JP2007201130A - Thermoelectric module drive circuit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a thermoelectric module drive circuit which is driven with a simple configuration, even if the number of a thermoelectric module is increased. <P>SOLUTION: Thermoelectric modules 21 are electrically connected into a a matrix form, by connecting each thermoelectric module 21 in an intersection of a first wiring 63 and a second wiring 64. Consequently, thermoelectric modules 21 of the number of 9 pieces can be chosen individually by the first and second 6 switches 65 and 66. It is also possible to collectively choose all the thermoelectric modules 21. Thus, even if the number of thermoelectric modules 21 is increased, increase in the number of the first and second switches 65 and 66 and the increase in the number of the first and second wiring 63 and 64 will be suppressed relatively. Accordingly, increase in wiring space or cost can be controlled so that the thermoelectric module drive circuit 61 can be constituted in a simple configuration. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a thermoelectric module driving circuit for driving a thermoelectric module.

  Conventionally, there is a substrate heat treatment apparatus provided with this type of circuit. The substrate heat treatment apparatus includes a heat treatment plate provided with a thermoelectric module, and performs heat treatment by placing the substrate on a heat treatment plate that is temperature-controlled by driving the thermoelectric module (see, for example, Patent Document 1). Examples of the substrate include a semiconductor substrate, a glass substrate for a liquid crystal display device, a glass substrate for a photomask, and a substrate for an optical disk.

A power supply circuit is connected to the thermoelectric module, and the power supplied to the thermoelectric module is controlled by opening and shorting the power supply circuit. Further, by providing such a circuit for each thermoelectric module and controlling it individually, the temperature of the heat treatment plate can be finely managed.
JP 2003-31645 A

However, the conventional example having such a configuration has the following problems.
That is, in the conventional apparatus, when a plurality of thermoelectric modules are individually operated, it is necessary to provide a power supply circuit such as an electrical wiring and a switch and a control circuit for driving the switch for each thermoelectric module. For this reason, there is an inconvenience that the wiring space and cost increase as the number of thermoelectric modules increases.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a thermoelectric module drive circuit that is driven with a simple configuration even when the number of thermoelectric modules increases.

In order to achieve such an object, the present invention has the following configuration.
That is, the invention described in claim 1 is a thermoelectric module driving circuit for driving a thermoelectric module, wherein a plurality of first wirings connected to a positive power source and a plurality of first wirings connected to a negative power source and intersecting the first wiring. A second wiring, a plurality of thermoelectric modules provided at intersections of the first wiring and the second wiring and connected to the first wiring and the second wiring, respectively, provided for each first wiring; A first opening / closing means for switching a short circuit / opening between the first wiring and the positive power supply; and a second opening / closing switch provided for each of the second wirings for switching the shorting / opening between the second wiring and the negative power supply. Means, driving means for selecting the thermoelectric module by driving the first opening / closing means and the second opening / closing means, and control means for controlling the output of the thermoelectric module by operating the driving means. Also features It is.

  [Operation / Effect] According to the invention described in claim 1, an arbitrary thermoelectric module is selectively connected by short-circuiting the first and second wirings connected to the positive and negative power supplies. Power is supplied. Thus, for the number of thermoelectric modules corresponding to the product of the number of first and second wires, the number of first and second opening / closing means corresponding to the sum of the number of first and second wires is provided. Individual selection is possible by driving. In addition, it is also possible to select all the thermoelectric modules collectively by short-circuiting all the first and second wirings between the positive electrode and the negative power source. Therefore, even if the number of thermoelectric modules increases, the increase in the number of first and second opening / closing means and the number of first and second wirings can be relatively suppressed, and the thermoelectric module driving circuit can be simply configured. .

  According to a second aspect of the present invention, in the thermoelectric module driving circuit for driving the thermoelectric module, the first wiring that can be connected to the positive power source and the negative power source, the positive power source, and the negative power source can be connected. A plurality of second wirings intersecting one wiring, a plurality of thermoelectric modules provided at intersections of the first wiring and the second wiring and respectively connected to the first and second wirings; A first opening / closing means that is provided for each wiring and that switches between short-circuiting / opening between the first wiring and the positive power source and short-circuiting / opening between the first wiring and the negative power source; and the second wiring A second opening / closing means for switching between a short circuit / opening between the second wiring and the positive power source and a short circuit / opening between the second wiring and the negative power source; The second opening / closing means is driven to generate heat Driving means for selecting the module, by operating the driving means, it is characterized in further comprising control means for controlling the output of the thermoelectric module.

  [Operation / Effect] According to the invention described in claim 2, an arbitrary thermoelectric module is selectively connected by short-circuiting the first and second wirings to which the module is connected to power supplies having different polarities. Is supplied with power. Thus, for the number of thermoelectric modules corresponding to the product of the number of first and second wires, the number of first and second opening / closing means corresponding to the sum of the number of first and second wires is provided. Individual selection is possible by driving. A plurality of thermoelectric modules can be selected at once. Therefore, even if the number of thermoelectric modules increases, the increase in the number of first and second opening / closing means and the number of first and second wirings can be relatively suppressed, and the thermoelectric module driving circuit can be simply configured. .

  Further, the direction of the current flowing in each thermoelectric module is changed by appropriately reversing the polarity of the power supply so that the positive and negative power supplies or the negative and positive power supplies are connected to the first and second wirings, respectively. be able to. Thereby, heating and cooling by the thermoelectric module can be switched and controlled.

  The control means preferably selects all thermoelectric modules simultaneously when the operation amount is equal for each thermoelectric module, and individually selects one thermoelectric module when the operation amount is different for each thermoelectric module. Item 3).

