JP2007279629A - Optical device, space part manufacturing method, and projector - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical device that ensures efficient cooling of a light modulation element, without causing image quality degradation, and to provide a space part manufacturing method and a projector. <P>SOLUTION: The optical apparatus 800 comprises a light modulation element (light valve 71); and a light valve cooling frame 110, disposed outside of the image formation area 71a of the light valve 71 and having a hollow part 111 filled with a liquid coolant 90. The light valve 71 includes an element substrate (TFT array substrate 4); an opposite substrate 5; and a light intercepting part 21, formed so as to be head conductive within the cross-section of the inner face in an area of the opposite substrate 5, by which of the light rays entering the element substrate from the external face of the opposite substrate 5, a light ray traveling toward an area between the adjacent pixel electrodes 20 is intercepted, but a light ray traveling toward the effective display area of the pixel electrode 20 is not intercepted. The light valve cooling frame 110 holds the light valve 71, by firmly fixing the light intercepting part 21 of the light valve 71 so that heat can be conducted with respect to the liquid coolant 90 inside the hollow 111. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an optical device, a method for manufacturing a gap, and a projector.

  2. Description of the Related Art Conventionally, in a projector, a light valve as a light modulation element, which is an optical element, a polarizing plate as a light conversion element, and the like generate heat by heat energy generated by the light source device emitting light and emitting a light beam. As a cooling method for the light valve and the polarizing plate that generate heat, an air cooling method in which outside air is blown using a cooling fan or the like is mainly used. However, recent projectors have been improved in brightness and need to improve cooling performance. In general, the cooling performance is improved by increasing the air flow rate and speed of the cooling fan, which sacrifices downsizing and noise reduction of the projector. In addition, since a large amount of outside air is taken into the projector, dust and oily smoke are also sucked in, causing contamination of the optical elements (including light valves and polarizing plates) to be cooled, leading to deterioration of the performance of the optical elements. ing.

  In order to solve the above-described problem, a liquid cooling method for cooling a light valve, a polarizing plate, and the like using a liquid refrigerant has been proposed. As a liquid cooling structure for realizing a liquid cooling system, Patent Document 1 proposes a structure in which a light valve is fixed to a frame and a liquid refrigerant in the frame is circulated. Patent Document 2 proposes a liquid refrigerant that is in full contact with the substrate of the light valve. Japanese Patent Application Laid-Open No. H10-228561 proposes a method in which a transparent heat conductive layer is formed on a substrate constituting a light valve to improve the heat conductivity from the substrate.

JP 2005-275189 A JP 2005-326660 A JP 2003-156729 A

  However, Patent Document 1 cannot directly remove heat from the substrate surface, which is a heat source, and has a problem that cooling efficiency is reduced due to indirect cooling by heat conduction from the substrate to the frame. . Further, in Patent Document 2, since the liquid refrigerant flows on the light valve surface that is the focal plane of the illumination system, the image quality of the projected image is likely to be deteriorated due to bubbles generated in the liquid refrigerant or fluctuation due to temperature nonuniformity. was there. Moreover, since the heat conductive layer is a thin film in Patent Document 3, there is a problem in conducting a sufficient amount of heat.

  The present invention has been made in view of the above problems, and provides an optical device, a gap manufacturing method, and a projector that can realize efficient cooling of a light modulation element without causing image quality degradation. Objective.

In order to achieve the above-described object, an optical device of the present invention is an optical device that performs cooling using a liquid refrigerant, and modulates and emits a light beam according to image information, and a light modulation device A light modulation element cooling frame having a thermal conductivity and a hollow portion in which a liquid refrigerant is sealed is formed in an area corresponding to the outside of the image forming area of the light modulation element. Includes an element substrate on which a plurality of pixel electrodes and switching elements for driving the pixel electrodes are arranged, a counter substrate provided facing the element substrate and having a cross section on the inner surface in a predetermined region, and an element from the outer surface of the counter substrate Of incident light incident at a predetermined angle toward the substrate side, the light directed to the region between adjacent pixel electrodes is shielded, and the incident light directed to the effective display region of the pixel electrode is not shielded within a predetermined region of the counter substrate. Within the cross section, heat conduction The light modulation element cooling frame is configured to closely fix the light shielding part of the light modulation element so as to be able to conduct heat with respect to the liquid refrigerant in the hollow portion. It is characterized by holding.
Here, “the inner surface of the counter substrate” means a substrate surface of the counter substrate that faces the element substrate, and “the outer surface of the counter substrate” means a substrate surface opposite to the inner surface. To do. In addition, the effective display area refers to an area effective for display among pixel areas formed by pixel electrodes (a switching element formation area, various wiring formation areas, and the like are invalid areas).

According to such an optical device, since the hollow portion in which the liquid refrigerant is sealed is formed in the area corresponding to the outside of the image forming area of the light modulation element, the liquid refrigerant is formed in the image forming area of the light modulation element. Does not exist. As a result, the image quality of the projected image does not deteriorate due to bubbles generated in the liquid refrigerant or fluctuations due to temperature non-uniformity.
Further, since the light shielding portion is formed in a predetermined region of the counter substrate that shields the light traveling toward the region between the adjacent pixel electrodes and does not shield the incident light traveling toward the effective display region of the pixel electrode. The light that goes is never weakened.
Further, since the light shielding portion is formed with thermal conductivity in the cross section of the inner surface in the predetermined area of the counter substrate, the cross sectional area with respect to the direction in which heat is conducted can be sufficiently increased. Heat generated inside the modulation element can be efficiently conducted.
In addition, the light modulation element cooling frame closely fixes the light shielding portion so as to be able to conduct heat with respect to the liquid refrigerant in the hollow portion, so that heat generated by the light modulation element is conducted to the light shielding portion, and the heat is transmitted from the light shielding portion. The heat is conducted to the light modulation element cooling frame and is radiated from the outer surface of the light modulation element cooling frame, and the heat is conducted to the liquid refrigerant in the hollow portion. When heat is conducted to the liquid refrigerant, natural convection of the liquid refrigerant occurs and the heat is efficiently cooled.
Therefore, efficient cooling can be realized without causing image quality degradation.

  In the above optical device, a hollow part connected to the hollow part of the light modulation element cooling frame and forming a flow path for circulating the liquid refrigerant, and a hollow installed in the flow path of the circulation part and connected via the circulation part It is preferable to include a circulation drive unit that forcibly circulates the liquid refrigerant in the unit.

  According to such an optical device, since the liquid refrigerant is forcibly circulated in the flow path formed by the circulation unit by the circulation drive unit, forced convection occurs inside the hollow portion connected to the circulation unit. . Accordingly, the heat of the light modulation element held by the light modulation element cooling frame in which the hollow portion is formed is further efficiently cooled by forced circulation and convection. Therefore, more efficient cooling can be realized.

  In the optical device, it is preferable that the circulation unit and the circulation drive unit are installed in a light modulation element cooling frame that forms a hollow portion.

  According to such an optical device, the circulation unit and the circulation drive unit are installed and configured in the light modulation element cooling frame, so that a compact cooling structure can be configured and the heat of the light modulation element is cooled. Therefore, the assemblability in manufacturing the optical device and the reliability of the optical device are improved.

  In the above optical device, it is preferable to have a gap portion in which the liquid refrigerant is sealed in the cross section where the light shielding portion is formed.

  According to such an optical device, since there is a gap portion in which the liquid refrigerant is sealed in the cross section where the light shielding portion is formed, heat transfer is efficiently performed by convection of the liquid refrigerant, and efficient cooling is realized. it can.

  In the optical device, it is preferable that a hollow member in which a liquid refrigerant is enclosed is installed in a cross section.

  According to such an optical device, since the hollow member in which the liquid refrigerant is sealed is included in the cross section, the risk of leakage of the liquid refrigerant can be suppressed.

  In order to achieve the above-described object, a gap portion manufacturing method of the present invention includes a step of forming a gap portion with a material different from a material for forming a light shielding portion in a cross section of a counter substrate, The method includes a step of forming a light shielding portion so as to cover the gap portion and a removing step of removing the gap portion.

  According to such a method for manufacturing a gap portion, a gap portion to be a gap portion later is formed first, then a light shielding portion is formed so as to cover the gap portion, and then a gap is formed by a removal process. By removing the portion, the gap can be formed efficiently.

  In order to achieve the above-described object, a projector according to the present invention includes any one of the above-described optical devices, a light source device that emits a light beam, and a projection unit that projects an optical image formed by the optical device. It is characterized by.

  According to such a projector, any one of the optical devices described above is provided, a light beam is emitted from the light source device, and an optical image is formed by the optical device according to image information, and is formed by the projection unit. Project an image. Accordingly, it is possible to provide a projector having improved temperature characteristics by combining the effects of the optical device described above.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In each drawing used for the following description, the scale of each member is appropriately changed to make each member a recognizable size.
In the present specification, regarding the liquid crystal light valve as the light modulation element, the liquid crystal layer side of each component is referred to as the inner side, and the opposite side is referred to as the outer side. “When non-selection voltage is applied” and “when selection voltage is applied” are respectively “when the applied voltage to the liquid crystal layer is near the threshold voltage at which the liquid crystal orientation changes” and “applied to the liquid crystal layer”. "When the voltage is sufficiently higher than the threshold voltage of the liquid crystal".
In the present embodiment, the liquid crystal light valve will be described by taking an active matrix type transmissive liquid crystal light valve using a thin film transistor (hereinafter referred to as TFT) element as a switching element as an example.
(First embodiment)

  FIG. 1 is an equivalent circuit diagram of the liquid crystal light valve according to the first embodiment of the present invention. An equivalent circuit diagram of the liquid crystal light valve 1 will be described with reference to FIG.

  Pixel electrodes 20 are formed on a plurality of dots arranged in a matrix so as to form an image display area of the transmissive liquid crystal light valve 1. Further, on the side of the pixel electrode 20, a TFT element 15 that is a switching element for performing energization control to the pixel electrode 20 is formed. The data line 10 is electrically connected to the source of the TFT element 15. Each data line 10 is supplied with image signals S1, S2,..., Sn. The image signals S1, S2,..., Sn may be supplied to each data line 10 in this order, or may be supplied for each group to a plurality of adjacent data lines 10.

  Further, the scanning line 9 is electrically connected to the gate of the TFT element 15. Scanning signals G1, G2,..., Gn are supplied to the scanning lines 9 in pulses at predetermined timing. The scanning signals G1, G2,..., Gn are applied sequentially to the respective scanning lines 9 in this order. Further, the pixel electrode 20 is electrically connected to the drain of the TFT element 15. When the TFT elements 15 as switching elements are turned on for a certain period by the scanning signals G1, G2,..., Gn supplied from the scanning lines 9, the image signals S1, S2,. , Sn are written to the liquid crystal of each pixel at a predetermined timing.

  The predetermined level image signals S1, S2,..., Sn written in the liquid crystal are held for a certain period by a liquid crystal capacitor formed between the pixel electrode 20 and a common electrode described later. In order to prevent leakage of the held image signals S1, S2,..., Sn, a storage capacitor 51 is formed between the pixel electrode 20 and the capacitor line 60, and is arranged in parallel with the liquid crystal capacitor. . Thus, when a voltage signal is applied to the liquid crystal, the alignment state of the liquid crystal molecules changes depending on the applied voltage level. As a result, the light incident on the liquid crystal is modulated so that gradation display can be performed.

  FIG. 2 is an explanatory diagram of a planar structure of the liquid crystal light valve. The planar structure of the liquid crystal light valve 1 will be described with reference to FIG.

  In the liquid crystal light valve 1 of the present embodiment, rectangular pixel electrodes 20 (whose outline is indicated by broken lines 20a) are arranged in a matrix on a TFT array substrate 4 (shown in FIG. 3) as an element substrate. Yes. A data line 10, a scanning line 9, and a capacitor line 60 are provided along the vertical and horizontal boundaries of the pixel electrode 20. In addition, light shielding portions 21 are provided in a lattice shape in a region indicated by diagonal lines (on the counter substrate 5 (shown in FIG. 3)). In the present embodiment, the area where each pixel electrode 20 is formed is a dot area, and display can be performed for each dot area arranged in a matrix.

