JP2007245708A - Metal mesh - Google Patents

Metal mesh Download PDF

Info

Publication number
JP2007245708A
JP2007245708A JP2007028097A JP2007028097A JP2007245708A JP 2007245708 A JP2007245708 A JP 2007245708A JP 2007028097 A JP2007028097 A JP 2007028097A JP 2007028097 A JP2007028097 A JP 2007028097A JP 2007245708 A JP2007245708 A JP 2007245708A
Authority
JP
Japan
Prior art keywords
plasma
metal mesh
wire
wettability
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007028097A
Other languages
Japanese (ja)
Inventor
Hideaki Asada
英明 浅田
Shigeo Asada
茂雄 浅田
Sadayuki Ibusuki
貞幸 指宿
Konko Lee
根浩 李
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASADA MESH CO Ltd
PJT KK
PSM Inc
Original Assignee
ASADA MESH CO Ltd
PJT KK
PSM Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASADA MESH CO Ltd, PJT KK, PSM Inc filed Critical ASADA MESH CO Ltd
Priority to JP2007028097A priority Critical patent/JP2007245708A/en
Publication of JP2007245708A publication Critical patent/JP2007245708A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Filtering Materials (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Printing Plates And Materials Therefor (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a metal mesh by which wettability and pass through property can be obtained and the metal mesh. <P>SOLUTION: The molecular bond of the surface of a wire material constituting the metal mesh 1 are surface reformed by a plasma P irradiated from a plasma irradiating device 4 to sufficiently uniformly form a plasma coating Pa with high wattability (affinity) on the whole surface of the wire material 2. Foreign materials E sticking to the surface of the wire material 2 is separated and removed from the surface of the wire material 2 by bonding the same to the molecules of the plasma P or making the plasma colliding against the same. The pass through property suitable fine screen printing or a filter for separating fine foreign objects can be obtained because the wettability is improved and the surface tension and contact resistance provided to objects to be contacted are reduced by forming a large number of fine unevenness on the whole surface of the wire material 2 and the plasma coating Pa. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

この発明は、例えば緻密な印刷パターンを印刷する印刷用スクリーン、微細な異物を分離する濾過用フィルタ等に用いられる金属メッシュの製造方法及び金属メッシュに関する。   The present invention relates to a method for producing a metal mesh and a metal mesh used for, for example, a printing screen for printing a dense print pattern, a filter for filtering to separate fine foreign matters, and the like.

従来、上述例の緻密な印刷パターンを印刷する方法としては、例えばポリエステル製メッシュ表面にプラズマ重合膜を生成せしめる特許文献1のスクリーン印刷用メッシュの製造方法がある。しかし、感光性の乳剤をメッシュ上に塗布する際、或いは、転写物を転写する際に付与される圧力により、ポリエステル製の線材が蛇行するか、線材の間隔が変位しやすく、緻密な印刷パターンを印刷する作業には適さない。また、例えば複雑な回路パターンを転写基材上に形成する作業に適したフォト法がある。しかし、レジストの塗布、露光、現像、エッチング等の処理を行わなければならず、全体の工程数が多く、回路パターンを印刷する作業に手間及び時間が掛かるため、作業能率が悪い。   Conventionally, as a method for printing the dense print pattern of the above-described example, there is a method for producing a mesh for screen printing described in Patent Document 1 in which a plasma polymerized film is formed on a polyester mesh surface, for example. However, when a photosensitive emulsion is applied on the mesh, or when transferring the transferred material, the polyester wire rods meander or the interval between the wire rods is easily displaced, so that a dense print pattern can be obtained. It is not suitable for printing work. Further, for example, there is a photo method suitable for an operation for forming a complicated circuit pattern on a transfer substrate. However, processing such as resist coating, exposure, development, etching, etc. must be performed, and the number of overall processes is large, and the work of printing the circuit pattern takes time and effort, resulting in poor work efficiency.

上記以外の方法として、例えば図14に示すように、スクリーンメッシュ1Aを金属製や樹脂製の線材2Aにより形成した後、スクリーンメッシュ1A上に塗布された乳剤5Aを感光させ、未感光部分の乳剤5Aを除去して印刷パターンである開口部6Aを複数形成する。印刷パターンが形成されたスクリーンメッシュ1Aを図示しない被転写物に重ね合わせた後、スクリーンメッシュ1A上に供給される転写物を、乳剤5Aに形成した開口部6Aを通過させて被転写物に印刷するスクリーン印刷法がある。
特許第3090535号公報
As an alternative method, for example, as shown in FIG. 14, after forming the screen mesh 1A with a metal or resin wire 2A, the emulsion 5A applied on the screen mesh 1A is exposed to light, and the unexposed portion of the emulsion. 5A is removed to form a plurality of openings 6A that are print patterns. After the screen mesh 1A on which the printing pattern is formed is superimposed on a transfer object (not shown), the transfer object supplied on the screen mesh 1A is printed on the transfer object through the opening 6A formed in the emulsion 5A. There is a screen printing method to do.
Japanese Patent No. 3090535

しかし、上記スクリーン印刷法は、スクリーンメッシュ1Aの線材2A表面が平滑な状態であるため、線材2Aと乳剤5Aの濡れ性(親性)が悪く、乳剤5Aに付与される表面張力が大きい。スクリーンメッシュ1A上に塗布された乳剤5Aと、乳剤5Aを除去してなる開口部6Aの輪郭(エッジ)が歪んでしまい、印刷パターンが不鮮明となる(図14参照)。また、インク等の転写物を、乳剤5Aの開口部6Aを通り抜けさせて被転写物へ印刷した際に、印刷パターンの輪郭が滲んだ様に呆けてしまうので、緻密な印刷パターンを印刷することが難しい。また、線材2Aと乳剤5Aの濡れ性が悪いと、図15に示すように、線材2Aの交差部分へ乳剤5Aが浸透しにくく、ボイド5Aaが発生するため、転写物が開口部6A以外の部分にも印刷されてしまい、パターン通りに印刷することができない。   However, in the screen printing method, since the surface of the wire 2A of the screen mesh 1A is smooth, the wettability (affinity) between the wire 2A and the emulsion 5A is poor, and the surface tension applied to the emulsion 5A is large. The emulsion 5A applied on the screen mesh 1A and the outline (edge) of the opening 6A formed by removing the emulsion 5A are distorted, and the printed pattern becomes unclear (see FIG. 14). In addition, when a transferred material such as ink passes through the opening 6A of the emulsion 5A and is printed on the transferred material, the printed pattern outline is blurred, so a precise printed pattern is printed. Is difficult. Also, if the wettability of the wire 2A and the emulsion 5A is poor, as shown in FIG. 15, the emulsion 5A hardly penetrates into the intersecting portion of the wire 2A and voids 5Aa are generated, so that the transferred material is a portion other than the opening 6A. Are also printed, and cannot be printed according to the pattern.

また、金属製のスクリーンメッシュ1Aを製造する際には、潤滑油等の有機物は必要不可欠な材料であるが、油系有機物は乳剤5Aとの相性が悪く、乳剤5Aを弾いてしまうため、線材2A表面に油系有機物等の異物Eが付着(図15参照)していると、線材2Aと乳剤5Aの馴染み性が悪くなり、印刷パターンにムラが発生する。製造途中において発生する有機物や無機物等の異物Eも付着しやすいため、線材2A表面に付着する異物Eを除去する洗浄作業は不可欠である。   Further, when manufacturing the metal screen mesh 1A, an organic material such as lubricating oil is an indispensable material, but the oil-based organic material is incompatible with the emulsion 5A and repels the emulsion 5A. If foreign matter E such as an oil-based organic substance adheres to the surface of 2A (see FIG. 15), the conformability of the wire 2A and the emulsion 5A deteriorates, and unevenness occurs in the print pattern. Since foreign substances E such as organic substances and inorganic substances that are generated during the production are likely to adhere, cleaning work for removing the foreign substances E adhering to the surface of the wire 2A is indispensable.

