JP2007278900A - Sheet-like connector and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sheet-like connector capable of performing pitch conversion of an arrangement pitch of an electrode to be inspected of a circuit board into an arrangement pitch of an inspection electrode of an electric inspection device to electrically connect both the electrodes, obtaining electrical conduction at a low load not damaging the electrode to be inspected without conduction failure due to positional deviation between the electrodes, and not causing rise in resistance due to damage of the electrode even when the inspection is performed repeatedly. <P>SOLUTION: The sheet-like connector is characterized in that the plurality of electrodes are formed with patterns different from each other on one outermost surface A and the other outermost surface B of an elastic resin sheet board and each electrode of the outermost surface A and the corresponding electrode of the outermost surface B are electrically connected, in the inside of the elastic resin sheet board. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a sheet-like connector using an anisotropic conductive sheet and a method for manufacturing the same, and more particularly, when an electrical inspection is performed on a circuit device such as a semiconductor integrated circuit device or a printed circuit board. The present invention relates to a sheet-like connector suitable for use by being disposed between an electrode to be inspected on a substrate and an inspection electrode of an electrical inspection apparatus, and a manufacturing method thereof.

  In order to perform an electrical inspection of a circuit device such as a semiconductor integrated circuit device or a printed circuit board, an inspection electrode of the circuit board and an inspection electrode of an electrical inspection device (also referred to as a checker) are associated with each other and accurately connected. There is a need. In general, electrical inspection of circuit boards is conducted by conducting a continuity test to check whether the connection of conductor patterns is as designed, and an electrical test to measure the continuity resistance of conductors, the insulation resistance between conductors, or the characteristic impedance. ing.

  In recent years, with the progress of high-density mounting of semiconductor packages, in a circuit board such as a printed circuit board, functional elements are formed at a high degree of integration at the center of the circuit board. Therefore, the number of electrodes arranged in the peripheral part of the circuit board is increased, and the arrangement pitch of the electrodes (distance between centers of adjacent electrodes; also referred to as “electrode pitch”) is decreasing. On the other hand, since the inspection electrodes of the inspection apparatus are connected to the inspection apparatus main body by lead wires, there is a limit in reducing the arrangement pitch of the inspection electrodes. Further, when the circuit board is electrically inspected, it is necessary to prevent the circuit board from being damaged by contact with the inspection electrode or the like.

  Conventionally, in order to connect an inspection electrode of a circuit board to be inspected and an inspection electrode of an electrical inspection apparatus, for example, a method of interposing a pitch conversion board made of a printed circuit board and an anisotropic conductive sheet has been adopted. . Specifically, as shown in FIG. 7, there is a method in which a pitch conversion board 74 and an anisotropic conductive sheet 73 are combined and arranged on a surface portion 72 where an inspection electrode 76 of an electrical inspection device (checker) 71 is disposed. Are known. The inspection electrode 76 is connected from the electrical inspection device 71 by a lead wire 77. The pitch conversion board 74 is fixed to the surface portion 72 with screws 75 with an anisotropic conductive sheet 73 interposed therebetween.

  The substrate of the pitch conversion board 74 is a printed circuit board having a multilayer structure formed of an epoxy resin containing glass fibers. Probe electrodes 78 are formed on one surface of the pitch conversion board 74 at the same pitch as the arrangement pitch of the electrodes to be inspected on the circuit board to be inspected, and on the other surface, inspection electrodes of the electrical inspection apparatus. Electrodes 80 are formed at the same pitch as the arrangement pitch. Inside the pitch conversion board 74, a circuit 79 for electrically connecting the probe electrode 78 and the electrode 80 is formed. In order to form such a circuit 79, the pitch conversion board needs to have a multilayer structure.

  The pitch conversion board 74 is generally a multi-layer substrate, and each layer constituting the pitch conversion board 74 receives different thermal histories at the time of manufacture. If the pitch conversion board is warped, it becomes impossible to accurately connect the electrode to be inspected and the inspection electrode. When the bump height of the electrode to be inspected of the circuit board to be inspected is small, even if it is slightly warped, it is likely not to conduct satisfactorily. However, since the pitch conversion board 74 is formed of a glass fiber reinforced epoxy resin, it is hard and it is difficult to correct the warp even when pressure is applied during inspection. Moreover, since the pitch conversion board 74 is hard, it is easy to damage an inspection electrode or an inspection electrode.

  In order to alleviate the above problem, an anisotropic conductive sheet 73 is disposed between the pitch conversion board 74 and the surface portion 72 on which the inspection electrode 76 of the electrical inspection apparatus 71 is disposed. As the anisotropic conductive sheet 73, generally an anisotropic conductive rubber in which conductive particles are dispersed in an elastomer is used. The anisotropic conductive sheet 73 is connected to the conductive particles existing between the electrode 80 and the inspection electrode 76 of the pitch conversion board 74 by the pressure applied at the time of inspection. Only the two electrodes can be conducted.

  However, when the warp of the pitch conversion board is large, the warp may not be absorbed even if the anisotropic conductive sheet 73 is interposed. Furthermore, as the integration and miniaturization of circuits progress and the electrode pitch of the circuit board to be inspected decreases, it is difficult to accurately align the electrodes of the respective members with the connection method having the above configuration.

  Japanese Patent No. 311688 (Patent Document 1) discloses an adapter body having a substrate and a wiring layer portion provided on the upper surface of the substrate, and an anisotropic conductive body integrally provided on the surface of the wiring layer portion of the adapter body. An adapter device for circuit board inspection comprising a conductive connector layer is disclosed. The adapter body has a function as a pitch conversion board, and is a printed circuit board having a multilayer structure formed using a glass fiber reinforced epoxy resin. An anisotropic conductive connector is an anisotropic conductive elastomer. The process of providing an anisotropic conductive connector layer on the surface of the wiring layer portion of the adapter body is a process of dispersing conductive magnetic particles in a polymer material that becomes an insulating elastic polymer material on the top surface of the adapter body. A material layer for a connector made of the flowable mixture formed is formed, placed in a cavity of a mold having a ferromagnetic portion corresponding to the connection electrode of the adapter body, and a parallel magnetic field in the thickness direction of the adapter body is applied. This is a process in which the conductive magnetic particles are gathered at portions located on the connection electrodes of the adapter main body and are subjected to curing treatment in a state of being oriented in the thickness direction.

  Japanese Patent No. 3163626 (Patent Document 2) discloses a circuit board inspection adapter device having a structure similar to that of Patent Document 1. In Patent Document 2, conductive magnetic particles are assembled on a portion located on a connection electrode of an adapter body using a magnetic plate for molding having a ferromagnetic portion and a non-magnetic portion.

