JP2007260818A - Polishing method and polishing tool - Google Patents

Polishing method and polishing tool Download PDF

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JP2007260818A
JP2007260818A JP2006087417A JP2006087417A JP2007260818A JP 2007260818 A JP2007260818 A JP 2007260818A JP 2006087417 A JP2006087417 A JP 2006087417A JP 2006087417 A JP2006087417 A JP 2006087417A JP 2007260818 A JP2007260818 A JP 2007260818A
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polishing
cotton
core rod
polishing tool
tool
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Koichi Okada
幸一 岡田
Hiroyasu Saito
浩靖 斎藤
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Topcon Corp
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Topcon Corp
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  • Polishing Bodies And Polishing Tools (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a polishing method for sufficiently polishing a polished surface of an optical element, particularly a curved polished surface (concave/convex surface) in every corner, and to provide a polishing tool. <P>SOLUTION: Polishing is carried out by impregnating a cotton portion 13 with abrasive solution. Specifically, cotton is coarsely wound on a core bar, and then the cotton is tightly wound from above, to thereby form the cotton portion 13 having an arbitrary pressure distribution imparted to the polishing tool 10. Then the cotton portion 13 is impregnated with the abrasive solution. The shape of the cotton wound on the core bar may be made slender, or may be like a disk radially extending from the core bar. Further a hydrophilic adhesive may be employed. Furthermore a portion of the core bar, where the cotton is not wound, may be coated with a water-repellent coating. Alternatively an abrasive solution feeding pipe 11 may be employed as the core bar, and while the abrasive solution is fed to the cotton portion via the abrasive solution feeding pipe 11, curved surface polishing is carried out. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、光学素子の研磨面を研磨する研磨方法及び研磨工具、例えば小径の金型部材や微小な光学レンズ、プリズム、ミラーなどの光学素子の研磨面を研磨する研磨方法及び研磨工具に関する。   The present invention relates to a polishing method and a polishing tool for polishing a polishing surface of an optical element, for example, a polishing method and a polishing tool for polishing a polishing surface of an optical element such as a small-diameter mold member, a minute optical lens, a prism, and a mirror.

従来から、工業用の綿棒は、金型のゴミ取り用に使用され(例えば特許文献1参照)、とくに精密機器の狭い隙間や小面積の箇所の清掃に用いられてきた(例えば特許文献2の0003段落及び図1〜図4参照)。   Conventionally, industrial cotton swabs have been used for removing dust from molds (see, for example, Patent Document 1), and in particular, have been used for cleaning narrow spaces and small areas of precision equipment (for example, Patent Document 2). 0003 and FIGS. 1 to 4).

また、綿花の柔らかい材料を用い、その綿花の表面にウレタン樹脂層を成膜し、精密機器の細部を掃除するための綿棒も知られている(例えば特許文献3請求項1、0010段落及び図1参照)。   Also known is a cotton swab that uses a soft material of cotton, forms a urethane resin layer on the surface of the cotton, and cleans the details of precision instruments (eg, Patent Document 3, claim 1, paragraph 0010 and figure). 1).

一方、例えば小径の金型部材や微小な光学レンズ、プリズム、ミラーなどの光学素子の曲面を清掃する場合、研磨用の織布や不織布が用いられている(例えば特許文献4の0014段落及び図4参照)。   On the other hand, when cleaning a curved surface of an optical element such as a small-diameter mold member, a minute optical lens, a prism, or a mirror, a polishing woven fabric or non-woven fabric is used (for example, 0014 paragraph and figure of Patent Document 4). 4).