また、スクリーンメッシュ1Aを、例えば洗浄ブラシ又はブラシに代わる洗浄具を用いて洗剤により洗浄しても、スクリーンメッシュ1A内部や線材2Aの交差部分に付着する異物Eを除去することが難しく、洗浄作業に手間及び時間が掛かるため、スクリーンメッシュ1A内部への乳剤5Aの浸透速度を遅くしなければならず、印刷作業に時間及び手間が掛かる。   Moreover, even if the screen mesh 1A is washed with a detergent using, for example, a washing brush or a cleaning tool instead of the brush, it is difficult to remove the foreign matter E adhering to the inside of the screen mesh 1A or the crossing portion of the wire 2A, and the cleaning work Therefore, it takes time and labor to slow down the penetration speed of the emulsion 5A into the screen mesh 1A.

この発明は上記問題に鑑み、濡れ性及び抜け性の向上を図ることができる金属メッシュの製造方法及び金属メッシュの提供を目的とする。   In view of the above problems, an object of the present invention is to provide a metal mesh manufacturing method and a metal mesh capable of improving wettability and pull-out property.

請求項1に記載した発明の金属メッシュの製造方法は、金属メッシュを構成する線材表面の分子結合を、プラズマ発生手段が発生するプラズマにより濡れ性が高くなる状態に表面改質して、上記プラズマにより表面改質してなる濡れ性の高いプラズマ被膜を線材の表面全体に対して略均一に形成したことを特徴とする。   The method for producing a metal mesh according to the first aspect of the present invention is characterized in that the molecular bond on the surface of the wire constituting the metal mesh is surface-modified so that the wettability is enhanced by the plasma generated by the plasma generating means, and the plasma The plasma coating having high wettability formed by surface modification by the method is characterized by being formed substantially uniformly over the entire surface of the wire.

この発明によると、線材表面の分子結合をプラズマにより濡れ性が高くなる状態に表面改質して、該プラズマにより表面改質してなる濡れ性の高いプラズマ被膜を線材の表面全体に対して略均一に形成するので、例えばペースト状の感光性乳剤、導電性を有するペースト状又は液状の転写物、気体や液体等の被接触物に付与される表面張力及び接触抵抗が小さくなり、被接触物と線材の濡れ性、被接触物の抜け性が向上する。   According to the present invention, the molecular bond on the surface of the wire is surface-modified so that the wettability is increased by the plasma, and the high wettability plasma coating formed by the surface modification by the plasma is substantially applied to the entire surface of the wire. Since it is uniformly formed, the surface tension and contact resistance applied to the contact object such as paste-like photosensitive emulsion, conductive paste-like or liquid transfer object, gas or liquid, etc. are reduced, and the object to be contacted. This improves the wettability of the wire and the ability to remove the contacted object.

上記金属メッシュの線材は、例えばステンレス、スチール等の金属で構成することができる。また、金属メッシュの網目は、目的や用途に応じて、所望する大きさ及び形状に変更することができる。また、プラズマ発生手段は、例えばエアープラズマ照射装置、グロープラズマ照射装置等で構成することができる。また、プラズマ発生時の環境としては、例えば大気圧(常圧)、減圧(真空)等の環境を設定することができる。   The metal mesh wire can be made of metal such as stainless steel or steel. The mesh of the metal mesh can be changed to a desired size and shape according to the purpose and application. The plasma generating means can be constituted by, for example, an air plasma irradiation device, a glow plasma irradiation device, or the like. Moreover, as an environment at the time of plasma generation, for example, an environment such as atmospheric pressure (normal pressure) or reduced pressure (vacuum) can be set.

請求項2に記載した発明の金属メッシュの製造方法は、上記請求項1に記載の構成と併せて、上記線材及びプラズマ被膜の少なくとも一方の表面に、上記プラズマ発生手段が発生するプラズマを衝突させて微細な凹凸を多数形成したことを特徴とする。   According to a second aspect of the present invention, there is provided a metal mesh manufacturing method in which the plasma generated by the plasma generating means is caused to collide with at least one surface of the wire and the plasma coating in combination with the configuration of the first aspect. It is characterized by the formation of many fine irregularities.

この発明によると、微細な凹凸を、線材及びプラズマ被膜の少なくとも一方の表面に形成するので、被接触物に付与される表面張力及び接触抵抗が小さくなり、線材及びプラズマ被膜と被接触物の濡れ性(親性)が向上する。   According to this invention, since the fine irregularities are formed on at least one surface of the wire and the plasma coating, the surface tension and contact resistance applied to the contacted object are reduced, and the wire, the plasma coating and the contacted object are wetted. Sex (friendliness) is improved.

請求項3に記載した発明の金属メッシュの製造方法は、上記請求項1又は2に記載の構成と併せて、上記プラズマ被膜を、大気圧又は減圧した環境下にて上記プラズマ発生手段によりプラズマを発生させて形成したことを特徴とする。   According to a third aspect of the present invention, there is provided a method for producing a metal mesh, comprising: combining the structure according to the first or second aspect with a plasma generated by the plasma generating means in an environment where the plasma coating is at atmospheric pressure or reduced pressure. It is characterized by being formed.

この発明によると、プラズマ被膜を大気圧の環境下にて形成するので、プラズマ被膜を形成する工程や装置等の構成を簡素化することができる。また、減圧した環境下にて形成すれば、環境内に存在する有機物や無機物等の異物が、例えば減圧手段の減圧力により雰囲気(例えば空気)と一緒に吸引除去されるので、プラズマ被膜が形成される部分に異物が再付着するのを防止することができる。   According to the present invention, since the plasma coating is formed under an atmospheric pressure environment, it is possible to simplify the configuration of the process and apparatus for forming the plasma coating. In addition, if formed in a reduced pressure environment, foreign substances such as organic and inorganic substances present in the environment are removed by suction together with the atmosphere (for example, air), for example, by the reduced pressure of the pressure reducing means, so that a plasma film is formed. It is possible to prevent foreign matters from adhering again to the portion to be formed.

請求項4に記載した発明の金属メッシュの製造方法は、上記請求項1又は2に記載の構成と併せて、上記微細な凹凸を、大気圧又は減圧した環境下にて上記プラズマ発生手段が発生するプラズマを衝突させて形成したことを特徴とする。   According to a fourth aspect of the present invention, there is provided a method for producing a metal mesh, wherein the plasma generating means is generated in an environment in which the fine irregularities are reduced to atmospheric pressure or reduced pressure in combination with the configuration of the first or second aspect. It is characterized by being formed by colliding with plasma.

この発明によると、微細な凹凸を大気圧の環境下にて形成するので、例えば減圧室内へ収容するか、減圧室内から取り出す等の手間及び作業が省け、作業の能率アップが図れる。また、減圧した環境下にて形成すれば、環境内に存在する有機物や無機物等の異物が、例えば減圧手段の減圧力により雰囲気(例えば空気)と一緒に吸引除去されるので、微細な凹凸が形成される部分に異物が付着するのを防止することができる。   According to the present invention, since the fine irregularities are formed in an atmosphere of atmospheric pressure, for example, it is possible to save time and work such as housing in the decompression chamber or taking it out from the decompression chamber, thereby improving the efficiency of the operation. Further, if formed under a reduced pressure environment, foreign matter such as organic matter and inorganic matter existing in the environment is removed by suction together with the atmosphere (for example, air) by, for example, the reduced pressure of the pressure reducing means, so that fine irregularities are formed. Foreign matter can be prevented from adhering to the formed portion.

請求項5に記載した発明の金属メッシュの製造方法は、上記請求項1又は2に記載の構成と併せて、上記線材の表面全体に、上記プラズマ発生手段が発生するプラズマを接触又は衝突させて該線材表面から異物を分離除去したことを特徴とする。   According to a fifth aspect of the present invention, in the metal mesh manufacturing method, the plasma generated by the plasma generating means is brought into contact with or collided with the entire surface of the wire in combination with the configuration according to the first or second aspect. The foreign matter is separated and removed from the surface of the wire.

この発明によると、線材表面に付着する異物をプラズマと結合させるか、線材表面に付着する異物にプラズマを衝突させる等して、線材表面から異物を分離除去する。   According to this invention, the foreign matter adhering to the surface of the wire is combined with the plasma, or the foreign matter attached to the surface of the wire is collided with the plasma to separate and remove the foreign matter from the surface of the wire.

