JP2006084455A - Angular velocity sensor inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a small-sized angular velocity sensor inspection device capable of accurately detecting multi-directional angular velocities in a short time from a measurement result of angular velocity by an angular velocity sensor. <P>SOLUTION: This angular velocity sensor inspection device 10 comprises struts 21 and 121; a pendulum support shaft 25 pivotally supported by the struts 21 and 121; a pendulum 30 oscillating with the support shaft 25 as an oscillating center; a mount base 100 interlocking with the oscillation of the pendulum 30; one or more angular velocity sensors 150 mounted on the mount base 100; a reference angle sensor 150 mounted on the support shaft 25 or the mount base 100; and a detection processor 90 freely oscillating the pendulum 30, comparing the angular velocity detected by the angular velocity sensor 50 with that detected by the reference angle sensor 150 to determine the propriety thereof. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an angular velocity sensor inspection apparatus having a structure that gives an angular velocity to an angular velocity sensor by free vibration of a pendulum.

  Conventionally, in order to evaluate the angular velocity and output of a gyroscope that detects angular velocity, an apparatus that gives an input angular velocity using a rate table and measures the angular velocity of the gyroscope is known (for example, see Non-Patent Document 1).

Edited by Tamagawa Seiki Co., Ltd., “Introduction to Gyro Utilization”, Industrial Research Committee, January 2002, pages 107-109

  As such a rate table according to Non-Patent Document 1, a rotary table that gives a rotational angular velocity to a gyroscope or a vibration table that gives vibration is used. These rotary tables and vibration tables are driven by a motor. Since the rate table is driven by the motor in this way, the vibration of the motor may be propagated to the gyroscope, and low frequency noise or high frequency noise may be generated from the motor. The gyroscope detects minute charges. Since this is an element, such noise affects the angular velocity detection value, and there is a problem that an accurate angular velocity cannot be detected.

  In such an angular velocity measuring device, the attitude of the gyroscope attached to the rotary table or the vibration table is limited to one direction, and it is difficult to give the gyroscope an angular velocity in another direction.

  Furthermore, the device proposed in Non-Patent Document 1 is a large-sized device, and the rotary table has a large inertia, and there is a problem that it takes time until the rotational speed reaches a stable angular velocity.

  SUMMARY OF THE INVENTION The object of the present invention is to solve the above-mentioned problems, and it is possible to accurately detect the angular velocity measured by the angular velocity sensor in a short time and to detect multidirectional angular velocities. It is possible to provide a small angular velocity sensor inspection apparatus that can perform the inspection and is easy to operate.

  The angular velocity sensor inspection apparatus of the present invention includes a support, a pendulum support shaft that is pivotally supported by the support, a pendulum that vibrates about the pendulum support shaft, a base that is linked to the vibration of the pendulum, and the base One or a plurality of angular velocity sensors attached to a table, a reference angle sensor attached to the pendulum support shaft or the base, and an angular velocity detected by the angle sensor and the reference angle sensor by freely vibrating the pendulum And a detection processing device for judging pass / fail to provide a pass / fail judgment.

Here, as the angular velocity sensor, for example, an angular velocity sensor such as a vibration gyroscope is employed. In addition, the detection processing device includes, for example, a function of comparing the detection values of the angular velocity sensor in numerical values or graphs.
The reference angle sensor is a standard angular velocity sensor that has been measured and calibrated in advance.

  According to the present invention, when the pendulum is freely vibrated, the pendulum reciprocally vibrates at a constant cycle based on the known pendulum principle. Therefore, the angular velocity sensor interlocked with the pendulum vibration is given the same input angular velocity as the pendulum. . Therefore, the detection values of the angular velocity sensor and the reference angular velocity sensor are compared and determined by the detection processing device, and the constant angular velocity sensor whose difference from the detected angular velocity value of the reference angular velocity sensor is within a predetermined range is selected as a non-defective product. it can.

  In addition, if the pendulum has a constant length, the pendulum repeats vibration with a stable period regardless of the size of the mass, that is, a constant input angular velocity can be given to the angular velocity sensor. The angular velocity measurement of the angular velocity sensor can be performed.

  In addition, since this angular velocity sensor inspection device has a structure that gives input angular velocity by free vibration of the pendulum, there is no need for a driving device such as a motor, the structure is simple, and there is no low-frequency noise or high-frequency noise generated from the motor. Since there is no vibration noise of the motor, accurate angular velocity measurement can be performed.

  Further, since the pendulum repeats reciprocating vibration, the input angular velocity in the positive direction and the negative direction is given to the angular velocity sensor, and the input angular velocity in the positive direction and the negative direction can be measured without a special switching device.

  Furthermore, since the input angular velocity in a desired range can be given to the angular velocity sensor by allowing the pendulum to fall naturally from a predetermined position and freely vibrate, there is also an effect that the operation is simplified.

  Moreover, it is preferable that the said base is pivotally supported by the edge part of the said pendulum support axis | shaft, interlock | cooperates with the vibration of the said pendulum, and rotates with the said pendulum support axis | shaft.

  According to such a structure, since the angular velocity sensor is attached to the end of the pendulum support shaft, the movable range of the angular velocity sensor can be reduced when the pendulum is vibrated and the angular velocity is measured. It can be downsized.

The angular velocity sensor is composed of a piezoelectric vibrating piece having three axes of an X axis, a Y axis, and a Z axis, and the X axis and Y axis of the piezoelectric vibrating piece with respect to the axial direction of the pendulum support shaft. It is preferable that the mounting posture of each Z axis can be varied.
Here, when the piezoelectric vibrating piece is made of, for example, a crystal resonator, the three axes are an X axis as an electric axis, a Y axis as a mechanical axis, and a Z axis as an optical axis.

  Thus, since the mounting posture of the angular velocity sensor (piezoelectric vibrating piece) can be changed in three directions, the angular velocity sensor can be more accurately inspected by inspecting the angular velocity from each of the three directions. it can.

  Further, in the present invention, an angular velocity sensor mounting table for mounting the angular velocity sensor on the base, a fixed base for mounting the angular velocity sensor vertically or horizontally with respect to the axial direction of the pendulum support shaft, It is preferable that a turntable for rotating the angular velocity sensor mounting table at a predetermined rotation angle with respect to the fixed base is further provided.

  In this way, the angular velocity sensor can be changed to a vertical or horizontal posture with respect to the pendulum support shaft by operating the fixed base, and the angular velocity sensor can be attached to the fixed base by operating the turntable. Therefore, the directions of the three axes of the angular velocity sensor can be easily changed.

