JP2007268322A - Method for controlling coating device and method for manufacturing coating device and color filter using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for controlling a coating device capable of performing drawing without deviating coating points, and performing drawing by controlling functional droplets to a predetermined quantity even if a substrate of low dimensional precision by stretching a substrate having division walls is provided. <P>SOLUTION: The method for controlling a coating device designed to relatively move a substrate and ink delivering sections on a stage in a direction with which a plurality of arranged ink delivering sections intersect, output data trigger signals by the movement of a certain distance, deliver the ink from each ink delivering section, and compensate ink delivering positions and ink delivering quantities by a virtually separated individual region, and the method for controlling a coating device for a color filter that extracts positional information of a pattern formed on the substrate, operate characteristic values of deviated quantities of positions and deviated quantities of areas of ink delivered regions, and compensate the ink delivered positions and ink delivered quantities from the stored characteristic values to perform coating. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a film-based color filter manufacturing method, a glass-based color filter manufacturing method, an EL manufacturing method, and a thin-film electronic circuit board manufacturing method, and a coating that provides means capable of manufacturing regardless of the size of the substrate The present invention relates to an apparatus control method, a coating apparatus using the apparatus, and a color filter manufacturing method.

  A conventional coating apparatus detects a position of a carriage (inkjet head) having a plurality of functional liquid droplet ejection heads and a substrate relative to each other, and continuously detects the moving inkjet heads, and triggers an ejection signal. And droplet discharge was performed based on the signal.

  In a conventional coating apparatus ejection method, when droplet ejection is performed on a glass substrate that has been subjected to accurate exposure under precise temperature control and a partition wall is disposed, it is possible to detect the position of the substrate in relative movement. If droplet discharge is performed based on the generated discharge signal, the landing position does not shift.

  FIG. 5 is a side sectional view showing a conventional control example and showing that the landing positions are not displaced as a result of the partition walls on the substrate being accurately arranged.

In FIG. 5, as a result of arranging the partition walls 24 formed on the substrate in advance with high precision, the trigger signal from the data (bitmap data) matches the position accuracy of the partition walls. It is formed between the partition walls at the position. The distance between the partition walls of t ₀ to t _{1 in} FIG. 5 is a normal distance, a normal ink thickness, the distance between the partition walls of t _{1 to} t ₂ is also normal, and an ink film having a normal ink thickness It is.

  However, in the conventional method, ideal exposure and temperature control cannot be expected, and the substrate is expanded or contracted, or accurate landing is applied to a substrate having a partition wall with poor dimensional accuracy caused by a deviation at the time when the partition wall is exposed. I can't hope.

  FIG. 6 is a side sectional view showing a conventional control example and showing that the landing positions are displaced as a result of the partition walls on the substrate being arranged with low accuracy.

In FIG. 6, the partition wall 24 previously formed on the substrate 22 is a substrate to be ejected with poor accuracy. As a result, the data trigger signal 36 from the data (bitmap data) does not match the position accuracy of the partition wall. As a result, the trigger signal of the data is received, and each ejected ink is displaced from a predetermined position of the partition wall and is not formed between the partition walls. That is, it is a product with degraded quality that results in poor alignment between the partition walls and the ejection film. In FIG. 6, the distance between the partition walls of t _{0 to} t ₁ is a normal distance and a normal ink thickness, the distance between the partition walls of t _{1 to} t ₂ is an extended distance, and is discharged to the center between the partition walls. Not an ink film with an abnormal ink thickness.

In the functional block which comprises the conventional coating apparatus, it is a site | part which controls the whole coating apparatus in cooperation with the main controller 1, the stage controller 2, the trigger controller 3, and the encoder controller 4. FIG. In the conventional functional block, pattern data (bitmap data) is transmitted to the trigger controller 3 and the encoder controller 4, and the trigger controller 3 generates a trigger signal 36 (data trigger signal) based on the data, and the encoder controller 4 After receiving the trigger signal 36, a discharge timing waveform 35 is generated. Therefore, the trigger signal 36 and the ejection timing waveform 35 are the same timing, and may be out of synchronization with the timing depending on the position of the partition wall on the substrate 22 (see the portion in FIG. 1).

  That is, in the conventional method, a color filter cannot be manufactured by drawing by functional droplet discharge on a substrate based on a material that expands and contracts with temperature.

  Further, it is very difficult to eliminate the expansion and contraction of the substrate.

  For this reason, a method for landing at a desired position on a substrate having a partition wall whose base material expands and contracts and has poor dimensional accuracy is required.

