JP2007304960A - Liquid flow rate controller - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid flow rate controller for controlling a minute amount of discharge. <P>SOLUTION: An electric controller 200 performs control so as to: connect a first passage 13 to a diaphragm pump 2 by opening a first valve 3 while keeping a second valve 4 closed; suck a liquid in the first passage 13 into the diaphragm pump 2 by supplying power to the diaphragm pump 2; then not only intercept the first passage 13 by closing the first valve 3 but also keep the diaphragm pump 2 in such a stop state that the diaphragm pump 2 can be restored to an original state, by stopping power supply to the diaphragm pump 2; cause the diaphragm pump 2 to start restoring the original state by starting opening the second valve 4; and close the second valve in the middle of restoration to the original state of the diaphragm pump 2. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a liquid flow rate control device.

  Advances in technologies such as MEMS (micro-electro-mechanical systems) and microfabrication technologies have led to the use of bioanalytical and immunological medical analyzers, gene identification, cell culture, and biotechnology research equipment related to manipulation. Smaller and more portable. In this type of apparatus, the reagent used for the test is expensive, and it is required to analyze a very small amount of sample. For this reason, miniaturization is required for fluid control devices such as valves and pumps, and there is a need to control a minute flow rate.

2. Description of the Related Art Conventionally, a technique for controlling a minute discharge amount by using a syringe pump having a stepping motor as an actuator and controlling the number of pulses sent to the stepping motor is known (see, for example, Patent Document 1).
JP 2000-18996 A

  However, according to the above prior art, the pump is expensive and large, and generates a large noise, so that it is difficult to achieve downsizing and portability of the apparatus.

  The present invention has been considered in view of the above points, and a main object of the present invention is to provide a liquid flow rate control device capable of controlling a minute discharge amount. Another object of the present invention is to provide a liquid flow rate control device capable of achieving downsizing and portability of the device.

  The liquid flow rate control device of the present invention is a liquid flow rate control device that sucks liquid from a suction port and discharges a small amount of liquid from a discharge port, and includes a diaphragm pump and a first passage extending from the suction port to the diaphragm pump. A first valve that opens and closes the valve, a second valve that opens and closes the second passage from the diaphragm pump to the discharge port, and the diaphragm pump, the first valve, and the second valve, respectively. An electrical control device, wherein the electrical control device opens the first valve while maintaining the second valve in a closed state, thereby communicating the first passage with the diaphragm pump, and the diaphragm pump The liquid in the first passage is sucked into the diaphragm pump by energizing the valve, and then the first valve is closed. Therefore, the diaphragm pump is maintained in a stop state where the diaphragm pump can be returned to the original state described later by shutting off the first passage and energizing the diaphragm pump, and the diaphragm is started by opening the second valve. The pump is started to return to the original state, and the second valve is controlled to be closed during the return of the diaphragm pump to the original state.

  According to the present invention, since the liquid is discharged according to the opening time of the second valve before the diaphragm pump returns to its original state, a minute amount on the microliter order is set by setting the opening time of the second valve short. It becomes possible to discharge the liquid. In addition, the liquid discharge amount can be freely controlled by adjusting the valve opening time of the second valve.

  Further, the liquid flow rate control device of the present invention is a liquid flow rate control device that sucks liquid from the suction port and discharges a small amount of liquid from each of the plurality of discharge ports, and includes a diaphragm pump and the suction port. A first valve that opens and closes a first passage leading to the diaphragm pump, a second valve that opens and blocks a second passage leading from the diaphragm pump to each discharge port, the diaphragm pump, the first valve, and An electric control device that drives and controls each of the plurality of second valves, and the electric control device opens the first valve while maintaining the second valves in a closed state. The passage is communicated with the diaphragm pump, and the diaphragm pump is energized to suck the liquid in the first passage into the diaphragm pump. And closing the first valve to shut off the first passage and stopping energization of the diaphragm pump to maintain the diaphragm pump in a stop state where the diaphragm pump can be returned to its original state. The diaphragm pump starts to return to its original state by starting to open one second valve of the valves, and the second valve that has been opened is closed while the diaphragm pump is returning to its original state. The second valve is started to open, and the control of closing the second valve that is opened during the return of the diaphragm pump to the original state is performed for all of the plurality of second valves. Features.

  According to the present invention, since the liquid is discharged from each discharge port according to the opening time of each second valve before the diaphragm pump returns to its original state, the opening time of each second valve is set short. This makes it possible to discharge a small amount of liquid in the microliter order. Further, by adjusting the valve opening time of each second valve, the ratio of the liquid discharge amount between the respective discharge ports can be freely controlled.

  Here, the diaphragm pump includes a conductive shape memory member, and when the conductive shape memory member is energized, the liquid in the first passage can be sucked into the diaphragm pump, and the conductive shape memory member is supplied to the diaphragm shape memory member. If the diaphragm pump can be restored to its original state by stopping energization, it is cheaper and can be made smaller and more portable than a conventional syringe pump, and noise is almost eliminated.

  In addition, the suction port, the discharge port, and the first and second passages are formed in a square plate-like channel member, and the first and second valves are configured in the same square shape in plan view. The diaphragm pump is formed in a quadrangular shape in plan view, and the first and second valves are arranged in a row on the upper surface of the flow path member in a state of being close to each other, and the diaphragm pump includes the first and second diaphragm pumps. The first and second valves and the diaphragm pump are arranged in the same row as the valve row and close to one of the first and second valves. If it is configured to be disposed on the upper surface of the flow path member so as to occupy the entire upper surface of the path member, the overall shape of the device can be a rectangular parallelepiped, and the device can be made smaller and portable.