  [Operation / Effect] According to the invention described in claim 3, when the operation amount is equal for each thermoelectric module, the time required for the control can be shortened by controlling the output of the thermoelectric module collectively. Further, when the operation amount is different for each thermoelectric module, the output of each thermoelectric module can be individually controlled. The operation amount is specifically the direction of the current supplied to the thermoelectric module and the amount of power supply, and the operation amount becomes equal when the direction of these currents matches the amount of power supply.

  Moreover, it is preferable that a control means adjusts the time when the thermoelectric module is selected (Claim 4).

  [Operation / Effect] According to the invention described in claim 4, the amount of electric power supplied to the thermoelectric module can be suitably controlled by the time during which the current is passed through the thermoelectric module.

  In addition, it is preferable that a detection unit that detects a temperature of the thermoelectric module is provided, and the control unit performs control based on a detection result of the detection unit.

  [Operation and Effect] According to the invention described in claim 5, the control means can accurately control the output of the thermoelectric module.

  Moreover, when individually selecting the thermoelectric modules one by one, it is preferable that the time for selecting all the thermoelectric modules is 10 microseconds or more and 1 second or less.

  [Operation / Effect] According to the invention described in claim 6, the temperature of the thermoelectric module can be prevented from pulsating and appropriately controlled.

  The present specification also discloses an invention relating to the following substrate heat treatment apparatus.

  (1) In the thermoelectric module driving circuit according to claim 1, the first opening / closing means includes a first switching element that short-circuits / opens the first wiring and a positive power source, and the second opening / closing means A thermoelectric module drive circuit comprising a fourth switching element for short-circuiting / opening between the second wiring and the negative power source, wherein the driving means drives the first and fourth switching elements.

  (2) The thermoelectric module drive circuit according to (1), wherein each of the first switching element and the fourth switching element is a transistor.

  (3) In the thermoelectric module drive circuit according to claim 2, the first opening / closing means includes a first switching element that short-circuits / opens the first wiring and the positive power source, and the first wiring and the negative power source. A second switching element for short-circuiting / opening between the second wiring and the second switching means, a third switching element for short-circuiting / opening between the second wiring and a positive power supply, and the second wiring A thermoelectric module driving circuit comprising: a fourth switching element that short-circuits / opens a negative power source; and the driving unit drives the first, second, third, and fourth switching elements. .

  (4) The thermoelectric module driving circuit according to (3), wherein each of the first, second, third, and fourth switching elements is a transistor.

  According to the thermoelectric module drive circuit described in (1) to (4), the first and second opening / closing means can be preferably realized.

  (5) In a substrate heat treatment apparatus for performing heat treatment on a substrate, a heat treatment plate for placing the substrate on or close to the substrate, a plurality of first wirings connected to a positive power supply, and a negative power supply connected to the first wiring A plurality of intersecting second wirings, a plurality of thermoelectric modules provided at intersections of the first wirings and the second wirings and connected to the first and second wirings, respectively, and the first wirings A first opening / closing means for switching a short circuit / opening between the first wiring and the positive power supply; and a short circuit / opening provided between the second wiring and the negative power supply. A second opening / closing means for switching, a driving means for driving the first opening / closing means and the second opening / closing means to select a thermoelectric module, and a control means for operating the driving means to control the output of the thermoelectric module; With a thermoelectric module The substrate heat treatment apparatus characterized by being arranged at a position corresponding to a plurality of regions for partitioning the thermal processing plate.

  (6) In a substrate heat treatment apparatus for performing heat treatment on a substrate, a heat treatment plate on which the substrate is placed or placed in close proximity, a plurality of first wirings that can be connected to a positive power source and a negative power source, and a positive power source and a negative power source can be connected And a plurality of thermoelectric modules provided at intersections of the plurality of second wirings intersecting the first wiring and the first wiring and the second wiring and respectively connected to the first wiring and the second wiring. And a first opening / closing means that is provided for each of the first wirings, and switches between short-circuiting / opening between the first wiring and the positive power source and short-circuiting / opening between the first wiring and the negative power source; A second opening / closing means provided for each of the second wirings, for switching between a short circuit / opening between the second wiring and the positive power source and a short circuit / opening between the second wiring and the negative power source; 1 opening and closing means and the second opening and closing means Driving means for moving and selecting the thermoelectric module; and control means for operating the driving means to control the output of the thermoelectric module, the thermoelectric module corresponding to a plurality of regions dividing the heat treatment plate A substrate heat treatment apparatus, which is disposed at a position.

  (7) In a substrate heat treatment apparatus for performing heat treatment on a substrate, a heat treatment plate for placing the substrate on or close to the substrate, a heating means attached to the heat treatment plate for heating the heat treatment plate, and a plurality connected to a positive power source First wiring, a plurality of second wirings connected to a negative power supply and intersecting the first wiring, and the first and second wirings provided at intersections of the first wiring and the second wiring. A plurality of thermoelectric modules respectively connected to the first wiring, a first opening / closing means for switching a short circuit / opening between the first wiring and a positive power source, and a second wiring A second opening / closing means for switching a short circuit / opening between the second wiring and the negative power source, a driving means for selecting a thermoelectric module by driving the first opening / closing means and the second opening / closing means, Operate drive means And a control means for controlling the output of the thermoelectric module, wherein the thermoelectric module is above a substrate placed on or in close proximity to the heat treatment plate and is divided into a plurality of regions dividing the heat treatment plate. A substrate heat treatment apparatus, wherein the substrate heat treatment apparatus is disposed at an opposed position.

