JP2007248399A - Vibration testing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vibration testing device, capable of applying vibration in three orthogonal axial directions to an object to be tested, further, allowing vibration test of the object during use and reducing the size of the device. <P>SOLUTION: The vibration testing device includes piezoelectric actuators 11X, 11Y and 11Z, respectively in X/Y/Z axial directions and is provided on a base 10 to prevent directions of applying vibration (excitation directions) in the different axial directions from intersecting with each another, that is to disperse the excitation directions. Thus, it is easy to provide a component, such as a common hole 14a for connecting the object with an electrical testing device in the base 10, and in addition, an entire upper part of the device can be used as a mounting surface of the object, thereby reducing the size of the device. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a vibration test apparatus for testing the influence of vibration on a device under test by applying vibration to the device under test. The present invention relates to a vibration test apparatus capable of applying vibration to each of the three axial directions.

  2. Description of the Related Art Conventionally, vibration tests that give vibrations under various conditions on products such as various devices (devices) and parts have been widely performed, and the influence of vibration on the products is evaluated by the vibration tests. In particular, in recent years, the quality and performance required in accordance with the types and applications of various products are becoming more sophisticated, so that the conditions for vibration tests are becoming more detailed and complicated depending on the applications of the products.

  Various types of vibration test apparatuses for performing the vibration test have been proposed so far, and among them, a multi-axis vibration test apparatus capable of applying vibration in a multi-axis direction has been proposed and put into practical use. Yes. Since the multi-axis vibration test apparatus can give more complex vibrations to the equipment and parts to be tested (hereinafter referred to as a device under test), it is almost the same as the situation where the device under test is actually used. The vibration state that is the same or close to that can be reproduced, and therefore, evaluation for vibration can be performed more strictly.

  As an example of the multi-axis vibration test apparatus, for example, a triaxial micro-vibration vibration apparatus disclosed in Patent Document 1 can be cited. This triaxial micro-vibration vibration exciter has a configuration in which piezoelectric actuators are arranged orthogonally in two or three directions and the vibration is transmitted to the movable block at the tip without interfering with the displacement of each actuator by a displacement synthesis member. Yes.

  More specifically, as shown in FIG. 5, the triaxial micro-vibration exciting device includes a triaxial vibrator main body 101 that can vibrate in three orthogonal directions, a base 102, and a laminated piezoelectric element arranged orthogonal to the base 102. Piezoelectric actuators 103a, 103b, 103c composed of elements, a cubic movable block 104 for fixing a specimen (test object, not shown) to the tip of the vibrator, the laminated piezoelectric elements 103a, 103b, 103c, and the movable block 104 Are further provided, and elastic hinge mechanisms 105a, 105b, and 105c are provided as displacement combining members for avoiding interference due to displacement in other directions.

  The laminated piezoelectric elements 103a, 103b, and 103c are firmly fixed by bonding or bolting between the coupling plates 106a, 106b, and 106c provided at the other ends of the elastic hinge mechanisms 105a, 105b, and 105c and the base 102, respectively. It is fixed to. Further, an acceleration sensor 107x is attached in the X direction of the movable block 104, and the output acceleration at the time of vibration is detected. Illustration of the acceleration sensor in the Y direction and the Z direction is omitted.

  Further, the mass of the base 102 is made sufficiently heavy with respect to the movable block 104. Thereby, it is made hard to receive the influence of the vibration of a front-end | tip. In Patent Document 1, the mass ratio between the base 102 and the movable block 104 is 1:10 or more as a preferable example.

According to the triaxial micro-vibration exciting apparatus having the above-described configuration, it is possible to simultaneously perform high-frequency excitation in two or three directions on the specimen (test object), and at the same time, achieve high incoherence. It can be accurately reproduced for acceleration input.
JP-A-6-265438 (published September 22, 1994)

  By the way, as described above, in recent years, the demand for product quality and performance has increased, so the demand for enabling various test conditions to be implemented also for vibration test apparatuses for evaluating products has increased. Yes. In particular, among various products, for example, devices that perform a predetermined operation by energization, such as home appliances and precision devices, are required to be able to perform vibration tests on devices in use. .

  Conventional vibration tests are typically an electrical test after vibration is applied to a product, for example, a vibration test for detecting a failure due to vibration such as transportation before shipping. In recent years, there has been an increasing demand for products that must be assumed to be vibrated in use, such as portable music players and in-vehicle electronic devices. Therefore, in recent years, there has been an increasing demand for tests that can be carried out in use, that is, in an energized state, and depending on the type of product, vibration tests that require an energized vibration test have appeared ( Portable music players, in-vehicle electronic devices, etc.).

  On the other hand, the triaxial micro-vibration exciting device disclosed in Patent Document 1 is not configured to take into account a vibration test during energization, and thus cannot sufficiently meet the demand.