  The TFT element 15 (shown in FIG. 3) is formed around a semiconductor layer 1a made of a polysilicon film or the like. A data line 10 is electrically connected to a source region (described later) of the semiconductor layer 1 a through a contact hole 53. Further, the pixel electrode 20 is electrically connected to the drain region (described later) of the semiconductor layer 1 a through the contact hole 54. On the other hand, a channel region 1a 'is formed in a portion facing the scanning line 9 in the semiconductor layer 1a. The scanning line 9 functions as a gate electrode at a portion facing the channel region 1a '.

  FIG. 3 is an explanatory diagram of a cross-sectional structure of the liquid crystal light valve, and is a side cross-sectional view taken along line A-A ′ of FIG. 2. The cross-sectional structure of the liquid crystal light valve 1 will be described with reference to FIG.

  As shown in FIG. 3, the liquid crystal light valve 1 of the present embodiment is mainly composed of a TFT array substrate 4, a counter substrate 5 disposed opposite to the TFT array substrate 4, and a liquid crystal layer 8 sandwiched therebetween. ing. The TFT array substrate 4 is made of a translucent material such as glass or quartz, and the TFT element 15, the pixel electrode 20, the alignment film 22 a, and the like are provided on the inner side. One counter substrate 5 is made of a light-transmitting material such as glass or quartz, and a common electrode 57 and an alignment film 22b are provided on the inner side.

  A first interlayer insulating film 59 is formed on the surface of the TFT array substrate 4. A semiconductor layer 1a made of polycrystalline silicon or the like is formed on the surface of the first interlayer insulating film 59, and the TFT element 15 is formed around the semiconductor layer 1a. A channel region 1a 'is formed in a portion of the semiconductor layer 1a facing the scanning line 9, and a source region and a drain region are formed on both sides thereof. Since the TFT element 15 employs an LDD (Lightly Doped Drain) structure, a high concentration region having a relatively high impurity concentration and a relatively low concentration region (LDD) are respectively provided in the source region and the drain region. Region). That is, a low concentration source region 1b and a high concentration source region 1d are formed in the source region, and a low concentration drain region 1c and a high concentration drain region 1e are formed in the drain region.

  A gate insulating film 2 is formed on the surface of the semiconductor layer 1a. Then, a scanning line 9 is formed on the surface of the gate insulating film 2, and a part thereof constitutes a gate electrode. A second interlayer insulating film 61 is formed on the surfaces of the gate insulating film 2 and the scanning line 9. The data line 10 is formed on the surface of the second interlayer insulating film 61 and is electrically connected to the high-concentration source region 1 d through the contact hole 53 formed in the second interlayer insulating film 61. Further, a third interlayer insulating film 62 is formed on the surfaces of the second interlayer insulating film 61 and the data line 10. A pixel electrode 20 made of a transparent conductive material such as indium tin oxide (hereinafter referred to as ITO) is formed on the surface of the third interlayer insulating film 62. The pixel electrode 20 is electrically connected to the high concentration drain region 1 e through a contact hole 54 formed in the second interlayer insulating film 61 and the third interlayer insulating film 62. Further, an alignment film 22 a made of an organic material such as polyimide is formed inside the pixel electrode 20. The surface of the alignment film 22a is rubbed or the like so that the alignment direction of the liquid crystal molecules when a non-selection voltage is applied can be regulated. Although the scanning line 9 has been described as including a gate electrode, the scanning line 9 may be formed in a different layer from the gate electrode and connected via a contact hole.

  In the present embodiment, the first storage capacitor electrode 1f is formed by extending the semiconductor layer 1a. Further, the gate insulating film 2 is extended to form a dielectric film, and the capacitor line 60 is arranged on the surface thereof to form a second storage capacitor electrode. Thus, the above-described storage capacitor 51 is configured.

  A common electrode 57 made of a transparent conductive material such as ITO is formed on the surface of the counter substrate 5 over substantially the entire surface. Further, an alignment film 22b made of an organic material such as polyimide is formed on the surface of the common electrode 57 through a water repellent layer (not shown) as necessary. The surface of the alignment film 22b is rubbed or the like so that the alignment direction of the liquid crystal molecules when a non-selection voltage is applied can be regulated.

  In order to form the alignment films 22a and 22b, polyimide is first applied by spin coating, dried at about 80 ° C. for about 10 minutes to volatilize the solvent, and then baked at about 180 ° C. for about 1 hour. Form. Further, if the polyimide film is rubbed at a rubbing density of about 450, the alignment films 22a and 22b are formed. For example, the alignment films 22a and 22b have a thickness of about 25 nm. Note that the thickness of the alignment films 22a and 22b is preferably 5 to 50 nm, and more preferably 15 to 30 nm.

  A liquid crystal layer 8 made of nematic liquid crystal is sealed inside a sealing material 6 (shown in FIG. 9) for bonding the TFT array substrate 4 and the counter substrate 5 at the peripheral edge. This nematic liquid crystal molecule exhibits a positive dielectric anisotropy, and is oriented horizontally with respect to the electrode when a non-selective voltage is applied, and perpendicularly with respect to the electrode when a selective voltage is applied. . Note that the alignment regulation direction by the alignment film 22a of the TFT array substrate 4 and the alignment regulation direction by the alignment film 22b of the counter substrate 5 are arranged in a state twisted by about 90 °. As a result, the liquid crystal light valve 1 of the present embodiment operates in the twisted nematic mode. In addition to the twisted nematic mode, the liquid crystal mode may be a liquid crystal mode having negative dielectric anisotropy, that is, a vertical alignment mode.

  FIG. 4 is an explanatory diagram of the liquid crystal light valve according to the present embodiment. FIG. 4 is a schematic diagram of the cross-sectional structure shown in FIG. 3, and is omitted as appropriate for easy understanding. A cross-sectional structure related to the light shielding portion 21 of the liquid crystal light valve 1 will be described with reference to FIG.

  A light shielding portion 21 is formed on the inner surface of the counter substrate 5 corresponding to the formation region of the TFT element 15. The light shielding unit 21 is made of aluminum alone or a laminate of other metal film on aluminum so as to shield light incident on the counter substrate 5 and to conduct heat.

  As shown in FIG. 4A, the light shielding portion 21 is not formed in a film shape, but has a triangular cross section, for example. Specifically, the width L (L = about 4 μm) is formed on the inner surface of the counter substrate 5 and the depth h (h = about 10 μm) is formed inside the counter substrate 5, and gradually inside the counter substrate 5. It is embedded in the counter substrate 5 so as to be tapered. Thus, since the light shielding part 21 has a cross section, the heat generated inside the liquid crystal light valve 1 is easily transmitted in the extending direction of the light shielding part 21. If the cross section has a width L of about 4 μm and a depth (height) of about 10 μm as in the light shielding portion 21, it can be said that the cross-sectional area in the direction in which heat is conducted is sufficiently large.

The tapered portion (hereinafter referred to as “taper portion”) 21 a is inclined so as to form an angle θ ₃ with respect to a direction (normal direction) perpendicular to the substrate. The light from the light source is incident on the counter substrate 5 at an incident angle θ ₁ from a certain direction with respect to the counter substrate 5, refracts at the refraction angle θ ₂ , and travels straight in the counter substrate 5. . When the refractive index of a material (for example, glass) forming the counter substrate 5 is n ₂ , sin (θ ₁ ) = n ₂ sin (θ ₂ ).

As shown in FIG. 4B, the incident light α ₁ and the incident light β ₁ incident on the counter substrate 5 reach the pixel electrode 20 without being blocked by the light blocking portion 21. And the incident light alpha ₂ incident from the left side in the drawing than the incident light alpha _1, incident light beta ₂ incident from the right side in the drawing than the incident light beta ₁ will be shielded by the light shielding unit 21. Such light does not reach the pixel electrode 20 when the light blocking portion 21 is not present, but reaches the region 25 between the adjacent pixel electrodes 20. The light shielding unit 21 shields light reaching other than the pixel electrode 20 (shields light reaching an area other than the so-called effective display area) and does not shield light reaching the pixel electrode 20. (Does not block light reaching the so-called effective display area), and is surrounded by a line representing incident light α, a line representing incident light β and a line representing the surface of the counter substrate 5 shown in FIG. Is formed so as to fit within the region Σ. A depth H from the surface of the counter substrate 5 to the apex P of the region Σ can be expressed by Expression (1).
H = L / (2 (tanθ ₂ )) ··· Formula (1)
Here, θ ₂ represents the value of the refraction angle of the incident light described above, and L represents the value of the width of the light shielding unit 21 described above. For example, θ ₂ is preferably about 16 °.

As shown in FIG. 4C, when the light shielding part 21 is formed so as to protrude from the region Σ shown in FIG. 4B, for example, the value of the height h is changed without changing the value of the width L of the light shielding part 21. When the value is larger than the value of Expression (1), even the incident light α ₃ that can originally reach the pixel electrode 20 is shielded by the light shielding portion 21. For comparison, the light shielding portion 21 shown in FIG. 4B is indicated by a one-dot chain line in FIG. 4C for comparison. The incident light α ₃ can reach the pixel electrode 20 through the very bottom portion of the light shielding portion indicated by the alternate long and short dash line, but is blocked by the tapered portion 21a of the light shielding portion 21 indicated by the solid line. Can't reach.

  Note that the outer shape of the counter substrate 5 of the liquid crystal light valve 1 is configured to be larger than the outer shape of the TFT array substrate 4 (element substrate), and the light shielding portion 21 formed on the counter substrate 5 is the outer shape of the counter substrate 5. It is formed (extended) near the end.

  FIG. 5 is a flowchart showing the manufacturing process of the liquid crystal light valve. FIG. 6 is an explanatory diagram of a process of forming a light shielding portion on the opposing mother substrate. The manufacturing process of the liquid crystal light valve 1 of the present invention will be described with reference to FIGS. In the present embodiment, a method in which a plurality of liquid crystal light valves are collectively formed using a mother substrate having a large area and separated into individual liquid crystal light valves 1 by cutting will be described as an example.

  The counter-side mother substrate 5M is formed by the steps ST1 to ST6, and the TFT array-side mother substrate 4M provided with a wiring element, for example, a switching element in the case of an active matrix type liquid crystal light valve, by the steps ST11 to ST13. Is formed. The TFT array-side mother substrate 4M is a large-sized substrate including a plurality of rectangular display areas to be the TFT array substrate 4. The counter-side mother substrate 5M includes a plurality of rectangular display areas to be the counter substrate 5. A large substrate.

First, the formation process (ST1 to ST6) of the opposite-side mother substrate 5M will be described.
The light shielding part 21 is formed on the opposing mother substrate 5M (ST1). As shown in FIG. 6A, a resist R is applied to the surface of the opposing mother substrate 5M. Next, as shown in FIG. 6B, the surface of the opposing mother substrate 5M on which the resist R is applied is cut together with the resist R by dicing. At this time, the width L and the depth h of the cutting portion 28 are set within the above-described region Σ. Next, as shown in FIG. 6 (c), aluminum (a portion indicated by oblique lines in FIG. 6 (c)) is deposited on the cut portion 28. Then, as shown in FIG. 6D, when the resist R portion and the upper aluminum are removed, the light shielding portion 21 is formed.

  Next, a planarization layer and a common electrode 57 are sequentially formed on the surface where the light shielding portion 21 is formed (ST2), an alignment film 22b is formed so as to cover the common electrode 57 (ST3), and the alignment film 22b is formed. Then, the rubbing process is executed (ST4). The alignment film 22b can be formed by applying or printing polyimide, for example.

  A sealing material 6 (shown in FIG. 9) made of epoxy resin or the like is formed in a rectangular frame shape around the display area so as to surround the display area (ST5). The sealing material 6 is accurately formed at a designed position using a dispenser or the like. The sealing material 6 is formed in a closed ring shape with a single stroke starting from the corner of the display area. In a region on the TFT array side mother substrate 4M where the sealing material 6 is formed, a reflective film (not shown) made of a material such as metal having a high light reflectance is formed in advance.

  And a liquid crystal is apply | coated to the display area enclosed with the sealing material 6 (ST6). For example, the opposing mother substrate 5M is disposed in the liquid crystal dropping device, and liquid crystal is discharged from the droplet discharge head in the form of droplets, and a large number of these are continuously arranged on the substrate surface to have a predetermined width. A liquid film is formed.

