JP2008053380A - Laser device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laser device manufactured by a specific structure so as to compose laser beams from a plurality of laser arrays to obtain a high output. <P>SOLUTION: A first laser unit 3 for outputting first output laser beams, and a second laser unit 4 which has a mounting part of a different thickness from the first laser unit 3 for outputting second output laser beams in a direction perpendicular to the first output laser beams, are mounted on a metallic base 9 via insulating sheets 13, 21, respectively, a mirror 42 for reflecting a progressive direction of the second output laser beams to the identical direction to the first output laser beams is mounted thereon, and the first and second laser units 3, 4 are electrically series-connected by a wiring to constitute the laser device 1. Thus, even when the laser beams from the plurality of laser arrays are composed to obtain a sufficiently high output, a cooling can be suitably performed, and when an operator touches the device, he/she can be prevented from receiving an electric shock. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a high-power laser device using a laser diode.

As a conventional laser apparatus, the laser beams from two laser arrays are synthesized, the laser beams from one laser array are linearly moved, and the laser beams from the other laser array are converted into a polarization beam splitter (optical path changing element). ) Is used to excite a solid-state laser element with the combined laser light from two directions (for example, Patent Document 1). According to such a laser device, a high output can be obtained by combining a plurality of laser beams.
JP-A-4-78180

  In a conventional laser device that synthesizes laser beams from a plurality of laser arrays, when it is configured to obtain a higher output, for example, the laser array cannot be suitably cooled, and the operator touches the device. The problem arises in that you get an electric shock. For this reason, it has not been possible to specifically configure a laser apparatus that can combine laser beams from a plurality of laser arrays to obtain a sufficiently high output.

  An object of this invention is to provide the laser apparatus which solved such a subject.

  According to the laser device of the present invention, a plurality of first laser diodes are provided on a case having a metal base as a bottom surface and a first mounting portion having a predetermined thickness placed on the base in the case. A first laser unit configured by mounting a first laser array arranged in an array and a second mounting having a thickness different from that of the first mounting portion mounted on the base in the case A first array including an optical axis of output laser light from the plurality of first laser diodes, the second laser array having a plurality of second laser diodes arrayed on the unit. The second array plane parallel to the plane includes the optical axes of the output laser beams of the plurality of second laser diodes, and the plurality of second lasers in a direction different from the output laser beams of the plurality of first laser diodes. Diode output laser light A second laser unit sowed, cooling means provided on the back side of the base for cooling the first and second laser units via the base, and output laser light of a plurality of second laser diodes Are provided at positions closest to the optical axes of the output laser beams of the plurality of first laser diodes, and the traveling directions of the output laser beams of the plurality of second laser diodes are set to the plurality of first laser diodes. An optical path changing element that changes the laser diode in the same direction as the output laser light of the laser diode, and a wiring that is insulated from the case and electrically connects the first and second laser arrays in series, the first and second Each of the laser units is made of a material that can expand and contract in the thickness direction, and is between the first and second mounting portions and the base, or between the laser array side portion and the base side of the first and second mounting portions. portion Characterized in that it has a interposed an insulating sheet between.

  According to this laser apparatus, since the heights of the laser output positions of the first and second laser arrays are different depending on the first and second mounting portions having different thicknesses, one of the output laser beams is Since the optical path changing element can be installed so that the optical path of the other output laser light is interfered without interference, the optical axes of the laser light propagating from two different directions can be made parallel and close to each other.

  Here, since the first and second laser arrays are electrically connected in series with each other, a large laser intensity can be obtained with a small current. Also, since the laser array and the base are insulated from each other by the insulating sheet, and the wiring between the laser units is also insulated from the case, the number of laser diodes included in the laser array is increased to obtain a large laser intensity. Even when a high voltage is applied to the wiring between them, charging of the case or the base can be prevented. In addition, the deformable insulating sheet increases the adhesion between the components between the laser array and the base and improves the thermal conductivity, so even when the laser array is driven with high power to obtain a large laser intensity, It can be efficiently cooled by the cooling means. As described above, it is possible to specifically configure a laser apparatus capable of driving a number of laser diodes to emit light and outputting them as powerful laser light aligned in one direction while overcoming the problems of cooling and electric shock.

