JP2008032487A - Visual inspection device - Google Patents

Visual inspection device Download PDF

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JP2008032487A
JP2008032487A JP2006205096A JP2006205096A JP2008032487A JP 2008032487 A JP2008032487 A JP 2008032487A JP 2006205096 A JP2006205096 A JP 2006205096A JP 2006205096 A JP2006205096 A JP 2006205096A JP 2008032487 A JP2008032487 A JP 2008032487A
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image
gear
light
inspected
polarizing filter
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Masatsugu Kishimura
正嗣 岸村
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Sumitomo Electric Industries Ltd
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Sumitomo Electric Industries Ltd
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<P>PROBLEM TO BE SOLVED: To provide an visual inspection device for accurately detecting the defects developed on each face, independently of the surface shape of each face, where the surface of an inspected body is formed out of a multitude of faces, and in particular, where each developed on a corner part formed out of two faces. <P>SOLUTION: This visual inspection device is equipped with a lighting means 4 for applying light to the inspected body (a toothed wheel 2) with its surface formed from among a plurality of faces; imaging means 51 and 52 imaging the inspected body 2 at a position where a part of a surface, which is not a plane among the surfaces of the inspected body 2, appears as an outline along the surface shape and is imaged; an image processing means 7 image-processing subjected images taken by the imaging means 51 and 52 for detecting the defects on a surface which is not a plane of the inspected body 2; a first polarizing filter 61, disposed near the light-emitting part of the lighting means 4 to cause a light wave, having a specific vibrating direction, to pass therethrough; and a second polarizing filter 62, disposed near light receiving parts of the imaging means 51 and 52 to cause a light wave having the same vibrating direction as the polarizing filter 61 to pass therethrough. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、歯車等、複数の面で表面が形成された被検査体における平面ではない面の欠陥を画像処理により検査する外観検査装置に関する。   The present invention relates to an appearance inspection apparatus that inspects a defect on a surface that is not a plane in an object to be inspected, such as a gear, by image processing.

複数の面で表面が形成された被検査体として、例えば、歯車が挙げられる。歯車を製造する場合、通常は、粉末合金を焼結して製造される。焼結する前の歯車の状態は、圧粉体なので表面に欠けが生じやすく、そのまま焼結してしまうと表面に欠けが残った状態になる。また、焼結する際に、歯車の柔らかい表面にごみが付着した場合には、そのゴミが焼結時に焼けてしまうと、欠けが発生してしまう場合もある。欠けは、例えば歯車の歯部における先端エッジ部に発生すると、その歯車の動力伝達不足の原因になる虞がある。   An example of an object to be inspected having a plurality of surfaces is a gear. When manufacturing a gear, it is usually manufactured by sintering a powder alloy. Since the state of the gear before sintering is a green compact, chipping is likely to occur on the surface, and if it is sintered as it is, chipping remains on the surface. Further, if dust adheres to the soft surface of the gear during sintering, chipping may occur if the dust is burned during sintering. For example, if the chipping occurs at the tip edge portion of the tooth portion of the gear, there is a possibility that power transmission of the gear is insufficient.

また、歯車を製造する際、型から歯車を抜くときにバリが発生することがある。このように、焼結された歯車の表面に欠けやバリがある場合には、歯車を回転させたとき、バリ噛み込みによって歯車が停止する原因となるので、バリのある歯車は欠陥品となる。   Moreover, when manufacturing a gear, a burr | flash may generate | occur | produce when removing a gear from a type | mold. In this way, when there are chips or burrs on the surface of the sintered gear, when the gear is rotated, the gear stops due to the burr biting, so the gear with burrs becomes a defective product. .

従来、歯車の表面、特に歯部の先端部を検査する場合は、作業者が目視によって欠陥があるか否かの判別を行っていた。しかし、人的に外観検査を行う場合、長時間検査を行ったときには、緊張による疲労感から見逃しや誤判定を起こし易いし、官能的な感覚に頼るため、個人差による判定バラツキが大きく、安定した検出能力を全数にわたって保証できない。   Conventionally, when inspecting the surface of a gear, particularly the tip of a tooth portion, an operator determines whether there is a defect visually. However, when performing a visual inspection for humans, when a long-term inspection is performed, it is easy to miss or misjudgment because of fatigue due to tension, and because it depends on sensual feeling, there are large variations in judgment due to individual differences, stable It is not possible to guarantee the entire detection capability.

また、表面欠陥を自動的に検査する装置が従来から提案されている。検査を自動化する場合、例えば、歯車に光を照射し、正反射光/乱反射光を撮像手段で撮像して、得られた画像を処理することによって良否を判定する装置がある(例えば特許文献1参照)。   Also, an apparatus for automatically inspecting surface defects has been proposed. In the case of automating inspection, for example, there is an apparatus that determines the quality by irradiating a gear with light, imaging regular reflection light / diffuse reflection light with an imaging unit, and processing the obtained image (for example, Patent Document 1). reference).

特許文献1に開示されている外観検査装置は、被検査体の被検査面に平行光を一定方向から照射し、被検査体に当たって反射した光を撮像手段で受光して画像処理を行い、モニタ画像上に明暗パターンとして映し出し、その明暗パターンを正常時のパターンと比較して被検査面の異常を検出するようになっている。   A visual inspection apparatus disclosed in Patent Document 1 irradiates parallel light on a surface to be inspected from a certain direction, receives light reflected by the object to be inspected by an imaging unit, performs image processing, and monitors A light and dark pattern is displayed on the image, and the light and dark pattern is compared with a normal pattern to detect an abnormality of the surface to be inspected.