また、光学素子の曲面を研磨する場合は、次のようなものが用いられている。すなわち、木材の粉砕された粉状材料と、ウレタン樹脂、エポキシ樹脂、フェノール樹脂のいずれかを主成分とする熱硬化性樹脂とを混練して過熱圧縮して形成した研磨工具(例えば特許文献5の0053段落及び図1参照)や、木綿の糸からなる織布を担体とし、その織布に研磨媒体が担持された研磨布(例えば特許文献6の0025段落及び図1参照)や、可撓性を有する竹棒の先端部に研磨媒体を担持させた研磨棒(例えば特許文献6の0035段落及び図3(b)を参照)や、研磨パット、ポリッシャ工具(例えば特許文献7の0032段落及び図1、研磨砥石(例えば特許文献8の0026〜0027、0031段落及び図3)などが用いられている。
特開平7−188959号公報 特開平10−57904号公報の0003段落、及び図1〜図4 特公平7−28893号公報の請求項1、0010段落、及び図1 特開2001−305700号公報の0014段落、及び図4 特開2001−138196号公報の0053段落、及び図1 特開2002−239925号公報の0025、0035段落、及び図1、図3(b) 特開2000−317797号公報の0032段落、及び図1 特開平8−229792号公報の0026〜0027、0031段落、及び図3
When polishing the curved surface of the optical element, the following is used. That is, a polishing tool formed by kneading and overheating compression of a pulverized material of wood and a thermosetting resin mainly composed of one of a urethane resin, an epoxy resin, and a phenol resin (for example, Patent Document 5) 0053 paragraph and FIG. 1), a woven cloth made of cotton yarn as a carrier, and a polishing cloth carrying a polishing medium on the woven cloth (for example, see paragraph 0025 of FIG. 6 and FIG. 1), flexible A polishing rod (see, for example, paragraph 0035 of Patent Document 6 and FIG. 3B), a polishing pad, a polisher tool (for example, paragraph 0032 of Patent Document 7 and FIG. 1 and a polishing grindstone (for example, 0026 to 0027, 0031 paragraph and FIG. 3 of Patent Document 8) are used.
JP-A-7-188959 Japanese Patent Laid-Open No. 10-57904, paragraph 0003 and FIGS. Japanese Patent Publication No. 7-28893, claim 1, paragraph 0010, and FIG. Japanese Patent Laid-Open No. 2001-305700, paragraph 0014 and FIG. Japanese Patent Laid-Open No. 2001-138196, paragraph 0053 and FIG. Japanese Patent Laid-Open No. 2002-239925, paragraphs 0025 and 0035, and FIGS. 1 and 3B. Japanese Patent Laid-Open No. 2000-317797, paragraph 0032 and FIG. Japanese Patent Laid-Open No. 8-229792, paragraphs 0026 to 0027, paragraph 0031, and FIG.

しかしながら、研磨用の織布や不織布では、小径の金型部材、微小な光学レンズなどの光学素子の曲面(凹凸面など)を隅々まで充分に研磨することはできなかった。   However, with a woven or non-woven fabric for polishing, the curved surfaces (uneven surfaces, etc.) of optical elements such as small-diameter mold members and minute optical lenses cannot be sufficiently polished.

また、従来の研磨パットやポリッシャ工具では、図5の(A)に示すように、芯棒1の先端に設けた綿の塊2によって、光学素子3の凹状の研磨面3aを研磨するときに、図5の(B)に示す圧力分布曲線4のように、研磨圧力が研磨面3aの中心付近に集中してしまう。そのため、研磨面3aの周辺では、研磨圧力が疎らになってしまう。その結果、研磨面3aの研磨による減耗量に偏りが生じ、形状誤差が発生しやすい問題があった。   Further, in a conventional polishing pad or polisher tool, as shown in FIG. 5A, when the concave polishing surface 3a of the optical element 3 is polished by a lump of cotton 2 provided at the tip of the core rod 1. As shown in the pressure distribution curve 4 shown in FIG. 5B, the polishing pressure is concentrated near the center of the polishing surface 3a. Therefore, the polishing pressure becomes sparse in the vicinity of the polishing surface 3a. As a result, there is a problem in that the amount of wear due to polishing of the polishing surface 3a is biased and shape errors are likely to occur.

そこで、本願発明は、凹凸面の隅々まで充分に研磨加工することができる研磨方法及び研磨工具を提供することを目的とする。   Then, this invention aims at providing the grinding | polishing method and grinding | polishing tool which can fully grind to every corner of an uneven surface.

上記課題を解決するための本発明の解決手段を例示すると、次のとおりである。   Examples of the solution means of the present invention for solving the above-described problems are as follows.

(1)芯棒の先端部分に綿部分を設けて研磨工具を形成し、その研磨工具の綿部分に研磨液を染み込ませて光学素子の研磨面を研磨することを特徴とする研磨方法。 (1) A polishing method characterized in that a polishing portion is formed by providing a cotton portion at the tip portion of the core rod, and a polishing liquid is soaked into the cotton portion of the polishing tool to polish the polishing surface of the optical element.

(2)芯棒の先端部分にまず粗く綿を巻き、その上から密に綿を巻いて研磨工具の綿部分を形成し、その研磨工具の綿部分に研磨液を染み込ませて光学素子の研磨面を研磨することを特徴とする研磨方法。 (2) First, roughly wrap cotton around the tip of the core rod, and then tightly wrap the cotton from above to form the cotton portion of the polishing tool, and soak the polishing liquid into the cotton portion of the polishing tool to polish the optical element. A polishing method comprising polishing a surface.