請求項6に記載した発明の金属メッシュは、金属メッシュを構成する線材の表面全体に、該線材表面の分子結合をプラズマにより表面改質してなる濡れ性の高いプラズマ被膜が略均一に形成されていることを特徴とする。   In the metal mesh of the invention described in claim 6, a plasma coating with high wettability formed by modifying the molecular bonds of the surface of the wire with plasma is formed substantially uniformly on the entire surface of the wire constituting the metal mesh. It is characterized by.

この発明によると、プラズマにより表面改質してなる濡れ性の高いプラズマ被膜を線材の表面全体に対して略均一に形成しているので、被接触物に付与される表面張力及び接触抵抗が小さく、線材と被接触物の濡れ性(親性)、被接触物の抜け性が向上する。つまり、プラズマにより線材表面の分子結合を変化させて、濡れ性の高いプラズマ被膜に改質する。   According to the present invention, the plasma coating with high wettability formed by surface modification with plasma is formed substantially uniformly over the entire surface of the wire, so the surface tension and contact resistance applied to the contacted object are small. In addition, the wettability (affinity) between the wire and the contacted object and the detachability of the contacted object are improved. In other words, the molecular bond on the surface of the wire is changed by the plasma to modify the plasma coating with high wettability.

請求項7に記載した発明の金属メッシュは、上記請求項6に記載の構成と併せて、上記線材及びプラズマ被膜の少なくとも一方の表面に、上記プラズマを衝突させてなる微細な凹凸が多数形成されていることを特徴とする。   In the metal mesh of the invention described in claim 7, in combination with the structure described in claim 6, a large number of fine irregularities formed by colliding the plasma are formed on at least one surface of the wire and the plasma coating. It is characterized by.

この発明によると、微細な凹凸を、線材及びプラズマ被膜の少なくとも一方の表面に形成しているので、被接触物に付与される表面張力及び接触抵抗が小さく、線材及びプラズマ被膜と被接触物の濡れ性(親性)が向上する。   According to this invention, since the fine irregularities are formed on at least one surface of the wire and the plasma coating, the surface tension and contact resistance applied to the contacted object are small, and the wire, the plasma coating and the contacted object Improves wettability (friendly).

請求項8に記載した発明の金属メッシュは、上記請求項6又は7に記載の構成と併せて、上記プラズマ被膜を、大気圧又は減圧した環境下にて上記プラズマを発生させた際に形成したことを特徴とする。   The metal mesh of the invention described in claim 8 is formed when the plasma is generated in an environment of atmospheric pressure or reduced pressure in combination with the structure described in claim 6 or 7. It is characterized by that.

この発明によると、プラズマ被膜を大気圧の環境下にて形成しているので、プラズマ被膜を形成する工程や装置等の構成を簡素化することができる。また、減圧した環境下にて形成すれば、環境内に存在する異物が、例えば減圧手段の減圧力により雰囲気(例えば空気)と一緒に吸引除去されるので、プラズマ被膜が形成される部分に異物が再付着するのを防止することができる。   According to the present invention, since the plasma coating is formed under an atmospheric pressure environment, it is possible to simplify the configuration of the process and apparatus for forming the plasma coating. Further, if formed under a reduced pressure environment, the foreign matter existing in the environment is removed by suction together with the atmosphere (for example, air) by the pressure reducing means of the pressure reducing means, for example. Can be prevented from reattaching.

請求項9に記載した発明の金属メッシュは、上記請求項6又は7に記載の構成と併せて、上記微細な凹凸を、大気圧又は減圧した環境下にて上記プラズマを衝突させた際に形成したことを特徴とする。   The metal mesh of the invention described in claim 9 is formed together with the structure described in claim 6 or 7 when the fine bumps are collided with the plasma in an environment of atmospheric pressure or reduced pressure. It is characterized by that.

この発明によると、微細な凹凸を、大気圧の環境下にて形成しているので、微細な凹凸を形成する工程や装置等の構成を簡素化することができる。また、減圧した環境下にて形成すれば、環境内に存在する異物が、例えば減圧手段の減圧力により雰囲気(例えば空気)と一緒に吸引除去されるので、微細な凹凸が形成される部分に異物が再付着するのを防止することができる。   According to the present invention, since the fine irregularities are formed under an atmospheric pressure environment, the configuration of the process and apparatus for forming the fine irregularities can be simplified. Further, if formed in a reduced pressure environment, foreign substances existing in the environment are removed by suction together with the atmosphere (for example, air) by, for example, the reduced pressure of the pressure reducing means, so that the portion where fine irregularities are formed is formed. It is possible to prevent foreign matters from reattaching.

請求項10に記載した発明の金属メッシュ製スクリーンは、上記請求項6〜9のいずれか一つに記載の金属メッシュにより印刷用スクリーンを構成したことを特徴とする。   A metal mesh screen according to a tenth aspect of the invention is characterized in that a printing screen is constituted by the metal mesh according to any one of the sixth to ninth aspects.

この発明によると、プラズマ被膜が形成された金属メッシュを印刷用スクリーンとして用いるので、例えば緻密な印刷パターンを形成するのに必要な粘性を有する乳剤を金属メッシュに塗布するか、金属メッシュに塗布された乳剤を除去する等して、金属メッシュ上に印刷パターンである開口部を形成する場合、乳剤と開口部の境界がストレート(直線性)に形成され、開口部の輪郭(エッジ)が鮮鋭となるので、緻密な印刷パターンを形成することができる。また、ペースト状又は液状の転写物と線材の濡れ性、転写物の抜け性が向上する。   According to the present invention, the metal mesh on which the plasma film is formed is used as a printing screen. For example, an emulsion having a viscosity necessary for forming a dense print pattern is applied to the metal mesh or applied to the metal mesh. When forming an opening as a printed pattern on a metal mesh by removing the emulsion, etc., the boundary between the emulsion and the opening is formed straight (linearity), and the outline (edge) of the opening is sharp. As a result, a dense printed pattern can be formed. Further, the wettability between the paste-like or liquid transfer product and the wire and the removal property of the transfer product are improved.

請求項11に記載した発明の金属メッシュ製フィルタは、上記請求項6〜9のいずれか一つに記載の金属メッシュにより濾過用フィルタを構成したことを特徴とする。   A metal mesh filter according to an eleventh aspect of the present invention is characterized in that a filter for filtration is constituted by the metal mesh according to any one of the sixth to ninth aspects.

この発明によると、プラズマ被膜が形成された金属メッシュを濾過用フィルタとして用いるので、例えば金属メッシュの網目を微細な異物の通過が阻止される程に小さくしても、流体の通過が妨げられることがなく、流体と線材の濡れ性、流体の抜け性が向上する。また、異物の通過が阻止され、流体のみの通過が許容されるため、微細な異物を流体から分離除去する濾過効果が安定して得られる。   According to the present invention, the metal mesh on which the plasma coating is formed is used as a filter for filtration. For example, even if the mesh of the metal mesh is small enough to prevent the passage of fine foreign matter, the passage of fluid is prevented. And the wettability between the fluid and the wire and the fluid detachability are improved. Further, since the passage of foreign matter is blocked and the passage of only the fluid is allowed, a filtration effect for separating and removing fine foreign matter from the fluid can be stably obtained.

この発明によれば、金属メッシュを構成する線材の表面全体をプラズマにより表面改質して、濡れ性の高いプラズマ被膜を線材の表面全体に対して略均一に形成するので、被接触物に付与される表面張力及び接触抵抗が小さくなり、線材と被接触物の濡れ性、被接触物の抜け性が向上する。金属メッシュの網目を通り抜ける際に要する時間が短くなり、印刷や濾過等の処理速度向上を図ることができる。網目を通り抜けさせる際に付与する圧力が小さくて済むので、大きな圧力を付与するための大型の装置や機器等を設置する必要がなく、装置及び機器への負荷が低減されるので、装置全体の構成を簡素化することができる。また、線材表面に付着する異物をプラズマと結合させるか、線材表面に付着する異物にプラズマを衝突させる等して、線材表面から有機物や無機物等の異物を分離除去するので、従来例のような洗浄作業が不要となり、線材表面から異物を確実に洗浄除去することができる。   According to the present invention, the entire surface of the wire constituting the metal mesh is surface-modified by plasma, and a highly wettable plasma coating is formed substantially uniformly on the entire surface of the wire, so that it is applied to the contacted object. The surface tension and contact resistance are reduced, and the wettability between the wire and the contacted object and the detachability of the contacted object are improved. The time required to pass through the mesh of the metal mesh is shortened, and the processing speed such as printing and filtration can be improved. Since the pressure applied when passing through the mesh may be small, it is not necessary to install a large device or equipment for applying a large pressure, and the load on the device and equipment is reduced. The configuration can be simplified. In addition, foreign substances such as organic substances and inorganic substances are separated and removed from the surface of the wire by combining foreign substances adhering to the surface of the wire with the plasma or by colliding the plasma with foreign substances adhering to the surface of the wire. No cleaning work is required, and foreign matters can be reliably cleaned and removed from the surface of the wire.

