JP2007209992A - Laser beam machining method, deburring method, and article - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laser beam machining method by which such a problem that the surface state of an article is deteriorated by the adhesion of dross to an article and production of burrs caused by applying machining to the article is solved. <P>SOLUTION: This laser beam machining method includes: the first stage S10 where the laser beam machining is applied to the object part of machining of an object matter of machining; and the second stage S20 where deburring is performed by radiating laser light in a state the optical axis of the laser light is approximately parallel to the contact surface in the object part of deburring of the object article of machining. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a laser processing method, a deburring method, and an article.

  2. Description of the Related Art An injection needle having a hole formed on a side surface or a slope of a distal end of the injection needle is known. According to such an injection needle, since the hole is formed in the side surface and the tip inclined surface of the injection needle, the injection efficiency when injecting drugs, etc. is increased, or the pain experienced by the patient during injection is reduced. (See, for example, Patent Documents 1 and 2).

  FIG. 12 is a figure shown in order to demonstrate the conventional 1st laser processing method described in patent document 1 among these. FIG. 12 (a) is a perspective view showing a laser processing apparatus 800 for performing the conventional first laser processing method, and FIG. 12 (b) shows a drilling process performed by the conventional first laser processing method. FIG.

The first conventional laser processing method is a laser processing method for forming a hole in the side surface of an injection needle, and is performed using a laser processing apparatus 800 as shown in FIG. In the conventional first laser processing method, for example, a plurality of thin tubes 820 made of stainless steel having a diameter of 0.4 mm and an inner diameter of 0.2 mm are prepared, and these thin tubes 820 are mounted on a mounting table 804 of the laser processing apparatus 800. state, while moving appropriately table 802 in the xy direction, is that performing drilling against capillary 820 are sequentially irradiated with pulsed laser light L ₁₁ from YAG laser.

  For this reason, according to the conventional first laser processing method, it is possible to accurately and efficiently manufacture an injection needle having a hole formed in the side surface. As a result, by using such an injection needle, it is possible to increase the injection efficiency when injecting a drug or the like.

FIG. 13 is a diagram for explaining a conventional second laser processing method described in Patent Document 2. In FIG.
The second conventional laser processing method is a laser processing method for forming a hole (medical solution outflow hole 914) on the tip inclined surface of the injection needle. As shown in FIG. 13, the laser beam L is applied to the tip inclined surface of the injection needle 912. ₁₂ is performed. In the second conventional laser processing method, for example, a resin injection needle 912 having a diameter of 50 μm manufactured by plastic molding is prepared, and a spot diameter of 10 μm from the YAG laser with respect to the tip inclined surface of the injection needle 912 is prepared. it is that performs drilling by irradiating a laser beam L ₁₂ degrees.

  For this reason, according to the conventional second laser processing method, it is possible to manufacture a minute injection needle in which a hole (medical solution outflow hole 914) is formed on the tip inclined surface. As a result, by using such a small injection needle, it is possible to reduce the pain experienced by the patient during the injection.

Japanese Patent Laid-Open No. 2-63689 JP 2002-172169 A

  However, in the conventional first laser processing method and the conventional second laser processing method, when drilling is performed, dross adheres to the side surface of the injection needle or the tip inclined surface, or burrs are generated and injection is performed. There is a problem that the surface state of the needle deteriorates. When the surface state of the injection needle deteriorates in this way, the pain experienced by the patient at the time of injection increases, or impurities are easily mixed into the body or the like at the time of injection.

  Note that the problem that the surface condition deteriorates due to the adhesion of dross or the occurrence of burrs is not a problem that occurs only when drilling is performed on an injection needle. This is also a problem that can occur when processing is performed. In addition, such a problem is not a problem that occurs only when a hole is formed in an article, but when a groove is formed in an article or a taper is formed on an article, laser processing is performed on the article by irradiating laser light. If it does, it is a problem that can occur in general as well. Further, such a problem is not only a problem that occurs when processing an article by irradiating a laser beam, but it can also occur when an article is processed using a drill, a punch, or the like.

  Therefore, the present invention has been made to solve such a problem, and the surface state of the article is deteriorated due to adhesion of dross to the article or generation of burrs caused by processing the article. It is an object of the present invention to provide a laser processing method or a deburring method that can solve the problem of performing. It is another object of the present invention to provide an article manufactured by using such a laser processing method or a deburring method.

  In the present specification, “deburring” means improving the surface state of an article that has deteriorated due to adhesion of dross or burrs to the article. That is, “deburring” in the present invention includes improving the surface condition of an article in addition to removing burrs generated on the article and removing dross attached to the article.

