JP2008081815A - Component for substrate treating apparatus and method for forming film - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for forming the film of a component for a substrate treating apparatus, by which production of particles caused by chipping of the film can be prevented. <P>SOLUTION: The method for forming the film includes a step (S61) comprising connecting a cooling plate in which an aluminum base material is exposed to surface to the anode of a direct-current power source and then dipping the plate into an oxalic acid solution to oxidize the surface of the plate and a step (62) for dipping the cooling plate on the surface of which an alumite film is formed into boiling water for 5-10 min. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a component for a substrate processing apparatus and a film forming method, and more particularly to a component for a substrate processing apparatus that performs plasma processing on a substrate.

  As a substrate processing apparatus that performs a predetermined process on a wafer as a substrate, a film forming apparatus that performs a film forming process such as CVD or PVD and an etching apparatus that performs etching using plasma are known. This substrate processing apparatus has been increased in size with the recent increase in wafer diameter, and an increase in the weight of the apparatus has been a problem. Therefore, lightweight aluminum members are frequently used as members for component parts of the substrate processing apparatus.

By the way, since an aluminum member generally has low corrosion resistance against corrosive gas and plasma used for predetermined processing in a substrate processing apparatus, an alumite film having corrosion resistance on the surface of a component made of the aluminum member, for example, a cooling plate, is used. (For example, refer to Patent Document 1).
Japanese Patent Laid-Open No. 11-43734

  However, recently, high power plasma processing is sometimes performed as represented by HARC (High Aspect Ratio Contact) processing. In high power plasma treatment, the temperature of the cooling plate rises, but generally the alumite film has low heat resistance, so in such plasma treatment, cracks occur in the alumite film of the cooling plate, and part of the alumite film is missing and particles Will occur.

  An object of the present invention is to provide a component for a substrate processing apparatus and a film forming method capable of preventing generation of particles due to chipping of the film.

  In order to achieve the above object, a component for a substrate processing apparatus according to claim 1 is a component for a substrate processing apparatus for performing plasma processing on a substrate, wherein the component is connected to an anode of a DC power source and an organic acid is mainly used. A film formed on the surface of the component by an anodizing treatment immersed in a solution as a component is provided, and the film is subjected to a semi-sealing process using boiling water.

  The component for a substrate processing apparatus according to claim 2 is the component according to claim 1, wherein the component for the substrate processing apparatus is immersed in the boiling water for 5 to 10 minutes in the semi-sealing process. It is characterized by.

  A component for a substrate processing apparatus according to a third aspect of the present invention is the component according to the first or second aspect, wherein the component has a surface on which a film cannot be formed by thermal spraying.

  A component for a substrate processing apparatus according to a fourth aspect is the component according to the third aspect, wherein the surface is a surface of at least one hole or recess.

  The component for a substrate processing apparatus according to claim 5 is the component according to any one of claims 1 to 4, wherein the surface of the component is exposed to a high-power plasma atmosphere.

  The component for a substrate processing apparatus according to claim 6 is the component according to any one of claims 1 to 5, wherein the component for the substrate processing apparatus is a disc-shaped cooling plate, It has a plurality of through holes.

  The component for a substrate processing apparatus according to claim 7 is the component according to any one of claims 1 to 6, wherein a base material forming the component is a JIS standard A6061 alloy. To do.

  To achieve the above object, the film forming method according to claim 8 is a film forming method for a component for a substrate processing apparatus for performing plasma treatment on a substrate, wherein the component is connected to an anode of a DC power source and an organic acid is added. It has an anodic oxidation step that immerses in a solution containing the main component, and a semi-sealing step that immerses the component in boiling water for 5 to 10 minutes.

