JP2007328063A - Objective lens switching device and microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microscope equipped with an objective lens switching device capable of excellently forming an image with simple constitution even when an objective lens is switched. <P>SOLUTION: A moving part 420 is disposed to move on a line on a plane orthogonal to the optical axis of a microscope main body of a finite correction optical system. A plurality of objective lenses 500 of the finite correction optical system are attachably/detachably attached to the moving part 420 in parallel in a moving direction. Thus, the constitution of slide movement which hardly causes an error resulting from switching the objective lens 500 to form the image singly and which is simple is used, and then accurate observation is achieved while switching magnification according to the state of a subject to be observed by the microscope of the finite correction optical system. The constitution for adjusting an error in the center of an optical axis caused in every objective lens 500 and an error of every attaching part attached to be switched is easily provided. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an objective lens switching device that switches a plurality of objective lenses and a microscope that includes the objective lens switching device.

2. Description of the Related Art Conventionally, inspection using a microscope has been used as an inspection for various parts subjected to fine processing such as high integration of a semiconductor and a video head. In particular, as part inspection in recent years, there is an increasing demand for inspection accuracy from micro-order to sub-micron order.
In component inspection using a microscope, it is necessary to appropriately change the magnification of the objective lens depending on the position and state of the observation site of the object to be observed. For this reason, a configuration in which a plurality of objective lenses is switched in consideration of workability for exchanging objective lenses is known as a microscope (see, for example, Patent Document 1 and Patent Document 2).

Patent Document 1 discloses a low-magnification objective lens and a high-magnification objective lens in which a lens group that protrudes largely upward from the body surface is movable with a thickness that can accommodate the objective lens group. Placed in the section. Then, the movable part is mounted on the microscope so that only the linear movement is possible, and the movable part is linearly moved to selectively position the low magnification objective lens and the high magnification objective lens on the observation optical axis. Yes.
The configuration described in Patent Document 2 adopts a configuration in which a plurality of objective lenses are mounted on the same circumference around the rotation axis of the revolver body, and the objective lens is positioned on the observation optical axis by rotating a mounting flange. ing.

JP 2001-91841 A JP 11-237558 A

By the way, the imaging method of the microscope is classified into a finite correction optical system and an infinite correction optical system. The finite correction optical system has a configuration in which an objective lens alone forms an image at a finite position. On the other hand, the infinite correction optical system is configured to create an image using an imaging lens in addition to the objective lens.
In order to obtain a particularly accurate component inspection result, it is necessary to match the optical axes of the objective lenses to be replaced. That is, when the optical axes do not match, there is a disadvantage that the image being observed is shifted from the center of the field of view when the objective lens is switched.

  In consideration of such points, an object of the present invention is to provide an objective lens switching device and a microscope that can obtain good image formation with a simple configuration even if the objective lens is switched.

An objective lens switching device according to the present invention is an objective lens switching device that is disposed in a microscope main body of a finite correction optical system and in which a plurality of objective lenses of the finite correction optical system are detachably attached, and is attached to the microscope A main body unit, and a movable unit that is disposed on the main body unit so as to be linearly movable in one direction on a plane that intersects the optical axis of the microscope main body, and in which the objective lens is mounted in parallel in the moving direction; , Provided in at least one of the main body part and the moving part, and the objective lens is positioned relative to the main body part with respect to the optical axis of the microscope main body. And positioning means for regulating the movement state.
In this invention, a moving part is arranged on a main body part attached to the microscope main body of the finite correction optical system so as to be movable in a straight line in one direction on a plane intersecting the optical axis of the microscope main body. A plurality of objective lenses of the finite correction optical system are detachably attached in parallel along the moving direction. Then, positioning means for restricting relative movement of the main body part and the moving part to at least one of the main body part and the moving part in a state where the objective lens attached to the moving part is located on the optical axis of the microscope main body. Is provided.
As a result, when the objective lens of the finite correction optical system having an error in the unique optical axis is switched in a configuration that forms an image alone, the moving unit to which the plurality of objective lenses are attached is moved linearly in one direction. Because of this configuration, it is possible to use a simple slide movement configuration that is less prone to errors due to switching, and high-precision observation can be obtained while switching the magnification according to the state of the object to be observed with a microscope with a finite correction optical system. Thus, it is possible to easily improve productivity and reduce the size. Furthermore, since the configuration is simple, it is easy to provide a configuration for adjusting the error at the center of the optical axis that occurs for each objective lens and the error for each mounting portion that mounts a plurality of objective lenses in a switchable manner. In addition, it is possible to easily improve the manufacturability and reduce the size of the finite correction optical system with a configuration that allows high-precision observation with high versatility.

And in this invention, the said moving part is formed in the substantially longitudinal plate shape, is arrange | positioned at the said main-body part so that a slide movement is possible in the longitudinal direction of a plane direction, and the said positioning means is the said main-body part and the said moving part. A locking portion provided on at least one of them, having a curved convex surface, and capable of advancing and retracting the curved convex surface substantially along the thickness direction of the moving portion, and at least one of the entire main body portion and the moving portion. It is preferable to provide a configuration including a concave engaging portion that is provided on the other side and engages with the locking portion so as to be detachable.
In this invention, the moving part formed in a substantially longitudinal plate shape is disposed in the main body part so as to be slidable in the longitudinal direction of the plane direction, and at least one of the main body part and the moving part has a curved convex surface. The locking portion is provided so that the curved convex surface can advance and retreat substantially along the thickness direction of the moving portion, and at least one of the other is provided with a concave engaging portion that engages and disengages the locking portion. In addition, the moving part is relatively moved and positioned by engaging and disengaging the engaging part.
As a result, errors due to the movement of the moving part that moves to switch the objective lens, errors due to positioning, etc. are less likely to occur with a simple configuration, and the finite correction optical system has a configuration that is highly versatile and enables high-precision observation. Easy to get.

