JP2007332634A - Exhausting/scavenging apparatus in draining facility - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for efficiently exhausting odor gas from drainage itself or a highly volatile chemical or the like mixed in the drainage stored in a drain trap or a drain trap pit as a draining instrument in a draining/storage facility. <P>SOLUTION: There is provided the exhausting/scavenging apparatus in the draining facility, which achieves a desired object, i.e. efficiently exhausting the odor gas, by arranging an exhaust pipe to the draining instrument at a location above a draining/storage liquid surface, and further arranging an exhaust accelerating means at an opening edge of the exhaust pipe. Arrangement of the exhaust accelerating means at the opening edge of the exhaust pipe brings about further effectiveness to the apparatus. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an exhaust / scavenging device for drainage equipment for odors of chemicals and indoor gases dissolved in the wastewater itself and indoor gases in semiconductor manufacturing facilities.

  Drains generated from production equipment, air-conditioning drains such as air conditioners and fan coils, and general waste water are collected by a drain pipe and drained outdoors.

With conventional technology, general drainage that is always drained is a device that prevents U-shaped traps and traps as drainage devices from being installed in the drainage device to prevent indoor odors and insects from drainage pipes. Has been proposed.
JP-A-5-51957 JP-A-7-15815 JP-A-8-193359

In addition, when there is no odor in drainage such as drain water, or when there is no constant drainage and trap water may evaporate, there is a method of collecting drainage from multiple drainage facilities into trap traps and draining it. It was done.
This is because, in the case of production equipment, the drainage horizontal pipe is connected to a drainage standpipe or trap trough with a gradient of about 1/100 to 1/200, depending on the pipe size. This is because the drainage is collected across a plurality of rooms without separating the drain pipes for each room.

  However, the drainage trap or drain trap trap, etc., as a drainage device, always collects drainage, and the odor of the drainage itself and highly volatile chemicals dissolved in the drainage diffuses from the drain pipe into the room. It was inevitable to come out.

  Furthermore, the drainage equipment connected to the same drain pipe by the drain trap or drain trap trap as a drainage device has a phenomenon in which odors of different drainage facilities diffuse and come out.

  Such a phenomenon becomes a problem particularly when it is necessary to control the presence of a trace gas in a room such as a semiconductor manufacturing apparatus.

  The present invention provides a device for efficiently discharging odorous gas from drainage itself or highly volatile chemicals mixed in drainage in drainage storage facilities such as drainage traps or drain traps as drainage devices. The purpose is to provide.

  The first invention is characterized in that an exhaust pipe is provided above the drainage storage liquid surface of the drainage device.

  As a result, the wastewater itself always accumulated in the drainage device, the odor due to the chemicals dissolved in the drainage diffused from the drainage pipe to the room, and the drainage equipment connected to the same drainage pipe by the drainage equipment. In addition, it is possible to exhaust or scavenge diffused odors and the like of different drainage facilities with particularly strong odors by an exhaust pipe provided above the storage liquid surface.

  Especially in clean room facilities such as semiconductor and chemical manufacturing, the interior side is pressurized, so that a small amount of air is easily exhausted from the exhaust pipe above the stored liquid level to the trap side as a drainage device. In addition, since it is difficult for the drum trap and soot trap to exhaust from the upper surface due to the trap shape, the exhaust is surely performed from the exhaust pipe provided on the upper side surface of the drainage surface.

  The second invention is characterized in that an exhaust promotion means is provided at the exhaust pipe open end.

  As a result, odors from drainage pipes or drain traps, etc. that are constantly accumulated in drainage traps or drain trap traps, or highly volatile chemicals dissolved in drainage, diffused into the room from drain pipes, drain traps or drain traps The trend of exhausting or scavenging diffused odors from different drainage facilities with particularly strong odors coming out in drainage facilities connected to the same drain pipe by dredging becomes more powerful and reliable.

  According to a third aspect of the present invention, the exhaust promotion strength of the exhaust promotion means can be set to a strength corresponding to the exhaust amount by detecting the water level of the exhaust storage liquid level of the drainage device based on the amount of drainage and the strength of odor. It is characterized by doing so.

  As a result, in general wastewater, particularly strong odors are generated, and when there is a large amount of wastewater, the air in the drainage pipe is disturbed. Increasing the strength of the fan or ventilator as a means would eliminate this problem.

