JP2007281413A - Exposure apparatus and exposure printer - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an exposure apparatus and an exposure printer, which project light with roughly uniform luminance on an entire projection region. <P>SOLUTION: The light that is emitted from a light emitting diode 12 enters a luminance uniformalizing element 20, and is fully reflected inside the luminance uniformalizing element 20 plural times to uniformalize its luminance. The luminance of the light that is emitted from the luminance uniformalizing element 20 is roughly uniformalized from the center part to the peripheral part of the light. The light with uniformalized luminance is projected on a member to be printed 24 by a projection lens 22. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an exposure apparatus that exposes an exposed member and an exposure printing apparatus that prints predetermined information on the exposed member by exposure.

  In recent years, quality control and yield improvement have been directly reflected in costs and product unit prices in the manufacturing process of printed members such as semiconductor substrates and liquid crystal substrates, and have been subject to important issues. For this reason, each manufacturer manufactures a product history by printing information such as a unique manufacturing number (for example, a 16-digit number or a two-dimensional code) on a semiconductor substrate or a liquid crystal substrate.

  Here, as an exposure printing apparatus that prints predetermined information such as a production number unique to a printing target member such as a semiconductor substrate or a liquid crystal substrate by exposure, as shown in FIG. 14, a light source unit 104 having a light emitting diode 102, An exposure printing apparatus 100 that includes a control unit 106 that controls the light emission timing or light emission pattern of the light emitting diode 102 and a projection lens 108 that projects light emitted from the light emitting diode 102 onto a print target member 110 is known. ing.

  According to the exposure printing apparatus 100, the light emitted from the light emitting diode 102 of the light source unit 104 is projected onto the printing member 110 by the projection lens 108 based on the control signal from the control unit 106, so that the printing member Predetermined information is printed on 110.

JP 2001-313251 A

  Incidentally, as shown in FIG. 15, in the conventional exposure printing apparatus 100, the light L emitted from the light emitting diode 102 has a property that the luminance at the center is higher than the luminance at the periphery (light emitting point). Has a Gaussian luminance distribution). When light having such a property is projected onto the print-receiving member 110, as shown in FIGS. 16 and 17, in the projection area M onto which the light from the light emitting diode 102 is projected, the projection center area M1 onto which the center of the light is projected. May be significantly higher than the light intensity in the projection peripheral region M2 where the periphery of the center of the light is projected (unevenness occurs in the light intensity). As a result, unevenness occurs in the print density of information printed on the print-receiving member 110, and there is a problem that a print defect occurs.

  In particular, when a two-dimensional code (for example, a QR code, a micro QR code, or a veri code) is printed on the printing member 110, the two-dimensional code may not be printed accurately if the above problem occurs.

  In view of the above circumstances, an object of the present invention is to provide an exposure apparatus and an exposure printing apparatus capable of projecting light with substantially uniform brightness over the entire projection area.

  The invention according to claim 1 is an exposure apparatus that exposes a member to be exposed, and uniformizes brightness of a light emitting diode or EL element that emits light and light emitted from the light emitting diode or EL element. Controls the light emission timing or / and the light emission pattern of the light-emitting diode or the EL element, the light-uniforming member, the light projection member that projects the light whose luminance is made uniform by the light-uniforming member, And a control means.

  According to the first aspect of the present invention, the light emission timing or / and the light emission pattern of the light emitting diode or EL element is controlled by the control means, and light is emitted from the light emitting diode or EL element. The luminance of the light emitted from the light emitting diode or EL element is made uniform by the luminance uniformizing member. The light whose luminance is uniformed by the luminance uniforming member is projected onto the exposed member by the light projection member.

  Here, since the luminance of the light emitted from the light emitting diode or the EL element is made uniform by the luminance uniforming member, the light intensity is made uniform in the projection area of the light projected on the exposed member. Thereby, light with substantially uniform brightness can be projected on the entire projection area.

  According to a second aspect of the present invention, in the exposure apparatus according to the first aspect, the brightness uniformizing member causes the light emitted from the light emitting diode or the EL element to be totally reflected a plurality of times to uniform the brightness. It is characterized by that.

