JP2007199032A - Correlation cell for gas detection, its manufacturing method, and infrared gas detection device - Google Patents
Correlation cell for gas detection, its manufacturing method, and infrared gas detection device Download PDFInfo
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本発明は、例えばガスフィルタ相関法方式を利用したガス検知装置において用いられるガス検知用相関セルおよびその作製方法、並びにこのガス検知用相関セルを備えた赤外線式ガス検知装置に関する。 The present invention relates to a gas detection correlation cell used in, for example, a gas detection apparatus using a gas filter correlation method, a method for manufacturing the same, and an infrared gas detection apparatus including the gas detection correlation cell.
現在、例えばＣＯやＮ2 Ｏなどのガス検知を行う方法として、赤外線が検知対象ガスによって吸収されることによる赤外線光量の減衰の程度に応じてガス濃度を検出する非分散型赤外線吸収法が知られているが、高い精度でかつ安定的にガス検知を行うことができることから、赤外線光源から放射される赤外光をガス検知用相関セル（ガス相関フィルタ）を介して導入する、ガスフィルタ相関法が利用されている。
ガス検知用相関セルは、適宜の駆動源によって回転駆動されて用いられ、一定濃度の検知対象ガスと同種のガス、赤外線に対して不活性なガスとがそれぞれ封入された２つのガス室が回転軸を中心に対称的に形成されてなるものである。
Currently, as a method for detecting gas such as CO and N 2 O, there is known a non-dispersive infrared absorption method for detecting a gas concentration according to the degree of attenuation of the amount of infrared light due to absorption of infrared light by a detection target gas. However, since gas detection can be performed with high accuracy and stability, infrared light emitted from an infrared light source is introduced through a gas detection correlation cell (gas correlation filter). The law is being used.
The gas detection correlation cell is rotated and used by an appropriate driving source, and two gas chambers each containing a certain concentration of detection target gas, the same kind of gas, and a gas inert to infrared rays are rotated. It is formed symmetrically about the axis.
ガスフィルタ相関法においては、ガス検知用相関セルが回転駆動されることにより２つのガス室が赤外線光源からサンプルセルに至る光路上を交互に通過し、検知対象ガスと同種のガスが封入されたガス室を透過した赤外光に係るセンサ信号と、不活性ガスが封入されたガス室を透過した赤外光に係るセンサ信号との差信号または信号比に基づいて、サンプルセル内に導入される被検ガス中に含まれる検知対象ガスの濃度が検出される。 In the gas filter correlation method, the gas detection correlation cell is driven to rotate, so that the two gas chambers alternately pass on the optical path from the infrared light source to the sample cell, and the same kind of gas as the detection target gas is enclosed. Based on the difference signal or signal ratio between the sensor signal related to the infrared light transmitted through the gas chamber and the sensor signal related to the infrared light transmitted through the gas chamber filled with the inert gas, it is introduced into the sample cell. The concentration of the detection target gas contained in the detected gas is detected.
このようなガス検知用相関セルは、例えばセル本体に形成された２つのガス室内に所定のガスを注入した後、当該ガス室内にガスを封入するためのガス封入用流路を気密に封止することにより作製することができるが、ガス封入作業は、例えばセル本体にパイプ材等を接続してガス室内を真空引きした後、所定のガスを注入し、当該パイプ材を例えばかしめ加工により気密に封止することにより行われている（例えば特許文献１参照）。 Such a correlation cell for gas detection, for example, injects a predetermined gas into two gas chambers formed in the cell body, and then hermetically seals a gas sealing channel for sealing the gas in the gas chamber. However, the gas filling operation can be performed, for example, by connecting a pipe material or the like to the cell body and evacuating the gas chamber, and then injecting a predetermined gas and air-tightening the pipe material by, for example, caulking. (See, for example, Patent Document 1).
しかしながら、ガスをガス室に注入した後にガス封入用流路を気密に封止する方法では、ガス封入作業を行うに際してセル本体にパイプ材等を接続することが必要となるので、高い生産性でガス検知用相関セルを作製することができないばかりか、ガス封入用流路を気密に封止するまでに不可避的に生ずるガス漏れの程度が大きく、所期の性能を有するものとして構成することが困難である、という問題がある。 However, in the method of hermetically sealing the gas filling flow path after injecting the gas into the gas chamber, it is necessary to connect a pipe material or the like to the cell body when performing the gas filling operation. The correlation cell for gas detection cannot be produced, and the degree of gas leakage that inevitably occurs until the gas sealing flow path is hermetically sealed is large, so that it can be configured to have the expected performance. There is a problem that it is difficult.
本発明は、以上のような事情に基づいてなされたものであって、ガス封入作業時におけるガス漏れの程度が小さく、所期の機能を有するものとして確実に構成することができると共に、高い気密性を有するガス検知用相関セルを提供することを目的とする。
本発明の他の目的は、ガス封入作業時におけるガス漏れの程度を小さく抑制しながら、ガス封入作業を容易に行うことができると共に、気密性の高いシール構造を容易に形成することができ、従って、所期の機能を有するものを高い作業性で確実に作製することのできるガス検知用相関セルの作製方法を提供することにある。
また、本発明のさらに他の目的は、所期のガス検知を高い信頼性をもって確実に行うことのできる赤外線式ガス検知装置を提供することにある。
The present invention has been made on the basis of the above circumstances, and can be reliably configured to have a desired function with a small degree of gas leakage at the time of gas filling operation and high airtightness. An object of the present invention is to provide a correlation cell for gas detection having the property.
