JP2007523353A - Method and apparatus for control by shadow measurement - Google Patents

Method and apparatus for control by shadow measurement Download PDF

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JP2007523353A
JP2007523353A JP2007500270A JP2007500270A JP2007523353A JP 2007523353 A JP2007523353 A JP 2007523353A JP 2007500270 A JP2007500270 A JP 2007500270A JP 2007500270 A JP2007500270 A JP 2007500270A JP 2007523353 A JP2007523353 A JP 2007523353A
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monitoring device
arm
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receiver
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JP4869219B2 (en
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クリストフ シャノ，
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コミッサリア タ レネルジー アトミーク
コンパニ ジェネラル デ マティエール ニュークリエール
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N2021/8411—Application to online plant, process monitoring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/02—Mechanical
    • G01N2201/021—Special mounting in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/08—Optical fibres; light guides

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  • General Health & Medical Sciences (AREA)
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  • Length Measuring Devices By Optical Means (AREA)
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  • Paper (AREA)
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  • Lining Or Joining Of Plastics Or The Like (AREA)

Abstract

The device has a light emitter (5) and a light receiver (6) placed perpendicular to main path of the light. The emitter and the receiver are held at the ends of an arm (8) that is bent for passing tubes (2, 3). The arm is connected to a support unit (9) by double hinges (13, 14) whose axes are perpendicular to direction of the main path, where movements of the hinges are controlled by motors. An independent claim is also included for a method of inspecting welded pipe fitting.

Description

本発明の技術分野は計測におけるモニタリングに関するものであり、本発明の主題は、部品の接続、例えば端と端とを繋げるチューブの接続に適用可能な陰影測定法（ｓｈａｄｏｗｓｃｏｐｙ ｍｅｔｈｏｄ）及び装置である。他の適用形態も勿論可能である。
モニタリングは、観察対象の部品の位置確認を目的として機械加工に先行して実行することができるか、又は、例えば溶接ビードの形状の観点から、治具の正しい位置及び動作の精度を確認するために、加工中に実行することができる。 The technical field of the present invention relates to monitoring in measurement, and the subject of the present invention is a shadowcopy method and apparatus applicable to the connection of parts, for example the connection of tubes connecting end to end. Other applications are of course possible.
The monitoring can be performed prior to machining for the purpose of confirming the position of the part to be observed, or to confirm the correct position of the jig and the accuracy of operation, for example, in terms of the shape of the weld bead In addition, it can be performed during machining.

表面に物理的に触れることなく表面を計測モニタリングする公知の方法では、レーザビームを表面に照射し、カメラの画像に収集されたものから交差線の位置を読み取る。しかしながら、非常に広く使用されるこの方法には幾つかの制限があり、特に、大量の光が溶融バスにより生成されるためにレーザ光が不明瞭になる場合がある溶接方法を使用せざるを得ない。更に、壁同士の間で起こる反射、及び反射光の密度の変化によって、凹んだ表面を読み取ることが難しい。
別の技術では、モニタリング対象のシーンの個別照明を採用せず、溶融バスによって生成される光を使用してシーンの画像を認識する。この技術は明らかに溶接法に制限される。結果の精度は、部品の性質及び方法のパラメータの性質によって変化し、また比較的安定した状態に維持されなければならない。観察条件の選択には細心の注意を必要とすることが多く、場合によっては良好な結果を得ることが不可能である。これらの公知の技術のいずれにおいても、欠点は、溶融バス、特に本方法によって生じるプラズマ（又は炎）、或いは熱源によって高温になる治具によって生成される、非常に大きな強度の光である。熱源の例としては、ＴＩＧ（タングステン不活性ガス）溶接法に用いられる電極の先端、ＭＩＧ（金属不活性ガス）溶接法、ＭＡＧ（金属活性ガス）溶接法に用いられる溶融ワイヤ又はロッドの端部、或いは被覆電極、並びに保護ガスを送入する赤く焼けたセラミックノズルの端部を挙げることができる。 A known method for measuring and monitoring a surface without physically touching the surface irradiates the surface with a laser beam and reads the position of the intersection line from what is collected in the camera image. However, this method, which is very widely used, has some limitations, especially the use of welding methods that can obscure the laser light due to the large amount of light produced by the melt bath. I don't get it. Furthermore, it is difficult to read the recessed surface due to reflection between the walls and changes in the density of the reflected light.
Another technique does not employ individual lighting of the monitored scene, but recognizes the scene image using the light generated by the melting bath. This technique is clearly limited to welding methods. The accuracy of the results varies with the nature of the parts and the nature of the process parameters and must be kept relatively stable. The selection of viewing conditions often requires careful attention and in some cases it is not possible to obtain good results. In any of these known techniques, the disadvantage is the very high intensity light produced by the melting bath, in particular the plasma (or flame) produced by the method, or a jig that is heated by a heat source. Examples of heat sources include the tip of an electrode used for TIG (tungsten inert gas) welding, the end of a molten wire or rod used for MIG (metal inert gas) welding, MAG (metal active gas) welding. Or, the end of a coated electrode and a red burned ceramic nozzle that feeds in protective gas.

