JP2007251198A - Method for conveying semiconductor wafer - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for conveying a semiconductor wafer, in which production TAT can be shortened by improving the operation efficiency of a semiconductor manufacturing equipment. <P>SOLUTION: When a management computer commands a conveying vehicle to convey the semiconductor wafer processed in a first processing unit to a second processing unit from the first processing unit, if the management computer confirms that the semiconductor wafer to be processed in the first processing unit exists in a stocker, the semiconductor wafer to be processed in the first processing unit is taken out from the stocker, and the conveying vehicle receives the semiconductor wafer taken out from the stocker and, thereafter, moves toward the first processing unit from the stocker. After the process of the semiconductor wafer is completed in the first processing unit, the conveying vehicle receives the semiconductor wafer processed in the first processing unit from the first processing unit and transfers the semiconductor wafer taken out from the stocker to the first processing unit. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a transfer control method of a transfer system in a semiconductor pretreatment process in a semiconductor device manufacturing process, and an apparatus for performing processing such as cleaning, drying, and etching of a semiconductor wafer includes a plurality of semiconductor wafers. By notifying the lot transportation vehicle of the end of the processing for the lot, the processed lot can be immediately taken out of the processing apparatus, and the TAT (Turn Around Time) in the semiconductor device manufacturing process can be shortened. The present invention provides a method for transporting a semiconductor wafer.

  Conventionally, a semiconductor device manufacturing system mainly includes a stocker that temporarily stores a lot of semiconductor wafers, an automatic transport vehicle that transports the lot, an automatic transport vehicle controller that controls the automatic transport vehicle, cleaning of the lot, A processing apparatus that performs processing such as drying and etching, and an in-process management computer that manages the manufacturing system are included. Then, by the in-process management computer, the automatic transport vehicle transports the lot from the stocker to the processing device or from one processing device to another processing device.

  Here, for example, when a lot is transported from the processing apparatus A to the processing apparatus B, after the lot is processed by the processing apparatus A, the in-process management computer can perform processing to be performed on the lot. The processing device B is searched, and it is determined whether or not the processing device B is in the same processing area as the processing device A. When the processing device B is not in the same processing area as the processing device A, the in-process management computer gives an instruction to transport the lot to the stocker to the automatic transport vehicle controller, and the processing device B is in the same processing area as the processing device A. If there is, it is further determined whether or not the lot can be carried into the processing apparatus B. The in-process management computer gives an instruction for conveying the lot to the stocker when the lot cannot be carried into the processing apparatus B, and processes the lot when the lot can be carried into the processing apparatus B. An instruction to convey to apparatus B is given to the automatic conveyance vehicle controller. As described above, lots are transported in the semiconductor device manufacturing process.

  In Japanese Patent Application No. 10-329112, which is the parent application of the present case, the following one document is cited at the time of notification of reasons for refusal.

Japanese Patent Laid-Open No. 10-133706

  However, in the conventional semiconductor device manufacturing process transport method, even if a lot processed by the processing apparatus is to be carried out of the processing apparatus, after the processing is completed, the lot is sent from the processing apparatus to the in-process management computer. Notify that the process has been completed. Based on this notification, the in-process management computer instructs the automatic guided vehicle controller to move the automatic guided vehicle to the processing device. Since it takes several minutes or more for the automated guided vehicle to arrive at the processing apparatus, it is not possible to immediately carry out the processed lot from the processing apparatus. Therefore, the time from when the lot is processed until the automated guided vehicle arrives at the processing apparatus, that is, the waiting time of the processed lot, has affected the increase in production TAT of the semiconductor device. This waiting time also affects the delay of the arrival of the lot at the stocker in the processing area in the semiconductor post-processing process.

  And especially when the lot is being transferred from the pre-processing step to the post-processing step, even if the lot in the middle of the transfer is actually a lot to be processed by the processing device in the post-processing step, the processing device May be removed from the search list of the in-process lot. Furthermore, when there is only a lot that is in the process of being transferred as a target lot to be processed by the processing device in the post-processing step, the processing device stops waiting for the arrival of the lot, and the operating efficiency of the processing device is reduced. There was a possibility.