  In JP 2004-342597 A (Patent Document 3), a conductive elastomer layer is formed on the surface of an adapter main body (pitch conversion board), and then laser processing is performed to correspond to the connection electrode of the adapter main body. An adapter device having a conductive path made of a conductive elastomer is disclosed. Between each conductive path, an insulating part is formed by forming a material layer for an insulating part made of a material that is cured to become an elastic polymer substance and performing a curing process.

  However, in the circuit board inspection adapter device disclosed in Patent Documents 1 to 3, the electrical connection between the adapter main body (pitch conversion board) and the anisotropic conductive elastomer is likely to be impaired. An anisotropic conductive elastomer is generally made of silicone rubber, and therefore has low adhesive strength with other materials, and easily peels off when a load is repeatedly applied during temperature changes or inspections.

Japanese Patent No. 311688 Japanese Patent No. 3163626 JP 2004-342597 A

  In addition to being able to electrically connect both electrodes by subjecting the array pitch of the electrodes to be inspected of the circuit board to be inspected to pitch conversion to the array pitch of the inspection electrodes of the electrical inspection apparatus, An object of the present invention is to provide a sheet-like connector that can be used as a pitch conversion board that does not have poor conduction due to misalignment between electrodes.

  Another object of the present invention is to provide a pitch conversion board that does not have poor conduction caused by gaps between electrodes due to warpage that becomes a problem when a hard material is used as a base material of the pitch conversion board due to an elastic and flexible material. It is providing the sheet-like connector which can be used as.

  Furthermore, an object of the present invention is to provide a pitch conversion board that can obtain electrical continuity with a low load that does not damage the electrode to be inspected, and that does not increase resistance even if repeated inspection is performed. It is to provide a sheet-like connector that can be used.

  As a result of earnest research to solve the above problems, the present inventors have formed a plurality of electrodes in different patterns on one outermost surface A and the other outermost surface B of the elastic resin sheet substrate, and The inventors have conceived a sheet-like connector in which the electrodes on the outermost surface A and the corresponding electrodes on the outermost surface B are electrically connected to each other inside the elastic resin sheet substrate.

  As a preferred embodiment, a plurality of electrodes are formed on one outermost surface of the elastic resin sheet substrate at a pitch corresponding to the arrangement pitch of the electrodes to be inspected provided on the circuit board to be inspected, and on the other outermost surface, A plurality of electrodes are formed at a pitch corresponding to the arrangement pitch of the inspection electrodes provided in the electrical inspection apparatus, and each electrode on one outermost surface and the other outermost electrode corresponding to these electrodes are formed inside the elastic resin sheet substrate. It has been found that the above problems can be achieved by electrically connecting each electrode on the surface.

As the elastic resin sheet substrate, a multilayer substrate in which a plurality of porous fluororesin sheets such as a stretched porous polytetrafluoroethylene resin (hereinafter referred to as “stretched porous PTFE resin”) are stacked and thermally fused at a lamination interface is used. preferable. In each layer of the multilayer substrate, it is preferable to form a cylindrical electrode obtained by conducting a conductive treatment on the inner wall of the through hole formed in each sheet layer as an electrode. A sheet-like connector made of a porous fluororesin sheet provided with a cylindrical electrode has a function as an anisotropic conductive sheet, because vertical conduction can be obtained by the cylindrical electrode.
The present invention has been completed based on these findings.

  Thus, according to the present invention, a plurality of electrodes are formed in different patterns on one outermost surface A and the other outermost surface B of the elastic resin sheet substrate, and inside the elastic resin sheet substrate, A sheet-like connector is provided in which each electrode on the outermost surface A is electrically connected to each electrode on the outermost surface B corresponding thereto.

  As a preferred embodiment, according to the present invention, a plurality of electrodes are formed on one outermost surface A of the elastic resin sheet substrate at a pitch corresponding to the arrangement pitch of the electrodes to be inspected provided on the circuit board to be inspected. On the other outermost surface B, a plurality of electrodes are formed at a pitch corresponding to the arrangement pitch of the inspection electrodes provided in the electrical inspection apparatus, and the electrode pitch of the outermost surface B is more than the electrode pitch of the outermost surface A. A sheet-like connector characterized in that each electrode on the outermost surface A and each corresponding electrode on the outermost surface B are electrically connected to each other inside the elastic resin sheet substrate. Provided.

  Further, according to the present invention, the elastic resin sheet substrate has a multilayer structure in which a plurality of elastic resin sheets are heat-sealed at the lamination interface, and each elastic resin sheet layer has an electrode as an electrode, The sheet-like connector is provided in which a cylindrical electrode is formed by conducting an inner wall of a through hole formed in each elastic resin sheet layer.

  As a more specific aspect, according to the present invention, the elastic resin sheet substrate has a two-layer structure in which two elastic resin sheets are heat-sealed at the lamination interface, and one outermost surface A is formed. The elastic resin sheet layer I has a plurality of cylindrical electrodes formed at a pitch corresponding to the arrangement pitch of the electrodes to be inspected, and the elastic resin sheet layer II having the other outermost surface B has the arrangement of the inspection electrodes. A plurality of cylindrical electrodes are formed at a pitch corresponding to the pitch, and each cylindrical electrode of the elastic resin sheet layer I and each cylindrical electrode of the elastic resin sheet layer II corresponding thereto are formed at the lamination interface. The sheet-like connector is provided in which a surface circuit is formed for electrical connection.

  Furthermore, according to the present invention, the elastic resin sheet substrate has a multilayer structure in which three or more elastic resin sheets are heat-sealed at each lamination interface, and an elastic resin sheet having one outermost surface A In the layer a, a plurality of cylindrical electrodes are formed at a pitch corresponding to the arrangement pitch of the electrodes to be inspected, and the elastic resin sheet layer b having the other outermost surface B corresponds to the arrangement pitch of the inspection electrodes. A plurality of cylindrical electrodes are formed at a pitch, and one or more elastic resin sheet layers arranged as an intermediate layer have a plurality of tubes at a pitch intermediate between the electrode pitch of the outermost surface A and the electrode pitch of the outermost surface B. And the corresponding cylindrical electrodes of all layers are electrically connected to each other directly or via a surface circuit, so that the electrode pitch of the outermost surface A is an intermediate layer. The electrode of the outermost surface B through the electrode pitch of The sheet-like connector which is gradually expanded until the pitch is provided.

  The elastic resin sheet constituting the elastic resin sheet substrate is preferably a porous fluororesin sheet, and more preferably an expanded porous polytetrafluoroethylene resin sheet.

  According to the present invention, in addition to being able to convert the pitch of the electrodes to be inspected on the circuit board to be inspected to the pitch of the electrodes to be inspected in the electrical inspection apparatus, the electrodes can be electrically connected. A pitch conversion board that does not have poor conduction due to positional deviation between electrodes is provided. In addition, according to the present invention, the pitch conversion board has no conduction failure caused by a gap between the electrodes due to the warp which becomes a problem when a hard material is used as a base material of the pitch conversion board by an elastic and flexible material. Is provided.