(1) The laser processing method of the present invention includes a first step of performing laser processing on a processing target portion in a processing target article, and a deburring target of the processing target article in order to remove burrs generated in the first step. And a second step of performing deburring by irradiating the laser beam in a state where the contact surface at the part and the optical axis of the laser beam are substantially parallel.

  For this reason, according to the laser processing method of the present invention, even if dross adheres to the article or burrs are generated in the first process and the surface condition of the article deteriorates, the second process of deburring is performed. By doing so, it becomes possible to remove dross and burrs generated in the first step. As a result, it is possible to manufacture a quality article having an improved surface condition.

  Note that, as the second step of performing deburring, it is conceivable to apply a deburring method of deburring by irradiating a laser beam (for example, JP-A-7-176555 or JP-A-10-154322). reference.).

  However, in this case, if the deburring is performed simply by irradiating the article with the laser beam, the article will be irradiated with the laser beam that does not contribute to deburring. Therefore, the dross without damaging the article itself. It is not easy to remove only burrs.

  On the other hand, according to the laser processing method of the present invention, deburring is performed by irradiating a laser beam in a state where the contact surface of the processing target article at the deburring target portion and the optical axis of the laser beam are substantially parallel. Therefore, it is possible to prevent the article from being irradiated with laser light that does not contribute to deburring as much as possible, and it is possible to remove only dross and burrs while sufficiently suppressing damage to the article itself.

  In the laser processing method of the present invention, "the state where the contact surface of the workpiece to be deburred and the optical axis of the laser beam is substantially parallel" This means that the angle formed with the optical axis of the laser light is 20 degrees or less.

  In this way, by irradiating the laser beam in a state where the angle is 20 degrees or less, it is possible to prevent the article from being irradiated with the laser beam that does not contribute to deburring as much as possible. It is possible to remove only dross and burrs while sufficiently suppressing the application.

  From this point of view, it is preferable to irradiate the laser light in a state where the angle is 10 degrees or less, and it is more preferable to irradiate the laser light in a state where the angle is 5 degrees or less.

  In the laser processing method of the present invention, the “laser processing” in the first step is a drilling process for forming a hole in an article by laser irradiation, a groove drilling process for forming a groove in the article by laser irradiation, or a laser irradiation. This includes taper processing for forming a taper on the article, and various laser processing for processing the article by laser irradiation.

  In the laser processing method of the present invention, the “contact surface at the deburring target part of the article to be processed” in the second step is not the contact surface at the surface of the dross or burr but the contact surface at the original surface of the article. Means.

(2) In the laser processing method according to the above (1), the laser is used in a state where the distance between the deburring target site and the optical axis of the laser beam along the normal line of the deburring target site is 30 μm or less. It is preferable to irradiate light.

  By adopting such a method, deburring can be performed at a portion where the power density in the laser light is high, so that deburring can be performed efficiently with high productivity.

  From this point of view, it is more preferable to irradiate the laser beam in a state where the distance between the deburring target site along the normal line of the deburring target site and the optical axis of the laser beam is 20 μm or less, and the interval is 10 μm. It is more preferable to irradiate laser light in the following state.

(3) In the laser processing method according to (2) above, a state in which an interval between the deburring target site and the optical axis of the laser beam along the normal line of the deburring target site is 0.5 μm or more. It is preferable to irradiate with laser light.

  By adopting such a method, it becomes possible to irradiate the laser beam with the part to be deburred and the optical axis of the laser beam slightly separated, so that laser light that does not contribute to deburring is used as much as possible in the article. It becomes possible not to irradiate, and it becomes possible to remove only dross and burrs while further sufficiently preventing damage to the article itself.

  From this point of view, it is more preferable to irradiate the laser light in a state where the distance between the deburring target part along the normal line of the deburring target part and the optical axis of the laser light is 1 μm or more, and the distance is 2 μm. It is more preferable to irradiate the laser beam in the above state.

(4) In the laser processing method according to any one of (1) to (3) above, an interval between the deburring target site along the optical axis of the laser beam and the focal point of the laser beam is 100 μm or less. It is preferable to irradiate a laser beam in a state.

  By adopting such a method, deburring can be performed at a portion where the power density in the laser light is high, so that deburring can be performed efficiently with high productivity. In addition, since it is possible to perform deburring at the portion where the laser beam is most focused, it is possible to prevent the article from being irradiated with laser light that does not contribute to deburring as much as possible, and damage the article itself. It becomes possible to remove only dross and burrs while further sufficiently suppressing this.

