JP2008034700A - Heat treatment device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To efficiently obtain a stable output from a thermoelectric module. <P>SOLUTION: This heat treatment device is provided with: a heat source 3; a plurality of thermoelectric modules 81 and 82 laminated toward the heat source 3; and a temperature setting layer 9 installed between the first thermoelectric module 81 installed at the low temperature side and the second thermoelectric module 82 installed at the high temperature side among the plurality of thermoelectric modules 81 and 82, and set to a predetermined temperature. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a heat treatment apparatus including a heat source and a plurality of thermoelectric modules stacked toward the heat source.

  Some industrial furnaces (heat treatment apparatuses) such as resistance heating furnaces and continuous furnaces include a thermoelectric module including a plurality of thermoelectric elements. Such a thermoelectric module is configured by alternately connecting a plurality of P-type power generation elements and N-type power generation elements that generate an electromotive force due to a temperature difference between a high temperature side and a low temperature side.

By the way, the temperature region in which thermoelectric modules can generate electric power most efficiently differs depending on the forming material. For example, a temperature range in which a thermoelectric module using a bismuth tellurium-based material as a forming material can efficiently generate power is 200 to 300 ° C.
However, in an industrial furnace such as a resistance heating furnace or a continuous furnace, the temperature in the furnace becomes high, exceeding the temperature range in which the thermoelectric module can efficiently generate power. For this reason, in the conventional industrial furnace, the structure which laminated | stacked several thermoelectric modules in the direction of a heat source may be taken. In this way, by laminating a plurality of thermoelectric modules in the direction of the heat source, the thermal load is distributed to the plurality of laminated thermoelectric modules, so the difference between the temperature on the high temperature side and the temperature on the low temperature side of each thermoelectric module is determined. Thus, the thermoelectric module can be brought close to a temperature range where power can be generated efficiently, and more efficient power generation can be performed.
JP 59-198883 A JP 60-34084 A JP-A-8-64874 JP 2005-33894 A JP 2005-79347 A

  However, the temperature in the furnace of an industrial furnace is not necessarily stable. For this reason, even if it is a case where efficient electric power generation is realized by laminating a plurality of thermoelectric modules in the direction of the heat source as described above, the output value from the thermoelectric module varies depending on the temperature variation in the furnace. , Could not get a stable output.

  The present invention has been made in view of the above-described problems, and an object thereof is to obtain an efficient and stable output from a thermoelectric module.

  To achieve the above object, the present invention provides a heat source, a plurality of thermoelectric modules stacked toward the heat source, a first thermoelectric module installed on a low temperature side among the plurality of thermoelectric modules, and a high temperature side. It is provided between the 2nd thermoelectric module installed, and is provided with the temperature setting layer set to predetermined temperature, It is characterized by the above-mentioned.

  According to the present invention having such characteristics, a temperature setting layer that is set to a predetermined temperature is installed between the first thermoelectric module and the second thermoelectric module. And by setting the temperature of the temperature setting layer, the high temperature side of the first thermoelectric module is exposed to the temperature atmosphere of the temperature setting layer.

In the present invention, a configuration in which the temperature setting layer includes a fluid set to the predetermined temperature and a flow path through which the fluid flows can be employed.
Further, when such a configuration is adopted, when the first thermoelectric module is installed on a water cooling jacket in which a fluid flows in a predetermined direction, the fluid of the temperature setting layer is cooled by the water cooling. A configuration can be adopted in which the fluid flows in the same direction as the fluid flowing inside the jacket.

Moreover, in this invention, the said 1st thermoelectric module can employ | adopt the structure that it is formed using the bismuth tellurium type material.
In the case of adopting such a configuration, the temperature setting layer employs a configuration in which the temperature is set such that the temperature difference between the low temperature side and the high temperature side of the first thermoelectric module is 200 to 300 ° C. be able to.

According to the present invention, by setting the temperature of the temperature setting layer, the high temperature side of the first thermoelectric module is exposed to the temperature atmosphere of the temperature setting layer. Since the temperature of the temperature setting layer is forcibly set to a predetermined temperature, even when the temperature of the heat source fluctuates, the fluctuation is smaller than the temperature fluctuation of the heat source. For this reason, a stable output can be obtained from the first thermoelectric module.
Therefore, according to the present invention, it is possible to obtain an efficient and stable output from the thermoelectric module by setting the temperature of the temperature setting layer to a temperature at which the first thermoelectric module can efficiently generate power.