  According to the component for a substrate processing apparatus according to claim 1, the component is connected to the anode of the DC power source and immersed in a solution containing an organic acid as a main component to form a film, and the film is boiled. A semi-sealing treatment using water is performed. When a component is connected to the anode of a DC power source and immersed in a solution containing organic acid as a main component, an oxide film grows from the surface of the component toward the inside, while oxidation occurs from the surface of the component toward the outside. The film never grows. That is, since the oxide crystal columns do not extend from the surface to the outside, the generation of residual stress due to the collision between the crystal columns can be suppressed. In addition, a plurality of pores (holes) are generated in the film, but the semi-sealing treatment using boiling water seals these pores incompletely, so that even if the oxide expands in each pore, it expands. It is possible to secure a escape place for the oxide. Accordingly, the coating is not destroyed even when the temperature of the component becomes high, and generation of particles due to chipping of the coating can be prevented.

  According to the component for a substrate processing apparatus according to claim 2, since the component for the substrate processing apparatus is immersed in boiling water for 5 minutes to 10 minutes, the amount of oxide growth is reduced in each pore of the film. It is possible to ensure the opening reliably. Therefore, generation of particles due to chipping of the film can be reliably prevented.

  According to the component for substrate processing apparatus of Claim 3, it has the surface which cannot form a film | membrane by thermal spraying. When the part is immersed in a solution containing an organic acid as a main component, the solution containing the organic acid as a main component comes into contact with a surface on which a film cannot be formed by thermal spraying. Therefore, a film can be formed on the surface where the film cannot be formed by thermal spraying.

  According to the component for a substrate processing apparatus of the fourth aspect, the surface on which the film cannot be formed by thermal spraying is the surface of at least one hole or recess. By dipping, a film can also be formed on the surface of the hole or the recess, and the generation of residual stress is suppressed in the film, and each pore is sealed incompletely. Therefore, the heat resistance of the component can be improved.

  According to the component for a substrate processing apparatus according to claim 5, the surface is exposed to a high-power plasma atmosphere, but a film having incompletely sealed pores is formed on the surface. Even when exposed to a plasma atmosphere, the generation of particles due to chipping of the film can be prevented.

  According to the component for a substrate processing apparatus of the sixth aspect, the component is a cooling plate having a plurality of through holes. Since a film is formed by contact of the organic acid with the surface of the cooling plate and each through hole, the heat resistance of the cooling plate can be improved.

  According to the component for a substrate processing apparatus of the seventh aspect, since the base material constituting the component is a JIS standard A6061 alloy, the above-described effects can be remarkably exhibited.

  According to the film forming method of claim 8, the component for the substrate processing apparatus is connected to the anode of the DC power source and is immersed in a solution mainly composed of an organic acid, and the component is immersed in boiling water for 5 minutes to 10 minutes. Soaked. When a component is connected to the anode of a DC power source and immersed in a solution containing organic acid as a main component, an oxide film grows from the surface of the component toward the inside, while oxidation occurs from the surface of the component toward the outside. The film never grows. That is, since the oxide crystal columns do not extend from the surface to the outside, the generation of residual stress due to the collision between the crystal columns can be suppressed. In addition, a plurality of pores (holes) are generated in the film. When the component is immersed in boiling water for 5 to 10 minutes, the amount of oxide growth in each pore can be reduced. Is incompletely sealed, and even if the oxide expands in each pore, it is possible to ensure a escape place for the expanded oxide. Accordingly, the coating is not destroyed even when the temperature of the component becomes high, and generation of particles due to chipping of the coating can be prevented.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  First, a substrate processing apparatus to which a component for a substrate processing apparatus according to an embodiment of the present invention is applied will be described.

  FIG. 1 is a cross-sectional view illustrating a schematic configuration of a substrate processing apparatus to which components for a substrate processing apparatus according to the present embodiment are applied. This substrate processing apparatus is configured to perform plasma processing such as RIE (Reactive Ion Etching) processing and ashing processing on a semiconductor wafer W as a substrate.