  From these viewpoints, it is more preferable to irradiate the laser light in a state where the distance between the deburring target site along the optical axis of the laser light and the focal point of the laser light is 50 μm or less, and the distance is 20 μm or less. It is more preferable to irradiate the laser beam in such a state.

(5) The laser processing method according to any one of (1) to (4) is particularly effective when the article to be processed has a cylindrical or columnar shape.

  When the object to be processed has a cylindrical or columnar shape, the surface of the object to be processed is a convex surface, so that it is possible to prevent the article from being irradiated with laser light that does not contribute to deburring as much as possible. Because.

(6) In the laser processing method according to (5) above, in the second step, an angle formed between a plane perpendicular to the central axis of the article to be processed and the optical axis of the laser light is 80 degrees or less. It is preferable to irradiate a laser beam in a state.

  By adopting such a method, the surface of the article along the traveling direction of the laser beam becomes a convex surface having a radius of curvature of a certain degree or more, so that the article is not irradiated with laser light that does not contribute to deburring as much as possible. It becomes possible.

  From this viewpoint, it is more preferable to irradiate the laser beam in a state where the angle formed by the plane perpendicular to the central axis of the article to be processed and the optical axis of the laser beam is 70 degrees or less, and the angle is 60 degrees or less. It is more preferable to irradiate the laser beam in such a state.

  When a spiral hole or groove is formed in an article having a cylindrical shape or a columnar shape, it is preferable to irradiate laser light along a direction orthogonal to the direction in which the spiral hole or groove travels.

(7) In the laser processing method according to any one of (1) to (6), in the second step, laser light is sequentially irradiated onto the deburring target portion on the surface of the processing target article. However, it is preferable to remove burrs.

  By setting it as such a method, it becomes possible to perform deburring over the whole surface of the article to be processed.

(8) In the laser processing method according to any one of (1) to (7), it is preferable that the first step and the second step are successively performed using the same laser processing apparatus. .

  In this way, by performing the first step and the second step continuously using the same laser processing apparatus, it becomes possible to perform laser processing on the article with high productivity.

  In this case, “continuously” means that the article to be processed is still attached to the attachment jig, and this makes it possible to efficiently perform laser processing on the article with high productivity.

  Note that the laser light output in the first step and the laser light output in the second step can be the same or different. In the latter case, the output of the laser beam in the second step can be made weaker or stronger than the output of the laser beam in the first step.

(9) The deburring method of the present invention is a deburring method for removing burrs generated in a processed article, wherein a contact surface of the article at a deburring target portion and an optical axis of a laser beam are Deburring is performed by irradiating a laser beam in a substantially parallel state.

  For this reason, according to the deburring method of the present invention, it is possible to remove dross and burrs from an article whose surface condition has deteriorated due to adhesion of dross or generation of burrs. As a result, it is possible to manufacture a quality article having an improved surface condition.

  Further, according to the deburring method of the present invention, the deburring is performed by irradiating the laser beam in a state where the contact surface of the article to be deburred and the optical axis of the laser beam are substantially parallel. It is possible to avoid irradiating the article with laser light that does not contribute as much as possible, and it is possible to remove only dross and burrs while sufficiently suppressing damage to the article itself.

  As described above, according to the deburring method of the present invention, deburring is performed by irradiating a laser beam to an article whose surface condition has deteriorated due to the occurrence of burrs when the article is processed using a drill, a punch, or the like. Even if it is done, it is possible to avoid irradiating the article with laser light that does not contribute to deburring as much as possible, and it is possible to remove only dross and burrs while sufficiently suppressing damage to the article itself It becomes.

  It should be noted that the deburring method of the present invention preferably has features applicable to the above-described laser processing method of the present invention.

(10) The article of the present invention is an article manufactured using the laser processing method according to any one of (1) to (8) above.

  For this reason, only the dross and the burr | flash are removed and the article | item of this invention turns into a good quality article | item with the improved surface condition.

(11) The article of the present invention is an article produced using the deburring method described in (9) above.

  For this reason, only the dross and the burr | flash are removed and the article | item of this invention turns into a good quality article | item with the improved surface condition.

(12) The article according to (10) or (11) is particularly effective when the article is an injection needle, a brain probe needle, a μTAS needle, an STM probe, or an LSI test probe. .

  As described above, since the article described in (10) or (11) is a good quality article with the surface state improved by removing only dross and burrs, it is preferable for various applications as described above. It can be used.

  Hereinafter, a laser processing method, a deburring method, and an article of the present invention will be described based on embodiments shown in the drawings.

Embodiment 1
In the first embodiment, a laser processing method for forming a spiral hole in a thin metal tube will be described. The metal thin tube in which the spiral hole is formed in this way is more flexible than a normal metal thin tube, and thus is suitable as a brain probe needle.