In the present invention, it is preferable that the base is attached to the pendulum, and the Z-axis of the angular velocity sensor is attached to the base so as to be perpendicular to a vibration plane of the pendulum.
Although details will be described later in the embodiment, in the present invention, the Z axis is a spin axis for measuring the angular velocity.

  According to such a structure, since the Z axis of the angular velocity sensor is mounted perpendicular to the vibration plane when the pendulum vibrates, the plane of the angular velocity generated by the pendulum and the rotation direction of the angular velocity sensor is the same. Since it is in the direction, accurate angular velocity measurement and detection sensitivity can be obtained.

  Moreover, since the base on which the angular velocity sensor can be attached is attached to the pendulum, the base attachment structure can be simplified, the amount of protrusion from the angular velocity sensor inspection device can be reduced, and a large amount of angular velocity sensors can be easily attached. There is an effect.

  The pendulum includes a first pendulum to which the angular velocity sensor is attached, and a second pendulum provided at a position facing the first pendulum across the support column, and the first pendulum It is preferable that the second pendulum vibrates integrally.

  According to such a structure, since the first pendulum and the second pendulum are provided across the support column, it is easy to balance the weight of the angular velocity sensor inspection device across the support column, and the pendulum is freely vibrated. At this time, it is possible to prevent the struts from vibrating and affecting the detection of the angular velocity due to the generation of the vibration noise.

Moreover, it is preferable that the pendulum includes a center-of-gravity position variable member that moves the position of the center of gravity of the pendulum.
Here, as the center-of-gravity position variable member, for example, a weight attached to the pendulum can be adopted, and the center-of-gravity position can be changed by changing the attachment position of the weight.

  It is known that the pendulum period is proportional to the pendulum length. Therefore, the pendulum cycle can be changed by moving the center-of-gravity position variable member to change the pendulum length. Therefore, the input angular velocity applied to the angular velocity sensor can be arbitrarily changed, and the angular velocity at the desired input angular velocity can be changed. The quality of the detection value of the sensor can be determined.

  Furthermore, the center-of-gravity position variable member can be provided on either the first pendulum or the second pendulum described above, and the mounting position of the center-of-gravity position variable member can be arbitrarily selected according to the size and layout of the base, etc. can do.

Moreover, it is preferable that the connection member which connects the said angular velocity sensor and the said detection processing apparatus has flexibility, and is penetrated by the axial through-hole opened in the said pendulum support shaft.
As the connection member, for example, a flexible substrate having flexibility, a lead wire, or the like can be employed.

  In this way, since the connecting member is inserted through the through-hole provided in the pendulum support shaft, when the pendulum freely vibrates, the resistance due to the connecting member can be reduced and used in combination with the low friction bearing described above. By doing so, the periodic fluctuation of the pendulum vibration can be further reduced.

  Furthermore, since the connecting member has flexibility, it can flexibly follow the vibration of the pendulum, so that the initial strength can be maintained even by repeated vibration, and it can be used continuously for a long period of time. .

In addition, the angular velocity sensor inspection apparatus of the present invention preferably includes an angle meter that regulates the swing angle of the pendulum.
Here, the swing angle indicates an angle from the vertical position of the position before the pendulum starts free fall when the pendulum is freely vibrated.

  As described above, since the angle meter that regulates the swing angle of the pendulum is provided, when the angular velocity is repeatedly measured, the swing angle can be made constant and free vibration can be applied. It can be made constant and the reliability of the measured value can be improved.

  Further, it is desirable that the pendulum is freely vibrated and each detection result of the plurality of angular velocity sensors is selectively or collectively processed by the detection processing device.

  When multiple angular velocity sensors are attached to the pendulum, each angular velocity sensor is selected one by one, and the measured values are taken into the detection processing device for comparison and judgment. Therefore, the angular velocity can be detected and determined efficiently.

Furthermore, it is preferable that the pendulum support shaft is pivotally supported by the support column by a low friction bearing, or the pendulum is pivotally supported by the pendulum support shaft by a low friction bearing.
Here, as the low friction bearing, for example, a bearing using a ball bearing can be employed.

  In this way, when the pendulum vibrates freely, a low-friction bearing such as a ball bearing is used, so the pendulum vibration is difficult to attenuate. Therefore, accurate angular velocity can be detected repeatedly and continuously.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 to 10 show an angular velocity sensor inspection apparatus according to Embodiment 1 of the present invention, FIGS. 11 to 13 show Embodiment 2, FIG. 14 shows Embodiment 3, and FIG. 15 shows Embodiment 4. ing.
(Embodiment 1)

1 to 10 illustrate the structure, measurement results, and operation of the angular velocity sensor inspection apparatus according to the first embodiment.
FIG. 1 is a side view showing an angular velocity sensor inspection apparatus 10 according to the first embodiment, and FIG. 2 is a front view. In FIG. 1 and FIG. 2, the angular velocity sensor inspection device 10 is provided as a basic configuration perpendicular to the support base 20, a pendulum support shaft 25 that is rotatably supported by the support base 20, and the support base 20. The pendulum 30 is supported between the support columns 21 and 121 and is fixed to the pendulum support shaft 25. The base 100 is fixed to the end of the pendulum support shaft 25. A plurality of angular velocity sensors 50 are attached. Further, a detection processing device 90 (see FIG. 2) that performs processing of angular velocity detection data by the angular velocity sensor 50 is further provided.

  The support table 20 includes a pedestal 22, support columns 21 and 121, and a seismic isolation device 24. The pedestal 22 has a size and weight that does not resonate when the pendulum 30 vibrates, and is placed on a seismic isolation device 24 provided at the four corners of the pedestal 22. The seismic isolation device 24 includes a function of not propagating external vibrations to the pendulum 30 and a height adjustment mechanism (not shown) that adjusts the height so that the upper surface of the pedestal 22 is horizontal.

  On the pedestal 22, the support column 21 and the support column 121 are vertically planted, supported by the reinforcing beam 29, and reinforced so that the support column does not resonate when the pendulum 30 vibrates. A level meter (level) 95 is provided on the upper surface of the pedestal 22, and the seismic isolation device 24 is adjusted so that the upper surface of the pedestal 22 is horizontal, that is, the column is vertical.

  An angle meter mounting portion 27 for mounting the angle meter 60 is projected from a substantially central portion in the height direction of the column 21, and the semicircular ring-shaped angle meter 60 is mounted. The angle meter 60 is provided with a scale 61 for setting the swing angle of the pendulum 30 and a stopper hole 62 into which the stopper 70 is inserted. The stopper 70 preliminarily regulates the pendulum 30 to a position of a predetermined swing angle. By pulling out the stopper 70, the pendulum 30 starts to fall and starts free vibration.

