JP2007203126A - Measurement method of electric conductivity of vapor for cleaning - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a measurement method of an electric conductivity of vapor for cleaning capable of accurately and easily measuring an electric conductivity of vapor for cleaning delivered from a delivery distal end of a vapor cleaning apparatus. <P>SOLUTION: The measurement method of the electric conductivity of the vapor for cleaning is a measurement method of the electric conductivity of the vapor for cleaning delivered from the delivery distal end of the cleaning apparatus for vapor-cleaning an object to be cleaned, and includes a step (ST301) for mounting a storage unit for storing the vapor for cleaning to the delivery distal end of the cleaning apparatus, a step (ST303) for storing the vapor for cleaning delivered from the delivery distal end of the cleaning apparatus in the storage unit, a step (ST304) for cooling the vapor for cleaning stored in the storage unit to liquefy it, and a step (ST306) for measuring the electric conductivity of a condensate of the vapor for cleaning. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a method for measuring the conductivity of cleaning steam, and more particularly, to a method for measuring the conductivity of cleaning steam discharged from a cleaning apparatus for cleaning an object to be cleaned with steam.

Conventionally, in a manufacturing process of a display device, steam cleaning using a steam cleaning device is performed in order to remove deposits adhering to the transparent glass substrate.
In a general steam cleaning apparatus, cleaning liquid such as pure water supplied is converted into cleaning steam by a steam generator (steam boiler), and this cleaning steam is discharged from a nozzle attached to the discharge tip of the cleaning steam. Erupting.

Patent Document 1 discloses a technique related to a steam cleaning apparatus.
Japanese Patent Laid-Open No. 9-327669 (paragraphs 0025 to 0027, FIG. 2)

For example, when an object to be cleaned such as a liquid crystal panel is steam cleaned with cleaning steam having a high conductivity of 3 (μS / cm) or more, electricity flows between terminals formed on the object to be cleaned, and the object to be cleaned There was a problem that electric corrosion occurred on the upper terminal.
For this reason, conventionally, when supplying a cleaning liquid such as pure water to a steam cleaning apparatus, first, the conductivity of the cleaning liquid is periodically measured, and after the measurement, the cleaning liquid is heated by the steam cleaning apparatus. The object to be cleaned was cleaned with steam using cleaning steam.

However, if the steam generator, the pipe connecting the steam generator and the discharge tip, or the nozzle attached to the discharge tip is corroded or deteriorated over time, the conductivity of the cleaning steam ejected from the nozzle The rate becomes higher than the conductivity of the supplied cleaning liquid, and the cleaning vapor having a conductivity higher than the permissible range of the cleaning vapor causes the object to be cleaned with steam having a high conductivity. there were. In addition, the conductivity of the cleaning steam cannot be measured in a gas state.
The present invention has been made to solve such a problem, and the cleaning steam that can accurately and easily measure the conductivity of the cleaning steam discharged from the discharge tip of the steam cleaning apparatus. An object of the present invention is to provide a method for measuring the electrical conductivity.

The method for measuring the conductivity of the cleaning steam according to the present invention is a method for measuring the conductivity of the cleaning steam discharged from the discharge tip of the cleaning device for cleaning the object to be cleaned by steam. A step of attaching a container for storing the cleaning vapor to the discharge tip, a step of storing the cleaning steam discharged from the discharge tip of the cleaning device in the container, and the cleaning steam stored in the container The method includes the steps of cooling and liquefying, and measuring the conductivity of the condensate of the cleaning steam.
By adopting such a measuring method, it is possible to accurately and easily measure the conductivity of the cleaning steam discharged from the discharge tip of the steam cleaning apparatus.

  Here, in the step of attaching the container to the discharge tip, the container is attached to the discharge tip by a screw. In addition, the container includes a container for storing the cleaning steam and a discharge port for discharging the cleaning steam, and in the step of storing the cleaning steam, the cleaning steam discharged from the discharge tip of the cleaning device Is allowed to flow toward the housing portion, so that the cleaning steam is accommodated, and the remaining cleaning steam not accommodated in the housing portion is discharged from the discharge port.

  According to the present invention, the conductivity of the cleaning steam discharged from the discharge tip of the steam cleaning apparatus can be accurately and easily measured.