  (8) In a substrate heat treatment apparatus for performing heat treatment on a substrate, a heat treatment plate on which the substrate is placed or placed in close proximity, a heating means attached to the heat treatment plate and heating the heat treatment plate, and connected to a positive power source and a negative power source A plurality of possible first wirings, connectable to a positive power source and a negative power source, provided at a crossing portion of the plurality of second wirings intersecting the first wiring, and the first wiring and the second wiring. A plurality of thermoelectric modules respectively connected to the first and second wirings, provided for each of the first wirings, short-circuited / opened between the first wiring and a positive power source, and the first wiring First opening / closing means for switching between short-circuit / open-circuit with a negative power supply, and short-circuit / open between the second wiring and the positive power supply provided for each second wiring, and the second wiring and the negative power supply Short circuit between A second opening / closing means for switching release, a driving means for driving the first opening / closing means and the second opening / closing means to select a thermoelectric module, and a control for operating the driving means to control the output of the thermoelectric module And the thermoelectric module is disposed above a substrate placed on or in close proximity to the heat treatment plate and at a position facing a plurality of regions dividing the heat treatment plate. A substrate heat treatment apparatus.

  According to the substrate heat treatment apparatus described in (5) to (8), the thermoelectric module for heating or cooling the heat treatment plate can be easily driven and controlled, and the heat treatment can be suitably performed on the substrate.

  According to the thermoelectric module drive circuit according to the present invention, an arbitrary thermoelectric module is selectively supplied with power by short-circuiting the first and second wirings to which the thermoelectric module is connected between the positive electrode and the negative power source. Thus, for the number of thermoelectric modules corresponding to the product of the number of first and second wires, the number of first and second opening / closing means corresponding to the sum of the number of first and second wires is provided. Individual selection is possible by driving. In addition, it is also possible to select all the thermoelectric modules collectively by short-circuiting all the first and second wirings between the positive electrode and the negative power source. Therefore, even if the number of thermoelectric modules increases, the increase in the number of first and second opening / closing means and the number of first and second wirings can be relatively suppressed, and the thermoelectric module driving circuit can be simply configured. .

Embodiment 1 of the present invention will be described below with reference to the drawings.
FIG. 1 is a vertical sectional view illustrating a schematic configuration of the substrate heat treatment apparatus according to the first embodiment.

  A heat treatment plate 1 on which a substrate W to be processed is placed includes a housing 3 having a heat pipe structure and a heat transfer section 5. The housing 3 is disposed below the heat treatment plate 1, and the heat transfer section 5 is disposed above the heat treatment plate 1.

  A sealed space A is formed inside the housing 3. The material of the housing 3 is preferably a highly heat-conductive material, such as aluminum. The space A is in a decompressed state and contains the hydraulic fluid L. Examples of the hydraulic fluid L include water. In addition, a plurality of pillars 11 are provided to ensure strength. Two hydraulic fluid chambers 13 are formed on the bottom surface of the space A by the groove. In each hydraulic fluid chamber 13, a rod-shaped heater 15 is disposed so as to be immersed in the hydraulic fluid L.

  The heat transfer unit 5 is stacked on the upper surface of the housing 3. The upper surface of the heat transfer section 5 becomes the upper surface of the heat treatment plate 1. Examples of the material of the heat transfer unit 5 include ceramics. A plurality of thermoelectric modules 21 are provided in the heat transfer section 5.

  FIG. 2 is a horizontal sectional view of the heat transfer section. As shown in the drawing, a plurality (9) of small spaces B are formed in the heat transfer section 5 by the inner wall 3a, and the heat treatment plate 1 is divided into a plurality of regions corresponding to the small spaces B. A thermoelectric module 21 is provided in the small space B. In addition, in FIG. 2, illustration of the delivery member 37 mentioned later is abbreviate | omitted.

  Each small space B is formed so that the thermoelectric modules 21 can be arranged concentrically. Specifically, a single thermoelectric module 21-1 is disposed at the center of the heat treatment plate 1, and eight thermoelectric modules 21-2 to 21-9 are disposed on a circumference concentric with the center. (Hereinafter, abbreviated as thermoelectric module 21 when it is not necessary to distinguish between them).

  FIG. 3 is a cross-sectional view of the thermoelectric module. The thermoelectric module 21 includes a P-type Peltier element 23p and an N-type Peltier element 23n, which are electrically connected in series via the electrode 25. On both sides thereof, two ceramic plates 27a and 27b are provided to achieve electrical insulation and to transfer heat to the outside. The thermoelectric module 21 shown in FIG. 3 includes a plurality of P-type Peltier elements 23p and N-type Peltier elements 23n. The thermoelectric module 21 includes at least a pair of P-type Peltier elements 23p and N-type Peltier elements. 23n.

  When a direct current is passed through the thermoelectric module 21 in the direction shown in the figure, the upper surface of the thermoelectric module 21 generates heat (dissipates heat) and the lower surface absorbs heat. When the direction of current flow is changed, the lower surface generates heat and the upper surface absorbs heat. Below, the direction of the electric current that flows when the upper surface of the heat treatment plate 1 is heated by the heat generated by the thermoelectric module 21 is referred to as the forward direction, and the opposite direction is referred to as the reverse direction.

  In addition, nine first sensors 31 that detect the temperature of each thermoelectric module 21 are provided on the upper surface of the heat transfer section 5. A single second sensor 33 for detecting temperature is provided on the upper surface of the housing 3. The first sensor 31 corresponds to the detection means in this invention.

  Further, on the upper surface of the heat transfer section 5, a plurality of support members 35 that form a proximity gap and place the substrate W close to each other are provided. In the present embodiment, three support members 35 are arranged at the positions of the vertices of the regular triangle in plan view. The shape of the support member 35 is spherical, and the material is exemplified by ceramic. Three recesses (not shown) slightly shallower than the diameter of the support member 35 are formed on the upper surface of the heat treatment plate 1, and the support member 35 is fitted into each of these recesses.

