JP2008036586A - Ultrasonic multifrequency vibrator, ultrasonic vibration unit, ultrasonic vibration apparatus, tip face ultrasonic wave radiation apparatus, tip face ultrasonic reception apparatus, and ultrasonic wave processing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultrasonic multifrequency vibrator having a plurality of resonance points near reference frequencies and capable of radiating ultrasonic wave with respective frequencies by being operated with the frequencies of these resonance points. <P>SOLUTION: The ultrasonic multifrequency vibrator 10 having a shape extended in an axial line AX direction comprises main parts 11A and 11B and a joints 12A installed between them. The main parts 11A and 11B are configured to resonate by ultrasonic wave vibration at reference frequency f<SB>0</SB>if the main parts are taken out by themselves. Th joint 12A has a length LS in the axial line AX direction satisfying 0< LS < λs/2. The ultrasonic multifrequency vibrator 10 has a frequency characteristic that two or less resonance points for resonating the entire body appear near the reference frequency f<SB>0</SB>. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an ultrasonic multi-frequency vibrator capable of vibrating at a plurality of resonance frequencies, an ultrasonic vibration unit used therefor, an ultrasonic vibration device using the ultrasonic multi-frequency vibrator, an ultrasonic processing device using the same, The present invention relates to a tip surface ultrasonic radiation device, a tip surface ultrasonic wave reception device, and an ultrasonic processing device.

  Conventionally, as an application of ultrasonic waves, it has been known to irradiate a liquid or the like with ultrasonic waves to cause processing such as emulsification, dispersion, crushing, chemical reaction promotion, or washing of a solid surface. . There is also known an ultrasonic processing machine that processes a workpiece by ultrasonically vibrating a processing tool. In addition, an ultrasonic exploration device and an ultrasonic sensor such as a fish finder that radiates ultrasonic waves into a medium and receives and detects ultrasonic waves transmitted through the medium are also known.

For example, Patent Document 1 describes a reaction apparatus in which an ultrasonic oscillator is attached to a tank inner wall in a stirring tank and ultrasonic waves are emitted toward the center of the tank.
Further, in Patent Document 2, a columnar or cylindrical radiator that radiates ultrasonic energy is disposed at the center of a bottomed cylindrical reaction tank, and the side surface of the radiator, or the other end and the side surface are disposed on the radiation surface. Describes a reaction apparatus that emits ultrasonic waves into a reaction vessel.
Furthermore, Patent Document 3 includes a radiation portion in which small-diameter radiation portions and large-diameter radiation portions are alternately arranged in the axial direction. When ultrasonic vibration of a predetermined frequency is applied to the radiation portion, Resonating with a small radiating part as an antinode and a large radiating part as a node, each large radiating part has a primary resonance in the radial direction, and the adjacent large radiating parts vibrate in opposite phases. An ultrasonic radiator and an ultrasonic processing apparatus using the same are disclosed.

JP 2000-202277 A (2nd page, FIG. 1) JP 2003-200042 A (2nd page, FIG. 1) Japanese Patent Laying-Open No. 2005-186030 (second page, FIG. 1)

  However, in the reaction apparatus described in Patent Document 1, an ultrasonic oscillator is disposed on a part of the tank wall surface, and the ultrasonic waves are radiated from the tank toward the center of the tank, and the radiation area of ultrasonic energy is small. , The distribution of the ultrasonic sound field in the layer becomes non-uniform. Moreover, since the emitted ultrasonic energy is also small, the reaction throughput is small. In addition, an ultrasonic oscillator is disposed in the tank, and when the liquid to be processed is at a high temperature or a low temperature, the performance of the oscillator may be deteriorated.

Further, in the reaction apparatus described in Patent Document 2, since ultrasonic waves directed radially outward from the center of the tank are radiated, the distribution of ultrasonic waves can be made more uniform than that of Patent Document 1. However, in the vicinity of the distal end portion (other surface) of the radiator, ultrasonic waves are emitted in the axial direction of the radiator and the radial direction perpendicular thereto, but no ultrasonic waves are emitted in the oblique tip direction. Therefore, the sound field distribution of the ultrasonic wave around the radiator is also non-uniform.
Further, as the radiator, a columnar radiator or a cylindrical radiator having a diameter of λ / 3 to λ / 4 is used. In a cylinder having such a small diameter, when the length is adjusted to be nλ / 2, the vibration in the axial direction due to resonance is excited and can be vibrated greatly in the axial direction. Therefore, strong ultrasonic waves can be emitted toward the tip of the cylinder. However, since this cylinder has a small diameter, it does not resonate in the radial direction, and vibration in the radial direction is difficult to be excited. Specifically, in the radial direction, only expansion and contraction in the radial direction appears in accordance with the Poisson's ratio with expansion and contraction due to longitudinal vibration. Therefore, even if this radiator is used, the intensity of ultrasonic vibration in the radial direction (side surface direction) cannot be increased so much.

On the other hand, in the ultrasonic processing apparatus of Patent Document 3, a plurality of large-diameter radiating portions and small-diameter radiating portions are connected, and ultrasonic waves are radiated from each of them.
However, even in such a case, since the ultrasonic vibration of a predetermined frequency is used, a standing wave is likely to be generated in the processing tank, and the distribution of the ultrasonic sound field cannot be sufficiently uniform, resulting in processing unevenness. It was.
Also, depending on the application, it may be desired to radiate ultrasonic waves from a part of the radiator, but even in such applications, standing waves will still be produced simply by radiating ultrasonic waves of a predetermined frequency. For this reason, there are cases where the treatment of the fluid and the object to be processed is not sufficient.

  The present invention has been made in view of such problems, and has a plurality of resonance points in the vicinity of a reference frequency, and by driving at the frequency of these resonance points, an ultrasonic wave of each frequency can be emitted. An object is to provide an ultrasonic multi-frequency vibrator. Moreover, it aims at providing the ultrasonic vibration unit suitable for this. It is another object of the present invention to provide an ultrasonic vibration device that can excite ultrasonic waves having a plurality of resonance frequencies using the ultrasonic multi-frequency vibrator. Furthermore, using these, it is possible to provide an ultrasonic processing device, a tip surface ultrasonic wave emitting device, a tip surface ultrasonic wave receiving device, and an ultrasonic processing device using a plurality of ultrasonic waves having different resonance frequencies. Objective.

The solving means is an ultrasonic multi-frequency vibrating body having a configuration extending in the axial direction, and is N main parts (N is a natural number of 2 or more), which are arranged apart from each other in the axial direction. And each main part is a main part having a relatively large radial dimension in the radial direction orthogonal to the axial direction, and N-1 coupling parts, each of the main parts being And a coupling part that is disposed between and couples the main parts to each other and has a relatively smaller radial dimension than the adjacent main parts, and the main part is independent of the main part. assuming that the extracted at, it is a form that resonates at an ultrasonic vibration of the reference frequency f _0, the coupling portion, ultrasonic vibration of the reference frequency f ₀ is, when transmitting the coupling portion to said axial direction the speed of sound Vs, when the wavelength of the ultrasonic vibration λs transmitted (= Vs / f _0), the upper The length LS of the axial direction, 0 satisfies the <LS <[lambda] s / 2, in the vicinity of the reference frequency f _0, the resonance point of the entire ultrasonic multifrequency vibrator resonates will appear 2 months or more, N months following An ultrasonic multi-frequency vibrator having frequency characteristics.

The ultrasonic multi-frequency vibrator of the present invention is composed of two or more relatively large main portions and a relatively small diameter coupling portion located between them. Of these, the main part is configured to resonate at the reference frequency f ₀ . On the other hand, the coupling portion has an axial length LS in a range of 0 <LS <λs / 2. And this ultrasonic multifrequency oscillating body has a frequency characteristic in which 2 to N resonance points due to the resonance of the entire ultrasonic multifrequency oscillating body appear.
The reason why a plurality of resonance points appear in the ultrasonic multi-frequency vibrator is not clear, but the ultrasonic multi-frequency vibrator of this embodiment has a plurality of main parts that resonate at the reference frequency f _0. Since the diameter is small and the length is shorter than λs / 2, the coupling portions that do not resonate at the reference frequency f ₀ are coupled to each other. For this reason, when viewed as a whole ultrasonic multi-frequency vibrator, the degeneracy of the natural vibration of each main part at the reference frequency f ₀ is solved, and 2 to N resonance points appear in the vicinity of the reference frequency f ₀ . It is considered a thing. Therefore, in the frequency region near the reference frequency f ₀ , 2 to N modes in which the ultrasonic vibrations in the main portion and the coupling portion interact with each other and the entire ultrasonic multi-frequency vibrating body resonates appear.

Therefore, according to this ultrasonic multi-frequency vibrating body, while having a simple form composed of N main parts and N-1 coupling parts, a plurality (2 to N) of non-harmonics are provided. A resonance point can be provided.
Therefore, by applying ultrasonic vibration having each resonance frequency to the ultrasonic multi-frequency vibrating body of the present invention, large ultrasonic vibration is excited, and powerful ultrasonic waves are emitted from the surroundings or a part such as the tip surface to the outside. Can be radiated efficiently. Conversely, ultrasonic waves can be received efficiently from the outside.

In addition, by switching ultrasonic vibrations of each resonance frequency in order or applying ultrasonic vibrations in which a plurality of resonance frequencies are mixed as ultrasonic vibrations, while being a single ultrasonic multi-frequency vibrator, externally Therefore, it is possible to efficiently emit ultrasonic waves having different frequencies.
For this reason, for example, when this ultrasonic multi-frequency vibrating body is placed in a closed space, even when used in a state where a standing wave sound field is formed around this ultrasonic multi-frequency vibrating body, different resonances are generated. By generating ultrasonic vibrations of frequency sequentially or simultaneously, the position of the abdomen and node of the standing wave can be changed for each frequency, eventually suppressing the bias of ultrasonic sound pressure in the space, The ultrasonic sound field in this space can be made uniform, and non-uniformity of processing (cleaning, etc.) by this ultrasonic wave can be suppressed.

The main part has a form larger in diameter than the coupling part, and when it is assumed that the main part is taken out alone, the main part is resonated by ultrasonic vibration of the reference frequency f _0. Is. For example, specifically, when this main part is taken out and the frequency characteristics are measured, at the reference frequency f ₀ , n / 2 wavelength resonance such as half wavelength resonance, full wavelength resonance, 3/2 wavelength resonance, or the like Those having a form of wavelength resonance (n is a natural number) can be mentioned. The specific shape of the main part is, for example, a cylindrical shape or prismatic shape that resonates in the height direction at the reference frequency f ₀ in the height direction, or a shape in which the corners of the cylinder are cut into a tapered shape at the reference frequency f ₀ . shape height direction or resonance radially n / 2 wavelength, the circular plate to n / 2-wavelength resonance in the radial direction perpendicular to the thickness direction at the reference frequency f ₀ (short cylinder) shape, at a reference frequency f ₀ own diameter Examples include a spherical shape that resonates in the direction of n / 2 wavelength, and an annular shape that resonates in the radial direction of itself at the reference frequency f ₀ .
Each main part may have a predetermined frequency characteristic when it is assumed that the main part is taken out alone. As will be described later, one main part constitutes a single ultrasonic vibration unit. In addition to the case where it is present, a single part cannot be taken out unless it is a member integrally formed with the coupling part or other main part, and further, the entire ultrasonic multi-frequency vibrating body forms a single member and is not cut. It is intended to include forms.
Further, the N main parts may be formed in different shapes or different materials as long as the above conditions are satisfied. However, if the same material and the same shape are used, there is an advantage that each main part can be easily manufactured.

Moreover, as a form of a coupling | bond part, it is set as a form relatively smaller in diameter than the main part. For example, specifically, a cylindrical shape or a prismatic shape having a diameter smaller than that of the main portion can be given. Also, in the coupling portion, within the range that is smaller in diameter than the main portion, the form in which the radial dimension is changed in the axial direction, for example, a drum shape gradually smaller in diameter toward the central portion in the axial direction, Conversely, it can also be formed into a barrel shape with a gradually increasing diameter.
The length LS is set to 0 <LS <λs / 2. The wavelength λs is given by λs = Vs / f _0, where Vs is the velocity of ultrasonic vibration of the reference frequency f ₀ transmitted through the coupling portion. The sound speed Vs is preferably measured using ultrasonic vibration of the reference frequency f ₀ , but data measured or reported using other frequencies may be used within a range where the sound speed does not change.
Further, the length LS of the coupling portion is preferably λs / 8 <LS <3λs / 8. By setting the length LS to a value close to λs / 4, the number of resonance points generated in the vicinity of the reference frequency f ₀ is increased, and the operation at each resonance point of the ultrasonic multi-frequency vibrator is reliably performed. Can be made.
The N-1 coupling portions may have different shapes or different materials as long as the above conditions are satisfied. However, using the same material and the same shape has the advantage of facilitating the manufacture of each joint.

In addition, the ultrasonic multi-frequency vibrator itself vibrates ultrasonically at each resonance point by excitation of ultrasonic vibration from the outside or excitation by an ultrasonic vibrator included in the ultrasonic vibration body. As a form using, various known methods can be used.
That is, for example, by arranging all of the main part and the coupling part of the ultrasonic multi-frequency vibrator in the treatment tank storing the treatment liquid etc., and generating ultrasonic vibration from various places of the ultrasonic multi-frequency vibrator, What performs a desired process in a processing tank is mentioned.
In addition, the tip surface of the main portion on the most distal side of the ultrasonic multi-frequency vibrator is brought into contact with the treatment liquid, and ultrasonic waves are emitted from the tip surface to cause a desired treatment (for example, emulsification). The tip surface is brought into close contact with the outer wall surface of the treatment tank, and ultrasonic treatment is radiated to the treatment liquid such as an internal washing liquid through the outer wall of the treatment tank to perform a desired treatment (for example, washing of various parts). Also mentioned. In addition, the tip surface of the most distal main part is immersed in water directly or in close contact with the bottom of the ship, and ultrasonic waves are radiated into the water indirectly via the bottom of the ship to perform a desired treatment (for example, a school of fish And the like that perform radiation of ultrasonic pulses in a detector or an ultrasonic exploration apparatus. In the air, there may be mentioned a method in which ultrasonic waves are directly or indirectly emitted from the distal end surface of the main portion on the most distal end side to perform a desired process (for example, transmission in an aerial ultrasonic sensor).
On the contrary, ultrasonic waves from the water or in the air are received directly or indirectly through the bottom of the ship or the case member, and the ultrasonic waves in the water are received at the tip surface of the main part on the most distal side, and the desired wave is received. What performs processing (for example, reception and signal processing of an ultrasonic pulse in a fish finder, an ultrasonic survey device, an aerial ultrasonic sensor, etc.) is also included.
Further, there may be mentioned a tool that is used to perform a predetermined processing while attaching a processing tool to the front end surface of the main portion on the most front end side and causing ultrasonic vibration to the processing tool.