  Specifically, in order to perform a vibration test in use, it is necessary to apply vibration to the device under test and to check the operation status of the device under test using another test apparatus. In the examples of the portable music player and the vehicle-mounted electronic device, it is necessary to connect the electronic device (electronic device) to be tested to an electrical test apparatus (for example, various testers). Therefore, it is necessary to have a configuration in consideration of connecting them with an interface cable. However, in the above three-axis micro-vibration vibration exciter, since such consideration is not made, even if the vibration test can be performed on the DUT when the power is OFF (non-use state), The vibration test cannot be performed in (use state).

  Furthermore, since the triaxial micro-vibration exciting device has a large main body, there is a problem that its manufacturing cost cannot be reduced sufficiently.

  Specifically, as shown in FIG. 5, the three-axis micro-vibration exciting device includes elastic hinge mechanisms 105a, 105b, and 105c and a coupling plate 106a in three directions orthogonal to each other, that is, X / Y / Z directions. A vibration source such as 106b and 106c and piezoelectric actuators 103a, 103b, and 103c is fixed to the base 102 outside the movable block 104. Therefore, the triaxial vibrator main body 101 is larger than the movable block 104. In other words, the region used for the vibration test (movable block 104) is relatively narrow with respect to the triaxial vibrator main body 101. ing.

  In order to reduce the size with such a configuration, for example, it is necessary to use special parts. In addition, there is no change in the small area used for the vibration test, and even if the size is reduced as it is, the exclusive area of the vibration test apparatus itself is not reduced.

  The present invention has been made in view of the above problems, and its purpose is to apply vibration in three orthogonal directions to the device under test, and to enable vibration testing in the use state of the device under test. In addition, an object of the present invention is to provide a vibration test apparatus that can reduce the size of the apparatus.

  As a result of intensive studies in view of the above problems, the present inventor does not face each other so that the excitation directions (directions in which vibration is applied) of a plurality of actuators cross each other as in the prior art. If each actuator is arranged so as to diverge, not only can the area used for vibration tests be made relatively large to reduce the size of the device, but also cables etc. can be passed through the space created in the direction opposite to the excitation direction. Therefore, the present inventors have found that it is possible to realize a vibration test apparatus that can perform a vibration test in a use state, and completed the present invention.

  That is, in order to solve the above-described problem, the vibration test apparatus according to the present invention includes a plurality of actuators arranged in each of three axial directions orthogonal to each other, a support body that fixes and supports these actuators, The vibration test apparatus includes a vibration table that can vibrate by operation of the actuator in a state where the test body is placed, wherein the plurality of actuators apply vibrations in actuators arranged in different axial directions. The vibration table is fixedly supported by the support so that the directions do not cross each other, and the vibration table is provided so as to cover the support with each actuator interposed.

  According to the above configuration, the actuator is provided in each direction of the X / Y / Z axis, and the actuators in different axial directions (other axis directions) diverge from one point to the outside without intersecting the excitation directions. It is like that. The vibration table is provided so as to cover these actuators (and a support body that fixes and supports the actuators). Therefore, a vibration source such as an actuator is installed in the vibration table, and the apparatus main body can be made smaller than the vibration table. In addition, by adopting a method such as forming a hole in the support in the vibration table, it is possible to adopt a configuration in consideration of conducting a vibration test during energization (use state).

  The vibration test apparatus preferably further includes interference removing means for avoiding interference between vibrations applied from actuators arranged in different axial directions.

  According to the above configuration, even when vibration is applied from two or more axial directions, it is possible to avoid a situation in which vibrations from different directions interfere with each other and cancel vibrations that are not supposed to be tested.

  Furthermore, the interference removing means is preferably provided between the vibration table and the actuator. Thereby, since the interference removing means is provided for the actuators in the respective axial directions, it is possible to more effectively avoid the interference of vibrations from the other axes.

  Furthermore, it is more preferable that a bearing is used as the interference removing means. By using the bearing as an interference removal means, vibration from the actuator arranged in the coaxial direction can be transmitted to the vibration table, and vibration from the actuator arranged orthogonal to the coaxial direction can be transmitted by itself. Since it can move smoothly while reducing friction, it is possible to effectively avoid a situation that affects the movement in the other axis direction.

  In the vibration test apparatus, it is preferable that a piezoelectric actuator using a piezoelectric element that causes displacement by application of voltage is used as the actuator. As a result, good minute vibrations can be given to the shaking table, and vibration control can be efficiently performed by using acceleration detecting means or the like, as will be described later. A piezo element can be given as a typical example of the piezoelectric element.

  In the vibration test apparatus, it is preferable that at least a hole for passing a cable connected to the actuator is provided in the support. Since the vibration test apparatus is fixedly supported by the support so that the directions in which vibrations are applied to the actuators arranged in different axial directions do not cross each other, a cable connected to the actuator is passed through the support. Holes can be provided. Thereby, it is possible to prevent the cable connected to the actuator from being broken by vibration, and to suppress interference of vibration to the device under test.

  In the vibration test apparatus, it is more preferable that a hole for passing a cable connected to the device under test is further provided. Since the vibration test apparatus is fixedly supported by the support so that the directions of applying vibrations in the actuators arranged in different axial directions do not cross each other, a cable connected to the test object is attached to the support. A hole can be provided for passage. Accordingly, it is possible to prevent the cable connected to the device under test from being disconnected due to vibration, and to suppress the interference of vibration to the device under test.