Further, in the present invention, a plurality of attachment members provided on the moving portion and detachably attached to the objective lens, and provided on the moving portion by engaging the attachment member, the moving the attachment member. An alignment mechanism that is movably positioned along a planar direction in which the moving part moves relative to the main body part with respect to the part, and an engaging member that is provided on the moving part so as to engage with the attachment member. A focus adjustment mechanism that is positioned so as to be movable along the optical axis direction of the microscope main body with respect to the moving unit is preferable.
In the present invention, a plurality of attachment members to which the objective lens is detachably attached are provided in the moving part. Then, the mounting member is positioned so as to be movable with respect to the moving unit along a plane along which the moving unit moves with respect to the main body by the alignment mechanism, and in the optical axis direction of the microscope main body with respect to the moving unit by the focus adjustment mechanism. A mounting member is movably positioned along.
This makes it possible to adjust not only the error at the mounting portion where the objective lens is mounted, but also the error for each objective lens, and a highly versatile and highly accurate observation can be easily obtained with the finite correction optical system.

Furthermore, in the present invention, the alignment mechanism is provided in a state of being engaged with any one of the plurality of attachment members, and the focus adjustment mechanism is other than the attachment member with which the alignment mechanism is engaged. It is preferable that the configuration is provided so as to be engaged with at least one of the other mounting members.
In this invention, any one attachment member to which the objective lens of the finite correction optical system is attached is appropriately moved by the alignment mechanism to adjust the optical axis, and the other attachment member to which the objective lens of the finite correction optical system is attached is adjusted. At least one of them is appropriately moved by the focus adjustment mechanism to adjust the focus.
As a result, the objective lens can be moved in one direction on a straight line even if an error for each objective lens of the finite correction optical system occurs, as well as an error at the time of switching the objective lens and an error of the mounting portion to which the objective lens is attached. Each error can be adjusted without providing an alignment mechanism and a focus adjustment mechanism for each mounting member. Therefore, high-accuracy observation can be obtained, and improvement of manufacturability and size reduction due to simplification of the configuration, reduction of cost, etc. can be obtained, and simplification of adjustment work for observation can be obtained. Efficiency can be obtained.

In the present invention, the mounting member is formed in an annular shape in which an objective lens is mounted on the inner peripheral side, and the alignment mechanism surrounds the mounting member in at least three locations in the circumferential direction near the outer periphery of the mounting member. A plurality of adjusting screws that are screwed to the moving portion at positions and pressed into a state of sliding contact with the mounting member in accordance with screwing into the moving portion; at least of the outer periphery of the mounting member and the adjusting screw It is preferable that either one is provided with an inclined surface for applying a pressing force for moving the adjusting screws in directions away from each other according to the screwing of the adjusting screw.
In the present invention, as the alignment mechanism, it is screwed onto the moving portion in a screwed state at a position surrounding the mounting member in at least three locations in the circumferential direction near the outer periphery of the annular mounting member to which the objective lens is mounted on the inner peripheral side. Correspondingly, an adjustment screw is provided that presses the mounting member in sliding contact with the mounting member and moves the mounting member in a pulling state in at least three directions from the outer peripheral side. In addition, an inclined surface is provided on at least one of the outer periphery of the mounting member and the adjustment screw to apply a pressing force that moves them in directions away from each other according to the screwed state of the adjustment screw.
In this way, an adjustment screw is provided in a state of slidingly contacting the mounting member so as to surround the mounting member at three or more locations, and an inclined surface that generates a component force that serves as a pressing force in a direction in which the sliding contact portion is separated from the screwing. Since the optical axis is adjusted with a simple configuration, it is easy to simplify the configuration, improve manufacturability, reduce size, etc., and simplify the configuration, so the objective lens is attached to switch the objective lens There is no need to increase rigidity so as not to cause an error as a configuration for moving the moving unit, and simplification of the configuration for switching the objective lens can be easily obtained.

Furthermore, in the present invention, the attachment member is formed in an annular shape having an external thread portion that is attached to the inner peripheral side of the objective lens and is screwed to the moving portion on the outer peripheral surface, and the focus adjustment mechanism is an external thread of the attachment member. It is formed in an annular shape having a female threaded portion to be screwed to the inner peripheral surface, and the mounting member is positioned by the axial end surface abutting or separating from the moving portion according to the threaded state with the mounting member. Or it is preferable to set it as the structure provided with the cyclic | annular nut part which can be moved.
In this invention, as a focus adjustment mechanism, a female screw provided on the inner peripheral surface of the annular nut portion is provided on the outer thread surface of the annular mounting member that is mounted on the inner peripheral side and is screwed into the moving portion. The mounting member can be positioned or moved to adjust the focal point by screwing the portion and contacting or moving the end surface in the axial direction of the nut portion to the moving portion according to the screwed state with the mounting member. .
As a result, the male screw portion provided on the outer periphery of the annular attachment member to which the objective lens is attached on the inner peripheral side is screwed to the moving portion, and the male screw portion of the attachment member is provided on the inner peripheral side of the annular nut portion. Focus adjustment can be performed with a simple configuration in which the female screw portion is screwed and the end face in the axial direction of the nut portion is brought into contact with or separated from the moving portion so that the mounting member can be positioned or moved with respect to the moving portion. Therefore, simplification of the configuration, improvement of manufacturability, miniaturization, etc. can be easily obtained, and the configuration is simplified, so that there is an error in the configuration for moving the moving unit to which the objective lens is mounted in order to switch the objective lens. There is no need to increase the rigidity so as not to occur, and the configuration for switching the objective lens can be easily simplified.

In the present invention, a low-magnification objective lens is attached to the attachment member moved by the alignment mechanism, and a high-magnification objective lens is attached to the attachment member moved by the focus adjustment mechanism. A configuration is preferable.
In this invention, a low-magnification objective lens is attached to the attachment member moved by the alignment mechanism, and a high-magnification objective lens is attached to the attachment member moved by the focus adjustment mechanism.
This makes it possible to adjust the optical axis with an objective lens with a low magnification and adjust the deviation of the image observed from the center of the field of view due to the inherent error due to the objective lens of the finite correction optical system and the error in the mounting part. With a high objective lens, it is possible to adjust the defocus due to the inherent error of the objective lens of the finite correction optical system, and without changing the optical axis tonality and focus adjustment for each, good observation with different magnifications by switching the objective lens Is easily obtained.