(3)芯棒の先端部分に粗く綿を巻き、その上から密に綿を巻いて綿部分を形成したことを特徴とする研磨工具。 (3) A polishing tool characterized in that cotton is roughly wound around the tip portion of the core rod, and the cotton portion is formed by densely winding cotton from above.

(4)前述の研磨工具において、芯棒に綿を巻いて形成された綿部分の形状が芯棒の軸芯方向に細長いことを特徴とする研磨工具。 (4) In the above polishing tool, a polishing tool characterized in that the shape of a cotton part formed by winding cotton around a core rod is elongated in the axial direction of the core rod.

(5)前述の研磨工具において、芯棒に綿を巻いて形成された綿部分の形状が芯棒の軸芯に対して放射方向に延びた円盤の形状をしていることを特徴とする研磨工具。 (5) In the above polishing tool, the polishing is characterized in that the shape of the cotton part formed by winding cotton around the core rod is a disk extending radially with respect to the axis of the core rod. tool.

(6)前述の研磨工具において、芯棒に親水性の接着剤を用いて綿部分を形成したことを特徴とする研磨工具。 (6) A polishing tool characterized in that in the above polishing tool, a cotton portion is formed on the core rod using a hydrophilic adhesive.

(7)前述の研磨工具において、綿が巻かれていない芯棒部分に、撥水性塗料が塗布されていることを特徴とする研磨工具。 (7) A polishing tool characterized in that a water-repellent paint is applied to a core rod portion in which cotton is not wound in the above polishing tool.

(8)研磨液を供給する研磨液供給管を芯棒として設け、研磨液をその研磨液供給管を介して綿部分に供給しつつ光学素子の研磨面を研磨することを特徴とする前述の研磨方法。 (8) A polishing liquid supply pipe for supplying a polishing liquid is provided as a core rod, and the polishing surface of the optical element is polished while supplying the polishing liquid to the cotton portion through the polishing liquid supply pipe. Polishing method.

(9)研磨液を供給する研磨液供給管を芯棒として設けたことを特徴とする前述の研磨工具。 (9) The polishing tool as described above, wherein a polishing liquid supply pipe for supplying the polishing liquid is provided as a core rod.

本発明によると、研磨面を傷つけずに光沢を持たせることが容易である。しかも、研磨面が凹凸面である場合も、隅々まで充分に研磨加工することができる。   According to the present invention, it is easy to give gloss without damaging the polished surface. Moreover, even when the polished surface is an uneven surface, it can be sufficiently polished to every corner.

また、芯棒の先端部に粗く綿を巻き、その上から密に綿を巻いて研磨工具の綿部分を形成する場合、研磨工具の綿部分に所望の硬さ・柔らかさを持たせてることができる。しかも、綿部分の弾力性を部分的に変えることにより、圧力分布を調整することが容易にできる。このような綿部分を使用すれば、凹凸面の隅々まで充分に研磨加工することが確実になる。   Also, when the cotton part of the polishing tool is formed by roughly winding the cotton around the tip of the core rod and densely winding the cotton from above, give the cotton part of the polishing tool the desired hardness and softness. Can do. Moreover, the pressure distribution can be easily adjusted by partially changing the elasticity of the cotton portion. If such a cotton part is used, it will be ensured that it is sufficiently polished to every corner of the uneven surface.

また、本発明によれば、研磨面の加工部の研磨液量は常に安定しており、研磨面の加工部にある余分な液は毛細管現象によって綿部分の中へ逆に吸い取られ、綿部分の乾燥に伴い、綿部分の中心に存在する液が綿部分の表面へ染み出てくるため、液切れの心配がなく、安定した研磨が可能である。   Further, according to the present invention, the amount of polishing liquid in the processed portion of the polishing surface is always stable, and excess liquid in the processed portion of the polishing surface is sucked back into the cotton portion by capillary action, Since the liquid existing at the center of the cotton portion oozes out to the surface of the cotton portion as the material is dried, there is no fear of the liquid running out and stable polishing is possible.

芯棒の先端部分に綿部分を設ける。例えば、芯棒にまず粗く綿を巻き、その上から密に綿を巻く。そのようにして研磨工具に綿部分を作る。   A cotton part is provided at the tip of the core rod. For example, the core rod is first wound roughly with cotton and then densely wound with cotton. In this way a cotton part is made on the polishing tool.