  The vibration test apparatus preferably further includes a device under test fixing means for fixing the device under test placed on the vibration table. Thereby, the device under test can be stably held on the vibration table even during the vibration test.

  Preferably, the device under test fixing means has a socket for pressing and fixing at least a part of the device under test. Further, it is more preferable that the device under test fixing means has a substrate shape that can be mounted on a vibration table. Thereby, the vibration test evaluation in a state where the device under test is energized can be performed.

  The vibration test apparatus preferably further includes vibration control means for controlling driving of the actuator. Thereby, the vibration of the actuator can be controlled, and a better vibration test evaluation can be performed. As an example of the vibration control means for controlling the drive of the actuator, there can be mentioned a drive amplifier and an amplifier control circuit for controlling the operation of the drive amplifier.

  The vibration control means preferably further includes an acceleration detection means that is provided on the vibration table and inputs the detected acceleration data to the vibration control means in order to use it for vibration control. Thereby, as will be described later, the vibration control means is actually set to an arbitrary vibration by detecting the vibration of the vibration table by the acceleration detection means and inputting the obtained signal to the vibration control means. Can be adjusted.

The acceleration detection means may further include one or more acceleration sensors that detect the acceleration in the end direction, and each one is provided in each of the different axial directions of the vibration table,
Alternatively, it is preferable to provide at least one on the shaking table using a multi-axis acceleration sensor that detects acceleration in three axial directions. Thereby, the excitation degree of each of the three axes can be detected. Thereby, the vibration control matched to the excitation degree of each of the three axes can be performed.

  As described above, the vibration test apparatus according to the present invention is provided so that the actuator is arranged on the support body in the X / Y / Z axis direction and outward, and the vibration table is provided so as to cover them. Thereby, unlike the prior art, it is possible to realize a configuration in which the support is present inside the vibration table and the actuator. Therefore, it becomes easy to provide means for connecting the device under test and the electrical test apparatus (tester or the like) by forming a hole or the like in the support body. In addition, the device can be vibrated in three axial directions, and the entire upper portion of the device can be used as a mounting surface of the device under test, so that it is used for vibration testing as compared with the prior art. The area can be made relatively larger than the apparatus main body 101.

  As a result, according to the vibration test apparatus according to the present invention, it is possible to perform a vibration test in the use state of the device under test, and to reduce the size of the apparatus. Alternatively, a triaxial vibration test can be performed in which vibration can be applied to the shaking table simultaneously in three directions.

  One embodiment of the present invention will be described below with reference to FIGS. 1 to 4, but the present invention is not limited to this.

  The vibration test apparatus according to the present embodiment is a vibration test apparatus that can vibrate a device under test in multiple directions, and includes actuators arranged in three orthogonal directions (X / Y / Z-axis directions), and A base (support) for supporting, a vibration table arranged to cover the upper part of the base and the actuator, and preferably an interference removing unit for avoiding interference of actuators in other axial directions (different axial directions) Furthermore, it is preferable that the interference removing unit is provided on a contact surface between the shaking table and the actuator.

  Specifically, as shown in FIG. 1, the vibration test apparatus of the present embodiment includes a base (support) 10, piezoelectric actuators 11X and 11Y (not shown in FIG. 1) 11Z, and a bearing 12X. 12Y (not shown in FIG. 1) 12Z and a shaking table 13 are provided. A common hole 14 a and an actuator hole 14 b are formed in the base 10, and a socket substrate (test object fixing means) 15 is detachably provided on the vibration table 13. Further, the socket substrate 15 is provided with device sockets 16A and 16B, and an interface cable connector (hereinafter referred to as IF cable connector for convenience) connected to an interface cable (hereinafter abbreviated as IF cable) 17. And an acceleration sensor 20 are provided. An actuator cable (signal cable) 19 is connected to the piezoelectric actuators 11X, 11Y, and 11Z.

  The base 10 is a support that fixes and supports the piezoelectric actuators 11X, 11Y, and 11Z. As shown in FIG. 1, a hole through which a cable such as a common hole 14a or an actuator hole 14b can be passed is formed. Has been. As will be described later, the base 10 has a shape in which a plurality of piezoelectric actuators 11X, 11Y, and 11Z are arranged in the X-axis direction, the Y-axis direction, and the Z-axis direction, for example, as shown in FIG. A preferable rectangular parallelepiped shape can be mentioned.

  A more specific configuration of the base 10 is not particularly limited, and is not particularly limited as long as the piezoelectric actuators 11X, 11Y, and 11Z can be fixedly supported while the vibration test apparatus is in operation.

  In the configuration shown in FIG. 1, the common hole 14 a formed in the base 10 is provided so as to penetrate from the lower side to the upper side of the base 10, and the IF cable 17 connected to the IF cable connector 18. The actuator cable 19 connected to each of the piezoelectric actuators 11X, 11Y, and 11Z is inserted and wired. Similarly, an actuator hole 14 b is also formed in the base 10. The actuator hole 14b branches from the common hole 14a toward the piezoelectric actuators 11X, 11Y, and 11Z provided on the surface of the base 10, and an actuator cable 19 is inserted and wired therein. .