In the present invention, it is preferable that the positioning means is provided at a position farthest from the mounting member with which the alignment mechanism is engaged among the plurality of mounting members.
In the present invention, the positioning means is provided at a position farthest from the mounting member with which the alignment mechanism is engaged among the plurality of mounting members.
As a result, the positioning error caused by the positioning means is reliably adjusted by the alignment mechanism which is the farthest position, and a better observation can be obtained.

The microscope according to the present invention includes a microscope main body of a finite correction optical system including a mounting table on which an object to be observed and an eyepiece are mounted, and the microscope main body according to any one of claims 1 to 8. And an objective lens switching device as described above.
In the present invention, the objective lens switching device according to any one of claims 1 to 8 is disposed in the microscope main body of the finite correction optical system.
Thus, even if the objective lens of the finite correction optical system is switched according to the state of the object to be observed, high-precision observation can be performed with a simple configuration.

Hereinafter, the best mode for carrying out the present invention will be described in detail.
In the present embodiment, a microscope with a finite correction optical system capable of observing by switching between two objective lenses of the finite correction optical system is illustrated. However, for example, a configuration in which three or more objective lenses are appropriately switched may be used. In addition, as a configuration in which three or more objective lenses can be attached, only two objective lenses may be attached.
FIG. 1 is a perspective view showing a microscope according to the present embodiment. FIG. 2 is a side view with a part cut away showing the microscope. FIG. 3 is a side view of the objective lens switching device with a part cut away. FIG. 4 is a plan view showing the objective lens switching device. FIG. 5 is a cross-sectional view at the position of the positioning means showing the objective lens switching device. FIG. 6 is a cross-sectional view in which a part of the vicinity of the positioning means of the objective lens switching device is cut away. FIG. 7 is a cross-sectional view in which a part of the vicinity of the first mounting hole of the objective lens switching device is cut away. FIG. 8 is a cross-sectional view in which a part of the vicinity of the second mounting hole of the objective lens switching device is cut away.

[Configuration of microscope]
In FIGS. 1 and 2, reference numeral 100 denotes a microscope. The microscope 100 is a finite correction optical system, and the magnification can be appropriately switched depending on the position and state of an observation site of an observation object (not shown).
The microscope 100 includes a mounting table 200 and a microscope main body 300.

The mounting table 200 includes a pedestal 210 that is mounted and fixed on a work table (not shown) for observation, for example. The pedestal 210 is integrally provided with a column 220 whose axial direction is substantially along the vertical direction.
Further, the pedestal part 210 is provided with an X-axis moving part 230 and a Y-axis moving part 240. The X-axis moving unit 230 and the Y-axis moving unit 240 are provided with a mounting plate 250 that can move in the horizontal direction with respect to the pedestal unit 210. The mounting plate 250 is moved in one direction which is the X-axis direction in the plane direction by the rotation operation of the X-axis rotation operation unit 231 of the X-axis movement unit 230, and the Y-axis rotation operation unit 241 of the Y-axis movement unit 240 is moved. It is moved in the other direction which is the Y-axis direction orthogonal to one direction in the plane direction by the rotation operation.
In addition, the mounting plate 250 is provided with a mounting glass 251 so that, for example, measurement by transmitted illumination is possible.

The microscope main body 300 is disposed on the support column 220 of the mounting table 200 so as to be movable along the vertical direction. The microscope main body 300 includes a housing 310. The casing 310 is provided with a Z-axis rotation operation unit 320 that is arranged so as to be rotatable and moves the casing 310 along the vertical direction by the rotation operation. Furthermore, an eyepiece lens 330 is disposed in the housing 310.
Further, as shown in FIG. 2, an optical system member 340 such as a first reflection mirror 341, a second reflection mirror 342, a third reflection mirror 343, and a half mirror 344 is disposed in the housing 310. Further, the housing 310 is provided with a light source unit 350 that is provided with, for example, a halogen lamp and emits light. The light source unit 350 is disposed so as to emit light downward along a substantially vertical direction.
The light emitted from the light source unit 350 is reflected by the first reflecting mirror 341 and further reflected downward by the half mirror 344 through the observation hole 311 opened in the lower surface of the housing 310 to irradiate the object to be observed. Is done. Further, the light irradiated to the object to be observed is reflected, transmitted through the half mirror 344, reflected by the second reflecting mirror 342 and the third reflecting mirror 343, and magnified by the eyepiece lens 330 to form an image.

In addition, an objective lens switching device 400 is disposed on the lower surface of the housing 310 of the microscope main body 300 corresponding to the observation hole 311. In this objective lens switching device 400, a plurality of, for example, two objective lenses 500 of a finite correction optical system are detachably mounted, and the objective lens 500 is switched to a state positioned on the optical axis by an observer's operation. In the present embodiment, a configuration using a relatively low magnification objective lens 510 and a relatively high magnification objective lens 520 as the objective lens 500 is illustrated.
As shown in FIGS. 3 to 5, the objective lens switching device 400 includes a main body portion 410, a moving portion 420, positioning means 430, and a movable portion 440 that is a so-called bearing.

The main body 410 has a holding plate 411 formed in a longitudinal plate shape with, for example, a steel plate. In the approximate center of the holding plate 411, a longitudinal engaging recess 412 is provided along the longitudinal direction. Further, a longitudinal observation hole 413 is formed in the center of the holding plate 411 so as to be located in the engagement recess 412 and to extend in the longitudinal direction. Further, on both sides of the holding plate 411 in the longitudinal direction, rib-shaped side plate portions 414 are provided in the same direction along the longitudinal direction. One of the side plate portions 414 is integrally formed, and the other is fixedly attached to the holding plate 411 by screws.
In addition, on the opposing surface of the side plate portion 414, a first movable concave groove portion 415 having a concave groove shape along the longitudinal direction is provided. Further, as shown in FIGS. 5 and 6, the holding plate 411 includes a positioning means 430 in the vicinity of one end portion in the longitudinal direction and the substantially central portion on the surface on which the side plate portion 414 is provided. A positioning hole 431 as a joint is formed.
The main body 410 has a state in which the plane direction of the holding plate 411 is orthogonal to the optical axis of the microscope main body 300, that is, a state where it intersects the optical axis of light emitted from the observation hole 311 of the microscope main body 300. And attached to the lower surface of the housing 310 of the microscope main body 300.