Next, a process of forming the TFT array side mother substrate 4M (ST11 to ST13) will be briefly described.
As in the case of the opposing mother substrate 5M, the scanning lines 9, the data lines 10 and the like are formed in each display region of a large base material made of a light-transmitting material such as quartz, and the pixel electrodes 20 and the TFT elements 15 are formed. (ST11). The scanning lines 9 and the data lines 10 can be collectively formed for each display region by, for example, sputtering a metal such as aluminum on the entire surface of the substrate and etching it. Next, an alignment film made of polyimide or the like is formed in each display region (ST12), and a rubbing process is performed on the alignment film (ST13).

  Next, the opposing mother substrate 5M and the TFT array mother substrate 4M formed in each of the above steps are bonded together (ST21). Both substrates are brought close to each other so that the TFT array-side mother substrate 4M is adhered to the sealing material 6 on the opposite-side mother substrate 5M. After the opposing mother substrate 5M and the TFT array mother substrate 4M are bonded together, the sealing material 6 is irradiated with ultraviolet rays (UV) and cured.

  When ultraviolet rays are irradiated from the outside of the opposing mother substrate 5M, the ultraviolet rays are transmitted through the opposing mother substrate 5M and applied to the sealing material 6. The ultraviolet rays that pass through the sealing material 6 are reflected by a reflective film formed in advance on the sealing material 6 formation portion of the TFT array side mother substrate 4M, and are applied to the sealing material 6. Of the ultraviolet light reflected by the reflective film, the ultraviolet light that has again passed through the sealing material 6 is reflected again by the flat surface of the light shielding portion 21 and is applied to the sealing material 6. In this way, the sealing material 6 is cured by efficiently irradiating ultraviolet rays.

  Thereafter, scribe lines are formed on the TFT array substrate 4 and the counter substrate 5, the liquid crystal panel is cut along the scribe lines (ST22), each liquid crystal panel is cleaned (ST23), and each liquid crystal panel is provided with, for example, ACF ( A flexible substrate is mounted via an anisotropic conductive adhesive), and the liquid crystal light valve 1 is completed.

  In this embodiment, the counter-side mother substrate 5M may be broken before being bonded to the TFT array-side mother substrate 4M, and the separated counter substrate 5 may be bonded to the TFT array-side mother substrate 4M. good.

  FIG. 7 is a schematic diagram showing a configuration of an optical system when the liquid crystal light valve is configured as an optical device and applied to a projector. The configuration of the optical system 35 of the projector 900 will be described with reference to FIG. A detailed description when the liquid crystal light valve 1 is configured as the optical device 800 will be described in FIG.

  As shown in FIG. 7, the optical system 35 of the projector 900 includes a light source device 30, an illumination optical system 40, a light modulation / conversion unit 70, a color synthesis optical system 80, and a projection unit 85. The light modulation / conversion unit 70 is configured as the light source device 30. The illumination optical system 40 includes an integrator illumination optical system 41, a color separation optical system 42, and a relay optical system 43.

  The optical component housing 45 accommodates the components constituting the light source device 30, the illumination optical system 40, the light modulation / conversion unit 70, and the color synthesis optical system 80 and is unitized. In addition, the illumination optical system 40 which comprises the optical system 35 in this embodiment can be changed or abbreviate | omitted suitably according to the optical system to be used.

  The projector 900 provided with such an optical system 35 modulates the light beam emitted from the light source device 30 according to image information by the light modulation / conversion unit 70 to form an optical image, and via the projection unit 85, The formed optical image is projected onto, for example, a screen (not shown).

The configuration and operation of the optical system 35 will be described.
In the description of the light valve 71 (in this embodiment, the liquid crystal light valve 1 is used for the optical system 35 of the projector 900), the incident polarizing plate 72, and the emission polarizing plate 73, the reference numerals shown in FIG. Is also used.

  The light source device 30 uses a discharge lamp 31 in this embodiment. Specifically, a high pressure mercury lamp is used as the lamp 31. The lamp 31 includes an arc tube 31a that emits light by discharge and emits a light beam radially, and a reflector 31b that emits the radial light beam emitted from the arc tube 31a as substantially parallel light in the direction of the illumination optical system 40. Configured.

  The integrator illumination optical system 41 constituting the illumination optical system 40 is an optical system for making the illuminance of the light beam emitted from the light source device 30 uniform in a plane orthogonal to the illumination optical axis L (illustrated by a one-dot chain line). . The integrator illumination optical system 41 includes a first lens array 41a, a second lens array 41b, a polarization conversion element 41c, and a superimposing lens 41d.

The first lens array 41a has a configuration in which small lenses having a substantially rectangular outline when viewed from the illumination optical axis L direction are arranged in a matrix. Each small lens divides the light beam emitted from the light source device 30 into partial light beams and emits them in the direction along the illumination optical axis L.
The second lens array 41b has substantially the same configuration as the first lens array 41a, and has a configuration in which small lenses are arranged in a matrix. The second lens array 41b, together with the superimposing lens 41d, has a function of forming an image of each small lens of the first lens array 41a on a light valve 71 as a light modulation element to be described later.

  The polarization conversion element 41c is an optical element that converts (aligns) the polarization direction of each partial light beam divided by the first lens array 41a and the second lens array 41b into a substantially uniform polarization light beam. The polarization conversion element 41c in the present embodiment has a configuration in which polarization separation films (not shown) and reflection films (not shown) that are inclined with respect to the illumination optical axis L are alternately arranged. The polarization separation film transmits one polarized light beam among the P-polarized light beam and S-polarized light beam included in each partial light beam, and reflects the other polarized light beam. The other polarized light beam reflected is bent by the reflecting film and emitted in the emission direction of one polarized light beam, that is, the direction along the illumination optical axis L. The emitted polarized light beam is polarized and converted by a phase difference plate (not shown) disposed on the light beam exit surface (not shown) of the polarization conversion element 41c, and the polarization direction of almost all the polarized light beams is polarized in one direction. Aligned as luminous flux.

  In the projector 900 using the light valve 71 of the type that modulates a polarized light beam, only a polarized light beam in one direction can be used, and therefore approximately half of the light beam from the arc tube 31a that emits a polarized light beam in a random direction is not used. For this reason, the use efficiency of light in the light modulation / conversion unit 70 is improved by using the polarization conversion element 41c to convert the light beam emitted from the light source device 30 into a polarized light beam in approximately one direction.

  The superimposing lens 41d collects a plurality of partial light beams converted into polarized light beams in substantially one direction by the polarization conversion element 41c, and places them on image forming regions 71a of three light valves 71 (to be described later) of the light modulation / conversion unit 70. It is an optical element to be superimposed. The light beam emitted from the superimposing lens 41 d is emitted to the color separation optical system 42.

  The color separation optical system 42 includes two dichroic mirrors 42a and 42b and a reflection mirror 42c. The plurality of partial light beams emitted from the integrator illumination optical system 41 are separated into three color lights of red (R), green (G), and blue (B) by the two dichroic mirrors 42a and 42b.

  The relay optical system 43 includes an incident side lens 43a, a pair of relay lenses 43c, and reflection mirrors 43b and 43d. In this embodiment, the relay optical system 43 has a function of guiding blue light, which is color light separated by the color separation optical system 42, to a light valve 71B for blue light, which will be described later, of the light modulation / conversion unit 70. Yes.

  At this time, the dichroic mirror 42a of the color separation optical system 42 transmits the green light component and the blue light component and reflects the red light component among the light beams emitted from the integrator illumination optical system 41. The red light reflected by the dichroic mirror 42a is reflected by the reflection mirror 42c, passes through the field lens 41e, and reaches the light valve 71R for red light. The field lens 41e converts each partial light beam emitted from the second lens array 41b into a light beam parallel to the central axis (principal ray). The same applies to the field lens 41e provided on the light incident side of the light valves 71B and 71G for blue light and green light.

  Of the blue light and green light transmitted through the dichroic mirror 42a, green light is reflected by the dichroic mirror 42b, passes through the field lens 41e, and reaches the light valve 71G for green light. On the other hand, the blue light passes through the dichroic mirror 42b, passes through the relay optical system 43, passes through the field lens 41e, and reaches the light valve 71B for blue light. Note that the relay optical system 43 is used for blue light because the optical path length of the blue light is longer than the optical path lengths of the other color lights, thereby preventing a decrease in light use efficiency due to light divergence or the like. It is to do. That is, this is to transmit the partial light beam incident on the incident side lens 43a to the field lens 41e as it is. The relay optical system 43 is configured to pass blue light of the three color lights, but is not limited thereto, and may be configured to pass red light, for example.

  The light modulation / conversion unit 70 modulates an incident light beam according to image information to form an optical image (color image). The light modulator / converter 70 includes three incident polarizers 72 (red light incident polarizers 72R for red light as light incident elements on the incident side on which the respective color lights separated by the color separation optical system 42 are incident. Green light incident polarizing plate 72G and blue light use blue light incident polarizing plate 72B). In addition, three light valves 71 (red light light valve 71R for red light, green light light valve 71G for green light, and blue light for blue light) as light modulation elements installed at the subsequent stage of each incident polarizing plate 72 A light valve 71B). In addition, three emission polarizing plates 73 (red light emission polarizing plate 73R for red light, green light emission polarizing plate 73G for green light, and blue light) as light conversion elements on the emission side installed at the rear stage of each light valve 71. A light emitting polarizing plate 73B).

  The light valve 71 (71R, 71G, 71B) uses a transmissive high-temperature polysilicon TFT as a switching element, and a liquid crystal is formed in a pair of transparent substrates (the counter substrate 5 and the TFT array substrate 4) arranged opposite to each other. The liquid crystal layer 8 is hermetically sealed. The light valve 71 modulates the light beam incident through the incident polarizing plate 72 according to image information, forms an optical image, and emits it.

  The light valve 71 is configured as an optical device 800 and is held by a light valve cooling frame 110 serving as a light modulation element cooling frame described later. The light valve 71 generates heat by the light flux emitted from the lamp 31, and the heat generated by the heat generation is cooled by the convection of the hollow portion 111 in which the liquid refrigerant 90 formed in the light valve cooling frame 110 is enclosed. .

  In this embodiment, the light valve 71 (liquid crystal light valve 1), the light valve cooling frame 110 that holds the light valve 71 (liquid crystal light valve 1), and the like are collectively referred to as an optical device 800. The optical device 800 includes a red light optical device 800R, a green light optical device 800G, and a blue light optical device 800B corresponding to each color light (details will be described later).

  The incident polarizing plate 72 transmits a polarized light beam in one direction out of each color light separated by the color separation optical system 42 and absorbs the other light beams, and is in close contact with the transparent member 212 having a plate-like flat portion. Fixed. The exit polarizing plate 73 is also configured in substantially the same manner as the entrance polarizing plate 72, and transmits a polarized light beam in a predetermined direction and absorbs other light beams out of the light beams emitted from the light valve 71. The polarization axis of the polarized light beam to be transmitted is set to be orthogonal to the polarization axis of the polarized light beam transmitted through the incident polarizing plate 72.

  Similarly to the light valve 71, the incident polarizer 72 and the exit polarizer 73 are also held in an entrance polarizer cooling frame 210 and an exit polarizer cooling frame 310 described later. The incident polarizing plate 72 and the exit polarizing plate 73 generate heat by the light flux emitted from the lamp 31, and the heat generated by the generated heat causes the liquid refrigerant 90 formed in the incident polarizing plate cooling frame 210 and the exit polarizing plate cooling frame 310. Is cooled by the convection of the hollow portions 211 and 311 in which is enclosed.

  In the present embodiment, the incident polarizing plate 72 and the incident polarizing plate cooling frame 210 that holds the incident polarizing plate 72 are combined to provide the incident-side light conversion unit 200, the outgoing polarizing plate 73, and the outgoing polarizing plate 73 that holds the outgoing polarizing plate 73. The cooling frame 310 is collectively referred to as an emission side light conversion unit 300. The incident side light conversion unit 200 includes a red light incident side light conversion unit 200R, a green light incident side light conversion unit 200G, and a blue light incident side light conversion unit 200B corresponding to each color light. . Similarly, the emission side light conversion unit 300 includes a red light emission side light conversion unit 300R, a green light emission side light conversion unit 300G, and a blue light emission side light conversion unit 300B.