  In addition, when the purpose is to express the color of the functional liquid droplets, if the position of the surface is different from digital information such as CAD, if the functional liquid droplets are at a ratio, unnecessary landing on the partition wall will occur. As a result, the quality of the product color characteristics deteriorates.

The known literature is described below.
JP 2003-266671 A

  It is an object of the present invention to draw on a substrate with a partition wall that expands and contracts and has a low dimensional accuracy, even when the landing position does not deviate. However, the present invention is to provide a method for controlling a coating apparatus that can perform drawing by controlling functional droplets to a desired amount, and a method for manufacturing a coating apparatus and a color filter using the coating apparatus.

According to a first aspect of the present invention, there is provided an ink discharge portion including a plurality of ink discharge ports for discharging ink arranged in a first direction, and a second direction orthogonal to the first direction. Each time the substrate on the stage and the ink ejection part are moved relative to each other and the ink ejection part moves by a certain distance, a data trigger signal is output, and the ink ejection array arranged in each ink ejection part is generated by this data trigger signal. A colored ink layer is formed by selectively ejecting ink from the outlet, and the position of the ink ejection port and the ink ejection amount are corrected for each virtually separated individual region. A method for controlling a coating apparatus used for manufacturing a color filter that ejects ink,
When ejecting ink in a specific individual area, the position information of the pattern formed on the substrate in advance for that individual area is extracted,
Based on the positional information, the characteristic value of the amount of deviation of the position of the specific individual region and the amount of deviation of the area of the ink ejection region is calculated and stored,
Correcting the ink discharge position and ink discharge amount of a specific individual area based on the stored feature value;
According to another aspect of the invention, there is provided a control method for a coating apparatus, wherein a corrected ink discharge amount is applied to a specific individual region at a corrected ink discharge position.

The invention according to claim 2 of the present invention is such that the control method of the coating apparatus applies a specific individual region based on information on characteristic values of the specific individual region by a configuration including at least the following procedure. A control method for a coating apparatus according to claim 1.
(A) A procedure for inputting measurement information of the position of a pattern formed in advance on a substrate.
(B) A procedure of dividing the measurement information of the position of the pattern into virtually separated individual areas.
(C) For each of the individual regions, the pattern position measurement information and the bitmap data from the coating data are collated, and the feature value of the positional deviation amount and the deviation amount of the area of the ink ejection region is calculated. procedure.
(D) A procedure for generating a trigger signal of information from the characteristic value of the positional deviation amount and the deviation amount of the area of the ink ejection region.

  According to a third aspect of the present invention, each time the ink ejection unit moves a certain distance, the presence or absence of an information trigger signal from a feature value for each specific individual region is confirmed, and the information trigger signal Only when the information trigger signal is output to the ink ejection unit, the trigger signal of the data is changed to the trigger signal of information, and the information of the characteristic value of a specific individual region is changed by the trigger signal of this information. 3. The coating apparatus control method according to claim 1, wherein a specific individual region is applied based on the coating method.

  In the invention according to claim 4 of the present invention, the position information of the pattern formed in advance on the substrate is the position information of the pattern of the partition wall, and the region between the partition walls where the virtually separated individual regions meet each other. The control method for a coating apparatus according to any one of claims 1 to 3, wherein:

  The invention according to claim 5 of the present invention is characterized in that the positional deviation amount is generated from the expansion coefficient parameter of the substrate, and the feature value is calculated in consideration of the temperature expansion and contraction data. 4. The method for controlling a coating apparatus according to any one of 4 above.

According to a sixth aspect of the present invention, there is provided an ink discharge portion including a plurality of ink discharge ports for discharging ink arranged in the first direction, and a second direction orthogonal to the first direction. The substrate placed on the stage and the ink ejection part are moved relative to each other, and a data trigger signal is output every time the ink ejection part moves by a certain distance, and this data trigger signal is arranged in each ink ejection part. A colored ink layer is formed by selectively discharging ink from the formed ink discharge ports, and the positions of the ink discharge ports are corrected and the ink discharge amount is set for each of the virtually separated individual regions. A coating apparatus used for manufacturing a color filter that discharges ink that has been corrected,
A coating apparatus equipped with the method for controlling a coating apparatus according to any one of claims 1 to 5.