特許文献1に開示されている外観検査装置では、被検査面に一定の方向から平行光を照射すると、その被検査面に傷や汚れの付着などが全く無い場合には、光はその被検査面の正常な形状による一定の方向に反射される。しかし、被検査面に異常がある場合には、欠陥部にあたった光は、ランダムに散乱するため、正常なときとは異なった散乱状態となる。特許文献1の外観検査装置では、この異常な散乱状態を正常なときの散乱状態と比較して欠陥を検出する。   In the appearance inspection apparatus disclosed in Patent Document 1, when the surface to be inspected is irradiated with parallel light from a certain direction, the light is inspected if there is no scratch or dirt on the surface to be inspected. Reflected in a certain direction due to the normal shape of the surface. However, when there is an abnormality on the surface to be inspected, the light that hits the defect portion is randomly scattered, so that the scattering state is different from the normal state. In the appearance inspection apparatus of Patent Document 1, a defect is detected by comparing this abnormal scattering state with a normal scattering state.

特開平05-157705号公報JP 05-157705 A

ところで、歯車の歯の部分は、側面が曲面で形成されていたり、軸方向端面における歯の先端側が軸方向に対して垂直な平面ではなく、緩やかに傾斜した形状をしていたりする場合がある。   By the way, the tooth portion of the gear may have a side surface formed by a curved surface, or the tip end side of the tooth on the axial end face may be a gently inclined shape instead of a plane perpendicular to the axial direction. .

特許文献1に記載されているように、被検査面である歯車の軸方向端面に平行光を照射して欠陥を検査する場合、軸方向端面が軸方向に垂直な面のときは、正常な部分は、反射した光が撮像手段に受光され、欠陥部分は受光されないので、明暗パターンを映し出すことにより、その中で欠陥を検出することができる。   As described in Patent Document 1, when inspecting defects by irradiating parallel light onto the axial end surface of the gear, which is the surface to be inspected, when the axial end surface is a surface perpendicular to the axial direction, it is normal. In the portion, the reflected light is received by the image pickup means, and the defective portion is not received. Therefore, the defect can be detected in the portion by projecting the light / dark pattern.

しかし、歯車の軸方向端面における歯の先端側が傾斜した面である場合には、傾斜面が正常な状態であっても、傾斜面であるため反射した光が撮像手段に受光されず、先端部分が暗い状態で歯車の歯が撮像されてしまう。従って、この傾斜した先端部の面での欠陥、特に、先端部分の角部に欠けやバリがある場合には、明確な明暗パターンを映し出すことが困難となるので、欠陥の検出は非常に困難となる。   However, when the tip end side of the tooth on the axial end surface of the gear is an inclined surface, even if the inclined surface is in a normal state, the reflected light is not received by the imaging means because of the inclined surface, and the tip portion The gear teeth are imaged in a dark state. Therefore, when there is a defect on the surface of the inclined tip part, particularly when there is a chip or a burr at the corner part of the tip part, it is difficult to project a clear light-dark pattern, so it is very difficult to detect the defect. It becomes.

さらに、被検査体に油が付着したりして汚れがあると、正反射を利用して欠陥を検出するのは難しい。正反射を受光して検査を行う場合には、曲面では反射光を受光できないので、曲面での欠陥の検出はできない。   Further, when oil adheres to the object to be inspected and is contaminated, it is difficult to detect a defect using regular reflection. When inspection is performed by receiving regular reflection, the reflected light cannot be received on the curved surface, so that the defect cannot be detected on the curved surface.

そこで、本発明は、上記問題に鑑みてなしたもので、被検査体の表面が多数の面で形成されている場合、各面の表面形状に関係なく、各面に発生した欠陥、特に、面と面とで形成される角部に発生した欠陥を正確に検出できる外観検査装置を提供することを目的とする。   Therefore, the present invention has been made in view of the above problems, and when the surface of the object to be inspected is formed of a large number of surfaces, the defects generated on each surface regardless of the surface shape of each surface, in particular, An object of the present invention is to provide an appearance inspection apparatus capable of accurately detecting defects generated at corners formed by surfaces.

本発明の外観検査装置は、複数の面で表面が形成された被検査体に、光を照射する照明手段と、被検査体の表面のうち平面ではない面の一部が表面形状に沿った輪郭として現れて撮像される位置で、被検査体を撮像する撮像手段と、撮像手段で撮像した撮像画像を画像処理して、被検査体の平面ではない面での欠陥を検出する画像処理手段とを備える。   The appearance inspection apparatus according to the present invention includes a lighting unit that irradiates light to a test object having surfaces formed on a plurality of surfaces, and a part of the surface of the test object that is not a plane is along a surface shape. An imaging unit that images the object to be inspected at a position that appears as an outline, and an image processing unit that performs image processing on the captured image captured by the imaging unit and detects a defect on a surface other than the plane of the object to be inspected With.

さらに、本発明は、照明手段の発光部の近くに配置し、特定の振動方向の光波を通過させる第一偏光フィルタと、撮像手段の受光部の近くに配置し、第一偏光フィルタと振動方向が同方向の光波を通過させる第二偏光フィルタとを備える。   Furthermore, the present invention provides a first polarizing filter that is disposed near the light emitting unit of the illumination unit and transmits a light wave having a specific vibration direction, and is disposed near the light receiving unit of the imaging unit, and the first polarizing filter and the vibration direction. Includes a second polarizing filter that allows light waves in the same direction to pass therethrough.

照明手段は、透過照明装置を用いる。透過照明装置としては面発光型のものが好ましい。   As the illumination means, a transmission illumination device is used. A surface-emitting type device is preferable as the transmission illumination device.

