JP2007218722A - Tilt angle sensor - Google Patents

Tilt angle sensor Download PDF

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JP2007218722A
JP2007218722A JP2006039137A JP2006039137A JP2007218722A JP 2007218722 A JP2007218722 A JP 2007218722A JP 2006039137 A JP2006039137 A JP 2006039137A JP 2006039137 A JP2006039137 A JP 2006039137A JP 2007218722 A JP2007218722 A JP 2007218722A
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light receiving
light
receiving element
position detection
bubble tube
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JP4878169B2 (en
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Hayami Kikawa
速見 木川
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Sokkia Co Ltd
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Sokkia Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To reduce the cost of a tilt angle sensor by using a general-purpose light receiving element for the angle detector. <P>SOLUTION: The tilt angle sensor includes a bubble tube 1, a light emitting part 6 placed below the bubble tube, a light receiving element 30 placed above the bubble tube, and an operation part 17 calculating a tilt angle from an output of the receiving element. A mask pattern 20 is disposed between the bubble tube and the receiving element. On the mask pattern, four position detecting light passage windows are disposed in a radial and crucial form while a reference light passage window is disposed in the vicinity of a radial outer end of each position detecting light passage window. The receiving element comprises four two-piece photodetectors. Two light receiving parts of each two-piece photodetector are disposed at positions corresponding to a position detecting light passage window and a reference light passage window, respectively. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、傾斜角を電気信号として取り出す傾斜角検出器に関する。   The present invention relates to a tilt angle detector that extracts a tilt angle as an electrical signal.

電子式測量機には、傾斜角を電気信号として取り出す傾斜角検出器が備えられる。このような傾斜角検出器としては、下記特許文献1に記載されたものが知られている。   The electronic surveying instrument is provided with a tilt angle detector that extracts the tilt angle as an electrical signal. As such an inclination angle detector, the one described in Patent Document 1 below is known.

下記特許文献1に記載された傾斜角検出器を図7〜図9に示す。図7に示したように、この傾斜角検出器は、透明液体5を封入した円形の気泡管1内に気泡4を封入したものであり、傾斜角を電気信号として取り出すために、気泡管1の下方に平行光線3を出射する発光部6を備え、気泡管1の上方に受光素子9を設置している。発光部6は、LED等の光源7と、光源7から放射される光を平行光線にするコリメータレンズ8とからなる。受光素子9は、図8に示したように、中心Oに原点を一致させたXY座標のX軸及びY軸上に4つの位置検出用受光部13、14、15、16を十字形の放射状に配置して備えるとともに、参照用受光部12を備えている。これらの受光部12、13、14、15、16の出力は演算部17へ入力される。   An inclination angle detector described in Patent Document 1 shown below is shown in FIGS. As shown in FIG. 7, this inclination angle detector is one in which bubbles 4 are enclosed in a circular bubble tube 1 in which a transparent liquid 5 is enclosed. In order to take out the inclination angle as an electric signal, the bubble tube 1 Is provided with a light emitting portion 6 that emits a parallel light beam 3, and a light receiving element 9 is provided above the bubble tube 1. The light emitting unit 6 includes a light source 7 such as an LED and a collimator lens 8 that converts light emitted from the light source 7 into parallel rays. As shown in FIG. 8, the light receiving element 9 includes four position detecting light receiving units 13, 14, 15, and 16 on the X and Y axes of the XY coordinates with the origin coincided with the center O in a cross-shaped radial shape. And a reference light receiving portion 12. The outputs of these light receiving units 12, 13, 14, 15, 16 are input to the calculation unit 17.

