JP2007305718A - Production device for metallized film - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a production device for a metallized film solving the problem that an electrode pattern formed on the metallized film for a metallized-film capacitor is difficult to conduct an inspection, and being capable of inspecting the electrode pattern with a high accuracy. <P>SOLUTION: The prodcution device is provided with a winding-out section 2 supplying a dielectric film 1a, an evaporator forming a metallized electrode on the surface of the dielectric film 1a, and an emitter having a winder 7 winding the manufactured metallized film 1 and irradiating from the rear side of the metallized film 1 by a fluorescent lamp 9 lit by a DC power supply. Further, the production is provided with a camera 11 photographing the metallized electrode from the surface side of the metallized film 1 by a transmitting light, and a decision section taking in and recognizing an image from the camera 11. The metallized film 1 is irradiated with a uniform light, and the electrode pattern formed on the metallized film 1 continuously carried at a high speed is photographed and decided with the high accuracy at all times by the transmitted light by such a constitution. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an apparatus for producing a metallized film useful for producing a metallized film used for a metallized film capacitor used for various electric equipments and automobiles.

  FIG. 8 is a sectional view showing the configuration of this type of metallized film capacitor, and FIGS. 9A and 9B are plan views showing a pair of metallized films used in the metallized film capacitor. 8 and 9, reference numerals 20 and 21 respectively denote metallized films, and a metallized film capacitor is formed by winding (or laminating) the metallized films 20 and 21 as a pair.

  Reference numerals 20a and 21a denote dielectric films serving as substrates of the metallized films 20 and 21, respectively. Reference numerals 20b and 21b denote metal vapor deposition electrodes formed on the surfaces of the dielectric films 20a and 21a, respectively. And 21b are formed by vapor-depositing aluminum metal on one side of the dielectric films 20a and 21a except for the insulation margins 20c and 21c at one end, and the electrodes are drawn out through the metallicons 22a and 22b on both end faces. It is what you are doing.

  Further, the metal vapor deposition electrodes 20b and 21b are non-vapor deposition electrodes that do not have a metal vapor deposition electrode formed by oil transfer on the side from the substantially central part of the width W of the effective electrode part forming the capacitance toward the insulation margins 20c and 21c. A dielectric that is divided into a plurality of divided electrodes 20e and 21e by slits 20d and 21d, and that is positioned on the side opposite to the insulation margins 20c and 21c and closer to the metallicons 22a and 22b from the approximate center of the width W of the effective electrode portion. It is connected in parallel by fuses 20f and 21f to metal vapor-deposited electrodes 20b and 21b deposited on the entire surface of the films 20a and 21a.

  The metallized film capacitor configured as described above is capable of realizing a metallized film capacitor having a self-safety function and generating less heat by the fuses 20f and 21f (Patent Document 1).

  The metallized films 20 and 21 have a width of about 1 m and a length of several thousand to several tens of thousands m of the strip-shaped dielectric films 20a and 21a in the longitudinal direction of the metal deposition electrodes 20b and 21b and the divided electrodes 20e. , 21e are formed in succession and then slit into a desired width dimension for use.

  Therefore, in order to determine the quality of the respective metal vapor deposition electrodes 20b and 21b and the divisional electrodes 20e and 21e formed on the metallized films 20 and 21, a part of the metallized films 20 and 21 that have been manufactured. Is generally used (Japanese Patent Laid-Open No. 2003-22883), in which the quality is determined by mounting and moving each of them on an XY stage and recognizing the image using an illumination device and a photographing device.

On the contrary, a method of fixing an object to be inspected and moving and capturing an image of the object to be inspected which is transmitted and illuminated by continuously arranging a plurality of illumination devices such as xenon lamps, and further, an illumination device In addition, it has been studied to make a pass / fail judgment by recognizing an image by moving a photographing device.
JP 2004-134561 A JP 2006-47170 A

  However, a part of the metallized films 20 and 21 produced in large quantities as described above are sampled, and the metal deposition electrodes 20b and 21b and the divided electrodes 20e and 21e (hereinafter referred to as electrode patterns) formed on the surface. ) Is already too late at the time when a negative determination occurs, so it is ideal to always inspect when the electrode patterns are formed on the dielectric films 20a and 21a that are continuously conveyed. However, if this is to be realized, it is impossible to perform the inspection by sampling a part of the metallized films 20 and 21 in this way.