  In addition, as the ultrasonic multi-frequency vibrator, each main part and coupling part may be made into a block-like ultrasonic vibration unit, and these may be coupled by fastening or the like to form an ultrasonic multi-frequency vibrator. A block-shaped ultrasonic vibration unit in which an appropriate number of parts and coupling parts are connected may be used, and these may be connected by fastening or the like to form an ultrasonic multi-frequency vibration body. Moreover, it can also be set as the ultrasonic multifrequency oscillating body which formed the whole as an integral member.

Furthermore, as a material of the entire ultrasonic multi-frequency vibrator, or each main portion and coupling portion, an appropriate material may be selected in consideration of the use, etc. Aluminum metal materials such as aluminum and duralumin, metal materials having heat resistance or corrosion resistance such as Inconel and Hastelloy, ceramic materials such as alumina, silicon nitride, and silica, quartz glass, and other glasses can be used.
Furthermore, an ultrasonic vibrator made of a piezoelectric element or the like is included in any of the main parts, and the ultrasonic multi-frequency vibrator can be made to vibrate ultrasonically without external excitation. it can.

In the frequency characteristics of the ultrasonic multi-frequency vibrator, the number of resonance points appearing in the vicinity of the reference frequency f ₀ varies depending on the combination of the form and material of the main part and the coupling part. Due to the desired properties, the ultrasonic multifrequency vibrator of the present invention includes a combination in which at least two resonance points at which the entire ultrasonic multifrequency vibrator resonates appear.
Also, the resonance frequency values at 2 to N resonance points vary depending on the combination of the form and material of the main part and the coupling part, but are in the vicinity of the reference frequency f ₀ as described above. For example, specifically, the deviation from the reference frequency f ₀ has a resonance frequency within ± 20% at the maximum.

  Further, in the ultrasonic multi-frequency vibrator according to claim 1, the N main parts may be ultrasonic multi-frequency vibrators having the same material and the same shape.

In the ultrasonic multi-frequency vibrator of the present invention, since the main parts are made of the same material and the same shape, there is an advantage that the ultrasonic multi-frequency vibrator can be easily manufactured.
In addition, by making the main part the same material and the same shape, the symmetry of the ultrasonic multi-frequency vibrator is increased, the mechanical quality factor Qm at each resonance point is high, and it is easy to have sharp resonance characteristics. .

  Further, in the ultrasonic multi-frequency vibrator according to claim 2, the N-1 is plural, and the N-1 coupling portions are all the same material and the same shape. It should be a vibrating body.

In the ultrasonic multi-frequency vibrator of the present invention, not only the main part but also a plurality of connecting parts are made of the same material and the same shape. Thereby, there is an advantage that an ultrasonic multi-frequency vibrator can be easily manufactured.
Further, by making not only the main part but also the joint part the same material and the same shape, the symmetry of the ultrasonic multi-frequency vibrator is further increased, and the mechanical quality factor Qm at each resonance point is high and sharp. It is easy to have resonance characteristics.

Alternatively, in the ultrasonic multi-frequency vibrator according to claim 1, the N main parts are all made of the same material and shape, the axial direction is the height direction, and the reference frequency f ₀ The N-1 coupling portions have a smaller diameter than the main portion, the axial direction is the height direction, and the length LS is LS. = has a cylindrical shape of [lambda] s / 4, when the N-1 is plural, any of the coupling section, same material is isomorphic, near the reference frequency f _0, the ultrasonic multi It is preferable that the ultrasonic multi-frequency vibrator has a frequency characteristic in which N resonance points at which the entire frequency vibrator resonates appear.

In the ultrasonic multi-frequency vibrating body of the present invention, each of the N main parts is made of the same material and shape, and the axis direction is the height direction at the reference frequency f ₀ , and the cylinder resonates 1/2 wavelength in this height direction. It has a shape. Further, the N-1 coupling portions have a cylindrical shape whose diameter is smaller than that of the main portion, the axial direction is the height direction, and the length (height) LS is λs / 4. Moreover, when there are a plurality of N-1, all of the connecting portions are made of the same material and shape. When N-1 is singular (that is, N = 2), there is no need to consider such a limitation because there is one coupling portion. The ultrasonic multi-frequency vibrator has a frequency characteristic in which N resonance points at which the entire ultrasonic multi-frequency vibrator resonates appear near the reference frequency f ₀ .
The ultrasonic multi-frequency vibrator of the present invention is easy to manufacture because the main part has a cylindrical shape extending in the axial direction and the coupling part also has a cylindrical shape extending in the axial direction. In particular, the main parts are identical to each other, and when there are a plurality of coupling parts, the coupling parts are also identical to each other.
Moreover, since not only the main part but also the coupling part is made of the same material and shape, the ultrasonic multi-frequency vibrator has high symmetry, a high mechanical quality factor Qm at each resonance point, and sharp resonance characteristics. You can have it.

  Furthermore, the ultrasonic multi-frequency vibrator according to any one of claims 1 to 4, wherein the ultrasonic multi-frequency vibrator is integrally formed without a connecting portion.

  Since the ultrasonic multi-frequency vibrator of the present invention is made of an integral material without a connecting portion, for example, a metal lump, a ceramic lump, etc., the connecting screw of the connecting portion is loosened or the ultrasonic multi-frequency vibrating body is Even if it is used under severe conditions such as high temperature, low temperature, thermal cycle, thermal shock, etc., there is no worry that some will fall off, and it will have good durability and reliability.

  Alternatively, the ultrasonic multi-frequency vibrator according to any one of claims 1 to 4, wherein a plurality of the same or different ultrasonic vibrator units are connected to each other. And good.

The ultrasonic multi-frequency vibrating body of the present invention comprises an ultrasonic multi-frequency vibrating body by connecting a plurality of identical or irregular ultrasonic vibrating units.
For this reason, it is possible to easily cope with a change or repair of the shape of the ultrasonic multi-frequency vibrator.

  Also, each ultrasonic vibration unit is formed, and these are connected and integrated to form an ultrasonic multi-frequency vibrator, and as described above, the ultrasonic multi-frequency vibrator is composed of an integral member without a connecting portion. And cheaper than manufacturing from a metal lump or the like by cutting or the like. In addition, the resonance frequency and the like can be finely adjusted for each ultrasonic vibration unit, and the frequency adjustment of each part and the whole of the ultrasonic multi-frequency vibrating body is facilitated.

Note that the plurality of ultrasonic vibration units used in the ultrasonic multi-frequency vibrator may be the same shape or different shapes. Also, an ultrasonic vibration unit in which a single main part is included in one ultrasonic vibration unit, or a plurality of main parts (and thus a coupling part between them) is included. It is also good.
Further, the ultrasonic vibration units may be connected to each other as long as they can be firmly connected to each other and can transmit ultrasonic vibrations appropriately. For example, there is a technique in which screw holes are drilled in the connecting surfaces, the connecting surfaces are butted together and fastened with bolts that are embedded and arranged so as to straddle both screw holes. It is also possible to adopt a method in which a male screw portion is provided protruding from one ultrasonic vibration unit, a screw hole is provided in the other ultrasonic vibration unit, and these are screwed. Moreover, it can adhere | attach with an adhesive agent, or can also use together the adhesion | attachment by an adhesive agent, and the fastening by a volt | bolt etc.

  The ultrasonic multi-frequency vibrator according to claim 6, wherein the plurality of ultrasonic vibration units are configured such that a connection surface that connects each other is located in the connection portion, and the connection portion and the main portion. It is preferable to use an ultrasonic multi-frequency vibrating body as at least one of the forms located between the two parts.

In the ultrasonic multi-frequency vibrating body of the present invention, using the ultrasonic vibration unit in which the connecting surface connecting each other is at least one of the connecting portion and the connecting portion and the main portion. Yes.
As described above, the main part needs to be configured to resonate with ultrasonic vibration of the reference frequency f ₀ . If one main part is divided so as to be composed of two or more ultrasonic vibration units, even if the main parts of these ultrasonic vibration units are brought into close contact with each other, the main part is configured. Since there is an interface between the ultrasonic vibration units, loss is likely to occur at this interface, and it is difficult to efficiently transmit ultrasonic energy from one ultrasonic vibration unit to the other ultrasonic vibration unit. As a result, even if it is vibrated at the resonance frequency, it is difficult to obtain a large vibration.
On the other hand, since the coupling portion has a smaller radial dimension than the main portion, vibration in the axial direction is easily excited, so that the interface of the coupling between the ultrasonic vibration units is within the coupling portion or between the coupling portion and the main portion. The ultrasonic vibration can be transmitted between the ultrasonic vibration units with less loss than when the interface is formed in the main part. Thus, transmission of ultrasonic energy from one ultrasonic vibration unit to the other ultrasonic vibration unit can be performed efficiently.

  Alternatively, the ultrasonic multi-frequency vibrator according to any one of claims 1 to 7, wherein each of the N main parts and the N-1 coupling parts is an ultrasonic vibrator. It is good to use an ultrasonic multi-frequency vibrating body that does not include.

In general, an ultrasonic vibrator using a piezoelectric element or the like needs to maintain insulation between electrodes or the like, and needs to take into account corrosion from a chemical solution or the like. In addition, it is necessary to protect against collisions of objects from the outside. In addition, it is necessary to give consideration to thermal characteristics such as deterioration of characteristics caused by driving at high or low temperatures.
On the other hand, the ultrasonic multi-frequency vibrator of the present invention does not include such an ultrasonic vibrator in the main part and the coupling part. For this reason, this ultrasonic multi-frequency vibrating body is immersed in a liquid such as a processing liquid or a cleaning liquid and an object to be processed directly in a range according to the material of the main part and the coupling part, It can be immersed in or exposed to a high or low temperature processing fluid. Further, in this way, powerful ultrasonic waves can be efficiently radiated to the surrounding fluid such as the processing liquid. Conversely, ultrasonic waves can be efficiently received from the outside.

  Furthermore, it is an ultrasonic multifrequency oscillating body according to any one of claims 1 to 7, wherein at least one of the N main parts includes the ultrasonic multifrequency oscillating body including itself. Of the 2 to N resonance points, an ultrasonic multi-frequency vibrator including an ultrasonic vibrator configured to be excited at resonance frequencies of at least two resonance points may be used.

The ultrasonic multifrequency vibrator of the present invention includes an ultrasonic transducer in at least one of the main parts. For this reason, with this ultrasonic vibrator, for the resonance frequencies of at least two resonance points, ultrasonic vibrations having respective resonance frequencies in order or in one waveform including a plurality of resonance frequencies, The ultrasonic multi-frequency vibrating body can be generated, and ultrasonic waves having these frequencies can be emitted to the outside.
Moreover, this ultrasonic multi-frequency vibrator is easy to handle because it includes an ultrasonic vibrator in its main part. In addition, there is no need for external excitation by another ultrasonic transducer, and the overall structure is simple and inexpensive.

In addition, as an ultrasonic transducer | vibrator included in a main part, a well-known piezoelectric element, an electrostrictive element, a magnetostrictive element, or various forms of ultrasonic transducers using these can be used. For example, in addition to piezoelectric elements, electrostrictive elements, magnetostrictive elements of plate shape (disc shape, square plate shape) or column shape (columnar shape, prismatic shape), Langevin type with these elements sandwiched between metal plates Examples thereof include an ultrasonic vibrator, and a bolted Langevin type ultrasonic vibrator in which these are fastened with bolts.
Further, the ultrasonic transducer only needs to be included in the main portion, and even if one main portion is entirely configured as one ultrasonic transducer, a part of the main portion is used as one ultrasonic transducer. It may be configured.

Still another solving means is an ultrasonic vibration unit that is one of the plurality of ultrasonic vibration units forming the ultrasonic multi-frequency vibration body according to claim 6 or 7.
Alternatively, at least the end portion in the axial direction has a connection structure that enables connection of another ultrasonic vibration unit or ultrasonic vibration source having the same shape or different shape, and by connecting to the other ultrasonic vibration unit. It is preferable that the ultrasonic vibration unit is a part of the ultrasonic multi-frequency vibrator according to claim 6 or claim 7.

  By using the ultrasonic vibration unit of the present invention, the application of the ultrasonic multi-frequency vibrator, for example, the shape of the treatment tank, the sound field distribution in the treatment tank, and the amount of ultrasonic vibration energy supplied from the ultrasonic vibration source. The ultrasonic multi-frequency vibrator having appropriate performance and characteristics can be formed by selecting a unit having an appropriate shape according to the above.

  Still another solution is that the ultrasonic multi-frequency vibrator according to any one of claims 1 to 8 and the ultrasonic multi-frequency vibrator are separated from the base end side in the axial direction. An ultrasonic vibration device comprising: an ultrasonic vibration source configured to be able to be excited at resonance frequencies of at least two resonance points among ˜N resonance points.

The ultrasonic vibration device of the present invention includes the above-described ultrasonic multi-frequency vibration body and an ultrasonic vibration source that applies ultrasonic vibration thereto.
Therefore, in this ultrasonic vibration device, the ultrasonic multi-frequency vibrating body is ultrasonically vibrated at two or more frequencies by using an ultrasonic vibration source, so that these frequencies are separated from the ultrasonic multi-frequency vibrating body. The ultrasonic wave which has can be radiated | emitted.

