JP2007309676A - Termination probe for circuit measurement - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain a termination probe for circuit measurement capable of performing ideal termination to a circuit to be measured which has the number of ports larger than the number of ports connectable to a measuring instrument, and has port electrodes of a fine pitch. <P>SOLUTION: The termination probe 10 for circuit measurement is used on the occasion of measuring electric characteristics of the circuit to be measured, and has a plurality of contacting electrodes 12, 13 at its tip. The plurality of contacting electrodes 12, 13 have resistors 14 between predetermined contacting electrodes, and do not have any conductive paths to the probe body side. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a termination probe for circuit measurement used when measuring frequency characteristics of a circuit under test or measurement of electrical characteristics such as time axis waveform measurement, and in particular, terminates a circuit with a narrow signal and ground electrode pitch. The present invention relates to an end probe for circuit measurement used when necessary.

  There are various conventional circuit measurement probes for measuring the electrical characteristics of a circuit under test (for example, see Non-Patent Documents 1 and 2). FIG. 11 is a configuration diagram of a conventional circuit measurement probe, which is shown in three views: (a) a top view, (b) a rear view, and (c) a side view. The circuit measurement probe 100 is a probe (hereinafter referred to as “GSSG probe”) having four terminals of ground (hereinafter referred to as “GND”), signal, signal, and GND.

  The conventional circuit measurement probe 100 includes a signal terminal 101, a GND terminal 102, and a connector 103. Further, a signal contact electrode 101 a is provided at the tip of the signal terminal 101, and a GND contact electrode 102 a is provided at the tip of the GND terminal 102. In the description in this specification, the entire structure including these terminals, connectors, and portions between them is referred to as a probe.

  Next, the operation of the conventional circuit measurement probe 100 will be described. The two signal contact electrodes 101 a respectively pass through the probe and are electrically connected to the signal lines of the two connectors 103. Further, the GND of the connector 103 is electrically connected to the GND terminal 102.

  A coaxial cable is usually connected to the connector 103, and is connected to a measuring instrument at the end. When such a probe is used, the signal contact electrode 101a and the GND contact electrode 102a are brought into contact with the signal electrode and the GND electrode of the circuit under measurement, respectively. Therefore, by using such a probe, it is possible to satisfactorily connect the circuit to be measured and the measuring instrument in which the pitch of the signal and GND electrodes is very narrow.

  When measuring the frequency characteristics of the circuit under measurement, the characteristics from the measuring instrument to the signal contact electrode 101a at the tip of the probe are measured in advance in each signal path, and this measurement system is obtained from the measurement data of the circuit under measurement. Subtract minutes. Obtaining data for subtraction is called calibration.

  FIG. 12 is a diagram showing a measurement example when four conventional circuit measurement probes 100 shown in FIG. 11 are used. On the substrate 200, a circuit to be measured 203 (corresponding to four wires in this example) having a signal contact electrode 201 and a GND contact electrode 202 at its ends is mounted. The GND on the substrate 200 is omitted except for the GND contact electrode 202.

  Next, an operation based on the configuration of FIG. 12 will be described. The signal contact electrodes 101a and the GND contact electrodes 102a at the tips of the four circuit measurement probes 100 are brought into contact with the signal contact electrodes 201 and the GND contact electrodes 202 at the ends of the circuit to be measured 203, respectively. Then, the connector 103 of each circuit measurement probe 100 is connected to a measuring instrument (not shown) via a cable. As a result, the measurement of the circuit under test 203 of 8 ports at both ends of the four wires is performed.

  However, the number of ports of a normal measuring instrument is generally smaller than the eight ports of the circuit under test 203 shown in FIG. For example, commercially available frequency characteristic measuring instruments generally have 2 ports, and even expensive ones have only 4 ports. For this reason, all connectors 103 that cannot be connected to a measuring instrument are attached with 50Ω terminators for measurement. Therefore, in order to create data for all eight ports, it is necessary to change the combination of the port to be measured and the port to which the terminator is attached and to measure a plurality of times and combine a plurality of measurement results.

  Here, the reason why the resistance value of the terminator is 50Ω is that the input / output port impedance of the measuring instrument and the port impedance of the circuit under test 203 are generally unified at 50Ω. If matched with a different value, the terminator must also match that value. In the present specification, all cases of 50Ω matching will be described below, but the same applies to cases other than 50Ω.

Cascade Microtech Co., Ltd. Catalog “Infinity Probe (registered trademark)” Cascade Microtech Co., Ltd. Catalog “Eye Pass (registered trademark) series multi-contact power supply bypass probe”

  However, the prior art has the following problems. In order to perform measurement when the number of ports of the circuit under test 203 is larger than the number of ports of the measuring instrument in the conventional measurement method according to FIGS. 11 and 12, in order to measure the characteristics of only the circuit under test 203, the measurement system Each port was calibrated at the probe tip.

  However, calibration is performed only at the port connected to the measuring instrument via the circuit measuring probe 100. Therefore, the port of the circuit to be measured 203 with which the circuit measuring probe 100 to which the terminator is attached is in contact with the circuit to be measured is connected to an extra circuit at the end of the circuit to be measured 203. Therefore, it was difficult to measure accurately.