この発明は、金属メッシュの濡れ性及び抜け性の向上を図ることができるという目的を、金属メッシュを構成する線材の表面全体をプラズマにより表面改質して、濡れ性の高いプラズマ被膜を線材の表面全体に対して略均一に形成することにより達成した。   The object of the present invention is to improve the wettability and detachability of the metal mesh by plasma-modifying the entire surface of the wire constituting the metal mesh with a plasma so that a highly wettable plasma coating is applied to the wire. This was achieved by forming substantially uniform over the entire surface.

この発明の一実施例を以下図面に基づいて詳述する。   An embodiment of the present invention will be described in detail with reference to the drawings.

図1〜図11は、大気圧の環境下にてプラズマ処理された金属メッシュ1を、電子回路等の緻密な印刷パターンを印刷する印刷用スクリーンとして用いた例を示している。   FIGS. 1-11 has shown the example which used the metal mesh 1 plasma-processed in the environment of atmospheric pressure as a printing screen which prints dense print patterns, such as an electronic circuit.

金属メッシュ1は、図1に示すように、ステンレス製の線材2を縦糸と横糸に用いて、平織り方法によりメッシュ状に織ったものであり、張り付け工程において、定型の金属体およびそれに準ずる製版用の枠体3に張り付けられる。   As shown in FIG. 1, the metal mesh 1 is woven in a mesh shape by a plain weaving method using a wire rod 2 made of stainless steel for warp and weft. The frame 3 is attached.

実施例では、金属メッシュ1を枠体3に張り付けてから後述するプラズマ照射装置4によりプラズマ処理するが、例えば金属メッシュ1の線材2をプラズマ処理してから平織りするか、金属メッシュ1をプラズマ処理してから枠体3に張り付ける等してもよい。また、平織り方法に代えて、例えば綾織、朱子織、捩り織等の織り方法により金属メッシュ1を織ってもよい。また、線材2の線径や断面形状を、印刷パターンの緻密度に応じて所望する線径及び断面形状に変更してもよい。   In the embodiment, the metal mesh 1 is attached to the frame 3 and then subjected to plasma treatment by a plasma irradiation device 4 described later. For example, the wire 2 of the metal mesh 1 is subjected to plasma treatment and then plain weave, or the metal mesh 1 is subjected to plasma treatment. Then, it may be attached to the frame 3 or the like. Further, instead of the plain weaving method, the metal mesh 1 may be woven by a weaving method such as twill weave, satin weave, or twist weave. Moreover, you may change the wire diameter and cross-sectional shape of the wire 2 into a desired wire diameter and cross-sectional shape according to the density of a printing pattern.

上記金属メッシュ1を、プラズマ照射装置4によりプラズマ処理する場合、図2に示すように、大気圧の環境下において、金属メッシュ1とプラズマ照射部4aを矢印方向へ相対移動させながら、金属メッシュ1を構成する線材2の表面全体に対してプラズマ照射部4aから出射される酸素・水素等のプラズマPを略均一に照射する。おな、プラズマ発生時の環境は、例えば真空圧(0mmHg)〜大気圧(760mmHg)の範囲に含まれる環境である。   When the metal mesh 1 is subjected to plasma treatment by the plasma irradiation apparatus 4, as shown in FIG. 2, the metal mesh 1 and the plasma irradiation unit 4a are moved relative to each other in the direction of the arrow under an atmospheric pressure environment. The plasma P such as oxygen and hydrogen emitted from the plasma irradiation unit 4a is irradiated substantially uniformly on the entire surface of the wire 2 constituting the wire. The environment at the time of plasma generation is an environment included in the range of, for example, vacuum pressure (0 mmHg) to atmospheric pressure (760 mmHg).

プラズマ照射時において、プラズマPが照射された線材2表面の分子結合を濡れ性が高くなる状態に表面改質するとともに、プラズマPにより表面改質してなる濡れ性の高いプラズマ被膜Paを線材2の表面全体に対して略均一に形成(図3の拡大断面図参照)するので、線材2の表面全体が活性化し、スクリーン印刷に適した良好な状態に表面改質することができる。   At the time of plasma irradiation, the surface of the wire 2 irradiated with the plasma P is subjected to surface modification so that the wettability becomes high, and the plasma coating Pa having high wettability formed by surface modification with the plasma P is applied to the wire 2. Therefore, the entire surface of the wire 2 is activated and the surface can be modified to a good state suitable for screen printing.

また、線材2表面に付着する有機物や無機物等の異物EをプラズマPの分子と結合させるか、線材2表面に付着する異物EにプラズマPを衝突させる等して、線材2表面から異物Eを確実に洗浄除去することができる(図3の平面図及び部分拡大図参照)。   Further, the foreign matter E such as an organic substance or an inorganic matter adhering to the surface of the wire 2 is bonded to the molecules of the plasma P, or the foreign matter E adhering to the surface of the wire 2 is caused to collide with the plasma P. It can be surely removed by cleaning (see the plan view and the partially enlarged view of FIG. 3).

プラズマ処理された金属メッシュ1に印刷パターンを形成する場合、図4に示す塗布工程において、緻密な印刷パターンを形成するのに必要な粘性を有する感光性乳剤5を金属メッシュ1に塗布するか、金属メッシュ1に塗布された乳剤5を部分的に除去する等して、印刷パターンである開口部6(又は孔部)を金属メッシュ1上に複数形成することにより、スクリーン印刷用の金属メッシュ製スクリーン1Bを製作することができる。なお、金属メッシュ1に塗布された乳剤5を除去する他の方法としては、例えば溶剤で腐食するか、切削具で切削する等の方法がある。   In the case of forming a print pattern on the plasma-treated metal mesh 1, in the coating step shown in FIG. 4, a photosensitive emulsion 5 having a viscosity necessary for forming a dense print pattern is applied to the metal mesh 1, A metal mesh for screen printing is formed by forming a plurality of openings 6 (or holes) as a printing pattern on the metal mesh 1 by partially removing the emulsion 5 applied to the metal mesh 1. The screen 1B can be manufactured. Other methods for removing the emulsion 5 coated on the metal mesh 1 include a method of corroding with a solvent or cutting with a cutting tool.

金属メッシュ1をプラズマ処理しない場合、線材2表面は平滑な状態であり、線材2と乳剤5の濡れ性(親性)が悪く、導電性を有する転写物7に付与される表面張力が大きいため、金属メッシュ1に乳剤5を塗布するか、金属メッシュ1に塗布した乳剤5を除去する等して印刷パターンである開口部6を形成した場合、開口部6の輪郭(エッジ)が歪んでしまい、印刷パターンが不鮮明となる。   When the metal mesh 1 is not subjected to plasma treatment, the surface of the wire 2 is smooth, the wettability (affinity) between the wire 2 and the emulsion 5 is poor, and the surface tension applied to the conductive transfer product 7 is large. When the opening 6 which is a printing pattern is formed by applying the emulsion 5 to the metal mesh 1 or removing the emulsion 5 applied to the metal mesh 1, the outline (edge) of the opening 6 is distorted. The printed pattern becomes unclear.

また、転写物7を、輪郭が歪んだ開口部6を通り抜けさせて基板等の転写基材8へ転写した際に、転写物7の輪郭が滲んだ様に呆けてしまうので、緻密な印刷パターンを形成する作業には適さない。且つ、隣接する転写物7の間が狭くなったり、広くなったりするため、電気的影響を与えることがない間隔に隔てることが難しく、転写物7間の電気的特性が悪くなる。   In addition, when the transferred product 7 is transferred to the transfer base material 8 such as a substrate through the opening 6 having a distorted contour, the transferred product 7 is distorted so that the contour of the transferred product 7 is blurred. It is not suitable for the work to form. In addition, since the space between adjacent transfer products 7 becomes narrower or wider, it is difficult to separate them at intervals that do not have an electrical influence, and the electrical characteristics between the transfer products 7 are deteriorated.

