JP2008032526A - Channel substrate, and channel device equipped with channel substrate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a channel substrate capable of easily removing bubbles in fluid. <P>SOLUTION: In this channel substrate wherein a channel along which the fluid flows is provided inside the substrate, the channel includes the first channel part wherein the fluid flows along a single route, and the second channel part provided adjacently to the first channel part and connected to the first channel part at two spots. The first channel part and the second channel part are constituted so that a pressure difference of the fluid between each connection surface of the two spots in the direction wherein the fluid flows in the first channel part is larger than a pressure difference of the fluid between each connection surface of the two spots in the second channel part, and a sectional area vertical to the direction wherein the fluid flows in the first channel part is set to be larger than the area of one connection surface of the two spots where the first channel part is connected to the second channel part, and to be smaller than the area of the other connection surface. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a flow path substrate used for a chemical chip or the like used for trace chemical analysis of biological materials or substances in the natural environment, and a flow path device using such a flow path substrate.

In recent years, with the development of micromachining technology, it has become possible to manufacture extremely small devices such as minute chemical reaction modules, chemical analysis modules, minute sensors, valves, pumps, etc. A so-called chemical chip specialized for DNA analysis and the like has also been proposed by combining these modules and devices (see Patent Document 1).
Japanese Patent No. 3538777

  However, in a flow path substrate used for a chemical chip or the like, since the amount of fluid flowing in the flow path is very small, if bubbles are generated or mixed due to the reaction of the fluid, The bubbles flow as they are, and there is a problem that the reactivity of the fluid is adversely affected and the measurement accuracy of the flow rate is lowered.

  In addition, the structure of a valve mechanism installed in the middle of a liquid channel with a minute channel cross section to extract bubbles is difficult to process, so the product price of a channel substrate equipped with such a valve mechanism is extremely expensive. Had the problem of being.

  The present invention has been made to solve the above problems, and an object of the present invention is to provide a flow path substrate that can easily remove bubbles in a fluid and a flow path device using such a flow path substrate. .

  In order to solve the above problem, the flow path substrate of the present invention is a flow path substrate provided with a flow path through which a fluid flows, and the flow path has a single path for the fluid. A first flow path portion that flows, and a second flow path portion that is provided adjacent to the first flow path portion and is connected to the first flow path portion at two locations. The first flow path portion and the second flow path portion have a difference in pressure difference between the two connection surfaces in the direction in which the fluid flows in the first flow path portion. An area of a cross section that is configured to be larger than a pressure difference of the fluid between the two connection surfaces in the two flow passage portions and is perpendicular to a direction in which the fluid flows in the first flow passage portion. Is larger than the area of one of the two connection surfaces to which the first channel portion and the second channel portion are connected, And wherein the less than the product.

  Preferably, in the flow path substrate, the cross section of the first flow path portion has a constant shape and size between the two connection surfaces, and the first flow path portion The cross section of the portion and the first and second connection surfaces are each rectangular or square, and the flow path substrate is based on the area of the cross section of the first flow path portion of the two connection surfaces. For the first connection surface having a smaller area, the square of the length of the circumference of the first connection surface is set to the length of the first flow path portion in the first connection surface. The value obtained by dividing the product of the area of the first connection surface by the square of ¼ is the square of the length of the circumference of the cross section, which is perpendicular to the first connection surface. Smaller than the product of the length of the first flow path portion in the direction and the square of the area of the cross-section, For the second connecting surface having an area larger than the cross-sectional area of the first flow path portion of the connecting surface, the square of the length of the circumference of the second connecting surface is The value divided by the product of the length of the first flow path portion in the second connection surface and the square of the area of the second connection surface is ¼ of the circumference of the cross section. The value obtained by dividing the square of 1/4 by the product of the length of the first flow path portion in the direction perpendicular to the second connection surface and the square of the quarter of the area of the cross section. It is large.

  Preferably, in the flow channel substrate, one area of the two connection surfaces is ½ or more of a cross-sectional area of the first flow channel portion, and the two connection surfaces are The other area is less than or equal to ½ of the cross-sectional area of the first flow path portion.

  A first flow path device of the present invention includes the above-described flow path substrate, a supply section that supplies fluid to the first flow path portion, and the first flow path portion. And a deriving unit for deriving the processed fluid to the outside. The processing unit determines the direction of the fluid flowing through the first flow path portion. As a reference, it is provided on the downstream side of the second flow path portion.

  Preferably, in the flow channel device, the processing unit is a heater that heats a fluid flowing through the first flow channel portion.