  The present invention has been made in order to solve the above-described problems. In the circuit having a port electrode with a fine pitch, the number of ports of the circuit to be measured is larger than the number of ports connectable to a measuring instrument. On the other hand, an object of the present invention is to obtain a circuit measurement termination probe that realizes termination at an ideal position.

  A circuit measurement termination probe according to the present invention is a circuit measurement termination probe that is used when measuring the electrical characteristics of a circuit under test, and has a plurality of contact electrodes at a tip portion. In addition, a resistor is provided between predetermined contact electrodes, and a conductive path to the probe main body side is not provided.

  According to the present invention, a measuring instrument is provided with a structure having a plurality of contact electrodes at the tip, a resistance between predetermined contact electrodes, and no conductive path to the probe body side. The number of ports in the circuit to be measured is larger than the number of ports that can be connected to the circuit, and a circuit-measuring termination probe that achieves termination at an ideal position for a circuit with port electrodes with a fine pitch is obtained. Can do.

  Hereinafter, preferred embodiments of a circuit measurement termination probe of the present invention will be described with reference to the drawings.

Embodiment 1 FIG.
FIG. 1 is a diagram showing the structure of a circuit measurement termination probe according to Embodiment 1 of the present invention. Furthermore, the inside of a broken line is an enlarged view of the front-end | tip part of the termination probe for circuit measurements. The tip of the circuit measurement termination probe 10 in FIG. 1 is composed of a probe terminal 11 made of an insulator, a signal contact electrode 12, a GND contact electrode 13, and a 100Ω resistor 14. In the conventional circuit measurement probe, the signal terminal and the GND terminal are separately configured. However, in the first embodiment, as shown in FIG.

  Next, the operation of the circuit measurement termination probe according to the first embodiment will be described. In the conventional example, both the signal and the GND are conductive from the signal contact electrode 101a and the GND contact electrode 102a of the circuit measurement probe 100 to the connector 103. And in the connector 103 corresponding to the port which cannot be connected to a measuring instrument, the resistor used as a terminator was connected.

  On the other hand, in the first embodiment, the probe terminal 11 itself of the circuit measurement terminal probe 10 connected to the port that cannot be connected to the measuring instrument is formed of an insulator, and the signal contact is made only at the tip portion thereof. The electrode 12, the GND contact electrode 13, and the 100Ω resistor 14 are integrally formed.

  In the conventional example, an example of a GSSG probe is given. However, in the first embodiment, an example of a termination probe having three terminals of GND, a signal, and GND (hereinafter referred to as “GSG termination probe”) is shown. Here, the two left and right GND contact electrodes 13 in FIG. 1 correspond to a first GND contact electrode and a second GND contact electrode, respectively. This type of probe is used when measuring a port having a GND, signal, or GND electrode at the port of the circuit to be measured 203.

  When the GSG termination probe of the first embodiment is brought into contact with the electrode on the measured circuit 203 side, the port of the measured circuit 203 is terminated to the GND of the measured circuit 203 with two 100Ω resistors. That is, it is terminated to GND with a combined resistance of 50Ω. As a result, among the ports of the circuit under test 203, ports that cannot be connected to the measuring device can be terminated at the position of the electrode at the end of the circuit under test 203. As a result, the problem that the characteristics of the probe in the conventional example enter can be solved.

  In addition, in this Embodiment 1, although the GSG termination probe was described, the termination probe of each type of GS, SG, GSSG, and GSSGSG can also be made into the same integrated structure as FIG. However, when there is only one GND electrode next to the signal electrode (that is, in the case of GS, SG and GSSG where the GND electrode is present only on one side), a 50Ω resistor is inserted between them and the GND is placed on both sides of the signal electrode. When there is an electrode (that is, in the case of GSG and GSSGSG), a 100Ω resistor is inserted between both the signal electrode and the adjacent GND electrode.

  As described above, according to the first embodiment, a circuit that has a plurality of contact electrodes at the tip, has resistance between predetermined contact electrodes, and does not have a conductive path to the probe body side. By using a termination probe for measurement, the number of ports in the circuit under test is greater than the number of ports that can be connected to the measuring instrument, and for circuits having port electrodes with a fine pitch (for example, a pitch of 1000 μm or less). An ideal termination can be realized.

Embodiment 2. FIG.
In the first embodiment, the example in which the electrode and the resistor are integrally formed at the distal end portion of the termination probe made of an insulator has been described. Next, Embodiment 2 shows an example in which a circuit composed of an electrode and a resistor is made of a substrate, and this substrate is attached to the tip of a termination probe made of an insulator.

  FIG. 2 is a diagram showing a structure of a circuit measurement termination probe according to the second embodiment of the present invention. Furthermore, the inside of a broken line is an enlarged view of the front-end | tip part of the termination probe for circuit measurements. The tip of the circuit measurement termination probe 20 in FIG. 2 is a probe terminal 21 made of an insulator, a signal contact electrode 22, a GND contact electrode 23, a 100Ω resistor 24, and a printed board 25 (corresponding to a board). Composed.