  The color synthesis optical system 80 includes one cross dichroic prism 81. The cross dichroic prism 81 is an optical element that synthesizes an optical image modulated for each color light emitted from the exit polarizing plate 73 to form a color image. The cross dichroic prism 81 has a substantially square shape in plan view in which four right-angle prisms are bonded. A dielectric multilayer film is formed along the interface at the substantially X-shaped interface where the right-angle prisms are bonded together. One of the substantially X-shaped dielectric multilayer films reflects red light, the other dielectric multilayer film reflects blue light, and red light and blue light correspond to the corresponding dielectric multilayer films. Reflected and bent by the film. Green light is transmitted through both dielectric multilayer films.

  Thereby, the traveling direction of red light and blue light can be aligned with the traveling direction of green light, and three color lights are synthesized. The color light synthesized by the cross dichroic prism 81 is emitted in the direction of the projection lens 86 constituting the projection unit 85. The video light emitted from the cross dichroic prism 81 is projected onto, for example, a screen (not shown) by the projection lens 86.

  The optical device 800 (800R, 800G, 800B), the incident side light conversion unit 200 (200R, 200G, 200B), and the emission side light conversion unit 300 (300R, 300G, 300B) described above maintain their positional relationships. Then, it is fixed to the cross dichroic prism 81 and unitized.

  FIG. 8 is a schematic diagram in which a liquid crystal light valve is configured as an optical device, FIG. 8A is a schematic plan view of the optical device, and FIG. 8B is a schematic cross-sectional view of the optical device. In addition, FIG.8 (b) shows the AA cross section in Fig.8 (a). FIG. 9 is a cross-sectional view of a main part of the optical device. FIG. 9 is a schematic perspective view of the BB cross section in FIG. The configuration of the optical device 800 will be described with reference to FIGS. The liquid crystal light valve 1 will be described as the light valve 71.

  The optical device 800 includes a light valve cooling frame 110 as a light modulation element cooling frame, a light valve 71, a light valve fixing frame 120, a packing 130, an elastic member 140, and a heat conducting member 150.

  The light valve cooling frame 110 is formed of an aluminum alloy that is a member having high thermal conductivity, and has a substantially rectangular outer shape. In addition, outside the area of the image forming area 71a of the light valve 71 (inside the area indicated by the two-dot chain line in FIG. 8A), the opening 114 has a substantially similar shape with a certain distance secured from the outer shape of the image forming area 71a. Is formed. A light valve guide 115 for guiding the light valve 71 is formed along the end of the opening 114 on which light flux enters (hereinafter referred to as the incident side). The light valve guide portion 115 is formed with a light valve receiving surface portion 116 that serves as a surface for holding the light valve 71. Specifically, the light valve receiving surface portion 116 is formed on a light valve facing surface receiving surface portion 116a formed in the X / Z plane and a surface (Y • Z plane) substantially perpendicular to the light valve facing surface receiving surface portion 116a. A light valve side surface receiving surface portion 116b is formed.

  In addition, the light valve cooling frame 110 is a packing that guides and fixes the packing 130 (130a) to a surface on the outer incident side of the light valve guide portion 115 (this surface is referred to as a light valve fixing frame contact surface 110a). The fixing portion 112a has a concave cross section and is formed in a round while maintaining a predetermined distance from the opening 114. In addition, on the light valve fixing frame abutting surface 110a, a hollow portion 111 for holding a predetermined distance from the packing fixing portion 112a and enclosing the liquid refrigerant 90 has a concave cross section outside the packing fixing portion 112a. It is formed in a circle. Further, on the light valve fixing frame contact surface 110a, a packing fixing portion 112b that guides and fixes the packing 130 (130b) while maintaining a predetermined distance from the hollow portion 111 is formed in a round shape with a concave cross section. Yes. In this manner, by disposing the packing 130 around the hollow portion 111, the light valve fixing frame 120 described later is engaged with the light valve cooling frame 110, thereby leaking the liquid refrigerant 90 sealed in the hollow portion 111. Is preventing.

  In addition, the light valve cooling frame 110 is formed with one engaging protrusion 117 having a substantially trapezoidal cross section at one central portion on the side surface in the substantially rectangular shape in four directions. Further, round holes 119 are formed in the vicinity of the four corners of the light valve cooling frame 110. The hole 119 is a hole into which a positioning pin 83 for fixing the optical device 800 to the cross dichroic prism 81 described later (see FIG. 10) is inserted. Further, a heat radiation fin 118 is formed in a region excluding the engaging protrusion 117 on the side surface portion in the Z direction of the light valve cooling frame 110.

  The light valve fixing frame 120 is formed of a stainless steel alloy, which is a metal plate member having thermal conductivity, and is formed by bending the four directions substantially vertically so as to form a box shape in a substantially rectangular shape in plan view. Yes. Similarly to the opening 114 of the light valve cooling frame 110, the light valve fixing frame 120 is substantially similar to the outside of the image forming area 71a of the light valve 71 with a certain distance from the outer shape of the image forming area 71a. An opening 121 is formed in the shape.

  In addition, when the light valve fixing frame 120 is assembled to the light valve cooling frame 110, the corner portion of the light valve fixing frame 120 has a cutout shape so as to escape the four holes 119 of the light valve cooling frame 110. . Further, on the side surface side of the light valve fixing frame 120, an engagement hole 122 is formed in a substantially rectangular shape at a portion facing the engagement protrusion 117 formed on the side surface side of the light valve cooling frame 110.

  The light valve 71 is configured such that the outer shape of the counter substrate 5 is larger than the outer shape of the TFT array substrate 4 (element substrate), and the light-shielding portion 21 formed on the counter substrate 5 has the outer shape of the counter substrate 5. It is formed to the end vicinity. A surface area of the counter substrate 5 that is outside the outer shape of the TFT array substrate 4 is a contact portion 7 for tightly fixing to the light valve cooling frame 110.

  The heat conducting member 150 includes a metal material such as aluminum in a powdery state, and uses a member having elasticity. A metal material other than aluminum can also be used. It is preferable to use a member having thermal conductivity and elasticity.

The assembly of the optical device 800 will be described.
Ring-shaped packings 130a and 130b having a round cross section are stored in packing fixing portions 112a and 112b formed on the light valve fixing frame contact surface 110a of the light valve cooling frame 110, respectively. Next, a rod-like heat conducting member 150 having a substantially rectangular cross section is placed on the light valve face receiving surface 116a with one side contacting the light valve side receiving surface 116b. Next, the contact portion 7 of the light valve 71 is placed from the incident side so as to come into contact with the surface portion facing the surface portion of the heat conducting member 150 placed on the light valve facing surface portion 116a. Next, a sheet-like elastic member 140 having a substantially rectangular cross section is placed on the outer edge of the counter substrate 5 of the light valve 71.

  After assembling in the above-described form, the light valve fixing frame 120 is placed on the light valve cooling frame 110 from the incident side. At that time, the light valve fixing frame 120 is pressed from the incident side, and the engagement hole 122 of the light valve fixing frame 120 is engaged with the engagement protrusion 117 of the light valve cooling frame 110. As a result, the light valve cooling frame 110 is engaged with the light valve fixing frame 120, thereby pressing the heat conducting member 150 and the elastic member 140 to pinch (hold) the light valve 71. As a result, the light valve facing surface 116 a and the light blocking portion 21 of the light valve 71 are tightly fixed via the heat conducting member 150.

Further, the light valve fixing frame 120 is engaged with the light valve cooling frame 110 to press the packings 130 a and 130 b and abut against the light valve fixing frame abutting surface 110 a of the light valve cooling frame 110. Thereby, a hollow space region to be sealed is formed by the hollow portion 111 and the light valve fixing frame 120. Note that a hole (not shown) that communicates from the side surface of the light valve cooling frame 110 to the hollow space region is formed, and by injecting the liquid refrigerant 90 from the hole, a hollow space region (hereinafter, referred to as a hollow space region) is formed. The liquid refrigerant 90 is enclosed in the hollow portion 111). A liquid refrigerant 90 necessary and sufficient for cooling is sealed inside the hollow portion 111. After sealing, the hole is sealed with a sealing material or the like.
The liquid refrigerant 90 is desirably transparent and excellent in heat transfer properties. In this embodiment, ethylene glycol is used. In addition, an antifreeze aqueous solution such as propylene glycol may be used.
Thus, the optical device 800 is completed.

  FIG. 10 is a schematic sectional view in which the optical device is fixed to the cross dichroic prism. 10 shows an optical device 800 configured in the light valve 71, an incident-side light conversion unit 200 as another optical device configured in the incident polarizing plate 72, and another optical device configured in the exit polarizing plate 73. The exit side light conversion unit 300 is similarly fixed to the cross dichroic prism 81.

  Note that the optical device 800, the incident-side light conversion unit 200, and the emission-side light conversion unit 300 shown in FIG. 10 are light valves 71 as light modulation elements for green light constituting the light modulation / conversion unit 70 shown in FIG. (71G), the case where it comprises with respect to the incident polarizing plate 72 (72G) and the output polarizing plate 73 (73G) as a light conversion element is demonstrated as an example. In the following description, reference numerals such as “G” representing colored light are omitted.

The configuration of the incident side light conversion unit 200 will be briefly described.
The incident polarizing plate 72 and the incident polarizing plate cooling frame 210 that holds the incident polarizing plate 72 are collectively referred to as an incident-side light conversion unit 200.

The incident polarizing plate cooling frame 210 is formed of an aluminum alloy that is a member having high thermal conductivity and has a substantially rectangular outer shape. Further, a heat radiation fin 215 is formed on the outer periphery of the incident polarizing plate cooling frame 210. The incident polarizing plate cooling frame 210 has an opening having a similar shape larger than the outer shape of the incident polarizing plate 72 at a substantially central position, and is transparent for guiding and holding the incident polarizing plate 72 in the opening. A transparent member holding portion 214 for the member 212 is formed. The transparent member holding part 214 is configured and held in parallel so that two transparent members 212 (212a and 212b) having a plate-like flat part form a gap via a sealing material 213. In addition, the incident polarizing plate 72 is tightly fixed to one surface of the transparent member 212a which is the front side of the transparent member 212.
In this embodiment, sapphire glass having high thermal conductivity and good translucency is used as the two transparent members 212 (212a and 212b).

  Further, inside the incident polarizing plate cooling frame 210, a refrigerant storage part 211b for storing the liquid refrigerant 90 is formed. The two transparent members 212a and 212b, the transparent member holding part 214, and the sealing material 213 form a refrigerant heat conduction part 211a having a substantially uniform gap. The refrigerant heat conducting portion 211a covers the light transmission region 72a of the incident polarizing plate 72. And the refrigerant | coolant heat conduction part 211a and the refrigerant | coolant storage part 211b are connected by the connection part 211c. In addition, the connection part 211c has the same shape as the cross-sectional shape perpendicular to the Z direction of the refrigerant heat conduction part 211a, and connects the refrigerant heat conduction part 211a and the refrigerant storage part 211b. In addition, a liquid refrigerant 90 is sealed inside the refrigerant heat conducting unit 211a, the refrigerant accumulating unit 211b, and the connecting unit 211c. And the hollow part 211 is comprised combining the refrigerant | coolant heat conduction part 211a, the refrigerant | coolant storage part 211b, and the connection part 211c. Liquid refrigerant 90 necessary and sufficient for cooling is accumulated in the refrigerant accumulation unit 211b.

  In addition, at the four corners of the incident polarizing plate cooling frame 210 having a substantially rectangular outer shape, the incident side light conversion unit 200 is placed at a predetermined position with respect to the cross dichroic prism 81 constituting the color combining optical system 80. A hole 216 into which a positioning pin 83 for adjusting and fixing the position is inserted is formed. The predetermined position is a position sufficiently separated from the liquid crystal surface of the light valve 71 as a focal plane on which the liquid refrigerant 90 in the hollow portion 211 forms an optical image with respect to the Y direction in the drawing, With respect to the planar direction, there is no pixel shift.