  Specific configurations of the common hole 14a and the actuator hole 14b are not particularly limited. For example, if the base 10 is hollow like a casing, for example, a pipe made of the same material as the base 10 is used. It may be formed in the base 10 or if the base 10 is a block-like block body, a corresponding hole may be formed inside by a known method. Also, the positions and conditions for forming these holes are not particularly limited, and they may be arranged and formed in a balanced manner so as not to affect the vibration during the test.

  The piezoelectric actuators 11X, 11Y, and 11Z are not particularly limited as long as the piezoelectric actuators 11X, 11Y, and 11Z are means for applying vibration (vibrating) to the vibration table 13. In this embodiment, as described above, a piezoelectric type using a piezoelectric element that causes displacement by application of voltage is used, but the actuator is not limited to this, and other known types are used. You can also. In the present embodiment, a piezoelectric element can be suitably used as the piezoelectric element.

  The number of piezoelectric actuators used in the present invention is not particularly limited. However, as shown in FIG. 2, at least one piezoelectric actuator 11X, 11Y, and each of the three X / Y / Z axes orthogonal to each other is shown. Since 11Z needs to be arranged, at least three or more are used. In the present embodiment, two on each of the opposing surfaces in the X-axis direction that are the side surfaces of the base 10 and two on each of the opposing surfaces in the Y-axis direction that are also the side surfaces of the base 10 are Z on the upper surface of the base 10. For example, a configuration in which four are provided in the axial direction can be employed, but the configuration is not limited to this (see FIGS. 1 and 2).

  Also, the arrangement conditions of the piezoelectric actuators 11X, 11Y, and 11Z are not particularly limited, but it is preferable that the piezoelectric actuators 11X, 11Y, and 11Z are provided so as to be targets in order to prevent variations in vibration applied to the vibration table 13. For example, two piezoelectric actuators 11X and 11Y are provided at equal intervals on the opposite surfaces in the X-axis direction and the Y-axis direction, which are side surfaces, and the upper surface in the Z-axis direction is square. An example in which four piezoelectric actuators 11Z are provided can be given.

  Furthermore, the piezoelectric actuators 11X, 11Y, and 11Z are fixedly supported by a support so that vibration applying directions (excitation directions) in actuators arranged in different axial directions do not intersect each other. Specifically, as shown in FIG. 2, the piezoelectric actuators 11 </ b> X, 11 </ b> Y, and 11 </ b> Z are provided on the surface of the rectangular parallelepiped base 10 so that the vibration surfaces (surfaces that apply vibration) do not face each other. In the figure, the arrow indicates the direction of amplitude of vibration, the piezoelectric actuator 11X applies vibration in a direction perpendicular to the side surface of the base 10 in the X-axis direction, and the piezoelectric actuator 11Y corresponds to the Y-axis of the base 10. Vibration is applied in a direction perpendicular to the side surface of the direction, and the piezoelectric actuator 11Z applies vibration to the upper surface (Z-axis direction) of the base 10.

  Looking at the excitation directions of the piezoelectric actuators 11X, 11Y, and 11Z, the respective excitation directions are directed from the inside of the base 10 to the outside, in other words, diverge from the inside of the base 10 to the outside. The direction of this excitation direction is greatly different from the direction in the conventional vibration test apparatus shown in FIG. 5 (conventionally, the excitation direction of the X / Y / Z axis converges or intersects at one point). Is different.

  The piezoelectric actuators 11X, 11Y, and 11Z are all connected to an actuator cable 19, and operate when a voltage is applied or a control signal is output by these cables. Are connected to a vibration control unit, a power source, and the like through the common hole 14a and the actuator hole 14b in the base 10.

  The vibration table 13 can be vibrated by the operation of the piezoelectric actuators 11X, 11Y, and 11Z with the test object mounted thereon. Further, as shown in FIGS. 1 and 2, each of the piezoelectric actuators 11X and 11Y is vibrated. -It is provided so as to cover the base 10 with 11Z interposed. The shape of the vibration table 13 is not particularly limited and may be any shape that covers the base 10. In the present embodiment, for example, as shown in FIGS. 1 and 2, the shape of the vibration table 13 corresponds to the outer shape of the base 10. The shape (box shape) which the square shape and the downward direction opened can be mentioned preferably.

  The specific configuration of the vibration table 13 is not particularly limited. The vibration table 13 has such a strength that the whole is appropriately vibrated by vibrations applied from the piezoelectric actuators 11X, 11Y, and 11Z while the test object is placed. Any material having durability may be used.

  The upper side of the vibration table 13, that is, the mounting surface only needs to be able to mount a test object (sample). The specific type of the device under test is not particularly limited and may be any product for which a vibration test is desired. In particular, in the present invention, a product that operates by energization or the like, in other words, a product that has a clear difference in state between the use state and the non-use state can be preferably cited as the DUT.