一方、金属メッシュ1をプラズマ処理した場合、プラズマPの分子が衝突することにより線材2及びプラズマ被膜Paの表面全体が分子レベルで荒らされ、線材2及びプラズマ被膜Paの表面全体に分子レベルで微細な凹凸が多数形成されるため、乳剤5に付与される表面張力が小さくなり、線材2と乳剤5の濡れ性が向上する。この結果、図5、図6に示すように、印刷パターンを形成する際に、乳剤5と開口部6の境界がストレート(直線性)に形成され、開口部6の輪郭(エッジ)が鮮鋭となるので、印刷パターンの精度が向上する。また、単位面積当たりの金属メッシュ1の表面積が大きくなっても、乳剤5と開口部6の境界をストレート(直線性)に形成することができる。   On the other hand, when the metal mesh 1 is subjected to plasma treatment, the entire surface of the wire 2 and the plasma coating Pa is roughened at the molecular level by collision of the molecules of the plasma P, and the entire surface of the wire 2 and the plasma coating Pa is finely formed at the molecular level. Since many irregularities are formed, the surface tension applied to the emulsion 5 is reduced, and the wettability of the wire 2 and the emulsion 5 is improved. As a result, as shown in FIGS. 5 and 6, when forming the print pattern, the boundary between the emulsion 5 and the opening 6 is formed straight (linearity), and the outline (edge) of the opening 6 is sharp. As a result, the accuracy of the printing pattern is improved. Even if the surface area of the metal mesh 1 per unit area is increased, the boundary between the emulsion 5 and the opening 6 can be formed straight (linearity).

また、導電性を有するペースト状の転写物7を、金属メッシュ1に形成された印刷パターンの開口部6を通り抜けさせて転写基材8へ転写した際に、転写物7の輪郭(エッジ)が鮮鋭となるので、緻密な印刷パターンを正確且つ確実に形成することができる。且つ、印刷パターンの輪郭が鮮鋭となり、隣接する転写物7の間が電気的影響を与えることがない間隔に隔てられるため、転写物7間の電気的特性が向上する。   In addition, when the conductive paste-like transfer material 7 is transferred to the transfer substrate 8 through the printed pattern opening 6 formed on the metal mesh 1, the contour (edge) of the transfer material 7 is changed. Since it becomes sharp, a precise printed pattern can be formed accurately and reliably. In addition, the outline of the printed pattern becomes sharp and the adjacent transfer products 7 are separated by an interval that does not have an electrical influence, so that the electrical characteristics between the transfer products 7 are improved.

乳剤5と線材2の界面が活性化し、濡れ性が向上することによって、金属メッシュ1の線材2が交差する部分にも乳剤5が浸透しやすくなり、ボイド5aが発生することがないので、転写物7が開口部6以外の部分に転写されるのを防止して、パターン通りに印刷することができる。また、スクリーン製作時に必要とする洗浄工程、特殊な溶剤での洗浄処理等が不要となり、水洗浄のみで洗浄除去することができる。   Since the interface between the emulsion 5 and the wire 2 is activated and the wettability is improved, the emulsion 5 can easily penetrate into the portion where the wire 2 of the metal mesh 1 intersects, and no void 5a is generated. The object 7 can be prevented from being transferred to a portion other than the opening 6 and can be printed in a pattern. In addition, the cleaning process required when the screen is manufactured, the cleaning process with a special solvent, and the like are not required, and the cleaning process can be performed only by water cleaning.

上記印刷パターンが形成された金属メッシュ製スクリーン1Bを用いて、所望の印刷パターンを転写基材8にスクリーン印刷する場合、図7に示す印刷工程において、金属メッシュ製スクリーン1Bを転写基材8の転写面に重ね合わせた後、目的の厚みを維持するのに必要な粘性を有するペースト状の転写物7を、金属メッシュ製スクリーン1Bに形成された膜状(又はレジスト状)の乳剤5上に供給する。また、転写に適した硬さ又は柔らかさを有するスキージ9を、膜状の乳剤5に押し付けながら矢印方向へ移動させる。   When a desired print pattern is screen-printed on the transfer substrate 8 using the metal mesh screen 1B on which the print pattern is formed, the metal mesh screen 1B is applied to the transfer substrate 8 in the printing step shown in FIG. After being superimposed on the transfer surface, a paste-like transfer product 7 having a viscosity necessary for maintaining the target thickness is formed on the film-like (or resist-like) emulsion 5 formed on the metal mesh screen 1B. Supply. Further, the squeegee 9 having hardness or softness suitable for transfer is moved in the direction of the arrow while being pressed against the film-like emulsion 5.

膜状の乳剤5上に供給される転写物7を、スキージ9により乳剤5に形成された各開口部6…に対して押し込むとともに、転写物7が押し込まれた開口部6付近の金属メッシュ製スクリーン1Bを転写基材8の転写面から離間するか浮き上がらせる等して、金属メッシュ製スクリーン1Bと転写基材8の対向面間に隙間を形成する。各開口部6…を通り抜けた転写物7を転写基材8の転写面上に残存させて、転写物7を各開口部6…と略合同な大きさ及び形状に転写することにより、所望の印刷パターン通りに印刷することができる。   The transfer product 7 supplied on the film-like emulsion 5 is pushed into each opening 6 formed in the emulsion 5 by the squeegee 9 and made of a metal mesh near the opening 6 into which the transfer product 7 is pushed. A gap is formed between the opposed surfaces of the metal mesh screen 1B and the transfer substrate 8 by separating the screen 1B from the transfer surface of the transfer substrate 8 or by raising the screen 1B. The transfer product 7 that has passed through the openings 6 is left on the transfer surface of the transfer substrate 8, and the transfer product 7 is transferred to a size and shape substantially the same as the openings 6 to obtain a desired shape. Printing can be performed according to the printing pattern.

金属メッシュ製スクリーン1Bを転写基材8の転写面から取り除いた後、転写基材8に転写した転写物7を加熱して硬化させる。転写物7からバインダー成分を除去し、無機フィラーを焼結して、転写物7からなる印刷パターンを転写基材8上に成形することで、金属メッシュ製スクリーン1Bを用いたスクリーン印刷作業が完了する。   After the metal mesh screen 1B is removed from the transfer surface of the transfer substrate 8, the transferred material 7 transferred to the transfer substrate 8 is heated and cured. By removing the binder component from the transfer 7, sintering the inorganic filler, and forming a print pattern consisting of the transfer 7 on the transfer substrate 8, the screen printing operation using the metal mesh screen 1B is completed. To do.

また、線材2と転写物7の濡れ性、転写物7の抜け性が向上することにより、転写物7を転写基材8へ転写する際に、印刷パターンの開口部6に対して転写物7が一定(定常的)に存在することになる。開口部6内に押し込まれる転写物7の存在が定常的になるので、転写物7の転写量、転写厚等の調整が容易に行える。   Further, the wettability between the wire 2 and the transfer product 7 and the detachability of the transfer product 7 are improved, so that when the transfer product 7 is transferred to the transfer substrate 8, the transfer product 7 with respect to the opening 6 of the print pattern. Exists constantly (stationary). Since the presence of the transfer product 7 pushed into the opening 6 becomes steady, the transfer amount, transfer thickness, and the like of the transfer product 7 can be easily adjusted.

スキージ9により転写物7を開口部6内に押し込んだ際に、開口部6内に転写物7が均一に存在することになるので、転写物7の転写量、転写時の大きさ及び形状が安定し、転写物7を開口部6と略合同な大きさ及び形状に印刷することができる。図8に示すように、金属メッシュ1の肉厚を厚くする等して、開口部6を所望する深さに形成すれば、転写物7を目的の厚みに印刷することが可能である。   When the transfer product 7 is pushed into the opening 6 by the squeegee 9, the transfer product 7 is uniformly present in the opening 6. Therefore, the transfer amount of the transfer product 7, the size and shape at the time of transfer are limited. The transfer product 7 can be printed in the same size and shape as the opening 6 in a stable manner. As shown in FIG. 8, if the opening 6 is formed to a desired depth by increasing the thickness of the metal mesh 1, the transferred material 7 can be printed to a desired thickness.