  Further, the discharge port and the first and second passages are composed of a plurality of sets, and the suction port is composed of a suction port common to each set, the plurality of sets of discharge ports, and the first and second passages, And the common suction port is formed in a square plate-like channel member, the first and second valves of each set are configured in the same square shape in plan view, and the diaphragm pumps of each set are respectively The first and second valves of each set are arranged in a line on the upper surface of the flow path member in a state of being close to each other, and the diaphragm pumps of each set are each in the same set. The first and second valves of each set are located on the same row as the rows of the first and second valves and disposed on the upper surface of the flow path member in a state of approaching one of the first and second valves. And the diaphragm pumps, respectively, are adjacent to the first and the second Are disposed on the upper surface of the flow path member in a state of being adjacent to the first and second valves and the diaphragm pump of the adjacent set and located on a row parallel to the row of the diaphragm and the diaphragm pump, If the second valve and the diaphragm pump are arranged on the upper surface of the flow path member so as to occupy the entire upper surface of the flow path member as a whole in plan view, the second valve and the diaphragm pump suck a liquid from a common suction port, and The entire shape of the device that discharges a small amount of liquid from each outlet can be made a rectangular parallelepiped, and the device can be made smaller and portable.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  1 is a configuration diagram including a left side cross-sectional view of a main body of a liquid flow rate control apparatus according to an embodiment of the present invention, FIG. 2 is a left side view of the main body, and FIG. 3 is a plan view of the main body. 4 is a front view of the main body, FIG. 5 is a block diagram of the main body, FIG. 6 is a timing chart of air bleeding control, FIG. 7 is a timing chart of micro discharge control, and FIG. FIG. 9 is a block diagram of a main body of a liquid flow rate control device according to another embodiment of the present invention, FIG. 10 is a left side view of the main body, and FIG. FIG. 12 is a front view of the main body, FIG. 13 is a left side view of the main body of a liquid flow rate control device according to still another embodiment of the present invention, and FIG. 14 is the main body. FIG. 15 is a timing chart of the micro discharge control.

  1 to 5, the liquid flow rate control device includes a main body portion 100 and an electric control device 200.

  The main body 100 includes a rectangular flat plate-shaped flow path member 1, a rectangular parallelepiped diaphragm pump 2 disposed on the upper surface of the flow path member 1, and a substantially rectangular parallelepiped first valve disposed on the upper surface of the flow path member 1. 3 and a substantially rectangular parallelepiped second valve 4 disposed on the upper surface of the flow path member 1. The first and second valves 3 and 4 are arranged in a row in a state where they are close to each other. The diaphragm pump 2 is arranged in the same row as the row of the first and second valves 3 and 4 in a state of being close to the first valve 3. The first and second valves 3 and 4 and the diaphragm pump 2 are arranged on the upper surface of the flow path member 1 so as to occupy the entire upper surface of the flow path member 1 as a whole in plan view.

  The flow path member 1 has a suction port, that is, a main body suction port 11 on the left side, and a discharge port, that is, a main body discharge port 12 on the lower surface. The flow path member 1 is formed with a first passage forming first half passage portion 13A extending from the main body suction port 11 to the input port of the first valve 3, that is, the first input port 31. Further, the flow path member 1 is formed with a first passage forming latter-half passage portion 13B extending from the output port of the first valve 3, that is, the first output port 32, to the suction port of the diaphragm pump 2, that is, the diaphragm pump suction port 21. Yes. Further, the flow path member 1 is formed with a first passage portion 14A for forming a second passage extending from the discharge port of the diaphragm pump 2, that is, the diaphragm pump discharge port 22, to the input port of the second valve 4, that is, the second input port 41. Yes. Further, the flow path member 1 is formed with a second passage forming latter-half passage portion 14 </ b> B extending from the output port of the second valve 4, that is, the second output port 42 to the main body discharge port 12.

  The diaphragm pump 2 has a rectangular parallelepiped housing 23. The housing 23 penetrates in the vertical direction, and has a valve chamber 23a in the lower portion and an actuator chamber 23b in the upper portion. The valve chamber 23a and the actuator chamber 23b communicate with each other via a spring chamber 23c.

  The valve chamber 23a accommodates a diaphragm 24 as a valve body and a valve body side connecting portion 25a of a plunger 25 connected and fixed to the diaphragm 24. The diaphragm 24 is disposed so as to be in close contact with the upper surface of the flow path member 1, and the outer peripheral portion 24 a is fixed between the lower end surface of the housing 23 and the upper surface of the flow path member 1.

  The actuator chamber 23b accommodates the actuator side connecting portion 25b of the plunger 25. The actuator chamber 23b accommodates a string-like conductive shape memory member 26 as an actuator that is connected to the actuator side connecting portion 25b of the plunger 25 and drives the plunger 25 upward. The conductive shape memory member 26 is shown in FIG. 1 between two pulleys 25c and 25d provided in the actuator side connecting portion 25b of the plunger 25 and a pulley 23d provided in the actuator chamber 23b of the housing 23. The two ends of the housing 23 are screwed to the upper end of the housing 23 while being electrically connected to the lead wire 27 to the electric control device 200. The conductive shape memory member 26 has a property of shortening when heat is generated by energization and elongating as it cools after the energization is stopped.

