JP2007234720A - Inspection equipment of solar cell panel, film polish inspection method, and process for manufacturing solar cell panel - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide inspection equipment of a solar cell panel in which a film remaining in a solar cell film removing region can be inspected with high precision, and to provide an inspection method. <P>SOLUTION: The inspection equipment of a solar cell panel comprises a moving device for conveying a solar cell panel where a solar cell film is laminated on a transparent substrate and removed from the outer circumferential part, a line illuminator for making illumination light impinge obliquely on the film side surface at the outer circumferential part of the solar cell panel, a camera receiving the illumination light scattered and reflected on the surface of the outer circumferential part, and an image processor for judging existence of a film remaining in the outer circumferential part based on the relation of magnitude between the luminance of red component and the luminance of green component of a light receiving image received by the camera. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a solar cell panel inspection device, and more particularly to a thin film solar cell panel inspection device.

  A solar cell panel in which a solar cell film is laminated on the main surface of a transparent substrate, a copper foil for current collection is installed, and then a back sheet is laminated on the solar cell film via an adhesive sheet Are known.

  As a method for manufacturing such a solar cell panel, as described in Patent Document 1, for example, the following method is known. First, a solar cell film is formed on the entire main surface of the transparent substrate. At this time, the solar cell modules connected in series are formed by repeating the process of cutting the film formed by laser etching into strips after forming the film. Subsequently, after installing the copper foil for current collection, in order to secure the main adhesion / seal surface with the adhesive sheet in order to protect the solar cell module from the external environment, at least a part of the sun on the main surface The battery film is removed to expose the transparent substrate. In removing some of the solar cell films, the solar cell film on the outer peripheral portion of the main surface of the solar cell panel where the solar cell module is present is often removed. Moreover, as a removal method, rotative grinding | polishing grinding | polishing which grind | polishes using a grindstone, and blast grinding | polishing such as sandblasting are mentioned. Thereafter, the adhesive sheet and the back sheet are arranged and bonded by deaeration, pressure bonding, and heating by a vacuum laminating method or the like.

  In the above manufacturing method, when the solar cell film of the main adhesion / seal surface is not completely removed, that is, when there is a residual film, the adhesive strength and adhesion to the adhesive sheet are sufficient. In some cases, a gap may be formed between the adhesive sheet and the substrate. If moisture enters from the outside through the gap, the insulation of the solar cell may be reduced or the solar cell film may be deteriorated, and the product may not be used. In addition, when the conductive film remains, the withstand voltage may be reduced, and a ground fault may occur with the solar cell panel mounting structure. Therefore, it is desirable that the solar cell film is reliably removed from the adhesion / seal surface.

  In order to confirm whether or not the remaining film of the solar cell film is generated, an inspection may be performed after the solar cell film is removed. As a method for the inspection, a visual method or a method using a resistance tester has been adopted.

  Even if the remaining film of the solar cell film is slight, it may cause a problem. Therefore, when inspecting the remaining film, the area with the remaining film should be quantitatively analyzed without leaking the minute remaining film. In addition, it is desired to be implemented.

  Further, when a solar cell film is formed on a large-area substrate having a side length of more than 1 m, the adhesion / seal surface for securing the adhesion / sealability provided by removing the solar cell film is also widened. Inspecting the remaining film on the entire bonding surface in a large-area substrate is a very time-consuming process. Therefore, it is desired that the entire adhesion / seal surface is inspected after the process time is shortened and automated.

  In relation to the above, Patent Document 2 discloses that in order to inspect scratches and foreign matter on the polished surface of a semiconductor wafer, the polished surface is irradiated with light and inspected based on the scattered reflected light. Yes.

Patent Document 3 discloses a color image signal R illuminated by a line illuminator and photographed by a color line sensor in order to automatically inspect foreign matter and pinholes attached to a transparent electrode substrate for a thin film solar cell. , G, and B signal intensity behavior are disclosed.
JP 2003-142717 A Japanese Patent Laid-Open No. 10-233374 Japanese Patent Laid-Open No. 2004-20254

  An object of the present invention is to provide a solar cell panel inspection device and an inspection method capable of accurately inspecting a film residue in a region where a solar cell film is removed.

  Another object of the present invention is to provide a solar cell panel inspection apparatus and inspection method capable of accurately inspecting a film residue in a region where a solar cell film is removed even on a large-area substrate.

  Still another object of the present invention is to provide an inspection apparatus and an inspection method in which an inspection time is shortened in a large-area substrate.

  Hereinafter, means for solving the problem will be described using the numbers and symbols used in the best mode for carrying out the invention. These numbers and symbols are added with parentheses to clarify the correspondence between the description of the claims and the best mode for carrying out the invention. However, these numbers and symbols should not be used for interpreting the technical scope of the invention described in the claims.

  The solar cell panel inspection apparatus (1) according to the present invention includes a solar cell film (3) laminated on a transparent substrate (2) while being cut into strips by a laser etching device, and the solar cell film (3). A line illuminator (6) in which illumination light is incident obliquely on the film-side surface with respect to the solar cell panel (5) from which a part of the illumination panel is removed, and a region (4, 4 ′) where the illumination light removes the film ) In which the film is removed based on the magnitude relationship between the luminance of the red component and the luminance of the green component in the received light image received by the camera (7) and the camera (7) that receives the scattered reflected light in () 4, 4 ′) and an image processing device (8) for determining the presence or absence of a remaining film.

  According to the above-described configuration, the image captured and read by the camera (7) is processed, and the magnitude relationship between the luminance of the red component and the luminance of the green component is compared, thereby removing the solar cell film region ( 4, 4 ′) can be determined by the image processing apparatus (8). That is, the present inventors, in the region (4, 4 ′) where the film is removed, between the portion where the remaining film is present and the normal portion where there is no remaining film, the luminance of the red component and the green component of the scattered reflected light It was found that the magnitude relationship with the brightness was different. Since the detection of the presence or absence of a remaining film by comparing the magnitude relationship of luminance can be performed by an image processing apparatus, the remaining film region can be quickly and inlined for a large-area solar cell panel (5). Inspection can be performed quantitatively. Therefore, the tact time is shortened, and an accurate inspection can be performed. In addition, as will be described later, the reason why the brightness relationship between the red component and the green component is reversed between the remaining film portion and the normal portion without the remaining film in the solar cell film removal method is due to the difference in the surface shape. It is thought that.

  The solar cell panel inspection device (1) according to the present invention further includes a position detection device (9) for detecting the position of the solar cell panel (5). When it is determined that there is a residual film, the image processing device (8) determines the residual film on the transparent substrate (2) based on the position information (P, S) detected by the position detection device (9). The position is specified, and the position of the remaining film is output to the output device (14).

  As described above, the position detection device (9) detects the position of the solar cell panel (5), and based on this, the position of the remaining film on the transparent substrate (2) is specified. It can be known whether the removal of the battery membrane (3) was insufficient. By specifying the position of the remaining film, only the place where the remaining film is generated may be selectively polished when repolishing. Therefore, the time required for re-polishing can be shortened.

  In the solar cell panel inspection apparatus (1) according to the present invention, the focal position of the camera (7) is preferably set on the surface of the solar cell panel (5) on the film surface side.

  The scattered reflection of illumination light may occur not only on the surface of the solar cell panel (5) on the solar cell film surface side but also on the surface of the opposite transparent substrate forming the solar cell film (3). If the camera (7) receives the reflected light reflected on the opposite surface, it may hinder accurate inspection. Since the focal position of the camera (7) is set on the surface on the solar cell film surface side, the influence of reflection on the surface of the transparent substrate on the opposite side can be eliminated and more accurate inspection can be performed.

