JP2007278657A - Air blower of fan filter unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To easily attach a fan filter unit and to easily detach a filter in the fan filter unit used in a clean room requiring a clean space. <P>SOLUTION: The air blower of the fan filter unit consists of a chamber 3 including a fan 1, motor 2 and a dust removing filter 4, a dust removing filter fixing means from a fan unit side and a louver 8 from the dust removing filter 4 to a blow-out direction of the fan filter unit, a second louver 9 and a rectifying means 10 and is capable of setting an opening of arbitral direction and shape for the chamber 3 without influenced by a setting situation and thus it is possible to obtain an air purifying effect, reducing work load and increasing a speed. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a fan filter unit air blower used in a clean room requiring a clean space such as a semiconductor factory or a food factory.

  Conventionally, this type of fan filter unit blower is known to have a laminated structure with a dust filter provided on the downstream side of the chamber of the fan filter unit structure to be attached to the top of the structure in the clean room. (For example, refer to Patent Document 1).

  Here, a specific configuration of the fan filter unit blower will be described with reference to FIG.

As shown in the figure, the fan filter unit is normally rectangular, and the fan filter unit 100 includes a chamber 3 containing a fan unit including a fan 1 and a motor 2 and a dust filter 4 detachable below the chamber 3. An upstream through hole 101 and a downstream through hole 102 of the filter provided in a frame portion having a substantially C-shaped or B-shaped cross section of the dust removal filter 4 are provided, and the upstream through hole 101 is fixed to the chamber 3 by the fixing means 103. Fixed. Further, the fan filter unit 100 is disposed on the top surface 104 of the opening 14 of the structure 14 provided with the opening, and is fixed to the edge of the opening by the body fixing metal fitting 106 disposed in the chamber 3. Further, the downstream through hole 102 of the dust filter 4 is provided with a punching means 105 after the dust filter 4 is fixed to the chamber 3. The shape of the dust filter 4 is normally the same as that of the chamber 3 and constitutes a fan filter unit.
JP 2000-244147 A (paragraphs 0027 to 0034, FIGS. 1 to 16)

  In such a conventional laminated structure of the chamber and the dust filter, installing in the opening of an arbitrary shape closes the downstream part of the square filter, and the scavenging in the clean space cannot be performed. In a situation where it is difficult to attach the device to the device, there is a problem that a clean environment is hindered because a space that cannot be scavenged is created in the clean space where a clean environment should be maintained.

  In addition, the maintenance space above the structure during operation tends to shrink due to the unitization and space saving of the equipment compared to the beginning of installation, and it is difficult to secure the maintenance space above the structure. Space is required.

  Further, in a clean space, there is a tendency that a higher cleanliness is required, and for that purpose, scavenging from the entire ceiling surface is required.

  Further, the air blowing state from the dust filter is closely related to the high cleanliness, and the air blowing state is required to be uniform.

  The present invention solves the problem of a blower that supplies clean air from a rectangular opening with such a conventional laminated structure, and can supply clean air from an arbitrary opening, and saves space. It is an object of the present invention to provide a fan filter unit air blower that can attach / detach the dust filter and save maintenance and can make air blown from an arbitrary opening uniform.

  In order to achieve the above object, the fan filter unit blower of the present invention has a fan unit including a fan and a motor, a chamber containing the dust filter, and a blow-off opening on a surface of the chamber different from the blow-out surface of the dust filter. This is a fan filter unit air blower comprising a chamber air passage provided with a portion. By this means, an arbitrary opening surface can be formed.

  Another means is characterized in that the blowout opening has an arbitrary shape. By this means, the air passage to the clean space can be formed in an arbitrary shape.

  Further, the other means is provided with a fixing means for fixing the dust filter from the fan unit side with an L-shaped metal fitting. By this means, it is possible to obtain a fan filter unit air blower capable of maintaining the dust filter from an arbitrary direction.

  Further, the other means has a fixing metal fitting for contacting the chamber and fixing the dust filter to the chamber, and the fixing means is made of an elastic metal fitting that holds the outer peripheral frame of the dust removal chamber and can be pressed against the chamber side. is there.

  As another means, the chamber comprises a door having a hinge means on the side surface and a fan unit constructed on the door. By this means, the fan filter unit is installed, and the dust filter can be easily attached and detached.

  The other means comprises a flat wind direction plate and a curved wind direction plate connected to the flat wind direction plate at a portion facing the blowout opening portion downstream of the dust filter inside the chamber. Thereby, the air blower of the fan filter unit which can guide the ventilation from a dust removal filter uniformly to arbitrary directions is obtained.