Another object of the present invention is to easily perform the gas filling operation while suppressing the degree of gas leakage during the gas filling operation, and to easily form a highly airtight seal structure. Accordingly, it is an object of the present invention to provide a method for producing a correlation cell for gas detection that can reliably produce a cell having an intended function with high workability.
Still another object of the present invention is to provide an infrared gas detection device capable of reliably performing desired gas detection with high reliability.
本発明のガス検知用相関セルは、検知対象ガスと同種のガスが封入された測定ガス室および比較ガスが封入された比較ガス室を有するガス検知用相関セルであって、
測定ガス室および比較ガス室の各々に連通するガス封入用流路を封止した後、測定ガス室および比較ガス室の各々に所定のガスを封入することにより得られたものであることを特徴とする。
The correlation cell for gas detection of the present invention is a correlation cell for gas detection having a measurement gas chamber in which the same kind of gas as the detection target gas is sealed and a comparison gas chamber in which a comparison gas is sealed,
It is obtained by sealing a gas-filling flow path communicating with each of the measurement gas chamber and the comparison gas chamber and then encapsulating a predetermined gas in each of the measurement gas chamber and the comparison gas chamber. And
本発明のガス検知用相関セルにおいては、閉塞部材がガス封入用流路内に収容され、さらに、当該ガス封入用流路内に固定用ネジが装着されることにより、ガス封入用流路が気密に封止された構成とされていることが好ましい。 In the correlation cell for gas detection of the present invention, the closing member is accommodated in the gas sealing flow path, and further, a fixing screw is mounted in the gas sealing flow path, whereby the gas sealing flow path is It is preferable that the structure is hermetically sealed.
本発明のガス検知用相関セルの作製方法は、測定ガス室形成用空間および比較ガス室形成用空間、並びに当該空間の各々に連通するガス封入用流路が形成されたセル本体を作製し、当該セル本体におけるガス封入用流路を閉塞部材によって封止して測定ガス室および比較ガス室を形成した後、測定ガス室および比較ガス室の各々に所定のガスを封入することを特徴とする。 The method for producing a correlation cell for gas detection of the present invention produces a cell main body in which a measurement gas chamber formation space and a comparison gas chamber formation space, and a gas filling passage communicating with each of the spaces are formed, A gas-filling flow path in the cell body is sealed with a closing member to form a measurement gas chamber and a comparison gas chamber, and then a predetermined gas is sealed in each of the measurement gas chamber and the comparison gas chamber. .
本発明のガス検知用相関セルの作製方法においては、樹脂製の閉塞部材を全体が収容された状態でガス封入用流路内に装着することにより測定ガス室および比較ガス室を形成し、ガス注入用管部材を閉塞部材に穿刺して先端部をガス室またはガス封入用流路内に突出させ、各々のガス室内を真空引きした後、当該ガス注入用管部材を利用して測定ガス室および比較ガスの各々に所定のガスを注入し、ガス封入用流路内に固定用ネジを装着することによりガス封入用流路を気密に封止することができる。 In the method for producing a correlation cell for gas detection according to the present invention, a measurement gas chamber and a comparison gas chamber are formed by mounting a resin-made blocking member in a gas-filled flow path in a state where the whole is accommodated. After the injection tube member is punctured into the closing member, the tip portion protrudes into the gas chamber or the gas-filling channel, and each gas chamber is evacuated, and then the measurement gas chamber is utilized using the gas injection tube member. In addition, by injecting a predetermined gas into each of the comparison gases and mounting a fixing screw in the gas sealing flow path, the gas sealing flow path can be hermetically sealed.
本発明の赤外線式ガス検知装置は、回転駆動されることにより測定ガス室および比較ガス室が赤外線光源から被検ガスが導入されるサンプルセルに至る光路を交互に通過するよう配設されたガス検知用相関セルを備えてなり、当該ガス検知用相関セルを介して赤外光がサンプルセルに供給され、前記測定ガス室を透過した赤外光に係るセンサ信号および前記比較ガス室を透過した赤外光に係るセンサ信号に基づいて、検知対象ガスの濃度を検出する赤外線式ガス検知装置において、
ガス検知用相関セルとして、上記のものが用いられていることを特徴とする。
The infrared type gas detection device of the present invention is a gas that is arranged so that the measurement gas chamber and the comparison gas chamber alternately pass through the optical path from the infrared light source to the sample cell into which the test gas is introduced by being driven to rotate. A correlation cell for detection is provided, and infrared light is supplied to the sample cell via the correlation cell for gas detection, and the sensor signal related to the infrared light transmitted through the measurement gas chamber and the comparison gas chamber are transmitted. In the infrared type gas detection device that detects the concentration of the detection target gas based on the sensor signal related to the infrared light,
The above-described cell is used as the correlation cell for gas detection.
本発明のガス検知用相関セルによれば、ガス封入用流路を封止した状態において所定のガスをガス室に封入して得られたものであることにより、ガス封入作業時において、ガス封入用流路を気密に封止するまで（最終的なシール構造を形成するまで）の間に不可避的に生ずるガス漏れの程度を可及的に小さく抑制することができるので、確実に所期の機能を有するものとなる。
また、閉塞部材がガス封入用流路内に装着された状態において、さらに、当該ガス封入用流路内に固定用ネジが装着された構造であることにより、気密性の高いシール構造を確実に形成することができる。
According to the correlation cell for gas detection of the present invention, it is obtained by sealing a predetermined gas in a gas chamber in a state where the gas sealing channel is sealed, so that the gas sealing is performed during the gas sealing operation. Since the degree of gas leakage that inevitably occurs until the working flow path is hermetically sealed (until the final seal structure is formed) can be suppressed as much as possible. It has a function.