  As an ultrasonic vibration source, a known ultrasonic vibrator such as a bolted Langevin type ultrasonic vibrator, or an ultrasonic transmission body for transmitting ultrasonic energy connected to the ultrasonic vibrator and the ultrasonic vibrator. And the like. Also included is an ultrasonic vibration source comprising a plurality of ultrasonic vibrators and a power synthesizer for accumulating these vibration energies and transmitting them to an ultrasonic multi-frequency vibrator.

  The ultrasonic vibration device according to claim 11, wherein the ultrasonic vibration source is configured to sequentially apply ultrasonic vibrations having the respective resonance frequencies with respect to the resonance frequencies of the at least two resonance points, or a plurality of ultrasonic vibration sources. It is preferable that an ultrasonic vibration device that is an ultrasonic vibration source that applies ultrasonic vibration including the resonance frequency to the ultrasonic multi-frequency vibrating body.

  In this ultrasonic vibration device, since the ultrasonic vibration including the ultrasonic vibration of the resonance frequency of at least two resonance points in order or one waveform including a plurality of resonance frequencies is applied to the ultrasonic multi-frequency vibration body, Ultrasonic waves having two or more frequencies can be radiated from each part of the ultrasonic multi-frequency vibrator or from the distal end surface of the main part closest to the distal end.

  The ultrasonic vibration device according to claim 11, further comprising: a fluid that is an object to be processed or a processing tank that contains the fluid and the object to be processed; and at least the ultrasonic multi-frequency vibrator is disposed in the processing tank. And an ultrasonic processing apparatus having

In the ultrasonic processing apparatus of this invention, the processing tank and the ultrasonic vibration apparatus which arrange | positions the above-mentioned ultrasonic multifrequency vibrator in the processing tank are provided. For this reason, since ultrasonic waves can be radiated from various places of the ultrasonic multi-frequency vibrating body, a uniform ultrasonic field can be created over a wide range in the processing tank. The object can be appropriately sonicated.
In addition, the ultrasonic vibrator included in the ultrasonic vibration source or the ultrasonic multi-frequency vibrator of the ultrasonic vibration device has at least two resonance points among 2 to N resonance points of the ultrasonic multi-frequency vibrator. The resonance frequency can be excited.
For this reason, an ultrasonic vibration source or an ultrasonic vibrator is excited, and ultrasonic vibrations having respective resonance frequencies are sequentially or ultrasonic vibrations including a single waveform including a plurality of resonance frequencies. By generating the frequency vibration body, it is possible to suppress non-uniformity of the distribution of the ultrasonic sound field due to standing waves generated in the processing tank, and to further suppress processing unevenness and the like.

Examples of the object to be processed include gases, liquids, fluids (such as a fluid mixture of solid and liquid), and fluids such as supercritical fluids. Moreover, the combination of the fluid and immersion material which consists of liquids and other fluids, such as water, a solvent, and a washing | cleaning liquid, and immersion objects, such as a machine component immersed in this liquid (fluid), is also mentioned.
Further, the processing by the ultrasonic processing apparatus includes any processing as long as it is a processing that applies a desired change to the processing object by irradiating the processing object with ultrasonic waves. For example, liquid treatment such as ultrasonic cleaning, ultrasonic homogenizer, sonochemistry, etc. using physical action such as cavitation by ultrasonic waves, vibration acceleration, straight flow, and chemical reaction promoting action can be given. More specifically, by ultrasonic irradiation, general cleaning and precision cleaning of objects to be cleaned, emulsification, dispersion, crushing, defoaming, promotion of chemical reaction, sludge treatment, PCB treatment, decomposition and detoxification of harmful substances, Examples include sterilization, fuel reforming, various treatments in bioprocesses and electrochemical processes.

  Alternatively, the ultrasonic multi-frequency vibrating body is arranged in such a manner that an ultrasonic wave is radiated directly or indirectly from the distal end surface of the main portion on the most distal end side in the axial direction to the radiation object. It is preferable that the ultrasonic vibration device described above or the tip surface ultrasonic radiation device having the ultrasonic multi-frequency vibration body according to claim 9 be used.

In the front end surface ultrasonic radiation device of the present invention, the ultrasonic multi-frequency vibrator is arranged in a form in which ultrasonic waves are directly or indirectly emitted from the front end surface of the main part on the most end side in the axial direction directly or indirectly. Do it.
For this reason, a strong ultrasonic wave can be efficiently radiated | emitted from the front end surface of the main part nearest to the front end side of the axial direction of the ultrasonic multi-frequency vibrator.
In addition, the ultrasonic vibrator included in the ultrasonic vibration source or the ultrasonic multi-frequency vibrator of the ultrasonic vibration device has at least two resonance points among 2 to N resonance points of the ultrasonic multi-frequency vibrator. The resonance frequency can be excited.
For this reason, an ultrasonic vibration source or an ultrasonic vibrator is excited, and ultrasonic vibrations having respective resonance frequencies are sequentially added, or ultrasonic vibrations including one waveform including a plurality of resonance frequencies are converted into ultrasonic multi-frequency waves. By generating the frequency vibration body, ultrasonic waves having a plurality of resonance frequencies can be emitted sequentially or simultaneously.

In addition, what is necessary is just a thing which receives the radiation | emission of an ultrasonic wave as a to-be-radiated object. In addition to the above-described object to be treated that receives such ultrasonic radiation to cause a desired change, there is a medium in which the ultrasonic wave propagates inside without changing itself. Therefore, specifically, in addition to gases and liquids, fluids (such as fluid solids and liquid mixtures), fluids such as supercritical fluids, and solids such as metal objects as targets for ultrasonic flaw detection, etc. Is mentioned. Moreover, the combination of the fluid and immersion material which consists of liquids and other fluids, such as water, a solvent, and a washing | cleaning liquid, and immersion objects, such as a machine component immersed in this liquid (fluid), is also mentioned. Moreover, the gas, liquid, solid, etc. which act as a medium are also mentioned.
Further, as can be seen from the above, examples of the tip surface ultrasonic radiation device include various ultrasonic treatment devices that treat an object to be processed as described above with emitted ultrasonic waves. Also included are devices that emit ultrasonic waves into liquids such as underwater, in the air, or into solids, such as ultrasonic probe devices such as fish detectors, ultrasonic sensors, and ultrasonic flaw detectors.

  Alternatively, the ultrasonic multi-frequency vibrator is arranged in such a form as to receive an ultrasonic wave transmitted through the object to be measured directly or indirectly from the distal end surface of the main portion on the most distal end side in the axial direction. The ultrasonic vibration device according to Item 11 or the tip surface ultrasonic wave reception device having the ultrasonic multi-frequency vibration member according to Claim 9 may be used.

In the tip surface ultrasonic wave receiving apparatus of the present invention, the ultrasonic multi-frequency vibrating body is arranged in a form for receiving ultrasonic waves transmitted through the object to be measured from the tip surface of the main part on the most tip side in the axial direction. Become.
For this reason, one ultrasonic multi-frequency vibrator can efficiently receive ultrasonic waves having a plurality of resonance frequencies among ultrasonic waves transmitted from the tip surface to the object to be measured.

Note that the object to be measured is not limited as long as the ultrasonic wave is transmitted and the ultrasonic wave can be received at the tip surface of the main part on the most tip side in the axial direction among the ultrasonic multi-frequency vibrators. A medium in which an ultrasonic wave propagates inside, for example, a gas, a liquid, a solid, and the like can be given.
Further, the tip surface ultrasonic wave receiving device is a device that receives an ultrasonic wave transmitted through the object to be measured and performs a predetermined process. For example, a device for receiving ultrasonic waves from a liquid such as water, the air, or a solid, such as an ultrasonic exploration device such as a fish finder, an ultrasonic sensor, or an ultrasonic flaw detection device is included.

  Furthermore, at least any one of the ultrasonic vibration apparatus of Claim 11 containing the said ultrasonic multifrequency vibration body, the ultrasonic multifrequency vibration body of Claim 9, and the said ultrasonic multifrequency vibration body. An ultrasonic processing device provided with an ultrasonic processing tool attached to the part.

In the ultrasonic processing apparatus of the present invention, an ultrasonic processing tool is attached to at least one portion of the ultrasonic multi-frequency vibrating body (for example, on the distal end surface of the main portion closest to the distal end in the axial direction).
For this reason, an ultrasonic wave can be efficiently transmitted to an ultrasonic processing tool and desired processing can be performed efficiently.
Moreover, while using a single ultrasonic multi-frequency vibrating body, ultrasonic vibrations of a plurality of resonance frequencies can be applied to the ultrasonic processing tool, so that unevenness in the processing place and accuracy can be prevented and more uniform. Processing can be performed.

In addition, as an ultrasonic processing tool, by giving ultrasonic vibration, compared with the case where there is no ultrasonic vibration, an additional or principal action can be added to the workpiece, or Any machining tool may be used as long as it can achieve some effect such as frictional force and stress reduction during machining. Specific examples include processing tools for performing cutting, cutting, grinding, polishing, drilling, tapping, sieving, and the like with ultrasonic waves, and more specifically saws, knives, files, A drill, a reamer, a tap, a sieve, etc. are mentioned.
Moreover, as this ultrasonic processing apparatus, what is necessary is just to attach one type or a plurality of types of ultrasonic processing tools, but preferably an ultrasonic processing tool configured to be replaceable.

(Embodiment 1)
A first embodiment relating to an embodiment of the present invention will be described with reference to FIGS.
The ultrasonic processing apparatus 1 according to the first embodiment includes an ultrasonic vibration apparatus 2 that generates ultrasonic vibrations, an ultrasonic oscillation circuit 5 that drives the ultrasonic vibration apparatus 2, and a processing tank 60.
Among these, the ultrasonic vibration device 2 includes an ultrasonic multi-frequency vibrating body 10 and an ultrasonic vibration source 30 that applies ultrasonic vibration to the ultrasonic multi-frequency vibrating body 10. The ultrasonic vibration source 30 includes a known bolt-clamped Langevin type ultrasonic vibrator 31 using a piezoelectric ceramic and a known supersonic wave for transmitting the ultrasonic vibration generated thereby to the ultrasonic multi-frequency vibrator 10. And a sound wave transmission body 32. The ultrasonic oscillation circuit 5 is a known drive circuit for driving the ultrasonic transducer 31 with two kinds of predetermined frequencies f _B1 and f _B2 .

  The ultrasonic transducer 31 and the ultrasonic transmission body 32 of the ultrasonic vibration source 30 are arranged coaxially with each other along the axis AX and are connected to each other by a connection screw 36. Further, the ultrasonic emitter 10 is connected to the tip of the ultrasonic transmitter 30 (the lower end in FIG. 1B) by a connecting screw 7.

  The ultrasonic multi-frequency vibrating body 10 is disposed in the treatment tank 60 together with a part of the ultrasonic transmission body 32 on the tip side (lower side in FIG. 1B) from the flange 32F. Soaked in the fluid P to be treated. The ultrasonic vibration transmitted from the ultrasonic ultrasonic vibration source 30 radiates ultrasonic waves to the fluid P to be processed in the processing tank 60 and performs desired processing (emulsification, dispersion, crushing, etc.) on the fluid P to be processed. )I do. The processing tank 60 is connected to the processing tank main body 61, the center of the side surface of the processing tank main body 61 in the height direction, and an inflow pipe 62 for allowing the fluid P to be processed to flow into the processing tank main body 61. It consists of two discharge pipes 63 </ b> A and 63 </ b> B that are connected to the upper and lower portions of the side surface of the tank body 61 and discharge the processed fluid P to be processed from the process tank body 61.

The ultrasonic multi-frequency vibrating body 10 is a metal block body formed by cutting out a metal lump of stainless steel (SUS304). As shown in FIG. 2, two large main portions 11A and 11B and And a connecting portion 12A having a relatively small diameter connecting between them. Accordingly, the main portion 11A, the coupling portion 12A, and the main portion 11B are formed of an integral member (ultrasonic multifrequency vibrator 10) made of the same material without a connecting portion.
For this reason, in this ultrasonic multifrequency vibrator 10, there is no fear that the connecting screw of the connecting portion is loosened or a part of the ultrasonic multifrequency vibrator is dropped from the connecting portion. Even when used under severe environments such as thermal cycling and thermal shock, durability and reliability are good.

The main portions 11A and 11B of the ultrasonic multi-frequency vibrating body 10 have cylindrical shapes with diameters DD1 and DD2 of 40 mmφ and heights (lengths in the axis AX direction) LD1 and LD2 of 90 mm, respectively. Therefore, the main portions 11A and 11B are made of the same material and have the same shape. Thus, since the main parts 11A and 11B are made of the same material and the same shape, the ultrasonic multi-frequency vibrator 10 can be easily manufactured.
Also, by making the main parts 11A and 11B both the same material and shape, the symmetry of the ultrasonic multi-frequency vibrator 10 is increased, and the mechanical quality factor Qm at each resonance point B1 and B2 described later is high. It is easy to have sharp resonance characteristics.

In the stainless steel used for the ultrasonic multi-frequency vibrator 10, the sound velocity Vd of the ultrasonic wave transmitted in the axial direction when the diameter is about 40 mmφ is Vd = 4900 m / s. Accordingly, if the ultrasonic frequency is the reference frequency f0 (= 27.22 kHz), the wavelength λd of the ultrasonic wave is λd = 180 mm (= 4900/27220). Therefore, when it is assumed that each of the main parts 11A and 11B is taken out alone, that is, when it is assumed that a metal body made of 40φ × 90H cylindrical stainless steel corresponding to the main parts 11A and 11B is formed. When the reference frequency f ₀ (= 27.22 kHz) is added to this, the main portions 11A and 11B (metal bodies) are half-wave resonance (1 / 2-wave resonance) in the height direction (axis AX direction). (LD1 = LD2 = λd / 2).

A screw hole 11AKN for connecting to the ultrasonic vibration source 30 (ultrasonic transmission body 32) is formed in the base end side surface 11AK on the base end side in the axis AX direction (upward in FIG. 2) of the main portion 11A. As described above, it is connected to the ultrasonic transmission body 32 by the connecting screw 37.
On the contrary, in the main portion 11B, the tip side surface 11BS on the tip side (downward in FIG. 2) in the axis AX direction is flattened.