  FIG. 1 is a flowchart for explaining the laser processing method according to the first embodiment. FIG. 2 is a diagram illustrating a laser processing apparatus 100 for performing the laser processing method according to the first embodiment. FIG. 3 is a view for explaining a first step in the laser processing method according to the first embodiment. FIG. 3A to FIG. 3D are diagrams showing each sub-process in the first process. FIG. 4 is a diagram illustrating a surface state of the metal thin tube 10 obtained by performing the first step in the laser processing method according to the first embodiment. 4A is a perspective view of the metal thin tube 10, and FIG. 4B is a partially enlarged view of FIG. 4A.

FIG. 5 is a view for explaining the second step in the laser processing method according to the first embodiment. 5 (a) is a diagram showing a state where the laser beam L ₁ is irradiated to the metal thin tube 10 in a first step, FIG. 5 (b) irradiating the laser beam L ₂ is a metal capillary 10 in the second step It is a figure which shows a mode that it is being performed. FIG. 6 is a view for explaining a second step in the laser processing method according to the first embodiment. FIG. 6A to FIG. 6D are diagrams showing each sub-process in the second process. FIG. 7 is a diagram illustrating a surface state of the metal thin tube 10 obtained by performing the second step in the laser processing method according to the first embodiment. FIG. 7A is a perspective view of the thin metal tube 10, and FIG. 7B is a partially enlarged view of FIG. 7A.

  In the laser processing method according to the first embodiment, as shown in FIG. 1, a first step S10 for performing laser processing on a processing target portion in a processing target article, and irradiating the deburring target portion in the processing target article with laser light. And a second step S20 for deburring.

  The laser processing method according to the first embodiment is performed using the laser processing apparatus 100 shown in FIG. The laser processing apparatus 100 includes a processing stage 110, a laser beam irradiation apparatus 130, and a measurement system 150.

  The processing stage 110 includes a base 112 having a substantially L shape, an x movement table 114 attached to the base 112 so as to be movable along the x axis direction, and a z axis direction with respect to the x movement table 114. Z movement table 116 movably attached to the z movement table 116, sample attachment chuck 118 attached to the z movement table 116 so as to be rotatable about the z axis, and the base 112 in the y axis direction. And a y-moving table 120 that is movably mounted along. As the processing stage 110, an xyzθ 4-axis control stage manufactured by Takashima Sangyo Co., Ltd. was used.

The laser beam irradiation device 130 includes a green laser 132, a mirror 134 that reflects light from the green laser 132, a beam expander 136 that expands the beam diameter of the laser beam reflected by the mirror 134, and a beam expander 136. An aperture 138 that shapes the laser beam having an enlarged beam diameter into a predetermined size and shape, a mirror 140 that reflects the laser beam shaped by the aperture 138, and the y movement table 120 of the processing stage 110 are attached. And a condensing lens 142 that condenses the laser light reflected by the mirror 140. As the green laser 132, Alistar-B (Nd: YVO ₄ ) manufactured by Allied Laser Co., Ltd. was used. The wavelength of the laser light is 532 nm, the maximum pulse energy of the laser light is 0.025 mJ, the repetition frequency of the laser light is 1 kHz, and the pulse width of the laser light is 4 nsec.

  The measurement system 150 includes an imaging element 152 that captures a processing target part, a deburring target part, and the like in the processing target article, and a monitor 154 that displays a subject to be photographed by the imaging element 152.

In 1st process S10, as shown in FIG. 3, a laser drilling process is performed to the process target site | part in the metal thin tube 10 as a process target article. Specifically, while vertical movement along the z-direction to rotate the metal tubule 10 in a predetermined direction about the z axis, spiral hole in the metal tubule 10 is irradiated with a laser beam L ₁ to the metal capillary tube 10 Form.

  As the metal thin tube 10, a copper metal thin tube having an outer diameter of 300 μm and an inner diameter of 150 μm was used. The rotation speed of the metal thin tube 10 is 2.7 rad / sec, the feed rate of the vertical movement of the metal thin tube 10 is 100 μm / sec, the number of reciprocations of the vertical movement of the metal thin tube 10 is 60 times, The range of vertical movement is 2.0 mm, and the number of turns of the spiral hole is 8.6.

  As a result, a spiral hole 12 is formed in the thin metal tube 10 as shown in FIG. At this time, dross 14 adheres to the periphery of the spiral hole 12 in the metal thin tube 10 as shown in FIG. In this specification, “Dross” is sometimes referred to as “Bali”.

