JP2007230234A5 - - Google Patents

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Publication number
JP2007230234A5
JP2007230234A5 JP2007024152A JP2007024152A JP2007230234A5 JP 2007230234 A5 JP2007230234 A5 JP 2007230234A5 JP 2007024152 A JP2007024152 A JP 2007024152A JP 2007024152 A JP2007024152 A JP 2007024152A JP 2007230234 A5 JP2007230234 A5 JP 2007230234A5
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Japan
Prior art keywords
flow path
side wall
forming
layer
manufacturing
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Pending
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JP2007024152A
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Japanese (ja)
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JP2007230234A (en
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Priority to JP2007024152A priority Critical patent/JP2007230234A/en
Priority claimed from JP2007024152A external-priority patent/JP2007230234A/en
Publication of JP2007230234A publication Critical patent/JP2007230234A/en
Publication of JP2007230234A5 publication Critical patent/JP2007230234A5/ja
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Claims (9)

インクを吐出するためのエネルギー発生素子、及び、該エネルギー発生素子にインクを供給するための供給口を有する基板と、
該基板上に形成され、インクを吐出するための吐出口、及び、該吐出口と前記供給口とを連通する流路を形成するための流路形成部材と、
該流路形成部材の一部である流路の側壁と基板との間に設けられた密着層とを備えたインクジェット記録ヘッドの製造方法であって、
前記基板上に前記密着層を形成するための密着材料を積層する工程と、
該密着材料上に感光性材料を積層し、露光及び現像により前記流路形成部材の一部となる流路の側壁を成形する工程と、
成形した該流路の側壁をマスクとして、前記密着材料をパターニングして密着層を成形する工程と、
前記流路の側壁上に、流路形成部材の一部となる層を貼り合わせる工程と、
該層に吐出口を形成する工程とを有することを特徴とするインクジェット記録ヘッドの製造方法。 An energy generating element for discharging ink, and a substrate having a supply port for supplying ink to the energy generating element;
A discharge port for discharging ink formed on the substrate, and a flow path forming member for forming a flow path connecting the discharge port and the supply port ;
A method of manufacturing an ink jet recording head comprising an adhesive layer provided between a side wall of a flow path that is a part of the flow path forming member and a substrate ,
Laminating an adhesion material for forming the adhesion layer on the substrate;
Laminating a photosensitive material on the adhesive material, and forming a side wall of a flow path that becomes a part of the flow path forming member by exposure and development ;
Using the formed side wall of the flow path as a mask, patterning the adhesion material to form an adhesion layer;
Bonding a layer to be a part of the flow path forming member on the side wall of the flow path;
And a step of forming an ejection port in the layer. 前記流路の側壁を成形する感光性材料と、前記流路の側壁上に貼り合わせる層とが同じ組成の材料であることを特徴とする請求項１に記載のインクジェット記録ヘッドの製造方法。 2. The method of manufacturing an ink jet recording head according to claim 1 , wherein the photosensitive material for forming the side wall of the flow path and the layer to be bonded onto the side wall of the flow path are made of the same material . 前記密着材料のパターニングはドライエッチングにより行うことを特徴とする請求項１又は２に記載のインクジェット記録ヘッドの製造方法。 3. The method of manufacturing an ink jet recording head according to claim 1, wherein the patterning of the adhesive material is performed by dry etching . 前記密着材料が、ポリエーテルアミド樹脂を含有することを特徴とする請求項１から３のいずれか１項に記載のインクジェット記録ヘッドの製造方法。 The adhesion material, method for manufacturing an ink jet recording head according to any one of claims 1 to 3, characterized in that it contains a polyether amide resin. 前記密着材料が、エポキシ樹脂を含有することを特徴とする請求項１から３のいずれか1項に記載のインクジェット記録ヘッドの製造方法。 The adhesion material, method for manufacturing an ink jet recording head according to any one of claims 1 to 3, characterized in that it contains an epoxy resin. インクを吐出するためのエネルギー発生素子、及び、該エネルギー発生素子にインクを供給するための供給口を有する基板と、
該基板上に形成され、インクを吐出するための吐出口、及び、該吐出口と前記供給口とを連通する流路を形成するための流路形成部材と、
該流路形成部材の一部である流路の側壁と基板との間に設けられた密着層とを備えたインクジェット記録ヘッドの製造方法であって、
前記基板上に前記密着層を形成するための感光性を有する密着材料を積層する工程と、
該密着材料上に前記流路形成部材の一部となる流路の側壁を成形するための感光性材料を積層する工程と、
該感光性材料と前記密着材料とを一括してパターニングして密着層及び流路の側壁を成形する工程と、
該流路の側壁上に、流路形成部材の一部となる層を貼り合わせる工程と、
該層に吐出口を形成する工程とを有することを特徴とするインクジェット記録ヘッドの製造方法。 An energy generating element for discharging ink, and a substrate having a supply port for supplying ink to the energy generating element;
A discharge port for discharging ink formed on the substrate, and a flow path forming member for forming a flow path connecting the discharge port and the supply port;
A method of manufacturing an ink jet recording head comprising an adhesive layer provided between a side wall of a flow path that is a part of the flow path forming member and a substrate,
Laminating an adhesive material having photosensitivity for forming the adhesion layer on the substrate;
Laminating a photosensitive material for forming a side wall of a flow path which becomes a part of the flow path forming member on the adhesion material;
Patterning the photosensitive material and the adhesive material together to form an adhesive layer and a side wall of the flow path;
Bonding a layer to be a part of the flow path forming member on the side wall of the flow path;
And a step of forming an ejection port in the layer . 前記流路の側壁を形成する感光性材料と、前記流路の側壁上に貼り合わせる層とが同じ組成の材料であることを特徴とする請求項６に記載のインクジェット記録ヘッドの製造方法。 The method of manufacturing an ink jet recording head according to claim 6, wherein the photosensitive material forming the side wall of the flow path and the layer to be bonded to the side wall of the flow path are made of the same material . 前記密着材料が、ポリエーテルアミド樹脂を含有することを特徴とする請求項６又は７に記載のインクジェット記録ヘッドの製造方法。 8. The method of manufacturing an ink jet recording head according to claim 6, wherein the adhesion material contains a polyetheramide resin . 前記密着材料が、エポキシ樹脂を含有することを特徴とする請求項６又は７に記載のインクジェット記録ヘッドの製造方法。 The method for manufacturing an ink jet recording head according to claim 6, wherein the adhesive material contains an epoxy resin .
JP2007024152A 2006-02-02 2007-02-02 Method of manufacturing ink jet recording head Pending JP2007230234A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007024152A JP2007230234A (en) 2006-02-02 2007-02-02 Method of manufacturing ink jet recording head

