JP2008030174A - Holding structure of lower chuck pad - Google Patents

Holding structure of lower chuck pad Download PDF

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JP2008030174A
JP2008030174A JP2006208341A JP2006208341A JP2008030174A JP 2008030174 A JP2008030174 A JP 2008030174A JP 2006208341 A JP2006208341 A JP 2006208341A JP 2006208341 A JP2006208341 A JP 2006208341A JP 2008030174 A JP2008030174 A JP 2008030174A
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film
lower chuck
holding
chuck pad
pad
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JP4861090B2 (en
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Keisuke Haneda
圭助 羽田
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YUKOSYOKAI CO Ltd
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YUKOSYOKAI CO Ltd
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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a holding structure of a lower chuck pad without requiring the cutting of a bridge for connecting an inside part and an outside part after adhering the bridge to a chuck face, even in the holding structure of the lower chuck pad having a structure for separating the inside part from the outside part in a pattern structure of an air transmission hole. <P>SOLUTION: In this structure, a peel film is formed on an adhesive layer of the lower chuck pad having the air transmission hole 41 passing through front and rear faces and the adhesive layer on one face. A holding film 7 having a fine adhesive layer 71 via a protective film 6 is formed on the other face of the lower chuck pad having a structure separated into two divided parts P1, P2 or more in the pattern structure of the air transmission hole 41. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明はロアチャックパッドの保持構造、さらに詳細にはウエハを研磨するに際して前記ウエハを吸引保持する真空チャック装置に、前記ウエハと前記真空チャック装置の真空チャック面との間に介装されるロアチャックパッドの保持構造に関する。   The present invention relates to a lower chuck pad holding structure, and more particularly, to a vacuum chuck device for sucking and holding the wafer when polishing the wafer, and a lower chuck interposed between the wafer and the vacuum chuck surface of the vacuum chuck device. The present invention relates to a chuck pad holding structure.

たとえばウエハのエッジを研磨するに際しては、図６に示すように円筒状に捲回され、かつ回転する研磨布などの研磨パッド１に、ウエハ２のエッジ２１を回転させて接触させて研磨することが行われている。前記ウエハ２を保持し、回転させるチャック装置には、ウエハ２を吸引することによりチャック面３に吸着させ保持する真空チャック装置が知られている。前述のチャック面３は、たとえば特開平９−９２７１０号に開示されているように多孔質板あるいは空気透過穴が形成された金属板が使用されており、この多孔あるいは穴を介して空気を吸引することによりウエハ２をチャック面３に保持するようになっている。   For example, when the edge of the wafer is polished, the edge 21 of the wafer 2 is rotated and brought into contact with a polishing pad 1 such as a polishing cloth which is wound in a cylindrical shape and rotates as shown in FIG. Has been done. As a chuck device that holds and rotates the wafer 2, a vacuum chuck device that sucks and holds the wafer 2 on the chuck surface 3 is known. For example, as disclosed in Japanese Patent Laid-Open No. 9-92710, the chuck surface 3 is a porous plate or a metal plate in which air-permeable holes are formed. Air is sucked through the holes or holes. By doing so, the wafer 2 is held on the chuck surface 3.

このようにウエハ２をチャック面３に保持するに際しては、上述の文献及び特開平９−２７２０５４号に記載されているように、弾性のあるロアチャックパッド４を介して前記ウエハ２をチャック面３に保持することが行われている。   When the wafer 2 is held on the chuck surface 3 as described above, the wafer 2 is held on the chuck surface 3 via the elastic lower chuck pad 4 as described in the above-mentioned document and Japanese Patent Laid-Open No. 9-272054. It is done to hold on.

従来、このようなロアチャックパッド４は、図７（ａ）、（ｂ）に示すように、所定のパターン状に空気透過穴４１が形成されたロアチャックパッド本体４０のチャック面３側の表面に粘着層４２が設けられた構造になっている。そして前記粘着層４２に、剥離紙５を貼着した保持構造で前記ロアチャックパッド４を保存あるいは運搬するようになっている。   Conventionally, as shown in FIGS. 7A and 7B, such a lower chuck pad 4 has a surface on the chuck surface 3 side of a lower chuck pad main body 40 in which air permeable holes 41 are formed in a predetermined pattern. The adhesive layer 42 is provided in the structure. The lower chuck pad 4 is stored or transported with a holding structure in which the release paper 5 is adhered to the adhesive layer 42.