  In order to solve the above-described problems, the present invention provides a stocker for storing semiconductor wafers, a transport vehicle controller for controlling a transport vehicle for transporting semiconductor wafers, and a plurality of processes for processing semiconductor wafers. The plurality of processing apparatuses include a first processing apparatus that processes a semiconductor wafer and a second processing apparatus that performs processing of the next process on the semiconductor wafer processed by the first processing apparatus. And the management computer transfers the semiconductor wafer processed by the first processing apparatus from the first processing apparatus to the second processing apparatus to the transfer vehicle via the transfer vehicle controller. Confirms whether or not a semiconductor wafer to be processed by the first processing apparatus exists in the stocker, and the semiconductor wafer to be processed by the first processing apparatus is stored in the stocker. The semiconductor wafer to be processed by the first processing apparatus is unloaded from the stocker, and the transport vehicle receives the semiconductor wafer unloaded from the stocker and then moves from the stocker toward the first processing apparatus. Thus, the semiconductor wafer to be processed by the first processing apparatus is transferred from the stocker to the first processing apparatus, and after the processing of the semiconductor wafer is completed by the first processing apparatus, the transfer vehicle performs the first processing. The semiconductor wafer processed by the apparatus is received from the first processing apparatus, and the semiconductor wafer unloaded from the stocker is transferred to the first processing apparatus. Thereafter, the semiconductor wafer processed by the first processing apparatus is transferred to the first processing apparatus. The transport vehicle moves from the first processing device toward the second processing device in order to transport the first processing device to the second processing device.

  According to the semiconductor wafer transfer method of the present invention, when the semiconductor wafer processed by the first processing apparatus is transferred from the first processing apparatus to the second processing apparatus for performing the next process, the management computer uses It is confirmed whether or not a semiconductor wafer to be processed by the first processing apparatus exists in the stocker. If a semiconductor wafer to be processed by the first processing apparatus exists in the stocker, the semiconductor wafer is removed from the stocker. It is conveyed to the first processing device. That is, the transfer efficiency of the semiconductor wafer can be improved, and as a result, the operation efficiency of the processing apparatus can be improved. As a result, the production TAT of the semiconductor device can be shortened.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 is a configuration diagram of a transfer control system in a manufacturing process of a semiconductor device showing a first embodiment of the present invention. The semiconductor device manufacturing system according to the present invention mainly includes a stocker for temporarily storing lots, an automatic transport vehicle for transporting lots, an automatic transport vehicle controller for controlling automatic transport vehicles, cleaning, drying, etching, etc. for lots. A processing apparatus that performs processing and an in-process management computer that manages the manufacturing system are configured. Each of the stocker, the automatic guided vehicle controller, and the processing device is controlled by the in-process management computer by being connected to the in-process management computer via a terminal server via a communication cable and a LAN (Local Area Network). Yes. The automated guided vehicle is controlled by an automated guided vehicle controller by transmitting and receiving data of a processing device or the like of the next process by wireless communication.

  FIG. 2 is a layout diagram of the transfer system in the manufacturing process of the semiconductor device showing the first embodiment of the present invention. In the processing area 1 in the semiconductor device manufacturing process, there are a stocker 2 for temporarily storing lots, an automatic transport vehicle controller 5 for controlling the automatic transport vehicle 3 along the travel line 4, a processing device 6, and a processing device 7. 2, and this transport system is controlled by the in-process management computer 8.

  Next, a transport control method according to the first embodiment of the present invention will be described with reference to FIGS.

  FIG. 3 is a flowchart of the conveyance control in the manufacturing process of the semiconductor device showing the first embodiment of the present invention. FIG. 4 is a communication sequence in the manufacturing process of the semiconductor device showing the first embodiment of the present invention.