  Hereinafter, an embodiment of a heat treatment apparatus according to the present invention will be described with reference to the drawings. In the following drawings, the scale of each member is appropriately changed in order to make each member a recognizable size.

(First embodiment)
In the first embodiment, a case where the present invention is applied to a resistance heating furnace (heat treatment apparatus) will be described.
FIG. 1 is a cross-sectional view schematically showing a schematic configuration of a resistance heating furnace 1 of the present embodiment. As shown in this figure, a resistance heating furnace 1 of the present embodiment includes a water cooling jacket 2 configured as an outermost shell, a heating chamber 3 housed in the water cooling jacket 2 and covered with a heat insulating material 3a. The gas supply pipe 4 communicated from the one side of the water cooling jacket 2 to the inside of the heating chamber 3, the waste gas pipe 5 communicated from the other side of the water cooling jacket 2 to the inside of the heating chamber 3, the water cooling jacket 2 and the heating And an electric heater 6 installed through the chamber 3.

  In the resistance heating furnace 1 of this embodiment, the workpiece w is placed inside the heating chamber 3, and the space 7 between the water cooling jacket 2 and the heating chamber 3 is set to a vacuum atmosphere or a predetermined gas atmosphere. In this state, the electric heater 6 is driven. At this time, by supplying a predetermined gas from the gas supply pipe 4 to the heating chamber 3, the workpiece w is heated in a predetermined gas atmosphere. The predetermined gas is exhausted from the heating chamber 3 to the outside through the waste gas pipe 5.

In the resistance heating furnace 1 of the present embodiment, a plurality of unitized thermoelectric modules 8 are installed on the inner wall 2 a of the water cooling jacket 2 in a state where the thermoelectric modules 8 are stacked in two stages toward the heating chamber 3. Each thermoelectric module 8 is formed by alternately arranging well-known P-type thermoelectric elements and N-type thermoelectric elements on a substrate and connecting them in series.
In the following description, among the thermoelectric modules 8 stacked in two stages, the thermoelectric module 8 positioned on the water cooling jacket 2 side is referred to as a lower thermoelectric module 81 (first thermoelectric module) and is positioned on the heating chamber 3 side. The thermoelectric module 8 is referred to as an upper thermoelectric module 82 (second thermoelectric module).

  FIG. 2 is a cross-sectional view schematically showing the vicinity of the thermoelectric module 8. As shown in this figure, the resistance heating furnace 1 of the present embodiment includes a lower thermoelectric module 81 installed on the low temperature side, an upper thermoelectric module 82 installed on the high temperature side, a lower thermoelectric module 81, and an upper thermoelectric module 82. And a temperature setting unit 9 (temperature setting layer) installed between the two.

The lower thermoelectric module 81 has one surface (low temperature side surface) in contact with the inner wall 2a of the water cooling jacket 2 and the other surface (high temperature side surface) in contact with the temperature setting unit 9. Installed. The cooling water X is allowed to flow in a predetermined direction inside the water cooling jacket 2 with which the lower thermoelectric module 81 is abutted, so that the surface of the water cooling jacket 2, that is, the low temperature side surface of the lower thermoelectric module 81 is at room temperature. The temperature is set so as to be about.
The lower thermoelectric module 81 has a main power generation function among the thermoelectric modules 8, and includes a P-type thermoelectric element and an N-type thermoelectric element using a bismuth tellurium-based material capable of exhibiting the highest power generation efficiency. It is what you have. The lower thermoelectric module 81 having a P-type thermoelectric element and an N-type thermoelectric element using this bismuth tellurium-based material has high power generation efficiency when the temperature difference between the low temperature side surface and the high temperature side surface is 200 to 300 ° C. In particular, the highest power generation efficiency is exhibited in the vicinity of 250 ° C.

The temperature setting unit 9 is installed between the lower thermoelectric module 81 and the upper thermoelectric module 82 as described above, and the oil Y (fluid) set to a predetermined temperature and the flow path 91 through which the oil Y flows. And is composed of. As shown in FIG. 1, the flow path 91 of the temperature setting unit 9 is disposed between all the lower thermoelectric modules 81 and the upper thermoelectric modules 82, and all the lower thermoelectric modules 81 and the upper thermoelectric modules 82 are arranged. Oil Y is configured to flow between the thermoelectric module 82. The oil Y is caused to flow in the same direction as the cooling water X flowing inside the water cooling jacket 2.
In the present embodiment, the temperature of the oil Y is set to 200 to 300 ° C. For this reason, the temperature of the temperature setting unit 9 is 200 to 300 ° C., and the high temperature side surface of the lower thermoelectric module 81 is 200 to 300 ° C. That is, the temperature of the temperature setting unit 9 is set so as to generate a differential temperature that allows the lower thermoelectric module 81 to generate power efficiently.