発光部6から出射された平行光線3は、気泡管1内の透明液体5を透過して受光素子9に入射するが、気泡4では反射され、気泡4は受光素子9上に影10を落とすようになっている。受光素子9の参照用受光部12は、気泡4の影10にかからない位置に配置される。気泡管1が水平になっていると、気泡4の影10の中心が図8に破線で示したように受光素子9の中心Oに位置して、4つの位置検出用受光部13、14、15、16には同じ光量が入射し、4つの位置検出用受光部13、14、15、16は等しい電気信号を出力するので、演算部17は気泡管1が水平と判断できる。気泡管1が傾くと気泡4が移動して、気泡4の影10も図8に実線で示したように移動するので、各位置検出用受光部13、14、15、16から出力される電気信号が個々に変化するので、演算部17は、対になっている位置検出用受光部13と14、15と16の各出力差に基づいて、二軸方向の傾斜角を算出することができる。   The parallel light beam 3 emitted from the light emitting unit 6 passes through the transparent liquid 5 in the bubble tube 1 and enters the light receiving element 9, but is reflected by the bubble 4, and the bubble 4 casts a shadow 10 on the light receiving element 9. It is like that. The reference light receiving portion 12 of the light receiving element 9 is disposed at a position that does not cover the shadow 10 of the bubble 4. When the bubble tube 1 is horizontal, the center of the shadow 10 of the bubble 4 is positioned at the center O of the light receiving element 9 as shown by the broken line in FIG. Since the same amount of light is incident on 15 and 16 and the four position detection light-receiving units 13, 14, 15 and 16 output equal electric signals, the calculation unit 17 can determine that the bubble tube 1 is horizontal. When the bubble tube 1 is tilted, the bubble 4 moves, and the shadow 10 of the bubble 4 also moves as shown by the solid line in FIG. 8, so that the electric power output from each position detection light-receiving unit 13, 14, 15, 16 Since the signals change individually, the calculation unit 17 can calculate the tilt angle in the biaxial direction based on the output difference between the pair of position detection light receiving units 13 and 14, 15 and 16. .

すなわち、図8における傾斜角検出器のX軸方向の傾斜角θx及びY軸方向の傾斜角θyは、気泡管1の上面の曲率半径をR、位置検出用受光部13、14、15、16の幅をD、参照用受光部12の面積をS12、参照用受光部12の出力をV12、位置検出用受光部13、14、15、16の出力をそれぞれV13、V14、V15、V16とすると、それぞれ次の(1)式及び(2)式で求まる。
θx={S12/(2DR)}{(V13−V14)/V12} (1)
θy={S12/(2DR)}{(V15−V16)/V12} (2)
That is, the inclination angle θx in the X-axis direction and the inclination angle θy in the Y-axis direction of the inclination angle detector in FIG. 8 are R for the radius of curvature of the upper surface of the bubble tube 1, and the position detection light receiving units 13, 14, 15, 16. , The reference light receiving unit 12 area is S 12 , the reference light receiving unit 12 output is V 12 , and the position detection light receiving units 13 , 14 , 15, 16 output are V 13 , V 14 , V, respectively. Assuming 15 and V 16 , the following equations (1) and (2) are obtained, respectively.
θx = {S 12 / (2DR)} {(V 13 −V 14 ) / V 12 } (1)
θy = {S 12 / (2DR)} {(V 15 −V 16 ) / V 12 } (2)

この傾斜角θx、θyの算出の際、対になっている位置検出用受光部13と14、15と16の各出力差(V13−V14)、(V15−V16)を参照用受光部12の出力V12で割るのは、温度変化による気泡4の膨張や、受光素子9の感度変化等に起因する傾斜角の誤差を除去するためである。 When calculating the tilt angles θx and θy, reference is made to the output differences (V 13 −V 14 ) and (V 15 −V 16 ) of the paired position detection light receiving units 13 and 14, 15 and 16. The reason for dividing by the output V 12 of the light receiving unit 12 is to remove an error in the tilt angle caused by expansion of the bubble 4 due to temperature change, sensitivity change of the light receiving element 9, and the like.

なお、参照用受光部12は、図9に示したように、各位置検出用受光部13、14、15、16の放射方向外端に近接させて4つ設けてもよい。   As shown in FIG. 9, four reference light receiving sections 12 may be provided close to the radial outer ends of the respective position detection light receiving sections 13, 14, 15, and 16.

特許第2655276号公報Japanese Patent No. 2655276

前記特許文献1に記載の受光素子9は、4つの位置検出用受光部13、14、15、16を十字形の放射状に配置するとともに、参照用受光部12も備えるという特別な形状をしているため、汎用品の受光素子を使用することができず、特注品を使用していた。このため、受光素子9が高価となり、傾斜角検出器の価格も高価になるという問題があった。   The light receiving element 9 described in Patent Document 1 has a special shape in which the four position detecting light receiving portions 13, 14, 15, and 16 are arranged in a cross-shaped radial shape and also includes a reference light receiving portion 12. Therefore, a general-purpose light receiving element cannot be used, and a custom-made product is used. For this reason, there is a problem that the light receiving element 9 is expensive and the price of the tilt angle detector is also expensive.

本発明は、前記問題に鑑みてなされたものであって、傾斜角検出器に汎用品の受光素子を使用することによって、傾斜角検出器のコストダウンをすることを課題とする。   The present invention has been made in view of the above problems, and an object of the present invention is to reduce the cost of the tilt angle detector by using a general-purpose light receiving element for the tilt angle detector.