  Furthermore, a delivery member 37 for delivering the substrate W to / from a transport unit (not shown) is provided. In the present embodiment, three delivery members 37 are arranged at the positions of the apexes of the regular triangle in plan view, avoiding the position of the support member 35. The shape of the delivery member 37 is a rod-like body, and the material is exemplified by ceramic. At each position of the delivery member 37, a through hole 39 that penetrates the heat treatment plate 1 from its upper surface to its lower surface is formed, and the delivery member 37 is inserted into each through hole 39. The lower end of each delivery member 37 is connected to a single support base 41 in common. The support base 41 is connected to the operating shaft of the air cylinder 43. The air cylinder 43 drives the support base 41 up and down. The transfer member 37, the support base 41, and the air cylinder 43 function as a substrate transfer portion.

  A cover 51 is provided above the heat treatment plate 1. An opening is formed at the center of the cover 51. An exhaust duct 53 is connected to this opening. One end of an arm 55 is connected to the side of the cover 51. The other end of the arm 55 is screwed to the screw shaft 57. The lower end of the screw shaft 57 is connected to the electric motor 59. The electric motor 59 moves the cover 51 up and down by rotating the screw shaft 57. The arm 55, the screw shaft 57, and the electric motor 57 function as a cover lifting / lowering unit.

  Next, a control system for the thermoelectric module 21 and the rod heater 15 will be described. FIG. 4 is a block diagram showing an outline of a control system for the thermoelectric module and the rod heater. As shown in the figure, the control system is largely divided into a thermoelectric module drive circuit 61 and a heater drive circuit 62.

  First, the thermoelectric module drive circuit 61 will be described. A plurality (three) of first wirings 63a, 63b, 63c (hereinafter abbreviated as first wiring 63 unless otherwise required) and a plurality (three) of second wirings 64a, 64b, 64c. (Hereinafter, abbreviated as the second wiring 64 if it is not necessary to distinguish between them) is laid so as to cross each other in the vicinity of the position where each thermoelectric module 21 is arranged. The first wiring 63 and the second wiring 64 are connected to both ends of the thermoelectric module 21 at each intersection. As a result, nine thermoelectric modules 21 are electrically arranged in three rows and three columns in two axial directions along the first wiring 63 and the second wiring 64, and the thermoelectric modules 21 in each column are shared by the first wiring 63. The thermoelectric modules 21 in each row are connected to the second wiring 64 in common. That is, each thermoelectric module 21 is electrically connected in a matrix.

  In this embodiment, the first direction is such that the direction in which the current flows from the first wiring 63 to the thermoelectric module 21 is the forward direction and the direction in which the current flows from the second wiring 64 to the thermoelectric module 21 is the reverse direction. The second wirings 63 and 64 are connected to the thermoelectric module 21.

  Each first wiring 63 is provided with first switches 65a, 65b, 65c (hereinafter, abbreviated as first switch 65 unless it is particularly necessary to distinguish). Similarly, each second wiring 64 is provided with second switches 66a, 66b, and 66c (hereinafter abbreviated as second switch 66 when it is not necessary to distinguish them).

  Since the first switches 65a, 65b, and 65c have the same structure, the first switch 65a will be described as an example. The first switch 65a includes an NPN-type first transistor Tr1a and a PNP-type second transistor Tr2a. A first wiring 63a is commonly connected to the emitters of the first transistor Tr1a and the second transistor Tr2a. A positive power supply line 67 is connected to the collector of the first transistor Tr1a, and a negative power supply line 68 is connected to the collector of the second transistor Tr2a.

  Since each of the second switches 66a, 66b, and 66c has the same structure, the second switch 66a will be described as an example. The second switch 65a includes an NPN-type third transistor Tr3a and a PNP-type fourth transistor Tr4a. A second wiring 64a is commonly connected to the emitters of the third transistor Tr3a and the fourth transistor Tr4a. A positive power supply line 67 and a negative power supply line 68 are connected to the collectors of the third transistor Tr3a and the fourth transistor Tr4a, respectively.

  Here, the positive power source line 67 and the negative power source line 68 are connected to the positive power source and the negative power source of the DC power source 69, respectively. The DC power source 69 supplies a relatively low voltage DC power according to the specifications of the thermoelectric module 21.

  A first gate line 70a is connected to the bases of the first transistor Tr1a and the second transistor Tr2a. A second gate line 71a is connected to each base of the third transistor Tr3a and the fourth transistor Tr4a. A gate circuit 73 is connected to the other ends of the first and second gate lines 70a and 71a. The gate circuit 73 outputs a gate pulse for turning on / off the first, second, third, and fourth transistors Tr1a, Tr2a, Tr3a, and Tr4a. The first, second, third, and fourth transistors Tr1a, Tr2a, Tr3a, and Tr4a are conductive between the collector and the emitter in the on state, and non-conductive between the collector and the emitter in the off state.

  Therefore, the first switch 65a short-circuits between the first wiring 63a and the positive power supply line 67 by turning on the first transistor Tr1a and turning off the second transistor Tr2a. Further, the first switch 65a short-circuits between the first wiring 63a and the negative power supply line 68 by turning off the first transistor Tr1a and turning on the second transistor Tr2a. Further, the first switch 65a opens the first wiring 63a by turning off the first and second transistors Tr1a and Tr2a.

  Similarly, when the third transistor Tr3a is turned on and the fourth transistor Tr4a is turned off, the second switch 66a short-circuits between the second wiring 64a and the positive power supply line 67. In addition, the third switch Tr3a is turned off and the fourth transistor Tr4a is turned on, so that the second switch 66a short-circuits between the second wiring 64a and the negative power supply line 68. Further, by turning off the third and fourth transistors Tr3a and Tr4a, the second switch 66a opens the second wiring 64a.