  Moreover, it is preferable that the area | region (4, 4 ') from which the film | membrane was removed is an outer peripheral part (4, 4') of the area | region used as a solar cell module.

  The solar cell panel inspection device (1) according to the present invention further includes a moving device (11) for transporting the solar cell panel (5), and a rotation for rotating the solar cell panel (5) by 90 ° within the plane in the transport direction. An apparatus (10). The solar cell panel (5) has a rectangular shape. The region (4, 4 ') from which the film has been removed is a plurality of line-like regions parallel to any one of the four sides of the solar cell panel. The moving device (11) conveys the solar cell panel (5) so that the pair of sides of the solar cell panel (5) is substantially parallel to the moving direction. The camera (7) and the line illuminator (6) are provided in each of the front stage and the rear stage of the rotating device (11). The camera (7) and the line illuminator (6) are respectively moved in the moving direction of the solar cell panel (5) in the region (4, 4 ′) where the film is removed in each of the front stage and the rear stage of the rotating device (11). Is provided so as to photograph a region (4, 4 ′) substantially parallel to the image.

  As described above, the camera (7) and the line illuminator (6) are provided in the same number as the line-shaped region from which the solar cell film is removed, and the outer peripheral portion (4) of the solar cell panel (5). ) First inspecting the line-shaped region parallel to the transport direction, and then inspecting the line-shaped region after removing the remaining solar cell film after rotating by the rotating device (10), without stopping the flow of the production line Can be inspected continuously.

  In the solar cell panel inspection apparatus (1) according to the present invention, the line illuminator (6) has an irradiation light of 20 ° ± 5 ° with respect to an orthogonal plane orthogonal to the moving direction of the solar cell panel (5). It arrange | positions so that it may enter with an angle. The camera (7) is preferably arranged so as to receive reflected light scattered and reflected at an angle of 30 ° ± 5 ° with respect to the orthogonal plane.

  In the solar cell panel inspection device (1) according to the present invention, when the removal of the solar cell film (3) is by grinding stone, the image processing device (8) When the luminance is higher than the luminance of the green component, it is determined that there is no remaining film. Further, when the luminance of the red component of the received light image is smaller than the luminance of the green component, it is determined that there is a remaining film.

  On the polished surface by the grinding wheel polishing, the luminance of the red component is larger than the luminance of the green component in the normal portion without the remaining film, and the luminance of the red component is smaller than the luminance of the green component in the portion where the remaining film is generated. Therefore, by setting it as the above structures, the remaining film in the case where a solar cell film (3) is removed by grinding | polishing of a grindstone can be determined.

  In the solar cell panel inspection device (1) according to the present invention, when the removal of the solar cell film (3) is by blast polishing, the image processing device (8) When the luminance is higher than the luminance of the red component, it is determined that there is no remaining film. Further, when the luminance of the green component of the received light image is smaller than the luminance of the red component, it is determined that there is a remaining film.

  On the polished surface by blast polishing, the luminance of the red component is lower than the luminance of the green component in the normal portion without the remaining film, and the luminance of the red component is higher than the luminance of the green component in the portion where the remaining film is generated. Therefore, with the above-described configuration, it is possible to determine the remaining film when the solar cell film (3) is removed by blast polishing.

The method for inspecting the film polishing of a solar cell panel according to the present invention comprises a solar cell film (3) on a transparent substrate (2).
Is the surface of the solar cell film side of the region (4, 4 ') where the film has been removed with respect to the solar cell panel (5) from which a part of the solar cell film (3) film has been removed The step of making the illumination light incident obliquely (step S311), the step of receiving the reflected light of the illumination light reflected on the surface of the region (4, 4 ′) where the film has been removed (step S313), and the reflection A remaining film detecting step (step S316) for detecting the presence or absence of a remaining film based on the magnitude relationship between the luminance of the red component and the luminance of the green component of the received light image.

  The film polishing inspection method for a solar cell panel according to the present invention further includes a step (step S312) of detecting the position of the solar cell panel (5) being conveyed. When a residual film is detected in the residual film detection step (S316), information indicating the position of the detected residual film on the solar cell panel (5) is output to the output device (14).

  In the film polishing inspection method for a solar cell panel according to the present invention, when the removal of the solar cell film (3) is removed by grindstone polishing, in the remaining film detection step (S316), When the luminance of the component is smaller than the luminance of the green component, it is determined that there is a remaining film.

  In the film polishing inspection method for a solar cell panel according to the present invention, when the removal of the solar cell film (3) is by blast polishing, in the remaining film detection step (S316), the luminance of the green component of the received light image Is smaller than the luminance of the red component, it is determined that there is a remaining film.

  The method for manufacturing a solar cell panel according to the present invention includes a step (step SS10) of forming a solar cell film (3) on the main surface of the transparent substrate (2) and a part on the main surface of the transparent substrate (2). The step of removing the solar cell film (3) (step S20) and the presence or absence of the remaining film in the region (4, 4 ′) from which the solar cell film (3) has been removed are determined by a film polishing inspection method for solar cell panels. Based on the inspection step (step S30) and the result of the inspection, if there is a remaining film region, repolishing is performed, and the solar cell panel (5) determined to have no remaining film region is subjected to the subsequent solar Performing a manufacturing process of the battery panel, and forming an adhesive sheet (12) so as to cover the solar cell film (3) in the manufacturing process (step S40).

  ADVANTAGE OF THE INVENTION According to this invention, the test | inspection apparatus and test | inspection method of a solar cell panel which can test | inspect the film remainder of the area | region which removed the solar cell film with sufficient precision are provided.

  According to the present invention, there is further provided a solar cell panel inspection apparatus and inspection method that can accurately inspect the remaining film in the region where the solar cell film has been removed, even if the polished surface is extensive. Is done.

(First embodiment)
(Constitution)
Embodiments of the present invention will be described. The solar cell panel inspection apparatus 1 according to the present embodiment inspects whether or not the film on the periphery of the solar cell panel 5 has been properly removed.

  First, the configuration of the solar cell panel 5 to be inspected will be described with reference to FIG. The solar cell panel 5 is obtained by laminating a solar cell film 3 on the main surface of a rectangular transparent substrate 2.

  The transparent substrate 2 has a rectangular shape. An example of the transparent substrate 2 is a glass substrate. In the present embodiment, a soda float glass substrate (1.4 m × 1.1 m × plate thickness; 4 mm) is used and the entire transparent substrate 2 is not divided into small solar cell panels as a solar cell module. explain. In addition, the solar cell module described in this specification indicates a region where the solar cell film 3 is formed after the solar cell panel is completed.

  Although not shown in FIG. 14, the solar cell film 3 has a transparent conductive layer, a photoelectric conversion layer, and a back electrode layer. A transparent conductive layer, a photoelectric conversion layer, and a back electrode layer are laminated in this order from the transparent substrate 2 side. An example of the transparent conductive layer is a tin oxide film. As the photoelectric conversion layer, microcrystalline silicon p layer, i layer, n layer laminated, amorphous silicon p layer, i layer, n layer laminated, microcrystalline silicon pin layer and amorphous silicon pin A tandem type, a triple type, or the like in which a plurality of layers are stacked can be used. Examples of the back electrode layer include an Ag film. A Ga-doped ZnO film may be provided between the photoelectric conversion layer and the back electrode layer.

