JP2008073889A - Method for manufacturing nozzle plate, method for manufacturing liquid droplet jet head, and image forming apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve the precision of an opening at the ink-ejection side of a nozzle and quality of the edge thereof. <P>SOLUTION: This method for manufacturing a nozzle plate comprises the process of using an exposure mask which keeps an opaque metallic film layer patterned on one face of a transparent substrate according to a nozzle pattern to form a photosensitive resin layer on the exposure mask at the side of the opaque metallic film, the process of exposing the photosensitive resin layer from the side of the transparent substrate of the exposure mask, the process of developing the photosensitive resin layer, the process of forming a sacrifice layer on the opaque metallic film layer, the process of forming a metallic layer on the sacrifice layer, the process of separating the exposure mask from the metallic layer and the sacrifice layer, and the process of removing the sacrifice layer. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a nozzle plate manufacturing method, a droplet discharge head manufacturing method, and an image forming apparatus, and more particularly to a nozzle plate manufacturing method using an electroforming method.

  A recording head used in an ink jet recording apparatus is provided with a nozzle plate in which a large number of nozzles are formed. For example, ink in a pressure chamber is applied using displacement of a piezoelectric element or heat energy generated by a heating element. The liquid droplets (ink droplets) are ejected from a nozzle that is pressurized and communicates with the pressure chamber. In order to achieve high-resolution and high-quality image recording, it is necessary to achieve stable ejection by eliminating variations in the volume, ejection direction, and ejection speed of the droplets ejected from each nozzle. Therefore, it is required to improve the accuracy and improve the quality of the nozzles formed on the surface. In particular, the opening accuracy and edge quality on the ink ejection side of the nozzle are important. If these accuracy and quality are poor, the ejection characteristics of each nozzle are likely to vary, which causes instability of ejection.

  Examples of nozzle plate manufacturing methods include laser processing, press processing, electroforming, and the like. Among these methods, electroforming methods are less expensive than other methods. Has been widely adopted because it can be mass-produced, and various methods have been proposed so far.

For example, Patent Document 1 describes a method of performing the following backside exposure as a method using an electroforming method. That is, as shown in FIG. 15A, an opaque metal film (nickel plating layer) 902 is patterned on one surface of a transparent substrate (glass substrate) 900, and a resist layer (photoresist layer) 906 is further formed on the opaque metal film 902. Form. Next, when the resist layer 906 is exposed and developed from the transparent substrate 900 side through the opaque metal film 902, as shown in FIG. 15B, a columnar resist 906a corresponding to the opening region 902a of the opaque metal film 902 is obtained. Is patterned. Then, a metal layer (nickel plating layer) 910 is formed on the opaque metal film 902 by electroforming (electroplating). The metal layer 910 formed at this time corresponds to a nozzle plate (or a part thereof), and the nozzle shape is a shape corresponding to the external shape of the resist 906a. Further, the joint surface of the metal layer 910 with the opaque metal film 902 is the surface on the ink ejection side of the nozzle plate.
JP 7-329304 A

  However, Patent Document 1 does not consider that the root shape of the resist after development deteriorates due to diffraction of light, a residue after resist development, or the like. That is, as shown in FIG. 15A, when the resist 906 layer is exposed and developed from the transparent substrate 900 side through the opaque metal film 902, ultraviolet light when passing through the opening region 902a of the opaque metal film 902 ( Due to diffraction of UV light, residues after resist development, and the like, the original shape (cylindrical shape) does not become like the resist 906a shown in FIG. 15B, but is opaque like the resist 906a ′ shown in FIG. In some cases, the root portion located on the metal film 902 side is widened. When the nozzles are formed according to the external shape of the resist 906a 'whose root shape has deteriorated in this way, the shape accuracy and edge quality on the ink discharge side of the nozzles are lowered, and the discharge characteristics of each nozzle vary. It becomes a factor of unstable discharge.

  The present invention has been made in view of such circumstances, and provides a nozzle plate manufacturing method, a droplet discharge head manufacturing method, and an image forming apparatus that improve the opening accuracy and edge quality of the ink discharge side of the nozzle. The purpose is to do.

  In order to achieve the above object, the invention according to claim 1 is characterized in that an opaque mask is formed on one side of a transparent substrate and an opaque mask is patterned on the opaque metal film side of the mask for exposure. Forming a photosensitive resin layer, exposing the photosensitive resin layer from the transparent substrate side of the exposure mask, developing the photosensitive resin layer, and forming a sacrificial layer on the opaque metal film A step of forming a metal layer on the sacrificial layer, a step of separating the exposure mask from the metal layer and the sacrificial layer, and a step of removing the sacrificial layer. A method for manufacturing a nozzle plate is provided.

  According to the present invention, the sacrificial layer and the metal layer are sequentially formed on the opaque metal film, and then the sacrificial layer is removed, so that a deteriorated portion of the root shape of the developed resist (photosensitive resin) is reflected in the nozzle shape. Since it is canceled without being canceled, it is possible to form a nozzle with good opening accuracy and edge quality on the ink ejection side.

  The invention according to claim 2 is a step of forming a photosensitive resin layer on the opaque metal film side of the exposure mask using an exposure mask in which an opaque metal film is patterned according to a nozzle pattern on one side of a transparent substrate. A step of exposing the photosensitive resin layer from the transparent substrate side of the exposure mask; a step of developing the photosensitive resin layer; a step of forming a sacrificial layer on the opaque metal film; Forming a liquid repellent layer on the substrate, forming a metal layer on the liquid repellent layer, separating the exposure mask from the metal layer, the liquid repellent layer, and the sacrificial layer, and the sacrificial layer. And a step of removing the nozzle plate.

  According to the second aspect of the present invention, the sacrificial layer, the liquid repellent layer, and the metal layer are sequentially formed on the opaque metal film, and then the sacrificial layer is removed to thereby form the root shape of the resist (photosensitive resin) after development. Since the deteriorated portion is canceled without being reflected in the nozzle shape, it is possible to form a nozzle with good opening accuracy and edge quality on the ink ejection side. In addition, the nozzle plate on which the liquid repellent layer is formed can be manufactured in a series of steps, and the number of steps is reduced.

  Invention of Claim 3 is a manufacturing method of the nozzle plate of Claim 1 or Claim 2, Comprising: The board | substrate which consists of the said mask for exposure and the said photosensitive resin layer with respect to the irradiation direction of exposure light is provided. The exposure is performed while rotating the substrate about an axis perpendicular to the substrate in a state inclined at an oblique predetermined angle.

  According to the aspect of the third aspect, it is possible to form a tapered nozzle with good opening accuracy and edge quality on the ink ejection side, and high-frequency ejection of high viscosity ink is possible.

  Invention of Claim 4 is a manufacturing method of the nozzle plate of Claim 3, Comprising: The said exposure further includes the process exposed on the conditions from which the inclination angle of the said board | substrate with respect to exposure light differs. To do.