In FIG. 1, a substrate processing apparatus 10 has a cylindrical chamber 11, and the chamber 11 has a processing space S therein. In the chamber 11, for example, a cylindrical susceptor 12 is disposed as a mounting table on which a semiconductor wafer (hereinafter simply referred to as “wafer”) W having a diameter of 300 mm is mounted. The inner wall surface of the chamber 11 is covered with a side wall member 31. The side wall member 31 is made of aluminum, and the surface facing the processing space S is coated with a sprayed coating of yttria (Y ₂ O ₃ ). The chamber 11 is electrically grounded, and the susceptor 12 is installed at the bottom of the chamber 11 via an insulating member 29.

  In the substrate processing apparatus 10, an exhaust path 13 for discharging the gas above the susceptor 12 to the outside of the chamber 11 is formed by the inner wall of the chamber 11 and the side surface of the susceptor 12. An annular exhaust plate 14 that prevents the plasma from leaking downstream is disposed in the exhaust path 13. In addition, the space downstream of the exhaust plate 14 in the exhaust passage 13 wraps around below the susceptor 12 and enters an automatic pressure control valve (hereinafter referred to as “APC valve”) 15 that is a variable butterfly valve. Communicate. The APC valve 15 is connected to a turbo molecular pump (hereinafter referred to as “TMP”) 17 which is an exhaust pump for evacuation through an isolator 16, and the TMP 17 is connected to the valve V 1. Are connected to a dry pump (hereinafter referred to as “DP”) 18 which is an exhaust pump. The APC valve 15 controls the pressure in the chamber 11, and the TMP 17 evacuates the chamber 11.

  A bypass pipe 19 is connected between the isolator 16 and the APC valve 15 to the DP 18 via the valve V2. The DP 18 roughens the interior of the chamber 11 via the bypass pipe 19.

  A high frequency power source 20 is connected to the susceptor 12 via a power feed rod 21 and a matcher 22, and the high frequency power source 20 supplies high frequency power to the susceptor 12. Thereby, the susceptor 12 functions as a lower electrode. The matching unit 22 reduces the reflection of the high frequency power from the susceptor 12 to maximize the supply efficiency of the high frequency power to the susceptor 12. The susceptor 12 applies the high frequency power supplied from the high frequency power supply 20 to the processing space S.

  A disc-shaped ESC electrode plate 23 made of a conductive film is disposed above the susceptor 12. An ESC DC power source 24 is electrically connected to the ESC electrode plate 23. The wafer W is adsorbed and held on the upper surface of the susceptor 12 by a Coulomb force or a Johnson-Rahbek force generated by a DC voltage applied from the ESC DC power source 24 to the ESC electrode plate 23. In addition, an annular focus ring 25 is disposed on the susceptor 12 so as to surround the wafer W attracted and held on the upper surface of the susceptor 12. The focus ring 25 is exposed to the processing space S, converges the plasma generated in the processing space S toward the surface of the wafer W, and improves the efficiency of the plasma processing.

  Further, for example, an annular refrigerant chamber 26 extending in the circumferential direction is provided inside the susceptor 12. A refrigerant having a predetermined temperature, for example, cooling water or a Galden (registered trademark) liquid, is circulated and supplied to the refrigerant chamber 26 via a refrigerant pipe 27 from a chiller unit (not shown), and the susceptor 12 is supplied depending on the temperature of the refrigerant. The processing temperature of the wafer W attracted and held on the upper surface is controlled.

  Further, a plurality of heat transfer gas supply holes 28 are opened in a portion of the upper surface of the susceptor 12 where the wafer W is adsorbed and held (hereinafter referred to as “adsorption surface”). The plurality of heat transfer gas supply holes 28 are connected to a heat transfer gas supply unit 32 via a heat transfer gas supply line 30 disposed inside the susceptor 12, and the heat transfer gas supply unit 32 serves as a heat transfer gas. Helium (He) gas is supplied to the gap between the adsorption surface and the back surface of the wafer W through the heat transfer gas supply hole 28.