  Further, the other means comprises a plurality of flat wind direction plates in a portion facing the blowout opening portion on the downstream side of the dust filter inside the chamber. This means has the effect of making the air blown from the dust filter uniform.

  Another means is a curved wind direction plate in a portion facing the outlet opening portion on the downstream side of the dust filter inside the chamber. By this means, the air from the dust removing filter is made uniform and guided to the opening.

  Another means is that a rectifying means is provided in front of the blowing opening inside the chamber.

  ADVANTAGE OF THE INVENTION According to this invention, the ventilation direction can be set other than the lamination direction of a dust removal filter and a fan unit, and the air blower of the fan filter unit which can eliminate the suction space of a lamination direction can be provided.

  Moreover, the air blower of the fan filter unit which has the effect which can form a ventilation opening part arbitrarily with respect to the arbitrary shapes of the ceiling surface of ventilation space can be provided.

  Moreover, the dust filter can be easily taken out from the fan unit side, and a fan filter unit air blower with maintenance can be provided.

  Moreover, the air blower of the fan filter unit which has a rectification effect in the flow after passing a dust removal filter can be provided.

  According to the first aspect of the present invention, a fan unit comprising a fan and a motor and a dust removal filter are contained in the chamber, and a blower passage for the chamber in which a blowout opening is provided on a surface of the chamber different from the blowout surface of the dust removal filter. The fan filter unit is composed of the following, and an arbitrary opening surface can be formed.

  Further, the invention according to claim 2 of the present invention is characterized in that the blowout opening portion has an arbitrary shape, and the air passage to the clean space can be formed in an arbitrary shape.

  The invention according to claim 3 of the present invention is provided with a fixing means for fixing the dust filter with an L-shaped bracket from the fan unit side. The fan filter unit is installed and the dust filter is attached and detached. Easy to do.

  Further, the invention according to claim 4 of the present invention has a fixing bracket that contacts the chamber and fixes the dust removal filter to the chamber, and the fixing means holds the outer peripheral frame of the dust removal chamber and has elasticity capable of being pressed against the chamber side. The fan filter unit mounting device according to claim 3, comprising a metal fitting, and can easily attach and detach the dust filter without using a tool.

  In the invention according to claim 5 of the present invention, the chamber is composed of a door having hinge means on the side surface and a fan unit constructed in the door, and has an effect of improving the maintenance of the dust removing filter.

  Further, the invention according to claim 6 of the present invention comprises a flat wind direction plate and a curved wind direction plate connected to the flat wind direction plate at a portion facing the blowout opening portion downstream of the dust filter inside the chamber. It has the effect | action which guides the ventilation from a dust removal filter to an opening part.

  Further, the invention according to claim 7 of the present invention is composed of a plurality of flat air direction plates in a portion facing the blowout opening portion on the downstream side of the dust filter inside the chamber, and uniformly blows air from the dust filter. Have the effect of

  Further, the invention according to claim 8 of the present invention comprises a curved wind direction plate in a portion facing the blowout opening portion downstream of the dust filter inside the chamber, and uniform air flow from the dust filter. Has the effect of leading to the opening.

  The invention according to claim 9 of the present invention is such that a rectifying means is provided in front of the blowout opening inside the chamber and has a rectifying action.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
As shown in FIGS. 1 and 2, the chamber 3 including the fan unit 5 including the fan 1 and the motor 2 and the dust filter 4 is provided with a blow-off opening 7 in an arbitrary direction and installed on the ceiling surface of the device. Can do.

  In FIG. 2, the blowout opening 7 forms an arbitrary shape to constitute the chamber 3 and can blow clean air from the dust filter 4.

  In FIG. 1, the dust removal filter 4 is fixed to the inner surface of the chamber 3 containing the fan unit 5 by an L-shaped bracket 6, and the fan unit 5 is a chamber 3 having a lid structure upstream of the dust removal filter 4 of the chamber 3. Consists of sides.

  In the above configuration, the side surface of the chamber 3 having the lid structure is detachable, the fan unit 5 is also detachable, and the dust filter 4 can be removed from the fan filter knit. Further, although the fixing means is the L-shaped metal fitting 6, an elastic body 6 a for holding the outer peripheral frame 4 a of the dust removing filter 4 and press-contacting the downstream opening of the chamber 3 as shown in FIG.

  In FIG. 2, the side surface of the chamber 3 having a lid structure is integrated with the fan unit 5, and is configured such that each end is connected by the chamber 3 and the hinge means 12, so that the door can be opened and closed. The fan unit 5 is obtained. With this configuration, the dust filter included in the chamber 3 can be attached from the door portion of the fan unit 5.

