JP2007506136A - Color filter direct drawing system and direct drawing method - Google Patents

Abstract

  A laser direct writing system and method for direct writing of a stripe pattern on a photosensitized surface, comprising scanning a laser beam over the photosensitized surface. The stripe pattern is exposed by using a pulsed laser and synchronizing the pulse delivery to expose additional stripe regions. Alternatively, the laser is scanned across the rotated panel and the translation speed, scan speed, and rotation angle are adjusted to sequentially expose each stripe and avoid exposure of the area between the stripes. .

Description

  This application claims the benefit of US Provisional Patent Application No. 60 / 503,887 filed on Sep. 22, 2003, the entire contents of which are hereby incorporated by reference. It is assumed that it is included inside.

  The present invention relates to a system and method for directly drawing a pattern on a photosensitive surface, and more particularly to directly drawing a color filter pattern on a substrate of a flat panel display.

  A flat panel display such as a TFT (thin film transistor) display usually displays a color image using a color filter. A color filter typically includes one of each of the three primary colors. The three primary colors are usually red, green, and blue. The color filters are usually arranged in a certain pattern which is a stripe pattern. Each color filter overlaps some but not all pixels on the panel. A color image is formed on the display by passing light through selected pixels according to the position and color that are attributes of the color filter.

  Traditionally, photolithographic processes have been used to form color filters on flat panel displays. An appropriately colored photosensitive filter material is selectively exposed and developed with a desired filter pattern, usually a stripe pattern. Unexposed portions of the filter material are removed, thereby leaving the color filter only at the desired location. A mask is used to define which portions of the photosensitive filter material are exposed.

  The present invention seeks to provide an improved system and method for forming color filters on flat panel displays.

  The present invention further intends to form a strip pattern by using a laser direct drawing system and a laser direct drawing method, in particular, a digital system and a digital method for selectively exposing a photosensitive material. The strip pattern includes, but is not limited to, a color filter on a flat panel display.

  In accordance with a comprehensive aspect of the present invention, the laser direct writing system is suitably set up to optimize the energy utilization of the laser that exposes portions of the strip of photosensitive material. Optimization is achieved by adjusting the timing of delivering pulses to the exposed strip position when using a pulsed laser. Another method for optimizing the laser power is to orient each strip in succession without modulating the laser on and off, taking into account transport during scanning, orienting the panel being scanned to the scanning device. It is to be able to scan. The orientation of the stripe, the scanning speed, and the relative transport speed between the exposed panel and the scanning device are such that upon completion of scanning of the first stripe, the laser beam is returned to the next strip to be exposed. Adjusted to scan. Intermediate portions that are not exposed are automatically skipped.

  In accordance with another general aspect of the present invention, a laser direct writing system includes a scanning device that scans a beam in the scanning direction and a deflector that deflects the scanning beam in a cross-scan direction. The deflection in the cross-scan direction is coordinated with the transport of the exposed panel to compensate for the transport in the cross-scan direction. Suitable deflectors include acousto-optic deflectors. In this acousto-optic deflector, the laser beam is deflected as a function of the frequency of the acoustic wave of the modulator.

  Therefore, according to an embodiment of the present invention, a system and method for drawing a pattern on a surface to which photosensitivity has been imparted are provided. The system and method includes a laser beam light source that outputs a laser beam, a panel, and a method. A supporting surface, wherein the panel comprises an array of pattern elements formed on the panel, the panel further comprising a photosensitive material overlying the pattern and scanning over the photosensitive surface. A scanning device that scans a laser beam in multiple passes along a path to expose a portion of a photosensitive material, and when the panel and scanning device are at a fixed position relative to each other, the array of pattern elements on the panel scans A rotating device that provides a mutual angular orientation between the panel and the scanning device to intersect the path.

  Various embodiments include one or more of the following added features and alternative features.

  The transport device operates in the cross-scan direction to provide mutual relative translation between the scan device and the panel, where the cross-scan direction intersects the scan path.

  The cross scan direction is transverse to the scan path.

  The panel rotation device aligns the panels so that the array of pattern elements is parallel to the effective scanning path during the relative translation of each other.

  The panel rotator rotates the panel so that during each pass of the laser beam, the laser beam exposes a portion of the light-sensitive surface that overlaps a single array of pattern elements. .