  For example, an electric device, an electronic device, a precision device, and the like that operate when energized can be given, but a component that operates by energization regardless of a device (device) as a finished product may be used. Specifically, examples of the electronic device as a finished product include a portable music player, an in-vehicle electronic device, and a notebook computer, and examples of the component include a hard disk drive used in these electronic devices. Of course, it is needless to say that even if the product does not necessarily operate and does not differ, it can be suitably used as a device under test.

  In the present embodiment, it is preferable to provide a socket substrate 15 on the mounting surface of the vibration table 13 as shown in FIG. The socket substrate 15 includes device sockets 16A and 16B, an IF cable connector 18, and an acceleration sensor 20 on the surface thereof, but it is of course not limited to this configuration. In other words, in the vibration test apparatus according to the present invention, it is preferable that the vibration test apparatus further includes a device under test fixing part for fixing the device under test placed on the vibration table 13. As in FIG. 15, it may not be a substrate that can be mounted on the vibration table 13.

  In the present embodiment, the socket substrate 15 is fixed to the mounting surface of the vibration table 13 and screws (not shown in FIG. 1). The material and specific shape of the socket substrate 15 are not particularly limited, and a known configuration used for fixing the device under test in the vibration test apparatus can be used as it is or by application. The device sockets 16A and 16B provided on the socket substrate 15 are members for pressing and fixing at least a part of the device under test, and use a socket having an appropriate configuration according to the type of the device under test to be used. Can do. Further, instead of the socket, other fixing members may be used.

  The IF cable connector 18 is not particularly limited as long as it is a member for connecting an interface cable from an electrical test apparatus to a test object fixed by the socket substrate 15. What is necessary is just to select a suitable well-known member according to the kind of a test body or an electrical test apparatus.

  Further, the socket substrate 15 is also provided with an acceleration sensor 20 to be described later, and the IF cable connector 18 and the acceleration sensor 20 may be connected to a printed wiring, for example. Each of the above-described members provided on the socket substrate 15 is arranged on the socket substrate 15 in a well-balanced manner so as not to affect the vibration applied to the vibration table 13 from the piezoelectric actuators 11X, 11Y, and 11Z. The specific arrangement is not particularly limited because it is appropriately set according to the use conditions and the type of each member.

  Further, in order to connect the IF cable 17 to the IF cable connector 18, a cable hole 14 c for allowing the IF cable 17 to pass therethrough is formed in the vibration table 13. The specific configuration of the cable hole 14c is not particularly limited, and the cable hole 14c can be inserted and passed therethrough, and can be formed in a position or shape that does not affect the vibration of the vibration table 13. That's fine.

  Here, the piezoelectric actuators 11X, 11Y, and 11Z may be in direct contact with the vibration table 13, but as shown in FIG. 1, the bearings 12X and (the bearing in the Y-axis direction are not shown) and 12Z are used. It is preferable to contact the shaking table 13.

  The bearing functions as an interference removing unit that avoids interference between vibrations applied from piezoelectric actuators arranged in different axial directions (other axial directions). That is, since the bearing is sandwiched between the piezoelectric actuator and the vibration table 13, both movements are buffered.

  Specifically, four piezoelectric actuators 11X, 11Y, and 11Z are provided in each of the three axis directions (X / Y / Z axis directions) of the base 10 (two in the X axis direction and two in the Y axis direction on the opposing surface). 1), in the example shown in FIG. 1, the inner surface of the vibration table 13 (the surface facing the base 10) is 1 for one piezoelectric actuator 11X / 11Y (not shown in FIG. 1) / 11Z. It is in contact with the vibration table 13 via bearings 12X (Y-axis bearing not shown) and 12Z. Here, vibration from a piezoelectric actuator arranged in the coaxial direction, for example, the piezoelectric actuator 11X, is satisfactorily transmitted to the vibration table 13 by the bearing 12X. On the other hand, with respect to vibration from an actuator arranged in the direction of the other axis, for example, the piezoelectric actuator 11Z, the friction with the vibration table 13 is reduced by the buffering action of the bearing 12X to give the vibration table 13 a smooth movement. Therefore, for example, when viewed from the Z-axis direction, the movement in the X-axis direction that is the other-axis direction is not affected.

  In this way, by providing a buffer removal unit such as a bearing, it is possible to avoid a situation in which the vibration in each axial direction affects the vibration in the other axial direction, so a better vibration test is performed. be able to.

  In the example shown in FIG. 1, the bearings 12X, (Y-axis bearing not shown) and 12Z are attached to the inner surface of the vibration table 13. However, the present invention is not limited to this example. Then, since the bearing only needs to be provided between the vibration table 13 and the piezoelectric actuators 11X, 11Y, and 11Z, the bearing may be attached to the base 10 side. Further, even if the buffer removal unit is other than the bearing, by providing it between the vibration table 13 and the piezoelectric actuators 11X, 11Y, and 11Z, an interference removal unit is provided for the actuator in each axial direction. The interference of vibration from can be avoided more effectively.

