JP2007268557A5 - - Google Patents

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Publication number
JP2007268557A5
JP2007268557A5 JP2006096066A JP2006096066A JP2007268557A5 JP 2007268557 A5 JP2007268557 A5 JP 2007268557A5 JP 2006096066 A JP2006096066 A JP 2006096066A JP 2006096066 A JP2006096066 A JP 2006096066A JP 2007268557 A5 JP2007268557 A5 JP 2007268557A5
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JP
Japan
Prior art keywords
wind cell
workpiece
cleaning
processing machine
laser processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006096066A
Other languages
Japanese (ja)
Other versions
JP2007268557A (en
JP4641276B2 (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2006096066A priority Critical patent/JP4641276B2/en
Priority claimed from JP2006096066A external-priority patent/JP4641276B2/en
Priority to KR1020070013177A priority patent/KR20070098478A/en
Priority to TW096104773A priority patent/TW200738386A/en
Priority to CNA2007100794203A priority patent/CN101045272A/en
Publication of JP2007268557A publication Critical patent/JP2007268557A/en
Publication of JP2007268557A5 publication Critical patent/JP2007268557A5/ja
Application granted granted Critical
Publication of JP4641276B2 publication Critical patent/JP4641276B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Claims (4)

レーザ発振器からのレーザビームを集光レンズにより、ＸＹテーブルに載置されて位置決めされる被加工物上に集光して加工を行うレーザ加工機において、
前記集光レンズの前記被加工物側に配置されたウインドセルと、
前記ＸＹテーブルに配置され、前記ウインドセルの表面を清掃し得るクリーニング装置と、を備え
前記クリーニング装置は、前記レーザビームによる前記被加工物の加工に際しては、前記ウインドセルから離れた位置にあり、前記ウインドセルの清掃に際して該ウインドセルに当接して清掃してなる、レーザ加工機。 By the condenser lens of the laser beam from the laser oscillator, the laser processing machine for machining and focused on a workpiece to be positioned it is placed on the XY table,
A wind cell disposed on the workpiece side of the condenser lens;
Disposed in the XY table, before comprises a cleaning device capable of cleaning the surface of Kiu Indoseru, the
The laser processing machine, wherein the cleaning device is located away from the wind cell when the workpiece is processed by the laser beam, and is cleaned by contacting the wind cell when cleaning the wind cell . 前記クリーニング装置は、中心軸の回りに回転可能なブラシと、前記ブラシを前記ウインドセルに当接する位置と離間する位置との昇降する昇降装置と、を備えることを特徴とする請求項１に記載のレーザ加工機。 The said cleaning apparatus is provided with the brush which can rotate around a center axis | shaft, and the raising / lowering apparatus which raises / lowers the position where the said brush contact | abuts to the said wind cell, and the position spaced apart. Laser processing machine. 吸塵装置を備え、
前記吸塵装置に接続する吸引口を前記ブラシ近傍に配置した、ことを特徴とする請求項２に記載のレーザ加工機。 Equipped with a dust suction device,
The laser processing machine according to claim 2, wherein a suction port connected to the dust suction device is disposed in the vicinity of the brush. 請求項１又は２記載のレーザ加工機に用いられるウインドセルであって、
前記ウインドセルの基材をゲルマニウムとし、前記被加工物と対向する側の表面にＤＬＣコーテイングを施したことを特徴とするウインドセル。 A wind cell used in the laser beam machine according to claim 1 or 2,
A wind cell characterized in that germanium is used as the base material of the wind cell, and DLC coating is applied to the surface facing the workpiece.
JP2006096066A 2006-03-30 2006-03-30 Laser processing machine and wind cell Expired - Fee Related JP4641276B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006096066A JP4641276B2 (en) 2006-03-30 2006-03-30 Laser processing machine and wind cell
KR1020070013177A KR20070098478A (en) 2006-03-30 2007-02-08 Laser machining apparatus and window cell
TW096104773A TW200738386A (en) 2006-03-30 2007-02-09 Laser machining apparatus and window cell
CNA2007100794203A CN101045272A (en) 2006-03-30 2007-03-05 Laser processing machine and window unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006096066A JP4641276B2 (en) 2006-03-30 2006-03-30 Laser processing machine and wind cell

Publications (3)

Publication Number Publication Date
JP2007268557A JP2007268557A (en) 2007-10-18
JP2007268557A5 true JP2007268557A5 (en) 2008-04-10
JP4641276B2 JP4641276B2 (en) 2011-03-02

Family

ID=38671896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006096066A Expired - Fee Related JP4641276B2 (en) 2006-03-30 2006-03-30 Laser processing machine and wind cell

Country Status (4)

Country Link
JP (1) JP4641276B2 (en)
KR (1) KR20070098478A (en)
CN (1) CN101045272A (en)
TW (1) TW200738386A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101518854B (en) * 2008-02-29 2011-08-31 深圳市大族激光科技股份有限公司 Dust suction protection device of lens
CN101884981B (en) * 2010-06-10 2012-12-26 北京中电科电子装备有限公司 Wafer cleaning device
KR101272839B1 (en) * 2011-03-04 2013-06-10 이무석 Processing apparatus for contact lens air hole

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57145644U (en) * 1981-01-28 1982-09-13
JPH0347692A (en) * 1989-07-15 1991-02-28 Fujitsu Ltd Laser beam machine
JP2004314128A (en) * 2003-04-17 2004-11-11 Sintokogio Ltd Method for modifying metallic member surface
JP2004361862A (en) * 2003-06-09 2004-12-24 Mitsubishi Electric Corp Condenser lens system, laser beam machining device, and method for adjusting condenser lens

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