  According to the fourth aspect of the present invention, it is possible to easily produce a nozzle plate having a deformed tapered nozzle composed of inclined surfaces (inner wall surfaces) having different taper angles. In addition, variations in the ejection direction of each nozzle can be suppressed in the same direction.

  According to a fifth aspect of the present invention, a first photosensitive resin layer is formed on the opaque metal film side of the exposure mask using an exposure mask in which an opaque metal film is patterned on one side of a transparent substrate according to a nozzle pattern. A step of exposing the first photosensitive resin layer from the transparent substrate side of the exposure mask in a state where the exposure mask is perpendicular to an irradiation direction of exposure light, and the first photosensitive A step of developing the conductive resin layer, a step of forming a sacrificial layer on the opaque metal film, a step of forming a first metal layer on the sacrificial layer, and a second on the first metal layer. A step of forming a photosensitive resin layer and a substrate made of the exposure mask, the sacrificial layer, the first metal layer, and the second photosensitive resin layer with respect to a direction in which exposure light is irradiated are obliquely predetermined. Centered on an axis perpendicular to the substrate in an inclined state Rotating the substrate and exposing the second photosensitive resin layer from the transparent substrate side of the exposure mask, developing the second photosensitive resin layer, and the first metal Forming a second metal layer on the layer, separating the exposure mask from the first metal layer, the second metal layer, and the sacrificial layer, and removing the sacrificial layer And a method of manufacturing a nozzle plate.

  According to the fifth aspect of the present invention, after the sacrificial layer, the liquid repellent layer, the first metal layer, and the second metal layer are sequentially formed on the opaque metal film, the sacrificial layer is removed, thereby developing the resist after development. Since the deteriorated portion of the root shape of the (photosensitive resin) is canceled without being reflected in the nozzle shape, a nozzle with good opening accuracy and edge quality on the ink ejection side can be formed. Further, since the nozzle is configured in a taper straight shape having a taper portion and a straight portion, the discharge direction of the nozzle is stabilized.

  A sixth aspect of the present invention is the nozzle plate manufacturing method according to the fifth aspect, wherein the first metal layer has liquid repellency.

  According to the aspect of Claim 6, the nozzle plate provided with the liquid repellent layer can be produced in a series of steps.

  According to a seventh aspect of the present invention, there is provided a nozzle plate manufactured by the method for manufacturing a nozzle plate according to any one of the first to fourth aspects, and a flow path plate joined to the nozzle plate. A method for manufacturing a droplet discharge head, comprising: a step of bonding the flow path plate to the metal layer before separating the exposure mask. provide.

  According to an eighth aspect of the present invention, there is provided a liquid droplet ejection device comprising the nozzle plate manufactured by the nozzle plate manufacturing method according to the fifth or sixth aspect, and a flow path plate joined to the nozzle plate. A method of manufacturing a droplet discharge head, comprising the step of joining the flow path plate to the second metal layer before separating the exposure mask. .

  According to the invention described in claims 7 and 8, handling is facilitated even when the nozzle plate corresponding to the metal layer is thin. In addition, the number of man-hours can be reduced because there is no need to use a dummy substrate for pasting.

  According to a ninth aspect of the present invention, there is provided an image forming apparatus comprising the liquid droplet ejection head manufactured by the method for manufacturing the liquid droplet ejection head according to the seventh or eighth aspect. .

  According to the present invention, it is possible to record a high quality image.

  According to the present invention, the sacrificial layer and the metal layer are sequentially formed on the opaque metal film, and then the sacrificial layer is removed, so that a deteriorated portion of the root shape of the developed resist (photosensitive resin) is reflected in the nozzle shape. Since it is canceled without being canceled, it is possible to form a nozzle with good opening accuracy and edge quality on the ink ejection side.

  Hereinafter, preferred embodiments (first to fourth embodiments) of the present invention will be described in detail with reference to the accompanying drawings.

[First Embodiment]
First, an ink jet recording apparatus which is an embodiment of an image forming apparatus according to the present invention will be described. FIG. 1 is an overall configuration diagram showing an outline of an ink jet recording apparatus. As shown in FIG. 1, the inkjet recording apparatus 10 includes a printing unit 12 having a plurality of recording heads 12K, 12C, 12M, and 12Y provided for each ink color, and each recording head 12K, 12C, 12M, and 12Y. An ink storage / loading unit 14 for storing ink to be supplied to the printer, a paper supply unit 18 for supplying the recording paper 16, a decurling unit 20 for removing curling of the recording paper 16, and ink ejection of the printing unit 12 A suction belt conveying unit 22 that conveys the recording paper 16 while maintaining the flatness of the recording paper 16, a print detection unit 24 that reads a printing result by the printing unit 12, and a print And a paper discharge unit 26 for discharging the printed recording paper (printed matter) to the outside.

  In FIG. 1, a magazine for rolled paper (continuous paper) is shown as an example of the paper supply unit 18, but a plurality of magazines having different paper widths, paper quality, and the like may be provided side by side. Further, instead of the roll paper magazine or in combination therewith, the paper may be supplied by a cassette in which cut papers are stacked and loaded.

  In the case of an apparatus configuration using roll paper, a cutter 28 is provided as shown in FIG. 1, and the roll paper is cut into a desired size by the cutter 28. The cutter 28 includes a fixed blade 28A having a length equal to or greater than the conveyance path width of the recording paper 16, and a round blade 28B that moves along the fixed blade 28A. The fixed blade 28A is provided on the back side of the print. The round blade 28B is arranged on the print surface side with the conveyance path interposed therebetween. Note that the cutter 28 is not necessary when cut paper is used.

  When multiple types of recording paper are used, an information recording body such as a barcode or wireless tag that records paper type information is attached to the magazine, and the information on the information recording body is read by a predetermined reader. Therefore, it is preferable to automatically determine the type of paper to be used and perform ink ejection control so as to realize appropriate ink ejection according to the type of paper.

  The recording paper 16 delivered from the paper supply unit 18 retains curl due to having been loaded in the magazine. In order to remove this curl, heat is applied to the recording paper 16 by the heating drum 30 in the direction opposite to the curl direction of the magazine in the decurling unit 20. At this time, it is more preferable to control the heating temperature so that the printed surface is slightly curled outward.

  After the decurling process, the cut recording paper 16 is sent to the suction belt conveyance unit 22. The suction belt conveyance unit 22 has a structure in which an endless belt 33 is wound between rollers 31 and 32, and at least a portion facing the ink ejection surface of the printing unit 12 and the sensor surface of the printing detection unit 24 is flat. It is comprised so that it may make.

  The belt 33 has a width that is greater than the width of the recording paper 16, and a plurality of suction holes (not shown) are formed on the belt surface. As shown in FIG. 1, an adsorption chamber 34 is provided at a position facing the ink ejection surface of the printing unit 12 and the sensor surface of the printing detection unit 24 inside the belt 33 spanned between the rollers 31 and 32. The suction chamber 34 is sucked by the fan 35 to be a negative pressure so that the recording paper 16 on the belt 33 is sucked and held.