前記課題を解決するため、請求項1に係る発明は、気泡管と、該気泡管の下方に設置された発光部と、前記気泡管の上方に設置された受光素子と、該受光素子の出力から傾斜角を算出する演算部とを備えた傾斜角検出器において、前記気泡管と前記受光素子との間にマスクパターンが配置され、該マスクパターンには、4つの位置検出光通過窓を十字形の放射状に配置するとともに、前記各位置検出光通過窓の放射方向外端付近に参照光通過窓を配置し、前記受光素子は4つの2分割光検出器を有し、各2分割光検出器の2つの受光部は前記位置検出光通過窓及び前記参照光通過窓それぞれに対応する位置に配置されたことを特徴とする。   In order to solve the above-mentioned problem, the invention according to claim 1 is directed to a bubble tube, a light emitting unit disposed below the bubble tube, a light receiving element disposed above the bubble tube, and an output of the light receiving element. In the inclination angle detector including the calculation unit for calculating the inclination angle from the mask tube, a mask pattern is disposed between the bubble tube and the light receiving element, and the mask pattern includes four position detection light passage windows. The reference light passage window is arranged in the vicinity of the radial direction outer end of each position detection light passage window, and the light receiving element has four two-split photodetectors, and each of the two split light detections. The two light receiving portions of the detector are arranged at positions corresponding to the position detection light passage window and the reference light passage window, respectively.

請求項2に係る発明は、気泡管と、該気泡管の下方に設置された発光部と、前記気泡管の上方に設置された受光素子と、該受光素子の出力から傾斜角を算出する演算部とを備えた傾斜角検出器において、前記気泡管と前記受光素子との間に液晶のマスクパターンが配置され、前記演算部からの指令により、前記マスクパターンに十字形の放射状に配置された4つの位置検出用光通過窓と、該位置検出光通過窓の放射方向外端付近に配置された参照光通過窓とを時間的に交互に形成し、前記受光素子は4つの受光部を有し、各受光部は前記位置検出光通過窓及び前記参照光通過窓に対応した位置に配置されたことを特徴とする。   According to a second aspect of the present invention, there is provided a bubble tube, a light emitting unit disposed below the bubble tube, a light receiving element disposed above the bubble tube, and an operation for calculating an inclination angle from an output of the light receiving element. In a tilt angle detector provided with a liquid crystal part, a liquid crystal mask pattern is disposed between the bubble tube and the light receiving element, and in accordance with a command from the arithmetic unit, the mask pattern is disposed in a cross-shaped radial pattern. Four position detection light passage windows and a reference light passage window arranged in the vicinity of the radially outer end of the position detection light passage window are alternately formed in time, and the light receiving element has four light receiving portions. Each light receiving portion is arranged at a position corresponding to the position detection light passage window and the reference light passage window.

請求項1に係る発明の傾斜角検出器によれば、汎用品の2分割光検出器から受光素子を構成することが可能になって、特注品の受光素子を用いないで済むので、傾斜角検出器のコストダウンをすることができる。   According to the tilt angle detector of the first aspect of the present invention, it is possible to configure a light receiving element from a general-purpose two-divided photodetector, and it is not necessary to use a custom-made light receiving element. The cost of the detector can be reduced.

請求項2に係る発明の傾斜角検出器によれば、汎用品の4分割光検出器又は4つの光検出器から受光素子を構成することが可能になって、特注品の受光素子を用いないで済むので、傾斜角検出器のコストダウンをすることができる。   According to the tilt angle detector of the second aspect of the present invention, it becomes possible to configure a light receiving element from a general-purpose quadrant photodetector or four photodetectors, and a custom-made light receiving element is not used. Therefore, the cost of the tilt angle detector can be reduced.

以下、図面に基づいて、本発明の傾斜角検出器の第1実施例を説明する。図1は、前記傾斜角検出器の縦断面図である。図2は、前記傾斜角検出器のマスクパターンの平面図である。図3は、前記傾斜角検出器の受光素子の平面図である。図4は、前記受光素子を構成する2分割光検出器の平面図である。   Hereinafter, a first embodiment of the tilt angle detector of the present invention will be described with reference to the drawings. FIG. 1 is a longitudinal sectional view of the tilt angle detector. FIG. 2 is a plan view of a mask pattern of the tilt angle detector. FIG. 3 is a plan view of a light receiving element of the tilt angle detector. FIG. 4 is a plan view of a two-divided photodetector constituting the light receiving element.