  Here, at least a hole for passing a cable or the like connected to the piezoelectric actuators 11X, 11Y, and 11Z can be provided in the base 10 like the common hole 14a and the actuator hole 14b described above. . This is derived from the arrangement of the piezoelectric actuators 11X, 11Y, and 11Z and the shape and arrangement of the vibration table 13.

  That is, as described above, in the present invention, the actuators are arranged so that the excitation directions (directions in which vibration is applied) of the plurality of actuators diverge without crossing each other. As a result, vibration sources such as the piezoelectric actuators 11X, 11Y, and 11Z and the bearings 12X (not shown in the Y-axis direction) and 12Z can be installed inside the vibration table 13. As a result, not only the apparatus main body can be made smaller with respect to the vibration table 13 than the conventional apparatus, but also the base 10 main body is arranged inside the vibration table 13, so that various configurations and members are provided on the base 10. Can be added.

  Therefore, in the present embodiment, for example, the common hole 14 a and the actuator hole 14 b can be provided in the base 10. By forming these holes, for example, the actuator cable 19 and the IF cable 17 from the electrical test apparatus are passed through the base 10, and the piezoelectric actuators 11X, 11Y, 11Z and the device under test (IF cable connector 19 are respectively connected). Through).

  If a hole is formed in the base 10 and the cable is passed through the base 10, it is possible to prevent the cable from being disconnected by vibration and to prevent the cable from interfering with the vibration. In other words, it can be said that the base 10 in which the hole is formed is a mechanism that avoids interference with vibration caused by a cable or the like. Therefore, in the vibration test apparatus according to the present invention, it is possible to effectively avoid the interference of the cable connecting the device under test and the electrical test device to the vibration, and the vibration test is performed on the device under operation. Can be done.

  In addition, the vibration test apparatus according to the present invention can be made smaller than before, and it is not necessary to use special parts for miniaturization. Therefore, since the price can be kept low, an increase in the manufacturing cost of the vibration test apparatus can be avoided, and the capital investment can be suppressed. The specific types of the IF cable 17 and the actuator cable 19 are not particularly limited, and various known cables can be used.

  Next, an operation of the vibration test apparatus according to the present invention, that is, an example of a vibration test using the vibration test apparatus according to the present invention will be described.

  As described above, the vibration test apparatus according to the present invention includes the piezoelectric actuators 11X, 11Y, and 11Z in the X / Y / Z axis directions, respectively. Therefore, at least one direction, preferably two directions simultaneously or three directions simultaneously. In addition to being able to vibrate, it is a three-axis micro-vibration type vibration testing device, and it is possible to vibrate the vibration table while avoiding interference from vibrations from other axes by an interference removing unit such as a bearing. . Furthermore, in the present embodiment, an example in which the vibration test apparatus according to the present invention includes a vibration control unit that controls driving of the piezoelectric actuators 11X, 11Y, and 11Z can be particularly preferably mentioned.

  Specifically, as shown in FIG. 3, the vibration test apparatus 21 in the present embodiment controls a drive amplifier 21a for driving the piezoelectric actuator 11 and the operation of the drive amplifier 21a as a vibration control unit. And an amplifier control circuit 21b. The drive amplifier 21a can output an operation control signal to the piezoelectric actuator 11, and the amplifier control circuit 21b can output an operation control signal to the drive amplifier 21a (all outputs are indicated by arrows in the figure). . Since the control signal can be output from the acceleration sensor 20 and the electrical test device 23 to the amplifier control circuit 21b, the amplifier control circuit 21b operates the drive amplifier 21a based on these control signals ( That is, the operation of the piezoelectric actuator 11 is controlled.

  The piezoelectric actuator 11 in FIG. 3 corresponds to the piezoelectric actuators 11X, 11Y, and 11Z shown in FIGS. 1 and 2, but is illustrated as one piezoelectric actuator 11 for convenience of description in the control block diagram. Also, input / output of control signals, power supplies, etc. in FIG.

  Although the acceleration sensor 20 was mentioned in the description of the socket substrate 15, it is provided on the vibration table 13, preferably on the socket substrate 15, and detects acceleration data and inputs it to the amplifier control circuit 21b. The acceleration sensor 20 detects vibration applied to the device under test 22 as acceleration data. In other words, in the present invention, the vibration applied to the device under test is directly or indirectly regardless of the acceleration sensor 20. What is necessary is just to provide the member and means which can be detected.

  Known sensors can be used as the acceleration sensor 20. Specifically, for example, there are a type that detects acceleration in a single direction (referred to as a single-axis acceleration sensor for convenience), a type that detects acceleration in a three-axis direction (referred to as a multi-axis acceleration sensor for convenience), and the like. it can. When a single-axis acceleration sensor is used, one or more may be provided in each of the X / Y / Z-axis directions of the vibration table 13 (or the socket substrate 15). In the case of using the other axis acceleration sensor, it is sufficient to provide at least one on the vibration table 13 (or the socket substrate 15). Of course, the present invention is not limited to this, and an appropriate position is determined using an appropriate type of vibration detection unit according to the type of the acceleration sensor 20, the type of the device under test 22, the use of the vibration test apparatus 21, and the like. Should be provided.