  A plurality of pusher pins 33 as lift pins that can protrude from the upper surface of the susceptor 12 are arranged on the suction surface of the susceptor 12. These pusher pins 33 protrude freely from the suction surface. The pusher pin 33 is accommodated in the susceptor 12 when the wafer W is sucked and held on the suction surface in order to perform the plasma processing on the wafer W, and when the wafer W subjected to the plasma processing is unloaded from the chamber 11, the pusher pin 33 is The wafer W protrudes from the upper surface of the susceptor 12 and is lifted upward while being separated from the susceptor 12.

  A gas introduction shower head 34 is disposed on the ceiling of the chamber 11 so as to face the susceptor 12. The gas introduction shower head 34 includes a ceiling electrode plate 35, a cooling plate 36 (parts for a substrate processing apparatus), and an upper electrode body 37. In the gas introduction shower head 34, the ceiling electrode plate 35, the cooling plate 36, and the upper electrode body 37 are superposed in order from below.

  The ceiling electrode plate 35 is a disk-shaped component made of a conductive material. A high frequency power source 38 is connected to the ceiling electrode plate 35 via a matching unit 39, and the high frequency power source 38 supplies high frequency power to the ceiling electrode plate 35. Thereby, the ceiling electrode plate 35 functions as an upper electrode. The matching unit 39 has the same function as the matching unit 22. The ceiling electrode plate 35 applies high frequency power supplied from a high frequency power source 38 to the processing space S. An annular insulating member 40 is disposed around the ceiling electrode plate 35 so as to surround the ceiling electrode plate 35, and the insulating member 40 insulates the ceiling electrode plate 35 from the chamber 11.

  The cooling plate 36 is a disk-shaped part made of aluminum, for example, a JIS standard A6061 alloy. The surface of the cooling plate 36 is covered with an alumite film 57 formed by a film forming method described later. The cooling plate 36 absorbs the heat of the ceiling electrode plate 35 that has become high temperature due to the plasma treatment, and cools the ceiling electrode plate 35. Since the lower surface of the cooling plate 36 is in contact with the upper surface of the ceiling electrode plate 35 via the alumite film 57, the ceiling electrode plate 35 is insulated from the cooling plate 36.

  The upper electrode body 37 is a disk-shaped component made of aluminum. The surface of the upper electrode body 37 is also covered with an alumite film 57 formed by a film forming method described later. A buffer chamber 41 is provided inside the upper electrode body 37, and a processing gas introduction pipe 42 from a processing gas supply unit (not shown) is connected to the buffer chamber 41. A processing gas is introduced into the buffer chamber 41 from the processing gas supply unit via the processing gas introduction pipe 42.

  The ceiling electrode plate 35 and the cooling plate 36 each have a plurality of gas holes 43 and 44 (through holes) penetrating in the thickness direction. The upper electrode body 37 has a plurality of gas holes 45 penetrating the lower surface of the upper electrode body 37 and the portion between the buffer chambers 41. When the ceiling electrode plate 35, the cooling plate 36, and the upper electrode body 37 are superimposed, the gas holes 43, 44, 45 are aligned and supply the processing gas introduced into the buffer chamber 41 to the processing space S.

  On the side wall of the chamber 11, a wafer W loading / unloading port 46 is provided at a position corresponding to the height of the wafer W lifted upward from the susceptor 12 by the pusher pin 33, and the loading / unloading port 46 is provided with the loading / unloading port 46. A gate valve 47 that opens and closes is attached.

  In the chamber 11 of the substrate processing apparatus 10, as described above, the susceptor 12 and the ceiling electrode plate 38 apply the high frequency power to the processing space S, so that the processing supplied from the gas introduction shower head 34 to the processing space S is performed. The gas is made into a high-density plasma to generate cations and radicals, and the wafer W is subjected to plasma treatment with the cations and radicals.