研磨工具の綿部分に研磨液を染み込ませ、光学素子の研磨面、とくに曲面状の研磨面を研磨する。   A polishing solution is soaked into the cotton part of the polishing tool to polish the polishing surface of the optical element, particularly the curved polishing surface.

好ましくは、まず芯棒に粗く綿を巻き、その上から密に綿を巻いて、綿棒の形をした研磨用の綿部分とする。その際、芯棒に綿を巻いた形状を細長くしたり、あるいは、芯棒に綿を巻いた形状が芯棒に対して放射方向に延在する円盤の形状にする。   Preferably, cotton is roughly wound around a core rod, and then cotton is densely wound on the core rod to form a cotton portion for polishing in the form of a cotton swab. At that time, the shape in which the core rod is wound with cotton is elongated or the shape in which the core rod is wound with cotton is formed into a disk shape extending in the radial direction with respect to the core rod.

また、好ましくは、親水性の接着剤を用いて綿を芯棒に巻く。   Preferably, cotton is wound around the core rod using a hydrophilic adhesive.

さらに好ましくは、綿で巻かれていない芯棒部分に対して、撥水性塗料を塗布する。   More preferably, the water-repellent paint is applied to the core rod portion not wound with cotton.

また、好ましくは、芯棒として、研磨液を供給する研磨液供給管を設け、研磨液供給管を介して研磨液を綿部分に供給しつつ曲面研磨を行なう。この場合、容器に研磨液を入れ、芯棒の後端を直接、又はパイプ等を介して液に漬けておくだけで、毛細管現象によって、研磨工具の綿部分への研磨液の充填が可能となる。また、病院で使用されている点滴のようにして、研磨液を供給してもよい。   Preferably, a polishing liquid supply pipe for supplying a polishing liquid is provided as a core rod, and curved surface polishing is performed while supplying the polishing liquid to the cotton portion through the polishing liquid supply pipe. In this case, it is possible to fill the cotton part of the polishing tool with the polishing liquid by capillary action simply by putting the polishing liquid into the container and immersing the rear end of the core rod directly or through a pipe or the like. Become. Moreover, you may supply polishing liquid like the drip currently used in the hospital.

図面を参照して、本発明の好適な実施例を説明する。   A preferred embodiment of the present invention will be described with reference to the drawings.

図1は、綿棒の形をした研磨工具10を用いて、光学素子の研磨面、とくに凹状の曲面を研磨加工する方法の一例を示す。   FIG. 1 shows an example of a method for polishing a polishing surface of an optical element, particularly a concave curved surface, using a polishing tool 10 in the form of a cotton swab.

芯棒は、研磨液を溜めておく研磨液保持手段としても機能する研磨液供給管11からなる。この研磨液供給管11は、手で持つことができるように筒状の剛体で形成されている。そして、研磨液供給管11の内側には、先端から後端まで、研磨液を染み込ませて溜めておくための多孔質材12が充てんされている。図1の例では、毛細管機能を有する多孔質材12としてスポンジが用いられている。   The core rod includes a polishing liquid supply pipe 11 that also functions as a polishing liquid holding means for storing the polishing liquid. The polishing liquid supply pipe 11 is formed of a cylindrical rigid body so that it can be held by hand. The inside of the polishing liquid supply pipe 11 is filled with a porous material 12 for soaking and storing the polishing liquid from the front end to the rear end. In the example of FIG. 1, a sponge is used as the porous material 12 having a capillary function.

研磨液供給管11の好ましい例を詳細に説明すると、アルミニウムや樹脂でできている管であり、内径が0.5〜8mmである。研磨液供給管11の先端には、多孔質材12がほぼ丸形に突き出て突起部12aを形成している。   If the preferable example of the polishing liquid supply pipe | tube 11 is demonstrated in detail, it is a pipe | tube made from aluminum and resin, and an internal diameter is 0.5-8 mm. At the tip of the polishing liquid supply pipe 11, the porous material 12 protrudes in a substantially round shape to form a protrusion 12 a.

13は綿花を糸状にして研磨液供給管11に巻き付けて固定した綿部分(塊)である。多孔質材12に吸い込ませておいた研磨液を徐々に綿部分13へ毛細管現象で供給することができる構造となっている。   Reference numeral 13 denotes a cotton portion (lumps) in which cotton is thread-like and wound around the polishing liquid supply pipe 11 and fixed. The polishing liquid sucked into the porous material 12 can be gradually supplied to the cotton portion 13 by capillary action.