  A fourth aspect of the invention is characterized in that the drainage storage liquid level of the drainage device is provided with a facility for detecting the water level and supplementing the drainage device with water supply, and the function of the exhaust promotion means can be stopped. And

  This prevents the trap or soot as a drainage device of a system with a small amount of drainage from exhausting, thereby preventing water from evaporating and sealing water from being cut off.

    The exhaust / scavenging system of the present invention is a wastewater that is always accumulated in the drainage device, a odor caused by chemicals dissolved in the drainage diffused from the drainage pipe into the room, or a drainage pipe connected to the same drainage pipe by the drainage equipment. It is possible to exhaust or scavenge the diffused odors of drainage facilities with different particularly strong odors that come out in the facility by the exhaust pipe provided above the storage liquid level, Dispersion of drainage facilities with particularly strong odors, where odors caused by highly volatile chemicals dissolved in the wastewater are diffused from the drainage pipe to the room or drainage equipment connected to the same drainage pipe to the drainage equipment The trend of exhausting or scavenging odors and the like becomes stronger and more reliable.

  Furthermore, when a particularly strong odor is generated in general wastewater and there is a large amount of wastewater, it is necessary to increase the amount of exhaust to disturb the air in the drainpipe. By increasing the strength of the fan or ventilator, this problem will be solved, and when the trap or trap as a drainage device of a system with little drainage is exhausted, the water evaporates and the sealed water is cut It will prevent fear.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 shows an exhaust / scavenging device in a drainage facility applied to a trap dredging, where drainage discharged from a plurality of rooms according to the present invention is stored in a trap dredging as a drainage device and discharged appropriately. Is shown.

  As shown in FIG. 1, the exhaust pipe 1 is provided on the upper surface of the upper part of the trap rod 3 a as the exhaust device 3. First, the general waste water and drains discharged from the chambers A, B, and C are passed through the drain pipes 6a, 6b, and 6c, and further, the waste water collected through the integrated drain pipe 4 is discharged through the excess drain pipe 5. In the meantime, it will be stored in the trap cage 3a.

  In addition, as a structural feature, a partition plate 7 is shown that is suspended from the upper surface of the trap 3a on the drain tube 5 side of the trap tube 3a. This effect will be described later.

The wastewater stored in the trap cage 3a is a general wastewater in each of the chambers A, B and C and the drain itself, and is a gas based on the volatility and evaporative properties of chemicals etc. dissolved in the general wastewater and the drain. In order to prevent odors from different drainage facilities with particularly strong odors from flowing back into the rooms A, B, C through the exhaust pipes 4 and 6a, 6b, 6c, the exhaust pipe 1 and its open end By adding a trend with the exhaust fan 2 as an exhaust promotion means provided, the exhaust is exhausted to the outside.

  Originally, trap trap 3a as a drainage device has the purpose of preventing the entry of external odors and insects from drainage pipe 5, but as a similar device, as shown in FIG. There are traps such as a U-shaped trap 3b.

  In this U-shaped trap 3b as a drainage device, general drainage and drains discharged from the chambers a, b, c are collected in the integrated drainpipe 4 through the drainpipes 6a, 6b, 6c, stored, and discharged. Excess drainage is discharged to the outside through the pipe 5.

  Here, the odors from the wastewater stored in the U-shaped trap 3b, from general wastewater, drains themselves, and highly volatile wastewater such as chemicals mixed in them, with different drainage facilities with particularly strong odors are integrated. In order to prevent the exhaust pipe 4 and the exhaust pipes 6a, 6b, 6c from flowing back into the chambers a, b, c, the upper part of the drainage storage liquid surface of the sealed water of the U-shaped trap 3b. The exhaust fan 1 branched to the inflow pipe 4 side and provided at the open end portion thereof as an exhaust promotion means is added with a trend by the exhaust fan 2 and discharged to the outside.

  FIG. 3 shows an inflow pipe that is an integrated drain pipe 4 that is an upper surface that is an upper portion of the trap trap 3a as a drainage device and an upper portion of a drainage storage liquid surface of the U-shaped trap 3b that is a drainage device. The ventilator 2 'attached to the exhaust pipe 1 is shown as a substitute for the fan 2 as an exhaust promotion means attached to the open end of the exhaust pipe 1, which is branched from the four sides.

  The strength of the fan 2 or the ventilator 2 'as the exhaust promotion means is determined depending on, for example, the water level of the exhaust storage liquid surface of the drain trap or drain trap trap 3a as the drainage device according to the amount of drainage and the strength of odor. A detector is arranged at the bottom and other locations of the drain trap cage 3a shown in Fig. 1 to detect the level of the liquid level of the sealed water stored in the drain trap cage 3a and set the exhaust amount to a corresponding strength. Make it possible.