  Here, the probe terminal 21, the signal contact electrode 22, the GND contact electrode 23, and the 100Ω resistor 24 in FIG. 2 are respectively the probe terminal 11, the signal contact electrode 12, the GND contact electrode 13, and the 100Ω resistor 14 in FIG. Is the same. Compared to the configuration of FIG. 1 of the first embodiment, the configuration of FIG. 2 is different in that the printed circuit board 25 is further provided.

  In the second embodiment, the signal contact electrode 22, the GND contact electrode 23, and the 100Ω resistor 24 are not formed directly on the probe terminal 21 but on the surface of the printed board 25. Then, the back surface of the printed board 25 is connected to the probe terminal 21.

  Next, the operation of the circuit measurement termination probe according to the second embodiment will be described. The printed circuit board 25 on which the signal contact electrode 22, the GND contact electrode 23, and the two 100Ω resistors 24 are formed is attached to the tip of the probe terminal 21 that is an insulator so that the circuit faces downward. In measurement, each electrode on the printed circuit board 25 is in contact with the electrode of the circuit under measurement.

  In general, the tip of the probe is scratched by repeated use over a long period of time, and an increase in electrode contact resistance and a change in 100Ω resistance 24 are expected. In such a case, in the first embodiment, the entire probe must be discarded. Similarly, if the manufactured resistance value is shifted due to manufacturing tolerances, the probe must be discarded as well.

  On the other hand, in the second embodiment, the signal contact electrode 22, the GND contact electrode 23, the printed circuit board 25 including the two 100Ω resistors 24, and the probe terminal 21 formed of an insulator are separately provided. Can be created. Thereby, it is only necessary to replace the printed circuit board 25 as necessary. Since the electrodes and resistors are formed on the printed circuit board 25 as compared with the case where electrodes and resistors are formed on the probe terminal 21 having a three-dimensional structure, the circuit measurement termination probe of the second embodiment is It becomes technically easy to create.

  As described above, according to the second embodiment, by having a configuration in which a substrate on which a plurality of contact electrodes and resistors are formed is attached to the distal end portion of the termination probe, the same effects as in the first embodiment can be obtained. In addition, the end probe can be easily manufactured and maintained.

Embodiment 3 FIG.
In the second embodiment, the example in which the circuit including the electrode and the resistor is formed on the printed circuit board 25 and attached to the distal end portion of the terminal probe including the insulator has been described. Next, in the third embodiment, a case will be described in which a flexible substrate is used instead of a printed circuit board, and the distal end portion of a termination probe, which is an insulator, is branched for each electrode.

  FIG. 3 is a diagram showing the structure of a circuit measurement termination probe according to Embodiment 3 of the present invention. Furthermore, the inside of the broken line of (a) is an enlarged view of the front-end | tip part of the terminal probe for circuit measurement, and the inside of the broken line of (b) is a front view for demonstrating a connection state with a to-be-measured circuit. The tip portion of the circuit measurement termination probe 30 in FIG. 3 includes a probe terminal 31 made of an insulator, a signal contact electrode 32, a GND contact electrode 33, a 100Ω resistor 34, and a flexible substrate 35.

  Here, the probe terminal 31, the signal contact electrode 32, the GND contact electrode 33, and the 100Ω resistor 34 in FIG. 3 are respectively the probe terminal 21, the signal contact electrode 22, the GND contact electrode 23, and the 100Ω resistor 24 in FIG. Is the same. Compared with the configuration of FIG. 2 of the second embodiment, the configuration of FIG. 3 uses a flexible substrate 35 instead of the printed circuit board 25, and the tip of the probe terminal 31 is branched for each electrode. Is different.

  In the third embodiment, the signal contact electrode 32, the GND contact electrode 33, and the 100Ω resistor 34 are not formed on the surface of the printed circuit board 25 but on the surface of the flexible substrate 35. Then, the back surface of the flexible substrate 35 is connected to the probe terminal 31.

  Next, the operation of the circuit measurement termination probe according to the third embodiment will be described. In the second embodiment, the tip of the probe terminal 21 that is an insulator is an integral type, and the printed circuit board 25 is made of a hard material. For this reason, when there is a difference in the height of the signal contact electrode 201 and the GND contact electrode 202 of the circuit under measurement, there is a possibility that a location where the circuit measurement termination probe and the electrode of the circuit under measurement cannot contact each other may be generated. There is.

  On the other hand, in the third embodiment, the tip of the probe terminal 31 that is an insulator is cracked corresponding to each electrode (signal contact electrode 32 and GND contact electrode 33) of the flexible substrate 35. It has a flexible structure. Further, the flexible substrate 35 itself has flexibility. For this reason, the probe terminal 31 is pressed from above to the electrodes of the circuit under measurement (the electrode 201 for signal contact and the electrode for GND contact 202), and is printed on the flexible substrate 35 according to the level difference of the electrode on the side of the circuit under measurement. The difference in the height of the electrodes is given.

  As described above, according to the third embodiment, the signal contact electrode and the GND contact electrode of the circuit to be measured are attached to the probe terminal having the tip portion cracked by attaching the flexible substrate having each electrode. Even when there is a step, good contact between the electrodes is possible.

