JP2007270438A - Building structure equipped with clean room - Google Patents

Building structure equipped with clean room Download PDF

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JP2007270438A
JP2007270438A JP2006094176A JP2006094176A JP2007270438A JP 2007270438 A JP2007270438 A JP 2007270438A JP 2006094176 A JP2006094176 A JP 2006094176A JP 2006094176 A JP2006094176 A JP 2006094176A JP 2007270438 A JP2007270438 A JP 2007270438A
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floor slab
clean room
building
closed space
foundation
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JP4908034B2 (en
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Hisayoshi Ishibashi
久義 石橋
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Kumagai Gumi Co Ltd
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Kumagai Gumi Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a building structure equipped with a clean room, which is economically constructed by securing a space for circulation of air without increasing the height of the building. <P>SOLUTION: The building structure equipped with the clean room includes base isolation devices for bearing a floor slab constituting the clean room on a foundation, and blocking means interposed between the floor slab and the foundation, for defining a closed space with respect to the floor slab. Each blocking means includes a bottom plate arranged under the floor slab so as to be spaced away from the same, and side plates each connecting between the bottom plate and the floor slab or the like at a location near the base isolation device. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、室内の塵や埃の量が一定の基準以下に制限された部屋、すなわちクリーンルームを備えた建物の構造に関する。   The present invention relates to a structure of a building including a room in which the amount of dust and dust in a room is limited to a certain standard or less, that is, a clean room.

半導体、精密電子機器等の製造工場のようなクリーンルームを備えた建物には、地震による製造装置の損傷、誤作動等を防止するため、建物の床版が免震装置によって基礎上に支持されているものがある（特許文献１参照）。図５に示す例では、クリーンルーム１００を備えた従来の建物１０２は、免震装置１０４により基礎１０６上に支持された仕切り板１０８、該仕切り板上の壁１１０及び該壁上の屋根１１２によって、外気から遮断された空間１１４が形成されている。クリーンルーム１００は、外気から遮断された空間１１４内にあって、仕切り板１０８の上方に設けられた床版１１６、該床版上の内壁１１８及び該内壁上の天井１２０によって形成されている。床版１１６は複数の通気孔（図示せず）を有し、天井１２０は、フィルター（図示せず）が配置された開口部（図示せず）を有する。外気から遮断された空間１１４内には前記フィルターを経てクリーンルーム１００へ空気を送り込むファン（図示せず）が設置されている。
特開２００６−２５５９号公報 In buildings with clean rooms such as semiconductor and precision electronics manufacturing factories, the floor slabs of buildings are supported on the foundation by seismic isolation devices to prevent damage or malfunction of manufacturing equipment due to earthquakes. (See Patent Document 1). In the example shown in FIG. 5, a conventional building 102 equipped with a clean room 100 includes a partition plate 108 supported on a foundation 106 by a seismic isolation device 104, a wall 110 on the partition plate, and a roof 112 on the wall. A space 114 that is blocked from outside air is formed. The clean room 100 is in a space 114 shielded from outside air, and is formed by a floor slab 116 provided above the partition plate 108, an inner wall 118 on the floor slab, and a ceiling 120 on the inner wall. The floor slab 116 has a plurality of ventilation holes (not shown), and the ceiling 120 has an opening (not shown) in which a filter (not shown) is arranged. A fan (not shown) for sending air to the clean room 100 through the filter is installed in the space 114 cut off from the outside air.
JP 2006-2559 A