As shown in FIGS. 3 to 5, the moving part 420 is made of, for example, a steel plate and has a thickness dimension that is substantially the same as the height dimension of the side plate part 414 of the main body part 410 and is substantially the same as the facing distance between the side plate parts 414. It is formed in a substantially plate shape with a width dimension. At the approximate center on one surface side of the moving part 420, the engaging part 412 swells at a height dimension substantially the same as the depth dimension of the engaging concave part 412 of the main body part 410, and engages slidably in the engaging concave part 412. A joint convex portion 421 is provided. Further, on both sides of the moving portion 420 in the longitudinal direction, there are provided second movable groove portions 422 in a groove shape along the longitudinal direction and facing the first movable groove portion 415 of the main body portion 410.
A movable part 440 is disposed between the first movable groove part 415 and the second movable groove part 422, and the moving part 420 slides the engagement convex part 421 in the engagement concave part 412 of the main body part 410. The movable portion 440 slides relatively linearly in the plane direction, that is, in the direction perpendicular to the optical axis of the microscope body 300 and in the longitudinal direction, with the engagement being possible and the stacking on the holding plate 411 of the body portion 410. The main body 410 is movably held.
Further, the first mounting hole 423 and the second mounting hole 424 are formed in the moving portion 420 so as to be arranged side by side along the longitudinal direction. The first mounting hole 423 and the second mounting hole 424 are in a state in which the surface side opposite to the holding plate 411 of the main body 410, that is, the surface side opposite to the side from which the engaging convex portion 421 protrudes opens in a large diameter. Each has a stepped portion 425.

Further, the moving part 420 is provided with a first attachment ring 450 as an attachment member and a second attachment ring 460 as an attachment member.
As shown in FIGS. 3, 4, and 7, the first mounting ring 450 is formed in an annular shape whose outer diameter is smaller than the inner diameter of the first mounting hole 423. A mounting screw portion 451 that is a female screw to which the objective lens 500 (510) is screwed is provided on the inner peripheral surface of the first mounting ring 450. Further, a flange portion 452 that protrudes like a bowl in the outer peripheral direction is provided at one axial end edge of the first mounting ring 450 so that the outer diameter is larger than the inner diameter of the first mounting hole 423 and smaller than the stepped portion 425. It has been. Then, the first attachment ring 450 is fitted and held so that the flange portion 452 can be slidably contacted with the step portion 425 in a state where the central axis is translated in the first attachment hole 423.
As shown in FIGS. 3, 4, and 8, the second mounting ring 460 is formed in an annular shape whose outer diameter is approximately the same as the inner diameter of the second mounting hole 424. A mounting screw portion 461 that is a female screw to which the objective lens 500 (520) is screwed is provided on the inner peripheral surface of the second mounting ring 460. The mounting screw portion 451 of the first mounting ring 450 and the mounting screw portion 461 of the second mounting ring 460 are formed at the same pitch, and the objective lens 500 of any finite correction optical system can be mounted. Further, a male screw portion 462 that is screwed into the mounting screw portion 426 of the second mounting hole 424 is formed on the outer peripheral surface of the second mounting ring 460.

In addition, as shown in FIGS. 3, 4, and 7, the moving unit 420 is provided with an alignment mechanism 470. The alignment mechanism 470 includes three adjustment screws 471 that are screwed at substantially equal intervals in the circumferential direction at the peripheral edge of the first mounting hole 423 on the side where the step 425 faces. Each of the adjusting screws 471 is provided with a ring-shaped pressing portion 472. These pressing portions 472 have an inclined surface 473 that is engaged with the head portion 471A of the adjusting screw 471 and is reduced in diameter toward the screw portion 471B side of the adjusting screw 471.
When the adjustment screw 471 is screwed into the moving part 420, the inclined surface 473 comes into contact with the outer peripheral edge of the first mounting ring 450 and is prevented from falling off from the first mounting hole 423. The outer peripheral edge of one attachment ring 450 is slidably brought into sliding contact with the inclined surface 473 of the pressing portion 472, and a pressing force is applied to move the first attachment ring 450 away from the adjustment screw 471.
Thus, the alignment mechanism 470 pushes the first mounting ring 450 in the first mounting hole 423 along the plane direction of the moving unit 420 in response to the screwing of the three adjusting screws 471 provided with the pressing unit 472. Move to the pulling state and position.

Further, the moving unit 420 is provided with a focus adjusting mechanism 480 as shown in FIGS. The focus adjustment mechanism 480 includes an annular nut portion 482 having an internal thread portion 481 that engages with the external thread portion 462 of the second mounting ring 460 on the inner peripheral surface.
The nut portion 482 is screwed to the second mounting ring 460 and the end surface in the axial direction comes into contact with the step portion 425 of the second mounting hole 424, whereby the second mounting ring 460 is positioned and fixed to the moving portion 420. The nut portion 482 is moved by screwing the second mounting ring 460 in the axial direction in a state where the end surface in the axial direction is screwed to the second mounting ring 460 in a state of being separated from the stepped portion 425 of the second mounting hole 424. It becomes movable in the axial direction of the second mounting hole 424 that is the thickness direction of the portion 420.

Further, as shown in FIGS. 4 to 6, the moving part 420 is positioned on one end side in the longitudinal direction, specifically, on the second mounting hole 424 side far from the first mounting hole 423, and positioning means. The click part 432 which comprises 430 is provided.
As shown in FIGS. 5 and 6, the click portion 432 includes a cylindrical portion 433 having a substantially bottomed cylindrical shape that is fitted and fixed to an attachment hole 427 formed through the moving portion 420. The tube portion 433 is fitted and fixed in the mounting hole 427 in a state where the tube portion 433 opens toward the side where the engagement convex portion 421 of the moving portion 420 protrudes. Further, an urging means 434 such as a coil spring is disposed on the inner peripheral side of the cylindrical portion 433. Further, a locking portion 435 that is urged to be pushed out from the one end opening in the axial direction by a restoring force due to elastic deformation of the urging means 434 is disposed on the inner peripheral side of the cylindrical portion 433. The locking portion 435 is formed in a spherical shape, for example, and is urged by the urging means 434 so that the spherical surface advances from the cylindrical portion 433.
The positioning means 430 is configured so that the engaging portion 435 of the click portion 432 is positioned to the main body 410 while the engaging convex portion 421 of the moving portion 420 is in contact with one end in the longitudinal direction of the engaging concave portion 412 of the main body portion 410. The hole 431 is engaged and positioned.