  A second flow path device of the present invention includes the above-described flow path substrate, a supply section that supplies the fluid to the first flow path portion, and the fluid to the first flow path substrate. Light is emitted to the fluid flowing downstream of the second flow path portion with reference to the outlet portion leading out from the flow path portion and the direction of the fluid flowing through the first flow path portion. And an optical path for guiding the light.

  According to the flow path substrate of the present invention, the flow path substrate is provided with a flow path through which a fluid flows, and the flow path includes a first flow path portion in which the fluid flows in a single path, A first flow path portion and a second flow path provided adjacent to the first flow path portion and connected to the first flow path portion at two locations. The portion is such that the pressure difference between the two connection surfaces in the flow direction of the fluid in the first flow path portion is the pressure of the fluid between the two connection surfaces in the second flow path portion. The area of the cross section that is configured to be larger than the difference and is perpendicular to the direction in which the fluid of the first flow path portion flows is two connections where the first flow path portion and the second flow path portion are connected. Since the area is larger than one area of the surface and smaller than the other area, the bubbles are moved from the first flow path portion to the second flow path portion. It is possible to prevent bubbles entering the second channel section again flows out to the first channel section. Therefore, according to the flow path substrate of the present invention, the bubbles in the fluid flowing through the first flow path portion can be easily removed from the first flow path portion.

  Further, according to the first flow channel device of the present invention, the flow channel substrate is supplied with a fluid to the first flow channel portion, and the fluid flowing through the first flow channel portion is subjected to predetermined processing. Since the processing section to be applied and the derivation section for leading the processed fluid to the outside are provided, bubbles in the fluid flowing through the flow path can be easily removed, and the reactivity and measurement accuracy of the fluid are improved. Thus, the flow channel device can be realized.

  Furthermore, according to the second flow path device of the present invention, the supply section that supplies the fluid to the first flow path portion is supplied to the flow path substrate, and the fluid is led out from the first flow path portion. Since the lead-out portion and the direction of the fluid flowing through the first flow path portion are used as a reference, an optical path for guiding the light is provided so that the fluid flowing downstream of the second flow path portion is irradiated with light. In addition, it is possible to easily remove bubbles in the fluid flowing through the flow path, and to realize a flow path device with improved fluid reactivity and measurement accuracy.

  Embodiments of the present invention will be specifically described below with reference to the drawings. FIG. 1 is a cross-sectional view schematically showing a flow path substrate according to the present embodiment.

  As shown in FIG. 1, a flow path substrate 1 according to the present embodiment is a flow path substrate in which a flow path through which a fluid flows is provided inside a substrate 2, and the flow path has a single fluid. A first flow path portion 3 that flows along a path; and a second flow path portion 4 that is provided adjacent to the first flow path portion 3 and connected to the first flow path portion 3 at two locations. ing. Specifically, the first flow path portion 3 has a linear shape, and the second flow path portion 4 has a U-shape in which three linear regions are connected. Moreover, the cross section perpendicular | vertical to the direction through which the fluid of the 1st flow-path part flows has a fixed shape and magnitude | size between the said two connection surfaces. In the flow path substrate 1 shown in FIG. 1, the second flow path portion 4 is located above the first flow path portion 3, but the second flow path portion 4 is not connected to the first flow path portion 3. For example, the second flow path portion 4 may be positioned below or on the side of the first flow path portion 3 as long as it is adjacent to the path portion 3.

  The first flow path portion 3 and the second flow path portion 4 in the flow path substrate 1 are respectively formed in the substrate 2. An example of the substrate 2 is a ceramic substrate. The ceramic substrate is made of a ceramic such as an aluminum oxide sintered body (alumina ceramic), an aluminum nitride sintered body, a silicon nitride sintered body, or a silicon carbide sintered body, for example, an aluminum oxide sintered body. In this case, an organic solvent and a solvent are added to and mixed with aluminum oxide (As2O3), silicon oxide (SiO2), magnesium oxide (MgO), calcium oxide (CaO), etc., and then a slurry is obtained. A ceramic green sheet (ceramic green sheet) is obtained by using the doctor blade method or the calender roll method, etc. to obtain a ceramic green sheet. Process into a rectangular channel shape. Thereafter, it is manufactured by firing at a high temperature (about 1600 ° C.).

