JP2007308806A - Method of working metal, metal body obtained by the method and metal-containing ceramic body obtained by the method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of working metal in which a microstructure of various kinds of metal bodies is rendered fine to thereby enhance the strength, ductility; a metal body obtained by the metal working method; and a metal-containing ceramic body obtained by the metal working method. <P>SOLUTION: In this metal working method, a first cooling means and a second cooling means for cooling the metal bodies along the grain-orientation direction of the unidirectionally grain-oriented metal bodies are provided, and a heating means for heating the metallic bodies is provided between the first and second cooling means. By heating the metallic body by the heating means, the deformation resistance of the metal body is lowered locally to thereby form low deformation resistance regions in the metal body, and one non-low deformation resistance region of the metal body, sandwiching the low deformation resistance regions is caused to have a relative position change to the other non-low deformation resistance region. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a metal working method for increasing strength, ductility, or homogenization by refining a metal structure of an object having a metal structure, a metal body using the metal working method, and the metal working The present invention relates to a metal-containing ceramic body using the method.

  Conventionally, in a material having a metal structure such as a metal body or a metal-containing ceramic body, the strength or ductility of the material is improved by refining the metal structure by the ECAP (Equal-Channel Angular Pressing) method. Is known to be possible.

  In the ECAP method, as shown in FIG. 19, an insertion path 200 bent at a required angle is provided in the middle of the die 100, and a required metal body 300 is inserted through the insertion path 200 while being pressed. The metal body 300 is bent along the insertion path 200, a shear stress is generated in the metal body 300 along with the bending, and the metal structure is refined by the shear stress. In FIG. 19, reference numeral 400 denotes a plunger for pressing the metal body.

  In such an ECAP method, in order to easily bend the metal body 300 along the insertion path 200, the entire metal body 300 is heated to reduce the deformation resistance by heating the die 100 to a predetermined temperature. If the deformation resistance of the metal body 300 is greatly reduced, the metal body 300 may be subject to excessive deformation such as buckling when pressed by the plunger 400. It was necessary to limit to the limit.

  In this way, if the heating of the metal body 300 is suppressed, the metal body 300 has to be pressed with a relatively large force by the plunger 400 and thus has a problem of poor workability. Proposed to improve the workability by locally heating the shear deformation area of the passage and reducing the deformation resistance of the shear deformation portion of the metal body by this heating, thereby reducing the force pressing the metal body with the plunger. (For example, refer to Patent Document 1).

  However, when the shear deformation region is heated, the metal body that has passed through the shear deformation region remains heated to a predetermined temperature, so that the deformation of the metal body extruded from the insertion passage decreases as a whole. In order to allow the metal body to continuously pass through the insertion path and to repeatedly apply the shear stress, a cooling time is required for cooling until the metal body becomes a predetermined temperature or lower and the deformation resistance increases. there were.

  Therefore, there is a problem that the metal body cannot be continuously processed by the ECAP method in a time shorter than the cooling time, and the productivity is extremely low.

  In addition, the ECAP method has a problem in that it is difficult to perform a partial process for refining only the metal structure of a part of the metal body because the metal body must be inserted through a bent insertion path.

  As a method for refining only the metal structure of a part of the metal body, the probe provided on the end axis of the rotor is brought into contact with the required position of the metal body and pressed to rotate the rotor. There is known a method in which a contact portion of a metal body with a probe is frictionally stirred (see, for example, Patent Document 2).

  However, the method using friction with the probe as described above has a problem in that it is very difficult to mass-produce as in the case of the ECAP method because it is extremely difficult to increase the processing speed.

  On the other hand, as a method for producing a large amount of a metal body with a refined metal structure, a low-carbon steel or low-carbon alloy steel having a predetermined composition has a cross-sectional area reduction rate of 60% or more in the process of cooling from a required high temperature state. There is known a method for performing the processing (for example, see Patent Document 3).

However, the metal body to which this method can be applied is a low-carbon steel or low-carbon alloy steel having a special composition, and there is a problem that this method cannot be applied to metal bodies having other compositions.
JP 2001-321825 A Japanese Patent Laid-Open No. 11-51103 JP 11-334881 A

  As described above, there are advantages and disadvantages in the formation of a metal body that is made to have a high strength or high ductility by miniaturizing the metal structure. Such metals have been used in special applications such as machines.

  Under these circumstances, in recent years, particularly in the automobile industry, it is desired to reduce the weight of the vehicle body for the purpose of improving fuel efficiency or driving performance, and it is necessary to refine the metal structure not only in luxury cars but also in general cars. Therefore, there has been a great demand for weight reduction by using a metal body with higher strength, and there has been a great potential demand for a metal body with low strength and high ductility.

  In view of the current situation, the present inventors have made it possible to continuously form various metal bodies or metal-containing ceramic bodies that have been made to have high strength or high ductility by miniaturizing the metal structure. Research and development have been conducted to provide a metal body or a metal-containing ceramic body that has been improved and reduced in cost, and the present invention has been achieved.

  The metal processing method according to claim 1, wherein a first cooling means and a second cooling means for cooling the metal body are provided along the extending direction of the metal body extended in one direction, and the first cooling is performed. A heating means for heating the metal body is provided between the first cooling means and the second cooling means, and the metal body is heated by the heating means to locally reduce the deformation resistance of the metal body. A low deformation resistance region is formed across the metal body, and one non-low deformation resistance region of the metal body sandwiching the low deformation resistance region is oscillated or rotated relative to the other non-low deformation resistance region. By changing the position, the low deformation resistance region is shear-deformed to refine the metal structure of the metal body.

  The metal working method according to claim 2, wherein in the metal working method according to claim 1, the relative position change of the other non-low deformation resistance region with respect to the one non-low deformation resistance region is determined by the extending direction of the metal body. The vibration motion was applied in a direction substantially perpendicular to the direction.

  The metal working method according to claim 3, wherein in the metal working method according to claim 1, a relative position variation of the other non-low deformation resistance region with respect to the one non-low deformation resistance region is determined by the extending direction of the metal body. First vibration motion applied in a first direction substantially orthogonal to the second direction, and second vibration motion applied in a second direction substantially orthogonal to the extending direction of the metal body and substantially orthogonal to the first direction. And combined exercise.

  In the metal processing method of Claim 4, in the metal processing method of any one of Claims 1-3, the said low deformation resistance area | region was moved along the extension direction of the said metal body.

  In the metal processing method of Claim 5, in the metal processing method of any one of Claims 1-4, the said metal body was made into the plate-shaped body.

  A metal processing method according to a sixth aspect is the metal processing method according to any one of the first to fourth aspects, wherein the metal body is a plate-like body formed by polymerizing metal layers having different compositions.

  The metal processing method according to claim 7, wherein the metal body is made of a mixed material obtained by mixing a first metal with a second metal in the metal processing method according to any one of claims 1 to 4. A plate-like body was obtained.

  The metal body according to claim 8, wherein the metal body is extended in one direction, and the first cooling means and the second cooling means for cooling the metal body arranged along the extension direction, and the first cooling means. A low deformation resistance region that is temporarily formed by locally heating with a heating unit that is provided between the cooling unit and the second cooling unit and heats the metal body is sandwiched between the low deformation resistance region. The non-low deformation resistance region was made to have a refined metal structure by vibrating or rotating with respect to the other non-low deformation resistance region to cause shear deformation.

  In the metal body according to claim 9, in the metal body according to claim 8, the shear deformation is performed by changing one non-low deformation resistance region sandwiching the low deformation resistance region with respect to the other non-low deformation resistance region. The deformation was applied by oscillating motion in a direction substantially perpendicular to the extending direction of the metal body.

  In the metal body according to claim 10, in the metal body according to claim 8, the shear deformation is performed with respect to one non-low deformation resistance region sandwiching the low deformation resistance region with respect to the other non-low deformation resistance region. Deformation caused by oscillating movement in a first direction substantially orthogonal to the extending direction of the metal body, and vibration in a second direction approximately orthogonal to the extending direction of the metal body and substantially orthogonal to the first direction The deformation was made by exercising.

  In the metal body according to claim 11, in the metal body according to any one of claims 8 to 10, the low deformation resistance region is moved along the extending direction of the metal body.

  In the metal body according to claim 12, in the metal body according to any one of claims 8 to 11, the metal body before refinement of the metal structure is a plate-like body.

  A metal body according to claim 13, wherein the metal body according to any one of claims 8 to 11 is formed by polymerizing a metal body having a different composition from a metal body before refinement of the metal structure. The body.

  In the metal body according to claim 14, in the metal body according to any one of claims 8 to 11, the metal body before refinement of the metal structure is mixed with the second metal in the first metal. A plate-like body made of a mixed material was used.

  The metal-containing ceramic body according to claim 15, wherein the metal-containing ceramic body is elongated in one direction, the first cooling means and the second cooling means for cooling the metal body arranged along the extending direction, A low deformation resistance region formed temporarily by locally heating with a heating means for heating the metal-containing ceramic body provided between the first cooling means and the second cooling means, One non-low deformation resistance region sandwiching the deformation resistance region has a metal structure refined by vibrating or rotating with respect to the other non-low deformation resistance region to cause shear deformation.