  The power of a motor (not shown) is transmitted to at least one of the rollers 31 and 32 around which the belt 33 is wound, so that the belt 33 is driven in the clockwise direction in FIG. The recording paper 16 is conveyed from left to right in FIG.

  Since ink adheres to the belt 33 when a borderless print or the like is printed, the belt cleaning unit 36 is provided at a predetermined position outside the belt 33 (an appropriate position other than the print area). Although details of the configuration of the belt cleaning unit 36 are not shown, for example, there are a method of niping a brush roll, a water absorbing roll, etc., an air blowing method of spraying clean air, or a combination thereof. In the case where the cleaning roll is nipped, the cleaning effect is great if the belt linear velocity and the roller linear velocity are changed.

Although a mode using a roller / nip conveyance mechanism instead of the suction belt conveyance unit 22 is also conceivable, if the roller / nip conveyance is performed in the print area, the roller contacts the print surface of the paper immediately after printing, so that the image blurs. There is a problem that it is easy. Therefore, as in this example, suction belt conveyance that does not contact the image surface in the printing region is preferable.

  A heating fan 40 is provided on the upstream side of the printing unit 12 on the paper conveyance path formed by the suction belt conveyance unit 22. The heating fan 40 heats the recording paper 16 by blowing heated air onto the recording paper 16 before printing. Heating the recording paper 16 immediately before printing makes it easier for the ink to dry after landing.

  The printing unit 12 is a so-called full-line type head in which line-type heads having a length corresponding to the maximum paper width are arranged in a direction (main scanning direction) orthogonal to the paper transport direction (sub-scanning direction). Each of the recording heads 12K, 12C, 12M, and 12Y constituting the printing unit 12 has a plurality of ink discharge ports (nozzles) arranged over a length exceeding at least one side of the maximum size recording paper 16 targeted by the inkjet recording apparatus 10. It is composed of a line type head.

  Recording corresponding to each color ink in the order of black (K), cyan (C), magenta (M), and yellow (Y) from the upstream side (left side in FIG. 1) along the conveyance direction (paper conveyance direction) of the recording paper 16. Heads 12K, 12C, 12M, and 12Y are arranged. A color image can be formed on the recording paper 16 by discharging the color inks from the recording heads 12K, 12C, 12M, and 12Y while conveying the recording paper 16.

  Thus, according to the printing unit 12 in which the full line head that covers the entire width of the paper is provided for each ink color, the recording paper 16 and the printing unit 12 are relatively moved in the paper transport direction (sub-scanning direction). It is possible to record an image on the entire surface of the recording paper 16 by performing this operation only once (that is, by one sub-scan). Thereby, high-speed printing is possible and productivity can be improved as compared with the shuttle type head in which the recording head reciprocates in the direction (main scanning direction) orthogonal to the paper transport direction.

  In this example, the configuration of KCMY standard colors (four colors) is illustrated, but the combination of ink colors and the number of colors is not limited to this embodiment, and light ink and dark ink are added as necessary. May be. For example, it is possible to add a recording head that discharges light ink such as light cyan and light magenta.

  As shown in FIG. 1, the ink storage / loading unit 14 has tanks that store inks of colors corresponding to the recording heads 12K, 12C, 12M, and 12Y, and each tank has a pipeline that is not shown. Via the recording heads 12K, 12C, 12M, and 12Y. Further, the ink storage / loading unit 14 includes notifying means (display means, warning sound generating means, etc.) for notifying when the ink remaining amount is low, and has a mechanism for preventing erroneous loading between colors. is doing.

  The print detection unit 24 includes an image sensor (line sensor or the like) for imaging the droplet ejection result of the print unit 12, and means for checking nozzle clogging and other ejection defects from the droplet ejection image read by the image sensor. Function as.

The print detection unit 24 of this example is composed of a line sensor having a light receiving element array that is wider than at least the ink ejection width (image recording width) of each recording head 12K, 12C, 12M, 12Y. This line sensor is a photoelectric conversion element (pixel) provided with a red (R) color filter.
A color separation line CCD sensor comprising: an R sensor array in which G is arranged in a line, a G sensor array provided with a green (G) color filter, and a B sensor array provided with a blue (B) color filter It consists of Instead of the line sensor, an area sensor in which the light receiving elements are two-dimensionally arranged can be used.

  The print detection unit 24 reads the test pattern printed by the recording heads 12K, 12C, 12M, and 12Y for each color, and detects the ejection of each head. The ejection determination includes the presence / absence of ejection, measurement of dot size, measurement of dot landing position, and the like.

  A post-drying unit 42 is provided following the print detection unit 24. The post-drying unit 42 is means for drying the printed image surface, and for example, a heating fan is used. Since it is preferable to avoid contact with the printing surface until the ink after printing is dried, a method of blowing hot air is preferred.

  When printing on porous paper with dye-based ink, the weather resistance of the image is improved by preventing contact with ozone or other things that cause dye molecules to break by blocking the paper holes by pressurization. There is an effect to.

  A heating / pressurizing unit 44 is provided following the post-drying unit 42. The heating / pressurizing unit 44 is a means for controlling the glossiness of the image surface, and pressurizes with a pressure roller 45 having a predetermined uneven surface shape while heating the image surface to transfer the uneven shape to the image surface. To do.

  The printed matter generated in this manner is outputted from the paper output unit 26. It is preferable that the original image to be printed (printed target image) and the test print are discharged separately. The ink jet recording apparatus 10 is provided with sorting means (not shown) for switching the paper discharge path in order to select the print product of the main image and the print product of the test print and send them to the discharge units 26A and 26B. ing. Note that when the main image and the test print are simultaneously formed in parallel on a large sheet, the test print portion is separated by a cutter (second cutter) 48. The cutter 48 is provided immediately before the paper discharge unit 26, and cuts the main image and the test print unit when the test print is performed on the image margin. The structure of the cutter 48 is the same as that of the first cutter 28 described above, and includes a fixed blade 48A and a round blade 48B. Although not shown, the paper output unit 26A for the target prints is provided with a sorter for collecting prints according to print orders.

  Next, the structure of a recording head that is an embodiment of a droplet discharge head according to the present invention will be described. Since the recording heads 12K, 12C, 12M, and 12Y provided for each ink color have the same structure, the recording head is represented by reference numeral 50 below.

  FIG. 2 is a perspective plan view showing a structural example of the recording head 50. In order to increase the dot pitch printed on the recording paper surface, it is necessary to increase the nozzle pitch in the recording head 50. As shown in FIG. 2, the recording head 50 of the present example includes a plurality of ink chamber units (droplet discharge elements) including nozzles 51 serving as ink droplet discharge ports and pressure chambers 52 corresponding to the nozzles 51. 53 has a structure in which 53 are arranged in a staggered matrix (two-dimensional), so that the substantial nozzle interval projected so as to be aligned along the longitudinal direction of the recording head (direction perpendicular to the paper feed direction) High density (projection nozzle pitch) is achieved.