The second step S20 is a deburring step for removing the burrs (dross 14) formed around the spiral hole 12. Then, in the second step S20, as shown in FIG. 5 (b), and the optical axis _L 2 ax the contact surface _{P 2} and the laser beam _{L 2} in deburring target site of the metal tubule 10 (dross attachment site) condition to be parallel (i.e., a state in which the angle between the optical axis L ₂ ax the contact surface P ₂ and the laser beam L ₂ in deburring target site of the metal tubule 10 is 0 degree) the laser beam L ₂ is irradiated with Deburring.

In this respect, the second step irradiates the processing target site with the laser beam L ₁ in a state where the contact surface P _{1 at} the processing target site of the metal thin tube 10 and the optical axis L ₁ ax of the laser beam L ₁ are perpendicular to each other. The first step of drilling the metal thin tube 10 (see FIG. 5A) is different in the laser beam irradiation direction on the contact surface by 90 degrees.

  For this reason, according to the laser processing method according to the first embodiment, even if burrs (dross 14) occur in the article in the first step S10 and the surface state of the metal thin tube 10 deteriorates, the second step of deburring. By performing S20, it is possible to remove burrs (dross 14) generated in the first step. As a result, it is possible to produce a high-quality metal thin tube having an improved surface condition.

Further, according to the laser processing method according to the first embodiment, in the second step S20, the optical axis L ₂ ax the contact surface P ₂ and the laser beam L ₂ in deburring target site of the metal tubule 10 (dross attachment site) As shown in FIG. 5B, the laser beam L ₂ ′ that does not contribute to deburring is used as much as possible in order to perform deburring by irradiating the deburring target site with the laser beam L ₂ in a state where the _two are parallel to each other. 10 can be prevented from being irradiated, and only the burrs (dross 14) can be removed while sufficiently preventing the metal thin tube 10 itself from being damaged.

In the second step S20, FIG. 5 (b) as shown in, the laser beam deburring target site and the focal point F of the deburring target site and the laser beam L ₂ in a state arranged such that they become the same position L ₂ is to be irradiated.

That is, in the second step S20, the interval between the optical axis L ₂ ax deburring target sites along the normal of the deburring target site and the laser beam L ₂ is irradiated with laser light L ₂ in a state where the 0μm I am going to do that.

Therefore, according to the laser processing method according to the first embodiment, since it is possible to perform deburring portion with high power density of the laser beam L _2, it can be efficiently deburring with high productivity It becomes.

In the second step S20, is irradiated with laser light L ₂ in a state where the distance between the laser light L ₂ of the optical axis L ₂ deburring target sites along the ax and the focus F of the laser beam L ₂ is 0μm I am going to do that.

Therefore, according to the laser processing method according to the first embodiment, since it is possible to perform deburring portion with high power density of the laser beam L _2, it can be efficiently deburring with high productivity It becomes. Further, since deburring can be performed at the portion where the laser beam L ₂ is most narrowed, it is possible to prevent the metal thin tube 10 from being irradiated with the laser beam L ₂ ′ that does not contribute to deburring as much as possible. In addition, it is possible to remove only the burrs (dross 14) while further sufficiently suppressing damage to the metal thin tube 10 itself.

In the second step S20, as shown in FIG. 6, and removing the burrs while sequentially irradiated with the laser light L ₂ with respect deburring target site on the surface of the metal tubule 10. Specifically, rotation of the vertical movement of the metal tubule 10 along the z-direction in a state of stopping (feed rate: 100 [mu] m / sec) of the metal tubule 10 while, by irradiating laser beam L ₂ to a metal capillary tube 10 Remove burrs along the vertical direction. Thereafter, the metal thin tube 10 is rotated 3 degrees around the z axis, and the same deburring operation is performed. By repeating this 120 times, burrs are removed over the entire surface of the thin metal tube 10.

  In the laser processing method according to the first embodiment, the first step S10 and the second step S20 are continuously performed using the same laser processing apparatus 100.

  For this reason, according to the laser processing method concerning Embodiment 1, it becomes possible to perform laser processing to metal capillary 10 article with high productivity.

  According to the laser processing method according to the first embodiment, as shown in FIG. 7, the burrs generated in the first step S10 (the burrs (dross 14) generated around the spiral hole 12 in the metal thin tube 10) are the first. By performing the two-step S20, it is possible to remove it cleanly.

[Modification 1]
FIG. 8 is a view for explaining a second step in the laser processing method according to the first modification of the first embodiment. 8 (a) is a diagram schematically showing the relationship between the deburring target site and the laser beam L _2, FIG. 8 (b) is an enlarged view of FIG. 8 (a).

