JP2007194831A - Vacuum-proof camera - Google Patents

Vacuum-proof camera Download PDF

Info

Publication number
JP2007194831A
JP2007194831A JP2006009955A JP2006009955A JP2007194831A JP 2007194831 A JP2007194831 A JP 2007194831A JP 2006009955 A JP2006009955 A JP 2006009955A JP 2006009955 A JP2006009955 A JP 2006009955A JP 2007194831 A JP2007194831 A JP 2007194831A
Authority
JP
Japan
Prior art keywords
vacuum
camera
connector
resistant
proof
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006009955A
Other languages
Japanese (ja)
Other versions
JP4192181B2 (en
Inventor
Satoru Kondo
悟 紺藤
Yuji Tsuchiya
雄司 土屋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Teli Corp
Original Assignee
Toshiba Teli Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Teli Corp filed Critical Toshiba Teli Corp
Priority to JP2006009955A priority Critical patent/JP4192181B2/en
Publication of JP2007194831A publication Critical patent/JP2007194831A/en
Application granted granted Critical
Publication of JP4192181B2 publication Critical patent/JP4192181B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Studio Devices (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vacuum-proof camera which is of low cost and versatile and allows flexible movement in vacuum. <P>SOLUTION: A vacuum-proof camera 10 placed in a vacuum chamber 1 is connected, in circuit, to a controller 50 which is provided outside (atmospheric side) of the vacuum chamber 1 by way of a vacuum-proof flexible composite cable 20 and a through connector 30 provided to a flange 40. The vacuum-proof camera 10 which uses the vacuum-proof flexible composite cable 20 obtaines a television camera for observation that allows flexible positioning and angular setting near an object, such as positioning and alignment adjustment of the object (subject) 2 within the vacuum chamber 1. Such vacuum-proof camera with a camera cable is obtained as discharging of gas into vacuum environment is almost zero even under a high vacuum environment of 10<SP>-6</SP>[Pa], although electric characteristics is similar to that of a general camera. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、高真空環境下で用いられる耐真空用カメラに関する。   The present invention relates to a vacuum resistant camera used in a high vacuum environment.

従来、真空環境下で用いられるカメラは、被検体、監視対象等により特定される構体に覗き窓を介して固定支持される構成であった。   Conventionally, a camera used in a vacuum environment is configured to be fixedly supported by a structure specified by a subject, a monitoring target, and the like through a viewing window.

真空環境下で用いられるカメラを真空中で可動可能に設ける技術としては、真空環境内へ大気側より蛇腹管（ベローズ）を延ばし、その先端に覗き窓を設けてカメラを被写体へ接近させる方法がある。しかしながら、この方法は、ベローズの可動範囲が比較的短い直進方向に特定され、監視範囲が極く狭い範囲に限られるという問題があり、例えば真空中での被検査体の位置あわせ、アライメント調整において、被検査体近傍での自由な位置取り、角度設を可能にしたいという要求に応えることができなかった。また、真空環境下で用いるカメラは、真空環境下での不活性ガス放出が厳しく規制されることからコスト面で非常に高価になるという問題があった。
特開２００２−３１０９５１号公報 特開平８−２３２０１４号公報 As a technique for movably installing a camera used in a vacuum environment, a bellows tube (bellows) is extended from the atmosphere side into the vacuum environment, and a viewing window is provided at the tip of the camera to bring the camera closer to the subject. is there. However, this method has a problem that the movable range of the bellows is specified in a relatively short straight direction, and the monitoring range is limited to a very narrow range. For example, in the alignment of the object to be inspected and the alignment adjustment in a vacuum. Therefore, it was not possible to meet the demand for enabling free positioning and angle setting in the vicinity of the object to be inspected. In addition, a camera used in a vacuum environment has a problem that it is very expensive in terms of cost because inert gas emission under a vacuum environment is strictly regulated.
JP 2002-310951 A JP-A-8-2332014

上述したように、従来、真空環境下で用いられるカメラは、真空中での可動範囲が極く狭い範囲に特定され、例えば真空中での被検査体の位置あわせ、アライメント調整において、被検査体近傍での自由な位置取り、角度設を可能にしたいという要求に応えることができないという問題があった。また、コスト面で非常に高価であり、汎用性に乏しいという問題があった。   As described above, conventionally, a camera used in a vacuum environment is specified to have a very narrow movable range in a vacuum. For example, in the alignment and alignment of an inspection object in a vacuum, the inspection object There was a problem that it was not possible to meet the demand for enabling free positioning and angle setting in the vicinity. Moreover, there was a problem that it was very expensive in terms of cost and lacked versatility.