  FIG. 2 is a cross-sectional perspective view showing a configuration of a general alumite film formed on the surface of a component for a substrate processing apparatus.

  In FIG. 2, an alumite film 48 includes a barrier layer 50 formed on an aluminum substrate 49 of a component, and a porous layer 51 formed on the barrier layer 50.

The barrier layer 50 is a substantially defect-free layer made of aluminum oxide (Al ₂ O ₃ ) and does not have gas permeability, and therefore prevents corrosive gas or plasma from coming into contact with the aluminum substrate 49. The porous layer 51 has a plurality of cells 52 made of aluminum oxide that grow along the thickness direction of the alumite film 48 (hereinafter simply referred to as “film thickness direction”). Each cell 52 has a pore 53 that is an opening on the surface of the alumite film 48 and extends along the film thickness direction.

  This anodized film 48 is formed by connecting a part to the anode of a DC power source and immersing the part in an acidic solution (electrolytic solution) to oxidize the surface of the aluminum substrate 49 (anodic oxidation treatment). At this time, the porous layer 51 is formed together with the barrier layer 50. In the porous layer 51, the pores 53 extend along the film thickness direction as the cells 52 grow.

  When the component having the alumite film 48 formed on the surface thereof is used in an atmosphere containing moisture, each pore 53 may absorb moisture and then release it. The plasma processing needs to be performed in a vacuum, but it is difficult to realize a vacuum when moisture is released from each pore 53. Therefore, each pore 53 needs to be sealed (sealing process).

  Usually, in the sealing treatment, the alumite film 48 is exposed to high-pressure steam at 120 ° C. to 140 ° C. At this time, as shown in FIG. 3A, in each cell 52, the aluminum oxide 60 expands and grows by being inspired by water vapor, and the pores 53 are almost sealed. At this time, there is no escape space for the expanded and grown aluminum oxide 60 in the pore 53, and a compressive stress may be generated in the porous layer 51 and the like.

  Usually, a sulfuric acid solution is used in the anodizing treatment. However, when the part is immersed in the sulfuric acid solution, as shown in FIG. 3 (B), the aluminum base material 49 is oxidized and the alumite film 48 is placed inside. Grows toward the outside and also grows outward. In the alumite film 48 that grows toward the inside of the aluminum base material 49, aluminum is only transformed into aluminum oxide, but in the alumite film 48 that grows toward the outside of the aluminum base material 49, FIG. As shown, an aluminum oxide crystal column 55 having an impurity 54 as a vertex extends toward the outside of the alumite film 48. At this time, when a certain crystal column 55 extends while bending and collides with an adjacent crystal column 55, residual stress is generated in each crystal column 55.

  In the alumite film 48 formed by anodizing treatment using a sulfuric acid solution and sealing treatment using water vapor, the components are heated at a high temperature by the HARC treatment, for example, the ceiling electrode plate in the cooling plate 36 on which the alumite film 48 is formed. When the temperature of the contact surface with 35 is about 176 ° C., the aluminum oxide 60 of the pore 53 expands in the anodized film 48 and compressive stress is generated in the porous layer 51 and the like. Further, thermal stress is added to the residual stress due to the collision between the crystal columns 55. As a result, the alumite film 48 may be destroyed.

  On the other hand, in the alumite film formed on the surface of the cooling plate 36 as the component for the substrate processing apparatus according to the present embodiment, the generation of compressive stress and residual stress in the porous layer or the like is suppressed.

  Specifically, a cooling plate 36 with an aluminum base material 56 exposed on the surface is connected to the anode of a DC power source, and an acidic solution containing organic acid, for example, oxalic acid as a main component (hereinafter referred to as “oxalic acid solution”). The surface of the cooling plate 36 is oxidized (anodic oxidation process).