In the processing apparatus 6 that is processing a lot made of a plurality of semiconductor wafers, the time when the lot processing ends from the processing apparatus to the in-process management computer 8 at the time when the lot processing is about to end. A lot processing end notice signal is notified (S101).
At this time, that is, when the in-process management computer 8 receives a lot processing end notice signal from the processing device 6, the in-process management computer 8 processes the scheduled processing end lot in the processing device 6 with which processing device next. Is searched based on the processing progress status from each processing apparatus (S102), and the next transport destination (apparatus capable of performing the next process of the process end scheduled lot) is determined (S107). .

  If there is no apparatus capable of performing the next process of the scheduled process end lot, the stocker 2 is determined as the transport destination (S106). If there is an apparatus capable of performing the next process of the process end scheduled lot, it is checked whether the apparatus exists in the same area as the processing apparatus 6 (S104). If the stocker 2 does not exist in the same area, the stocker 2 is determined as the transport destination (S106). If the stocker 2 exists in the same area, whether or not there is a buffer capable of carrying a lot to be processed into the processing apparatus. (S105).

  Here, if there is no buffer that can be loaded, the stocker 2 is determined as the transport destination (S106). If there is a buffer that can be carried in, that processing device is determined as the transport destination (S107). (In this case, for example, this apparatus is referred to as a processing apparatus 7.) The in-process management computer 8 sends a sequence number (a non-overlapping positive integer representing a conveyance instruction), a standby position to the automatic guided vehicle controller 5. ID (the ID of the processing device that carries out the processed lot), lot ID1 (the lot ID that is scheduled to be finished), transfer source position 1 (the ID of the processing device that carries out the processed lot + the processing that carries out the processed lot Conveyance instruction data including, as the contents of the conveyance instruction, the lot takeout ID (port ID) in the apparatus and the transfer destination position 1 (ID of the transfer destination processing apparatus + lot transfer entrance ID (port ID) of the transfer destination processing apparatus) Is notified (S108).

  Based on the conveyance instruction data, the automatic conveyance vehicle controller 5 controls the automatic conveyance vehicle 3, and the automatic conveyance vehicle 3 starts moving to the processing device 6 (the conveyance source processing device 6) that carries out the processed lot. To do. Further, the in-process management computer 8 receives the lot processing end notice signal from the processing device 6, and after the lot transfer instruction described above, the processing device 6 determines the time when the lot processing is finished after the lot processing end notice signal is transmitted. The set monitoring timer 9 provided in the processing device 6 is started (S109).

  Thereafter, the in-process management computer 8 waits for the automatic guided vehicle 3 to arrive at the standby position of the processing device 6. When the automatic guided vehicle 3 arrives at the standby position of the processing device 6, the automatic guided vehicle controller 5 notifies the in-process management computer 8 that the automatic guided vehicle 3 has arrived at the standby position of the processing device 6 (S110). ). At this time, the in-process management computer 8 confirms whether or not the end of the lot processing is notified from the processing device 6 (S111).

  Here, when the end of lot processing is notified from the processing device 6, the in-process management computer 8 processes the processed lot in the next process of the lot that has been processed by the processing device 6 from the processing device 6. An instruction to convey to a processing apparatus (for example, the processing apparatus 7) that can be used is issued (S112), and the automatic transport vehicle 3 transports the lot from the processing apparatus 6 to the processing apparatus 7.

  Here, since the processing end of the lot is time-consuming and is notified to the management computer 8 in advance, the automatic transport vehicle 3 can arrive at the processing device 6 almost simultaneously with the end of the lot processing. As a result, the automatic transport vehicle 3 The processed lot can be carried out immediately after the arrival at the processing device 6. Thereafter, the in-process management computer 8 again waits for reception of a signal for notifying the end of lot processing in the processing apparatus (S113), and when receiving the notification signal, repeats the above-described operation (S114).

  On the other hand, when the end of lot processing is not notified from the processing device 6, the in-process management computer 8 passes the time when the monitoring timer 9 started when the lot processing end notice signal is received from the processing device 6 is set. Whether or not the monitoring timer 9 has timed out is checked (S115).