綿部分13の好ましい構造は、研磨液供給管11へ綿糸を巻き付ける際に中心から外側に向かって密になるような巻き方をしたものである。とくに、弾力性の分布を任意に調整した構造からなる綿棒形の研磨工具10とするのが好ましい。   A preferable structure of the cotton portion 13 is one in which the cotton yarn is wound around the polishing liquid supply pipe 11 so as to become dense from the center toward the outside. In particular, a cotton swab-shaped polishing tool 10 having a structure in which the distribution of elasticity is arbitrarily adjusted is preferable.

14はレンズや金型などの光学素子(ワーク)であり、凹状や凸状の曲面状をした研磨面14aを有する。   Reference numeral 14 denotes an optical element (work) such as a lens or a mold, which has a polished surface 14a having a concave or convex curved surface.

15は綿部分13を光学素子14の研磨面14aに当接した際にかかる研磨圧力の分布曲線を示す。   Reference numeral 15 denotes a distribution curve of the polishing pressure applied when the cotton portion 13 is brought into contact with the polishing surface 14 a of the optical element 14.

綿棒形状の研磨工具10を揺動させ、必要に応じて光学素子14を回転させながら研磨加工を行う。研磨中に研磨液は蒸発したり飛散してしまうが、研磨液供給管11内の多孔質材12に溜まっていた研磨液が綿部分13へと徐々に染み出てくるため、液切れの心配や研磨液供給の手間がなくなる。   Polishing is performed while swinging the swab-shaped polishing tool 10 and rotating the optical element 14 as necessary. Although the polishing liquid evaporates or scatters during polishing, the polishing liquid that has accumulated in the porous material 12 in the polishing liquid supply pipe 11 gradually oozes out to the cotton portion 13, so there is a risk of running out of liquid. And the trouble of supplying the polishing liquid is eliminated.

多孔質材12への研磨液補充法の一例を述べると、研磨液の入った容器(図示せず)の中へ研磨液供給管11の後端を漬けておく。そうすれば、毛細管現象によって研磨液が吸い上げられ、多孔質材12の中に補給することができる。   An example of a polishing liquid replenishment method for the porous material 12 will be described. The rear end of the polishing liquid supply pipe 11 is immersed in a container (not shown) containing the polishing liquid. Then, the polishing liquid is sucked up by capillary action and can be replenished into the porous material 12.

また、多孔質材12への研磨液補充は、他の種々の方法で実施できる。例えば、病院で使用する点滴装置のように、研磨液供給管11の上から、研磨液供給管11に補給することもできる。この場合、多孔質材12を省略することが可能である。   In addition, the polishing material can be replenished to the porous material 12 by various other methods. For example, the polishing liquid supply pipe 11 can be replenished from above the polishing liquid supply pipe 11 like an infusion device used in a hospital. In this case, the porous material 12 can be omitted.

研磨液供給管11の上端側と研磨液の入ったタンク(図示せず)とをチューブ(図示せず)でつないで、強制的に(例えばポンプによって)研磨液を供給することもできる。   The polishing liquid can be forcibly supplied (for example, by a pump) by connecting the upper end side of the polishing liquid supply pipe 11 and a tank (not shown) containing the polishing liquid with a tube (not shown).

綿部分13の巻き方を工夫して、中心部分と外周部分が粗密になるように調整することにより、任意の弾力性の圧力分布曲線15を得ることができる。この場合、スポット的に微小部位を集中的に研磨したいときには、逆に中心を密にして外周を疎に巻いた綿部分を用いることもできる。   An arbitrary elastic pressure distribution curve 15 can be obtained by devising how to wind the cotton portion 13 and adjusting the center portion and the outer peripheral portion so as to be dense. In this case, when it is desired to intensively polish a minute portion in a spot manner, a cotton portion having a dense center and a loosely wound outer periphery can be used.

図2は、本発明の他の種々の実施例を示す。   FIG. 2 shows various other embodiments of the present invention.

圧力分布曲線15の調整を効果的に行なうために、図2の(A)に示す実施例では、綿部分13の形状を細くしている。   In order to effectively adjust the pressure distribution curve 15, in the embodiment shown in FIG. 2A, the shape of the cotton portion 13 is narrowed.

図2の(B)に示す実施例では、綿部分13の形状を放射方向に延びた円盤の形状にすることにより、凸形状の研磨面14aを有する光学素子14が入り組んだ複雑形状のものであっても、隅々まで効率よく磨くことができる。   In the embodiment shown in FIG. 2B, the shape of the cotton portion 13 is changed to the shape of a disk extending in the radial direction so that the optical element 14 having a convex polished surface 14a is complicated. Even if there is, we can polish to every corner efficiently.