この傾斜角検出器は、図7〜図9に示した従来の傾斜角検出器と、図1に示したように、気泡管1と受光素子30との間にマスクパターン20を配置することと、図3及び図4に示したように受光素子30の構造が異なることを除いて同じである。したがって、この傾斜角検出器の従来と同じ部分に関しては、図1において、図7と同じ符号を付すに止めて、これ以上の説明は省略し、以下、従来と異なる部分について説明する。   This tilt angle detector includes the conventional tilt angle detector shown in FIGS. 7 to 9 and a mask pattern 20 disposed between the bubble tube 1 and the light receiving element 30 as shown in FIG. 3 and FIG. 4, except that the structure of the light receiving element 30 is different. Accordingly, in FIG. 1, the same reference numerals as those in FIG. 7 are assigned to the same portions of the tilt angle detector as in the prior art, and further description thereof is omitted. Hereinafter, portions different from the prior art will be described.

マスクパターン20は、ガラス製であり、その表面には遮光のために金属膜が蒸着され、エッチングによって光が通過できる窓が形成される。金属膜としては、クロムや酸化クロム等を使用する。そして、図2に示したように、マスクパターン20には、その中心Oに原点を一致させたXY座標のX軸上及びY軸上に沿って長い4つの位置検出光通過窓23、24、25、26を十字形の放射状に配置するとともに、各位置検出光通過窓23、24、25、26の放射方向外端付近に短い参照光通過窓22を配置している。4つの位置検出光通過窓23、24、25、26の放射方向内端は、マスクパターン20の中心Oから所定距離だけ離されている。位置検出光通過窓23、24、25、26及び参照光通過窓22は、ガラス板に酸化クロム等の金属を蒸着させ、各窓23、24、25、26、22部分の金属膜をエッチングにより除去することで形成する。もちろん、マスクパターン20を金属製の板とし、この板を切開して、各窓23、24、25、26、22を形成してもよいし、液晶のマスクパターンとしてもよい。この場合のマスクパターンは、従来技術でマスクパターンを構成することができる。   The mask pattern 20 is made of glass. A metal film is deposited on the surface of the mask pattern 20 to block light, and a window through which light can pass is formed by etching. As the metal film, chromium, chromium oxide or the like is used. As shown in FIG. 2, the mask pattern 20 includes four position detection light passage windows 23, 24 that are long along the X axis and the Y axis of the XY coordinates whose origin is coincident with the center O. 25 and 26 are arranged in a cross-shaped radial shape, and a short reference light passage window 22 is arranged in the vicinity of the radially outer ends of the position detection light passage windows 23, 24, 25 and 26. The inner ends in the radial direction of the four position detection light passage windows 23, 24, 25, 26 are separated from the center O of the mask pattern 20 by a predetermined distance. The position detection light passage windows 23, 24, 25, and 26 and the reference light passage window 22 are made by depositing a metal such as chromium oxide on a glass plate and etching the metal film in each of the windows 23, 24, 25, 26, and 22 portions. It is formed by removing. Of course, the mask pattern 20 may be a metal plate, and the plate may be cut to form the windows 23, 24, 25, 26, 22 or a liquid crystal mask pattern. In this case, the mask pattern can be formed by a conventional technique.

受光素子30は、図4に示したように、長短2つの受光部33、34、35、36、32を有する汎用品である2分割光検出器38を図3に示したように位置検出光通過窓23、24、25、26及び参照光通過窓22に対応した位置に配置している。そして、各2分割光検出器38は、位置検出光通過窓23、24、25、26及び参照光通過窓22に対応した位置に、位置検出光受光部33、34、35、36及び参照光受光部32が位置するように設置される。位置検出光受光部33、34、35、36及び参照光受光部32は、位置検出光通過窓23、24、25、26及び参照光通過窓22より、幅及び長さが若干大きくされている。このため、発光部6から出射された平行光線3は、マスクパターン20の位置検出光通過窓23、24、25、26及び参照光通過窓22を通過して、受光素子30の位置検出光受光部33、34、35、36及び参照光受光部32の上に、それらからはみ出さないように光の像43、44、45、46、42を生じさせる。   As shown in FIG. 4, the light receiving element 30 includes a two-part photodetector 38, which is a general-purpose product having two light receiving portions 33, 34, 35, 36, and 32, which are long and short, as shown in FIG. They are arranged at positions corresponding to the passing windows 23, 24, 25, 26 and the reference light passing window 22. Each of the two-divided light detectors 38 is positioned at positions corresponding to the position detection light passage windows 23, 24, 25, 26 and the reference light passage window 22, and the position detection light receivers 33, 34, 35, 36 and the reference light. It is installed so that the light receiving part 32 is located. The position detection light receivers 33, 34, 35, and 36 and the reference light receiver 32 are slightly larger in width and length than the position detection light passage windows 23, 24, 25, and 26 and the reference light passage window 22. . For this reason, the parallel light beam 3 emitted from the light emitting unit 6 passes through the position detection light passage windows 23, 24, 25, 26 and the reference light passage window 22 of the mask pattern 20 and receives the position detection light of the light receiving element 30. Light images 43, 44, 45, 46, 42 are generated on the parts 33, 34, 35, 36 and the reference light receiving part 32 so as not to protrude from them.