On the other hand, the coupling portion 12A interposed between the distal end side surface 11AS of the main portion 11A and the proximal end side surface 11BK of the main portion 11B has a cylindrical shape with a diameter DS1 of 15 mmφ and a height (length in the axis AX direction) LS1 of 45 mm. It is.
In the stainless steel used for the ultrasonic multifrequency vibrator 10, when the diameter is about 15 mmφ, the sound velocity Vs in the axial direction is Vs = 4900 m / s. Therefore, if the ultrasonic frequency is the reference frequency f0 (= 27.22 kHz), the wavelength λs of the ultrasonic wave is λs = 180 mm (= 4900/27220). Accordingly, when the coupling portion 12A alone (15φ × 45H) is viewed, when the reference frequency f ₀ (= 27.22 kHz) is added, the coupling portion 12A has a height in the height direction (axis AX direction) ( It can be seen that (length) LS1 is 1/4 (LS1 = λs / 4) of the wavelength λs of the ultrasonic wave transmitted therethrough. Accordingly, the coupling portion 12A does not resonate at the reference frequency f ₀ .

The ultrasonic multi-frequency vibrator 10 was regarded as an axial vibration system in the axial direction, analyzed by displaying an equivalent circuit with a distributed constant circuit, and modal analysis was performed by a finite element method. FIG. 3 shows the frequency characteristics (impedance characteristics) of the ultrasonic multi-frequency vibrator. FIG. 4 shows the state of displacement of each part in the axial direction when the ultrasonic multi-frequency vibrator 10 is excited at the resonance frequencies f _B1 and f _B2 of the resonance points B1 and B2.

According to the frequency characteristic graph of FIG. 3, the ultrasonic multi-frequency vibrating body 10 does not resonate at the reference frequency f ₀ (= 27.22 kHz) which is the resonance frequency of the main portions 11A and 11B alone. It can be seen that resonance points B1 and B2 appear one by one near f ₀ , specifically below and above the reference frequency f ₀ . It can be seen that the resonance frequencies f _B1 and f _B2 of the resonance points B1 and B2 are f _B1 = 26.12 kHz and f _B2 = 28.33 kHz, respectively.

4A, when driven at the resonance point B1 (in the case of the B1 mode), the two main portions 11A and 11B vibrate (expand / contract) in opposite phases, and the coupling portion 12A between them. Can be seen to vibrate in a form that moves greatly in the axial direction between the two main portions 11A and 11B.
On the other hand, according to FIG. 4B, when driven at the resonance point B2 (in the case of the B2 mode), the two main portions 11A and 11B vibrate (expand / contract) in phase, and the coupling portion 12A between them is It turns out that it vibrates in the form which expands-contracts in a reverse phase between two main parts 11A and 11B. In the case of this B2 mode, it can be seen that the coupling portion 12A behaves as if it were one resonator.

Although details are unknown as to why the ultrasonic multi-frequency vibrator 10 of the first embodiment has frequency characteristics having two resonance points B1 and B2, it may be as follows. That is, the ultrasonic multi-frequency vibrator 10 has two main parts 11A and 11B having a large diameter and a large volume (weight) and resonating at the reference frequency f ₀ . Between these, a coupling portion 12A having a small diameter and a small volume (weight) and not resonating with the reference frequency main portion f ₀ is interposed. Therefore, when viewed as the ultrasonic multi-frequency vibrating body 10 as a whole, the degeneracy of the natural vibration at the reference frequency f ₀ of each main part 11A, 11B is solved, and the two resonance points B1 are located near the reference frequency f _0. , B2 appears to have appeared.
In any case, it can be seen that the ultrasonic multi-frequency vibrator 10 of the first embodiment resonates at the resonance frequencies f _B1 and f _B2 of the two resonance points B1 and B2 and vibrates greatly.

Therefore, in the ultrasonic processing apparatus 1 according to the first embodiment, when the ultrasonic transducer 31 is driven by the ultrasonic oscillation circuit 5 with a drive waveform having the resonance frequency f _B1 or f _B2 , the ultrasonic multifrequency vibrator 10. The main portions 11A and 11B and the coupling portion 12A vibrate as shown in FIGS. Thus, ultrasonic waves can be radiated around the treatment tank 60.
As shown in FIGS. 1 and 2, the ultrasonic multi-frequency vibrator 10 according to the first embodiment has a shape extending in the axis AX direction in which two main portions 11A and 11B and a coupling portion 12A are connected. Since each part greatly vibrates in the direction of the axis AX in accordance with the vibration mode (see FIGS. 4A and 4B), in particular, the base side surfaces 11AK and 11BK of the main parts 11A and 11B, and the tip Strong ultrasonic waves are radiated from the side surfaces 11AS and 11BS. For this reason, it is easy to make the size of the ultrasonic sound field in the treatment tank 60 uniform.

Moreover, when an ultrasonic wave having one frequency (for example, the resonance frequency f _B1 ) is radiated, a standing wave generated in the treatment tank 60 and an ultrasonic wave having the other frequency (for example, the resonance frequency f _B2 ) are radiated. In some cases, the positions of the nodes and the belly are different from the standing waves generated in the treatment tank 60.
For this reason, if the ultrasonic oscillation circuit 5 generates the drive waveform signal having the resonance frequency f _B1 and the drive waveform signal having the resonance frequency f _B2 by alternately switching them, the inside of the processing tank 60 is obtained. The position of the standing wave generated in the processing tank 60 is not constant, and the size of the ultrasonic sound field in the processing bath 60 is easily uniformed.
Alternatively, when the ultrasonic vibrator 31 is driven by the ultrasonic oscillation circuit 5 with a drive waveform including both the component of the resonance frequency f _{B1 and} the component of the resonance frequency f _B2 , the standing wave is generated in the processing tank 60. Further, it is easy to make the size of the ultrasonic sound field in the processing tank 60 uniform.

  In addition, as a process in the ultrasonic processing apparatus 1 of this Embodiment 1, what is necessary is just the process which can give a change to this to-be-processed fluid by irradiating the to-be-processed fluid P with an ultrasonic wave, For example, emulsification, dispersion, defoaming, chemical reaction promotion, sludge treatment, PCB treatment, etc., decomposition / detoxification of toxic substances, sterilization, fuel reforming, various treatments in bioprocesses and electrochemical processes, etc. Can be mentioned. In addition, by introducing another object to be processed into the processing tank 60 together with the fluid P to be processed, general cleaning, precision cleaning, crushing, etc. of the object to be processed (object to be cleaned) can be performed.

(Modification 1)
Next, a first modification of the first embodiment will be described with reference to FIGS. The first modification is different from the first embodiment only in the form of the ultrasonic multi-frequency vibrator, and the others are the same. The characteristics will be mainly described.

  This ultrasonic multi-frequency vibrating body 110 is also a metal block body formed by integrally cutting a metal lump of stainless steel (SUS304), and as shown in FIG. 111B, 111C, and two relatively small coupling portions 112A, 112B connecting between them.

The main portions 111A, 111B, and 111C of the ultrasonic multi-frequency vibrating body 110 are cylindrical shapes having diameters DD1, DD2, and DD3 of 40 mmφ and heights (lengths in the direction of the axis AX) LD1, LD2, and LD3, respectively. is there. Accordingly, the three main portions 111A, 111B, and 111C are made of the same material and have the same shape. Thus, since all the main parts 111A, 111B, and 111C are made of the same material and the same shape, the ultrasonic multi-frequency vibrator 110 can be easily manufactured.
Also, by making the main parts 111A, 111B, and 111C all the same material and shape, the symmetry of the ultrasonic multi-frequency vibrating body 110 is enhanced, and the mechanical quality at each resonance point C1, C2, and C3, which will be described later. The coefficient Qm is high, and it is easy to have sharp resonance characteristics.

Even in the ultrasonic multi-frequency vibrating body 110, the sound velocity Vd of the ultrasonic wave having the reference frequency f0 (= 27.22 kHz) transmitted in the axial direction through the rod of about 40 mmφ is Vd = 4900 m / s, and the wavelength λd is λd = 180 mm. Therefore, when viewed with each main part 111A, 111B, 111C alone (40φ × 90H), each main part 111A, 111B, 111C has a reference wavelength f ₀ (= 27.22 kHz) and a half wavelength in the direction of the axis AX. The resonance mode is set (LD1 = LD2 = LD3 = λd / 2).

  A screw hole 111AKN for connecting to the ultrasonic transmission body 32 is also formed in the base end side surface 111AK of the main portion 111A. The tip side surface 111CS of the opposite main part 111C is made flat.

On the other hand, the coupling portions 112A and 112B have cylindrical shapes with diameters DS1 and DS2 of 15 mmφ and heights (lengths in the axis AX direction) LS1 and LS2 of 45 mm, respectively. Accordingly, the two coupling portions 112A and 112B are made of the same material and have the same shape. Thus, in the ultrasonic multi-frequency vibrating body 110, not only the main part but also the plurality of coupling parts 112A and 112B are made of the same material and the same shape. Thereby, there is an advantage that the ultrasonic multi-frequency vibrator 110 can be easily manufactured.
In addition, not only the main part but also the coupling parts 112A and 112B are made of the same material and the same shape, so that the symmetry of the ultrasonic multi-frequency vibrating body 110 is further increased, and mechanical at the resonance points C1 to C3. The quality factor Qm is high, and it is easy to have sharp resonance characteristics.

Also in the ultrasonic multi-frequency vibrator 110, the ultrasonic sound velocity Vs transmitted in the axial direction through a rod of about 15 mmφ in the axial direction is Vs = 4900 m / s, and the wavelength λs is λs = 180 mm. Accordingly, when the coupling portions 112A and 112B are viewed alone (15φ × 45H), when the reference frequency f ₀ (= 27.22 kHz) is added, the coupling portions 112A and 112B are in the height direction (axis AX direction). It can be seen that the length is exactly ¼ of the wavelength λs of the ultrasonic wave of the reference frequency f ₀ (LS1 = LS2 = λs / 4). Accordingly, the coupling portions 112A and 112B do not resonate at the reference frequency f ₀ .

This ultrasonic multi-frequency vibrating body 110 was regarded as an axial vibration system in the axial direction, and was analyzed by displaying an equivalent circuit with a distributed constant circuit, and modal analysis was performed by a finite element method. FIG. 6 shows the frequency characteristics (impedance characteristics) of the ultrasonic multi-frequency vibrator. FIG. 7 shows the state of displacement of each part in the axial direction when the ultrasonic multi-frequency vibrating body 110 is excited at the resonance frequencies f _C1 , f _C2 , and f _C3 of the resonance points C1, C2, and C3.

According to the frequency characteristic graph of FIG. 6, the ultrasonic multi-frequency vibrating body 110 is in the vicinity of the reference frequency f ₀ (= 27.22 kHz), which is the resonance frequency of the main parts 111A, 111B, 111C alone, specifically. is one to the reference frequency f ₀ or very near, further reference frequency f 1 at a time of a total of three resonance points C1 to below and above the _0, C2, it can be seen that C3 appear. It can be seen that the resonance frequencies f _C1 , f _C2 , and f _C3 of the resonance points C1, C2, and _C3 are f _C1 = 25.69 kHz, f _C2 = 27.23 kHz, and f _C3 = 28.76 kHz, respectively.

  Further, according to FIG. 7A, when driven at the resonance point C1 (in the case of the C1 mode), the three main portions 111A, 111B, and 111C vibrate (expand and contract) in opposite phases in order. Also, it can be seen that the two coupling portions 112A and 112B between them vibrate in a form that greatly moves in the axial direction between the two main portions sandwiching them.

  Next, according to FIG. 7B, when driven at the resonance point C2 (in the case of the C2 mode), the main portions 111A and 111C at both ends are in reverse phase but greatly vibrate (expand / contract), while the center It can be seen that the main portion 111B does not vibrate much. It can also be seen that the coupling portions 112A and 112B between them vibrate in a form that expands and contracts with the vibration of the main portion 111A or the main portion 111C at both ends.

  Further, according to FIG. 7C, when driven at the resonance point C3 (in the case of the C3 mode), the three main portions 111A, 111B, 111C vibrate (expand / contract) in phase with each other, It can be seen that the coupling portions 112A and 112B vibrate in a form that expands and contracts in opposite phases between the two main portions sandwiching them. In the case of the C3 mode, it can be seen that each of the coupling portions 112A and 112B behaves as if it is one resonator.

The details of why the ultrasonic multi-frequency vibrator 110 according to the first modification has frequency characteristics having three resonance points C1, C2, and C3 are unknown. It can be seen that the ultrasonic multi-frequency vibrating body 110 resonates at the resonance frequencies f _C1 , f _C2 , and f _C3 of the three resonance points C1, _C2 , and _C3 and vibrates greatly.

Therefore, the ultrasonic multi-frequency vibrating body 110 according to the first modification is applied to an ultrasonic processing apparatus similar to the ultrasonic processing apparatus 1 according to the first embodiment, and the ultrasonic vibrator 31 has a resonance frequency f _C1. , F _C2 , or f _C3 , ultrasonic waves can be emitted around the inside of the treatment tank.
As shown in FIGS. 7A to 7C, the ultrasonic multi-frequency vibrating body 110 according to the first modified embodiment vibrates greatly in the direction of the axis AX, so that each main part 111A, Ultrasonic waves are radiated from the base end side surfaces 111AK, 111BK, 111CK and the front end side surfaces 111AS, 111BS, 111CS of 111B, 111C. For this reason, it is easy to make the magnitude | size of the ultrasonic sound field in a processing tank uniform.

In addition, when an ultrasonic wave having any one of the three resonance frequencies (for example, the resonance frequency f _C1 ) is radiated, a standing wave generated in the treatment tank and other resonance frequencies (for example, the resonance frequency f _C2 ). The positions of the nodes and the abdomen differ from the standing waves generated in the treatment tank when ultrasonic waves are emitted.
For this reason, if at least two resonance frequencies are selected from the three resonance frequencies in the ultrasonic oscillation circuit, and a signal having a drive waveform having these resonance frequencies is sequentially switched and generated, the processing tank can be used. The position of the standing wave generated is not constant, and the size of the ultrasonic sound field in the treatment tank is easily made uniform.
Alternatively, when at least two resonance frequencies are selected from the three resonance frequencies by the ultrasonic oscillation circuit and the ultrasonic transducer 31 is driven with a drive waveform signal including both components of these resonance frequencies, It is difficult for standing waves to be generated in the processing tank, and the size of the ultrasonic sound field in the processing tank is easily made uniform.