  In the flow path substrate 1 according to the present embodiment, the area of the cross section perpendicular to the direction in which the fluid in the first flow path portion 3 flows (hereinafter referred to as “the cross-sectional area of the first flow path portion 3”) is the first. It is larger than the area of one of the two connection surfaces of the first flow path portion 3 and the second flow path portion 4 and smaller than the other area. Specifically, the cross-sectional area of the first flow path portion 3 is a downstream connection surface (hereinafter referred to as “first connection surface”) with reference to the direction of the fluid flowing through the first flow path portion 3. It is larger than the area and smaller than the area of the upstream connection surface (hereinafter referred to as “second connection surface”).

  In the flow path substrate 1 according to the present embodiment, the area of the first connection surface with respect to the cross-sectional area of the first flow path portion 3 is reduced, and the bubbles 5 are moved from the first flow path portion 3 to the second flow path. While moving to the path portion 4, the area of the second connection surface with respect to the cross-sectional area of the first flow path portion 3 is increased so that the bubbles 5 move from the first flow path portion 3 to the second flow path portion 4. Prevents moving.

  In the flow path substrate 1 according to the present embodiment, the fluid pressure difference between the first and second connection surfaces in the direction in which the fluid flows in the first flow path portion 3 is the second flow path portion 4. Since the first flow path part 3 and the second flow path part 4 are respectively configured to be larger than the pressure difference of the fluid between the first and second connection surfaces in the second flow path, the second flow path The movement of the bubbles 5 from the portion 4 to the first flow path portion 3 can be prevented.

  That is, in the flow path substrate 1, the bubbles 5 move from the first flow path portion 3 to the second flow path portion 4 through the first connection surface and remain in the second flow path portion 4.

  Below, while moving the bubble 5 from the 1st flow path part 3 to the 2nd flow path part 4, the movement of the bubble 5 from the 2nd flow path part 4 to the 1st flow path part 3 is prevented. The configuration of the flow path will be described in detail. In the following description, it is assumed that each of the first flow path portion 3 and the second flow path portion 4 has a rectangular cross section perpendicular to the direction in which the fluid flows.

  First, the pressure difference (pressure loss) between the fluid flow direction along the first flow path portion 3 and the fluid flow direction along the second flow path portion 4 in the vicinity of the first connection surface is calculated.

The pressure loss of the fluid can be calculated using the following formula ΔP = 2 × μ × L × V × {(A + B) / A × B} ² . Here, μ is the viscosity coefficient of the fluid, L is the channel length, A and B are ½ of the length of two different sides of the rectangle that is the shape of the channel cross section, and V is the average flow velocity. The channel cross section is a cross section perpendicular to the fluid flow direction, and the channel length is a length passing through the center of the channel cross section in the channel.

  FIG. 2 is a schematic diagram for explaining the pressure loss of the fluid in the flow path shown in FIG. As shown in FIG. 2, the length of the first flow path portion 3 at the first connection surface is la, the length of the first flow path portion 3 at the second connection surface is lb, the first and first The length of the first flow path portion 3 between the two connection surfaces is lc. That is, the length between the two connection surfaces in the direction in which the fluid in the first flow path portion flows is lc. In addition, the length of the first flow path portion 3 (the width of the first flow path portion 3) in the direction perpendicular to the first connection surface and the second connection surface is set to wa, and the second flow path portion 4 The distance from the first or second connection surface to the region parallel to the first flow path portion 3 is wb, and the first and second in the region of the second flow path portion 4 parallel to the first flow path portion 3 The length in the direction perpendicular to the connection surface 2 (the width of the parallel region in the second flow path portion 4) is wc. Further, the heights of the flow paths of the first flow path portion 3 and the second flow path portion 4 are both d, and the average flow velocity at the inlet portion of the fluid in the region for obtaining the pressure loss is v.

At this time, when the area of the connection surface of the first flow path part 3 and the second flow path part 4 is smaller than the cross-sectional area of the first flow path part 3, that is, the first connection surface L = la, A = wa / 2, B = d / 2, V = v × la / (la + wa) and the pressure loss ΔP11 is ΔP11. = 8 × μ × v / (la + wa) × (la / wa + la / d) ² Further, in the fluid flow direction along the second flow path portion 4, L = wa, A = la / 2, B = d / 2, V = v × wa / (la + wa) holds, and pressure loss ΔP12 ΔP12 = 8 × μ × v / (la + wa) × (wa / la + wa / d) ²

  Here, since the moving speed of the bubbles 5 is proportional to the pressure loss ΔP, the moving time of the bubbles 5 is proportional to a value L / ΔP obtained by dividing the channel length L by the pressure loss ΔP. Therefore, when the bubbles 5 are moved from the first flow path part 3 to the second flow path part 4 on the first connection surface, the flow path length of the first flow path part 3 on the first connection surface. The value la / ΔP11 obtained by dividing la by the pressure loss ΔP11 is larger than the value wa / ΔP12 obtained by dividing the width wa of the first flow path portion 3 by the pressure loss ΔP12, that is, la / The channel dimensions la and wa and the channel height d are set so that ΔP11> wa / ΔP12 holds.