  In the laser apparatus according to the present invention, a first optical element that collimates output laser light from a plurality of first and second laser diodes in a direction orthogonal to the first and second array planes, and the first optical element An optical path conversion element that rotates the output laser beams of the plurality of first and second laser diodes emitted from the optical axis by 90 ° about the respective optical axes, and a plurality of first and second output lights from the optical path conversion element And a second optical element that collimates the output laser light of each of the laser diodes in directions orthogonal to the first and second arrangement surfaces, respectively.

  According to this, each output laser beam output with a certain spread is collimated in the direction of the array plane of the laser diode and in the direction perpendicular to the array plane, so that the output laser beams of adjacent laser diodes Crossing can be prevented. As a result, the laser diodes can be mounted at a high density, and the output of each laser array can be increased.

  In the laser device according to the present invention, at least one of the first and second mounting portions preferably has a submount on the laser array side and a spacer having a predetermined thickness on the base side. Even when the same submount is used in each laser unit, the thickness of the mounting portion can be adjusted by simply changing the spacer.

  The laser device according to the present invention may further include a condensing element for condensing the output laser beams of the plurality of first and second laser diodes whose traveling directions are the same. For example, it is possible to easily introduce laser light into an optical fiber or the like, and it is preferable that the wiring has an aerial structure. According to this, a high-voltage current can be stably supplied to each laser array. .

  In the laser device according to the present invention, the insulating sheet includes a thin carbon graphite layer and a thin film polyethylene terephthalate layer laminated structure, and the case has a side wall provided on the base, It is preferable that an endless sealing ring is provided at a portion where the base and the side wall are in contact with each other, and according to this, the airtightness in the case can be improved.

  The laser apparatus according to the present invention may further include a screw member that adjusts the deformation amount in the thickness direction of the insulating sheet by tightening the first and second laser units toward the base. Since the laser output position in each laser unit can be finely adjusted only by an easy tightening operation, it is possible to accurately correct the deviation of the optical axis for each output laser beam that cannot be corrected only by a combination of optical elements.

  According to the laser device of the present invention, the first laser array in which a plurality of first laser diodes are arranged in an array and a plurality of second laser diodes are arranged in an array, The optical axes of the output laser beams of the plurality of second laser diodes are included in a second array plane parallel to the first array plane including the optical axis of the output laser light of the first laser diode with a certain distance. A second laser array in which the output laser light of the plurality of second laser diodes propagates in a direction different from the output laser light of the plurality of first laser diodes, and the plurality of first and second laser diodes A first optical element that collimates the output laser light of the laser diode in a direction orthogonal to the second array plane, and output laser beams of the first and second laser diodes emitted from the first optical element. An optical path conversion element that rotates light by 90 ° about each optical axis, and output laser beams of a plurality of first and second laser diodes emitted from the optical path conversion element, respectively, in first and second arrays A second optical element that collimates in a direction orthogonal to the surface, and an optical axis of the output laser light of the plurality of second laser diodes, and the optical axis of the output laser light of the plurality of first laser diodes An optical path changing element that is provided at a contact position and changes the traveling direction of the output laser light of the plurality of second laser diodes in the same direction as the output laser light of the plurality of first laser diodes.

  According to this laser apparatus, by collimating the respective output laser beams output from the first and second laser diodes with a certain spread in the laser diode array plane direction and the direction perpendicular to the array plane. The crossing of the output laser beams of adjacent laser diodes can be prevented. As a result, the laser diodes can be mounted at a high density, and the output of each laser array can be increased. Since the first and second array plane positions including the optical axes of the laser output lights of the first and second laser diodes are separated by a certain distance, one of the output laser lights interferes. Since the optical path changing element can be installed so that the optical path of the other output laser light interferes, the optical axes of the laser light propagating from two different directions can be made parallel and close to each other. As described above, it is possible to specifically configure a laser apparatus that can drive and emit a large number of laser diodes mounted at high density and output them as powerful laser light aligned in one direction.