In addition, in a state where the closing member is mounted in the gas sealing flow path, the structure in which the fixing screw is mounted in the gas sealing flow path ensures a highly airtight seal structure. Can be formed.
本発明のガス検知用相関セルの作製方法によれば、ガス封入用流路を予め封止した後にガスが注入されることにより、ガス封入流路を気密に封止するまで（最終的なシール構造を形成するまで）の間に不可避的に生ずるガス漏れの程度を小さく抑制することができるので、所期の機能を有するガス検知用相関セルを確実に得ることができる。
また、ガス注入用管部材を閉塞部材に穿刺してガスの注入を行うことにより、従来におけるガス封入作業において必要とされるパイプの接続等を行うことが不要であるので、ガス封入作業を容易に行うことができ、しかも、ガス封入用流路内に固定用ネジを装着することによりシール構造が形成されるので、ガス漏れを閉塞部材に形成されるガス注入用管部材の小さい孔から生ずる量の極めて小さい程度に抑制しながら、気密性の高いシール構造を容易に形成することができ、高い作業性を得ることができる。
According to the method for producing a correlation cell for gas detection of the present invention, a gas is injected after a gas sealing flow path is sealed in advance until the gas sealed flow path is hermetically sealed (final seal). Since the degree of gas leakage that inevitably occurs until the structure is formed can be suppressed small, a correlation cell for gas detection having an expected function can be obtained with certainty.
In addition, by puncturing the gas injection tube member into the closing member and injecting gas, it is not necessary to connect pipes or the like that are required in the conventional gas injection operation. In addition, since a sealing structure is formed by mounting a fixing screw in the gas sealing flow path, gas leakage occurs from a small hole in the gas injection tube member formed in the closing member. A highly airtight seal structure can be easily formed while suppressing the amount to an extremely small amount, and high workability can be obtained.
本発明の赤外線式ガス検知装置によれば、上記ガス検知用相関セルを具備しているので、所期のガス検知を高い信頼性をもって確実に行うことができる。 According to the infrared type gas detection device of the present invention, since the gas detection correlation cell is provided, desired gas detection can be reliably performed with high reliability.
図１は、本発明の赤外線式ガス検知装置の一例における構成の概略を示す説明図である。
この赤外線式ガス検知装置は、被検ガスが導入されるサンプルセル本体１１内において、例えば凹面状の反射面１６Ａを有する第１の反射鏡１６と、各々第１の反射鏡１６における反射面１６Ａと同等の大きさの曲率半径を有する２つの凹面状の反射面１７Ａ，１７Ｂを有する第２の反射鏡１７とが、第２の反射鏡１７における反射面１７Ａ，１７Ｂの曲率中心位置の各々が第１の反射鏡１６の反射面１６Ａ上に位置されるよう、互いに対向して配置されてなる、いわゆる『ホワイトセル型』のサンプルセル１０を備えている。図１において、１４はガス導入口、１５はガス排出口である。
FIG. 1 is an explanatory diagram showing an outline of a configuration in an example of an infrared gas detection device of the present invention.
This infrared gas detection device includes, for example, a first reflecting mirror 16 having a concave reflecting surface 16A and a reflecting surface 16A of the first reflecting mirror 16 in the sample cell body 11 into which a test gas is introduced. And the second reflecting mirror 17 having the two concave reflecting surfaces 17A and 17B having the same radius of curvature as each other, and each of the curvature center positions of the reflecting surfaces 17A and 17B in the second reflecting mirror 17 is A so-called “white cell type” sample cell 10 is provided so as to face each other so as to be positioned on the reflecting surface 16A of the first reflecting mirror 16. In FIG. 1, 14 is a gas inlet and 15 is a gas outlet.
サンプルセル本体１１には、赤外線光源２０からの赤外光をサンプルセル１０内に入射させる光入射部と、第１の凹面反射鏡１６および第２の凹面反射鏡１７により多重反射された赤外光をサンプルセル１０の外部に出射させる光出射部とが形成されている。
サンプルセル１０内には、サンプルセル１０内に導入される赤外光を反射して第２の反射鏡１７に入射させる光入射側ミラー１８が光入射部を臨む位置に配設されていると共に、第１の反射鏡１６および第２の反射鏡１７により多重反射された赤外光を反射して赤外センサ２５に入射させる光出射側ミラー１９が光出射部を臨む位置に配設されている。
In the sample cell main body 11, infrared light that is multiple-reflected by the light incident portion that makes the infrared light from the infrared light source 20 enter the sample cell 10 and the first concave reflecting mirror 16 and the second concave reflecting mirror 17. A light emitting portion for emitting light to the outside of the sample cell 10 is formed.
In the sample cell 10, a light incident side mirror 18 that reflects infrared light introduced into the sample cell 10 and enters the second reflecting mirror 17 is disposed at a position facing the light incident portion. A light exit side mirror 19 that reflects the infrared light multiple-reflected by the first reflecting mirror 16 and the second reflecting mirror 17 and enters the infrared sensor 25 is disposed at a position facing the light emitting portion. Yes.