本発明は上記実情に鑑みなされたもので、真空環境下での自在な動きを可能にした安価で汎用性の高い耐真空用カメラを提供することを目的とする。   The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an inexpensive and highly versatile vacuum-proof camera that enables free movement in a vacuum environment.

本発明に係る耐真空用カメラは、ステンレス鋼で構成したカメラ筐体に撮像素子を収容し、前記カメラ筐体の一端に前記撮像素子に結像するレンズを保持したレンズマウントを設け、前記カメラ筐体の他端に前記撮像素子を回路接続するコネクタおよびコネクタを覆うジャケットを設けて、前記カメラ筐体を密閉構造にしたことを特徴とする。   The vacuum-proof camera according to the present invention includes a lens mount that houses an imaging element in a camera casing made of stainless steel, and that holds a lens that forms an image on the imaging element at one end of the camera casing. A connector for connecting the imaging element to the circuit and a jacket for covering the connector are provided at the other end of the casing, so that the camera casing has a sealed structure.

真空環境下での自在な動きを可能にした安価で汎用性高い耐真空用カメラを提供することができる。   An inexpensive and highly versatile vacuum-resistant camera that can freely move in a vacuum environment can be provided.

以下図面を参照して本発明の実施形態を説明する。
本発明の実施形態に係る耐真空用カメラを用いたカメラ装置全体の構成を図１に示す。
本発明の実施形態に係る耐真空用カメラ１０は、１０−６［Ｐａ］程度の高真空環境にある真空チャンバー（例えば真空室）１の内部に於いて、耐真空用可撓性複合ケーブル２０を用いることにより、真空室１内で任意の位置および姿勢制御による被検査体（被写体）２の観察（監視）が可能な構造としている。 Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 shows the overall configuration of a camera apparatus using a vacuum-proof camera according to an embodiment of the present invention.
The vacuum-resistant camera 10 according to the embodiment of the present invention includes a vacuum-resistant flexible composite cable 20 in a vacuum chamber (for example, a vacuum chamber) 1 in a high vacuum environment of about 10 −6 [Pa]. By using this, it is possible to observe (monitor) the object to be inspected (subject) 2 by arbitrary position and posture control in the vacuum chamber 1.

この耐真空用可撓性複合ケーブル２０を用いた耐真空用カメラ１０により、真空室１内に於いて、被検査体（被写体）２の位置合わせ、アライメント調整等、被検査体近傍での自由な位置取り、角度設定を可能にした観察用テレビカメラを実現可能にしている。また、電気的特性は一般用カメラと同等でありながら、１０−６［Ｐａ］程度の高真空環境下に於いても真空環境へのガス放出がほぼゼロのカメラケーブル付耐真空用カメラを実現している。この耐真空用カメラを実現するため、耐真空用カメラ１０、および耐真空用可撓性複合ケーブル２０は、それぞれ真空度１０−６［Ｐａ］の高真空に晒されても安定に動作し、かつ真空空間への不純物放出（不要ガス放出）を最小限に抑えた構造および材料構成としている。 The vacuum-resistant camera 10 using the vacuum-resistant flexible composite cable 20 can freely position the object to be inspected (subject) 2 in the vacuum chamber 1 and adjust the alignment in the vicinity of the object to be inspected. This makes it possible to realize a TV camera for observation that allows easy positioning and angle setting. In addition, while realizing the same electrical characteristics as a general-purpose camera, a vacuum-proof camera with a camera cable that emits almost no gas into the vacuum environment even in a high vacuum environment of about 10 −6 [Pa] is realized. is doing. In order to realize this vacuum-resistant camera, the vacuum-resistant camera 10 and the vacuum-resistant flexible composite cable 20 operate stably even when exposed to a high vacuum with a degree of vacuum of 10 −6 [Pa]. In addition, the structure and the material configuration are such that the emission of impurities (unnecessary gas emission) into the vacuum space is minimized.