  The speed of the relative translation of each other is adjusted with the speed of the scan so that in each pass of the laser beam, the part of the light-sensitive surface that overlaps the pattern elements in the subsequent sequence of pattern elements is exposed. The

  The laser beam light source outputs a pulsed laser beam defined by a number of temporally separated laser pulses, each pulse exposing an overlapping portion of the surface to which photosensitivity is imparted. Alternatively, the laser beam is a continuous wave laser beam.

  The rotating device rotates the panel with respect to the scanning device. Alternatively, the scanning device is rotated relative to the support structure that supports the panel.

  Thus, according to another embodiment of the present invention, a system for drawing a pattern on a photosensitized surface is provided, the system being defined by a series of temporally separated laser pulses. A laser beam source that outputs a laser beam and a scanning device that scans the laser beam in a scanning direction over a surface to which photosensitivity has been imparted, and scanning and a series of laser pulses scan a pattern to be drawn Synchronized to deliver each laser pulse to discrete locations in the direction.

  Various embodiments include one or more of the following added features and alternative features.

  The laser beam light source is a Q switch pulse laser.

  The scanning device is a rotating polygon.

  The transport device provides a relative translation between each other between the scanning device and the photosensitized surface.

  The system controller controls at least one of the pulse rate of the pulses defining the laser beam, the relative translational speed, and the scanning speed.

  The scanning device sends a pulse in the first scan to the first array to be exposed, and sends a pulse in the second scan to the first and consecutive second exposed sequences to be exposed. To work.

  The scanning device sends out each pulse so as to add and expose a region to form a stripe.

  The drawn pattern includes a stripe pattern of color filters on a flat panel display.

  Thus, according to yet another embodiment of the present invention, there is provided a system and method for drawing a pattern on a photosensitized surface, the system and method comprising a laser beam light source that outputs a laser beam. And a scanning device that scans a laser beam in a scanning direction across a surface to which photosensitivity is imparted, and a scanning device and a surface to which photosensitivity is applied And a laser beam deflector for deflecting the laser beam in the cross-scan direction in synchronization with the relative translation as the laser beam is scanned in the scan direction.

  The present invention will be understood and appreciated more fully from the drawings and the following detailed description.

  Please refer to FIG. FIG. 1 is a partially simplified drawing partial block diagram of a system 10 for exposing a strip pattern to a photosensitive material in accordance with an embodiment of the present invention. The systems and methods described herein are particularly suitable for producing strips of color filters that are part of a flat panel display. However, strip pattern exposure on an appropriate photosensitive material is also considered.

  Briefly, a flat panel display includes an array of pixels. A color filter is associated with each of those pixels. By selectively outputting light from those pixels, an image is displayed on the panel. Each pixel is selected according to its position and color.

  Typically, the color filters are arranged in strips, and each color filter strip overlaps a row (or column) of pixels on the display panel 12. The filter is manufactured by appropriately exposing a colored photosensitive material.

  According to one embodiment of the invention, a laser direct drawing technique is used to expose the photosensitive material. The present invention can be implemented, for example, by appropriately adapting a scanning laser direct drawing apparatus. This scanning laser direct drawing apparatus is a DP (trademark) series laser direct drawing system commercially available from Orbotech, Inc. of Yavne, Israel.

  As seen in FIG. 1, according to one embodiment of the present invention, the system 10 includes a pulsed laser 20 that outputs a pulsed laser beam 22. The pulsed laser beam 22 is defined by a series of laser pulses 24 that are separated in time rather than a continuous beam. Suitable lasers for providing a pulsed laser beam include, for example, Q-switched diode pumped solid state lasers. This Q-switched diode pumped solid state laser is commercially available from any of several laser manufacturers, including Coherent and Spectra, California, USA.

  The laser pulse 24 is directed through a suitable pre-scan optical device 26 to strike a scanning device 28 such as a rotating polygon having a plurality of reflective surfaces 30. The pre-scanning optical device 26 usually includes a plurality of lenses (not shown). These lenses are selected to appropriately shape the laser beam 22 so that each laser pulse 24 exposes a spot having a desired size and shape on the panel 12. Note that the scanning device delivers each laser pulse to a different location on the panel 12. Each path of the laser pulse 24 is indicated by a broken line.

  As the polygon of the scanning device 28 rotates in the direction of the arrow 32 (scanning direction), the beam 22 strikes one of the reflective surfaces 30 of the polygon. One of the polygonal reflective surfaces 30 passes the beam through the scanning optics 34. Typically, the scanning optical device 34 includes an f-θ scanning lens and other optical elements (not shown). As the polygon rotates, the beam 22 is scanned along a scanning path in the scanning direction indicated by arrow 36.