  In the spring chamber 23c, a shaft portion 25e that connects the actuator side connecting portion 25b of the plunger 25 and the valve body side connecting portion 25a, and an outer periphery of the shaft portion 25e, the valve body side connecting portion 25a of the plunger 25 is disposed below the spring chamber 23c. And a spring 28 that biases the spring.

  Next, the basic operation of the diaphragm pump 2 having the above-described configuration, that is, the operation of the diaphragm pump alone will be described. When the electric control device 200 is not energized to the conductive shape memory member 26, the conductive operation is performed. The shape memory member 26 is in an extended state, a downward urging force is applied to the valve body side connecting portion 25 a of the plunger 25 by the spring 28, and the diaphragm 24 is in close contact with the upper surface of the flow path member 1.

  When the electric control device 200 starts energizing the conductive shape memory member 26, the conductive shape memory member 26 generates heat and shortens, and the plunger 25 resists the downward biasing force of the spring 28. As it rises, the diaphragm 24 is pulled upward.

  Thereafter, when the electric control device 200 stops energizing the conductive shape memory member 26, the conductive shape memory member 26 expands as it cools, and the plunger 25 descends due to the downward biasing force of the spring 28. As a result, the diaphragm 24 comes into close contact with the upper surface of the flow path member 1.

  The first valve 3 is a rectangular parallelepiped solenoid valve. The first valve 3 has a first solenoid 33 configured by winding a first coil 33b around a first bobbin 33a. The first coil 33 b is electrically connected to the first lead wire 34 to the electric control device 200. A first fixed iron core 35 is fixed to the upper hollow portion of the first bobbin 33a. A first movable iron core 36 is arranged in the lower hollow portion of the first bobbin 33a so as to be movable in the vertical direction. The first movable iron core 36 receives a downward biasing force by the first spring 37. A first diaphragm 38 as a first valve body is connected and fixed to the lower end of the first movable iron core 36. The first diaphragm 38 is disposed so as to block the input port of the first valve 3, that is, the first input port 31, or the output port of the first valve 3, that is, the first output port 32, and the outer peripheral portion 38 a It is fixed by the body 39.

  Next, the basic operation of the first valve 3 configured as described above, that is, the operation of the first valve alone, will be described. When the electric control device 200 is not energized to the first coil 33b, the first operation is performed. A downward urging force is applied to the movable iron core 36 by the first spring 37, and the first diaphragm 38 blocks between the first input port 31 and the first output port 32.

  When the electric control device 200 starts energizing the first coil 33b, a magnetic force is generated in the first fixed iron core 35, and the first movable iron core 36 receives a magnetic attractive force toward the first fixed iron core 35. The first movable iron core 36 rises against the downward urging force of the first spring 37, and the first diaphragm 38 opens between the first input port 31 and the first output port 32.

  Thereafter, when the electric control device 200 stops energizing the first coil 33b, the magnetic force of the first fixed iron core 35 disappears, and the first movable iron core 36 does not receive the magnetic attractive force from the first fixed iron core 35, and the first The first diaphragm 38 is disconnected from the first input port 31 and the first output port 32 by being lowered by the downward biasing force of the spring 37.

  The second valve 4 is configured similarly to the first valve 3. That is, the second valve 4 is configured by a rectangular parallelepiped solenoid valve. The 2nd valve | bulb 4 has the 2nd solenoid 43 comprised by winding the 2nd coil 43b around the 2nd bobbin 43a. The second coil 43b is electrically connected to the second lead wire 44 to the electric control device 200. A second fixed iron core 45 is fixed to the upper hollow portion of the second bobbin 43a. A second movable iron core 46 is disposed in the lower hollow portion of the second bobbin 43a so as to be movable in the vertical direction. The second movable iron core 46 receives a downward biasing force by the second spring 47. A second diaphragm 48 as a second valve body is connected and fixed to the lower end of the second movable iron core 46. The second diaphragm 48 is arranged to block the input port of the second valve 4, that is, the second input port 41, or the output port of the second valve 4, that is, the second output port 42, and the outer peripheral portion 48 a It is fixed by the body 49.

  The basic operation of the second valve 4, that is, the operation of the second valve alone is the same as the basic operation of the first valve 3. That is, when the electric control device 200 is not energizing the second coil 43b, a downward urging force is applied to the second movable iron core 46 by the second spring 47, and the second diaphragm 48 has the second diaphragm 48. The input port 41 and the second output port 42 are blocked. When the electric control device 200 starts energizing the second coil 43b, a magnetic force is generated in the second fixed iron core 45, and the second movable iron core 46 receives a magnetic attractive force toward the second fixed iron core 45. The second movable iron core 46 rises against the downward urging force of the second spring 47, and the second diaphragm 48 opens between the second input port 41 and the second output port 42. Thereafter, when the electric control device 200 stops energizing the second coil 43b, the magnetic force of the second fixed iron core 45 disappears, the second movable iron core 46 does not receive the magnetic attraction from the second fixed iron core 45, and the second The second diaphragm 48 is shut off between the second input port 41 and the second output port 42 by being lowered by the downward biasing force of the spring 47.

  The electric control device 200 includes a diaphragm pump driving unit 201 that drives the diaphragm pump 2 and a valve driving unit 202 that drives the first and second valves 3 and 4.