サンプルセル１０と赤外センサ２５の間には、検知対象ガスのガス分子固有の吸収波長域の赤外線に対してのみ高い透過率を有する光学フィルタ２６が配設されている。 Between the sample cell 10 and the infrared sensor 25, an optical filter 26 having a high transmittance only with respect to infrared rays in an absorption wavelength region unique to gas molecules of the detection target gas is disposed.
赤外線光源２０とサンプルセル１０との間には、各々、例えばモータなどの駆動源２１によって回転駆動されるガス検知用相関セル３０およびチョッパ２２が光照射方向に対してこの順で配設されている。 Between the infrared light source 20 and the sample cell 10, for example, a gas detection correlation cell 30 and a chopper 22 which are rotationally driven by a drive source 21 such as a motor are arranged in this order with respect to the light irradiation direction. Yes.
チョッパ２２は、例えば赤外線光源２０からの赤外光の通過を許容する切り欠き部が形成された２枚羽根の回転円板を備えてなり、例えば回転駆動されることにより赤外線光源２０からの赤外光を断続的にサンプルセル１０に供給する。 The chopper 22 includes, for example, a two-bladed rotating disk formed with a notch that allows the infrared light from the infrared light source 20 to pass therethrough. External light is intermittently supplied to the sample cell 10.
ガス検知用相関セル３０は、図２および図３に示すように、一定濃度の検知対象ガスと同種のガスが封入された一方のガス室（以下、「測定ガス室３２」という。）および赤外線に不活性なガスが封入された他方のガス室（以下、「比較ガス室３３」という。）が回転中心軸Ｃを中心に対称的に形成されてなり、回転駆動されることによって測定ガス室３２および比較ガス室３３が赤外線光源２０からサンプルセル１０に至る光路上を交互に通過し、測定ガス室３２または比較ガス室３３を介して赤外光をサンプルセル１０内に導入させる。 As shown in FIGS. 2 and 3, the gas detection correlation cell 30 includes one gas chamber (hereinafter referred to as “measurement gas chamber 32”) in which a gas of the same type as the detection target gas having a constant concentration is enclosed, and infrared rays. The other gas chamber (hereinafter referred to as “comparative gas chamber 33”) in which an inert gas is sealed is formed symmetrically about the rotation center axis C and is driven to rotate to thereby measure the gas chamber. 32 and the comparison gas chamber 33 alternately pass on the optical path from the infrared light source 20 to the sample cell 10, and infrared light is introduced into the sample cell 10 through the measurement gas chamber 32 or the comparison gas chamber 33.
ガス検知用相関セル３０は、例えばアルミニウムよりなる円板状のセル本体３１を具えてなり、このセル本体３１には、図４に示すように、各々厚み方向に貫通する２つのガス室形成用空間３２Ａ，３３Ａが、回転中心軸Ｃと同心円上の径方向位置であって、回転中心軸Ｃを挟んで互いに対向した位置に、形成されている。この実施例におけるガス室形成用空間３２Ａ，３３Ａは、各々例えば半円弧状であって、周方向に沿って伸びるよう形成されているが、ガス室形成用空間３２Ａ，３３Ａの形状は、特に制限されるものではない。
セル本体３１の両面には、ガス室形成用空間３２Ａ，３３Ａを含む回転中心軸Ｃを中心とした円領域に窓部材装着用凹所３８が形成されており、この窓部材装着用凹所３８の各々に、例えばサファイアよりなる窓部材４０が装着されて２つのガス室形成用空間３２Ａ，３３Ａが塞がれている。窓部材４０は、例えば接着剤によりセル本体３１に接着されて固定されている。
The correlation cell 30 for gas detection includes a disk-shaped cell body 31 made of, for example, aluminum. As shown in FIG. 4, the cell body 31 is used for forming two gas chambers penetrating in the thickness direction. The spaces 32 </ b> A and 33 </ b> A are formed at radial positions concentric with the rotation center axis C and facing each other across the rotation center axis C. Each of the gas chamber forming spaces 32A and 33A in this embodiment has, for example, a semicircular arc shape and is formed to extend along the circumferential direction. However, the shape of the gas chamber forming spaces 32A and 33A is particularly limited. Is not to be done.
On both surfaces of the cell main body 31, a window member mounting recess 38 is formed in a circular region around the rotation center axis C including the gas chamber forming spaces 32A and 33A. Each of these is fitted with a window member 40 made of, for example, sapphire, thereby closing the two gas chamber forming spaces 32A and 33A. The window member 40 is bonded and fixed to the cell body 31 with an adhesive, for example.
セル本体３１には、ガス室形成用空間３２Ａ，３３Ａと連通するガス封入用流路３４がセル本体３１の肉厚中を径方向に伸び、セル本体３１の外周面位置に開口するよう形成されており、各々のガス封入用流路３４の外端部には、閉塞部材装着部３５が形成されている。
ガス封入用流路３４における閉塞部材装着部３５には、閉塞部材である例えばシリコーンゴムなどの樹脂よりなる止め栓４５が全体が収容された状態で例えば圧入されて装着され、さらに、例えば真鍮やステンレス鋼などの金属よりなる固定用ネジ５０が装着されており、これにより、ガス封入用流路３４が閉塞されて各々のガス室形成用空間３２Ａ，３３Ａが気密に封止され、測定ガス室３２および比較ガス室３３が形成されている。
以上において、図２乃至図４中の符号３９は、ガス検知用相関セル３０を回転駆動させるための回転軸２１Ａを支持する回転軸支持部である。
The cell body 31 is formed with a gas-filling channel 34 communicating with the gas chamber forming spaces 32A and 33A so as to extend radially in the thickness of the cell body 31 and open to the outer peripheral surface of the cell body 31. A closing member mounting portion 35 is formed at the outer end of each gas sealing flow path 34.
