacturing data.

  The color database stores color data representing colors determined according to the characteristic portions.

  The color data acquisition unit is provided with a feature portion for each layer of the substrate from the color database based on the material type data acquired by the material type data acquisition unit and / or the layer processing data acquired by the layer processing data acquisition unit. Get the corresponding color data.

  The color layer image data creation unit combines the color data corresponding to the feature portion of each layer acquired by the color data acquisition unit with the first color region in the layer image data of each layer acquired by the layer image data acquisition unit. Thus, color layer image data representing the color image of each layer is created for each layer of the substrate.

  The color laminate image data creation unit is based on the layer processing data acquired by the layer processing data acquisition unit, the material thickness data acquired by the material thickness data acquisition unit, and the layer configuration data acquired by the layer configuration data acquisition unit. Then, the color layer image data of each layer created by the color layer image data creation unit is superimposed to create color layered image data representing a color image of the layered structure of the substrate.

  The color surface image data creation unit superimposes the color layer image data of each layer created by the color layer image data creation unit on the basis of the color layer image data created by the color layer image data creation unit. Create image data.

  The area color feature data creation unit extracts each internal region delimited by the color pattern outline from the color surface image data created by the color surface image data creation unit as each inspection region, and the color characteristics of each extracted inspection region Region color feature data representing a value is created.

  The inspection unit detects a color gradation value which is a color feature value in measurement of each inspection region from the captured image data acquired by the imaging unit, and the region color feature data created by the region color feature data creation unit is The color feature value of each inspection area to be represented is compared with the color gradation value of each detected inspection area, and the color feature value of each inspection area and the color gradation value of each inspection area are within a predetermined error range. If the two match, the external appearance of the substrate is determined to be appropriate.

  According to a first aspect of the present invention, a substrate appearance inspection apparatus acquires captured image data of a substrate, analyzes the color of each area of the acquired captured image data, and applies a resist material and a silk material for each color. Instead of separating areas such as pads as inspection areas, layer image data is created based on CAD data, and inspection areas of the substrate are separated based on the layer image data. And this board | substrate appearance inspection apparatus calculates the color feature value of each test | inspection area | region isolate | separated in this way, and uses the color feature value of each test | inspection area | region as reference | standard board | substrate data, The quality of a board | substrate external appearance is judged. inspect.

  According to this substrate appearance inspection apparatus, each inspection region is separated based on layer image data created based on CAD data, instead of separating each inspection region only by color analysis as in the prior art. . Therefore, according to this board | substrate external appearance inspection apparatus, each test | inspection area | region can always be isolate | separated correctly. Moreover, according to this board | substrate external appearance inspection apparatus, since it can prevent isolate | separating a test | inspection area | region correctly, the precision of a test | inspection can be improved rather than before.

  In addition, the board appearance inspection apparatus according to either the first invention or the second invention can create the area color feature data based on CAD data and board manufacturing data without using an actual board. it can. Therefore, according to this substrate appearance inspection apparatus, (1) the operation of preparing a large amount of substrates can be eliminated, and (2) the operation of selecting a large amount of reference substrates from the prepared substrates can be eliminated. And (3) an operation of collecting a large amount of reference board data can be eliminated.

  Further, according to this board appearance inspection apparatus, each internal area delimited by the contour of the color pattern of the created color surface image data represents each inspection area, and therefore each internal area delimited by this outline is detected. By doing so, inspection area data can be created automatically. (4) For this reason, the operation | work which produces the inspection area data by an operator sequentially can be excluded.

  Further, according to this board appearance inspection apparatus, the color surface image data created as a kind of reference board data becomes a kind of setting data to be set in the board appearance inspection apparatus, so that setting data to the board appearance inspection apparatus, for example, Inspection parameters, inspection area data, color data corresponding to the inspection area, etc. can be set and adjusted. (5) For this reason, the operation | work which sets the setting data to the board | substrate visual inspection apparatus by an operator's manual work, and the operation | work which adjusts can be excluded.

  As a result, according to this board appearance inspection apparatus, it is possible to obtain an effect that the inspection accuracy can be improved as compared with the conventional technique while the teaching work time is reduced as compared with the conventional technique.

  This substrate appearance inspection apparatus is effective even when a large variety of substrates are inspected in small quantities or a variety of types, but is particularly effective when inspecting a variety of substrates in small amounts. Therefore, this board appearance inspection apparatus can be promoted to a wide variety of low-volume board manufacturers.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In each drawing, common components and similar components are denoted by the same reference numerals, and redundant description thereof is omitted.

[First Embodiment]
<Configuration of substrate visual inspection equipment>
Hereinafter, the configuration of the substrate visual inspection apparatus according to the first embodiment will be described with reference to FIG. FIG. 1 is a block diagram illustrating a configuration example of the board appearance inspection apparatus according to the first embodiment.

  The board appearance inspection apparatus 1000 is an apparatus for inspecting the appearance of the inspection board 10b.

  As shown in FIG. 1, the board appearance inspection apparatus 1000 includes an input unit 1100, an output unit 1200, a main calculation unit 1300, and a main storage unit 1400.

  The input unit 1100 described above is means for inputting various data from the outside of the board appearance inspection apparatus 1000. The input unit 1100 includes an imaging unit 1102 that images the inspection board 10b, a data reading unit 1110 that reads various data from various storage media and storage devices provided outside the board appearance inspection apparatus 1000, a keyboard, A pointing device, for example, an input means (not shown) such as a mouse is provided.

  The imaging unit 1102 includes an image sensor and a camera. The imaging unit 1102 images the inspection board 10b, and acquires captured image data 1102a (see FIG. 2) indicating the appearance of the inspection board 10b as a color image. FIG. 2 is a diagram illustrating an example of an image provided by captured image data. FIG. 2 shows an image of the inspection substrate 10b having a different color pattern for each region due to the difference in the laminated structure of each region. In FIG. 2, two arrows indicate the X-axis direction and the Y-axis direction.

  In this embodiment, the inspection substrate 10b is described as having a laminated structure as shown in FIG. FIG. 3 is a diagram illustrating an example of a laminated structure of the inspection substrate. In the example shown in FIG. 3, the test substrate 10 b includes, in order from the top, a layer (hereinafter referred to as “first silk layer”) 11 b formed of a first silk material and a second resist material. 12b (hereinafter referred to as "first resist layer") formed by the above-described process, and a third layer, a surface layer formed by copper plating and treated (hereinafter referred to as "surface layer (treated layer)"). Or a surface layer formed by copper plating of the fourth layer (hereinafter referred to as “surface layer (copper plating layer)” or “first copper plating layer”) 14b, A layer (hereinafter referred to as “first prepreg layer”) 15b formed of a fifth layer of prepreg material, and a sixth layer of a middle layer formed by copper plating and treated (hereinafter referred to as “first prepreg layer”). (Referred to as “middle layer (treatment layer)” or “second treatment layer”) 6b, an intermediate layer (hereinafter referred to as "intermediate layer (copper plating layer)" or "second copper plating layer") 17b formed by copper plating of the seventh layer, and a core material of the eighth layer. Layer (hereinafter referred to as "core layer") 18b, middle layer (copper plating layer) 9b (hereinafter referred to as "third copper plating layer") 19b, and middle layer (treatment) Layer) (hereinafter referred to as a “third treatment layer”) 20b, an eleventh second prepreg layer 21b, and a twelfth surface layer (copper plating layer) (hereinafter referred to as “fourth copper plating layer”). 22b, a thirteenth surface layer (process layer) (hereinafter referred to as “fourth process layer”) 23b, a fourteenth resist layer 24b, and a fifteenth second layer. It has a 15-layer laminated structure consisting of a silk layer 25b.

  The data reading unit 1110 includes a reader / writer (R / W) that reads data from various storage media and storage devices, an input / output interface (I / O) that communicates with external devices, and the like. .

  The data reading unit 1110 includes a CAD data reading unit 1112 that reads the CAD data 52a from the CAD data storage unit 52, a substrate manufacturing data reading unit 1122 that reads the substrate manufacturing data 54a from the substrate manufacturing data storage unit 54, and the color database creation device 500. A color data reading unit 1132 for reading the color data 500a from the color data 500a.

  The data storage means 50 is means for storing CAD data 52a representing a board design image and board manufacturing data 54a relating to board manufacturing. The data storage means 50 is configured by various storage media such as a DVD, CD-ROM, floppy (registered trademark) disk, USB memory, or various storage devices such as a hard disk device and a computer. The data storage means 50 includes a CAD data storage means 52 for storing CAD data 52a and a board manufacturing data storage means 54 for storing board manufacturing data 54a. The CAD data 52a will be described in detail in the section “Data acquired from CAD data” described later. Further, the substrate manufacturing data 54a will be described in detail in the section of “data acquired from substrate manufacturing data” described later. In this embodiment, the CAD data storage unit 52 and the board manufacturing data storage unit 54 are described as being formed separately, but may be formed integrally.

  The color database creation device 500 is a device that creates color data 500a that is determined according to the characteristic part of each layer of the substrate, that is, a part formed of a specific material or a part subjected to a specific process. . The color data 500a will be described in detail in the section “Data stored in the color database” described later.

  In this embodiment, the CAD data reading unit 1112, the substrate manufacturing data reading unit 1122, and the color data reading unit 1132 are described as being formed separately, but they may be formed integrally.

  The output unit 1200 described above is means for outputting various data. The output unit 1200 includes a display, a printer, a reader / writer (R / W) that reads / writes data from / to various storage media, an input / output interface (I / O) that communicates with an external device, and the like.

  The above-described main calculation unit 1300 is means for executing various calculations. The main arithmetic unit 1300 is composed of a CPU. The main calculation unit 1300 includes a layer image data acquisition unit 1312, a laminated structure data generation unit 1314, a color data acquisition unit 1342, a skew correction unit 1384, an alignment unit 1386, an area color feature data generation unit 1392, and an inspection unit 1394. As an element. Here, “acquisition” is an operation of extracting specific data included in arbitrary data from arbitrary data, an operation of generating specific data based on arbitrary data, and It means any one or more operations of reading specific data from an arbitrary storage unit.

  The main storage unit 1400 described above is means for storing various programs and data. The main storage unit 1400 is composed of a RAM. The main storage unit 1400 includes a captured image data storage unit 1402, a layer image data storage unit 1412, a layered structure data storage unit 1414, a board manufacturing data storage unit 1422, a color database 1440, a color data storage unit 1442, and a skew correction image data storage unit. 1484, an alignment data storage unit 1486, a calculation data storage unit 1488, and an area color feature data storage unit 1492 are provided as constituent elements.

  Hereinafter, the components of the main calculation unit 1300 and the main storage unit 1400 will be sequentially described.

  The layer image data acquisition unit 1312 represents, from the CAD data 52a stored in the CAD data storage unit 52, white and black binary data representing each layer image of the substrate (hereinafter referred to as “layer image data”). 1312a (refer to FIGS. 5A to 5D) is acquired and stored in the layer image data storage unit 1412.

  The layered structure data creating unit 1314 obtains data representing the layered structure of each region of the inspection substrate 10b (hereinafter referred to as “layered structure data”) from the layer image data 1312a of each layer of the substrate stored in the layer image data storage unit 1412. 1314a (see FIG. 14) is created and stored in the stacked structure data storage unit 1414.

  The color data acquisition unit 1342 acquires color data 1342a (see FIG. 15) determined according to the characteristic part of each layer of the substrate from the color data 500a stored in the color database 1440, and stores it in the color data storage unit 1442. It is a functional means for storing.

  The skew correction unit 1384 is imaged image data (hereinafter referred to as “skew corrected image data”) 1384a obtained by correcting the inclination (skew) from the imaged image data 1102a of the inspection board 10b acquired by the imaging unit 1102 (see FIG. 16). ) And is stored in the skew-corrected image data storage unit 1484.

  The alignment unit 1386 detects each inspection region from the skew correction image data 1384a stored in the skew correction image data storage unit 1484, and the stacked structure stored in the stack structure data storage unit 1414 in each detected inspection region. This is a functional means for creating alignment data 1386a (see FIG. 17) by associating the data 1314a and storing it in the alignment data storage unit 1486.

  The area color feature data creation unit 1392 is based on alignment data 1386a created by the alignment unit 1386 and color data 1342a corresponding to the feature portion of each layer acquired by the color data acquisition unit 1342. 1 to 3, the color feature value of each inspection region is calculated, region color feature data 1392 a (see FIG. 18) representing the color feature value of each inspection region is created, and stored in the region color feature data storage unit 1492. Functional means.

  The inspection unit 1394 is based on the skew corrected image data 1384a that is the captured image data 1102a skew-corrected by the skew correction unit 1184 and the area color feature data 1392a generated by the area color feature data generation unit 1392. This is a functional unit that inspects the appearance of 10b and outputs data (hereinafter referred to as “inspection result data”) 1394a representing the inspection result to the output unit 1200. In this embodiment, in the appearance inspection of the inspection substrate 10b, the inspection unit 1394 detects the color gradation value of each inspection region from the skew correction image data 1384a, and the region created by the region color feature data creation unit 1392 This is performed by comparing the color feature value of each inspection area represented by the color feature data 1392a with the detected color gradation value of each inspection area.

  The captured image data storage unit 1402 is a storage area for storing the captured image data 1102a of the inspection board 10b acquired by the imaging unit 1102.

  The layer image data storage unit 1412 is a storage area for storing the layer image data 1312 a acquired by the layer image data acquisition unit 1312.

  The board manufacturing data storage unit 1422 is a storage area for storing board manufacturing data 54a read by the board manufacturing data reading unit 1122.

  The color database 1440 is a database that stores various color data 500 a created by the color database creation device 500. Each of the color data 500a stored in the color database 1440 corresponds to, for example, the material used for forming the layer, the processing content of the layer being processed, and the like.

  The color data storage unit 1442 is a storage area for storing color data 1342a that is determined according to the characteristic part of each layer of the substrate acquired by the color data acquisition unit 1342 from the color data 500a stored in the color database 1440. is there.

  The calculation data storage unit 1488 is a storage area for storing various data used when creating the area color feature data 1392a serving as the reference board data. The calculation data storage unit 1488 includes, for example, Equations 1 to 3 described later, a layer superposition constant described later, a color attenuation constant depending on a layer thickness described later, and a color feature according to a material type or layer processing described later. Stores values etc. In this embodiment, it is assumed that the “color feature value” includes an R color feature value, a G color feature value, and a B color feature value. “R color feature value”, “G color feature value”, and “B color feature value” are respectively a logically calculated red (R color) tone value and green (G color) tone value. , And blue (B color) gradation values. Of course, the same color has the same color feature value.

  The area color feature data storage unit 1492 is a storage area for storing the area color feature data 1392 a created by the area color feature data creation unit 1392.

  In this embodiment, a skew correction unit 1384, a skew correction image data storage unit 1484, an alignment unit 1386, and an alignment data storage unit 1486 are provided. These components are useful for improving the inspection accuracy of the appearance of the inspection substrate 10b, but may be omitted. When omitted, the region color feature data creation unit 1392 acquires the stack structure data 1314a of each inspection region from the stack structure data storage unit 1414, and the color data 1342a corresponding to the feature portion of each layer from the color data storage unit 1442. And the region color feature data 1392a is created based on the layered structure data 1314a of each inspection region and the color data 1342a corresponding to the feature portion of each layer. Further, the inspection unit 1394 acquires the captured image data 1102a from the captured image data storage unit 1402 and also acquires the region color feature data 1392a from the region color feature data storage unit 1492, and the captured image data 1102a and the region color feature data 1392a. Based on the above, the inspection board 10b is inspected for appearance.

<Data acquired from CAD data>
Hereinafter, data acquired from the CAD data 52a will be described with reference to FIG. FIG. 4 is an explanatory diagram of data acquired from CAD data.

  The CAD data 52a is data representing a design image of the board. The CAD data 52a is created during the board design process. The CAD data 52a can be converted into data (hereinafter referred to as “layer image data”) 1312a representing an image of each layer of the substrate. This layer image data 1312a is the design drawing data of the board in binary of white and black.

  As shown in FIG. 4, the CAD data reading unit 1112 reads the CAD data 52 a from the CAD data storage unit 52 and outputs the read CAD data 52 a to the layer image data acquisition unit 1312. In this embodiment, the CAD data 52a represents images of each layer of the inspection substrate 10b having the laminated structure shown in FIG. 3, that is, the first silk layer 11b to the second silk layer 25b shown in FIG. It shall be.

  In response to the input of CAD data 52a from the CAD data reading unit 1112, the layer image data acquisition unit 1312 converts the CAD data 52a into binary image data of white and black for each layer of the board. Then, the layer image data 1312a (see FIGS. 5A to 5D) is acquired.

  5A to 5D are diagrams illustrating an example of an image provided by the layer image data. FIG. 5A shows an example of an image provided by the silk layer image data 11a corresponding to the first silk layer 11b shown in FIG. FIG. 5B shows an example of an image provided by the resist layer image data 12a corresponding to the first resist layer 12b shown in FIG. FIG. 5C shows an example of an image provided by the surface layer (copper plating layer) image data 14a corresponding to the first copper plating layer 14b shown in FIG. FIG. 5D shows an example of an image provided by the middle layer (copper plating layer) image data 17a corresponding to the second copper plating layer 17b shown in FIG. The layer image data 1312a is data representing a white area and a black area in binary.