[Operation of microscope]
Next, the operation of observing the object to be observed will be described as the operation of the microscope.

First, the low-magnification objective lens 510 is attached to the first attachment ring 450 of the moving unit 420, and the high-magnification objective lens 520 is attached to the second attachment ring 460. Further, the low-magnification objective lens 510 is positioned by moving the moving unit 420 to a position on the optical axis, for example, the state shown in FIG. Then, power is supplied to the microscope 100 to turn on the light source unit 350, and a pseudo object to be observed, that is, an adjustment sample (not shown) is placed on the placement plate 250 to be in an observable state.
And an adjustment process is implemented in this state.

That is, the mounting plate 250 is moved horizontally by operating the X-axis moving unit 230 and the Y-axis moving unit 240 in a state where the objective lens 510 is visually positioned almost directly above the object to be observed, and the Z-axis rotating operation unit. The microscope main body 300 is moved up and down by operating 320. Thereafter, the adjustment sample is confirmed through the eyepiece lens 330, and the reference position provided on the adjustment sample is positioned at the center of the visual field, for example, the reference line provided on the eyepiece lens is positioned at the center of intersection. Then, the mounting plate 250 is moved by operating the X-axis moving unit 230 and the Y-axis moving unit 240. Further, the microscope main body 300 is moved by operating the Z-axis rotation operation unit 320 in a direction in which the objective lens 510 is separated from the adjustment sample to a focus position.
Then, when the reference position is focused at the center of the visual field, the moving unit 420 is moved so that the objective lens 510 is positioned on the optical axis.

Next, the moving unit 420 is moved so that the objective lens 520 is positioned on the optical axis. In this state, the nut 482 of the focus adjustment mechanism 480 is loosened, and the objective lens 520 is moved along the optical axis together with the second attachment ring 460 by a screwing operation of screwing or loosening the second attachment ring 460. ,match the focal point.
Thereafter, the moving unit 420 is moved so that the objective lens 510 is positioned on the optical axis. Then, the adjustment lens 471 of the alignment mechanism 470 is appropriately screwed or loosened to move the objective lens 510 together with the second mounting ring 460 in a direction perpendicular to the optical axis, so that the optical axis centers are the same. Adjust so that
By carrying out the above two adjustments, the observed image does not deviate from the center of the field of view even when the objective lens 500 (510, 520) is switched, and the focused image is also in focus. The focus adjustment of the microscope 300 becomes unnecessary.
By these adjustment steps, after the alignment and focus adjustment are completed, an observation step is performed in which the object to be observed is actually placed on the placement plate 250 and observed.

[Operation effect of microscope]
As described above, in the above-described embodiment, the main body 410 attached to the microscope main body 300 of the finite correction optical system is linearly aligned in one direction which is a longitudinal direction on a plane orthogonal to the optical axis of the microscope main body 300. The moving unit 420 is movably disposed in the movable unit 420, and a plurality of objective lenses 500 (510, 520) of the finite correction optical system are detachably attached to the moving unit 420 in parallel along the moving direction. Then, the objective lens 500 (510, 520) attached to the moving part 420 is moved to at least one of the main body part 410 and the moving part 420 in a state where the objective lens 500 (510, 520) is positioned on the optical axis of the microscope main body 300. Positioning means 430 for restricting relative movement of the portion 420 is provided.
For this reason, when switching the objective lens 500 (510, 520) of the finite correction optical system having an error in the specific optical axis with a configuration in which an image is formed independently, the plurality of objective lenses 500 (510, 520) are attached. Since the moving unit 420 is configured to move in a straight line in one direction, a slide moving configuration, which is a simple configuration in which an error due to switching of the objective lens 500 (510, 520) is not easily generated, can be used. With this microscope 100, high-precision observation can be obtained while switching the magnification according to the state of the object to be observed, and it is possible to easily improve the manufacturability and reduce the size. Furthermore, since the configuration is simple, an error of the optical axis center that occurs for each objective lens 500 (510, 520) and each mounting portion that mounts the plurality of objective lenses 500 (510, 520) in a switchable manner, that is, A configuration for adjusting each error of the first mounting hole 423 and the first mounting ring 450 and the second mounting hole 424 and the second mounting ring 460 can be easily provided, and the finite correction optical system has high versatility and high. Improvements in manufacturability and downsizing of a configuration capable of accurate observation can be easily obtained.

In the above embodiment, the moving part 420 formed in a substantially longitudinal plate shape is disposed in the main body part 410 so as to be slidable in the longitudinal direction of the plane direction, and at least of the main body part 410 and the moving part 420. A locking portion 435 having a curved convex surface on either side is provided so that a spherical surface that is a curved convex surface can move forward and backward substantially along the thickness direction of the moving portion 420, and at least one of the locking portions 435 can be engaged and disengaged. A concave engaging portion is provided, and the moving portion 420 is relatively moved and positioned by engaging and disengaging the locking portion 435 and the positioning hole 431.
For this reason, errors due to movement of the moving unit 420 that moves to switch the objective lens 500 (510, 520), errors due to positioning, and the like are less likely to occur with a simple configuration, and the finite correction optical system has high versatility and high accuracy. A configuration that allows easy observation is easily obtained.
In particular, since a spherical body is used as the locking portion 435, a general-purpose product can be used, and a configuration for positioning with a simple configuration can be easily obtained.
Furthermore, as a configuration for positioning, the main body 410 is provided with an engaging concave portion 412, and an engaging convex portion 421 that is slidably engaged with the engaging concave portion 412 is provided in the moving portion 420. It moves to the direction and it is set as the structure positioned at the position which the engagement recessed part 412 and the engagement convex part 421 contact | abutted. For this reason, more accurate positioning can be obtained.