Embodiment 4 FIG.
In the third embodiment, the case where the flexible substrate 35 is used is described so that the electrodes can be satisfactorily contacted even when the electrodes of the circuit to be measured have a step. In the previous third embodiment, it is assumed that the electrode surface of the circuit under measurement is flat. Next, in the fourth embodiment, in order to enable good contact even when the electrode surface of the circuit to be measured is not flat, a case where protrusions or irregularities are provided on the surface of the contact electrode on the probe terminal side. explain.

  FIG. 4 is a front view for explaining the connection state of the circuit measurement termination probe according to the fourth embodiment of the present invention, and corresponds to the front view of FIG. 3B in the previous third embodiment. is there. As shown in FIG. 4, the signal contact electrode 201a and the GND contact electrode 202a on the circuit under test side have irregularities on the surface. On the other hand, the signal contact electrode 32a and the GND contact electrode 33a on the probe terminal 31 side are also provided on the flexible substrate 35 in a state where unevenness is provided on the surface.

  Next, the operation of the circuit measurement termination probe according to the fourth embodiment will be described. When the surface of the electrode of the circuit to be measured has irregularities, the contact area becomes small if the surface of the contact electrode on the probe terminal 31 side is flat as in the third embodiment. For this reason, the contact resistance increases, and the resistance value between the signal contact electrode and the GND contact electrode may be larger than the value of the resistor 34.

  Therefore, by providing fine irregularities (or protrusions) on the surface of the contact electrode on the probe terminal 31 side in advance, the irregularities fit each other when the contact electrode on the probe terminal 31 side is pressed against the electrode of the circuit to be measured. To come. Further, the shape of the fine unevenness easily changes. Thereby, it can prevent that the contact area of electrodes falls.

  As described above, according to the fourth embodiment, even if the electrode surface of the circuit to be measured has irregularities, it is possible to prevent the contact area from being lowered by providing irregularities on the contact electrode side. It is possible to prevent an increase in contact resistance, that is, a change in termination resistance value due to a decrease in the resistance.

Embodiment 5 FIG.
In the fifth and subsequent embodiments, specific examples of measuring the frequency characteristics of the circuit under measurement using the above-described circuit measurement termination probe will be described. First, in the fifth embodiment, a specific example of measurement using a circuit measurement termination probe having one signal terminal and one GND terminal will be described.

  FIG. 5 is an explanatory diagram of a specific example of frequency characteristic measurement according to Embodiment 5 of the present invention. On the substrate 210, a circuit to be measured 213 (corresponding to two wires in this example) having signal contact electrodes 211 and GND contact electrodes 212 at the ends is mounted. The GND on the substrate 210 is omitted except for the GND contact electrode 212.

  On the other hand, on the probe side, circuit measurement probe 110a (hereinafter referred to as “GS probe 110a”) having two terminals in the order of GND and signals from the left, circuit measurement having two terminals in the order of signals and GND from the left. Probe 110b (hereinafter referred to as “SG probe 110b”), two terminal electrodes corresponding to the first contact electrode and the second contact electrode, and two circuit measurement termination probes 114 having a 50Ω resistance therebetween (Hereinafter referred to as “GS termination probe 114”).

  The GS probe 110 a and the SG probe 110 b are connected to the measuring instrument 310 via the cable 311. Note that the measuring instrument 310 in the fifth embodiment is a measuring instrument having two ports as shown in FIG.

  Next, an operation based on the configuration of FIG. 5 will be described. The measuring instrument 310 has only two ports, but the circuit under test 213 has four ports on the substrate 210. When only the normal GS probe 110a and the SG probe 110b are used, the remaining two ports on the substrate 210 become open ends, and accurate 4-port frequency characteristics cannot be measured.

  Therefore, the two GS termination probes 114 are brought into contact with the two ports, which are the open ends, and terminated at the port of the circuit under test 213. As a result, the frequency characteristics of the two ports with which the measurement GS probe 110a and the SG probe 110b are in contact can be accurately measured.

  As described above, according to the fifth embodiment, all combinations of four-port circuits are measured with a two-port measuring instrument by measuring the frequency characteristics by connecting the termination probe according to the present invention to the open end of the circuit to be measured. The measurement between the two ports can be performed accurately, and high-accuracy frequency characteristics of four ports can be obtained from these data.

  In the fifth embodiment, the case where the frequency characteristic is measured as the electric characteristic has been described. However, the termination probe according to the present invention can also be applied to the time-axis waveform measurement. An accurate measurement result can be obtained.

Embodiment 6 FIG.
In the previous fifth embodiment, the application example of the termination probe having one signal terminal and one GND terminal has been described. Next, in the sixth embodiment, an application example of a termination probe having one signal terminal and two GND terminals will be described.

  FIG. 6 is an explanatory diagram of a specific example of frequency characteristic measurement according to Embodiment 6 of the present invention. On the substrate 220, a circuit under test 223 (corresponding to two wires in this example) having signal contact electrodes 221 and GND contact electrodes 222 at its ends is mounted. The GND on the substrate 220 is omitted except for the GND contact electrode 222.

  On the other hand, the probe side has two circuit measurement probes 120 (hereinafter referred to as “GSG probe 120”) having three terminals in the order of GND, signal, and GND, a first contact electrode, and a second contact electrode. And three terminal electrodes corresponding to the third contact electrodes and two circuit measurement termination probes 124 (hereinafter referred to as “GSG termination probes 124”) having two 100Ω resistors therebetween.