前記ロアチャックパッド４を使用するに際しては、前記剥離紙５を剥離したのち、チャック面３に前記粘着層４２により接着させる。この際、前記空気透過穴４１のパターン構造が円形帯状のように、ロアチャックパッド４のたとえば内側部分Ｐ１と外側部分Ｐ２が離間している場合、すなわちロアチャックパッド４が２以上の部分に分割されている場合には、前記パターン構造が崩れないように、前記分割部分Ｐ１、Ｐ２（前記内側部分と外側部分）を接続するブリッジ４３が設けられ、一体化されている。   When using the lower chuck pad 4, the release paper 5 is peeled off and then adhered to the chuck surface 3 by the adhesive layer 42. At this time, when the pattern structure of the air permeable hole 41 is a circular band, for example, the inner portion P1 and the outer portion P2 of the lower chuck pad 4 are separated, that is, the lower chuck pad 4 is divided into two or more portions. In such a case, a bridge 43 that connects the divided portions P1 and P2 (the inner portion and the outer portion) is provided and integrated so that the pattern structure does not collapse.

したがって、前記ロアチャックパッド４をチャック面３に貼着した後、図８に示すように前記ブリッジ４４をハンドワークで切除する必要があった。
特開平９−９２７１０号公報 特開平９-２７２０５４号公報 Therefore, after the lower chuck pad 4 is attached to the chuck surface 3, it is necessary to cut the bridge 44 by hand work as shown in FIG.
JP-A-9-92710 Japanese Patent Laid-Open No. 9-272054

本発明は上述の課題を解決するためなされたものであり、空気透過穴のパターン構造に内側部分と外側部分を離間する構造を有するロアチャックパッドの保持構造であっても、前記内側部分と外側部分を接続するブリッジをチャック面に貼着した後切除する必要のないロアチャックパッドの保持構造を提供することを目的とする。   The present invention has been made to solve the above-described problems. Even if the lower chuck pad holding structure has a structure in which the inner portion and the outer portion are separated from each other in the pattern structure of the air permeable hole, the inner portion and the outer portion are arranged. It is an object of the present invention to provide a lower chuck pad holding structure that does not need to be cut off after a bridge for connecting portions is attached to a chuck surface.

上記課題を解決するため、本発明によるロアチャックパッドの保持構造は、表裏面を貫通する空気透過穴が設けられ、かつ一方の面に粘着層が設けられたロアチャックパッドの前記粘着層に剥離フィルムが設けられたロアチャックパッドの保持構造において、前記空気透過穴のパターン構造が２以上の分割部分に分離された構造を有するロアチャックパッドの他方の面に保護フィルムを介して微粘着層を備えた保持フィルムを設けたことを特徴とする。   In order to solve the above problems, the lower chuck pad holding structure according to the present invention is peeled off from the adhesive layer of the lower chuck pad provided with an air permeable hole penetrating the front and back surfaces and having an adhesive layer on one surface. In the holding structure of the lower chuck pad provided with the film, a fine adhesion layer is provided on the other surface of the lower chuck pad having a structure in which the pattern structure of the air permeable hole is separated into two or more divided portions through a protective film. The holding film provided is provided.