In the above embodiment, a plurality of, for example, the first attachment ring 450 and the second attachment ring 460 to which the objective lenses 500 (510, 520) are detachably attached are provided in the moving unit 420. Then, the first attachment ring 450 is positioned so as to be movable with respect to the moving unit 420 along the plane in which the moving unit 420 moves with respect to the main body 410 by the alignment mechanism 470, and the moving unit 420 is moved by the focus adjusting mechanism 480. On the other hand, the second mounting ring 460 is movably positioned along the optical axis direction of the microscope main body 300.
For this reason, not only the error in the mounting part to which the objective lens 500 (510, 520) is mounted but also the error for each objective lens 500 (510, 520) can be adjusted, and the finite correction optical system is highly versatile and highly accurate. Observation is easily obtained.
In other words, the object lens 500 (510, 520) for the finite correction optical system is manufactured with an emphasis on obtaining a predetermined magnification, so that the object lens 500 (510, 520) can be mounted from the mounting seat. The focal distance, which is the distance to the object to be observed, is not necessarily a constant distance. Thus, in a configuration in which only one objective lens 500 is attached, focus adjustment may be performed each time. However, in the objective lens switching device 400 that switches a plurality of objective lenses 500 (510, 520), the objective lens 500 is used. (510, 520) It is necessary to adjust the focus in accordance with the individual focal distance.
And as an adjustment method, the following two methods can be implemented.
(Method of adjusting the focal distance between objective lenses)
A method for adjusting the low-magnification objective lens 510 and the objective lens 520 attached to the focus adjustment mechanism 480 so that the focal points thereof coincide with each other (a method of adjusting the magnifications of the two objective lenses)
The focus adjustment mechanism 480 is adjusted so as to match the magnification of the objective lens 500 (510, 520) attached to the alignment mechanism 470 side and the focus adjustment mechanism 480 side. By these methods, each objective lens 500 (510, 520) is adjusted. The inherent error can also be adjusted, and high-precision observation can be easily obtained with a configuration in which the objective lens 500 (510, 520) of the finite correction optical system is switched.

Furthermore, in the above embodiment, the first mounting ring 450, which is any one to which the objective lens 510 of the finite correction optical system is mounted, is appropriately moved by the alignment mechanism 470 to adjust the optical axis, and the finite correction optical system. The second attachment ring 460, which is at least one of the other to which the objective lens 520 is attached, is appropriately moved by the focus adjustment mechanism 480 to adjust the focus.
For this reason, not only the error at the time of switching of the objective lens 500 (510, 520) and the error of the mounting portion to which the objective lens 500 (510, 520) is attached, but also for each objective lens 500 (510, 520) of the finite correction optical system. Even if an error occurs, the alignment mechanism 470 and the focus adjustment mechanism 480 are configured for each mounting member with a configuration in which an error at the time of switching the objective lens 500 (510, 520) by moving in one direction on a straight line is unlikely to occur. Each error can be adjusted without providing it. Therefore, high-accuracy observation can be obtained, and improvement of manufacturability and size reduction due to simplification of the configuration, reduction of cost, etc. can be obtained, and simplification of adjustment work for observation can be obtained. Efficiency can be obtained.

In particular, in the above embodiment, the low-magnification objective lens 510 is attached to the first attachment ring 450 moved by the alignment mechanism 470, and the high-magnification objective is attached to the second attachment ring 460 moved by the focus adjustment mechanism 480. The lens 520 is attached.
For this reason, the optical axis is adjusted by the objective lens 510 having a low magnification, and the image observed from the center of the field of view due to the inherent error by the objective lens 500 (510, 520) of the finite correction optical system and the error in the mounting portion is shifted from the center. The defocus due to the inherent error caused by the objective lens 500 (510, 520) of the finite correction optical system can be adjusted by the objective lens 520 having a high magnification, and the optical axis tonality and the focus adjustment are performed respectively. In addition, good observation can be easily obtained by switching the objective lens 500 (510, 520) and switching the magnification.

Moreover, in the said embodiment, the position which surrounds the 1st attachment ring 450 in the circumferential direction at least three places in the vicinity of the outer periphery of the cyclic | annular 1st attachment ring 450 to which the objective lens 510 is attached to an inner peripheral side as the alignment mechanism 470. Next, the first mounting ring 450 is moved by being pushed and pulled in at least three directions from the outer peripheral side by being screwed to the moving part 420 and pressed in a state of sliding contact with the first mounting ring 450 according to the screwed state. A screw 471 is provided. Then, at least one of the outer periphery of the first attachment ring 450 and the adjustment screw 471, specifically, the pressing screw 472 provided on the adjustment screw 471, and the adjustment screw 471 according to the screwed state of the adjustment screw 471 An inclined surface 473 is provided for applying a pressing force for moving the first mounting ring 450 away from each other.
For this reason, adjustment screws 471 are provided in sliding contact with the first mounting ring 450 so as to surround the first mounting ring 450 at three or more locations, and the pressing force is such that the sliding contact portions are separated from each other with respect to screwing. Since the optical axis is adjusted with a simple configuration in which the pressing portion 472 having the inclined surface 473 that generates force is provided, simplification of the configuration, improvement in manufacturability, miniaturization, and the like can be easily obtained. Therefore, there is no need to increase rigidity so as not to cause an error as a configuration for moving the moving unit 420 to which the objective lens 500 (510, 520) is mounted in order to switch the objective lens 500 (510, 520), and the objective is not required. Simplification of the configuration for switching the lens 500 (510, 520) is also easily obtained.
Further, as the alignment mechanism 470, a pressing portion 472 is provided on the adjustment screw 471, and an inclined surface 473 is provided on the pressing portion 472. For this reason, a stable slidable contact state between the first mounting ring 450 and the inclined surface 473 that exerts a pressing force depending on the screwing state of the adjusting screw 471 can be easily obtained, and smooth and highly accurate adjustment can be easily performed with a simple configuration. can get.