  The electric control device 200 outputs a drive control signal for performing air venting control (FIG. 6), micro discharge control (FIG. 7), and suction / discharge control from the discharge port (FIG. 8) to the main body 100. . Hereinafter, each control mode will be described in order.

a. Air bleeding control (Fig. 6)
The air vent control is a control mode performed prior to the micro discharge control, the main body suction port 11 is communicated with a liquid supply source (not shown), and the main body discharge port 12 is a liquid discharge target, that is, the discharged liquid. It communicates with a destination (not shown).

  The electric control device 200 starts energizing the first coil 33b of the first valve 3 without energizing the second coil 43b of the second valve 4. At substantially the same time as the start of energization of the first coil 33b, a magnetic force is generated in the first fixed iron core 35, and the first movable iron core 36 moves toward the first fixed iron core 35 against the biasing force of the first spring 37. The first diaphragm 38 opens between the first input port 31 and the first output port 32. Therefore, the first passage forming first half passage 13A and the first passage forming second half passage 13B communicate with each other, that is, the first passage 13 is opened, and the diaphragm pump suction port 21 is sucked into the main body through the first passage 13. The communication with the mouth 11 is established.

  Thereafter, the electric control device 200 starts energizing the conductive shape memory member 26 of the diaphragm pump 2. When energization of the conductive shape memory member 26 is started, the conductive shape memory member 26 starts to generate heat and gradually shortens. As the conductive shape memory member 26 is shortened, the plunger 25 rises and the diaphragm 24 rises. As the diaphragm 24 rises, a suction force is generated in the diaphragm pump 2, and the air in the first passage 13 is sucked into the diaphragm pump 2 and also from the liquid supply source through the main body suction port 11. Liquid is sucked into the passage 13.

  After the shortening of the conductive shape memory member 26 is finished and the diaphragm 24 is raised to the raised position, the energization to the first coil 33b of the first valve 3 is stopped. By stopping energization to the first coil 33b of the first valve 3, the magnetic force of the first fixed iron core 35 disappears, the first movable iron core 36 is lowered by the urging force of the first spring 37, and the first diaphragm 38 is moved to the first diaphragm 38. The input port 31 and the first output port 32 are blocked. For this reason, the liquid sucked into the first passage 13 remains held in the first passage 13.

  Thereafter, the electric control device 200 starts energization of the second coil 43b of the second valve 4. At substantially the same time as the energization of the second coil 43b is started, a magnetic force is generated in the second fixed iron core 45, and the second movable iron core 46 moves toward the second fixed iron core 45 against the urging force of the second spring 47. The second diaphragm 48 opens between the second input port 41 and the second output port 42. For this reason, the first passage forming first half passage 14A and the second passage forming second half passage 14B communicate with each other through the second valve 4, that is, the second passage 14 is opened, and the diaphragm is formed through the second passage 14. The pump discharge port 22 is in communication with the main body discharge port 12.

  After starting energization of the second coil 43b, the electric control device 200 stops energization of the conductive shape memory member 26 of the diaphragm pump 2. The conductive shape memory member 26 is gradually cooled by stopping energization and starts to expand. When the diaphragm pump discharge port 22 communicates with the main body discharge port 12, the plunger 25 is lowered by the urging force of the spring 28 as the conductive shape memory member 26 of the diaphragm pump 2 is extended, and the diaphragm 24 is lowered. I will do it. As the diaphragm 24 descends, the air inside the diaphragm pump 2 is pushed out from the diaphragm pump discharge port 22 into the second passage 14.

  After the diaphragm 24 is lowered to the lowered position, the electric control device 200 stops energization of the second coil 43b of the second valve 4. By stopping energization of the second coil 43b, the magnetic force of the second fixed iron core 45 disappears, the second movable iron core 46 is lowered by the urging force of the second spring 47, and the second diaphragm 48 is moved to the second input port 41, The second output port 42 is disconnected.

  Thereafter, the electric control device 200 starts energizing the first coil 33b again, and thereafter repeatedly performs the same control as the above-described control. By this repeated control, air escapes from the first and second passages 13 and 14 from the main body suction port 11 to the main body discharge port 12 and the first and second passages 13 and 14 are filled with the liquid.

b. Trace discharge control (Fig. 7)
The electric control device 200 starts energizing the first coil 33b of the first valve 3 without energizing the second coil 43b of the second valve 4. At substantially the same time as the energization of the first coil 33b is started, a magnetic force is generated in the first fixed iron core 35, and the first movable iron core 36 moves toward the first fixed iron core 35 against the biasing force of the first spring 37. The first diaphragm 38 opens between the first input port 31 and the first output port 32. For this reason, the first passage forming first half passage 13A and the first passage forming second half passage 13B communicate with each other through the first valve 3, that is, the first passage 13 is opened, and the diaphragm is formed through the first passage 13. The pump suction port 21 is in communication with the main body suction port 11.

  Thereafter, the electric control device 200 starts energizing the conductive shape memory member 26 of the diaphragm pump 2. When energization of the conductive shape memory member 26 is started, the conductive shape memory member 26 starts to generate heat and gradually shortens. As the conductive shape memory member 26 is shortened, the plunger 25 rises and the diaphragm 24 rises. As the diaphragm 24 rises, a suction force is generated in the diaphragm pump 2, and the liquid in the first passage 13 is sucked into the diaphragm pump 2, and the first is supplied from the liquid supply source through the main body suction port 11. Liquid is sucked into the passage 13.