  In addition, the metallized films 20 and 21 are continuously conveyed at a high speed of 350 to 500 m / min. When trying to constantly inspect the electrode patterns formed on the metallized films 20 and 21 thus conveyed at high speed, Since the vapor deposition process for forming the electrode pattern is generally performed in a vacuum atmosphere, it is advisable to perform inspection by arranging a camera or illumination in the vacuum atmosphere. Since it is necessary to move the camera and illumination in order to take a picture over the entire width direction, the equipment is not only increased in size, but also the cost is too high. Generally, this method is considered.

  Therefore, considering the camera side on the assumption that the inspection is performed in the atmosphere, it is possible to use an ultra-high-speed camera, but one ultra-high-speed camera costs several million yen. In addition to being expensive, there is a problem in that high brightness illumination is required, so that it cannot be adopted in consideration of cost and downsizing.

  In addition, some shutter-type cameras developed for industrial use are capable of exposure of 10 μs and can be photographed using this, but there is a problem that a sufficient amount of light is indispensable in this case. In addition, when using a normal camera, there is a problem that only flash photography using a xenon lamp can be used, and there is also a problem that these cannot be adopted because there is no specific solution.

  Similarly, when the illumination side is examined on the assumption that the inspection is performed in the atmosphere, illumination is applied toward the electrode pattern formed on the surface of the metallized films 20 and 21 and the reflected light is used. It is conceivable to use a xenon lamp or a metal halide as the illumination. However, when the reflected light is used in this way, fine wrinkles generated in the metallized films 20 and 21 are affected, and the insulation margin described above is used. In addition to the problem that fine pattern images such as 20c and 21c and slits 20d and 21d become unstable and difficult to judge, in order to obtain uniform illuminance over the entire width direction of the wide metallized films 20 and 21 However, there is a problem that the lighting device cannot be adopted because the lighting device becomes large and expensive.

  Therefore, in order to solve such many problems, illumination is applied from the back side of the metallized films 20 and 21, and the electrode pattern formed on the surface side of the metallized films 20 and 21 using the transmitted light. In this case, although there is a great restriction that the illumination device must be disposed in a vacuum atmosphere, the metallized film 20 that is the object to be inspected in this case, This is an optimum method for inspecting the electrode pattern formed on the surface 21.

  Therefore, the xenon lamp and the metal halide lighting are first considered as lighting devices used in a vacuum atmosphere. However, since these lightings are partial lightings, a plurality of lighting devices may be arranged in a straight line. It is difficult to obtain uniform illuminance over the entire width direction of the wide metallized films 20 and 21, and in order to obtain uniform illuminance, a device such as using an optical fiber is required, resulting in a large illuminating device. There is a problem that it cannot be adopted because it becomes expensive and costly.

  In addition, it is conceivable to use a fluorescent lamp as another illumination device used in a vacuum atmosphere. However, in a fluorescent lamp that is turned on by a generally used AC power source, it may be instantaneous depending on a frequency (50 Hz or 60 Hz) to be used. Since the phenomenon of turning off the light (called flicker phenomenon or flicker phenomenon) occurs at a frequency of 50 times or 60 times per second, in order to avoid this flicker phenomenon, the shooting timing with the camera is synchronized with the above frequency. For this reason, there is a problem that it is impossible to always photograph the electrode pattern formed on the metallized films 20 and 21 continuously conveyed at high speed.

  In addition to the above general fluorescent lamps, there are also high-frequency lighting fluorescent lamps that are lit by an AC power source of 20 kHz to 50 kHz. Since flickering occurs when moving at a high speed, there is a problem that it is impossible to always take an image of the electrode patterns formed on the metallized films 20 and 21 that are continuously conveyed at a high speed.

  The present invention solves many of the problems of the prior art and can always inspect the electrode pattern formed on the metallized film continuously conveyed at high speed with high accuracy, and is simple and small in size and inexpensive. An object of the present invention is to provide a manufacturing apparatus for a metallized film.

  In order to solve the above problems, the present invention comprises an unwinding unit for continuously supplying a strip-shaped dielectric film, an evaporation unit for forming a metal evaporation electrode on the surface of the dielectric film supplied from the unwinding unit, In a metallized film manufacturing apparatus for a metallized film capacitor having at least a winding unit for winding a metallized film on which a metal vapor-deposited electrode is formed, a fluorescent lamp configured to be lit by a DC power source is used. Photographed with this camera, a light emitting part that irradiates the metallized film from the back side, a shutter type camera that photographs the metal deposition electrode from the surface side of the metallized film using the transmitted light from this light emitting part By providing a determination unit that captures and recognizes an image, the electrode pattern formed on the metallized film is inspected.