  At this time, unlike the anodizing treatment using sulfuric acid, as shown in FIG. 4A, the alumite film 57 grows mainly toward the inside of the aluminum base material 56 and almost toward the outside of the aluminum base material 56. Does not grow. Therefore, the crystal column of aluminum oxide hardly grows outward from the surface of the aluminum base material 56, and adjacent crystal columns do not collide with each other. As a result, the occurrence of residual stress in the alumite film 57 can be suppressed. A pore 59 similar to the pore 53 is also formed in each cell 58 of the alumite film 57.

  Moreover, the cooling plate 36 with the alumite film 57 formed on the surface is immersed in boiling water for 5 to 10 minutes (semi-sealing treatment). At this time, as shown in FIG. 4B, in each cell 58, the aluminum oxide 61 expands and grows by being inspired by boiling water, but the expansion and growth amount is expanded and grown by a sealing process using water vapor. The amount of expansion / growth of the aluminum oxide 60 is smaller. As a result, the pore 59 is incompletely sealed, and an opening passage 62 surrounded by the aluminum oxide 61 is secured in the pore 59. As a result, even if the aluminum oxide 61 expands in the pore 59, it is possible to secure a escape place for the expanded aluminum oxide 61 and almost prevent the occurrence of compressive stress in the porous layer or the like.

  When the cooling plate 36 is immersed in boiling water for 30 to 60 minutes, as shown in FIG. 4C, the aluminum oxide 62 greatly expands and grows near the surface of the anodized film 57 in the pore 59, The pore 59 is almost sealed. Therefore, the immersion time of the cooling plate 36 in boiling water is less than 30 minutes, preferably 5 minutes to 10 minutes.

  In the alumite film 57 formed by an anodizing treatment using an oxalic acid solution and a semi-sealing treatment in which the cooling plate 36 is immersed in boiling water for 5 to 10 minutes, the cooling plate 36 is heated to a high temperature by the HARC treatment. However, since the escape field of the aluminum oxide 61 is secured in the pore 59, almost no compressive stress is generated in the porous layer or the like. Further, since the residual stress hardly occurs in the alumite film 57, the residual stress is not added to the thermal stress. As a result, the alumite film 57 is not destroyed. This effect is particularly remarkable in JIS standard A6061 alloy.

  In addition, the size of the cell 58, the thickness of the barrier layer, and the diameter of the pore 59 in the anodized film 57 change in accordance with the voltage applied to the oxalic acid solution by the DC power source connected to the cooling plate 36 in the anodizing process. To do. Specifically, as shown in FIG. 5, the size of the cell 58, the thickness of the barrier layer, and the diameter of the pore 59 increase as the applied voltage increases. However, these increases are different from each other, the increase in the size of the cell 58 is the largest, and the increase in the diameter of the pore 59 is the smallest. Therefore, when the applied voltage is increased, the pore 59 becomes relatively small with respect to the cell 58, and the density of the alumite film 57 is improved. When the alumite film 57 becomes dense, there is a high possibility that the escape area of the aluminum oxide 61 is not secured in each pore 59. Therefore, the voltage applied to the oxalic acid solution is preferably below a certain threshold value.

  Next, the film forming method according to the present embodiment will be described.

  FIG. 6 is a flowchart of the film forming method according to the present embodiment.

  In FIG. 6, first, the cooling plate 36 with the aluminum base material 56 exposed on the surface is connected to the anode of the DC power source and immersed in the oxalic acid solution to oxidize the surface of the cooling plate 36 (step S61). (Anodizing treatment).

  Next, the cooling plate 36 with the alumite film 57 formed on the surface is immersed in boiling water for 5 to 10 minutes (step S62) (semi-sealing process), and this process ends.