  Although details of the distal end portion of the GSG termination probe 124 are not shown, the first contact electrode to the third contact electrode at the distal end portion are the first GND contact electrode and the signal contact electrode, respectively. , And a second GND contact electrode. Between the first GND contact electrode and the signal contact electrode, and between the second GND contact electrode and the signal contact electrode, 100Ω corresponding to a value twice the impedance of the measurement system. Has resistance.

  The two GSG probes 120 are each connected to the measuring device 320 via the cable 321. Note that the measuring instrument 320 in the sixth embodiment is a measuring instrument having two ports as shown in FIG.

  Next, an operation based on the configuration of FIG. 6 will be described. Generally, the GSG probe 120 of the sixth embodiment can measure up to a higher frequency with higher accuracy than the GS probe 110a or the SG probe 110b shown in the fifth embodiment. Therefore, the electrode of the port of the circuit to be measured 223 is configured as GND, a signal, and GND, and measurement by the GSG probe 120 corresponding to this is made possible.

  In addition, the electrode of the termination probe to be applied to the vacant port is similarly configured as GND, signal, and GND, and further, two 100Ω resistors are connected to the signal contact electrode and the GND contact on both sides so that the combined resistance is 50Ω. It is provided between the electrodes. By using the GSG termination probe 124 having such a configuration, it is possible to measure frequency characteristics with higher accuracy up to a higher frequency than in the fifth embodiment.

  As described above, according to the sixth embodiment, by measuring the frequency characteristics using the GSG probe and the GSG termination probe, the measurement between two ports of all combinations of the four-port circuit can be performed with the two-port measuring device. Therefore, it is possible to carry out with high accuracy up to a higher frequency, and a 4-port high-accuracy frequency characteristic can be obtained from these data.

  In the sixth embodiment, the case where the frequency characteristic is measured as the electric characteristic has been described. However, the termination probe according to the present invention can also be applied to the time-axis waveform measurement, An accurate measurement result can be obtained.

  In the above description, the description has been given of the case where the electrode of the port of the circuit to be measured is configured as GND, signal, and GND, and the GSG termination probe is used. However, the sixth embodiment is not limited to this. When the electrode of the port of the circuit to be measured has a signal, GND, and signal configuration, by applying an SGS termination probe in which the resistance value between the electrodes is changed from 100Ω to 50Ω in the same configuration as the GSG termination probe, Similar effects can be obtained.

Embodiment 7 FIG.
In the previous fifth and sixth embodiments, the case where a circuit under measurement having four ports is measured by a two-port measuring device has been described. Next, in the seventh embodiment, a case where a circuit under measurement having 8 ports is measured by a 4-port measuring device will be described.

  FIG. 7 is an explanatory diagram of a specific example of frequency characteristic measurement according to Embodiment 7 of the present invention. A circuit under test 233 (corresponding to four wires in this example) having signal contact electrodes 231 and GND contact electrodes 232 at the ends is mounted on the substrate 230. The GND on the substrate 230 is omitted except for the GND contact electrode 232.

  On the other hand, the probe side has two circuit measurement probes 130 (hereinafter referred to as “GSSG probe 130”) having four terminals in the order of GND, signal, signal, and GND, a first contact electrode, and a second contact. Electrodes, four terminal electrodes corresponding to the third contact electrode and the fourth contact electrode, and two circuit measurement end probes 134 having two 50Ω resistors therebetween (hereinafter referred to as “GSSG end probe 134”) )have.

  Although details of the distal end portion of the GSSG termination probe 134 are not shown, each of the first contact electrode to the fourth contact electrode at the distal end portion includes a first GND contact electrode and a first signal. A contact electrode, a second signal contact electrode, and a second GND contact electrode are included. Between the first GND contact electrode and the first signal contact electrode, and between the second GND contact electrode and the second signal contact electrode, the same value as the impedance of the measurement system 50Ω resistance corresponding to

  The two GSSG probes 130 are each connected to the measuring device 330 via the cable 331. Note that the measuring instrument 330 in the seventh embodiment is a four-port frequency characteristic measuring instrument having a port impedance of 50Ω, as shown in FIG.

  Next, an operation based on the configuration of FIG. 7 will be described. The measuring device 330 has only 4 ports, but the circuit under test 233 has 8 ports on the substrate 230. When only the normal GSSG probe 130 is used, the remaining 4 ports on the substrate 230 become open ends, and accurate 8-port frequency characteristics cannot be measured.

  Therefore, the two GSSG termination probes 134 are brought into contact with the four ports that are open ends, and terminated at the port of the circuit under test 233. As a result, the frequency characteristics of the four ports with which the measurement GSSG probe 130 is in contact can be accurately measured.

  As described above, according to the seventh embodiment, all combinations of 8-port circuits are measured with a 4-port measuring instrument by measuring the frequency characteristics by connecting the termination probe according to the present invention to the open end of the circuit to be measured. 4 ports can be accurately measured, and high-accuracy frequency characteristics of 8 ports can be obtained from these data.