A pendulum support shaft 25 having a through-hole 26 is pivotally supported at the upper ends of the columns 21 and 121. The pendulum support shaft 25 is a rotation shaft of the pendulum 30. The pendulum 30 is fixed to the pendulum support shaft 25, and the pendulum support shaft 25 rotates in conjunction with the vibration of the pendulum.
In addition, the support | pillar 121 does not necessarily need to be sufficient if the gravity center balance of the angular velocity sensor inspection apparatus 10 can be ensured only by the support | pillar 21. FIG.

  The pendulum 30 is a rigid metal plate-like member, one end of which is fixed to the pendulum support shaft 25, and a weight 80 serving as a center-of-gravity position variable member is attached to the other end. The weight 80 is configured to be slidable on the arm portion 31 and is fixed to the arm portion with a fixing screw or the like (not shown). In FIG. 1, a state in which the weight 80 is slid and fixed is indicated by a two-dot chain line.

  It is known that when the pendulum 30 freely vibrates, the vibration period changes depending on the length of the pendulum 30, but by changing the position of the weight 80 described above, the position of the center of gravity of the pendulum 30 changes. The length of 30 changes and the cycle changes. That is, by changing the position of the weight 80, the period of the pendulum is changed, the input angular velocity is changed, and the angular velocity can be measured.

  The pendulum support shaft 25 is fixed to the support columns 21 and 121 via ball bearings 32A and 32B as low friction bearings. The ball bearings 32A and 32B are employed for the purpose of reducing frictional resistance and vibration damping when the pendulum 30 freely vibrates.

  The base 100 is fixed to the end of the pendulum support shaft 25 on the column 121 side. The base 100 has a substantially cubic shape, and has a through hole in the center, and is fixed to the pendulum support shaft 25 by press-fitting or screwing a fixing screw from the side. In the drawing of the base 100, the left end surface (angular velocity sensor side) is perpendicular to the axial direction of the pendulum support shaft 25.

A fixed base 110 is fixed to the aforementioned left end surface of the base 100. A pair of fixed arms 111 are provided on both sides in the axial direction of the pendulum support shaft 25 of the fixed base 110, and after the fixed base 110 is brought into close contact with the base 100, it is fixed by a fixed base fixing screw 140. At this time, the fixed base 110 is positioned by inserting the guide shaft 101D planted on the base 100 into the guide hole 114A provided in the fixed base 110.
A turntable 115 is further fixed to the end surface of the fixing table 110.

  The turntable 115 is planted with a rotating shaft 116 protruding in the center, and is fixed to the fixed base 110 by a spring 135, but can be rotated around the rotating shaft 116 as a center of rotation. The turntable 115 has an angular velocity sensor mounting table 118 fixed at four corners by four fixing screws 119 (see FIG. 2).

  A plurality of angular velocity sensors 50 are attached to the angular velocity sensor attachment table 118 as shown in FIG. The angular velocity sensor 50 is mounted on a connector for mounting the angular velocity sensor 50 on a substrate (not shown) on the angular velocity sensor mounting table 118. A wiring pattern for input / output of each angular velocity sensor is formed on the substrate and connected to the connection connector 41, and input / output connection leads 40 corresponding to each angular velocity sensor are connected to the connection connector 41 ( FIG. 2 shows only one).

  The connection lead 40 as a connection member is provided on the side surface of the pendulum support shaft 25 and is inserted into the connection lead hole 26A that communicates with the through hole 26 that penetrates in the axial direction. The connecting lead hole 26 </ b> B communicates with the detection processing device 90 (see FIG. 2). At this time, it is preferable that the connection lead 40 is not brought into contact with the inner surface of the through hole 26 and the connection lead holes 26A and 26B.

  A reference angular velocity sensor 150 is attached to an end portion of the pendulum support shaft 25 that is different from the attachment direction of the angular velocity sensor 50. The reference angular velocity sensor 150 is a standard sensor calibrated in advance. Similar to the angular velocity sensor 50, the reference angular velocity sensor 150 is connected to a substrate and a connector (not shown), and is connected to the detection processing device 90 via the connection connector 42 and the connection lead 45.

Next, the form which attaches the angular velocity sensor 50 to the base 100 is demonstrated with reference to drawings.
FIG. 3 is a plan view showing the posture of the angular velocity sensor 50 when attached to the base 100. Here, in this embodiment, the angular velocity sensor 50 is exemplified as a vibration gyroscope, and one of them will be described. Further, in FIG. 3, a container for storing the vibration type gyroscope is omitted. In FIG. 3, the angular velocity sensor 50 includes a pair of vibrating arms 53 and 54 provided at end portions of a connecting arm 52 extending from both end surfaces of a rectangular base portion 51, and 1 extending from the other end surfaces. And a pair of detection arms 55.

  This piezoelectric vibrating piece is made of quartz and is composed of a plane composed of an X axis called an electric axis and a Y axis called a mechanical axis and a Z axis in the thickness direction called an optical axis, and passes through the center of gravity of the base 51. The axis parallel to the Z axis is the spin axis of the angular velocity sensor. Angular velocity can be detected by applying a rotational force with the spin axis as a rotation axis. The angular velocity sensor 50 is mounted such that the spin axis (Z axis) is in the axial direction of the pendulum support shaft 25. The angular velocity sensor 50 is interlocked with the vibration of the pendulum 30 and an input angular velocity ω is applied to the Z axis.

  Next, the operation of the angular velocity sensor inspection device 10 of the first embodiment will be described. First, the reference angular velocity sensor 150 is attached to the end of the pendulum support shaft 25 (see FIG. 1), the pendulum 30 is vibrated at a predetermined period, and the angular velocity for each elapsed time of the reference angular velocity sensor 150 is measured. This angular velocity is stored in the detection processing device 90. In the detection processing device 90, the angular velocity waveform for each elapsed time is graphed (see FIG. 4) or numerically stored.

  Next, the angular velocity sensor 50 to be measured is attached to the base 100, the input angular velocity is given under the same conditions as the reference angular velocity sensor 150, the angular velocity is measured, and stored in the detection processing device 90.

  The detection processing device 90 compares the angular velocity value measured by the reference angular velocity sensor 150 with the angular velocity value measured by the angular velocity sensor 50 or each angular velocity waveform, and the measured value by the angular velocity sensor 50 is within a predetermined standard range. If there is a non-defective product, it is determined as a defective product, and each angular velocity sensor is separated.