真空室１には、耐真空用可撓性複合ケーブル２０の接続インタフェースをもつ貫通コネクタ３０を備えた密閉構造のフランジ４０が設けられる。真空室１内に置かれた耐真空用カメラ１０は、耐真空用可撓性複合ケーブル２０、およびフランジ４０に設けられた貫通コネクタ３０を介して真空室１の外部（大気側）に設けられた制御器５０に回路接続される。フランジ４０は真空室１の規格および寸法に準じた形状および強度とする。貫通コネクタ３０は気密性の高い構造とする。制御器５０は、耐真空用カメラ１０に設けられた撮像素子に駆動信号を送出し、撮像素子の出力信号に従う映像信号を外部へ出力する。   The vacuum chamber 1 is provided with a sealed flange 40 having a through connector 30 having a connection interface for the vacuum-resistant flexible composite cable 20. The vacuum-resistant camera 10 placed in the vacuum chamber 1 is provided outside (atmosphere side) of the vacuum chamber 1 via a vacuum-resistant flexible composite cable 20 and a through connector 30 provided on the flange 40. The controller 50 is connected to the circuit. The flange 40 has a shape and strength conforming to the standard and dimensions of the vacuum chamber 1. The through connector 30 has a highly airtight structure. The controller 50 sends a drive signal to the image sensor provided in the vacuum resistant camera 10 and outputs a video signal according to the output signal of the image sensor to the outside.

真空室１内に設けられる耐真空用カメラ１０は、撮像素子を収容したカメラ筐体と、撮像素子に結像するレンズを装着するレンズマウントと、撮像素子を回路接続する耐真空用貫通コネクタおよびこのコネクタを覆うジャケットとを有し、レンズマウントおよびコネクタジャケットを隔壁にカメラ筐体を密閉した構造としている。これにより真空域内に於いてカメラ筐体に収容された撮像素子は大気側の環境に置かれる。   A vacuum-resistant camera 10 provided in the vacuum chamber 1 includes a camera housing that houses an image sensor, a lens mount that mounts a lens that forms an image on the image sensor, a vacuum-resistant through connector that connects the image sensor to a circuit, and A jacket for covering the connector, and the camera housing is sealed with the lens mount and the connector jacket as partition walls. As a result, the image pickup device accommodated in the camera housing is placed in the atmosphere on the atmosphere side in the vacuum region.

耐真空用カメラ１０の真空中に晒される外筐は、真空中に於いてガス放出が非常に少ない金属材料を用いて構成される。ここでは耐真空用カメラ１０の外筐を構成する、カメラ筐体、レンズマウント、ジャケットをすべてステンレス鋼を用いて構成している。この耐真空用カメラ１０の具体的な構造については図４乃至図１１を参照して後述する。   The outer casing exposed to the vacuum of the vacuum resistant camera 10 is configured using a metal material that emits very little gas in the vacuum. Here, the camera casing, the lens mount, and the jacket constituting the outer casing of the vacuum resistant camera 10 are all made of stainless steel. The specific structure of the vacuum resistant camera 10 will be described later with reference to FIGS.

真空室１内に設けられる耐真空用可撓性複合ケーブル２０は、真空中での不純物放出を最小限に抑える材料と構造を採用し、定インピーダンスの信号線（同軸芯線）を含んだ多芯ケーブル構造によりカメラ信号（ＣＣＤ直接駆動信号）の理想的伝送を可能にしている。   The vacuum-resistant flexible composite cable 20 provided in the vacuum chamber 1 employs a material and structure that minimizes the emission of impurities in a vacuum, and includes a multi-core including a constant impedance signal line (coaxial core line). The cable structure enables ideal transmission of camera signals (CCD direct drive signals).

この耐真空用可撓性複合ケーブル２０の断面構造を図２および図３に示し、ケーブルコネクタを設けた同ケーブルを図８に示している。   2 and 3 show the cross-sectional structure of the vacuum-resistant flexible composite cable 20, and FIG. 8 shows the same cable provided with a cable connector.