  After the diaphragm 24 is raised to the raised position, the electric control device 200 stops energizing the first coil 33b of the first valve 3. By stopping energization to the first coil 33b of the first valve 3, the magnetic force of the first fixed iron core 35 disappears, the first movable iron core 36 is lowered by the urging force of the first spring 37, and the first diaphragm 38 is moved to the first diaphragm 38. The input port 31 and the first output port 32 are blocked. Next, the energization to the conductive shape memory member 26 of the diaphragm pump 2 is stopped. The conductive shape memory member 26 is gradually cooled by stopping energization and starts to expand. Even after the conductive shape memory member 26 has sufficiently expanded, the liquid sucked into the diaphragm pump 2 remains held inside the diaphragm pump 2. This state of the diaphragm pump 2 is referred to as a stop state in which the diaphragm pump 2 can return to the original state.

  Thereafter, the electric control device 200 energizes the second coil 43b of the second valve 4 for a short time t, and supplies the first coil 3b of the first valve 3 to the first coil 33b at the time when the energization of the second coil 43b is stopped. Start energization. Here, the energization time t to the second coil 43b is set to a time shorter than the time from when the diaphragm 24 of the diaphragm pump 2 starts to descend until when the diaphragm 24 finishes descending and contacts the upper surface of the flow path member 1. Keep it.

  By energizing the second coil 43b for a short time t, the second valve 4 is opened for a short time t, the second passage 14 is opened, and the diaphragm pump discharge port 22 is connected to the main body through the second passage 14. The discharge port 12 is in communication. During this time, the diaphragm pump 2 pushes the liquid inside the diaphragm pump 2 into the second passage 14 from the diaphragm pump discharge port 22 by the lowering of the diaphragm 24 by the biasing force of the spring 28, and the liquid in the second passage 14. Is discharged from the main body discharge port 12 to the liquid discharge target.

  After the energization of the second coil 43b is stopped, the second valve 4 is closed, the first valve 3 is opened, and the diaphragm pump discharge port 22 is connected to the main body suction port via the first passage 13. 11, the liquid in the diaphragm pump 2 is pushed out from the diaphragm pump discharge port 22 into the first passage 13, and the liquid in the first passage 13 is discharged from the main body suction port 11 to the liquid supply source. Thus, the liquid in the second passage 14 is not discharged from the main body discharge port 12 to the liquid discharge target.

  After all the liquid is discharged from the inside of the diaphragm pump 2, the electric control device 200 stops energization to the first coil 33b and ends the first micro discharge control.

  Thereafter, by repeating the same control as the above-described control, a minute amount of liquid is repeatedly discharged from the main body discharge port 12 to the liquid discharge target.

c. Suction / discharge control from the discharge port 12 (FIG. 8)
This control mode is performed by moving the main body 100 and switchingly connecting the liquid supply source and the liquid discharge target to the main body discharge port 12.

  In a state where the main body discharge port 12 is in communication with the liquid supply source, the electric control device 200 energizes the second coil 43b of the second valve 4 without energizing the first coil 33b of the first valve 3. Start. By energizing the second coil 43 b, the second valve 4 is opened, and the diaphragm pump discharge port 22 is in communication with the main body discharge port 12 through the second passage 14.

  Thereafter, the electric control device 200 starts energizing the conductive shape memory member 26 of the diaphragm pump 2. When the conductive shape memory member 26 is energized, the diaphragm pump 2 enters the suction state, and the air in the second passage 14 is sucked into the diaphragm pump 2 and the second is supplied from the liquid supply source through the main body discharge port 12. Liquid is sucked into the passage 14.

  Thereafter, the electric control device 200 stops energization of the second coil 43b of the second valve 4, and thereafter stops energization of the conductive shape memory member 26 of the diaphragm pump 2. As a result, the air sucked into the diaphragm pump 2 remains held in the diaphragm pump 2.

  Next, the main body portion 100 is moved, the communication state between the main body discharge port 12 and the liquid supply source is released, and the main body discharge port 12 is brought into a communication state with the liquid discharge target.

  Thereafter, the second coil 43b of the second valve 4 is energized for a short time t. Here, the energization time t to the second coil 43b is set to a time shorter than the time from when the diaphragm 24 of the diaphragm pump 2 starts to descend until when the diaphragm 24 finishes descending and contacts the upper surface of the flow path member 1. Keep it.

  By energizing the second coil 43b for a short time t, the second valve 4 is opened for a short time t, the second passage 14 is opened, and the diaphragm pump discharge port 22 is connected to the main body through the second passage 14. The discharge port 12 is in communication. During this time, the diaphragm pump 2 pushes the air inside the diaphragm pump 2 into the second passage 14 from the diaphragm pump discharge port 22 by the lowering of the diaphragm 24 by the urging force of the spring 28, and the liquid in the second passage 14. Is discharged from the main body discharge port 12 to the liquid discharge target.

  After the energization of the second coil 43b is stopped, the second valve 4 is closed. The main body 100 is moved again to move the main body discharge port 12 to the liquid supply source. Thereafter, energization to the second coil 43b of the second valve 4 is started again. The second valve 4 is opened, the diaphragm pump discharge port 22 is in communication with the main body discharge port 12 through the second passage 14, and the liquid in the second passage 14 is discharged from the main body discharge port 12 to the liquid supply source. Is done. Here, the liquid discharged from the main body discharge port 12 may be collected in the drainage tank instead of the liquid supply source.