また、開口部6に露出する線材2自体及び線材2外面に形成したプラズマ被膜Paの表面全体には、プラズマ処理により分子レベルの微細な凹凸が多数形成されるので、線材2と転写物7の濡れ性が良く、転写物7に付与される表面張力及び接触抵抗が小さくなる。開口部6に露出する網目を通り抜ける際に要する時間が短くなるので、印刷処理精度の向上及び印刷処理速度のアップを図ることができる。また、精密機器の電子回路を製造する工程に適用することが可能である。   In addition, since the surface of the wire 2 exposed in the opening 6 itself and the entire surface of the plasma coating Pa formed on the outer surface of the wire 2 have a large number of fine irregularities at the molecular level formed by the plasma treatment, The wettability is good, and the surface tension and contact resistance applied to the transfer product 7 are reduced. Since the time required to pass through the mesh exposed in the opening 6 is shortened, it is possible to improve the printing processing accuracy and increase the printing processing speed. Moreover, it is possible to apply to the process of manufacturing the electronic circuit of a precision instrument.

また、開口部6に露出する網目を通り抜けさせる際に付与する圧力が小さくて済み、開口部6に露出する線材2に対して付与される接触抵抗が小さいので、線材2の直線性や間隔が変位することがなく、緻密な印刷パターンを印刷するのに適している。且つ、大きな圧力を付与するための大型の装置や機器等を設置する必要がなく、装置及び機器への負荷が低減されるので、装置全体の構成を簡素化することができる。   Further, since the pressure applied when passing through the mesh exposed in the opening 6 is small and the contact resistance applied to the wire 2 exposed in the opening 6 is small, the linearity and spacing of the wire 2 are reduced. It is suitable for printing a dense print pattern without displacement. In addition, it is not necessary to install a large device or device for applying a large pressure, and the load on the device and the device is reduced. Therefore, the configuration of the entire device can be simplified.

また、プラズマ処理済みの金属メッシュ1を長期間放置するか、次工程へ移動又は他の場所へ運搬する等した際に、処理済みの金属メッシュ1に異物Eが再付着することがなく、プラズマ照射による効果が長期間持続されるので、プラズマ処理を再度行う必要がなくなる。   In addition, when the metal mesh 1 that has been subjected to plasma treatment is left for a long period of time, moved to the next process, or transported to another location, foreign matter E does not reattach to the metal mesh 1 that has been treated. Since the effect of irradiation lasts for a long time, it is not necessary to perform plasma treatment again.

また、大気圧の環境下にて、金属メッシュ1全体をプラズマ処理するので、真空状態に減圧される減圧室10内(図12参照)へ未処理の金属メッシュ1を収容するか、減圧室10内から処理済みの金属メッシュ1を取り出す等の手間及び作業が省け、プラズマ処理に要する時間が短くなるため、多数の金属メッシュ1を連続してプラズマ処理することができ、処理作業の省力化及び能率アップが図れる。且つ、真空状態に減圧するための減圧装置等を設置する必要がなく、製造ラインの全体構成を簡素化することができる。   Further, since the entire metal mesh 1 is plasma-treated under an atmospheric pressure environment, the untreated metal mesh 1 is accommodated in the decompression chamber 10 (see FIG. 12) that is decompressed to a vacuum state, or the decompression chamber 10 Since the labor and work of taking out the treated metal mesh 1 from the inside can be saved and the time required for the plasma treatment can be shortened, a large number of metal meshes 1 can be subjected to plasma treatment continuously, saving labor of the treatment work and Efficiency can be improved. In addition, it is not necessary to install a decompression device or the like for decompressing to a vacuum state, and the entire configuration of the production line can be simplified.

図9は、プラズマ処理による非金属性異物Eの除去試験の結果を示すグラフである。一定環境条件による一定時間処理した際の異物Eの除去率(%)を50μm〜300μm別に表示しており、50μm以下では略100%の除去率である。異物Eの成分によって除去率に差異が発生するも、除去するのに適した条件が確定できれば、定常的に除去効果が期待できる。   FIG. 9 is a graph showing the results of a non-metallic foreign matter E removal test by plasma treatment. The removal rate (%) of the foreign matter E when treated for a certain period of time under a certain environmental condition is displayed separately for 50 μm to 300 μm, and the removal rate is approximately 100% below 50 μm. Even if the removal rate varies depending on the component of the foreign matter E, the removal effect can be expected on a regular basis if conditions suitable for the removal can be determined.

図10は、転写物7に代わる液体をプラズマ処理済みの滴下部に所定の高さから落下させた際の滴定試験の結果を示し、液体の水平からの角度(θ)を測定することによって、液体と滴下部の親性(濡れ性)と疎性(非濡れ性)を数値化したものである。未プラズマ処理の滴下部に滴下された液体の角度θに比べて、プラズマ処理済みの滴下部に滴下された液体の角度θが小さくなる。   FIG. 10 shows the results of a titration test when a liquid in place of the transfer product 7 is dropped from a predetermined height onto a dropping portion subjected to plasma treatment, and by measuring the angle (θ) from the horizontal of the liquid, This is a quantification of the affinity (wetting properties) and looseness (non-wetting properties) of the liquid and the dropping part. The angle θ of the liquid dropped on the plasma-treated dropping part is smaller than the angle θ of the liquid dropped on the dropping part that has not been plasma-treated.

上記滴定試験の結果を、図11に示すようにグラフ化すると、プラズマPによる処理時間が長くなるほど角度θが小さくなるので、転写物7と対応する液体と、転写基材8と対応する滴下部の親性が向上していることが明らかである。   When the result of the titration test is graphed as shown in FIG. 11, the angle θ becomes smaller as the processing time by the plasma P becomes longer. Therefore, the liquid corresponding to the transferred material 7 and the dropping portion corresponding to the transfer base material 8. It is clear that the friendliness of has improved.

図12は、金属メッシュ1を、密閉型のプラズマ照射装置10Aにより減圧した環境下にてプラズマ処理する他の方法を示し、金属メッシュ1を密閉可能な減圧室10内へ収容し、減圧室10内に設けた下部電極10aと上部電極10bの間に配置する。減圧手段の一例である減圧装置11により減圧室10内を減圧して、空気や異物等が分子レベルで存在しない状態に減圧する。減圧装置11を停止した後、減圧室10内にガス供給部12から供給される酸素、水素等のプラズマ発生用ガスを放出し、電源13から供給される高圧の電力により上部電極10bに高周波電圧を印加することにより、下部電極10aと上部電極10bの間にプラズマPを発生させる。   FIG. 12 shows another method in which the metal mesh 1 is subjected to plasma treatment in an environment where the pressure is reduced by the sealed plasma irradiation apparatus 10A. The metal mesh 1 is accommodated in the vacuum chamber 10 that can be sealed, and the vacuum chamber 10 It arrange | positions between the lower electrode 10a and the upper electrode 10b which were provided in the inside. The inside of the decompression chamber 10 is decompressed by the decompression device 11 which is an example of the decompression means, and decompressed to a state where no air or foreign matter exists at the molecular level. After the decompression device 11 is stopped, a plasma generating gas such as oxygen or hydrogen supplied from the gas supply unit 12 is released into the decompression chamber 10, and a high-frequency voltage is applied to the upper electrode 10 b by high-voltage power supplied from the power source 13. Is applied to generate plasma P between the lower electrode 10a and the upper electrode 10b.

減圧した環境下において、プラズマPの分子を金属メッシュ1の線材2表面に接触又は衝突させるか、線材2表面に付着する異物EをプラズマPの分子と結合させる等して、線材2表面から分離除去する。また、プラズマPにより線材2表面の分子結合を表面改質して、濡れ性(親性)の高いプラズマ被膜Paを線材2の表面全体に対して略均一に形成するので、上記実施例と略同等の作用及び効果を奏することができる。また、線材2表面から分離された異物Eは減圧室10内の空気と一緒に吸引除去されるので、分離除去した異物Eが金属メッシュ1の線材2表面に再付着するのを防止することもできる。   In a reduced pressure environment, plasma P molecules are separated from the surface of the wire 2 by contacting or colliding with the surface of the wire 2 of the metal mesh 1 or by binding foreign matter E adhering to the surface of the wire 2 to the plasma P molecules. Remove. Further, the molecular bond on the surface of the wire 2 is modified by the plasma P, and the plasma coating Pa having high wettability (affinity) is formed almost uniformly on the entire surface of the wire 2. Equivalent actions and effects can be achieved. In addition, since the foreign matter E separated from the surface of the wire 2 is sucked and removed together with the air in the decompression chamber 10, the separated foreign matter E can be prevented from reattaching to the surface of the wire 2 of the metal mesh 1. it can.