本発明は別の技術、いわゆる陰影測定（ｓｈａｄｏｗｓｃｏｐｙ）に属し、この陰影測定では、モニタリング対象のシーンに対する単独照明を行ない、観察シーンの起伏を、カメラが記録する画像上に単独照明により生成される陰影によって推測する。従って、光は、モニタリング対象の表面に対する接線の方向に投影する。この技術は、検出器によって観測されず、且つ直接観察が不可能なアークプラズマの場合と同様に、非常に輝度の高い光源によって取り囲まれた不透明な被写体の観察に使用することができる。溶接法、即ち溶接ジョイント部の溶加材を再充填して切断する方法の場合、当該方法では、特に、接合部における部品の形状及び位置、治具の位置、溶接ビードの形状及び特に溶着材料の量、濡れ性、溶着した材料の規則性及びパターン（溶滴の側方位置、貫通角度、形状及び振動など）を認識することができる。欠陥が検出された場合、この方法に直ちに補正を行なうことができる。
陰影測定の基本原理は、１９８５年１月「Welding Journal」に掲載された「A method of filming metal transfer in welding arcs」と題するドイツ国論文に記載されている。 The present invention belongs to another technique, the so-called shadow measurement, in which a single illumination is performed on a scene to be monitored, and the undulation of an observation scene is generated by single illumination on an image recorded by a camera. Guess by shading. Therefore, the light projects in the direction of the tangent to the surface to be monitored. This technique can be used to observe an opaque object surrounded by a very bright light source, as in the case of arc plasma that is not observed by a detector and is not directly observable. In the case of the welding method, that is, the method of refilling and cutting the filler material of the weld joint part, in this method, in particular, the shape and position of the part at the joint, the position of the jig, the shape of the weld bead and particularly the welding material Amount, wettability, regularity of the deposited material and pattern (lateral position of droplet, penetration angle, shape, vibration, etc.) can be recognized. If a defect is detected, this method can be corrected immediately.
The basic principle of shadow measurement is described in a German paper entitled “A method of filming metal transfer in welding arcs” published in “Welding Journal” in January 1985.

本発明の一態様では、レーザ又は発光ダイオードのような別の光源を用いる陰影測定デバイスを作製し、このデバイスは特定の組み立て条件の下で使用することができ、例えば面取りエッジにおいて、特に顕著な窪みをもつ起伏パターンを溶接条件の下で撮像するために使用できる。
モニタリング装置の一般的な構造は、支持体、光源、及び光源の光を受ける受光器を備えており、一方の端部に光源が、他方の端部に受光器が装着されたアームと、アームを支持体に取り付ける調整可能なダブルジョイントとを更に備え、このダブルジョイントが、互いに、及び光源と受光器との間の主光路にほぼ直交する２つの回転軸を含むことを特徴とする。この構造は、起伏表面のモニタリング動作を容易にする機能を有することが分かる。 In one aspect of the invention, a shading measurement device is made using another light source such as a laser or light emitting diode, which can be used under certain assembly conditions, for example, particularly at the chamfer edge. It can be used to image relief patterns with depressions under welding conditions.
The general structure of a monitoring device includes a support, a light source, and a light receiver that receives light from the light source, an arm having a light source at one end and a light receiver at the other end, and an arm And an adjustable double joint that attaches to the support, the double joint comprising two rotation axes that are substantially perpendicular to each other and to the main optical path between the light source and the light receiver. It can be seen that this structure has the function of facilitating the monitoring operation of the undulating surface.