  Here, if the timeout of the monitoring timer 9 has not occurred, the in-process management computer 8 confirms again whether or not the lot processing has been completed in the processing device 6 (S111). Therefore, if the lot processing has been completed, the in-process management computer 8 issues an instruction to transfer the processed lot from the processing device 6 to the processing device 7 as described above (S112). Start lot transportation.

However, if the monitoring timer 9 times out due to the trouble of the processing device 6 or the like that causes the lot processing end time of the processing device 6 to be later than the scheduled processing end time, the in-process management computer 8 sends a lot Is notified to the automatic guided vehicle controller 5 (S116).
Thereafter, the automated guided vehicle 3 waiting in front of the processing device 6 carries out the processed lot from a processing device other than the processing device 6 by canceling the removal of the lot from the processing device 6. Alternatively, it can be used arbitrarily such as unloading an unprocessed lot from the stocker 2.

  In addition, when the processing device 6 notifies the in-process management computer 8 of the end of the lot processing after the time-out of the monitoring timer 9 occurs (S117), the in-process management computer 8 informs the automatic guided vehicle controller 5 On the other hand, another automatic conveyance vehicle 3 is instructed to move to the processing device 6 (S118), and the automatic conveyance vehicle 3 causes the processed device 6 to carry out the processed lot. Thereafter, the in-process management computer 8 again waits for reception of a signal for notifying the end of lot processing in the processing apparatus (S113), and when receiving the notification signal, repeats the above-described operation. (S114)

  As described above, according to the semiconductor device manufacturing process transport system in the first embodiment of the present invention, the lot is about to be processed from the processing device 6 that is processing the lot to the in-process management computer 8. A signal indicating that the process is to be finished is transmitted in advance, and the automatic transport vehicle 3 can immediately send the processed lot out of the processing apparatus 6 after the processing device 6 finishes processing the lot. It can be conveyed to the processing device 7 of the process.

  That is, the time for waiting for arrival of the automated guided vehicle 3 for the lot processed in the processing apparatus 6 is reduced, and as a result, the operating rate of the semiconductor manufacturing apparatus can be improved. Turn Around Time) can be shortened. Further, since the monitoring timer 9 is installed so that the automatic conveyance vehicle 3 can grasp the processing status of the lot in the processing device 6, until the automatic conveyance vehicle 3 arrives at the processing device 6, the automatic conveyance vehicle 3. Can be used effectively in terms of time.

  Next, a second embodiment of the present invention will be described below with reference to the drawings.

  In the second embodiment, the configuration and layout of the transport control in the manufacturing process of the semiconductor device are as shown in FIGS. 1 and 2, respectively, as in the case of the first embodiment.

  FIG. 5 is a flowchart of transport control in the manufacturing process of the semiconductor device showing the second embodiment of the present invention. FIG. 6 is a communication sequence in the semiconductor device manufacturing process according to the second embodiment of the present invention.

  In the processing apparatus 6 that is processing a lot made of a plurality of semiconductor wafers, the time when the lot processing ends from the processing apparatus to the in-process management computer 8 at the time when the lot processing is about to end. A lot processing end notice signal is notified (S201).

  At this time, that is, when the in-process management computer 8 receives a lot processing end notice signal from the processing device 6, the in-process management computer 8 processes the scheduled processing end lot in the processing device 6 with which processing device next. Is searched based on the processing progress status from each processing apparatus (S202), and the next transport destination (apparatus capable of performing the next process of the process end scheduled lot), for example, the processing apparatus 7 is searched. Determine (S207).

  If there is no apparatus that can process the next process of the scheduled process end lot, the stocker 2 is determined as the transport destination (S206). If there is an apparatus that can process the next process of the scheduled process end lot, it is checked whether the apparatus exists in the same area as the processing apparatus 6 (S204).