  The pressure chamber 52 provided corresponding to each nozzle 51 has a substantially square planar shape, and nozzles 51 and supply ink inlets (supply ports) 54 are provided at both corners on the diagonal line. ing.

  FIG. 3 is a cross-sectional view (a cross-sectional view taken along line 3-3 in FIG. 2) showing a three-dimensional configuration of one droplet discharge element (an ink chamber unit corresponding to one nozzle 51). As shown in FIG. 3, the ink ejection surface 50a of the recording head 50 is constituted by a nozzle plate 60 (60A). A plurality of nozzles 51 are formed in the nozzle plate 60, and each nozzle 51 communicates with the pressure chamber 52 via a nozzle channel 68.

  Further, the pressure chamber 52 communicates with the common channel 55 through a supply port 54 formed at one end thereof. The common channel 55 communicates with an ink tank (not shown) as an ink supply source, and the ink supplied from the ink tank is distributed and supplied to each pressure chamber 52 via the common channel 55.

  One wall surface (the upper wall surface in FIG. 3) of the pressure chamber 52 is constituted by a diaphragm 56 and faces the pressure chamber 52 at a position corresponding to the pressure chamber 52 on the diaphragm 56 (that is, sandwiching the diaphragm 56). At the position), a piezoelectric element 58 including an individual electrode 57 is provided. The diaphragm 56 also serves as a common electrode for the piezoelectric element 58. A wiring board 70 is bonded on the diaphragm 56, and a predetermined drive signal is supplied to the piezoelectric element 58 via wiring (not shown) formed on the wiring board 70.

  With this configuration, when a predetermined drive signal is supplied to the piezoelectric element 58, the volume of the pressure chamber 52 changes according to the deformation of the piezoelectric element 58, and the ink in the pressure chamber 52 is pressurized by the pressure change accompanying this. Then, an ink droplet is ejected from the nozzle 51 communicating with the pressure chamber 52. When the supply of the drive signal is canceled after ink ejection, new ink is supplied from the common flow channel 55 through the supply port 54 to the pressure chamber 52.

  In the present embodiment, a method of ejecting ink droplets by deformation of the piezoelectric element 58 typified by a piezo element is employed. However, the present invention is not limited to a method of ejecting ink, and the piezo element is not limited. Instead of the method, a thermal jet method in which ink is heated by a heating element such as a heater to generate bubbles and ink droplets are ejected by the pressure may be used.

  FIG. 4 is a schematic diagram showing the configuration of the ink supply system in the inkjet recording apparatus 10. In the figure, an ink tank 80 is a base tank that supplies ink to the recording head 50, and is installed in the ink storage / loading unit 14 described in FIG. In the form of the ink tank 80, there are a system that replenishes ink from a replenishment port (not shown) and a cartridge system that replaces the entire tank when the remaining amount of ink decreases. A cartridge system is suitable for changing the ink type according to the intended use. In this case, it is preferable that the ink type information is identified by a barcode or the like, and ejection control is performed according to the ink type. The ink tank 80 in FIG. 4 is equivalent to the ink storage / loading unit 14 in FIG. 1 described above.

  A filter 82 is provided between the ink tank 80 and the recording head 50 in order to remove foreign substances and bubbles. The filter mesh size is preferably equal to or smaller than the nozzle diameter (generally about 20 μm). Although not shown in FIG. 4, a configuration in which a sub tank is provided in the vicinity of the recording head 50 or integrally with the recording head 50 is also preferable. The sub-tank has a function of improving a damper effect and refill that prevents fluctuations in the internal pressure of the recording head 50.

  Further, the inkjet recording apparatus 10 is provided with a cap 84 as a means for preventing an increase in ink viscosity near the nozzles and drying, and a cleaning blade 86 as a means for cleaning the ink discharge surface 50a of the recording head 50. ing. The maintenance unit including the cap 84 and the cleaning blade 86 can be moved relative to the recording head 50 by a moving mechanism (not shown), and is moved from a predetermined retracted position to a maintenance position below the recording head 50 as necessary. The

  The cap 84 is displaced up and down relatively with respect to the recording head 50 by an elevator mechanism (not shown). The cap 84 is raised to a predetermined raised position when the power is turned off or during printing standby, and is brought into close contact with the recording head 50, thereby covering the ink ejection surface 50 a with the cap 84.

  The cleaning blade 86 is made of an elastic member such as rubber, and can slide on the ink discharge surface 50a of the recording head 50 by a blade moving mechanism (not shown). When ink droplets or foreign matters adhere to the ink ejection surface 50a, the ink droplets or the like are wiped off by performing a so-called wiping operation in which the cleaning blade 86 slides on the ink ejection surface 50a.

  During printing or standby, when a specific nozzle is used less frequently and the ink viscosity in the vicinity of the nozzle increases, preliminary ejection is performed toward the cap 84 to discharge the deteriorated ink.

  Further, when bubbles are mixed in the ink in the recording head 50 (in the pressure chamber 52), the cap 84 is applied to the recording head 50, and the ink in the recording head 50 (ink mixed with bubbles) is sucked by the suction pump 87. The removed and sucked ink is sent to the collection tank 88. In this suction operation, the deteriorated ink that has increased in viscosity (solidified) is sucked when the initial ink is loaded into the recording head 50 or when the ink is used after being stopped for a long time.

  If the recording head 50 is not ejected for a certain period of time, the ink solvent near the nozzles evaporates and the viscosity of the ink near the nozzles increases, and the ejection drive actuator (piezoelectric element 58) operates. Ink is not discharged from the nozzle 51. Therefore, before this state is reached (within the viscosity range in which ink can be ejected by the operation of the piezoelectric element 58), the piezoelectric element 58 is operated toward the ink receiver, and the ink in the vicinity of the nozzle whose viscosity has increased is removed. “Preliminary discharge” is performed. Further, after the dirt on the ink discharge surface 50a is cleaned by a wiper such as a cleaning blade 86 provided as a cleaning means for the ink discharge surface 50a, foreign matters are mixed in the nozzle by this wiper rubbing operation (wiping operation). In order to prevent this, preliminary discharge is performed. Note that the preliminary discharge may be referred to as “empty discharge”, “purge”, “spitting”, or the like.

  Further, if bubbles are mixed into the nozzle 51 or the pressure chamber 52 or if the ink viscosity in the vicinity of the nozzle exceeds a certain level, ink cannot be ejected by the preliminary ejection, and the suction operation described below is performed.

  That is, when bubbles are mixed in the ink in the nozzle 51 or the pressure chamber 52, or when the ink viscosity in the vicinity of the nozzle rises to a certain level or more, the ink cannot be ejected from the nozzle even if the piezoelectric element 58 is operated. . In such a case, the cap 84 is brought into contact with the ink discharge surface 50a of the recording head 50 as a suction means for sucking the ink in the pressure chamber 52 with a pump or the like, and the ink containing the bubbles or the thickened ink is sucked. Is done.