  The solar cell film 3 has a plurality of solar cells. Each solar cell is strip-shaped, and the long sides are arranged next to each other in parallel. The plurality of solar cells are connected in series.

  In the outer peripheral part 4 of the transparent substrate 2, the surface of the transparent substrate 2 is exposed. This is to secure an adhesion / seal surface with the adhesive sheet 12 when the solar cell film 3 is covered with the adhesive sheet 12 in a subsequent process. That is, after the solar cell panel 5 is completed, the solar cell film 3 in the region that becomes the outer peripheral portion 4 of the solar cell module is removed, and the surface of the transparent substrate 2 is exposed. After the solar cell film 3 is provided on the entire main surface of the transparent substrate 2, the outer peripheral portion 4 is subjected to grinding stone polishing or blast polishing to remove the solar cell film 3, and a part of the surface layer of the transparent substrate 2 Is also polished, and the surface of the transparent substrate 2 is exposed.

  The solar cell panel inspection apparatus 1 according to the present embodiment inspects whether or not the solar cell film 3 has been properly removed from the outer peripheral portion 4.

  With reference to FIG.1 and FIG.7, the structure of the inspection apparatus 1 of a solar cell panel is demonstrated. The inspection device 1 includes a moving device 11, a 90 ° rotating conveyor (rotating device) 10, a line illuminator 6, a color line sensor camera (camera) 7, an image processing device 8, a position detecting device 9, and a display device. (Output device) 14 and a dimmer 13.

  The moving device 11 carries the solar cell panel 5 to be inspected in the horizontal state and carries it in the carrying direction (Y direction). As shown in FIG. 7, the solar cell panel 5 to be inspected is washed with a water washing device after the solar cell film 3 on the outer peripheral portion 4 of the solar cell panel is removed by the film polishing device, and an air knife. Etc., and is transported to the inspection apparatus 1. The moving device 11 conveys the two sides of the solar cell panel 5 substantially in parallel with the conveying direction (Y direction). In the following description, the transport direction may be referred to as the Y direction, and the direction orthogonal to this in the horizontal plane may be referred to as the X direction. The solar cell panel 5 conveyed to the inspection apparatus 1 is inspected by an apparatus including a color line sensor camera 7 installed on each of two sides parallel to the conveyance direction in the previous inspection, and then rotated by 90 °. 10 is rotated 90 ° in a horizontal plane. It is conveyed again by the moving device 11, and the same inspection is performed for the remaining two sides in the subsequent inspection.

  The line illuminator 6 is provided with a total of four units including two units (6A, 6B) for the pre-inspection and two units (6C, 6D) for the post-inspection. Each line illuminator 6 is fixed above the moving device 11 so as to illuminate each of two sides of the outer peripheral portion 4 parallel to the Y direction. The illumination light emitted from the line illuminator 6 is incident obliquely and illuminates the surface in a line shape parallel to the X direction. As such a line illuminator 6, for example, a fluorescent lamp can be used. The line illumination is preferably slit light in order to make the irradiated part clear. The line illuminator 6 is connected to the dimmer 13 and the brightness is adjusted by the dimmer 13.

  Similarly to the line illuminator 6, the color line sensor camera 7 is also provided with two units (7A, 7B) for the previous stage inspection and two units (7C, 7D) for the subsequent stage inspection. Each color line sensor camera 7 is fixed above the moving device 11 so as to photograph the surface of the outer peripheral portion 4 of the solar cell panel illuminated by the line illuminator 6 (portion that is line-shaped in the X direction). Has been. That is, the color line sensor camera 7 is disposed obliquely so that the reflected light is reflected by the illumination light scattered and reflected at the outer peripheral portion 4 on the surface of the solar cell panel 5. That is, a light scattering imaging method is employed in which slit light is irradiated on the substrate surface and the reflected and scattered light on the same axis is captured by the color line sensor camera.

  FIG. 2 is a diagram for explaining the arrangement of a pair of line illuminators 6 and a color line sensor camera 7. The line illuminator 6 is arranged so that the angle (incident angle) formed by the incident direction of the illumination light and the orthogonal plane orthogonal to the transport direction is 20 °. On the other hand, the color line sensor camera 7 is disposed so as to receive the scattered reflected light having an angle (reflection angle) of 30 ° with respect to the orthogonal plane among the reflected light. Here, the region from which the solar cell film 3 has been removed reflects the scattered light because of the unevenness of the surface. In detecting the reflected scattered light with high accuracy, the incident angle is preferably 20 ° ± 5 °, more preferably 20 °, from the viewpoint of the accuracy of determination of the light reflected by the presence or absence of the remaining film. ° ± 2 °. On the other hand, the reflection angle is preferably in the range of 30 ° ± 5 °, more preferably 30 ° ± 2 °.

  The focal position of the color line sensor camera 7 is set on the upper surface of the solar cell panel 5. The focal position of the color line sensor camera 7 is preferably set within a range of ± 1 mm from the surface. By focusing the color line sensor camera 7 on the upper surface of the solar cell panel 5, it is possible to prevent scattered light reflected from the surface of the transparent substrate 2 on the side opposite to the solar cell film 3 from being received. Therefore, a more accurate inspection can be performed.

  In addition, the optical system from which the illumination light emitted from the line illuminator 6 is scattered and reflected on the surface and enters the color line sensor camera 7 is a housing that is difficult to transmit or reflect light such as blackening (see FIG. Etc.). Since the optical system is shielded from light, accurate inspection can be performed without being affected by light from the outside.

  FIG. 1 is a diagram schematically showing a configuration in the pre-inspection. Note that the same configuration is used in the subsequent inspection. The color line sensor camera 7 is connected to the image processing device 8. The color line sensor camera 7 transmits the captured image (light reception image signal) to the image processing device 8 in response to an instruction from the image processing device 8. The received light image signal includes red component luminance information R indicating the luminance of the red component, green component luminance information G indicating the luminance of the green component, and blue component luminance information B indicating the luminance of the blue component.

  Next, the position detection device 9 will be described. The position detection device 9 includes a photoelectric switch 91 and a rotary encoder 92. These are connected to the image processing apparatus 8.

  The photoelectric switch 91 detects whether or not the leading end portion of the solar cell panel 5 that has been conveyed has reached the incident position of the illumination light, that is, the line-shaped photographing position photographed by the color line sensor camera 2. When the photoelectric switch 91 detects that the solar battery panel 5 has reached the photographing position, the photoelectric switch 91 generates an inspection start signal S and notifies the image processing device 8 of it.

  The rotary encoder 92 generates a pulse signal P for each set rotation angle, that is, every time the solar battery panel 5 moves a set distance, and notifies the image processing apparatus 8 of the pulse signal P.

  The display device 14 realizes a function of displaying the inspection result by the image processing device 8 and notifying the operator of the result. When there is a remaining film at a predetermined position in the area where the solar cell film of the solar cell panel 5 is removed, data may be recorded as a processing abnormality corresponding to the ID number provided for each solar cell panel.

  Next, the image processing apparatus 8 will be described with reference to FIG. The image processing apparatus 8 has a CPU and a memory, and realizes its function by an installed program. FIG. 3 is a block diagram showing the configuration of the image processing apparatus 8. The image processing apparatus 8 includes a position detection unit 81, a smoothing unit 82, an image shift correction unit 83, an inspection region setting unit 84, a remaining film detection unit 85, a determination unit 86, an imaging control unit 87, and an image forming unit as computer programs. 88 and a substrate region specifying part 89.