  The sheet-like connector of the present invention uses a multi-layer substrate in which a plurality of porous fluororesin sheets such as a stretched porous PTFE resin sheet are laminated, and conducts by electroless plating on the inner wall of the through hole provided in each layer of the multi-layer substrate. By forming the portion (cylindrical electrode), electrical continuity can be obtained with a low load that does not damage the electrode to be inspected, and even if repeated inspection is performed, the electrode is damaged and the resistance increases. There is nothing. Such a multi-layered sheet-like connector can be provided at a lower cost than the conventional pitch conversion device combining a hard multilayer printed circuit board and an anisotropic conductive sheet. . When an expanded porous PTFE resin sheet is used as the elastic resin sheet constituting the substrate, a sheet-like connector excellent in high elasticity, high heat resistance, low dielectric constant, low outgas characteristics and the like can be obtained.

1. Elastic resin sheet substrate Examples of the elastic resin sheet constituting the elastic resin sheet substrate include an electrically insulating elastomer sheet and a porous resin sheet, but the electrode pitch can be easily increased sequentially by multilayering. The cylindrical electrode showing anisotropic conductivity can be easily formed by plating, and electrical continuity can be obtained with a low load that does not damage the electrode to be inspected. A porous resin sheet is preferable in that resistance does not increase. As the porous resin sheet, a fluororesin sheet is preferable and a stretched porous PTFE resin sheet is more preferable from the viewpoint of low dielectric constant and heat resistance.

  Examples of the synthetic resin material for forming the porous resin sheet include polytetrafluoroethylene (PTFE), tetrafluoroethylene / hexafluoropropylene copolymer (FEP), and tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer (PFA). ), Polyvinylidene fluoride (PVDF), polyvinylidene fluoride copolymer, ethylene / tetrafluoroethylene copolymer (ETFE resin), etc .; polyimide (PI), polyamideimide (PAI), polyamide (PA) , Engineering polyphenylene ether (mPPE), polyphenylene sulfide (PPS), polyetheretherketone (PEEK), polysulfone (PSU), polyethersulfone (PES), liquid crystal polymer (LCP), etc. Stick; and the like. Among these synthetic resin materials, fluororesins are preferable, and polytetrafluoroethylene (PTFE) is particularly preferable from the viewpoints of heat resistance, workability, mechanical properties, dielectric properties, and the like.

  Examples of a method for producing a porous resin film made of a synthetic resin include a pore making method, a phase separation method, a solvent extraction method, a stretching method, and a laser irradiation method. Among these, the stretching method is preferable in that the average pore diameter and the porosity can be easily controlled. By forming a porous resin film using a synthetic resin, elasticity can be given in the film thickness direction, and the dielectric constant can be further lowered.

  The porous resin sheet such as the stretched porous PTFE resin sheet preferably has a porosity of about 20 to 80%. The porous resin sheet preferably has an average pore diameter of 10 μm or less or a bubble point of 2 kPa or more. From the viewpoint of fine pitching of the electrodes (conducting portions), the average pore diameter is 5 μm or less, and further 1 μm or less. Is preferred. The lower limit value of the average pore diameter is about 0.05 μm. The bubble point of the porous resin sheet is preferably 5 kPa or more, more preferably 10 kPa or more. The upper limit of the bubble point is about 300 kPa, but is not limited to this.

  Although the film thickness of a porous resin sheet can be suitably selected according to a use purpose or a use location, it is 20-3000 micrometers normally, Preferably it is 25-2500 micrometers, More preferably, it is 30-1500 micrometers. Therefore, the thickness of the porous resin sheet includes both regions of the film (less than 250 μm) and the sheet (250 μm or more).

  Among the porous resin sheets, the porous polytetrafluoroethylene resin sheet membrane (stretched porous PTFE resin sheet) obtained by the stretching method is elastic, heat resistant, workability, mechanical properties, dielectric properties, low outgas properties. In addition, since it is easy to obtain a porous resin sheet having a uniform pore size distribution, it is the most excellent material as an elastic resin sheet constituting the sheet-like connector of the present invention. The stretched porous PTFE resin sheet has a microstructure composed of a large number of fibrils and nodes, and a conductive metal such as plating particles can be attached to the fibrils.

  The stretched porous PTFE resin sheet used in the present invention can be produced, for example, by the method described in Japanese Patent Publication No. 42-13560. First, a liquid lubricant is mixed with the unsintered powder of PTFE and extruded into a tube shape or a plate shape by ram extrusion. When a thin sheet is desired, the plate is rolled by a rolling roll. After the extrusion rolling process, the liquid lubricant is removed from the extruded product or the rolled product as necessary. When the extruded product or the rolled product thus obtained is stretched at least in a uniaxial direction, an unsintered stretched porous PTFE resin is obtained in the form of a sheet. The unsintered expanded porous PTFE resin sheet has high strength when heated to a temperature of 327 ° C. or higher, which is the melting point of PTFE, while being fixed so as not to shrink, and the expanded structure is sintered and fixed. An expanded porous PTFE resin sheet is obtained.

  The stretched porous PTFE resin sheet has a microstructure composed of very thin fibrils formed by PTFE and nodes connected to each other by the fibrils. In the stretched porous PTFE resin sheet, this fine structure forms a porous structure.

2. Sheet Connector The sheet connector of the present invention is formed using an elastic resin sheet substrate, and a plurality of electrodes are formed in different patterns on one outermost surface A and the other outermost surface B of the elastic resin sheet substrate. And has a basic structure in which the electrodes on the outermost surface A and the corresponding electrodes on the outermost surface B are electrically connected to each other inside the elastic resin sheet substrate. ing.

  In the sheet-like connector according to a preferred embodiment of the present invention, a plurality of electrodes are formed on one outermost surface A of the elastic resin sheet substrate at a pitch corresponding to the arrangement pitch of the electrodes to be inspected provided on the circuit board to be inspected. On the other outermost surface B, a plurality of electrodes are formed at a pitch corresponding to the arrangement pitch of the inspection electrodes provided in the electrical inspection apparatus, and the electrode pitch of the outermost surface B is larger than the electrode pitch of the outermost surface A. And has a basic structure in which each electrode on the outermost surface A and each corresponding electrode on the outermost surface B are electrically connected to each other inside the elastic resin sheet base material. ing.

  Such a sheet-like connector uses, for example, a stretched porous PTFE resin sheet having a single layer thickness and perforates a plurality of non-through holes at a predetermined pitch from one surface to the middle of the thickness. A plurality of non-through holes are drilled from the surface at a pitch larger than the pitch, and the non-through holes are partially connected (partially penetrated) in the middle of the thickness, and then the inner walls of both non-through holes are subjected to conductive treatment. It can be obtained by a method.