In the laser processing method according to the first embodiment, as shown in FIG. 5B, the contact surface P _{2 at} the deburring target site (the dross adhesion site) of the metal thin tube 10 and the optical axis L ₂ ax of the laser beam L _2. Doo is in a state to be parallel, and, although the irradiating the laser beam L ₂ and the focal point F of the deburring target site and the laser beam L ₂ in a state where they are arranged to run in the same position, the present invention Is not limited to this.

That is, in the laser processing method of the present invention, as shown in FIG. 8, the contact surface P _{2 at} the deburring target site (dross adhesion site) of the thin metal tube 10 and the optical axis L ₂ ax of the laser beam L ₂ are formed. deburring target site in a state where the angle θ becomes, for example 20 degrees or less with the laser beam L ₂ may be irradiated.

By adopting such a method, it becomes possible to avoid irradiating the metal thin tube 10 with the laser light L ₂ ′ that does not contribute to deburring as much as possible, so that the metal thin tube 10 itself is more sufficiently damaged. Only the burrs (dross 14) can be removed while suppressing.

Further, in the laser processing method of the present invention, as shown in FIG. 8, the distance d ₁ between the deburring target site and the optical axis L ₂ ax of the laser beam L ₂ along the normal line of the deburring target site is, for example, the laser beam L ₂ deburring target site in a condition to be 30μm or less may be irradiated.

By adopting such a method, as in the case of the laser processing method according to the first embodiment, since it is possible to perform deburring portion with high power density of the laser beam L _2, with high productivity Deburring can be performed efficiently.

In the laser processing method of the present invention, as shown in FIG. 8, in consideration of the width W _BW of the beam waist of the laser beam L _2, deburring target site and laser along the normal of the deburring target site The part to be deburred may be irradiated with the laser light L ₂ in a state where the distance d ₁ between the light L _{2 and} the optical axis L ₂ ax is, for example, 0.5 μm or more.

With such a method, it becomes possible to irradiate the laser light L ₂ of the deburring target site and the laser beam L ₂ and the optical axis L ₂ ax while being slightly spaced, contribute to deburring As a result, it is possible to prevent the metal thin tube 10 from being irradiated with the laser beam L ₂ ′ that is not used as much as possible, and it is possible to remove only the burrs (dross 14) while further sufficiently preventing damage to the metal thin tube 10 itself. It becomes.

Furthermore, in the laser processing method of the present invention, as shown in FIG. 8, the distance d ₂ between the laser beam L ₂ of the optical axis L ₂ deburring target sites along the ax and the laser light L ₂ of the focal point F is for example, deburring target site in a condition to be 100μm or less laser light L ₂ may be irradiated.

By adopting such a method, as in the case of the laser processing method according to the first embodiment, since it is possible to perform deburring portion with high power density of the laser beam L _2, with high productivity Deburring can be performed efficiently. Further, since it is possible to perform deburring at the portion where the laser beam L ₂ is most narrowed, it is possible to prevent the metal thin tube 10 from being irradiated with the laser beam L ₂ ′ that does not contribute to deburring as much as possible. Therefore, it becomes possible to remove only the burrs (dross 14) while further sufficiently suppressing damage to the metal thin tube 10 itself.

[Embodiment 2]
FIG. 9 is a diagram for explaining the laser processing method according to the second embodiment. FIG. 9A is a view of the thin metal tube 10 as viewed obliquely from the left, and FIG. 9B is a view of the thin metal tube 10 as viewed from the side.

The laser processing method according to the second embodiment has basically the same steps as the laser processing method according to the first embodiment, but the direction in which the metal thin tube 10 is irradiated with laser light in the second step is the same. This is different from the laser processing method according to the first embodiment. That is, in the laser processing method in accordance with the second embodiment, as shown in FIG. 9, in the second step, as applying a laser beam L ₃ along a direction orthogonal to the direction in which the spiral hole 12 progresses Yes.

In this case, the spiral pitch of the spiral holes 12 is set to be small, and the angle formed by the virtual plane Q perpendicular to the central axis Cax of the thin metal tube 10 and the traveling direction of the spiral holes 12 is 10 degrees or less. If such, it is preferable to irradiate the laser beam L ₃ in the deburring target site in a state that the angle between the optical axis L ₃ ax virtual plane Q and the laser beam L ₃ phi is 80 degrees or less.

By adopting such a method, the surface of the metal thin tube 10 along the traveling direction of the laser light L ₃ becomes a convex surface having a curvature radius of a certain degree or more, and therefore the laser light L ₃ ′ that does not contribute to deburring is as much as possible. It becomes possible not to irradiate the metal thin tube 10.

