JP2007330947A - 乾式洗浄装置、および乾式洗浄方法 - Google Patents

乾式洗浄装置、および乾式洗浄方法 Download PDF

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Publication number
JP2007330947A
JP2007330947A JP2006169124A JP2006169124A JP2007330947A JP 2007330947 A JP2007330947 A JP 2007330947A JP 2006169124 A JP2006169124 A JP 2006169124A JP 2006169124 A JP2006169124 A JP 2006169124A JP 2007330947 A JP2007330947 A JP 2007330947A
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Japan
Prior art keywords
cleaning
cleaning medium
medium
nozzle
dry
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Pending
Application number
JP2006169124A
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English (en)
Japanese (ja)
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JP2007330947A5 (enrdf_load_stackoverflow
Inventor
Yoichi Okamoto
洋一 岡本
Tatsuya Sato
達哉 佐藤
Akihiro Fuchigami
明弘 渕上
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Ricoh Co Ltd
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Ricoh Co Ltd
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Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP2006169124A priority Critical patent/JP2007330947A/ja
Publication of JP2007330947A publication Critical patent/JP2007330947A/ja
Publication of JP2007330947A5 publication Critical patent/JP2007330947A5/ja
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned

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  • Cleaning In General (AREA)
JP2006169124A 2006-06-19 2006-06-19 乾式洗浄装置、および乾式洗浄方法 Pending JP2007330947A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006169124A JP2007330947A (ja) 2006-06-19 2006-06-19 乾式洗浄装置、および乾式洗浄方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006169124A JP2007330947A (ja) 2006-06-19 2006-06-19 乾式洗浄装置、および乾式洗浄方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010195587A Division JP4950329B2 (ja) 2010-09-01 2010-09-01 洗浄装置

Publications (2)

Publication Number Publication Date
JP2007330947A true JP2007330947A (ja) 2007-12-27
JP2007330947A5 JP2007330947A5 (enrdf_load_stackoverflow) 2009-05-07

Family

ID=38930926

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006169124A Pending JP2007330947A (ja) 2006-06-19 2006-06-19 乾式洗浄装置、および乾式洗浄方法

Country Status (1)

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JP (1) JP2007330947A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009285617A (ja) * 2008-05-30 2009-12-10 Ricoh Co Ltd 乾式洗浄装置、洗浄対象物、および再生装置の製造方法
CN106269630A (zh) * 2016-08-02 2017-01-04 徐海慧 一种墙板清扫支撑架
CN110230982A (zh) * 2019-07-03 2019-09-13 合肥新汇成微电子有限公司 一种探针卡全自动干式清洁设备
CN111729899A (zh) * 2020-07-02 2020-10-02 蒋晓茜 一种轨道交通专用施工结构
CN112893327A (zh) * 2021-01-22 2021-06-04 温州职业技术学院 一种方便实用的模具激光清洗装置
CN119870026A (zh) * 2025-03-26 2025-04-25 华海清科(北京)科技有限公司 晶圆清洗方法、装置和设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60188123A (ja) * 1984-03-08 1985-09-25 株式会社エムテ−樋川 表面清掃方法
JPH0379982A (ja) * 1989-08-22 1991-04-04 Japan Fuirudo Kk 被洗浄物の乾燥装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60188123A (ja) * 1984-03-08 1985-09-25 株式会社エムテ−樋川 表面清掃方法
JPH0379982A (ja) * 1989-08-22 1991-04-04 Japan Fuirudo Kk 被洗浄物の乾燥装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009285617A (ja) * 2008-05-30 2009-12-10 Ricoh Co Ltd 乾式洗浄装置、洗浄対象物、および再生装置の製造方法
CN106269630A (zh) * 2016-08-02 2017-01-04 徐海慧 一种墙板清扫支撑架
CN110230982A (zh) * 2019-07-03 2019-09-13 合肥新汇成微电子有限公司 一种探针卡全自动干式清洁设备
CN111729899A (zh) * 2020-07-02 2020-10-02 蒋晓茜 一种轨道交通专用施工结构
CN112893327A (zh) * 2021-01-22 2021-06-04 温州职业技术学院 一种方便实用的模具激光清洗装置
CN119870026A (zh) * 2025-03-26 2025-04-25 华海清科(北京)科技有限公司 晶圆清洗方法、装置和设备

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