  As described above, the liquid flow rate control device of the present embodiment is a liquid flow rate control device that sucks liquid from the suction port (main body suction port 11) and discharges a small amount of liquid from the discharge port (main body discharge port 12). The first valve 3 for opening and closing the diaphragm pump 2, the first passage 13 from the suction port 11 to the diaphragm pump 2, and the second passage 14 from the diaphragm pump 2 to the discharge port 12 are opened and closed. A second valve 4 and an electric control device 200 that drives and controls each of the diaphragm pump 2, the first valve 3, and the second valve 4 are provided. The electric control device 200 maintains the second valve 4 in a closed state. By opening the first valve 3, the first passage 13 communicates with the diaphragm pump 2, and energizing the diaphragm pump 2 causes the liquid in the first passage 13 to flow through the diaphragm. Suction into the ram pump 2 and then shut off the first passage 13 by closing the first valve 3 and stop the power supply to the diaphragm pump 2 so that the diaphragm pump 2 can be returned to its original state. The diaphragm pump 2 is started to return to its original state by maintaining the opening of the second valve 4, and the second valve 4 is closed while the diaphragm pump 2 is returning to the original state.

  According to the present embodiment, since the liquid is discharged only for the opening time of the second valve 4 before the diaphragm pump 2 is returned to its original state, the opening time of the second valve 4 is set to a short microliter order. It is possible to discharge a small amount of liquid. Further, by adjusting the valve opening time of the second valve 4, the liquid discharge amount can be freely controlled.

  Further, the diaphragm pump 2 includes a conductive shape memory member 26, and when the conductive shape memory member 26 is energized, the liquid in the first passage 13 can be sucked into the diaphragm pump 2, and the conductive shape memory member 26 is supplied to the diaphragm pump 2. If the diaphragm pump 2 can be restored to its original state by stopping energization, it can be reduced in size and portability, and noise can be suppressed, compared with the case where a conventional syringe pump is used. it can.

  The suction port 11, the discharge port 12, and the first and second passages 13, 14 are formed in the square plate-like channel member 1, and the first and second valves 3, 4 have the same rectangular shape in plan view. The diaphragm pump 2 has a quadrangular shape in plan view, and the first and second valves 3 and 4 are arranged in a line on the upper surface of the flow path member 1 in a state of being close to each other. The first and second valves 3 and 4 are arranged on the upper surface of the flow path member 1 in the same row as the first and second valves 3 and 4 and close to one of the first and second valves 3 and 4. 4 and the diaphragm pump 2 are configured to be arranged on the upper surface of the flow path member 1 so as to occupy the entire upper surface of the flow path member 1 in plan view, so that the overall shape of the apparatus can be a rectangular parallelepiped. The apparatus can be made smaller and portable.

  9 to 12, the main body 100 of the liquid flow rate control device according to another embodiment of the present invention includes a discharge port 12 and a plurality of sets (5 sets) of first and second passages 13 and 14. The suction port 11 is composed of a suction port 11 common to each set, and the plurality of sets of discharge ports 12, the first and second passages 13 and 14, and the common suction port 11 are a square plate-like flow path member 1. The first and second valves 3 and 4 of each set are each configured in the same square shape in plan view, and the diaphragm pumps 2 in each set are each configured in a square shape in plan view. The first and second valves 3 and 4 are arranged in a row on the upper surface of the flow path member 1 in a state where they are close to each other, and each set of diaphragm pumps 2 has the same set of first and second valves 3 and 4 respectively. It is located on the same row as the row and is in contact with one of the first and second valves 3 and 4. In this state, the first and second valves 3 and 4 and the diaphragm pump 2 of each group are arranged on the upper surface of the flow path member 1, and the first and second valves 3 and 4 and the diaphragm pump 2 of the adjacent group are respectively A plurality of sets of first and second sets are arranged on the upper surface of the flow path member 1 in a state of being positioned on a row parallel to the row and close to the adjacent first and second valves 3 and 4 and the diaphragm pump 2. The valves 3 and 4 and the diaphragm pump 2 are configured to be disposed on the upper surface of the flow path member 1 so as to occupy the entire upper surface of the flow path member 1 in plan view. For this reason, it becomes possible to make the whole shape of the device that sucks liquid from the common suction port 11 and discharges a small amount of liquid from each of the plurality of discharge ports 12 into a rectangular parallelepiped shape, thereby reducing the size and portability of the device. You can plan.

  13-15, the liquid flow control apparatus which concerns on further another embodiment of this invention is the main-body part 100 and an electric control apparatus (not shown in FIGS. 13-15) similarly to embodiment mentioned above. It consists of.

  The main body 100 includes a rectangular flat plate-shaped flow path member 1, a rectangular parallelepiped diaphragm pump 2 disposed on the upper surface of the flow path member 1, and a substantially rectangular parallelepiped first valve disposed on the upper surface of the flow path member 1. 3 and two substantially rectangular parallelepiped second valves 4A and 4B arranged on the upper surface of the flow path member 1. The first and second valves 3, 4 </ b> A, 4 </ b> B are arranged in a row in a state where they are close to each other. The diaphragm pump 2 is arranged in the same row as the row of the first and second valves 3, 4 </ b> A, 4 </ b> B in a state of being close to the first valve 3. The first and second valves 3, 4 </ b> A, 4 </ b> B and the diaphragm pump 2 are disposed on the upper surface of the flow path member 1 so as to occupy the entire upper surface of the flow path member 1 in plan view.