  In the seventh embodiment, the case where the frequency characteristic is measured as the electric characteristic has been described. However, the termination probe according to the present invention can also be applied to the time-axis waveform measurement. An accurate measurement result can be obtained.

Embodiment 8 FIG.
In the previous embodiment 7, the application example of the GSSG probe has been described. Next, in the eighth embodiment, an application example of the GSSGSG probe will be described.

  FIG. 8 is an explanatory diagram of a specific example of frequency characteristic measurement according to the eighth embodiment of the present invention. On the substrate 240, a circuit to be measured 243 (corresponding to four wires in this example) having signal contact electrodes 241 and GND contact electrodes 242 at the ends is mounted. The GND on the substrate 240 was omitted except for the GND contact electrode 242.

  On the other hand, on the probe side, two circuit measurement probes 140 (hereinafter referred to as “GSSGSG probe 140”) having five terminals in the order of GND, signal, GND, signal, and GND, first contact electrode, Contact electrodes, third contact electrodes, fourth contact electrodes, and five terminal electrodes corresponding to the fifth contact electrodes, and two terminal probes for circuit measurement having four 100Ω resistors therebetween 144 (hereinafter referred to as “GSSGSG termination probe 144”).

  Although details of the distal end portion of the GSSG termination probe 144 are not shown, the first contact electrode to the fifth contact electrode at the distal end portion are the first GND contact electrode and the first signal contact electrode. The electrode includes a second GND contact electrode, a second signal contact electrode, and a third GND contact electrode. And between the first ground contact electrode and the first signal contact electrode, between the second ground contact electrode and the first signal contact electrode, the second ground contact electrode and the second 100 Ω resistance corresponding to twice the impedance of the measurement system is provided between the signal contact electrode and the third ground contact electrode and the second signal contact electrode. .

  The two GSSGSG probes 140 are connected to the measuring device 340 via the cable 341, respectively. Note that the measuring instrument 340 in the eighth embodiment is a four-port frequency characteristic measuring instrument having a port impedance of 50Ω as shown in FIG.

  Next, an operation based on the configuration of FIG. 8 will be described. Generally, the GSSG probe 140 according to the eighth embodiment can measure up to a higher frequency with higher accuracy than the GSSG probe 130 shown in the seventh embodiment. Therefore, the electrode of the port of the circuit under test 243 is configured as GND, signal, GND, signal, GND, and measurement with the GSSG probe 140 corresponding thereto is possible.

  Similarly, the terminal probe electrode for contact with the vacant port has the same structure as GND, signal, GND, signal, and GND, and a 100Ω resistor is provided between the contact electrodes so that the combined resistance is 50Ω. By using the GSSG SG termination probe 144 having such a configuration, it is possible to measure the frequency characteristics with higher accuracy up to a higher frequency than in the previous seventh embodiment.

  As described above, according to the eighth embodiment, by measuring the frequency characteristics using the GSSGSG probe and the GSSGSG termination probe, it is possible to measure all four combinations of 8-port circuits with a 4-port measuring instrument. Therefore, it is possible to carry out with high accuracy up to a higher frequency, and an 8-port high-accuracy frequency characteristic can be obtained from these data.

  In the eighth embodiment, the case where the frequency characteristic is measured as the electric characteristic has been described. However, the termination probe according to the present invention can also be applied to the time-axis waveform measurement. An accurate measurement result can be obtained.

Embodiment 9 FIG.
In the seventh and eighth embodiments, the case where a circuit under measurement having eight ports is measured by a four-port measuring device has been described. Next, in the ninth embodiment, a case where eight ports of a circuit under measurement are measured as four sets of differential ports will be described.

  FIG. 9 is an explanatory diagram of a specific example of frequency characteristic measurement in the ninth embodiment of the present invention. On the substrate 250, a circuit to be measured 253 (corresponding to four wires in this example) provided with signal contact electrodes 251 and GND contact electrodes 252 at the ends is mounted. The GND on the substrate 250 is omitted except for the GND contact electrode 252.

  On the other hand, on the probe side, two circuit measurement probes 150 (hereinafter referred to as “GSSG probe 150”) having four terminals in the order of GND, signal, signal, and GND, a first contact electrode, and a second contact Electrode, four terminal electrodes corresponding to the third contact electrode and the fourth contact electrode, and one 100Ω resistor between the second contact electrode and the third contact electrode Two differential termination probes 154 for circuit measurement (hereinafter referred to as “GSSG differential termination probe 154”) are provided.

  Although details of the distal end portion of the GSSG differential termination probe 154 are not shown, the first contact electrode to the fourth contact electrode at the distal end portion are the first GND contact electrode and the first signal. A contact electrode, a second signal contact electrode, and a second GND contact electrode are included. A 100Ω resistor corresponding to the same value as the differential port impedance of the measurement system is provided between the first signal contact electrode and the second signal contact electrode.

  The two GSSG probes 150 are connected to the measuring device 350 via cables 351, respectively. Note that the measuring instrument 350 in the ninth embodiment is a four-port (differential two-port) frequency characteristic measuring instrument having a differential port impedance of 100Ω as shown in FIG.