As described above, the reference angular velocity sensor 150 and the angular velocity sensor 50 to be inspected may be separately mounted and the angular velocity may be measured as shown in FIG. It is also possible to measure the angular velocity by applying the input angular velocity to the angular velocity sensor 50 and the reference angular velocity sensor 150 at the same time.
In addition, each measurement data of the angular velocity sensor 50 can be taken into the detection processing device 90 and the above-described processing can be performed, or all the measured values can be taken together into the control device and batch processing can be performed.

  In addition to a vibration gyroscope that has been calibrated in advance as the reference angular velocity sensor, an inclination sensor is employed to capture the change in inclination over time and calculate the angular velocity. An encoder or the like can be employed to capture the change in the rotation angle with time and calculate the angular velocity.

Then, the verification result of this invention is demonstrated.
FIG. 4 shows an angular velocity waveform in which changes in angular velocity over time when the reference angular velocity sensor 150 and the angular velocity sensor 50 are attached and the pendulum 30 is freely vibrated are graphed. In FIG. 4, the elapsed time (seconds) is displayed on the horizontal axis, and the angular velocity output values dps (angle / second, degree per second) of the reference angular velocity sensor 150 and the angular velocity sensor 50 are displayed on the vertical axis. The angular velocity output value + (plus) represents the angular velocity when the pendulum is freely dropped from the swinging position, and-(minus) represents the returning angular velocity. The solid line indicates the angular velocity sensor 50, and the broken line indicates the reference angular velocity sensor 150.

  First, before the measurement is started, the pendulum 30 is stationary, so the output value is 0. When the pendulum is rotated about 1.5 seconds to move to a predetermined swing angle position and the pendulum is dropped after about 2 seconds, an angular velocity waveform generated by the free vibration of the pendulum is obtained. In this graph, the vibration of the pendulum is displayed only for two reciprocations, but shows almost the same waveform, and it can be inferred that substantially the same angular velocity waveform can be obtained even if it is repeatedly vibrated. The difference in angular velocity waveform between the reference angular velocity sensor 150 and the angular velocity sensor 50 is slightly lower in the angular velocity sensor 50 near the top dead center on the plus side, but there is no difference in other parts, It shows that the angular velocity sensor inspection apparatus has reliability. In addition, it can be seen that this inspection can be measured if the vibration is about 2 reciprocations, that is, the vibration time is about 4 seconds.

  FIG. 5 is a graph showing the relationship between the angular velocity and the output voltage (mV) of the angular velocity sensor when the pendulum is freely vibrated under the above-described conditions. Since the angular velocity sensor calculates the output voltage by time and converts it into an angular velocity, the angular velocity can be detected more accurately as the relationship between the output voltage and the angular velocity is closer to a straight line. In FIG. 5, it can be seen that the reference angular velocity sensor 150 and the angular velocity sensor 50 can obtain the same straight line. When the angular velocity exceeds plus 600 dps, the output value of the angular velocity sensor 50 starts to saturate. That is, when the angular velocity is in the positive and negative 600 dps ranges, there is no difference from the reference angular velocity sensor 150, indicating that the angular velocity sensor inspection apparatus 10 of the present invention can accurately measure the angular velocity.

  In FIG. 4, the pendulum 30 is moved to a predetermined swing angle position and then dropped freely. However, as described above, the pendulum 30 is regulated to the predetermined angle position by the stopper 70 provided in the goniometer 60. If the stopper 70 is removed from the base plate so as to fall freely, the measurement time can be further shortened, and the measurement under the same conditions can be repeated when measurement is repeated.

Subsequently, an angular velocity sensor mounting operation for measuring multi-directional angular velocities in the angular velocity sensor inspection apparatus according to the present embodiment will be described. 6 to 8 show the second mounting posture, and FIGS. 9 and 10 show the third mounting posture. The direction shown in FIGS. 1 to 3 is the first mounting posture.
FIG. 6 is a partial side view showing a switching operation from the first attachment posture to the second attachment posture, and FIG. 7 is a partial front view showing a structure for fixing the fixing base 110 to the base 100. 6 and 7, first, the fixing base fixing screws 140 on both sides of the base 100 are loosened (see also FIG. 2), and the fixing base 110 is moved in the direction of arrow A in the figure (represented by a two-dot chain line).

  A pair of fixing arms 111 provided on the fixing base 110 are provided with slide holes 112, respectively, and by loosening the fixing base fixing screw 140, a fixing base guide shaft portion 141 (see FIG. 7), the fixed base 110 can be moved in the direction of arrow A within the range of the slide hole 112. Here, the moving amount of the fixed base 110 is at least until the guide hole 114A opened in the fixed base 110 is detached from the guide shaft 101B planted in the base 100.

After the guide hole 114 </ b> A has moved to a position where it is detached from the guide shaft 101 </ b> B of the base 100, the fixing base 110 is rotated in the direction of arrow B, and when the fixing base 110 reaches parallel to the upper surface of the base 100, the direction of arrow C The guide hole 114A opened in the fixing base 110 is inserted into the guide shaft 101A (see FIG. 1) planted on the base 100 and positioned in the plane direction, and then the fixing base fixing screw 140 is attached. The fixing base 110 is fixed to the base 100 by tightening (see FIG. 7).
At this time, the connection lead 40 is set to a length that has a sufficient margin even when the fixed base 110 is moved to a predetermined position.

  FIG. 8 shows the attitude of the angular velocity sensor 50 with respect to the pendulum support shaft 25 at this time. In the angular velocity sensor 50 in FIG. 8, the Y axis is directed in the axial direction of the pendulum support shaft 25. Therefore, when the pendulum 30 vibrates, the input angular velocity ω with the Y axis as the rotation axis is given to the angular velocity sensor 50.

  As described above, the angular velocity sensor 50 can detect the angular velocity only when the Z axis is the rotation axis. Therefore, in such a posture, even if the pendulum 30 is vibrated, the detection signals shown in FIGS. 4 and 5 are not generated, and the graph is parallel to the horizontal axis. In such a case, when a detection signal is generated, the detection processing device 90 determines that the angular velocity sensor 50 is abnormal.

Next, a method for changing the angular velocity sensor 50 from the second mounting posture to the third mounting posture will be described. The third mounting posture means a state in which the angular velocity sensor 50 is rotated 90 degrees in the plane direction from the second mounting posture described above.
FIG. 9 is a partial side view showing switching to the third mounting posture. In FIG. 9, the angular velocity sensor 50 shows a state in which the turntable 115 is rotated 90 degrees (in the direction of arrow D in the drawing) from the second mounting posture shown in FIG.

  In FIG. 9, a turntable guide hole 113 is formed at the center of the fixed base 110, and a recess 113A is formed around the turntable guide hole 113 on the base 100 side. Further, a rotating shaft 116 that protrudes through the turntable guide hole 113 of the fixed base 110 protrudes from the center of the turntable 115.