  The imaging control unit 87 transmits the trigger signal T to the color line sensor camera 7 every time the pulse signal P is received after obtaining the inspection start signal S from the photoelectric switch 91. Each time the color line sensor camera 7 receives the trigger signal T, the color line sensor camera 7 captures an image and transmits a received light image signal to the image processing device 8.

  Based on the inspection start signal S and the pulse signal P, the position detector 81 captures which position (coordinate position in the Y direction) of the received image signal acquired from the color line sensor camera 7 on the solar cell panel 5. Find out if Then, this position information is associated with the received image signal.

  When the solar battery panel 5 passes the shooting position and acquires the light reception image signal for the entire side parallel to the Y direction, the image forming unit 88 two-dimensionally stores the light reception image signal acquired based on the position information on the memory. Arrange. Thereby, the two-dimensional image which shows the surface of the edge | side parallel to a Y direction among the outer peripheral parts 4 of the solar cell panel 5 is formed.

  The board | substrate area | region specific | specification part 89 detects the position of the solar cell panel 5 on the obtained two-dimensional image. This is because the image taken by the color line sensor camera 7 may include an area other than the film removal area of the solar cell panel 5, and it is necessary to determine the remaining film of the solar cell panel 5. This is because the position area needs to be specified. The smoothing unit 82 further performs a smoothing process on the two-dimensional image. The image misalignment correcting unit 83 automatically corrects misalignment of the two-dimensional image with respect to a slight misalignment of the transport position of the solar battery panel by a conveyor roller or the like.

  On the two-dimensional image, an area where the presence or absence of the remaining film should be determined, that is, the outer peripheral portion 4 of the solar cell panel from which the solar cell film 3 has been removed is set.

  The remaining film detecting unit 85 compares the intensity of the red component and the intensity of the green component in the set inspection region to detect the presence or absence of the remaining film. The detection of the remaining film differs depending on the method of removal of the solar cell film 3. Below, the criteria for each of the blast polishing and the grinding wheel polishing will be described.

During grinding of the grinding wheel;
The case where the removal of the solar cell film 3 is by polishing using a grindstone (rotary grindstone polishing) will be described. In the present embodiment, a case where the surface layer of the transparent substrate 2 is polished with a silicon carbide-based abrasive (# 400 to 800) at a feed rate of 10 to 20 m / min and a processing depth of 1 to 5 μm will be described. The arithmetic average roughness Ra of the surface of the outer peripheral portion 4 of the solar cell panel parallel to the transport direction obtained at this time is 0.1 (μm) in the transport direction (Y direction) and 0.3 (μm) in the X direction. ), A streak-like polishing path remains in each side direction around the solar cell panel 5.

  In the case of the rotating grindstone polishing, the remaining film detection unit 85 refers to the two-dimensional image and determines that it is normal when the luminance of the red component is larger than the luminance of the green component. On the other hand, when the luminance of the red component is smaller than the luminance of the green component, it is determined that the remaining film is generated. FIG. 4 is a diagram conceptually showing a state of determination at this time. FIG. 4A shows a luminance line distribution (X direction) in a normal state (no remaining film), and FIG. 4B shows a line of a portion where the remaining film is generated in a part of the area removed from the solar cell film 3. Distribution is shown. As shown in FIG. 4A, in a normal portion without a remaining film, the luminance R of the red component is stronger than the luminance G of the green component. On the other hand, in the example shown in (b), the luminance G of the green component partially exceeds the luminance R of the red component. It has been found that the portion where the luminance G of the green component exceeds the luminance R of the red component corresponds to the remaining film portion. The remaining film detection unit 8 performs such luminance comparison in units of pixels, and detects the presence or absence of the remaining film by connecting the inspection target regions. Further, the detection result of the remaining film is displayed on the display device and is stored in a storage device (not shown).

  Here, when there is a remaining film, the position of the remaining film on the solar cell panel 5 is specified based on the position information obtained by the position detection unit 81, and the position of the remaining film is displayed on the display device 14. To display. By displaying the position of the remaining film, the operator can know which part of the solar cell panel 5 was not sufficiently polished. Even if it is necessary to polish again, it is not necessary to polish the entire outer peripheral portion 4 of the solar cell panel, and only the necessary portion can be selectively polished. That is, the process time and cost for re-polishing are reduced.

  The determination unit 86 determines whether or not re-polishing is necessary based on the detection result of the remaining film detection unit 85. The determination unit 86 determines whether or not the luminance G of the green component is higher than a predetermined value (first threshold; THL1) with respect to the luminance R of the red component in units of pixels. Then, the ratio of the number of pixels having the intensity of THL1 or more to the number of pixels in the inspection area is obtained as the remaining film ratio. That is, the remaining film rate is obtained as “remaining film rate (%) = number of pixels of (G / R> THL1) / (number of pixels in the inspection region) × 100”.

  Furthermore, the determination unit 86 determines whether the obtained remaining film rate is larger or smaller than a predetermined value (second threshold; THL2). As a result of the determination, if the remaining film ratio is larger than THL2, it is determined that re-polishing is necessary, and the result is displayed on the display device 14. On the other hand, when the remaining film rate is smaller than THL2, it is determined that there is no remaining film and the polishing is normally performed, and the result is displayed on the display device 14. In a practical mass production line, THL2 is set to a value close to 0 to manage yield.

During blast polishing;
Next, the criteria for determining the remaining film during blast polishing will be described. In the present embodiment, a case will be described in which blast polishing is performed so that the surface layer of the transparent substrate 2 is polished with alumina (# 400 to 800) as an abrasive and an injection pressure of 0.1 to 0.5 MPa. The arithmetic average roughness Ra of the surface of the outer peripheral portion 4 of the solar cell panel parallel to the transport direction obtained at this time is 1.2 (μm) in the transport direction (Y direction) and 1.1 (μm) in the X direction. ) And there are uneven polishing marks remaining on the entire surface.

  When the remaining film detecting unit 85 is removed by blast polishing in this way, the remaining film detecting unit 85 determines that the remaining film is generated when the luminance of the green component is smaller than the luminance of the red component. FIG. 5 is a diagram conceptually showing a state of determination at this time. FIG. 5A shows the line distribution (X direction) of the luminance at the normal time (no remaining film), and FIG. 5B shows the line distribution of the remaining film portion. As shown in FIG. 5A, in a normal part without a remaining film, the luminance G of the green component is stronger than the luminance R of the red component. On the other hand, in the example shown in (b), the luminance R of the red component exceeds the luminance G of the green component in part. Thus, it was found that the portion where the luminance R of the red component exceeds the luminance G of the green component corresponds to the remaining film portion. The remaining film detection unit 8 performs such luminance comparison on a pixel-by-pixel basis, connects the inspection target regions, and displays the detection result of the presence or absence of the remaining film on the display device 14. The detection result is stored in a storage device (not shown).

  Here, as in the grinding of the grindstone, when there is a residual film, it is preferable to display the position of the residual film on the solar cell panel 5 on the display device 14. By displaying the position of the remaining film, the operator can know which part of the solar cell panel 5 was not sufficiently polished. Therefore, when polishing again, there is no need to polish the entire outer peripheral portion 4 of the solar cell panel, and only the remaining film portion can be selectively polished. That is, the process time and cost for re-polishing are reduced.