本発明によれば、空気透過穴を備えたロアチャックパッドの他方の面に保護フィルムを介して微粘着層を備えた保持フィルムを設けている。このため前記保護フィルムを剥離したのち、空気透過穴のパターン構造を保持するように、前記ロアチャックパッドの他方の面を一時的に微粘着層に貼着し、一方の面の剥離フィルムを剥離紙、チャック面に貼着し、その後前記保持フィルムを剥離することによって、チャック面にロアチャックパッドを固定することができる。このため、前記空気透過穴のパターン構造に内側部分と外側部分を離間する構造を有する場合も、ブリッジを設ける必要がなく、ブリッジを切除する工程を省くことが可能となる。   According to the present invention, the holding film provided with the slightly adhesive layer is provided on the other surface of the lower chuck pad provided with the air permeable hole via the protective film. For this reason, after peeling off the protective film, the other surface of the lower chuck pad is temporarily attached to the slightly adhesive layer so that the pattern structure of the air permeable holes is maintained, and the peeling film on one surface is peeled off. The lower chuck pad can be fixed to the chuck surface by adhering to paper and the chuck surface and then peeling the holding film. For this reason, even when the pattern structure of the air permeable hole has a structure in which the inner part and the outer part are separated from each other, it is not necessary to provide a bridge, and the step of cutting the bridge can be omitted.

本発明によるロアチャックパッドの保持構造は、表裏面を貫通する空気透過穴が設けられ、かつ一方の面に粘着層が設けられたロアチャックパッドの前記粘着層に剥離フィルムが設けられたロアチャックパッドの保持構造において、前記空気透過穴のパターン構造が２以上の分割部分に分離された構造を有するロアチャックパッドの他方の面に保護フィルムを介して微粘着層を備えた保持フィルムを設けたことを特徴とする。   The lower chuck pad holding structure according to the present invention has a lower chuck in which an air permeable hole penetrating the front and back surfaces is provided and a release film is provided on the adhesive layer of the lower chuck pad provided with an adhesive layer on one surface. In the pad holding structure, a holding film provided with a slightly adhesive layer is provided on the other surface of the lower chuck pad having a structure in which the pattern structure of the air permeable holes is separated into two or more divided portions via a protective film. It is characterized by that.

本発明による好ましい形態にあっては、前記剥離フィルムは、前記ロアチャックパッドより大きな面積を有し、前記保持フィルムは前記剥離フィルムの前記ロアチャックパッドが設けられていない余白部分に貼着されていることを特徴とする。   In a preferred embodiment according to the present invention, the release film has a larger area than the lower chuck pad, and the holding film is attached to a blank portion of the release film where the lower chuck pad is not provided. It is characterized by being.

さらに本発明による好ましい他の形態では、前記保持フィルムの一辺は前記剥離フィルムより突出した突出部を備えていることを特徴とする。   Furthermore, in another preferred embodiment of the present invention, one side of the holding film is provided with a protruding portion protruding from the release film.

また本発明による好ましい他の形態では、前記剥離フィルムの一辺の余白部分は他の余白部分より大きな幅を備えた固定部分を有していることを特徴とし、前記保持フィルムの一辺は剥離フィルムの余白部分から前記剥離フィルムの所定の一辺を回り込んで、剥離フィルムの裏側に達し、固定部分を形成していることを特徴とする。   In another preferred embodiment according to the present invention, a margin part of one side of the release film has a fixed part having a width larger than that of the other margin part, and one side of the holding film is a part of the release film. A predetermined portion of the release film is wrapped around from the blank portion to reach the back side of the release film, thereby forming a fixed portion.

本発明による好ましい、他の形態では、前記保持フィルムは保持フィルム本体と微粘着層とを有し、前記保持フィルム本体はポリエステルフィルムであり、前記微粘着層はアクリル系粘着剤である。   In another preferred embodiment of the present invention, the holding film has a holding film body and a slightly adhesive layer, the holding film body is a polyester film, and the slightly adhesive layer is an acrylic adhesive.