  According to the process of FIG. 6, the cooling plate 36 is connected to the anode of the DC power source and immersed in the oxalic acid solution, and the cooling plate 36 is immersed in boiling water for 5 to 10 minutes. Thereby, in the alumite film | membrane 57, generation | occurrence | production of the residual stress by the collision of crystal columns can be suppressed. In addition, the growth amount of the aluminum oxide 61 can be reduced in each pore 59, and a escape field for the aluminum oxide 61 can be secured in each pore 59, so that almost no compressive stress is generated in the porous layer or the like. Therefore, even if the cooling plate 36 reaches a high temperature, the alumite film 57 is not broken, and generation of particles due to chipping of the alumite film 57 can be prevented. That is, the heat resistance of the cooling plate 36 can be improved.

  Although the cooling plate 36 has a plurality of gas holes 44, since the gas holes 44 are usually pores, even if particles such as yttria are blown toward the surface of the gas holes 44 by gun spray or the like, the particles are sufficient. Part that does not adhere to the surface occurs. That is, it is difficult to form an yttria film having excellent heat resistance on the surface of the gas hole 44 by spraying, but in the process of FIG. 6, the cooling plate 36 is immersed in the oxalic acid solution. An oxalic acid solution, which is an electrolytic solution, contacts the surface of 44. Therefore, the alumite film 57 can be formed on the surface of the gas hole 44. Thereby, the heat resistance of the cooling plate 36 can be improved reliably. It should be noted that other parts having a surface that cannot be sufficiently sprayed with particles such as yttria by gun spray, or a surface that cannot be sprayed at all, such as other parts having pores, deep holes, or intricate recesses, are also oxalic acid. By immersing in the solution, the alumite film 57 can be formed on the entire surface, whereby the heat resistance can be reliably improved.

  In the HARC process, the surface of the cooling plate 36, specifically, the surface of the gas hole 44 is exposed to a high-power plasma atmosphere, but an incompletely sealed pore 59 is formed on the surface of the gas hole 44. Since the alumite film 57 having the residual stress suppressed is formed, the generation of particles due to chipping of the alumite film 57 can be prevented even when the cooling plate 36 is exposed to a high-power plasma atmosphere.

  In the process of FIG. 6 described above, the alumite film 57 is formed on the surface of the cooling plate 36, but the parts on which the alumite film 57 is formed are not limited thereto. For example, an alumite film 57 may be formed on the surface of the upper electrode body 37 by the process of FIG.

  Next, examples of the present invention will be specifically described.

Example An alumite film 57 was formed on the surface of the cooling plate 36 by the process of FIG. 6, and the cooling plate 36 was incorporated into the substrate processing apparatus 10. Next, a wafer W having a thermal oxide film was prepared, and the wafer W was subjected to HARC processing by the substrate processing apparatus 10. In this HARC process, the pressure in the chamber 11 is set to 3.33 Pa (25 mTorr), the high frequency power of 3300 W is supplied to the ceiling electrode plate 35, the high frequency power of 3800 W is supplied to the susceptor 12, and the processing space S the _C 5 _{F 8} gas, the process gas consisting of Ar gas and _{O 2} gas _(flow rate ratio of C 5 _{F 8} gas, Ar gas and _{O 2} gas 29/750/47) is supplied, the suction surface and the wafer W In the gap on the back surface, 2.00 MPa (15 Torr) He gas and 5.33 MPa (40 Torr) He gas are supplied to the central part and the peripheral part of the wafer W, respectively. The bottom surface temperatures were set to 60 ° C., 60 ° C., and 20 ° C., respectively, and this state was maintained for 60 seconds. Then, after the HARC process, the etch rate of the thermal oxide film on the wafer W was calculated, and the cooling plate 36 was removed from the substrate processing apparatus 10 to check the state of the alumite film 57.

Comparative Example An alumite film 48 was formed on the surface of the cooling plate 36 by anodizing treatment using a sulfuric acid solution and sealing treatment using water vapor, and the cooling plate 36 was incorporated into the substrate processing apparatus 10. Next, a wafer W having a thermal oxide film was prepared, and the substrate processing apparatus 10 performed HARC processing on the wafer W under the same conditions as in the example. After the HARC process, the etch rate of the thermal oxide film on the wafer W was calculated, and the cooling plate 36 was removed from the substrate processing apparatus 10 to check the state of the alumite film 48.