  According to the second aspect of the present invention, the luminance uniforming member can easily and reliably uniformize the luminance of the light by totally reflecting the light emitted from the light emitting diode or the EL element a plurality of times.

  According to a third aspect of the present invention, in the exposure apparatus according to the first or second aspect, a plurality of the light emitting diodes or the EL elements are provided, the light emitted from the light emitting diodes or the EL elements, or the luminance equalization. A light amount adjusting member that adjusts the amount of light whose luminance is uniformed by the member is provided.

  According to the third aspect of the present invention, the amount of light emitted from the light emitting diode or EL element or the light whose luminance is uniformed by the luminance uniforming member is adjusted by the light amount adjusting member. Thereby, even when a plurality of light emitting diodes or EL elements are provided, it is possible to eliminate variations in the amount of light between the light emitting diodes or between the EL elements.

  According to a fourth aspect of the present invention, in the exposure apparatus according to the third aspect, the light amount adjusting member is provided between the light emitting diode or the EL element and the luminance equalizing member, and the light emitting diode or the light emitting member. The amount of light emitted from the EL element is adjusted by the light amount adjusting member, and the luminance of the light whose light amount has been adjusted is made uniform by the luminance equalizing member.

  According to the fourth aspect of the present invention, the light amount of the light emitted from the light emitting diode or the EL element is adjusted by the light amount adjusting member, and the luminance of the light whose light amount has been adjusted is made uniform by the luminance equalizing member. As a result, even if a defect (for example, uneven deposition) occurs in the material and film used of the light amount adjusting member, the luminance of the light whose light amount has been adjusted by the light amount adjusting member is made uniform by the brightness uniformizing member. The intensity of the light projected on the exposed member can be made uniform.

  According to a fifth aspect of the present invention, in the exposure apparatus according to any one of the first to fourth aspects, the brightness uniformizing member is made of optical glass or acrylic resin.

  According to the fifth aspect of the present invention, since the luminance uniforming member is made of optical glass or acrylic resin, the luminance of light can be easily uniformed using an existing member.

  According to a sixth aspect of the present invention, in the exposure apparatus according to any one of the third to fifth aspects, the light amount adjusting member includes a neutral density filter.

  According to the sixth aspect of the present invention, since the light amount adjusting member is composed of a neutral density filter (ND filter), the light amount of light can be easily adjusted using an existing member.

  The invention according to claim 7 is the exposure apparatus according to any one of claims 1 to 6, wherein a center wavelength of light emitted from the light emitting diode or the EL element is 500 nm or less. And

  According to the seventh aspect of the invention, by setting the center wavelength of the light emitted from the light emitting diode or EL element to 500 nm or less, the resolving power can be increased, and complicated information is printed on the exposed member. be able to. In addition, by setting the center wavelength of the light emitted from the light emitting diode or EL element to 500 nm or less, it is not necessary to make the room used when printing predetermined information on the exposed member a dark room.

  The invention according to claim 8 is an exposure printing apparatus that prints predetermined information on the exposed member using the exposure apparatus according to any one of claims 1 to 7, wherein the exposed member is exposed to the exposed member. Is coated with a photosensitive material, and predetermined information is printed on the exposed member by exposing the photosensitive material and removing a photosensitive portion or an unexposed portion of the photosensitive material. And

  According to the eighth aspect of the present invention, when predetermined information is printed on the exposed member using the exposure apparatus according to any one of the first to seventh aspects, a photosensitive material ( Resist) is applied, the photosensitive material (resist) is exposed, and then the exposed or unexposed portions of the photosensitive material (resist) are removed so that predetermined information is printed on the exposed member. Can do.