  The positioning pin 83 and the hole 216 are fixed using, for example, an ultraviolet curable adhesive. In addition, the positioning pin 83 is fixed to a fixing member 82 installed on the cross dichroic prism 81, and the optical device 800 and the emission side light conversion unit 300 are also adjusted in position so that each is at a predetermined position. Fixed.

The cooling operation in the incident side light conversion unit 200 will be described.
In the incident-side light conversion unit 200, the incident polarizing plate 72 transmits polarized light beams in one direction among the color lights separated by the color separation optical system 42, and does not transmit other light beams. The incident polarizing plate 72 absorbs the light flux that cannot be transmitted as heat, and the incident polarizing plate 72 generates heat due to the absorption. The generated heat is transferred to the transparent member 212a to which the incident polarizing plate 72 is closely fixed. The heat transferred is transferred to the liquid refrigerant 90 in contact therewith. Through this heat transfer path, the heat generated in the incident polarizing plate 72 is transferred to the liquid refrigerant 90 of the refrigerant heat conducting unit 211a. By transferring heat to the liquid refrigerant 90 of the refrigerant heat conduction unit 211a, the connection part 211c connected to the refrigerant heat conduction part 211a and the liquid refrigerant 90 sealed in the refrigerant accumulation part 211b cause natural convection. Due to this natural convection, the heat transferred to the liquid refrigerant 90 of the refrigerant heat conducting section 211a is cooled. By repeating such a flow, the heat generated in the incident polarizing plate 72 is cooled.

Since the configuration of the optical device 800 configured in the light valve 71 has been described above, the fixing to the cross dichroic prism 81 will be described here.
In the optical device 800, a positioning pin 83 is inserted into a hole 119 formed in the light valve cooling frame 110, and the position is adjusted and fixed to a predetermined position with respect to the cross dichroic prism 81. The predetermined position is a position where the liquid crystal surface (liquid crystal layer 8) of the light valve 71 becomes a focus with respect to the Y direction shown in the figure, and a position where there is no pixel shift with respect to the X / Z plane direction shown in the figure. .

The cooling operation in the optical device 800 will be described.
In the optical device 800, the light valve 71 generates heat by modulating the polarized light beam that has been transmitted through the incident polarizing plate 72 and emitted in one direction according to image information to form an optical image.
The heat generated in the light valve 71 is conducted through the light-shielding portion 21 that is composed of a single aluminum or a laminate of another metal film and has a sufficiently large cross-sectional area with respect to the direction in which heat is conducted. Then, the heat conducted through the light shielding portion 21 is transferred to the light shielding portion 21 in the area of the contact portion 7, and the heat conduction member 150 installed between the contact portion 7 and the light valve facing surface receiving surface portion 116 a from the contact portion 7. Conducts heat. The heat conducted through the heat conducting member 150 is conducted to the light valve facing surface 116a. It also conducts to the light valve side receiving surface portion 116b provided.

  The heat conducted to the light valve receiving surface portion 116 (116a, 116b) is conducted inside the light valve cooling frame 110, is radiated from the outer surface of the light valve cooling frame 110, and is conducted from the hollow portion 111 to the liquid refrigerant 90. To do. When heat is conducted to the liquid refrigerant 90, the liquid refrigerant 90 inside the hollow portion 111 causes natural convection. By this natural convection, the heat transferred to the liquid refrigerant 90 in the hollow portion 111 is efficiently cooled. By repeating such a flow, the heat generated in the light valve 71 is cooled. A part of the heat conducted inside the light valve cooling frame 110 is conducted to the fins 118 and dissipated to improve the cooling effect.

The configuration of the emission side light conversion unit 300 will be briefly described.
The exit polarizing plate 73 and the exit polarizing plate cooling frame 310 that holds the exit polarizing plate 73 are collectively referred to as an exit side light conversion unit 300.

  The emission side light conversion unit 300 has the same configuration as that of the incident side light conversion unit 200 described above. However, the main difference is that the polarization axis of the exit polarizer 73 is set to be orthogonal to the polarization axis of the entrance polarizer 72. Other structures are the same as those of the incident side light conversion unit 200.

The exit polarizing plate cooling frame 310 is formed of an aluminum alloy that is a member having high thermal conductivity, and has a substantially rectangular outer shape. In addition, heat radiation fins 315 are formed on the outer periphery of the exit polarizing plate cooling frame 310. In addition, the exit polarizing plate cooling frame 310 has an opening having a similar shape larger than the outer shape of the exit polarizing plate 73 at substantially the center, and transparent for guiding and holding the exit polarizing plate 73 in the opening. A transparent member holding portion 314 for the member 312 is formed. The transparent member holding part 314 is configured and held in parallel so that two transparent members 312 (312a, 312b) having a plate-like flat part form a gap via a sealing material 313. In addition, the emission polarizing plate 73 is closely fixed to one surface of the transparent member 312a which is the front side of the transparent member 312.
As the two transparent members 312 (312a and 312b), in this embodiment, sapphire glass having high thermal conductivity and good translucency is used.

  In addition, a refrigerant accumulation unit 311 b that accumulates the liquid refrigerant 90 is formed inside the exit polarizing plate cooling frame 310. The two transparent members 312a and 312b, the transparent member holding portion 314, and the sealing material 313 form a refrigerant heat conduction portion 311a having a substantially uniform gap. The refrigerant heat conducting portion 311a covers the light transmission region 73a of the exit polarizing plate 73. And the refrigerant | coolant heat conduction part 311a and the refrigerant | coolant storage part 311b are connected by the connection part 311c. The connecting portion 311c has the same shape as the cross-sectional shape perpendicular to the Z direction of the refrigerant heat conducting portion 311a, and connects the refrigerant heat conducting portion 311a and the refrigerant accumulating portion 311b. In addition, a liquid refrigerant 90 is sealed inside the refrigerant heat conducting unit 311a, the refrigerant accumulating unit 311b, and the connecting unit 311c. And the hollow part 311 is comprised combining the refrigerant | coolant heat conductive part 311a, the refrigerant | coolant storage part 311b, and the connection part 311c. Liquid refrigerant 90 necessary and sufficient for cooling is accumulated in the refrigerant accumulation unit 311b.

  In addition, at the four corners of the exit polarizing plate cooling frame 310 having a substantially rectangular outer shape, the exit side light conversion unit 300 is located at a predetermined position with respect to the cross dichroic prism 81 constituting the color combining optical system 80. A hole 316 for inserting a positioning pin 83 for adjusting and fixing the position is formed. The predetermined position is a position sufficiently separated from the liquid crystal surface of the light valve 71 as a focal plane on which the liquid refrigerant 90 in the hollow portion 311 forms an optical image with respect to the Y direction in the drawing, With respect to the planar direction, there is no pixel shift.

  Since the cooling operation in the emission side light conversion unit 300 is the same as the cooling operation of the incident side light conversion unit 200 described above, description thereof is omitted.

  The incident-side light conversion unit 200, the optical device 800, and the emission-side light conversion unit 300 described above are fixed to the positioning pin 83, fixed to the cross dichroic prism 81 via the fixing member 82, and unitized. The optical device described above is configured with respect to the incident light polarizing plate 72 (72G), the light valve 71 (71G), and the exit polarizing plate 73 (73G) for green light constituting the light modulation / conversion unit 70. Yes, an optical device can be configured similarly for red light and blue light. Further, the optical devices for red light and blue light are also fixed to the corresponding surface portions of the cross dichroic prism 81 and unitized.

According to the embodiment described above, the following effects can be obtained.
(1) According to the optical device 800 of the present embodiment, the hollow portion 111 in which the liquid refrigerant 90 is enclosed is formed in a region corresponding to the outside of the image forming region 71a of the light valve 71 (liquid crystal light valve 1). Therefore, the liquid refrigerant 90 does not exist in the image forming area 71a of the light valve 71. As a result, the image quality of the projected image does not deteriorate due to bubbles generated in the liquid refrigerant 90 or fluctuation due to temperature non-uniformity.
Further, since the light shielding portion 21 is formed in the region of the counter substrate 5 that shields the light traveling toward the region between the adjacent pixel electrodes 20 and does not shield the incident light traveling toward the effective display region of the pixel electrode 20. The light traveling toward the pixel electrode 20 is not weakened.
Further, since the light shielding portion 21 is formed with thermal conductivity in the cross section of the cross section of the inner surface in the predetermined region of the counter substrate 5, the cross sectional area in the direction in which heat is conducted must be sufficiently large. The heat generated inside the light valve 71 can be efficiently conducted.
Further, since the light shielding portion 21 is closely fixed to the light valve cooling frame 110 (light valve facing surface portion 116a) via the heat conducting member 150 in the contact portion 7, the heat conducted to the light shielding portion 21 is reduced to the light valve. Conducted efficiently to the cooling frame 110. The heat conducted to the light valve cooling frame 110 is radiated from the outer surface of the light valve cooling frame 110 and is conducted to the liquid refrigerant 90 in the hollow portion 111. When heat is conducted to the liquid refrigerant 90, natural convection of the liquid refrigerant 90 occurs, and the heat is efficiently cooled. Therefore, efficient cooling can be realized without causing image quality degradation.

(2) According to the projector 900 of the present embodiment, the optical device 800 is provided, a light beam is emitted from the lamp 31 as the light source device 30, and the optical device 800 modulates according to image information to form an optical image. The optical image formed by the projection lens 86 constituting the projection unit 85 is projected. Thereby, by having the effect of the optical apparatus 800 mentioned above, the heat which generate | occur | produces in the optical apparatus 800 can be cooled efficiently, and a temperature characteristic can be improved.
(Second Embodiment)

  FIG. 11 is a schematic cross-sectional view showing the structure of an optical device according to the second embodiment of the present invention. The structure and operation of the optical device 801 will be described with reference to FIG.

  The optical device 801 of this embodiment has a structure that does not use the heat conducting member 150 shown in FIG. The light valve 71 is held by being pressed and held between the light valve facing surface portion 116a of the light valve cooling frame 110 and the light valve fixing frame 120 with the elastic member 140 interposed therebetween. As a result, the contact portion 7 of the light valve 71 and the light valve facing surface portion 116a are brought into direct contact with each other, and the light shielding portion 21 formed on the light valve 71 and the light valve facing surface portion 116a are brought into close contact with each other.

Note that the components described above are different from the first embodiment, and the other parts are the same as those of the first embodiment. Therefore, in FIG. 11, the same reference numerals as those in the first embodiment are added to the same components as those in the first embodiment.
In addition, the cooling operation (heat conduction operation and cooling operation to each component) related to the heat generated by the light valve 71 of the optical device 801 is the same as that in the first embodiment, and thus the description thereof is omitted.

According to the above-described embodiment, although the heat conduction efficiency between the light shielding portion 21 and the light valve facing surface portion 116a is slightly lowered, the heat generated in the light valve 71 is first generated without using the heat conduction member 150. Cooling can be performed in substantially the same manner as in the embodiment. Further, since the heat conducting member 150 need not be used, the assembling property of the optical device 801 is improved.
(Third embodiment)

FIG. 12 is a block diagram showing a structure of an optical device according to the third embodiment of the present invention. The block diagram will be described with reference to FIG. In the description of the incident side light conversion unit 200, the emission side light conversion unit 300, and the optical device 800, the components shown in FIG. 10 are used as appropriate.
The optical device 802 of the present embodiment corresponds to each color light (red light (R), green light (G), blue light (B)) separated by the color separation optical system 42, and the incident side light conversion unit 200. The optical device 800 and the emission side light conversion unit 300 are used. Then, for each color light, for the unit constituted by the incident side light conversion unit 200, the optical device 800, and the emission side light conversion unit 300, red light is unit 700R, green light is unit 700G, and blue light is unit 700B. It is configured as. In FIG. 12, only the green light unit 700G, the incident-side light conversion unit 200, the optical device 800, and the emission-side light conversion unit 300 are shown using schematic diagrams, and the other color lights are omitted. Then, the optical device 802 of the present embodiment forcibly causes the liquid refrigerant 90 to flow (forced convection) in each of the units 700R, 700G, and 700B, and is generated by the incident polarizer 72, the light valve 71, and the exit polarizer 73. It is the structure which cools the heat to do.