  As described above, the metallized film manufacturing apparatus according to the present invention irradiates from the back side of the metallized film using a fluorescent lamp configured to be lit by a direct current power source, and thus has a simple structure. Since it is possible to irradiate uniform light over the entire width direction of this, using this transmitted light, the metal deposition electrode formed on the metallized film continuously conveyed at high speed is always photographed with high accuracy. Thus, it is possible to make a determination, and it is possible to obtain an effect that it can be realized in a small size and at a low cost.

(Embodiment 1)
Hereinafter, the invention described in the first, fourth, and sixth aspects of the present invention will be described using the first embodiment, but the present invention is not limited to this.

  FIG. 1 is a cross-sectional view showing a configuration of a metallized film manufacturing apparatus according to Embodiment 1 of the present invention, and FIG. 2 is a perspective view showing an inspection unit provided in the apparatus. 1 is a metallized film, 1a is a dielectric film as a base material of the metallized film 1, 1b is an electrode pattern made of a metal vapor-deposited electrode, a divided electrode, etc. formed on the surface of the dielectric film 1a. This electrode pattern 1b is formed continuously on the surface in the longitudinal direction of the dielectric film 1a in the same manner as the electrode pattern described with reference to FIGS. 9A and 9B in the above background art section. However, in FIG. 2, it is simplified for the sake of explanation and is only a partial description.

  2 is an unwinding unit for continuously supplying the dielectric film 1a wound on a reel in units of thousands to tens of thousands of meters, and 3 is an oil transfer to the surface of the dielectric film 1a supplied from the unwinding unit 2. The transfer roller performs pattern transfer for forming the electrode pattern 1b.

  4 is a vapor deposition roller, and when the dielectric film 1a passes over the vapor deposition roller 4, the aluminum melted in the aluminum tank 5 is scattered and deposited on a predetermined portion of the surface of the dielectric film 1a. The operation of continuously fusing zinc melted in the zinc tank 6 and depositing it on a predetermined portion of the surface of the dielectric film 1a is performed continuously, whereby the electrode pattern 1b is formed on the predetermined portion of the surface of the dielectric film 1a. The metallized film 1 is formed, and the metallized film 1 thus produced is configured to be wound on a reel by the winding unit 7.

  8a is a first vacuum chamber, 8b is a second vacuum chamber, and the first vacuum chamber 8a and the second vacuum chamber 8b are evacuated from the exhaust ports 8c and 8d by a vacuum pump (not shown), respectively. The degree of vacuum is maintained.

  Reference numeral 9 denotes a fluorescent lamp as a light emitting part, and 10 denotes a direct current power source for lighting the fluorescent lamp 9. The fluorescent lamp 9 is an effective lighting part longer than the width of the metallized film 1 (non-lighting part + α at both ends). Is provided on the back side of the metallized film 1 so that the metallized film 1 and the electrode pattern 1b are irradiated from the back side of the metallized film 1. It is what.

  Further, as the DC power source 10, a “fluorescent lamp DC power source: DCLS-T36” manufactured by Kyoto Denki Co., Ltd. is used. This DC power source 10 uses an automatic polarity switching function about every hour. Since the polarity can be switched between the two, it is possible to eliminate the dark end phenomenon in which the anode direction peculiar to DC lighting darkens with time, and since this switching time can be performed in 5 μs, the occurrence of output light flicker is almost affected. It is constituted so that there is no.

  Further, since the DC power supply 10 can be manually switched in polarity, the influence of the optical flicker is completely eliminated by switching the polarity at a timing when the electrode pattern is not photographed by a camera which will be described later. It will be able to.

The above and the dark edge phenomenon, in dc lighting of the fluorescent lamp of the discharge space Hg ⁺ are moved to the cathode side, to reduce the anode vicinity Hg ^+, a phenomenon that light emission luminance of the anode side is reduced gradually. This emission luminance is greatly influenced by the ambient temperature, and the dark end phenomenon appears earlier as the temperature is lower, and becomes noticeable at about 10 ° C. for 10 to 13 hours. A similar phenomenon appears in the opposite direction.

  Therefore, if the polarity is switched at an appropriate interval every time, it is possible to always obtain a stable illumination free from the occurrence of a dark end phenomenon or flicker, but in this embodiment, vapor deposition is performed. Since the ambient temperature of the part is about 50 ° C., the dark end phenomenon is not likely to appear, and since the polarity is switched every hour, it is not affected at all.