(Modification 2)
Next, a second modification of the first embodiment will be described with reference to FIGS. This modified embodiment 2 is different from the first and modified embodiments 1 only in the form of the ultrasonic multi-frequency vibrator, and the others are the same, so that the ultrasonic multi-frequency vibrator 210 according to the modified embodiment 2 is the same. The configuration and frequency characteristics will be mainly described.

  This ultrasonic multi-frequency vibrating body 210 is also a metal block body formed by integrally cutting a metal lump of stainless steel (SUS304), and as shown in FIG. 211B, 211C, and 211D, and three relatively small coupling portions 212A, 212B, and 212C that connect the two.

The main portions 211A, 211B, 211C, and 211D of the ultrasonic multi-frequency vibrating body 210 have a cylindrical shape with diameters DD1 to DD4 of 40 mmφ and height (length in the axis AX direction) LD1 to LD4 of 90 mm, respectively. Therefore, the four main parts 211A, 211B, 211C, 211D are made of the same material and have the same shape.
Also in the ultrasonic multi-frequency vibrator 210, each main part 211A, 211B, 211C, 211D has an axis line at the reference frequency f ₀ when viewed from the respective main parts 211A, 211B, 211C, 211D alone (40φ × 90H). It is configured to resonate at half wavelength in the AX direction (LD1 = LD2 = LD3 = LD4 = λd / 2).

  A screw hole 211AKN for connecting to the ultrasonic transmission body 32 is also formed in the base end side surface 211AK of the main portion 211A. The tip side surface 211DS of the opposite main portion 211D is flat.

On the other hand, the coupling portions 212A, 212B, and 212C each have a cylindrical shape with diameters DS1, DS2, and DS3 of 15 mmφ and heights (lengths in the direction of the axis AX) LS1, LS2, and LS3 of 45 mm. Therefore, the three coupling portions 212A, 212B, and 212C are made of the same material and have the same shape.
Even when the ultrasonic multi-frequency vibrator 210 is viewed as a single coupling portion 212A, 212B, 212C (15φ × 45H), each coupling portion 212A, 212B, 212C has a reference frequency f in its height direction (axis AX direction). It can be seen that the length is ¼ of the wavelength λs of the ultrasonic wave of ₀ (LS1 = LS2 = LS3 = λs / 4). Therefore, the coupling portions 212A, 212B, and 212C also do not resonate at the reference frequency f ₀ .

The ultrasonic multi-frequency vibrator 210 was regarded as an axial longitudinal vibration system, and was analyzed by displaying an equivalent circuit with a distributed constant circuit, and modal analysis was performed by a finite element method. FIG. 9 shows the frequency characteristics (impedance characteristics) of the ultrasonic multi-frequency vibrator. FIG. 10 shows the displacement in the axial direction of each part when the ultrasonic multi-frequency vibrating body 410 is excited at the resonance frequencies f _D1 , f _D2 , f _D3 , and f _D4 of the resonance points D1, D2, D3, and D4. The state of is shown.

According to the frequency characteristic graph of FIG. 9, this ultrasonic multi-frequency vibrator 210 is in the vicinity of the reference frequency f ₀ (= 27.22 kHz), which is the resonance frequency of the main parts 211A, 211B, 211C, 211D alone. specifically, the 2 one by a total of four resonance points below and above the reference frequency _{f 0 D1, D2, D3,} D4 seen that appears. The resonance frequencies f _D1 , f _D2 , f _D3 , and f _D4 of the resonance points D1, D2, D3, and _D4 are f _D1 = 25.48 kHz, f _D2 = 26.55 kHz, f _D3 = 27.90 kHz, respectively. It can be seen that f _D4 = 28.970 kHz.

  Further, according to FIG. 10A, when driven at the resonance point D1 (in the case of the D1 mode), the four main portions 211A, 211B, 211C, 211D sequentially vibrate (expand and contract) in opposite phases. Further, it can be seen that the three coupling portions 212A, 212B, and 212C between them vibrate in such a manner that they greatly move in the axial direction between the two main portions sandwiching them.

  Next, according to FIG. 10B, when driven at the resonance point D2 (in the case of the D2 mode), the two main parts 211B and 211C in the center vibrate (expand / contract) in phase with each other, The main parts 211A and 211D vibrate (expand and contract) in the opposite phase to the main parts 211B and 211C. Further, the coupling portions 212A and 212C on both sides vibrate in such a manner that they greatly move in the axial direction between the two main portions sandwiching the coupling portions 212A and 212C. On the other hand, the coupling part 212B vibrates in a form that expands and contracts in opposite phases between the main parts 211B and 212C sandwiching the coupling part 212B. That is, it can be seen that the coupling portion 212B behaves as if it is one resonator.

  Furthermore, according to FIG. 10C, when driven at the resonance point D3 (in the case of the D3 mode), the two main portions 211A and 211B on the base end side vibrate (expand and contract) in the same phase. Also, the two main portions 211C and 211D on the distal end side vibrate (expand / contract) in phase with each other. However, the main parts 211A and 211B and the main parts 211C and 211D vibrate (expand and contract) in opposite phases. Further, the central coupling portion 212B vibrates in such a manner that it largely moves in the axial direction between the two main portions 211B and 211C sandwiching this. On the other hand, the coupling portions 212A and 212C on both sides vibrate in a form that expands and contracts in a reverse phase with the main portion sandwiching the coupling portions 212A and 212C. That is, it can be seen that these coupling portions 212A and 212C behave as if they were one resonator.

  Furthermore, according to FIG. 10 (d), when driven at the resonance point D4 (in the case of the D4 mode), the four main portions 211A, 211B, 211C, 211D vibrate (expand / contract) in phase with each other. The three coupling portions 212A, 212B, and 212C each vibrate in a form that expands and contracts in opposite phases between two main portions sandwiching them. That is, it can be seen that each of the three coupling portions 212A, 212B, and 212C behaves as if it is one resonator.

The details of why the ultrasonic multi-frequency vibrator 210 of the second modification has frequency characteristics having four resonance points D1 to D4 are unknown, but in any case, the ultrasonic of the second modification 2 It can be seen that the multi-frequency vibrator 210 resonates at the resonance frequencies f _D1 , f _D2 , f _D3 , and f _D4 of the four resonance points D1 to _D4 and vibrates greatly.

Therefore, the ultrasonic multi-frequency vibrator 210 according to the second modification is applied to an ultrasonic processing apparatus similar to the ultrasonic processing apparatus 1 according to the first embodiment, and the ultrasonic transducer 31 is set to the resonance frequency f _D1. , F _D2 , f _D3 , or f _D4 , ultrasonic waves can be emitted around the inside of the treatment tank.
As shown in FIGS. 10A to 10D, the ultrasonic multi-frequency vibrator 210 of the second modification 2 vibrates greatly in the direction of the axis AX, so that each main part 211A, Ultrasonic waves are radiated from the base end side surfaces 211AK, 211BK, 211CK, and 211DK of the 211B, 211C, and 211D and the front end side surfaces 211AS, 211BS, 211CS, and 211DS. For this reason, it is easy to make the magnitude | size of the ultrasonic sound field in a processing tank uniform.

In addition, when an ultrasonic wave of any one of the four frequencies (for example, the resonance frequency f _D1 ) is radiated, a standing wave generated in the processing tank and an ultrasonic wave of another frequency (for example, the resonance frequency f _D2 ). The position of the node and the belly is different from the standing wave generated in the treatment tank.
For this reason, if the ultrasonic oscillation circuit selects at least two resonance frequencies among the four resonance frequencies and sequentially generates and generates the drive waveform signals having these resonance frequencies, The position of the standing wave generated is not constant, and the size of the ultrasonic sound field in the treatment tank is easily made uniform.
Alternatively, when at least two resonance frequencies are selected from the four resonance frequencies by the ultrasonic oscillation circuit and the ultrasonic transducer 31 is driven with a drive waveform signal including both components of these resonance frequencies, It is difficult for standing waves to be generated in the processing tank, and the size of the ultrasonic sound field in the processing tank is easily made uniform.

(Modification 3)
Next, the ultrasonic multi-frequency vibrator 310 according to the third modification will be described with reference to FIG.
The ultrasonic multi-frequency vibrator 310 of the third modification has the same outer shape as the ultrasonic multi-frequency vibrator 210 according to the second modification, as can be easily understood by comparing FIG. 11 with FIG. However, in the ultrasonic multi-frequency vibrator 210 according to the modification 2, the four main portions 211A to 211D and the coupling portions 212A to 212C are cut out from a single metal lump and formed integrally.
On the other hand, the ultrasonic multi-frequency vibrator 310 according to the third modification is that four main parts 311A to 311D and coupling parts 312A to 312C are separated as separate ultrasonic vibration units U1 to U7. Different.

  Specifically, among the ultrasonic vibration units U1, U3, U5, and U7 corresponding to the main portions 311A to 311D, screw holes 311AKN to 311DKN are provided on the base end side surfaces 311AK to 311DK, and tip side surfaces 311AS to 311CS are provided. Screw holes 311ASN to 311CSN are formed. Accordingly, the ultrasonic vibration units U1, U3, and U5 corresponding to the three main portions 311A to 311C can be used interchangeably with the same shape, and the ultrasonic multi-frequency vibrator 310 can be easily handled such as assembly and repair. There are advantages.

The screw hole 311AKN drilled in the proximal end side surface 311AK of the main portion 311A is used for connection with the ultrasonic transmission body 32 or the like (see FIG. 1). On the other hand, no screw hole is drilled in the distal end side surface 311DS of the ultrasonic vibration unit U7 corresponding to the most distal end main portion 311D.
However, a screw hole can also be drilled in the tip side surface 311DS of this ultrasonic vibration unit U7, and in this way, it becomes the same shape as the other ultrasonic vibration units U1, U3, U5. There are advantages in that they can be used interchangeably, and the handling of the ultrasonic multi-frequency vibrator 310 such as assembly and repair can be facilitated.

  On the other hand, screw holes 312AKN to 312CKN and screw holes 312ASN to 312CSN are also formed at both ends (upper and lower ends in the figure) of the ultrasonic vibration units U2, U4, and U6 corresponding to the coupling portions 312A to 312C. ing. Accordingly, the ultrasonic vibration units U2, U4, and U6 corresponding to the three coupling portions 312A to 312C can be used interchangeably with the same shape, and the ultrasonic multi-frequency vibrator 310 can be easily handled such as assembly and repair. Become.

  The seven ultrasonic vibration units U1 to U7 connect the screw holes 311ASN facing each other using the six connection screws 316A to 316F to constitute the ultrasonic multi-frequency vibrator 310. Yes.

Since the ultrasonic multi-frequency vibrator 310 and the ultrasonic vibration units U1 to U7 of the third modification are configured as described above, for example, the ultrasonic multi-frequency such as changing the number of main parts and coupling parts. It is possible to easily cope with changes in the shape of the vibrating body, repairs and replacement of each part.
Further, as in the third modification, the ultrasonic vibration units U1 to U7 are formed, and these are connected and integrated to form the ultrasonic multi-frequency vibrator 310, as in the second modification. Compared to forming the ultrasonic multi-frequency vibrating body 210 made of an integral member having no connecting portion, it is easier to manufacture and suitable for mass production, and is inexpensive. In addition, for each ultrasonic vibration unit U1 and the like, it is possible to finely adjust the dimensions such as the length and the resonance frequency, and the frequency adjustment of each part and the whole of the ultrasonic multi-frequency vibrator 310 is facilitated.

(Modification 4)
Next, the ultrasonic multi-frequency vibrating body 410 according to the modification 4 will be described with reference to FIG.
The ultrasonic multi-frequency vibrator 410 according to the fourth modification has the same outer shape as the ultrasonic multi-frequency vibrator 210 according to the second and third modifications, as can be easily understood by comparing with FIGS. 8 and 12 described above. It is. However, the ultrasonic multi-frequency vibrator 310 according to the modification 3 is separated into seven ultrasonic vibration units U1 to U7.
On the other hand, the ultrasonic multi-frequency vibrating body 410 of the fourth modification is different in that it is separated into three ultrasonic vibration units U11 to U13.

Specifically, the ultrasonic vibration unit U11 corresponds to a combination of the main portions 411A and 411B and the coupling portion 412A positioned therebetween. Further, the ultrasonic vibration unit U13 corresponds to a combination of the main portions 411C and 411D and the coupling portion 412C positioned therebetween. On the other hand, the ultrasonic vibration unit U11 corresponds to the coupling portion 412B.
Screw holes 411AKN and 411BSN are formed at both ends of the ultrasonic vibration unit U11, that is, at the base end side surface 411AK of the main portion 411A and the front end side surface 411BS of the main portion 411B, respectively. Further, screw holes 411CKN and 411DSN are formed at both ends of the ultrasonic vibration unit U13, that is, at the base end side surface 411CK of the main portion 411C and the front end side surface 411DS of the main portion 411D, respectively. Correspondingly, screw holes 412BKN and 412BSN are formed at both ends of the ultrasonic vibration unit U12.

Thus, the ultrasonic vibration units U11 and U13 can be used interchangeably with each other in the same shape, and the ultrasonic multi-frequency vibrating body 410 can be easily handled such as assembly and repair.
In the fourth modification, the screw hole 411DSN is also drilled in the distal end side surface 411DS corresponding to the most main portion 411D in the ultrasonic vibration unit U13. This is because the ultrasonic vibration units U11 and U13 have the same shape.

  The three ultrasonic vibration units U11 to U13 connect the screw holes 411BSN and the like facing each other using two connection screws 416A and 416B to constitute an ultrasonic multi-frequency vibration body 410. .