A stopper plug 45 made of a resin such as silicone rubber, which is a blocking member, is fitted into the blocking member mounting portion 35 in the gas sealing flow path 34, for example, by being press-fitted, and further, for example, brass or A fixing screw 50 made of a metal such as stainless steel is attached, whereby the gas sealing flow path 34 is closed, and the gas chamber forming spaces 32A and 33A are hermetically sealed, and the measurement gas chambers are sealed. 32 and a comparative gas chamber 33 are formed.
In the above description, reference numeral 39 in FIGS. 2 to 4 denotes a rotating shaft support portion that supports the rotating shaft 21A for rotating the correlation cell 30 for gas detection.
以下、上記構成のガス検知用相関セル３０の作製方法について説明する。
先ず、円板状のセル本体基材の所定の位置に、２つのガス室形成用空間３２Ａ，３３Ａ、閉塞部材装着部３５を含むガス封入用流路３４、回転軸支持部３９および窓部材装着用凹所３８を切削加工によって形成することによりセル本体３１を作製し、このセル本体３１における窓部材装着用凹所３８に、窓部材４０を例えばエポキシ系接着剤により接着して固定すると共に、ガス封入用流路３４内の閉塞部材装着部３５に止め栓４５を圧入し、さらに、このガス封入用流路３４内の閉塞部材装着部３５に固定用ネジを装着することにより、ガス室形成用空間３２Ａ，３３Ａを封止し、測定ガス室３２および比較ガス室３３を形成する。このとき、固定用ネジとしては、中央部に貫通孔５１が形成されてなり、ガス封入用治具としての機能を有する仮止め用のもの５０Ａが用いられる（図４参照）。
また、止め栓４５は、接着剤によってセル本体３１に接着、固定されることによって装着されてもよい。
Hereinafter, a method for manufacturing the gas detection correlation cell 30 having the above-described configuration will be described.
First, two gas chamber forming spaces 32A and 33A, a gas sealing flow path 34 including a closing member mounting portion 35, a rotary shaft support portion 39, and a window member are mounted at predetermined positions on the disk-shaped cell body base material. The cell body 31 is produced by forming the recess 38 by cutting, and the window member 40 is bonded and fixed to the window member mounting recess 38 in the cell body 31 by, for example, an epoxy adhesive, A stopper 45 is press-fitted into the closing member mounting portion 35 in the gas sealing flow path 34, and a fixing screw is mounted on the closing member mounting portion 35 in the gas sealing flow path 34 to form a gas chamber. The use spaces 32A and 33A are sealed, and the measurement gas chamber 32 and the comparison gas chamber 33 are formed. At this time, as a fixing screw, a through hole 51 is formed in the center portion, and a temporary fixing screw 50A having a function as a gas sealing jig is used (see FIG. 4).
Further, the stopper plug 45 may be mounted by being bonded and fixed to the cell body 31 with an adhesive.
次いで、例えばシリンジ針などの管径の大きさが小さい（細い）ガス注入用管部材を固定用ネジ５０Ａの貫通孔５１を介して止め栓４５に穿刺し、先端部をガス封入用流路３４内またはガス室内に突出させ、例えば真空ポンプによってガス室内を真空引きした後、所定のガス、具体的には測定ガス室３２に対しては所定濃度の検知対象ガスと同種のガス、比較ガス室３３に対しては赤外光に対して不活性なガス例えばＮ2 ガスを注入する。ここに、ガス注入用管部材の外径の大きさは特に制限されるものではないが、シール構造を形成するまでの間に不可避的に生ずるガス漏れの程度を可及的に小さくすることおよび作業効率を高くすることの観点から、例えばφ０．５〜２ｍｍ程度であることが好ましい。また、測定ガス室３２および比較ガス３３室内のガス封入圧力は例えば常圧である。
その後、例えば仮止め用の固定用ネジ５０Ａを貫通孔を有さないシール構造形成用の固定用ネジ５０（図２乃至図４参照）に付け替えることにより測定ガス室３２および比較ガス室３３を気密に封止し、これにより、上記構成のガス検知用相関セル３０を得ることができる。ここに、ガス注入後にガス室を気密に封止する方法としては、例えば仮止め用の固定用ネジ５０Ａをそのまま使用し、固定用ネジ５０Ａの貫通孔５１内に例えば樹脂材料等を充填する方法が用いられてもよい。
Next, for example, a small (thin) gas injection tube member such as a syringe needle is punctured into the stopper plug 45 through the through-hole 51 of the fixing screw 50A, and the distal end portion of the gas injection channel 34 is inserted. After the gas chamber is evacuated by, for example, a vacuum pump, a predetermined gas, specifically, the measurement gas chamber 32 is the same type of gas as the detection target gas having a predetermined concentration, a comparison gas chamber For the gas 33, an inert gas such as N 2 gas is injected. Here, the size of the outer diameter of the gas injection tube member is not particularly limited. However, the degree of gas leakage that inevitably occurs until the seal structure is formed is minimized. From the viewpoint of increasing the working efficiency, for example, it is preferably about φ0.5 to 2 mm. Further, the gas filling pressure in the measurement gas chamber 32 and the comparison gas 33 chamber is, for example, a normal pressure.