  In this way, the time for the bubbles 5 to move from the first flow path part 3 to the second flow path part 4 is shorter than the time for the bubbles 5 to move along the first flow path part 3. Therefore, the bubbles 5 move from the first flow path portion 3 to the second flow path portion 4 on the first connection surface.

On the other hand, when the area of the connection surface of the first flow path part 3 and the second flow path part 4 is larger than the cross-sectional area of the first flow path part 3, that is, for the second connection surface, In the fluid flow direction along the flow path portion 3, L = lb, A = wa / 2, B = d / 2, V = v × lb / (lb + wa) holds, and the pressure loss ΔP21 is ΔP21 = 8 × μ × v / (lb + wa) × (lb / wa + lb / d) ² Further, in the fluid flow direction along the second flow path portion 4, L = wa, A = lb / 2, B = d / 2, V = v × wa / (lb + wa) holds, and pressure loss ΔP22 ΔP22 = 8 × μ × v / (lb + wa) × (wa / lb + wa / d) ²

  Therefore, when the bubbles 5 are prevented from moving from the first flow path part 3 to the second flow path part 4 on the second connection surface, the first flow path part 3 on the second connection surface The value lb / ΔP21 obtained by dividing the channel length lb by the pressure loss ΔP21 is smaller than the value wa / ΔP22 obtained by dividing the width wa of the first channel part 3 by the pressure loss ΔP22, that is, , The channel dimensions lb and wa and the channel height d are set so that lb / ΔP21 <wa / ΔP22.

  In this way, the time for the bubbles 5 to move along the first flow path portion 3 on the second connection surface is the time for the bubbles 5 to move from the first flow path portion 3 to the second flow path portion 4. Therefore, it is possible to prevent the bubbles 5 from traveling through the first flow path portion 3 and moving from the first flow path portion 3 to the second flow path portion 4 on the first connection surface. it can.

Here, when la / ΔP11> wa / ΔP12 holds, la × ΔP12> wa × ΔP11 holds, and ΔP11 = 2 × μ × la × v × wa / (la + wa) × {(Wa / 2 + d / 2) / (wa / 2 × d / 2)} ² , and ΔP12 = 2 × μ × wa × v × wa / (la + wa) × {(la / 2 + d / 2) / (la / 2 × d / 2)} By introducing ² , the following expression (1) is established.

{(La / 2 + d / 2) / (la / 2 × d / 2)} ² / la <{(wa / 2 + d / 2) / (la / 2 × d / 2)} ² / wa...・ (1)
Further, when lb / ΔP21 <wa / ΔP22 is satisfied, lb × ΔP22> wa × Δ21 is satisfied, and ΔP21 = 2 × μ × lb × v × wa / (lb + wa) × { (Wa / 2 + d / 2) / (wa / 2 × d / 2)} ² , and ΔP22 = 2 × μ × wa × v × wa / (lb + wa) × {(lb / 2 + d / 2) / (lb / 2 × d / 2)} By introducing ² , the following equation (2) is established.

{(Lb / 2 + d / 2) / (lb / 2 × d / 2)} ² / lb> {(wa / 2 + d / 2) / (lb / 2 × d / 2)} ² / wa... (2)
Note that la / 2 + d / 2 is ¼ of the circumference of the first connection surface (2la + 2d), and la / 2 × d / 2 is the area of the first connection surface (la × d). Lb / 2 + d / 2 is 1/4 of the circumference of the second connection surface (2lb + 2d), and lb / 2 × d / 2 is the area of the second connection surface It is 1/4 of (lb × d).