  The metal-containing ceramic body according to claim 16, wherein in the metal-containing ceramic body according to claim 15, one of the non-low deformation resistance regions sandwiching the low deformation resistance region is replaced with the other non-low deformation resistance region. On the other hand, it was set as the deformation | transformation twisted around the rotating shaft made substantially parallel to the extending direction of the said metal containing ceramic body.

  According to invention of Claim 1, while providing the 1st cooling means and the 2nd cooling means which cool the said metal body along the extension direction of the metal body extended to one direction, said 1st cooling A heating means for heating the metal body is provided between the first cooling means and the second cooling means, and the metal body is heated by the heating means to locally reduce the deformation resistance of the metal body. A low deformation resistance region is formed across the metal body, and one non-low deformation resistance region of the metal body sandwiching the low deformation resistance region is oscillated or rotated relative to the other non-low deformation resistance region. The metal structure of the low deformation resistance region portion formed locally can be refined by shearing and deforming the low deformation resistance region by changing the position in order to refine the metal structure of the metal body. Higher strength or higher ductility The metal body can be easily formed.

  According to a second aspect of the present invention, in the metal processing method according to the first aspect, the relative position variation of the other non-low deformation resistance region with respect to the one non-low deformation resistance region is determined by the extending direction of the metal body. By virtue of the vibration motion applied in a direction substantially orthogonal to the shear deformation, shear deformation can be caused very easily in the low deformation resistance region.

  According to a third aspect of the present invention, in the metal processing method according to the first aspect, a change in the relative position of the other non-low deformation resistance region with respect to the one non-low deformation resistance region is determined by the extending direction of the metal body. First vibration motion applied in a first direction substantially orthogonal to the second direction, and second vibration motion applied in a second direction substantially orthogonal to the extending direction of the metal body and substantially orthogonal to the first direction. With this combined motion, shear deformation can be caused very easily in the low deformation resistance region, and a large shear stress can be applied.

  According to a fourth aspect of the present invention, in the metal processing method according to any one of the first to third aspects, the low deformation resistance region is moved along the extending direction of the metal body. The entire metal structure of the metal body elongated in the direction can be extremely easily refined, and the metal structure can be continuously refined.

  According to invention of Claim 5, in the metal processing method of any one of Claims 1-4, by making the said metal body into a plate-shaped body, the metal which was not obtained by the conventional ECAP method A plate-like metal body with fine crystals can be easily produced.

  According to invention of Claim 6, in the metal processing method of any one of Claims 1-4, the said metal body was made into the plate-shaped object formed by superposing | polymerizing the metal layer of a different composition. As a result, it is possible to easily produce a plate-like metal body with a refined metal crystal that could not be obtained by the conventional ECAP method, and to form alloys having different compositions in the polymerization direction.

  According to invention of Claim 7, in the metal processing method of any one of Claims 1-4, the said metal body consists of a mixed material which mixed the 2nd metal with the 1st metal. By forming a plate-like body, an alloy in which the first metal and the second metal are firmly bonded can be formed, and the alloy that has been difficult to manufacture by the conventional method for manufacturing an alloy by melting different kinds of metals. Can be easily generated.

  According to the eighth aspect of the present invention, the first cooling means and the second cooling means for cooling the metal body that is extended in one direction and that is disposed along the extension direction, and the first cooling means. A low deformation resistance region that is temporarily formed by locally heating with a heating unit that is provided between the cooling unit and the second cooling unit to heat the metal body is sandwiched between the low deformation resistance region. One of the non-low deformation resistance regions has a metal structure refined by oscillating or rotating with respect to the other non-low deformation resistance region to cause shear deformation. The metal structure can be refined, and a metal body with high strength or high ductility can be provided at low cost.

  According to the ninth aspect of the present invention, in the metal body according to the eighth aspect, the shear deformation is caused by changing one non-low deformation resistance region sandwiching the low deformation resistance region to the other non-low deformation resistance region. By providing a deformation that is applied by oscillating motion in a direction substantially perpendicular to the extending direction of the metal body, a metal body having a refined metal structure by causing shear deformation in the low deformation resistance region very easily is provided. it can.

  According to a tenth aspect of the present invention, in the metal body according to the eighth aspect, the shear deformation is caused by changing one non-low deformation resistance region sandwiching the low deformation resistance region with respect to the other non-low deformation resistance region. And a deformation applied by oscillating and moving in a first direction substantially orthogonal to the extending direction of the metal body, and a second direction substantially orthogonal to the extending direction of the metal body and substantially orthogonal to the first direction. By adopting the deformation applied by oscillating motion, shear deformation can be caused very easily in the shape resistance region, and a metal body in which the metal structure is refined by applying a large shear stress can be provided.

  According to the eleventh aspect of the present invention, in the metal body according to any one of the eighth to tenth aspects, the low deformation resistance region is moved along the extending direction of the metal body, thereby unidirectionally. In addition to being able to make the entire metal structure of the extended metal body very easy, it is possible to provide a metal body having a continuously refined metal structure.

  According to the twelfth aspect of the present invention, in the metal body according to any one of the eighth to eleventh aspects, the metal body before refinement of the metal structure is formed into a plate-like body. It is possible to provide a plate-like metal body in which metal crystals that have not been obtained are refined.

  According to a thirteenth aspect of the present invention, in the metal body according to any one of the eighth to eleventh aspects, the metal body before the refinement of the metal structure is formed by polymerizing metal layers having different compositions. By adopting the shape, it is possible to provide a plate-like metal body in which metal crystals that have not been obtained by the conventional ECAP method are refined, and to provide alloys having different compositions in the polymerization direction.

  According to the invention of claim 14, in the metal body according to any one of claims 8 to 11, the metal body before the refinement of the metal structure is mixed with the second metal in the first metal. By forming a plate-like body made of a mixed material, an alloy in which the first metal and the second metal are firmly bonded can be formed. It is possible to provide a difficult alloy.

  According to invention of Claim 15, it is the metal containing ceramic body extended in one direction, Comprising: The 1st cooling means and 2nd cooling means which cool the said metal body arrange | positioned along the extending direction, A low deformation resistance region which is temporarily formed by locally heating with a heating unit which is provided between the first cooling unit and the second cooling unit and heats the metal-containing ceramic body. One non-low deformation resistance region sandwiching the resistance region is vibrated or rotated with respect to the other non-low deformation resistance region to have a metal structure refined by shear deformation, thereby containing a metal component contained therein A metal-containing ceramic body in which a nonmetallic component is firmly and uniformly bonded can be provided.

  According to the invention of claim 16, in the metal-containing ceramic body according to claim 15, the shear deformation is caused by changing one non-low deformation resistance region sandwiching the low deformation resistance region into the other non-low deformation resistance region. On the other hand, since it is a deformation added by twisting around the rotation axis approximately parallel to the extending direction of the metal-containing ceramic body, it is possible to apply a shear stress to the metal structure in the region of the rotation axis. It is possible to provide a metal-containing ceramic body in which the contained metal component and non-metal component are firmly and evenly bonded.

  In the metal processing method of the present invention, the metal body using the metal processing method, the metal-containing ceramic body using the metal processing method, and the sputtering target using the metal processing method, By refinement, the strength of the metal body is increased or the ductility is increased. In particular, in the case of a metal-containing ceramic body, further homogenization is achieved.

  In the metal body and the metal-containing ceramic body, a low deformation resistance region formed by lowering the deformation resistance is locally formed, and the low deformation resistance region portion is subjected to shear deformation to apply a strong strain to refine the metal structure. It has become.

  In particular, since the low deformation resistance region is locally formed, the shear stress due to the shear deformation applied to make the metal structure finer is concentrated and acts on the low deformation resistance region. It can be miniaturized.

  Here, the low deformation resistance region is a region in which the deformation resistance is reduced by heating the metal body and the metal-containing ceramic body, and the deformation is caused by the action of an external force as compared with a region other than the low deformation resistance region. It is an area that tends to occur. For convenience of explanation, a region other than the low deformation resistance region is referred to as a non-low deformation resistance region.

  The low deformation resistance region is not only formed by heating, but, for example, a non-low deformation resistance region is formed by mounting a restraint body that restrains the metal body around the metal body heated to a required temperature. The region that is not mounted can be a low deformation resistance region.

  In addition, the metal body may be composed not only of a single metal composed of one kind of metal element but also of an alloy composed of two or more kinds of metal elements, or a metal composed of a metal element and a nonmetallic element. It may be composed of an intercalation compound. Here, when the metal body is an intermetallic compound, it is called a metal-containing ceramic body in order to clarify that fact. In the following, the term “metal body” is used as including a “metal-containing ceramic body” unless otherwise specified.

  The metal body does not need to have a uniform composition. As shown in the schematic cross-sectional view of the metal body in FIG. 1, the second metal layer 12 and the third metal layer 13 are laminated on the first metal layer 11. The laminate 10 may be used. At this time, the first metal layer 11, the second metal layer 12, and the third metal layer 13 may be required metals or alloys, respectively. The first metal layer 11, the second metal layer 12, and the third metal layer 13 may be simply polymerized to form a laminate 10, or may be laminated by plating, vapor deposition, pressure bonding, or the like. Here, the laminate 10 is not limited to three layers, and the laminate 10 may be formed by polymerizing an appropriate number.