  11 is a shutter-type camera, 12 is a guide rail for moving the camera 11 in the width direction, 13 is an acrylic plate window provided in the first vacuum chamber 8a, and the camera 11 is the first vacuum chamber. By being arranged in the atmosphere outside 8a, an image of the electrode pattern 1b formed on the surface of the metallized film 1 is taken through the window 13 using the light transmitted by the fluorescent lamp 9. The camera 11 can move freely in the width direction via the guide rail 12 so that images of all the electrode patterns 1b formed on the surface of the metallized film 1 can be taken. It is configured.

  In the present embodiment, “XC-HR50” manufactured by SONY Co., Ltd. was used as the shutter-type camera 11, and the shutter (exposure) time was 10 μs. In principle, since the deposition speed is 350 to 500 m / min, the metallized film 1 is moving at a speed of 5.83 to 8.33 μm / μs in practice (350,000 μm / 60000 μs =), and the shutter time is 10 μs. In the figure, a movement of 58.3 to 83.3 μm occurs.

  The field of view of the camera 11 is 20 × 15 mm (640 × 480 pixels), the resolution is about 31.25 μm / pixel for both x and y, and if the amount of movement is originally within the range below the resolution, Is supposed to be in an unaffected state, but in reality, an image flow of about (58.3 / 31.25 =) 2.6 pixels is generated. However, a very good image can be obtained and there is no problem visually.

  In addition, in the determination unit described later, it is possible to obtain dimensional accuracy in units of subpixels by using an edge detection method based on projection in grayscale processing instead of edge detection by binarization processing for image processing inspection. In addition, the width dimension can be detected with high accuracy and is hardly affected by the image flow. In addition, an inspection for an insulation margin, blurring of an electrode portion, and a blurring defect is also performed, and an area determination inspection by binarization processing is performed.

  A determination unit 14 captures and recognizes an image captured by the camera 11, and performs pass / fail determination by comparing the image of the electrode pattern 1b captured by the camera 11 with a previously stored electrode pattern 1b. To do.

  The metallized film manufacturing apparatus according to the present embodiment configured as described above includes a fluorescent lamp 9 having an effective lighting part longer than the width dimension of the metallized film 1 and being lit by the DC power supply 10. Since it becomes possible to irradiate uniform light over the whole width direction of the metallized film 1 by having used the structure which irradiates from the back surface side of the metallized film 1 using this transmitted light, The electrode pattern 1b formed on the metallized film 1 that is continuously conveyed at a high speed can be photographed with high accuracy at all times.

  Further, the configuration in which the fluorescent lamp 9 is turned on by the DC power source 10 can eliminate the flicker phenomenon described in the section of the problem to be solved by the present invention. It is possible to always photograph the electrode pattern 1b formed at a high accuracy. For example, even when the metallized film 1 is transported at a high speed of 350 to 500 m / min, the speed is about 1 / 100,000 seconds. If the shutter is released, a very good image can be taken with high accuracy.

  Further, only the fluorescent lamp 9 is disposed in the first vacuum chamber 8a, and the camera 11 is disposed outside the first vacuum chamber 8a through the window 13 made of an acrylic plate. Since particles such as aluminum and zinc floating in the chamber 8a can be prevented from adhering to the lens of the camera 11, not only can maintenance be improved, but also the apparatus is simplified and the cost is reduced. Can be realized.

  The determination unit 14 can also measure the dimensions of the electrode pattern 1b formed on the surface of the metallized film 1. Further, as a result of the pass / fail determination performed by the determination unit 14, it is determined as No. In such a case, it is possible to easily add a control function for controlling the feedback so that the information is fed back to the vapor deposition section and restored to the proper vapor deposition conditions.

(Embodiment 2)
Hereinafter, the invention described in claim 2 of the present invention will be described with reference to the second embodiment, but the present invention is not limited to this.

  The present embodiment is different in that a light reflector of the fluorescent film manufacturing apparatus described in the first embodiment is provided with a reflector for condensing the light of the fluorescent lamp. Since the configuration is the same as that of the first embodiment, the same parts are denoted by the same reference numerals and detailed description thereof is omitted, and only different parts will be described below with reference to the drawings.

  FIG. 3 is a perspective view showing the configuration of the inspection unit of the metallized film manufacturing apparatus according to Embodiment 2 of the present invention. In FIG. 3, 15 is a reflector formed using a polished stainless steel plate, The reflecting plate 15 has a U-shaped cross section so as to shield the three surfaces except the surface facing the metallized film 1 of the fluorescent lamp 9 constituting the light emitting portion.