  As described above, the first switch 65 switches between connecting the first wiring 63 to the positive power source or the negative power source or opening the first wiring 63. The second switch 66 switches the second wiring 64 to either a positive power source or a negative power source or to open the second wiring 64. The first switch 65 and the second switch 66 correspond to the first opening / closing means and the second opening / closing means in the present invention, respectively. The gate circuit 73 corresponds to the driving means in the present invention.

  The gate circuit 73 is connected to the thermoelectric module control unit 74. The thermoelectric module control unit 74 is further connected to an input unit 75 that receives an input of a target temperature of the thermoelectric module 21 by the user and the first detection sensor 31. The thermoelectric module control unit 74 determines the operation amount based on the detection result of the first detection sensor 31 and the target temperature of the thermoelectric module 21. The operation amount is the direction of current supplied to the thermoelectric module 21 (separate between “forward direction” and “reverse direction”) and the amount of power supplied to the thermoelectric module 21. The thermoelectric module control unit 74 operates the gate circuit 73 with such an operation amount, and controls the output of the thermoelectric module 21.

  The input unit 75 includes a mouse, a keyboard, and the like. In addition, the thermoelectric module controller 74 includes a central processing unit (CPU) that executes various processes, a RAM (Random-Access Memory) that is a work area for arithmetic processes, and a storage medium such as a fixed disk that stores various types of information. Etc. are realized. The thermoelectric module control unit 74 corresponds to the control means in this invention.

  Next, the heater drive circuit 62 will be described. Each bar heater 15 is electrically connected to an AC power source 82 via a power switch 81. The heater control unit 83 cooperates with the thermoelectric module control unit 74 and obtains the target temperature of the housing 3 with reference to the target temperature of the thermoelectric module 21. Based on the target temperature and the detection result of the second sensor 33, the power switch 81 is turned on / off. The heater control unit 83 is also realized by a central processing unit that executes various types of processing, a RAM that is a work area for arithmetic processing, a storage medium such as a fixed disk that stores various types of information, and the like.

  Next, the operation of the substrate heat treatment apparatus configured as described above will be described with reference to FIG. FIG. 5 is a flowchart showing a processing procedure by the substrate heat treatment apparatus.

<Step S <b>1> Controlling the Temperature of the Heat Treatment Plate 1 The thermoelectric module drive circuit 61 and the heater drive circuit 62 operate the thermoelectric module 21 and the rod-shaped heater 15 to control the temperature of the heat treatment plate 1. This temperature control will be described later.

<Step S2> Loading Substrate W The electric motor 59 is driven to raise the cover 51. When the substrate W is carried in from the lateral direction by a transfer means (not shown), the air cylinder 43 is driven to raise the delivery member 37, and the raised delivery member 37 receives the substrate W. Thereafter, the air cylinder 43 is lowered and the substrate W is transferred from the transfer member 37 to the support member 35. Further, the electric motor 59 is driven to lower the cover 51.

<Step S3> Heat-treating the substrate W The substrate W is heat-treated for a predetermined period. At this time, the heated gas (for example, nitrogen) in the vicinity of the heat treatment plate 1 is exhausted from the substrate heat treatment apparatus through the exhaust duct 53.

<Step S4> Unloading the substrate W The operation opposite to that in step S2 is performed to unload the substrate W from the substrate heat treatment apparatus.

<Step S5> Is there a substrate W to be heat-treated?
If there is another substrate W to be heat-treated, the process returns to step S1. Then, the temperature of the heat treatment plate 1 is changed and controlled as necessary. If there is no substrate W to be heat-treated, the process ends.

  Next, the temperature control of the heat treatment plate 1 shown in step S1 will be described separately for the thermoelectric module drive circuit 61 and the heater drive circuit 62. It is assumed that the target temperatures of the thermoelectric module 21 and the housing 3 have already been acquired.

<Heater drive circuit 62>
The heater control unit 83 compares the target temperature of the housing 3 with the detection result of the second sensor 33. When the detection result of the second sensor 33 does not reach the target temperature of the housing 3, the power switch 81 is set to the “ON” state. As a result, the AC power supply 82 supplies power to the bar heater 15 and the bar heater 15 generates heat. The hydraulic fluid L stored in the hydraulic fluid chamber 13 is heated by the rod-shaped heater 15 and eventually evaporates. The evaporated working fluid (hereinafter simply referred to as “steam G”) reaches the ceiling surface of the space A and convects. As the vapor G condenses, the upper surface of the housing 3 is heated uniformly.

  While supplying power to the rod-shaped heater 15, the heater control unit 83 continuously obtains the detection result of the second sensor 33 and determines whether or not the target temperature of the housing 3 has been reached. Then, power supply to the rod heater 15 is continued until the target temperature is reached, and then power supply is stopped.

<Thermoelectric module drive circuit 61>
The thermoelectric module control unit 74 determines the operation amount. That is, the target temperature of each thermoelectric module 21 and the detection result of the first sensor 31 are compared, and the direction of the current supplied to the thermoelectric module 21 is determined. Specifically, when the detection result of the first sensor 31 is lower than the target temperature, it is determined as “forward direction”, and when it is higher than the target temperature, it is determined as “reverse direction”. Further, in the present embodiment, if they match, it is determined as “stop”.

  Further, the amount of power supplied to the thermoelectric module 21 is determined according to the difference between the target temperature of each thermoelectric module 21 and the detection result of the first sensor 31. In this embodiment, it is expressed as a percentage with respect to the maximum power supply amount.

  This will be specifically described with reference to FIG. FIG. 6A is a diagram schematically illustrating an example of operation amount information determined by the thermoelectric module control unit. As illustrated, the direction of current and the amount of power supply are determined for each thermoelectric module 21.