図１は本発明によって保持されるロアチャックパッドの平面図、図２は本発明のロアチャックパッドの保持構造の平面図、図３は断面図であるが、これらの図より明らかなように、ロアチャックパッド４は、この実施例では、一部の円弧部分が切りかかれた截弧円形状であり、所定のパターン構造を有する空気透過穴４１が形成されている。この実施例において、前記パターン構造は、２つの円形帯状の空気透過穴４１１、４１２と外側の円形帯状の空気透過穴４１１を直線帯状に接続する中央部の空気透過穴４１３が設けられている。そして従来のようにブリッジ４３を備えていない。このため、ロアチャックパッド４は相互に一体化されておらず、５つの分割部分Ｐ１，Ｐ２，Ｐ３，Ｐ４、Ｐ５に分離されている。   FIG. 1 is a plan view of a lower chuck pad held by the present invention, FIG. 2 is a plan view of a lower chuck pad holding structure of the present invention, and FIG. 3 is a cross-sectional view. In this embodiment, the lower chuck pad 4 has a circular arc shape in which a part of the arc portion is cut, and is formed with an air transmission hole 41 having a predetermined pattern structure. In this embodiment, the pattern structure is provided with a central air transmission hole 413 that connects two circular belt-shaped air transmission holes 411 and 412 and an outer circular belt-shaped air transmission hole 411 in a straight band shape. The bridge 43 is not provided as in the prior art. For this reason, the lower chuck pad 4 is not integrated with each other and is divided into five divided portions P1, P2, P3, P4, and P5.

図３に示すように、本発明によるロアチャックパッドの保持構造によれば、前記ロアチャックパッド本体４０の下部にはロアチャックパッド４の下面に設けられた粘着層４２を介して剥離フィルム５が貼着されている。この剥離フィルム５としては、たとえば剥離処理をされたポリエステルフィルム、剥離紙等を使用することが可能である。   As shown in FIG. 3, according to the lower chuck pad holding structure according to the present invention, the release film 5 is disposed under the lower chuck pad body 40 through an adhesive layer 42 provided on the lower surface of the lower chuck pad 4. It is stuck. As the release film 5, for example, a release-treated polyester film, release paper, or the like can be used.

一方、ロアチャックパッド４の上面には保護フィルム６が設けられているとともに、さらに保護フィルム６上に保持フィルム本体７０に微粘着層７１を備えた保持フィルム７が接続されている。   On the other hand, a protective film 6 is provided on the upper surface of the lower chuck pad 4, and a holding film 7 having a slightly adhesive layer 71 is connected to a holding film body 70 on the protective film 6.

この実施例では、前記剥離フィルム５は、ロアチャックパッド４より大きな面積を有し、前記ロアチャックパッド４はその中央部に設けられている。このロアチャックパッド４を覆うように保護フィルム６が設けられているが、この保護フィルム６の一辺は、前記剥離フィルム５より突出して突出部分６１を形成している。   In this embodiment, the release film 5 has a larger area than the lower chuck pad 4, and the lower chuck pad 4 is provided at the center thereof. A protective film 6 is provided so as to cover the lower chuck pad 4, but one side of the protective film 6 protrudes from the release film 5 to form a protruding portion 61.

この保護フィルム６に設けられる保持フィルム７は、図３に図１のＡ−Ａ断面図を示すように微粘着層７１を備えており、剥離フィルム５の前記ロアチャックパッド４が設けられていない余白部分５１に前記保持フィルム７が貼着されている。この図３（ａ）に示す実施例においては、保持フィルム５の一辺（この実施例では、前記突出部分６１が形成された辺と隣接する辺）の余白部分５１の幅Ｌは他の辺の幅Ｌ１に比較して大きく取ってあり、前記保持フィルム７と剥離フィルム５の接着幅が大きくなり、容易に剥離しない固定部分７２を形成するようになっている。   The holding film 7 provided on the protective film 6 is provided with a slightly adhesive layer 71 as shown in the AA sectional view of FIG. 1 in FIG. 3, and the lower chuck pad 4 of the release film 5 is not provided. The holding film 7 is stuck to the blank portion 51. In the embodiment shown in FIG. 3A, the width L of the blank portion 51 on one side of the holding film 5 (in this embodiment, the side adjacent to the side on which the protruding portion 61 is formed) is the width of the other side. The fixing width 72 is larger than the width L1, and the adhesive width between the holding film 7 and the release film 5 is increased, and a fixed portion 72 that does not easily peel off is formed.