  As described above, the lower thermoelectric module 81 is formed using a bismuth tellurium material that exhibits the highest power generation efficiency when the temperature difference between the high-temperature side surface and the low-temperature side surface is around 250 ° C. For this reason, the lower thermoelectric module 81 in the present embodiment in which the low-temperature side surface is set to about room temperature and the high-temperature side surface is 200 to 300 ° C. can perform efficient power generation.

The upper thermoelectric module 82 is installed in a state where one side surface (low temperature side surface) is in contact with the temperature setting unit 9 and the other side surface (high temperature side surface) faces the heating chamber 3. Has been.
The upper thermoelectric module 82 includes a P-type thermoelectric element and an N-type thermoelectric element using a material corresponding to a temperature difference generated between a high temperature side surface and a low temperature side surface.

FIG. 3 is a graph for explaining the difference in power generation efficiency due to the difference in the formation materials of the P-type thermoelectric element and the N-type thermoelectric element, with the horizontal axis indicating the absolute temperature and the vertical axis indicating the performance index.
As shown in this figure, a thermoelectric module in which a P-type thermoelectric element and an N-type thermoelectric element are formed using a bismuth tellurium-based material exhibits high power generation efficiency in a range of 200 to 300 ° C. In contrast, thermoelectric modules in which P-type thermoelectric elements and N-type thermoelectric elements are formed using lead tellurium-based materials exhibit high power generation efficiency in the range of 600 to 700 ° C., and silicon germanium-based materials are used. The thermoelectric module in which the P-type thermoelectric element and the N-type thermoelectric element are used exhibits high power generation efficiency in the vicinity of 1200 ° C.
For this reason, for example, when the temperature of the high temperature side surface of the upper thermoelectric module 82 generated by receiving radiation from the heating chamber 3, that is, the temperature to which the high temperature side surface of the upper thermoelectric module 82 is exposed is about 900 ° C. The temperature difference between the high-temperature side surface and the low-temperature side surface (the surface in contact with the temperature setting unit 9) of the upper thermoelectric module 82 is in the range of about 600 to 700 ° C. Therefore, in such a case, it is preferable to use a thermoelectric module in which a P-type thermoelectric element and an N-type thermoelectric element are formed using a lead tellurium-based material as the upper stage thermoelectric module.

  Returning to FIG. 1, each thermoelectric module 8 is connected to a power storage device 12 via a power recovery line 11 including a backflow preventer 10 such as a diode. The power storage device 12 is connected to the control device 14 via the power supply line 13. Control device 14 operates using the electric power supplied from power storage device 12.

  FIG. 4 is a diagram schematically showing the flow path 20 of the cooling water X flowing inside the water cooling jacket 2 and the flow path 30 of the oil Y of the temperature setting unit 9. As shown in this figure, the flow path 20 of the cooling water X is configured as a circulation flow path including the inside of the water cooling jacket 2, and a chiller 21 having a pump function is installed in the middle of the flow path. The cooling water X flows in the flow path 20 by driving the chiller 21 and is cooled to room temperature when passing through the chiller 21. Moreover, the flow path 30 of the oil Y is configured as a circulation flow path including the flow path 91 of the temperature setting unit 9, in order to recover the heat of the oil Y in the middle of the temperature setting to 200 to 300 ° C. The heat exchanger 31 and a pump 32 that applies a flow to the oil Y are installed. The oil Y flows through the flow path 30 by driving the pump 32 and is cooled to 200 to 300 ° C. when passing through the heat exchanger 31. Note that a thermoelectric module may be attached to the heat exchanger 31 and power generation may be performed using the heat recovered in the heat exchanger 31. As a result, since the heat inside the resistance heating furnace 1 absorbed by the oil Y is converted into electric power by flowing through the flow path 91 of the temperature setting unit 9, a more efficient resistance heating furnace is obtained. Further, steam may be generated by the heat recovered in the heat exchanger 31, and power generation may be performed by driving a steam turbine. Further, the heat recovered by the heat exchanger 31 may be used for generating hot water or the like.