この装置によってモニタリングされる動作を実行する治具支持部材は、支持体に取り付けることができる。従って、治具にはモニタリング装置が装備され、これは多くの方法において適切である。
アームは、観察対象のシーンのために空間を形成できるように、両端部の間で屈曲させることができ、光源及び受光器には、光を直角に反射し、更には互いに平行に、且つ主光路に直交するように配置される直角反射体を設けることができ、これによって装置を小型化できる。装置に対して行なうことができる別の種類の改良では、単色光を使用する場合、受光器が、当該光を透過するが他の光波長は透過しないフィルタと、集光レンズと、当該レンズによって形成される光焦点に配置されるピンホールとを含む。また、帯域通過フィルタ及び特殊フィルタの両方が設けられる。これによる共通の利点は、例えば溶融バスによって生成される周囲光の影響を無くすことができることである。 A jig support member that performs the operation monitored by this device can be attached to the support. The jig is therefore equipped with a monitoring device, which is appropriate in many ways.
The arm can be bent between both ends so that space can be created for the scene to be observed, and the light source and receiver reflect light at right angles, and are parallel to each other and main. A right-angled reflector can be provided that is arranged perpendicular to the optical path, thereby miniaturizing the device. Another type of improvement that can be made to the device is that when using monochromatic light, the receiver includes a filter that transmits the light but not other wavelengths of light, a condenser lens, and the lens. And a pinhole arranged at the optical focus to be formed. In addition, both a band pass filter and a special filter are provided. A common advantage with this is that, for example, the influence of ambient light generated by the melting bath can be eliminated.

本発明の別の態様は、前述の装置によって実行されるシーンモニタリング方法であり、この方法では、主光路がモニタリング対象のシーンの接線と一致するように当該装置を配置し、ダブルジョイントを調節することによってアームの向きを調節する。捕捉される起伏パターンは実際、陰影測定デバイスの向きが悪いと歪む。本発明は、簡単な判定基準に基づいてこの向きを容易に修正できる。この実施例については後述する。
重要な用途は、位置合わせしたチューブの、特に起伏を有する円形接合部に関し、これらのチューブは第１回転軸に平行である。多くの場合、これらのチューブは装置の前方で回転することができ、アームは、少なくとも第１回転軸を中心とした双方向の回転を行なって、起伏の底部を正確に追跡する。しかしながら、装置は固定チューブを中心に回転することもできる。 Another aspect of the present invention is a scene monitoring method performed by the above-described apparatus, in which the apparatus is arranged so that the main light path coincides with the tangent of the monitored scene, and the double joint is adjusted. Adjust the direction of the arm. The captured relief pattern is actually distorted if the shadow measurement device is misoriented. The present invention can easily correct this orientation based on simple criteria. This embodiment will be described later.
An important application relates to aligned tubes, particularly circular joints with undulations, which are parallel to the first axis of rotation. In many cases, these tubes can rotate in front of the device, and the arm performs a bi-directional rotation at least about the first axis of rotation to accurately track the bottom of the relief. However, the device can also rotate around a fixed tube.