前記ファンを運転すると、前記フィルターを経た清浄な空気１２２がクリーンルーム１００へ供給される。クリーンルーム１００に供給された空気は、塵や埃とともに床版１１６を経て排出され、外気から遮断された空間１１４を通り、前記フィルターを経て再びクリーンルーム１００へ供給される。外気から遮断された空間１１４を経て空気を循環させることにより、建物の外部から塵や埃が入るのを防止することができる。また、循環させる空気内に存在する塵や埃は前記フィルターにより除去することができる。これによりクリーンルーム１００内の塵や埃の量を一定のレベル以下に制限することができる。   When the fan is operated, clean air 122 that has passed through the filter is supplied to the clean room 100. The air supplied to the clean room 100 is discharged together with dust and dust through the floor slab 116, passes through the space 114 shielded from outside air, and is supplied again to the clean room 100 through the filter. By circulating the air through the space 114 that is blocked from the outside air, dust and dirt can be prevented from entering from the outside of the building. Also, dust and dirt present in the circulating air can be removed by the filter. Thereby, the amount of dust and dust in the clean room 100 can be limited to a certain level or less.

しかし、クリーンルームを備えた従来の建物１０２は、空気を循環させるために床版１１６と床下を仕切る仕切り板１０８との間に空間が設けられているため、建物の高さが高くなり、建物の構築にかかる費用が高くつく。   However, the conventional building 102 equipped with a clean room has a space between the floor slab 116 and the partition plate 108 that divides the floor to circulate air. The construction cost is expensive.

本発明の目的は、建物の高さを増すことなく空気の循環のための空間を確保することによって、より経済的な構築を可能にする、クリーンルームを備えた建物の構造を提供することである。   It is an object of the present invention to provide a building structure with a clean room that allows more economical construction by ensuring space for air circulation without increasing the height of the building. .

本発明は、前記目的を達成するために、空気を循環させるための閉鎖空間を床版と基礎との間に形成する。   In order to achieve the object, the present invention forms a closed space for circulating air between the floor slab and the foundation.

本発明に係る、クリーンルームを備えた建物の構造は、前記クリーンルームを構成する床版を基礎上に支持する免震装置と、前記床版と前記基礎との間にあって、前記床版との間に閉鎖空間を形成する閉鎖手段とを含む。これにより、前記床版と前記基礎との間に前記閉鎖空間を確保することができ、前記閉鎖空間を経て空気を循環させることができる。前記閉鎖手段は、前記床版と前記基礎との間の空間の全体に前記閉鎖空間を形成してもよいし、前記床版と前記基礎との間の空間の一部に前記閉鎖空間を形成してもよい。   A structure of a building having a clean room according to the present invention is a seismic isolation device for supporting a floor slab constituting the clean room on a foundation, between the floor slab and the foundation, and between the floor slab Closing means for forming a closed space. Thereby, the closed space can be secured between the floor slab and the foundation, and air can be circulated through the closed space. The closing means may form the closed space in the entire space between the floor slab and the foundation, or form the closed space in a part of the space between the floor slab and the foundation. May be.

前記閉鎖手段は、前記床版の下方に間隔を置いて配置された底板と、該底板と前記免震装置近傍の前記床版、該床版に固定されたもの等（以下「床版等」という。）とを連結する側板とを含むことができる。前記側板は透明とすることができ、これにより前記免震装置の目視点検を容易に行うことができる。前記側板は、前記免震装置の点検のための点検用開口部と、該点検用開口部を閉鎖する閉鎖部材とを備えることができる。これにより、前記免震装置の点検を行うとき、作業員が前記点検用開口部を経て前記免震装置に接近することができる。前記閉鎖手段は前記床版に取り付けられた送風管、すなわちダクトとすることもできる。   The closing means includes a bottom plate arranged below the floor slab at an interval, the bottom plate and the floor slab in the vicinity of the seismic isolation device, one fixed to the floor slab (hereinafter referred to as “floor slab”) And a side plate that connects to each other. The side plate can be transparent, whereby the seismic isolation device can be easily visually inspected. The side plate can include an inspection opening for inspecting the seismic isolation device and a closing member for closing the inspection opening. Thereby, when inspecting the seismic isolation device, an operator can approach the seismic isolation device through the inspection opening. The closing means may be a blower pipe attached to the floor slab, that is, a duct.