図13は、大気圧(図2参照)又は減圧(図12参照)した環境下にてプラズマ処理された金属メッシュ1を濾過用フィルタとして用いた例を示し、プラズマ処理済みの金属メッシュ1からなる金属メッシュ製フィルタ1Cは、金属メッシュ1Bの網目を、気体・液体等の流体Gの通過が許容され、微細な異物Eの通過が阻止されるような大きさ及び形状に形成している。また、金属メッシュ1Bを構成する線材2の表面全体に対してプラズマ被膜Paを略均一に形成し、線材2及びプラズマ被膜Paの表面全体に分子レベルで微細な凹凸を多数形成して、流体Gに付与される表面張力及び接触抵抗が小さくしているので、線材2と流体Gの濡れ性、流体Gの抜け性が向上し、上記実施例と略同等の作用及び効果を奏することができる。   FIG. 13 shows an example in which a metal mesh 1 that has been plasma-treated in an environment of atmospheric pressure (see FIG. 2) or reduced pressure (see FIG. 12) is used as a filter for filtration, and is made of a metal mesh 1 that has been plasma-treated. The metal mesh filter 1C is formed in such a size and shape that the mesh of the metal mesh 1B is allowed to pass through a fluid G such as gas or liquid and is prevented from passing through fine foreign matter E. Further, the plasma coating Pa is formed substantially uniformly on the entire surface of the wire 2 constituting the metal mesh 1B, and a large number of fine irregularities are formed on the entire surface of the wire 2 and the plasma coating Pa on the molecular level. Since the surface tension and contact resistance applied to the wire 2 are reduced, the wettability between the wire 2 and the fluid G and the fluid G can be improved, and the operation and effect substantially equivalent to those of the above embodiment can be achieved.

また、上記プラズマ処理済みの金属メッシュ1を濾過用フィルタとして用いることにより、流体Gの抜け性が向上し、金属メッシュ1の網目を微細な異物Eの通過が阻止される程に小さくしても、流体Gの通過が妨げられることがなく、濾過処理速度及び濾過処理能力のアップを図ることができる。また、異物Eの通過が阻止され、流体Gのみの通過が許容されるため、微細な異物Eを流体Gから確実に分離除去することができる。   In addition, by using the plasma-treated metal mesh 1 as a filter for filtration, the fluid G can be easily removed and the mesh of the metal mesh 1 can be made small enough to prevent the passage of fine foreign matter E. The passage of the fluid G is not hindered, and the filtration processing speed and the filtration processing capacity can be increased. Further, since the passage of the foreign matter E is blocked and the passage of only the fluid G is allowed, the fine foreign matter E can be reliably separated and removed from the fluid G.

また、金属メッシュ1の網目を通過させる際に付与する移送圧が小さくても、流体Gの抜け性能が低下することがなく、大きな移送圧を付与するための大型の装置や機器等を設置する必要がなく、流体Gの移送圧を高めるための装置や機器等を設置する必要がなく、装置及び機器への負荷が低減されるので、濾過装置全体の構成を簡素化することができる。   In addition, even if the transfer pressure applied when the mesh of the metal mesh 1 is passed is small, the removal performance of the fluid G is not deteriorated, and a large apparatus or device for applying a large transfer pressure is installed. There is no need, and it is not necessary to install a device or equipment for increasing the transfer pressure of the fluid G, and the load on the device and equipment is reduced. Therefore, the configuration of the entire filtration device can be simplified.

この発明の構成と、上述の実施例との対応において、
この発明のプラズマ発生手段は、実施例のプラズマ照射装置4に対応するも、
この発明は、上述の実施例の構成のみに限定されるものではなく、請求項に示される技術思想に基づいて応用することができ、多くの実施の形態を得ることができる。
In the correspondence between the configuration of the present invention and the above-described embodiment,
The plasma generating means of the present invention corresponds to the plasma irradiation apparatus 4 of the embodiment,
The present invention is not limited to the configuration of the above-described embodiment, but can be applied based on the technical idea shown in the claims, and many embodiments can be obtained.

金属メッシュの張り付け状態を示す正面図。The front view which shows the sticking state of a metal mesh. 大気圧の環境下におけるプラズマ処理を示す側面図。The side view which shows the plasma processing in the environment of atmospheric pressure. プラズマ処理後の金属メッシュを示す正面図及び部分拡大図、プラズマ被膜が形成された線材を示す拡大断面図。The front view and partial enlarged view which show the metal mesh after a plasma process, and the expanded sectional view which shows the wire in which the plasma film was formed. 乳剤の塗布状態及び印刷パターンの形成状態を示す正面図。The front view which shows the application | coating state of an emulsion, and the formation state of a printing pattern. 乳剤の境界部分を示す正面図及び部分拡大図。The front view and partial enlarged view which show the boundary part of an emulsion. 線材と乳剤の濡れ性を示す部分拡大図。The elements on larger scale which show the wettability of a wire and an emulsion. 金属メッシュ製スクリーンによる印刷状態を示す断面図。Sectional drawing which shows the printing state by the screen made from a metal mesh. 開口部と略合同な転写物の印刷状態を示す断面図。Sectional drawing which shows the printing state of the transcription | transfer material substantially congruent with an opening part. プラズマ処理による非金属性異物の除去率を示すグラフ。The graph which shows the removal rate of the nonmetallic foreign material by plasma processing. 滴定試験における角度の測定方法を示す説明図。Explanatory drawing which shows the measuring method of the angle in a titration test. 図11の角度と照射時間の関係を示すグラフ。The graph which shows the relationship between the angle of FIG. 11, and irradiation time. 減圧した環境下におけるプラズマ処理を示す側面図。The side view which shows the plasma processing in the pressure-reduced environment. 金属メッシュ製フィルタによる濾過状態を示す側面図。The side view which shows the filtration state by the filter made from a metal mesh. 従来例の線材と乳剤の濡れ性を示す正面図及び部分拡大図。The front view and partial enlarged view which show the wettability of the wire and emulsion of a prior art example. スクリーンメッシュに異物が付着した状態を示す正面図。The front view which shows the state which the foreign material adhered to the screen mesh.

符号の説明Explanation of symbols

P…プラズマ
Pa…プラズマ被膜
E…異物
G…流体
1…金属メッシュ
2…線材
3…枠体
4…プラズマ照射装置
5…乳剤
6…開口部
7…転写物
8…転写基材
9…スキージ
10A…プラズマ照射装置
10…減圧室
10a…下部電極
10b…上部電極
11…減圧装置
12…ガス供給部
13…電源
P ... plasma Pa ... plasma coating E ... foreign matter G ... fluid 1 ... metal mesh 2 ... wire 3 ... frame 4 ... plasma irradiation device 5 ... emulsion 6 ... opening 7 ... transfer material 8 ... transfer base material 9 ... squeegee 10A ... Plasma irradiation device 10 ... Decompression chamber 10a ... Lower electrode 10b ... Upper electrode 11 ... Decompression device 12 ... Gas supply unit 13 ... Power supply

Claims (11)