In the above embodiment, as the focus adjustment mechanism 480, the second mounting ring 460 provided on the outer peripheral surface of the annular second mounting ring 460 to which the objective lens 520 is mounted on the inner peripheral side is screwed into the moving part 420. A female screw portion 481 provided on the inner peripheral surface of the annular nut portion 482 is screwed to the male screw portion 462. The second mounting ring 460 is positioned or moved in the optical axis direction by bringing the axial end surface of the nut portion 482 into contact with or separating from the stepped portion 425 of the moving unit 420 according to the screwed state with the second mounting ring 460. The focus is adjusted by making it movable.
Therefore, the male screw portion 462 provided on the outer periphery of the annular second mounting ring 460 to which the objective lens 500 (510, 520) is attached on the inner peripheral side is screwed to the moving portion 420, and the male screw of the second mounting ring 460 is provided. The internal threaded portion 481 provided on the inner peripheral side of the annular nut portion 482 is screwed to the portion 462, and the end surface in the axial direction of the nut portion 482 is brought into contact with or separated from the stepped portion 425 of the moving portion 420, so that the second attachment Focus adjustment can be performed with a simple configuration in which the ring 460 can be positioned or moved with respect to the moving unit 420. Accordingly, simplification of the configuration, improvement in manufacturability, and miniaturization can be easily obtained, and the configuration is simplified, so that the objective lens 500 (510, 520) is switched to switch the objective lens 500 (510, 520). There is no need to increase rigidity so as not to cause an error as a configuration for moving the mounted moving unit 420, and a configuration for switching the objective lens 500 (510, 520) can be easily simplified.

Moreover, in the said embodiment, the position which is farthest with respect to the 1st attachment ring 450 with which the alignment mechanism 470 engages among two of the some 1st attachment ring 450 and the 2nd attachment ring 460, ie, 2nd. A click portion 432 of the positioning means 430 is provided on the mounting ring 460 side.
For this reason, the positioning error by the positioning means 430 can be reliably adjusted by the alignment mechanism 470 which is the farthest position, and a better observation can be obtained.

Furthermore, in the said embodiment, the movable part 440 which is what is called a bearing is provided as a structure to which the moving part 420 is moved. For this reason, the structure which can carry out the movement part 420 so that a smooth and fine movement can be performed, and also the moving part 420 and the main-body part 410 do not rattle easily is obtained, and more highly accurate. Observation is possible with a simple configuration.
Further, the main body 410 is held by the movable portion 440 so as to be movable on both sides in the moving direction of the moving portion 420. For this reason, rattling is further prevented and stable movement is obtained. Furthermore, one side plate part 414 of the main body part 410 is attached and fixed by screwing, and the moving part 420 can be assembled movably without rattling, and smooth movement can be easily obtained with a simple structure.
Moreover, the moving part 420 is formed in plate shape. For this reason, the objective lens switching device 400 can be miniaturized and the productivity can be improved. Furthermore, a configuration for sliding movement can be easily obtained.

[Modification of Embodiment]
The aspect described above shows one aspect of the present invention, and the present invention is not limited to the above-described embodiment, and within the scope of achieving the objects and effects of the present invention. Needless to say, the modifications and improvements are included in the contents of the present invention. In addition, the specific structure and shape in carrying out the present invention may be used as other structures and shapes within the scope of achieving the object and effect of the present invention.

In other words, the microscope according to the present invention may be configured as a plurality of lenses in which the lens is also disposed in the housing 310 as the eyepiece lens 330, for example. The binocular type is exemplified as the eyepiece 330, but it may be a monocular type.
Further, as the mounting table 200 on which the object to be observed is mounted, a configuration in which the mounting plate 250 can move in the X-axis direction and the Y-axis direction orthogonal to the optical axis is illustrated, but not limited to this configuration. It is good also as a structure which the mounting plate 250 does not move. Moreover, as a structure to move, it is not restricted to the structure provided with the X-axis moving part 230 and the Y-axis moving part 240 mentioned above, For example, you may set it as an electrically driven type. In addition, any moving configuration can be used.
Moreover, although the structure of the bright field illumination which provided the light source part 350 in the microscope main body 300 was illustrated, for example, the structure which provides a light source in the mounting base 200, and also various kinds according to desired observation states, such as various dark field illuminations Lighting methods can be used.
In addition, as described above, the configuration in which the two objective lenses 500 (510, 520) are mounted and switched is illustrated, but the configuration is not limited to the configuration in which only two objective lenses 500 are mounted, and the configuration in which three or more can be mounted. Also good. There is not limited to a configuration in which all the objective lenses 500 are mounted and used, such as mounting only two in a configuration in which three or more can be mounted.

Moreover, although the structure which attaches the objective lens 500 (510,520) to the 1st attachment ring 450 and the 2nd attachment ring 460 which were provided in the movement part 420 so that a movement was illustrated, as a structure attached directly to the movement part 420, for example, Good. Further, the configuration for attaching the objective lens 500 is not limited to an annular configuration, and any configuration can be adopted. That is, when the alignment mechanism 470 and the focus adjustment mechanism 480 are provided, various configurations according to the configuration of the movement restriction can be applied.
In the above description, the alignment mechanism 470 is provided on the first attachment ring 450 side and the focus adjustment mechanism 480 is provided on the second attachment ring 460 side. Furthermore, the alignment mechanism 470 and the focus adjustment mechanism 480 may be provided on both sides.

Furthermore, although the moving part 420 was formed in plate shape, it is not restricted to plate shape, It is good also as block shapes, such as rectangular shape.
Moreover, although the movable part 440 was provided as a structure to which the moving part 420 is moved, any structure, such as a structure in which the movable part 440 is not provided and the side plate part 414 is directly slidably held, can be used. Furthermore, the movable portion 440 is not limited to a bearing structure, and may be configured to be held movably by magnetism such as a so-called linear motor.