According to the resistance heating furnace 1 of this embodiment as described above, since the lower thermoelectric module 81 and the upper thermoelectric module 82 are stacked in the direction of the heating chamber 3 (heat source), only a single layer thermoelectric module is installed. Compared with the case, the temperature difference between the low temperature side surface and the high temperature side surface of each thermoelectric module 8 is reduced. Therefore, even if the internal temperature of the resistance heating furnace 1 exceeds the temperature at which efficient power generation can be performed in the single-layer thermoelectric module, the resistance heating furnace 1 of the present embodiment enables efficient power generation. Can be performed.
Further, according to the resistance heating furnace 1 of the present embodiment, the temperature setting unit 9 is installed between the lower thermoelectric module 81 and the upper thermoelectric module 82. For this reason, the surface on the high temperature side of the lower thermoelectric module 81 in contact with the temperature setting unit 9 is always set to the temperature of the temperature setting unit 9. Since the temperature of the temperature setting unit 9 is forcibly set according to the temperature of the oil Y, even if the radiation dose from the heating chamber 3, that is, the temperature of the heat source fluctuates, the temperature of the lower thermoelectric module 81 is increased. Surface temperature fluctuation can be reduced. Therefore, a stable output can be obtained from the lower thermoelectric module 81 having the main function of power generation.
Therefore, according to the resistance heating furnace 1 of the present embodiment, an efficient and stable output can be obtained from the thermoelectric module 8.

Further, according to the resistance heating furnace 1 of the present embodiment, the oil Y of the temperature setting unit 9 is caused to flow in the same direction as the cooling water X flowing inside the water cooling jacket 2.
Since the oil Y of the temperature setting unit 9 and the cooling water X flowing inside the water cooling jacket 2 are exposed to a high temperature atmosphere inside the resistance heating furnace 1, the temperature gradually rises. However, in the resistance heating furnace 1 of the present embodiment, the oil Y of the temperature setting unit 9 is caused to flow in the same direction as the cooling water X flowing inside the water cooling jacket 2, and therefore, as shown in FIG. The temperature of the cooling water X similarly rises, and the temperature difference between the temperature of the oil Y and the temperature of the cooling water X is always constant. For this reason, the temperature difference between the high temperature side surface and the low temperature side surface of the lower thermoelectric module 81 is always constant, and a stable output can be obtained from the lower thermoelectric module 81.

  Further, in the resistance heating furnace 1 of the present embodiment, the low temperature side surface of the lower thermoelectric module 81 is in contact with the water cooling jacket 2. Since the cooling water X whose temperature is set to about room temperature flows inside the water cooling jacket 2, the temperature on the low temperature side surface of the lower thermoelectric module 81 can be stabilized to about room temperature. For this reason, in the resistance heating furnace 1 of this embodiment, the temperature fluctuation of the lower thermoelectric module 81 can be suppressed, and the output from the lower thermoelectric module 81 can be further stabilized.

Further, in the resistance heating furnace 1 of the present embodiment, a thermoelectric module formed using a bismuth tellurium-based material is used as the lower thermoelectric module 81.
For this reason, it becomes possible to convert heat into electric power with high efficiency, and the resistance heating furnace 1 is more efficient.

Further, in the resistance heating furnace 1 of the present embodiment, the temperature of the temperature setting unit 9 is set to 200 to 300 ° C. so that the thermoelectric module formed using the bismuth tellurium material can generate power most efficiently. The cooling water X flowing through the water cooling jacket 2 is set to about room temperature. That is, the temperature difference between the low temperature side and the high temperature side of the lower thermoelectric module 81 is set to a temperature at which the thermoelectric module formed using the bismuth tellurium material can generate power most efficiently.
For this reason, according to the resistance heating furnace 1 of the present embodiment, the thermoelectric module 8 can perform more efficient power generation.

(Second Embodiment)
Next, a second embodiment of the present invention will be described. In the second embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted or simplified.