気泡管1が水平なときは、気泡4の影10の中心がマスクパターン20の中心Oに位置して、位置検出光通過窓23、24、25、26を通過した平行光線3は4つの位置検出光受光部33、34、35、36を等しい面積だけ照射し、4つの位置検出光受光部33、34、35、36からは等しい電気信号が出力されるので、演算部17は気泡管1が水平と判断できる。気泡管1が傾いて、気泡4の位置が移動すると、気泡4の影10も移動し、各位置検出光受光部33、34、35、36の受光量が個々に変化する。演算部17は、それぞれの2分割光検出器38の出力について、位置検出光受光部33、34、35、36の出力をそれぞれの参照光受光部32の出力で割って基準化する。傾斜角検出器の対になっている位置検出光受光部33と34、35と36の各基準化した出力の差に基づいて、次の(3)式及び(4)式を用いて、傾斜角検出器の二軸方向の傾斜角θx、θyを算出することができる。
θx={S12/(2DR)}(V13/V12(13)−V14/V12(14)) (3)
θy={S12/(2DR)}(V15/V12(15)−V16/V12(16)) (4)
When the bubble tube 1 is horizontal, the center of the shadow 10 of the bubble 4 is located at the center O of the mask pattern 20, and the parallel rays 3 that have passed through the position detection light passage windows 23, 24, 25, 26 are at four positions. Since the detection light receiving units 33, 34, 35, and 36 are irradiated with the same area, and the same electrical signals are output from the four position detection light receiving units 33, 34, 35, and 36, the calculation unit 17 is the bubble tube 1 Can be judged to be horizontal. When the bubble tube 1 is inclined and the position of the bubble 4 is moved, the shadow 10 of the bubble 4 is also moved, and the received light amounts of the position detection light receiving units 33, 34, 35, and 36 are individually changed. The calculation unit 17 standardizes the outputs of the two-part photodetectors 38 by dividing the outputs of the position detection light receiving units 33, 34, 35, 36 by the outputs of the respective reference light receiving units 32. Based on the difference between the standardized outputs of the position detection light receivers 33 and 34 and 35 and 36 that form a pair of inclination angle detectors, the following equations (3) and (4) are used to The tilt angles θx and θy in the biaxial direction of the angle detector can be calculated.
θx = {S 12 / (2DR )} (V 13 / V 12 (13) -V 14 / V 12 (14)) (3)
θy = {S 12 / (2DR )} (V 15 / V 12 (15) -V 16 / V 12 (16)) (4)

ただし、前記(3)式及び(4)式において、S12には参照光透過窓22の1個の面積を、Rには気泡管1の上面の曲率半径を、Dには位置検出光通過窓23、24、25、26の幅を、V13、V14、V15、V16には、それぞれ位置検出光受光部33、34、35、36の出力を、V12(13)、V12(14)、V12(15)、V12(16)には個々の2分割光検出器38の参照光受光部32の出力を用いる。 However, in the expressions (3) and (4), one area of the reference light transmitting window 22 in S 12, the radius of curvature of the upper surface of the bubble tube 1 to R, the position detection light passes the D The widths of the windows 23, 24, 25, 26 are set to V 13 , V 14 , V 15 , V 16, and the outputs of the position detection light receiving units 33, 34, 35, 36 are respectively set to V 12 (13) , V 12 (14) , V12 (15) , and V12 (16) use the output of the reference light receiving unit 32 of each two-part photodetector 38.

本実施例によれば、汎用品の2分割光検出器38から受光素子30を構成することが可能になって、特注品の受光素子を用いないで済むので、傾斜角検出器のコストダウンをすることができる。   According to the present embodiment, the light receiving element 30 can be configured from the general-purpose two-divided photodetector 38, and it is not necessary to use a custom-made light receiving element, so that the cost of the inclination angle detector can be reduced. can do.