  Next, a manufacturing method of the nozzle plate 60A as the first embodiment according to the present invention will be described. FIG. 5 is a diagram showing a process sequence for manufacturing the nozzle plate 60A. FIG. 6 is a diagram for explaining each step shown in FIG. Hereinafter, according to FIG. 5, each process is demonstrated, referring FIG.

  First, as a mask manufacturing step (step S102), as shown in FIG. 6A, an exposure mask 104 made of a transparent substrate 100 and an opaque metal film 102 is manufactured. Specifically, the opaque metal film 102 is patterned on one surface of the transparent substrate 100 made of a material that transmits ultraviolet light (for example, quartz, glass, etc.) according to the nozzle pattern. That is, the opaque metal film 102 is formed on the transparent substrate 100 and patterned so that an opening region 102a corresponding to the opening shape of the nozzle 51 on the ink ejection side is formed at a predetermined nozzle formation position. The opaque metal film 102 is a metal film that blocks ultraviolet light. For example, a Cr film is preferably used. As a method for forming the opaque metal film 102, various methods such as sputtering and vacuum deposition can be used. Further, by using a photolithography method as a patterning method, the opaque metal film 102 can be formed with high accuracy. In this way, an exposure mask 104 composed of the transparent substrate 100 and the opaque metal film 102 can be obtained. In this manufacturing method, the exposure mask 104 can be reused, and this step (mask manufacturing step) is not necessary when the exposure mask 104 has already been manufactured.

  Next, as a resist formation step (step S104), a resist (photosensitive resin) 106 is formed on the exposure mask 104 as shown in FIG. 6B. Specifically, a negative resist (negative resist) 106 is applied to the opaque metal film 102 side of the exposure mask 104 by a spin coater or the like. The thickness of the resist 106 corresponds to the thickness of the nozzle plate 60A, and the thickness of the resist 106 is configured to be larger than the total thickness of the sacrificial layer 108 and the metal layer 110 formed in a later process.

  Next, as an exposure step (step S106), as shown in FIG. 6C, the resist 106 on the exposure mask 104 is exposed. Specifically, the resist 106 is irradiated with ultraviolet light (UV light) perpendicular to the exposure mask 104 from the transparent substrate 100 side of the exposure mask 104 through the opaque metal film 102. Thereby, the resist region 106 a corresponding to the opening region 102 a of the opaque metal film 102 is exposed. Since the ultraviolet light irradiated from the transparent substrate 100 side is blocked by the opaque metal film 102, other resist regions are not exposed. Subsequently, when the resist 106 is developed as a developing step (step S108), the resist 106a is patterned on the exposure mask 104 as shown in FIG. 6D.

  In such an exposure process or development process, as described above, the exposure of the resist 106a is caused by the diffraction of ultraviolet light when passing through the opening region 102a of the opaque metal film 102 or the residue after resist development as shown in the figure. The root shape located on the mask 104 side (that is, the opaque metal film 102 side) may not be the original cylindrical shape (straight section), but may become a spread shape. When the nozzles are formed according to the external shape of the resist 106a whose root shape has deteriorated in this way, the opening accuracy and edge quality on the ink discharge side of the nozzles are lowered, and the discharge characteristics of each nozzle vary. It becomes a factor of unstable discharge.

  Therefore, in this manufacturing method, in order to cancel the deteriorated portion of the base shape of the resist 106a, in the next sacrificial layer forming step (step S110), as shown in FIG. A sacrificial layer 108 having a predetermined thickness is formed so as to include a portion where the root shape of 106a is deteriorated. The thickness of the sacrificial layer 108 is, for example, about 1 to 3 μm. As the sacrificial layer 108, a plating film such as Cu, Zn, Sn, or Pb can be used, and can be formed by a method using electroless plating or electroplating. In electroless plating, the growth of the plating film is slow, but a uniform film thickness can be formed. On the other hand, in electroplating, the film thickness tends to be non-uniform due to the electric resistance of the power feeding layer (the opaque metal film 102), but the plating film grows quickly. Therefore, a plating film forming method is appropriately selected according to the required film thickness and accuracy, and a film capable of plating the opaque metal film 102 may be selected in accordance with this selection. Moreover, after forming a power feeding layer having a sufficiently small electric resistance by electroless plating, electroplating may be performed using the power feeding layer. In this case, a plating film (sacrificial layer 108) having a uniform film thickness and a sufficient growth rate can be formed.

  Next, as an electroforming process (step S112), as shown in FIG. 6F, a metal layer 110 is formed on the opaque metal film 102 by Ni electroforming (electroplating). Subsequently, as a peeling step (step S114), as shown in FIG. 6G, after removing the resist 106a with an organic solvent or the like, the exposure mask 104 is peeled from the sacrificial layer 108 and the metal layer 110. The exposed mask 104 after peeling can be reused. Finally, when the sacrificial layer 108 is removed as a sacrificial layer removal step (step S116), a nozzle plate 60A made of the metal layer 110 can be obtained as shown in FIG. 6 (h). As shown in FIG. 3, the recording head 50 of this embodiment can be obtained by joining the nozzle plate 60 </ b> A to the flow path plate 66.

  According to the manufacturing method of the nozzle plate 60A according to the present embodiment, the sacrificial layer 108 and the metal layer 110 are sequentially formed on the opaque metal film 102, and then the sacrificial layer 108 is removed, thereby deteriorating the root shape of the resist 106a. Since the portion is canceled without being reflected in the nozzle shape, it is possible to form the nozzle 51A with good opening accuracy and edge quality on the ink ejection side.

  In the present embodiment, the electroforming step may be performed after the sacrificial layer forming step and the liquid repellent layer forming step. Specifically, as shown in FIG. 7A, after the sacrificial layer 108 is formed on the opaque metal film 102, the liquid repellent layer 112 is formed on the sacrificial layer 108 by liquid repellent plating, A metal layer 110 is formed on the layer 112. As a result, as shown in FIG. 7B, a nozzle plate 60A ′ composed of the metal layer 110 and the liquid repellent layer 112 can be obtained. The nozzle plate 60A ′ on which the liquid repellent layer 112 is formed can be manufactured in a series of steps, and the number of man-hours can be reduced compared to the case where the liquid repellent treatment is performed after the nozzle plate 60A is completed. In addition, when composite plating containing a fluororesin is used as the liquid repellent plating, it is preferable to perform a heat treatment after the peeling step, and the liquid repellency can be improved. Further, when the liquid repellent performance is insufficient by the liquid repellent plating, another liquid repellent film may be formed after the nozzle plate is manufactured.

  In the present embodiment, as shown in FIG. 8, after the electroforming process, the separation step may be performed after joining the flow path plate 66 on the metal layer 110. Further, the separation step may be performed after another plate member (a constituent member of the pressure chamber 52 or the common flow channel 55) is further joined on the flow channel plate 66. This facilitates handling even when the metal layer 110 is thin. In addition, the number of man-hours is reduced because there is no need to replace the dummy substrate.