  Since the laser processing method according to the second embodiment is the same as the case of the laser processing method according to the first embodiment in other points, the corresponding effect among the effects of the laser processing method according to the first embodiment is obtained. Have.

[Embodiment 3]
Embodiment 3 is an embodiment of a laser processing method for forming a slit-like hole in a metal thin tube. FIG. 10 is a diagram for explaining the laser processing method according to the third embodiment. FIG. 10A is a view of the thin metal tube 20 as viewed obliquely from the left, and FIG. 10B is a cross-sectional view of the thin metal tube 20.

  The laser processing method according to the third embodiment basically has the same steps as the laser processing method according to the first embodiment, but the type of laser processing used in the first step is the laser according to the first embodiment. It is different from the processing method. That is, in the laser processing method according to the third embodiment, as shown in FIG. 10, laser processing that performs slit processing on the metal thin tube 20 is used as laser processing used in the first step.

  As described above, the laser processing method according to the third embodiment is different from the laser processing method according to the first embodiment in the type of laser processing used in the first step. Since it is the same as that of the laser processing method which concerns, it has an applicable effect among the effects which the laser processing method which concerns on Embodiment 1 has.

  According to the laser processing method according to the third embodiment, it is possible to manufacture the metal thin tube 20 with the surface state improved by removing the burr (dross 24) as described above, and this can be used for an injection needle or a μTAS. By applying it to the needle, it is possible to increase the injection efficiency when injecting a drug or the like, or to reduce the possibility of mixing impurities during the drug injection.

[Embodiment 4]
Embodiment 4 is an embodiment of a laser processing method for forming a tapered step in a metal thin tube. FIG. 11 is a diagram for explaining the laser processing method according to the fourth embodiment. FIG. 11A is a view of the thin metal tube 30 as viewed obliquely from the left, and FIG. 11B is a cross-sectional view of the thin metal tube 30.

  The laser processing method according to the fourth embodiment has basically the same steps as the laser processing method according to the first embodiment, but the type of laser processing used in the first step is the laser according to the first embodiment. It is different from the processing method. That is, in the laser processing method according to the fourth embodiment, as the laser processing used in the first step, as shown in FIG. 11, laser processing that performs taper processing (step processing) on the metal thin tube 30 is used.

  As described above, the laser processing method according to the fourth embodiment is different from the laser processing method according to the first embodiment in the type of laser processing used in the first step. Since it is the same as that of the laser processing method which concerns, it has an applicable effect among the effects which the laser processing method which concerns on Embodiment 1 has.

  According to the laser processing method according to the fourth embodiment, it is possible to manufacture the metal thin tube 30 with the surface state improved by removing the burrs (dross 34) as described above. By applying to various probes such as inspection probes, it is possible to increase the resolution of STM probes, increase the electrical stability of LSI inspection probes, and improve the basic performance of other probes. Become.

  The laser processing method, the deburring method, or the article of the present invention has been described based on each of the above embodiments. However, the present invention is not limited to this, and should be implemented within the scope not departing from the gist thereof. For example, the following modifications are possible.

(1) A laser processing method according to Embodiments 1 to 4 includes a first step of performing laser processing on an object to be processed, and a laser at a deburring target portion of the object to be processed in order to remove burrs generated in the first step. Although it is a laser processing method including the second step of deburring by irradiating light, the present invention is not limited to this. For example, burrs generated by processing an article using a drill, a punch, or the like can be removed by irradiating the article with laser light.

(2) In the laser processing methods according to Embodiments 1 to 4, the present invention has been described by taking the case of performing laser processing on a copper metal thin tube as an example, but the present invention is not limited to this. For example, the present invention can be applied to a case where laser processing is performed on a metal thin tube made of a metal other than copper, a metal article other than a metal thin tube, a resin article, or a ceramic article.