本発明によれば、クリーンルームを備えた建物の高さを増すことなく空気の循環のための空間を確保することができ、これにより経済的に建物を構築することができる。   ADVANTAGE OF THE INVENTION According to this invention, the space for the circulation of air can be ensured, without increasing the height of the building provided with the clean room, and, thereby, a building can be constructed economically.

図１に示すように、クリーンルーム１０を備えた建物１２は、基礎１４上に配置された免震装置１６と、該免震装置に支持された床版１８とを有し、該床版、該床版上の壁２０及び該壁上の屋根２２によって第１閉鎖空間２４が形成されている。クリーンルーム１０は、第１閉鎖空間２４内にあって、床版１８の一部と、該床版上の内壁２６と、該内壁上の天井２８とによって形成されている。免震装置１６は、例えば、積層ゴム、すなわち鋼板とゴムとを交互に重ねた構造を有する免震装置である。クリーンルーム１０には、半導体、精密電子機器等の製造装置３０が配置されている。   As shown in FIG. 1, a building 12 having a clean room 10 includes a base isolation device 16 disposed on a foundation 14 and a floor slab 18 supported by the base isolation device. A first closed space 24 is formed by the wall 20 on the floor slab and the roof 22 on the wall. The clean room 10 is in the first closed space 24 and is formed by a part of the floor slab 18, an inner wall 26 on the floor slab, and a ceiling 28 on the inner wall. The seismic isolation device 16 is, for example, a laminated rubber, that is, a seismic isolation device having a structure in which steel plates and rubber are alternately stacked. In the clean room 10, a manufacturing apparatus 30 such as a semiconductor or a precision electronic device is disposed.

建物１２は、床版１８と基礎１４との間にあって、床版１８との間に第２閉鎖空間３２を形成する閉鎖手段３４を含む。図示の例では、第２閉鎖空間３２は床版１８と基礎１４との間の空間の全体に形成されている。閉鎖手段３４は、例えば、床版１８の下方に間隔を置いて配置された底板３６と、該底板と免震装置１６上に床版１８を支持する梁３８とを連結する側板４０とを含む。側板４０の一端は、梁３８に取り付けられている上記の例に代え、床版１８に取り付けられていてもよいし、床版１８又は梁３８に固定されたもの（図示せず）に取り付けられていてもよい。なお、閉鎖手段３４は、床版１８等に固定されているため、地震時に床版１８と基礎１４との相対移動を妨げることはない。   The building 12 includes a closing means 34 which is between the floor slab 18 and the foundation 14 and forms a second closed space 32 between the floor slab 18. In the illustrated example, the second closed space 32 is formed in the entire space between the floor slab 18 and the foundation 14. The closing means 34 includes, for example, a bottom plate 36 that is spaced below the floor slab 18, and a side plate 40 that connects the bottom plate and a beam 38 that supports the floor slab 18 on the seismic isolation device 16. . One end of the side plate 40 may be attached to the floor slab 18 instead of the above example attached to the beam 38, or attached to the floor slab 18 or one fixed to the beam 38 (not shown). It may be. In addition, since the closing means 34 is being fixed to the floor slab 18 grade | etc., It does not prevent the relative movement of the floor slab 18 and the foundation 14 at the time of an earthquake.

床版１８は、クリーンルーム１０と第２閉鎖空間３２とを連通させる第１連通部４２と、第１閉鎖空間２４と第２閉鎖空間３２とを連通させる第２連通部４４とを有する。第１連通部４２の範囲は、クリーンルーム１０に要求される空気の清浄度に応じて決めることができる。第１連通部４２及び第２連通部４４のそれぞれは、例えば、複数の通気孔を有する床板（図示せず）からなる。クリーンルーム１０の天井２８は少なくとも１つの開口部（図示せず）を有し、該開口部にはフィルター（図示せず）が配置されている。第１閉鎖空間２４には、クリーンルーム１０へ空気を送り込むファン（図示せず）が配置されている。   The floor slab 18 includes a first communication portion 42 that allows the clean room 10 and the second closed space 32 to communicate with each other, and a second communication portion 44 that allows the first closed space 24 and the second closed space 32 to communicate with each other. The range of the 1st communication part 42 can be determined according to the cleanliness of the air requested | required of the clean room 10. FIG. Each of the 1st communicating part 42 and the 2nd communicating part 44 consists of a floor board (not shown) which has a plurality of ventilation holes, for example. The ceiling 28 of the clean room 10 has at least one opening (not shown), and a filter (not shown) is disposed in the opening. A fan (not shown) that sends air into the clean room 10 is disposed in the first closed space 24.