撮像手段としては、CCDカメラ等の二次元カメラが挙げられる。撮像手段は、視野サイズを撮像領域として、二次元画像を得る。この二次元画像は、画像処理手段に送られる。   Examples of the imaging means include a two-dimensional camera such as a CCD camera. The imaging means obtains a two-dimensional image using the visual field size as an imaging region. This two-dimensional image is sent to the image processing means.

撮像手段により、被検査体の表面のうち平面ではない面の一部が表面形状に沿った輪郭として現れて撮像されるようにするには、例えば、撮像手段の光軸が透過照明の透過方向に対して斜めになる位置に配置する。より具体的には、被検査体を照明手段と撮像手段との間に配置し、撮像手段の光軸が被検査体の平面と非直角となるようにする。   In order to cause the imaging unit to capture and image a part of the non-planar surface of the surface of the object to be inspected and imaged as a contour along the surface shape, for example, the optical axis of the imaging unit is the transmission direction of the transmitted illumination. It arranges in the position which becomes diagonal to. More specifically, the object to be inspected is arranged between the illumination means and the imaging means so that the optical axis of the imaging means is not perpendicular to the plane of the object to be inspected.

被検査体が歯車の場合、照明手段を、歯車の一方の軸方向端面と対向するように配置し、撮像手段を、撮像手段の光軸が歯車の軸方向(透過照明の透過方向)に対して鋭角になるように歯車の他方の軸方向端面側に配置する。   When the object to be inspected is a gear, the illumination means is arranged so as to face one axial end face of the gear, and the imaging means is arranged with respect to the axial direction of the gear (the transmission direction of the transmitted illumination). And arranged on the other axial end face side of the gear so as to have an acute angle.

このように照明手段と撮像手段とを配置すると、被検査体の表面のうち平面ではない面での欠陥、特に、非平面と非平面とで形成される角部、または、非平面と平面とで形成される角部での欠陥を確実に検出することができる。   When the illumination unit and the imaging unit are arranged in this way, defects on a non-planar surface of the surface of the object to be inspected, in particular, a corner formed by a non-plane and a non-plane, or a non-plane and a plane It is possible to reliably detect defects at the corners formed by.

そして、被検査体が歯車の場合で、歯車の軸方向端面における歯部形成部分が平面となっていない場合(傾斜面)でも、歯車の軸方向端面の歯部形成部分と歯部側面で形成される角部(エッジ部)の欠陥を確実に検出することができる。   And even when the object to be inspected is a gear and the tooth portion forming portion on the axial end surface of the gear is not flat (inclined surface), it is formed by the tooth forming portion and the tooth side surface of the axial end surface of the gear. It is possible to reliably detect defects in the corners (edge portions).

画像処理手段は、撮像手段で撮像した撮像画像に対して画像処理を行って、平面ではない面での欠陥を検査する。   The image processing means performs image processing on the picked-up image picked up by the image pick-up means, and inspects a defect on a non-planar surface.

画像処理手段は、例えばコンピュータにより構成され、画像処理部と、判定部とを備える構成とすることができる。画像処理部は、例えば、被検査体の撮像画像から検査対象部位をパターンサーチし、正常な形状データを基準画像として、この基準画像とサーチした検査対象画像との差分画像を求める。そして、その差分画像において差異のある部位の粒子面積を求める。   The image processing means is configured by, for example, a computer, and can include an image processing unit and a determination unit. For example, the image processing unit pattern-searches the inspection target region from the captured image of the object to be inspected, and obtains a difference image between the reference image and the searched inspection target image using normal shape data as the reference image. And the particle | grain area of the site | part with a difference in the difference image is calculated | required.

判定部は、画像処理部で得られたデータを元に良否を判定する。例えば、画像処理部で求めた差分画像において差異のある部位の粒子面積が所定の値より大きければ欠陥であると判定し、所定の値以下のときには、欠陥ではないと判定する。   The determination unit determines pass / fail based on the data obtained by the image processing unit. For example, if the particle area of a part having a difference in the difference image obtained by the image processing unit is larger than a predetermined value, it is determined as a defect, and if it is equal to or smaller than a predetermined value, it is determined as not a defect.

また、画像処理手段は、撮像手段で撮像した最初の画像(シルエット画像)を基準画像とし、その後に撮像した画像(シルエット画像)と基準画像とを比較して欠陥の有無の判定するようにしてもよい。このように、最初の画像を基準画像とすることにより、被検査体間の寸法バラツキ(個体差)に影響を受けないで、安定して欠陥を検出することができる。また、被検査体が歯車の場合、先端形状が仕様変更等により変化しても、検査ソフトを変更、あるいは基準画像を再登録する必要が無いという効果も得られる。   Further, the image processing means uses the first image (silhouette image) captured by the imaging means as a reference image, and then compares the image captured (silhouette image) with the reference image to determine the presence or absence of a defect. Also good. In this way, by using the first image as a reference image, it is possible to detect defects stably without being affected by dimensional variations (individual differences) between test objects. Further, when the object to be inspected is a gear, even if the tip shape changes due to a specification change or the like, there is an effect that it is not necessary to change the inspection software or re-register the reference image.