The positioning means 430 for positioning the moving part 420 is not limited to the one constituted by the positioning hole 431 and the click part 432 described above, but simply positioning based on movement restriction of the engaging concave part 412 and the engaging convex part 421. Further, various configurations such as a configuration in which a click feeling is given to the side plate portion 414 by a leaf spring or the like can be used. And although the positioning hole 431 was provided in the main-body part 410 and the click part 432 was provided in the moving part 420, it is good also as a reverse structure. Furthermore, it is good also as a structure positioned in the opposing direction of the side-plate part 414 and the moving part 420. FIG.
Moreover, although it provided and demonstrated in the position far from the 1st attachment ring 450, you may provide in the 1st attachment ring 450 side. Furthermore, a plurality of locations may be provided. In the case of providing a plurality, more reliable positioning can be performed.
A spherical object is exemplified as the locking portion 435, but the curved convex surface may be configured to advance and retract as a so-called mushroom shape, for example. Further, although the biasing means 434 such as a coil spring has been described, any configuration for moving the curved convex surface back and forth, for example, using an elastic member such as rubber, or biasing hydraulically or pneumatically, can be used. Applicable.

  In addition, the specific structure and procedure for carrying out the present invention may be changed to other configurations as long as the object of the present invention can be achieved.

It is a perspective view which shows the microscope in this invention. It is the side view which notched a part which shows the microscope in the said embodiment. It is the side view which notched a part which shows the objective lens switching device in the said embodiment. It is a top view which shows the objective lens switching apparatus in the said embodiment. It is sectional drawing in the position of the positioning means which shows the objective lens switching device in the said embodiment. It is sectional drawing which notched a part which shows the positioning means vicinity of the objective lens switching apparatus in the said embodiment. It is sectional drawing which notched a part which shows the 1st attachment hole vicinity of the objective lens switching apparatus in the said embodiment. It is sectional drawing which notched a part which shows the 2nd attachment hole vicinity of the objective lens switching apparatus in the said embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 ... Microscope 300 ... Microscope main body 330 ... Eyepiece lens 400 ... Objective-lens switching device 410 ... Main-body part 412 ... Engagement recessed part which can function as a positioning means 420 ... Moving part 421 ... Function as a positioning means Possible engaging projections 430 ... positioning means 431 ... positioning holes as engaging portions 435 ... locking portions 450 ... first mounting ring as mounting member 460 ... second mounting ring as mounting member 462 …… Male thread 470 …… Alignment mechanism 471 …… Adjustment screw 473 …… Inclined surface 480 …… Focus adjustment mechanism 481 …… Female thread 482 …… Nut 500 (510, 520)… Objective lens

Claims (9)

An objective lens switching device that is disposed in a microscope body of a finite correction optical system and in which a plurality of objective lenses of the finite correction optical system are detachably attached,
A main body attached to the microscope;
A moving part that is arranged to be linearly movable in one direction on a plane that intersects the optical axis of the microscope main body, and in which the objective lens is mounted in parallel in the moving direction;
Relative movement of the main body and the moving portion relative to the main body in a state where the objective lens is provided on at least one of the main body and the moving portion and the objective lens is positioned on the optical axis of the microscope main body. Positioning means for regulating the state;
An objective lens switching device characterized by comprising: The objective lens switching device according to claim 1,
The moving part is formed in a substantially longitudinal plate shape, and is arranged in the main body part so as to be slidable in the longitudinal direction of the plane direction.
The positioning means is provided on at least one of the main body part and the moving part, and has a curved convex surface, and a locking part in which the curved convex surface can advance and retreat substantially along the thickness direction of the moving part. An objective lens switching device comprising: a concave engaging portion that is provided on at least one of the main body portion and the moving portion, and that engages and disengages the locking portion. The objective lens switching device according to claim 1 or 2,
A plurality of attachment members provided in the moving unit, to which the objective lens is detachably attached; and
An alignment mechanism that is provided in the moving portion so as to engage with the mounting member and positions the mounting member so as to be movable with respect to the moving portion along a planar direction in which the moving portion moves relative to the main body portion. When,
A focus adjusting mechanism provided on the moving portion so as to be engaged with the mounting member and positioning the mounting member so as to be movable along the optical axis direction of the microscope main body with respect to the moving portion. A characteristic objective lens switching device. The objective lens switching device according to claim 3,
The alignment mechanism is provided in a state of engaging with any one of the plurality of attachment members,
The objective lens switching device, wherein the focus adjustment mechanism is provided in a state of being engaged with at least one of the attachment members other than the attachment member with which the alignment mechanism is engaged. The objective lens switching device according to claim 3 or 4, wherein
The attachment member is formed in an annular shape to which an objective lens is attached on the inner peripheral side,
The alignment mechanism is screwed to the moving portion at a position surrounding the mounting member in at least three locations in the circumferential direction near the outer periphery of the mounting member, and slidably contacts the mounting member in response to screwing into the moving portion. It is equipped with a plurality of adjustment screws that press into the state,
At least one of the outer periphery of the mounting member and the adjustment screw is provided with an inclined surface for applying a pressing force to move in a direction away from each other in accordance with the screwing of the adjustment screw. Objective lens switching device. The objective lens switching device according to any one of claims 3 to 5,
The attachment member is formed in an annular shape having a male screw portion that is attached to the inner peripheral side of the objective lens and is screwed to the moving portion on the outer peripheral surface.
The focus adjustment mechanism is formed in an annular shape having an internal thread surface on the inner peripheral surface thereof that is screwed to the external thread portion of the mounting member, and an axial end surface is abutted against the moving portion according to a screwed state with the mounting member. An objective lens switching device comprising an annular nut portion that enables positioning or movement of the mounting member by contact or separation. The objective lens switching device according to any one of claims 3 to 6,
The attachment member moved by the alignment mechanism is mounted with a low-magnification objective lens,
An objective lens switching device, wherein the attachment member moved by the focus adjustment mechanism is mounted with a high-magnification objective lens. The objective lens switching device according to any one of claims 3 to 7,
The objective lens switching device, wherein the positioning means is provided at a position farthest from the mounting member with which the alignment mechanism is engaged among the plurality of mounting members. A microscope main body of a finite correction optical system including a mounting table for mounting an object to be observed and an eyepiece;
The objective lens switching device according to any one of claims 1 to 8, which is disposed in the microscope main body,
A microscope characterized by comprising:

Images