According to a seventh aspect of the present invention, there is provided an ink discharge portion including a plurality of ink discharge ports for discharging ink arranged in the first direction, and a second direction substantially orthogonal to the first direction. The substrate placed on the stage and the ink ejection part are moved relative to each other, and a data trigger signal is output every time the ink ejection part moves by a certain distance, and this data trigger signal is arranged in each ink ejection part. A colored ink layer is formed by selectively discharging ink from the formed ink discharge ports, and the positions of the ink discharge ports are corrected and the ink discharge amount is set for each of the virtually separated individual regions. A method of manufacturing a color filter that is manufactured using a coating apparatus that discharges ink that has been corrected,
A color filter manufacturing method, wherein a color filter is manufactured using the coating apparatus according to claim 6.

  In the invention according to the claims of the present invention, it is possible to perform drawing in which ink is ejected without displacement of the landing position even on a substrate having a partition wall that is expanded and contracted in advance and has low dimensional accuracy.

  Further, in the invention according to the claims of the present invention, by changing the inkjet head drive voltage based on the information such as the pattern position of the partition wall, the substrate provided with the partition wall in advance expands and contracts with respect to the substrate with low dimensional accuracy. However, it is possible to perform drawing in which ink is ejected by controlling the functional droplets to a desired amount.

  That is, the invention according to the present invention includes a stage that can move in the X, Y, and θ directions, an inkjet head that can eject functional liquid droplets, and captures temperature information and deviation information during exposure. An input unit and a calculation function are provided, and based on this, an information trigger signal is generated, an ejection signal is generated from the encoder signal, and ink ejection can be performed.

  According to the present invention, it is possible to perform drawing without shifting the landing position even on a substrate having a partition wall in advance that expands and contracts and has low dimensional accuracy.

  In addition, according to the present invention, it is possible to perform drawing by controlling the functional liquid droplets to a desired amount even on a substrate with a partition wall that is expanded and contracted in advance and has low dimensional accuracy.

  According to the present invention, the apparatus includes a stage that can move in the X direction, the Y direction, and the θ direction, includes an inkjet head that can eject functional liquid droplets, and has an input unit that captures temperature information and deviation information during exposure, and an arithmetic function. It is possible to provide a control method for a coating apparatus that performs drawing by generating an information trigger signal and generating an ejection signal from an encoder signal.

  The control method of the coating apparatus of this invention is demonstrated below based on one Embodiment.

  FIG. 1 is a configuration diagram of an example of a coating apparatus according to an embodiment of the present invention, (a) is a functional block diagram, and (b) is a detailed functional diagram of an arithmetic unit.

  As shown in FIG. 1A, the main controller 1 is a part that controls the entire coating apparatus in cooperation with a function generator 5, a stage controller 2, a trigger controller 3, and an encoder controller 4. After the bitmap data is transmitted to the head driver 18, it is transmitted to the trigger controller 3 via the stage controller 2 at the ejection position from the pattern data. At the same time, the trigger controller 3 sends a trigger signal (data trigger signal). The head driver 18 receives a data trigger signal that is generated and starts ink ejection, and ejects a predetermined amount of ink to the ejection position from the pattern data. In the present invention, the arithmetic unit 8 is attached to the functional block. The arithmetic unit 8 is a unit that calculates feature value information for correction, and is provided with an information memory 7 that records feature values such as position information of patterns formed in advance on the substrate. The arithmetic unit 8 calculates the corrected position and distance from the temperature information and the deviation information at the time of exposure, and the trigger controller 3 generates a corrected trigger signal (information trigger signal) using the correction data. The trigger signal, which is a discharge start command, is generated every time. In the present invention, the trigger signal generated from the pattern data is used as the data trigger signal, and is generated from the feature value information such as the deviation amount. The trigger signal was an information trigger signal.

  In the control method of the coating apparatus used for manufacturing the color filter of the present invention, the trigger controller 3 triggers a data trigger signal each time the substrate on the stage and the ink discharge portion move relative to each other and the ink discharge portion moves a certain distance. In response to the trigger signal of this data, the head driver 18 selectively ejects ink from the plurality of ink ejection ports of the jet head 19 to form a colored ink layer and is virtually separated. This is a method of forming a colored ink layer by discharging ink in which the position of the ink discharge port and the ink discharge amount are corrected every individual region, that is, each time the fixed distance is moved.

FIG. 1B is a detailed functional diagram of the arithmetic unit 8. After receiving data and information from the main controller 1, the arithmetic unit 8 is divided into individual areas virtually separated by the area dividing unit 80. The division information 81 is collated, and a feature value of the difference (deviation) is calculated and extracted 83. The feature values are stored in the information memory 7 in order. The information memory 7 transmits feature value information, for example, distance information and discharge amount to the trigger controller 3 and the head driver 18.