  Alternatively, the metal body is a calcined body obtained by calcining a mixture of the first metal powder 14 and the second metal powder 15 into a predetermined shape as shown in FIG. It may be 16. At this time, not only the calcined body 16 is composed of two kinds of powders of the first metal powder 14 and the second metal powder 15, but also various kinds of powders are mixed to form the calcined body 16. Alternatively, the calcined body 16 may be formed by mixing not only metal powder but also non-metal powder.

  Alternatively, as shown in FIG. 3 as a schematic cross-sectional view of the metal body, the metal body may be a filling body 19 formed by filling the metal powder 18 into the pores of the porous body 17 having a predetermined shape. . The porous body 17 may be filled not only with the metal powder 18 but also with a non-metal powder.

  Alternatively, the metal body may be a metal wire bundle 23 formed by bundling a plurality of first metal wire materials 21 and a plurality of second metal wire materials 22 as shown in a schematic cross-sectional view of the metal body in FIG. Good. At this time, the metal wire bundle 23 may be formed not only by forming the metal wire bundle 23 with two kinds of metal wire rods of the first metal wire rod 21 and the second metal wire rod 22 but also by bundling various metal wire rods.

  Thus, various forms of the metal body are possible, and the metal body may have any form as long as the metal structure is refined by shear deformation as described later.

  1-3, the metal body has a rectangular cross section, and in FIG. 4, the metal body has a circular cross section, but the metal body has a rectangular cross section and a circular cross section. It is not limited to a round bar, but may be a flat body or a cylindrical body having a hollow portion. Other than these, for example, an H-shaped steel body, an angle steel body, a channel steel body, a T-shaped steel body It may be a ripple groove steel body or the like.

  The metal body is extended in one direction, and as shown in FIG. 5, a low deformation resistance region 30 is formed so as to cross the metal body. A first non-low deformation resistance region 31 and a second non-low deformation resistance region 32 are formed.

  By forming the low deformation resistance region 30 by traversing the metal body extending in one direction in this way, the low deformation resistance region 30 is moved while moving the low deformation resistance region 30 along the extending direction of the metal body. By making the shear deformation, the metal structure can be continuously refined.

  In addition, by adjusting the deformation form of the shear deformation that occurs in the low deformation resistance region 30 as necessary, the metal body can be formed with regions having different degrees of refinement of the metal structure. Functionalization can be achieved.

  As shown in FIG. 5A, the shear deformation of the low deformation resistance region 30 is caused by vibrating the second non-low deformation resistance region 32 with respect to the first non-low deformation resistance region 31 in the thickness direction of the metal body. Is going. Alternatively, it may be performed by vibrating in the width direction of the metal body orthogonal to the thickness direction of the metal body as shown in FIG. 5B instead of in the thickness direction of the metal body. ), It may be a composite vibration in which both the vibration in the thickness direction of the metal body and the vibration in the width direction are combined. Thus, when it is set as a composite vibration, a big shear stress can be made to act on a low deformation resistance area | region.

  In the case where the metal body is a wide flat plate body, the low deformation resistance region is not necessarily formed so as to cross the metal body, and the low deformation resistance region is formed only in a required region of the metal body, The low deformation resistance region can be shear-deformed to refine the metal structure only in a part of the metal body, thereby forming a region with high strength or high ductility.

  When the metal body is a round bar or a cylindrical body having a hollow portion, as shown in FIG. 6, the second non-low deformation resistance region 32 ′ is set to the first non-low deformation resistance region 31 ′. Further, the low deformation resistance region 30 ′ can be shear-deformed by twisting around a rotation axis substantially parallel to the extending direction of the metal body. At this time, the second non-low deformation resistance region 32 ′ may always be rotated at a constant angular velocity relative to the first non-low deformation resistance region 31 ′, or forward rotation and reverse rotation may be alternately repeated. Good.

  The relative vibrational motion or twisting momentum of the second non-low deformation resistance region 32, 32 'relative to the first non-low deformation resistance region 31, 31' causes shear deformation in the low deformation resistance region 30, 30 '. It is sufficient that the momentum is such that the metal structure can be refined.

  When the low deformation resistance regions 30, 30 ′ are subjected to shear deformation, the low deformation resistance regions 30, 30 ′ are applied to the low deformation resistance regions 30, 30 ′ by applying a compressive stress along the extending direction of the metal body. It is possible to suppress the occurrence of large shape deformation and the occurrence of breakage in the low deformation resistance regions 30, 30 ′.

  By shearing the low deformation resistance region in this way, not only can the metal structure in the low deformation resistance region be refined, but the metal structures shown in FIGS. New alloys or ceramics can be produced, and in particular, alloys having a composition that could not be produced by the conventional melting method can be produced mechanically.

  When the low deformation resistance region is shear-deformed as described above, as shown in FIG. 7, a first low deformation resistance region 30a crossing the metal body and a second low deformation are formed on a metal body extending in one direction. The resistance region 30b is formed at a predetermined interval, and a region sandwiched between the first low deformation resistance region 30a and the second low deformation resistance region 30b is defined as an intermediate non-low deformation resistance region 33. By oscillating the resistance region 33, the first low deformation resistance region 30a and the second low deformation resistance region 30b can be easily sheared and deformed.

  Here, in FIG. 7, the metal body is a flat body, and in FIG. 7A, the intermediate non-low deformation resistance region 33 is vibrated in the thickness direction of the metal body, and in FIG. The intermediate non-low deformation resistance region 33 is vibrated in the width direction of the metal body perpendicular to the thickness direction of the metal body. In FIG. It is made to vibrate by a composite vibration in which both the vibration in the thickness direction and the vibration in the width direction are combined.

  In the case where the metal body is a round bar or a cylindrical body having a hollow portion, as shown in FIG. 8, a first low deformation resistance region 30a 'and a second low deformation resistance region 30b provided at a predetermined interval. The first low deformation resistance region 30a and the second low deformation resistance region 30b can be easily obtained by rotating the intermediate non-low deformation resistance region 33 'between and around the rotation axis substantially parallel to the extending direction of the metal body. Can be shear-deformed. In FIG. 8, reference numeral 34 denotes a rotating roller that rotates the intermediate non-low deformation resistance region 33 '.

  Further, in FIGS. 7 and 8, the position of the first low deformation resistance region 30a ′ and the second low deformation resistance region 30b ′ in the metal body can be moved by moving the metal body along the extending direction. .

  Therefore, normally, during the manufacturing process of a continuously manufactured metal body, the first low deformation resistance regions 30a and 30a ′ and the second low deformation resistance regions 30b and 30b ′ are formed in the metal body to prevent intermediate By vibrating or rotating the low deformation resistance regions 33 and 33 ′, the metal body can be easily sheared and deformed. Therefore, the metal structure having high strength or high ductility can be obtained by refining the metal structure. It can be manufactured at low cost.

  In particular, the first low deformation resistance regions 30a and 30a ′ and the second low deformation resistance regions 30b and 30b ′ are usually formed by heating a metal body, respectively. Shear stress acting on the first low deformation resistance regions 30a, 30a 'and the second low deformation resistance regions 30b, 30b' by differentiating the heating temperatures of 'and the second low deformation resistance regions 30b, 30b'. Since different shear stresses can be applied to the metal structure in two stages, the metal structure can be further refined.

  Moreover, when the portion where the metal structure has been refined by shear deformation once is further subjected to shear deformation, the heating temperature of the metal body can be lowered by improving the ductility of the metal body. It can be made finer.

  In addition to applying shear stress to the metal structure in two stages, it can be added in multiple stages by providing a plurality of intermediate non-low deformation resistance regions 33, 33 ′ along the extending direction of the metal body. Also good. In particular, in the case of a metal-containing ceramic body, homogenization can be improved by setting shear deformation under different conditions each time shear deformation is performed.

  In the following, embodiments of the present invention will be described.

  FIG. 9 shows an apparatus for shearing and deforming a low deformation resistance region formed on a metal body by vibration. The present inventors have called the SVSP (Severe Vibration Straining Process) method in which the low deformation resistance region is shear-deformed by vibration to refine the metal structure in this way, and FIG. 9 is an outline of an example of the SVSP apparatus. It is explanatory drawing. Here, for convenience of explanation, the metal body M1 is a rectangular bar that is extended in one direction, but may have other shapes.

  The SVSP apparatus is provided with a fixing portion 41, a shear deformation portion 42, and a vibration portion 43 on the base 40 along the extending direction of the metal body M1.

  The fixed portion 41 is provided with a first restricting body 44 and a second restricting body 45 along the extending direction of the metal body M1. The first restricting body 44 restricts the movement in the width direction of the metal body M1 fed along the extending direction, and the second restricting body 45 restricts the movement of the metal body M1 fed along the extending direction. The movement in the thickness direction is restricted, and the metal body M1 is fixed so as to freely advance and retract.

  That is, in the first restricting body 44, the metal body M1 is sandwiched and fixed by the first contact roller 44a and the second contact roller 44b that are rotatably supported by the support bodies.