図2の(C)の実施例では、綿部分13がほぼ球状になっていて、回転中心のところに小さな突起が形成されている。   In the embodiment of FIG. 2C, the cotton portion 13 is substantially spherical, and a small protrusion is formed at the center of rotation.

図2の(D)の実施例では、綿部分13の下端面は円形である。   In the embodiment of FIG. 2D, the lower end surface of the cotton portion 13 is circular.

図2(A)(C)に示すように、研磨液供給管20の先端の一部に突起部を設けた形状とすることで、部分的に集中的な磨き方をすることができる。   As shown in FIGS. 2 (A) and 2 (C), by using a shape in which a protrusion is provided at a part of the tip of the polishing liquid supply pipe 20, a partially intensive polishing method can be achieved.

図2の(A)〜(D)に示す実施例において、芯棒20は、中実であってもよいが、図1のものと同様に管状(筒状)にして、その中にも毛細管機能を有する材料を充てんするのが好ましい。ただし、研磨液の供給の仕方によっては、そのような材料の充てんを省略してもよい。   In the embodiment shown in FIGS. 2A to 2D, the core rod 20 may be solid, but it has a tubular shape (tubular shape) similar to that shown in FIG. It is preferable to fill a functional material. However, depending on how the polishing liquid is supplied, filling of such a material may be omitted.

更に他の実施例として、図3は、本発明による研磨工具の綿部分13において親水性接着剤を用いた形態を示す。   As yet another embodiment, FIG. 3 shows a form using a hydrophilic adhesive in the cotton portion 13 of the polishing tool according to the present invention.

図3において、15は研磨液、16は研磨スラリー中の研磨材を示す。13aは、綿部分13の粗部を示し、13bは、綿部分13の密部を示す。17はそれらの間に設けた親水性接着剤を示す。綿部分13の密部13bの表面に接着剤17を塗布して、その上に綿部分13の粗部13aを接着している。   In FIG. 3, 15 indicates a polishing liquid, and 16 indicates an abrasive in the polishing slurry. 13 a indicates a rough portion of the cotton portion 13, and 13 b indicates a dense portion of the cotton portion 13. Reference numeral 17 denotes a hydrophilic adhesive provided between them. The adhesive 17 is applied to the surface of the dense portion 13b of the cotton portion 13, and the coarse portion 13a of the cotton portion 13 is adhered thereon.

なお、糸状になった綿花の全体に、まず親水性接着剤17を塗布し、そのような糸状のものによって、綿部分13の粗部13aと密部13bを形成することが、最良の態様の1つである。   It is to be noted that the best mode is to apply the hydrophilic adhesive 17 to the entire cotton in the form of a thread and form the rough portion 13a and the dense portion 13b of the cotton portion 13 with such a thread-like material. One.

このような形態にすれば、綿部分13の密部13bの表面、又は糸状の綿花の各々の表面に塗布した親水性接着剤17により、研磨スラリー中の研磨材16は、その親水作用により、綿部分13の表層の粗部13aに吸着・保持されやすくなり、光学素子(ワーク)14の研磨面14aに良好な研磨作用をもたせ、摩擦等で綿部分13の表面より研磨材16の脱落が繰り返し行なわれ、効率良く綿部分13と光学素子14の研磨面14aに作用する効果が得られる。   With such a form, the abrasive 16 in the polishing slurry is caused by the hydrophilic action by the hydrophilic adhesive 17 applied to the surface of the dense portion 13b of the cotton portion 13 or each surface of the thread-like cotton. It becomes easy to be adsorbed and held by the rough portion 13a of the surface layer of the cotton portion 13, and has a good polishing action on the polishing surface 14a of the optical element (work) 14, and the abrasive 16 is detached from the surface of the cotton portion 13 due to friction or the like. Repeatedly, the effect of efficiently acting on the cotton portion 13 and the polishing surface 14a of the optical element 14 is obtained.

また、図4は、綿を巻いていない、芯棒チューブ41の外周表面の部分全体に撥水性塗料42を塗布した研磨工具を示す。   FIG. 4 shows a polishing tool in which a water-repellent paint 42 is applied to the entire portion of the outer peripheral surface of the core rod tube 41 that is not wound with cotton.

