JP2008012420A5 - - Google Patents

Claims (8)

A cleaning apparatus that is installed in the middle of a transport path for transporting a cleaning object and that cleans the object to be cleaned while the object to be cleaned passes, and rotates and moves the object to be cleaned said maintaining liquid level at least a part of the site of the object to be cleaned is immersed storing a liquid, and a cleaning tank for immersing the moving object to be cleaned to the liquid, the cleaning tank vibrates biased A cleaning apparatus comprising: a vibrator to be vibrated, wherein the vibrator is energized to vibrate the washing tank to wash and rotate the object to be washed. A downstream moving path for guiding the object to be cleaned from the cleaning tank to the transport path;
The downstream moving passage has a portion that is positioned higher than the liquid level of the liquid, and a slope is formed between the portion and the connecting portion of the cleaning tank, and the vibrator passes through the cleaning tank. The cleaning apparatus according to claim 1, wherein vibration is transmitted or vibration of a vibrator different from the vibrator is transmitted to vibrate. An upstream moving path for guiding the object to be cleaned from the transport path to the cleaning tank;
The upstream movement passage has a portion that is higher than the liquid level of the liquid, and a slope is formed between the portion and the connection portion of the cleaning tank, and the vibrator passes through the cleaning tank. The cleaning apparatus according to claim 1, wherein vibration is transmitted or vibration of a vibrator different from the vibrator is transmitted. At least one of the cleaning tank according to any one of claims 1 to 3, the downstream movement passage according to claim 2 or 3, and the upstream movement passage according to claim 3 , A cleaning apparatus having an array path for moving a plurality of objects to be cleaned in series.   The cleaning apparatus according to claim 4, wherein a plurality of the array paths are provided in parallel. The cleaning device according to claim 4 , wherein the array path is configured to meander the object to be cleaned.   The object to be cleaned has a disc shape, and the cleaning tank is configured such that the object to be cleaned rotates and moves with its peripheral edge contacting the bottom of the cleaning tank, and is stored in the cleaning tank. The cleaning apparatus according to claim 1, wherein the liquid level is set to be equal to or larger than a radius of the object to be cleaned and less than a diameter, and the vibrator is fixed to a side surface of the cleaning tank. .   2. A circulation path for circulating the liquid stored in the cleaning tank, a circulation pump provided in the circulation path for circulating the liquid, and a filter for filtering at least a part of the circulating liquid. The cleaning apparatus according to any one of 1 to 7.