  Specifically, after light is projected onto the photosensitive material of the exposed member through a pattern formed on a reticle or the like by an exposure apparatus, an unexposed portion of the photosensitive material (a portion that is not irradiated with light, The portion corresponding to the pattern formed on the reticle (the portion that becomes the shadow of the pattern formed on the reticle) is plated with Ni or the like, and the exposed member is immersed in the developer. As a result, only the photosensitive portion of the photosensitive material (the portion irradiated with light, the portion corresponding to the portion other than the pattern formed on the reticle (the portion that does not become a shadow of the pattern formed on the reticle)) is only developed by the developer. Only the unexposed portion of the photosensitive material is dissolved and remains on the exposed member. Thereby, a predetermined pattern can be formed in the unexposed part of the photosensitive material. As a result, predetermined information can be printed on the exposed member.

  Further, after light is projected onto the photosensitive material of the member to be exposed through the pattern formed on the reticle or the like by the exposure apparatus, the photosensitive portion of the photosensitive material (the portion irradiated with light, formed on the reticle) A portion corresponding to a portion other than the pattern (a portion that does not become a shadow of the pattern formed on the reticle) is plated with Ni or the like, and the exposed member is immersed in the developer. As a result, only the unexposed portion of the photosensitive material (the portion not irradiated with light, the portion corresponding to the pattern formed on the reticle (the portion that becomes the shadow of the pattern formed on the reticle)) is dissolved by the developer. Only the photosensitive portion of the photosensitive material remains on the exposed member. Thereby, a predetermined pattern can be formed in the photosensitive part of the photosensitive material. As a result, predetermined information can be printed on the exposed member.

  In particular, by using the exposure apparatus according to any one of claims 1 to 7, the brightness of the light emitted from the light emitting diode or the EL element is made uniform by the brightness uniformizing member. The light intensity is made uniform in the projected area of the projected light. Thereby, light with substantially uniform brightness can be projected on the entire projection area. As a result, it is possible to prevent unevenness in the print density of the information printed on the exposed member in the projection area of the light onto the exposed member, and as a result, it is possible to prevent a printing defect from occurring.

  The invention according to claim 9 is the exposure printing apparatus according to claim 8, wherein the predetermined information printed on the exposed member is a two-dimensional code.

  According to the ninth aspect of the present invention, by printing a two-dimensional code (for example, QR code) as predetermined information on the exposed member, the predetermined information printed on the exposed member is read by a separate reader. It can be read at high speed.

  According to the present invention, it is possible to project light with substantially uniform brightness over the entire projection area of the exposed member. Further, it is possible to prevent unevenness in the print density of information printed on the exposed member in the light projection area on the exposed member. As a result, printing defects can be prevented from occurring.

  Next, an exposure printing apparatus according to a first embodiment of the present invention will be described with reference to the drawings.

  As shown in FIGS. 1 and 2, the exposure printing apparatus 10 includes a light source unit 14 having a light emitting diode 12. As the light emitting diode 12, a blue light emitting diode that emits light having a central wavelength of 500 nm or less is used. The light emitting diodes 12 are arranged in a matrix of m × n (m, n: natural number) on the substrate. Note that m and n may be the same natural number or different natural numbers.

  The exposure printing apparatus 10 also includes a control unit (control unit) 16 that controls the light emission timing or light emission pattern of the light emitting diode 12. Further, the exposure printing apparatus 10 includes a storage unit (storage unit) 18. The storage unit 18 is configured by a RAM, for example, and stores a program for controlling the light emission timing or the light emission pattern of the light emitting diode 12.

  In particular, in the present embodiment, as shown in FIGS. 3 to 5, programs related to two-dimensional codes such as a QR (Quick Response) code 26, a micro QR code 28, and a vericode 30 are stored in the storage unit 18. Therefore, the light source unit 14 whose light emission is controlled by the control unit 16 can print two-dimensional codes such as the QR code 26, the micro QR code 28, and the Veri code 30 on the print target member 24.

  As shown in FIGS. 1 and 6, the exposure printing apparatus 10 includes a luminance uniforming element (luminance uniforming member) 20 that uniformizes the luminance of light emitted from the light emitting diode 12. The brightness uniformizing element 20 is made of optical glass or acrylic resin. Further, the luminance equalizing element 20 is formed in a rectangular parallelepiped shape. The brightness uniformizing element 20 is attached so as to be connected (interviewed) to the light emission surface of each light emitting diode 12 so as to correspond to each light emitting diode 12. Therefore, if the light emitting diodes 12 are arranged in a matrix of m × n (m, n: natural numbers), the luminance equalizing element 20 is also in a matrix of m × n (m, n: natural numbers). Placed in.