In the second embodiment, an example in which the present invention is applied to a continuous furnace will be described.
FIG. 6 is a cross-sectional view schematically showing the continuous furnace 40 of the second embodiment. As shown in this figure, the continuous furnace 40 of this embodiment maintained the temperature of the temperature rising part 41 which raises the temperature of the workpiece | work w by heating, and the workpiece | work w heated up by the temperature rising part 41. The holding part 42 which gas-processes by exposing to a predetermined gas atmosphere in the state, and the cooling part 43 which cools the workpiece | work w gas-processed by the holding part 42 with the water cooling plate 44 are provided. The temperature raising unit 41, the holding unit 42, and the cooling unit 43 are connected to each other, and the workpiece w is conveyed in the order of the temperature raising unit 41, the holding unit 42, and the cooling unit 43 by a conveying unit 45 such as a belt conveyor. .

  In such a continuous furnace 40, since the workpiece | work w is conveyed in the heated state, a radiation ray is always inject | emitted from the workpiece | work w. That is, in the continuous furnace 40 of the present embodiment, the workpiece w is a heat source.

  A plurality of lower-stage thermoelectric modules 81 and upper-stage thermoelectric modules 82 are installed on the inner wall 41a of the temperature raising section 41, the inner wall 42a of the holding section 42, and the inner wall 43a of the cooling section 43, as shown in FIG. In addition, a temperature setting unit 9 is installed between each lower thermoelectric module 81 and each upper thermoelectric module 82.

  Also in the continuous furnace 40 of this embodiment having such a configuration, heat from radiation from the heat source is converted into electric power by the thermoelectric module 8 (lower thermoelectric module 81, upper thermoelectric module 82). The electric power generated by the thermoelectric module 8 is temporarily stored in the power storage device 12 (not shown in FIG. 6) and then consumed by the operation of the control device 14 (not shown in FIG. 6).

And according to the continuous furnace 40 of this embodiment, since the lower stage thermoelectric module 81 and the upper stage thermoelectric module 82 are laminated | stacked on the workpiece | work w (heat source) direction similarly to the resistance heating furnace 1 of the said 1st Embodiment. Compared with the case where only a single-layer thermoelectric module is installed, the temperature difference between the low temperature side surface and the high temperature side surface of each thermoelectric module 8 is reduced. Therefore, even if the internal temperature of the continuous furnace 40 exceeds the temperature at which efficient power generation can be performed in the single-layer thermoelectric module, the continuous furnace 40 of this embodiment performs efficient power generation. It becomes possible.
Further, according to the continuous furnace 40 of the present embodiment, the temperature setting unit 9 is installed between the lower thermoelectric module 81 and the upper thermoelectric module 82. For this reason, the surface on the high temperature side of the lower thermoelectric module 81 in contact with the temperature setting unit 9 is always set to the temperature of the temperature setting unit 9. Since the temperature of the temperature setting unit 9 is forcibly set by the temperature of the oil Y, even if the radiation dose from the work w, that is, the temperature of the heat source fluctuates, the surface on the high temperature side of the lower thermoelectric module 81 Temperature fluctuation can be reduced. Therefore, a stable output can be obtained from the lower thermoelectric module 81 having the main function of power generation.
Therefore, according to the continuous furnace 40 of the present embodiment, it is possible to obtain an efficient and stable output from the thermoelectric module 8.

  In the continuous furnace 40 of the present embodiment, since the internal temperatures of the temperature raising unit 41, the holding unit 42, and the cooling unit 43 are different, efficient power generation is performed according to the internal temperature of each unit 41 to 43. Thus, the material for forming the upper thermoelectric module is appropriately selected.

  As mentioned above, although preferred embodiment of the heat processing apparatus which concerns on this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to the said embodiment. Various shapes, combinations, and the like of the constituent members shown in the above-described embodiments are examples, and various modifications can be made based on design requirements and the like without departing from the gist of the present invention.

For example, in the above embodiment, a resistance heating furnace or a continuous furnace has been described as an example of the heat treatment apparatus of the present invention.
However, the present invention is not limited to this, and can be applied to any heat treatment apparatus having a heat source that emits radiation. Further, the heat treatment apparatus of the present invention is not limited to an apparatus having a heat source for heat-treating a processing object such as a heating object, or an apparatus having a heated processing object as a heat source. Including a device to be heated. For example, an apparatus that includes an exhaust gas flue of a combustion engine as a heat source and converts heat from the exhaust gas flue into electric power by a thermoelectric module is also included in the heat treatment apparatus of the present invention.