Thereafter, the measurement gas chamber 32 and the comparison gas chamber 33 are hermetically sealed by, for example, replacing the fixing screw 50A for temporary fixing with a fixing screw 50 for forming a seal structure (see FIGS. 2 to 4) that does not have a through hole. Thus, the gas detection correlation cell 30 having the above-described configuration can be obtained. Here, as a method of hermetically sealing the gas chamber after gas injection, for example, the fixing screw 50A for temporary fixing is used as it is, and the resin material or the like is filled in the through hole 51 of the fixing screw 50A, for example. May be used.
上記のガス検知用相関セルの作製方法によれば、ガス封入用流路３４を予め封止した後にガスが注入されることにより、ガス封入流路３４を気密に封止するまで（最終的なシール構造を形成するまで）の間に不可避的に生ずるガス漏れの程度を小さく抑制することができるので、所期の機能を有するガス検知用相関セル３０を確実に得ることができる。
また、ガス注入用管部材を止め栓４５に穿刺してガスの注入を行うことにより、従来におけるガス封入作業において必要とされるパイプの接続等を行うことが不要であるので、ガスの注入を容易に行うことができ、しかも、ガス封入用流路３４内に固定用ネジ５０を装着することによりシール構造が形成されるので、ガス漏れを止め栓４５に形成されるガス注入用管部材の極めて小さい孔から生ずる量の極めて小さい程度に抑制しながら、気密性の高いシール構造を容易に形成することができ、高い作業性を得ることができる。
According to the above-described method for producing a correlation cell for gas detection, gas is injected after sealing the gas-filling flow path 34 in advance until the gas-filled flow path 34 is hermetically sealed (final). Since the degree of gas leakage that inevitably occurs until the seal structure is formed) can be suppressed, the correlation cell 30 for gas detection having an intended function can be obtained with certainty.
In addition, by inserting the gas injection tube member into the stopper plug 45 and injecting the gas, it is not necessary to connect a pipe that is required in the conventional gas filling operation. Since the sealing structure is formed by mounting the fixing screw 50 in the gas sealing flow path 34, the gas injection tube member formed in the stopper plug 45 can be prevented from leaking. A highly airtight seal structure can be easily formed while suppressing the amount generated from extremely small holes to a very small extent, and high workability can be obtained.
以上のようなガス検知用相関セル３０を備えてなる赤外線ガス検知装置においては、次のようにしてガス検知が行われる。
すなわち、赤外線光源２０が常時点灯状態となるよう駆動されると共に、ガス検知用相関セル３０およびチョッパ２２が駆動源２１によって一定の周期で回転駆動されることにより、赤外線光源２０からの赤外光がサンプルセル１０に対して断続的に供給され、被検ガスが導入されたサンプルセル１０内において、第１の凹面反射鏡１６および第２の凹面反射鏡１７によって多重反射された後、光学フィルタ２６を介して赤外センサ２５に入射される（図１参照）。
そして、ガス検知用相関セル３０における測定ガス室３２を透過した赤外光に係るセンサ信号と、ガス検知用相関セル３０における比較ガス室３３を透過した赤外光に係るセンサ信号との差信号または信号比に基づいて、被検ガスに含まれる検知対象ガスの濃度が検出される。
In the infrared gas detection apparatus including the gas detection correlation cell 30 as described above, gas detection is performed as follows.
That is, the infrared light source 20 is driven so as to be constantly lit, and the gas detection correlation cell 30 and the chopper 22 are rotated by the drive source 21 at a constant period, whereby the infrared light from the infrared light source 20 is emitted. Is intermittently supplied to the sample cell 10 and is subjected to multiple reflections by the first concave reflecting mirror 16 and the second concave reflecting mirror 17 in the sample cell 10 into which the test gas is introduced, and then the optical filter 26 is incident on the infrared sensor 25 through 26 (see FIG. 1).
Then, a difference signal between the sensor signal related to the infrared light transmitted through the measurement gas chamber 32 in the gas detection correlation cell 30 and the sensor signal related to the infrared light transmitted through the comparison gas chamber 33 in the gas detection correlation cell 30. Alternatively, the concentration of the detection target gas contained in the test gas is detected based on the signal ratio.
而して、上記構成のガス検知用相関セル３０によれば、ガス封入用流路３４を予め止め栓４５によって封止し、ガス注入用管部材を止め栓４５に穿刺してガスを封入することによって得られるものであることにより、シール構造を形成するまでの間に不可避的に生ずるガス漏れを止め栓４５に形成されるガス注入用管部材の小さい孔から生ずる量の極めて小さい程度に抑制することができるので、確実に所期の機能を有するものとして構成することができ、しかも、ガスを注入した後、ガス封入用流路３４内に固定用ネジ５０が装着されることによりシール構造が形成されていることにより、当該固定用ネジ５０とセル本体３１との接合が螺合によって達成されるという構造上、高い気密性を有するものとなる。
従って、上記ガス検知用相関セル３０を備えてなる赤外線式ガス検知装置によれば、所期のガス検知を高い信頼性をもって確実に行うことができる。
Thus, according to the correlation cell 30 for gas detection having the above-described configuration, the gas filling flow path 34 is sealed in advance by the stopper plug 45, and the gas injection tube member is punctured into the stopper plug 45 to enclose the gas. As a result, gas leakage that inevitably occurs until the seal structure is formed is suppressed to an extremely small amount that is generated from a small hole in the gas injection tube member formed in the stopper plug 45. Therefore, the sealing structure can be surely configured to have an intended function, and a fixing screw 50 is mounted in the gas-filling channel 34 after the gas is injected. As a result of the formation, the connection between the fixing screw 50 and the cell body 31 is achieved by screwing, so that the structure has high airtightness.