  Further, in the second restricting body 45, the first support 45a and the second support 45b which are erected with the metal body M1 interposed therebetween, the lower roller 45c positioned below the metal body M1, and the metal body M1. An upper roller 45d positioned on the upper side is rotatably mounted, and the metal body M1 is sandwiched and fixed by the lower roller 45c and the upper roller 45d.

  The lower roller 45c and the upper roller 45d, and further, the first contact roller 44a and the second contact roller 44b of the first restricting body 44 are rotated using appropriate driving devices, respectively, so that the metal body M1 is rotated. A feeding mechanism for feeding may be used. In FIG. 9, 46 is a guide roller for assisting the feeding of the metal body M1.

  The vibration unit 43 is provided with a vibration applying body 47 and a vibration propagation suppressing body 48 along the extending direction of the metal body M1. The vibration applying body 47 applies a predetermined vibration to the metal body M1, and the vibration propagation suppressing body 48 suppresses the vibration applied to the metal body M1 in the vibration applying body 47 from propagating along the metal body M1.

  The vibration applying body 47 includes an ultrasonic vibrating body 49 positioned below the metal body M1 and a propagating body 50 attached to the output shaft 49a of the ultrasonic vibrating body 49. The propagating body 50 includes a lower roller 50a positioned on the lower side of the metal body M1 and an upper roller 50b positioned on the upper side of the metal body M1 rotatably mounted on a U-shaped support frame 50c. The metal body M1 is sandwiched between the lower roller 50a and the upper roller 50b.

  The propagating body 50 operates the ultrasonic vibrating body 49 to vibrate in a vertical direction with a predetermined amplitude and a predetermined frequency, thereby vibrating the metal body M1 in the vertical direction. In the present embodiment, the vibration motion is generated by the ultrasonic vibrator 49, but the vibration motion may be generated by a device other than the ultrasonic vibrator 49, such as a linear motor or a piezoelectric element.

  The amplitude of the vibration applied to the metal body M1 by the ultrasonic vibrator 49 is not limited as long as the metal structure in the low deformation resistance region 30 formed on the metal body M1 can be refined by shear deformation as described later. Specifically, the minimum amplitude required is determined from the grain size of the metal structure of the metal constituting the metal body M1 and the width dimension of the low deformation resistance region 30 in the extending direction of the metal body M1.

  The larger the amplitude of vibration by the ultrasonic vibrator 49, the finer the metal structure can be. However, when the amplitude of vibration is large, there is a risk of deformation that is difficult to restore in the low deformation resistance region 30, Therefore, it is desirable to vibrate the metal body M1 with the maximum amplitude that does not cause deformation that makes it difficult to restore the low deformation resistance region 30.

  Here, the deformation that does not become difficult to restore is a deformation in which the low deformation resistance region 30 is restored to the shape before vibration in vibration due to a half cycle, and the deformation that is difficult to restore is in vibration due to a half cycle, This is a deformation in which the low deformation resistance region 30 is not restored to the shape before vibration.

  The frequency of the vibration applied to the metal body M1 by the ultrasonic vibrator 49 can eliminate the distortion caused by the displacement caused in the low deformation resistance region 30 by the vibration, or the metal structure M1 can be relieved, or the metal structure can be recrystallized. Before it can be resolved by the oxidization action, it must be a frequency that can give a displacement different from the displacement applied earlier, that is, a distortion caused by a displacement in the opposite direction or in a different direction, and this frequency is as much as possible A larger setting is desirable. Note that the vibration applied to the metal body M1 is not limited to applying high-frequency vibrations. For example, low-frequency vibrations such as applying only half-cycle vibrations to the low deformation resistance region 30 are applied for a short time. You may comprise.

  The term “low frequency” as used herein refers to the time until the above-described action of eliminating the distortion of the metal body M1 or the recrystallization action of the metal structure starts to act on the distortion caused by the displacement generated in the low deformation resistance region 30. In addition, the frequency of vibration with the longest period during which low-frequency vibration can cause distortion due to the next displacement as a quarter period.

  The vibration propagation suppressing body 48 has the same configuration as that of the second restricting body 45 described above, and is provided on the lower side of the metal body M1 on the first support body 48a and the second support body 48b which are erected with the metal body M1 interposed therebetween. A lower roller 48c to be positioned and an upper roller 48d positioned to the upper side of the metal body M1 are rotatably mounted, and the metal body M1 is sandwiched and fixed by the lower roller 48c and the upper roller 48d, and a vibration application body 47 prevents the vibration applied to the metal body M1 from propagating along the metal body M1.

  The shear deformation portion 42 is a metal body in order to suppress the heating device 51 that heats the metal body M1 to a predetermined temperature and the low deformation resistance region 30 formed in the metal body M1 by heating by the heating device 51 within a predetermined width. And a cooling device 52 for cooling M1.

  In the present embodiment, the heating device 51 uses a high-frequency heating coil. The high-frequency heating coil is wound around the metal body M1 a predetermined number of times, and the metal body M1 is heated to a predetermined temperature to reduce the deformation resistance and thereby reduce the resistance. A deformation resistance region 30 is formed. The heating device 51 is not limited to a high-frequency heating coil, and may be heating using an electron beam, plasma, laser, electromagnetic induction, etc., heating by a gas burner, or heating using an electrical short circuit. . In particular, when an electron beam is used as the heating device 51, the width of the low deformation resistance region 30 in the extending direction of the metal body M1 can be extremely small, and a large shear stress acts on the low deformation resistance region 30. Therefore, the metal structure can be further miniaturized.

  The cooling device 52 includes a first water outlet 52b and a second water outlet 52c that discharge water supplied from the water supply pipe 52a, and is made of metal by water discharged from the first water outlet 52b and the second water outlet 52c. Body M1 is cooling. In FIG. 9, 53 is a water receiving container that receives water discharged from the first water outlet 52 b and the second water outlet 52 c, and 54 is a drain pipe connected to the water receiving container 53.

  In the cooling device 52, both sides of the low deformation resistance region 30 formed by the heating device 51 provided between the first water outlet 52b and the second water outlet 52c are connected to the first water outlet 52b and the second water outlet 52c. In particular, the low deformation resistance region 30 is compared with the length of the metal body M1 in the extending direction by adjusting the arrangement positions of the first water outlet 52b and the second water outlet 52c. This is a very small area.

  In this way, by making the low deformation resistance region 30 a minute width along the extending direction of the metal body M1, it is easy to cause extremely large shear deformation in the portion of the low deformation resistance region 30, and the metal structure refinement efficiency Can be improved. In addition, the residual strain of the shear deformation due to the vibration motion or the residual deformation can be reduced.

  In addition, the low deformation resistance region 30 heated by the heating device 51 is quenched by the cooling device 52, so that the hardness of the metal body M1 with a refined metal structure can be improved. .

  The cooling of the metal body M1 is not limited to water cooling, and may be air cooling, excitation cooling, or any method that can improve the deformation resistance of the metal body M1. .

  In the present embodiment, a cooling device 52 is provided between the second regulating body 45 and the heating device 51 composed of a high-frequency heating coil, and a cooling device 52 is provided between the heating device 51 and the vibration applying body 47. However, the second regulating body 45 and the vibration applying body 47 may be provided closer to the heating device 51 than the cooling device 52, and the distance between the second regulating body 45 and the vibration applying body 47 may be as short as possible.

  In this way, by reducing the distance between the second restricting body 45 and the vibration applying body 47 as much as possible, the energy of vibration applied to the metal body M1 by the vibration applying body 47 is dissipated to a portion other than the low deformation resistance region 30. This can prevent the shear deformation of the low deformation resistance region 30 due to the energy of vibration and can efficiently occur.

  Further, a cooling function is added to the lower roller 45c and the upper roller 45d of the second regulating body 45 sandwiching the metal body M1, and the lower roller 50a and the upper roller 50b in the propagation body 50 of the vibration applying body 47, The metal body M1 may be sandwiched and cooled by the rollers 45c, 45d, 50a, and 50b.

  In the SVSP apparatus configured as described above, when the metal structure is refined by vibration motion, the metal body M1 is sequentially sent to the fixing portion 41, the shear deformation portion 42, and the vibration portion 43 to cool the shear deformation portion 42. While cooling both sides of the low deformation resistance region 30 by the device 52, the metal body M1 is heated by the heating device 51 to form the low deformation resistance region 30.

  Here, the heating by the heating device 51 is performed until the temperature of the low deformation resistance region 30 becomes equal to or higher than the recovery softening temperature of the strain generated in the metal body M1 or the recrystallization temperature of the metal structure, and becomes higher than the recovery / recrystallization temperature. The vibration applying body 47 vibrates the non-low deformation resistance region of the metal body M1 to cause shear deformation in the low deformation resistance region 30. It should be noted that the heating temperature of the metal body M1 by the heating device 51 is not less than the recovery / recrystallization temperature, but is preferably controlled to be not more than the temperature at which the influence of the coarsening of the metal crystal grains starts to occur.

  As described above, by shearing and deforming the low deformation resistance region 30, the metal structure can be refined with almost no change in the outer shape of the metal body M1.