  The optical device 802 includes a delivery tank 510, a return tank 520, and a reserve tank 530 as the refrigerant accumulation unit 500 that accumulates the liquid refrigerant 90. In addition, the optical device 802 includes a radiator 540 that concentrates heat dissipation and a pump 550 as a circulation drive unit that forcibly circulates the liquid refrigerant 90. The optical device 802 includes a circulation unit 600 that connects the units 700R, 700G, and 700B for each color light, the refrigerant storage unit 500, the radiator 540, the pump 550, and the like to form a flow path 610 that circulates the liquid refrigerant 90. ing.

A connection relationship between each component and the flow path 610 will be described.
Pump 550 and delivery tank 510 are connected by flow path 610. Also, the delivery tank 510 and each color light unit 700R, 700G, 700B are connected by a flow path 610. Specifically, for example, the connection will be described by taking the unit 700G as an example. One of the flow paths 610 from the delivery tank 510 is connected to the refrigerant storage part 211b of the hollow part 211 of the incident side light conversion unit 200 via the coupler 560. Connected. Further, one of the flow paths 610 from the delivery tank 510 is connected to the hollow portion 111 of the optical device 800 via a coupler 560. In addition, one of the flow paths 610 from the delivery tank 510 is connected to the refrigerant accumulation unit 311 b of the hollow portion 311 of the emission side light conversion unit 300 via the coupler 560.

  Then, one of the other flow paths 610 is connected to the refrigerant storage part 211 b of the hollow part 211 of the incident side light conversion unit 200 via the coupler 560, and the other of the flow paths 610 is connected to the return tank 520. Similarly, one of the other flow paths 610 is also connected via the coupler 560 from the hollow portion 111 of the optical device 800 and the refrigerant accumulation portion 311b of the hollow portion 311 of the emission side light conversion unit 300. The other is connected to the return tank 520.

  The connection of the flow path 610 of the unit 700G described above is similarly connected in the units 700R and 700B. The units 700R, 700G, and 700B are connected in parallel between the delivery tank 510 and the return tank 520, and each color light optical device 800 (800R, 800G, and 800B) that constitutes the units 700R, 700G, and 700B. ), Each incident side light conversion unit 200 (200R, 200G, 200B) and each emission side light conversion unit 300 (300R, 300G, 300B) are also connected in parallel. Specifically, nine flow paths 610 from the delivery tank 510 are branched and connected to the incident-side light conversion units 200, the optical devices 800, and the emission-side light conversion units 300 of the units 700R, 700G, and 700B. Yes.

The return tank 520 is connected to the radiator 540 through the flow path 610, the radiator 540 is connected to the reserve tank 530 and the flow path 610, and the reserve tank 530 is connected to the pump 550 through the flow path 610.
As described above, in the optical device 802 of the present embodiment, the respective components are connected by the flow path 610 of the circulation unit 600.

  In the figure, the flow path 610 is indicated by an arrow, and the flow direction of the liquid refrigerant 90 is also indicated. Further, the arrows in the incident side light conversion unit 200, the optical device 800, and the emission side light conversion unit 300 in the unit 700G schematically indicate the flow direction of the liquid refrigerant 90.

The operation of the liquid refrigerant 90 in the optical device 802 will be described.
When the pump 550 is driven, the liquid refrigerant 90 is discharged. The discharged liquid refrigerant 90 flows into the delivery tank 510, and the liquid refrigerant 90 in the delivery tank 510 is made into each incident side light conversion unit 200, each optical device 800, which constitutes each color light unit 700R, 700G, 700B, The light is sent to each emission side light conversion unit 300.

Here, the operation of the liquid refrigerant 90 will be described by taking the green light unit 700G as an example.
Through the flow path 610 from the delivery tank 510, the liquid refrigerant 90 flows into the refrigerant accumulation part 211b of the hollow part 211 of the incident side light conversion unit 200. As a result, the liquid refrigerant 90 flows inside the hollow portion 211 and flows out of the refrigerant accumulation portion 211b. At this time, heat generated in the incident polarizing plate 72 is transferred to the liquid refrigerant 90 flowing in the hollow portion 211 and flows out, whereby the heat generated in the incident polarizing plate 72 is cooled. The liquid refrigerant 90 that has flowed out of the refrigerant accumulation unit 211 b flows into the return tank 520 through the flow path 610.

  Further, the liquid refrigerant 90 flows from the delivery tank 510 into the hollow portion 111 of the optical device 800. Thereby, the liquid refrigerant 90 flows inside the hollow portion 111 and flows out of the hollow portion 111. At this time, the heat generated in the light valve 71 is cooled by transferring the heat to the liquid refrigerant 90 flowing in the hollow portion 111 and flowing out. The liquid refrigerant 90 that has flowed out of the hollow portion 111 flows into the return tank 520 through the flow path 610.

  Further, the liquid refrigerant 90 flows from the delivery tank 510 into the refrigerant accumulation part 311b of the hollow part 311 of the emission side light conversion unit 300. As a result, the liquid refrigerant 90 flows inside the hollow portion 311 and flows out of the refrigerant accumulation portion 311b. At this time, the heat generated in the injection polarizing plate 73 is cooled by transferring the heat generated in the injection polarizing plate 73 to the liquid refrigerant 90 flowing in the hollow portion 311 and flowing out. The liquid refrigerant 90 that has flowed out of the refrigerant accumulation unit 311 b flows into the return tank 520 through the flow path 610.

  In the units 700R and 700B, the operation of the liquid refrigerant 90 similar to that described above is performed.

  The liquid refrigerant 90 containing the heat flowing into the return tank 520 flows into the radiator 540 through the flow path 610. The radiator 540 cools the liquid refrigerant 90 containing heat. The cooled liquid refrigerant 90 flows out of the radiator 540 and flows into the reserve tank 530 through the flow path 610. The liquid refrigerant 90 flowing into the reserve tank 530 flows through the flow path 610 and is sucked into the pump 550.

  By repeating the forced flow of the liquid refrigerant 90 by the pump 550, the heat generated in the incident polarizer 72, the light valve 71, and the exit polarizer 73 for each color light is cooled.

  The sending tank 510 and the return tank 520 constituting the refrigerant accumulating unit 500 are installed in the vicinity of the cross dichroic prism 81 via positioning pins 83 that fix the units 700R, 700G, and 700B at their respective positions. Thereby, the routing of the flow path 610 is simplified. The reserve tank 530 is installed in the vicinity of a casing (not shown) that constitutes the exterior of the projector 900 from the standpoint of maintenance and the like. Thereby, the liquid refrigerant 90 can be supplied to the reserve tank 530.

According to the embodiment described above, the following effects can be obtained.
(1) According to the optical device 802 of this embodiment, the pump 550 forcibly circulates the liquid refrigerant 90 in the flow path 610 formed by the circulation unit 600, so that the hollow part 111 connected to the circulation unit 600 is used. In the hollow portions 211 and 311, forced convection occurs inside. Thereby, the heat generated in the light valve 71, the incident polarizer 72, and the exit polarizer 73 is further efficiently cooled by forced circulation and convection (flow). Therefore, the optical device 802 and the projector 900 that can realize more efficient cooling by the liquid refrigerant 90 can be provided.
(Fourth embodiment)

  FIG. 13 is a schematic plan view showing the structure of the optical device according to the fourth embodiment of the present invention. The structure and operation of the optical device 803 will be described with reference to FIG.

  The optical device 803 of this embodiment is configured by installing a hollow portion 161, a gear pump 551, a reserve tank 531, a circulation portion 601, etc. in a light valve cooling frame 160. The liquid refrigerant 90 is sealed in the hollow portion 161, the gear pump 551, the reserve tank 531, and the circulation portion 601, and the liquid refrigerant 90 is forced to flow (convection).

  In the optical device 803, the light valve cooling frame 160 is formed of an aluminum alloy that is a member having high thermal conductivity, and has a substantially rectangular outer shape. In addition, heat radiation fins 168 are formed on the outer periphery of the light valve cooling frame 160.

  In addition, an opening is formed in a substantially similar shape that secures a certain distance from the outer shape of the image forming area 71a outside the area of the image forming area 71a of the light valve 71 (inside the area indicated by the two-dot chain line in FIG. 13). A light valve guide 165 for guiding and holding the light valve 71 is formed in the opening. In the present embodiment, a configuration similar to that of the light valve guide 115 shown in FIG. 9 described in the first embodiment is configured, and the light valve 71 includes a heat conduction member (not shown) and an elastic member. By being pressed by a light valve fixing frame (not shown) in a form sandwiched between (not shown), it is held between the light valve cooling frame 160 and the light valve fixing frame (not shown).

  The hollow portion 161 is installed in close contact with the back side (light emission side) of the light valve cooling frame 160 outside the image forming area 71a of the light valve 71. The hollow portion 161 is composed of a refrigerant heat conduction tube 161a that is a tube having a substantially rectangular cross section. Moreover, the refrigerant | coolant heat conductive tube 161a is comprised with the member with high heat conductivity. Further, the refrigerant heat conduction tube 161 a is formed and installed so as to make a circuit along the outer periphery of the light valve cooling frame 160.

  The refrigerant heat conduction tube 161 a has both ends that open, and one opening end is connected to the reserve tank 531 via a flow path 611 formed by the circulation unit 601. The other opening end is connected to a discharge port 551a of a gear pump 551 as a circulation drive unit. The suction port 551b of the gear pump 551 is connected to the reserve tank 531 via a flow path 611 formed by the circulation unit 601. The gear pump 551 is used because it can be reduced in size and can be switched between the forward direction and the reverse direction with certainty. Note that the reserve tank 531, the gear pump 551, and the flow path 611 are installed in close contact with the back side of the light valve cooling frame 160, similarly to the refrigerant heat conduction pipe 161a. Thus, the optical device 803 is configured.

  As described above, the liquid refrigerant 90 is sealed inside the refrigerant heat conduction pipe 161 a, the reserve tank 531, the flow path 611, and the gear pump 551 configured to be connected. In particular, the reserve tank 531 is filled with a liquid refrigerant 90 necessary and sufficient for cooling the heat of the light valve 71.

The cooling operation of the optical device 803 will be described.
The heat generated in the light valve 71 is transmitted through a light shielding portion (not shown), conducted from a contact portion (not shown) through a heat conducting member (not shown), and conducted to the light valve cooling frame 160. The heat conducted to the light valve cooling frame 160 is conducted to the hollow portion 161 and conducted to the liquid refrigerant 90 inside. Here, when the gear pump 551 is driven, the liquid refrigerant 90 is discharged from the discharge port 551a. The discharged liquid refrigerant 90 causes the liquid refrigerant 90 that has been conducted by the heat generated by the light valve 71 to flow inside the refrigerant heat conduction pipe 161a.

The liquid refrigerant 90 that has flowed inside the refrigerant heat conduction pipe 161 a flows through the flow path 611 and flows into the reserve tank 531. The liquid refrigerant 90 flowing into the reserve tank 531 flows through the flow path 611 and flows into the suction port 551b of the gear pump 551. Due to this flow, the liquid refrigerant 90 conducted by the heat generated by the light valve 71 flows inside the refrigerant heat conduction pipe 161a, and the liquid refrigerant 90 conducted by this heat is cooled. Accordingly, the heat generated in the light valve 71 is cooled. Further, heat is dissipated from the heat dissipating fins 168 formed on the outer periphery of the light valve cooling frame 160 to improve the cooling efficiency.
Note that the arrows shown in the drawing schematically indicate the flow direction of the liquid refrigerant 90.

According to the embodiment described above, the following effects can be obtained.
(1) According to the optical device 803 of the present embodiment, the liquid refrigerant 90 is forcibly circulated inside the refrigerant heat conduction tube 161a by the gear pump 551, so that forced convection occurs inside the hollow portion 161. Thereby, the heat generated in the light valve 71 is efficiently cooled by forced circulation and convection (flow). Therefore, more efficient cooling by the liquid refrigerant 90 can be realized.

  (2) The light valve cooling frame 160 has an opening formed in a similar shape in which a certain distance is secured from the outer shape of the image forming area 71a outside the image forming area 71a of the light valve 71. A light valve guide 165 for guiding and holding the bulb 71 is formed to hold the light bulb 71. Thereby, since the liquid refrigerant 90 does not exist in the image forming area 71a of the light valve 71, bubbles generated in the liquid refrigerant 90, fluctuation due to non-uniform temperature, and the like are not formed as an optical image. Is not projected as a projected image, the image quality of the projected image is not deteriorated. Therefore, the image quality is not deteriorated by the liquid refrigerant 90, and efficient cooling can be realized.