さらに、透過照明の光が、被検査体の表面、例えば歯車の場合は、歯部の側面に当たるとこの光が乱反射して撮像手段に受光されてしまう虞がある。このときの撮像画像は、光りが反射した面が光った状態の画像となり、欠陥部分と正常部分とのコントラストが得られなくなって、光った部分で発生した欠陥の検査ができなくなる虞がある。そこで、このように被検査体の表面に当たって乱反射した光は撮像手段で受光する前にフィルタで取り除くことが好ましい。   Furthermore, in the case where the light of the transmitted illumination hits the surface of the object to be inspected, for example, a gear, the light may be irregularly reflected and received by the imaging means. The captured image at this time is an image in which the light-reflected surface is shined, and the contrast between the defective portion and the normal portion cannot be obtained, and there is a possibility that the defect generated in the shining portion cannot be inspected. Therefore, it is preferable to remove the light irregularly reflected on the surface of the object to be inspected with a filter before receiving the light with the imaging means.

従って、本発明では、被検査体の表面に当たって乱反射した光が撮像手段で撮像されるのを低減するように偏光フィルタを配置する。具体的には、前記したように、照明手段の発光部の近くに特定の振動方向の光波を通過させる第一偏光フィルタを配置するとともに、撮像手段の受光部の近くに、第一偏光フィルタと振動方向が同方向の光波を通過させる第二偏光フィルタを配置する。   Therefore, in the present invention, the polarizing filter is disposed so as to reduce the image of the light irregularly reflected by hitting the surface of the object to be inspected by the imaging means. Specifically, as described above, the first polarizing filter that allows light waves in a specific vibration direction to pass is disposed near the light emitting unit of the illumination unit, and the first polarizing filter is disposed near the light receiving unit of the imaging unit. A second polarizing filter that allows light waves having the same vibration direction to pass is disposed.

本発明では、照明手段から照射された光のうち特定振動方向の光波を第一偏光フィルタに通過させ、第一偏光フィルタを通過した光波と振動方向が同方向の光波のみを第二偏光フィルタに通過させる。その結果、被検査体の表面に当たった光波が乱反射して振動方向が散乱されても、その光波の殆どを第二偏光フィルタでカットできる。その結果、撮像画像は光った部分が低減された状態となり、コントラストの高い画像が得られる。   In the present invention, the light wave in the specific vibration direction out of the light irradiated from the illumination means is passed through the first polarizing filter, and only the light wave having the same vibration direction as the light wave that has passed through the first polarizing filter is passed through the second polarizing filter. Let it pass. As a result, even if the light wave hitting the surface of the object to be inspected is irregularly reflected and the vibration direction is scattered, most of the light wave can be cut by the second polarizing filter. As a result, the captured image is in a state where the shining portion is reduced, and an image with high contrast is obtained.

このように偏光フィルタを設けることにより、被検査体の表面で乱反射した成分を低減させることができ、撮像した際のコントラスト比の向上を図ることができる。   By providing the polarizing filter in this way, it is possible to reduce the component that is irregularly reflected on the surface of the object to be inspected, and to improve the contrast ratio at the time of imaging.

さらに、被検査体が歯車である場合には、歯車の一つの歯部において、歯部先端部を通る軸方向と平行な線に対して対称となるように二つの撮像手段を配置するとともに、照明手段の発光部の近くに特定の振動方向の光波を通過させる第一偏光フィルタを配置し、各撮像手段の受光部の近くに、第一偏光フィルタと振動方向が同方向の光波を通過させる第二偏光フィルタを配置することが好ましい。   Further, when the object to be inspected is a gear, in one tooth portion of the gear, two imaging means are arranged so as to be symmetric with respect to a line parallel to the axial direction passing through the tooth tip portion, A first polarizing filter that allows light waves in a specific vibration direction to pass is arranged near the light emitting part of the illumination means, and light waves that have the same vibration direction as the first polarizing filter are passed near the light receiving part of each imaging means. It is preferable to arrange a second polarizing filter.

二つの撮像手段の光軸を、歯部先端部を通る軸方向と平行な線に対して斜めで、かつ、対称となるように配置することにより、歯車の歯の手前側エッジ部と奥側エッジ部を左右同時に撮像することができるので、歯車を1回転させるだけで歯車の全ての歯部に対してエッジ部全ての欠陥の検査が可能となる。   By arranging the optical axes of the two imaging means so as to be oblique and symmetrical with respect to a line parallel to the axial direction passing through the tip of the tooth part, the front edge part and the back side of the gear tooth Since the edge portion can be imaged simultaneously on the left and right, it is possible to inspect all the edge portions for all the tooth portions of the gear with only one rotation of the gear.

なお、本発明の外観検査装置は、歯車の歯部での欠陥の検査に限らず、タービンベーンやU字状の溝を有するギヤ、ラック歯を有するラック棒などでも、表面に平面部分だけでなく、傾斜面や湾曲面を有する物であれば、この傾斜面や湾曲面のエッジ部における欠陥を検査することができる。   In addition, the appearance inspection apparatus of the present invention is not limited to the inspection of defects in the gear teeth, and even a turbine vane, a gear having a U-shaped groove, a rack bar having rack teeth, or the like can be formed only on a flat surface. However, if the object has an inclined surface or a curved surface, it is possible to inspect defects at the edge portion of the inclined surface or the curved surface.

本発明の外観検査装置は、歯車の歯部における軸方向端面形状など、被検査体の表面に、平面でない面を有する被検査体でも、平面でない面で発生した欠陥、特に、面と面とで形成される角部で発生した欠陥を確実に検出することができる。   The appearance inspection apparatus according to the present invention has a defect that occurs on a non-planar surface, particularly a surface and a surface, even if the surface of the object to be inspected has a non-planar surface, such as an axial end face shape of a gear tooth. It is possible to reliably detect defects generated at the corners formed by.