また、図３（ｂ）に示す実施例では、前記保持フィルム７の一辺（この実施例では、前記突出部分６１が形成された辺と隣接する辺）は剥離フィルム５の余白部分５１から前記剥離フィルム５の所定の一辺５２を回り込んで、剥離フィルム５の裏側５３に達し、固定部分７２を形成している。この実施例によれば、前述の図３（ａ）の実施例に比較して固定部分７２は堅固に固着される。   In the embodiment shown in FIG. 3B, one side of the holding film 7 (in this embodiment, the side adjacent to the side where the protruding portion 61 is formed) is separated from the blank portion 51 of the release film 5. The film 5 wraps around a predetermined side 52 of the film 5 and reaches the back side 53 of the release film 5 to form a fixed portion 72. According to this embodiment, the fixing portion 72 is firmly fixed as compared with the embodiment of FIG.

前記保護フィルム６としては、前記保持フィルム７の微粘着層７１と強固に接着しないものを選択する。たとえば剥離処理をされたポリエステルフィルムなどを使用することができる。一方、保持フィルム本体７０としてとしては、同様にポリエステルフィルムを使用することができ、微粘着層７１としてはアクリル系粘着剤を使用することができる。この微粘着層７１は前記保護フィルム６及び剥離フィルム５と強固に接着せず、緩やかに粘着し、かつ容易に剥離可能なものであれば基本的にいかなるものでもよい。   As the protective film 6, a film that does not firmly adhere to the slightly adhesive layer 71 of the holding film 7 is selected. For example, a polyester film subjected to a peeling treatment can be used. On the other hand, as the holding film main body 70, a polyester film can be used similarly, and as the slightly adhesive layer 71, an acrylic adhesive can be used. The slight adhesive layer 71 may be basically any layer as long as it does not adhere firmly to the protective film 6 and the release film 5 but adheres gently and can be easily peeled off.

前記保持フィルム７は前述のように、剥離フィルム５とその余白部分５１で緩く貼着されており、かつ保護フィルム６が前記ロアチャックパッド４を覆っているため、直接ロアチャックパッド４と保持フィルム７の微粘着層７１が接触することはない。このため、前記微粘着層７１と長時間接触することによるロアチャックパッド４の劣化および前記ロアチャックパッド４と保持フィルム７の強固な接着を防止することができる。   As described above, the holding film 7 is loosely adhered to the release film 5 and its marginal part 51, and the protective film 6 covers the lower chuck pad 4. Therefore, the lower chuck pad 4 and the holding film are directly attached. No. 7 slightly adhesive layer 71 does not contact. For this reason, it is possible to prevent deterioration of the lower chuck pad 4 and strong adhesion between the lower chuck pad 4 and the holding film 7 due to contact with the fine adhesive layer 71 for a long time.

本発明によるロアチャックパッドをチャック面３に貼着する場合（図３（ｂ）の構造を例として説明するが、図３（ａ）の場合も同様である）、まず、図４及び図５に示すように前記保持フィルム７を前記固定部分７２の対向する辺７３から剥離させる（図４（ａ）及び図１参照）。このとき、保持フィルム７は固定部分７２によって剥離フィルム５に固定されているため、完全に剥離されることはなく、めくれるようになっている。   When the lower chuck pad according to the present invention is attached to the chuck surface 3 (the structure of FIG. 3B will be described as an example, the same applies to FIG. 3A). First, FIGS. As shown in FIG. 4, the holding film 7 is peeled from the opposite side 73 of the fixed portion 72 (see FIGS. 4A and 1). At this time, since the holding film 7 is fixed to the release film 5 by the fixing portion 72, the holding film 7 is not completely peeled off but is turned up.

その後、保護フィルム６の突出部分６１より保護フィルム６を剥離し（図４（ｂ））、除去した後、めくれ上がった保持フィルム７を再びロアチャックパッド４上に重ね合わせて前記ロアチャックパッド４を緩く粘着させる（図４（ｃ））。上述の保持フィルム７のロアチャックパッド４への積層は、前述のように前記保持フィルム７の端部が固定部分７２によって剥離フィルム５に固定されており、完全に分離されていないため、容易に行うことができる。   Thereafter, the protective film 6 is peeled off from the protruding portion 61 of the protective film 6 (FIG. 4 (b)), removed, and then the holding film 7 turned up is overlaid again on the lower chuck pad 4 and the lower chuck pad 4 is removed. Is loosely adhered (FIG. 4C). As described above, the holding film 7 is easily laminated on the lower chuck pad 4 because the end portion of the holding film 7 is fixed to the release film 5 by the fixing portion 72 and is not completely separated. It can be carried out.