[Second Embodiment]
Next, a second embodiment according to the present invention will be described. Hereinafter, description of parts common to the first embodiment will be omitted, and description will be made focusing on characteristic parts of the present embodiment.

  FIG. 9 is a diagram for explaining a manufacturing process of the nozzle plate 60B as the second embodiment. As shown in FIG. 9H, the nozzle plate 60B of the present embodiment is formed with a tapered nozzle 51B that tapers toward the ink ejection side. Hereinafter, the manufacturing method of the nozzle plate 60B will be described with reference to FIG.

  First, as a mask manufacturing process, as shown in FIG. 9A, an exposure mask 204 made of a transparent substrate 200 and an opaque metal film 202 is manufactured. Reference numeral 202a represents an opening region of the opaque metal film 202 formed according to the nozzle pattern. Next, as a resist formation step, as shown in FIG. 9B, a negative resist (negative resist) 206 is applied to the opaque metal film 202 side of the exposure mask 204 by a spin coater or the like. The steps up to here are the same as in the first embodiment.

  Next, as an exposure step, as shown in FIG. 9C, when the ultraviolet light is irradiated from the transparent substrate 200 side of the exposure mask 204, the exposure mask 204 and the resist 206 are irradiated with respect to the irradiation direction of the ultraviolet light. The substrate 220 is rotated while the substrate 220 is rotated about an axis P perpendicular to the substrate 220 while the substrate 220 is inclined at a predetermined angle θ [degree]. By performing such tilt rotation exposure, the reverse tapered columnar resist region 206a corresponding to the tilt angle θ of the substrate 220 is exposed. The other resist regions are not exposed because the opaque metal film 202 blocks ultraviolet light. After that, when the resist 206 is developed as a development step, the reverse tapered columnar resist 206a is patterned on the exposure mask 204 as shown in FIG. 9D.

  As described in the first embodiment, even in this embodiment, the root shape of the resist 206a may be deteriorated due to light diffraction or a residue after resist development. In FIG. 9, the root shape of the resist 206a is deteriorated. The illustration of the deteriorated part is omitted. Similarly, in other embodiments to be described later, illustration of a deteriorated portion of the resist base shape is omitted.

  The subsequent steps are the same as those in the first embodiment. That is, as a sacrificial layer forming step, as shown in FIG. 9E, a sacrificial layer 208 is formed on the opaque metal film 202 by electroless plating or electroplating. Subsequently, as an electroforming process, as shown in FIG. 9F, a metal layer 210 is formed on the sacrificial layer 208 by electroforming. Next, as a peeling step, as shown in FIG. 9G, after removing the resist 206a with an organic solvent or the like, the exposure mask 204 is peeled from the sacrificial layer 208 and the metal layer 210. Finally, when the sacrificial layer 208 is removed as a sacrificial layer removing step, a nozzle plate 60B made of the metal layer 210 can be obtained as shown in FIG.

  According to the method for manufacturing the nozzle plate 60B according to the present embodiment, the deteriorated portion of the root shape of the resist 206a is canceled without being reflected in the nozzle shape by the sacrificial layer 208, as in the first embodiment. It is possible to form the nozzle 51B with good opening accuracy and edge quality on the discharge side. Further, since the nozzle 51B is configured in a taper shape that tapers toward the ink discharge side, the fluid resistance to the ink is reduced and the refill speed is improved, so that high-frequency discharge with high-viscosity ink is possible. By controlling the exposure conditions (ultraviolet light intensity, tilt angle, rotation speed, etc.) in tilt rotation exposure, a nozzle shape having an arbitrary taper angle can be easily realized.

  Moreover, a liquid repellent layer may be formed between the sacrificial layer 208 and the metal layer 210 as in the first embodiment. The nozzle plate 60B on which the liquid repellent layer is formed can be manufactured in a series of steps.

[Third Embodiment]
Next, a third embodiment according to the present invention will be described. Hereinafter, description of parts common to the above-described embodiments will be omitted, and description will be made focusing on characteristic parts of the present embodiment.

  FIG. 10 is a diagram for explaining a manufacturing process of the nozzle plate 60C as the third embodiment. In the nozzle plate 60C of the present embodiment, as shown in FIG. 10 (l), a nozzle 51C composed of a tapered portion 330 and a straight portion 332 is formed. Hereinafter, a method for manufacturing the nozzle plate 60C will be described with reference to FIG.

  First, as a mask manufacturing process, as shown in FIG. 10A, an exposure mask 304 including a transparent substrate 300 and an opaque metal film 302 is manufactured in the same manner as in the first embodiment. Reference numeral 302a represents an opening region of the opaque metal film 302 formed according to the nozzle pattern. Next, as a first resist formation step, as shown in FIG. 10B, a negative resist (negative resist) 306 is applied to the opaque metal film 302 side of the exposure mask 304 by a spin coater or the like.

  Next, as a first exposure step, as shown in FIG. 10C, ultraviolet light (UV light) perpendicular to the exposure mask 304 is applied to the opaque metal film 302 from the transparent substrate 300 side of the exposure mask 304. Then, the resist 306 is irradiated. Thereby, the columnar resist region 306a corresponding to the opening region 302a of the opaque metal film 302 is exposed. Subsequently, when the resist 306 is developed as a first developing step, a columnar resist 306a is patterned on the exposure mask 304 as shown in FIG.

  Next, as a sacrificial layer forming step, a sacrificial layer 308 having a predetermined thickness is formed on the opaque metal film 302 as shown in FIG. Subsequently, as a first electroforming process, as shown in FIG. 10F, a metal layer 310 is formed on the sacrificial layer 308 by electroforming (electroplating).

  Next, as a second resist formation step, a resist 312 is applied on the metal layer 310 as shown in FIG. Then, as the second exposure step, as shown in FIG. 10 (h), tilt rotation exposure similar to that of the second embodiment is performed. That is, when the ultraviolet light is irradiated from the transparent substrate 300 side of the exposure mask 304, the substrate 320 composed of the exposure mask 304, the sacrificial layer 308, the metal layer 310, and the resist 312 is inclined with respect to the irradiation direction of the ultraviolet light. This is performed while rotating the substrate 320 around the axis P perpendicular to the substrate 320 in a state where the substrate 320 is inclined at a predetermined angle θ [degree]. As a result, the reverse tapered columnar resist region 312a corresponding to the inclination angle θ of the substrate 320 is exposed. Thereafter, when the resist 312 is developed as a second developing step, the resist 312a having a reverse tapered columnar shape is patterned above the resist 306a as shown in FIG.

  Note that the resists 306 and 312 formed in the first and second resist forming steps are preferably the same or have the same optical characteristics (particularly the refractive index). The shape accuracy of the resists 306a and 312a obtained after development is improved.