  However, in the method using a single-layer elastic resin sheet substrate, the electrode pitch cannot be sufficiently increased. Therefore, it is preferable to use a multilayer structure substrate in which a plurality of elastic resin sheets are heat-sealed at the lamination interface. That is, as the elastic resin sheet substrate, it is preferable to use a multilayer substrate having a multilayer structure in which a plurality of elastic resin sheets are thermally fused at the lamination interface. Each elastic resin sheet layer is preferably formed with a plurality of through holes at a predetermined pitch, and the inner wall thereof is subjected to a conductive treatment to form a cylindrical electrode. Lamination of each elastic resin sheet is performed after the formation of the through holes and the conductive treatment of the inner walls of the through holes. In order to electrically connect the corresponding cylindrical electrodes of each elastic resin sheet, when a circuit is required, the circuit is also formed on the surface of the elastic resin sheet and then laminated.

  When the elastic resin sheet substrate is a multi-layer substrate having a two-layer structure in which two elastic resin sheets are heat-sealed at the lamination interface, the elastic resin sheet layer I having one outermost surface A is inspected. A plurality of cylindrical electrodes are formed at a pitch corresponding to the arrangement pitch of the electrodes, and a plurality of cylindrical electrodes are formed on the elastic resin sheet layer II having the other outermost surface B at a pitch corresponding to the arrangement pitch of the inspection electrodes. To do. A surface circuit that electrically connects each cylindrical electrode of the elastic resin sheet layer I and each cylindrical electrode of the elastic resin sheet layer II corresponding thereto is formed at the lamination interface. The surface circuit is formed on either the elastic resin sheet layer I or the elastic resin sheet layer II.

  A case where the substrate of the sheet-like connector is a multilayer substrate having a two-layer structure will be described with reference to FIGS. FIG. 1 shows a multilayer substrate in which stretched porous PTFE resin sheets 11 and 12 are laminated by thermal fusion at the lamination interface. In the expanded porous PTFE resin sheet layer 11 having one outermost surface layer A, a plurality of through holes 13 are formed at a predetermined pitch, and a cylindrical electrode 14 is formed on the inner wall of each through hole by a conductive treatment. Is formed. The plurality of through holes 13 are formed at a pitch corresponding to the arrangement pitch of the electrodes to be inspected provided on the circuit board to be inspected, and the number thereof matches the number of electrodes to be inspected.

  As shown in FIG. 2, a plurality of through holes 23 are formed at a predetermined pitch in the expanded porous PTFE resin sheet layer 12 having the other outermost surface layer B, and the inner wall of each through hole is electrically conductive. A cylindrical electrode 24 is formed by the treatment. The plurality of through holes 23 are formed at a pitch corresponding to the arrangement pitch of the inspection electrodes provided in the electrical inspection apparatus, and the number thereof matches the number of inspection electrodes.

  Since the electrode pitch of the cylindrical electrode 24 formed on the stretched porous PTFE resin sheet 12 is larger than the electrode pitch of the cylindrical electrode 14 formed on the stretched porous PTFE resin sheet 11, a stretch Surface circuits 15 are formed to electrically connect the respective cylindrical electrodes of the porous PTFE resin sheet 11 and the corresponding cylindrical electrodes of the expanded porous PTFE resin sheet 12 (FIGS. 2-3). . The surface circuit is formed on one of the stretched porous PTFE resin sheets 11 and 12. Next, when the stretched porous PTFE resin sheets 11 and 12 are stacked and heated and pressurized, they are heat-sealed at the lamination interface, and an integrated sheet-like connector is obtained.

  As shown in FIG. 3, each cylindrical electrode formed on the expanded porous PTFE resin sheet layer 11 is connected to each cylindrical electrode of the expanded porous PTFE resin sheet layer 12 corresponding thereto by a surface circuit 15. However, as shown in FIG. 3, the cylindrical electrodes among the plurality of cylindrical electrodes can be connected by directly contacting the cylindrical electrodes. In place of the stretched porous PTFE resin sheet, a sheet-like connector having a similar structure can also be produced by using another elastic resin sheet such as a porous fluororesin sheet.

  When the elastic resin sheet substrate is a multilayer substrate having a multilayer structure in which three or more elastic resin sheets are thermally fused at each lamination interface, the elastic resin sheet layer a having one outermost surface A includes A plurality of cylindrical electrodes are formed at a pitch corresponding to the arrangement pitch of the electrodes to be inspected, and a plurality of cylindrical electrodes are formed on the elastic resin sheet layer b having the other outermost surface B at a pitch corresponding to the arrangement pitch of the inspection electrodes. An electrode is formed. A plurality of cylindrical electrodes are formed at an intermediate pitch between the electrode pitch of the outermost surface A and the electrode pitch of the outermost surface B on one or more elastic resin sheet layers arranged as the intermediate layer. Corresponding cylindrical electrodes in all layers are electrically connected directly or through a surface circuit at each stacking interface, whereby the electrode pitch of the outermost surface A is changed to the outermost surface B via the electrode pitch of the intermediate layer. It is gradually expanded to reach the electrode pitch. In order to simplify the process, it is preferable that the corresponding cylindrical electrodes of all layers are directly electrically connected to each other at each lamination interface.

  The case where the board | substrate which comprises a sheet-like connector is a multilayer board | substrate of a 3 layer structure is demonstrated, referring FIGS. FIG. 4 shows a multilayer substrate having a three-layer structure in which stretched porous PTFE resin sheets 40, 41 and 42 are laminated by thermal fusion at each lamination interface. In the expanded porous PTFE resin sheet layer 40 having one outermost surface layer A, a plurality of through holes 43 are formed at a predetermined pitch, and a cylindrical electrode 44 is formed on the inner wall of each through hole by conductive treatment. Is formed. The plurality of through holes 43 are formed at a pitch corresponding to the arrangement pitch of the electrodes to be inspected provided on the circuit board to be inspected, and the number thereof matches the number of the electrodes to be inspected.

  As shown in FIGS. 5 and 6, in the expanded porous PTFE resin sheet layer 41 serving as an intermediate layer and the expanded porous PTFE resin sheet layer 42 having the outermost surface layer B, a plurality of cylindrical electrodes sequentially increase the electrode pitch. Enlarged and formed. That is, the electrode pitch of the cylindrical electrode 54 formed on the expanded porous PTFE resin sheet layer 41 is larger than the electrode pitch of the cylindrical electrode 44 of the expanded porous PTFE resin sheet layer 40 having the outermost surface A. Furthermore, the electrode pitch of the cylindrical electrode 64 formed on the expanded porous PTFE resin sheet layer 42 having the outermost surface B is expanded from the electrode pitch of the cylindrical electrode 54 of the intermediate expanded porous PTFE resin sheet layer 41. Yes.