  The determination unit 86 determines whether or not re-polishing is necessary based on the detection result of the remaining film detection unit 85. The determination unit 86 determines whether or not R is an intensity greater than or equal to a predetermined value (third threshold; THL3) with respect to G in units of pixels, and the ratio of the inspection area to the number of pixels is left. Obtained as the film rate. That is, the remaining film ratio is obtained as “remaining film ratio (%) = number of pixels of (G / R> THL3) / (number of pixels in the inspection region) × 100”.

  The determination unit 86 determines whether the obtained remaining film rate is larger or smaller than a predetermined value (fourth threshold; THL4). As a result of the determination, if the remaining film rate is larger than THL4, it is determined that re-polishing is necessary, and the result is displayed on the display device 14. On the other hand, when the remaining film rate is smaller than THL4, it is determined that there is no remaining film and the polishing is normally performed, and the result is displayed. These determination results are stored in a storage device (not shown). In a practical mass production line, THL4 is set to a value close to 0 to manage yield.

  As described above, when the grindstone is polished and the blast polishing is performed, the magnitude relationship between the luminance R of the red component and the luminance G of the green component is reversed when determining the presence or absence of the remaining film in a part of the area removed from the solar cell film 3. It has become. This is presumably because the surface of the transparent substrate 2 after the removal of the solar cell film 3 has a different uneven shape, so that the state of scattered light is different due to the difference in R and G wavelengths.

(Operation method)
Next, the operation of the solar cell panel film polishing inspection method according to the present embodiment will be described. FIG. 6 is a flowchart showing a flow of operation of the film polishing inspection method for solar cell panels. As shown in FIG. 6A, the solar cell panel 5 that has been transported to the inspection apparatus 1 is first inspected for two sides parallel to the transport direction in the pre-inspection step (S31). When the pre-inspection step (S31) is completed, the solar cell panel 5 is rotated 90 ° in the horizontal plane by the 90 ° rotating conveyor 10 (90 ° rotating step S32). In the subsequent inspection step (S33), the remaining two sides are inspected. Details of the operation of the pre-inspection step (S31) will be described below. In addition, the operation | movement in a back | latter stage inspection step (S33) is the same as that of a front | former stage inspection step (S31), and abbreviate | omits description.

  FIG. 6B is a flowchart showing the operation flow of the pre-inspection step (S31). Details of the operation of each step will be described in detail below.

Step S311: Step of irradiating illumination light First, the line illuminator 6 emits slit-like illumination light.

Step S312; Substrate Position Detection Step Subsequently, when the solar cell panel 5 is conveyed to the inspection apparatus 1 and the tip reaches the photographing position of the color line sensor camera 7, the photoelectric switch 91 detects the arrival of the solar cell panel 5. The photoelectric switch 91 generates an inspection start signal S and transmits it to the image processing apparatus 8 (S3121). The image processing apparatus 8 that has acquired the inspection start signal S recognizes that the inspection has started (S3122). When the substrate moves by a predetermined distance, the rotary encoder 7 generates a pulse signal P and transmits it to the image processing apparatus 8 (S3123). When acquiring the pulse signal P, the image processing device 8 generates a trigger signal T and transmits it to the color line sensor camera 7 (S3124).

Step S313: Shooting Step The color line sensor camera 7 that has received the trigger signal T images the surface of the solar cell panel 5, and sends it to the image processing device 8 as a received image signal C having image information for one line in the X direction. Send. Photographing is performed until the solar battery panel 5 passes the photographing position (S3131).

Step S314: Image Capture Step The image processing apparatus 8 stores the received image signal C sent one after another in the memory in association with position information indicating which part of the solar cell panel 5 is the image. The position information can be generated based on the inspection start signal S and the pulse signal P. When the image processing device 8 obtains the received image signal C for the entire one side of the outer peripheral portion 4 of the solar cell panel, a two-dimensional image representing one side of the surface of the outer peripheral portion 4 of the solar cell panel is obtained based on the position information. Form.

Step S315; Image Processing Step Subsequently, the image processing apparatus 8 performs a smoothing process (step S3151), a substrate region specifying process (S3152), and an image shift correction process (step S3153) on the two-dimensional image. Automatic correction of image shift during substrate transport. Furthermore, the image processing apparatus 8 specifies a region to be inspected for the presence of a remaining film in the region where the solar cell film 3 has been removed (step S3154).

Step S316: Residual Film Detection Step Subsequently, the image processing apparatus 8 inspects the presence or absence of a residual film in the inspection region specified in the inspection region setting step. Here, as described above, the inspection is performed by comparing the intensities of the red component luminance R and the green component luminance G with reference to the image. Corresponding to the polishing method, the R / G or G / R value is compared with a threshold value to determine the presence or absence of the remaining film in units of pixels, and when the remaining film is detected by connecting the inspection target regions The image processing device 8 displays on the display device 14 the fact that there is a remaining film and information for specifying the position of the remaining film in association with each other. Moreover, the test result of the presence or absence of the remaining film and the position of the remaining film are stored in a storage device (not shown) in comparison with the ID number that becomes the manufacturing number of the solar cell panel 5.

Step SS317; Determination Step Further, the image processing apparatus 8 determines whether or not it is necessary to polish the solar cell panel 5 again based on the detection result in the remaining film detection step (S316). As described above, the necessity of re-polishing is “remaining film ratio (%) = (R / G> THL) pixel number / (inspection area pixel number) × 100”, and the remaining film ratio is a predetermined value. This is done by determining whether it is greater than or equal to the threshold.
The image processing device displays the determination result on the display device 14 to notify the operator, and stores it in a storage device (not shown) in comparison with the ID number of the solar battery panel 5.

  As described above, the remaining film is inspected on two sides parallel to the Y direction in the pre-inspection step (S31). In the subsequent inspection step (S33), the same inspection is performed on the remaining two sides, and the inspection on the entire four sides of the outer peripheral portion 4 is completed.

  The operations after the image processing step (S315) may be performed collectively instead of separately in the pre-stage inspection and the post-stage inspection. That is, the image processing, the remaining film detection, and the determination may be performed after the image of the entire four sides of the outer peripheral portion 4 is taken into the image processing apparatus 8.

  In the present embodiment, the case where four line illuminators 6 and four color line sensor cameras 7 are fixed and provided has been described. However, as shown in FIG. The illuminator 6 and the color line sensor camera 7 may be moved relative to the solar cell panel 5 so that the four sides of the outer peripheral portion 4 of the solar cell panel go around. Moreover, as shown in FIG.13 (b), you may move so that each group may test | inspect two sides using two sets of line illuminators and the color line sensor camera 7. FIG. Thus, the time which concerns on the rotation process by the 90 degree | times rotation conveyor 10 by moving the line illuminator 6 and the color line sensor camera 7 relatively with respect to the outer peripheral part 4 of the solar cell panel 5 which moves. Can be omitted.

(Solar cell panel manufacturing method)
This invention is also a manufacturing method of the solar cell panel using the film | membrane polishing test | inspection method of a solar cell. Here, an example in which a single-layer amorphous silicon thin film solar cell is used as the solar cell film 3 on a glass substrate as the transparent substrate 2 will be described. FIG. 8 is a flowchart of a method for manufacturing a solar cell panel according to the present embodiment. Moreover, FIGS. 9-12 is schematic which shows embodiment of the manufacturing method of the solar cell panel of this invention.