  5A to 5D, the white area indicates an area where the characteristic part exists, and the black area indicates an area where the characteristic part does not exist. The characteristic part means, for example, a part formed of a specific material or a part subjected to a specific process. In the example shown in FIG. 5A, the white region indicates a portion formed of a silk material. In the example shown in FIG. 5B, the white region indicates a portion formed of a resist material. In the example shown in FIG. 5C, the white area indicates a surface layer portion formed by copper plating. In the example shown in FIG. 5D, the white area indicates the middle layer portion formed by copper plating.

  The white area and the black area in each layer image data 1312a are later converted into binary codes by the stacked structure data creation unit 1314, respectively. At this time, the color data 1342a is assigned to the code portion corresponding to the white area in the converted code by the area color feature data creation unit 1392 later.

  Upon acquiring the layer image data 1312a, the layer image data acquisition unit 1312 outputs the layer image data 1312a to the main storage unit 1400 and stores it in the layer image data storage unit 1412 of the main storage unit 1400. .

  In the example illustrated in FIG. 4, the layer image data storage unit 1412 includes, for example, silk layer (upper surface) image data 11a, resist layer (upper surface) image data 12a, and surface layer (processing layer) image data as the layer image data 1312a. 13a, surface layer (copper plating layer) image data 14a, prepreg layer image data 15a, middle layer (processing layer) image data 16a, middle layer (copper plating layer) image data 17a, core layer image data 18a, middle layer (copper plating layer) image Data 19a, middle layer (processed layer) image data 20a, prepreg layer image data 21a, surface layer (copper plating layer) image data 22a, surface layer (processed layer) image data 23a, resist layer (lower surface) image data 24a, and silk layer ( Lower surface) Stores image data 25a.

<Data obtained from substrate manufacturing data>
Hereinafter, data acquired from the substrate manufacturing data 54a will be described with reference to FIG. FIG. 6 is an explanatory diagram of data acquired from the substrate manufacturing data.

  The board manufacturing data 54a is data related to board manufacturing. This substrate manufacturing data 54a is used in the process. The substrate manufacturing data 54a includes, for example, data indicating the type of material constituting each layer of the substrate (hereinafter referred to as “material type data”), the layer being processed, particularly the processing content of the surface of the layer. Data (hereinafter referred to as “layer processing data”), the thickness of the material constituting each layer of the substrate (hereinafter referred to as “material thickness data”), and data representing the configuration of each layer of the substrate (hereinafter referred to as “layer”) Referred to as “configuration data”).

  As shown in FIG. 6, the board manufacturing data reading unit 1122 reads the board manufacturing data 54 a from the board manufacturing data storage unit 54. As shown in FIG. 7, the board manufacturing data 54a is assigned to each layer corresponding to each layer of the inspection board 10b, that is, each of the first silk layer 11b to the second silk layer 25b shown in FIG. It includes “layer number data”, “layer configuration data”, “material type / layer processing data”, and “material thickness data”. FIG. 7 is a diagram (1) showing an example of substrate manufacturing data. In FIG. 7, “layer number data” represents a number assigned to a layer. The “layer configuration data” represents the layer configuration such as the number of layers and the shape of each layer. The “material type / layer processing data” represents the type of material used for manufacturing the substrate and the layer being processed, particularly the processing content of the surface of the layer. The “material thickness data” represents the thickness of the material used for manufacturing the substrate. Note that types of “material type / layer processing data” and processing contents include, for example, those shown in FIGS. 8A and 8B. FIGS. 8A and 8B are diagrams (2) illustrating an example of substrate manufacturing data. FIG. 8A shows an example of material type data, and FIG. 8B shows an example of layer processing data. In this embodiment, the inspection substrate 10b includes the first and second silk layers 11b and 25b made of “200 W”, the first and second resist layers 12b and 24b made of “G24”, and the first and fourth layers. The treatment layers 13b and 23b are made of “SR”, the first to fourth copper plating layers 14b, 17b, 19b and 22b are made of “Cu”, and the first and second prepreg layers 15b and 21b are made of “FR-4”. The second and third treatment layers 16b and 20b are made of “B / O”, and the core layer 18b is made of “FR-4”. Note that the material type data is preferably created according to the material manufacturer, material, and the like. In this embodiment, the board appearance inspection apparatus 1000 includes color data corresponding to the material type data 312a (hereinafter also referred to as “material color data”) and color data corresponding to the layer processing data 314a (hereinafter referred to as “material color data”). , And may be referred to as “processed color data”) as the same color data 1342a. This is because, for example, the surface of a layer formed by a process such as plating is regarded as a new layer, and the color of the new layer is reflected in the area color feature data 1392a calculated later.

  When the board manufacturing data reading unit 1122 reads the board manufacturing data 54a, in response to this, the board manufacturing data 54a is output to the main storage unit 1400 and stored in the board manufacturing data storage unit 1422 of the main storage unit 1400. .

  In the example shown in FIG. 6, the substrate manufacturing data reading unit 1122 includes, as the material type data 312a, for example, core material type data 313a, prepreg material type data 313b, resist material type data 313c, silk material type data 313d, plating. Material type data 313e and the like, and as layer processing data 314a, data related to processing applied to the surface of the middle layer (hereinafter simply referred to as “middle layer processing data”) 315a and data related to processing applied to the surface of the surface layer (Hereinafter simply referred to as “surface processing data”) 315b and the like are stored.

  The core material type data 313a is data related to the core material. The prepreg material type data 313b is data related to the prepreg material. The resist material type data 313c is data related to the resist material. The silk material type data 313d is data related to the silk material. The plating material type data 313e is data relating to the plating material.

  As shown in FIG. 8A, the core material and the prepreg material are, for example, “FR-4”, “FR-4.5”, “FR-4 HF”, “polyimide”, “BT”, and the like. There is. Further, as shown in FIG. 8A, the resist material includes, for example, “G24”, “BL01 Ao”, “H12F AB” and the like. Further, as shown in FIG. 8A, the silk material includes, for example, “200W”, “200Y”, “200B”, and the like. Further, as shown in FIG. 8A, the plating material includes, for example, “copper (Cu)”, “solder; solder coat (SC)”, and “gold (Au)”. Each of these materials has a unique color.

  The middle layer processing data 315a is data relating to processing performed on the surface of the middle layer. The surface layer processing data 315b is data relating to processing performed on the surface of the surface layer.

  As shown in FIG. 8B, the middle layer processing includes, for example, “B / O”, “CZ”, and the like. Further, as shown in FIG. 8B, the surface layer processing includes, for example, “SR”, “CZ”, “gold plating”, and the like. Each of these layer treatments has a unique color for each material.

<Data stored in the color database>
Hereinafter, the data stored in the color database 1440, that is, the color data 500a will be described with reference to FIG. FIG. 9 is a block diagram illustrating a configuration example of the color database creation apparatus. In this embodiment, the color database creation apparatus 500 will be described as a computer in which the components shown in FIG. 9 are constructed. In this embodiment, the color database creation apparatus 500 is described as being an apparatus different from the board appearance inspection apparatus 1000, but may be configured as an apparatus integrated with the board appearance inspection apparatus 1000.

  The color database creation apparatus 500 includes a main calculation unit 510 that executes various calculations and a main storage unit 520 that stores various data. The main calculation unit 510 is constituted by a CPU. The main storage unit 520 is configured by a RAM.

  The main calculation unit 510 includes an image acquisition unit 512, a color analysis unit 514, and a color database output unit 516.

  The image acquisition unit 512 is a functional unit that acquires and outputs the color image data 520 a corresponding to the material type data and the color image data 520 a corresponding to the layer processing data from the main storage unit 520.

  The color analysis unit 514 decomposes each of the color image data 520a acquired by the image acquisition unit 512 into RGB (red, green, blue) components, and corresponds to the color data 500a corresponding to the material type data and the layer processing data. This is functional means for creating color data 500a. The color analysis unit 514 outputs the created color data 500 a to the main storage unit 520 and stores it in the color data storage unit 534 of the main storage unit 520.

  The color database output unit 516 is a functional unit that reads the color data 500 a from the color data storage unit 534 and outputs the read color data 500 a to the board appearance inspection apparatus 1000. The color data 500a output to the board appearance inspection apparatus 1000 is stored in the color database 1440 of the board appearance inspection apparatus 1000.

  The main storage unit 520 includes a core material / prepreg material data storage unit 522, a resist material data storage unit 524, a silk material data storage unit 526, a plating material data storage unit 528, and an intermediate layer processing data storage unit 530. A surface processing data storage unit 532 and a color data storage unit 534.

  The core material / prepreg material data storage unit 522 is a storage area for storing core material / prepreg material data 522a, for example, as shown in FIG. In the example illustrated in FIG. 9, the core material / prepreg material data storage unit 522 includes five data “FR-4”, “FR-4.5”, “FR-4 HF”, “polyimide”, and “BT”. Stores material type data. Each of these material type data includes corresponding color image data 520a.

  The resist material data storage unit 524 is a storage area for storing resist material data 524a as shown in FIG. 8A as one type of material type data. In the example illustrated in FIG. 9, the resist material data storage unit 524 stores three material type data of “G24”, “BL01 Ao”, and “H12F AB”. Each of these material type data includes corresponding color image data 520a.

  The silk material data storage unit 526 is a storage area for storing silk material data 526a as shown in FIG. 8A as one type of material type data. In the example illustrated in FIG. 9, the silk material data storage unit 526 stores three material type data of “200 W”, “200 Y”, and “200 B”. Each of these material type data includes corresponding color image data 520a.

  The plating material data storage unit 528 is a storage area for storing plating material data 528a as shown in FIG. 8A as a kind of material type data. In the example illustrated in FIG. 9, the plating material data storage unit 528 stores three material type data of “copper (Cu)”, “solder (SC)”, and “gold (Au)”. Each of these material type data includes corresponding color image data 520a.

  The middle-layer processing data storage unit 530 is a storage area for storing middle-layer processing data 530a as shown in FIG. 8B as a kind of layer processing data. In the example illustrated in FIG. 9, the middle-layer processing data storage unit 530 stores two layer processing data “B / O” and “CZ”. Each of these layer processing data includes corresponding color image data 520a.

  The surface layer processing data storage unit 532 is a storage area for storing surface layer processing data 532a as shown in FIG. 8B as a kind of layer processing data. In the example shown in FIG. 9, the surface layer processing data storage unit 532 stores three layer processing data of “SR”, “CZ”, and “gold plating”. Each of these layer processing data includes corresponding color image data 520a.

  The color data storage unit 534 is a storage area for storing the color data 500 a created by the color analysis unit 514.

  The color database creation device 500 operates as follows.

  First, material type data or layer processing data including color image data 520 a is stored in the main storage unit 520. This is done by the operator of the color database creation device 500 performing the following work.

  That is, the operator can use, for example, “FR-4”, “FR-4.5”, “FR-4 HF”, “polyimide” on the material not affected by the color as the core material / prepreg material. And a sample in which each of “BT” is arranged by a predetermined thickness (hereinafter referred to as “reference thickness”) is prepared. Then, the operator operates the imaging apparatus 600. At this time, the imaging apparatus 600 captures images of the core material and the prepreg material, and acquires color image data 520a corresponding to the core material and the prepreg material. Upon acquiring the color image data 520a corresponding to each core material / prepreg material, the imaging apparatus 600 creates a color database in response to each of the acquired color image data 520a as core material / prepreg material data. Output to the device 500. When each of the color image data 520a is input from the imaging device 600, the color database creation device 500 converts each of the input color image data 520a as the core material / prepreg material data 522a of the material type data. The data is stored in the prepreg material data storage unit 522.

  Similarly, the operator prepares a sample in which, for example, “G24”, “BL01 Ao”, and “H12F AB” are arranged by a reference thickness on a material that is not affected by color as a resist material. Then, the imaging device 600 is operated. At this time, the imaging apparatus 600 captures each image of these resist materials and acquires color image data 520a corresponding to each resist material. Upon acquiring the color image data 520a corresponding to each resist material, the imaging device 600 outputs each of the acquired color image data 520a to the color database creation device 500 as resist material data in response to this. When each of the color image data 520a is input from the imaging apparatus 600, the color database creation apparatus 500 uses the input color image data 520a as the resist material data 524a of the material type data, and the resist material data storage unit 524. To store.

  Similarly, the operator prepares a sample in which, for example, “200 W”, “200 Y”, and “200 B” are arranged by a reference thickness on a material not affected by color as a silk material, and imaging is performed. The device 600 is activated. At this time, the imaging apparatus 600 captures each image of the silk material and acquires color image data 520a corresponding to each silk material. Upon acquiring the color image data 520a corresponding to each resist material, the imaging device 600 outputs each of the acquired color image data 520a to the color database creation device 500 as silk material data in response to this. When each of the color image data 520a is input from the imaging apparatus 600, the color database creation apparatus 500 uses the input color image data 520a as silk material data 526a of material type data, and a silk material data storage unit 526. To store.

  Similarly, the operator can use only a reference thickness of, for example, “copper (Cu)”, “solder (SC)”, and “gold (Au)” on a material that is not affected by color as a plating material. The arranged sample is prepared, and the imaging apparatus 600 is operated. At this time, the imaging device 600 captures images of the plating materials and acquires color image data 520a corresponding to the plating materials. Upon acquiring the color image data 520a corresponding to each plating material, the imaging device 600 outputs each of the acquired color image data 520a to the color database creation device 500 as plating material data in response to this. When each of the color image data 520a is input from the imaging apparatus 600, the color database creation apparatus 500 uses the input color image data 520a as the plating material data 528a of the material type data, and the plating material data storage unit 528. To store.

  Similarly, the operator prepares, for example, a material having a reference thickness in which each of the treatments “B / O” and “CZ” is performed on the surface as the material subjected to the layer processing on the surface, and the imaging apparatus 600 is installed. Operate. At this time, the imaging apparatus 600 captures images of materials whose layers have been subjected to layer processing, and acquires color image data 520a corresponding to the materials. When the image capturing apparatus 600 acquires each color image data 520a corresponding to each material, in response to this, the image capturing apparatus 600 outputs each of the acquired color image data 520a to the color database creating apparatus 500 as middle layer processing data. When each of the color image data 520a is input from the imaging apparatus 600, the color database creation device 500 uses the input color image data 520a as the intermediate processing data 530a of the processing data, and the intermediate processing data storage unit 530. To store.

  Similarly, the operator prepares, for example, a reference-thickness material in which each of the treatments “SR”, “CZ”, and “gold plating” is performed on the surface as the material on which the surface treatment is performed. The device 600 is activated. At this time, the imaging apparatus 600 captures images of materials whose layers have been subjected to layer processing, and acquires color image data 520a corresponding to the materials. When the image capturing apparatus 600 acquires each color image data 520a corresponding to each material, in response to this, the image capturing apparatus 600 outputs each of the acquired color image data 520a to the color database creating apparatus 500 as surface layer processing data. When each of the color image data 520a is input from the imaging apparatus 600, the color database creation device 500 uses the input color image data 520a as the surface processing data 532a of the layer processing data, and the surface processing data storage unit 532. To store.

  In this way, the main storage unit 520 of the color database creation apparatus 500 stores the material type data or the layer processing data including the color image data 520a.

  Next, when a command for instructing the creation of the color data 500a is input by the operator, the color database creation device 500 starts the creation of the color data 500a in response to the input.

  At this time, the image acquisition unit 512 of the main calculation unit 510 includes a core material / prepreg material data storage unit 522, a resist material data storage unit 524, a silk material data storage unit 526, and a plating material data storage unit 528 of the main storage unit 520. The color image data 520a corresponding to the material type data and the color image data 520a corresponding to the layer processing data are read from each of the middle layer processing data storage unit 530 and the surface layer processing data storage unit 532, and each read color image data 520a. Is output to the color analysis unit 514.

  Next, when each color image data 520a is input from the image acquisition unit 512, the color analysis unit 514 responds to the color data 500a corresponding to the material type or layer processing from each of the color image data 520a. Create Specifically, the color analysis unit 514 decomposes each of the color image data 520a into, for example, 256 gradation RGB components, and the 256 gradation R component image data of each color image data 520a and the 256th floor. Tone G component image data and 256 gradation B component image data are created. Then, the color analysis unit 514 calculates the average value of the R component image data, the average value of the G component image data, and the average value of the B component image data of each color image data 520a. These average values respectively represent the color feature value of the material type data or the color feature value of the layer processing data in each color image data 520a. Therefore, these average values mean color data corresponding to the material type or layer processing. In this way, the color analysis unit 514 performs the average value of the R component image data, the average value of the G component image data, and the average value of the B component image data of each color image data 520a, that is, each color image data 520a. Color data 500a corresponding to the material type or layer processing of the image data 520a is created. Then, the color analysis unit 514 converts the average value of the R component image data, the average value of the G component image data, and the average value of the B component image data of each color image data 520a to the material type or layer. The color data 500 a corresponding to the process is output to the main storage unit 520 and stored in the color data storage unit 534 of the main storage unit 520.