  The metallized film manufacturing apparatus according to the present embodiment configured as described above has a structure in which the reflecting plate 15 is provided on the fluorescent lamp 9 that constitutes the light emitting unit, and the irradiation light from the fluorescent lamp 9 is condensed to be metallized. Since the back surface of the film 1 can be irradiated, the transmitted light can be obtained more efficiently, and the illuminance of the fluorescent lamp 9 can be reduced as compared with the case where the reflecting plate 15 is not provided. This has the special effect of becoming possible.

(Embodiment 3)
Hereinafter, the invention described in the third aspect of the present invention will be described with reference to the third embodiment, but the present invention is not limited thereto.

  In the present embodiment, the configuration of the fluorescent lamp constituting the light emitting unit of the metallized film manufacturing apparatus described in the first embodiment is different, and the other configurations are the same as in the first embodiment. Therefore, the same reference numerals are given to the same parts, and detailed description thereof is omitted, and only different parts will be described below with reference to the drawings.

  4 (a) and 4 (b) are plan views showing a fluorescent lamp constituting the light emitting part of the metallized film manufacturing apparatus according to Embodiment 3 of the present invention, and FIG. 4 (a) shows two parallel lamps. 4 (b) shows a U-shaped tube 17 formed in a U-shape. In this embodiment, the twin tube 16 is Matsushita Electric Industrial Co., Ltd. “Twin tube: FPL36EX-N” manufactured by Co., Ltd. is used, and “Uline: FPL36EX-N” manufactured by Toshiba Lighting & Technology Co., Ltd. is used as the U-shaped tube 17.

  When the twin tube 16 or the U-shaped tube 17 is used, the irradiation area per unit length can be doubled. Therefore, when the single tube fluorescent lamp 9 described in the first embodiment is used. As compared with the above, there is an extraordinary effect that the illuminance of the fluorescent lamp can be reduced.

  5A and 5B are perspective views showing an example in which only one twin tube 16 is used and an example in which the two twin tubes 16 are used. Depending on the width dimension of the metallized film 1, etc. Select one and use either one. Further, a U-shaped tube 17 may be used in place of the twin tube 16.

(Embodiment 4)
Hereinafter, the present invention will be described with reference to the second and third embodiments, but the present invention is not limited thereto.

  This embodiment combines the reflector 15 described in the second embodiment and the twin tube 16 described in the third embodiment as the light emitting part of the metallized film manufacturing apparatus described in the first embodiment. The configuration of the light emitting unit is shown, and the other configurations are the same as those of the first to third embodiments. Therefore, the same reference numerals are given to the same parts, and detailed descriptions thereof are omitted. Only this will be described below with reference to the drawings.

  FIG. 6 is a sectional view showing the structure of the light emitting part of the metallized film manufacturing apparatus according to Embodiment 4 of the present invention. In FIG. 6, 15 is a reflector, and this reflector 15 is a polished stainless steel plate. The U-shaped central portion is formed using a thickness of 3 mm, the upper and lower portions are formed with a thickness of 2 mm, the height dimension H is 28 to 32 mm, and the depth dimension L is 58 to 59 mm. The distance A between the portion and the metallized film 1 is 10 mm, and the twin tube 16 is constructed using a fluorescent lamp portion having a diameter of φ19 to 22.5 mm.

  With such a configuration, the effects obtained by the above-described Embodiments 2 and 3 can be obtained more efficiently. Therefore, the irradiation light from the twin tube 16 is condensed and irradiated on the back surface of the metallized film 1. Thus, it is possible to obtain a special effect that transmitted light can be obtained more efficiently.

(Embodiment 5)
Hereinafter, the invention described in the second, third, and fifth aspects of the present invention will be described using the fifth embodiment, but the present invention is not limited thereto.

  The present embodiment is different from the light emitting unit of the metallized film manufacturing apparatus described in the fourth embodiment in that a cooling unit for cooling a fluorescent lamp constituting the light emitting unit is provided. Since the configuration is the same as in the first to fourth embodiments, the same reference numerals are given to the same parts, and detailed description thereof is omitted, and only different parts will be described below with reference to the drawings.

  FIG. 7 is a cross-sectional view showing the structure of the light emitting part of the metallized film manufacturing apparatus according to Embodiment 5 of the present invention. In FIG. 7, 18 is disposed on the reflector 15 and the twin tube 16 and The heat transfer material is formed so as to be in close contact, and the heat transfer material 18 is made of a conductive metal plate or a conductive gel sheet. Reference numeral 19 denotes a cooling pipe coupled to the bottom surface of the reflecting plate 15 and is configured to circulate water or the like.