  The flow path member 1 has a suction port, that is, a main body suction port 11 on the left side, and two discharge ports, that is, main body discharge ports 12A and 12B, on the lower surface.

  The diaphragm pump 2 is configured similarly to the diaphragm pump 2 shown in FIG. 1 and operates in the same manner. The first and second valves 3, 4A, 4B are configured in the same manner as the first and second valves 3, 4 shown in FIG. 1 and operate in the same manner.

  The flow path member 1 is formed with a first passage forming first half passage portion 13A extending from the main body suction port 11 to the first input port 31 of the first valve 3. Further, the flow path member 1 is formed with a first passage forming latter-half passage portion 13 </ b> B extending from the first output port 32 of the first valve 3 to the diaphragm pump suction port 21 of the diaphragm pump 2. The first passage forming first half passage portion 13 </ b> A and the first passage forming second half passage portion 13 </ b> B constitute a first passage 13.

  The flow path member 1 includes a first passage portion 14Aa for forming a second passage from the diaphragm pump discharge port 22 of the diaphragm pump 2 to the second input port 41A of one of the two second valves 4A. Is formed. Further, the flow path member 1 is formed with a second passage forming latter-half passage portion 14Ba extending from the second output port 42A of the second valve 4A to one of the two main body discharge ports 12A. . The first half passage portion 14Aa for forming the second passage and the second half passage portion 14Ba for forming the second passage constitute one second passage 14A of the two second passages.

  In addition, the flow path member 1 includes a first passage portion 14Ab for forming a second passage from the diaphragm pump discharge port 22 of the diaphragm pump 2 to the second input port 41B of the other second valve 4B of the two second valves. Is formed. In addition, the flow path member 1 is formed with a second passage forming latter-half passage portion 14Bb extending from the second output port 42B of the second valve 4B to the other main body discharge port 12B of the two main body discharge ports. . The second passage forming first half passage portion 14Ab and the second passage forming second half passage portion 14Bb constitute the other second passage 14B of the two second passages.

  The electric control device includes a diaphragm pump driving unit 201 that drives the diaphragm pump 2 and a valve driving unit 202 that drives the first and second valves 3, 4 </ b> A, and 4 </ b> B, similarly to the electric control device 200 illustrated in FIG. 1.

  The electric control device performs the same control as the air vent control (FIG. 6), the micro discharge control (FIG. 7), and the suction discharge control (FIG. 8) executed by the electric control device 200 shown in FIG. . Hereinafter, the micro discharge control mode will be schematically described with reference to FIG.

  The electric control device starts energizing the first valve 3 without energizing the second valves 4A and 4B. With this energization start, the first valve 3 is opened, the first passage 13 is opened, and the diaphragm pump suction port 21 is in communication with the main body suction port 11 via the first passage 13.

  Thereafter, the electric control device starts energizing the diaphragm pump 2. When this energization is started, the diaphragm pump 2 performs a suction operation, and the liquid in the first passage 13 is gradually sucked into the diaphragm pump 2 and also from the liquid supply source via the main body suction port 11. Liquid is sucked into the inside.

  After the diaphragm pump 2 finishes the suction operation, the electric control device stops energizing the first valve 3. With this energization stop, the first valve 3 is closed and the first passage 13 is cut off. Next, the power supply to the diaphragm pump 2 is stopped. The diaphragm pump 2 can be discharged by this energization stop, but the liquid sucked into the diaphragm pump 2 remains held inside the diaphragm pump 2.

  Thereafter, the electric control device energizes the second valve 4A of one of the two second valves for a short time t. With this energization, the second valve 4A is opened for a short time t, one of the two second passages 14A is opened, and two diaphragm pump discharge ports 22 are opened via the second passage 14A. The main body discharge port is in communication with one of the main body discharge ports 12A. During this time, the diaphragm pump 2 performs a discharge operation, and the liquid inside the diaphragm pump 2 is pushed out from the diaphragm pump discharge port 22 into the second passage 14A, and the liquid in the second passage 14A is discharged from the main body discharge port 12A into two pieces. The liquid is ejected to one of the liquid ejection targets.

  After the energization of the second valve 4A is stopped, the energization of the other second valve 4B of the two second valves is started. When the energization is started, the second valve 4B is opened, the other second passage 14B of the two second passages is opened, and the diaphragm pump discharge port 22 is connected to the two main body discharge ports via the second passage 14B. It becomes a communication state with the other main body discharge port 12B. During this time, the diaphragm pump 2 performs a discharge operation, pushing the remaining liquid inside the diaphragm pump 2 into the second passage 14B from the diaphragm pump discharge port 22, and the liquid in the second passage 14B is discharged from the main body discharge port 12B. It is discharged to the other liquid discharge target of the two liquid discharge targets.

  After all the liquid is discharged from the inside of the diaphragm pump 2, the electric control device stops energization to the second valve 4B and ends the first micro discharge control.

  Thereafter, by repeating the same control as the above-described control, a small amount of liquid is repeatedly discharged from the main body discharge port 12 to one liquid discharge target and the other liquid discharge target.