前記ファンを運転すると、第１閉鎖空間２４から前記フィルターを経てクリーンルーム１０に空気４６が送られる。クリーンルーム１０に供給された空気は、塵や埃とともに第１連通部４２を経て第２閉鎖空間３２へ排出され、第２連通部４４を経て第１閉鎖空間２４へ流れ、前記フィルターを経て再びクリーンルーム１０に供給される。外気から遮断された第１閉鎖空間２４及び第２閉鎖空間３２を経て空気を循環させることにより、建物の外部から塵や埃が入るのを防止することができる。また、第１閉鎖空間２４又は第２閉鎖空間３２に存在する塵や埃は前記フィルターによって除去することができる。これによりクリーンルーム１０内の塵や埃の量を一定の基準以下に制限することができ、クリーンルーム１０内の空気を清浄な状態に維持することができる。このように、第２閉鎖空間３２を経て空気を循環させることができ、また、第２閉鎖空間３２が床版１８と基礎１４との間に設けられているため、建物１２の高さをより低く抑えることができる。   When the fan is operated, air 46 is sent from the first closed space 24 to the clean room 10 through the filter. The air supplied to the clean room 10 is discharged together with dust and dust to the second closed space 32 via the first communication portion 42, flows to the first closed space 24 via the second communication portion 44, and again passes through the filter to the clean room. 10 is supplied. By circulating air through the first closed space 24 and the second closed space 32 that are blocked from the outside air, it is possible to prevent dust and dirt from entering from the outside of the building. Also, dust and dirt present in the first closed space 24 or the second closed space 32 can be removed by the filter. Thereby, the dust and the amount of dust in the clean room 10 can be limited to a certain standard or less, and the air in the clean room 10 can be maintained in a clean state. Thus, air can be circulated through the second closed space 32, and the second closed space 32 is provided between the floor slab 18 and the foundation 14, so that the height of the building 12 can be further increased. It can be kept low.

第２閉鎖空間３２には、製造装置３０に接続される補助装置４８を配置することができる。補助装置４８は、地震時に製造装置３０に対して相対移動することがないように、床版１８に固定することができる。   An auxiliary device 48 connected to the manufacturing apparatus 30 can be disposed in the second closed space 32. The auxiliary device 48 can be fixed to the floor slab 18 so as not to move relative to the manufacturing device 30 during an earthquake.

側板４０は、免震装置１６の目視点検を容易に行うために、透明とすることができる。また、側板４０は、免震装置１６の点検のための点検用開口部４０ａと、該点検用開口部を閉鎖する閉鎖部材４０ｂとを備えることができる（図２）。これにより、免震装置１６の点検を行うとき、作業員が点検用開口部４０ａを経て免震装置１６に接近することができる。なお、免震装置１６の点検を行うとき、作業員は床板を外して第２閉鎖空間３２に入ることができ、点検用開口部４０ａを開放するときは、例えば、点検用開口部４０ａの周囲をシートで覆い、第２閉鎖空間３２又はクリーンルーム１０に外部から塵や埃が入るのを防止することができる。   The side plate 40 can be transparent in order to facilitate visual inspection of the seismic isolation device 16. Further, the side plate 40 can include an inspection opening 40a for inspecting the seismic isolation device 16 and a closing member 40b for closing the inspection opening (FIG. 2). Thereby, when the seismic isolation device 16 is inspected, the worker can approach the seismic isolation device 16 through the inspection opening 40a. When the seismic isolation device 16 is inspected, the worker can remove the floor board and enter the second closed space 32. When opening the inspection opening 40a, for example, around the inspection opening 40a. Can be prevented from entering the second closed space 32 or the clean room 10 from the outside.