  If the stocker 2 does not exist in the same area, the stocker 2 is determined as the transport destination (S206). If the stocker 2 exists in the same area, whether or not there is a buffer capable of carrying the lot to be processed into the processing apparatus. (S205). Here, in-process management computer 8 determines stocker 2 as the transport destination when there is no buffer that can be loaded (S206), and determines the processing device as the transport destination when there is a buffer that can be loaded (S206). S207). Thereafter, the in-process management computer 8 also checks whether or not a lot to be processed by the processing device 6 exists in the stocker 2 (S208).

  First, a case where there is a lot to be processed in the stocker 2 will be described. In this case, the in-process management computer 8 instructs the stocker 2 to leave the lot to be processed by the processing device 6 from the stocker 2 (S209). The in-process management computer 8 recognizes that the lot has been delivered from the stocker 2, and then instructs the automatic guided vehicle controller 5 to transport the delivered lot to the processing device 6 (S210). .

  The transport instruction data at this time includes a sequence number (a non-overlapping positive integer representing the transport instruction), a standby position ID (the ID of the processing apparatus that carries out the processed lot), and a lot ID 1 (the processing apparatus 6 in the stocker). ID of the lot to be processed in step 1), transfer source position 1 (stocker ID + lot takeout ID in the stocker (port ID)), transfer destination position 1 (transfer destination processing device ID + transport destination processing device lot delivery) Mouth ID (port ID)), lot ID 2 (ID of the lot scheduled to end processing in the processing device 6), transfer source position 2 (ID of the processing device 6 that carries out the processing-finished lot + processing for carrying out the processing-finished lot The lot takeout ID (port ID) in the apparatus 6 is included. Thereafter, the automatic transport vehicle 3 moves to the stocker 2, and transports the lot to be processed by the processing device 6, which has been delivered from the lot takeout port of the stocker 2, to the processing device 6.

  On the other hand, a case where there is no lot to be processed in the stocker 2 will be described. In this case, the in-process management computer 8 instructs the automatic guided vehicle controller 5 to move toward the processing device 6 without passing through the stocker 2 and to carry out the processed lot from the processing device 6. (S212). Further, here, the delay timer 10 provided in the automatic guided vehicle controller 5 is started (S211), so that the time required for the automatic guided vehicle 3 to arrive at the processing device 6 via the stocker 2 from the current location is determined. The automatic conveyance vehicle 3 starts moving to the processing device 6 with a delay by a time obtained by subtracting the time required for the automatic conveyance vehicle 3 to arrive at the processing device 6 without passing through the stocker 2 from the current location.

  Further, the in-process management computer 8 instructs the automatic transport vehicle controller 5 to move the automatic transport vehicle regardless of whether there is a lot to be processed by the processing device 6 in the stocker 2 (automatic transport vehicle movement instruction signal is displayed). And a monitoring timer 9 provided in the processing device 6 is started (S213), which sets a time at which the lot processing in the processing device 6 ends after the automatic transport vehicle movement instruction signal is transmitted (S213).

  Thereafter, the in-process management computer 8 waits for the automatic guided vehicle 3 to arrive at the standby position of the processing device 6. When the automatic guided vehicle 3 arrives at the standby position of the processing device 6, the automatic guided vehicle controller 5 notifies the in-process management computer 8 that the automatic guided vehicle 3 has arrived at the standby position of the processing device 6 (S214). ). At this time, the in-process management computer 8 checks whether or not the end of the lot processing has been notified from the processing device 6 (S215).

  Here, when the end of lot processing is notified from the processing device 6, the in-process management computer 8 processes the processed lot in the next process of the lot that has been processed by the processing device 6 from the processing device 6. An instruction to convey to a processing apparatus (for example, processing apparatus 7) that can be used is issued (S216).

  Then, the automatic transport vehicle 3 carries the unprocessed lot taken out from the stocker 2 into the processing device 6 and takes out the processed lot from the processing device 6 and transports it to the processing device 7. Thereafter, the in-process management computer 8 again waits for reception of a signal for notifying the end of lot processing in the processing apparatus (S217), and when receiving the notification signal, repeats the above-described operation (S218).