本発明について添付図面を参照しながら記載する。
図１に示す装置は、端と端を接合させた２つのチューブ２及び３が形成する円形接続部１をモニタリングすることを目的としている。接続部１は、いずれかの溶接法を用いる治具４により溶接される。本明細書に関連するモニタリング装置は、発光器５、及びこの光を受ける受光器６を備えており、これら発光器と受光器は、チューブ２及び３の上を通過する屈曲アーム８の両端に支持されて、チューブ２及び３の接線とほぼ一致し、接続部１の領域を照明する主光路７上に位置合わせされており、この接続部１の領域に対して治具４が動作する。アーム８は、詳細には示されない溶接設備１０に取り付けられた支持部材９によって支持されており、その軸１１を中心に回転可能にチューブ２及び３を互いに接した状態に保持する手段も含む。この手段についてはこれ以上説明しない。治具４は、剛性接続支持体１２によって支持部材９に接続されており、アーム８は、チューブ２及び３の軸１１に平行なｙ軸を有する第１ジョイント１３と、接続部１の方に向かうｚ軸を有する第２ジョイント１４とからなるダブルジョイントを介して支持部材９に接続されている。これらジョイントの軸は共に、主光路７のｘ方向に直交するか、又はほぼ直交する。従って、第１ジョイント１３を回転させることにより、接続部１上の主光路７の傾きが変化し、第２ジョイント１４を回転させることにより、接続部１の平面に対する主光路７の角度が変化する。ジョイント１３及び１４の運動は、これらのジョイントに含まれるモータ１５及び１６によって制御される。これらのモータを使用してこれらのジョイントを所望の位置に固定することもできる。制御は観察者が行なうことができるか、又は例えばスキャンを使用する場合は自動的に行なうことができる。 The present invention will be described with reference to the accompanying drawings.
The device shown in FIG. 1 is intended to monitor a circular connection 1 formed by two tubes 2 and 3 joined end to end. The connecting part 1 is welded by a jig 4 using any welding method. The monitoring device related to the present specification includes a light emitter 5 and a light receiver 6 that receives this light, and these light emitter and light receiver are provided at both ends of the bending arm 8 that passes over the tubes 2 and 3. It is supported and substantially coincides with the tangent lines of the tubes 2 and 3 and is aligned on the main optical path 7 that illuminates the region of the connecting portion 1, and the jig 4 operates on the region of the connecting portion 1. The arm 8 is supported by a support member 9 attached to a welding equipment 10 (not shown in detail), and also includes means for holding the tubes 2 and 3 in contact with each other so as to be rotatable about an axis 11 thereof. This means will not be further described. The jig 4 is connected to the support member 9 by a rigid connection support 12, and the arm 8 is connected to the first joint 13 having a y axis parallel to the axis 11 of the tubes 2 and 3 and the connection portion 1. It is connected to the support member 9 via a double joint composed of a second joint 14 having a facing z-axis. Both axes of these joints are orthogonal or almost orthogonal to the x direction of the main optical path 7. Therefore, by rotating the first joint 13, the inclination of the main optical path 7 on the connecting portion 1 changes, and by rotating the second joint 14, the angle of the main optical path 7 with respect to the plane of the connecting portion 1 changes. . The movement of joints 13 and 14 is controlled by motors 15 and 16 included in these joints. These motors can also be used to fix these joints in the desired position. The control can be performed by the observer or can be performed automatically, for example when using a scan.