金属メッシュを構成する線材表面の分子結合を、プラズマ発生手段が発生するプラズマにより濡れ性が高くなる状態に表面改質して、
上記プラズマにより表面改質してなる濡れ性の高いプラズマ被膜を線材の表面全体に対して略均一に形成した
金属メッシュの製造方法。
Surface modification of the molecular bond on the surface of the wire constituting the metal mesh to a state where the wettability is increased by the plasma generated by the plasma generating means,
A method for producing a metal mesh, wherein a plasma coating with high wettability formed by surface modification with the plasma is formed substantially uniformly over the entire surface of the wire.
上記線材及びプラズマ被膜の少なくとも一方の表面に、上記プラズマ発生手段が発生するプラズマを衝突させて微細な凹凸を多数形成した
請求項1に記載の金属メッシュの製造方法。
The method for producing a metal mesh according to claim 1, wherein a number of fine irregularities are formed on at least one surface of the wire and the plasma coating by colliding with plasma generated by the plasma generating means.
上記プラズマ被膜を、大気圧又は減圧した環境下にて上記プラズマ発生手段によりプラズマを発生させて形成した
請求項1又は2に記載の金属メッシュの製造方法。
The method for producing a metal mesh according to claim 1 or 2, wherein the plasma coating is formed by generating plasma with the plasma generating means in an environment of atmospheric pressure or reduced pressure.
上記微細な凹凸を、大気圧又は減圧した環境下にて上記プラズマ発生手段が発生するプラズマを衝突させて形成した
請求項1又は2に記載の金属メッシュの製造方法。
The method for producing a metal mesh according to claim 1 or 2, wherein the fine irregularities are formed by colliding with plasma generated by the plasma generating means in an environment of atmospheric pressure or reduced pressure.
上記線材の表面全体に、上記プラズマ発生手段が発生するプラズマを接触又は衝突させて該線材表面から異物を分離除去した
請求項1又は2に記載の金属メッシュの製造方法。
The method for producing a metal mesh according to claim 1 or 2, wherein the foreign matter is separated and removed from the surface of the wire by causing the plasma generated by the plasma generating means to contact or collide with the entire surface of the wire.
金属メッシュを構成する線材の表面全体に、該線材表面の分子結合をプラズマにより表面改質してなる濡れ性の高いプラズマ被膜が略均一に形成されていることを特徴とする
金属メッシュ。
A metal mesh, characterized in that a high wettability plasma coating formed by surface modification of molecular bonds on the surface of the wire by plasma is formed substantially uniformly on the entire surface of the wire constituting the metal mesh.
上記線材及びプラズマ被膜の少なくとも一方の表面に、上記プラズマを衝突させてなる微細な凹凸が多数形成されていることを特徴とする
請求項6に記載の金属メッシュ。
The metal mesh according to claim 6, wherein a number of fine irregularities formed by colliding the plasma are formed on at least one surface of the wire and the plasma coating.
上記プラズマ被膜を、大気圧又は減圧した環境下にて上記プラズマを発生させた際に形成した
請求項6又は7に記載の金属メッシュ。
The metal mesh according to claim 6 or 7, wherein the plasma coating is formed when the plasma is generated in an environment of atmospheric pressure or reduced pressure.
上記微細な凹凸を、大気圧又は減圧した環境下にて上記プラズマを衝突させた際に形成した
請求項6又は7に記載の金属メッシュ。
The metal mesh according to claim 6 or 7, wherein the fine irregularities are formed when the plasma is collided under an atmospheric pressure or a reduced pressure environment.
上記請求項6〜9のいずれか一つに記載の金属メッシュにより印刷用スクリーンを構成した
金属メッシュ製スクリーン。
A metal mesh screen comprising a printing screen made of the metal mesh according to any one of claims 6 to 9.
上記請求項6〜9のいずれか一つに記載の金属メッシュにより濾過用フィルタを構成した
金属メッシュ製フィルタ。
The metal mesh filter which comprised the filter for filtration with the metal mesh as described in any one of the said Claims 6-9.
JP2007028097A 2007-02-07 2007-02-07 Metal mesh Pending JP2007245708A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007028097A JP2007245708A (en) 2007-02-07 2007-02-07 Metal mesh

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007028097A JP2007245708A (en) 2007-02-07 2007-02-07 Metal mesh

Publications (1)

Publication Number Publication Date
JP2007245708A true JP2007245708A (en) 2007-09-27

Family

ID=38590467

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007028097A Pending JP2007245708A (en) 2007-02-07 2007-02-07 Metal mesh

Country Status (1)

Country Link
JP (1) JP2007245708A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010142752A (en) * 2008-12-19 2010-07-01 Seiko Epson Corp Filter, and pressure regulation valve incorporating the same
JP2011178126A (en) * 2010-03-03 2011-09-15 Mitsubishi Electric Corp Method and tool for cleaning metal mask
WO2014189026A1 (en) * 2013-05-20 2014-11-27 太陽化学工業株式会社 Structure and stencil printing plate which have been subjected to wettability-improving surface modification, and processes for producing both
CN107779926A (en) * 2016-08-31 2018-03-09 安平县亚荣星环保科技有限公司 A kind of woven wire with aluminum oxide coating layer
CN113878977A (en) * 2021-08-24 2022-01-04 江苏友迪激光科技有限公司 Screen exposure method and device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010142752A (en) * 2008-12-19 2010-07-01 Seiko Epson Corp Filter, and pressure regulation valve incorporating the same
JP2011178126A (en) * 2010-03-03 2011-09-15 Mitsubishi Electric Corp Method and tool for cleaning metal mask
WO2014189026A1 (en) * 2013-05-20 2014-11-27 太陽化学工業株式会社 Structure and stencil printing plate which have been subjected to wettability-improving surface modification, and processes for producing both
CN105392635A (en) * 2013-05-20 2016-03-09 太阳诱电化学科技株式会社 Structure and stencil printing plate which have been subjected to wettability-improving surface modification, and processes for producing both
JP6067846B2 (en) * 2013-05-20 2017-01-25 太陽誘電ケミカルテクノロジー株式会社 Structure subjected to surface modification treatment for improving wettability, stencil for printing, and method for producing the same
JPWO2014189026A1 (en) * 2013-05-20 2017-02-23 太陽誘電ケミカルテクノロジー株式会社 Structure subjected to surface modification treatment for improving wettability, stencil for printing, and method for producing the same
CN107779926A (en) * 2016-08-31 2018-03-09 安平县亚荣星环保科技有限公司 A kind of woven wire with aluminum oxide coating layer
CN113878977A (en) * 2021-08-24 2022-01-04 江苏友迪激光科技有限公司 Screen exposure method and device

Similar Documents

Publication Publication Date Title
JP2007245708A (en) Metal mesh
KR100283818B1 (en) Manufacturing method of plastic mask for paste printing, Plastic mask and paste printing method for paste printing
JP5514764B2 (en) Screen printing method and apparatus
JP6412547B2 (en) Structure subjected to surface modification treatment for improving wettability, stencil for printing, and method for producing the same
JP5229437B2 (en) Wiring board manufacturing method
WO2006134734A1 (en) Screen printing plate and screen printer
KR20130009855A (en) Screen-printing stencil having amorphous carbon films and manufacturing method therefor
JP2008078657A (en) Manufacturing method of multilayer print circuit board, multilayer print circuit board and vacuum printer
WO2007000833A1 (en) Method for electrically conductive circuit formation
JP2013161871A (en) Printer, and method for manufacturing solar cell using the same
TW201304635A (en) Printing conductive lines
TWI393506B (en) Method of manufacturing circuit board
JP6290417B2 (en) Method for forming a conductive structure on a plastic substrate
Schwanke et al. Enhancement of fine line print resolution due to coating of screen fabrics
JP2008192977A (en) Printing method and printer to plasma-treated transfer base material using plasma-treated metal mesh
KR20120093974A (en) Method for producing perforated or partially perforated stencils with a relief
JPH06183165A (en) Metal mask and production thereof
KR101319943B1 (en) method of patterning metal mesh for transparent electrode and transparent electrode thereby
Khan et al. Substrate treatment evaluation and their impact on printing results for wearable electronics
DE19854036A1 (en) Applying pasty media e.g. adhesive, solder paste, conductive glue etc. to circuit board by transmitting vibration from squeegee to pasty medium
KR100887056B1 (en) Screen print apparatus
JPH07249866A (en) Method of filling curing paste
JP2006327064A (en) Screen printing plate and its manufacturing method
TW201316866A (en) Method for manufacturing reusable paste, reusable paste, and method for manufacturing wiring substrate using reusable paste
KR101055527B1 (en) Repair structure and repair method of pattern part

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070810

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20070810

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20070918

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20071016

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20080112

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20080118

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20080213

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20080218

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20080314

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20080319

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080416

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080513

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20081216