図３に示す例では、第２閉鎖空間３２は床版１８と基礎１４との間の空間の一部に形成されている。第１閉鎖空間２４は、床版１８、壁２０及び屋根２２によって形成されている図１に示した例に代え、床版１８の一部、該床版上の間仕切り壁５０、壁２０の一部及び屋根２２の一部によって形成されている。床版１８は、クリーンルーム１０と第２閉鎖空間３２とを連通させる第１連通部４２と第１閉鎖空間２４と第２閉鎖空間３２とを連通させる第２連通部４４とを有する。   In the example shown in FIG. 3, the second closed space 32 is formed in a part of the space between the floor slab 18 and the foundation 14. The first closed space 24 is a part of the floor slab 18, a partition wall 50 on the floor slab, and a part of the wall 20 instead of the example shown in FIG. 1 formed by the floor slab 18, the wall 20 and the roof 22. And part of the roof 22. The floor slab 18 includes a first communication portion 42 that allows the clean room 10 and the second closed space 32 to communicate with each other, and a second communication portion 44 that allows the first closed space 24 and the second closed space 32 to communicate with each other.

図４に示す例では、閉鎖手段３４は、底板３６と側板４０と有する上記の例に代え、床版１８に取り付けられた送風管、すなわちダクト５２である。ダクト５２の一端部は、クリーンルーム１０内の床版１８に設けられた第１開口部１８ａに接続され、ダクト５２の他端部は、第１閉鎖空間２４の床版１８に設けられた第２開口部１８ｂに接続されている。これにより第２閉鎖空間３２を局部的に形成することができる。製造装置３０の配置変更によって第１開口部１８ａの位置を変更する場合、第１開口部１８ａの位置に合わせてダクト５２の位置を変更することができる。   In the example shown in FIG. 4, the closing means 34 is a blower pipe attached to the floor slab 18, that is, a duct 52 instead of the above example having the bottom plate 36 and the side plate 40. One end of the duct 52 is connected to a first opening 18 a provided in the floor slab 18 in the clean room 10, and the other end of the duct 52 is a second provided in the floor slab 18 of the first closed space 24. It is connected to the opening 18b. Thereby, the 2nd closed space 32 can be formed locally. When the position of the first opening 18a is changed by changing the arrangement of the manufacturing apparatus 30, the position of the duct 52 can be changed according to the position of the first opening 18a.

図示の例において、クリーンルームを備えた建物の高さを増すことなく空気の循環のための空間を確保することができ、これにより経済的に建物を構築することができる。   In the illustrated example, it is possible to secure a space for air circulation without increasing the height of the building including the clean room, and thus the building can be constructed economically.

本発明に係る、クリーンルームを備えた建物の縦断面図。The longitudinal cross-sectional view of the building provided with the clean room based on this invention. 図１の線２における断面図。Sectional drawing in the line 2 of FIG. 本発明の第１の実施例における、クリーンルームを備えた建物の縦断面図。The longitudinal cross-sectional view of the building provided with the clean room in the 1st Example of this invention. 本発明に第２の実施例における、クリーンルームを備えた建物の水平断面図。The horizontal sectional view of the building provided with the clean room in the 2nd example in the present invention. クリーンルームを備えた従来の建物の縦断面図。The longitudinal cross-sectional view of the conventional building provided with the clean room.