次に図２には、発光及び受光システムを更に詳細に示す。光はレーザ１７によって生成され、ファイバカプラー１８を通って光ファイバ１９に伝送される。ファイバ１９の、レーザ１７と反対側の端部はアーム８の端部に固定され、ファイバ１９の他方の端部はレーザ１７に取り付けられる。光は、光ファイバ１９からわずかに広がったビームとして放出され、連続する直角ミラーペア２０及び２１、及びビームを広げて平行にする拡大レンズ２２、更には保護ガラス２３を通過した後で、主光路７に戻る。光は、接続部１の一部、及び治具４の端部を照明し、次いで第２保護ガラス２４、集光レンズ２５、第２直角ミラーペア２６及び２７、レンズ２５によって集光されるビームの焦点に配置されるピンホール２８に順に到達し、次いで集束したビームを再度平行にする別のレンズ２９を通った後、干渉フィルタ又は帯域通過フィルタ３０、及び観察カメラのような検出器３１に到達する。後半に挙げた第２保護ガラス２４から始まる手段は受光器６に含まれ、前半に挙げた手段は発光器５に含まれる。発光器５に見られるように、受光手段６の一部は、光ファイバ結線を使用することにより固定することができる。直角ミラー２０、２１、及び２６、２７は必須ではないが、これらの直角ミラーによって、発光器５及び受光器６の位置合わせが不要となり、よってアーム８の長さに沿って非常に大型化する構成を避けることができる。これは、発光器５及び受光器６を、図２に示すように軸１１に平行に、又は図３に示すように垂直に、チューブ２及び３の位置合わせ箇所から屈折した位置に配置することを可能にする。   Next, FIG. 2 shows the light emitting and receiving system in more detail. Light is generated by a laser 17 and transmitted to an optical fiber 19 through a fiber coupler 18. The end of the fiber 19 opposite to the laser 17 is fixed to the end of the arm 8, and the other end of the fiber 19 is attached to the laser 17. The light is emitted as a slightly broadened beam from the optical fiber 19, and after passing through a series of right angle mirror pairs 20 and 21, a magnifying lens 22 that spreads and collimates the beam, and a protective glass 23, the main optical path 7. Return to. The light illuminates a part of the connecting portion 1 and the end of the jig 4, and then the second protective glass 24, the condenser lens 25, the second right angle mirror pairs 26 and 27, and the beam collected by the lens 25. The pinhole 28, which is placed at the focal point, is reached in turn, then through another lens 29 that re-collimates the focused beam, and then reaches an interference or bandpass filter 30 and a detector 31 such as an observation camera. To do. Means starting from the second protective glass 24 listed in the second half are included in the light receiver 6, and means listed in the first half are included in the light emitter 5. As seen in the light emitter 5, a part of the light receiving means 6 can be fixed by using an optical fiber connection. The right angle mirrors 20, 21, and 26, 27 are not essential, but these right angle mirrors eliminate the need for alignment of the light emitter 5 and the light receiver 6 and are therefore very large along the length of the arm 8. Configuration can be avoided. This is because the light emitter 5 and the light receiver 6 are arranged in a position refracted from the alignment position of the tubes 2 and 3 parallel to the axis 11 as shown in FIG. 2 or perpendicularly as shown in FIG. Enable.

この光学系の特性の一つは、レーザ１７から放出される光ビームを拡大して主光路７において大きな断面を有するようにすることにより、光ビームがモニター対象のシーンの全てを照明できるようにし、更に光ビームをピンホール２８の焦点の大きさに縮小することである。ピンホールの機能は、周囲光の大部分を遮断する空間フィルタの機能であり、この機能によって周囲光が目立たなくなり、レーザ光により形成される陰影を認識する機能が妨害されることがない。干渉フィルタ又は帯域通過フィルタ３０により、観察時に、レーザ１７が放出する波長の光線のみを保持し、且つ周囲光の一部を再度抑制することが可能になる。従って、溶融バスにより生成されるか、又は溶接に使用される熱源によって高温になるプラズマ又は治具により生成される強い周囲光の存在下においても、これらのフィルタによってモニタリング対象のシーンの適切なビューが得られる。   One of the characteristics of this optical system is that the light beam emitted from the laser 17 is expanded to have a large cross section in the main optical path 7 so that the light beam can illuminate the entire scene to be monitored. Further, the light beam is reduced to the size of the focal point of the pinhole 28. The function of the pinhole is that of a spatial filter that blocks most of the ambient light. This function makes the ambient light inconspicuous and does not hinder the function of recognizing the shadow formed by the laser light. The interference filter or band-pass filter 30 makes it possible to hold only the light beam having the wavelength emitted by the laser 17 and to partially suppress the ambient light during observation. Therefore, these filters provide an appropriate view of the monitored scene, even in the presence of intense ambient light generated by a melting bath or by a plasma or jig that is heated by a heat source used for welding. Is obtained.