  Further, after inserting the rotating shaft 116 into the turntable guide hole 113, the turntable 115 holds the coil spring 135 with a C-ring or the like after the coil spring 135 is mounted. The coil spring 135 pulls and fixes the turntable 115 to the fixed base 110 by its elastic force, but the turntable 115 can be rotated about the rotation shaft 116.

  Further, a plurality of hemispherical protrusions 117 are concentrically provided on the upper surface of the fixing table 110 in a unit of 90 degrees (preferably two or four), and the turntable 115 is opposed to the fixing table 110. A recess 113B facing the protrusion 117 is formed.

  When the positions of the projection 117 and the recess 113B coincide, the rotational position of the turntable 115 in the planar direction is determined. When the turntable 115 is rotated, a rotational force is applied to the turntable 115 by hand. At this time, when the coil spring 135 is bent and the recess 113B gets over the protrusion 117 and rotates 90 degrees, the protrusion 117 and the recess 113B are fitted again, and the turntable 115 is positioned. Since the angular velocity sensor mounting table 118 is fixed to the turntable 115, the mounting posture of the angular velocity sensor 50 is also rotated 90 degrees in conjunction with the rotation of the turntable 115.

As described above, the turntable 115 can be moved moderately by the protrusion 117 and the recess 113B, and is accurately positioned at a desired position.
Further, the turntable 115 is capable of forward and reverse rotation, and rotates at a predetermined angle in both forward and reverse rotations to set the mounting posture of the angular velocity sensor 50.

  FIG. 10 shows the angular velocity sensor 50 in the third mounting posture. The angular velocity sensor 50 is in a state rotated about the Z-axis by 90 degrees from the second mounting posture described above, and the X-axis is directed in the axial direction of the pendulum support shaft 25. Therefore, when the pendulum 30 vibrates, the angular velocity sensor 50 is applied with the input angular velocity ω having the X axis as the rotation axis.

  In such a posture, as in the second mounting posture described above, even if the pendulum 30 is vibrated, the detection signal shown in FIGS. Become. In such a case, when a detection signal is generated, the detection processing device 90 determines that the angular velocity sensor 50 is abnormal.

  As the reference angular velocity sensor, in addition to adopting a calibrated angular velocity sensor in advance, an inclination sensor is adopted, and it is possible to take an inclination change over time and calculate the angular velocity. The change of the rotation angle with the passage of time can be taken in and the angular velocity can be calculated.

  Therefore, according to the first embodiment described above, when the pendulum 30 is freely vibrated, the pendulum 30 reciprocates at a constant cycle. Therefore, the angular velocity sensor 50 that is linked to the vibration of the pendulum 30 has the same input angular velocity as the pendulum 30. Is given. Therefore, the detection values of the angular velocity sensor 50 and the reference angular velocity sensor 150 are compared and determined by the detection processing device 90, and the angular velocity sensor 50 whose difference from the angular velocity detection value of the reference angular velocity sensor 150 is within a predetermined range is regarded as a good product. Can be sorted.

  In addition, the pendulum 30 repeats vibration with a stable period regardless of the size of the mass with the angular velocity sensor 50 attached, that is, can provide a constant input angular velocity to the angular velocity sensor 50 at a time. The angular velocity measurement of the plurality of angular velocity sensors 50 can be performed.

  Further, since this angular velocity sensor inspection device 10 has a structure that gives an input angular velocity by free vibration of the pendulum, there is no need for a driving device such as a motor, the structure is simple, and low frequency noise and high frequency noise generated from the motor are not generated. In addition, since there is no vibration noise of the motor, an accurate angular velocity can be measured.

  Further, since the pendulum 30 repeats reciprocating vibration, the input angular velocity in the positive direction and the negative direction is given to the angular velocity sensor 50 and the reference angular velocity sensor 150. Therefore, the input angular velocity in the positive direction and the negative direction is provided with a special switching device. It can measure without.

  Furthermore, since the pendulum 30 is naturally dropped from an arbitrary position and freely vibrated, an angular velocity in a desired range can be given to the angular velocity sensor 50 in a short time, so that the operation is simplified.

  Further, since the base 100 is pivotally fixed to the end portion of the pendulum support shaft 25 and interlocked with the vibration of the pendulum 30 and rotated together with the pendulum support shaft 25, the pendulum 30 is vibrated and the angular velocity is measured. Since the movable range of the angular velocity sensor 50 can be reduced, the angular velocity sensor inspection device 10 can be reduced in size.

  Also, since the angular velocity sensor 50 can change the mounting orientation of the three axes of the X axis, the Y axis, and the Z axis, it should not occur originally by inspecting the angular velocity about each of the three axes as the rotation axis. Since the generation of the angular velocity can be detected when the axis and the Y axis are the rotation axes, the inspection of the angular velocity sensor 50 can be performed more accurately.

  Further, in the present embodiment, the angular velocity sensor 50 is changed to a vertical or horizontal posture with respect to the pendulum support shaft 25 by operating the fixed base 110, and further, the angular velocity sensor 50 is moved to the base 100 by operating the turntable 115. On the other hand, since the mounting angle in the plane direction can be changed, the directions of the three axes of the angular velocity sensor can be easily changed.

  In addition, since the pendulum 30 includes the weight 80 as a center-of-gravity position variable member that moves the position of the center of gravity of the pendulum, the period of the pendulum 30 can be changed by moving the weight 80 and changing the length of the pendulum 30. Therefore, the input angular velocity applied to the angular velocity sensor 50 can be arbitrarily changed, and the quality of the detection value of the angular velocity sensor 50 at the desired input angular velocity can be determined.

  Further, since the connection lead 40 is inserted through the through hole 26 provided in the pendulum support shaft 25, the connection lead 40 is less likely to move due to the rotation of the pendulum support shaft 25. The resistance due to the lead 40 can be reduced, and the period fluctuation of the vibration of the pendulum 30 can be further reduced by using the ball bearings 32A and 32B as low friction bearings together.

  Furthermore, since the connection lead 40 has flexibility, it can flexibly follow the vibration of the pendulum 30. Therefore, the initial strength is maintained even by repeated vibration, so that the connection lead 40 can be used continuously for a long period of time. Can do.

  Further, since the strut 21 is provided with an angle meter 60 that regulates the swing angle of the pendulum 30, when the angular velocity is repeatedly measured, the swing angle can be made constant and free vibration can be applied. The measurement conditions can be made constant, and the reliability of the measurement values can be improved.