  In the metallized film manufacturing apparatus according to the present embodiment configured as described above, the twin tube 16 disposed in the vacuum atmosphere generates heat due to irradiation to increase the temperature, and is disposed in the vacuum atmosphere. Therefore, the problem that the high temperature state continues and the life of the twin tube 16 is significantly reduced due to the inability to dissipate heat is to keep the twin tube 16 at a constant temperature by cooling the twin tube 16 by the cooling part composed of the heat transfer material 18 and the cooling tube 19. By doing so, there is a special effect that it can be solved.

  In the first to fifth embodiments, the electrode pattern 1b formed on the metallized film 1 continuously conveyed at high speed has been described using an example of recognition. However, the present invention is not limited to this application. Needless to say, the present invention can be applied to a wide variety of applications such as an image recognition system for recognizing an image of a wide object moving at high speed.

  The metallized film manufacturing apparatus according to the present invention can always detect and determine the electrode pattern formed on the metallized film continuously conveyed at high speed with high accuracy, and is small and inexpensive with a simple configuration. In particular, it is useful as an apparatus for producing a metallized film for a metallized film capacitor.

Sectional drawing which showed the structure of the manufacturing apparatus of the metallized film by Embodiment 1 of this invention The perspective view which showed the test | inspection part provided in the apparatus The perspective view which showed the structure of the test | inspection part of the manufacturing apparatus of the metallized film by Embodiment 2 of this invention. (A) The top view of the twin pipe used for the manufacturing apparatus of the metallized film by Embodiment 3 of this invention, (b) The top view of the U-shaped pipe (A) Perspective view showing an example using only one twin pipe according to the embodiment, (b) Perspective view showing an example using two twin pipes Sectional drawing which showed the structure of the light emission part of the manufacturing apparatus of the metallized film by Embodiment 4 of this invention. Sectional drawing which showed the structure of the light emission part of the manufacturing apparatus of the metallized film by Embodiment 5 of this invention Sectional view showing the configuration of a metallized film capacitor (A), (b) Top view of a pair of metallized films used in the metallized film capacitor

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Metallized film 1a Dielectric film 1b Electrode pattern 2 Unwinding part 3 Transfer roller 4 Deposition roller 5 Aluminum tank 6 Zinc tank 7 Winding part 8a 1st vacuum chamber 8b 2nd vacuum chamber 8c, 8d Exhaust port 9 Fluorescent lamp 10 DC power supply 11 Camera 12 Guide rail 13 Window 14 Judgment part 15 Reflector 16 Twin tube 17 U-shaped tube 18 Heat transfer material 19 Cooling tube

Claims (6)

An unwinding unit for continuously supplying a strip-shaped dielectric film, a vapor deposition unit for forming a metal vapor deposition electrode on the surface of the dielectric film supplied from the unwinding unit, and a metallized film on which the metal vapor deposition electrode is formed In a manufacturing apparatus for a metallized film for a metallized film capacitor having at least a winding part for winding, light emission in which the metallized film is irradiated from the back side using a fluorescent lamp configured to be lit by a DC power source A shutter-type camera that captures the metal vapor deposition electrode from the surface side of the metallized film using the transmitted light from the light emitting unit, and a determination unit that captures and recognizes an image captured by the camera By this, the metallized film manufacturing apparatus in which the electrode pattern formed on the metallized film is inspected. The manufacturing apparatus of the metallized film of Claim 1 which provided the reflecting plate of the cross-sectional U shape which shielded three surfaces except the surface which opposes a metallized film in the light emission part. The production of the metallized film according to claim 1, wherein any one of a straight tube, a twin tube formed by connecting two parallel tubes, and a U-shaped tube formed in a U-shape is used as the fluorescent lamp constituting the light emitting unit. apparatus. The apparatus for producing a metallized film according to claim 1, wherein at least the vapor deposition part is in a vacuum atmosphere, and the light emitting part is disposed in the vacuum atmosphere. The manufacturing apparatus of the metallized film of Claim 1 which provided the cooling part which cools the fluorescent lamp which comprises a light emission part. When the image of the metal vapor deposition electrode determined by the determination unit is negative, the information is returned to the vapor deposition unit, and a control unit is provided to control the restoration to a correct state. apparatus.

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