  The color data 500a stored in the color data storage unit 534 includes, for example, a command (hereinafter referred to as “color data”) that the color database creation device 500 requests the substrate appearance inspection device 1000 to output the color data 500a as described below. When the output request command is received, it is transmitted to the board appearance inspection apparatus 1000. That is, when the color database creation apparatus 500 receives a command requesting the output of the color data 500a from the board appearance inspection apparatus 1000, the color database output section 516 reads the color data 500a from the color data storage section 534, and the board appearance. It transmits to the inspection apparatus 1000. The board appearance inspection apparatus 1000 receives the color data 500 a transmitted from the color database creation apparatus 500 through the input unit 1100. In response to this, the board appearance inspection apparatus 1000 stores the color data 500a received from the color database creation apparatus 500 in the color database 1440.

  In this embodiment, the color database creation device 500 creates the color data 500a by decomposing each color image data 520a into RGB components, but various other methods, for example, a method of measuring with a color difference meter. Also, the color data 500a can be created.

<Operation of PCB visual inspection equipment>
Hereinafter, the operation of the substrate visual inspection apparatus will be described with reference to FIG.

  When inspecting the appearance of the inspection substrate 10b, the substrate appearance inspection apparatus 1000 performs the following preliminary operations in advance.

  First, a command for instructing to read color data 500a from the color database creation device 500 by an operation of an input unit 1100 such as a mouse or a keyboard by an operator of the board appearance inspection device 1000 (hereinafter referred to as a “color data read command”). Is input to the board appearance inspection apparatus 1000. In response to the input of the color data read command, the substrate appearance inspection device 1000 transmits the color data output request command to the color database creation device 500 in response to the input of the color data read command. When the color database creation apparatus 500 receives the color data output request command from the board appearance inspection apparatus 1000, in response to this, the color database output section 516 reads the color data 500a from the color data storage section 534, and the board appearance inspection. It transmits to the apparatus 1000 (refer FIG. 9). The board appearance inspection apparatus 1000 receives the color data 500 a transmitted from the color database creation apparatus 500 by the color data reading unit 1132 of the input unit 1100. Upon receiving the color data 500a, the color data reading unit 1132 outputs the received color data 500a to the main storage unit 1400 and stores it in the color database 1440 of the main storage unit 1400.

  Next, a command (hereinafter referred to as “CAD data read command”) for instructing to read out the CAD data 52a from the data storage means 50 by the operation of the input unit 1100 such as a mouse or a keyboard by the operator is provided. 1000 is input. The CAD data read command may be input before the color data read command is input. In response to the input of the CAD data reading command, the board appearance inspection apparatus 1000 causes the CAD data reading unit 1112 of the input unit 1100 to receive the inspection data from the CAD data storage unit 52 of the data storage unit 50 of the inspection board 10b. The CAD data 52 a is read, and the read CAD data 52 a is output to the layer image data acquisition unit 1312. When the CAD data 52a is input from the CAD data reading unit 1112, the layer image data acquisition unit 1312 receives the CAD data 52a for each layer of the inspection board 10b, for example, as shown in FIGS. D) conversion into binary layer image data of white and black as shown in D). Thereby, the layer image data acquisition unit 1312 acquires the layer image data 1312a of each layer of the inspection substrate 10b.

  When the layer image data acquisition unit 1312 acquires the layer image data 1312a of each layer of the inspection board 10b, in response to this, the layer image data 1312a is output to the main storage unit 1400, and the layers of the main storage unit 1400 are output. The image data is stored in the image data storage unit 1412.

  When each of the layer image data 1312a is stored in the layer image data storage unit 1412, the laminated structure data creation unit 1314 is activated in response thereto.

  Hereinafter, with reference to FIGS. 10 to 14, the operation of the laminated structure data creation unit 1314 will be described. 10 to 14 are explanatory diagrams of the laminated structure data creation unit, respectively.

  FIG. 10 shows a laminated structure of the inspection substrate 10b. In the inspection substrate 10b, when the inspection substrate 10b is viewed from one main surface (upper surface in the example shown in FIG. 10) side, there are a plurality of regions having different visible ranges in the depth direction depending on the laminated structure. . For example, in the example illustrated in FIG. 10, the inspection substrate 10b includes regions R1 to R9 as regions having different visible ranges in the depth direction. In FIG. 10, arrows r1 to r9 indicate the visible ranges in the depth direction in the regions R1 to R9 as an example.

  This is because a layer in which the light transmittance is lower than a predetermined threshold inside the inspection substrate 10b and the inner layer cannot be seen through (hereinafter referred to as “opaque layer”), and the light transmittance. This is because there is a layer (hereinafter referred to as a “transparent layer”) in which the inner layer is seen through and is higher than a predetermined threshold value. The opaque layer is mainly made of metal. In this embodiment, the first processing layer 13b, the first copper plating layer 14b, the second processing layer 16b, the second copper plating layer 17b, the third copper plating layer 19b, the third processing layer 13b formed by copper (Cu) plating. The treatment layer 20b, the fourth copper plating layer 22b, and the fourth treatment layer 23b are opaque layers. The first silk layer 11b, the core layer 18b, and the second silk layer 25b are also opaque layers because the light transmittance is lower than a predetermined threshold value and the lower layer cannot be seen through. The other layers, that is, the first resist layer 12b, the first prepreg layer 15b, the second prepreg layer 21b, and the second resist layer 24b are transparent layers.

  11 and 12 show the relationship between the opaque layer and the transparent layer. FIG. 11 shows composite layer image data 10c created by superimposing layer image data 1312a (see FIGS. 5A to 5D) of each layer acquired by the layer image data acquisition unit 1312. ing. FIG. 12 shows a cut surface when the composite layer image data 10c is cut along the cutting line 10d shown in FIG.

  In FIG. 11, a one-dot chain line 10d indicates a cutting line for cutting the composite layer image data 10c. In the example shown in FIG. 11, the cutting line 10d has a coordinate value in the Y-axis direction (hereinafter referred to as “Y-coordinate value”) fixed to “(i)” and is arranged parallel to the X-axis. . An arrow r indicates the depth direction.

  In FIG. 12, a layer marked with “x” indicates an opaque layer, and a layer marked with “◯” indicates a transparent layer. Further, the uncolored area of each layer represents a white area, that is, an area where a characteristic part exists, and the colored area of each layer represents a black area, that is, an area where no characteristic part exists. . Moreover, the arrows r1 to r9 represent the visible ranges in the depth direction in the regions R1 to R9, respectively. The visible range r1 to r9 in the depth direction is a range from the main surface to the white region of the opaque layer, that is, the layer marked with “X” shown in FIG.

  The stacked structure data creation unit 1314 operates as follows to detect the visible ranges r1 to r9 in the depth direction, and detects the regions R1 to R9 based on the detected visible ranges r1 to r9 in the depth direction. Furthermore, the laminated structure data 1314a in each of the regions R1 to R9 is created based on the detected regions R1 to R9.

  (1) When the laminated structure data creation unit 1314 is activated, it reads out the layer image data 1312a (see FIGS. 5A to 5D) for each layer from the layer image data storage unit 1412 in response to the activation. The layer image data 1312a of each layer is overlapped to create composite layer image data 10c (see FIG. 11).

  (2) When the laminated structure data creation unit 1314 creates the composite layer image data 10c, in response to this, the Y coordinate value of the cutting line 10d (see FIG. 11) is fixed to the initial value “i”, for example. The composite layer image data 10c is cut in parallel with the X axis to create image data (see FIG. 12) of the cut surface of the composite layer image data 10c.

  (3) When the layered structure data creation unit 1314 creates the image data of the cut surface of the composite layer image data 10c, in response to this, all the data in the X-axis direction are obtained from the image data of the cut surface of the composite layer image data 10c. At each pixel position, a range from the main surface to the white area of the opaque layer, that is, the layer marked with “x” shown in FIG. 12 is detected. Each of the ranges from the main surface detected at this time to the white region of the opaque layer has a depth direction at each pixel position in the X axis direction when the Y coordinate value of the cutting line 10d is set to the initial value “i”. Visible range.

  (4) When the stacked structure data creation unit 1314 detects the visible range in the depth direction at each pixel position, in response to this, the white area and the black area in the visible range in the depth direction at each pixel position are displayed. To detect. Note that the white area represents an area where the characteristic part exists, and the black area represents an area where the characteristic part does not exist.

  (5) When the laminated structure data creation unit 1314 detects a white region and a black region within the visible range in the depth direction at each pixel position, in response to this, the white region is coded as shown in FIG. “1” is set, and the black area is set to code “0”, and the white area and the black area within the visible range in the depth direction at each pixel position are converted into binary codes. Thereby, the laminated structure data creation unit 1314 creates the laminated structure data 1314a at each pixel position.

  (6) When the layered structure data creation unit 1314 creates the layered structure data 1314a at each pixel position, in response to this, the layered structure data creation unit 1314 compares the layered structure data 1314a between adjacent pixel positions. In this comparison, when it is determined that both, that is, the stacked structure data 1314a at adjacent pixel positions are the same, the stacked structure data creation unit 1314 detects both as data in the same region. The stacked structure data creation unit 1314 performs such a comparison on the stacked structure data 1314a at all pixel positions. Thereby, the laminated structure data creation unit 1314 detects the regions R1 to R9.

  (7) Upon detecting each of the regions R1 to R9, the stacked structure data creation unit 1314 responds to this by stacking the regions R1 to R9 when the Y coordinate value of the cutting line 10d is set to the initial value “i”. Structure data 1314a (see FIG. 13) is created. FIG. 13 shows an example of the laminated structure data 1314a in each of the regions R1 to R9.

  In the example illustrated in FIG. 13, the stacked structure data 1314a of the region R1 is “(1)”, the stacked structure data 1314a of the region R2 is “(0, 1, 1)”, and the stacked structure data 1314a of the region R3 is “ (0, 1, 0, 0, 1, 1) ”, and the layer structure data 1314a of the region R4 is“ (0, 1, 0, 0, 1, 0, 0, 1) ”, and the layer structure of the region R5. The data 1314a is “(0, 0, 0, 0, 1, 0, 0, 1)”, the stacked structure data 1314a in the region R6 is “(0, 0, 1)”, and the stacked structure data 1314a in the region R7. Becomes “(0, 0, 0, 0, 1, 0, 0, 1)”, and the stacked structure data 1314a of the region R8 becomes “(0, 1, 0, 0, 1, 0, 0, 1)”. The layer structure data 1314a of the region R9 is “(0, 0, 0, 0, 1, 0, 0 And has a 1) ". The stacked structure data 1314a has the same value at any pixel position as long as the stacked structure is in the same region. Accordingly, the laminated structure data 1314a in each of the regions R1 to R9 has the same value at any pixel position.

  The layered structure data creation unit 1314 executes the above-described steps (1) to (7), so that the layered structure in each of the regions R1 to R9 when the Y coordinate value of the cutting line 10d is set to the initial value “i”. Data 1314a is created.

  (8) When the laminated structure data creating unit 1314 creates the laminated structure data 1314a in each of the regions R1 to R9 when the Y coordinate value of the cutting line 10d is set to the initial value “i”, in response to this, FIG. As shown, the pixel coordinates of each of the regions R1 to R9 are associated with the layered structure data 1314a, output to the main storage unit 1400, and stored in the layered structure data storage unit 1414 of the main storage unit 1400. FIG. 14 shows an example of the laminated structure data 1314a in which the pixel coordinates of the regions R1 to R9 are associated with each other. In FIG. 14, the data entered in the “pixel coordinate” column terminates from the coordinate range in the X-axis direction of each of the regions R1 to R9, that is, from the coordinate value of the start end of each of the regions R1 to R9 in the X-axis direction. The coordinate range up to the coordinate value is represented for each Y coordinate value.

  Thereafter, the layered structure data creating unit 1314 changes the Y coordinate value as described below, executes the same process, and creates layered structure data 1314a in all regions in the two-dimensional direction.

  (9) When the layered structure data creating unit 1314 creates the layered structure data 1314a at all the pixel positions in the X-axis direction when the Y coordinate value of the cutting line 10d is set to the initial value “i”, the layered structure data creating unit 1314 responds to this. Then, the Y coordinate value of the cutting line 10d is fixed to a value obtained by adding “+1” to the initial value “i”, that is, “i + 1”, and in the same manner as in the above-described step (2), the composite layer image data 10c Is cut in the X-axis direction to create image data of the cut surface of the composite layer image data 10c.

  (10) When the laminated structure data creation unit 1314 creates the image data of the cut surface of the composite layer image data 10c, in response to this, the cut of the composite layer image data 10c is performed in the same manner as in the step (3). From the image data of the surface, the range from the main surface to the white area of the opaque layer, that is, the visible range in the depth direction at each pixel position is detected at each of all the pixel positions in the X-axis direction.

  (11) When the stack structure data creation unit 1314 detects the visible range in the depth direction at each pixel position, in response to this, in the same manner as in the above-described step (4), in the depth direction at each pixel position. A white area and a black area within the visible range are detected.

  (12) When the laminated structure data creation unit 1314 detects a white region and a black region within the visible range in the depth direction at each pixel position, in response to this, in the same manner as the above-described step (5), The white area is set to code “1”, the black area is set to code “0”, and the white area and the black area within the visible range in the depth direction at each pixel position are converted into binary codes. Thereby, the laminated structure data creation unit 1314 creates the laminated structure data 1314a at each pixel position.

  (13) When the layered structure data creating unit 1314 creates the layered structure data 1314a at each pixel position, in response to this, the layered structure data 1314a between adjacent pixel positions is processed in the same manner as in the above-described step (6). Are detected, and each region when the Y coordinate value of the cutting line 10d is set to the initial value “i + 1” is detected.

  (14) When the laminated structure data creation unit 1314 detects each of the regions R1 to R9, in response to this, the Y coordinate value of the cutting line 10d is set to the initial value “i + 1” in the same manner as the above-described step (7). Layer structure data 1314a in each region is created.

  The layered structure data creation unit 1314 performs all the pixels in the X-axis direction when the Y coordinate value of the cutting line 10d is set to the initial value “i + 1” by executing the processes (9) to (14) described above. The laminated structure data 1314a at the position is created.

  (15) When the layered structure data creating unit 1314 creates the layered structure data 1314a in each region when the Y coordinate value of the cutting line 10d is set to the initial value “i + 1”, in response to this, the layered structure data creating unit 1314 described above (8) Similarly to the process of, the pixel coordinates of each region are associated with the stacked structure data 1314a, output to the main storage unit 1400, and stored in the stacked structure data storage unit 1414 of the main storage unit 1400.

  Thereafter, the stacked structure data creation unit 1314 repeatedly executes the above-described steps (9) to (15) until the Y coordinate value of the cutting line 10d reaches the end value.

  In this way, the laminated structure data creation unit 1314 creates the laminated structure data 1314a in all the regions in the two-dimensional direction, associates the pixel coordinates of each region with the laminated structure data 1314a, and outputs them to the main storage unit 1400. And stored in the laminated structure data storage unit 1414 of the main storage unit 1400.

  Next, a command (hereinafter referred to as a “substrate manufacturing data read command”) for instructing to read the substrate manufacturing data 54a from the data storage means 50 by the operation of the input unit 1100 such as a mouse or a keyboard by the operator is displayed on the substrate exterior. Input to the inspection apparatus 1000. The substrate manufacturing data read command may be input before the color data read command or the CAD data read command. In response to the input of the board manufacturing data reading command, the board appearance inspection apparatus 1000 causes the board manufacturing data reading unit 1122 of the input unit 1100 to receive, for example, from the board manufacturing data storage unit 54 of the data storage unit 50. As illustrated in FIG. 7, the board manufacturing data 54 a of the inspection board 10 b is read, and the read board manufacturing data 54 a is output to the main storage unit 1400 and stored in the board manufacturing data storage unit 1422 of the main storage unit 1400.

  As shown in FIG. 7, the board manufacturing data 54a of the inspection board 10b corresponds to each of the first silk layer 11b to the second silk layer 25b of the inspection board 10b, for example, “layers assigned to each layer”. It includes “number data”, “layer configuration data”, “material type / layer processing data”, and “material thickness data”. Therefore, in this embodiment, the board appearance inspection apparatus 1000 acquires, for example, “FR-4” as the material type data of the core material from the board manufacturing data 54a, and “FR-4” as the material type data of the prepreg material. ”,“ G24 ”as the material type data of the resist material,“ 200 W ”as the material type data of the silk material, and“ Cu ”as the material type data of the plating material (See FIG. 7). In this embodiment, the substrate appearance inspection apparatus 1000 obtains, for example, “SR” as the layer processing data for the surface layer (processing layer) from the substrate manufacturing data 54a, and the layer processing data for the middle layer (processing layer). "B / O" can be acquired as (see FIG. 7). In this embodiment, the substrate appearance inspection apparatus 1000 obtains, for example, “100 μm” as the material thickness data of the core material from the substrate manufacturing data 54a, “100 μm” as the material thickness data of the prepreg material, and the resist material “10 μm” is acquired as the material thickness data, “50 μm” is acquired as the material thickness data of the silk material, and “18 μm” is acquired as the material thickness data of the plating material (see FIG. 7).