  The length of the brightness uniformizing element 20 is set to such a length that the light incident inside can be totally reflected a plurality of times (for example, four times).

  Further, the exposure printing apparatus 10 includes a projection lens (light projection member) 22 for projecting light whose luminance is uniformed by the luminance uniformizing element 20 onto a member to be printed (for example, a semiconductor substrate or a liquid crystal substrate) 24. I have. A photosensitive material (resist) is applied to the surface of the printing member 24.

  Next, an exposure printing method as an operation of the exposure printing apparatus 10 according to the first embodiment will be described based on a flowchart shown in FIG.

  As shown in FIG. 7, in the control step, the control unit 16 controls the light emission timing or / and the light emission pattern of the light emitting diode 12 based on a control program stored in advance in the storage unit 18 (step 100). In the light emission step, light whose emission timing or / and light emission pattern of the light emitting diode 12 is controlled by the control unit 16 is emitted from the light emitting diode 12 (step 120).

  Next, in the brightness uniformization process, the light emitted from the light emitting diode 12 is incident on the brightness uniformization element 20 and is totally reflected a plurality of times (for example, four times) inside the brightness uniformization element 20. The brightness is equalized (step 140). That is, as shown in FIG. 8, the luminance of the light L emitted from the luminance uniformizing element 20 is substantially uniform from the center portion to the peripheral portion of the light L.

  Next, in the printing process, the light with uniform luminance is projected onto the printing member 24 by the projection lens 22 (step 160). As a result, as shown in FIGS. 3 to 5, a two-dimensional code such as a QR code 26, a micro QR code 28, and a Veri code 30 is printed on the printing member 24.

  Specifically, after light is projected onto the photosensitive material of the print-receiving member 24 through a pattern formed on a reticle or the like, an unexposed portion (a portion that is not irradiated with light) of the photosensitive material is made of Ni or the like. Plating is performed to immerse the printing member 24 in the developer. As a result, only the photosensitive portion (the portion irradiated with light) of the photosensitive material is dissolved by the developer, and only the unexposed portion of the photosensitive material remains on the printing member 24. Thereby, a predetermined pattern can be formed in the unexposed part of the photosensitive material. As a result, printing using an unexposed portion of the photosensitive material becomes possible.

  In addition, after light is projected onto the photosensitive material of the print-receiving member 24 through a pattern formed on the reticle or the like, the photosensitive portion (the portion irradiated with light) of the photosensitive material is plated with Ni or the like. Then, the printing member 24 is immersed in the developer. As a result, only the unexposed part of the photosensitive material (the part not irradiated with light) is dissolved by the developer, and only the photosensitive part of the photosensitive material remains on the printing member 24. Thereby, a predetermined pattern can be formed in the photosensitive part of the photosensitive material. As a result, printing using the photosensitive portion of the photosensitive material becomes possible.

  As described above, since the luminance of the light emitted from the light emitting diode 12 is substantially uniformed by the luminance uniformizing element 20, the projection of the light projected on the print-receiving member 24 is performed as shown in FIGS. In the region M, the intensity of the light L is substantially uniform (see the hatched portion in FIGS. 9 and 10). As a result, it is possible to prevent unevenness in the print density of information printed in the light projection area M on the print-receiving member 24, and as a result, it is possible to prevent print defects.

  In particular, the light emitted from the light emitting diode 12 is totally reflected a plurality of times by the brightness uniformizing element 20, whereby the brightness of the light can be easily and reliably uniformed.

  Further, since the brightness uniformizing element 20 is made of optical glass or acrylic resin, the brightness of light can be easily uniformed using an existing member.