  If the electrode pitch of each cylindrical electrode of the stretched porous PTFE resin sheet layers 40 to 42 is adjusted so that the respective cylindrical electrodes of the corresponding layers slightly overlap each other, the three stretched porous PTFE resin sheets 40 By stacking ~ 42, heating and pressurizing, each layer is thermally fused and integrated at the lamination interface, and a sheet-like connector in which each corresponding cylindrical electrode of all layers is directly electrically connected is obtained. It is done.

  If the electrode pitch of the electrodes to be inspected on the circuit board to be inspected is extremely small and the electrode pitch cannot be sufficiently increased with a multilayer substrate having a three-layer structure, the multilayer structure can be made to have four or more layers. In such a case, a technique similar to that for a multilayer substrate having a three-layer structure can be employed. There is no particular upper limit on the number of layers, but from the viewpoint of workability and practicality, the number is usually 10 and in many cases about 5. When the electrode pitch of the electrodes to be inspected on the circuit board to be inspected is extremely small, the corresponding cylindrical electrodes in all layers may be electrically connected to the surface circuit at each lamination interface. Corresponding cylindrical electrodes of all layers may be directly connected at each laminated interface, and the rest may be connected by a surface circuit. In place of the stretched porous PTFE resin sheet, a sheet-like connector having a similar structure can also be produced by using another elastic resin sheet such as a porous fluororesin sheet.

3. Manufacturing method of sheet-like connector In the sheet-like connector of the present invention, a plurality of through holes are formed at a predetermined pitch in an elastic resin sheet, and then electroless plating is performed on the inner wall of each through hole to form a cylindrical electrode Step 1 for producing a plurality of elastic resin sheets formed with cylindrical electrodes having different electrode pitches by the method; each electrode pitch is sequentially expanded for a plurality of elastic resin sheets formed with cylindrical electrodes having different electrode pitches And a step 2 of electrically connecting the corresponding cylindrical electrodes of all layers directly or via a surface circuit; and a step 3 of thermally fusing the laminated interface. Can do. The surface circuit can be formed before the formation of each cylindrical electrode, after the formation of each cylindrical electrode, or simultaneously with the formation of each cylindrical electrode.

  In order to form through holes at a predetermined pitch in an elastic resin sheet such as a stretched porous PTFE resin sheet and to make the inner wall conductive, the following method can be employed. Hereinafter, although an explanation will be given by taking an expanded porous PTFE resin sheet as an example, the same operation should be adopted when an elastic resin sheet such as another porous fluororesin sheet is used instead of the expanded porous PTFE resin sheet. Can do.

  First, through holes penetrating in the thickness direction from the first surface to the second surface are formed in a plurality of locations of the stretched porous PTFE resin sheet, and then a porous resin portion (for example, fibrils) on the wall surface of each through hole A plurality of cylindrical electrodes (conducting portions) capable of exhibiting conductivity in the film thickness direction are formed independently. In general, the conductive metal can be attached by a method in which plating particles are attached to the resin portion of the porous structure on the wall surface of each through hole by electroless plating or a combination of electroless plating and electroplating. Usually, only electroless plating is sufficient.

  A method of providing a plurality of through holes in the thickness direction of the stretched porous PTFE resin sheet and a method of forming a cylindrical electrode by attaching a conductive metal to the wall surface of the through holes are not particularly limited. A method can be illustrated.

For example, the following steps 1 to 5:
(1) Step 1 of forming a three-layer laminate by laminating a resin layer as a mask layer on both surfaces of an expanded porous PTFE resin sheet;
(2) Step 2 of forming a plurality of through holes penetrating in the thickness direction in the laminate;
(3) Step 3 of attaching a catalyst that promotes a reduction reaction of metal ions to the surface of the laminate including the wall surface of the through hole;
(4) Step 4 of peeling the mask layer from the stretched porous PTFE resin sheet; and (5) Step 5 of attaching a conductive metal to the resin portion of the wall surface of the through hole using the catalyst.
Can be mentioned.

  A resin material is preferably used as the material of the mask layer. In the case of using a porous fluororesin sheet film such as a stretched porous PTFE resin sheet as the elastic resin sheet, it is preferable to use the same type of porous fluororesin sheet as the mask layer, A nonporous resin sheet or a porous resin sheet made of a resin material other than the fluororesin can also be used. From the viewpoint of the balance between fusibility between layers and peelability, it is preferable to use a porous resin sheet of the same quality as the porous resin sheet as the material of the mask layer. An adhesive tape or sheet can also be used as the mask layer.

  A mask layer is arrange | positioned on both surfaces of an extending | stretching porous PTFE resin sheet, and generally three layers are integrated by melt | fusion. When an expanded porous PTFE resin sheet is used as the elastic resin sheet, it is preferable to use the same expanded porous PTFE resin sheet as the mask layer. These three layers can be formed into a laminate in which the respective layers are fused by thermocompression bonding. The laminate can be easily peeled off in a later step by adjusting the thermocompression bonding conditions.

  A plurality of through holes are formed in the laminate in the thickness direction. As a method of forming a through hole, (1) a mechanical drilling method, (2) a method of etching by a photoablation method, (3) an ultrasonic head having at least one vibrator at the tip is used. And a method of punching by applying ultrasonic energy by pressing the tip of the vibrator.

  For mechanical drilling, for example, a machining method such as pressing, punching, or drilling can be employed. According to the machining method, for example, a through hole having a relatively large diameter of 100 μm or more, in many cases 200 μm or more, and further 300 μm or more can be formed at low cost. Through holes with smaller diameters can also be formed by machining.

  When the through-hole is formed by the light ablation method, light is applied to the surface of the laminate through a light shielding sheet (mask) having a plurality of light transmission parts (openings) that are independent in a predetermined pattern. Therefore, it is preferable to employ a method of forming a patterned through hole. Light is transmitted through a plurality of openings of the light shielding sheet, and the irradiated portion of the laminate is etched to form a through hole. According to this method, for example, a through hole having a relatively small diameter of 10 to 200 μm, in many cases 15 to 150 μm, and further 20 to 100 μm can be formed. Examples of irradiation light in the photoablation method include synchrotron radiation light and laser light.

  In the ultrasonic method, a patterned through-hole is formed by applying ultrasonic energy to the laminate using an ultrasonic head having at least one vibrator at the tip. Ultrasonic energy is applied only to the vicinity where the tip of the vibrator contacts, and the temperature rises locally due to the vibrational energy generated by the ultrasonic wave, and the resin is easily cut and removed to form a through hole.