  Pattern data 40 corresponding to the pattern to be exposed is supplied to the system controller 42. The system controller 42 controls one or more of the clocks that govern the rotational speed of the polygons of the scanning device 28, the translation of the panel 12 relative to the scanning device 28, and the generation of laser pulses 24. 1 shows that the translator moves the panel 12 in the direction of the arrow 46 (cross-scan direction) while the scanner 28 is stationary, the actual system design is It is also possible for the scanning device 28 to be moved while the 12 is stationary.

  In FIG. 1, a timing signal 48 output by the pulse generator 50 is shown. These timing signals correspond to the laser pulse 24 of the laser beam 22. According to one embodiment of the present invention, the laser pulses 24 are synchronized with the polygon rotation of the scanning device 28 so that each laser pulse 24 exposes another portion of the photosensitive material on the panel 12; Thereby, an exposure region 60 is formed. By combining the temporal separation between the laser pulses 24 with the continuous rotation of the scanning device 28, each of the exposure areas 60 is discontinuous with the other exposure areas 60. The inherent on-off modulation of the pulsed beam, ie the time between pulses when the beam is “off” is used to move the beam 22 from one exposure area 60 to the next. .

  When the scanning path is complete, i.e., when the laser beam 22 reaches the end of the swath to be scanned, the next reflective surface of the polygon of the scanning device 28 is rotated to a predetermined position so that the laser beam 22 is at the start of the scanning path. Return to the moment. The scanned swath can be the full width of panel 12, but need not be full width. The laser beam 22 is scanned again along the scanning path. For example, due to the relative translation between the panel 12 and the scanning device 28 provided by the panel transport device 44, a new position on the panel 12 adjacent to the previous scanning position is then scanned. The Thus, it should be noted that each scan path is continuous with the previous scan path, thereby creating an additional portion of each exposure area 60 that extends as a strip in the cross-scan direction.

  Reference is now made to FIG. FIG. 2 is a partially simplified drawing partial block diagram of a system 110 for exposing a strip pattern to a photosensitive material according to another embodiment of the present invention. The photosensitive material includes a dyed filter material suitable for manufacturing a color filter on a panel 112 such as a flat panel display. This dyed filter material is usually laid on a pixel pattern 113 already formed on the panel 112. Both system 110 and system 10 are configured to optimally utilize a laser direct writing apparatus for exposing a pattern of discontinuous strips, while system 10 exposes while adding an area for each strip. The system 110 continuously exposes each strip.

  As seen in FIG. 2, the system 110 includes a laser 120 that outputs a laser beam 122. The laser beam 122 can be a continuous wave laser beam or a pulsed laser beam. The pulsed laser beam is provided by a Q-switched diode-pumped solid state laser, such as that commercially available from any of several laser manufacturers including, for example, Coherent and Spectrum in California. According to one embodiment of the present invention, when a pulsed laser is used, the system design (spot size, scanning speed, and mutual translation speed) ensures continuous strip exposure, as described below. In order to do this, the spots exposed by each of the pulses need to overlap each other with at least one other spot.

  The laser beam 122 is directed through a suitable prescan optical device 126 to impinge a scanning device 128 such as a rotating polygon having a plurality of reflective surfaces 130. The pre-scanning optical device 126 typically includes a plurality of lenses (not shown). These lenses are selected to properly shape the laser beam 122 to expose a continuous strip on the panel 112.

  As the polygon of scanning device 128 rotates in the direction of arrow 32 (scanning direction), beam 122 strikes one of the polygonal reflective surfaces 130. One of the polygonal reflecting surfaces 130 passes the beam through the scanning optical device 134. The scanning optical device 134 typically includes an f-θ scanning lens and other optical elements (not shown). As the polygon rotates, the beam 122 is scanned along a scan path in the nominal scan direction indicated by arrow 136.

  During scanning, panel 112 and scanning device 128 are translated relative to each other in the cross-scan direction indicated by arrow 146, for example, by transport device 144. Note that due to the relative translation of each other during the scan, the actual scan direction is slightly skewed, as indicated by arrow 148.

  It is a feature of this embodiment that the rotation device 150 establishes a mutual angular offset between the panel 112 and the scanning device 128 during scanning. Therefore, when there is no relative translation between the panel 112 and the scanning device 128, the arrangement of the pattern elements of the pattern 113 intersects the axis corresponding to the nominal scanning direction 136. Introducing mutual relative translation between panel 112 and scanning device 128, the actual scanning direction matches the orientation of the pattern elements 113, thereby facilitating continuous exposure of region 160.