  In this embodiment, the vibration applying body 47 vibrates the non-low deformation resistance region of the metal body M1 in the vertical direction that is the thickness direction of the metal body M1, but as described above, as shown in FIG. The metal body M1 may be vibrated in the left-right direction, which is the width direction of the metal body M1, or may be vibrated by a composite vibration in which the vertical vibration and the left-right vibration are combined. It is good as composition.

  Here, the vibration applied to the metal body M1 is not limited to the vibration in the vertical direction or the left-right direction substantially orthogonal to the extension direction of the metal body M1, but at least the extension of the metal body M1 in the vibration component. It is sufficient that vibrations in the vertical direction or the horizontal direction substantially perpendicular to the direction are included.

  In the SVSP apparatus of the present embodiment, as described above, the shear deformation is caused in the low deformation resistance region 30 by the application of the vibration motion in the vibration part 43, and at the same time, the metal body M1 is fed in the distraction direction, thereby The position of the low deformation resistance region 30 in the body M1 can be displaced, and the metal structure M1 can be subjected to a shearing process by vibration motion continuously to refine the metal structure over a wide range.

  In particular, since the low deformation resistance region 30 completely traverses the metal body M1 extending in one direction, the metal body M1 can be uniformly subjected to shearing as the low deformation resistance region 30 moves. It is possible to form the metal body M1 in which the metal structure is refined substantially uniformly.

  Further, in some cases, the strength or ductility of the metal body M1 is adjusted by adjusting the degree of refinement of the metal structure by adjusting the magnitude of the shear stress caused by the shear deformation at the required position of the metal body M1. Thus, it is possible to generate the metal body M1 that is partially improved in strength or improved in ductility.

  In addition, when the SVSP apparatus is provided in the subsequent stroke portion of a predetermined forming apparatus that performs hot rolling, cold rolling, extrusion molding, or the like on the metal body M1, the extending direction is increased by rolling or extrusion processing. Thus, the metal structure of the metal body M1 stretched by the shearing can be shear-deformed, and the metal structure can be further refined.

  FIG. 10 shows an apparatus for shear deformation by twisting a low deformation resistance region formed in a metal body. The present inventors have called the STSP (Severe Torsion Straining Process) method in which the metal structure is refined by shear deformation by twisting the low deformation resistance region, and FIG. It is a schematic explanatory drawing of an example. Here, for convenience of explanation, the metal body M2 is a round bar extending in one direction, but may be a cylindrical body having a hollow portion.

  The STSP apparatus is configured by providing a fixed portion 61, a shear deformation portion 62, and a rotating portion 63 on the upper surface of the base 60 along the extending direction of the metal body M2.

  The fixing portion 61 is composed of a first fixing wall 61a standing on the upper surface of the base 60 and a second fixing wall 61b. The first fixed wall 61a and the second fixed wall 61b are each constituted by a plate having a predetermined thickness, and the first fixed wall 61a and the second fixed wall 61b are substantially parallel to each other.

  The first fixed wall 61a and the second fixed wall 61b are each provided with an insertion hole through which the metal body M2 is inserted. The metal body M2 is inserted through the insertion hole, and the first fixed wall 61a and the second fixed wall 61b. The metal body M2 is fixed by bringing the tip ends of the fixing screws 61c and 61d screwed into the upper end of the metal body M2 into contact with the circumferential surface of the metal body M2 inserted through the insertion hole.

  The fixing portion 61 is not limited to the one constituted by the first fixing wall 61a and the second fixing wall 61b, and may be configured in any way as long as the metal body M2 can be fixed. Here, to fix the metal body M2 is to fix the rotation of the metal body M2 with the central axis of the metal body M2 having a round bar shape as the rotation axis.

  The rotating portion 63 includes a first restriction wall 63a erected on the upper surface of the base 60, a second restriction wall 63b, and an advance / retreat restriction body 63c interposed between the first restriction wall 63a and the second restriction wall 63b. And a rotating device (not shown).

  The first restriction wall 63a and the second restriction wall 63b are each configured by a plate having a predetermined thickness, and the first restriction wall 63a and the second restriction wall 63b are substantially parallel to each other. The first restriction wall 63a and the second restriction wall 63b are each provided with an insertion hole through which the metal body M2 is inserted, and the metal body M2 is inserted through the insertion hole.

  The advance / retreat restricting body 63c has a length that is substantially the same as the distance between the first restricting wall 63a and the second restricting wall 63b, and is formed of a cylindrical body that can be attached to the metal body M2. The advance / retreat restricting body 63c is mounted on the metal body M2 between the first restricting wall 63a and the second restricting wall 63b, and further includes fixing screws 63d, 63d screwed onto the peripheral surface of the advance / retreat restricting body 63c. The forward / backward restricting body 63c is fixed to the metal body M2 by bringing the tip portion into contact with the circumferential surface of the metal body M2 penetrating the advance / retreat restricting body 63c.

  Therefore, when the non-low deformation resistance region of the metal body M2 is rotated as will be described later, the advance / retreat restricting body 63c is restricted by the first restricting wall 63a and the second restricting wall 63b. It is possible to prevent the displacement in the extending direction.

  Various devices can be used as the rotating device for rotating the non-low deformation resistance region of the metal body M2, and any device can be used as long as it can be rotated while applying a predetermined torque to the metal body M2 on the rotating portion 63 side. There may be. In the present embodiment, a rotating motor (not shown) is interlocked and connected to the end of the metal body M2 on the rotating portion 63 side, and this rotating motor is used as a rotating device.

  The shear deformation part 62 is a metal device for heating the metal body M2 to a predetermined temperature and the low deformation resistance region 30 ′ formed in the metal body M2 by heating by the heating device 64 to have a predetermined width dimension. And a cooling device 65 for cooling M2.

  In the present embodiment, the heating device 64 uses a high-frequency heating coil. The high-frequency heating coil is wound around the metal body M2 a predetermined number of times, and the metal body M1 is heated to a predetermined temperature to reduce the deformation resistance, thereby reducing the resistance. A deformation resistance region 30 ′ is formed. The heating device 64 is not limited to the high-frequency heating coil, and may be heating using an electron beam, plasma, laser, electromagnetic induction, etc., heating by a gas burner, or heating using an electrical short circuit. In particular, when an electron beam is used as the heating device 64, the width of the low deformation resistance region 30 ′ in the extending direction of the metal body M2 can be extremely small, and a large shear stress acts on the low deformation resistance region 30 ′. Therefore, the metal structure can be further miniaturized.

  The cooling device 65 is composed of a first water outlet 65b and a second water outlet 65c that discharge water supplied from the water supply pipe 65a, and is made of metal by water discharged from the first water outlet 65b and the second water outlet 65c. Body M2 is cooling. In FIG. 10, 66 is a water receiving container that receives water discharged from the first water outlet 65 b and the second water outlet 65 c, and 67 is a drain pipe connected to the water receiving container 66.

  In the cooling device 65, both sides of the low deformation resistance region 30 ′ formed by the heating device 64 provided between the first water outlet 65b and the second water outlet 65c are connected to the first water outlet 65b and the second water outlet 65c. In particular, the low deformation resistance region 30 ′ is adjusted to the length in the extending direction of the metal body M2 by adjusting the arrangement positions of the first water outlet 65b and the second water outlet 65c. Compared to this, the area is extremely small.

  In this way, by setting the low deformation resistance region 30 ′ to a minute width along the extending direction of the metal body M2, it is easy to cause extremely large shear deformation in the portion of the low deformation resistance region 30 ′, and the microstructure of the metal structure is fine. Efficiency can be improved. Moreover, when the low deformation resistance region 30 ′ is twisted by the rotating device, it is possible to prevent the occurrence of uneven twisting in the low deformation resistance region 30 ′. Furthermore, the residual strain or residual deformation of the shear deformation caused in the low deformation resistance region 30 ′ by twisting can be reduced.

  In addition, the low deformation resistance region 30 ′ heated by the heating device 64 is quenched by the cooling device 65, so that the hardness of the metal body M2 having a refined metal structure can be improved. it can.

  The width of the low deformation resistance region 30 ′ is preferably within about three times the cross-sectional width dimension of a cross section by a plane orthogonal to the extending direction of the metal body M2. By setting the low deformation resistance region 30 ′ to such a condition, it is possible to cause a large shear deformation while suppressing the deformation of the low deformation resistance region 30 ′ accompanying twisting to the minimum necessary. The refinement efficiency of the metal structure can be improved.

  The cooling device 65 is a water cooling device, but is not limited to the water cooling device, and can be an air cooling if it can be cooled so that the heating region by the heating device 64 can be a local region. Alternatively, excitation cooling may be used, and an appropriate cooling device may be used. In particular, when the heating by the heating device 64 is electron beam heating, the atmosphere can be vacuumed and cooling can be performed by self-cooling.

  In the STSP apparatus of the present embodiment and the above-described SVSP apparatus, the metal bodies M2 and M1 are heated by the heating apparatuses 64 and 51 in the atmosphere, but may be heated in an inert gas atmosphere. Depending on the case, heating may be performed in a reactive gas atmosphere that reacts with the heating region of the metal bodies M2 and M1. Moreover, instead of heating in an atmospheric pressure state, heating may be performed in a reduced pressure state or a pressurized state.