Embodiment 1 of the Invention
Embodiment 1 of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic diagram showing a configuration of a steam cleaning device and a cleaning state by the steam cleaning device. The arrows in FIG. 1 indicate the flow of cleaning steam.
As shown in FIG. 1, the steam cleaning apparatus 1 includes a cleaning steam generator 10, a cleaning liquid supply port 20, a cleaning steam discharge tip 30, and a pipe 40.

The cleaning steam generator 10 generates cleaning steam by heating and evaporating cleaning liquid such as pure water supplied from the cleaning liquid supply port 20. The cleaning liquid supply port 20 is provided to supply the cleaning liquid to the cleaning steam generator 10, and is formed of, for example, a cylindrical body connected to the cleaning steam generator 10.
As shown in FIG. 1, a cleaning steam discharge tip 30 for discharging the cleaning steam generated by the cleaning steam generator 10 is provided on the distal end side of the pipe 40. The cleaning steam generator 10 and the cleaning steam discharge tip 30 are connected by a pipe 40. The pipe 40 is formed in a cylindrical shape and is provided to guide the cleaning steam generated by the cleaning steam generator 10 to the cleaning steam discharge tip 30.

  As shown in FIG. 1, a nozzle 50 is attached to the cleaning vapor discharge tip 30. The nozzle 50 is attached to the discharge port of the cleaning vapor discharge tip 30 with a screw and is detachable from the cleaning vapor discharge tip 30. As shown in FIG. 1, a female screw 53 is formed on the inner surface of the end portion opposite to the tip of the nozzle 50, and a male screw 43 is formed on the outer surface of the cleaning vapor discharge tip portion 30 on the discharge port side. Is formed. The nozzle 50 is attached to the cleaning vapor discharge tip 30 by the female screw 53 of the nozzle 50 and the male screw 43 of the cleaning vapor discharge tip 30 being screwed together.

The nozzle 50 has an opening 51 at the tip and a through-hole 52 that penetrates from the tip toward the cleaning vapor discharge tip 30. It is formed in a substantially conical shape so as to spread.
The cleaning liquid supply port 20, the internal piping (not shown) of the cleaning steam generator 10, the piping 40, the cleaning steam discharge tip 30, and the nozzle 50 are made of stainless steel having high corrosion resistance (for example, SUS304, SUS316), titanium, or the like is used.

Next, a method for cleaning an object to be cleaned P such as a liquid crystal panel using the vapor cleaning apparatus 1 will be described with reference to the drawings.
First, the object to be cleaned P is fixed in the clean room so as not to move. Next, a cleaning liquid such as pure water is supplied from the cleaning liquid supply port 20. Next, the cleaning steam generator 10 is operated to vaporize the cleaning liquid supplied from the cleaning liquid supply port 20 to generate cleaning steam. The cleaning steam generated by the cleaning steam generator 10 is ejected from the opening 51 at the tip of the nozzle 50 through the pipe 40 and the cleaning steam discharge tip 30. And the to-be-cleaned object P is wash | cleaned by spraying the cleaning vapor | steam ejected from the opening 51 of this nozzle 50 to the to-be-cleaned object P.

Next, a method for measuring the conductivity of the cleaning steam discharged from the steam cleaning apparatus 1 will be described with reference to the drawings.
FIG. 2 is a schematic cross-sectional view showing the configuration of the container attached to the cleaning steam discharge tip of the steam cleaning apparatus. FIG. 2 shows a state in which the container is attached to the cleaning vapor discharge tip instead of the nozzle shown in FIG. FIG. 3 is a measurement flow chart showing a procedure for measuring the conductivity of the cleaning steam discharged from the cleaning steam discharge tip of the steam cleaning apparatus.

As shown in FIG. 2, when measuring the conductivity of the cleaning steam discharged from the steam cleaning apparatus 1, a container 60 is attached to the cleaning steam discharge tip 30 instead of the nozzle 50.
As shown in FIG. 2, the container 60 is formed in a cylindrical body having a bottom part, a container part 61 is formed on the bottom part side, and a discharge port 62 is formed on the end part side opposite to the bottom part. Has been.

The accommodating portion 61 is provided to accommodate the cleaning vapor discharged from the cleaning vapor discharge tip portion 30. The discharge port 62 is provided to discharge the remaining cleaning steam that has not been accommodated in the accommodating portion 61.
Further, a female screw 63 is formed on the inner surface of the end opposite to the bottom of the container 60, and the container 60 is detachably formed on the cleaning vapor discharge tip 30 like the nozzle 50. ing. The container 60 is attached to the cleaning steam discharge tip 30 by the female screw 63 of the container 60 and the male screw 43 of the cleaning steam discharge tip 30 being screwed together.