  In addition, when a plurality of angular velocity sensors 50 are mounted, each angular velocity sensor is selected one by one, and the measured values are taken into the detection processing device 90, and comparison determination can be performed. Since the comparison determination can be performed, the angular velocity can be detected and determined efficiently. The angular velocity sensor inspection apparatus can be efficiently used in mass production and in trial production tests.

Further, since the ball bearings 32A and 32B are used for the pendulum support shaft 25 serving as the center of vibration, the vibration of the pendulum 30 is not easily attenuated when the pendulum 30 vibrates freely. The fluctuation (attenuation) can be reduced, whereby accurate angular velocity detection can be repeated continuously.
(Embodiment 2)

  Subsequently, an angular velocity sensor inspection apparatus according to a second embodiment of the present invention will be described with reference to the drawings. The second embodiment is characterized in that the angular velocity sensor is attached to the pendulum itself as compared with the first embodiment described above, description of common parts is omitted, and the same reference numerals are given to the same functional members.

  FIG. 11 is a front view of the angular velocity sensor inspection device according to the second embodiment, and FIG. 12A shows a side view thereof. 11 and 12 (a), the angular velocity sensor inspection device 10 has, as a basic configuration, a pendulum 30 to which an angular velocity sensor 50 as a measurement target angular velocity sensor is mounted, and a support column 21 that supports the pendulum 30 so as to be rotatable. A support base 20 and a detection processing device 90 that supplies a drive signal to the angular velocity sensor 50 and processes detection data obtained from the angular velocity sensor 50 are provided.

  The support table 20 includes a pedestal 22, a support column 21, and a seismic isolation device 24. The pedestal 22 has a size and weight that does not resonate when the pendulum 30 vibrates, and is placed on a seismic isolation device 24 provided at the four corners of the pedestal 22. A level meter (level) 95 is provided on the upper surface of the pedestal 22, and the seismic isolation device 24 is adjusted so that the upper surface of the pedestal 22 is horizontal, that is, the column is vertical.

  An angle meter mounting portion 27 for mounting the angle meter 60 is projected at a substantially central portion in the height direction of the column 21 (see FIG. 12A), and the semicircular ring-shaped angle meter 60 is mounted. Yes. The angle meter 60 is provided with a scale 61 for setting the swing angle of the pendulum 30 and a stopper hole 62 into which the stopper 70 is inserted. The stopper 70 preliminarily regulates the pendulum 30 at the position of the predetermined swing angle of the pendulum 30. By pulling out the stopper 70, the pendulum 30 starts to fall and starts free vibration.

  In addition, a pendulum support shaft 25 having a through hole 26 is implanted at the upper end of the column 21. The pendulum support shaft 25 is a rotation shaft of the pendulum 30. A pendulum 30 is rotatably attached to the pendulum support shaft 25.

  The pendulum 30 is a metal plate member having rigidity, and is provided with a ball bearing 32 as a low friction bearing member in the vicinity of one end. Although not shown, the outer ring of the ball bearing 32 is press-fitted and fixed to the pendulum 30 and the inner ring is press-fitted and fixed to the pendulum support shaft 25. A ball is provided between the outer ring and the inner ring, and the pendulum 30 can rotate with low friction about the pendulum support shaft 25 as a rotation center. The pendulum 30 includes a head portion 37 above the ball bearing 32 and an arm portion 31 below, and a base 36 for mounting the angular velocity sensor 50 on the main surface of the arm portion 31 and a surface of the base 36. A substrate 33 is mounted.

  The pendulum 30 has a fixed support structure in which the pendulum 30 is fixed to the pendulum support shaft 25 and a ball bearing is provided between the pendulum support shaft 25 and the support column 21 as in the first embodiment (see FIG. 1). It can also be interposed.

  A connection connector 34 (see FIG. 11) is attached to the substrate 33, and each angular velocity sensor 50 is connected to the connection connector 34 by a wiring pattern (not shown). In the second embodiment (see FIG. 11), 14 angular velocity sensors 50 are attached along the longitudinal direction of the arm portion 31, but the number of angular velocity sensors 50 is not limited. The angular velocity sensor 50 is connected to connection leads 40 corresponding to the input and output terminals (the connection lead 40 is shown in a simplified manner) via connection terminals (not shown) of the connection connector 34. .

  This connection lead 40 is connected to the detection processing device 90 through the through hole 26 of the pendulum support shaft 25. At this time, the connection lead 40 is preferably not brought into contact with the inner surface of the through hole 26.

  The detection processing device 90 takes in an angular velocity detection signal from the angular velocity sensor 50 and displays the detection signal waveform on a monitor, or digitizes a predetermined angular velocity stored in advance or a reference angular velocity sensor (not shown). And a data processing function for displaying an angular velocity sensor outside the predetermined angular velocity range. That is, it has a function of judging whether the angular velocity sensor is good or bad.

The pendulum 30 is further provided with a weight 80 as a center of gravity position variable member.
FIG. 12B shows a mounting structure of a weight 80 in which the pendulum 30 is viewed from the tip of the arm portion. In FIG. 12B, projections 39 for mounting the weight 80 are continuously formed on both sides of the pendulum 30 from the arm portion 31 to the head portion 37. The weight 80 is a metal weight having a high specific gravity, and has a groove 81 into which the protrusion 39 is inserted. The weight 80 can move from the tip of the arm 31 to the tip of the head 37 along the projection 39 after engaging the projection 39 and the groove 81, and at a predetermined position, The pendulum 30 is fixed by a fixing screw 85.

Next, the form which attaches the angular velocity sensor 50 to the pendulum 30 is demonstrated with reference to drawings.
FIG. 13 is a schematic diagram illustrating a posture in which the angular velocity sensor 50 is attached to the pendulum 30. In FIG. 13, the angular velocity sensor 50 includes a pair of vibrating arms 53 and 54 provided at an end portion of a connecting arm 52 extending on both sides from an end surface of a rectangular base portion 51, and a pair extending from another end surface. The detection arm 55 is comprised of a piezoelectric vibrating piece.

  As shown in FIG. 13, the angular velocity sensor 50 is mounted with the Z axis perpendicular to the vibration plane of the pendulum 30. The pendulum 30 reciprocates in the direction of arrow E around the axis 35 of the pendulum support shaft 25 and is given an input angular velocity ω.

  Next, the operation of the angular velocity sensor inspection device 10 of the second embodiment will be described. First, a reference angle sensor (not shown) is attached to the pendulum 30 of the angular velocity sensor inspection apparatus 10, the pendulum 30 is vibrated at a predetermined cycle, and the angular velocity for each elapsed time of the reference angular velocity sensor is measured. This angular velocity is stored in the detection processing device 90. In the detection processing device 90, the angular velocity waveform for each elapsed time is graphed (see FIG. 4) or numerically stored.