以下、本発明に係る外観検査装置の実施形態を図面に基づいて説明する。本実施形態の外観検査装置1は、図1の概略構成図に示すように、被検査体である歯車2の歯部21におけるエッジ部分(軸方向端面と側面とで形成される角部)で発生した欠陥を検査する装置である。   Embodiments of an appearance inspection apparatus according to the present invention will be described below with reference to the drawings. As shown in the schematic configuration diagram of FIG. 1, the appearance inspection apparatus 1 according to the present embodiment is an edge portion (a corner portion formed by an axial end surface and a side surface) of a tooth portion 21 of a gear 2 that is an object to be inspected. It is an apparatus for inspecting the generated defects.

歯車2は、図1から図3に示すように、円板状の歯車本体22の中心に貫通孔23が形成され、歯車本体22の軸方向一方の面に、貫通孔23と同軸で同じ内径の筒部24が突設されるとともに、外周に歯部21が形成されている。   As shown in FIGS. 1 to 3, the gear 2 is formed with a through hole 23 at the center of a disc-shaped gear body 22, and the same inner diameter is coaxial with the through hole 23 on one axial surface of the gear body 22. The cylindrical portion 24 is projected and a tooth portion 21 is formed on the outer periphery.

外観検査装置1は、歯車2を回転させながら、各歯部21におけるエッジ部分の欠陥の有無を検査するようになっている。外観検査装置1は、歯車2を回転させる回転機構3と、照明手段となる透過照明装置4と、二台の第一CCDカメラ(撮像手段)51と第二CCDカメラ(撮像手段)52と、第一偏光フィルタ61と、第二偏光フィルタ62と、画像処理手段7とを備える。   The appearance inspection apparatus 1 inspects the presence or absence of a defect in the edge portion of each tooth portion 21 while rotating the gear 2. The appearance inspection apparatus 1 includes a rotation mechanism 3 that rotates the gear 2, a transmission illumination device 4 that serves as illumination means, two first CCD cameras (imaging means) 51, and a second CCD camera (imaging means) 52, A first polarizing filter 61, a second polarizing filter 62, and an image processing means 7 are provided.

回転機構3は、図2に示すように、モータにより回転駆動する回転用ローラ31と、この回転用ローラ31と歯車2の筒部24外周面とに接触して、回転用ローラ31からの回転力を歯車2に伝達する伝達ローラ32と、歯車2の筒部24を回転可能に支持する支持ローラ33とを備える。   As shown in FIG. 2, the rotation mechanism 3 is in contact with the rotation roller 31 that is rotated by a motor, and the rotation roller 31 and the outer peripheral surface of the cylindrical portion 24 of the gear 2. A transmission roller 32 that transmits force to the gear 2 and a support roller 33 that rotatably supports the cylindrical portion 24 of the gear 2 are provided.

透過照明装置4は、面発光型の透過照明装置を用いている。透過照明装置4は、図1および図3に示すように、歯車2の軸方向一方の端面側から歯部21に向けて照射する位置に設けている。   The transmission illumination device 4 uses a surface-emitting type transmission illumination device. As shown in FIGS. 1 and 3, the transmitted illumination device 4 is provided at a position where irradiation is performed toward the tooth portion 21 from one end face side in the axial direction of the gear 2.

第一CCDカメラ51と第二CCDカメラ52とは、図1に示すように、カメラの光軸が歯車2の軸方向に対して鋭角になるように歯車2の軸方向他方の端面側に配置している。本実施形態では、図1に示すように、第一CCDカメラ51と第二CCDカメラ52とは、歯部先端部を通る軸方向と平行な線に対して対称となるように配置しており、しかも、軸方向に対して光軸が45°となるように配置している。この光軸の角度は、45°±10°の範囲とするのが好ましい。   As shown in FIG. 1, the first CCD camera 51 and the second CCD camera 52 are arranged on the other end face side in the axial direction of the gear 2 so that the optical axis of the camera is an acute angle with respect to the axial direction of the gear 2. is doing. In the present embodiment, as shown in FIG. 1, the first CCD camera 51 and the second CCD camera 52 are arranged so as to be symmetric with respect to a line parallel to the axial direction passing through the tooth tip. And it arrange | positions so that an optical axis may become 45 degrees with respect to an axial direction. The angle of the optical axis is preferably in the range of 45 ° ± 10 °.

第一CCDカメラ51および第二CCDカメラ52で撮像される画像は、カメラの視野サイズを撮像領域とした二次元画像となる。この二次元画像は、画像処理手段に送られる。   The images picked up by the first CCD camera 51 and the second CCD camera 52 are two-dimensional images with the field of view size of the camera as the image pickup area. This two-dimensional image is sent to the image processing means.

第一偏光フィルタ61は、特定の振動方向の光波を通過させ、透過照明装置4の発光部の近くに配置しており、透過照明装置の発光面の全面を覆う大きさを有している。   The first polarizing filter 61 allows light waves in a specific vibration direction to pass therethrough and is disposed near the light emitting unit of the transmissive illumination device 4, and has a size that covers the entire light emitting surface of the transmissive illumination device.

第二偏光フィルタ62は、第一CCDカメラ51および第二CCDカメラ52のそれぞれの受光部の近くに配置しており、第一偏光フィルタ61と振動方向が同方向の光波を通過させる。   The second polarizing filter 62 is disposed near the respective light receiving portions of the first CCD camera 51 and the second CCD camera 52, and allows light waves having the same vibration direction as that of the first polarizing filter 61 to pass therethrough.