次に、本発明の傾斜角検出器の第2実施例を説明する。図5は、前記傾斜角検出器のマスクパターンの平面図である。図6は、前記傾斜角検出器の受光素子の平面図である。本実施例の傾斜角検出器は、前記第1実施例とはマスクパターン50と受光素子60の構成が相違するのみで、その他は前記第1実施例と同じである。   Next, a second embodiment of the tilt angle detector of the present invention will be described. FIG. 5 is a plan view of a mask pattern of the tilt angle detector. FIG. 6 is a plan view of a light receiving element of the tilt angle detector. The tilt angle detector of the present embodiment is the same as the first embodiment except that the mask pattern 50 and the light receiving element 60 are different from the first embodiment.

マスクパターン50は、通常は不透明で制御電圧をかけられると透明になる液晶パネルからなり、演算部17(図1参照)からの指令により、図5において、実線で示した4つの位置検出光通過窓53、54、55、56と、波線で示した4つの参照光通過窓52とを時間的に交互に切換えて透明にすることにより、両窓53、54、55、56、52を開閉可能としたものである。   The mask pattern 50 is formed of a liquid crystal panel that is normally opaque and becomes transparent when a control voltage is applied. In response to a command from the calculation unit 17 (see FIG. 1), four position detection light passages indicated by solid lines in FIG. The windows 53, 54, 55, 56, 52 can be opened and closed by switching the windows 53, 54, 55, 56 and the four reference light passage windows 52 indicated by the wavy lines alternately in time to be transparent. It is what.

受光素子60は、汎用品である4分割光検出器を用いる。この受光素子60は、中心角90°の扇形の4つの受光部63、64、65、66に分割されており、マスクパターン50の各位置検出光通過窓53、54、55、56及び参照光通過窓52の位置それぞれに対応させて、4分割光検出器の各受光部63、64、65、66を配置する。   The light receiving element 60 uses a general-purpose quadrant photodetector. The light receiving element 60 is divided into four fan-shaped light receiving portions 63, 64, 65, 66 having a central angle of 90 °, and each position detection light passing window 53, 54, 55, 56 of the mask pattern 50 and reference light. Corresponding to the positions of the passage windows 52, the respective light receiving portions 63, 64, 65, 66 of the four-divided photodetector are arranged.

傾斜角の検出の際には、発光部6から平行光線3を出射するとともに、まず、演算部17からの指令により、4つの位置検出光通過窓53、54、55、56のみを開ける。すると、位置検出光通過窓53、54、55、56を通過した平行光線3により、受光素子60の各受光部63、64、65、66には光の像73、74、75、76を生じる。ここで演算部17は各受光部63、64、65、66の出力を読み込む。次に、演算部17からの指令により、4つの位置検出光通過窓53、54、55、56を閉め、4つの参照光通過窓52を開ける。すると、受光素子60の各受光部63、64、65、66には、位置検出光通過窓52を通過した平行光線3により、光の像72を生じる。ここで、演算部17は、各受光部63、64、65、66の出力を読み込む。もちろん、位置検出光通過窓53、54、55、56と参照光通過窓52とを開閉する順序は、この逆でもよい。   When detecting the tilt angle, the parallel light beam 3 is emitted from the light emitting unit 6, and first, only the four position detection light passage windows 53, 54, 55, and 56 are opened by a command from the calculation unit 17. Then, light images 73, 74, 75, and 76 are generated in the respective light receiving portions 63, 64, 65, and 66 of the light receiving element 60 by the parallel light beam 3 that has passed through the position detection light passage windows 53, 54, 55, and 56. . Here, the calculation unit 17 reads the outputs of the light receiving units 63, 64, 65, 66. Next, the four position detection light passage windows 53, 54, 55, and 56 are closed and the four reference light passage windows 52 are opened according to a command from the calculation unit 17. Then, in each of the light receiving portions 63, 64, 65 and 66 of the light receiving element 60, a light image 72 is generated by the parallel light beam 3 that has passed through the position detection light passage window 52. Here, the calculating part 17 reads the output of each light-receiving part 63,64,65,66. Of course, the order of opening and closing the position detection light passage windows 53, 54, 55 and 56 and the reference light passage window 52 may be reversed.