符号の説明Explanation of symbols

１０ クリーンルーム
１２ 建物
１４ 基礎
１６ 免震装置
１８ 床版
３２ 第２閉鎖空間
３４ 閉鎖手段
３６ 底板
４０ 側板
４０ａ 点検用開口部
４０ｂ 閉鎖部材
５２ ダクト DESCRIPTION OF SYMBOLS 10 Clean room 12 Building 14 Foundation 16 Seismic isolation device 18 Floor slab 32 2nd closed space 34 Closing means 36 Bottom plate 40 Side plate 40a Inspection opening 40b Closing member 52 Duct

Claims (6)

クリーンルームを備えた建物の構造であって、前記クリーンルームを構成する床版を基礎上に支持する免震装置と、前記床版と前記基礎との間にあって、前記床版との間に閉鎖空間を形成する閉鎖手段とを含む、クリーンルームを備えた建物の構造。   A structure of a building having a clean room, a seismic isolation device for supporting a floor slab constituting the clean room on a foundation, and a closed space between the floor slab and the floor slab. A structure of a building with a clean room, including a closure means to form. 前記閉鎖手段は、前記床版と前記基礎との間の空間の全体又は一部に前記閉鎖空間を形成する、請求項１に記載のクリーンルームを備えた建物の構造。   The structure of a building with a clean room according to claim 1, wherein the closing means forms the closed space in the whole or a part of the space between the floor slab and the foundation. 前記閉鎖手段は、前記床版の下方に間隔を置いて配置された底板と、該底板と前記免震装置近傍の床版等とを連結する側板とを含む、請求項１に記載のクリーンルームを備えた建物の構造。   2. The clean room according to claim 1, wherein the closing means includes a bottom plate arranged below the floor slab at an interval, and a side plate that connects the bottom plate and a floor slab in the vicinity of the seismic isolation device. The structure of the building provided. 前記側板は透明である、請求項３に記載のクリーンルームを備えた建物の構造。   The structure of a building with a clean room according to claim 3, wherein the side plate is transparent. 前記側板は、前記免震装置の点検のための点検用開口部と、該点検用開口部を閉鎖する閉鎖部材とを有する、請求項３に記載のクリーンルームを備えた建物の構造。   The said side plate is a structure of the building provided with the clean room of Claim 3 which has the opening part for inspection for the inspection of the said seismic isolation apparatus, and the closing member which closes this opening part for inspection. 前記閉鎖手段は、前記床版に取り付けられたダクトである、請求項１に記載のクリーンルームを備えた建物の構造。

The structure of a building with a clean room according to claim 1, wherein the closing means is a duct attached to the floor slab.

JP2006094176A 2006-03-30 2006-03-30 Structure of a building with a clean room Expired - Fee Related JP4908034B2 (en)

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CN109736606B (en) * 2019-01-25 2020-06-09 国网甘肃省电力公司白银供电公司 High distribution station room of security

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04368561A (en) * 1991-06-17 1992-12-21 Toshiba Corp Earthquake-proof isolation floor
JPH08303053A (en) * 1995-04-28 1996-11-19 Hitachi Plant Eng & Constr Co Ltd Clean room building structure
JPH09268797A (en) * 1996-01-31 1997-10-14 Fujikura Ltd Seismic isolation structure of structural body
JPH1054158A (en) * 1996-08-08 1998-02-24 Fujita Corp Base isolation device
JPH11141185A (en) * 1997-11-14 1999-05-25 Tomoe Corp Electromagnetic-wave shielding building utilizing vibration-isolation construction method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04368561A (en) * 1991-06-17 1992-12-21 Toshiba Corp Earthquake-proof isolation floor
JPH08303053A (en) * 1995-04-28 1996-11-19 Hitachi Plant Eng & Constr Co Ltd Clean room building structure
JPH09268797A (en) * 1996-01-31 1997-10-14 Fujikura Ltd Seismic isolation structure of structural body
JPH1054158A (en) * 1996-08-08 1998-02-24 Fujita Corp Base isolation device
JPH11141185A (en) * 1997-11-14 1999-05-25 Tomoe Corp Electromagnetic-wave shielding building utilizing vibration-isolation construction method

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