  When forming the through-holes, it is possible to employ a method in which a porous polymer of a stretched porous PTFE resin sheet is impregnated with a soluble polymer such as polymethyl methacrylate or paraffin in a solution or in a molten state and solidified before being perforated. . This method is preferable because the porous structure on the inner wall of the through hole is easily retained. After drilling, the soluble polymer or paraffin can be removed by dissolving or melting.

  The shape of the through-hole is arbitrary, such as a circle, an ellipse, a star, an octagon, a hexagon, a quadrangle, and a triangle, but in many cases, it is preferably a circle. In the case of a small-diameter through hole, the diameter of the through hole can be usually reduced to 5 to 100 μm, and further to 5 to 30 μm. On the other hand, in the case of a relatively large through-hole, the diameter of the through-hole can be increased to usually 50 to 3000 μm, in many cases 75 to 2000 μm, and further to 100 to 1500 μm.

  In order to attach a catalyst (also referred to as a “plating catalyst”) that promotes the reduction reaction of metal ions to the surface of the laminate including the wall surface of the through hole, the laminate is sufficiently stirred, for example, in a palladium-tin colloid catalyst application liquid. So long as it is immersed. Using the catalyst remaining on the wall surface of the through hole, a conductive metal is selectively attached to the wall surface. Examples of the method for attaching the conductive metal include an electroless plating method, a sputtering method, and a conductive metal paste coating method, but the electroless plating method is preferable.

  Before performing electroless plating, the catalyst (for example, palladium-tin) remaining on the wall surface of the through hole is activated. Specifically, by immersing in a commercially available organic acid salt or the like for activating the plating catalyst, tin is dissolved and the catalyst is activated. By immersing the stretched porous PTFE resin sheet provided with a catalyst on the inner wall surface of the through hole in the electroless plating solution, the conductive metal (plating particles) can be deposited only on the wall surface of the through hole to which the catalyst is attached. . By this method, a cylindrical electrode is formed. Examples of the conductive metal include copper, nickel, silver, gold, and a nickel alloy. However, when high conductivity is required, it is preferable to use copper.

  When the stretched porous PTFE resin sheet is used, the plating particles are deposited so as to be entangled with the resin portion (mainly fibrils) exposed to the wall surface of the through hole of the stretched porous PTFE resin sheet at first. It is possible to control the adhesion state of the conductive metal. By setting an appropriate plating amount, a conductive metal layer is formed while maintaining a porous structure, and it is possible to provide elasticity in the film thickness direction as well as elasticity.

  The thickness of the resin part having a fine porous structure (for example, the thickness of the fibril of the stretched porous PTFE resin sheet) is preferably 10 μm or less, more preferably 5 μm or less, and even more preferably 1 μm or less. The particle diameter of the conductive metal is preferably about 0.001 to 5 μm. The amount of conductive metal deposited is preferably about 0.01 to 4.0 g / ml in order to maintain the porous structure and elasticity.

  The cylindrical electrode produced above is preferably coated with a noble metal or a noble metal alloy in order to improve oxidation prevention and electrical contact. As the noble metal, palladium, rhodium, and gold are preferable from the viewpoint of low electric resistance. The thickness of the coating layer is preferably 0.005 to 0.5 μm, more preferably 0.01 to 0.1 μm. For example, when the cylindrical electrode is coated with gold, a method of performing displacement gold plating after coating the conductive metal layer with nickel of about 8 nm is effective.

  When the stretched porous PTFE resin sheet is used, a cylindrical electrode having a structure in which conductive metal particles adhere to fibrils is formed on the wall surface of the through hole. When a stress in the thickness direction is applied to the stretched porous PTFE resin sheet, the distance between the fibrils is reduced, so that the stress is relaxed and the structure of the cylindrical electrode is maintained without being destroyed. Therefore, even if a compressive force is repeatedly applied to the stretched porous PTFE resin sheet, the cylindrical electrode is unlikely to deteriorate.

  The cylindrical electrode usually has a structure in which a conductive metal adheres only to the wall surface of the through-hole provided in the thickness direction of the stretched porous PTFE resin sheet. By performing electroplating in addition to electrolytic plating, one or both of the two open ends of the cylindrical electrode may be closed to form a lid made of a conductive metal. When the plating amount is increased, plating particles grow from the edge of the opening end, and the opening end is closed. As a method of closing the opening end without increasing the amount of conductive metal attached to the wall surface of the through hole, there is a method of applying a high-viscosity paste containing conductive metal particles to the opening end. By such a method, when the lid is formed by closing the opening end of the cylindrical electrode with a conductive material, the cylindrical electrode of the expanded porous PTFE resin sheet and the cylindrical shape of another expanded porous PTFE resin sheet The contact area with the electrode, the electrode to be inspected on the circuit board, the inspection electrode of the electrical inspection apparatus, etc. can be increased.

  In addition to the cylindrical electrode, a circuit can be formed on the stretched porous PTFE resin sheet. As a method for forming a circuit on the surface of the stretched porous PTFE resin sheet, an additive method, a subtractive method, or a semi-additive method can be employed as in the conventional method for forming a circuit on a printed circuit board. In these methods, using a lithography technique, plating is performed through steps of photoresist coating, pattern exposure, development, and etching to form a circuit. Moreover, the board | substrate which bonded copper foil to the surface of an extending | stretched porous PTFE resin sheet is produced, and the method of forming a surface circuit in a copper foil layer using a photolithographic technique is mentioned. Further, a method for forming a surface circuit by applying a plating catalyst to the stretched porous PTFE resin sheet in the same pattern as the circuit shape and using the plating catalyst by electroless plating or a combination of electroless plating and electrolytic plating There is.

In order to heat-seal a plurality of expanded porous PTFE resin sheets on which cylindrical electrodes are formed, they are stacked and heated to a temperature of 330 to 380 ° C, preferably 340 to 360 ° C, and 50 to 200 g / cm. ² , preferably a method of heating and pressurizing at a pressure of 70 to 150 g / cm ² for 30 minutes to 5 hours, preferably 1 to 3 hours. When a porous fluororesin sheet other than the stretched porous PTFE resin sheet is used as the elastic resin sheet, heating and pressing conditions can be appropriately set according to the melting characteristics such as the melting point of each resin.

4). Characteristics of Sheet-like Connector The sheet-like connector of the present invention preferably uses a porous resin sheet, more preferably a porous fluororesin sheet, as an elastic resin sheet serving as a substrate material, and an expanded porous PTFE resin sheet Most preferably, is used. The stretched porous PTFE resin sheet has high elasticity, high heat resistance, low dielectric constant, and low outgas characteristics, and is suitable as a substrate forming material for a sheet-like connector.