  The electrical test apparatus 23 is an apparatus for performing various electrical tests on the device under test 22 of the vibration test. The specific type and configuration of the electrical test apparatus 23 is an electrical test performed in parallel with the vibration test. It is appropriately selected according to the type of physical test. A typical example is a known tester or the like, but it is not limited thereto.

  The electrical test apparatus 23 and the DUT 22 are connected to the IF cable 17 (indicated by an arrow in FIG. 3) as described in the description of the vibration table 13 and the socket substrate 15. As described above, since the common hole 14a and the like can be provided in the base 10, the IF cable 17 having one end connected to the electrical test apparatus 23 is inserted into the common hole 14a and the device under test is inserted. The IF cable 17 is connected to an IF cable connector 18 provided on the socket substrate 15 to which the 22 is fixed. The IF cable 17 can input and output various control signals and electrical test data bidirectionally between the device under test 22 and the electrical test apparatus 23 as indicated by arrows in FIG. In addition, power can be supplied from the electrical test apparatus 23 to the device under test 22.

  The drive amplifier 21a controls the operation of the piezoelectric actuator 11, that is, the vibration applied to the vibration table 13 (indicated by an arrow in FIG. 3). The amplifier control circuit 21b controls the operation of the drive amplifier 21a, and can output a control signal to the drive amplifier 21a (indicated by an arrow in FIG. 3). Acceleration data can be input from the acceleration sensor 20 to the amplifier control circuit 21b, and a control signal can also be input from the electrical test apparatus 23 (all are indicated by arrows in FIG. 3).

  The drive amplifier 21 a and the piezoelectric actuator 11 are connected to the actuator cable 19. In the present embodiment, as shown in FIG. 1 and FIG. 2, a total of 16 pieces are provided, two on the opposite surface (side surface) in the X / Y-axis direction of the base 10 and four on the surface (upper surface) in the Z-axis direction. Piezoelectric actuators 11 (piezoelectric actuators 11X, 11Y, and 11Z) are provided, and an actuator cable 19 is connected to each of the piezoelectric actuators 11, and the actuator cable 19 is connected to the common hole 14a in the base 10 and The actuator hole 14b is inserted and connected to the drive amplifier 21a.

  The specific configurations of the drive amplifier 21a and the amplifier control circuit 21b are not particularly limited, and known amplifiers and control circuits can be suitably used. In the present invention, if the vibration applied to the vibrating body 22 can be controlled by controlling the operation of the piezoelectric actuator 11, a vibration control unit other than the drive amplifier 21a and the amplifier control circuit 21b may be provided. Good.

  With regard to vibration control using the drive amplifier 21a and the amplifier control circuit 21b, a test when sine wave vibration is applied to a device as the device under test 22 (hereinafter referred to as a device under test) is taken as a specific example. This will be described with reference to FIG. It should be noted that the specific method of vibration control is not limited to the following method, and it goes without saying that known methods can be incorporated, combined, or replaced within the scope of the present invention.

  First, the vibration test apparatus 21 in the present embodiment is in a stopped state and the device under test is not operating at all. Next, as step 1 (hereinafter, step is abbreviated as S as appropriate), a power is supplied from the electrical test apparatus 23 to the device under test via the IF cable 17 and a control signal is input to the device under test 22. The operation is started to obtain a desired operation state.

  In the next S2, a control signal of a start command is output from the electrical test apparatus 23 to the amplifier control circuit 21b, and a voltage level (sine wave) that regularly changes from the amplifier control circuit 21b in response to this is output to the drive amplifier. It is output to 21a. In next S <b> 3, the drive amplifier 21 a outputs a regularly changing voltage (sine wave) to the piezoelectric actuator 11 based on the voltage level from the amplifier control circuit 21 b.

  In next S <b> 4, the piezoelectric actuator 11 causes a displacement with a regular voltage change (sine wave) output from the drive amplifier 21 a, and applies vibration to the vibration table 13. As a result, the vibration table 13 vibrates slightly, and the device under test in the operating state vibrates. In the next S5, the acceleration sensor 20 provided on the vibration table 13 (socket substrate 15) also vibrates slightly, so that the acceleration sensor 20 detects acceleration data (voltage change) as vibration data, and performs amplifier control thereof. Output to the circuit 21b.

  In next S6, based on the obtained acceleration data, the amplifier control circuit 21b determines whether to change the vibration. In the case of changing (YES in FIG. 4), the process proceeds to S7, the voltage level is changed by the amplifier control circuit 21b, output to the drive amplifier 21a, and the process returns to S3. Thereby, the vibration of the vibration table 13 is adjusted.

  On the other hand, when the vibration is not changed in S6 (NO in FIG. 4), the process proceeds to S8, and the electrical test apparatus 23 sends a signal (value) as a result of the electrical test from the device under test via the IF cable 17. To determine whether the test result is within specifications. In response to this determination result, the process proceeds to S9 to determine whether or not to continue the test. If a retest is required (YES in FIG. 4), the process returns to S6, the vibration is adjusted as appropriate, and the test is continued.