次に、モニタリング方法について説明する。
図４は、本明細書に記載の用途において見られる接続部の構造を示しており、この構造は、チューブ２及び３の水平母線３２及び３３、接続部１の水平母線３４、及びテーパ状面取りエッジの傾斜母線３５及び３６により構成されている。測定しようとするパラメータは、接続部１の高さによる、水平母線３２、３３、及び３４の間の垂直距離、又は母線３５と３６との間の水平距離、つまり接続部１の深さ、又は幅である。接続部構造の認識は、モニタリング装置の向き、特に光学系の向きに大きく依存する。このように、チューブの軸に平行な平面とテーパ状面取りエッジとの交差部分は双曲線３９となる。図４に示すように、これらの面取りエッジ間の距離は、観察光線の向きによって異なる幅Ｌとして認識され、この最大距離ＬＯ（測定対象となる軸方向の距離に相当する）は、観察方向が円錐体の軸に直交する場合に観察される。このため、第２ジョイント１４の周りでシステムの往復運動を少なくとも周期的に生じさせることにより、照準方向の調整及び再調整を行う。 Next, a monitoring method will be described.
FIG. 4 shows the structure of the connection found in the application described herein, which structure includes the horizontal buses 32 and 33 of the tubes 2 and 3, the horizontal bus 34 of the connection 1, and the tapered chamfer. It is constituted by edge inclined buses 35 and 36. The parameter to be measured is the vertical distance between horizontal buses 32, 33 and 34, or the horizontal distance between buses 35 and 36, ie the depth of connection 1, depending on the height of connection 1, or Width. The recognition of the connection structure greatly depends on the orientation of the monitoring device, particularly the orientation of the optical system. Thus, the intersection of the plane parallel to the tube axis and the tapered chamfered edge is a hyperbola 39. As shown in FIG. 4, the distance between these chamfered edges is recognized as a width L that varies depending on the direction of the observation light beam, and this maximum distance L O (corresponding to the axial distance to be measured) is the observation direction. Is observed when orthogonal to the axis of the cone. For this reason, the aiming direction is adjusted and readjusted by causing the system to reciprocate around the second joint 14 at least periodically.

また、接続部１の深さの推定値は、照準方向の傾きによって変わる。特に、接続部１のような円形ラインに対して動作を実行する場合、第１ジョイント１３の周りで規則的に光学系を往復させればよいことが分かる。これは、図５に示すように、特に溶接ビードが接続部１の元の表面から後退している場合に必要となる。図５では、溶接ビードの上表面を参照番号３７で示す。主光路７を一定の傾斜角に維持することによって初めて、溶融バスの上方に突出する接続部１のエッジ３８を測定することが可能になる。しかしながら、傾斜を周期的に変えて新規の主光路７’を形成することにより、元の接続部１ではなく溶接ビード３７自体を観察することができ、よって溶接されるアセンブリの状態に関する更に有用な情報を提供することが可能になる。   Moreover, the estimated value of the depth of the connection part 1 changes with inclination of an aiming direction. In particular, when the operation is performed on a circular line such as the connection portion 1, it is understood that the optical system may be regularly reciprocated around the first joint 13. This is necessary especially when the weld bead is retracted from the original surface of the connection 1 as shown in FIG. In FIG. 5, the upper surface of the weld bead is indicated by reference numeral 37. Only by maintaining the main optical path 7 at a constant tilt angle, it is possible to measure the edge 38 of the connection 1 protruding above the melting bath. However, by periodically changing the slope to form a new main optical path 7 ', it is possible to observe the weld bead 37 itself rather than the original connection 1, thus further useful for the state of the assembly being welded. It becomes possible to provide information.

レーザは別の光源（特にＬＥＤタイプ、発光ダイオード）に置き換えることができる。レーザの利点は、レーザの光エネルギーが狭いスペクトル範囲に集中することにより、狭帯域通過フィルタを使用することができ、このフィルタがレーザ光を透過し、且つそれよりもスペクトルが狭い寄生放射を減衰させことである。従って、約数ｍＷの電力しか必要としない。更に、発光波長はプラズマが発光波長を透過するように選択される。広い発光スペクトルを特徴とする光源を用いる場合、同じコントラストレベルを得るためにずっと大きな光電力が必要となる。電力を小さくすることにより、観察者にとっての不快感又は眼を傷める危険を低減することができる。   The laser can be replaced by another light source (especially LED type, light emitting diode). The advantage of a laser is that it allows a narrow bandpass filter to be used by concentrating the laser light energy in a narrow spectral range, which attenuates parasitic radiation that is transparent to the laser beam and narrower in spectrum. Is to let Therefore, only about several mW of power is required. Furthermore, the emission wavelength is selected so that the plasma transmits the emission wavelength. When using a light source characterized by a broad emission spectrum, much higher optical power is required to obtain the same contrast level. By reducing the electric power, it is possible to reduce the discomfort for the observer or the risk of eye damage.