  According to the laser device of the present invention, a high output can be obtained by combining a plurality of laser beams with a specific configuration.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of a laser device according to the invention will be described in detail with reference to the drawings.

  FIG. 1 is a perspective view showing a schematic configuration inside a part of a side wall 2b and a top wall of a case 2 in a laser device 1 according to an embodiment of the present invention. As shown in FIG. 1, the laser apparatus 1 is configured by housing first and second laser units 3 and 4 and optical elements corresponding to the first and second laser units 3 and 4 inside a case 2. The first output laser light emitted from the second laser unit 4 and the second output laser light emitted from the second laser unit 4 are combined and emitted to the outside of the case 2.

  The case 2 is a rectangular parallelepiped box whose inside is a sealed space. A rectangular plate-like base 9 is provided with a side wall 2b surrounding the four sides, and the upper end side of the side wall 2b is an upper wall (not shown). ). Endless sealing rings (not shown) are provided at portions where the side wall 2b contacts the base 9 and the top wall, respectively, so that the airtightness in the case 2 is enhanced. Further, bolt-shaped electrode terminals 6, 7, and 8 are fixed to the side wall 2b on the electrode side of the laser device 1 in order from the right side when viewed from the inside of the case 2, and the output side facing the side wall 2b on the electrode side. The combined laser beam is emitted from the side wall (not shown).

  The rectangular base 9 is made of a material having high thermal conductivity such as copper, and a Peltier cooler (cooling means) 11 for cooling the laser units 3 and 4 via the base 9 is provided on the back surface 9b. It is provided so as to cover the whole. The first laser unit 3 that emits the first output laser beam in the direction of the side wall on the output side is placed at a position near the electrode terminal 6 on the upper surface 9a of the base 9. A second laser unit 4 that emits the second output laser beam in a direction orthogonal to the traveling direction of the first output laser beam is placed at a position closer to eight.

  The first laser unit 3 includes a rectangular parallelepiped first pedestal (laser array side portion of the first mounting portion) 14, a first laser array 16 mounted on the upper surface 14a via a submount (not shown), and a base 9 And a first insulating sheet 13 interposed between the lower surface of the first pedestal 14 and the upper surface of the spacer 12. . The first laser array 16 is mounted on the output side edge portion 14b of the upper surface 14a of the first pedestal 14, and each optical element is arranged in front of the traveling direction of the output light.

  The first insulating sheet 13 interposed between the first pedestal 14 and the spacer 12 is formed by a laminated structure of a thin carbon graphite layer and a thin polyethylene terephthalate layer, and has high heat transfer properties and elasticity. . Due to the high thermal conductivity of the first insulating sheet 13, the first laser array 16 can be efficiently cooled by the Peltier cooler 11. Furthermore, due to the high elasticity, the adhesion between the spacer 12 and the first pedestal 14 is increased, and the thermal conductivity between the components can be improved to further improve the cooling efficiency.

  The first laser unit 3 fastens the first pedestal 14 to the base 9 by a first screw portion (screw member) 15 formed by inserting a screw into a screw hole formed from the upper surface 14 a of the first pedestal 14. It is fixed by. Further, since the deformation amount in the thickness direction of the first insulating sheet 13 can be adjusted by the tightening degree of the first screw portion 15, the laser output position of the first laser unit 3 can be finely adjusted. The first screw portion 15 can accurately correct the deviation of the optical axis of the laser beam that cannot be corrected only by a combination of optical elements.

  The second laser unit 4 includes a rectangular parallelepiped second base (second mounting portion) 22, a second laser array 24 mounted on the upper surface 22 a via a submount (not shown), a lower surface thereof, and an upper surface of the base 9. It is comprised by the 2nd insulating sheet (insulating sheet) 21 interposed between these. The second laser array 24 is mounted on the output side edge 22b of the upper surface 22a of the second pedestal 22, and each optical element is disposed in front of the second laser array 24. The traveling direction of the output light is the first laser array 16. It is orthogonal to the output light from.