  Next, as a second electroforming process, as shown in FIG. 10 (j), the metal layer 310 is grown to a predetermined thickness by electroforming (electroplating). In the second electroforming process, a metal layer different from the metal layer 310 formed in the first electroforming process may be formed. Next, as a peeling process, as shown in FIG. 10K, after removing the resists 306a and 312a with an organic solvent or the like, the exposure mask 304 is peeled from the sacrificial layer 308 and the metal layer 310. The peeled exposure mask 304 can be reused. Finally, when the sacrificial layer 308 is removed as a sacrificial layer removing step, a nozzle plate 60C made of the metal layer 310 can be obtained as shown in FIG.

  FIG. 11 is a view showing a modification of the method for manufacturing the nozzle plate 60C of the present embodiment. As shown in the figure, as a first electroforming step, a first metal layer (liquid repellent plating layer) 314 having a predetermined thickness having liquid repellency is formed on the sacrificial layer 308, and a second resist forming step. After performing the second exposure process and the second development process, the second metal layer 316 may be formed on the first metal layer 314 as the second electroforming process. In particular, when the thickness of the first metal layer 314 is formed to be equal to the length of the straight portion 332 of the nozzle 51C (see FIG. 10L), the straight portion 332 of the nozzle 51C has liquid repellency. In other words, the boundary between the straight portion 332 and the tapered portion 330 becomes a position where not only the shape (angle) but also the liquid repellency changes, the meniscus position is easily determined, and the discharge stability is improved. Note that the first metal layer 314 may be composed of a plurality of layers of a liquid repellent plating layer and another metal layer.

  According to the manufacturing method of the nozzle plate 60C according to the present embodiment, the deteriorated portion of the base shape of the resist 306a is canceled without being reflected in the nozzle shape by the sacrificial layer 308, so that the opening accuracy and edge quality on the ink ejection side are reduced. A good nozzle 51C can be formed. Further, since the nozzle 51C is configured in a taper straight shape including the taper portion 330 and the straight portion 332, the discharge direction of the nozzle 51C is stabilized.

[Fourth Embodiment]
Next, a fourth embodiment according to the present invention will be described. Hereinafter, description of parts common to the above-described embodiments will be omitted, and description will be made focusing on characteristic parts of the present embodiment.

  FIG. 12 is a diagram for explaining a manufacturing process of the nozzle plate 60D as the fourth embodiment. In the nozzle plate 60D of the present embodiment, as shown in FIG. 12 (i), a deformed tapered nozzle 51D is formed. Hereinafter, a manufacturing method of the nozzle plate 60D will be described with reference to FIG.

  First, as a mask manufacturing process, as shown in FIG. 12A, an exposure mask 404 made of a transparent substrate 400 and an opaque metal film 402 is manufactured. Reference numeral 402a represents an opening region of the opaque metal film 402 formed according to the nozzle pattern. Next, as a resist forming step, as shown in FIG. 12B, a negative resist (negative resist) 406 is applied to the opaque metal film 402 side of the exposure mask 404 by a spin coater or the like. The steps up to here are the same as in the first embodiment.

  Next, as a first exposure step, as shown in FIG. 12C, when irradiating ultraviolet light from the transparent substrate 400 side of the exposure mask 404, the exposure mask 404 and This is performed while rotating the substrate 420 about the axis P perpendicular to the substrate 420 in a state where the substrate 420 made of the resist 406 is inclined at an oblique predetermined angle θ1 [degree]. By performing such tilt rotation exposure, the tapered resist region 406a corresponding to the tilt angle θ1 of the substrate 420 with respect to the irradiation direction of the ultraviolet light is exposed as in the second embodiment.

  Next, as a second exposure step, as shown in FIG. 12D, the inclination angle of the substrate 420 with respect to the ultraviolet light irradiation direction is changed from θ1 [degree] to θ2 [degree] (where θ2 <θ1). Then, ultraviolet light is irradiated from the transparent substrate 400 side of the exposure mask 404 while the rotation of the substrate 420 is stopped. By performing such tilt exposure, a partial region 406b outside the resist region 406a exposed in the first exposure step according to the tilt angle θ2 of the substrate 420 with respect to the ultraviolet light irradiation direction is exposed. The second exposure process may be performed before the first exposure process or may be performed in the middle of the first exposure process.

  Next, when the resist 406 is developed as a development step, a deformed tapered resist 406c is patterned on the exposure mask 406 as shown in FIG. Note that the shape of the resist 406c corresponds to a shape obtained by combining the resists 406a and 406b. Such a sidewall surface of the resist 406c has a first inclined surface 412 defined by a taper angle θ1 ′ [degree] and a first inclined surface 412 defined by a taper angle θ2 ′ [degree] (where θ2 ′ <θ1 ′). 2 inclined surfaces 414. Further, the upper surface shape of the resist 406c has a deformed circular shape (or a deformed ellipse shape) in which the second inclined surface 414 side has a protruding shape as shown in the upper part of FIG. Note that the lower surface of the resist 406c has a circular shape similar to that of the opening region 402a of the opaque metal film 402, although not particularly illustrated.

  Next, as a sacrificial layer forming step, a sacrificial layer 408 is formed on the opaque metal film 102 as in the first embodiment, as shown in FIG. Subsequently, as an electroforming process, as shown in FIG. 12G, a metal layer 410 is formed on the sacrificial layer 408 by Ni electroforming.

  Next, as a peeling process, after removing the resist 406c with an organic solvent or the like, the exposure mask 404 is peeled off at the interface with the sacrificial layer 408 as shown in FIG. The exposed mask 404 after peeling can be reused. Finally, when the sacrificial layer 408 is removed as a sacrificial layer removing step, a nozzle plate 60D made of the metal layer 410 can be obtained as shown in FIG.

  The nozzle plate 60D has an inner wall surface corresponding to the external shape of the resist 406c, the first inclined surface 416 defined by the taper angle θ1 ′ and the second inclined surface 418 defined by the taper angle θ2 ′. A configured nozzle 51D is formed. The planar shape of the ink supply side opening of the nozzle 51 </ b> D is a deformed circular shape (or a deformed ellipse shape) in which the second inclined surface 418 side has a protruding shape as shown in the upper part of FIG. On the other hand, the planar shape of the ink ejection side opening of the nozzle 51D is a circle corresponding to the opening region 402a of the opaque metal film 402, as shown in the lower part of FIG. In this way, the nozzle 51D has a shape that is not an axis object with respect to the nozzle axis, and has a shape that is plane-symmetric with respect to the cross section (nozzle symmetry plane) of the nozzle plate 60D shown in the middle of FIG.

  By using the nozzle plate 60D provided with the deformed tapered nozzle 51D in which the inner wall surface is constituted by the first and second inclined surfaces 416 and 418 respectively defined by the different taper angles θ1 ′ and θ2 ′ as described above. The following effects can be obtained.