  On the other hand, when the end of the lot processing is not notified from the processing device 6, the in-process management computer 8 is set in the monitoring timer 9 that is started when the instruction signal for moving the automatic guided vehicle is transmitted. It is confirmed whether the time has passed, that is, whether the monitoring timer 9 has timed out (S219).

  Here, if the timeout of the monitoring timer 9 has not occurred, the in-process management computer 8 confirms again whether or not the lot processing has been completed in the processing device 6. If the lot processing has been completed after the reconfirmation, the in-process management computer 8 issues an instruction to transfer the processed lot from the processing device 6 to the processing device 7 as described above, and the automatic transport vehicle 3 Start transporting.

  However, if the monitoring timer 9 times out due to the trouble of the processing device 6 or the like that causes the lot processing end time of the processing device 6 to be later than the scheduled processing end time, the in-process management computer 8 sends a lot from the processing device 6 to the lot. Is notified to the automatic guided vehicle controller 5 (S220).

  Thereafter, the automated guided vehicle 3 waiting in front of the processing device 6 carries out the processed lot from a processing device other than the processing device 6 by canceling the removal of the lot from the processing device 6. Alternatively, it can be used arbitrarily such as unloading an unprocessed lot from the stocker 2.

  In addition, when the processing device 6 notifies the in-process management computer 8 of the end of the lot processing after the timeout of the monitoring timer 9 occurs (S221), the in-process management computer 8 notifies the automatic guided vehicle controller 5 of the in-process management computer 8. On the other hand, another automatic transport vehicle 3 is instructed to move to the processing device 6 (S222), and the processed transport lot is unloaded from the processing device 6 to the automatic transport vehicle 3. Thereafter, the in-process management computer 8 again waits for reception of a signal for notifying the end of lot processing in the processing apparatus (S217), and when receiving the notification signal, repeats the above-described operation (S218).

  As explained above, according to the transfer system of the semiconductor device manufacturing process in the second embodiment of the present invention, the following effects appear. In other words, if the in-process management computer 8 receives a signal from the processing device 6 that is processing the lot that the lot is about to be processed, the stocker 2 will process the next in the processing device 6. If there is a lot that can be processed, the automated guided vehicle 3 is moved to the processing device 6 via the stocker, and after arriving at the processing device 6, the unprocessed lot is carried into the processing device 6, and the processed lot is Since it was carried out from the processing apparatus 6, the operating efficiency of the processing apparatus in the semiconductor device manufacturing process can be improved.

  Further, when there is no unprocessed lot in the stocker 2, by using the delay timer 10, the automatic transport vehicle 3 is automatically transported from the time required for the automatic transport vehicle 3 to arrive at the processing device 6 via the stocker 2 from the current location. Since the automatic conveyance vehicle 3 is moved to the processing device 6 with a delay of the time required for the vehicle 3 to arrive at the processing device 6 without passing through the stocker 2 from the current location, the automatic conveyance vehicle 3 Can be used effectively in terms of time. As a result, TAT (Turn Around Time) in the manufacturing process of the semiconductor device can be shortened.

It is a block diagram of the conveyance control in the manufacturing process of the semiconductor device which shows the 1st Embodiment of this invention. It is a layout of the conveyance system in the semiconductor device manufacturing process which shows the 1st Embodiment of this invention. It is a flowchart of the conveyance control in the manufacturing process of the semiconductor device which shows the 1st Embodiment of this invention. It is a communication sequence in the manufacturing process of the semiconductor device which shows the 1st Embodiment of this invention. It is a flowchart of the conveyance control in the manufacturing process of the semiconductor device which shows the 2nd Embodiment of this invention. It is a communication sequence in the manufacturing process of the semiconductor device which shows the 1st Embodiment of this invention.