  The second laser unit 4 is different from the first laser unit 3 in that first, no spacer is provided on the lower surface of the second insulating sheet, and second, the progress of output light from the second laser array 24. The direction is perpendicular to the output light from the first laser array 16. Therefore, the same thing as the thing of the 1st laser unit 3 is used for the 2nd insulating sheet 21 and the 2nd screw part 23, and there can exist an effect similar to the above-mentioned.

  A long electrode plate 28 for supplying a current to the first laser array 16 is disposed on the upper surface 14a of the first pedestal 14, and the electrode plate 28 and the electrode terminals 6 are rectangular and electrically connected by an aerial wiring board 29. Connected to. Similarly, an electrode plate 31 is disposed on the upper surface 22a of the second pedestal 22, and the electrode plate 31 and the upper surface 14a of the first pedestal 14 are electrically connected by an aerial wiring board 32 in the shape of an L-shaped plate. . Further, the upper surface 22 a of the second pedestal 22 and the electrode terminal 8 on the side wall 2 b are electrically connected by a long and aerial wiring board 33. The electrode terminal 8 is connected to a driving power source (not shown) such as a semiconductor power source outside the case 2 so that the electrode terminal 8 has a positive pole and the electrode terminal 6 has a negative pole.

  As described above, the multiple laser diodes constituting the first laser array 16 of the first laser unit 3 and the multiple laser diodes constituting the second laser array 16 of the second laser unit 4 are electrically connected to each other. Connected in series. Thus, the laser diode can be driven to emit light with a smaller current than in the case where the laser array and the laser diode are connected in parallel, so that a large laser intensity can be obtained as a whole of the laser device 1.

  If there are a large number of laser diodes constituting the first and second laser arrays 16, 24, the supply voltage is increased in proportion to the number of laser diodes connected in series, but the wiring boards 29, 32, 33 Since both are wired so as to be suspended in an aerial state, a high-voltage current can be stably supplied to the first and second laser arrays 16 and 24.

  Further, by forming the side wall 2b and the top wall of the case 2 with a material other than metal, the wiring connecting the first and second laser arrays 16 and 24 and the base 9 can be insulated. Alternatively, when they are formed of metal, the side wall 2b and the top wall in the case 2 are charged by interposing an insulating member between the electrode terminals 6 and 8 and the side wall 2b on the electrode side. Can be prevented. Further, as described above, the base 9 is insulated from each of the first and second laser arrays 16 and 24 by the insulating sheet 13 and the insulating sheet 21. As described above, even when a high voltage is applied due to the laser units connected in series, it is possible to prevent an operator from accidentally touching the case 2 or the base 9 and receiving an electric shock. Furthermore, the electrical influence exerted on the first and second laser arrays 16 and 24 from the respective components can be reduced.

  A first collimating lens mounting portion 36 is provided on the upper surface 9a of the base 9 so as to be adjacent to the first laser unit 3 on the front side in the traveling direction of the first output laser light. The first collimating lens mounting portion 36 has a rectangular parallelepiped shape, and a first collimating lens (second optical element) 37 for collimating the first output laser beam is disposed on the upper surface thereof. Similarly, a second collimating lens mounting portion 38 corresponding to the second laser unit 4 is provided on the upper surface 9a of the base 9, and a second collimating lens (second optical element) 39 is disposed on the upper surface. ing.

  On the upper surface 9 a of the base 9, a mirror mounting portion 41 is provided at a position where the emitted light from the first collimating lens 37 and the emitted light from the second collimating lens 39 intersect, and a mirror (optical path changing element) 42 is provided on the upper surface. Is provided. Here, the height position of the emitted light of the first collimating lens 37 is higher than the height position of the emitted light of the second collimating lens 39 by the thickness of the spacer 12. Therefore, by adjusting the size of the mirror 42 in the height direction, the first output laser beam is reflected while reflecting the second output laser beam emitted from the second collimating lens 39 toward the side wall on the output side. As a result, both output laser beams can be substantially aligned with one laser beam.