The ultrasonic multi-frequency vibrator 410 and the ultrasonic vibration units U11 to U13 of the fourth modification can also obtain the same effects as those of the ultrasonic multi-frequency vibrator 310 and the units U1 to U7 of the third modification.
That is, it is possible to easily cope with a change in the shape of the ultrasonic multi-frequency vibrating body, such as a change in the number of main parts and coupling parts, and a repair and replacement of each part. Further, as in the above-described modified embodiment 2, it is easier to manufacture and more suitable for mass production than the formation of the ultrasonic multi-frequency vibrator 210 made of an integral member having no connection portion, and it is inexpensive. In addition, for each ultrasonic vibration unit U11 and the like, it is possible to finely adjust the dimensions such as the length and the resonance frequency, and the frequency adjustment of each part and the whole of the ultrasonic multi-frequency vibrating body 410 is easy.

In the above-described modification 3, the ultrasonic vibration unit U1 and the like used for the ultrasonic multi-frequency vibrating body 310 are basically configured to correspond to the main parts and the coupling parts. The basic shape has two forms. Further, in the above-described fourth modification, the ultrasonic vibration unit U11 used for the ultrasonic multi-frequency vibrating body 410 has the above-described form, and thus each ultrasonic vibration unit U11 has two types of forms. It became.
However, each ultrasonic vibration unit may have the same shape or a different shape. Further, as can be seen from the modified embodiments 3 and 4, an ultrasonic vibration unit (for example, U1) in which one main part is included in one ultrasonic vibration unit can be used as a plurality of main parts and between them. It is good also as an ultrasonic vibration unit (for example, U11) in which these coupling parts are included.

Further, in the ultrasonic multi-frequency vibrating body 310 of the third modification, the connecting surface for connecting the units U1 and the like to each other is positioned at the position between each main portion and the coupling portion, that is, the base end side surface 311BK of each main portion. Or the tip side surface 311AS. Similarly, in the ultrasonic multi-frequency vibrating body 410 according to the fourth modification, the connecting surfaces that connect the units U11 and the like are made to coincide with the distal end side surface 411BS of the main portion 411B and the proximal end side surface 411CK of the main portion 411C. .
For this reason, compared with the case where the connecting surface is positioned inside the main portion 311A, etc., loss at the interface is less likely to occur, and ultrasonic vibration is efficiently transmitted between the ultrasonic vibration units U1, U11, etc. Can do.
In the third and fourth modifications, the connecting surfaces of the units U1 and the like are positioned between the main portions and the connecting portions. For example, the connecting surfaces such as the connecting portions 312A and 412B are connected to the center in the axis AX direction. A surface can also be located.

Moreover, in this modification 3, 4, as a mutual connection method, such as ultrasonic vibration unit U1, the screw hole is drilled in the mutual connection surface shown by the above-mentioned modification 3, 4, and connection surfaces are connected. A method of joining and fastening with connecting screws (bolts) arranged so as to straddle both screw holes was adopted. In addition, it is also possible to adopt a method in which a male screw portion is protruded from one ultrasonic vibration unit, a screw hole is recessed in the other ultrasonic vibration unit, and these are screwed. Moreover, it can adhere | attach with an adhesive agent, or can also use together the adhesion | attachment by an adhesive agent, and the fastening by a connection screw | thread etc. FIG.
Further, the ultrasonic multi-frequency vibrators 310 and 410 according to the modified embodiments 3 and 4 can be applied to an ultrasonic processing apparatus or the like in the same manner as the ultrasonic multi-frequency vibrator 210 of the modified embodiment 2.

(Modification 5)
Next, Modification 5 will be described with reference to FIG.
The ultrasonic processing device 501 according to the fifth modification is an ultrasonic vibration device 502 that generates ultrasonic waves, as can be easily understood when compared with the ultrasonic processing device 1 according to the first embodiment (see FIG. 1). The configuration, more specifically, the configuration of the ultrasonic vibration source 530 that applies ultrasonic vibration to the ultrasonic multi-frequency vibrating body 10 and the ultrasonic oscillation circuit 505 that drives this are different. It will be described and other description will be omitted.

As described above, the ultrasonic processing apparatus 501 according to the fifth modification includes the processing tank 60 and the ultrasonic multifrequency vibrator 10 similar to those in the ultrasonic processing apparatus 1, the ultrasonic vibration source 530 and the ultrasonic vibration source 10. A sound wave oscillation circuit 505 is included.
Among these, the ultrasonic vibration source 530 synthesizes the known bolt-clamped Langevin type ultrasonic vibrators 531A and 531B using a piezoelectric ceramic and the ultrasonic vibrations generated by these to make stronger ultrasonic vibrations. It comprises a known power synthesizer 538 and a known ultrasonic transmitter 32 for transmitting ultrasonic vibrations to the ultrasonic multi-frequency vibrator 10.
The ultrasonic oscillation circuit 505 is a known drive circuit for driving the ultrasonic transducers 531A and 531B with two types of predetermined frequencies f _B1 and f _B2 , but is compared with the ultrasonic oscillation circuit 5 described above. Since the two ultrasonic transducers 531A and 531B are driven in the same phase, a larger output can be obtained.

In the power synthesizer 538, the power assembly plate 538A is a substantially annular metal block, and the ultrasonic transducers 531A and 531B are connected to the side surfaces of the power synthesizer 538A at positions facing each other across the axis AX. They are connected using screws 536A and 536B. Further, a substantially columnar conversion column 538B is inserted in close contact with the inner side of the power collecting plate 538A in an interference fit state.
Therefore, when the two ultrasonic vibrators 531A and 531B are vibrated in the same phase, the power assembly plate 538A resonates to generate radial vibration (horizontal vibration in FIG. 13C). Then, the conversion column 538B inserted into the power assembly plate 538A resonates in the axis AX direction. Thus, the vibration in the direction of the axis AX is transmitted to the ultrasonic multifrequency vibrator 10 via the ultrasonic transmitter 32.

  At this time, the ultrasonic energy that can be extracted from the ultrasonic transmission body 32 is approximately the sum of the ultrasonic energy output from the two ultrasonic transducers 531A and 531B. Thus, in the ultrasonic processing apparatus 501 of the fifth modification, by using the two ultrasonic transducers 531A and 531B, ultrasonic waves that are stronger than those in the ultrasonic processing apparatus 1 of the first embodiment can be generated. It can be made to radiate | emit from the body 10, and the to-be-processed fluid P can be processed with a more powerful ultrasonic wave.

In the fifth modification and FIG. 13, the ultrasonic multi-frequency vibrator 10 having two main parts 11A and 11B and one coupling part 12A as the ultrasonic multi-frequency vibrator connected to the ultrasonic vibration source 530. An example using is shown.
However, other ultrasonic multi-frequency vibrators, for example, the ultrasonic multi-frequency vibrators 110 and 210 of the first and second modifications (see FIGS. 5 and 8) can be used.

(Embodiment 2)
Next, the tip surface ultrasonic radiation device 601 according to the second embodiment will be described with reference to FIG. Specifically, the tip end surface ultrasonic radiation device 601 of the second embodiment is an ultrasonic cleaner that ultrasonically cleans members (parts and the like, not shown) immersed in the fluid P to be processed. The distal end surface ultrasonic radiation device 601 includes an ultrasonic vibration device 2 (see FIG. 1) according to the first embodiment, an ultrasonic oscillation circuit 5, and a storage tank 660 that stores a fluid P to be processed. The ultrasonic vibration device 2 includes an ultrasonic multifrequency vibrator 10 and an ultrasonic vibration source 30 that excites the ultrasonic multifrequency vibrator 10. The bottom surface 660B of the storage tank 660 has the distal end surface 11BS of the main portion 11B on the distal end side (upward in FIG. 14) of the ultrasonic multi-frequency vibrating body 10 adhered and fixed.

Accordingly, when the ultrasonic oscillation circuit 5 excites the ultrasonic vibration source 30 to generate ultrasonic vibration and the ultrasonic multi-frequency vibrator 10 is resonated at the resonance frequency f _B1 or f _B2 , the bottom plate 660B is interposed. Indirectly, ultrasonic waves are radiated into the fluid P to be treated. Therefore, if a member such as a metal part is put into the storage tank 660 together with the fluid P to be processed, such a member can be ultrasonically cleaned. As shown in FIGS. 1 and 2, the ultrasonic multi-frequency vibrator 10 used in the second embodiment has a shape extending in the direction of the axis AX in which the two main portions 11A and 11B and the coupling portion 12A are connected. Since the tip surface 11BS greatly vibrates in the axis AX direction according to the vibration mode (see FIGS. 4A and 4B), strong ultrasonic waves can be emitted from the tip surface 11BS.

Moreover, in the distal-end surface ultrasonic radiation device 601 of the second embodiment, the ultrasonic oscillation circuit 5 alternately generates a drive waveform signal having the resonance frequency f _B1 and a drive waveform signal having the resonance frequency f _B2. If it is generated by switching, the position of the standing wave generated in the fluid P to be treated stored in the storage tank 660 is not constant, and the size of the ultrasonic sound field in the storage tank 660 is made uniform. Cheap. Therefore, the member can be ultrasonically cleaned more uniformly.
Alternatively, even when the ultrasonic oscillator 31 is driven by the ultrasonic oscillation circuit 5 with a drive waveform including both the component of the resonance frequency f _{B1 and} the component of the resonance frequency f _B2 , a standing wave is generated in the storage tank 660. In addition, the ultrasonic sound field in the storage tank 660 is easily made uniform.

In addition, in the front end surface ultrasonic radiation device 601 of the second embodiment, the ultrasonic wave is applied to the fluid P to be processed, and ultrasonic cleaning of the member put into the storage tank 660 together with the fluid P to be processed is performed. Described as what to do.
However, the distal-end surface ultrasonic radiation device 601 of the second embodiment also needs only to be able to perform a process that can give some change to the processed fluid P stored in the storage tank 660. Examples include emulsification, dispersion, defoaming, promotion of chemical reaction, sludge treatment, PCB treatment, decomposition and detoxification of harmful substances, sterilization, fuel reforming, various treatments in bioprocesses and electrochemical processes. In addition, by throwing another processed object together with the processed fluid P into the storage tank 660, the processed object can be crushed.

(Modification 6)
Next, the tip surface ultrasonic radiation device 701 according to the modified embodiment 6 will be described with reference to FIG. Specifically, the tip end surface ultrasonic radiation device 701 of the sixth modification is also an ultrasonic cleaning machine that ultrasonically cleans a member (part or the like) immersed in the fluid P to be processed.
The tip surface ultrasonic radiation device 701 is different from the tip surface ultrasonic radiation device 601 according to the above-described second embodiment in an ultrasonic vibration device 702 and an ultrasonic multifrequency vibrator 710. Therefore, these will be described and description of similar parts will be omitted.

  The ultrasonic multi-frequency vibrator 710 according to the sixth modification includes main portions 711A and 711B and a coupling portion 712A interposed therebetween, and includes two ultrasonic vibration units U71 and U72. Among these, the ultrasonic vibration unit U72 includes a main portion 711B and a coupling portion 712A, and is the same material and the same shape as the main portion 11B and the coupling portion 12A of the ultrasonic multi-frequency vibrator 10 according to the first embodiment. However, a screw hole 712AKN is formed at the base end (the base end of the coupling portion 712A).

On the other hand, as can be easily understood with reference to FIG. 15, the ultrasonic vibration unit U71 is a main part 711A as a single unit. Unlike the main part 11A of the ultrasonic multi-frequency vibrator 10, the main part 711A is a so-called bolted Langevin type ultrasonic vibrator using a piezoelectric element. Therefore, the main portion 711A (ultrasonic vibration unit U71) can generate ultrasonic vibration by being driven by the ultrasonic oscillation circuit 5. For this reason, unlike the above-described distal-end-surface ultrasonic radiation device 601 (see FIG. 14), ultrasonic vibration can be generated without the ultrasonic vibration source 30 including the ultrasonic transducer 31. . On the other hand, the main portion 711A, like the main portion 711B and the main portion 11A of the ultrasonic multi-frequency vibrating body 10, is subjected to half-wave resonance (1) in the axis AX direction when ultrasonic vibration having a reference frequency f ₀ is applied. The dimensions of each part are selected so as to achieve (/ 2 wavelength resonance). Thus, the main portion 711A functions as an ultrasonic vibration source that ultrasonically vibrates the ultrasonic multi-frequency vibrating body 710 or as a resonator that resonates at a reference wavelength f ₀ in the direction of the axis AX. Accordingly, similarly to the ultrasonic multi-frequency vibrator 10 of the first embodiment, the ultrasonic multi-frequency vibrator 710 also resonates at the resonance frequencies f _B1 and f _B2 .

  The ultrasonic vibration units U71 and U72 are formed by connecting a screw hole 712AKN formed in the base end of the coupling portion 712A and a screw hole 711ASN formed in the distal end side surface 711AS of the ultrasonic vibration unit U71 (main portion 711A) with a connecting screw 716. The ultrasonic multi-frequency vibrating body 710 is configured by being connected. The ultrasonic multi-frequency vibrator 710 is also an ultrasonic vibration device 702 capable of ultrasonic vibration by itself.

  In addition to the above-described ultrasonic vibration device 702, the distal-end surface ultrasonic radiation device 701 of the sixth modification includes a storage tank 660 that stores the ultrasonic oscillation circuit 5 and the fluid P to be processed, as in the second embodiment. Yes. Of the ultrasonic multi-frequency vibrating body 710, the front end surface 711BS of the main portion 711B on the front end side (upward in FIG. 15) is adhered and fixed to the bottom plate 660B of the storage tank 660.

Therefore, when the ultrasonic oscillation circuit 5 excites the main part 711A to generate ultrasonic vibrations and the ultrasonic multi-frequency vibrating body 710 is resonated at the resonance frequency f _B1 or f _B2 , the ultrasonic wave is generated in the fluid P to be processed. Since the sound wave is emitted, such a member can be ultrasonically cleaned if the member is put into the storage tank 660.

Moreover, even in the distal end surface ultrasonic radiation device 701 of the sixth modification, the main portion 711A can be driven by alternately switching between a drive waveform having the resonance frequency f _B1 and a drive waveform having the resonance frequency f _B2 . Since the position of the standing wave generated in the fluid P to be processed fluctuates, the size of the ultrasonic sound field in the storage tank 660 can be easily made uniform. Therefore, the member can be ultrasonically cleaned more uniformly.
Alternatively, even when the main portion 711A is driven with a drive waveform including both the component of the resonance frequency f _{B1 and} the component of the resonance frequency f _B2 , a standing wave is hardly generated in the storage tank 660, and further, It is easy to make the size of the ultrasonic sound field uniform.