  FIG. 2 is an outline view showing an example of the overall configuration of the coating apparatus according to the embodiment of the present invention.

  The coating apparatus according to the present invention includes an inkjet head 19 including a discharge unit having a plurality of ink discharge ports for discharging ink arranged in a first direction, and a second direction orthogonal to the first direction. The stage 13 on which the substrate 22 is placed, the substrate 22 and the inkjet head 19 are relatively moved, the position of the inkjet head 19 is continuously detected, and each time the ink ejection unit moves a certain distance, A trigger signal is output, or when necessary, a trigger signal for correcting the position of the ink discharge port and the ink discharge amount is output, and ink is selectively selected from the ink discharge ports arranged in a plurality of ink discharge units. It is an apparatus used for manufacturing a color filter that forms a colored ink layer by discharging. In the coating apparatus of the present invention, an arithmetic unit 8 is provided for inputting position information 70 to the image processing unit 17 and calculating feature values.

  The coating apparatus of the present invention includes a control method for a coating apparatus that coats a specific individual area based on information on characteristic values of the specific individual area. This will be described below with reference to FIG. In step (S2-a), measurement information on the position of a pattern formed on the substrate in advance is input. Next, in the procedure (S2-b), the measurement information of the pattern position is divided into virtually separated individual areas. For example, the adjacent specific patterns arranged at predetermined pitches are assumed to be virtually separated individual areas, and the boundary is the center line of the pattern. Next, in step (S3-c), for each of the individual areas, the pattern position measurement information and the bitmap data from the pattern data are collated, and the positional deviation amount and the deviation amount of the area of the ink ejection region are compared. The feature value of is calculated. Next, in step (S3-d), an information trigger signal is generated from the characteristic value of the positional deviation amount and the deviation amount of the area of the ink ejection region. Through the above steps (a) to (d), it is possible to generate a trigger signal of information corrected to the pattern position formed on the target substrate.

  A method for changing the data trigger signal or the information trigger signal will be described below. The data or information trigger signal is generated every time the ink ejection unit moves a certain distance. Therefore, after confirming the presence or absence of an information trigger signal from the characteristic value for each specific individual area (see S13-e in FIG. 2 (b)), only when the information trigger signal is present, that is, the position, etc. An information trigger signal is output to the ink discharge section only when correction of the ink is necessary, and the data trigger signal is changed to an information trigger signal, and the information is applied to the specific individual area by the information trigger signal. This is a control method (see FIG. 2B, S13-f). Therefore, this is a control method in which either one of the data trigger signal and the information trigger signal is always transmitted to the ink ejecting unit every time a certain distance is moved. In the present invention, all may be changed to information trigger signals, and it is preferable to optimize each of them appropriately (see FIG. 2 (b) S13-g).

  Next, the operation of the ink jet printing coating apparatus according to the embodiment of the present invention will be described with reference to the flowchart shown in FIG.

  FIG. 3 is a flowchart showing a control example of the coating apparatus according to the embodiment of the present invention.

  The processing flow shown in the flowchart of FIG. 3 is merely an example, and processing that is a modification or addition of part of this processing flow is within the scope of the invented technical idea. A person skilled in the art can conceive of various changes and modifications, and it is understood that these changes and modifications also belong to the technical scope of the present invention.

  In order to operate the coating apparatus according to the embodiment of the present invention, the stage is initialized from the main controller 1 (see S1).

  Next, information such as temperature information, substrate information, and a deviation during exposure of a pattern formed on the substrate in advance is input (see S2).

  Next, the information and the pattern data are collated, and feature values such as a positional deviation amount and a distance deviation are calculated (see S3).

  Next, an information trigger signal is generated based on the calculated feature values (information of feature values of positional deviation and distance deviation) (see S4).

  Next, parameters are set in the stage controller, trigger controller, and encoder controller (see S5).

  Next, coating operation parameters are set (see S6).

  Next, bitmap data of the drawing pattern is generated and stored in the head driver (see S7).

  Next, the stage is moved to match the coating start position on the substrate (see S8).

  Next, the coordinate value of the stage at the coating start position is read (see S9).

  Next, the stage is moved so that the inkjet head is at the start position (see S10).

  Next, flushing is performed to improve the accuracy state of the inkjet head (see S11).