  A condensing lens mounting portion 40 is provided on the upper surface 9 a of the base 9 so as to be adjacent to the mirror mounting portion 41 on the front side in the traveling direction of the first output laser light. A condensing lens (condensing element) 43 for condensing the first and second output laser beams is provided on the upper surface of the condensing lens mounting portion 40. The condensed laser light is introduced into the bundle type optical fiber bundle through a fiber input end (not shown) provided on the side wall on the output side.

  A connector 44 for connection is connected to the electrode terminal 7 on the side wall 2b on the electrode side, and this connector 44 is connected to the first pedestal 14 for controlling the temperature of the Peltier cooler 11 (not shown). A body (Pt100), a light receiving element 46 for confirming the light emission state of the second laser diode 24a of the first and second laser arrays 16, 24, a humidity measuring element 47 for confirming airtightness in the case 2, and A laser diode for red guide light (not shown) disposed inside the first collimating lens mounting portion 36 is electrically connected. The guide light output from the laser diode for red guide light passes through a through hole (not shown) provided in the mirror mounting portion 41 and is collected together with the first and second output laser lights by the condenser lens 43. The Rukoto.

  A detailed description of the optical system of the laser apparatus 1 configured as described above will be given with reference to FIG.

  FIG. 2 is a schematic diagram showing paths through which the first and second output laser beams 70 and 80 emitted from the first and second laser units 3 and 4 are collected on the condenser lens 43.

  The first laser array 16 is a rectangular parallelepiped having a longitudinal dimension of about 1 cm, and is formed by arranging a plurality (five in FIG. 2) of first laser diodes 16a that output the first output laser light 70 in an array. ing. The size of the light emitting output end face of the first laser diode 16a is about 100 μm × 1 μm, and is formed at an interval of about 500 μm. A plane including each optical axis of output light from each first laser diode 16 a (referred to as “first arrangement plane”) is parallel to the upper surface 9 a of the base 9. Further, the first output laser light 70 is output in a state of being expanded by 4 degrees in the arrangement direction of the first laser diodes 16a and 15 degrees in the direction orthogonal to the arrangement direction.

  On the first pedestal 14, a collimating lens (first optical element) 17 that collimates the first output laser beam 70 in a direction orthogonal to the first arrangement surface is provided so as to be close to the first laser diode 16a. ing. The collimating lenses 17 are arranged one by one for each first laser diode 16a, and the dimensions thereof are about 1.2 mm in the array direction, about 0.6 mm in the direction perpendicular to the array direction, and 0 in the optical axis direction. The laser emission surface is a convex curved surface.

  On the exit surface side of the collimating lens 17 on the first pedestal 14, there are provided first optical path conversion elements (optical path conversion elements) 18 that rotate the respective first output laser beams 70 about the optical axis thereof by 90 degrees. . The dimensions of the first optical path conversion element 18 are about 12 mm in the array direction, about 1.5 mm in the direction perpendicular to the array direction, and about 1.5 mm in the optical axis direction. Are arranged one by one with respect to one of the laser diodes 16a toward the arrangement direction of the first laser diodes 16a, and each surface is inclined by 45 degrees in a direction perpendicular to the arrangement direction. It has been.

  The first output laser beam 70 collimated by the collimating lens 17 in the direction perpendicular to the first arrangement surface is rotated by 90 ° about the axis of intersection by the first optical path conversion element 18, so that the first output emitted is emitted. The laser beam 70 is spread in a direction perpendicular to the first arrangement surface and is collimated in the first arrangement surface direction.

  The first collimating lens 37 collimates the first output laser beam 70 in a direction orthogonal to the first arrangement surface, and its dimensions are about 12 mm in the array direction and about 3 mm in the direction orthogonal to the optical axis. The laser emission surface is a convex curved surface. Since the first output laser beam 70 emitted from the first optical path conversion element 18 is collimated in the direction perpendicular to the first array plane by the first collimating lens 37, as a result, it is collimated in any direction. Therefore, it goes to the condensing lens 43.

  With the optical system as described above, it is possible to prevent the laser beams from the first laser diodes arranged next to each other from crossing each other due to spreading at the time of laser output. As a result, the first laser diodes can be mounted at a high density in the first laser array 16, so that the laser output of the entire first laser array 16 can be increased in intensity.