  Further, by printing a two-dimensional code (such as QR code 26) as predetermined information on the printing member 24, the predetermined information printed on the printing member 24 can be read at a high speed by a separate reading device. . By setting the center wavelength of the light emitted from the light emitting diode 12 to 500 nm or less, the resolving power can be increased, and complicated information can be printed on the print target member 24. Further, by setting the center wavelength of the light emitted from the light emitting diode 12 to 500 nm or less, it is not necessary to make the room used when printing the predetermined information on the member to be printed 24 a dark room.

  In particular, since the light emitting diodes 12 are arranged in a matrix of m × n (m, n: natural number), for example, complicated information including two dimensions such as the QR code 26 in FIG. 3 is printed. The member 24 can be printed accurately. Similarly to the light emitting diodes 12, the luminance equalizing element 20 is also arranged in a matrix of m × n (m, n: natural number), and thus can correspond to each light emitting diode 12. . Thereby, the brightness | luminance of the light radiate | emitted from all the light emitting diodes 12 can be equalize | homogenized.

  Next, an exposure printing apparatus according to a second embodiment of the present invention will be described with reference to the drawings. In addition, about the structure similar to the structure of the exposure printing apparatus of 1st Embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted suitably.

  As shown in FIG. 11, in the exposure printing apparatus of the present embodiment, a neutral density filter (for example, ND filter) 32 that restricts the amount of light to a certain amount is connected to the emission surface of the light emitting diode 12 that is the light source unit 14. Are arranged to be. As a result, the light emitted from the light emitting diode 12 passes through the neutral density filter 32, so that the amount of light is reduced to a certain amount. As a result, the amount of light emitted from each light emitting diode 12 is all constant, and the amount of light between each light emitting diode 12 is adjusted.

  Further, the luminance equalizing element 20 is disposed on the light exit surface side of the neutral density filter 32. As a result, the light whose light quantity is limited by the neutral density filter 32 passes through the brightness uniformizing element 20, so that the brightness is substantially uniformed.

  Further, a projection lens 22 (see FIG. 1) is disposed on the light exit surface side of the luminance uniformizing element 20. As a result, the light having substantially uniform luminance is projected onto the printing member 24 (see FIG. 1) by the projection lens 22, and predetermined information is printed on the printing member 24.

  Next, an exposure printing method as an operation of the exposure printing apparatus according to the second embodiment will be described based on a flowchart shown in FIG. In addition, about the effect | action similar to the exposure printing method which is an effect | action of the exposure printing apparatus 10 which concerns on 1st Embodiment, the description is abbreviate | omitted suitably.

  As shown in FIG. 12, in the control step, the control unit 16 controls the light emission timing or / and the light emission pattern of the light emitting diode 12 based on a control program stored in advance in the storage unit 18 (step 200). In the light emitting step, the light whose emission timing or / and the light emission pattern of the light emitting diode 12 is controlled by the control unit 16 is emitted from the light emitting diode 12 (step 220).

  Next, in the light amount adjustment step, the light emitted from the light emitting diode 12 enters the neutral density filter 32, and the light amount is reduced to a certain amount (step 240). As a result, the amount of light emitted from each light emitting diode 12 becomes a constant amount, and the amount of light between the light emitting diodes 12 is adjusted. As a result, variation in the amount of light between the light emitting diodes 12 can be prevented.

  Next, in the brightness uniformization process, the light emitted from the neutral density filter 32 is incident on the brightness uniformization element 20, and is totally reflected a plurality of times (for example, four times) inside the brightness uniformization element 20, The brightness is made uniform (step 260).

  Next, in the printing process, the light with uniform brightness is projected onto the printing member 24 by the projection lens 22 (step 280). As a result, as shown in FIGS. 3 to 5, a two-dimensional code such as a QR code 26, a micro QR code 28, and a Veri code 30 is printed on the printing member 24.

  As described above, in the present embodiment, the amount of light emitted from the light emitting diode 12 is adjusted by the neutral density filter 32 and becomes a constant amount. Thereby, even when a plurality of light emitting diodes 12 are provided, it is possible to eliminate variations in the amount of light between the light emitting diodes 12. As a result, it is possible to prevent the print density of information printed on the print-receiving member 24 from becoming uneven.