  Next, the angular velocity sensor 50 to be measured is attached to the pendulum 30, the input angular velocity is given under the same conditions as the reference angular velocity sensor, the angular velocity is measured, and stored in the detection processing device 90.

  The detection processing device 90 compares the angular velocity value measured by the reference angular velocity sensor with the angular velocity value measured by the angular velocity sensor 50 or each angular velocity waveform, and if the measured value by the angular velocity sensor 50 is within a predetermined standard range. If it is out of the standard range, it is determined as a defective product, and each angular velocity sensor is separated.

In addition, the angular velocity sensor 50 and the reference angular velocity sensor are attached to the substrate 33, the pendulum 30 is vibrated, and simultaneously the angular velocity detection values of the angular velocity sensor 50 and the reference angular velocity sensor are input to the detection processing device 90, and pass / fail judgment is performed by the method described above. You can also.
In addition, a reference angular velocity sensor can be attached to the end of the pendulum support shaft 25 as in the first embodiment (see FIG. 1).

  Therefore, according to the second embodiment described above, since the Z-axis of the angular velocity sensor 50 is mounted perpendicular to the vibration plane when the pendulum 30 vibrates, the vibration direction of the pendulum 30 (the direction of the input angular velocity ω) ) And the angular velocity sensor 50 are rotated in the same plane direction, so that accurate angular velocity measurement and detection sensitivity can be obtained.

Further, since the base 36 to which the angular velocity sensor 50 is attached is attached to the pendulum 30, the base attachment structure can be simplified, and a large amount of angular velocity sensors can be attached even if the protrusion amount of the pendulum 30 from the vibration plane is small. Therefore, there is an effect that the angular velocity sensor inspection device 10 can be reduced in size.
(Embodiment 3)

Subsequently, an angular velocity sensor inspection apparatus according to Embodiment 3 of the present invention will be described with reference to the drawings. The third embodiment differs from the second embodiment described above in that the arrangement of the angular velocity sensors 50 attached to the pendulum 30 is different, and the angular velocity measurement of more angular velocity sensors can be performed at one time. FIG. Differences from the second embodiment are shown, and common portions are omitted or simplified.
FIG. 14 is a partial front view showing the angular velocity sensor inspection device 10 according to the third embodiment. In FIG. 14, a wide base 36 is attached to the main surface of the arm portion 31 of the pendulum 30.

  The base 36 is a plate member having rigidity, and a substrate 33 is attached to the main surface thereof. A connection connector 34 is attached to the substrate 33. In FIG. 14, 48 angular velocity sensors 50 are attached, but this number is not limited to 48 and can be increased or decreased as appropriate. Input and output terminals (not shown) provided in the angular velocity sensor 50 are connected to the connection leads 40 via connection terminals of the connection connector 34 via wiring patterns (not shown) formed on the substrate 33.

  Further, the arm portion 31 of the pendulum 30 is provided with a weight 80 as a center-of-gravity position variable member having the same structure as that of the above-described second embodiment (see FIGS. 11 and 12), and changes the position of the center of gravity of the pendulum 30. Thus, the vibration cycle of the pendulum 30 can be changed.

Therefore, according to the third embodiment described above, if the position of the center of gravity of the pendulum 30 including the angular velocity sensor 50 and the weight 80 is the same, the period of the pendulum is constant. Since more angular velocity sensors 50 can be attached to the pendulum 30, many angular velocities can be measured at one time, and the angular velocity sensor 50 can be inspected efficiently.
(Embodiment 4)

  Next, a fourth embodiment of the angular velocity sensor inspection device according to the present invention will be described with reference to the drawings. The fourth embodiment is characterized in that a balance arm 130 is further provided in addition to the pendulum 30 based on the technical idea of the second and third embodiments described above, and the same reference numerals are given to the same functional members. . Description of the common part is omitted.

  FIG. 15 is a side view showing the angular velocity sensor inspection device 10 according to the fourth embodiment. In FIG. 15, the angular velocity sensor inspection apparatus 10 includes, as a basic configuration, a pendulum 30 as a first pendulum to which the angular velocity sensor 50 is attached, a support base 220 having a column 221 that rotatably supports the pendulum 30, and a column. A detection processing device 90 that supplies driving power to the balance arm 130 as a second pendulum that is rotatably attached to a position facing the pendulum 30 across the 221 and the angular velocity sensor 50 and processes angular velocity detection data ( (Not shown).

  The pendulum 30 includes a substrate 33, an angular velocity sensor 50, and a connection lead 40, and these configurations and the attachment structure to the column 221 are the same as those in the second embodiment (see FIG. 12A). A pendulum support shaft 25 having a through hole 26 is implanted at an upper end portion of the column 221. Both ends of the pendulum support shaft 25 protrude through the column 221, and the above-described pendulum 30 is rotatably attached to one end portion via a ball bearing 32.

  The balance arm 130 is a bowl-shaped member having rigidity, and a ball bearing 32 is provided at one end thereof. Although not shown, the ball bearing 32 has an outer ring press-fitted and fixed to the pendulum 30 and an inner ring press-fitted and fixed to the pendulum support shaft 25. A ball is provided between the outer ring and the inner ring, and the pendulum 30 can rotate with low friction about the pendulum support shaft 25 as a rotation center. A weight 80 as a center-of-gravity position variable member is attached to the other end of the balance arm 130 with the same structure as that of the second embodiment (see FIG. 12B).

The pendulum 30 and the balance arm 130 are screwed (not shown) to the fixing member 38 by the heads 37 and 132, respectively, and rotate integrally around the pendulum support shaft 25 as a rotation axis. Since the weight 80 described above is movable in the longitudinal direction of the balance arm 130, the vibration period of the pendulum can be changed by changing the position of the weight 80.
Further, the weight 80 can be attached to the balance arm 130, attached to the pendulum 30, or both.

An angle meter 60 is attached in the middle of the column 221 in the longitudinal direction, and the swing angle of the pendulum 30 can be regulated (see FIG. 11).
In addition, since the effect | action of the angular velocity sensor test | inspection apparatus 10 in Embodiment 4 is the same as that of above-mentioned Embodiment 2, description is abbreviate | omitted.
In the fourth embodiment, the structure of the third embodiment described above can also be employed.

  Therefore, according to the above-described fourth embodiment, the same effect as in the first and second embodiments can be obtained, and the pendulum 30 and the balance arm 130 are provided with the support 221 interposed therebetween. Therefore, when the pendulum 30 is freely vibrated, the column 221 vibrates and this vibration noise is generated, thereby preventing the angular velocity detection from being affected.