(Modification 7)
Next, the tip surface ultrasonic radiation device 801 according to the modified embodiment 7 will be described with reference to FIG. Specifically, the distal end surface ultrasonic radiation device 801 of the present modified embodiment 7 is also an ultrasonic cleaning machine that ultrasonically cleans a member (part or the like) immersed in the fluid P to be processed.
This tip surface ultrasonic radiation device 801 is different from the tip surface ultrasonic radiation devices 601 and 701 according to the second embodiment and the sixth modification described above, in the ultrasonic vibration device 802, the ultrasonic multi-frequency vibrator 810, and the ultrasonic wave. The oscillation circuit 805 is different. Therefore, these will be described and description of similar parts will be omitted.

  The ultrasonic multi-frequency vibrating body 810 of the present modified embodiment 7 includes ultrasonic vibration units U81, U82, U83. These correspond to the main portion 811A, the coupling portion 812A, and the main portion 811B, respectively. Among these, the ultrasonic vibration unit U82 corresponds to the coupling portion 812A, and is the same material and the same shape as the coupling portion 12A of the ultrasonic multi-frequency vibrator 10 according to the first embodiment. However, screw holes 812AKN and 812ASN are formed at both ends, respectively.

  On the other hand, as can be easily understood with reference to FIG. 16, the ultrasonic vibration units U81 and U83 are single units and correspond to the main portions 811A and 811B. Each of the main portions 811A and 811B is a so-called bolted Langevin type ultrasonic vibrator using a piezoelectric element as a whole, like the main portion 711A of the ultrasonic multi-frequency vibrator 710 according to the above-described modified embodiment 6. ing. Accordingly, by driving the main portions 811A and 811B with the ultrasonic oscillation circuit 805, ultrasonic vibration can be generated. Therefore, similarly to the above-described modified embodiment 6, it is possible to generate ultrasonic vibration without providing the ultrasonic vibration source 30 including the ultrasonic transducer 31.

On the other hand, the dimensions of each part of the main parts 811A and 811B are selected so that half-wave resonance (1 / 2-wave resonance) is performed in the axis AX direction when ultrasonic vibration of the reference frequency f ₀ is applied. Has been. Thus, the main portion 811A, 811B, each also ultrasonic multi-frequency vibrator 810 as a source of ultrasonic vibrations to the ultrasonic vibration, also functions as a resonator to a half-wavelength resonance in the direction of the axis AX at a reference frequency f ₀ To do. Therefore, similarly to the ultrasonic multi-frequency vibrator 10, the ultrasonic multi-frequency vibrator 810 also resonates at the resonance frequencies f _B1 and f _B2 .

  The ultrasonic vibration units U81, U82, U83 include screw holes 812AKN, 812ASN formed at both ends of the coupling portion 812A, screw holes 811ASN formed in the tip side surface 811AS of the ultrasonic vibration unit U81 (main portion 811A), and super The ultrasonic multi-frequency vibrating body 810 is configured by connecting screw holes 811AKN formed in the base end side surface 811AK of the sonic vibration unit U83 (main portion 811B) with connection screws 816A and 816B, respectively. This ultrasonic multi-frequency vibrator 810 is also an ultrasonic vibration device 802 capable of ultrasonic vibration by itself.

  In addition to the above-described ultrasonic vibration device 802, the distal end surface ultrasonic radiation device 801 of the present modified embodiment 7 includes a storage tank 660 that stores the fluid P to be processed, as in the second embodiment and the modified embodiment 6. Of the ultrasonic multi-frequency vibrating body 810, the front end surface 811BS of the main portion 811B on the front end side (upper side in FIG. 16) is adhered and fixed to the bottom plate 660B of the storage tank 660.

Accordingly, when the ultrasonic oscillation circuit 805 excites the main parts 811A and 811B to generate ultrasonic vibrations and causes the ultrasonic multi-frequency vibrating body 810 to resonate at the resonance frequency f _B1 or f _B2 , the bottom plate 660B is interposed. Indirectly, ultrasonic waves are radiated into the fluid P to be treated. Therefore, if a member such as a metal part is put into the storage tank 660 together with the fluid P to be processed, such a member can be ultrasonically cleaned.

In addition, also in the distal end surface ultrasonic radiation device 801 of the seventh modification, the ultrasonic oscillation circuit 805 alternately generates a drive waveform signal having the resonance frequency f _B1 and a drive waveform signal having the resonance frequency f _B2. If it is generated by switching, the position of the standing wave generated in the fluid P to be treated stored in the storage tank 660 is not constant, and the size of the ultrasonic sound field in the storage tank 660 is made uniform. Cheap.
Alternatively, even when the ultrasonic transducer 31 is driven by the ultrasonic oscillation circuit 805 with a drive waveform including both the component of the resonance frequency f _{B1 and} the component of the resonance frequency f _B2 , a standing wave is generated in the storage tank 660. In addition, it is easy to make the size of the ultrasonic sound field in the storage tank 660 uniform.

(Embodiment 3)
Next, the tip surface ultrasonic radiation device 901 according to the third embodiment will be described with reference to FIG.
Specifically, the distal end surface ultrasonic radiation device 901 of the third embodiment is an ultrasonic homogenizer that emulsifies the fluid P to be processed. The tip surface ultrasonic radiation device 901 includes an ultrasonic vibration device 2 (see FIG. 1) according to the first embodiment, an ultrasonic oscillation circuit 5, and a storage tank 960 that stores a fluid P to be processed. The ultrasonic vibration device 2 includes an ultrasonic multifrequency vibrator 10 and an ultrasonic vibration source 30 that excites the ultrasonic multifrequency vibrator 10. The front end surface ultrasonic radiation device 901 of the third embodiment uses the front end surface 11BS of the main portion 11B on the front end side of the ultrasonic multi-frequency vibrating body 10 by being immersed in the processing fluid P stored in the storage tank 960. .

Therefore, when the ultrasonic oscillation circuit 5 excites the ultrasonic vibration source 30 to generate ultrasonic vibrations and the ultrasonic multi-frequency vibrating body 10 is resonated at the resonance frequency f _B1 or f _B2 , the fluid to be processed directly Ultrasonic waves are emitted into P, and the fluid P to be processed is emulsified.

The ultrasonic multi-frequency vibrator 10 used also in the third embodiment can radiate strong ultrasonic waves from the distal end surface 11BS.
Moreover, in the distal end surface ultrasonic radiation device 901 of the third embodiment, the ultrasonic oscillation circuit 5 alternately generates a drive waveform signal having the resonance frequency f _B1 and a drive waveform signal having the resonance frequency f _B2. If it is generated by switching, the position of the standing wave generated in the fluid P to be processed is not fixed, and the size of the ultrasonic sound field in the storage tank 960 is made uniform, and the fluid P to be processed is more Can be uniformly emulsified.
Alternatively, even when the ultrasonic transducer 31 is driven by the ultrasonic oscillation circuit 5 with a drive waveform including both the component of the resonance frequency f _{B1 and} the component of the resonance frequency f _B2 , a standing wave is generated in the storage tank 960. In addition, the ultrasonic sound field in the storage tank 960 is easily made uniform.

(Embodiment 4)
Next, an ultrasonic processing apparatus 1001 according to Embodiment 4 will be described with reference to FIG. Specifically, the ultrasonic processing apparatus 1001 according to the fourth embodiment is an ultrasonic processing apparatus that performs various ultrasonic processing by replacing the ultrasonic processing tools 1071 to 1074. This ultrasonic processing apparatus 1001 includes ultrasonic processing tools 1071 to 1074 that can be replaced in addition to the ultrasonic vibration apparatus 2 (see FIG. 1) and the ultrasonic oscillation circuit 5 according to the first embodiment. The ultrasonic vibration device 2 includes an ultrasonic multifrequency vibrator 10 and an ultrasonic vibration source 30 that excites the ultrasonic multifrequency vibrator 10. The ultrasonic machining apparatus 1001 according to the fourth embodiment attaches the ultrasonic machining tools 1071 to 1074 using the screw holes 11BSN formed in the distal end surface 11BS of the main portion 11B on the distal end side of the ultrasonic multi-frequency vibrator 10. Use it instead. Of these, 1071 is a file, 1072 is a reamer, and 1073 is a saw. Reference numeral 1074 denotes a sieve, which is formed by stretching a sieve net 1074A.

Therefore, any of the ultrasonic processing tools 1071 to 1074 (for example, the file 1071) is attached to the tip of the ultrasonic multi-frequency vibrating body 10, and the ultrasonic vibration source 30 is excited by the ultrasonic oscillation circuit 5 to generate ultrasonic waves. When vibration is generated and the ultrasonic multi-frequency vibrating body 10 is resonated at the resonance frequency f _B1 or f _B2 , the ultrasonic processing tool (for example, the file 1071) attached to the tip surface 11 BS of the main part 11 B has these frequencies. Vibrates ultrasonically. Thereby, in processing a workpiece (not shown), the effect of ultrasonic vibration is superimposed.

In particular, in the ultrasonic processing apparatus 1001 of the fourth embodiment, if the ultrasonic oscillation circuit 5 is used to alternately generate a drive signal having the resonance frequency f _B1 and a drive signal having the resonance frequency f _B2. Since the position of the standing wave generated in the ultrasonic processing tools 1071 to 1074 can be switched by the applied ultrasonic vibration, the ultrasonic processing can be performed uniformly.
Alternatively, even when the ultrasonic vibrator 31 is driven by the ultrasonic oscillation circuit 5 with a drive waveform including both the component of the resonance frequency f _{B1 and} the component of the resonance frequency f _B2 , the ultrasonic processing tools 1071 to 1074 are fixed. Standing waves are unlikely to occur, and ultrasonic processing can be performed uniformly.

(Embodiment 5)
Next, the tip surface ultrasonic radiation device 1101 according to Embodiment 5 will be described with reference to FIG. Specifically, the tip surface ultrasonic radiation device 1101 according to the fifth embodiment is a fish finder that is installed outside the boat SH floating on the water WT and detects an underwater fish school or the like. The distal end surface ultrasonic radiation device 1101 includes an ultrasonic vibration device 702 (see FIG. 15) according to the above-described modified embodiment 6, a drive processing device 1105, and a case 1160 surrounding the ultrasonic vibration device 702. As described above, the ultrasonic vibration device 702 is also an ultrasonic multi-frequency vibrator 710 having the main part 711A that also serves as an ultrasonic vibrator, the coupling part 712A, and the main part 711B.

The distal end surface ultrasonic radiation device 1101 of the fifth embodiment is intermittently ultrasonically vibrated by a burst-wave drive signal having a resonance frequency f _B1 or f _B2 generated by the drive processing device 1105. Thereby, ultrasonic waves having a frequency of f _B1 or f _B2 are radiated from the tip of the ultrasonic multi-frequency vibrating body 710 into the water through the bottom plate 1160B of the case 1160.
Further, during a period when the ultrasonic multi-frequency vibrating body 710 is not driven, ultrasonic waves (echoes) from the water are received by the ultrasonic multi-frequency vibrating body 710 via the bottom plate 1160B, and the main portion 711A is electrically used. Convert to signal. This electric signal is signal-processed by the drive processing device 1105, and the underwater state such as the presence of a school of fish and the state of the bottom of the water is displayed on a monitor or the like. Therefore, the front end surface ultrasonic radiation device 1101 of the fifth embodiment also functions as a front end surface ultrasonic wave receiving device.

In particular, in the front end surface ultrasonic wave emitting device (front end surface ultrasonic wave receiving device) 1101 of the fifth embodiment, the ultrasonic multi-frequency vibrating body 710 has two resonance frequencies f _B1 and f _B2. In the processing device 1105, the frequency of the burst-wave drive signal can be switched to one of the easily observable resonance frequencies f _B1 and f _B2 according to the underwater condition.
Alternatively, if a burst-wave drive signal having the resonance frequency f _B1 and a burst-wave drive signal having the resonance frequency f _B2 are alternately generated, ultrasonic waves having different frequencies can be generated from the ultrasonic multi-frequency vibrator 710. It can emit alternately, and can receive ultrasonic waves (echoes) of different frequencies alternately. As a result, depending on the difference in the characteristics of ultrasonic waves with different frequencies of objects such as a school of fish in the water or the bottom of the water, or the difference in behavior due to the phase of the ultrasonic waves when the emitted ultrasonic waves hit the object, More detailed information on the underwater situation can be obtained.
Alternatively, the ultrasonic oscillator 31 drives the ultrasonic transducer 31 with a burst-wave-like drive signal including both the component of the resonance frequency f _{B1 and} the component of the resonance frequency f _B2 , and ultrasonic waves having two frequencies are generated. Can radiate and receive waves.

In the above, the present invention has been described with reference to the first to fifth embodiments and the first to seventh modified embodiments. Needless to say, the present invention can be applied with appropriate changes.
For example, in the embodiment, etc. described above, the main portion 11A or the like has a cylindrical shape, assuming seen in this main portion alone, among the forms that resonates at a reference frequency f _0, prismatic, disc-shaped, It can also be in the form of a sphere or a ring.
Similarly, in the above-described embodiment or the like, the coupling portion 12A or the like has a cylindrical shape. In such a range, a prismatic shape, a drum shape, a barrel shape, or the like can be used.

In the above-described embodiment, the example in which the main portion 11A and the coupling portion 12A are made of stainless steel has been shown. However, an appropriate material may be selected according to an object to be processed and processing conditions. For example, metals such as hastelloy, inconel, titanium, titanium alloy, aluminum, and duralumin, ceramics such as alumina, silicon nitride, and silicon carbide can be used.
Further, in the modified embodiments 6 and 7, the main portions 711A, 811A, and 811B are shown as bolt tightened Langevin type ultrasonic vibrators using piezoelectric elements as a whole. It may be a sonic transducer. Further, an ultrasonic vibrator using a magnetostrictive material or an electrostrictive material can be used instead of the piezoelectric element.