さらに、剥離フィルム５を前記ロアチャックパッド４より剥離させてめくり上げ（図４（ｄ）、前記粘着パッド４の粘着層４２をチャック面３に当接させて接着した後（図５（ａ））、前記保持フィルム７を剥離させることにより、ロアチャックパッド４をチャック面３に設置することが可能である（図５（ｂ））。   Further, the release film 5 is peeled off from the lower chuck pad 4 and turned up (FIG. 4D), after the adhesive layer 42 of the adhesive pad 4 is brought into contact with and adhered to the chuck surface 3 (FIG. 5A). ), The lower chuck pad 4 can be placed on the chuck surface 3 by peeling the holding film 7 (FIG. 5B).

少なくとも前記保持フィルム７は透明であるのが好ましい。保持フィルム７が透明であると、チャック面３へロアチャックパッド４を移し替える際、透明フィルムより転写位置が視認でき、位置決めが容易になるからである。他の剥離フィルム、保護フィルムは、必ずしも透明であることはないが、もちろん透明であってもよい。   At least the holding film 7 is preferably transparent. This is because, when the holding film 7 is transparent, the transfer position can be visually recognized from the transparent film when the lower chuck pad 4 is transferred to the chuck surface 3, and positioning becomes easy. Other release films and protective films are not necessarily transparent, but may of course be transparent.

以上、本発明によれば、空気透過穴を備えたロアチャックパッドの他方の面に保護フィルムを介して微粘着層を備えた保持フィルムを設けている。このため前記保護フィルムを剥離したのち、空気透過穴のパターン構造を保持するように、前記ロアチャックパッドの他方の面を一時的に微粘着層に貼着し、一方の面の剥離フィルムを剥離紙、チャック面に貼着し、その後前記保持フィルムを剥離することによって、チャック面にロアチャックパッドを固定することができる。このため、前記空気透過穴のパターン構造に内側部分と外側部分を離間する構造を有する場合も、ブリッジを設ける必要がなく、ブリッジを切除する工程を省くことが可能となる。   As described above, according to the present invention, the holding film including the slightly adhesive layer is provided on the other surface of the lower chuck pad including the air permeable hole via the protective film. For this reason, after peeling off the protective film, the other surface of the lower chuck pad is temporarily attached to the slightly adhesive layer so that the pattern structure of the air permeable holes is maintained, and the peeling film on one surface is peeled off. The lower chuck pad can be fixed to the chuck surface by adhering to paper and the chuck surface and then peeling the holding film. For this reason, even when the pattern structure of the air permeable hole has a structure in which the inner part and the outer part are separated from each other, it is not necessary to provide a bridge, and the step of cutting the bridge can be omitted.

本発明によって保持するロアチャックパッドの平面図。The top view of the lower chuck pad hold | maintained by this invention. 本発明によるロアチャックパッドの保持構造の一実施例の平面図。The top view of one Example of the holding structure of the lower chuck pad by this invention. 本発明によるロアチャックパッドの保持構造の一実施例の断面図。Sectional drawing of one Example of the holding structure of the lower chuck | zipper pad by this invention. 本発明のロアチャックパッドの保持構造を使用する場合の説明図。Explanatory drawing in the case of using the holding structure of the lower chuck pad of this invention. 本発明のロアチャックパッドの保持構造を使用する場合の説明図。Explanatory drawing in the case of using the holding structure of the lower chuck pad of this invention. ロアチャックパッドの使用状態を説明する説明図。Explanatory drawing explaining the use condition of a lower chuck pad. 従来のロアチャックパッドの保持構造の平面図及び断面図。The top view and sectional drawing of the holding structure of the conventional lower chuck pad. 従来のロアチャックパッドをチャック面に設ける方法の説明図。Explanatory drawing of the method of providing the conventional lower chuck pad on a chuck | zipper surface.