(3) According to the optical device 803 of the present embodiment, the hollow portion 161, the gear pump 551, the reserve tank 531, and the flow path 611 can be installed in the light valve cooling frame 160, and thus the coupler 560 for connection in the third embodiment. The structure becomes simple and a compact cooling structure can be obtained.
Further, since the configuration for performing the forced convection is completely provided in the light valve cooling frame 160, it is not necessary to enclose the liquid refrigerant 90 when assembling the projector (it is necessary to enclose only when the optical device 803 is assembled). ), It is possible to minimize the risk of deteriorating the image quality of the projected image, such as dust contamination and the generation of bubbles due to the outflow of the liquid refrigerant 90.
In addition, since the optical device 803 is manufactured in a compact cooling structure, the assembling property is improved, thereby improving the reliability of the optical device 803.

(4) According to the optical device 803 of the present embodiment, by configuring the optical device 803 for the light valve 71 for each color light, the above-described effects are similarly exerted on the light valve 71 for each color light. Can do.
(Fifth embodiment)

  FIG. 14 is a schematic sectional view showing the structure of an optical device according to the fifth embodiment of the present invention. FIG. 14 is a schematic sectional view of the counter substrate 5 of the light valve 71 (liquid crystal light valve 1). FIG. 14 shows a positional relationship in which a liquid crystal layer (not shown) is formed above the plane of the paper, and the light beam enters from the lower side of the counter substrate 5. The structure and operation of the optical device 804 will be described with reference to FIG.

  The optical device 804 of the present embodiment has a gap portion 730 in which the liquid refrigerant 90 is enclosed in the cross section where the light shielding portion 721 is formed on the inner surface of the counter substrate 5 of the light valve 71 (liquid crystal light valve 1). ing. Specifically, as shown in FIG. 4B, a range that falls within an area Σ surrounded by a line representing incident light α, a line representing incident light β, and a line representing the surface of counter substrate 5. In the triangular cross section (groove 29), a gap 730 is formed in a cross-sectional area near the apex P, and a light-shielding section 721 is formed in the base cross-sectional area. A common electrode 57 is formed on the inner surface of the counter substrate 5 (including the surface of the light shielding portion 721), and the alignment film 22b is formed on the surface thereof.

  FIG. 15 is a flowchart showing the manufacturing process of the gap. 16 is a schematic cross-sectional view for each step of the flowchart shown in FIG. A manufacturing process of the gap 730 will be described with reference to FIGS. 15 and 16. In the actual manufacturing, the gap portions 730 are collectively formed on the plurality of counter substrates 5 using a large-sized mother substrate. In this embodiment, a part of the gap portions 730 is taken up. ,explain.

  As shown in FIG. 15, first, a step (ST31) of forming a groove portion 29 for forming the light shielding portion 721 and the gap portion 730 on the inner surface of the counter substrate 5 is performed. Next, a step (ST32) of forming a gap portion 740 in a cross-sectional area that will later become the gap portion 730 is performed. Next, a step (ST33) of forming a light shielding portion 721 in a cross-sectional area above the gap portion 740 so as to cover the gap portion 740 is performed. Finally, the gap portion 730 is formed by removing the gap portion 740 and performing the step of forming the gap portion 730 (ST34). In addition, a light shielding portion 721 is also formed.

  FIG. 16A shows a step (ST31) of forming a groove portion 29 for forming the light shielding portion 721 and the gap portion 730 on the inner surface of the counter substrate 5, and machining or A groove 29 having the above-described triangular shape is formed by etching or the like. In the present embodiment, the machining is performed, and in detail, the groove 29 is formed by cutting.

  FIG. 16B shows a step (ST32) of forming a gap portion 740 in a cross-sectional area that will later become the gap portion 730, and the cross-sectional shape is in the vicinity of the apex P of the groove portion 29 formed in a triangular shape. In the cross-sectional area, the gap portion 740 is formed with a material different from the material for forming the light shielding portion 721. Note that a material different from the material forming the light shielding portion 721 is preferably a material that can be easily removed later, and a material having a low melting point or a property that can be easily dissolved by a chemical is preferable.

  FIG. 16C shows a step (ST33) of forming the light shielding portion 721, and the gap portion 740 is formed in a cross-sectional area (base cross-sectional area) other than the cross-sectional area where the gap portion 740 is formed. A light shielding portion 721 is formed so as to cover. In addition, when forming the light shielding part 721, although depending on the thickness of the light shielding part 721, when comparatively thin, methods, such as vapor deposition and sputtering, can be used. Further, when the light shielding portion 721 is thick, a method such as screen printing can be used. In any case, the light shielding portion 721 can be formed at an accurate portion by masking the region other than the light shielding portion 721 with a photoresist.

  FIG. 16D shows a step of forming the gap 730 (ST34). The gap 740 is removed to form a hollow space region surrounded by the cross section of the groove 29 and the light shielding portion 721. A gap 730 is formed. As a removal method, a method of forming the gap portion 740 with a material having a melting point lower than that of the light shielding portion 721 and dissolving the material forming the gap portion 740 by applying high heat can be used. Alternatively, a method of dissolving a material for forming the gap portion 740 using a chemical can be used.

In addition, the liquid refrigerant 90 is sealed in the gap portion 730 formed by each process described above in a subsequent process. Further, the light valve 71 (liquid crystal light valve 1) is formed by using the counter substrate 5 formed in this way. Further, a gap portion 730 is also extended along with the light shielding portion 721 in the contact portion 7 shown in FIGS.
Using the light valve 71 formed in this way, the optical device 804 is completed by assembling in the same manner as shown in FIGS.

According to the embodiment described above, the following effects can be obtained.
(1) According to the optical device 804 of the present embodiment, the heat generated in the light valve 71 is conducted to the light shielding portion 721 and from the contact portion 7 to the light valve cooling frame. In addition, since the gap portion 730 in which the liquid refrigerant 90 is sealed is provided in the groove portion 29 in the cross section in which the light shielding portion 721 of the light valve 71 is formed, the heat generated in the light valve 71 is reduced by the light shielding portion 721. The heat conducted to the light shielding part 721 is also transferred to the liquid refrigerant 90 enclosed in the gap part 730. The heat transferred to the liquid refrigerant 90 is more efficiently transferred to the contact portion 7 by the convection of the liquid refrigerant 90, and can be conducted to the light valve cooling frame. The heat conducted to the light valve cooling frame is efficiently cooled as in the first embodiment.

  (2) In the optical device 804 of the present embodiment, the light shielding part 721 is composed of aluminum alone or a laminate of another metal film on aluminum, and thus has high thermal conductivity, but constitutes the light shielding part 721. Even when the material does not necessarily have high thermal conductivity, the heat conduction can be supplemented by the convection of the liquid refrigerant 90 in the gap 730.

(3) According to the manufacturing method of the gap portion 730 in the optical device 804 of the present embodiment, the gap portion 740 that will later become the gap portion 730 is formed first, and then the light shielding portion so as to cover the gap portion 740. Next, the gap portion 730 can be efficiently formed by removing the gap portion 740 in a removal step (sixth embodiment).

  FIG. 17 is a schematic sectional view showing the structure of an optical device according to the sixth embodiment of the present invention. FIG. 17 is a schematic sectional view of the counter substrate 5 of the light valve 71 (liquid crystal light valve 1). FIG. 17 shows a positional relationship in which a liquid crystal layer (not shown) is formed above the plane of the paper, and a light beam enters from the lower side of the counter substrate 5. The structure and operation of the optical device 805 will be described with reference to FIG.

  In the optical device 805 of the present embodiment, the liquid refrigerant 90 is enclosed in the cross section in which the light shielding portion 721 in the fifth embodiment described above is formed on the inner surface of the counter substrate 5 of the light valve 71 (liquid crystal light valve 1). A hollow tube 760 is installed as a hollow member. Specifically, as shown in FIG. 4B, a range that falls within an area Σ surrounded by a line representing incident light α, a line representing incident light β, and a line representing the surface of counter substrate 5. A hollow tube 760 having a round cross section is installed and fixed with an adhesive 750 in a triangular cross section. Further, a flat portion 770 is formed in a cross-sectional portion other than the hollow tube 760. A common electrode 57 is formed on the inner surface of the counter substrate 5 (including the flat surface formed by the flat portion 770), and the alignment film 22b is formed on the surface.

  FIG. 18 is a flowchart showing a hollow tube installation process. FIG. 19 is a schematic cross-sectional view for each step of the flowchart shown in FIG. The installation process of the hollow tube 760 is demonstrated using FIG. 18, FIG. When actually manufacturing, the hollow tube 760 is collectively installed on the plurality of counter substrates 5 using a large-area mother substrate. In the present embodiment, a part of the hollow tube 760 is provided. Take up and explain.

  As shown in FIG. 18, the process (ST41) which forms the groove part 29 for installing the hollow tube 760 in the inner surface of the opposing board | substrate 5 first is performed. Next, a step (ST42) of filling an adhesive 750 for fixing the hollow tube 760 to be installed is performed. Next, a step of installing the hollow tube 760 (ST43) is performed. Next, the hollow tube 760 is installed and fixed by performing the process (ST44) of forming the flat part 770 in the groove part 29 after installing the hollow tube 760. In the next step, the common electrode 57 and the alignment film 22b are formed.

  FIG. 19A shows a step (ST41) of forming a groove 29 for installing the hollow tube 760 on the inner surface of the counter substrate 5. The inner surface of the counter substrate 5 is machined, etched, or the like. Then, a groove 29 having a triangular cross-sectional shape is formed. In the present embodiment, the machining is performed, and in detail, the groove 29 is formed by cutting.

  FIG. 19B shows a step (ST42) of filling the adhesive material 750 for fixing the hollow tube 760, and a cross section in the vicinity of the apex P of the groove 29 formed in a triangular cross section. A predetermined amount of adhesive material 750 is filled in the region. Further, the filling is performed by applying and filling accurately by using a dispenser or the like. In addition, the adhesive material 750 uses the adhesive material which has heat conductivity.

  FIG. 19C shows a step of installing the hollow tube 760 (ST 43), and the hollow tube 760 having a round cross section is installed in the groove 29. At that time, it is necessary to set the thickness (tube diameter) so that the outer portion of the installed hollow tube 760 does not protrude onto the inner surface of the counter substrate 5. The hollow tube 760 preferably has thermal conductivity, and preferably has a surface state that reflects the light beam incident on the counter substrate 5 so as not to be scattered light. Through this step, the hollow tube 760 is fixed to the groove 29 by the adhesive material 750.

  FIG. 19D shows a step (ST44) of forming a flat portion 770 in the groove 29 after the hollow tube 760 is installed. After the flat tube 760 is installed and fixed in the groove 29, the flat portion 770 has a cross-sectional portion other than the hollow tube 760 of the groove 29 up to the height of the inner surface of the counter substrate 5, for example, similar to the above-described light blocking portion. These materials (a simple substance of aluminum or a material in which another metal film is laminated on aluminum) are used. The material for forming the flat portion 770 may be an unexpected metal material or a resin material.

In addition, the liquid refrigerant 90 is sealed in the hollow tube 760 installed in each process described above by a subsequent process. Further, the light valve 71 (liquid crystal light valve 1) is formed by using the counter substrate 5 formed in this way. Further, a hollow tube 760 is also extended along with the flat portion 770 in the contact portion 7 shown in FIGS.
Using the light valve 71 formed in this way, the optical device 805 is completed by assembling in the same manner as shown in FIGS.

According to the embodiment described above, the following effects can be obtained.
(1) According to the optical device 805 of this embodiment, since the hollow tube 760 in which the liquid refrigerant 90 is enclosed is installed in the cross section of the groove portion 29 of the light valve 71, the heat generated in the light valve 71 is moderate. Conducted to the empty tube 760 and conducted from the contact portion 7 to the light valve cooling frame. The heat conducted to the hollow tube 760 is also transferred to the liquid refrigerant 90 enclosed in the hollow tube 760, and heat transfer is further efficiently performed by the convection of the liquid refrigerant 90, and is conducted to the light valve cooling frame. can do. The heat conducted to the light valve cooling frame is efficiently cooled as in the first embodiment.