As shown in FIG. 2, the container 61 of the container 60 includes a cleaning steam cooling container 70.
It is cooled by the ice 71 inside. Accordingly, the cleaning steam flowing into the housing 61 is cooled by the ice 71 and liquefied. In the accommodating part 61 of FIG. 2, the condensate L of the cleaning vapor is shown.
As the material of the container 60, stainless steel with high corrosion resistance (for example, SUS304, SUS316), titanium, or the like is used.

Next, a procedure for measuring the conductivity of the cleaning steam discharged from the cleaning steam discharge tip of the steam cleaning apparatus 1 will be described with reference to the drawings.
As shown in FIGS. 2 and 3, first, the container 60 is attached to the cleaning steam discharge tip 30 of the steam cleaning device 1 by screwing the male screw 43 and the female screw 63 (ST301). Here, when the nozzle 50 is attached to the cleaning vapor discharge tip 30, the nozzle 50 is removed from the cleaning vapor discharge tip 30 before the container 60 is attached to the cleaning vapor discharge tip 30. .

  Next, a cleaning liquid such as pure water is supplied from the cleaning liquid supply port 20 to the cleaning steam generator 10 (ST302). Then, the cleaning steam generator 10 is operated to vaporize the cleaning liquid supplied from the cleaning liquid supply port 20 to generate cleaning steam. The cleaning steam generated by the cleaning steam generator 10 is discharged from the cleaning steam discharge tip 30 via the pipe 40 and is directly supplied to the container 60 connected to the cleaning steam discharge tip 30. Inflow.

Next, the cleaning vapor discharged from the cleaning vapor discharge tip 30 is stored in the storage 61 of the storage device 60 (ST303). In ST303, the remaining cleaning steam that is not accommodated in the accommodating portion 61 is discharged from the discharge port 62. Thereby, it adjusts so that the pressure in the container 60 may not become high too much.
Next, the cleaning steam stored in the storage unit 61 of the storage tool 60 is cooled and liquefied using ice 71 in the cleaning steam cooling container 70 (ST304). For example, by operating the cleaning steam generator 10 for about one hour or longer, the condensate L of cleaning steam necessary for measuring the conductivity in ST305 can be accommodated.

  Next, the conductivity of the condensate L of the cleaning vapor is measured using a conductivity meter (ST305). Specifically, the container 60 is removed from the cleaning vapor discharge tip 30 and immediately, the electrode rod of the conductivity measuring instrument is inserted from the opening at the end opposite to the bottom of the container 60, and the cleaning vapor is inserted. The electrode rod of the conductivity meter is immersed in the condensate L, and the conductivity of the condensate L of the cleaning vapor is measured.

  A conductivity meter is a device that measures the proportion of liquid to electricity and measures the proportion of liquid components and the percentage of dissolved substances in the liquid. The principle is roughly divided into the electrode method and the electromagnetic induction method. The electrode method covers the entire range from a very low conductivity to a general aqueous solution, and the electromagnetic induction method is used in a region with a high conductivity.

  In the electrode method, the conductivity is obtained by immersing the electrode in a measurement solution and measuring the solution resistance. In the electromagnetic induction method, an alternating current is passed through the measurement solution by electromagnetic induction, and the current is detected by electromagnetic induction. In this way, the conductivity of the solution is obtained. In the present invention, a conductivity measuring device using an electrode method suitable for measuring a relatively small conductivity is used.

  Here, in the measurement of the conductivity of ST305, it is necessary to perform the work in a short time. That is, the electrical conductivity tends to increase as the time for which the condensate L of the cleaning vapor contacts the outside air is longer. The outside air is full of dust and dirt, and when the condensate L for cleaning steam touches the outside air for a long time, the condensate L for cleaning steam absorbs dust and dirt in the outside air, The conductivity will be high. Therefore, it is necessary to quickly measure the conductivity of the condensate L of the cleaning steam before the condensate L of the cleaning steam touches the outside air very much.