  Next, an operation based on the configuration of FIG. 9 will be described based on a comparison with the previous embodiment 7. In the previous embodiment 7, the measurement of the standard mode frequency characteristic by the 4-port frequency characteristic measuring instrument is supported, and the GSSG termination probe 134 is 50 Ω (two 100 Ω in parallel) from the two signal contact electrodes to GND. Equivalent to the synthesis of

  However, when the differential transmission characteristic is measured, the differential port is measured with an impedance of 100Ω. In such a case, the GSSG differential termination probe 154 in which the signal is directly terminated with 100Ω can be brought into contact with the empty port. As a result, the tip of the terminal probe can be simplified as compared with the seventh embodiment. Further, the insulator terminal itself of the termination probe can be shared with the previous embodiment 7.

  As described above, according to the ninth embodiment, by using the differential termination probe, the differential characteristic measurement of the circuit under test having the differential ports larger than the number of differential ports of the measuring instrument can be performed with high accuracy. Realized at low cost.

Embodiment 10 FIG.
In the previous embodiment 9, the case where the GSSG differential termination probe 154 is used in the differential characteristic measurement has been described. Next, in the tenth embodiment, measurement for a differential circuit that has almost no coupling with GND in the vicinity of the electrode of the circuit to be measured will be described.

  FIG. 10 is an explanatory diagram of a specific example of frequency characteristic measurement according to the tenth embodiment of the present invention. On the substrate 260, a circuit to be measured 263 (corresponding to four wires in this example) having signal contact electrodes 261 and GND contact electrodes 262 at the ends is mounted. The GND on the substrate 260 is omitted except for the GND contact electrode 262.

  On the other hand, on the probe side, two circuit measurement probes 160 (hereinafter referred to as “GSSG probe 160”) having four terminals in the order of GND, signal, signal, and GND, the first contact electrode, and the second contact Two circuit measuring differential termination probes 164 (hereinafter referred to as “SS differential termination probes 164”) having two contact electrodes corresponding to the electrodes for measurement and a 100Ω resistance therebetween are provided.

  Although the details of the tip of the SS differential termination probe 164 are not shown, the first contact electrode and the second contact electrode at the tip are the first signal contact electrode and the second contact electrode. It consists of a signal contact electrode. A 100Ω resistor corresponding to the same value as the differential port impedance of the measurement system is provided between the first signal contact electrode and the second signal contact electrode.

  The two GSSG probes 160 are connected to the measuring device 360 via cables 361, respectively. Note that the measuring instrument 360 in the tenth embodiment is a 4-port (differential 2-port) frequency characteristic measuring instrument having a differential port impedance of 100Ω as shown in FIG.

  Next, an operation based on the configuration of FIG. 10 will be described based on a comparison with the previous ninth embodiment. In the ninth embodiment, the GSSG differential termination probe 154 is used in response to the differential mode frequency characteristic measurement by the 4-port (differential 2-port) frequency characteristic measuring instrument. On the other hand, in the tenth embodiment, it is assumed that the coupling between the signal port of the circuit under test 263 and GND is weak and the differential characteristic is almost determined by the characteristic between the differential pair ports. .

  In such a case, the SS differential termination probe 164 does not require a GND contact electrode, and only needs to have two signal contact electrodes and a differential termination resistor therebetween. Thereby, the structure of the tip of the differential termination probe can be simplified as compared with the ninth embodiment.

  As described above, according to the tenth embodiment, the number of differential ports of the measuring instrument can be obtained by using the SS differential termination probe for the differential circuit that has almost no coupling with the GND near the electrode of the circuit to be measured. Differential characteristic measurement of a circuit under test having more differential ports can be realized with high accuracy and at low cost.

It is the figure which showed the structure of the termination probe for circuit measurements in Embodiment 1 of this invention. It is the figure which showed the structure of the termination probe for circuit measurements in Embodiment 2 of this invention. It is the figure which showed the structure of the terminal probe for circuit measurement in Embodiment 3 of this invention. It is a front view for demonstrating the connection state of the termination probe for circuit measurements in Embodiment 4 of this invention. It is explanatory drawing of the specific example of the frequency characteristic measurement in Embodiment 5 of this invention. It is explanatory drawing of the specific example of the frequency characteristic measurement in Embodiment 6 of this invention. It is explanatory drawing of the specific example of the frequency characteristic measurement in Embodiment 7 of this invention. It is explanatory drawing of the specific example of the frequency characteristic measurement in Embodiment 8 of this invention. It is explanatory drawing of the specific example of the frequency characteristic measurement in Embodiment 9 of this invention. It is explanatory drawing of the specific example of the frequency characteristic measurement in Embodiment 10 of this invention. It is one block diagram of the conventional probe for circuit measurement. It is the figure which showed the example of a measurement at the time of using four conventional circuit measurement probes.