図4において、43は綿部分、40は研磨液、44は光学素子である。研磨液40は光学素子44の研磨面44aに充分に作用するように加工部全域にプール状に供給される。撥水塗料42は、その撥水効果により、研磨面44aに対して効率的に作用する。このために必要最小限の液量を加えるとよい。研磨部位や研磨液の汚れなどをいち早く視認することができる。   In FIG. 4, 43 is a cotton part, 40 is a polishing liquid, and 44 is an optical element. The polishing liquid 40 is supplied in a pool shape over the entire processing portion so as to sufficiently act on the polishing surface 44 a of the optical element 44. The water repellent paint 42 efficiently acts on the polishing surface 44a due to its water repellent effect. For this purpose, a minimum amount of liquid may be added. It is possible to quickly recognize the polishing site and the dirt of the polishing liquid.

図3〜4の実施例においては、研磨液は芯棒を経由せず、直接、光学素子14、44の研磨面14a、44aに供給してもよい。   3 to 4, the polishing liquid may be supplied directly to the polishing surfaces 14a and 44a of the optical elements 14 and 44 without passing through the core rod.

前述のいずれの実施例においても、綿部分の綿の持つしなやかさや、柔らかさを利用して、小径の金型部材や微小な光学レンズ、プリズム、ミラーなどの光学素子の曲面研磨を的確に行い、研磨面を傷つけずに光沢を持たせ、凹凸面の隅々まで充分に研磨加工することができる。   In any of the above-described embodiments, the curved surface of optical elements such as small-diameter mold members, minute optical lenses, prisms, and mirrors is accurately polished using the softness and softness of the cotton in the cotton portion. It is possible to give gloss without damaging the polished surface, and to sufficiently polish every corner of the uneven surface.

さらに、芯棒に粗く綿を巻き、その上から密に綿を巻くことで、研磨工具に所望の硬さ・柔らかさを持たせ、弾性を部分的に変化させて圧力分布を調整することができる。   Furthermore, it is possible to adjust the pressure distribution by changing the elasticity partly by giving the polishing tool the desired hardness and softness by roughly winding the cotton around the core rod and winding the cotton densely from above. it can.

また、研磨液を補充する際にも、綿の毛細管現象を利用して、研磨作業中に研磨液が蒸発しても、自然に研磨液を供給でき、充分な研磨加工を実現することができる。   Moreover, even when the polishing liquid is replenished, even if the polishing liquid evaporates during the polishing operation, the polishing liquid can be supplied spontaneously and sufficient polishing can be realized by utilizing the capillary action of cotton. .

(A)は、本発明の1つの実施例による研磨方法を示す。(B)は、図1の(A)の光学素子の研磨面における研磨圧力分布曲線を示す。(A) shows a polishing method according to one embodiment of the present invention. (B) shows a polishing pressure distribution curve on the polishing surface of the optical element of FIG. (A)〜(D)は、本発明の他の種々の実施例による研磨方法を示す。(A)-(D) show the grinding | polishing method by the other various Example of this invention. 本発明の更に他の実施例による研磨方法を示す。4 shows a polishing method according to still another embodiment of the present invention. 本発明の更に他の実施例による研磨方法を示す。4 shows a polishing method according to still another embodiment of the present invention. (A)は、従来の研磨方法を示す。(B)は、図5の(A)の光学素子の加工面における圧力分布曲線を示す。(A) shows the conventional grinding | polishing method. FIG. 5B shows a pressure distribution curve on the processed surface of the optical element in FIG.

符号の説明Explanation of symbols

10 研磨工具
11 研磨液供給管
12 多孔質材
13 綿部分
13a 綿部分13の粗部
13b 綿部分13の密部
14 光学素子(ワーク)
14a 研磨面
15 圧力分布曲線
16 研磨材
17 親水性接着材
40 研磨液
41 チューブ
42 撥水性塗料
43 綿部分
44 光学素子
44a 研磨面

DESCRIPTION OF SYMBOLS 10 Polishing tool 11 Polishing liquid supply pipe 12 Porous material 13 Cotton part 13a Coarse part 13b of cotton part 13 Dense part 14 of cotton part 13 Optical element (workpiece)
14a Polishing surface 15 Pressure distribution curve 16 Polishing material 17 Hydrophilic adhesive 40 Polishing liquid 41 Tube 42 Water-repellent paint 43 Cotton portion 44 Optical element 44a Polishing surface

Claims (9)