  As described above, the container 60 that stores the cleaning steam is attached to the discharge port of the cleaning steam discharge tip 30 of the steam cleaning device 1, and the cleaning discharged from the cleaning steam discharge tip 30 of the steam cleaning device 1 is performed. The cleaning steam is stored in the storage device 60, the cleaning steam stored in the storage device 60 is cooled and liquefied, and the conductivity of the condensate of the cleaning steam is measured, whereby the cleaning steam discharge tip 30 is Cleaning steam discharged from the cleaning steam discharge tip 30 of the steam cleaning apparatus 1 can be easily accommodated in the discharged cleaning steam, and can reduce the time during which the condensate of the cleaning steam is exposed to the outside air. Can be measured accurately and easily.

  For example, with the container 60 attached to the cleaning vapor discharge tip 30, the condensate L of the cleaning vapor is not exposed to the air, and the electrode rod of the conductivity meter is liquefied with the cleaning vapor. An insertion port that can be immersed in the condensate L may be provided separately in the container 60. Thereby, the electrical conductivity of the condensate L of the cleaning vapor can be accurately measured without reliably exposing the condensate L of the cleaning steam to the outside air.

Examples of the present invention and comparative examples will be described below. In both the example and the comparative example, a new one immediately after purchase was used for the steam cleaning apparatus 1.
Example.
Using 1 μS / cm pure water as the cleaning liquid, the water vapor discharged from the cleaning steam discharge tip 30 of the steam cleaning apparatus 1 is stored in the storage unit 61 of the storage device 60 according to the above embodiment over about 1 hour, The conductivity of the stored condensate of water vapor was measured and found to be 1 μS / cm, the same as the conductivity of pure water at the time of supply. The variation between samples at this time was small. In this way, the conductivity of the cleaning steam discharged from the cleaning steam discharge tip 30 of the steam cleaning apparatus 1 can be accurately and easily measured.

Comparative example.
Using pure water of 1 μS / cm as a cleaning liquid, the steam discharged from the cleaning steam discharge tip 30 of the steam cleaning apparatus 1 is stored in a beaker while liquefying over about 2 to 3 hours, and the condensate of the steam is conducted. When the rate was measured, it was significantly different from the conductivity of pure water at the time of supply and was 7 μS / cm. Moreover, the dispersion | variation between samples was also large.

  Although the above description is to describe the embodiment of the present invention, the present invention is not limited to the above-described embodiment. Further, those skilled in the art can easily change, add, and convert each element of the above-described embodiment within the scope of the present invention. For example, the container may be attached so as not to block the discharge port of the cleaning vapor discharge tip, and the electrode rod of the conductivity measuring instrument may be inserted into the container in advance.

It is a schematic diagram which shows the structure of a steam cleaning apparatus, and the washing | cleaning state by a steam cleaning apparatus. It is a schematic cross section which shows the structure of the container attached to the vapor | steam discharge front-end | tip part for washing | cleaning of a vapor | steam washing apparatus. It is a measurement flowchart which shows the procedure which measures the electrical conductivity of the washing | cleaning vapor | steam discharged from the washing | cleaning steam discharge front-end | tip part of a vapor | steam washing apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Steam cleaning apparatus 10 Cleaning steam generator 20 Cleaning liquid supply port 30 Cleaning vapor | steam discharge front-end | tip part 40 Piping 43 Male screw 50 Nozzle 51 Opening 52 Through hole 53 Female screw 60 Container 61 Housing part 62 Outlet 63 Female screw 70 Cleaning Steam cooling container for water 71 Ice P Object to be cleaned L Condensate of steam for cleaning

Claims (3)

A method for measuring the conductivity of cleaning steam discharged from a discharge tip of a cleaning device for cleaning an object to be cleaned,
Attaching a container for storing the cleaning vapor to the discharge tip of the cleaning device;
Storing the cleaning vapor discharged from the discharge tip of the cleaning device in the storage tool;
Cooling and liquefying the cleaning steam stored in the container;
Measuring the conductivity of the condensate of the cleaning steam. The method for measuring the conductivity of the cleaning steam.   The method for measuring the conductivity of the cleaning steam according to claim 1, wherein in the step of attaching the container to the discharge tip, the container is attached to the discharge tip by a screw. The storage device includes a storage unit that stores the cleaning steam, and a discharge port that discharges the cleaning steam,
In the step of storing the cleaning steam, the cleaning steam is stored by letting the cleaning steam discharged from the discharge tip of the cleaning device flow toward the storage unit, and in the storage unit. 2. The method for measuring the conductivity of cleaning steam according to claim 1, wherein the remaining cleaning steam that has not been accommodated is discharged from the outlet.

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