  In addition, when the cross-sectional area of the 1st flow path part 3 is smaller than the area of the connection surface of the 1st flow path part 3 and the 2nd flow path part 4, the 1st flow path part in the connection surface 3 is divided by the pressure loss of the fluid along the first flow path portion 3, the width of the first flow path portion 3 is always the fluid along the second flow path portion 3. When the cross-sectional area of the first flow path part 3 is larger than the area of the connection surface of the first flow path part 3 and the second flow path part 4, The value obtained by dividing the flow path length of the first flow path portion 3 on the connection surface by the pressure loss of the fluid along the first flow path portion 3 always sets the width of the first flow path portion 3 to the first 2 divided by the pressure loss of the fluid along the flow path portion 3. That is, the cross-sectional area of the first flow path portion 3 is larger than one area of the two connection surfaces to which the first flow path portion 3 and the second flow path portion 4 are connected, and is larger than the other area. If smaller, the bubble 5 is moved from the first flow path part 3 to the second flow path part 4 on one connection surface, and the first flow path from the second flow path part 4 on the other connection surface. The movement of the bubbles 5 to the portion 3 can be prevented.

  Next, a method for preventing the bubbles 5 from moving from the second flow path portion 4 to the first flow path portion 3 will be described.

In the region between the two connecting portions of the first and second flow path portions 3 and 4 in the first flow path portion 3, L = lc, A = wa / 2, B = d / 2, V = v holds, and the pressure loss ΔP30 becomes ΔP30 = 8 × μ × v × lc × (1 / wa + 1 / d) ² .

  On the other hand, the pressure loss of the fluid in the second flow path portion 4 is obtained as the sum of the pressure losses in the three regions with the bend angle of the flow path as a boundary.

First, in the first region A from the first connecting surface to the first bend in the second flow path portion 4, L = (2wb + wc) / 2, A = la / 2, B = d / 2, V = v × wa / (la + wa) holds, and the pressure loss ΔP31 becomes ΔP31 = 4 × μ × v × (2wb + wc) / (la + wa) × (1 / la + 1 / d) ² .

Next, in the second region B between two bends, L = (la + 2lc + lb) / 2, A = wc / 2, B = d / 2, V = v × wa / (lb + wa) × lb / wc Thus, the pressure loss ΔP32 is ΔP32 = 4 × μ × v × (la + 2lc + lb) / (lb + wa) × lb × wa / wc × (1 / wc + 1 / d) ² .

In the third region C from the first connection surface to the first bend in the second flow path portion 4, L = (2wb + wc) / 2, A = lb / 2, B = d / 2, V = v Xwa / (lb + wa) * lb / la holds, and the pressure loss ΔP33 becomes ΔP33 = 4 × μ × v × (2wb + wc) / (la + wa) × (1 / la + 1 / d) ² .

  At this time, if ΔP30> ΔP31 + ΔP32 + ΔP33, the bubble 5 does not move from the second flow path portion 4 to the first flow path portion 3, and ΔP30 <ΔP31 + ΔP32 + ΔP33. If there is, the bubbles 5 move from the second flow path portion 4 to the first flow path portion 3.

  That is, in order to prevent the bubbles 5 from moving from the second flow path portion 4 to the first flow path portion 3 between the first connection surface and the second connection surface, ΔP30> Δ The flow path dimensions la, lc, lb, wa, wb, wc, and the flow path height d may be set so as to be P31 + ΔP32 + ΔP33.

  As described above, the bubble 5 can be moved by adjusting the movement time and the pressure gradient of the bubbles 5 by changing the channel length and the channel width.

In the above example, the first flow path portion 3 and the second flow path portion 4 are assumed to have a rectangular cross section perpendicular to the direction in which the fluid flows. It is clear that it is good.

  Further, the cross sections of the first flow path portion 3 and the second flow path portion 4 may be circular or the like. Furthermore, the second flow path portion 4 has a configuration in which a straight flow path is connected, but may have a curved portion. In those cases, the length of the first flow path portion in the first connection surface and the second connection surface, and the length of the first flow path portion in the direction perpendicular to the first and second connection surfaces The length (width) may be a length passing through the center of the cross section perpendicular to the length direction and the width direction, respectively. In these cases, when calculating the pressure loss ΔP, 4 × (A + B) may be calculated as the circumference of the cross section, and 4 × A × B may be calculated as the area of the cross section.

  The configurations of the first channel portion and the second channel portion are not limited to those described above, and the pressure difference between the two connection surfaces in the direction in which the fluid flows in the first channel portion is the same. And the pressure difference of the fluid between the two connection surfaces in the second flow path portion is larger than the first flow path portion and the cross-sectional area of the first flow path portion. If the configuration is larger than one area of the two connection surfaces to which the second flow path portion is connected and smaller than the other area, the first flow path portion 3 to the second flow path on one connection surface. It is possible to move the bubbles 5 to the channel portion 4 and to prevent the bubbles 5 from moving from the second channel portion 4 to the first channel portion 3 on the other connection surface.