  Next, the stage is moved in the Y direction, and information that is a signal instructing the head driver 18 to start ejection from the stage controller 2 via the trigger controller 3 at the position read in step S9. Alternatively, a data trigger signal is valid, that is, transmitted (see S13).

  Simultaneously with the transmission, the inkjet head 19 performs an ejection operation on the substrate in synchronization with the encoder signal (see S14).

  Next, the operation ends when the ejection is finished for the drawing area.

  FIG. 4 is a side sectional view showing an example of control according to the present invention and showing that there is no deviation in the landing position as a result of ejection based on the ejection signal generated using the information trigger signal according to the present invention.

It is a sectional side view explaining the result of having ejected ink based on the ejection signal produced | generated using the trigger signal of the information by this invention. In FIG. 4, the substrate 22 on which the partition wall 24 is formed is placed on a stage. The inkjet head 19 moves immediately above the substrate, and the ejection timing waveform 35 is synchronized simultaneously with reception of the information trigger signal, and the ejection operation to the substrate is started by the inkjet head 19. The information trigger signal is transmitted at a timing corrected so as to be synchronized with the position of the partition formed on the substrate. The discharged ink film 25
Lands near the center between the partition walls, and forms an ink film with a uniform film thickness at a normal position between the partition walls. Further, the interval between the partition walls is calculated, the ink discharge amount is corrected from the deviation of the distance, and the ink film between each partition wall is formed with the same film thickness, and the color characteristics are also formed with the same quality. . The distance between the partition walls of t _{0 to} t ₁ is a normal distance and a normal ink thickness, and the distance between the partition walls of t _{1 to} t ₂ is an extended distance, and the normal distance is increased by increasing the amount of ejected ink. It is an ink film adjusted to the ink thickness.

A plurality of partition walls 24 are formed on the substrate 22 in FIG. 4 and are arranged at positions t ₀ , t ₁ , and t ₂ . partition wall 24 formed in the t ₁ generates a deviation of the distance between t ₀ ~t _1, the shift amount is the distance d ₁ ~t _1. In addition, it is the indication position of the partition from the d ₁ and d ₂ pattern data. The virtually separated individual area of the present invention is an area divided by t ₀ , t ₁ , t ₂ , that is, an individual area divided for each partition wall 24. The movement of a certain distance according to the present invention is performed at the position where each partition wall 24 and the next partition wall are formed, and an information trigger signal is generated for each movement from each partition wall to the next partition wall. An amount of ink is ejected. Therefore, according to the control method of the present invention, even when the partition is formed on the substrate with poor accuracy, the formation position of the partition and the ink film 25 becomes normal for each partition.

  An embodiment of the present invention will be described below with reference to FIG.

  In Example 1, stripe-shaped partition walls were formed on a 300 mm × 300 mm substrate using a 0.1 mm thick film. The partition walls have a width of 4 μm, a length of 60 μm, and a height of 5 μm. The arrangement pitch is 20 μm, and the pitch between the partition walls is a value in the range of +0.025 to −0.25 μm, with an average value of 20 μm. Randomly generated, partition walls were formed at each position at a random pitch obtained by adding the numerical values as errors. It formed using the well-known material and the manufacturing method.

  The position of the partition was measured using a coordinate measuring device. The trigger signal 36 of information was calculated using the measured value. Next, a data trigger signal from the data (bitmap data) was generated.

  Ink was ejected onto the substrate on which the partition walls were formed to form an ink film having a thickness of 2.5 μm. Ten random locations between the partition walls on the material of Example 1 were extracted, the center position between the partition walls and the center position of the ink film were measured, and the deviation was measured. At the same time, the film thickness of the ink film was measured.

  As a result of measurement, the positional deviation amount was 0.03 μm at the maximum value and 0.075 μm at the variation width of the film thickness, and the film was formed with good quality.

It is a functional block diagram which shows the structural example of the coating apparatus which concerns on embodiment of this invention. It is an outline figure showing the example of whole composition of the coating device concerning an embodiment of the invention. It is a flowchart figure which shows the procedure which concerns on embodiment of the coating apparatus of this invention. It is one Example of the control method of the coating device of this invention, and is a sectional side view which shows that there is no shift | offset | difference in a landing position as a result of discharging based on the trigger signal of the produced | generated information. It is a control example of the conventional coating apparatus, and is a sectional side view showing that the landing position is not displaced as a result of the partition walls on the substrate being accurately arranged. It is a control example of the conventional coating apparatus, and is a sectional side view showing that the landing position is displaced as a result of the partition walls on the substrate being arranged with poor accuracy.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Main controller 2 ... Stage controller 3 ... Trigger controller 4 ... Encoder controller 6 ... Pattern data memory 7 ... Information memory 8 ... Arithmetic unit 11 ... (Area) division | segmentation data 13 ... Stage 16 ... CCD sensor 17 ... Image processing part 18 ... Head driver 19 ... Inkjet head 22 ... Substrate 24 ... Partition 25 ... Ink film 35 ... Discharge timing waveform (from stage encoder)
36 ... trigger information 70 (information or data) ... position information 80 ... area division unit 81 ... (area) division information 83 ... feature value extraction unit