  In FIG. 2, it can be seen that the pattern data 140 corresponding to the pattern to be exposed is supplied to the system controller 142. The system controller 142 controls one or more of the polygon rotation speed of the scanning device 128, the mutual translation of the panel 112 relative to the scanning device 128, and the direction of rotation of the panel 112 relative to the scanning device 128.

  FIG. 2 shows that the translation device 144 moves the panel 112 in the direction of the arrow 146 (cross-scan direction) while the scanning device 128 is stationary, but the actual system design is that the panel 112 is While still, the scanning device 128 may be moved. For example, at the same time that the panel 112 is supported by an air cushion, the translation device can operate to move the panel 112 directly. Alternatively, the translation device can also operate to move the support that supports the panel 112.

  Further, although FIG. 2 schematically illustrates a rotating device 150 that operates to rotate the panel 112, the rotating device 150 supports the panel 112 or the panel 112 according to one embodiment of the present invention. Note that the supporting platform (not shown) can be operated directly, or the scanning device 128 can be rotated relative to the panel 112 while the panel 112 is held stationary. The rotating device can operate immediately if the panel is already placed in the system 128, for example, rotating the panel 112 before placing the panel in the system 110 as part of a pick and place loader. It can also be made.

  When the scanning path is complete, that is, when the laser beam 122 reaches the end of the swath to be scanned, the next reflective surface of the polygon of the scanning device 128 is rotated to a predetermined position so that the laser beam 122 is at the start of the scanning path. System 110 is configured to return instantly to The system controller 142 determines the appropriate relative angular orientation of the panel 112 and the scanning device 128, the translation speed, and the stripe region 160 so that each scan path corresponds to the exposed stripe region 160 and skips the region between the stripes. Obtained along with scanning speed.

  Reference is now made to FIG. FIG. 3 is a partially simplified drawing partial block diagram of a system 210 for exposing a strip pattern to a photosensitive material in accordance with another embodiment of the present invention. The photosensitive material includes a dyed filter material suitable for manufacturing a color filter on a panel 112 such as a flat panel display. The dyed filter material is laid on a pixel pattern 113 already formed on the panel 112.

  In the embodiment seen in FIG. 3, system 210 is identical in all respects to system 110 except that it includes an optional cross-scan deflector 370 added. The cross scan deflector 370 communicates with the system control 142 and operates to deflect the beam 122 in the cross scan direction. Thus, according to one embodiment of the present invention, the system control 142 further controls the deflection angle of the beam 122 to compensate for the relative translation between each other between the panel 112 and the scanning device 128. The compensation provided by deflector 370 can be performed in addition to or in place of establishing mutual relative rotation between panel 112 and scanning device 128 as described above with respect to FIG. it can.

  The deflector 370 is an acousto-optic deflector that optionally deflects the laser beam 122 using sound waves. The deflection amount is controlled by changing the frequency of the sound wave of the deflector 370, as is known in the art.

  It will be appreciated by persons skilled in the art that the present invention is not limited to what has been particularly shown and described hereinabove. On the contrary, the present invention is conceivable to those skilled in the art after reading the above description, and includes modifications and variations of the present invention which are not present in the prior art.

FIG. 2 is a partially simplified drawing partial block diagram of a system for exposing a strip pattern to a photosensitive material according to an embodiment of the present invention. FIG. 6 is a partially simplified drawing partial block diagram of a system for exposing a strip pattern to a photosensitive material according to another embodiment of the present invention. FIG. 7 is a partially simplified drawing partial block diagram of a system for exposing a strip pattern to a photosensitive material according to still another embodiment of the present invention.

Claims (46)