Therefore, according to the infrared gas detection apparatus provided with the gas detection correlation cell 30, the desired gas detection can be reliably performed with high reliability.
以上、本発明の実施形態について説明したが、本発明は上記の実施形態に限定されるものではなく、種々の変更を加えることができる。
例えば、ガス室の形状、大きさ（容積）およびその他の具体的な構成は、目的に応じて適宜に変更することができる。
また、ガス封入方法は上記方法に限定されるものではなく、図５および図６に示すように、止め栓４５がガス封入用流路３４内の所定の位置に装着状態とされたときに、当該止め栓４５の周面を臨む位置に開口するガス注入用管部材挿入用孔３６をセル本体３１に形成し、ガス封入用流路３４内に止め栓４５およびシール構造形成用の固定用ネジ５０を装着して当該ガス封入用流路３４を気密に封止した状態において、ガス注入用管部材挿入用孔３６を介してガス注入用管部材を止め栓４５に穿刺してその先端部をガス封入用流路３４内またはガス室内に突出させ、所定のガスをガス室に注入した後、ガス注入用管部材挿入用孔３６を気密に封止する方法であってもよい。
ここに、ガス注入用管部材挿入用孔の径は、ガス注入用管部材である例えばシリンジ針が挿入可能な大きさであれば特に制限されない。
As mentioned above, although embodiment of this invention was described, this invention is not limited to said embodiment, A various change can be added.
For example, the shape, size (volume), and other specific configurations of the gas chamber can be appropriately changed according to the purpose.
Further, the gas sealing method is not limited to the above method, and as shown in FIGS. 5 and 6, when the stopper plug 45 is mounted at a predetermined position in the gas sealing flow path 34, A gas injection tube member insertion hole 36 that opens to a position facing the peripheral surface of the stopper plug 45 is formed in the cell body 31, and the stopper plug 45 and a fixing screw for forming a seal structure are formed in the gas sealing flow path 34. In the state in which the gas sealing flow path 34 is hermetically sealed by mounting the gas injection pipe member 50, the gas injection pipe member is punctured into the stopper plug 45 through the gas injection pipe member insertion hole 36, and the distal end portion thereof is inserted. A method may be employed in which the gas injection tube member insertion hole 36 is hermetically sealed after projecting into the gas sealing flow path 34 or the gas chamber and injecting a predetermined gas into the gas chamber.
Here, the diameter of the gas injection tube member insertion hole is not particularly limited as long as it is a size in which, for example, a syringe needle which is a gas injection tube member can be inserted.
また、本発明の赤外線式ガス検知装置においては、ガス検知用相関セルとして、例えば図７および図８に示すように、窓部材４０が装着されたセル本体３１における入光側の面に、マスク材６０がセル本体３１に一体に固定されて装着されてなるものを用いることができる。
マスク材６０は、各々のガス室に対向する領域内において、複数の透光用開口６１が赤外線光源からの赤外光が当該開口６１を介してガス室に入射されるよう、ガス室の形態に沿って互いに離間して並んだ位置に形成されたものであって、この実施例においては、測定ガス室３２および比較ガス室３３に対向する領域の各々について、３つの透光用開口６１が互いに周方向（回転方向）に等間隔毎に離間して並んで形成された構成とされている。
このようなガス検知用相関セル３０Ａを備えた赤外線式ガス検知装置においては、測定ガス室３２についての透光用開口６１の各々を透過した赤外光に係るセンサ検知信号の複数の平均値と、比較ガス室３３についての透光用開口６１の各々を透過した赤外光に係るセンサ検知信号の複数の平均値との差信号または信号比に基づいて検知対象ガスの濃度が検出される。
Further, in the infrared type gas detection apparatus of the present invention, as a correlation cell for gas detection, for example, as shown in FIGS. A material in which the material 60 is fixed and attached to the cell body 31 integrally can be used.
The mask material 60 has a plurality of light-transmitting openings 61 in a region facing each gas chamber so that the infrared light from the infrared light source is incident on the gas chamber through the openings 61. In this embodiment, three light-transmitting openings 61 are formed in each of the regions facing the measurement gas chamber 32 and the comparison gas chamber 33. It is set as the structure formed in the circumferential direction (rotation direction) mutually spaced apart at equal intervals.
In the infrared type gas detection apparatus having such a gas detection correlation cell 30A, a plurality of average values of sensor detection signals relating to infrared light transmitted through each of the light transmission openings 61 for the measurement gas chamber 32 and The concentration of the detection target gas is detected based on a difference signal or a signal ratio with a plurality of average values of sensor detection signals related to infrared light transmitted through each of the light transmission openings 61 for the comparative gas chamber 33.