  When the board manufacturing data 54a is stored in the board manufacturing data storage unit 1422, in response to this, the color data acquisition unit 1342 is activated.

  Hereinafter, the operation of the color data acquisition unit 1342 will be described with reference to FIG. FIG. 15 is an explanatory diagram of the color data acquisition unit.

  In response to the activation, the color data acquisition unit 1342 reads the substrate manufacturing data 54a from the substrate manufacturing data storage unit 1422, and material type data 312a and layer processing data 314a (see FIG. 6).

  When the color data acquisition unit 1342 acquires the material type data 312a and the layer processing data 314a, in response to this, the color data 1440 receives from the color database 1440 the material type data 312a and the layer processing data 314a. Corresponding color data 1342a (see FIG. 15) is read. FIG. 15 shows color data 1342 a read from the color database 1440 by the color data acquisition unit 1342. In the example illustrated in FIG. 15, the color data acquisition unit 1342 uses R (FR-4) that is a color feature value of R and a color feature of G as color data 1342 a corresponding to the material type data “FR-4”. The value G (FR-4) and the color characteristic value B (FR-4) of B color are read out. In addition, the color data acquisition unit 1342, as color data 1342a corresponding to the material type data “G24”, R (G24) which is a color feature value of R color and G (G24) and B which are color feature values of G color. B (G24) which is the color feature value of the color is read out. In addition, the color data acquisition unit 1342 includes R (200 W) and G (green) color feature values that are R (red) color feature values as color data 1342 a corresponding to the material type data “200 W”. G (200 W) and B (200 W), which is a color feature value of B (blue), are read out. In addition, the color data acquisition unit 1342 uses, as the color data 1342a corresponding to the material type data “Cu”, R (Cu) that is a color feature value of R color, and G (Cu) and B that are color feature values of G color. B (Cu), which is the color feature value of the color, is read out. In addition, the color data acquisition unit 1342 uses R (B / O), which is a color feature value of R color, and G (, which is a color feature value of G color, as color data 1342 a corresponding to the layer processing data “B / O”. B / O) and B (B / O) which is a color characteristic value of B color are read out. In addition, the color data acquisition unit 1342 uses, as the color data 1342a corresponding to the layer processing data “SR”, R (SR) that is the color feature value of R color and G (SR) and B that are the color feature value of G color. B (SR) which is the color feature value of the color is read out. In this way, the color data acquisition unit 1342 acquires the color data 1342a corresponding to each of the material type data 312a and the layer processing data 314a.

  When the color data acquisition unit 1342 acquires the color data 1342a corresponding to each of the material type data 312a and the layer processing data 314a, the color data acquisition unit 1342 outputs the color data 1342a to the main storage unit 1400 and stores it in the color data storage unit 1442 of the main storage unit 1400.

  At this time, the color data acquisition unit 1342 mainly stores the material thickness data of each layer included in the substrate manufacturing data 54a read from the substrate manufacturing data storage unit 1422 as data related to the color data 1342a of each layer. The data is output to the unit 1400 and stored in the color data storage unit 1442 of the main storage unit 1400.

  The above is the preliminary operation when inspecting the appearance of the inspection substrate 10b.

  When the preliminary operation is finished, the board appearance inspection apparatus 1000 is in a state where a command (hereinafter referred to as “inspection instruction”) for instructing the appearance of the inspection board 10b to be input can be input. Thereafter, an inspection command is input to the board appearance inspection apparatus 1000 by an operation of the input unit 1100 such as a mouse or a keyboard by the operator.

  In the board appearance inspection apparatus 1000, when an inspection command is input, in response to this, the imaging unit 1102 of the input unit 1100 is activated.

  When the imaging unit 1102 is activated, in response thereto, the imaging unit 1102 images the inspection board 10b and acquires the captured image data 1102a of the inspection board 10b. When the imaging unit 1102 acquires the captured image data 1102a of the inspection board 10b, in response to this, the imaging unit 1102 outputs the acquired captured image data 1102a to the main storage unit 1400, and the captured image data storage unit 1402 of the main storage unit 1400. To store.

  When the captured image data 1102a is stored in the captured image data storage unit 1402, the skew correction unit 1384 is activated in response to this.

  When the skew correction unit 1384 is activated, the skew correction unit 1384 reads out the captured image data 1102a from the captured image data 1402, and corrects the inclination (skew) of the read out captured image data 1102a by a known method. Data 1384a (see FIG. 16) is created. FIG. 16 is an explanatory diagram of the skew correction unit. FIG. 16 shows an example of an image given by the skew corrected image data 1384a obtained by correcting the skew of the captured image data 1102a at the angle θ. In FIG. 16, regions Rm, Rm + 1, Rn, Rn + 1, Rn + 2, and Rn + 3 are examples of inspection regions that are objects of visual inspection. The laminated structure in each inspection region is the same at any pixel position. For example, the stacked structures of the pixels Rm (1), Rm (2), Rm (3), etc. existing in the inspection region Rm are all the same.

  As a technique for correcting the skew, for example, there is a technique using an alignment mark as follows.

  That is, the inspection substrate 10b is provided with alignment marks called alignment marks (not shown) at predetermined positions. For example, if the shape of the inspection substrate 10b is a rectangle, one alignment mark is provided at each of the three vertices of the four vertices of the rectangle. The skew correction unit 1384 detects two of the three alignment marks arranged in the horizontal direction from the captured image data 1102a of the inspection substrate 10b. These two alignment marks arranged in the horizontal direction draw a line substantially parallel to the X axis by connecting the lines with each other. In addition, the skew correction unit 1384 detects two of the three alignment marks arranged in the vertical direction from the captured image data 1102a of the inspection board 10b. These two alignment marks arranged in the vertical direction draw a line substantially parallel to the Y-axis by connecting each other with a line. The skew correction unit 1384 includes a line drawn by two alignment marks arranged in the horizontal direction (hereinafter referred to as “horizontal line”) and a line drawn by two alignment marks arranged in the vertical direction (hereinafter referred to as “vertical line”). An alignment mark (hereinafter referred to as a “common alignment mark”) common to the two-dimensional coordinates, and the horizontal line and the vertical line overlap the X axis and the Y axis, respectively. The skew of the data 1102a is corrected. Accordingly, the skew correction unit 1384 creates skew correction image data 1384a. When the horizontal line and the vertical line do not overlap the X axis and the Y axis, respectively, the skew correction unit 1384 performs the following correction on the captured image data 1102a, thereby correcting the skew corrected image data. 1384a is created. That is, the skew correction unit 1384 determines the amount of deviation of the horizontal line from the X-axis at the position of the alignment mark at the end of the horizontal line and the vertical line at the position of the alignment mark at the end of the vertical line. For each position of the pixel unit according to each amount of deviation so that the rate of expansion / contraction of the interval between the pixels becomes larger toward the terminal side with respect to the captured image data 1102a. The correction is performed by changing the expansion / contraction ratio and expanding / contracting the interval between the pixels.

  In response to the creation of the skew correction image data 1384a, the skew correction unit 1384 outputs the created skew correction image data 1384a to the main storage unit 1400 and the skew correction image data storage unit 1484 of the main storage unit 1400. To store.

  When the skew correction image data 1384a is stored in the skew correction image data storage unit 1484, in response to this, the alignment unit 1386 is activated.

  Hereinafter, the operation of the alignment unit 1386 will be described with reference to FIG. FIG. 17 is an explanatory diagram of the alignment unit.

  When the alignment unit 1386 is activated, in response to this, the alignment unit 1386 reads the skew correction image data 1384a (see FIG. 16) from the skew correction image data storage unit 1484, and at the same time, the stack structure data storage unit 1414 reads the layer structure data 1314a (see FIG. 14).

  The alignment unit 1386 reads the skew correction image data 1384a from the skew correction image data storage unit 1484 and reads the layer structure data 1314a from the layer structure data storage unit 1414. In response to this, the alignment unit 1386 reads the skew correction image data 1384a. The color of each pixel (specifically, the R color gradation value, the G color gradation value, and the B color gradation value) is analyzed, and each area is detected for each color from the skew correction image data 1384a. . At this time, the alignment unit 1386 uses the above-described common alignment mark as the origin of the two-dimensional coordinates, and detects the pixel coordinates of each region based on the origin. However, since the pixel coordinates of each area detected at this time are detected based on the color of each pixel of the skew correction image data 1384a, the position is not accurate.

  When the alignment unit 1386 detects each region from the skew correction image data 1384a, the alignment unit 1386 extracts an inspection region that is a target region for appearance inspection from each region based on the stacked structure data 1314a. Here, it is assumed that the alignment unit 1386 has extracted, for example, inspection regions Rm, Rm + 1, Rn, Rn + 1, Rn + 2, and Rn + 3 shown in FIG. Note that the pixel coordinates of each inspection region extracted at this time are not accurate because each region to be extracted is detected based on the color of each pixel of the skew correction image data 1384a.

  When the alignment unit 1386 extracts the inspection region from each region, the alignment unit 1386 extracts data corresponding to each inspection region from the stacked structure data 1314a in response to the extraction.

  When the alignment unit 1386 extracts data corresponding to each inspection area from the laminated structure data 1314a, in response to this, each alignment area detected from the skew correction image data 1384a is extracted from the laminated structure data 1314a. Alignment data 1386a (see FIG. 17) is created by associating data corresponding to the extracted inspection regions.

  FIG. 17 shows an example of alignment data 1386 a created by the alignment unit 1386. In the example shown in FIG. 17, the alignment data 1386a is a combination of each inspection area and data corresponding to each inspection area extracted from the laminated structure data 1314a read from the laminated structure data storage unit 1414. It becomes the composition. Note that the configuration of the alignment data 1386a can be changed as appropriate according to the operation.

  When the registration unit 1386 creates the registration data 1386a, the registration unit 1386 outputs the created registration data 1386a to the main storage unit 1400 and stores it in the registration data storage unit 1486 of the main storage unit 1400. .

  When the alignment data 1386a is stored in the alignment data storage unit 1486, the area color feature data creation unit 1392 is activated in response to this.

  Hereinafter, the operation of the region color feature data creation unit 1392 will be described with reference to FIG. FIG. 18 is an explanatory diagram of a region color feature data creation unit.

  When activated, the area color feature data creation unit 1392 reads the alignment data 1386a from the alignment data storage unit 1486 in response to this, and further, the color data 1342a corresponding to the feature portion of each layer from the color data storage unit 1442. Is read. For example, if the layer is the first layer, the color data 1342a corresponding to the feature portion of each layer is the material “200W” of the first silk layer 11b that is the feature portion of the first layer. The corresponding R color feature value, that is, R (200 W), G color feature value, that is, G (200 W), and B color feature value, that is, B (200 W).

  When the area color feature data creation unit 1392 reads out the alignment data 1386a and the color data 1342a, in response to this, the area color feature data creation unit 1392 is based on the alignment data 1386a of each inspection area and the color data 1342a corresponding to the feature portion of each layer. Thus, region color feature data 1392a (see FIG. 18) of each inspection region is created.

  FIG. 18 shows an example of area color feature data 1392a created by the area color feature data creation unit 1392. The region color feature data 1392a of each inspection region represents the R color feature value, the G color feature value, and the B color feature value of each inspection region. In the example shown in FIG. 18, the region color feature data creation unit 1392 has a region color feature of the inspection region Rm based on (0, 1, 0, 0, 1, 1) which is the stacked structure data 1314a of the inspection region Rm. As data 1392a, R (0, G24, 0, 0, FR-4, B / O), G (0, G24, 0, 0, FR-4, B / O), and B (0, G24, 0) , 0, FR-4, B / O). The area color feature data creation unit 1392 also generates area color feature data of the inspection area Rm + 1 based on (0, 1, 0, 0, 1, 0, 0, 1), which is the layered structure data 1314a of the inspection area Rm + 1. 1392a as R (0, G24, 0, 0, FR-4, 0, 0, FR-4), G (0, G24, 0, 0, FR-4, 0, 0, FR-4), and B (0, G24, 0, 0, FR-4, 0, 0, FR-4) is created.

  In response to the creation of the region color feature data 1392a, the region color feature data creation unit 1392 outputs the created region color feature data 1392a to the main storage unit 1400 and stores the region color feature data in the main storage unit 1400. Stored in the unit 1492.

  In this embodiment, the R color feature value, the G color feature value, and the B color feature value represented by the region color feature data 1392a of each inspection region are values calculated by the following formulas 1 to 3, respectively. Become. The following formulas 1 to 3 and formulas 4 to 12 described later are merely examples, and other formulas can be applied.

  In this embodiment, when the region color feature data creation unit 1392 stores the region color feature data 1392a in the region color feature data storage unit 1492, in response to this, the region color of each inspection region is as follows. An R color feature value, a G color feature value, and a B color feature value represented by the feature data 1392a are calculated.

  That is, when the region color feature data creation unit 1392 stores the region color feature data 1392a in the region color feature data storage unit 1492, in response to this, the operation color storage unit 1488 reads the operation data 1488a, Material thickness data is read from the color data storage unit 1442. It is assumed that the calculation data 1488a read at this time includes the above-described formulas 1 to 3.

  When the area color feature data creation unit 1392 reads out the calculation data 1488a and the material thickness data, in response to this, the above-described equations 1 to 3 are extracted from the calculation data 1488a and the read material thickness data is used. Then, the R color feature value, the G color feature value, and the B color feature value represented by the region color feature data 1392a of each inspection region are calculated by the extracted equations 1 to 3 described above.

  For example, if the region is the inspection region Rm, the above Equations 1 to 3 are expressed by the following Equations 4 to 6.

  Here, the R color feature value (Rm) represents the R color feature value represented by the region color feature data 1392a of the region Rm, and the G color feature value (Rm) represents the G color represented by the region color feature data 1392a of the region Rm. The B color feature value (Rm) indicates the B color feature value represented by the region color feature data 1392a of the region Rm.

  Since the first resist layer 12b is the second layer from the top, the first resist layer 12b is i = 2, and the first prepreg layer 15b is the fifth layer from the top, so the first prepreg Since the layer 15b is i = 5 and the second treatment layer 16b is the sixth layer from the top, the second treatment layer 16b is i = 6 (see FIGS. 3 and 7). These data are extracted from the alignment data 1386a by the region color feature data creation unit 1392 and used to calculate the region color feature data.

  Further, the thicknesses Tr2, Tg2, and Tb2 of the first resist layer 12b are each 10 (μm) (see FIG. 7). Further, the thicknesses Tr5, Tg5, and Tb5 of the first prepreg layer 15b are each 100 (μm) (see FIG. 7). In addition, the thicknesses Tr6, Tg6, and Tb6 of the second treatment layer 16b are actually surface treatments of the layers, and thus there is no thickness, but a predetermined reference thickness (here, 10 (μm)). ). These data are read from the color data storage unit 1442 by the area color feature data creation unit 1392 and used to calculate the color feature data.

  As described above, the region color feature data creating unit 1392 uses the R color feature value (Rm), the G color feature value (Rm), and the B color feature value (Rm) as the color feature data in the region Rm of the inspection board 10b. calculate.

  The area color feature data creation unit 1392 performs such calculation for each inspection area. As a result, the area color feature data creation unit 1392 displays the R color feature value, the G color feature value, and the B color feature value (hereinafter referred to as “all colors”) represented by the area color feature data 1392a of all the inspection areas of the inspection board 10b. (Referred to as “feature value”).

  When the area color feature data creation unit 1392 calculates all color feature values, in response to this, the area color feature data creation unit 1392 outputs the calculated all color feature values to the main storage unit 1400, and the area color feature data storage unit 1492 of the main storage unit 1400. To store. At this time, the region color feature data storage unit 1492 stores the color feature value of each inspection region in association with the region color feature data 1392a of each inspection region.

  When all color feature values are stored in the area color feature data storage unit 1492, the inspection unit 1394 is activated in response to this.

  In response to the activation, the inspection unit 1394 reads the skew correction image data 1384a from the skew correction image data storage unit 1484 and also reads the region color feature data 1392a of each inspection region from the region color feature data storage unit 1492. . It should be noted that the area color feature data 1392a of each inspection area read out at this time includes a corresponding color feature value.

  When the inspection unit 1394 reads the skew correction image data 1384a from the skew correction image data storage unit 1484 and reads the region color feature data 1392a from the region color feature data storage unit 1492, in response to this, the region color feature data 1392a is read. Each inspection area is detected from the skew-corrected image data 1384a based on the pixel coordinates, and further, the color gradation value of each inspection area is detected.

  When the inspection unit 1394 detects the color gradation value of each inspection region, in response to this, the inspection unit 1394 extracts the color feature value of each inspection region represented by the region color feature data 1392a, and detects the color gradation of each detected inspection region. The value is compared with the extracted color feature value of each inspection area.

  In this comparison, when both coincide with each other within a predetermined error range, it means that the inspection substrate 10b is a non-defective product. In this case, the inspection unit 1394 determines that the appearance of the inspection substrate 10b is appropriate, and outputs, for example, an inspection result indicating “appropriate” to the output unit 1200. As a result, the output unit 1200 displays the test result indicating “appropriate” on the display or stores it in the storage device. The “error range” is stored in advance in a storage area (not shown) of the main storage unit 1400 or the calculation data storage unit 1488, and is read out by the inspection unit 1394 when color feature values are compared.