Explanation of symbols

  10, 20, 30 Terminal probe for circuit measurement, 11, 21, 31 Probe terminal, 12, 22, 32, 32a Signal contact electrode (contact electrode), 13, 23, 33, 33a GND contact electrode (for contact) Electrode), 14, 24, 34 resistance, 25 printed circuit board (board), 35 flexible circuit board, 100 circuit measurement probe, 101 signal terminal, 101a signal contact electrode, 102 GND terminal, 102a GND contact electrode, 103 connector, 110a circuit measurement probe (GS probe), 110b circuit measurement probe (SG probe), 114 circuit measurement termination probe (GS termination probe), 120 circuit measurement probe (GSG probe), 124 circuit measurement termination probe (GS probe) GSG termination probe), 130 Circuit measurement probe (G SG probe), 134 circuit measurement termination probe (GSSG termination probe), 140 circuit measurement probe (GSSGSG probe), 144 circuit measurement termination probe (GSSGSG termination probe), 150 circuit measurement probe (GSSG probe), 154 circuit Differential termination probe for measurement (GSSG differential termination probe), 154 Differential termination probe, 160 Probe for circuit measurement (GSSG probe), 164 Differential termination probe for circuit measurement (SS differential termination probe), 200, 210, 220, 230, 240, 250, 260 Substrate, 201, 201a, 211, 221, 231, 241, 251, 261 Signal contact electrode, 202, 202a, 212, 222, 232, 242, 252, 262 GND contact electrode , 203, 213, 2 3,233,243,253,263 circuit under test 310 through 360 meter, 311,321,331,341,351,361 cable.

Claims (14)

A terminal probe for measuring a circuit, which is used when measuring the electrical characteristics of a circuit under test and has a plurality of contact electrodes at the tip,
The terminal probe for circuit measurement, wherein the plurality of contact electrodes have a resistance between predetermined contact electrodes and do not have a conductive path to the probe body side. The terminal probe for circuit measurement according to claim 1,
A plurality of contact electrodes and a substrate having the resistor formed on a surface thereof;
The terminal probe for circuit measurement, wherein the probe main body is formed of an insulator and has a configuration in which a back surface of the substrate is attached to a tip portion. The terminal probe for circuit measurement according to claim 2,
The probe main body has a flexible structure in which a tip portion is cracked corresponding to the plurality of contact electrodes formed on the surface of the substrate,
The substrate is a flexible substrate having flexibility, and a back surface portion corresponding to the plurality of contact electrodes formed on the surface is attached to the tip portion of the probe body. End probe. The terminal probe for circuit measurement according to any one of claims 1 to 3,
The terminal probe for circuit measurement, wherein the plurality of contact electrodes have protrusions on a surface portion in contact with the electrode on the circuit under test side. The terminal probe for circuit measurement according to any one of claims 1 to 4,
The plurality of contact electrodes are two of a first contact electrode and a second contact electrode, and the impedance of the measurement system is between the first contact electrode and the second contact electrode. A terminal probe for circuit measurement, which has a resistance of the same value as The terminal probe for circuit measurement according to any one of claims 1 to 4,
The plurality of contact electrodes are three of a first contact electrode, a second contact electrode, and a third contact electrode, and the first contact electrode, the second contact electrode, And a resistance of twice the impedance of the measurement system between the second contact electrode and the third contact electrode, respectively. The terminal probe for circuit measurement according to any one of claims 1 to 4,
The plurality of contact electrodes are three of a first contact electrode, a second contact electrode, and a third contact electrode, and the first contact electrode, the second contact electrode, And a resistance having the same value as the impedance of the measurement system between the second contact electrode and the third contact electrode, respectively. The terminal probe for circuit measurement according to any one of claims 1 to 4,
The plurality of contact electrodes are four of a first contact electrode, a second contact electrode, a third contact electrode, and a fourth contact electrode, and the first contact electrode, For circuit measurement, characterized by having a resistance of the same value as the impedance of the measurement system between the second contact electrode and between the third contact electrode and the fourth contact electrode End probe. The terminal probe for circuit measurement according to any one of claims 1 to 4,
The plurality of contact electrodes are five of a first contact electrode, a second contact electrode, a third contact electrode, a fourth contact electrode, and a fifth contact electrode, Between the first contact electrode and the second contact electrode, between the second contact electrode and the third contact electrode, between the third contact electrode and the fourth contact. A circuit-measuring termination probe having a resistance twice the impedance of the measurement system between the electrodes and between the fourth contact electrode and the fifth contact electrode. The terminal probe for circuit measurement according to any one of claims 1 to 4,
The plurality of contact electrodes are four of a first contact electrode, a second contact electrode, a third contact electrode, and a fourth contact electrode, and the second contact electrode, A circuit-measuring termination probe having a resistance equal to the differential port impedance of the measurement system between the third contact electrode and the third contact electrode. The terminal probe for circuit measurement according to any one of claims 1 to 4,
The plurality of contact electrodes are a first contact electrode and a second contact electrode, and a differential port of a measurement system is provided between the first contact electrode and the second contact electrode. A terminal probe for circuit measurement, characterized by having a resistance having the same value as the impedance. The terminal probe for circuit measurement according to any one of claims 5, 7, 8, 10, and 11,
The terminal probe for circuit measurement, wherein the resistance value of the resistor is 50Ω. The terminal probe for circuit measurement according to claim 6 or 9,
The terminal probe for circuit measurement, wherein the resistance value of the resistor is 100Ω. The terminal probe for circuit measurement according to any one of claims 1 to 13,
Adjacent contact electrodes are arranged at a pitch of 1000 μm or less, and a circuit measurement termination probe.

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