こうして、時間的に交互に位置検出光通過窓53、54、55、56と参照光通過窓52を開閉すると、各位置検出光通過窓53、54、55、56のみを開いたときと、各参照光通過窓52のみを開いたときのそれぞれの各受光部63、64、65、66の出力を交互に読み取ることができる。これで、前記第1実施例と同様に、前記(3)式及び(4)式を用いて、傾斜角検出器の二軸方向の傾斜角θx、θyを算出することができる。ただし、前記(3)式及び(4)式において、S12は参照光透過窓52の1個の面積を、Dは位置検出光通過窓53、54、55、56の幅を、V13、V14、V15、V16は、それぞれ参照光通過窓52を閉じて位置検出光通過窓53、54、55、56を開いたときの各受光部63、64、65、66の出力を、V12(13)、V12(14)、V12(15)、V12(16)は、それぞれ位置検出光通過窓53、54、55、56を閉じて参照光通過窓52を開いたときの各受光部63、64、65、66の出力を用いる。 Thus, when the position detection light passage windows 53, 54, 55, and 56 and the reference light passage window 52 are opened and closed alternately in time, each of the position detection light passage windows 53, 54, 55, and 56 is opened. The outputs of the respective light receiving portions 63, 64, 65, 66 when only the reference light passage window 52 is opened can be read alternately. As in the first embodiment, the tilt angles θx and θy in the biaxial direction of the tilt angle detector can be calculated using the equations (3) and (4). However, in the above formulas (3) and (4), S 12 is the area of one reference light transmission window 52, D is the width of the position detection light passage windows 53, 54, 55, 56, V 13 , V 14 , V 15 , and V 16 are outputs of the light receiving units 63, 64, 65, and 66 when the reference light passage window 52 is closed and the position detection light passage windows 53, 54, 55, and 56 are opened, respectively. V 12 (13) , V 12 (14) , V 12 (15) , and V 12 (16) are respectively when the position detection light passage windows 53, 54, 55, and 56 are closed and the reference light passage window 52 is opened. The outputs of the light receiving units 63, 64, 65, and 66 are used.

本実施例でも、汎用品の4分割光検出器から受光素子60を構成することが可能になって、特注品の受光素子を用いないで済むので、傾斜角検出器のコストダウンをすることができる。   Also in this embodiment, the light receiving element 60 can be configured from a general-purpose four-divided light detector, and it is not necessary to use a custom-made light receiving element, so that the cost of the tilt angle detector can be reduced. it can.

ところで、本発明は、前記実施例に限るものではなく、種々の変形が可能である。たとえば、前記実施例では本発明を円形気泡管に適用したが、本発明は棒状気泡管にも適用可能である。また、前記第2実施例では受光素子60を4分割光検出器から構成したが、受光部が1つだけの光検出器を4つ用いてもよい。また、図1の構成では、1個の光源7で気泡1管全体を照明しているが、位置検出光通過窓23、24、25、26と参照光通過窓22の一対の範囲を照明するように光源を4個配置してもよい。   By the way, the present invention is not limited to the above-described embodiments, and various modifications are possible. For example, although the present invention is applied to a circular bubble tube in the above embodiment, the present invention can also be applied to a rod-shaped bubble tube. In the second embodiment, the light receiving element 60 is constituted by a four-divided photodetector. However, four photodetectors having only one light receiving portion may be used. In the configuration of FIG. 1, the entire bubble 1 tube is illuminated by one light source 7, but a pair of ranges of the position detection light passage windows 23, 24, 25, and 26 and the reference light passage window 22 are illuminated. Thus, four light sources may be arranged.

本発明の第1実施例に係る傾斜角検出器の縦断面図である。It is a longitudinal cross-sectional view of the inclination angle detector which concerns on 1st Example of this invention. 前記傾斜角検出器のマスクパターンの平面図である。It is a top view of the mask pattern of the said inclination angle detector. 前記傾斜角検出器の受光素子の平面図である。It is a top view of the light receiving element of the said inclination angle detector. 前記受光素子を構成する2分割光検出器の平面図である。It is a top view of the 2 split photodetector which comprises the said light receiving element. 本発明の第2実施例に係る傾斜角検出器のマスクパターンの平面図である。It is a top view of the mask pattern of the inclination angle detector which concerns on 2nd Example of this invention. 前記第2実施例に係る傾斜角検出器の受光素子の平面図である。It is a top view of the light receiving element of the inclination angle detector which concerns on the said 2nd Example. 従来の傾斜角検出器の縦断面図である。It is a longitudinal cross-sectional view of the conventional inclination angle detector. 従来の傾斜角検出器の受光素子の平面図である。It is a top view of the light receiving element of the conventional inclination angle detector. 従来の傾斜角検出器の受光素子の別の平面図である。It is another top view of the light receiving element of the conventional inclination angle detector.