  Or in this comparison, when both do not correspond within a predetermined error range, it means that the inspection substrate 10b is defective. In this case, the inspection unit 1394 determines that the appearance of the inspection substrate 10b is inappropriate and outputs, for example, an inspection result indicating “inappropriate” to the output unit 1200. As a result, the output unit 1200 displays the test result indicating “inappropriate” on the display or stores it in the storage device.

  In this way, the board appearance inspection apparatus 1000 inspects the appearance of the inspection board 10b.

[Second Embodiment]
<Configuration of substrate visual inspection equipment>
Hereinafter, the configuration of the substrate visual inspection apparatus according to the second embodiment will be described with reference to FIG. FIG. 19 is a block diagram illustrating a configuration example of the board appearance inspection apparatus according to the second embodiment.

  The board appearance inspection apparatus 1000A is an apparatus for inspecting the appearance of the inspection board 10b, similarly to the board appearance inspection apparatus 1000 according to the first embodiment.

  As illustrated in FIG. 19, the board appearance inspection apparatus 1000A includes an input unit 1100, an output unit 1200, a main calculation unit 1300A, and a main storage unit 1400A.

  The input unit 1100 described above is the same component as the input unit 1100 (see FIG. 1) of the first embodiment. In this embodiment, like the input unit 1100 of the first embodiment, the imaging unit 1102 captures the inspection substrate 10b having the stacked structure shown in FIG. It is assumed that captured image data shown is acquired.

  The output unit 1200 described above is the same component as the output unit 1200 (see FIG. 1) of the first embodiment.

  The above-described main calculation unit 1300A is means for executing various calculations in the same manner as the main calculation unit 1300 (see FIG. 1) of the first embodiment. The main arithmetic unit 1300A is composed of a CPU. The main calculation unit 1300A includes a layer image data acquisition unit 1312, a material type data acquisition unit 1332, a layer processing data acquisition unit 1334, a material thickness data acquisition unit 1336, a layer configuration data acquisition unit 1338, a color data acquisition unit 1342A, and layer image data. A development unit 1352, a color layer image data creation unit 1354, a reference substrate data creation unit 1360, a skew correction unit 1384, and an inspection unit 1394 are provided as constituent elements.

  The main storage unit 1400A described above is a means for storing various programs and data, similarly to the main storage unit 1400 (see FIG. 1) of the first embodiment. The main storage unit 1400A is composed of a RAM. The main storage unit 1400A includes a captured image data storage unit 1402, a layer image data storage unit 1412, a material type data storage unit 1432, a layer processing data storage unit 1434, a material thickness data storage unit 1436, a layer configuration data storage unit 1438, and a color database. 1440, a color data storage unit 1442A, a color layer image data storage unit 1454, a reference board data storage unit 1460, a skew correction image data storage unit 1484, and a calculation data storage unit 1488 are provided as constituent elements.

  Hereinafter, the components of the main calculation unit 1300A and the main storage unit 1400A will be sequentially described.

  The layer image data acquisition unit 1312 is the same component as the layer image data acquisition unit 1312 (see FIG. 1) of the first embodiment.

  The material type data acquisition unit 1332 reads the substrate manufacturing data 54a from the substrate manufacturing data storage unit 54, and material type data representing the type of material used for forming each layer of the substrate from the read substrate manufacturing data 54a. This is a functional unit that extracts 312 a and stores it in the material type data storage unit 1432.

  The layer processing data acquisition unit 1334 reads the substrate manufacturing data 54a from the substrate manufacturing data storage unit 54, and extracts the layer processing data 314a representing the processing content of the layer being processed from the read substrate manufacturing data 54a. Thus, it is functional means for storing in the layer processing data storage unit 1434.

  In the first embodiment, the color data acquisition unit 1342 extracts the material type data 312a and the layer processing data 314a from the substrate manufacturing data 54a. However, in this embodiment, the material type data acquisition unit 1332 extracts the material type data 312a from the substrate manufacturing data 54a, and the layer processing data acquisition unit 1334 extracts the layer processing data 314a from the substrate manufacturing data 54a. It is the composition to do. Therefore, in this embodiment, the color data acquisition unit 1342A does not extract the material type data 312a and the layer processing data 314a, but extracts the material types extracted by the material type data acquisition unit 1332 and the layer processing data acquisition unit 1334. Only the data 312a and the layer processing data 314a are used for processing. In this embodiment, since the layer processing data 314a is used not only for the color data acquisition unit 1342A but also for the reference substrate data creation unit 1360, the layer processing data 314a is extracted in advance and the color data acquisition unit 1342A. The reference substrate data creation unit 1360 uses the layer processing data 314a extracted in advance to improve the processing speed in the color data acquisition unit 1342A and the reference substrate data creation unit 1360.

  The material thickness data acquisition unit 1336 reads the substrate manufacturing data 54a from the substrate manufacturing data storage unit 54, and extracts the material thickness data 316a representing the thickness of the material of each layer of the substrate from the read substrate manufacturing data 54a. , Functional means for storing in the material thickness data storage unit 1436.

  The layer configuration data acquisition unit 1338 reads the substrate manufacturing data 54a from the substrate manufacturing data storage unit 54, extracts layer configuration data 318a representing the configuration of each layer of the substrate from the read substrate manufacturing data 54a, and stores the layer configuration This is a functional means for storing in the data storage unit 1438.

  Similar to the color data acquisition unit 1342 (see FIG. 1) of the first embodiment, the color data acquisition unit 1342A reads the color data 500a from the color database 1440, and each layer of the substrate from the read color data 500a. Is a functional unit that extracts color data 1342a determined according to the characteristic portion of the color data and stores it in the color data storage unit 1442A.

  In the first embodiment, the color data acquisition unit 1342 extracts the material type data 312a and the layer processing data 314a from the substrate manufacturing data 54a, and extracts the extracted material type data 312a and the layer processing data 314a. Are used for the extraction process of the color data 1342a. However, in this embodiment, the color data acquisition unit 1342A does not extract the material type data 312a and the layer processing data 314a, but uses the previously extracted material type data 312a and the layer processing data 314a of the color data 1342a. Used for extraction processing.

  The layer image data developing unit 1352 is a functional unit that reads the layer image data 1312a of each layer of the substrate from the layer image data storage unit 1412 and develops it as image data. Here, “development” means an operation of creating data as image data in which the position coordinates of each dot in the image are specified.

  Based on the layer image data 1312a and the color data 1342a, the color layer image data creation unit 1354 creates data (hereinafter referred to as “color layer image data”) 1354a that represents the color image of each layer of the substrate. This is a functional means for storing in the layer image data storage unit 1454. The color layer image data 1354a includes, for example, a color corresponding to the color data 1342a of the material type constituting the white region or a white region in the white region of the layer image data 1312a illustrated in FIGS. It is created by synthesizing colors corresponding to the color data 1342a of the processing to be performed.

  The reference substrate data creation unit 1360 is a functional unit that artificially creates reference substrate data 1360a that serves as a reference for inspecting the appearance of the inspection substrate 10b. In this embodiment, the reference board data 1360a includes, for example, color laminated image data 1362a, color surface image data 1364a, area color feature data 1366a, and inspection area data 1368a, which will be described later.

  The reference substrate data creation unit 1360 includes a color layer image data creation unit 1362, a color surface image data creation unit 1364, a region color feature data creation unit 1366, and an inspection region data creation unit 1368.

  The color layered image data creation unit 1362 creates data (hereinafter referred to as “color layered image data”) 1362a representing a color image of the layered structure of the substrate as shown in FIG. 23, for example, and a reference substrate data storage unit 1460 is a functional means stored in 1460.

  FIG. 23 is an explanatory diagram of the color layered image data creation unit. FIG. 23 shows an example of an image provided by the color layer image data 1362 a created by the color layer image data creation unit 1362.

  In the example shown in FIG. 23, the color laminate image data 1362a simply shows a laminate structure in a certain section of the inspection substrate 10b. In this example, the inspection substrate 10b includes, in order from the top, the first silk layer 11b of the first layer, the first resist layer 12b of the second layer, the first processing layer 13b of the third layer, A fourth copper plating layer 14b, a fifth prepreg layer 15b, a sixth second treatment layer 16b, a seventh copper plating layer 17b, An eighth core layer 18b, a ninth copper plating layer 19b, a tenth third treatment layer 20b, an eleventh second prepreg layer 21b, and a twelfth layer 15th layer consisting of the fourth copper plating layer 22b, the 13th fourth treatment layer 23b, the 14th second resist layer 24b, and the 15th second silk layer 25b. It has a laminated structure.

  The color layered image data creation unit 1362 includes layer processing data 314a read from the layer processing data storage unit 1434, material thickness data 316a read from the material thickness data storage unit 1436, and layer configuration data read from the layer configuration data storage unit 1438. The color layered image data 1362a shown in FIG. 23 is created based on any one data of 318a or combination data of two or more and the color layer image data 1354a read from the color layer image data storage unit 1454.

  The color surface image data creation unit 1364 creates data (hereinafter referred to as “color surface image data”) 1364a representing a color image of the main surface of the substrate, for example, as shown in FIG. 1460 is a functional means stored in 1460.

  FIG. 24 is an explanatory diagram of the color surface image data creation unit. FIG. 24 shows an example of the color surface image data 1364 a created by the color surface image data creation unit 1364. As shown in FIG. 24, the color surface image data 1364a indicates the color pattern of the main surface of the substrate, for example, the “upper surface”. In FIG. 24, two arrows indicate the X-axis direction and the Y-axis direction.

  The color surface image data creation unit 1364 creates the color surface image data 1364a shown in FIG. 24 based on the color layer image data 1362a created by the color layer image data creation unit 1362.

  The area color feature data creation unit 1366 creates the area color feature data 1366a representing the color feature values of all the pixels of the inspection board 10b as shown in FIG. 27, for example, and stores it in the reference board data storage unit 1460. It is.

  FIG. 27 is an explanatory diagram of a region color feature data creation unit. FIG. 27 shows an example of area color feature data 1366a created by the area color feature data creation unit 1366.

  The area color feature data creation unit 1366 calculates the color feature values of all the pixels of the inspection board 10b in the color surface image data 1364a created by the color surface image data creation unit 1364, so that the area color feature data shown in FIG. 1366a is created.

  The inspection area data creation unit 1368 creates data (hereinafter referred to as “inspection area data”) 1368a representing the position of the area to be inspected on the board, for example, as shown in FIG. 1460 is a functional means stored in 1460.

  FIG. 28 is an explanatory diagram of the inspection area data creation unit. FIG. 28 shows an example of inspection region data 1368a created by the inspection region data creation unit 1368.

  The inspection area data 1368a is coordinate data representing the position of each internal area divided by the color pattern outline of the color surface image data 1364a. The inspection area data 1368a is associated with area color feature data 1366a of each area for each area.

  Based on the color surface image data 1364a created by the color surface image data creation unit 1364, the inspection area data creation unit 1368 identifies the position of each internal region delimited by the color pattern outline of the color surface image data 1364a. Thus, the inspection area data 1368a shown in FIG. 28 is created.

  The skew correction unit 1384 is a component similar to the skew correction unit 1384 (see FIG. 1) of the first embodiment.

  The inspection unit 1394 is a component similar to the inspection unit 1394 (see FIG. 1) of the first embodiment.

  The captured image data storage unit 1402 is the same component as the captured image data storage unit 1402 (see FIG. 1) of the first embodiment.

  The layer image data storage unit 1412 is the same component as the layer image data storage unit 1412 (see FIG. 1) of the first embodiment.

  The material type data storage unit 1412 is a storage area for storing the material type data 312 a acquired by the material type data acquisition unit 1332.

  The layer processing data storage unit 1434 is a storage area for storing the layer processing data 314 a acquired by the layer processing data acquisition unit 1334.

  The material thickness data storage unit 1436 is a storage area for storing the material thickness data 316 a acquired by the material thickness data acquisition unit 1336.

  The layer configuration data storage unit 1438 is a storage area for storing the layer configuration data 318 a acquired by the layer configuration data acquisition unit 1338.

  The color database 1440 is the same component as the color database 1440 (see FIG. 1) of the first embodiment.

  The color data storage unit 1442A is a storage area for storing the color data 1342a acquired by the color data acquisition unit 1342A.

  The color layer image data storage unit 1454 is a storage area for storing the color layer image data 1354a created by the color layer image data creation unit 1354.

  The reference board data storage unit 1460 is a storage area for storing the reference board data 1360a created in a pseudo manner by the reference board data creation unit 1360. The reference substrate data storage unit 1460 stores, for example, color laminated image data 1362a, color surface image data 1364a, region color feature data 1366a, and inspection region data 1368a as reference substrate data 1360a.

  The skew correction image data storage unit 1484 is the same component as the skew correction image data storage unit 1484 (see FIG. 1) of the first embodiment.

  The calculation data storage unit 1488 is the same component as the calculation data storage unit 1488 (see FIG. 1) of the first embodiment.

<Data acquired from CAD data>
Similar to the substrate appearance inspection apparatus 1000 according to the first embodiment, the substrate appearance inspection apparatus 1000A acquires layer image data 1312a of each layer of the inspection substrate 10b based on the CAD data 52a (FIG. 4 and FIG. 4). 5 (A) to (D)). The acquired layer image data 1312a is stored in the layer image data storage unit 1412 of the main storage unit 1400A.

<Data obtained from substrate manufacturing data>
Hereinafter, data acquired from the substrate manufacturing data 54a, that is, the material type data 312a, the layer processing data 314a, the material thickness data 316a, and the layer configuration data 318a will be described with reference to FIG. FIG. 20 is an explanatory diagram of substrate manufacturing data.

  As shown in FIG. 20, the board manufacturing data reading unit 1122 reads the board manufacturing data 54 a (see FIG. 7) from the board manufacturing data storage unit 54. As described above, the substrate manufacturing data 54a is the “layer number data assigned to each layer corresponding to each layer of the inspection substrate 10b, that is, each of the first silk layer 11b to the second silk layer 25b shown in FIG. ”,“ Layer configuration data ”,“ material type / layer processing data ”, and“ material thickness data ”.

  When the substrate manufacturing data reading unit 1122 reads the substrate manufacturing data 54a, in response to the reading, the substrate manufacturing data 54a is obtained from the material type data acquisition unit 1332, the layer processing data acquisition unit 1334, the material thickness data acquisition unit 1336, and the layer configuration. The data is output to the data acquisition unit 1338.

  When the substrate manufacturing data 54a is input from the substrate manufacturing data reading unit 1122, the material type data acquiring unit 1332 acquires the material type data 312a from the substrate manufacturing data 54a in response to the input, and the material type data 312a is used as the material. Stored in the type data storage unit 1432.

  In the example illustrated in FIG. 20, the material type data acquisition unit 1332 includes, as the material type data 312a, for example, core material type data 313a, prepreg material type data 313b, resist material type data 313c, silk material type data 313d, and plating. Material type data 313e and the like are stored.

  When the substrate manufacturing data 54a is input from the substrate manufacturing data reading unit 1122, the layer processing data acquisition unit 1334 acquires the layer processing data 314a from the substrate manufacturing data 54a in response to the input, and the layer processing data 314a is stored in the layer processing data 314a. Stored in the processing data storage unit 1434.

  In the example illustrated in FIG. 20, the layer processing data acquisition unit 1334 stores, for example, middle layer processing data 315a and surface layer processing data 315b as the layer processing data 314a.

  When the substrate manufacturing data 54a is input from the substrate manufacturing data reading unit 1122, the material thickness data acquiring unit 1336 acquires the material thickness data 316a from the substrate manufacturing data 54a in response to the input, and the material thickness data 316a is used as the material. Stored in the thickness data storage unit 1436.

  In the example shown in FIG. 20, the material thickness data acquisition unit 1336 stores, for example, core material thickness data 317a, prepreg material thickness data 317b, resist material thickness data 317c, and the like as material thickness data 316a.

  When the substrate manufacturing data 54a is input from the substrate manufacturing data reading unit 1122, the layer configuration data acquiring unit 1338 acquires the layer configuration data 318a from the substrate manufacturing data 54a in response to the input, and the layer configuration data 318a is stored in the layer. The data is stored in the configuration data storage unit 1438.

  The layer configuration data 318a is data representing the configuration of each layer of the substrate, such as the number of layers and the shape of each layer. The layer configuration data 318a is used, for example, for identifying whether each layer is a transparent layer or an opaque layer.

<Data stored in the color database>
The board appearance inspection apparatus 1000A acquires the color data 500a from the color database creation apparatus 500 as in the board appearance inspection apparatus 1000 according to the first embodiment (see FIG. 9). The acquired color data 500a is stored in the color database 1440 of the main storage unit 1400A.

<Operation of PCB visual inspection equipment>
Hereinafter, the operation of the substrate appearance inspection apparatus will be described with reference to FIG.