  In addition, although the cross section of the 1st flow path part assumed that the shape and the magnitude | size were constant, the area of the cross section of the 1st flow path part is the 1st flow path part and the 2nd flow path part. As long as it is larger than one area of the two connected connection surfaces and smaller than the other area, they may not be constant.

In the above-described example, the flow channel substrate has been described with respect to the example in which the second flow channel portion 4 is embedded in the substrate 2, but the second flow channel portion 4 may be formed on the surface of the substrate 2.

  In the above-described example, the case where one second flow path portion 4 is formed with respect to the first flow path portion 3 has been described. However, the second flow path portion 3 is adjacent to the first flow path portion 3. A plurality of flow path portions 4 may be formed.

  Furthermore, in the above example, the case where the substrate 2 of the flow path substrate 1 is made of an aluminum oxide sintered body has been described. However, the substrate 2 is made of a silicon carbide sintered body, an aluminum nitride sintered body, or the like. Also good.

  Further, in this case, since the silicon carbide sintered body has high strength at a high temperature, the reliability is high when the channel is used at a high temperature.

  When the substrate 2 is made of an aluminum nitride sintered body, the aluminum nitride sintered body includes, for example, an aluminum nitride content of 97 to 99% by weight and an oxide such as Al2O3 in the range of 1 to 3% by weight. And those containing a rare earth element oxide such as Y2O3, Yb2O3, Er2O3 in the range of 1 to 9% by weight with an aluminum nitride content of 91 to 99% by weight.

  Next, a chemical chip using the flow path substrate 1 according to the present embodiment will be described. FIG. 3 is a cross-sectional view showing a configuration example of such a chemical chip. The chemical chip 11 shown in FIG. 3 is supplied to the substrate 2 with a supply unit 12 that supplies the fluid to be processed and a fluid to be processed that reacts at a predetermined temperature such as an enzyme flowing through the first flow path portion 3. A processing unit 13 made of, for example, a heater that performs heat treatment at a predetermined temperature, and a deriving unit 14 that is provided at an end on the downstream side of the first flow path portion 3 and guides the processed fluid to the outside. Prepare.

  In the chemical chip 11, the substrate 2, the supply unit 12, the first flow path part 3, the second flow path part 4, and the lead-out part 14 are integrally formed. That is, a plurality of ceramic green sheets are prepared, and a part of the first flow path portion 3 and the second flow path portion 4 are respectively formed to a desired depth of each corresponding ceramic green sheet by laser processing or the like. The second flow path portion 4 is formed by forming a through hole reaching the second flow path portion 4 from the first flow path portion 3 in the corresponding ceramic green sheet by laser processing. Are connected to the flow path portion 3. Further, the supply portion 12 and the lead-out portion 14 are formed by this laser processing, the green sheet laminate is laminated, and heated and fired, whereby the substrate 2, the supply portion 12, the first flow path portion 3, and the second The chemical chip 11 in which the flow path portion 4 and the outlet portion 14 are integrally formed is obtained.

  Here, the configuration of the chemical chip 11 will be described. The fluid to be treated is fed and supplied from the supply unit 12 by a pump or the like, and merges and mixes in the first flow path portion 3. At this time, if there are two or more supply units 12, different types of fluids can be supplied to the supply units 12, and these fluids can be mixed in the first flow path portion 3.

In addition, the dimension of the flow path substrate 1 is about several hundred μm, several mm, and several mm in length, width, and height, respectively. Moreover, the cross-sectional area of the first flow path portion 3 is preferably 2.5 × 10 ^{−3 to 1} mm ² . At this time, since the cross-sectional area of the first flow path portion 3 is small, the diffusion time of the fluid to be treated is short, the reaction efficiency can be improved, and the reaction time can be reduced.

When the cross-sectional area of the first flow path portion 3 is larger than 1 mm ² , the diffusion time of the fluid to be processed becomes long and the reaction efficiency is lowered. On the other hand, when the cross-sectional area of the first flow path portion 3 is smaller than 2.5 × 10 ⁻³ mm ² , the pressure loss increases and a problem occurs in liquid feeding.

Moreover, the cross-sectional area of the connection surface larger than the first flow path portion of the second flow path portion 4 is preferably 5 × 10 ⁻³ mm ² or more which is twice or more the cross-sectional area of the first flow path portion. . When the cross-sectional area of the second flow path part 4 is smaller than twice the cross-sectional area of the first flow path part, the movement time of the bubbles to the first flow path part and the movement of the bubbles to the second flow path part The difference with time becomes small, and it becomes incomplete to prevent the movement of bubbles from the first flow path portion to the second flow path portion.