Further, in the embodiment 1 and the like described above, the main portion 11A the axis line AX direction dimension LD1 such like, both with respect to the ultrasonic wavelength λd of the reference frequency f _0, the length of a half wavelength (LD1 = LD2 = LD3 = LD4 = λd / 2). However, if the main part 11A or the like resonates with ultrasonic waves of the reference frequency f ₀ , the length of each main part is set to full wavelength resonance, such as LD1 = LD2 = LD3 = LD4 = λd. The length can be 3/2 wavelength resonance.
In the first embodiment and the like described above, the dimension LS1 and the like in the axis AX direction of the coupling portion 12A and the like are all ¼ wavelength length (LS1 = LS1) with respect to the ultrasonic wavelength λs of the reference frequency f _0. LS2 = LS3 = λs / 4). However, the coupling unit 12A and the like may have a length equal to or shorter than a half wavelength with respect to the wavelength λs of the ultrasonic wave having the reference frequency f ₀ (0 <LS1 = LS2 = LS3 <λs / 2). More preferably, the length of the coupling portion is set to a value close to λs / 4, that is, λs / 8 <LS1 = LS2 = LS3 <3λs / 8) as in the embodiment or the like.

It is a figure which shows the ultrasonic multifrequency vibrator, ultrasonic vibration apparatus, and ultrasonic processing apparatus concerning Embodiment 1, (a) is a top view in the state which saw through the upper surface of the processing tank, (b) is a processing tank It is a front view which fractures | ruptures and shows. 1 is a front view of an ultrasonic multifrequency vibrator according to Embodiment 1. FIG. 3 is a graph showing frequency characteristics of the ultrasonic multi-frequency vibrator according to the first embodiment. FIG. 6 is an explanatory diagram showing the state of vibration of the ultrasonic multi-frequency vibrator according to the first embodiment, where (a) shows the state of vibration in the vibration mode (B1 mode) when vibrating at the resonance frequency f _B1; ) Shows the state of vibration in the vibration mode (B2 mode) when vibrating at the resonance frequency f _B2 . The curve shown in each figure shows the displacement (amplitude) in the direction of the axis AX for each part of the ultrasonic multi-frequency vibrator. 6 is a front view showing the shape of an ultrasonic multiple vibrator according to Modification 1. FIG. 6 is a graph showing frequency characteristics of an ultrasonic multi-frequency vibrator according to a first modification. It is explanatory drawing which shows the mode of a vibration of the ultrasonic multifrequency oscillating body which concerns on the deformation | transformation form 1, (a) is a mode of the vibration in the vibration mode (C1 mode) when it vibrates with resonance frequency f _C1. ) Shows the state of vibration in the vibration mode (C2 mode) when vibrating at the resonance frequency f _C2 , and (c) shows the state of vibration in the vibration mode (C3 mode) when vibrating at the resonance frequency f _C3. . The curve shown in each figure shows the displacement (amplitude) in the direction of the axis AX for each part of the ultrasonic multi-frequency vibrator. 10 is a front view showing the shape of an ultrasonic multiple vibrator according to a second modification. FIG. 6 is a graph showing frequency characteristics of an ultrasonic multi-frequency vibrator according to a second modification. Is an explanatory view showing the state of vibration of the ultrasonic multi-frequency vibrator according to the second modified embodiment, a state of vibration in (a) vibration mode (D1 mode) when caused to vibrate at the resonance frequency f _D1, (b ) Shows the state of vibration in the vibration mode (D2 mode) when vibrated at the resonance frequency f _D2 , and (c) shows the state of vibration in the vibration mode (D3 mode) when vibrated at the resonance frequency f _D3 . (D) shows the state of vibration in the vibration mode (D4 mode) when vibrating at the resonance frequency f _D4 . The curve shown in each figure shows the displacement (amplitude) in the direction of the axis AX for each part of the ultrasonic multi-frequency vibrator. It is a front view which shows the shape of an ultrasonic vibration unit which concerns on the modification 3, and the ultrasonic multifrequency vibrating body which connected this. It is a front view which shows the shape of an ultrasonic vibration unit which concerns on the modification 4, and the ultrasonic multifrequency vibrating body which connected this. It is a figure which shows the ultrasonic multi-frequency vibrator, ultrasonic vibration apparatus, and ultrasonic processing apparatus concerning the deformation | transformation form 5, (a) is a top view in the state which saw through the upper surface of the processing tank, (b) is a processing tank. The front view (c) which fractures | ruptures and shows is a side view which fractures | ruptures and shows a processing tank. It is explanatory drawing which concerns on Embodiment 2 and shows the front end surface ultrasonic radiation apparatus (ultrasonic cleaning machine) using the ultrasonic multifrequency vibrator and ultrasonic vibrator (refer FIG. 1) which concern on Embodiment 1. FIG. It is explanatory drawing which concerns on the deformation | transformation form 6, and shows the front end surface ultrasonic radiation apparatus (ultrasonic cleaning machine) using an ultrasonic multifrequency vibrator and an ultrasonic vibrator. It is explanatory drawing which concerns on the deformation | transformation form 7 and shows the front end surface ultrasonic radiation apparatus (ultrasonic cleaning machine) using an ultrasonic multifrequency vibrator and an ultrasonic vibrator. It is explanatory drawing which shows the front end surface ultrasonic radiation apparatus (ultrasonic homogenizer) using the ultrasonic multifrequency vibrator and ultrasonic vibrator (refer FIG. 1) which concern on Embodiment 3. FIG. It is explanatory drawing which shows the ultrasonic processing apparatus which concerns on Embodiment 4 and used the ultrasonic multifrequency vibrator and ultrasonic vibrator (refer FIG. 1) which concern on Embodiment 1. FIG. The tip surface ultrasonic wave emitting device and the tip surface ultrasonic wave receiving device (fish finder) using the ultrasonic multi-frequency vibrator and the ultrasonic vibrator (see FIG. 14) according to the sixth embodiment according to the fifth embodiment. It is explanatory drawing which shows.

Explanation of symbols

AX Axis P Fluid to be treated (Process to be treated)
SH boat WT water B1, B2, C1, C2, C3, D1, D2, D3, D4 resonance point _{f B1, f B2, f C1} , f C2, f C3, f D 1, f D2, f D3, f D4 Resonance frequency (at resonance point) 1,501 Ultrasonic processing devices 601,701,801,901,1101 Tip surface ultrasonic radiation device 1001 Ultrasonic processing device 1101 Tip surface ultrasonic wave receiving device 2,502,702,802 Sonic vibration device 5,505,805 Ultrasonic oscillation circuit 1105 Drive processing device 10,110,210,310,710,810 Ultrasonic multi-frequency vibrator 11A, 11B, 111A, 111B, 111C, 211A, 211B, 211C, 211D , 311A, 311B, 311C, 311D, 411A, 411B, 411C, 411D, 711A, 711B, 811A, 811B 11A, 811A, 811B Ultrasonic transducers 11AK, 11BK, 111AK, 111BK, 111CK, 211AK, 211BK, 211CK, 211DK, 311AK, 311BK, 311CK, 311DK, 411CK (main part) proximal side surfaces 11AS, 11BS, 111AS, 111BS, 111CS, 211AS, 211BS, 211CS, 211DS, 311AS, 311BS, 311CS, 311DS, 411BS, 711AS, 711BS (main part) tip side surface 311BK, 311CK, 311DK, 311AS, 311BS, 311CS, 411BS, 411CK Connecting surface 11AK , 111AKN, 211AKN, 311AKN Screw hole 11BSN (for coupling with an ultrasonic vibration source) Screw hole 311BKN (for coupling an ultrasonic machining tool) , 311CKN, 311DKN, 411CKN (for coupling between units formed on the base side of the main part) 311ASN, 311BSN, 311CSN, 411BSN, 711ASN (for coupling between units formed on the front side of the main part) Screw holes 12A, 112A, 112B, 212A, 212B, 212C, 312A, 312B, 312C, 412A, 412B, 412C, 712A coupling portion 312AKN, 312BKN, 312CKN, 412BK, 712AKN (units formed on the proximal end side of the coupling portion Screw holes 312ASN, 312BSN, 312CSN, 412BSN (for connecting the units formed at the tip of the connecting portion) DD1, DD2, DD3, DD4 main part diameters LD1, LD2, LD3, LD4 Main part Height (length in the axial direction)
DS1, DS2, DS3 Diameter of coupling part LS1, LS2, LS3 Height of coupling part (length in axial direction)
U1, U2, U3, U4, U5, U6, U7, U11, U12, U13, U71, U72, U81, U82, U83 Ultrasonic vibration units 316A, 316B, 316C, 316D, 316E, 316F, 416A, 416B, 716 Connection screws 30, 530 Ultrasonic vibration sources 31, 531A, 531B Ultrasonic vibrator 32 Ultrasonic transmitter 32F Flange portions 36, 37, 536A, 536B Connection screws 538 Power synthesizer 538A Power collecting plate 538B Conversion column 60 Processing tank 61 Processing tank main body 62 Inflow pipe 63 Outflow pipe 660,960 Storage tank 660B Bottom plate 1160 Case 1160B Bottom plate 1161 Matching layer 1071, 1072, 1073, 1074 Sonic processing tool 1071 File 10 2 reamer 1073 saws 1074 sieve 1074A sieve screen

Claims (15)

An ultrasonic multi-frequency vibrator having a form extending in an axial direction,
N parts (N is a natural number of 2 or more)
Arranged apart from each other in the axial direction,
Each main portion has a main portion having a relatively large radial dimension in the radial direction perpendicular to the axial direction,
N-1 joints,
Arranged between each of the main parts, to join the main parts together,
A coupling portion having a smaller radial dimension than the adjacent main portion,
The main part is
Assuming that this main part is taken out alone, it is configured to resonate with ultrasonic vibration of the reference frequency f ₀ ,
The joint is
When the ultrasonic vibration of the reference frequency f ₀ is transmitted through the coupling portion in the axial direction as Vs and the wavelength of the ultrasonic vibration transmitted is λs (= Vs / f ₀ ),
The length LS in the axial direction satisfies 0 <LS <λs / 2,
An ultrasonic multi-frequency vibrator having a frequency characteristic in which two or more and N or less resonance points at which the entire ultrasonic multi-frequency vibrator resonates appear in the vicinity of the reference frequency f ₀ . The ultrasonic multi-frequency vibrator according to claim 1,
The N main parts are
Both are ultrasonic multi-frequency vibrators made of the same material and shape. The ultrasonic multi-frequency vibrator according to claim 2,
N-1 is plural,
The N-1 connecting portions are:
All are ultrasonic multi-frequency vibrators of the same material and shape. The ultrasonic multi-frequency vibrator according to claim 1,
The N main parts are
Both have the same material, the same shape, the axial direction is the height direction, and has a cylindrical shape that resonates at a reference frequency f ₀ for a half wavelength in this height direction,
The N-1 connecting portions are:
The diameter is smaller than the main part, the axial direction is the height direction, and the length LS has a cylindrical shape of LS = λs / 4,
In the case where there are a plurality of N-1s, all of the coupling parts are the same material and the same shape,
An ultrasonic multifrequency vibrator having a frequency characteristic in which N resonance points at which the entire ultrasonic multifrequency vibrator resonates appear in the vicinity of the reference frequency f ₀ . The ultrasonic multi-frequency vibrator according to any one of claims 1 to 4,
An ultrasonic multi-frequency vibrator formed integrally with no connecting portion. The ultrasonic multi-frequency vibrator according to any one of claims 1 to 4,
An ultrasonic multi-frequency vibrator formed by connecting a plurality of identical or irregular ultrasonic vibration units to each other. The ultrasonic multi-frequency vibrator according to claim 6,
The plurality of ultrasonic vibration units includes:
Connecting surfaces that connect each other
An ultrasonic multi-frequency vibrator as at least one of a form located in the coupling part and a form located between the coupling part and the main part. The ultrasonic multi-frequency vibrator according to any one of claims 1 to 7,
An ultrasonic multi-frequency vibrator in which none of the N main parts and the N-1 coupling parts includes an ultrasonic vibrator. The ultrasonic multi-frequency vibrator according to any one of claims 1 to 7,
At least one of the N main parts is
An ultrasonic multi-frequency including an ultrasonic vibrator configured to be able to excite the ultrasonic multi-frequency vibrator including itself at resonance frequencies of at least two resonance points among the 2 to N resonance points. Vibrating body. An ultrasonic vibration unit that is one of the plurality of ultrasonic vibration units forming the ultrasonic multi-frequency vibrating body according to claim 6 or 7. The ultrasonic multi-frequency vibrator according to any one of claims 1 to 8,
An ultrasonic vibration source configured to be able to excite the ultrasonic multi-frequency vibrator from the base end side in the axial direction at resonance frequencies of at least two resonance points among the 2 to N resonance points. And an ultrasonic vibration device comprising: A fluid to be processed or a processing tank for storing the fluid and the processed material;
An ultrasonic processing apparatus comprising: the ultrasonic vibration device according to claim 11, wherein at least the ultrasonic multi-frequency vibrating body is disposed in the processing tank. The ultrasonic multi-frequency vibrating body,
The ultrasonic vibration device according to claim 11, wherein the ultrasonic vibration device according to claim 11, wherein the ultrasonic vibration device is arranged to radiate ultrasonic waves directly or indirectly to a radiation object from a distal end surface of a main portion closest to the distal end in the axial direction. A tip surface ultrasonic radiation device having the ultrasonic multi-frequency vibrator according to 9. The ultrasonic multi-frequency vibrating body,
The ultrasonic vibration device according to claim 11, wherein the ultrasonic vibration device according to claim 11, wherein the ultrasonic vibration device is arranged to receive an ultrasonic wave transmitted through an object to be measured directly or indirectly from a distal end surface of a main portion closest to the distal end in the axial direction. A tip end face ultrasonic receiving device having the ultrasonic multi-frequency vibrator according to claim 9. The ultrasonic vibration device according to claim 11 including the ultrasonic multifrequency vibration body, or the ultrasonic multifrequency vibration body according to claim 9;
An ultrasonic processing apparatus comprising: an ultrasonic processing tool attached to at least one of the ultrasonic multi-frequency vibrators.

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