Claims (7)

An ink discharge portion including a plurality of ink discharge ports for discharging ink arranged in a first direction, and a substrate on the stage and the ink discharge portion are relative to each other along a second direction orthogonal to the first direction. Each time the ink ejection unit moves and moves a certain distance, a data trigger signal is output. By this data trigger signal, ink is selectively ejected from the ink ejection ports arranged in each ink ejection unit. The color ink layer is formed by the above-described method, and the position of the ink discharge port is corrected for each virtually separated individual region and the color filter that discharges the ink that corrects the ink discharge amount is used. A control method for a coating apparatus,
When ejecting ink in a specific individual area, the position information of the pattern previously formed on the substrate in that individual area is extracted,
Based on the position information, the characteristic value of the amount of deviation of the position of the specific individual region and the amount of deviation of the area of the ink ejection region is calculated and stored,
Correcting the ink discharge position and ink discharge amount of a specific individual area based on the stored feature value;
A method for controlling a coating apparatus, comprising: applying a corrected ink discharge amount to a specific individual region at a corrected ink discharge position. The coating method according to claim 1, wherein the control method of the coating apparatus applies a specific individual region based on information on a characteristic value of the specific individual region by a configuration including at least the following procedure. Control method of the device.
(A) A procedure for inputting measurement information of the position of a pattern formed in advance on a substrate.
(B) A procedure of dividing the measurement information of the position of the pattern into virtually separated individual areas.
(C) For each of the individual regions, the pattern position measurement information and the bitmap data from the coating data are collated, and the feature value of the positional deviation amount and the deviation amount of the area of the ink ejection region is calculated. procedure.
(D) A procedure for generating a trigger signal of information from the characteristic value of the positional deviation amount and the deviation amount of the area of the ink ejection region.   Each time the ink ejection unit moves a certain distance, the presence or absence of an information trigger signal from the feature value of each specific individual area is confirmed, and only when there is an information trigger signal, An information trigger signal is output, and the data trigger signal is changed to an information trigger signal, and a specific individual area is applied based on the feature value information of the specific individual area by the information trigger signal. The control method of the coating apparatus of Claim 1 or 2 characterized by the above-mentioned.   4. The position information of a pattern formed on the substrate in advance is position information of a partition pattern, and is an area between adjacent partitions of virtually separated individual areas. The control method of the coating apparatus of Claim 1.   5. The coating apparatus according to claim 1, wherein the positional deviation amount is generated from a substrate expansion coefficient parameter, and the characteristic value is calculated in consideration of temperature expansion / contraction data. Control method. An ink discharge portion including a plurality of ink discharge ports for discharging ink arranged in a first direction, and a substrate placed on the stage and an ink discharge along a second direction orthogonal to the first direction The data trigger signal is output every time the ink ejection unit moves a certain distance, and the data trigger signal selectively selects ink from the ink ejection ports arranged in each ink ejection unit. A color filter that discharges ink to form a colored ink layer and to correct the position of the ink discharge port and the ink discharge amount for each virtually separated individual region A coating device used in the manufacture of
A coating apparatus comprising the coating apparatus control method according to any one of claims 1 to 5. An ink discharge portion including a plurality of ink discharge ports for discharging ink arranged in a first direction, and a substrate and ink placed on a stage along a second direction substantially orthogonal to the first direction A data trigger signal is output each time the ink ejection unit moves a certain distance by relative movement of the ejection unit, and this data trigger signal selectively selects ink from the ink ejection ports arranged in each ink ejection unit. A colored ink layer is formed by discharging the ink, and the ink discharge port position is corrected and the ink discharge amount is corrected for each of the virtually separated individual areas. A method of manufacturing a color filter manufactured using an apparatus,
A method for producing a color filter, comprising producing a color filter using the coating apparatus according to claim 6.

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