  Further, in FIG. 1, a wind direction plate 8 inclined to the chamber outlet and a second wind direction plate 9 connected to the wind direction plate 8 are provided on the downstream side of the dust removal filter of the chamber 3, and air is sent from the dust removal filter 4 in the previous period. It arrange | positions so that it may guide | lead to the blower outlet of the chamber 3, and the blowout in arbitrary directions is attained.

  In FIG. 1, rectifying means arranged after being led out by the first wind direction plate 8 and the second wind direction plate 9, preferably a flat plate in which pores are arranged at equal intervals, or a non-woven sheet having a uniform density enables uniform air blowing. Become.

(Embodiment 2)
A second embodiment of the present invention will be described with reference to FIGS.

  FIG. 5 includes a plurality of wind direction plates 8 inclined at an arbitrary interval on the downstream side of the dust removal filter 4 in the chamber 3, and the air blown from the dust removal filter 4 is arbitrarily led out to the blowout port 13 of the previous chamber 3. Therefore, arbitrary air blowing from the air outlet 13 is made possible.

  6 includes a plurality of second wind direction plates 9 inclined to the air outlet 13 of the chamber 3 at an arbitrary interval on the downstream side of the dust removing filter of the chamber 3, and the air blown from the dust removing filter 4 is arbitrarily supplied to the air outlet 13 of the previous chamber 3. Thus, it is possible to perform arbitrary air blowing from the air outlet 13.

  By attaching a fan-shaped fan unit to the side of the fan filter unit and enclosing the dust filter fixing means in the chamber, it is possible to easily replace the dust filter, and to form an outlet in an arbitrary direction of the chamber. A fan filter unit is attached to the ceiling surface of an arbitrarily shaped structure, and can be applied to achieve an arbitrarily shaped clean space.

Sectional drawing which shows the structure of Embodiment 1 of this invention The top view from the lower part which shows the structure of Embodiment 1-2 of this invention The top view from the lower part which shows the integral structure of the door of the fan unit of Embodiment 1-2 of this invention Sectional drawing which shows the wind direction board structure of Embodiment 1-2 of this invention Sectional drawing which shows the wind direction board structure of Embodiment 2 of this invention Sectional drawing which shows the 2nd wind direction board structure of Embodiment 2 of this invention Sectional drawing which shows conventional embodiment

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Fan 2 Motor 3 Chamber 4 Dust removal filter 4a Outer frame 5 Fan unit 6 L-shaped metal fitting 6a Elastic body for pressure contact 7 Blowing opening 8 Wind direction plate (flat plate)
9 Second wind direction plate (curved plate)
DESCRIPTION OF SYMBOLS 10 Rectification means 11 2nd rectification means 12 Hinge means 13 Air outlet 14 Structure 100 Fan filter unit

Claims (9)

A fan filter unit blower comprising: a fan unit comprising a fan and a motor; a chamber containing a dust removal filter; and a blower passage of the chamber in which a blowout opening is provided on a surface of the chamber different from the blowout surface of the dust removal filter. The blower opening device for a fan filter unit according to claim 1, wherein the blowout opening portion has an arbitrary shape. 3. The fan filter unit blower according to claim 1, further comprising a fixing unit that can fix the dust filter from the fan unit side with an L-shaped bracket. 4. The fan filter unit according to claim 3, further comprising: a fixture that abuts the chamber and fixes the dust filter to the chamber, and the fixing means includes a bracket that holds the outer peripheral frame of the dust removal chamber and has elasticity capable of being pressed against the chamber. Mounting device. The fan device for a fan filter unit according to any one of claims 1 to 4, wherein the chamber includes a door having a hinge means on a side surface and a fan unit constructed in the door. The fan filter unit according to any one of claims 1 to 5, comprising a flat wind direction plate and a curved wind direction plate connected to the flat wind direction plate at a portion facing the blowout opening portion downstream of the dust filter inside the chamber. Blower. The fan device of the fan filter unit according to any one of claims 1 to 5, comprising a plurality of flat wind direction plates in a portion of the chamber facing a blow-off opening portion on the downstream side of the dust filter. The fan filter unit blower according to any one of claims 1 to 5, comprising a curved airflow direction plate at a portion facing the blowout opening portion on the downstream side of the dust filter inside the chamber. The air blower of the fan filter unit according to any one of claims 1 to 8, wherein a rectifying means is provided in front of the blowout opening inside the chamber.

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