  A porous fluororesin sheet such as a stretched porous PTFE sheet formed with a plurality of cylindrical electrodes is an anisotropic conductive sheet that can conduct in the thickness direction, and a multilayer structure in which these are laminated is also anisotropic. It is a conductive sheet. Therefore, the sheet-like connector of the present invention has both a pitch conversion function and a function as an anisotropic conductive sheet. Therefore, compared to the conventional product, which is a separate member in which the pitch conversion board and the anisotropic conductive sheet are formed from different materials, there are inconveniences such as electrode misalignment and poor conduction due to pitch conversion board warpage. Does not occur.

  When a through-hole is formed in a porous fluororesin sheet such as a stretched porous PTFE resin sheet and a cylindrical electrode is formed by conducting conductive treatment on the wall surface by electroless plating, the obtained sheet shape Even if the connector is repeatedly used for electrical inspection, the cylindrical electrode is not damaged and the resistance is not increased, and electrical connection can be obtained with a low load that does not damage the electrode to be inspected. .

  Hereinafter, the present invention will be described more specifically with reference to examples. However, the present invention is not limited to these examples.

[Example 1]
A stretched porous PTFE resin sheet having a porosity (ASTM-D-792) of 60%, an average pore diameter of 0.1 μm, a bubble point (measured in accordance with ASTM-F-316-76 using isopropyl alcohol) of 150 kPa and a thickness of 600 μm. On both sides, a stretched porous PTFE resin sheet having a porosity of 60%, an average pore diameter of 0.1 μm, and a thickness of 30 μm is overlapped and sandwiched between two stainless steel plates having a thickness of 3 mm. Heat-treated for 30 minutes. After heating, the laminate was rapidly cooled with water from above the stainless steel plate to obtain a laminate of porous PTFE resin sheets fused in three layers.

  The laminate obtained as described above was cut into a 50 mm square. The laminated body has a rotation speed of 100,000 / min and a feed speed of 0.01 mm / rev. The drill was operated under the conditions described above, and through-holes with a diameter of 100 μmφ were drilled at nine locations (3 vertical × 3 horizontal) at a pitch of 0.25 mm. Degrease treatment by immersing the laminated body with through-holes in ethanol for 1 minute to make it hydrophilic and then immersing it in Melplate PC-321 manufactured by Meltex Co., Ltd. diluted to 100 ml / L for 4 minutes at a temperature of 60 ° C. Went. Further, after immersing the laminate in 10% sulfuric acid for 1 minute, as a pre-dip, immersed in 0.8% hydrochloric acid for 2 minutes in a solution of Meltex Co., Ltd. Enplate PC-236 dissolved at a rate of 180 g / L. did.

  Further, the laminate was prepared by adding 150% of Enplate PC-236 manufactured by Meltex Co., Ltd. in an aqueous solution prepared by dissolving 3% of Enplate Activator 444 manufactured by Meltex Co., Ltd., 1% of Enplate Activator Additive, and 3% of hydrochloric acid. The catalyst particles were adhered to the surface of the laminate and the wall surface of the through hole by immersing in a solution dissolved at a ratio of L for 5 minutes. Next, the laminate was immersed in a 5% solution of Enplate PA-360 manufactured by Meltex Co., Ltd. for 5 minutes to activate the palladium catalyst nucleus. Thereafter, the first and third mask layers were peeled off to obtain an expanded porous PTFE resin sheet in which catalytic palladium particles adhered only to the wall surface of the through hole.

  Meltex Co., Ltd. Melplate Cu-3000A, Melplate Cu-3000B, Melplate Cu-3000C, Melplate Cu-3000D are each 5%, and Melplate Cu-3000 Stabilizer is 0.1%. The porous PTFE resin sheet was immersed for 20 minutes in the electrolytic copper plating solution with sufficient air stirring, and only the wall surface of the through hole was made conductive with copper particles.

  Subsequently, gold plating was performed in order to improve rust prevention and contact with electrodes such as a circuit board. For the gold plating, a displacement gold plating method from nickel was adopted by the following method. A porous PTFE resin sheet with copper particles attached to the wall surface of the through-hole is dipped in Atotech's Activator Aurotech SIT Additive (80m1 / L) as a pre-dip for 3 minutes, and then Atotech's Aurotech SIT Activator Conc. (125 ml / L), immersed in a bath solution of Atotech's Activator Aurotech SIT Additive (80 ml / L) for 1 minute, and further immersed in Atotech's Aurotech SIT post dip (25 ml / L) for 1 minute. Deposited on copper particles.

  Next, it is stretched to an electroless nickel plating solution built with sodium hypophosphite (20 g / L), trisodium citrate (40 g / L), ammonium borate (13 g / L), and nickel sulfate (22 g / L). The porous PTFE resin sheet was immersed for 5 minutes, and the copper particles were nickel-coated. Subsequently, Meltex replacement gold plating solution [Melplate AU-6630A (200 ml / L), Melplate AU-6630B (100 ml / L), Melplate AU-6630C (20 ml / L), sodium gold sulfite aqueous solution (as gold 1.0 g / L)] was immersed in the base film for 5 minutes to carry out gold coating of conductive particles.

  In this way, the stretched porous PTFE resin sheet 11 in which a plurality of through holes 13 shown in FIG. By the same method as described above, an expanded porous PTFE resin sheet 12 in which the electrode pitch was 0.50 mm and the cylindrical electrodes were formed at nine locations (3 vertical × 3 horizontal) was formed. A surface electrode was formed at a predetermined location on the surface of the stretched porous PTFE resin sheet 12 by a photolithography technique according to a conventional method.

The stretched porous PTFE resin sheets 11 and 12 obtained above were superposed and heated and pressurized under the conditions of a temperature of 350 ° C. and a pressure of 100 g / cm ² for 2 hours to heat-seal the laminated interface. In this way, a sheet-like connector having a structure as shown in FIGS.

  It was confirmed that the sheet-like connector obtained in this manner is conductive when a load is applied and elastically recovers to its original shape when the load is removed. This sheet-like connector was fixed by pinning after adjusting the positional relationship so that each inspection electrode and each cylindrical electrode were connected to the inspection electrode region of the electrical inspection apparatus. The electrical inspection of the semiconductor chip was repeated 10,000 times, but the substrate composed of the stretched porous PTFE resin sheet was not deformed and could be inspected smoothly.

[Example 2]
In the same manner as in Example 1, on the first stretched porous PTFE resin sheet, through holes having a diameter of 100 μmφ were drilled at 15 locations (5 vertical × 3 horizontal) at a pitch of 0.25 mm, and the inner wall was electrically conductive. A cylindrical electrode was formed by processing. In the second stretched porous PTFE resin sheet, through holes having a diameter of 2000 μmφ were drilled at 15 places (5 vertical × 3 horizontal) at a pitch of 0.50 mm, and the inner wall was subjected to conductive treatment to form a cylindrical electrode. Formed. The third stretched porous PTFE resin sheet has a pitch of 0.75 mm, drilled through holes with a diameter of 300 μm in 15 locations (5 vertical × 3 horizontal), and electrically conductively treated the inner wall to form a cylindrical electrode. Formed.