画像処理手段7は、コンピュータで構成されており、図示していないが、モニタも備える。画像処理手段7は、記憶部と、画像処理部と、判定部とを備える。記憶部は、第一CCDカメラ51で撮像した画像のデータおよび第二CCDカメラ52で撮像した画像のデータを記憶する。画像処理部は、被検査体の撮像画像から検査対象部位をサーチした後、基準画像とサーチした検査対象画像との差分画像を求め、その差分画像において差異のある部位の粒子面積を求める。判定部は、画像処理部で得られた欠陥部の粒子面積を元に良否を判定する。   The image processing means 7 is composed of a computer and includes a monitor (not shown). The image processing means 7 includes a storage unit, an image processing unit, and a determination unit. The storage unit stores image data captured by the first CCD camera 51 and image data captured by the second CCD camera 52. The image processing unit searches the inspection target part from the captured image of the object to be inspected, obtains a difference image between the reference image and the searched examination target image, and obtains a particle area of a part having a difference in the difference image. The determination unit determines pass / fail based on the particle area of the defect portion obtained by the image processing unit.

本実施形態では、基準画像は、歯車2の歯部21を撮像するとき、最初に撮像した歯部21の画像(歯部のシルエット画像)を基準画像としており、この基準画像と次から撮像する歯部21の画像(シルエット画像)とを比較して歯部21に欠陥があるか否かを判定する。   In the present embodiment, when the tooth portion 21 of the gear 2 is imaged, the reference image is the image of the tooth portion 21 (the silhouette image of the tooth portion) first captured as the reference image, and the reference image and the next image are captured. The image (silhouette image) of the tooth portion 21 is compared to determine whether the tooth portion 21 has a defect.

さらに、外観検査装置1は、歯車2の歯部21に対向するように光透過型の撮像トリガ用検知センサ8を設けている。この検知センサ8の光は、歯部21と歯部21との谷間を通過するようになっており、この光が歯部21で遮断されるタイミング信号が画像処理手段7に入力されるようになっている。このタイミング信号に基づいて、画像処理手段は、順次、歯部21を撮像するように、第一CCDカメラ51および第二CCDカメラ52の撮像タイミングを制御している。   Further, the appearance inspection apparatus 1 is provided with a light transmission type imaging trigger detection sensor 8 so as to face the tooth portion 21 of the gear 2. The light from the detection sensor 8 passes through the valley between the tooth portion 21 and the tooth portion 21, and a timing signal at which this light is blocked by the tooth portion 21 is input to the image processing means 7. It has become. Based on this timing signal, the image processing means controls the imaging timing of the first CCD camera 51 and the second CCD camera 52 so as to sequentially image the tooth portion 21.

本実施形態では、歯車2を回転機構3にセットし、まず、歯車2の歯部21の一つを第一CCDカメラ51と第二CCDカメラ52とで撮像する。これらカメラ51,52で撮像された歯部21のシルエット画像は、図1の円内に示すように、歯部21の軸方向端面と側面とが現れるように撮像され、歯部21の軸方向端面と側面とのエッジ部分が輪郭として現れた状態になる。画像処理手段7は、これら画像を基準画像として記憶部に記憶する。   In the present embodiment, the gear 2 is set on the rotation mechanism 3, and first, one of the tooth portions 21 of the gear 2 is imaged by the first CCD camera 51 and the second CCD camera 52. The silhouette images of the tooth portion 21 captured by these cameras 51 and 52 are captured so that the axial end face and the side surface of the tooth portion 21 appear as shown in the circle of FIG. The edge portion between the end surface and the side surface appears as a contour. The image processing means 7 stores these images as reference images in the storage unit.

そして、検知センサ8の検知結果に基づいて、順次、隣接する歯部21を第一CCDカメラ51と第二CCDカメラ52とで同様に撮像していく。これらの画像も画像処理手段7の記憶部に記憶させる。   Based on the detection result of the detection sensor 8, the adjacent tooth portions 21 are sequentially imaged in the same manner by the first CCD camera 51 and the second CCD camera 52. These images are also stored in the storage unit of the image processing means 7.

画像処理手段7は、記憶部から基準画像とその後に撮像した他の歯部の撮像画像の一つを読み出し、画像処理部において、撮像画像フレーム中で対象歯部をパターンサーチし、歯部21の位置を合わせた後、基準画像との差分画像を求め、その差分画像において差異のある部位の粒子面積を求める。   The image processing means 7 reads out the reference image and one of the captured images of the other teeth captured thereafter from the storage unit, and the image processing unit pattern-searches the target tooth in the captured image frame, and the tooth 21 Then, a difference image from the reference image is obtained, and a particle area of a part having a difference in the difference image is obtained.

そして、判定部において、この差異のある部位の粒子面積が所定の値より大きい場合には欠陥であると判定し、所定の値以下の場合には、欠陥でないと判定し、欠陥の検査処理が終了する。   Then, in the determination unit, when the particle area of the part having the difference is larger than a predetermined value, it is determined as a defect. When the particle area is equal to or smaller than the predetermined value, it is determined as not a defect, and the defect inspection process is performed. finish.

このときの判定は、最初の画像である基準画像に欠けやバリがある場合には、残り歯部の画像に一つでも正常なものがあれば、基準画像と不一致となるので、その歯車は欠陥であると判定する。   The determination at this time is that the reference image, which is the first image, is missing or burred, and if any one of the remaining tooth images is normal, it will not match the reference image. Judged as a defect.