本装置の概略図である。It is the schematic of this apparatus. 本光学系の詳細図である。It is detail drawing of this optical system. 別の実施形態である。It is another embodiment. 装置によって行われる測定の一用途を示す。One use of the measurement performed by the apparatus is shown. 装置によって行われる測定の別の用途を示す。Fig. 4 shows another application of the measurements made by the device.

Claims (9)

支持部材（９）、発光器（５）、及び光源の光を受ける受光器（６）を備えるモニタリング装置であって、一方の端部に光源（５）を、他方の端部に受光器（６）を有するアーム（８）及びアームを支持体に取り付ける調整可能なダブルジョイント（１３、１４）を更に備え、このダブルジョイントが、互いに且つ発光器と受光器との間の主光路（ｘ）に直交する２つの回転軸（ｙ、ｚ）を有することを特徴とする、モニタリング装置。   A monitoring device comprising a support member (9), a light emitter (5), and a light receiver (6) for receiving light from the light source, wherein the light source (5) is provided at one end and the light receiver (6) at the other end. 6) and an adjustable double joint (13, 14) for attaching the arm to the support, the double joint being the main optical path (x) between each other and the emitter and receiver A monitoring device comprising two rotation axes (y, z) perpendicular to the axis. 支持部材（９）上に、治具（４）の支持体（１２）を備え、前記治具が行う動作をモニタリングの対象とすることを特徴とする、請求項１記載のモニタリング装置。   The monitoring apparatus according to claim 1, wherein a support body (12) of the jig (4) is provided on the support member (9), and an operation performed by the jig is a monitoring target. アームがその両端部の間で屈曲していることを特徴とする、請求項１又は２記載のモニタリング装置。   The monitoring device according to claim 1, wherein the arm is bent between both ends thereof. 発光器及び受光器が、互いに平行に、且つ主光路（７）に対して垂直に配置された、光を直角反射する直角反射体（２０、２１、２６、２７）を有していることを特徴とする、請求項１ないし３のいずれか一項に記載のモニタリング装置。   The light emitter and the light receiver have right angle reflectors (20, 21, 26, 27) that reflect light at right angles, arranged parallel to each other and perpendicular to the main optical path (7); The monitoring device according to claim 1, wherein the monitoring device is characterized. 光が単色光であり、受光器が、前記光を透過し、他の光波長を透過しないフィルタ（３０）と、集光レンズ（２５）と、レンズによって形成される光焦点に配置されるピンホール（２８）とを備えることを特徴とする、請求項１ないし４のいずれか一項に記載のモニタリング装置。   The light is monochromatic light, and the light receiver transmits the light and does not transmit other light wavelengths, the filter (30), the condenser lens (25), and a pin disposed at the optical focus formed by the lens 5. A monitoring device according to any one of claims 1 to 4, characterized in that it comprises a hole (28). 発光器が発光ダイオードであることを特徴とする、請求項１ないし４のいずれか一項に記載のモニタリング装置。   The monitoring device according to claim 1, wherein the light emitter is a light emitting diode. 請求項１ないし６のいずれか一項に記載の装置によって実行されるシーンモニタリング方法であって、主光路（ｘ）がモニタリング対象のシーンの接線に一致するように装置を配置し、ダブルジョイントを調整してアームの向きを調整することを特徴とする、モニタリング方法。   A scene monitoring method executed by the apparatus according to any one of claims 1 to 6, wherein the apparatus is arranged so that the main optical path (x) coincides with a tangent of the scene to be monitored, and a double joint is provided. A monitoring method characterized by adjusting the direction of the arm by adjusting. 第１回転軸（ｙ）に平行に配置され、且つ位置合わせされたチューブ（２、３）の、特に起伏を有する円形接合部（１）に適用されることを特徴とする、請求項７記載のモニタリング方法。   8. Application to a circular joint (1), in particular having undulations, of a tube (2, 3) arranged and aligned parallel to the first axis of rotation (y). Monitoring method. チューブが回転可能であり、少なくとも第１回転軸を中心として、アームを周期的に双方向に回転させることを特徴とする、請求項８記載のモニタリング方法。   9. The monitoring method according to claim 8, wherein the tube is rotatable, and the arm is periodically rotated bidirectionally around at least the first rotation axis.
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