  When inspecting the appearance of the inspection substrate 10b, the substrate appearance inspection apparatus 1000A performs the following preliminary operation in advance.

  First, a command for instructing to read the color data 500a from the color database creation device 500 by the operation of the input unit 1100 such as a mouse or a keyboard by the operator of the board appearance inspection device 1000A (hereinafter referred to as “color data read command”). Is input to the board appearance inspection apparatus 1000A. In response to the input of the color data reading command, the board appearance inspection device 1000A receives the color data 500a transmitted from the color database creation device 500 by the color data reading unit 1132 of the input unit 1100. Upon receiving the color data 500a, the color data reading unit 1132 outputs the received color data 500a to the main storage unit 1400A and stores it in the color database 1440 of the main storage unit 1400A.

  Next, a command (hereinafter referred to as “CAD data read command”) for instructing to read out the CAD data 52a from the data storage means 50 by the operation of the input unit 1100 such as a mouse or a keyboard by the operator is provided. 1000A is input. The CAD data read command may be input before the color data read command is input. In response to the input of the CAD data reading command, the board appearance inspection apparatus 1000A causes the CAD data reading unit 1112 of the input unit 1100 to read the inspection board 10b from the CAD data storage unit 52 of the data storage unit 50. The CAD data 52 a is read, and the read CAD data 52 a is output to the layer image data acquisition unit 1312. When the CAD data 52a is input from the CAD data reading unit 1112, the layer image data acquisition unit 1312 receives the CAD data 52a for each layer of the inspection board 10b, for example, as shown in FIGS. D) conversion into binary layer image data of white and black as shown in D). Thereby, the layer image data acquisition unit 1312 acquires the layer image data 1312a of each layer of the inspection substrate 10b. 5A to 5D, the color corresponding to the color data 1342a is synthesized by the color layer image data creation unit 1354 later as described above.

  When the layer image data acquisition unit 1312 acquires the layer image data 1312a of each layer of the inspection board 10b, in response to this, the layer image data 1312a outputs each of the layer image data 1312a to the main storage unit 1400A, and the layers of the main storage unit 1400A The image data is stored in the image data storage unit 1412.

  Next, a command (hereinafter referred to as a “substrate manufacturing data read command”) for instructing to read the substrate manufacturing data 54a from the data storage means 50 by the operation of the input unit 1100 such as a mouse or a keyboard by the operator is displayed on the substrate exterior. Input to the inspection apparatus 1000A. The substrate manufacturing data read command may be input before the color data read command or the CAD data read command. In response to the input of the board manufacturing data reading command, the board appearance inspection apparatus 1000A causes the board manufacturing data reading unit 1122 of the input unit 1100 to receive, for example, from the board manufacturing data storage unit 54 of the data storage unit 50, for example. As shown in FIG. 7, the board manufacturing data 54a of the inspection board 10b is read, and the read board manufacturing data 54a is read from the material type data acquisition unit 1332, the layer processing data acquisition unit 1334, the material thickness data acquisition unit 1336, and the layer configuration data. The data is output to the acquisition unit 1338.

  As shown in FIG. 7, the board manufacturing data 54a of the inspection board 10b corresponds to each of the first silk layer 11b to the second silk layer 25b of the inspection board 10b, for example, “layers assigned to each layer”. It includes “number data”, “layer configuration data”, “material type / layer processing data”, and “material thickness data”.

  When the board manufacturing data 54a of the inspection board 10b is input from the board manufacturing data reading section 1122, the material type data acquisition unit 1332 responds to this from the board manufacturing data 54a for each layer of the inspection board 10b. The type data 312a is extracted. Thereby, the material type data acquisition unit 1332 acquires the material type data 312a used for each layer of the inspection substrate 10b. In this embodiment, the material type data acquisition unit 1332 acquires, for example, “FR-4” as the material type data 312a of the core material, acquires “FR-4” as the material type data 312a of the prepreg material, “G24” is acquired as the material type data 312a of the resist material, “200W” is acquired as the material type data 312a of the silk material, and “Cu” is acquired as the material type data 312a of the plating material (see FIG. 7).

  When the material type data acquisition unit 1332 acquires the material type data 312a of the inspection board 10b, in response to this, the material type data acquisition unit 1332 outputs the material type data 312a to the main storage unit 1400A, and the material type data storage unit of the main storage unit 1400A. 1432.

  In addition, when the board manufacturing data 54a of the inspection board 10b is input from the board manufacturing data reading unit 1122, the layer processing data acquisition unit 1334 performs processing of the inspection board 10b from the board manufacturing data 54a in response thereto. For each layer, layer processing data 314a is extracted. Thereby, the layer processing data acquisition unit 1334 acquires the layer processing data 314a applied to each layer of the inspection substrate 10b. In this embodiment, for example, the layer processing data acquisition unit 1334 acquires “SR” as the layer processing data 314a for the surface processing, and acquires “B / O” as the layer processing data 314a for the middle processing (FIG. 7). reference).

  When the layer processing data acquisition unit 1334 acquires the layer processing data 314a of the inspection board 10b, in response to this, the layer processing data 314a outputs the layer processing data 314a to the main storage unit 1400A, and the layer processing data storage unit of the main storage unit 1400A 1434.

  In addition, when the board manufacturing data 54a of the inspection board 10b is input from the board manufacturing data reading unit 1122, the material thickness data acquisition unit 1336 responds to each layer of the inspection board 10b from the board manufacturing data 54a. The material thickness data 316a is extracted. Thereby, the material thickness data acquisition part 1336 acquires the material thickness data 316a of each layer of the test substrate 10b. In this embodiment, the material thickness data acquisition unit 1336 acquires, for example, “100 μm” as the material thickness data 316a of the core material, and acquires “100 μm” as the material thickness data 316a of the prepreg material. “10 μm” is acquired as the thickness data, “50 μm” is acquired as the material thickness data 316a of the silk material, and “18 μm” is acquired as the material thickness data 316a of the plating material (see FIG. 7).

  When the material thickness data acquisition unit 1336 acquires the material thickness data 316a of the inspection board 10b, in response to this, the material thickness data acquisition unit 1336 outputs the material thickness data 316a to the main storage unit 1400A, and the material thickness data storage unit of the main storage unit 1400A. 1436 is stored.

  In addition, when the board manufacturing data 54a of the inspection board 10b is input from the board manufacturing data reading unit 1122, the layer configuration data acquisition unit 1338 responds to each layer of the inspection board 10b from the board manufacturing data 54a. The layer configuration data 318a is extracted. Thereby, the layer configuration data acquisition unit 1338 acquires the layer configuration data 318a of each layer of the inspection substrate 10b.

  When the layer configuration data acquisition unit 1338 acquires the layer configuration data 318a of the inspection substrate 10b, in response to this, the layer configuration data acquisition unit 1338 outputs the layer configuration data 318a to the main storage unit 1400A, and the layer configuration data storage unit of the main storage unit 1400A. 1438.

  When the material type data 312a, the layer processing data 314a, the material thickness data 316a, and the layer configuration data 318a are stored in the corresponding storage units 1432 to 1438, the color data acquisition unit 1342A is activated in response thereto. .

  Hereinafter, the operation of the color data acquisition unit 1342A will be described with reference to FIGS. 21 and 22 are explanatory diagrams of the color data acquisition unit.

  As shown in FIG. 21, first, the color data acquisition unit 1342A reads the material type data 312a from the material type data storage unit 1432 and reads the layer processing data 314a from the layer processing data storage unit 1434.

  When the color data acquisition unit 1342A reads the material type data 312a and the layer processing data 314a, in response to this, the color data acquisition unit 1342A corresponds to the material type data 312a and the layer processing data 314a in the color data 500a from the color database 1440. Color data 1342a (see FIG. 21) is read. FIG. 21 shows color data 1342a read from the color database 1440 by the color data acquisition unit 1342A. In the example illustrated in FIG. 21, the color data acquisition unit 1342A uses R (FR-4) which is a color feature value of R color and a color feature of G color as color data 1342a corresponding to the material type data “FR-4”. The value G (FR-4) and the color feature value B (FR-4) of B color are extracted. Further, the color data acquisition unit 1342A, as color data 1342a corresponding to the material type data “G24”, R (G24) which is a color feature value of R color and G (G24) and B which are color feature values of G color. B (G24) which is the color feature value of the color is extracted. In addition, the color data acquisition unit 1342A includes R (200W) and G (green) color feature values that are R (red) color feature values as color data 1342a corresponding to the material type data “200W”. G (200 W) and B (200 W) which is a color feature value of B (blue) are extracted. Further, the color data acquisition unit 1342A, as color data 1342a corresponding to the material type data “Cu”, R (Cu) that is a color feature value of R color and G (Cu) and B that are color feature values of G color. B (Cu) that is a color feature value of the color is extracted. Further, the color data acquisition unit 1342A, as the color data 1342a corresponding to the layer processing data “B / O”, R (B / O) which is a color feature value of R color and G (which is a color feature value of G color) B / O) and B (B / O) which is a color characteristic value of B color are extracted. Further, the color data acquisition unit 1342A, as the color data 1342a corresponding to the layer processing data “SR”, R (SR) that is the color feature value of R color and G (SR) and B that are the color feature values of G color. B (SR) that is a color feature value of the color is extracted. In this way, the color data acquisition unit 1342A acquires the color data 1342a corresponding to each of the material type data 312a and the layer processing data 314a.

  When the color data acquisition unit 1342A acquires the color data 1342a corresponding to the material type data 312a and the color data 1342a corresponding to the layer processing data 314a, the color data acquisition unit 1342A outputs the color data 1342A to the main storage unit 1400A and the color data storage unit 1442 of the main storage unit 1400A. To store.

  When the color data 1342a corresponding to each of the material type data 312a and the layer processing data 314a is stored in the color data storage unit 1442A, the layer image data development unit 1352 is activated in response thereto.

  The layer image data development unit 1352 reads out the layer image data 1312a of all the layers of the inspection board 10b from the layer image data storage unit 1412 for each layer of the inspection board 10b, and converts each of the read layer image data 1312a to white. And binary image data of black.

  When the layer image data 1312a of all the layers of the inspection board 10b is developed as image data, the color layer image data creation unit 1354 is activated in response to this.

  The color layer image data creation unit 1354 reads the color data 1342a acquired by the color data acquisition unit 1342A from the color data storage unit 1442A for each layer of the inspection substrate 10b, and reads the read color for each layer of the inspection substrate 10b. The color corresponding to each of the data 1342a is combined with the white region (see FIGS. 5A to 5D) of the layer image data 1312a developed by the layer image data development unit 1352. As a result, the color layer image data creation unit 1354 creates color layer image data 1354a for each layer of the inspection substrate 10b.

  When the color layer image data creation unit 1354 creates the color layer image data 1354a of each layer of the inspection board 10b, in response to this, the color layer image data 1354a is output to the main storage unit 1400A, and the main storage unit It is stored in the color layer image data storage unit 1454 of 1400A.

  When each of the color layer image data 1354a is stored in the color layer image data storage unit 1454, the color layer image data creation unit 1362 is activated.

  The color layered image data creation unit 1362 reads the layer processing data 314a acquired by the layer processing data acquisition unit 1334 from the layer processing data storage unit 1434 for each layer of the inspection substrate 10b, and reads the material thickness from the material thickness data storage unit 1436. The material thickness data 316a acquired by the data acquisition unit 1336 is read, the layer configuration data 318a acquired by the layer configuration data acquisition unit 1338 is read from the layer configuration data storage unit 1438, and further, the color layer image data storage unit 1454 reads the color The color layer image data 1354a of each layer created by the layer image data creation unit 1354 is read out.

  When the color layer image data creation unit 1362 reads out the layer processing data 314a, the material thickness data 316a, the layer configuration data 318a, and the color layer image data 1354a of each layer for each layer of the inspection substrate 10b, The color layer image data 1354a is overlaid according to the configuration of the inspection substrate 10b. At this time, the color layer image data creation unit 1362 has a color layer image data 1354a corresponding to each layer of the inspection substrate 10b indicated by the layer configuration data 318a and a color layer image corresponding to a layer subjected to the processing indicated by the layer processing data 314a. The data 1354a is arranged in the order of the layers indicated by the layer configuration data 318a, and the color layer image data 1354a is overlaid by the thickness of each layer indicated by the material thickness data 316a. Thereby, the color layered image data creation unit 1362 creates color layered image data 1362a (see FIG. 23).

  When the color layered image data creation unit 1362 creates the color layered image data 1362a, in response to this, the color layered image data 1362a outputs the color layered image data 1362a to the main storage unit 1400A, and the reference board data storage unit 1460 of the main storage unit 1400A. To store.

  When the color laminated image data 1362a is stored in the reference substrate data storage unit 1460, the color surface image data creation unit 1364 is activated.

  The color surface image data creation unit 1364 reads the color laminated image data 1362a from the reference substrate data storage unit 1460 and reads the layer configuration data 318a from the layer configuration data storage unit 1438.

  When the color surface image data creation unit 1364 reads the color layer image data 1362a from the reference substrate data storage unit 1460 and the layer configuration data 318a from the layer configuration data storage unit 1438, in response to this, the color layer image data data For 1362a, whether each layer is a transparent layer or an opaque layer is specified for each region based on the layer configuration data 318a.

  When the color surface image data creation unit 1364 specifies whether each layer is a transparent layer or an opaque layer for each region, in response to this, an opaque layer (however, the outermost layer) is provided for each region. The layer formed outside the opaque layer, that is, on the exposed surface side is extracted as a layer in the visible range in the depth direction. As a result, the color surface image data creation unit 1364 extracts the color layer image data 1354a of each layer within the visible range in the depth direction for each region from the color layered image data 1362a. In this embodiment, “color layer image data 1354a of each layer located in the visible range in the depth direction” refers to the first silk layer 11b, the first treatment layer 13b, and the first copper plating layer, which are opaque layers. 14b, second treatment layer 16b, second copper plating layer 17b, core layer 18b, third copper plating layer 19b, third treatment layer 20b, fourth copper plating layer 22b, fourth treatment layer 23b, and second silk layer This means color layer image data 1354a of a layer formed outside 25b (however, the outermost one). The layers formed outside the opaque layer (however, the outermost layer) can be seen through because the light transmittance of each layer is higher than a predetermined threshold value. On the other hand, the layer on the inner side, that is, the core side of the opaque layer (however, the outermost layer) becomes invisible because the light transmittance of the opaque layer is lower than a predetermined threshold value.

  When the color surface image data creation unit 1364 extracts the color layer image data 1354a of each layer located in the visible range in the depth direction for each region, in response to this, the color surface image data creation unit 1364 is located in the extracted visible range in the depth direction. The respective colors corresponding to the color layer image data 1354a of each layer are synthesized. Thereby, the color surface image data creation unit 1364 creates color surface image data 1364a (see FIG. 24).

  When the color surface image data creation unit 1364 creates the color surface image data 1364a, in response to this, the color surface image data creation unit 1364 outputs the color surface image data 1364a to the main storage unit 1400A, and the reference board data storage unit 1460 of the main storage unit 1400A. To store.

  When the color surface image data 1364a is stored in the reference board data storage unit 1460, the area color feature data creation unit 1366 is activated.

  The area color feature data creation unit 1366 reads the color surface image data 1364a and the color laminated image data 1362a from the reference substrate data storage unit 1460.

  When the color surface image data 1364a and the color laminated image data 1362a are read, the area color feature data creation unit 1366 identifies the inspection area of the inspection substrate 10b based on the color surface image data 1364a. In addition, this inspection area | region is each internal area | region divided with the outline of the color pattern of the test | inspection board | substrate 10b. For example, as shown in FIG. 24, in the color surface image data 1364a, the difference in the laminated structure appears as a difference in the color of the color pattern. This color difference indicates a difference in the inspection area. The area color feature data creation unit 1366 identifies the inspection area by identifying this color difference.

  When the region color feature data creation unit 1366 identifies the inspection region of the inspection substrate 10b, the region color feature data creation unit 1366 calculates region color feature data 1366a of the inspection substrate 10b for each inspection region based on the color laminated image data 1362a. To do. The region color feature data 1366a includes red (R) tone values, green (G) tone values, and blue (B) in the color layer image data 1354a of each layer located in the visible range in the depth direction. Are extracted as an R color feature value, a G color feature value, and a B color feature value, respectively. The region color feature data 1366a has the same value as a matter of course if the region has the same color in the color surface image data 1364a.

  Hereinafter, the calculation of the region color feature data 1366a will be described in detail with reference to FIGS. In addition, FIGS. 25-27 is explanatory drawing of the area | region color characteristic data preparation part of this embodiment, respectively. FIG. 25 shows, as an example, the positions of viewpoints 90a to 90e for viewing one main surface (upper surface in the example shown in FIG. 25) and visible ranges r90a to r90e in the depth direction at the respective viewpoints 90a to 90e. ing. FIG. 26 shows the laminated structure data in the visible range in the depth direction of the inspection substrate 10b at the positions of the respective viewpoints 90a to 90e. FIG. 27 shows area color feature data 1366a of the inspection board 10b at the positions of the respective viewpoints 90a to 90e.