A system for drawing a pattern on a photosensitized surface,
A laser beam light source for outputting a laser beam;
A support surface for supporting a panel including a pattern element array and a photosensitive material overlapping the pattern;
A scanning device that exposes a portion of the photosensitive material by scanning the laser beam in multiple passes along a scanning path across the surface to which the photosensitivity is imparted;
A mutual angular direction between the panel and the scanning device such that when the panel and the scanning device are at a fixed position relative to each other, the arrangement of pattern elements on the panel intersects the scanning path. Providing a rotating device to rotate,
A system for drawing a pattern on a surface provided with photosensitivity.   The apparatus further comprises a transport device that operates to provide mutual relative translation between the scanning device and the panel in a cross-scan direction, the cross-scan direction intersecting the scan path. A system for drawing a pattern on a surface provided with photosensitivity according to Item 1.   3. The system for drawing a pattern on a photosensitized surface according to claim 2, wherein the cross scanning direction is a horizontal direction with respect to the scanning path.   The panel rotation device operates to align the panel so that an arrangement of pattern elements is parallel to the scanning path during the relative translation of the pattern elements. A system for drawing a pattern on the surface given the photosensitivity.   The panel rotating device exposes a portion of the photosensitized surface where the laser beam overlaps the pattern elements in a single row of pattern elements during each pass of the laser beam. 2. The system for drawing a pattern on a photosensitized surface according to claim 1, wherein the panel is rotated.   6. A pattern is drawn on a photosensitized surface according to claim 5, further comprising a transport device that operates to provide mutual relative translation between the scanning device and the panel. System to do.   The speed of the relative translation of each other is such that, in each pass of the laser beam, a part of the photosensitized surface that overlaps the pattern elements in a subsequent row of pattern elements is exposed. The system for drawing a pattern on a light-sensitive surface according to claim 6, wherein the system is adjusted to a speed of the pattern.   8. The photosensitized surface of claim 7, wherein the subsequent array of pattern elements is separated from the previous array of pattern elements by at least one intermediate array of pattern elements. A system for drawing patterns.   2. The laser beam light source outputs a pulsed laser beam defined by a number of temporally separated laser pulses to draw a pattern on a photosensitized surface according to claim 1. System.   10. The system for drawing a pattern on a photosensitized surface according to claim 9, wherein each pulse exposes a portion of the photosensitized surface.   11. The system for drawing a pattern on a photosensitized surface according to claim 10, wherein at least two portions of the photosensitized surface overlap each other.   2. The system for drawing a pattern on a photosensitized surface according to claim 1, wherein the laser beam light source outputs a continuous wave laser beam.   The system for drawing a pattern on a photosensitized surface according to claim 1, wherein the rotating device operates to rotate the panel with respect to the scanning device.   2. The method of claim 1, wherein the rotating device operates to rotate the scanning device relative to a support structure that supports the panel. System. A method for drawing a pattern on a surface given photosensitivity,
Outputs a laser beam,
Supporting a panel comprising a pattern element array and a photosensitive material overlying the pattern,
Scanning the laser beam in multiple passes along a scanning path across the photosensitived surface, thereby exposing and scanning a portion of the photosensitive material, and the panel and the scanning device are constant relative to each other Including a step of providing a mutual angular direction between the panel and the scanning device such that an array of pattern elements on the panel intersects the scanning path when the position is A method for drawing a pattern on a photosensitized surface.   The photosensitive according to claim 15, further comprising providing a relative translation between the scanning device and the panel in a cross-scan direction, the cross-scan direction intersecting the scan path. A method for drawing a pattern on a given surface.   17. The method for drawing a pattern on a photosensitized surface according to claim 16, wherein the cross-scan direction is a horizontal direction with respect to the scan path.   Providing the mutual angular orientation includes aligning the panels such that an array of pattern elements is parallel to an actual scanning path during the relative translation of the mutual. 17. A method for drawing a pattern on a photosensitized surface according to claim 16.   Providing a mutual angular orientation includes: during each pass of the laser beam, a portion of the photosensitive surface over which the laser beam overlaps the pattern elements in a single array of pattern elements. 16. The method for drawing a pattern on a photosensitized surface according to claim 15, comprising the step of aligning the panel to expose.   20. The method for drawing a pattern on a light-sensitive surface as claimed in claim 19, further comprising the step of providing a relative translation between the scanning device and the panel.   In each pass of the laser beam, the relative translational speed and scanning speed of each other are such that a part of the photosensitized surface that overlaps the pattern elements in a subsequent sequence of pattern elements is exposed. 21. The method for drawing a pattern on a photosensitized surface according to claim 20, further comprising adjusting a speed.   24. The photosensitized surface of claim 21, wherein the subsequent array of pattern elements is separated from the previous array of pattern elements by at least one intermediate array of pattern elements. A method for drawing patterns.   