In the above embodiment, the thermoelectric modules are stacked in two stages. However, the present invention is not limited to this, and a plurality of thermoelectric modules may be stacked.
In such a case, the temperature setting unit 9 may be installed between the thermoelectric modules, or may be in contact with the high temperature side surface of the main thermoelectric module having the main power generation function, that is, the thermoelectric module having the largest power generation amount. A temperature setting unit 9 may be installed.

Moreover, in the said embodiment, the temperature setting part 9 demonstrated as what is temperature-set by the oil Y. FIG.
However, the present invention is not limited to this, and various fluids can be used for the temperature setting of the temperature setting unit 9. For example, instead of the oil Y, a fluid such as water, a solution containing an organic compound, an aqueous salt solution, an acidic or alkaline aqueous solution, or a mixed solution of these fluids may be used. Furthermore, a liquid metal, an emulsion, or a suspension containing particles can also be used. Gas may be used instead of liquid. And it is preferable that it is a heat storage material as a fluid used for the temperature setting part 9 more.
In addition, when using the above-mentioned various fluids instead of the oil Y, in order to ensure the stable temperature of the temperature setting part 9, it is preferable to adjust a pressure so that various fluids do not raise | generate a phase transformation.
In addition to this, instead of the oil Y, a sherbet-like high-temperature mixture in which the melting point is not constant but the temperature is stable can also be used. Thereby, it can suppress that the temperature of the temperature setting part 9 raises with the radiation from a heat source, and it becomes possible to make the output from each thermoelectric module constant.

  Further, instead of the cooling water X flowing in the water cooling jacket 2, a solution containing an organic compound, an aqueous salt solution, an emulsion, a suspension containing particles, or the like can be used.

  Further, heat conduction members such as fins, heat receiving plates and heat pipes are placed in contact with the high temperature side surface of the upper thermoelectric module 82 of the above embodiment, and the heat of the heat source is efficiently increased to the high temperature of the upper thermoelectric module 82. Heat may be efficiently transferred to the side surface.

It is sectional drawing which showed typically schematic structure of the resistance heating furnace 1 which is 1st Embodiment of this invention. It is sectional drawing which showed typically the vicinity of the thermoelectric module 8 with which the resistance heating furnace 1 which is 1st Embodiment of this invention is provided. It is a graph for demonstrating the difference in electric power generation efficiency by the difference in the formation material of a P-type thermoelectric element and an N-type thermoelectric element. The figure which showed typically the flow path 20 of the cooling water X which flows through the inside of the water cooling jacket 2, and the flow path 30 of the oil Y of the temperature setting part 9 in the resistance heating furnace 1 which is 1st Embodiment of this invention. It is. In the resistance heating furnace 1 which is 1st Embodiment of this invention, it is a figure for demonstrating that the temperature difference between the oil Y and the cooling water X becomes fixed. It is sectional drawing which showed typically schematic structure of the resistance heating furnace 40 which is 2nd Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Resistance heating furnace (heat processing apparatus), 2 ... Water cooling jacket, 3 ... Heating chamber (heat source), 8 ... Thermoelectric module, 81 ... Lower thermoelectric module (1st thermoelectric module), 82 ... Upper thermoelectric Module (second thermoelectric module), 9 ... temperature setting section (temperature setting layer), 91 ... flow path, 40 ... continuous furnace (heat treatment device), w ... work, X ... cooling water (fluid), Y: Oil (fluid)

Claims (5)

A heat source,
A plurality of thermoelectric modules stacked toward the heat source;
A temperature setting layer installed between a first thermoelectric module installed on a low temperature side and a second thermoelectric module installed on a high temperature side among the plurality of thermoelectric modules, and set to a predetermined temperature. The heat processing apparatus characterized by the above-mentioned. The temperature setting layer includes
A fluid set at the predetermined temperature;
The heat treatment apparatus according to claim 1, further comprising: a flow path through which the fluid flows. When the first thermoelectric module is installed on a water-cooled jacket in which fluid flows in a predetermined direction inside,
The heat treatment apparatus according to claim 2, wherein the fluid in the temperature setting layer is caused to flow in the same direction as the fluid flowing in the water cooling jacket. The heat treatment apparatus according to claim 1, wherein the first thermoelectric module is formed using a bismuth tellurium-based material. 5. The heat treatment apparatus according to claim 4, wherein the temperature setting layer is temperature-set so that a temperature difference between a low temperature side and a high temperature side of the first thermoelectric module is 200 to 300 ° C. 6.

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