本実施形態では、歯車の軸方向端面における歯部形成部分が緩やかに傾斜していて、平面となっていない場合でも、歯車の軸方向端面の歯部形成部分と歯部側面で形成されるエッジ部分の輪郭を撮像することができるので、このエッジ部分で発生した欠陥を確実に検出することができる。   In this embodiment, even if the tooth portion forming portion on the axial end surface of the gear is gently inclined and is not flat, the edge formed by the tooth forming portion and the tooth side surface of the axial end surface of the gear Since the contour of the part can be imaged, it is possible to reliably detect a defect generated at the edge part.

さらに、本実施形態では、一つのカメラで歯車2の歯部21の手前側エッジ部分と奥側エッジ部分を撮像でき、しかも、第一CCDカメラ51と第二CCDカメラ52とで左右のエッジ部分を同時に撮像できる。その結果、本実施形態の外観検査装置によれば、歯車2を1回転させるだけで歯車2の全ての歯部21の全てのエッジ部分に対して欠陥を検査できるので、高速に欠陥の検査が行える。   Further, in the present embodiment, the front edge portion and the back edge portion of the tooth portion 21 of the gear 2 can be imaged with one camera, and the left and right edge portions are captured by the first CCD camera 51 and the second CCD camera 52. Can be imaged simultaneously. As a result, according to the appearance inspection apparatus of the present embodiment, the defect can be inspected for all the edge portions of all the tooth portions 21 of the gear 2 only by rotating the gear 2 once, so that the defect can be inspected at high speed. Yes.

また、本実施形態の外観検査装置は、第一偏光フィルタ61と第二偏光フィルタ62とを設けている。透過照明装置4から照射された光は、特定振動方向の光波のみが第一偏光フィルタ61を通過する。そして、第一偏光フィルタ61を通過した光波は、歯車2の側面に当たって乱反射しても、第二偏光フィルタ62は、第一偏光フィルタ61と振動方向が同方向の光波のみを通過させるので、乱反射した光波のほとんどは第二偏光フィルタ62でカットされる。その結果、第一CCDカメラ51と第二CCDカメラ52では、側面の乱反射成分が低減された画像を撮像できるので、撮像した画像はコントラストが良くなり、画像には歯車2の端面と側面とにより形成されるエッジ部分の輪郭が確実に現れる。   In addition, the appearance inspection apparatus of the present embodiment includes a first polarizing filter 61 and a second polarizing filter 62. As for the light emitted from the transmission illumination device 4, only the light wave in the specific vibration direction passes through the first polarizing filter 61. Even if the light wave that has passed through the first polarizing filter 61 hits the side surface of the gear 2 and is irregularly reflected, the second polarizing filter 62 allows only the light wave having the same vibration direction as that of the first polarizing filter 61 to pass. Most of the light wave is cut by the second polarizing filter 62. As a result, since the first CCD camera 51 and the second CCD camera 52 can capture an image with reduced diffuse reflection components on the side surfaces, the captured image has a good contrast. The contour of the edge portion to be formed surely appears.

本実施形態の外観検査装置によれば、歯部の軸方向端面が傾斜した面であるために、従来では、欠陥部分と良好部分とのコントラストが取れず、検査できなかった歯車であっても、図4の点線で示す円内のエッジ部分の欠けや、図5の点線で示す円内のエッジ部分のバリなどの欠陥を良好部分とコントラスト良く判別できる。   According to the appearance inspection apparatus of the present embodiment, since the axial end face of the tooth portion is an inclined surface, conventionally, even a gear that could not be inspected because the contrast between the defective portion and the good portion could not be taken. 4, defects such as chipping of the edge portion in the circle indicated by the dotted line in FIG. 4 and burrs in the edge portion in the circle indicated by the dotted line in FIG. 5 can be distinguished from the good portion with good contrast.

本発明の外観検査装置は、歯車など、表面に平面でない面を有する被検査体の面と面とで形成される角部に発生した欠陥の検査に好適である。   The appearance inspection apparatus according to the present invention is suitable for inspecting defects generated at corners formed by surfaces of an object to be inspected having a non-planar surface such as a gear.

本発明の外観検査装置の全体を示す概略構成図である。It is a schematic structure figure showing the whole appearance inspection device of the present invention. 本発明の外観検査装置における歯車と回転機構との位置関係を示す説明図である。It is explanatory drawing which shows the positional relationship of the gearwheel and rotation mechanism in the external appearance inspection apparatus of this invention. 本発明の外観検査装置における歯車とCCDカメラ及び照明装置との位置関係を示す説明図である。It is explanatory drawing which shows the positional relationship of the gearwheel in the external appearance inspection apparatus of this invention, a CCD camera, and an illuminating device. 歯車の歯部におけるエッジ部分に欠けが発生した状態を示す撮像画像である。It is a picked-up image which shows the state which the chip | tip generate | occur | produced in the edge part in the tooth | gear part of a gearwheel. 歯車の歯部におけるエッジ部分にバリが発生した状態を示す撮像画像である。It is a captured image which shows the state where the burr | flash generate | occur | produced in the edge part in the tooth | gear part of a gearwheel.