3 is a flowchart for explaining the laser processing method according to the first embodiment. It is a figure shown in order to demonstrate the laser processing apparatus 100 for enforcing the laser processing method concerning Embodiment 1. FIG. It is a figure shown in order to demonstrate the 1st process in the laser processing method concerning Embodiment 1. FIG. It is a figure which shows the surface state of the metal thin tube 10 obtained by implementing the 1st process in the laser processing method concerning Embodiment 1. FIG. It is a figure shown in order to demonstrate the 2nd process in the laser processing method concerning Embodiment 1. FIG. It is a figure shown in order to demonstrate the 2nd process in the laser processing method concerning Embodiment 1. FIG. It is a figure which shows the surface state of the metal thin tube 10 obtained by implementing the 2nd process in the laser processing method concerning Embodiment 1. FIG. It is a figure shown in order to demonstrate the 2nd process in the laser processing method concerning the modification 1 of Embodiment 1. FIG. It is a figure shown in order to demonstrate the laser processing method which concerns on Embodiment 2. FIG. It is a figure shown in order to demonstrate the laser processing method which concerns on Embodiment 3. FIG. It is a figure shown in order to demonstrate the laser processing method concerning Embodiment 4. FIG. It is a figure shown in order to demonstrate the conventional 1st laser processing method. It is a figure shown in order to demonstrate the conventional 2nd laser processing method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10,20,30 ... Metal thin tube, 12 ... Spiral hole, 14, 24, 34 ... Dross, 16 ... Area | region where deburring process was complete | finished, 22 ... Slit-like hole, 100 ... Laser processing apparatus, 110 ... Processing Stage 112 112 Base 114 114 x moving table 116 Z moving table 118 Sample mounting chuck 120 y moving table 130 Laser irradiation device 132 Green laser 134 134 Mirror 136 Beam expander, 138 ... aperture, 140 ... mirror, 142 ... condensing lens, 150 ... measurement system, 152 ... imaging device, 154 ... monitor, 800 ... laser processing device, 802 ... table, 804 ... mounting table, 806 ... presser Plate, 808 ... elastic piece, 810 ... laser light irradiation part, 820 ... capillary, 910 ... base part, 912 ... injection needle, 9 4 ... chemical outlet holes, Cax ... central axis, the distance between the optical axis L ₂ ax of d 1 _... deburring target sites along the normal of the deburring target site and the laser beam L ₂ of the metal tubular 10, d ₂ ... distance between the laser light _{L 2} of the focal point F of the optical axis _L 2 deburring along the ax target site and the laser beam _{L 2,} the focus of the F ... laser _{light, L 1, L 2, L} 2 ', L 3, L ₃ ′, L ₄ , L ₄ ′, L ₅ , L ₅ ′, L ₁₁ , L ₁₂ ... Laser light, L ₁ ax, L ₂ ax, L ₃ ax, L ₄ ax, L ₅ ax. Axis, P ₁ ... contact surface at the part to be processed, P ₂ , P ₄ , P ₅ ... contact surface at the part to be deburred, Q ... virtual plane perpendicular to the central axis Cax of the metal thin tube 10, θ ... part to be deburred the angle between the optical axis _L 2 ax the contact surface _{P 2} and the laser beam _{L 2} in, phi ... imaginary plane Q and the laser beam _{L 3} The angle between the axis _L 3 ax, W _{BW ...} beamwidth waist

Claims (12)

A first step of performing laser processing on a processing target portion in the processing target article;
In order to remove the burrs generated in the first step, deburring is performed by irradiating laser light in a state where the contact surface of the workpiece to be deburred at the part to be deburred and the optical axis of the laser light are substantially parallel. A laser processing method comprising: a second step. The laser processing method according to claim 1,
A laser processing method characterized by irradiating a laser beam in a state where an interval between the deburring target site and the optical axis of the laser beam along a normal line of the deburring target site is 30 μm or less. The laser processing method according to claim 2,
A laser processing method comprising irradiating a laser beam in a state where an interval between the deburring target site and the optical axis of the laser beam along a normal line of the deburring target site is 0.5 μm or more. In the laser processing method in any one of Claims 1-3,
A laser processing method comprising irradiating a laser beam in a state where an interval between the deburring target site along the optical axis of the laser beam and a focal point of the laser beam is 100 μm or less. In the laser processing method in any one of Claims 1-4,
The laser processing method, wherein the article to be processed has a cylindrical or columnar shape. In the laser processing method of Claim 5,
In the second step, the laser beam is irradiated in a state where an angle formed by a plane perpendicular to the central axis of the article to be processed and the optical axis of the laser beam is 80 degrees or less. . In the laser processing method in any one of Claims 1-6,
In the second step, the burr is removed while sequentially irradiating the deburring target portion on the surface of the processing target article with a laser beam. In the laser processing method in any one of Claims 1-7,
A laser processing method, wherein the first step and the second step are continuously performed using the same laser processing apparatus. A deburring method for removing burrs generated in a processed article,
A deburring method comprising performing deburring by irradiating a laser beam in a state in which a contact surface of the article at a deburring target portion and an optical axis of the laser beam are substantially parallel to each other.   An article manufactured using the laser processing method according to claim 1.   An article manufactured using the deburring method according to claim 9.   The article according to claim 10 or 11, wherein the article is an injection needle, a brain probe needle, a μTAS needle, an STM probe, or an LSI inspection probe.