符号の説明Explanation of symbols

１ 研磨パッド
２ ウエハ
３ チャック面
４ ロアチャックパッド
４０ ロアチャックパッド本体
４１ 空気透過穴
４２ 粘着層
４３ ブリッジ
５ 剥離フィルム（紙）
５１ 余白部分
６ 保護フィルム
６１ 突出部分
７ 保持フィルム
７０ 保持フィルム本体
７１ 微粘着層
７２ 固定部分 DESCRIPTION OF SYMBOLS 1 Polishing pad 2 Wafer 3 Chuck surface 4 Lower chuck pad 40 Lower chuck pad main body 41 Air permeation hole 42 Adhesive layer 43 Bridge 5 Release film (paper)
51 Blank portion 6 Protective film 61 Projecting portion 7 Holding film 70 Holding film body 71 Slight adhesive layer 72 Fixed portion

Claims (6)

表裏面を貫通する空気透過穴が設けられ、かつ一方の面に粘着層が設けられたロアチャックパッドの前記粘着層に剥離フィルムが設けられたロアチャックパッドの保持構造において、前記空気透過穴のパターン構造が２以上の分割部分に分離された構造を有するロアチャックパッドの他方の面に保護フィルムを介して微粘着層を備えた保持フィルムを設けたことを特徴とするロアチャックパッドの保持構造。 In the lower chuck pad holding structure in which an air permeable hole penetrating the front and back surfaces is provided, and a release film is provided on the adhesive layer of the lower chuck pad provided with an adhesive layer on one side, the air permeable hole Lower chuck pad holding structure, characterized in that a holding film having a slightly adhesive layer is provided on the other surface of the lower chuck pad having a structure in which the pattern structure is separated into two or more divided parts via a protective film . 前記剥離フィルムは、前記ロアチャックパッドより大きな面積を有し、前記保持フィルムは前記剥離フィルムの前記ロアチャックパッドが設けられていない余白部分に貼着されていることを特徴とする請求項１記載のロアチャックパッドの保持構造。 2. The release film has a larger area than the lower chuck pad, and the holding film is attached to a blank portion of the release film where the lower chuck pad is not provided. Lower chuck pad holding structure. 前記保護フィルムの一辺は前記剥離フィルムより突出した突出部を備えていることを特徴とする請求項１または２記載のロアチャックパッドの保持構造。 The lower chuck pad holding structure according to claim 1, wherein one side of the protective film includes a protruding portion protruding from the release film. 前記剥離フィルムの一辺の余白部分は他の余白部分より大きな幅を備えた固定部分を有していることを特徴とする請求項１から３記載のロアチャックパッドの保持構造。 4. The lower chuck pad holding structure according to claim 1, wherein a margin part on one side of the release film has a fixed part having a larger width than the other margin part. 前記保持フィルムの一辺は剥離フィルムの余白部分から前記剥離フィルムの所定の一辺を回り込んで、剥離フィルムの裏側に達し、固定部分を形成していることを特徴とする請求項１から３記載のいずれかのロアチャックパッドの保持構造。 The one side of the said holding film wraps around the predetermined | prescribed side of the said peeling film from the blank part of a peeling film, reaches the back side of a peeling film, and forms the fixed part. Any lower chuck pad holding structure. 前記保持フィルムは保持フィルム本体と微粘着層とを有し、前記保持フィルム本体はポリエステルフィルムであり、前記微粘着層はアクリル系粘着剤である請求項１から５記載のいずれかのロアチャックパッドの保持構造。 The lower chuck pad according to any one of claims 1 to 5, wherein the holding film has a holding film body and a slightly adhesive layer, the holding film body is a polyester film, and the slightly adhesive layer is an acrylic adhesive. Holding structure.
JP2006208341A 2006-07-31 2006-07-31 Lower chuck pad holding structure Expired - Fee Related JP4861090B2 (en)

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