Moreover, the cross-sectional area of the connection surface smaller than the first flow path portion of the second flow path portion 4 is 2.5 × 10 ^{−3 to} 0 which is 1/2 or less of the cross-sectional area of the first flow path portion. 0.5 mm ² is preferred. When the cross-sectional area of the second flow path part 4 is larger than ½ of the cross-sectional area of the first flow path part, the movement time of the bubbles to the first flow path part and the bubble flow to the second flow path part The difference from the movement time becomes small, and it becomes incomplete to move bubbles from the first flow path portion to the second flow path portion. On the other hand, when the cross-sectional area of the second flow path portion 4 is smaller than 2.5 × 10 ⁻³ mm ² , the pressure loss increases and a problem occurs in liquid feeding.

  The second flow path portion 4 is connected to the first flow path portion 3 at two locations, and the bubbles move to the second flow path portion 4. And the to-be-processed fluid which the bubble does not mix flows into the 1st flow-path part 3, and since the predetermined process is performed by the process part 13 to the fluid, it is possible to perform an efficient reaction process. It is. The fluid processed by the processing unit 13 reaches the derivation unit 14 arranged on the downstream side of the processing unit 13. Then, the processed fluid after the processing is led out and collected by the lead-out unit 14. Note that, as described above, in order to perform an efficient process on a fluid in which bubbles are not mixed, the processing unit 13 is connected to the second part with reference to the direction of the fluid flowing through the first fluid part 3. It is necessary to provide on the downstream side of the flow path portion 4, that is, on the downstream side of the first connection surface. Of the two connection surfaces of the first flow path part 3 and the second flow path part 4, the area of the upstream connection surface with respect to the direction of the fluid flowing through the first fluid part 3 is When the cross-sectional area of one flow path portion 3 is smaller, the processing unit 13 may be provided on the downstream side of the upstream connection surface.

  According to the configuration as described above, since the bubbles in the fluid flowing through the flow path are easily removed, the performance of the chemical chip 11 is improved. That is, if the above-described chemical chip 11 is used, the processing for the fluid can be performed more efficiently. In addition, in the case where some measurement is performed on the fluid using the chemical chip 11, an effect that the measurement accuracy is improved is also obtained.

  In addition, by arranging sensing means (not shown) in the derivation unit 14 and the processing unit 13, it becomes possible to grasp the reaction efficiency of the fluid to be processed at any time, and the continuous driving is performed by changing the flow rate. Thus, it is possible to obtain a chemical chip 11 that can be used under conditions with higher reaction efficiency.

  Further, the flow path substrate 1 may be provided with an optical path (not shown) that guides light that irradiates the fluid flowing through the first flow path portion 3. In this case, it is preferable that an optical path is provided so that light flows to the fluid flowing downstream of the second flow path portion 4 with reference to the direction of the fluid flowing through the first flow path portion 3. With such a configuration, it is possible to cause a photoreaction by irradiating the fluid with light of a predetermined wavelength. In this case, the processing unit 13 can be omitted.

  Moreover, it becomes possible to generate a stepwise reaction by providing three or more supply parts 12.

  The chemical chip is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the present invention.

  Furthermore, in the above-described embodiment, the case where the flow path substrate is used for the chemical chip has been described. However, the present invention is not limited to this. Industrial devices such as heat exchangers, electronic components such as methanol fuel cells, and personal computers It may be used for general household equipment such as a water cooling module.

  Hereinafter, the operation of the flow path substrate of the present invention will be described in comparison with a conventional flow path substrate.

First, as shown in FIG. 1, a plurality of green sheets made of aluminum oxide are laminated, a flow path is formed by laser processing, and the green sheet laminate is heated and fired to obtain a flow in which the flow path is formed. A road substrate 1 was produced.

  As a comparative example, a conventional flow path substrate 101 having no second fluid portion 4 as shown in FIG. 4 was prepared using a ceramic green sheet made of aluminum oxide as described above.

  Next, with respect to the flow path substrate 1 according to the present embodiment and the conventional flow path substrate 101, the inflow portion and the outflow portion of the second flow path portion 3 are set so that the flow velocity is 0.1 m / s when stable. An image obtained by observing the number of bubbles with a microscope was recorded and calculated as bubble movement rate = (number of bubbles in the inflow portion−number of bubbles in the outflow portion) / number of bubbles in the inflow portion.