16. The method for drawing a pattern on a photosensitized surface according to claim 15, wherein the step of outputting a pulsed laser beam outputs a pulsed laser beam.   24. The method for drawing a pattern on a photosensitized surface as claimed in claim 23, wherein each pulse exposes a portion of the photosensitized surface.   25. The method for drawing a pattern on a photosensitized surface according to claim 24, wherein at least two portions of the photosensitized surface overlap each other.   16. The method for drawing a pattern on a photosensitized surface according to claim 15, wherein the step of outputting the laser beam outputs a continuous wave laser beam.   16. The method for drawing a pattern on a photosensitized surface according to claim 15, wherein the rotating device operates to rotate the panel relative to the scanning device.   16. The method of claim 15, wherein the rotating device operates to rotate the scanning device relative to a support structure that supports the panel. the method of. A system for drawing a pattern on a photosensitized surface,
A laser beam light source that outputs a laser beam defined by a series of temporally separated laser pulses;
A scanning device that scans the laser beam in a scanning direction over the surface provided with photosensitivity;
With
The scanning and the series of laser pulses are synchronized on a photosensitized surface characterized in that each laser pulse is synchronized to a discontinuous position in the scanning direction of the pattern to be drawn. A system for drawing patterns.   30. The system for drawing a pattern on a photosensitized surface according to claim 29, wherein the laser beam light source comprises a Q-switch pulse laser.   30. The system for drawing a pattern on a photosensitized surface according to claim 29, wherein the scanning device comprises a rotating polygon.   30. The pattern on a photosensitized surface of claim 29, further comprising a transport device that provides a relative translation between the scanning device and the photosensitized surface. A system for drawing.   The photosensitivity of claim 32, further comprising a system controller that controls at least one of a pulse rate of pulses defining the laser beam, a speed of relative translation relative to each other, and a speed of scanning. A system for drawing a pattern on a given surface.   The scanning device sends a pulse in a first scan to the first sequence to be exposed, and sends a pulse in the second scan to the first sequence to be exposed and a second sequence to be exposed. 33. The system for drawing a pattern on a photosensitized surface according to claim 32, wherein the pattern is drawn on the surface.   35. The apparatus for drawing a pattern on a photosensitized surface according to claim 34, wherein said scanning device sends out each pulse so as to add a region for exposure to form a stripe. system.   30. The system for drawing a pattern on a light-sensitive surface according to claim 29, wherein the drawn pattern includes a color filter stripe pattern on a flat panel display. A method for drawing a pattern on a surface given photosensitivity,
Output a laser beam defined by a series of temporally separated laser pulses;
Each laser at a discontinuous position in the scanning direction of a pattern drawn by scanning the laser beam in a scanning direction across the photosensitized surface, and scanning and synchronizing the series of laser pulses. A method for drawing a pattern on a photosensitized surface, characterized in that a pulse is transmitted and synchronized.   38. The system for drawing a pattern on a photosensitized surface according to claim 37, wherein in the step of outputting the laser beam, a laser beam is output from a Q switch pulse laser.   38. The method for drawing a pattern on a photosensitized surface according to claim 37, wherein in the scanning step, the laser is reflected from a rotating polygon.   38. The method of claim 37, further comprising providing a relative translation between each other between a scanning device and the photosensitized surface. Way for.   41. The method of claim 40, further comprising controlling at least one of a pulse rate of pulses defining the laser beam, a speed of the relative translation relative to each other, and a speed of scanning. A method for drawing a pattern on a given surface.   In the scanning step, a pulse in the first scan is sent to the first row to be exposed, and a pulse in the second scan is sent to the first row to be exposed and the second row to be continuously exposed. 41. A method for drawing a pattern on a photosensitized surface according to claim 40.   43. The photosensitized surface of claim 42, wherein the step of scanning includes the step of delivering each pulse to be exposed with additional regions, thereby forming a stripe. A method for drawing a pattern.   38. The method for drawing a pattern on a light-sensitive surface according to claim 37, wherein the drawn pattern includes a color filter stripe pattern on a flat panel display. A system for drawing a pattern on a photosensitized surface,
A laser beam light source for outputting a laser beam;
A scanning device for scanning the laser beam in a scanning direction over a surface provided with photosensitivity;
A transport device that provides relative translation between the scanning device and the photosensitized surface in a cross-scan direction transverse to the scan direction;
A laser beam deflector for deflecting the laser beam in the cross-scan direction in synchronization with the relative translation as the laser beam is scanned in the scan direction;
A system for drawing a pattern on a surface provided with photosensitivity. A method for drawing a pattern on a surface given photosensitivity,
Outputs a laser beam,
Scanning the laser beam in a scanning direction over a surface provided with photosensitivity,
Providing mutual relative translation between the scanning device and the photosensitive surface in a cross-scan direction transverse to the scan direction;
As the laser beam is scanned in the scanning direction, each step includes deflecting the laser beam in the cross-scanning direction in synchronism with the relative translation of each other. A method for drawing a pattern on a surface.

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