  This solves this problem by increasing the strength of exhaust promotion of the fan 2 or the ventilator 2 'as an exhaust promotion means in response to a case where a particularly strong odor is generated in general waste water and the amount of drainage is large. It will be.

  The drainage storage liquid surface of the drainage trap or drain trap trap 3a as the drainage device 3 is provided with a facility for detecting the water level with a detection device and supplementing the trap or trap 3a with water supply, and the exhaust The fan 2 or the ventilator 2 'can be stopped.

  As a result, it is possible to prevent the possibility of the water being evaporated and the sealed water being cut off due to the exhaust of the trap or dredger 3a of the system with a small amount of drainage.

  FIG. 4 shows a trap trap 3c as a drainage device. In this case, in order to seal the drained water flowing through the mesh 8, it is impossible to exhaust from the upper surface, which is the upper part, together with the fact that the trough 9 covers the open end of the drain pipe 5. In addition, the exhaust pipe 1 is provided on the upper side surface, which is the upper part of the flange 3c.

  FIG. 5 shows one mode of the trap trough 3 as the drainage device 3. However, basically, there is no difference in the overall structure of the exhaust pipe 1 described in FIG. 1 provided on the upper surface as the upper part of the trap cage 3a as a drainage device.

  However, as a drainage facility, the drainage pipe 5 does not flow directly into the drainage pipe 5 in order to prevent the wastewater flowing in from the drainage pipe 4 from sedimenting filth due to the sewage into the dredge 3a. On the other hand, the one in which the partition plate 10 is suspended from the upper surface of the tank 3a to be detoured so as to flow so as to crawl the bottom of the tub 3a is shown.

  FIG. 6 also shows another aspect of the drainage device 3. However, there is no difference in the structure in which the exhaust pipe is basically arranged on the upper surface as the upper portion of the trap rod 3a as the drainage device as described in FIG.

  And also as a drainage facility, drainage from the drainpipe 4 is used for the purpose of preventing the wastewater flowing in from the drainpipe 4 from depositing filth from the sewage in the gutter 3a and generating pollutant gas, etc. from there. However, a part of the drainage pipe seems to extend in a bent shape toward the inner bottom of the trough 3 so as to drain the water so as to suck the water at the bottom of the trough 3a of the drainage pipe 5 without flowing directly into the drainage pipe 5. What you are doing is shown.

  It can be widely used in drainage facilities that use drainage pipes from the inflow pipe, place the drainage sealed temporarily, and use sealing equipment for the purpose of preventing odors and insects from entering from the drain pipe or outside.

It is an Example figure of the trap cage | basket of the exhaust_gas | exhaustion / scavenging apparatus in the drainage equipment of this invention. It is an Example figure of the U-shaped trap of the exhaust_gas | exhaustion / scavenging apparatus in the drainage equipment of this invention. It is a figure which shows the ventilator used for the exhaust_gas | exhaustion / scavenging apparatus in the drainage equipment of this invention. It is an Example figure at the time of attaching the exhaust pipe of the exhaust_gas | exhaustion / scavenging apparatus in the drainage system of this invention to the upper side surface. The present invention is another embodiment of the present invention. The present invention is another embodiment of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Exhaust pipe 2 Fan 2 'Ventilator 3 Drainage device 3a Trap trap 3b U-shaped trap 3c Trap trap 4 Integrated drain pipe 5 Drain pipes 6a, 6b, 6c, Exhaust pipe 7, 10 Divider plate 8 Mesh 9 碗 A, B, C, a, b, c chamber

Claims (4)

  An exhaust / scavenging device in a drainage facility, characterized in that an exhaust pipe is provided above the drainage storage liquid surface of the drainage device.   2. The exhaust / scavenging device for a drainage facility according to claim 1, wherein an exhaust promotion means is provided at the exhaust pipe open end.   The exhaust promotion means can detect the water level of the exhaust storage liquid level of the drainage device according to the amount of drainage and the strength of odor, and set the exhaust amount to a corresponding strength. The exhaust / scavenging device for a drainage facility according to claim 1 or 2.   The drainage storage liquid level of the drainage device is provided with a facility for detecting the water level and supplementing the drainage device with water supply, and the function of the exhaust promotion means can be stopped. 2. Exhaust / scavenging device for drainage facilities according to items 2 and 3.

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