  As a result of confirming the state of the alumite films 48 and 57, it was confirmed that cracks were not generated in the alumite film 57 of the example, but cracks were generated in the alumite film 48 of the comparative example. Thereby, it turned out that the heat resistance of the cooling plate 36 can be improved reliably by the process of FIG.

  In addition, a significant difference could not be found between the thermal oxide film etch rate in the example and the thermal oxide film etch rate in the comparative example. Therefore, it was found that the alumite film 57 formed by the treatment of FIG. 6 does not affect the plasma treatment.

It is sectional drawing which shows schematic structure of the substrate processing apparatus with which the components for substrate processing apparatuses which concern on embodiment of this invention are applied. It is a cross-sectional perspective view which shows the structure of the general anodized film formed in the surface of the components for substrate processing apparatuses. It is a figure which shows the growth form of the alumite film in a normal film formation method, FIG. 3 (A) is a figure which shows the expansion and growth form of the aluminum oxide in a pore, FIG. 3 (B) shows the growth direction of an alumite film. FIG. 3 (C) is a diagram showing an extended form of crystal columns in the alumite film. It is a figure which shows the growth form of the alumite film in the film formation method which concerns on this Embodiment, FIG. 4 (A) is a figure which shows the growth direction of an alumite film | membrane, FIG. It is a figure which shows the expansion and growth form of the aluminum oxide in the pore at the time of being immersed over 10 minutes, FIG.4 (C) is the oxidation in the pore at the time of immersing components in boiling water for 30 minutes-60 minutes It is a figure which shows the expansion | swelling and growth form of aluminum. It is a graph which shows the relationship between the voltage applied to an oxalic acid solution, and the increase in the size of the cell in an alumite film | membrane, the thickness of a barrier layer, and the diameter of a pore. It is a flowchart of the membrane | film | coat formation method which concerns on this Embodiment.

Explanation of symbols

S Processing space W Wafer 10 Substrate processing apparatus 11 Chamber 36 Cooling plate 37 Upper electrode body 48, 57 Anodized film 49, 56 Aluminum base material
50 Barrier layer 51 Porous layer 52, 58 Cell 53, 59 Pore 55 Crystal column 60, 61, 63 Aluminum oxide

Claims (8)

In parts for substrate processing equipment that performs plasma processing on substrates,
A film formed on the surface of the component by anodizing by connecting the component to the anode of a DC power source and immersing in a solution containing an organic acid as a main component;
A part for a substrate processing apparatus, wherein the film is subjected to a semi-sealing process using boiling water.   2. The component for a substrate processing apparatus according to claim 1, wherein in the semi-sealing treatment, the component for the substrate processing apparatus is immersed in the boiling water for 5 to 10 minutes.   3. The component for a substrate processing apparatus according to claim 1, wherein the component has a surface on which a film cannot be formed by thermal spraying.   4. The component for a substrate processing apparatus according to claim 3, wherein the surface is a surface of at least one hole or recess.   The component for a substrate processing apparatus according to any one of claims 1 to 4, wherein the surface is exposed to a high-power plasma atmosphere.   The component for a substrate processing apparatus according to claim 1, wherein the component for the substrate processing apparatus is a disc-shaped cooling plate, and the cooling plate has a plurality of through holes. parts.   7. The component for a substrate processing apparatus according to claim 1, wherein the base material forming the component is a JIS standard A6061 alloy. In the method of forming a film on a component for a substrate processing apparatus that performs plasma processing on a substrate
An anodic oxidation step in which the component is connected to the anode of a DC power source and immersed in a solution containing organic acid as a main component;
And a semi-sealing step of immersing the part in boiling water for 5 to 10 minutes.

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