  Further, the thermoelectric module control unit 74 individually controls the output of the thermoelectric module 21 when the operation amount (the direction of current and the amount of power supply) is different for each thermoelectric module 21. Further, when the operation amount is equal, the thermoelectric modules 21 are collectively controlled. In the following, description will be given separately for individual control and collective control.

[Individual control]
The gate circuit 73 is divided into nine periods in time according to the nine thermoelectric modules 21, and selects one thermoelectric module 21 in each period. The nine periods are repeated as one cycle. Note that the shorter the period, the better. Specifically, it is desirable to be 1 microsecond to 1 second.

  In each period, the first wiring 63 and the second wiring 64 to which the single thermoelectric module 21 to which the period is assigned are connected are respectively used as the positive power supply and the negative power supply, or the negative power supply and the positive power supply. The first and second switches 65 and 66 are driven so as to be short-circuited to each other. In this way, by connecting the first wiring 63 and the second wiring 64 to power supplies having different polarities, the thermoelectric module 21 can be selectively supplied with power. Here, the polarity of the connected power source is inverted according to the direction of the current supplied to the thermoelectric module 21. In other words, the first wiring 63 is connected to the positive power source if it is in the forward direction, and the first wiring 63 is connected to the negative power source if it is in the reverse direction. The other first and second switches 65 and 66 open the first and second wirings 63 and 64, respectively. For this reason, power is not supplied to other than the assigned thermoelectric module 21.

  Further, the time during which the first and second switches 65 and 66 are on is changed by changing the pulse width of the gate pulse in accordance with the amount of power supplied to the thermoelectric module 21. Thus, the time during which the thermoelectric module 21 is actually selected is adjusted within the period assigned to the thermoelectric module 21.

  This will be described with reference to FIG. FIG. 6B is a timing chart for driving the first switch and the second switch by the gate circuit. In the figure, “+” indicates that the first (second) wiring 63 (64) and the positive power source are short-circuited, and “−” indicates the first (second) wiring 63 (64). ) And the negative power supply are short-circuited, and “off” indicates that the first (second) wiring 63 (64) is open.

  Here, the period t1 to the period t9 are periods obtained by dividing one cycle into nine, and are periods allocated from the thermoelectric module 21-1 to the thermoelectric module 21-9, respectively.

  As illustrated in FIG. 6A, the direction of the current supplied to the thermoelectric module 21-1 is “positive direction”, and the power supply amount is 100%. Therefore, over the entire period t1, the first switch 65a short-circuits between the first wiring 63a and the positive power source, and the second switch 66a short-circuits between the second wiring 64a and the negative power source. Thereby, a current flows through the thermoelectric module 21-1 in the positive direction, the thermoelectric module 21-1 generates heat, and the heat treatment plate 1 is heated.

  The other first switches 65b and 65c and the second switches 66b and 66c open the first wirings 63b and 63c and the second wirings 64b and 64c, respectively. Therefore, power is not supplied from the thermoelectric modules 21-2 to 21-9, and the thermoelectric modules 21-2 are stopped.

  In the period t2, the first and second switches 65b and 66a are driven so as to be short-circuited between the first wiring 63b and the negative power source and to be connected to the second wiring 64a and the positive power source. As a result, current flows only in the thermoelectric module 21-2 in the reverse direction, and the thermoelectric module 21-2 absorbs heat. Therefore, the heat treatment plate 1 is cooled.

  In the period t3, the first and second switches 65 and 66 open all the first and second wirings 63 and 64. As a result, the thermoelectric module 21-3 to which the period t3 is assigned is stopped.

  In the period t4, the first wiring 63a is connected to the positive power source and the second wiring 64b is connected to the negative electrode side only in the first half of the period. In the second half of the period t4, the first wiring 63a and the second wiring 64b are opened. As a result, a current flows through the thermoelectric module 21-4 only for half of the period t4, and the thermoelectric module 21-4 generates heat for 50% of the amount of heat corresponding to the maximum power supply amount.

  Also from the period t5 to the period t9, the thermoelectric module 21-9 to the thermoelectric module 21-9 are individually selected one by one, and the thermoelectric module 21 generates heat, absorbs heat, or stops. Then, when the period t9 ends, the period t1 starts again.

  While power is being supplied to the thermoelectric module 21, the thermoelectric module control unit 74 continuously obtains the detection result of the first sensor 31 and determines whether or not it matches the target temperature. As a result, when it coincides with the target temperature, the output control of the thermoelectric module 21 is terminated.

[Batch control]
When the operation amount of each thermoelectric module 21 is equal, the outputs of all the thermoelectric modules 21 can be controlled collectively.

  For example, when the thermoelectric module control unit 74 determines that the current direction is “positive direction” and the power supply amount is “100%” for all the thermoelectric modules 21, the gap between all the first wires 63 and the positive power supply is determined. The first switches 65 and the second switches 66 are driven so as to short-circuit and short-circuit between all the second wires 64 and the negative power source. As a result, a current flows in all thermoelectric modules 21 in the positive direction. When the direction of the current is “reverse direction”, all the first wirings 63 are connected to the negative power source by the first switch 65, and all the second wirings 64 are connected to the positive power source by the second switch 66. You can do it.

  Thus, according to the thermoelectric module drive circuit 61 provided in the substrate heat treatment apparatus according to the present embodiment, since each thermoelectric module 21 is electrically connected in a matrix form, the three first switches 65 and three The nine thermoelectric modules 21 can be individually selected by the second switch 66. Therefore, even if the number of thermoelectric modules 21 increases, it is possible to suppress an increase in the number of first switches 65 and second switches 66. Accordingly, the number of first wirings 63 and second wirings 64 and the increase in the number of first gate lines 70 and second gate lines 71 can be suppressed, and the thermoelectric module driving circuit 61 can be simply configured. Can do.