  In particular, when the metal bodies M2 and M1 are heated in a reactive gas atmosphere, the metal M2 and M1 can be subjected to a strong strain caused by the reaction with the reactive gas in the heating region, or surface coating. May be able to do.

  Further, when the metal body M2 is a hollow cylindrical body, a strong strain is applied to the low deformation resistance region 30 ′ by supplying an inert gas or a reactive gas to the hollow portion in a high pressure state or a reduced pressure state in the STSP device. Can also occur.

  Note that an inert liquid or a reactive liquid may be used instead of the inert gas or the reactive gas.

  The STSP apparatus is configured as described above, and when the metal structure is made fine by twisting the low deformation resistance region 30 ′ formed in the metal body M2, the metal body M2 is attached to the STSP apparatus, The low deformation resistance region 30 ′ is heated by the heating device 64 while cooling both sides of the low deformation resistance region 30 ′ by the cooling device 65.

  Here, the heating by the heating device 64 is performed until the temperature of the low deformation resistance region 30 ′ becomes equal to or higher than the recovery softening temperature or recrystallization temperature of the strain generated in the metal body M2, and when the temperature becomes higher than the recovery / recrystallization temperature. The low deformation resistance region 30 ′ is twisted by rotating the non-low deformation resistance region around the rotation axis with the central axis of the metal body M2 as the rotation axis by the rotating device.

  The rotation of the non-low deformation resistance region by the rotating device is 1 to 20 rpm. The number of rotations is set to 1/2 or more, and the larger the number of rotations, the larger shear deformation can be caused and the metal structure refinement efficiency can be improved.

  Although the heating temperature of the metal body M2 by the heating device 64 is not less than the recovery / recrystallization temperature, it is desirable to control it to not more than the temperature at which the influence of the coarsening of metal crystal grains starts to occur.

  After the low deformation resistance region 30 ′ is twisted in this way, the low deformation resistance region 30 ′ is cooled. In the embodiment described above, the metal body M2 cannot be moved along the extending direction, but by configuring the metal body M2 to be movable along the extending direction, the low deformation resistance region 30 ′ in the metal body M2 is configured. The position of the metal body M2 can be displaced, and the metal body M2 can be continuously subjected to a shearing process by twisting to obtain a metal body M2 having a finer metal structure over a wide area.

  Further, in some cases, for each low deformation resistance region 30 ′ formed at a required position of the metal body M2, the degree of refinement of the metal structure is adjusted by adjusting the rotation speed of the metal body M2 by the rotating device. In addition, the strength or ductility of the metal body M2 can be adjusted, and the metal body M2 having partially improved strength or improved ductility can be generated.

  FIG. 11 is an electron micrograph of A5056, which is an aluminum alloy before processing by the above-described STSP apparatus, and FIG. 12 is an electron micrograph of A5056 processed by the STSP apparatus. It can be seen that the metal structure M2 can be refined to 5 μm or less by making the metal body M2 shear deformation.

  Moreover, this refinement of the crystal grains can be achieved by devising and setting the heating and cooling conditions, for example, by heating only a very narrow region to the deep part with an electron beam, and outside the region by self-cooling. If this is left, the boundary between the low deformation resistance region and the non-low deformation resistance region can be narrowed to concentrate strong strain in the low deformation resistance region, so that the crystal grain size can be reduced to a level of several tens of nanometers to ten nanometers. Can be

  Further, FIG. 13 shows the proof stress, tensile strength, and uniform elongation of a metal body obtained by processing S45C, which is an iron-based material, by the above-described STSP apparatus and a metal body that has been annealed by the same thermal history as the process in the STSP apparatus. These results show that the yield strength and the tensile strength can be improved without increasing the uniform elongation by processing with the STSP apparatus.

  Furthermore, FIG. 14 shows the yield strength, tensile strength, and uniform elongation of a metal body obtained by treating Al5056, which is an aluminum-based material, with the above-described STSP apparatus, and a metal body that has been annealed by the same thermal history as the process in the STSP apparatus. These results show that the yield strength and the tensile strength can be improved without increasing the uniform elongation, as in the case of S45C, by processing with the STSP apparatus.

  As described above, the low deformation resistance regions 30 and 30 ′ are locally formed on the metal body by the above-described SVSP device and STSP device, and the low deformation resistance regions 30 and 30 ′ are subjected to shear deformation to apply strong strain. As a result, the metal structure can be refined and the strength or ductility of the metal bodies M1 and M2 can be improved.

  Moreover, as shown in FIG. 1, when the metal body is a laminate 10 obtained by polymerizing a plurality of metal layers, the metal forming each metal layer is made finer with the metal of the adjacent metal layer. In addition, by joining together, an integrated metal body can be generated, and a metal body whose metal composition changes in the stacking direction of the metal layers can be provided.

  Alternatively, as shown in FIG. 15 as a schematic cross-sectional view of a metal body, a composite metal rod 26 in which a second metal member 25 is inserted and integrated into a notch portion of a notched round bar-shaped first metal rod 24 with a part cut away. Can be mechanically mixed with the metal of the first metal rod 24 and the metal of the second metal material 25 to produce a new alloy.

  In addition, as shown in FIG. 2, when the metal body is a calcined body 16 of a mixture obtained by mixing a plurality of types of metal powders, the metal structures of the metal powders are joined together while being refined. Thus, a tightly integrated metal body can be generated. In particular, a combination of metals that cannot be generated by the melting method can be mechanically joined by the SVSP apparatus and the STSP apparatus, and a new alloy can be generated.

  As shown in FIG. 3, when the metal body is a filling body 19 formed by filling the pores of the porous body 17 with the metal powder 18, the metal structure of each metal is made finer. An integrated metal body can be produced by bonding. In particular, a combination of metals that cannot be generated by the melting method can be mechanically joined by the SVSP apparatus and the STSP apparatus, and a new alloy can be generated.

  Also, as shown in FIG. 4, when the metal body is a metal wire bundle 23 formed by bundling a plurality of types of metal wires, the metal structures of each metal wire are integrated by being refined and joined together. Metal bodies can be generated. In particular, combinations of metals that cannot be produced by the melting method can be mechanically joined by the STSP apparatus, and a novel alloy can be produced.

  In particular, the metal body has a hollow cylindrical shape until the metal structure is refined by the SVSP apparatus or the STSP apparatus, and after the metal structure is refined by the SVSP apparatus or the STSP apparatus, the circumference of the cylindrical metal body is increased. By cutting the surface into a plate-like body, it is possible to easily provide a metal material that is a plate-like metal material and has a fine metal structure.

  In the above-mentioned SVSP device and STSP device, the length of the low deformation resistance regions 30, 30 ′ formed by the heating devices 51, 64 in the extending direction of the metal bodies M1, M2 and the shear deformation applied to the low deformation resistance regions 30, 30 ′. Can be adjusted so that shear deformation can be performed in the entire region of the low deformation resistance region 30, 30 ′, or a part of the low deformation resistance region 30, 30 ′, for example, the central region of the low deformation resistance region 30, 30 ′. Alternatively, shear deformation can be performed at both ends or one end of the low deformation resistance regions 30, 30 ′.

  In the STSP device, as is clear from the structure, the metal shaft is not sufficiently deformed in the rotating shaft portion of the low deformation resistance region 30 ′ when the non-low deformation resistance region is rotated by the rotating device. There is a possibility that an area where the structure is not sufficiently refined may appear.

  Therefore, in the STSP device of the present embodiment, when the low deformation resistance region 30 ′ is formed by heating the metal body M2 by the heating device 64, the heating device 64 has a heating distribution with the rotation axis region as a non-center. As heating.

  That is, when the heating device 64 is configured with a high-frequency heating coil as in the present embodiment, the central axis of the high-frequency heating coil is offset from the rotation axis of the metal body M2 by the rotating unit 63. As a result, in the low deformation resistance region 30 ′, a heating distribution having a non-centered region of the rotation axis can be obtained, and a non-miniaturized region can be prevented from forming in the rotation axis region. Can be made finer.

  In this way, by adjusting the arrangement of the heating device 64, the heating distribution can be brought into a state where the region of the rotating shaft is not centered, and the metal structure in the region of the rotating shaft can be surely refined.

  As a method for preventing non-uniformization of the microstructure of the metal structure in the STSP apparatus, one non-low deformation resistance region sandwiching the low deformation resistance region 30 ′ is made to the other non-low deformation resistance region with respect to the metal body M1. By moving in a direction substantially perpendicular to the extending direction and causing the shear deformation in the region of the rotation axis of the low deformation resistance region 30 ′ by this movement, non-uniformity in the metal structure may be prevented.

  That is, the vibration applying body 47 of the SVSP device may be incorporated in the STSP device to twist and vibrate the low deformation resistance region 30 ′.

  Alternatively, the rotational axis itself is offset from the geometric center of the metal body M2 in the form of a round bar, thereby causing shear deformation in the region of the rotational axis of the low deformation resistance region 30 ′, thereby miniaturizing the metal structure. May be prevented.