The configuration and function on the second laser unit 4 side are substantially the same as the configuration and function on the first laser unit 3 side described above,
The second laser array 24 is the first laser array 16, the second output laser light 80 is the first output laser light 70, the second laser diode 24a is the first laser diode 16a, the collimating lens 26 is the collimating lens 17, The second optical path conversion element 27 corresponds to the first optical path conversion element, respectively. The difference between the two is that the traveling direction of the second output laser light 80 is orthogonal to the first output laser light 70 and the output of the second output laser light 80 by the amount that the direction spacer is not provided. The position is lowered, and the second output laser beam 80 is reflected by the mirror 42 in the same direction as the first output laser beam 70 and travels toward the condenser lens 43.

  Note that an interval corresponding to the thickness of the spacer 12 in the first laser unit 4 is provided between the second array surface and the first array surface. As described above, by using the spacer 12, even when the first laser unit 3 and the second laser unit 4 use the same pedestal with a submount, the first and second laser units can be easily changed by simply changing the spacer 12. It is possible to adjust the interval between the two arrangement surfaces.

  Further, the mirror 42 is provided on the optical axis of the second output laser beam 80 and at a position where the first and second output laser beams 70 and 80 are closest to each other, and thereby, from a direction perpendicular to the arrangement surface. When viewed, the second output laser beam 80 is reflected at a position intersecting with the first output laser beam 70, overlaps with the first output laser beam 70, and travels toward the condenser lens 43.

  Since the height of the laser output position of the first and second laser arrays 16 and 24 is made different by the configuration of the optical system as described above, the first output laser beam 70 is not interfered with the first laser beam 70 without interference. Since the mirror 42 can be installed so as to change the traveling direction of the two-output laser beam 80, the optical axes of the two laser beams propagating from different directions can be made parallel and close to each other.

  The present invention is not limited to the embodiment described above.

  For example, it is good also as a structure as shown in FIG. The laser device shown in FIG. 3 is different from the laser device 1 described above in that a third laser unit 51, a third collimating lens 52, and a mirror 53 are arranged next to the second laser unit 4 to thereby provide three laser units. It is a point made into the laser apparatus which consists of. At this time, the height position of the third laser unit 51, the second laser unit 4, and the first laser unit 3 is increased by the spacer in this order, and the height positions of the collimating lens and the mirror are adjusted accordingly. Each laser unit is electrically connected in series.

  Further, the third laser unit 51 may be disposed at a position opposite to the second laser unit 4 with the mirror 42 interposed therebetween. At this time, the third laser unit 51 outputs laser light in the direction of the second laser unit 4 and arranges the mirror 53 so as to intersect the mirror 42.

  Further, the number of laser units is not limited to two or three, and may be further increased.

  The laser unit in the laser unit is not limited to one, and a plurality of laser arrays may be stacked.

It is the perspective view which cut | disconnected a part of side wall and upper surface wall of the case of the laser apparatus which concern on embodiment of this invention, and showed the schematic structure of the inside. It is the schematic which showed the path | route until the 1st and 2nd output laser beams radiate | emitted from the 1st and 2nd laser unit are condensed on a condensing lens. It is a figure which shows the laser apparatus which concerns on a modification, and is a perspective view equivalent to FIG.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Laser apparatus, 2 ... Case, 3 ... 1st laser unit, 4 ... 2nd laser unit, 9 ... Base, 11 ... Peltier cooler (cooling means), 12 ... Spacer (base side part of 1st mounting part) , 13, 21... First and second insulating sheets (insulating sheets), 14... First pedestal (laser array side portion of the first mounting portion), 15, 23..., First and second screw portions (screw members) ), 16 ... first laser array, 16a ... first laser diode, 17, 26 ... collimating lens (first optical element), 18,27 ... first and second optical path conversion elements, 22 ... second pedestal (first) 2), 24 ... second laser array, 24a ... second laser diode, 29, 32, 33 ... wiring board (wiring), 37,39 ... first and second collimating lenses (second optical element) 42 ... Mirror (optical path changing element) 43 ... Condensed light 'S (condensing device), 70 ... first output laser beam, 80 ... second output laser beam.