  As described above, according to the liquid flow rate control device shown in FIGS. 13 to 15, a small amount of liquid can be discharged from each of the two main body discharge ports 12A and 12B, and the second valve 4A can be energized. In other words, the ratio of the liquid discharge amount between the main body discharge ports 12A and 12B can be freely controlled by adjusting the valve opening time of the second valve 4A. Even when the number of the second valves 4, the second passages 14, and the main body discharge ports 12 is three or more, by controlling the energization time to each of the second valves 4, the liquid between the main body discharge ports 12 is controlled. The ratio of the discharge amount can be freely controlled.

It is a lineblock diagram including a left side sectional view of a main part of a liquid flow control device concerning one embodiment of the present invention. It is a left view of the main-body part. It is a top view of the main-body part. It is a front view of the main-body part. It is a block diagram of the main-body part. It is a timing chart of air bleeding control. It is a timing chart of trace discharge control. It is a timing chart of suction discharge control from a discharge outlet. It is a block diagram of the main-body part of the liquid flow control apparatus which concerns on other embodiment of this invention. It is a left view of the main-body part. It is a top view of the main-body part. It is a front view of the main-body part. It is a left view of the main-body part of the liquid flow control apparatus which concerns on further another embodiment of this invention. It is a block diagram of the main-body part. It is a timing chart of trace discharge control.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Main body part 1 Channel member 11 Main body suction port (suction port)
12, 12A, 12B Main unit discharge port (discharge port)
Reference Signs List 13 First passage 14, 14A, 14B Second passage 2 Diaphragm pump 26 Conductive shape memory member 3 First valve 4, 4A, 4B Second valve 200 Electric control device

Claims (5)

A liquid flow rate control device that sucks liquid from the suction port and discharges a small amount of liquid from the discharge port,
A diaphragm pump; a first valve for opening and closing a first passage from the suction port to the diaphragm pump; a second valve for opening and closing a second passage from the diaphragm pump to the discharge port; and the diaphragm An electric control device for driving and controlling each of the pump, the first valve, and the second valve;
The electric control device opens the first valve while maintaining the second valve in a closed state, thereby communicating the first passage with the diaphragm pump, and energizing the diaphragm pump to supply the first valve. The liquid in one passage is sucked into the diaphragm pump, and then the first valve is closed to shut off the first passage and stop energization of the diaphragm pump. Control that keeps the diaphragm pump from returning to its original state by starting the opening of the second valve, and closing the second valve in the middle of returning to the original state of the diaphragm pump. A liquid flow rate control device characterized in that: A liquid flow rate control device that sucks liquid from the suction port and discharges a small amount of liquid from each of the plurality of discharge ports,
A diaphragm pump, a first valve for opening and closing a first passage from the suction port to the diaphragm pump, a second valve for opening and closing a second passage from the diaphragm pump to each discharge port, and A diaphragm pump, an electric control device that drives and controls each of the first valve and the plurality of second valves,
The electric control device opens the first valve while maintaining the second valves in a closed state, connects the first passage to the diaphragm pump, and supplies power to the diaphragm pump. Liquid in the first passage is sucked into the diaphragm pump, and then the first valve is closed to shut off the first passage and stop energization of the diaphragm pump. The diaphragm pump is started to return to the original state by maintaining one of the plurality of second valves in a stopped state that can be returned to the original state, and starting to open one of the plurality of second valves, thereby returning the diaphragm pump to the original state. The second valve that was opened in the middle is closed and another one of the second valves is started to be opened. Liquid flow controller and performs control to close the second valve on the way returning to the original state of Fulham pumps were the opening with respect to all of the plurality of second valve.   The diaphragm pump includes a conductive shape memory member, and by energizing the conductive shape memory member, the liquid in the first passage can be sucked into the diaphragm pump, and the conduction to the conductive shape memory member is stopped. The liquid flow rate control device according to claim 1, wherein the diaphragm pump can be restored to the original state by the above. The suction port, the discharge port, and the first and second passages are formed in a square plate-like channel member,
The first and second valves are configured in the same square shape in plan view, and the diaphragm pump is configured in a square shape in plan view.
The first and second valves are arranged in a row on the upper surface of the flow path member in a state of being close to each other, and the diaphragm pump is in the same row as the row of the first and second valves. Arranged close to one of the two valves on the upper surface of the flow path member,
The first and second valves and the diaphragm pump are arranged on the upper surface of the flow path member so as to occupy the entire upper surface of the flow path member in plan view. The liquid flow rate control apparatus as described. The discharge port and the first and second passages are made up of a plurality of sets, and the suction port is made up of a suction port common to each set, and the plurality of sets of discharge ports, the first and second passages, and the common The suction port is formed in a square plate-like channel member,
The first and second valves of each set are each configured in the same square shape in plan view, and the diaphragm pumps in each set are each configured in a square shape in plan view,
The first and second valves of each set are arranged in a row on the upper surface of the flow path member in a state where they are close to each other, and the diaphragm pumps of each set are arranged in a row of first and second valves of the same set, respectively. And is disposed on the upper surface of the flow path member in a state close to one of the first and second valves,
The first and second valves and the diaphragm pump of each set are located on a row parallel to the row of the first and second valves and the diaphragm pump of the next set, and the first and second valves of the next set are set. And disposed on the upper surface of the flow path member in a state close to the diaphragm pump,
The plurality of sets of the first and second valves and the diaphragm pump are arranged on the upper surface of the flow path member so as to occupy the entire upper surface of the flow path member as a whole in plan view. Liquid flow control device.

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