符号の説明Explanation of symbols

1 外観検査装置
2 歯車 21 歯部 22 歯車本体 23 貫通孔 24 筒部
3 回転機構
31 回転用ローラ 32 伝達ローラ 33 支持ローラ
4 透過照明装置
51 第一CCDカメラ(撮像手段) 52 第二CCDカメラ(撮像手段)
61 第一偏光フィルタ 62 第二偏光フィルタ
7 画像処理手段 8 検知センサ
1 Visual inspection device
2 Gear 21 Tooth 22 Gear body 23 Through hole 24 Tube
3 Rotating mechanism
31 Rotating roller 32 Transmission roller 33 Support roller
4 Transmitted illumination device
51 First CCD camera (imaging means) 52 Second CCD camera (imaging means)
61 First polarizing filter 62 Second polarizing filter
7 Image processing means 8 Detection sensor

Claims (4)

複数の面で表面が形成された被検査体に、光を照射する照明手段と、
被検査体の表面のうち平面ではない面の一部が表面形状に沿った輪郭として現れて撮像される位置で、被検査体を撮像する撮像手段と、
撮像手段で撮像した撮像画像を画像処理して、被検査体の前記平面ではない面での欠陥を検出する画像処理手段と、
照明手段の発光部の近くに配置し、特定の振動方向の光波を通過させる第一偏光フィルタと、
撮像手段の受光部の近くに配置し、第一偏光フィルタと振動方向が同方向の光波を通過させる第二偏光フィルタとを備えることを特徴とする外観検査装置。
Illumination means for irradiating light to the object to be inspected having a plurality of surfaces, and
An imaging unit that images the inspection object at a position where a part of the surface of the inspection object that is not a plane appears as an outline along the surface shape and is imaged;
Image processing means for performing image processing on a picked-up image picked up by the image pickup means and detecting defects on a surface other than the flat surface of the inspection object;
A first polarizing filter disposed near the light emitting portion of the illumination means and passing a light wave in a specific vibration direction;
An appearance inspection apparatus comprising: a first polarizing filter and a second polarizing filter that is disposed near a light receiving unit of an imaging unit and transmits a light wave having the same vibration direction.
被検査体が歯車であり、歯車は、軸方向端面における歯部形成部分が平面となっておらず、
照明手段を、被検査体の一方の軸方向端面と対向するように配置するとともに、
撮像手段は、撮像手段の光軸が被検査体の軸方向に対して鋭角になるように被検査体の他方の軸方向端面側に配置して、
被検査体の軸方向端面の歯部形成部分と歯部側面で形成される角部の欠陥を検出することを特徴とする請求項1に記載の外観検査装置。
The object to be inspected is a gear, and in the gear, the tooth portion forming portion on the axial end surface is not flat,
While arranging the illumination means so as to face one axial end face of the object to be inspected,
The imaging means is arranged on the other axial end face side of the inspection object so that the optical axis of the imaging means becomes an acute angle with respect to the axial direction of the inspection object,
The appearance inspection apparatus according to claim 1, wherein a defect in a corner portion formed by a tooth portion forming portion and a tooth side surface of an end surface in the axial direction of the inspection object is detected.
歯車の一つの歯部において、歯部先端部を通る軸方向と平行な線に対して対称となるように二つの撮像手段を配置するとともに、照明手段の発光部の近くに特定の振動方向の光波を通過させる第一偏向フィルタを配置し、各撮像手段の受光部の近くに、第一偏向フィルタと振動方向が同方向の光波を通過させる第二偏向フィルタを配置していることを特徴とする請求項2に記載の外観検査装置。   In one tooth portion of the gear, the two imaging means are arranged so as to be symmetric with respect to a line parallel to the axial direction passing through the tip portion of the tooth portion, and in a specific vibration direction near the light emitting portion of the illumination means. A first deflection filter that allows light waves to pass through is disposed, and a second deflection filter that allows light waves having the same vibration direction as that of the first deflection filter to be disposed near the light receiving portion of each imaging means. The visual inspection apparatus according to claim 2. 画像処理手段は、撮像手段で撮像した最初の画像を基準画像とし、その後に撮像した画像を基準画像と比較して欠陥の有無の判定を行うことを特徴とする請求項1から請求項3の何れかに記載の外観検査装置。   4. The image processing unit according to claim 1, wherein the first image picked up by the image pickup unit is used as a reference image, and the image picked up thereafter is compared with the reference image to determine the presence / absence of a defect. An appearance inspection apparatus according to any one of the above.
JP2006205096A 2006-07-27 2006-07-27 Visual inspection device Pending JP2008032487A (en)

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Cited By (4)

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KR101210674B1 (en) 2010-07-14 2012-12-10 씨씨에스 가부시키가이샤 Light irradiating device and light source adjusting method
JP2016070732A (en) * 2014-09-29 2016-05-09 株式会社Screenホールディングス Inspection device and inspection method
JP2018072165A (en) * 2016-10-30 2018-05-10 ジヤトコ株式会社 Remaining mill scale detection method and detection device
JP2019060628A (en) * 2017-09-25 2019-04-18 株式会社Screenホールディングス Inspection device and inspection method

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101210674B1 (en) 2010-07-14 2012-12-10 씨씨에스 가부시키가이샤 Light irradiating device and light source adjusting method
JP2016070732A (en) * 2014-09-29 2016-05-09 株式会社Screenホールディングス Inspection device and inspection method
KR20170042337A (en) * 2014-09-29 2017-04-18 가부시키가이샤 스크린 홀딩스 Inspection device and inspection method
KR101951576B1 (en) 2014-09-29 2019-02-22 가부시키가이샤 스크린 홀딩스 Inspection device and inspection method
US10613037B2 (en) 2014-09-29 2020-04-07 SCREEN Holdings Co., Ltd. Inspection apparatus and inspection method
JP2018072165A (en) * 2016-10-30 2018-05-10 ジヤトコ株式会社 Remaining mill scale detection method and detection device
JP2019060628A (en) * 2017-09-25 2019-04-18 株式会社Screenホールディングス Inspection device and inspection method
US11175240B2 (en) 2017-09-25 2021-11-16 SCREEN Holdings Co., Ltd. Inspection apparatus and inspection method

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