Explanation of symbols

1: Processing area in semiconductor device manufacturing process 2: Stocker 3: Automatic transport vehicle 4: Travel line 5: Automatic transport vehicle controller 6, 7: Processing device 8: In-process management computer 9: Monitoring timer 10: Delay timer

Claims (8)

A management computer manages a stocker that stores semiconductor wafers, a transport vehicle controller that controls a transport vehicle that transports the semiconductor wafers, and a plurality of processing devices that process the semiconductor wafers. Includes a first processing apparatus that processes the semiconductor wafer, and a second processing apparatus that performs processing of the next process on the semiconductor wafer processed by the first processing apparatus,
When the management computer causes the transfer vehicle to transfer the semiconductor wafer processed by the first processing apparatus from the first processing apparatus to the second processing apparatus via the transfer vehicle controller, the management computer Confirms whether or not a semiconductor wafer to be processed by the first processing apparatus exists in the stocker,
When the semiconductor wafer to be processed by the first processing apparatus exists in the stocker, the semiconductor wafer to be processed by the first processing apparatus is unloaded from the stocker, and the transport vehicle is moved from the stocker. The semiconductor wafer received is received, and then moved from the stocker toward the first processing apparatus, whereby the semiconductor wafer to be processed by the first processing apparatus is transferred from the stocker to the first processing. Transport to equipment,
After the processing of the semiconductor wafer is completed in the first processing apparatus, the transport vehicle receives the semiconductor wafer processed in the first processing apparatus from the first processing apparatus, and from the stocker. The delivered semiconductor wafer is transferred to the first processing apparatus, and then moved from the first processing apparatus toward the second processing apparatus, so that the first wafer is processed by the first processing apparatus. A method of transporting a semiconductor wafer, comprising transporting a semiconductor wafer from the first processing apparatus to the second processing apparatus. The method for transporting a semiconductor wafer according to claim 1.
When the semiconductor wafer to be processed by the first processing apparatus exists in the stocker,
The management computer notifies the stocker of a delivery instruction for taking out the semiconductor wafer to be processed by the first processing apparatus from the stocker, and the first processing apparatus executes the stocking instruction according to the delivery instruction. The semiconductor wafer to be processed is unloaded from the stocker,
The management computer is notified of a movement instruction for transferring the semiconductor wafer delivered from the stocker to the first processing apparatus, and according to the movement instruction, the conveyance vehicle A semiconductor wafer transfer method, wherein the semiconductor wafer moves from a stocker toward the first processing apparatus. In the semiconductor wafer transfer method according to claim 1 or 2,
The transport vehicle controller notifies the management computer that the transport vehicle has arrived at the first processing apparatus, and then the management computer processes the semiconductor wafer in the first processing apparatus. It is confirmed whether or not the semiconductor wafer is finished. In the conveyance method of the semiconductor wafer as described in any one of Claims 1-3,
A method of transporting a semiconductor wafer, characterized in that the first processing apparatus notifies the management computer that the processing of the semiconductor wafer has been completed by the first processing apparatus. In the conveyance method of the semiconductor wafer as described in any one of Claims 1-4,
After the processing of the semiconductor wafer is completed in the first processing apparatus, the transport vehicle is moved from the first processing apparatus toward the second processing apparatus from the management computer to the transport vehicle controller. A method for transporting a semiconductor wafer, characterized in that an instruction is given. In the semiconductor wafer transfer method according to any one of claims 1 to 5,
A method of transporting a semiconductor wafer, wherein the processing of the semiconductor wafer in the first processing apparatus is finished when the transport vehicle arrives at the first processing apparatus. In the conveyance method of the semiconductor wafer as described in any one of Claims 1-6,
When the semiconductor wafer to be processed by the first processing apparatus exists in the stocker, the transport vehicle moves to the stocker to receive the semiconductor wafer to be processed by the first processing apparatus. A method for transporting a semiconductor wafer. In the conveyance method of the semiconductor wafer as described in any one of Claims 1-7,
After the semiconductor wafer processed by the first processing apparatus is determined to be transferred from the first processing apparatus to the second processing apparatus, the management computer should process the first processing apparatus. It is confirmed whether or not a semiconductor wafer exists in the stocker.

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