  The area color feature data 1366a is obtained by calculating a combination of colors with respect to the overlapping of each layer in the visible range in the depth direction of the inspection substrate 10b. This combination is as follows.

  That is, as shown in FIG. 25, for example, when one main surface (upper surface in the example shown in FIG. 25) of the inspection substrate 10b is viewed with the viewpoint aligned with the arrow 90a, the first silk layer 11b is an opaque layer. Therefore, the layer below the first silk layer 11b is not visible. Therefore, when the viewpoint is aligned with the arrow 90a and one main surface (the upper surface in the example shown in FIG. 25) of the inspection substrate 10b is viewed, only the first silk layer 11b is visible. Therefore, the color combination at the viewpoint 90a is only the color of the first silk layer 11b.

  Further, for example, when the viewpoint is aligned with the arrow 90b and the upper surface of the inspection substrate 10b is viewed, the first processing layer 13b made of copper is an opaque layer, so that the layer below the first processing layer 13b cannot be seen. Therefore, when the viewpoint is aligned with the arrow 90b and the upper surface of the inspection substrate 10b is viewed, the first processing layer 13b can be seen through the first resist layer 12b. Therefore, the color combination at the viewpoint 90b is the color of the first resist layer 12b and the color of the first processing layer 13b.

  Further, for example, when the viewpoint is aligned with the arrow 90c and the upper surface of the inspection substrate 10b is viewed, the second processing layer 16b made of copper is an opaque layer, so that the layer below the second processing layer 16b cannot be seen. Therefore, when the viewpoint is aligned with the arrow 90c and the upper surface of the inspection substrate 10b is viewed, the second processing layer 16b can be seen through the first resist layer 12b and the first prepreg layer 15b. Therefore, the color combination at the viewpoint 90c is the color of the first resist layer 12b, the color of the first prepreg layer 15b, and the color of the second processing layer 16b.

  Further, for example, when the viewpoint is aligned with the arrow 90d and the upper surface of the inspection substrate 10b is viewed, the first processing layer 13b made of copper is an opaque layer, so that the layer below the first processing layer 13b cannot be seen. Therefore, when the viewpoint is aligned with the arrow 90d and the upper surface of the inspection substrate 10b is viewed, only the first processing layer 13b is visible. Therefore, the color combination at the viewpoint 90d is only the color of the first processing layer 13b.

  For example, when the viewpoint is aligned with the arrow 90e and the upper surface of the inspection substrate 10b is viewed, the core layer 18b is an opaque layer, so that the layer below the core layer 18b cannot be seen. Therefore, when the viewpoint is aligned with the arrow 90e and the upper surface of the inspection substrate 10b is viewed, the core layer 18b can be seen through the first resist layer 12b and the first prepreg layer 15b. Therefore, the color combination at the viewpoint 90e is the color of the first resist layer 12b, the color of the first prepreg layer 15b, and the color of the core layer 18b.

  Here, assuming that the area where the characteristic part exists is “1” and the area where the characteristic part does not exist is “0”, the laminated structure data within the visible range of the inspection substrate 10b at the positions of the respective viewpoints 90a to 90e is shown in FIG. Shown in As described above, the “characteristic portion” means, for example, a portion formed of a specific material or a portion subjected to a specific process.

  In the example shown in FIG. 26, the laminated structure data in the visible range in the depth direction of the inspection substrate 10b at the position of the viewpoint 90a is “(1)”. The laminated structure data in the visible range in the depth direction of the inspection substrate 10b at the position of the viewpoint 90b is “(0, 1, 1)”. The laminated structure data in the visible range in the depth direction of the inspection substrate 10b at the position of the viewpoint 90c is “(0, 1, 0, 0, 1, 1)”. The laminated structure data in the visible range in the depth direction of the inspection substrate 10b at the position of the viewpoint 90d is “(0, 0, 1)”. The laminated structure data in the visible range in the depth direction of the inspection substrate 10b at the position of the viewpoint 90e is “(0, 1, 0, 0, 1, 0, 0, 1)”.

  Here, the material type data 312a of the first silk layer 11b which is the first layer is “200 W”. Therefore, for example, if the layer is the first layer, the region color feature data 1366a includes the R color feature value, the G color feature value, and the B color feature value corresponding to the feature portion of the first layer, that is, , R (200 W)), G (200 W), and B (200 W) corresponding to the material “200 W” of the first silk layer 11 b.

  Similarly, the material type data 312a of the first resist layer 12b which is the second layer is “G24”. The layer processing data 314a of the first processing layer 13b, which is the third layer, is “SR”. The material type data 312a of the first copper plating layer 14b as the fourth layer is “Cu”. The material type data 312a of the first prepreg layer 15b that is the fifth layer is “FR-4”. The layer processing data 314a of the second processing layer 16b, which is the sixth layer, is “B / O”. The material type data 312a of the second copper plating layer 17b, which is the seventh layer, is “Cu”. The material type data 312a of the core layer 18b as the eighth layer is “FR-4”.

  FIG. 27 shows region color feature data 1366a of the inspection substrate 10b at the positions of the respective viewpoints 90a to 90e based on the material type data and the layer processing data.

  In the example shown in FIG. 27, the area color feature data 1366a of the inspection board 10b at the position of the viewpoint 90a is “R (200W), G (200W), B (200W)”. Further, the area color feature data 1366a of the inspection board 10b at the position of the viewpoint 90b is “R (0, G24, SR), G (0, G24, SR), B (0, G24, SR)”. The area color feature data 1366a of the inspection board 10b at the position of the viewpoint 90c is “R (0, G24, 0, 0, FR-4, B / O), G (0, G24, 0, 0, FR-4”. , B / O), B (0, G24, 0, 0, FR-4, B / O) ". Further, the area color feature data 1366a of the inspection board 10b at the position of the viewpoint 90d is “R (0, 0, SR), G (0, 0, SR), B (0, 0, SR)”. The area color feature data 1366a of the inspection board 10b at the position of the viewpoint 90e is “R (0, G24, 0, 0, FR-4, 0, 0, FR-4), G (0, G24, 0, 0”. , FR-4, 0, 0, FR-4), B (0, G24, 0, 0, FR-4, 0, 0, FR-4) ".

  The area color feature data creation unit 1366 creates data representing a combination of these colors as area color feature data 1366a of the inspection board 10b in each inspection area as follows.

  When the area color feature data 1366a of the inspection board 10b is calculated, the area color feature data creation unit 1366 performs the following Expressions 7 to 9 from the calculation data storage unit 1488, and the calculations of Expressions 7 to 9 from each storage unit. Various data to be used, for example, the material thickness data 316a stored in the material thickness data storage unit 1436, the layer configuration data 318a stored in the layer configuration data storage unit 1438, and the like are read. The following formulas 7 to 9 are formulas for calculating the area color feature data 1366a of the inspection board 10b in each inspection area. According to the following formulas 7 to 9, the position of the viewpoint is an arbitrary position, for example, the p-th pixel (hereinafter also referred to as “p-th pixel”), and one side of the inspection substrate 10b from the arbitrary position. The gradation values of the R, G, and B colors of the inspection substrate 10b that can be seen when the main surface of the inspection substrate 10 is viewed vertically are calculated as area color feature data 1366a of the inspection board 10b in each inspection area. it can. Note that the position of the viewpoint represents an X coordinate value in which the X coordinate position of the left end portion of the inspection substrate 10b shown in FIG.

  The following formulas 7 to 9 are obtained by considering that the color of each layer outside the opaque layer and the opaque layer varies depending on the type of material constituting the layer, the layer treatment, and the thickness of the material. It has been calculated. The following formulas 7 to 9 are respectively stored in advance in the calculation data storage unit 1488 of the main storage unit 1400A. The following formulas 7 to 9 are respectively read from the calculation data storage unit 1488 by the main calculation unit 1300A (here, the region color feature data creation unit 1366) and used for the calculation of the region color feature data 1366a. .

  Here, the R color feature value represents a red (R color) feature value in the RGB component, the G color feature value represents a green (G color) feature value in the RGB component, and the B color feature value represents RGB. The characteristic value of blue (B color) in the component is shown.

  Further, in the above formulas 7 to 9, the layer superposition constants αrpi, αgpi, αbpi, the color attenuation constants βrpi, βgpi, βbpi depending on the layer thickness, the R color feature value Rpi corresponding to the material type or layer processing, The G color feature value Gpi corresponding to the material type or layer processing and the B color feature value Bpi corresponding to the material type or layer processing are stored in advance in the calculation data storage unit 1488 of the main storage unit 1400A, respectively. . These values are read from the calculation data storage unit 1488 by the main calculation unit 1300A (here, the region color feature data creation unit 1366) and used for the calculation of the region color feature data 1366a.

  The above formulas 7 to 9 represent the R color, G color, and B color of each of the outer layers and the opaque layer outside the opaque layer when one main surface of the inspection substrate 10b is viewed vertically from an arbitrary position. For each layer, the gradation value is multiplied by the layer superposition constant, the color attenuation constant depending on the layer thickness, and the layer thickness, and the obtained value is integrated.

  In the above formulas 7 to 9, for example, when the inspection substrate 10b is viewed with the viewpoint aligned with the arrow 90c shown in FIG. 25, the second processing layer 16b can be seen through the first resist layer 12b and the first prepreg layer 15b. Therefore, the following expressions 10 to 12 are obtained.

  Here, the R color feature value (viewpoint 90c) indicates the R color feature value when viewing the inspection substrate 10b with the viewpoint aligned with the arrow 90c, and the G color feature value (viewpoint 90c) indicates the viewpoint with the arrow 90c. The B color feature value (viewpoint 90c) is the B color feature value when viewing the inspection board 10b with the viewpoint aligned with the arrow 90c. Show.

  Since the first resist layer 12b is the second layer from the top, the first resist layer 12b is i = 2, and the first prepreg layer 15b is the fifth layer from the top, so the first prepreg Since the layer 15b is i = 5 and the second treatment layer 16b is the sixth layer from the top, the second treatment layer 16b is i = 6 (see FIGS. 3 and 7). These data are extracted from the layer configuration data 318a read from the layer configuration data storage unit 1438 by the region color feature data creation unit 1366 and used for the calculation of the region color feature data 1366a.

  Further, the thicknesses Trp2, Tgp2, and Tbp2 of the first resist layer 12b are 10 (μm), respectively (see FIG. 7). Further, the thicknesses Trp5, Tgp5, and Tbp5 of the first prepreg layer 15b are 100 (μm), respectively (see FIG. 7). In addition, the thicknesses Trp6, Tgp6, and Tbp6 of the second processing layer 16b are actually surface treatments of the layers, and thus there is no thickness, but a predetermined reference thickness (here, 10 (μm)). ). These data are extracted from the material thickness data 316a read from the material thickness data storage unit 1436 by the region color feature data creation unit 1366, and used for the calculation of the region color feature data 1366a.

  As described above, the area color feature data creation unit 1366, when viewing the inspection board 10b with the viewpoint aligned with the arrow 90c shown in FIG. 25, the above expressions 10 to 12 are based on the above expressions 7 to 9. Thus, an R color feature value (viewpoint 90c), a G color feature value (viewpoint 90c), and a B color feature value (viewpoint 90c) are calculated as the area color feature data 1366a at the viewpoint 90c.

  The area color feature data creation unit 1366 performs the above-described calculation on all the pixels in the X-axis direction and the Y-axis direction of the two-dimensional coordinate system as described below, and thereby the area colors of all the pixels on the inspection substrate 10b. The feature data 1366a is calculated.

  That is, first, the area color feature data creation unit 1366 sets, for example, the value of the Y coordinate to an initial value “0” (unit: pixel) for the inspection board 10b that is reflected in the color surface image data 1364a (see FIG. 24). A line parallel to the X axis is set, and each contour of the color pattern of the inspection substrate 10b existing on the line parallel to the set X axis is sequentially extracted. Each area delimited by each contour of the color pattern extracted at this time becomes each inspection area of the inspection substrate 10b in the appearance inspection.

  The area color feature data creation unit 1366 detects the X coordinate value of each contour of the color pattern in response to sequentially extracting each contour of the color pattern. This detection is performed by setting the left end of the inspection substrate 10b as the origin, that is, the value of the X coordinate as 0, and detecting the pixel number where each contour exists from the origin.

  When the area color feature data creation unit 1366 detects the value of the X coordinate of each outline of the color pattern, in response to this, each inspection area of the inspection substrate 10b, that is, each of the areas delimited by each outline of the color pattern is displayed. The internal region is specified, and data specifying each inspection region of the inspection substrate 10b is created. In this embodiment, the data for specifying each inspection area is the coordinate range in the X-axis direction of each inspection area, that is, each inspection area where the Y-coordinate value is the Y-coordinate value of the line parallel to the X-axis. It is assumed that the coordinate data represents a coordinate range from the X coordinate value at the start end of the region to the X coordinate value at the end.

  When the region color feature data creation unit 1366 creates data for specifying each inspection region of the inspection substrate 10b, the region color feature data creation unit 1366 specifies the layer configuration in each inspection region based on the color laminated image data 1362a. That is, the region color feature data creation unit 1366 has, for example, the first silk layer 11b, the first resist layer 12b, the first processing layer 13b, the first layer configuration from the top as the layer configuration at the position of the viewpoint 90a shown in FIG. A configuration including the copper plating layer 14b, the first prepreg layer 15b, the core layer 18b, the third copper plating layer 19b, the third treatment layer 20b, the second prepreg layer 21b, and the second resist layer 24b is specified. Similarly, the region color feature data creation unit 1366 sequentially identifies the layer configuration in each of the other inspection regions.

  When the region color feature data creation unit 1366 specifies the layer configuration in each inspection region, in response to this, the region color feature data creation unit 1366 specifies whether each layer is a transparent layer or an opaque layer for each inspection region.

  When the region color feature data creation unit 1366 specifies whether each layer is a transparent layer or an opaque layer for each inspection region, in response to this, an opaque layer (however, the outermost layer) is specified for each inspection region. The layer formed outside the opaque layer, i.e., on the exposed surface side, is included as a layer within the visible range in the depth direction.

  When the region color feature data creation unit 1366 identifies a layer in the visible range in the depth direction for each inspection region, in response to this, the calculation data storage unit 1488 returns the above Expressions 7 to 9 and Various data used for the calculations of Expressions 7 to 9 from each storage unit, for example, the material thickness data 316a stored in the material thickness data storage unit 1436, and the layer configuration data 318a stored in the layer configuration data storage unit 1438 Read out. The area color feature data creation unit 1366 then generates area color feature data of all pixels in the X-axis direction on the line parallel to the X-axis, based on the configuration of the layers in the visible range in the depth direction in each inspection area. 1366a, that is, the R color feature value, the G color feature value, and the B color feature value are calculated. Thereby, the area color feature data creation unit 1366 calculates area color feature data 1366a of all pixels in the X-axis direction.

  When the region color feature data creation unit 1366 calculates the region color feature data 1366a of all the pixels in the X axis direction on the line parallel to the X axis, the X color on the line parallel to the X axis described above is calculated. The area color feature data 1366a of all pixels in the axial direction is output to the main storage unit 1400A and stored in the reference board data storage unit 1460 of the main storage unit 1400A.

  When the region color feature data creation unit 1366 stores the region color feature data 1366a of all pixels in the X-axis direction with the Y coordinate value as an initial value in the reference substrate data storage unit 1460, in response to this, the color surface image For the inspection board 10b reflected in the data 1364a (see FIG. 24), for example, a line parallel to the X axis is set, with the Y coordinate value set to the next value “1” (unit: pixel) of the initial value, Each contour of the color pattern of the inspection substrate 10b existing on a line parallel to the set X axis is sequentially extracted.

  Thereafter, the area color feature data creation unit 1366 repeats the same operation for all the pixels of the inspection board 10b that are reflected in the color surface image data 1364a. As a result, the area color feature data 1366a of all the pixels of the inspection board 10b reflected in the color surface image data 1364a, that is, the R color feature value, the G color feature value, and the B color feature value are calculated and stored as the reference board data. Stored in the unit 1460.

  When the area color feature data 1366a of all the pixels of the inspection board 10b reflected in the color surface image data 1364a is stored in the reference board data storage unit 1460, the inspection area data creation unit 1368 is activated in response thereto.

  The inspection area data creation unit 1368 specifies, from the reference board data storage unit 1460, data specifying each inspection area of all the inspection boards 10b, that is, each Y coordinate when the Y coordinate value is set from the initial value to the final value. The coordinate data representing the coordinate range corresponding to the value from the start X coordinate value to the end X coordinate value of each inspection area and the area color feature data 1366a corresponding to all the inspection areas, that is, the Y coordinate value The area color feature data 1366a of each inspection area when reading from the initial value to the final value is read out.