芯棒の先端部分に綿部分を設けて研磨工具を形成し、その研磨工具の綿部分に研磨液を染み込ませて光学素子の研磨面を研磨することを特徴とする研磨方法。   A polishing method comprising: forming a polishing tool by providing a cotton portion at a tip portion of a core rod; and polishing a polishing surface of an optical element by impregnating a polishing liquid into the cotton portion of the polishing tool. 芯棒の先端部分にまず粗く綿を巻き、その上から密に綿を巻いて研磨工具の綿部分を形成し、その研磨工具の綿部分に研磨液を染み込ませて光学素子の研磨面を研磨することを特徴とする研磨方法。   First, coarsely wrap cotton around the tip of the core rod, and then wrap the cotton tightly from above to form the cotton part of the polishing tool. The polishing part is soaked into the cotton part of the polishing tool to polish the polishing surface of the optical element. A polishing method comprising: 芯棒の先端部分に粗く綿を巻き、その上から密に綿を巻いて綿部分を形成したことを特徴とする研磨工具。   A polishing tool characterized in that cotton is roughly wound around the tip of the core rod, and cotton is densely wound from above to form a cotton portion. 請求項3に記載の研磨工具において、芯棒に綿を巻いて形成された綿部分の形状が芯棒の軸芯方向に細長いことを特徴とする研磨工具。   4. The polishing tool according to claim 3, wherein the shape of a cotton portion formed by winding cotton around the core rod is elongated in the axial direction of the core rod. 請求項3に記載の研磨工具において、芯棒に綿を巻いて形成された綿部分の形状が芯棒の軸芯に対して放射方向に延びた円盤の形状をしていることを特徴とする研磨工具。   4. The polishing tool according to claim 3, wherein the shape of the cotton portion formed by winding cotton around the core rod is a disk extending radially with respect to the axis of the core rod. Polishing tool. 請求項3ないし5のいずれか1項に記載の研磨工具において、
芯棒に親水性の接着剤を用いて綿部分を形成したことを特徴とする研磨工具。
The polishing tool according to any one of claims 3 to 5,
A polishing tool wherein a cotton part is formed on a core bar using a hydrophilic adhesive.
請求項3ないし6のいずれか1項に記載の研磨工具において、
綿が巻かれていない芯棒部分に、撥水性塗料が塗布されていることを特徴とする研磨工具。
The polishing tool according to any one of claims 3 to 6,
A polishing tool, characterized in that a water-repellent paint is applied to a core rod portion on which cotton is not wound.
研磨液を供給する研磨液供給管を芯棒として設け、研磨液をその研磨液供給管を介して綿部分に供給しつつ光学素子の研磨面を研磨することを特徴とする請求項1又は2に記載の研磨方法。   3. A polishing liquid supply pipe for supplying a polishing liquid is provided as a core rod, and the polishing surface of the optical element is polished while supplying the polishing liquid to the cotton portion through the polishing liquid supply pipe. The polishing method according to 1. 研磨液を供給するための研磨液供給管を芯棒としてに設けたことを特徴とする請求項3〜7のいずれか1項に記載の研磨工具。

The polishing tool according to claim 3, wherein a polishing liquid supply pipe for supplying the polishing liquid is provided as a core rod.

JP2006087417A 2006-03-28 2006-03-28 Polishing method and polishing tool Pending JP2007260818A (en)

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Cited By (1)

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Publication number Priority date Publication date Assignee Title
CN115139191A (en) * 2022-09-05 2022-10-04 歌尔光学科技有限公司 Polishing method of optical lens mould core

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JPH04300153A (en) * 1991-03-28 1992-10-23 Olympus Optical Co Ltd Peel-off mechanism for lens after completion of polishing
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JPS62130178A (en) * 1985-11-28 1987-06-12 Kyocera Corp Buffing machine
JPH02232174A (en) * 1989-03-01 1990-09-14 Nippon Steel Corp Rotary tool consisting of inorganic fiber reinforced resin
JPH0487779A (en) * 1990-07-30 1992-03-19 Fujikoo:Kk Manufacture of high density felt cylindrical body
JPH04300153A (en) * 1991-03-28 1992-10-23 Olympus Optical Co Ltd Peel-off mechanism for lens after completion of polishing
JP2000317816A (en) * 1998-09-13 2000-11-21 Yoshiaki Nagaura Piezoelectric element and machining method therefor
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JP2005246588A (en) * 2004-03-08 2005-09-15 Nikon Corp Polishing device, polishing method, optical element and exposure device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115139191A (en) * 2022-09-05 2022-10-04 歌尔光学科技有限公司 Polishing method of optical lens mould core
CN115139191B (en) * 2022-09-05 2022-11-22 歌尔光学科技有限公司 Polishing method of optical lens mould core

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