  FIG. 16 is a schematic explanatory diagram of a modification example of the above-described STSP apparatus. This STSP apparatus is provided with a supply unit 70 for supplying the metal body M2 ′ and a storage unit 71 for storing the sheared metal body M2 ′.

  The supply unit 70 is supplied with a metal body M2 ′ wound around a required reel, and is fed while the metal body M2 ′ is linearly extended by a drawing tool (not shown).

  In the accommodating portion 71, the sheared and deformed metal body M2 ′ is accommodated by being wound around a reel with a winding tool (not shown).

  In the STSP apparatus, a plurality of shear deformation portions 62 ′ are provided apart from each other by a predetermined interval along the extending direction of the metal body M2 ′ between the supply portion 70 and the accommodating portion 71, and adjacent to each other. A rotating part 63 ′ is provided between the shear deforming parts 62 ′ and 62 ′, and the rotating part 63 ′ rotates the metal body M2 ′ around the rotation axis substantially parallel to the extending direction of the metal body M2 ′. The metal body M2 ′ in the shear deformation portion 62 ′ is subjected to shear deformation.

  The shear deformation portion 62 ′ includes a high frequency heating coil 64 ′ for heating the metal body M2 ′, a first water outlet 65b ′ and a second water outlet 65c ′ for discharging cooling water for cooling the metal body M2 ′. In addition, the high frequency heating coil 64 'is positioned between the first water outlet 65b' and the second water outlet 65c ', and the heating region of the metal body M2' by the high frequency heating coil 64 'is set to a minute range. .

  In the present embodiment, the rotating part 63 ′ is provided with a rotating roller in contact with the metal body M2 ′, and the metal body M2 ′ is rotated by the rotating roller. In addition, the rotation direction of the rotating roller is opposite in each of the adjacent rotating parts 63 ′.

  In the STSP apparatus configured as described above, the metal body M2 ′ is fed a plurality of times by the metal body M2 ′ by feeding the metal body M2 ′ using the supply unit 70 and the housing part 71 as the conveying means of the metal body M2 ′. Can do.

  Alternatively, for example, when the shear deformation portion 62 ′ is provided at N locations at a predetermined interval T along the extending direction of the metal body M2 ′, the supply portion 70 and the storage portion 71 are used as a means for conveying the metal body M2 ′. When the body M2 ′ is fed at an equal distance with the predetermined interval T, the shear deformation can be performed at once in the region of the length of T × N, so the shear deformation is stopped and the metal body M2 ′ is moved by T × N. It is also possible to repeatedly feed the metal body M2 ′ by a distance equal to the predetermined interval T by restarting the shear deformation. Thereby, manufacturing efficiency can be improved.

  In this case, N is an even number, and as shown in FIG. 16, not all the rotating parts 63 ′ are provided between the shearing deformation part 62 ′ and the shearing deformation part 62 ′, but every other rotation part 63 ′. A rotating part 63 ′ may be provided.

  Since the metal body having a finer metal structure as described above has high strength, it can be reduced in weight when used as an automobile part, and the automobile can be reduced in weight to improve fuel efficiency. .

  Thus, the metal body used for a motor vehicle part is manufactured as follows.

  First, pretreatment is performed on a plate-shaped metal plate having a desired composition. In this pretreatment, the metal plate is once heated and cooled to make a single phase of the metal plate, to disperse the metal particles constituting the metal plate, and to adjust the residual stress of the metal plate, etc. Yes.

  Next, the metal plate that has been pretreated is processed with an SVSP apparatus, so that the metal structure of the metal plate is uniformly refined to form a metal plate with high strength and high ductility.

  In particular, when the metal plate is made of an aluminum alloy, a large-sized aluminum alloy plate with high strength and high ductility can be formed, and a complex-shaped bonnet or cowl can be formed by forging. Manufacturing cost can be greatly reduced.

  In particular, when such bonnets, cowls, etc. are formed by forging, the flange and fitting structure used for connection with other members can be integrally formed, so the cost can be reduced by integrally forming multiple parts. In addition, the structural strength can be improved.

  As described above, the metal plate is not only formed with the SVSP apparatus, but also processed with the STSP apparatus after the above-described pretreatment is performed on the round bar-shaped metal body having a desired composition. Thus, the metal structure of the metal plate can be uniformly refined to form a metal body having high strength and high ductility.

  Since the metal body formed in this way has high ductility, forging with a forging die having a plurality of cylinders after separation for each required volume, for example, as shown in FIG. Alternatively, the body frame socket 80 having a complicated shape can be formed.

  As shown in FIG. 18, the body frame socket 80 of this embodiment is used for a connecting portion of each frame in a body frame 90 of an automobile, and is usually connected by welding each frame at a connecting portion. However, by using the body frame socket 80 shown in FIG. 17, it is possible to reduce the manufacturing cost by eliminating the need for welding work, and it is possible to improve the structural strength and improve the reliability compared to welding. be able to.

  In the body frame socket 80 of FIG. 17, four frames 81, 82, 83, a first frame 81, a second frame 82, a third frame 83, and a fourth frame 84 extending in different directions, respectively. A first fitting portion 85, a second fitting portion 86, a third fitting portion 87, and a fourth fitting portion 88 into which 84 is inserted are extended in a predetermined direction and protruded.

  Each fitting portion 85, 86, 87, 88 is provided with insertion holes 85h, 86h, 87h, 88h formed by inserting a cylinder during forging, and the insertion holes 85h, 86h, 87h, The front ends of the frames 81, 82, 83, and 84 are inserted and connected to 88h.

  As another form of use, for example, a high-strength rod-shaped body can be provided by refining the metal structure of the rod-shaped member such as a steering shaft by the SVSP method. In addition, the entire metal structure of the rod-shaped body is not uniformly miniaturized, but it is possible to have an intentional variation in strength by miniaturizing only a part or not minimizing only a part.

  Thus, in the case of a steering shaft made of a rod-like body with intentional variations in strength, it is possible to impart shock absorption by intentionally breaking the steering shaft with an impact when an accident occurs. .

  Alternatively, in the case of forming the screw, after the metal structure is refined by the SVSP method on the rod-shaped member, the screw rolling is performed by utilizing the rotation of the metal body by the STSP method. A strengthened screw can be easily formed.

  Similarly, when forming a transmission gear, after refining the metal structure by the SVSP method on the rod-shaped member, the gear teeth are rotated by a required die using the rotation of the metal body by the STSP method. By performing this molding, it is possible to easily form a high-strength mission gear.

  The metal body having a finer metal structure as described above is extremely useful not only for automobile parts but also when used as a sputtering target material for a sputtering apparatus used in a semiconductor manufacturing process.

  In particular, a metal body having a required composition can be generated, and the generated metal body can have a homogeneous composition and a fine metal structure can generate a homogeneous metal film on the upper surface of the semiconductor substrate. can do. Such a sputtering target material can be produced at a lower cost than the ECAP method.

  This sputtering target material is manufactured as follows.

  First, pretreatment is performed on a metal plate having a desired composition. In this pretreatment, the metal plate is once heated and cooled to make a single phase of the metal plate, to disperse the metal particles constituting the metal plate, and to adjust the residual stress of the metal plate, etc. Yes.

  Next, the metal plate after the pretreatment is processed by the SVSP apparatus, so that the metal structure of the metal plate is uniformly refined.

  After refinement of the metal structure by the SVSP device, the crystal orientation of the crystal structure refined by cold rolling, cold forging or warm forging, swaging, etc. of the metal plate is adjusted and the target shape is formed. ing.

  Thus, by adjusting the crystal orientation of the refined crystal structure, it is possible to provide a sputtering target capable of generating a homogeneous metal film on the upper surface of the semiconductor substrate.

  Further, when the metal plate is formed into a target shape, a cooling concave groove is formed on the back surface simultaneously with forming the metal body into a substantially disk shape. Thus, by simultaneously forming the cooling concave groove, the manufacturing process of the sputtering target can be shortened, and an inexpensive sputtering target can be provided.

  In particular, because the metal structure is refined by the SVSP apparatus, the formability of the metal plate is improved, so that the cooling concave groove can be accurately generated by cold forging or warm forging.

  After the metal structure of the metal plate is uniformly refined by the SVSP apparatus, the metal plate is heated to a temperature at which coarsening of the refined metal verification can be suppressed, and the residual stress of the metal plate is adjusted. May be.

  Another manufacturing method may be as follows. In this manufacturing method, the metal body used as the target material is a round bar-shaped metal bar having a desired composition.

  First, the metal rod is pretreated in the same manner as in the case of the metal plate described above, so that the metal rod becomes a single phase, the particles of the metal constituting the metal rod are dispersed, and the metal rod remains. The stress is adjusted.

  Subsequently, the metal structure of the metal rod is uniformly refined by processing the metal rod after the pretreatment with the STSP apparatus.

  After the metal structure is refined by the STSP apparatus, the metal rod is cut into predetermined lengths, and a metal plate is formed by cold forging or warm forging.

  By processing the metal plate thus formed with the SVSP apparatus as described above, the metal structure of the metal plate is further refined. After that, as in the case of the metal plate described above, the crystal orientation of the crystal structure refined by cold rolling, cold forging or warm forging, swaging or the like is adjusted and the target shape is formed. It is carried out.