  As shown in the flowchart of FIG. 8, the method for manufacturing a solar cell panel includes a step of forming a solar cell film (step S10), a step of polishing an outer peripheral portion of the solar cell panel (step S20), and an inspection of the remaining film. A step (Step S30), and a step (Step S40) of attaching an adhesive sheet and a back sheet by installing a copper foil for collecting current. Details of each step will be described in detail below.

Step S10: Step of Forming Solar Cell Film First, the solar cell film 3 is formed on the main surface of the transparent substrate 2. With reference to FIG.9 and FIG.10, the step which forms the solar cell film | membrane 3 is demonstrated below.
(1) FIG. 9 (a):
A soda float glass substrate (1.4 m × 1.1 m × plate thickness: 4 mm) is used as the transparent substrate 2. It is desirable that the end face of the substrate is corner chamfered or rounded to prevent breakage.
(2) FIG. 9B:
As the transparent conductive layer 2, a transparent electrode film mainly composed of a tin oxide film (SnO2) is about 500 to 80
Film formation is performed at about 500 ° C. using a thermal CVD apparatus at 0 nm. At this time, a texture with appropriate irregularities is formed on the surface of the transparent electrode film. As the transparent conductive layer 2, in addition to the transparent electrode film, an alkali barrier film (not shown) may be formed between the substrate 1 and the transparent electrode film. The alkali barrier film is a silicon oxide film (SiO2) of 50 to 150 nm and about 50 nm by a thermal CVD apparatus.
Film formation is performed at 0 ° C.
(3) FIG. 9 (c):
Thereafter, the transparent substrate 2 is placed on the XY table, and the first harmonic (1064 nm) of the laser diode-pumped YAG laser is incident from the film surface side of the transparent electrode film as indicated by the arrow in the figure. Pulse oscillation: Adjusting the laser power so as to be suitable for the processing speed as 5 to 20 kHz, the width of the transparent electrode film is formed so as to form the groove 35 in the direction perpendicular to the series connection direction of the power generation cells 5. Laser etching into 6-10 mm strips.
(4) FIG. 9 (d):
Using a plasma CVD apparatus, a p-layer film / i-layer film / n-layer film composed of an amorphous silicon thin film as the photoelectric conversion layer 3 is sequentially formed at a reduced pressure atmosphere of 30 to 150 Pa and about 200 ° C. The photoelectric conversion layer 33 is formed on the transparent conductive layer 31 using SiH 4 gas and H 2 gas as main raw materials. The p-layer, i-layer, and n-layer are stacked in this order from the sunlight incident side. In this embodiment, the photoelectric conversion layer 33 is a p-layer: B-doped amorphous SiC and a film thickness of 10 to 30 nm, an i-layer: amorphous Si and a film thickness of 250-350 nm, and an n-layer: p-doped microcrystalline Si. The film thickness is 30 to 50 nm. A buffer layer may be provided between the p layer film and the i layer film in order to improve the interface characteristics.
(5) FIG. 9 (e)
The transparent substrate 2 is placed on an XY table, and the second harmonic (532 nm) of the laser diode-pumped YAG laser is incident from the film surface side of the photoelectric conversion layer 33 as shown by the arrow in the figure. Pulse oscillation: 10 to 20 kHz, the laser power is adjusted so as to be suitable for the processing speed, and laser etching is performed so that the groove 36 is formed on the side of about 100 to 150 μm of the laser etching line of the transparent conductive layer 2. .
(6) FIG. 10 (a)
As the back electrode layer 34, an Ag film and a Ti film are sequentially formed by a sputtering apparatus at about 150 ° C. in a reduced pressure atmosphere. In this embodiment, the back electrode layer 4 is formed by stacking an Ag film: 200 to 500 nm and a Ti film having a high anticorrosive effect: 10 to 20 nm in this order as a protective film. For the purpose of reducing contact resistance between the n-layer and the back electrode layer 34 and improving light reflection, a GZO (Ga-doped ZnO film) film thickness between the photoelectric conversion layer 33 and the back electrode layer 34: 50 to 100 nm, sputtering apparatus May be provided by forming a film.
(7) FIG. 10 (b)
The transparent substrate 2 is placed on an XY table, and the second harmonic (532 nm) of the laser diode-pumped YAG laser is incident from the transparent substrate 2 side as indicated by the arrow in the figure, so that the laser light is photoelectrically generated. The back electrode layer 34 is exploded and removed using the high gas vapor pressure that is absorbed by the conversion layer 33 and generated at this time. Pulse oscillation: 1 to 10 kHz, the laser power is adjusted so as to be suitable for the processing speed, and laser etching of the lateral side of about 250 μm to 400 μm of the laser etching line of the transparent conductive layer 31 is performed so as to form the groove 37. .
(8) FIG. 10 (c)
The power generation region is divided to eliminate the influence that the serial connection portion due to laser etching is likely to be short-circuited at the film edge around the substrate edge. The transparent substrate 2 is placed on an XY table, and the second harmonic (532 nm) of the laser diode-pumped YAG laser is incident from the transparent substrate 2 side, so that the laser light is transmitted through the transparent conductive layer 31 and the photoelectric conversion layer 33. The back electrode layer 4 is exploded and removed using the high gas vapor pressure generated at this time. The laser power is adjusted so that the processing speed is appropriate for pulse oscillation: 1 to 10 kHz, and laser etching is performed at a position of 5 to 15 mm from the end of the transparent substrate 2 so as to form an X-direction insulating groove. At this time, no Y-direction insulating groove is provided. The groove 36 terminates the etching at a position of 5 to 10 mm from the end of the transparent substrate 2. The etching may be terminated by stopping the laser beam, but can be dealt with simply by installing a metallic masking plate in the non-laser etching region of the substrate 1. The etching is terminated at a position of 5 to 10 mm from the end of the transparent substrate 2, so that a groove trace crossing to the end of the substrate is not left in the transparent substrate 2 in the region where the solar cell film 3 is removed. Effective in suppressing external moisture intrusion from the edge of the panel.

Step S20: Step of polishing the outer periphery In the step of forming the solar cell film 3, the solar cell film 3 is formed on the entire main surface of the transparent substrate 2. In order to secure a healthy main adhesion / seal surface with the back sheet via the adhesive sheet in the subsequent process, the solar cell film 3 formed on the outer peripheral portion 4 of the transparent substrate 2 is removed, and the transparent substrate 2 is exposed. Let In order to prevent a part of the transparent electrode film from remaining and lowering the withstand voltage, the surface layer of the transparent substrate 2 may be further removed. Examples of the removal method include a rotating grindstone polishing using a grindstone and a blast polishing using a sandblast. Depending on this removal method (polishing method), the inspection method used when inspecting the remaining film in a subsequent process is different. In this embodiment, both the case where the rotating grindstone is polished and the case where the blasting using the sandblast is performed will be described.

For grinding wheel grinding;
The outer peripheral portion 4 of the solar cell panel is polished under the conditions of silicon carbide-based abrasive (# 400 to # 800) and processing depth: 1 to 5 μm. The shape of the surface of the outer peripheral portion 4 obtained in this way has an arithmetic average roughness Ra of 0.3 μm (X direction) and 0.1 μm (Y direction), and is about 0. 0 in the peripheral direction of the solar cell panel. There were wrinkle-like polishing marks of about 1 μm. Polishing debris and abrasive grains are removed by cleaning the transparent substrate 2.