For example, when the cross section (nozzle symmetry plane) of the nozzle plate 60D shown in FIG. 13 is configured to be parallel to the paper transport direction, the ejection direction of each nozzle 51D-1, 51D-2 is determined by the error in nozzle shape. Even if there is a variation in the transport direction, it is possible to suppress variations in a direction perpendicular to the paper transport direction (front and back direction with respect to the paper surface). That is, the variation in the ejection direction of the nozzles 51D-1 and 51D-2 can be limited to the same direction. Further, regarding variations in the paper conveyance direction, in the inspection process after the nozzle plate 60D is incorporated in the recording head 50, the ejection angles θ _A and θ _B of the nozzles 51D-1 and 51D-2 are measured, and the recording medium The ejection timing may be controlled so that the landing positions of the nozzles 51D-1 and 51D-2 are within a desired range on the recording medium based on the conveyance speed, the distance between the recording medium and the recording head 50, and the like. That is, as shown in FIG. 14, when the ink droplets ejected from the nozzle 51D deviate downstream from the desired landing position in the paper conveyance direction, the ejection timing is set late, and conversely, upstream in the paper conveyance direction If the landing position deviates, the discharge timing may be set earlier. Thus, the landing position accuracy can be improved by adjusting the discharge timing.

  In this embodiment, the exposure is performed in a state where the substrate 420 is stopped without rotating in the second exposure step. However, the present invention is not limited to this, for example, ultraviolet intensity, irradiation with ultraviolet rays. The exposure may be performed while appropriately changing the exposure angle such as the tilt angle of the substrate 420 with respect to the direction and the rotation speed and rotation speed of the substrate 420.

  As mentioned above, although the manufacturing method of the nozzle plate of this invention, the manufacturing method of a droplet discharge head, and the image forming apparatus were demonstrated in detail, this invention is not limited to the above example and does not deviate from the summary of this invention. It goes without saying that various improvements and modifications may be made in the range.

Overall configuration diagram showing outline of inkjet recording apparatus Plane perspective view showing structure example of recording head Sectional view along line 3-3 in FIG. Schematic diagram showing the configuration of an ink supply system in an inkjet recording apparatus The figure which showed the process sequence for manufacturing the nozzle plate of 1st Embodiment. Explanatory drawing of the manufacturing process of the nozzle plate of 1st Embodiment. The figure for demonstrating the state in which the liquid repellent layer was formed on the opaque metal film The figure for demonstrating the state which joined the flow-path plate to the metal layer Explanatory drawing of the manufacturing process of the nozzle plate of 2nd Embodiment Explanatory drawing of the manufacturing process of the nozzle plate of 3rd Embodiment The figure which showed the modification of the manufacturing method of the nozzle plate of 3rd Embodiment. Explanatory drawing of the manufacturing process of the nozzle plate of 4th Embodiment The figure for demonstrating the discharge direction of a deformation | transformation taper-shaped nozzle A diagram for explaining a discharge timing control method The figure for demonstrating the manufacturing method of the conventional nozzle plate The figure for demonstrating the problem of the manufacturing method of the conventional nozzle plate

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Inkjet recording apparatus, 50 ... Recording head, 50a ... Ink discharge surface, 51 ... Nozzle, 52 ... Pressure chamber, 54 ... Ink supply port, 55 ... Common liquid chamber, 58 ... Piezoelectric element, 60 ... Nozzle plate, 62 ... Counterbore part, 66 ... channel plate, 68 ... nozzle channel, 100 ... transparent substrate, 102 ... opaque metal film, 104 ... exposure mask, 106 ... resist, 108 ... sacrificial layer, 110 ... metal layer

Claims (9)

Forming a photosensitive resin layer on the opaque metal film side of the exposure mask using an exposure mask in which an opaque metal film is patterned according to a nozzle pattern on one side of the transparent substrate;
Exposing the photosensitive resin layer from the transparent substrate side of the exposure mask;
Developing the photosensitive resin layer;
Forming a sacrificial layer on the opaque metal film;
Forming a metal layer on the sacrificial layer;
Separating the exposure mask from the metal layer and the sacrificial layer;
Removing the sacrificial layer;
The manufacturing method of the nozzle plate characterized by including. Forming a photosensitive resin layer on the opaque metal film side of the exposure mask using an exposure mask in which an opaque metal film is patterned according to a nozzle pattern on one side of the transparent substrate;
Exposing the photosensitive resin layer from the transparent substrate side of the exposure mask;
Developing the photosensitive resin layer;
Forming a sacrificial layer on the opaque metal film;
Forming a liquid repellent layer on the sacrificial layer;
Forming a metal layer on the liquid repellent layer;
Separating the exposure mask from the metal layer, the liquid repellent layer, and the sacrificial layer;
Removing the sacrificial layer;
The manufacturing method of the nozzle plate characterized by including.   Exposing while rotating the substrate about an axis perpendicular to the substrate in a state where the substrate made of the exposure mask and the photosensitive resin layer is tilted at a predetermined oblique angle with respect to an irradiation direction of exposure light. The method for manufacturing a nozzle plate according to claim 1, wherein the nozzle plate is manufactured.   The method of manufacturing a nozzle plate according to claim 3, further comprising a step of exposing the substrate under a condition in which an inclination angle of the substrate with respect to exposure light is different from the exposure. Forming a first photosensitive resin layer on the opaque metal film side of the exposure mask using an exposure mask in which an opaque metal film is patterned according to a nozzle pattern on one side of the transparent substrate;
Exposing the first photosensitive resin layer from the transparent substrate side of the exposure mask in a state where the exposure mask is perpendicular to an irradiation direction of exposure light;
Developing the first photosensitive resin layer;
Forming a sacrificial layer on the opaque metal film;
Forming a first metal layer on the sacrificial layer;
Forming a second photosensitive resin layer on the first metal layer;
A substrate made of the exposure mask, the sacrificial layer, the first metal layer, and the second photosensitive resin layer is perpendicular to the substrate in a state where the substrate is inclined at a predetermined oblique angle with respect to the exposure light irradiation direction. Exposing the second photosensitive resin layer from the transparent substrate side of the exposure mask while rotating the substrate around an axis,
Developing the second photosensitive resin layer;
Forming a second metal layer on the first metal layer;
Separating the exposure mask from the first metal layer, the second metal layer, and the sacrificial layer;
Removing the sacrificial layer;
The manufacturing method of the nozzle plate characterized by including.   6. The method of manufacturing a nozzle plate according to claim 5, wherein the first metal layer has liquid repellency. 5. A method for manufacturing a droplet discharge head comprising a nozzle plate manufactured by the method for manufacturing a nozzle plate according to claim 1, and a flow path plate joined to the nozzle plate. And
A method of manufacturing a liquid droplet ejection head, comprising the step of bonding the flow path plate to the metal layer before separating the exposure mask. A nozzle plate manufactured by the nozzle plate manufacturing method according to claim 5 or 6, and a manufacturing method of a droplet discharge head comprising a flow path plate joined to the nozzle plate,
A method of manufacturing a droplet discharge head, comprising the step of joining the flow path plate to the second metal layer before separating the exposure mask.   An image forming apparatus comprising: a droplet discharge head manufactured by the method of manufacturing a droplet discharge head according to claim 7.

Images