  Even in the structure including the balance arm 130, the weight 80 as the center-of-gravity position variable member can be moved to change the period of the pendulum, the input angular velocity applied to the angular velocity sensor can be arbitrarily changed, and a desired The detection value of the angular velocity sensor at the input angular velocity can be determined.

It should be noted that the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
For example, in the first to third embodiments described above, the vibration type gyroscope having the vibrating arms 53 and 54 and the detection arm 55 as the measurement target angular velocity sensor has been described as an example. However, a tuning fork type, triangular prism type, or bimorph type vibration type is described. It can also be employed in an angular velocity sensor such as a gyroscope.

In Embodiment 4 described above, the angular velocity sensor is attached to the pendulum 30, but can also be attached to the balance arm 130 side.
In this way, it is possible to inspect a large amount of angular velocity sensors at once, and to supply a highly reliable angular velocity sensor.

  Therefore, according to the first to fourth embodiments described above, the angular velocity measurement result by the angular velocity sensor can be accurately detected in a short time, and multi-directional angular velocities can be detected, and a large number of angular velocity sensors can be inspected at a time. Therefore, it is possible to provide a small angular velocity sensor inspection apparatus that can be operated easily.

The side view which shows the angular velocity sensor inspection apparatus which concerns on Embodiment 1 of this invention. The front view which shows the angular velocity sensor inspection apparatus which concerns on Embodiment 1 of this invention. The top view which shows the angular velocity sensor which concerns on Embodiment 1 of this invention. The graph which shows the angular velocity waveform by the angular velocity sensor test | inspection apparatus which concerns on Embodiment 1 of this invention. The graph which shows the angular velocity and output voltage relationship by the angular velocity sensor test | inspection apparatus which concerns on Embodiment 1 of this invention. The partial side view which shows switching operation from the 1st attachment attitude | position of the angular velocity sensor which concerns on Embodiment 1 of this invention to a 2nd attachment attitude | position. The partial front view which shows the structure which fixes the fixing stand which concerns on Embodiment 1 of this invention to a base. The top view which shows the 2nd attachment attitude | position of the angular velocity sensor which concerns on Embodiment 1 of this invention. The partial side view which shows switching operation from the 2nd attachment attitude | position of the angular velocity sensor which concerns on Embodiment 1 of this invention to a 3rd attachment attitude | position. The top view which shows the 3rd attachment attitude | position of the angular velocity sensor which concerns on Embodiment 1 of this invention. The front view which shows the angular velocity sensor inspection apparatus which concerns on Embodiment 2 of this invention. (A) is a side view which shows the angular velocity sensor test | inspection apparatus which concerns on Embodiment 2 of this invention, (b) is a fragmentary sectional view which shows a weight mounting structure. The schematic diagram which shows the attitude | position which attaches an angular velocity sensor to the pendulum which concerns on Embodiment 2 of this invention. The partial front view which shows the angular velocity sensor test | inspection apparatus which concerns on Embodiment 3 of this invention. The side view which shows the angular velocity sensor inspection apparatus which concerns on Embodiment 4 of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Angular velocity sensor test | inspection apparatus, 21, 121 ... Support | pillar, 25 ... Pendulum support shaft, 30 ... Pendulum, 36, 100 ... Base, 50 ... Angular velocity sensor, 150 ... Reference | standard angular velocity sensor, 90 ... Detection processing apparatus.

Claims (11)

A support and a pendulum support shaft supported by the support;
A pendulum that vibrates about the pendulum support shaft as a vibration center;
A base interlocking with the vibration of the pendulum;
One or more angular velocity sensors attached to the base;
A reference angle sensor attached to the pendulum support shaft or the base;
A detection processing device that freely vibrates the pendulum, compares the angular velocities detected by the angle sensor and the reference angle sensor, and determines pass / fail,
Is provided with an angular velocity sensor inspection device. The angular velocity sensor inspection apparatus according to claim 1,
The angular velocity sensor inspection apparatus, wherein the base is pivotally fixed to an end of the pendulum support shaft, and is rotated together with the pendulum support shaft in conjunction with vibration of the pendulum. The angular velocity sensor inspection device according to claim 2,
The angular velocity sensor is composed of a piezoelectric vibrating piece formed by having three axes of an X axis, a Y axis, and a Z axis,
An angular velocity sensor inspection apparatus, wherein the mounting posture of each of the X-axis, Y-axis, and Z-axis of the piezoelectric vibrating piece can be varied with respect to the axial direction of the pendulum support shaft. In the angular velocity sensor inspection apparatus according to claim 2 or 3,
An angular velocity sensor mounting table for mounting the angular velocity sensor on the base, a fixed base for mounting the angular velocity sensor vertically or horizontally with respect to the axial direction of the pendulum support shaft, and the fixed base An angular velocity sensor inspection apparatus, further comprising a turntable for rotating the angular velocity sensor mounting table at a predetermined rotation angle with moderation. The angular velocity sensor inspection apparatus according to claim 1,
The base is attached to the pendulum;
The angular velocity sensor inspection apparatus is attached to the base so that a Z axis of the angular velocity sensor is perpendicular to a vibration plane of the pendulum. In the angular velocity sensor inspection apparatus according to claim 5,
The pendulum is composed of a first pendulum to which the angular velocity sensor is attached, and a second pendulum provided at a position facing the first pendulum across the column.
The angular velocity sensor inspection apparatus, wherein the first pendulum and the second pendulum vibrate together. In the angular velocity sensor inspection apparatus according to any one of claims 1 to 6,
2. The angular velocity sensor inspection apparatus according to claim 1, wherein the pendulum includes a center-of-gravity position variable member that moves a center of gravity position of the pendulum. In the angular velocity sensor inspection apparatus according to any one of claims 1 to 7,
An angular velocity sensor inspection apparatus, wherein a connecting member that connects the angular velocity sensor and the detection processing device has flexibility and is inserted into a through hole formed in the pendulum support shaft. In the angular velocity sensor inspection apparatus according to any one of claims 1 to 8,
An angular velocity sensor inspection device comprising an angle meter for regulating a swing angle of the pendulum. In the angular velocity sensor inspection apparatus according to any one of claims 1 to 9,
An angular velocity sensor inspection apparatus, wherein the pendulum is freely vibrated and each detection result of the plurality of angular velocity sensors is selectively or collectively processed by the detection processing apparatus. In the angular velocity sensor inspection apparatus according to any one of claims 1 to 10,
2. The angular velocity sensor inspection device according to claim 1, wherein the pendulum support shaft is pivotally supported on the support column by a low friction bearing, or the pendulum is pivotally supported on the pendulum support shaft by a low friction bearing.

Images