For blast polishing;
Alumina (# 400 to # 800) is used as the abrasive. This is injected from the nozzle at an injection pressure of 0.1 to 0.5 MPa, and the solar cell film 3 on the outer peripheral portion 4 of the solar cell panel is removed. In addition, about the part which is not removed, the transparent substrate 2 can be exposed by removing the solar cell film | membrane 3 in the outer peripheral part 4 by protecting with a masking material. In order to prevent a part of the transparent electrode film from remaining and lowering the withstand voltage, the surface layer of the transparent substrate 2 may be further removed. As described above, the surface of the outer peripheral portion 4 of the solar cell panel obtained by blast polishing has an arithmetic average roughness Ra of 1.1 μm (X direction) and 1.2 μm (Y direction), and unevenness of about 1 μm as a whole. There were polishing marks. Polishing debris and abrasive grains are removed by cleaning the transparent substrate 2.

Step S30: Inspecting the remaining film (S30)
After the outer peripheral portion 4 of the solar cell panel is polished, the remaining film is inspected. That is, according to the solar cell panel film polishing inspection method described above, the presence / absence of remaining film on the outer peripheral portion 4 of the solar cell panel and the necessity of re-polishing are determined. The solar cell panel 5 determined to be unnecessary for re-polishing proceeds to Step S40. On the other hand, the solar cell panel determined to need re-polishing returns to step S20, and at least the remaining film portion of the outer peripheral portion 4 of the solar cell panel is polished again.

Step S40: Adhesion of Adhesive Sheet and Back Sheet A copper foil for current collection is installed on the solar cell panel 5 determined not to be re-polished, and the back sheet is laminated through the adhesive sheet. The attachment is done. FIG. 11B to FIG. 12 are diagrams for explaining this situation.
(1) FIG. 11 (b)
At the terminal box mounting part, an opening through window is provided in the back sheet, and the copper foil current collector plate is taken out. Processing so that power can be taken out from the terminal box portion on the back side of the solar cell panel by collecting copper foil from the one end solar cell 5 and the other end solar cell 5 in series. To do. In order to prevent a short circuit with each part, the copper foil arranges an insulating sheet wider than the copper foil width. After the current collecting copper foil and the like are arranged at a predetermined position, an adhesive sheet made of EVA (ethylene vinyl acetate copolymer) or the like is arranged so as to cover the entire solar cell module 6 and not to protrude from the solar cell panel 5. . A back sheet having a high waterproofing effect is installed on the EVA. In this embodiment, the back sheet has a three-layer structure of PTE sheet / AL foil / PET sheet so that the waterproof and moisture proof effect is high. The EVA is cross-linked and closely adhered while the inside of the back sheet at a predetermined position is deaerated with a laminator in a reduced pressure atmosphere and pressed at about 150 to 160 ° C.
(2) FIG. 12 (a)
A terminal box is attached to the back side of the solar cell module 6 with an adhesive.
(3) FIG. 12 (b)
The copper foil and the output cable of the terminal box are connected with solder or the like, and the inside of the terminal box is filled with a sealing agent (potting agent) and sealed. Thus, the solar cell panel 5 is completed.

  As described above, according to the present embodiment, by comparing the magnitude relationship between the luminance of the red component and the luminance of the green component, the remaining film in the region where the solar cell film is removed by the image processing device 8 is compared. The presence or absence can be determined. Therefore, the inspection can be performed as an automatic inline inspection. That is, the tact time for inspection is shortened. In addition, since a method of evaluating the magnitude relationship of brightness with the inspection position of the substrate is used, quantitative evaluation of the presence or absence of the remaining film and the position of the remaining film can be performed.

  Furthermore, the solar cell panel manufactured using the film polishing inspection method according to the present embodiment is more accurately inspected for the residual film on the adhesive surface, and therefore has more problems due to poor adhesion between the adhesive sheet and the substrate. It is definitely prevented.

(Second Embodiment)
A second embodiment of the present invention will be described. In 1st Embodiment, the transparent substrate 2 was not divided | segmented but the case where the substantially whole transparent substrate 2 was made into a solar cell module was demonstrated. On the other hand, in this Embodiment, after forming the solar cell film | membrane 3 in the transparent substrate 2, it differs in the point which divides | segments a board | substrate and obtains a several small solar cell panel from the one transparent substrate 2. FIG. .

  The solar cell panel 5 can be made into a small solar cell panel 5 ′ by cutting a solar cell film 3 on the transparent substrate 2 while cutting it into a strip shape with a laser etching device into a plurality of pieces. It is. At this time, the portion of the planned cutting line becomes the outer peripheral portion 4 ′ of the small solar cell panel 5 ′ after cutting, and this is the main adhesion / seal region. Therefore, when the small solar cell panel 5 ′ is manufactured by cutting into a plurality of pieces, it is necessary to remove the solar cell film 3 in the vicinity of the planned cutting line.

  Accordingly, in the first embodiment, the camera and the line illuminator are installed at a position corresponding to the outer peripheral portion 4 of the solar cell panel 5, whereas in this embodiment, the solar cell after being divided. It is installed at a position corresponding to the outer periphery of the panel 5. In the following description, the divided solar cell panel is referred to as a small solar cell panel 5 ′ in order to distinguish it from the solar cell panel 5 before division. Further, the outer periphery of the small solar cell panel 5 ′ is denoted by reference numeral 4 ′ and is described as the outer periphery 4 ′.

  FIG. 14 is a diagram for explaining how the solar cell panel 5 is divided in the present embodiment. As shown in FIG. 14A, the planned cutting line 50 is set in a state where the solar cell film 3 is formed on the entire surface of the transparent substrate 2. The planned cutting line 50 is set in a cross shape so as to divide the rectangular transparent substrate 2 into four equal parts.

  Subsequently, as shown in FIG. 14B, the solar cell film 3 around the planned cutting line 50 is removed. Further, the solar cell film 3 on the outer peripheral portion of the transparent substrate 2 is also removed. That is, in the small solar cell panel 5 ′, the solar cell film 3 in the region that becomes the outer peripheral portion 4 ′ of the solar cell module is removed.

  Subsequently, an inspection for the presence or absence of a remaining film is performed on the region (outer peripheral portion 4 ′) from which the solar cell film 3 has been removed. FIG. 15 is a diagram showing the arrangement of the color line sensor camera 7 and the line illuminator 6. Three sets of the color line sensor camera 7 and the line illuminator 6 are provided in the front inspection and three in the rear inspection. Each set of the color line sensor camera 7 and the line illuminator 6 shoots by irradiating slit light to an area parallel to the transport direction in the area (outer peripheral part 4 ′) from which the solar cell film 3 is removed. In the position. In other words, each set of the color line sensor camera 7 and the line illuminator 6 includes 3 parts each of two sides parallel to the transport direction of the solar cell panel 5 and the center part of the substrate in each of the upstream inspection and the downstream inspection. It is provided at a position corresponding to the location.

  Note that the image processing method for detecting the presence or absence of the remaining film is the same as that in the first embodiment, and thus the description thereof is omitted.

  Referring to FIG. 14 again, as shown in FIG. 14C, solar cell panel 5 determined to have no problem based on the result of the presence / absence of the remaining film is cut along cutting planned line 50. Thus, one solar cell panel 5 is divided into four small solar cell panels 5 '. Similar to the first embodiment, the installation of the copper foil for collecting current, the attachment of the adhesive sheet and the back sheet, and the terminal box are performed on each small solar panel 5 ′, and the small solar panel 5 ′. Is completed.