１０ サンプルセル
１１ サンプルセル本体
１４ ガス導入口
１５ ガス排出口
１６ 第１の反射鏡
１６Ａ 反射面
１７ 第２の反射鏡
１７Ａ，１７Ｂ 反射面
１８ 光入射側ミラー
１９ 光出射側ミラー
２０ 赤外線光源
２１ 駆動源
２１Ａ 回転軸
２２ チョッパ
２５ 赤外センサ
２６ 光学フィルタ
３０，３０Ａ ガス検知用相関セル
３１ セル本体
３２Ａ，３３Ａ ガス室形成用空間
３２ 測定ガス室
３３ 比較ガス室
Ｃ 回転中心軸
３４ ガス封入用流路
３５ 閉塞部材装着部
３６ ガス注入用管部材挿入用孔
３８ 窓部材装着用凹所
３９ 回転軸支持部
４０ 窓部材
４５ 止め栓
５０ 固定用ネジ
５０Ａ 仮止め用の固定用ネジ
５１ 貫通孔
６０ マスク材
６１ 透光用開口
DESCRIPTION OF SYMBOLS 10 Sample cell 11 Sample cell main body 14 Gas introduction port 15 Gas discharge port 16 1st reflecting mirror 16A Reflecting surface 17 2nd reflecting mirror 17A, 17B Reflecting surface 18 Light incident side mirror 19 Light emitting side mirror 20 Infrared light source 21 Drive Source 21A Rotating shaft 22 Chopper 25 Infrared sensor 26 Optical filter 30, 30A Correlation cell for gas detection 31 Cell body 32A, 33A Gas chamber forming space 32 Measuring gas chamber 33 Comparison gas chamber C Rotating central shaft 34 Gas filling flow path 35 Closing member mounting portion 36 Gas injection tube member insertion hole 38 Window member mounting recess 39 Rotating shaft support portion 40 Window member 45 Stopping plug 50 Fixing screw 50A Temporary fixing screw 51 Through hole 60 Mask material 61 Translucent aperture
Claims (5)
測定ガス室および比較ガス室の各々に連通するガス封入用流路を封止した後、測定ガス室および比較ガス室の各々に所定のガスを封入することにより得られたものであることを特徴とするガス検知用相関セル。 A correlation cell for gas detection having a measurement gas chamber in which the same kind of gas as the detection target gas is sealed and a comparison gas chamber in which a comparison gas is sealed,
It is obtained by sealing a gas-filling flow path communicating with each of the measurement gas chamber and the comparison gas chamber and then encapsulating a predetermined gas in each of the measurement gas chamber and the comparison gas chamber. Correlation cell for gas detection.
ガス検知用相関セルが請求項１または請求項２に記載のものよりなることを特徴とする赤外線式ガス検知装置。 The measurement gas chamber and the comparison gas chamber are provided with a correlation cell for gas detection arranged so as to alternately pass through the optical path from the infrared light source to the sample cell into which the test gas is introduced by being driven to rotate. Infrared light is supplied to the sample cell via the correlation cell for gas detection, and based on the sensor signal related to the infrared light transmitted through the measurement gas chamber and the sensor signal related to the infrared light transmitted through the comparison gas chamber. In the infrared type gas detection device that detects the concentration of the detection target gas,
An infrared type gas detection apparatus, wherein the correlation cell for gas detection comprises the one according to claim 1 or 2.
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| JP2009174868A (en) * | 2008-01-21 | 2009-08-06 | Dkk Toa Corp | Correlation cell, gas analyzer, and assembling method of correlation cell |
| JP2010249725A (en) * | 2009-04-17 | 2010-11-04 | Shimadzu Corp | Gas cell |
| KR101840813B1 (en) * | 2016-11-15 | 2018-03-21 | 호남대학교 산학협력단 | Multi-gas detecting apparatus |
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| JP2000060970A (en) * | 1998-08-21 | 2000-02-29 | Terumo Corp | Medicine contained syringe |
| JP2001124671A (en) * | 1999-10-27 | 2001-05-11 | Sekisui Chem Co Ltd | Housing body for analyzing gas |
| JP2004333170A (en) * | 2003-04-30 | 2004-11-25 | Shimadzu Corp | Gas sealing method for analysis gas filled device, and analysis gas filled device |
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2006
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0429862U (en) * | 1990-06-29 | 1992-03-10 | ||
| JPH0618798U (en) * | 1992-08-19 | 1994-03-11 | 株式会社巴川製紙所 | Grease lubricator for easy air removal |
| JPH07294432A (en) * | 1994-04-27 | 1995-11-10 | Shimadzu Corp | Gas correlative cell |
| JP2000060970A (en) * | 1998-08-21 | 2000-02-29 | Terumo Corp | Medicine contained syringe |
| JP2001124671A (en) * | 1999-10-27 | 2001-05-11 | Sekisui Chem Co Ltd | Housing body for analyzing gas |
| JP2004333170A (en) * | 2003-04-30 | 2004-11-25 | Shimadzu Corp | Gas sealing method for analysis gas filled device, and analysis gas filled device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009174868A (en) * | 2008-01-21 | 2009-08-06 | Dkk Toa Corp | Correlation cell, gas analyzer, and assembling method of correlation cell |
| JP2010249725A (en) * | 2009-04-17 | 2010-11-04 | Shimadzu Corp | Gas cell |
| KR101840813B1 (en) * | 2016-11-15 | 2018-03-21 | 호남대학교 산학협력단 | Multi-gas detecting apparatus |
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| JP4700506B2 (en) | 2011-06-15 |
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