  In addition, the first switch 65 and the second switch 66 can be switched to either connect the first wiring 63 to the positive power source or the negative power source or open the first wiring 63 and the second wiring 64. Since it comprises, the direction of the electric current which flows into each thermoelectric module 21 can be changed. Thereby, heating and cooling by the thermoelectric module 21 can be switched and controlled.

  In addition, since all the thermoelectric modules 21 can be selected simultaneously by driving each first switch 65 and each second switch 66, all the thermoelectric modules 21 can generate heat or absorb heat collectively. Thereby, the output control of the thermoelectric module 21 can be performed in a short time.

  In addition, the amount of power supplied to the thermoelectric module 21 can be suitably controlled by changing the pulse width of the gate pulse to adjust the time during which the thermoelectric module 21 is selected.

  Moreover, since the thermoelectric module control part 74 determines the operation amount based on the detection result of the 1st sensor 31, it can control the output of the thermoelectric module 21 exactly.

  Further, since the period of one cycle is relatively short from 1 microsecond to 1 second, it is possible to prevent the temperature of each thermoelectric module 21 from pulsating.

  In addition, since the thermoelectric module drive circuit 61 is provided, the substrate heat treatment apparatus can suitably perform the temperature control of the heat treatment plate 1 and appropriately heat treat the substrate.

  The present invention is not limited to the above-described embodiment, and can be modified as follows.

  (1) In the above-described embodiment, the first switch 65 and the second switch 66 are configured to switch between connection with a positive power source or negative power source or opening of the first and second wirings 63 and 64. However, it is not limited to this.

  Please refer to FIG. Each first switch 95 is provided with a single transistor, and the collector of this transistor is connected to the positive power supply line 67 and the emitter is connected to the first wiring 63. Similarly, each second switch 96 is also provided with a single transistor. The collector of this transistor is connected to the negative power supply line 68, and the emitter is connected to the second wiring 64.

  With this configuration, the first switch 95 switches whether or not the first wiring 63 is connected to the positive power source, and the second switch 96 determines whether or not the second wiring 64 is connected to the negative power source. Switch. Even with this configuration, the output of the thermoelectric module 21 can be controlled. However, the output of the thermoelectric module 21 is limited to either heat absorption or heat generation.

(2) In the embodiment described above, in the “individual control” by the thermoelectric module control unit 74, the first and second wires 63 and 64 connected to other than the selected thermoelectric module 21 are the first and second switches. 65 and 66. In addition, when the assigned thermoelectric module 21 is “stopped”, the first and second wirings 63 and 64 to which the thermoelectric module 21 is connected are opened by the first and second switches 65 and 66. It was. However, the driving of the first and second switches 65 and 66 when power is not supplied to the thermoelectric module 21 is not limited to this. For example, the first and second wirings 63 and 64 connected to the thermoelectric module 21 are both short-circuited with the power source having the same polarity, so that the thermoelectric module 21 is not supplied with power. In addition, when one of the first and second wirings 63 and 64 connected to the thermoelectric module 21 is opened, power is not supplied to the thermoelectric module 21. As described above, the driving of the first and second switches 65 and 66 can be appropriately changed as long as any thermoelectric module 21 can be selected.

  (3) In the above-described embodiment, the first switch 65 and the second switch 66 are provided with the first to fourth transistors Tr1 to Tr4 as switching elements. However, the present invention is not limited to this. For example, it can be appropriately replaced with a semiconductor such as a field effect transistor (FET) or a switching element such as a relay.

  (4) In the above-described embodiment, the configuration includes the input unit 75 that receives the input of the target temperature of the thermoelectric module 21, but is not limited thereto. For example, the input unit 75 can be omitted by setting the target temperature of the thermoelectric module 21 in advance in a storage medium or the like included in the thermoelectric module control unit 74.

  (5) In the above-described embodiment, the amount of power supplied to the thermoelectric module 21 is realized by adjusting the time during which the thermoelectric module 21 is selected by changing the pulse width of the gate pulse, but is not limited thereto. . For example, the amount of power supplied to the thermoelectric module 21 may be adjusted by changing the voltage applied to the thermoelectric module 21 or the supplied current.

  (6) In the above-described embodiment, each thermoelectric module 21 is configured to be able to be fed by a single DC power supply 69, but is not limited thereto. When appropriate voltage values are different between the thermoelectric modules 21, separate DC power supplies having different output voltages may be provided for the thermoelectric modules 21.

  (7) In the embodiment described above, the direction in which the current flows from the first wiring 63 to the thermoelectric module 21 is the forward direction, and the direction in which the current flows from the second wiring 64 to the thermoelectric module 21 is the reverse direction. Although the 1st, 2nd wiring 63 and 64 was connected to the thermoelectric module 21, it is not restricted to this. The connection of the first and second wirings 63 and 64 may be changed as appropriate.

  (8) In the embodiment described above, the number of the first and second wirings 63 and 64 is three and the number of the thermoelectric modules 21 is nine. However, the number can be changed as appropriate. Further, the number of the thermoelectric modules 21 does not need to match the product of the numbers of the first and second wirings 63 and 64.

  (9) In the above-described embodiment, the thermoelectric modules 21 are illustrated as being concentrically arranged. However, the present invention is not limited to this. The shape of the thermoelectric module 21 can be freely changed and can be arranged in an arbitrary section. For example, the thermoelectric module 21 may be arranged in an annular shape (ring shape). That is, by arranging a plurality of annular thermoelectric modules 21 having different diameters, a temperature gradient can be efficiently applied between the center and the periphery of the substrate W.