  In addition, a value obtained by dividing the flow path length in the direction in which the fluid in the first flow path portion in the first connection surface flows by the pressure loss and the flow path length in the direction in which the fluid in the second flow path portion flows are pressure. The difference from the value divided by the loss was calculated. Similarly, the value obtained by dividing the flow path length in the direction in which the fluid in the first flow path portion flows in the second connection surface by the pressure loss and the flow path length in the direction in which the fluid in the second flow path portion flows are pressure. The difference from the value divided by the loss was calculated. Further, the difference between the pressure difference of the fluid in the first flow path portion and the pressure difference of the fluid in the second flow path portion between the first and second connection surfaces was calculated.

The results are shown in Table 1.

  From Table 1, the conventional flow path substrate 101 that does not consider the movement of bubbles has a bubble movement rate of 0%, whereas the flow path substrate 1 according to the present embodiment has a bubble movement rate of 100%. %, It was found that the bubbles were moving completely.

It is sectional drawing which showed the flow-path board | substrate of this invention typically. It is a schematic diagram for demonstrating the pressure loss of the fluid in the flow path shown by FIG. It is sectional drawing which showed typically the chemical chip using the flow-path board | substrate of this invention. It is sectional drawing which showed the conventional flow-path board | substrate typically.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Flow path substrate 2 Substrate 3 1st flow path part 4 2nd flow path part 5 Bubble 11 Chemical chip 12 Supply part 13 Processing part 14 Derivation part

Claims (6)

A flow path substrate in which a flow path through which a fluid flows is provided inside the substrate, wherein the flow path includes a first flow path portion in which the fluid flows in a single path, and the first flow path portion. A second flow path portion provided adjacent to and connected to the first flow path portion at two locations;
The first flow path portion and the second flow path portion have a difference in pressure of the fluid between the two connection surfaces in the direction in which the fluid flows in the first flow path portion. Configured to be greater than the pressure difference of the fluid between the two connection surfaces in the flow path portion,
The area of the cross section perpendicular to the direction in which the fluid flows in the first flow path portion is larger than the area of one of the two connection surfaces to which the first flow path portion and the second flow path portion are connected. A flow path substrate characterized by being larger and smaller than the other area. The cross section of the first flow path portion has a constant shape and size between the two connection surfaces,
The cross section of the first flow path portion and the first and second connection surfaces are each square or rectangular,
Of the two connection surfaces, the first connection surface having an area smaller than the cross-sectional area of the first flow path portion is a square of the length of the circumference of the first connection surface. Is divided by the product of the length of the first flow path portion on the first connection surface and the square of the area of the first connection surface to the square of 1/4. Is divided by the product of the length of the first flow path portion in the direction perpendicular to the first connection surface and the square of the area of the cross section. small,
Of the two connection surfaces, the second connection surface having an area larger than the cross-sectional area of the first flow path portion is ¼ of the length of the circumference of the second connection surface. Is divided by the product of the length of the first flow path portion on the second connection surface and the square of the area of the second connection surface to be the square of the area of the cross section. Is divided by the product of the length of the first flow path portion in the direction perpendicular to the second connection surface and the square of the area of the cross section. The flow path substrate according to claim 1, wherein the flow path substrate is large. One area of the two connection surfaces is ½ or more of the cross-sectional area of the first flow path portion, and the other area of the two connection surfaces is the first flow path portion. The flow path substrate according to claim 1, wherein the flow path substrate has a cross-sectional area of ½ or less. A flow path substrate according to any one of claims 1 to 3, comprising: a supply unit that supplies fluid to the first flow path portion; and a fluid that flows through the first flow path portion. A processing unit for performing a predetermined process and a deriving unit for deriving the processed fluid to the outside are provided, and the processing unit uses the direction of the fluid flowing through the first flow path portion as a reference, and A flow path device provided on the downstream side of a flow path portion. The flow path device according to claim 4, wherein the processing unit is a heater that heats a fluid flowing through the first flow path portion. A flow path substrate according to any one of claims 1 to 3, comprising: a supply unit configured to supply a fluid to the first flow path portion to the flow path substrate; and the fluid from the first flow path portion. An optical path that guides the light so that the fluid flowing on the downstream side of the second flow path portion is irradiated with light with reference to the direction of the fluid flowing through the first flow path portion and the derivation section that leads to the outside And a flow path device.

Images