The three stretched porous PTFE resin sheets obtained above were superposed and heated and pressed under the conditions of a temperature of 350 ° C. and a pressure of 100 g / cm ² for 2 hours to thermally bond each laminated interface. In this way, a sheet-like connector having a structure as shown in FIGS.

  It was confirmed that the sheet-like connector obtained in this manner is conductive when a load is applied and elastically recovers to its original shape when the load is removed. This sheet-like connector was fixed by pinning after adjusting the positional relationship so that each inspection electrode and each cylindrical electrode were connected to the inspection electrode region of the electrical inspection apparatus. Although the electrical inspection of the printed circuit board was repeated 10,000 times, there was no deformation of the board composed of the stretched porous PTFE resin sheet, and the inspection could be performed smoothly.

  The sheet-like connector of the present invention can be used for electrical inspection of circuit devices such as semiconductor integrated circuit devices and printed circuit boards.

It is a schematic diagram showing an example of the sheet-like connector of the present invention. 2 is a schematic diagram illustrating an internal structure of the sheet-like connector of FIG. 1. It is sectional drawing of the sheet-like connector of FIG. It is the schematic which shows another example of the sheet-like connector of this invention. 5 is a schematic diagram showing an internal structure of the sheet-like connector of FIG. It is sectional drawing of the sheet-like connector of FIG. It is sectional drawing which shows the typical example of the sheet-like connector of a prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Stretched porous PTFE resin sheet 12 Stretched porous PTFE resin sheet 13 Through-hole 14 Cylindrical electrode 15 Surface circuit of lamination | stacking interface 23 Through-hole 24 Cylindrical electrode 40 Stretched porous PTFE resin sheet 41 Stretched porous PTFE resin sheet 42 Stretched Porous PTFE resin sheet 43 Through hole 44 Cylindrical electrode 54 Cylindrical electrode 64 Cylindrical electrode 71 Electrical inspection device 72 Surface portion on which inspection electrode is arranged 73 Anisotropic conductive sheet 74 Sheet-like connector 75 Screw 76 Inspection electrode 77 Lead Wire 78 probe electrode 79 circuit 80 electrode

Claims (11)

  A plurality of electrodes are formed in different patterns on one outermost surface A and the other outermost surface B of the elastic resin sheet substrate, and each electrode on the outermost surface A and these electrodes are formed inside the elastic resin sheet substrate. Each of the electrodes on the outermost surface B corresponding to is electrically connected to the sheet-like connector.   A plurality of electrodes are formed on one outermost surface A of the elastic resin sheet substrate at a pitch corresponding to the arrangement pitch of the electrodes to be inspected provided on the circuit board to be inspected. A plurality of electrodes are formed at a pitch corresponding to the arrangement pitch of the inspection electrodes provided in the mechanical inspection device, the electrode pitch of the outermost surface B is larger than the electrode pitch of the outermost surface A, and the elastic resin sheet base The sheet-like connector according to claim 1, wherein each electrode on the outermost surface A and each corresponding electrode on the outermost surface B are electrically connected to each other inside the material.   The elastic resin sheet substrate has a multilayer structure in which a plurality of elastic resin sheets are heat-sealed at the lamination interface, and each elastic resin sheet layer is formed on each elastic resin sheet layer as an electrode. 3. A sheet-like connector according to claim 1 or 2, wherein a cylindrical electrode is formed by conducting an inner surface of the through hole.   The elastic resin sheet substrate has a two-layer structure in which two elastic resin sheets are heat-sealed at the lamination interface, and the elastic resin sheet layer I having one outermost surface A includes the electrode to be inspected. A plurality of cylindrical electrodes are formed at a pitch corresponding to the arrangement pitch, and a plurality of cylindrical electrodes are formed at a pitch corresponding to the arrangement pitch of the inspection electrodes on the elastic resin sheet layer II having the other outermost surface B. In addition, a surface circuit that electrically connects each cylindrical electrode of the elastic resin sheet layer I and each cylindrical electrode of the elastic resin sheet layer II corresponding thereto is formed at the lamination interface. The sheet-like connector according to claim 3.   The elastic resin sheet substrate has a multilayer structure in which three or more elastic resin sheets are heat-sealed at each lamination interface, and the elastic resin sheet layer a having one outermost surface A includes the inspected A plurality of cylindrical electrodes are formed at a pitch corresponding to the arrangement pitch of the electrodes, and the plurality of cylindrical electrodes are formed at a pitch corresponding to the arrangement pitch of the inspection electrodes on the elastic resin sheet layer b having the other outermost surface B. In the one or more elastic resin sheet layers formed and arranged as an intermediate layer, a plurality of cylindrical electrodes are formed at an intermediate pitch between the electrode pitch of the outermost surface A and the electrode pitch of the outermost surface B, In addition, the corresponding cylindrical electrodes of all layers are electrically connected directly or via a surface circuit at each lamination interface, so that the electrode pitch of the outermost surface A is the outermost surface via the electrode pitch of the intermediate layer. Sequential expansion up to the electrode pitch of B Sheet-like connector according to claim 3, wherein being.   The sheet-like connector according to any one of claims 1 to 5, wherein the elastic resin sheet constituting the elastic resin sheet substrate is a porous fluororesin sheet.   The sheet-like connector according to claim 6, wherein the porous fluororesin sheet is a stretched porous polytetrafluoroethylene resin sheet.   The sheet-like connector according to any one of claims 3 to 7, wherein the cylindrical electrode is obtained by conducting a conductive treatment on an inner wall of a through hole formed in an elastic resin sheet by electroless plating.   The sheet-like connector according to claim 4, wherein the surface circuit is formed by electroless plating on the surface of the elastic resin sheet layer I or the elastic resin sheet layer II.   By forming a plurality of through holes at a predetermined pitch in the elastic resin sheet and then forming a cylindrical electrode by electroless plating on the inner wall of each through hole, cylindrical electrodes having different electrode pitches were formed. Step 1 for producing a plurality of elastic resin sheets; a plurality of elastic resin sheets formed with cylindrical electrodes having different electrode pitches are stacked so that the electrode pitches are sequentially enlarged, and the corresponding cylindrical electrodes in all layers A method of manufacturing a sheet-like connector, comprising: a step 2 of electrically connecting each of the above and a surface circuit; and a step 3 of thermally fusing the laminated interface.   The method according to claim 10, wherein the elastic resin sheet is a stretched porous polytetrafluoroethylene resin sheet.

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