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006025777 2006-02-02
JP2007024152A JP2007230234A (en) 2006-02-02 2007-02-02 Method of manufacturing ink jet recording head

Publications (2)

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JP2007230234A JP2007230234A (en) 2007-09-13
JP2007230234A5 true JP2007230234A5 (en) 2010-03-18

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JP5224771B2 (en) * 2007-10-16 2013-07-03 キヤノン株式会社 Manufacturing method of recording head substrate
US8778200B2 (en) 2007-10-16 2014-07-15 Canon Kabushiki Kaisha Method for manufacturing liquid discharge head
JP5800534B2 (en) * 2011-03-09 2015-10-28 キヤノン株式会社 Manufacturing method of substrate for liquid discharge head
JP5520266B2 (en) * 2011-08-29 2014-06-11 富士フイルム株式会社 Method for manufacturing liquid discharge head
JP6270363B2 (en) 2012-09-11 2018-01-31 キヤノン株式会社 Method for manufacturing liquid discharge head
JP6112809B2 (en) * 2012-09-21 2017-04-12 キヤノン株式会社 Method for manufacturing droplet discharge head
JP6000831B2 (en) * 2012-11-30 2016-10-05 キヤノン株式会社 Method for manufacturing liquid discharge head
JP6478741B2 (en) 2015-03-20 2019-03-06 キヤノン株式会社 Method for manufacturing liquid discharge head
JP6900182B2 (en) * 2016-12-16 2021-07-07 キヤノン株式会社 Liquid discharge head and manufacturing method of liquid discharge head
JP7134831B2 (en) * 2018-10-17 2022-09-12 キヤノン株式会社 Manufacturing method of liquid ejection head

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JP2843176B2 (en) * 1991-07-16 1999-01-06 アルプス電気株式会社 Inkjet head
JPH09174838A (en) * 1995-12-22 1997-07-08 Sharp Corp Ink jet head
JP3957920B2 (en) * 1998-06-11 2007-08-15 キヤノン株式会社 Inkjet head manufacturing method
JP3799871B2 (en) * 1999-04-28 2006-07-19 カシオ計算機株式会社 Inkjet printer head manufacturing method
JP2001001515A (en) * 1999-06-18 2001-01-09 Ricoh Co Ltd Method for machining silicon basic body, ink jet head employing silicon basic body and manufacture thereof
JP2001130011A (en) * 1999-08-23 2001-05-15 Matsushita Electric Ind Co Ltd Ink jet head and method of manufacturing same and ink jet recorder
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JP2002144578A (en) * 2000-07-31 2002-05-21 Canon Inc Liquid jet head, method of making the same, head cartridge having the same, and liquid jet apparatus
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