  In particular, the amount of light emitted from the light emitting diode 12 is adjusted by the neutral density filter 32, and the luminance of the light whose light amount has been adjusted is substantially uniformed by the luminance equalizing element 20. Thereby, even when a defect (for example, uneven deposition) occurs in the material or the film used of the neutral density filter 32, the luminance equalizing element 20 substantially equalizes the luminance of the light whose light amount is adjusted by the neutral density filter 32. Therefore, the intensity of the light projected on the print-receiving member 24 can be made substantially uniform. As a result, it is possible to prevent density unevenness from occurring in predetermined information printed on the print-receiving member 24 even when a problem (for example, vapor deposition unevenness) occurs in the material of the neutral density filter 32 or the film used.

  Further, by using the neutral density filter (ND filter) 32 as the light amount adjusting member, the light amount of light can be easily and reliably adjusted using an existing member.

  As shown in FIG. 13, the neutral density filter 32 is disposed on the downstream side of the optical path of the brightness uniformizing element 20 to adjust the light amount of the light whose brightness is substantially uniformed by the brightness uniformizing element 20 to a constant amount. You may do it.

  In each of the above embodiments, the configuration using the light emitting diode 12 is shown. However, the configuration is not limited to this configuration, and instead of the light emitting diode 12, for example, an EL (light emitting light having a center wavelength of 500 nm or less) An electro-luminescence element (not shown) may be used. Also in this case, similarly, it is preferable that the EL elements are arranged so as to be m × n (m, n: natural number). Note that m and n may be the same natural number or different natural numbers.

  Next, an exposure experiment using the exposure printing apparatus of the present invention will be described.

  First, in the cleaning process, the member to be printed (silicon wafer) is cleaned for 120 seconds with a cleaning solution (tetramethylammonium hydroxide (concentration 3%)) and then rinsed with pure water for 60 seconds.

  Next, in the antireflection film forming process, an antireflection film is formed on the surface of the member to be printed. In this antireflection film forming process, a printing member is placed on a rotating body (not shown) that is driven to rotate by a motor (not shown), and the rotating member is rotated at a rotational speed of 3000 rpm for 60 seconds to rotate the printing member. Rotate with body. Then, by applying an antireflection film forming material (SWK-T5DBDFPM) substantially at the center of the surface of the printing member, the antireflection film forming material spreads over the entire surface by centrifugal force. Thereafter, the member to be printed is placed on a hot plate (not shown) and heated at 183 ° C. for 120 seconds. Thereby, an antireflection film is formed on the surface of the member to be printed.

  Next, in a resist coating process, a resist is coated on the upper surface of the antireflection film formed on the surface of the printing target member. In this resist coating process, a member to be printed on which an antireflection film is formed is placed on a rotating body (not shown) rotated by a motor (not shown), and the rotating body is rotated at a rotational speed of 5000 rpm for 60 seconds. The printing member is rotated together with the rotating body. Then, by applying a resist material (THMRip3300 (45% dilution)) substantially at the center of the antireflection film of the member to be printed, this resist material spreads over the entire surface of the antireflection film by centrifugal force. Thereafter, the member to be printed is placed on a hot plate (not shown) and heated at 93 ° C. for 120 seconds. Thus, a resist is applied to the member to be printed.

  Next, in the exposure process, light is emitted from the blue light emitting diode toward the member to be printed and projected onto the member to be printed.

  Next, in the development process, the member to be printed is developed. In the development process, the printing target member onto which the light is projected is immersed in a developer (NMD-W2.83%) for 15 seconds. Thereafter, the printing member is rinsed twice with pure water for 7 seconds each time. Thereby, predetermined information appears on the surface of the member to be printed.

