JP2007289834A5 - - Google Patents
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- JP2007289834A5 JP2007289834A5 JP2006119189A JP2006119189A JP2007289834A5 JP 2007289834 A5 JP2007289834 A5 JP 2007289834A5 JP 2006119189 A JP2006119189 A JP 2006119189A JP 2006119189 A JP2006119189 A JP 2006119189A JP 2007289834 A5 JP2007289834 A5 JP 2007289834A5
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic
- cleaning liquid
- slit
- ultrasonic vibration
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004140 cleaning Methods 0.000 claims 16
- 239000007788 liquid Substances 0.000 claims 12
- 238000004506 ultrasonic cleaning Methods 0.000 claims 4
- 239000002131 composite material Substances 0.000 claims 2
- 230000003247 decreasing Effects 0.000 claims 2
- 238000005507 spraying Methods 0.000 claims 2
Claims (2)
前記洗浄液に５００ｋＨｚ以上の超音波振動を伝搬させるために前記スリットに沿って前記洗浄液溜槽内に備えられた超音波振動体とを有し、被洗浄物が前記スリットに直交する方向に移動されることによって洗浄が行われる超音波洗浄装置であって、
前記超音波振動体は短冊形状の超音波振動素子を複数個、端面が相接するように長さ方向に並べて振動板上に配置された複合素子配置構造によって形成され、
前記超音波振動素子それぞれの相接する端面の少なくとも一部分が前記スリットに直交方向に沿う又は点で交差するような嵌合形状とし、
前記超音波振動素子それぞれの相接する端面において超音波音圧の低下が抑制されて前記超音波振動体の前記スリットから噴射する前記洗浄液の全面で均一な超音波放射特性が得られる構成とした超音波洗浄装置。 A cleaning liquid storage tank in which a cleaning liquid is stored and a slit is formed for spraying the cleaning liquid;
In order to propagate ultrasonic vibration of 500 kHz or more to the cleaning liquid, an ultrasonic vibration body provided in the cleaning liquid reservoir is provided along the slit, and the object to be cleaned is moved in a direction perpendicular to the slit. An ultrasonic cleaning device in which cleaning is performed by
The ultrasonic vibrator is formed an ultrasonic vibration element strip shape plurality, the composite element arrangement arranged in the diaphragm on the side by side in the longitudinal direction so that the end faces contact with each,
It is a fitting shape such that at least a part of the end faces of each of the ultrasonic vibration elements that are in contact with each other is perpendicular to the slit or intersects at a point.
The ultrasonic vibration pressure is prevented from decreasing at the contacting end surfaces of the ultrasonic vibration elements , and uniform ultrasonic radiation characteristics can be obtained over the entire surface of the cleaning liquid ejected from the slit of the ultrasonic vibration body. Ultrasonic cleaning device.
前記洗浄液に５００ｋＨｚ以上の超音波振動を伝搬させるために前記スリットに沿って前記洗浄液溜槽内に備えられた超音波振動体とを有し、被洗浄物が前記スリットに直交する方向に移動されることによって洗浄が行われる超音波洗浄装置であって、
前記超音波振動体は、短冊形状の超音波振動素子を複数個、端面が相接するように長さ方向に並べて複数配列とし、かつ、該それぞれの相接する端面が同一の直線上に位置しないようにずらして振動板上へ配列することによって前記相接する端面の前記スリットに直交方向に沿う部分が前記複数配列の幅の複数分の一となるように配置された複合素子配置構造によって形成され、
前記超音波振動素子それぞれの相接する端面において超音波音圧の低下が抑制されて前記超音波振動体の前記スリットから噴射する前記洗浄液の全面で均一な超音波放射特性が得られる構成とした超音波洗浄装置。 A cleaning liquid storage tank in which a cleaning liquid is stored and a slit is formed for spraying the cleaning liquid;
In order to propagate ultrasonic vibration of 500 kHz or more to the cleaning liquid, an ultrasonic vibration body provided in the cleaning liquid reservoir is provided along the slit, and the object to be cleaned is moved in a direction perpendicular to the slit. An ultrasonic cleaning device in which cleaning is performed by
The ultrasonic vibrating body includes a plurality of strip-shaped ultrasonic vibrating elements arranged in the length direction so that the end faces are in contact with each other, and the contacting end faces are located on the same straight line. The composite element arrangement structure is arranged so that a portion along the orthogonal direction to the slit of the end face to be in contact with each other is a plurality of a width of the plurality of arrangements by arranging on the diaphragm so as not to shift Formed,
The ultrasonic vibration pressure is prevented from decreasing at the contacting end surfaces of the ultrasonic vibration elements , and uniform ultrasonic radiation characteristics can be obtained over the entire surface of the cleaning liquid ejected from the slit of the ultrasonic vibration body. Ultrasonic cleaning device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006119189A JP2007289834A (en) | 2006-04-24 | 2006-04-24 | Ultrasonic cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006119189A JP2007289834A (en) | 2006-04-24 | 2006-04-24 | Ultrasonic cleaning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007289834A JP2007289834A (en) | 2007-11-08 |
| JP2007289834A5 true JP2007289834A5 (en) | 2008-10-16 |
Family
ID=38760974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006119189A Pending JP2007289834A (en) | 2006-04-24 | 2006-04-24 | Ultrasonic cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2007289834A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101827296B1 (en) | 2016-09-22 | 2018-02-09 | 한국기계연구원 | Ultrasonic cleaning apparatus for large area |
| JP7405539B2 (en) | 2019-09-12 | 2023-12-26 | 株式会社ディスコ | Cleaning nozzle and cleaning method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0234923A (en) * | 1988-07-25 | 1990-02-05 | Toshiba Corp | Ultrasonic cleaner |
| JPH0919665A (en) * | 1995-07-04 | 1997-01-21 | Shibaura Eng Works Co Ltd | Ultrasonic washing device |
| JP2001170584A (en) * | 1999-12-17 | 2001-06-26 | Sharp Corp | Ultrasonic treatment apparatus |
-
2006
- 2006-04-24 JP JP2006119189A patent/JP2007289834A/en active Pending
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