  (2) In the optical device 805 of the present embodiment, since the adhesive material 750 and the flat portion 770 use a material having thermal conductivity, the heat generated in the light valve 71 is transferred to the hollow tube 760 and the light valve cooling frame. Improves the efficiency of conduction.

  (3) In the optical device 805 of this embodiment, even if the material forming the adhesive material 750, the flat portion 770, and the hollow tube 760 is not necessarily high in thermal conductivity, the liquid in the hollow tube 760 is liquid. The heat conduction can be supplemented by the convection of the refrigerant 90.

  (4) In the optical device 805 of the present embodiment, the groove portion 29 is provided with a hollow tube 760 having a round cross section in a triangular cross section within a range Σ within the area Σ, as in the first embodiment. It is fixed with an adhesive material 750. Accordingly, since the hollow tube 760 can function as a light shielding portion, the light directed to the area between the adjacent pixel electrodes is shielded, and the incident light directed to the effective display area of the pixel electrode is not shielded. As a result, the light traveling toward the pixel electrode is not weakened.

  (5) According to the optical device 805 of the present embodiment, the hollow tube 760 as a hollow member in which the liquid refrigerant 90 is sealed is installed in the cross section (in the groove 29) where the light shielding portion is formed. The risk of leakage of the refrigerant 90 can be suppressed.

The present invention is not limited to the above-described embodiments, and various changes and improvements can be added. A modification will be described below.
(Modification 1) The hollow portions 111 of the optical devices 800 and 801 shown in the first embodiment and the second embodiment are formed in a concave shape in cross section on the light valve fixing frame contact surface 110a of the light valve cooling frame 110, A hollow space region is formed by pressing and fixing the light valve fixing frame 120 to the light valve fixing frame abutting surface 110a. However, the present invention is not limited to this, and the light valve fixing frame 120 is divided into two bodies, and a hollow portion is formed by forming a groove portion having a concave cross section, for example, on one side and joining the other in a form covering the groove portion. May be. The hollow portion may be formed in various ways, but may be formed without departing from the gist (technical idea) of the present invention.

(Modification 2) FIG. 20 is a schematic plan view when a light shielding portion is formed in a stripe shape.
Although the light shielding portions 21 and 721 in the above embodiment are formed on the inner surface of the counter substrate 5 in a lattice shape, the light shielding portions 722 may be formed in a stripe shape as shown in FIG. Even the stripe-shaped light shielding portion 722 can sufficiently shield light, and heat generated in the light valve 71 (liquid crystal light valve 1) can be transferred along the stripe.

  (Modification 3) In the third embodiment, for example, in the unit 700G for green light, the incident side light conversion unit 200G, the optical device 800G, and the emission side light conversion unit 300G constituting the unit 700G are connected in parallel. Although it has a structure, it is not limited to this, and a structure connected in series may be used. At that time, it is preferable to determine the order of connection in series based on the calorific value of each optical element. Of course, the same applies to the unit 700R for red light and the unit 700B for blue light.

  (Modification 4) In the third embodiment, the green light unit 700G, the red light unit 700R, and the blue light unit 700B are connected in parallel, but the present invention is not limited thereto. The structure connected in series may be sufficient. At that time, it is preferable to determine the order of connection in series based on the calorific value of each optical element.

  (Modification 5) In the third embodiment, forced convection is performed on the incident-side light conversion unit 200, the optical device 800, and the emission-side light conversion unit 300 as the optical device 802. Cooling by forced convection may be performed only on the light valve 71 constituting the above. At that time, it is preferable that the incident side light conversion unit 200 and the emission side light conversion unit 300 use natural convection or natural convection and air cooling.

  (Modification 6) In the third embodiment, as the optical device 802, the units 700R, 700G, and 700B are configured for each color light. However, the present invention is not limited to this, and the optical device 802 is configured for color light with a large calorific value. That's fine.

  (Modification 7) In the said 4th Embodiment, it may replace with the refrigerant | coolant heat conductive tube 161a which comprises the hollow part 161, and may apply the structure of the hollow part 111 in 1st Embodiment. At that time, it is preferable to form two openings in the hollow portion 111, connect the formed openings to the flow path 611, and connect the flow path 611 to the reserve tank 531 and the gear pump 551.

  (Modification 8) In the sixth embodiment, the flat portion 770 is formed in the groove portion 29, and the common electrode 57 and the alignment film are formed on the flat surface formed by the flat portion 770 and the inner surface of the counter substrate 5 in the subsequent steps. 22b is formed. However, the present invention is not limited thereto, and the common electrode 57 and the alignment film 22b may be formed on the inner surface of the counter substrate 5 in the subsequent process without forming the flat portion 770.

  (Modification 9) In the above embodiment, the light valve cooling frames 110 and 160 are made of an aluminum alloy that is a member having high thermal conductivity. However, the present invention is not limited to this, and a magnesium alloy or a resin material having thermal conductivity may be used.

  (Modification 10) The projector 900 according to the above embodiment uses a three-plate system that uses three light valves 71 as the light modulation / conversion unit 70 constituting the optical system 35. However, the present invention is not limited to this, and a single plate method using one light valve may be used. When the single plate method is used, color separation and color synthesis optical system in the illumination optical system can be eliminated. Depending on the optical system used, the number of light valves may be four or two, and the number of light valves is not limited.

  (Modification 11) The projector 900 in the above embodiment uses a front-type projector 900 that projects an optical image on a screen (not shown) installed outside. However, the present invention is not limited to this, and a rear type projector that has a screen inside the projector and projects an optical image on the screen may be used.

  (Modification 12) In the projector 900 according to the above embodiment, the light emitted from one light source device 30 is separated into each color light by the color separation optical system 42. However, the present invention is not limited to this, and a plurality of light source devices that emit light of each color may be used. For example, a red LED (light emitting diode) that emits red light, which is a solid light source, a green LED that emits green light, or a blue LED that emits blue light may be used. An LD (laser diode) can also be used.

1 is an equivalent circuit diagram of a liquid crystal light valve according to a first embodiment of the present invention. Explanatory drawing of the planar structure of a liquid crystal light valve. Explanatory drawing of the cross-section of a liquid crystal light valve. Explanatory drawing of a liquid crystal light valve. The flowchart which shows the manufacturing process of a liquid crystal light valve. FIG. 6A is an explanatory diagram of a process of forming a light shielding portion on the opposing mother substrate, FIG. 6A is an explanatory diagram of applying a resist to the surface of the opposing mother substrate, and FIG. 6B is an opposing mother. FIG. 6C is an explanatory view for cutting the surface of the substrate, FIG. 6C is an explanatory view for depositing aluminum on the cut portion, and FIG. 6D is an explanatory view for removing the resist portion and the upper aluminum. The schematic diagram which shows the structure of an optical system when a liquid crystal light valve is comprised as an optical apparatus and it applies to a projector. FIG. 8 is a schematic diagram in which a liquid crystal light valve is configured as an optical device, FIG. 8A is a schematic plan view of the optical device, and FIG. 8B is a schematic cross-sectional view of the optical device. Sectional drawing of the principal part of an optical apparatus. FIG. 3 is a schematic cross-sectional view in which an optical device is fixed to a cross dichroic prism. The schematic sectional drawing which shows the structure of the optical apparatus which concerns on 2nd Embodiment of this invention. The block diagram which shows the structure of the optical apparatus which concerns on 3rd Embodiment of this invention. The schematic plan view which shows the structure of the optical apparatus which concerns on 4th Embodiment of this invention. The schematic sectional drawing which shows the structure of the optical apparatus which concerns on 5th Embodiment of this invention. The flowchart which shows the manufacturing process of a gap | interval part. FIG. 16A is a schematic cross-sectional view for each process of the flowchart, FIG. 16A is a schematic cross-sectional view showing a process for forming a groove, and FIG. 16B is a schematic cross-sectional view showing a process for forming a gap portion. FIG. 16C is a schematic cross-sectional view showing a step of forming the light shielding portion, and FIG. 16D is a schematic cross-sectional view showing a step of removing the gap portion. The schematic sectional drawing which shows the structure of the optical apparatus which concerns on 6th Embodiment of this invention. The flowchart which shows the installation process of a hollow tube. FIG. 19A is a schematic cross-sectional view showing a step of forming a groove, and FIG. 19B is a schematic cross-sectional view showing a step of filling an adhesive material. FIG. 19C is a schematic cross-sectional view showing a step of installing a hollow tube, and FIG. 19D is a schematic cross-sectional view showing a step of forming a flat portion. The schematic plan view when a light shielding part is formed in a stripe shape.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Liquid crystal light valve, 4 ... TFT array substrate (element substrate), 5 ... Counter substrate, 6 ... Sealing material, 8 ... Liquid crystal layer, 15 ... TFT element, 20 ... Pixel electrode, 21, 721 ... Light-shielding part, 22a, 22b ... alignment film, 28 ... cutting part, 29 ... groove part, 30 ... light source device, 35 ... optical system, 40 ... illumination optical system, 42 ... color separation optical system, 57 ... common electrode, 70 ... light modulation / conversion part, DESCRIPTION OF SYMBOLS 71 ... Light valve, 71a ... Image formation area, 80 ... Color composition optical system, 85 ... Projection part, 110, 160 ... Light valve cooling frame, 111, 161 ... Hollow part, 120 ... Light valve fixed frame, 140 ... Elastic member , 150 ... heat conduction member, 161a ... refrigerant heat conduction pipe, 500 ... refrigerant accumulation part, 510 ... delivery tank, 520 ... return tank, 530, 531 ... reserve tank, 540 ... radiator, 550 ... pump, 5 1 ... gear pump, 600, 601 ... circulation unit, 610, 611 ... passage, 730 ... gap, 750 ... adhesive, 760 ... hollow tube, 770 ... flats, 800-805 ... optical device, 900 ... projector.

Claims (7)

An optical device that performs cooling using a liquid refrigerant,
A light modulation element that modulates and emits light according to image information;
A light-modulating element cooling frame that holds the light-modulating element and has a thermal conductivity in a region corresponding to the outside of the image-forming area of the light-modulating element, in which a hollow portion in which the liquid refrigerant is enclosed is formed; Prepared,
The light modulation element includes a plurality of pixel electrodes and an element substrate on which switching elements for driving the pixel electrodes are arranged;
A counter substrate provided facing the element substrate and having a cross section on the inner surface in a predetermined region;
Of the incident light incident at a predetermined angle from the outer surface of the counter substrate toward the element substrate side, the light traveling toward the region between the adjacent pixel electrodes is shielded to enter the effective display region of the pixel electrode. A light-shielding portion formed with thermal conductivity in the cross-section having the predetermined area of the counter substrate that does not shield the incident light; and
The light modulation element cooling frame holds the light modulation element by closely fixing the light shielding portion of the light modulation element so as to be able to conduct heat to the liquid refrigerant in the hollow portion. Optical device. The optical device according to claim 1,
A circulation part connected to the hollow part of the light modulation element cooling frame and forming a flow path for circulating the liquid refrigerant;
An optical device comprising: a circulation drive unit that is installed in the flow path of the circulation unit and forcibly circulates the liquid refrigerant in the hollow portion that is connected via the circulation unit. The optical device according to claim 2,
The optical device, wherein the circulation unit and the circulation drive unit are installed in the light modulation element cooling frame forming the hollow portion. An optical device according to any one of claims 1 to 3,
An optical device comprising a gap portion in which the liquid refrigerant is sealed in the cross section in which the light shielding portion is formed. An optical device according to any one of claims 1 to 3,
An optical device, wherein a hollow member in which the liquid refrigerant is enclosed is installed in the cross section. A method for manufacturing the gap portion of the optical device according to claim 4,
Forming a gap portion with a material different from a material for forming the light shielding portion in the cross section of the counter substrate;
Forming the light shielding portion so as to cover the gap portion in the cross section;
And a removing step of removing the gap portion. The optical device according to any one of claims 1 to 5, a light source device that emits a light beam, and a projection unit that projects an optical image formed by the optical device. projector.

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