  As in the present embodiment, the solar cell film 3 is removed at positions other than the outer peripheral portion 4 by devising the arrangement of the color line sensor camera 7 and the line illuminator 6 in the pre-stage inspection and the post-stage inspection. Also for the panel 5, a quantitative inspection of the presence or absence of the remaining film and the position of the remaining film can be performed in an automatic in-line.

It is a block diagram of the inspection apparatus which concerns on this invention. It is a figure which shows arrangement | positioning of a line illuminator and a line sensor camera. It is a block diagram of an image processing apparatus. It is a conceptual diagram explaining the method of remaining film detection at the time of rotary grindstone grinding | polishing. It is a conceptual diagram explaining the method of remaining film detection at the time of blast grinding | polishing. It is a flowchart which shows the flow of operation | movement of a film | membrane polishing test | inspection method. It is a flowchart which shows the flow of operation | movement of a film | membrane polishing test | inspection method. It is a figure which shows the flow of the manufacturing line of a solar cell panel. It is a flowchart which shows the manufacturing method of the solar cell panel which concerns on this invention. It is the schematic which shows embodiment of the manufacturing method of a solar cell panel. It is the schematic which shows embodiment of the manufacturing method of a solar cell panel. It is the schematic which shows embodiment of the manufacturing method of a solar cell panel. It is the schematic which shows embodiment of the manufacturing method of a solar cell panel. It is a figure which shows a motion of a color line sensor camera and a line illuminator. In 2nd Embodiment, it is a figure explaining the mode of a cutting | disconnection of a solar cell panel. In 2nd Embodiment, it is a figure which shows arrangement | positioning of a color line sensor camera and a line illuminator.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Inspection apparatus 2 Transparent substrate 3 Solar cell film 31 Transparent conductive layer 32 Power generation cell 33 Photoelectric conversion layer 34 Back surface electrode layer 4 Outer peripheral part 4 'Outer peripheral part 5 Solar cell panel 5' Small solar cell panel 6 Line illuminator 7 Color line Sensor camera 8 Image processing device 81 Position detection unit 82 Smoothing unit 83 Image displacement correction unit 84 Inspection region setting unit 85 Residual film detection unit 86 Judgment unit 87 Imaging control unit 88 Image forming unit 89 Substrate region specifying unit 9 Position detection device 91 Photoelectric switch 92 Rotary encoder 10 90 ° rotating conveyor 11 Moving device 12 Adhesive sheet 13 Dimmer 14 Display device 15 Back sheet 50 Scheduled cutting line

Claims (13)

A line illuminator for laminating a solar cell film on a transparent substrate and allowing illumination light to enter the film side surface obliquely with respect to the solar cell panel from which a part of the solar cell film is removed, and
A camera that receives the scattered reflected light reflected by the area where the illumination light is removed from the film;
An image processing device that determines the presence or absence of a remaining film in the region where the film is removed based on the magnitude relationship between the luminance of the red component and the luminance of the green component of the received light image received by the camera;
A solar cell panel inspection apparatus comprising: A solar cell panel inspection apparatus according to claim 1,
Furthermore,
A position detection device for detecting the position of the solar cell panel;
Comprising
When the image processing apparatus determines that there is a remaining film, the position of the remaining film on the transparent substrate is specified based on the position information detected by the position detection device, and the position of the remaining film is output to the output device. A solar panel inspection device that outputs An inspection apparatus for a solar cell panel according to claim 1 or 2,
The focus position of the camera is a solar cell panel inspection apparatus set on the film-side surface of the solar cell panel. An inspection apparatus for a solar cell panel according to any one of claims 1 to 3,
The area | region which removed the said film | membrane is the test | inspection apparatus of the solar cell panel which is the outer peripheral part of the area | region used as a solar cell module. An inspection apparatus for a solar cell panel according to any one of claims 1 to 4,
Furthermore,
A moving device for conveying the solar cell panel;
A rotating device for rotating the solar cell panel by 90 ° in a plane in the conveying direction;
Comprising
The solar cell panel is rectangular,
The region from which the film has been removed is a plurality of line-like regions parallel to any one of the four sides of the solar cell panel,
The moving device conveys the solar cell panel so that a pair of sides of the solar cell panel is substantially parallel to a moving direction,
The camera and the line illuminator are provided in each of a front stage and a rear stage of the rotating device,
The camera and the line illuminator are provided so as to photograph an area substantially parallel to the moving direction of the solar cell panel in the area where the film is removed in each of the front stage and the rear stage of the rotating device. Inspection device for solar panel. An inspection apparatus for a solar cell panel according to any one of claims 1 to 5,
The line illuminator is disposed so that the irradiation light is incident at an angle of 20 ° ± 5 ° with respect to an orthogonal plane orthogonal to the moving direction of the solar cell panel,
The said camera is a solar cell panel inspection apparatus arrange | positioned so that the reflected light scattered and reflected by the angle of 30 degrees +/- 5 degrees with respect to the said orthogonal plane may be received. An inspection apparatus for a solar cell panel according to any one of claims 1 to 6,
When the removal of the outer peripheral film was by grinding stone,
The image processing apparatus includes:
An inspection apparatus for a solar cell panel, which determines that there is a remaining film when the luminance of the red component of the received light image is smaller than the luminance of the green component. An inspection apparatus for a solar cell panel according to any one of claims 1 to 7,
When the removal of the solar cell film was by blast polishing,
An inspection apparatus for a solar cell panel, which determines that there is a remaining film when the luminance of the green component of the received light image is smaller than the luminance of the red component. The step of causing the illumination light to enter obliquely on the film-side surface of the solar cell panel in which the solar cell film is laminated on the transparent substrate and a part of the film is removed;
Receiving a reflected light of the illumination light reflected in the region where the film is removed by a camera;
Based on the magnitude relationship between the luminance of the red component and the luminance of the green component of the received light image received by the camera, a residual film detection step for detecting the presence or absence of a residual film;
A method for inspecting film polishing of a solar cell panel comprising: It is the film | membrane polishing test | inspection method of the solar cell panel described in Claim 9, Comprising:
Furthermore,
Identifying the position on the solar cell panel for the received light image received by the camera;
Comprising
In the remaining film detection step, when a remaining film is detected, a film polishing inspection method for a solar cell panel that outputs information indicating a position of the detected remaining film on the solar cell panel to an output device. It is the film | membrane polishing test | inspection method of the solar cell panel described in Claim 9 or 10,
When the removal of the solar cell film was performed by grindstone polishing,
A film polishing inspection method for a solar cell panel, wherein in the remaining film detection step, it is determined that there is a remaining film when the luminance of the red component of the received light image is smaller than the luminance of the green component. A film polishing inspection method for a solar cell panel according to any one of claims 9 to 11,
When the removal of the solar cell film was performed by blast polishing,
A film polishing inspection method for a solar cell panel, wherein in the remaining film detecting step, it is determined that there is a remaining film when a luminance of a green component of the received light image is smaller than a luminance of a red component. Forming a solar cell film on the main surface of the transparent substrate;
Removing a part of the solar cell film on the main surface of the transparent substrate;
The step of inspecting the remaining film by the film polishing inspection method for a solar cell panel according to any one of claims 8 to 11, with respect to the region from which the solar cell film has been removed,
A step of forming an adhesive sheet so as to cover the solar cell film with respect to the solar cell panel determined to be unnecessary to be repolished based on the result of the inspection;
The manufacturing method of the solar cell panel which comprised.

Images