Claims (9)

A case with a metal base as the bottom,
A first laser array in which a plurality of first laser diodes are arranged in an array is mounted on a first mounting portion having a predetermined thickness placed on the base in the case. A first laser unit;
A second laser array in which a plurality of second laser diodes are arranged in an array on a second mounting portion having a thickness different from that of the first mounting portion placed on the base in the case. The output laser beams of the plurality of second laser diodes on a second array plane parallel to the first array plane including the optical axes of the output laser beams of the plurality of first laser diodes. A second laser unit that includes the optical axes of the plurality of second laser diodes and propagates the output laser beams of the plurality of second laser diodes in a direction different from the output laser beams of the plurality of first laser diodes;
A cooling means provided on the back side of the base for cooling the first and second laser units via the base;
The plurality of second lasers provided on the optical axis of the output laser light of the plurality of second laser diodes and closest to the optical axis of the output laser light of the plurality of first laser diodes. An optical path changing element that changes a traveling direction of output laser light of the diode in the same direction as output laser light of the plurality of first laser diodes;
A wiring insulated from the case and electrically connecting the first and second laser arrays in series;
With
Each of the first and second laser units is made of a material that can expand and contract in the thickness direction, and is between the first and second mounting portions and the base, or the first and second mountings. A laser apparatus comprising: an insulating sheet interposed between the laser array side portion and the base side portion of a portion. A first optical element that collimates output laser light of the plurality of first and second laser diodes in a direction orthogonal to the first and second arrangement surfaces;
An optical path conversion element that rotates the output laser beams of the plurality of first and second laser diodes emitted from the first optical element by 90 ° about the respective optical axes;
A second optical element that collimates the output laser light of the plurality of first and second laser diodes emitted from the optical path conversion element in a direction orthogonal to the first and second arrangement surfaces, respectively;
The laser apparatus according to claim 1, further comprising:   3. The laser device according to claim 1, wherein at least one of the first and second mounting portions includes a submount on the laser array side and a spacer having a predetermined thickness on the base side. .   The laser apparatus according to claim 1, further comprising a condensing element for condensing output laser beams from the plurality of first and second laser diodes having the same traveling direction.   The laser apparatus according to claim 1, wherein the wiring has an aerial structure.   6. The laser device according to claim 1, wherein the insulating sheet has a laminated structure of a thin carbon graphite layer and a thin polyethylene terephthalate layer.   The case includes a side wall provided on the base, and an endless sealing ring is provided at a portion where the base and the side wall are in contact with each other. The laser device according to any one of the above.   The screw member which adjusts the amount of deformation of the thickness direction of the insulating sheet by tightening the first and second laser units toward the base, further comprising: A laser device according to claim 1. A first laser array in which a plurality of first laser diodes are arranged in an array;
A plurality of second laser diodes are arranged in an array, and the first laser diodes are parallel to each other at a certain distance from the first array plane including the optical axis of the output laser light of the plurality of first laser diodes. Two array planes include the optical axes of the output laser beams of the plurality of second laser diodes, and the plurality of second laser diodes in a direction different from the output laser beams of the plurality of first laser diodes. A second laser array adapted to propagate the output laser light;
A first optical element that collimates output laser light of the plurality of first and second laser diodes in a direction perpendicular to the second arrangement surface;
An optical path conversion element that rotates the output laser beams of the plurality of first and second laser diodes emitted from the first optical element by 90 ° about the respective optical axes;
A second optical element that collimates the output laser light of the plurality of first and second laser diodes emitted from the optical path conversion element in a direction orthogonal to the first and second arrangement surfaces, respectively;
The plurality of second lasers provided on the optical axis of the output laser light of the plurality of second laser diodes and closest to the optical axis of the output laser light of the plurality of first laser diodes. An optical path changing element that changes a traveling direction of output laser light of the diode in the same direction as output laser light of the plurality of first laser diodes;
A laser device comprising:

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