符号の説明Explanation of symbols

1 気泡管
6 発光部
17 演算部
20、50 マスクパターン
22、52 参照光通過窓
23、24、25、26、53、54、55、56 位置検出光通過窓
30、60 受光素子
32 参照光受光部
33、34、35、36 位置検出光受光部
63、64、65、66 受光部
DESCRIPTION OF SYMBOLS 1 Bubble tube 6 Light emission part 17 Calculation part 20, 50 Mask pattern 22, 52 Reference light passage window 23, 24, 25, 26, 53, 54, 55, 56 Position detection light passage window 30, 60 Light receiving element 32 Reference light reception Part 33, 34, 35, 36 Position detection light receiving part 63, 64, 65, 66 Light receiving part

Claims (2)

気泡管と、該気泡管の下方に設置された発光部と、前記気泡管の上方に設置された受光素子と、該受光素子の出力から傾斜角を算出する演算部とを備えた傾斜角検出器において、
前記気泡管と前記受光素子との間にマスクパターンが配置され、該マスクパターンには、4つの位置検出光通過窓を十字形の放射状に配置するとともに、前記各位置検出光通過窓の放射方向外端付近に参照光通過窓を配置し、
前記受光素子は4つの2分割光検出器を有し、各2分割光検出器の2つの受光部は前記位置検出光通過窓及び前記参照光通過窓それぞれに対応する位置に配置されたことを特徴とする傾斜角検出器。
Inclination angle detection comprising a bubble tube, a light emitting unit installed below the bubble tube, a light receiving element installed above the bubble tube, and an arithmetic unit for calculating an inclination angle from the output of the light receiving element In the vessel
A mask pattern is disposed between the bubble tube and the light receiving element, and four position detection light passage windows are arranged in a cross-shaped radial pattern in the mask pattern, and a radiation direction of each position detection light passage window. Place a reference beam passage window near the outer edge,
The light receiving element has four two-split light detectors, and two light receiving portions of the two split light detectors are arranged at positions corresponding to the position detection light passage window and the reference light passage window, respectively. A featured tilt angle detector.
気泡管と、該気泡管の下方に設置された発光部と、前記気泡管の上方に設置された受光素子と、該受光素子の出力から傾斜角を算出する演算部とを備えた傾斜角検出器において、
前記気泡管と前記受光素子との間に液晶のマスクパターンが配置され、前記演算部からの指令により、前記マスクパターンに十字形の放射状に配置された4つの位置検出用光通過窓と、該位置検出光通過窓の放射方向外端付近に配置された参照光通過窓とを時間的に交互に形成し、
前記受光素子は4つの受光部を有し、各受光部は前記位置検出光通過窓及び前記参照光通過窓に対応した位置に配置されたことを特徴とする傾斜角検出器。
Inclination angle detection comprising a bubble tube, a light emitting unit installed below the bubble tube, a light receiving element installed above the bubble tube, and an arithmetic unit for calculating an inclination angle from the output of the light receiving element In the vessel
A liquid crystal mask pattern is disposed between the bubble tube and the light receiving element, and in response to a command from the arithmetic unit, four position detection light passing windows disposed in a cross-shaped radial pattern on the mask pattern, A reference light passage window arranged in the vicinity of the radially outer end of the position detection light passage window is alternately formed in time,
The light receiving element has four light receiving portions, and each light receiving portion is arranged at a position corresponding to the position detection light passage window and the reference light passage window.
JP2006039137A 2006-02-16 2006-02-16 Tilt angle detector Expired - Fee Related JP4878169B2 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0242311A (en) * 1988-08-02 1990-02-13 Sokkisha Co Ltd Detector for inclined angle
JPH04269619A (en) * 1991-02-26 1992-09-25 Topcon Corp Inclination-angle detecting device
JP2655276B2 (en) * 1988-08-02 1997-09-17 株式会社ソキア Tilt angle detector
JPH10239052A (en) * 1997-02-21 1998-09-11 Topcon Corp Inclination detecting device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0242311A (en) * 1988-08-02 1990-02-13 Sokkisha Co Ltd Detector for inclined angle
JP2655276B2 (en) * 1988-08-02 1997-09-17 株式会社ソキア Tilt angle detector
JPH04269619A (en) * 1991-02-26 1992-09-25 Topcon Corp Inclination-angle detecting device
JPH10239052A (en) * 1997-02-21 1998-09-11 Topcon Corp Inclination detecting device

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