JP2008028340A5 - - Google Patents
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- JP2008028340A5 JP2008028340A5 JP2006202380A JP2006202380A JP2008028340A5 JP 2008028340 A5 JP2008028340 A5 JP 2008028340A5 JP 2006202380 A JP2006202380 A JP 2006202380A JP 2006202380 A JP2006202380 A JP 2006202380A JP 2008028340 A5 JP2008028340 A5 JP 2008028340A5
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- storage
- operation check
- manufactured product
- manufacturing process
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000969 carrier Substances 0.000 claims 21
- 230000032258 transport Effects 0.000 claims 15
- 238000003860 storage Methods 0.000 claims 14
- 238000004519 manufacturing process Methods 0.000 claims 9
- 238000005259 measurement Methods 0.000 claims 5
- 238000000034 method Methods 0.000 claims 3
- 239000000428 dust Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000009826 distribution Methods 0.000 claims 1
Claims (5)
前記保管庫に保管されている前記非製造品のリアルタイムの在庫量を取得し、このリアルタイムの在庫量と予め登録されている前記保管庫の適正量とを比較し、この差分に基づいて前記非製造品の搬送先である前記保管庫の優先度を作成し、
前記作成された前記保管庫の前記優先度に基づいて事前に前記計測装置の近傍の前記保管庫に前記非製造品を前記キャリアによって搬送する、
ことを特徴とするキャリア搬送制御方法。 In the carrier transport control method of loading at least one non-manufactured product on a carrier and transporting it to a storage in the manufacturing process in order to perform an operation check of a process processing device arranged in the manufacturing process by computer processing,
A real-time inventory amount of the non-manufactured product stored in the storage is obtained, and the real-time inventory amount is compared with an appropriate amount stored in the storage in advance, and the non-production based on the difference Create a priority for the vault that is the transport destination for manufactured products,
The non-manufactured product is transported by the carrier to the storage in the vicinity of the measuring device in advance based on the priority of the created storage .
A carrier transport control method characterized by the above.
これら空きキャリアと前記動作チェックに必要な種類の前記非製造品を載せている前記キャリアとを前記予測された前記計測装置の近傍の前記保管庫に搬送する、
ことを特徴とする請求項１記載のキャリア搬送制御方法。 For transporting the non-manufactured product of the type necessary for the operation check by the carrier, select an empty carrier from the manufacturing process and the carrier carrying the non-manufactured product of the type necessary for the operation check. ,
Transport these empty carriers and the carrier carrying the non-manufactured product of the type necessary for the operation check to the storage in the vicinity of the predicted measuring device;
The carrier transport control method according to claim 1 .
これら検索された前記動作チェックに必要な複数種類の前記非製造品を前記予測された前記計測装置の近傍の前記保管庫に搬送し、
これと共に前記製造工程中から前記非製造品が積載されていない空きキャリアを検索し、当該空きキャリアを前記予測された前記計測装置の近傍の前記保管庫に搬送し、
前記空きキャリア内に前記動作チェックに必要な複数種類の前記非製造品を前記動作チェックの順序に従って載積する、
ことを特徴とする請求項１記載のキャリア搬送制御方法。 Search each arrangement position of the plurality of types of non-manufactured products necessary for the operation check from the plurality of types of non-manufactured products scattered in the manufacturing process
Transporting the plurality of types of non-manufactured products necessary for the operation check thus searched to the storage in the vicinity of the predicted measuring device,
At the same time, search for an empty carrier on which the non-manufactured product is not loaded from the manufacturing process, and transport the empty carrier to the storage in the vicinity of the predicted measuring device,
A plurality of types of non-manufactured products necessary for the operation check are loaded in the empty carrier according to the order of the operation check.
The carrier transport control method according to claim 1 .
前記計測装置は、前記動作チェックとして少なくとも膜厚測定又はダスト測定を行い、
少なくとも前記膜厚測定又は前記ダスト測定の前記動作チェックに必要な複数種類の前記半導体基板を前記動作チェックの順序に従って前記空きキャリア内に載積する、
ことを特徴とする請求項３記載のキャリア搬送制御方法。 The non-manufactured product has a semiconductor substrate,
The measuring device performs at least film thickness measurement or dust measurement as the operation check,
A plurality of types of the semiconductor substrates necessary for the operation check of at least the film thickness measurement or the dust measurement are loaded in the empty carrier according to the order of the operation check.
The carrier transport control method according to claim 3 .
前記保管庫に保管されている前記非製造品のリアルタイムの在庫量を取得し、このリアルタイムの在庫量と予め登録されている前記保管庫の適正量とを比較し、この差分に基づいて前記非製造品の搬送先である前記保管庫の優先度を作成する配分量算出部と、
前記作成された前記保管庫の前記優先度に基づいて事前に前記計測装置の近傍の前記保管庫に前記非製造品を前記キャリアによって搬送する搬送制御部と、
を具備することを特徴とするキャリア搬送制御装置。 A plurality of carriers are transported to a transport system provided between a plurality of process processing apparatuses arranged in a manufacturing process, and at least one type of non-manufactured product is loaded on the carrier to check the operation of the process processing apparatus. In the carrier transport control device that transports to the storage in the manufacturing process,
A real-time inventory amount of the non-manufactured product stored in the storage is obtained, and the real-time inventory amount is compared with an appropriate amount stored in the storage in advance, and the non-production based on the difference A distribution amount calculation unit for creating a priority of the storage that is a transport destination of the manufactured product;
A transport control unit that transports the non-manufactured product by the carrier to the storage in the vicinity of the measurement device in advance based on the priority of the created storage;
Carrier transport control apparatus characterized by comprising a.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006202380A JP4810344B2 (en) | 2006-07-25 | 2006-07-25 | Carrier transport control method and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006202380A JP4810344B2 (en) | 2006-07-25 | 2006-07-25 | Carrier transport control method and apparatus |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008028340A JP2008028340A (en) | 2008-02-07 |
| JP2008028340A5 true JP2008028340A5 (en) | 2009-09-10 |
| JP4810344B2 JP4810344B2 (en) | 2011-11-09 |
Family
ID=39118634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006202380A Expired - Fee Related JP4810344B2 (en) | 2006-07-25 | 2006-07-25 | Carrier transport control method and apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4810344B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5504880B2 (en) * | 2009-12-25 | 2014-05-28 | 凸版印刷株式会社 | Cassette transfer control method |
| CN102234017B (en) * | 2010-04-29 | 2015-03-04 | 达丰(上海)电脑有限公司 | Crown block system integrating multiple assembling output lines and erection method thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001176763A (en) * | 1999-12-14 | 2001-06-29 | Nec Corp | Method and system for automatic process for non-product wafer including product wafer, and record medium on which the method is recorded |
-
2006
- 2006-07-25 JP JP2006202380A patent/JP4810344B2/en not_active Expired - Fee Related
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