  By combining the STSP method and the SVSP method to produce a metal body that becomes a sputtering target, a metal body with a very fine metal structure can be obtained, and a homogeneous metal film can be produced on the upper surface of the semiconductor substrate. A sputtering target can be provided.

  In particular, the metal rod can be homogenized by treating the metal rod by the STSP method, and a homogeneous metal film can be formed on the upper surface of the semiconductor substrate by generating a sputtering target from a more homogenized metal body. It is possible to provide a sputtering target that makes it possible to generate

  The above-mentioned SVSP method or STSP method can be used not only for the production of automobile parts and sputtering targets, but also for materials and parts with improved characteristics by being used for the following materials.

  When the metal body is a magnetic body, it is possible to improve the workability by refining the metal structure of the metal body by the SVSP method or the STSP method, thereby enabling fine processing such as thinning. it can. In some cases, an improvement in magnetic susceptibility can be expected.

  When the metal body is a shape memory alloy, the metal structure of the metal body is refined by the SVSP method or the STSP method, thereby improving workability and enabling processing into a finer shape. Can do. In particular, when a screw used for assembling an electronic device is formed using this shape memory alloy, it can be easily disassembled by eliminating the screw thread by shape memory when the electronic device is discarded.

  When the metal body is a hydrogen storage alloy, the metal storage structure can be refined by the SVSP method or the STSP method to improve the hydrogen storage capacity. Furthermore, various shapes can be obtained by improving workability, and a structure having a hydrogen storage function can be formed.

  If the metal body is a vibration-damping alloy, the metal structure of this metal body should be refined by the SVSP method or STSP method to improve workability and enable processing into a finer shape. Can do. In particular, the sound quality can be improved by widening the application of the damping alloy to structural members of acoustic equipment such as speakers.

  When the metal body is an electrothermal material, it is possible to improve the workability by refining the metal structure of the metal body by the SVSP method or the STSP method, thereby enabling processing into a finer shape. it can.

  When the metal body is a biomaterial, it is possible to improve the workability by refining the metal structure of the metal body by the SVSP method or the STSP method, thereby enabling processing into a finer shape. it can.

  In particular, titanium has been conventionally used as a biomaterial. However, since titanium has high hardness, there is a problem that workability is very poor and molding cost is increased. However, a metal structure is formed by the SVSP method or STSP method. It is possible to form titanium by forging by miniaturizing the material, and it is possible to form a titanium part having a predetermined shape at low cost.

  Moreover, titanium whose metal structure has been refined by the SVSP method or the STSP method can be made into a material having a low Young's modulus and a high strength, and can also improve biocompatibility.

  As described above, the metal body processed by the SVSP method or the STSP method has not only improved workability due to improved ductility, but also increased strength, so that a member having the same strength can be made lighter. It is possible to reduce the weight of a transport device such as a ship, an aircraft, or an automobile, or a building structure such as a high-rise building or a bridge.

  As described above, in the metal processing method of the present invention and the metal body using the metal processing method, a high-strength and high-ductility metal can be continuously purified. Can be provided. In addition, an alloy having a composition that could not be produced by the conventional melting method can be produced, so that a novel metal can be provided.

  In particular, the metal-containing ceramic body using the metal processing method of the present invention can provide a metal-containing ceramic body in which the contained metal component and non-metal component are firmly and uniformly bonded.

  In addition, the sputtering target using the metal processing method of the present invention can provide a sputtering target that is not only inexpensive, but also enables purification of a homogeneous metal film on a semiconductor substrate.

It is a cross-sectional schematic diagram of a metal body. It is a cross-sectional schematic diagram of a metal body. It is a cross-sectional schematic diagram of a metal body. It is a cross-sectional schematic diagram of a metal body. It is explanatory drawing of the shear deformation | transformation added to a low resistance area | region. It is explanatory drawing of the shear deformation | transformation added to a low resistance area | region. It is explanatory drawing of the shear deformation | transformation added to a low resistance area | region. It is explanatory drawing of the shear deformation | transformation added to a low resistance area | region. It is a schematic explanatory drawing of a SVSP apparatus. It is a schematic explanatory drawing of an example of an STSP apparatus. It is an electron micrograph of the metal structure before the process by a STSP apparatus. It is an electron micrograph of the metal structure after the processing by the STSP apparatus. It is a graph which shows the physical property change at the time of refinement | miniaturizing a metal structure in S45C. It is a graph which shows the physical-property change when metal structure is refined | miniaturized in Al5056. It is a cross-sectional schematic diagram of a metal body. It is a schematic explanatory drawing of the example of a change of a STSP apparatus. It is explanatory drawing of a body frame socket. It is explanatory drawing of a body frame socket. It is a reference figure for demonstrating ECAP method.

Explanation of symbols

M1 metal body
30 Low deformation resistance region
40 base
41 Fixed part
42 Shear deformation part
43 Vibration section
44 First Regulatory Body
44a First contact roller
44b Second contact roller
45 Second regulatory body
45a First support
45b Second support
45c Lower roller
45d upper roller
46 Guide roller
47 Vibration applying body
48 Vibration propagation suppressor
49 Ultrasonic vibrator
49a Output shaft
50 Propagator
50a Lower roller
50b Upper roller
50c support frame
51 Heating device
52 Cooling device
52a Water supply piping
52b First outlet
52c Second outlet
53 Water receiving container
54 Drainage pipe

Claims (16)

  A first cooling means and a second cooling means for cooling the metal body along the extending direction of the metal body extended in one direction are provided, and the first cooling means and the second cooling means A heating means for heating the metal body is provided in between, and the metal body is heated by the heating means to locally reduce the deformation resistance of the metal body, thereby forming a low deformation resistance region crossing the metal body. Forming and moving the one non-low deformation resistance region of the metal body sandwiching the low deformation resistance region relative to the other non-low deformation resistance region to change the position relative to each other. A metal processing method in which the resistance region is shear-deformed and the metal structure of the metal body is refined.   The metal processing method according to claim 1, wherein the change in position is a vibration motion applied in a direction substantially orthogonal to the extending direction of the metal body.   The fluctuation of the position is substantially orthogonal to the first vibrational motion applied in the first direction substantially orthogonal to the extending direction of the metal body, and substantially orthogonal to the extending direction of the metal body. The metal processing method according to claim 1, wherein the metal processing method is a combined motion with a second vibration motion applied in the second direction.   The metal processing method according to claim 1, wherein the low deformation resistance region is moved along an extending direction of the metal body.   The metal processing method according to claim 1, wherein the metal body is a plate-like body.   The metal processing method according to claim 1, wherein the metal body is a plate-like body formed by polymerizing metal layers having different compositions.   The metal processing method according to any one of claims 1 to 4, wherein the metal body is a plate-like body made of a mixed material in which a second metal is mixed with a first metal.   A metal body extended in one direction, the first cooling means and the second cooling means for cooling the metal body arranged along the extension direction, the first cooling means and the second cooling means. A low deformation resistance region temporarily formed by heating locally with a heating means for heating the metal body, and one non-low deformation resistance region sandwiching the low deformation resistance region, the other A metal body having a metallographic structure refined by vibrating or rotating the non-low deformation resistance region of the material to cause shear deformation.   The shear deformation was applied by causing one non-low deformation resistance region sandwiching the low deformation resistance region to vibrate in a direction substantially perpendicular to the extending direction of the metal body with respect to the other non-low deformation resistance region. The metal body according to claim 8, wherein the metal body is a deformation.   The shear deformation causes one non-low deformation resistance region sandwiching the low deformation resistance region to oscillate in a first direction substantially perpendicular to the extending direction of the metal body with respect to the other non-low deformation resistance region. 9. The deformation applied in the above-described manner, and the deformation applied by oscillating and moving in a second direction substantially orthogonal to the extending direction of the metal body and substantially orthogonal to the first direction. Metal body.   The metal body according to any one of claims 8 to 10, wherein the low deformation resistance region is moved along an extending direction of the metal body.   The metal body according to any one of claims 8 to 11, wherein the metal body is a plate-like body.   The metal body according to any one of claims 8 to 11, wherein the metal body is a plate-like body formed by polymerizing metal layers having different compositions.   The metal body according to any one of claims 8 to 11, wherein the metal body is a plate-like body made of a mixed material in which a first metal is mixed with a second metal.   A metal-containing ceramic body extended in one direction, the first cooling means and the second cooling means for cooling the metal body arranged along the extension direction, the first cooling means and the second cooling means. A non-low deformation resistance region sandwiching the low deformation resistance region is provided with a low deformation resistance region temporarily formed by heating locally with a heating unit provided between the cooling unit and heating the metal-containing ceramic body. A metal-containing ceramic body having a metal structure refined by oscillating or rotating an area with respect to the other non-low deformation resistance area to cause shear deformation.   In the shear deformation, one non-low deformation resistance region sandwiching the low deformation resistance region is twisted around a rotation axis that is substantially parallel to the extending direction of the metal-containing ceramic body with respect to the other non-low deformation resistance region. The metal-containing ceramic body according to claim 15, wherein the metal-containing ceramic body is a deformation applied by turning.