  (10) In the above-described embodiment, the thermoelectric module 21 is attached to the heat treatment plate 1, but is not limited thereto. For example, you may comprise so that it may arrange | position above the heat processing plate 1. FIG.

  FIG. 8 is a vertical sectional view showing a schematic configuration of a substrate heat treatment apparatus according to a modification. The heat treatment plate 1 according to the modification is provided with a mica heater 91 at the lower portion, and a heat transfer body 93 is provided between the mica heater 91 and the upper surface of the heat treatment plate 1. Note that no thermoelectric module is disposed in the heat transfer body 93.

  And in the cover 51 provided above the heat processing plate 1, the some thermoelectric module 21 is arrange | positioned so that the several area | region which divides the heat processing plate 1 may be opposed. It is desirable that the thermoelectric module 21 be installed so that the lower surface of the thermoelectric module 21 has a height of 1 mm to 10 mm above the substrate W when heat treatment is performed.

  On the upper surface side of each thermoelectric module 21, a thermostat 94 that is adjusted to a predetermined constant temperature is provided. As the constant temperature body 94, a heat exchanger or the like in which constant temperature water adjusted to a constant temperature circulates is exemplified.

  Each thermoelectric module 21 includes a thermoelectric module drive circuit 61 together with the first and second wirings 63 and 64, the first and second switches 65 (95) and 66 (96), the gate circuit 73, the thermoelectric module control unit 74, and the like. Configure. With this configuration, heat can be radiated from the thermoelectric module 21 to the upper surface of the heat treatment plate 1, and the temperature management of the heat treatment plate 1 can be suitably performed.

  (11) In the above-described embodiment, the thermoelectric module driving circuit 61 is applied to the substrate heat treatment apparatus. Further, the thermoelectric module drive circuit 61 alone can be used as a heating device, a cooling device, or a temperature control device.

1 is a vertical sectional view showing a schematic configuration of a substrate heat treatment apparatus according to Example 1. FIG. It is a horizontal sectional view of a heat transfer part. It is sectional drawing of a thermoelectric module. It is a block diagram which shows the outline of the control system of a thermoelectric module and a rod-shaped heater. It is a flowchart which shows the process sequence by a substrate heat processing apparatus. (A) is a figure which shows typically an example of the information of the operation amount determined by the thermoelectric module control part, (b) is a timing chart of the drive of the 1st switch and 2nd switch by a gate circuit. It is a block diagram which shows the outline of the control system of the thermoelectric module and rod-shaped heater which concern on a modification. It is a vertical sectional view showing a schematic configuration of a substrate heat treatment apparatus according to a modification.

Explanation of symbols

W ... Substrate 1 ... Heat treatment plate 3 ... Housing 5 ... Heat transfer part 15 ... Rod heater L ... Hydraulic fluid A ... Space 21 ... Thermoelectric module 31 ... First sensor 61 ... Thermoelectric module drive circuit 63 ... First wiring 64 ... Second Wiring 65 ... First switch 66 ... Second switch 67 ... Positive power supply line 68 ... Negative power supply line 69 ... DC power supply 70 ... First gate line 71 ... Second gate line 73 ... Gate circuit 74 ... Thermoelectric module controller 75 ... Input Part

Claims (6)

In the thermoelectric module drive circuit that drives the thermoelectric module,
A plurality of first wires connected to the positive power supply;
A plurality of second wirings connected to a negative power supply and intersecting the first wiring;
A plurality of thermoelectric modules provided at intersections of the first wiring and the second wiring and respectively connected to the first and second wirings;
A first opening / closing means provided for each of the first wirings, for switching between short circuit / opening between the first wiring and a positive power source;
A second opening / closing means provided for each of the second wirings, for switching between short circuit / opening between the second wiring and a negative power source;
Driving means for selecting the thermoelectric module by driving the first opening and closing means and the second opening and closing means;
Control means for operating the drive means to control the output of the thermoelectric module;
A thermoelectric module drive circuit comprising: In the thermoelectric module drive circuit that drives the thermoelectric module,
A plurality of first wires connectable to a positive power source and a negative power source;
A plurality of second wirings connectable to a positive power supply and a negative power supply and intersecting the first wiring;
A plurality of thermoelectric modules provided at intersections of the first wiring and the second wiring and respectively connected to the first and second wirings;
A first opening / closing means that is provided for each of the first wirings, and switches between short-circuiting / opening between the first wiring and the positive power source and short-circuiting / opening between the first wiring and the negative power source;
A second opening / closing means that is provided for each of the second wirings and switches between short-circuiting / opening between the second wiring and the positive power source and short-circuiting / opening between the second wiring and the negative power source;
Driving means for selecting the thermoelectric module by driving the first opening and closing means and the second opening and closing means;
Control means for operating the drive means to control the output of the thermoelectric module;
A thermoelectric module drive circuit comprising: In the thermoelectric module drive circuit according to claim 1 or 2,
The control means causes all thermoelectric modules to be selected simultaneously when the operation amount is equal for each thermoelectric module, and individually selects one thermoelectric module when the operation amount is different for each thermoelectric module. Module drive circuit. In the thermoelectric module drive circuit according to any one of claims 1 to 3,
The thermoelectric module driving circuit characterized in that the control means adjusts a time during which the thermoelectric module is selected. In the thermoelectric module drive circuit according to any one of claims 1 to 4,
A detecting means for detecting the temperature of the thermoelectric module;
The thermoelectric module drive circuit, wherein the control means performs control based on a detection result of the detection means. In the thermoelectric module drive circuit according to any one of claims 1 to 5,
A thermoelectric module driving circuit characterized in that when selecting one thermoelectric module at a time, the time for selecting all thermoelectric modules is 10 microseconds or more and 1 second or less.

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