  When the inspection area data creation unit 1368 reads out the data specifying each inspection area of all the inspection substrates 10b and the area color feature data 1366a corresponding to all the inspection areas, in response to this, in the Y-axis direction, The area color feature data 1366a at adjacent pixel positions are compared, and if it is determined that the area color feature data 1366a at the adjacent pixel positions are the same, the area color feature data 1366a at the adjacent pixel positions is compared. They are integrated as data in the same area. “Integration” means that a plurality of data matching a specific condition, for example, the condition that the area color feature data 1366a at adjacent pixel positions are the same is grouped as one data. ing. In this embodiment, as shown in FIG. 28, “integration” is described as being performed by the inspection region data creation unit 1368 associating the position of each viewpoint with the coordinate range of the position of each viewpoint. To do. In FIG. 28, the data entered in the “pixel coordinate” column is the coordinate range in the X-axis direction of the set of viewpoint positions 90c, which is a set of pixels in which the region color feature data 1366a are the same. That is, the coordinate range from the start coordinate value to the end coordinate value in the X-axis direction of the set of viewpoint positions 90c is represented for each Y coordinate value. In the example shown in FIG. 28, a set of viewpoint positions 90c, which is a set of pixels having the same area color feature data 1366a, is regarded as one inspection area. Therefore, the examination area data creation unit 1368 associates the set of viewpoint positions 90c with the pixel range. Similarly, the inspection area data creation unit 1368 associates the positions 90a, 90b, 90d, and 90e of other viewpoints with the pixel ranges. Thus, the inspection area data creation unit 1368 creates inspection area data 1368a that represents each area color feature data 1366a in units of areas for each inspection area.

  When the inspection area data creation unit 1368 creates each inspection area data 1368a, in response to this, the inspection area data 1368a is output to the main storage unit 1400A and stored in the reference board data storage unit 1460 of the main storage unit 1400A. To do. At this time, the inspection region data creation unit 1368 combines the region color feature data 1366a and the inspection region data 1368a by an arbitrary calculation method, and outputs the combined data to the main storage unit 1400A. The data may be stored in the reference board data storage unit 1460 of the storage unit 1400A.

  When the inspection area data 1368a is stored in the reference board data storage unit 1460, the inspection unit 1394 is activated in response thereto.

  When the inspection unit 1394 is activated, in response to this, the inspection unit 1394 reads the skew correction image data 1384a from the skew correction image data storage unit 1484, and the region color of each inspection region as reference substrate data from the reference substrate data storage unit 1460. The feature data 1366a and the inspection area data 1368a are read out.

  The inspection unit 1394 reads the skew correction image data 1384a from the skew correction image data storage unit 1484 and reads the region color feature data 1366a and the inspection region data 1368a of each inspection region from the reference substrate data storage unit 1460. In response, each inspection region is detected from the skew-corrected image data 1384a based on the pixel coordinates of the inspection region data 1368a, and further, the color gradation value of each inspection region is detected.

  Upon detecting the color gradation value of each inspection area, the inspection unit 1394 calculates the color feature value of each inspection area represented by the area color feature data 1366a in response to this, and detects the color gradation of each detected inspection area. The value is compared with the calculated color feature value of each inspection region.

  In this comparison, when both coincide with each other within a predetermined error range, it means that the inspection substrate 10b is a non-defective product. In this case, the inspection unit 1394 determines that the appearance of the inspection substrate 10b is appropriate, and outputs, for example, an inspection result indicating “appropriate” to the output unit 1200. As a result, the output unit 1200 displays the test result indicating “appropriate” on the display or stores it in the storage device. The “error range” is stored in advance in a storage area (not shown) of the main storage unit 1400 or the calculation data storage unit 1488, and is read out by the inspection unit 1394 when color feature values are compared.

  Or in this comparison, when both do not correspond within a predetermined error range, it means that the inspection substrate 10b is defective. In this case, the inspection unit 1394 determines that the appearance of the inspection substrate 10b is inappropriate and outputs, for example, an inspection result indicating “inappropriate” to the output unit 1200. As a result, the output unit 1200 displays the test result indicating “inappropriate” on the display or stores it in the storage device.

  In this way, the board appearance inspection apparatus 1000A inspects the appearance of the inspection board 10b.

  As described above, the present invention does not inspect the appearance of the inspection board based on the reference board data created using the actual board as in the prior art, but the CAD data created in the board design process. The reference board data is created in a pseudo manner using the board manufacturing data used in the board manufacturing process, and the appearance of the inspection board is inspected based on the created reference board data.

  As a result, according to the present invention, (1) it is possible to create reference substrate data without using an actual substrate, and therefore it is possible to eliminate the work of preparing a large amount of substrates. (2) an actual substrate Since the reference board data can be created without using the board, it is possible to eliminate the work of selecting a large number of reference boards from the prepared boards. (3) The reference board data can be obtained without using the actual board. Since it can be created, it is possible to eliminate the work of collecting a large amount of reference board data. (4) Since the inspection area data can be automatically created by the board appearance inspection apparatus, the inspection area by the operator The work of sequentially creating data can be eliminated. (5) Setting data in the board appearance inspection apparatus, for example, inspection parameters, inspection area data, inspection area Since the corresponding color data can be set and adjusted, it is possible to eliminate the work of setting and adjusting the setting data for the board visual inspection apparatus manually by the operator. be able to. As a result, according to this board appearance inspection apparatus, it is possible to obtain an effect that a highly accurate inspection can be performed while greatly reducing the time for teaching work.

  The present invention is effective even when inspecting a large number of substrates of a small variety, but is particularly effective when inspecting a variety of substrates in small amounts. Therefore, it is possible to promote the spread of the substrate appearance inspection apparatus not only to substrate manufacturers that manufacture a large variety of substrates, but also to substrate manufacturers that manufacture small amounts of substrates in small amounts.

  The present invention is not limited to the above-described embodiment, and various changes and modifications can be made without departing from the gist of the present invention.

  For example, in the first and second embodiments described above, the data storage means 50 is a component external to the board visual inspection apparatus, such as a DVD, CD-ROM, floppy (registered trademark) disk, USB memory, or the like. It is configured as various storage media and various storage devices such as an external hard disk device. However, the data storage means 50 can also be configured as an internal component of the board appearance inspection apparatus, for example, by configuring it as a storage area of the main storage unit.

  In the above-described embodiment, the board manufacturing data shown in FIG. 7 can be arbitrarily changed. For example, the substrate manufacturing data can be changed as appropriate when the number of types of resist materials increases or when new data such as a material manufacturer is added.

It is a block diagram which shows the structural example of the board | substrate external appearance inspection apparatus which concerns on 1st Embodiment. It is a figure which shows an example of the image which captured image data gives. It is a figure which shows an example of the laminated structure of a test | inspection board | substrate. It is explanatory drawing of the data acquired from CAD data. (A)-(D) is a figure showing an example of an image which layer image data gives, respectively. It is explanatory drawing of the data acquired from board | substrate manufacture data. It is a figure (1) which shows an example of substrate manufacture data. It is a figure (2) which shows an example of substrate manufacture data. It is a block diagram which shows the structural example of a color database production apparatus. It is explanatory drawing (1) of a laminated structure data preparation part. It is explanatory drawing (2) of a laminated structure data creation part. It is explanatory drawing (3) of a laminated structure data preparation part. It is explanatory drawing (4) of a laminated structure data preparation part. It is explanatory drawing (5) of a laminated structure data creation part. It is explanatory drawing of a color data acquisition part. It is explanatory drawing of a skew correction | amendment part. It is explanatory drawing of a position alignment part. It is explanatory drawing of the area | region color characteristic data creation part. It is a block diagram which shows the structural example of the board | substrate external appearance inspection apparatus which concerns on 2nd Embodiment. It is explanatory drawing of the data acquired from board | substrate manufacture data. It is explanatory drawing (1) of the color data acquisition part of 2nd Embodiment. It is explanatory drawing (2) of the color data acquisition part of 2nd Embodiment. It is explanatory drawing of a color lamination | stacking image data creation part. It is explanatory drawing of a color surface image data preparation part. It is explanatory drawing (1) of the area | region color characteristic data preparation part of 2nd Embodiment. It is explanatory drawing (2) of the area | region color characteristic data preparation part of 2nd Embodiment. It is explanatory drawing (3) of the area | region color characteristic data preparation part of 2nd Embodiment. It is explanatory drawing of a test | inspection area | region data preparation part.

Explanation of symbols

DESCRIPTION OF SYMBOLS 50 ... Data storage means 52 ... CAD data storage means 52a ... CAD data 54 ... Substrate manufacture data storage means 54a ... Substrate manufacture data 500 ... Color database creation apparatus 500a, 1342a ... Color data 1000 ... Substrate appearance inspection apparatus 1100 ... Input part 1102 ... Imaging unit 1102a ... Captured image data 1110 ... Data reading unit 1112 ... CAD data reading unit 1122 ... Substrate manufacturing data reading unit 1132 ... Color data reading unit 1200 ... Output unit 1300 ... Main calculation unit 1312 ... Layer image data acquisition unit 1312a ... Layer image data 1314 ... Laminated structure data creation unit 1314a ... Laminated structure data 1342 ... Color data acquisition unit 1384 ... Skew correction unit 1384a ... Skew correction image data 1386 ... Alignment unit 1386a ... Alignment 1392 ... Area color feature data creation unit 1392a ... Area color feature data 1394 ... Inspection unit 1394a ... Inspection result data 1400 ... Main storage unit 1402 ... Captured image data storage unit 1412 ... Layer image data storage unit 1414 ... Layer structure data storage Unit 1422 ... substrate manufacturing data storage unit 1440 ... color database 1442 ... color data storage unit 1484 ... skew correction image data storage unit 1486 ... alignment data storage unit 1488 ... calculation data storage unit 1488a ... calculation data 1492 ... area color feature Data storage

Claims (5)

In the substrate appearance inspection apparatus for inspecting the appearance of the substrate composed of a plurality of layers,
An imaging unit for acquiring captured image data of the substrate;
A CAD data reading unit for reading out the CAD data from CAD data storing means storing CAD data representing the design drawing of the board;
A portion formed of a specific material or a portion that has been subjected to a specific process is defined as a feature portion, a region where the feature portion exists is defined as a first color region, and a region where the feature portion does not exist is defined as a second color region. As a region, a layer image data acquisition unit that acquires, for each layer of the substrate, layer image data representing an image of the layer from the CAD data read by the CAD data reading unit;
The layer image data of each layer acquired by the layer image data acquisition unit is superimposed to create composite layer image data, and each internal region having a different visible range in the depth direction is created from the generated composite layer image data. Extracted as each inspection region, and for each of the extracted inspection regions, the composite layer image data is converted into a binary code based on the first color region and the second color region within the visible range in the depth direction. A layered structure data creating unit for creating layered structure data representing the layered structure of each inspection region;
A board manufacture data reading unit for reading out the board manufacture data from the board manufacture data storage means storing the board manufacture data relating to the manufacture of the substrate;
A color database storing color data representing colors determined according to the characteristic part;
Based on the substrate manufacturing data read by the substrate manufacturing data reading unit, a color data acquisition unit that acquires the color data corresponding to the feature portion for each layer of the substrate from the color database;
Based on the layered structure data of each inspection region created by the layered structure data creation unit and the color data corresponding to the feature portion of each layer acquired by the color data acquisition unit, the logic of each inspection region An area color feature data creating unit for creating area color feature data representing a color feature value which is the upper color gradation value;
A color gradation value of each inspection region is detected from the captured image data acquired by the imaging unit, and the color feature of each inspection region represented by the region color feature data created by the region color feature data creation unit. A value is compared with the color gradation value of each detected inspection area, and the color feature value of each inspection area and the color gradation value of each inspection area match within a predetermined error range And an inspection unit that determines that the appearance of the substrate is appropriate. In the substrate appearance inspection apparatus for inspecting the appearance of the substrate composed of a plurality of layers,
An imaging unit for acquiring captured image data of the substrate;
A skew correction unit that corrects skew of the captured image data acquired by the imaging unit and acquires skew-corrected image data;
A CAD data reading unit for reading out the CAD data from CAD data storing means storing CAD data representing the design drawing of the board;
A portion formed of a specific material or a portion that has been subjected to a specific process is defined as a feature portion, a region where the feature portion exists is defined as a first color region, and a region where the feature portion does not exist is defined as a second color region. As a region, a layer image data acquisition unit that acquires, for each layer of the substrate, layer image data representing an image of the layer from the CAD data read by the CAD data reading unit;
The layer image data of each layer acquired by the layer image data acquisition unit is superimposed to create composite layer image data, and each internal region having a different visible range in the depth direction is created from the generated composite layer image data. Extracted as each inspection region, and for each of the extracted inspection regions, the composite layer image data is converted into a binary code based on the first color region and the second color region within the visible range in the depth direction. A layered structure data creating unit for creating layered structure data representing the layered structure of each inspection region;
By detecting each inspection region from the skew correction image data acquired by the skew correction unit and associating the stacked structure data created by the stacked structure data creation unit with each detected inspection region, alignment data is obtained. An alignment part to be created;
A board manufacture data reading unit for reading out the board manufacture data from the board manufacture data storage means storing the board manufacture data relating to the manufacture of the substrate;
A color database storing color data representing colors determined according to the characteristic part;
Based on the substrate manufacturing data read by the substrate manufacturing data reading unit, a color data acquisition unit that acquires the color data corresponding to the feature portion for each layer of the substrate from the color database;
Based on the alignment data created by the alignment unit and the color data corresponding to the feature portion of each layer acquired by the color data acquisition unit, a logical color gradation value of each inspection region An area color feature data creation unit that calculates a color feature value and creates area color feature data representing the color feature value;
A color gradation value of each inspection region is detected from the skew correction image data acquired by the skew correction unit, and the inspection region of each inspection region represented by the region color feature data generated by the region color feature data generation unit is detected. The color feature value is compared with the detected color gradation value of each inspection area, and the color feature value of each inspection area matches the color gradation value of each inspection area within a predetermined error range. An inspection unit that determines that the appearance of the substrate is appropriate. In the board | substrate external appearance inspection apparatus of Claim 1 or 2,
The color feature value of each inspection region represented by the region color feature data created by the region color feature data creation unit includes an R color feature value, a G color feature value, and a B color feature value,
The R color feature value, the G color feature value, and the B color feature value are values calculated by the following formulas 1 to 3, respectively.
In the substrate appearance inspection apparatus for inspecting the appearance of the substrate composed of a plurality of layers,
An imaging unit for acquiring captured image data of the substrate;
A CAD data reading unit for reading out the CAD data from CAD data storing means storing CAD data representing the design drawing of the board;
A portion formed of a specific material or a portion that has been subjected to a specific process is defined as a feature portion, a region where the feature portion exists is defined as a first color region, and a region where the feature portion does not exist is defined as a second color region. As a region, a layer image data acquisition unit that acquires, for each layer of the substrate, layer image data representing an image of the layer from the CAD data read by the CAD data reading unit;
A board manufacture data reading unit for reading out the board manufacture data from the board manufacture data storage means storing the board manufacture data relating to the manufacture of the substrate;
From the substrate manufacturing data, a material type data acquisition unit for acquiring material type data representing the type of material constituting each layer of the substrate,
A layer processing data acquisition unit for acquiring layer processing data representing the processing content of the layer being processed from the substrate manufacturing data;
From the substrate manufacturing data, a material thickness data acquisition unit for acquiring material thickness data representing the thickness of the material constituting each layer of the substrate;
A layer configuration data acquisition unit for acquiring layer configuration data representing the configuration of each layer of the substrate from the substrate manufacturing data;
A color database storing color data representing colors determined according to the characteristic part;
Based on the material type data acquired by the material type data acquisition unit and / or the layer processing data acquired by the layer processing data acquisition unit, from the color database, the feature portion for each layer of the substrate A color data acquisition unit for acquiring the color data corresponding to
Combining the color data corresponding to the characteristic portion of each layer acquired by the color data acquisition unit with the first color region in the layer image data of each layer acquired by the layer image data acquisition unit; A color layer image data creation unit that creates color layer image data representing a color image of each layer for each layer of the substrate;
Based on the layer processing data acquired by the layer processing data acquisition unit, the material thickness data acquired by the material thickness data acquisition unit, and the layer configuration data acquired by the layer configuration data acquisition unit, A color layer image data creation unit that creates color layer image data representing a color image of the layered structure of the substrate by superimposing the color layer image data of each layer created by the color layer image data creation unit;
Based on the color layer image data created by the color layer image data creation unit, by superimposing the color layer image data of each layer created by the color layer image data creation unit, the main surface of the substrate A color surface image data creation unit for creating color surface image data representing a color image;
Each internal region delimited by the contour of the color pattern is extracted as each inspection region from the color surface image data created by the color surface image data creation unit, and the logical color gradation value of each extracted inspection region A region color feature data creation unit for creating region color feature data representing a certain color feature value;
A color gradation value of each inspection region is detected from the captured image data acquired by the imaging unit, and the color feature of each inspection region represented by the region color feature data created by the region color feature data creation unit. When the value and the color gradation value of each inspection area detected are compared, and the color feature value of each inspection area and the color gradation value of each inspection area match within a predetermined error range And an inspection unit that determines that the appearance of the substrate is appropriate. In the board | substrate external appearance inspection apparatus of Claim 4,
The region color feature data creation unit extracts each internal region delimited by a color pattern outline from the color surface image data created by the color surface image data creation unit as each inspection region. The board appearance inspection apparatus characterized by calculating an R color feature value, a G color feature value, and a B color feature value of each of the extracted inspection areas according to 1 to 3.