1 is a perspective view of an exposure printing apparatus according to a first embodiment of the present invention. It is a block diagram of the control system of the exposure printing apparatus which concerns on 1st Embodiment of this invention. It is a figure which shows QR code printed with the exposure printing apparatus which concerns on 1st Embodiment of this invention. It is a figure which shows the micro QR code printed with the exposure printing apparatus which concerns on 1st Embodiment of this invention. It is a figure which shows the verification code printed with the exposure printing apparatus which concerns on 1st Embodiment of this invention. It is a perspective view which shows the single body of the brightness equalization member used for the exposure printing apparatus which concerns on 1st Embodiment of this invention. It is a flowchart which shows the exposure printing method using the exposure printing apparatus which concerns on 1st Embodiment of this invention. It is a conceptual diagram which shows the state in which the brightness | luminance of light was equalized by the brightness | luminance equalization member which comprises the exposure printing apparatus which concerns on 1st Embodiment of this invention. It is a conceptual diagram which shows the state in which the light was projected from the single light emitting diode which comprises the exposure printing apparatus which concerns on 1st Embodiment of this invention. It is a conceptual diagram which shows the state where the light was projected on the to-be-printed member from the several light emitting diode which comprises the exposure printing apparatus which concerns on 1st Embodiment of this invention. It is a conceptual diagram of the principal part of the exposure printing apparatus which concerns on 2nd Embodiment of this invention. It is a flowchart which shows the exposure printing method using the exposure printing apparatus which concerns on 2nd Embodiment of this invention. It is a conceptual diagram of the principal part of the modification of the exposure printing apparatus which concerns on 2nd Embodiment of this invention. It is a perspective view of the exposure printing apparatus used as a prior art. It is a conceptual diagram which shows the brightness | luminance of the light irradiated from the light emitting diode which comprises the exposure printing apparatus used as a prior art. It is a conceptual diagram which shows the state in which the light was projected from the single light emitting diode which comprises the exposure printing apparatus used as a prior art. It is a conceptual diagram which shows the state by which the light was projected on the to-be-printed member from the several light emitting diode which comprises the exposure printing apparatus used as a prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Exposure printing apparatus 12 Light emitting diode 14 Light source part 16 Control part 20 Brightness equalization element (brightness equalization member)
22 Projection lens (light projection member)
24 Printed member (exposed member)
26 QR code (two-dimensional code)
28 Micro QR code (two-dimensional code)
30 Vericode (2D code)
32 Neutral density filter (light quantity adjustment member)

Claims (9)

An exposure apparatus that exposes a member to be exposed,
A light emitting diode or EL element that emits light;
A brightness uniformizing member for uniformizing the brightness of light emitted from the light emitting diode or the EL element;
A light projection member that projects the light whose luminance is uniformed by the luminance uniforming member onto the exposed member;
Control means for controlling the light emission timing or / and the light emission pattern of the light emitting diode or the EL element;
An exposure apparatus comprising:   The exposure apparatus according to claim 1, wherein the brightness uniforming member uniforms brightness by totally reflecting light emitted from the light emitting diode or the EL element a plurality of times. A plurality of the light emitting diodes or the EL elements are provided,
The light quantity adjustment member which adjusts the light quantity of the light radiate | emitted from the said light emitting diode or the said EL element, or the light in which the brightness | luminance was equalized by the said brightness | luminance equalization member was provided. Exposure device. The light amount adjusting member is provided between the light emitting diode or the EL element and the brightness uniformizing member,
The amount of light emitted from the light emitting diode or the EL element is adjusted by the light amount adjusting member, and the luminance of the light having the adjusted light amount is made uniform by the luminance equalizing member. The exposure apparatus described.   The exposure apparatus according to claim 1, wherein the brightness uniforming member is made of optical glass or acrylic resin.   The exposure apparatus according to claim 3, wherein the light amount adjustment member is configured by a neutral density filter.   The exposure apparatus according to claim 1, wherein a center wavelength of light emitted from the light emitting diode or the EL element is 500 nm or less. An exposure printing apparatus that prints predetermined information on the exposed member using the exposure apparatus according to claim 1,
A photosensitive material is applied to the exposed member,
An exposure printing apparatus characterized in that the photosensitive material is exposed and predetermined portions of information are printed on the exposed member by removing a photosensitive portion or an unexposed portion of the photosensitive material. 9. The exposure printing apparatus according to claim 8, wherein the predetermined information printed on the exposed member is a two-dimensional code.

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