  On the other hand, when the test is not continued (NO in FIG. 4), the process proceeds to S10, finally determines the quality of the device under test, and proceeds to S11 to supply power and control signals from the electrical test apparatus 23. Is stopped and vibration is stopped by outputting a control signal of the amplifier control circuit 21db stop command. As a result, the vibration test in the operating state for the device under test (the device under test 22) is completed.

  As described above, in the present embodiment, the output voltage obtained from the acceleration sensor 20 is input to the amplifier control circuit 21b, so that the vibration table 13 is actually vibrated, in other words, the DUT 22 Vibration is detected, and the drive amplifier 21a is controlled so as to be an arbitrary vibration. Therefore, since it is possible to apply appropriate vibration to the device under test 22 (device under test) in the operating state, not only can the vibration test be performed in the operating state, but also the quality of the vibration test itself. It is also possible to improve.

  The present invention is not limited to the configurations described above, and various modifications are possible within the scope of the claims, and technical means disclosed in different examples in the embodiments. Embodiments obtained by appropriately combining the above are also included in the technical scope of the present invention.

  By arranging the actuator so that the surface to which vibration is applied is directed inward (diverged) rather than inward, the device itself can be miniaturized, and the device under test and the electrical test device are placed in the base that supports the actuator. It is possible to provide a mechanism for avoiding interference with vibration caused by the connecting cable. Therefore, the present invention can only be used in various vibration test apparatuses, in particular, a three-axis micro vibration test apparatus that can apply micro vibrations in the X / Y / Z-axis directions and the field of manufacturing the parts. Furthermore, it can be applied to a wide range of fields related to various vibration tests.

FIG. 1 is a schematic diagram showing an example of a configuration of a main part of a vibration test apparatus (triaxial micro vibration test apparatus) according to the present invention. FIG. 2 is a partial perspective view showing an example of the arrangement of the piezoelectric actuators included in the vibration test apparatus shown in FIG. FIG. 3 is a block diagram showing an example of the configuration of the vibration test apparatus shown in FIG. It is a flowchart which shows an example of the vibration control in the vibration test apparatus shown in FIG. It is a perspective view which shows the example of the conventional vibration test apparatus.

Explanation of symbols

10 Base (support)
11, 11X, 11Y, 11Z Piezoelectric actuator (actuator)
12X / 12Z bearing (interference canceling means)
13 Shaking table 21 Vibration test apparatus 14a Common hole 14b Actuator hole 14c Cable hole 15 Socket substrate (Test object fixing means)
16A and 16B Socket 17 Interface cable 18 Interface cable connector 19 Actuator cable 20 Acceleration sensor (acceleration detection means)
21a Drive amplifier (vibration control means)
21b Amplifier control circuit (vibration control means)

Claims (15)

A plurality of actuators arranged at least one in each of three orthogonal directions, a support that fixes and supports these actuators, and a vibration table that can vibrate by the operation of the actuator with the device under test being placed A vibration test apparatus comprising:
The plurality of actuators are fixedly supported by the support so that the directions of applying vibrations in the actuators arranged in different axial directions do not cross each other,
The vibration test apparatus according to claim 1, wherein the vibration table is provided so as to cover the support body with each actuator interposed therebetween.   The vibration test apparatus according to claim 1, further comprising interference removing means for avoiding interference between vibrations applied from actuators arranged in different axial directions.   The vibration test apparatus according to claim 2, wherein the interference removing means is provided between a vibration table and an actuator.   The vibration test apparatus according to claim 3, wherein a bearing is used as the interference removing means.   The vibration test apparatus according to claim 1, wherein a piezoelectric actuator using a piezoelectric element that causes displacement by application of a voltage is used as the actuator.   6. The vibration test apparatus according to claim 5, wherein a piezoelectric element is used as the piezoelectric element.   The vibration test apparatus according to claim 1, wherein the support is provided with at least a hole for passing a cable connected to the actuator.   The vibration test apparatus according to claim 1, wherein the vibration table is provided with a hole for passing a cable connected to the device under test.   The vibration test apparatus according to claim 1, further comprising a device under test fixing means for fixing a device under test placed on the vibration table.   The vibration test apparatus according to claim 9, wherein the device under test fixing means includes a socket for pressing and fixing at least a part of the device under test.   11. The vibration test apparatus according to claim 9, wherein the device under test fixing means has a substrate shape that can be mounted on a vibration table.   The vibration test apparatus according to claim 1, further comprising vibration control means for controlling driving of the actuator.   The vibration test apparatus according to claim 12, wherein the vibration control means includes a drive amplifier for driving the actuator and an amplifier control circuit for controlling the operation of the drive amplifier.   The vibration test apparatus according to claim 12, further comprising an acceleration detection unit that is provided on the vibration table and inputs the detected acceleration data to the vibration control unit for use in vibration control. As the acceleration detection means, using an acceleration sensor that detects acceleration in a single direction, one or more are provided in each of the different axial directions of the vibration table,
The vibration test apparatus according to claim 14, wherein at least one vibration sensor is provided on the vibration table using a multi-axis acceleration sensor that detects acceleration in three axial directions.

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