耐真空用可撓性複合ケーブル２０は、真空中において線間および芯線に空気溜まりが生じないよう、また不要ガスが放出されないよう線材および製法を考慮して製造されるもので、図２および図３に示すように、編組シールド２１ｃを外皮とし、フッ素系樹脂を中心導体２１ａの絶縁材２１ｂとした同軸芯線２１，２１，…と、フッ素系樹脂を導体２２ａの絶縁材および外皮２２ｂとした他の芯線２２，２２，…とを撚り合わせて編組管２３に通した後、前記編組管２３内で前記同軸芯線２１，２１，…と、他の芯線２２，２２，…との撚りを戻して各芯線間を粗密にし、ベーキング処理を施すことにより製造される。なお、上記各芯線２１，２２は、柔軟性を保ち、かつ長期間の使用に耐えるよう、内部導体２１ａ，２２ａに撚り線を用いた可撓性ケーブル構造であり、大気中で用いられる通常の可撓性ケーブルとほぼ同様の可撓性を有している。また、上記各芯線２１，２２の絶縁材２１ｂ，２２ｂにフッ素系樹脂を用い、各芯線２１，２２の導体２１ａ，２２ａ、編組シールド２１ｃ、編組管２３に銀メッキ線を用いて真空中に不要ガスを放出しない材料構成としている。また、上記ベーキングの処理では、約２００℃で十数時間乃至数十時間の真空ベーキングを行い、樹脂内の不要なガス成分を除去する。   The vacuum-resistant flexible composite cable 20 is manufactured in consideration of the wire and the manufacturing method so as not to cause air accumulation between the wires and the core wire in a vacuum and to prevent unnecessary gas from being released. As shown in FIG. 3, the coaxial core wires 21, 21... With the braided shield 21 c as the outer skin and the fluorine resin as the insulating material 21 b of the central conductor 21 a, and the fluorine resin as the insulating material and the outer skin 22 b of the conductor 22 a Are twisted together and passed through the braided tube 23, and then the twists of the coaxial core wires 21, 21,... And the other core wires 22, 22,. Manufactured by making the gap between the core wires dense and baking. Each of the core wires 21 and 22 has a flexible cable structure using a stranded wire for the internal conductors 21a and 22a so as to maintain flexibility and withstand long-term use. It has almost the same flexibility as a flexible cable. Also, fluorine resin is used for the insulating materials 21b and 22b of the core wires 21 and 22, and the conductors 21a and 22a, the braided shield 21c, and the braided tube 23 of the core wires 21 and 22 are silver plated wires. The material composition does not release gas. In the baking process, vacuum baking is performed at about 200 ° C. for 10 to several tens hours to remove unnecessary gas components in the resin.

このようにして製造した耐真空用可撓性複合ケーブル２０は、樹脂絶縁のケーブルであり、ケーブル自体が非常に柔らかに撓ることから、大気中において使用される一般的なカメラケーブルと同様な可撓性を実現でき、被写体に合わせた真空室１内でのカメラの移動、ハンドリングが自由に行える。このようなケーブル構造により、経済的に有利な構成で、電気的特性は、一般用のカメラケーブルと同等でありながら、１０−６［Ｐａ］に於いても真空環境へのガス放出がほぼゼロの耐真空用可撓性カメラケーブルが実現できる。 The vacuum-resistant flexible composite cable 20 manufactured in this way is a resin-insulated cable, and the cable itself bends very softly, so that it is similar to a general camera cable used in the atmosphere. Flexibility can be realized, and the camera can be moved and handled freely in the vacuum chamber 1 according to the subject. With such a cable structure, an economically advantageous configuration and electrical characteristics are equivalent to those of a general-purpose camera cable, but gas emission to the vacuum environment is almost zero even at 10 −6 [Pa]. The vacuum resistant flexible camera cable can be realized.

上記した耐真空用可撓性複合ケーブル２０の一端には、図４および図８に示すように、耐真空用カメラ１０の貫通コネクタに結合するケーブルコネクタ２８が設けられ、他端には、フランジ４０の貫通コネクタ３０に結合するケーブルコネクタが設けられる。   As shown in FIGS. 4 and 8, a cable connector 28 is provided at one end of the vacuum resistant flexible composite cable 20 as shown in FIG. 4 and FIG. A cable connector that couples to the 40 through connectors 30 is provided.

上記した耐真空用可撓性複合ケーブル２０とともに真空室１内に設けられる耐真空用カメラ１０の各部の組み立て構造を図４乃至図１１に示している。耐真空用カメラ１０全体の外観構造を図４に示し、耐真空用カメラ１０のカメラヘッド部の組み立て構造を図５および図６に示し、耐真空用貫通コネクタおよびこのコネクタを覆うジャケット部の取付構造を図７および図８に示し、耐真空用貫通コネクタの組み立て構造を図９乃至図１１に示している。   The assembled structure of each part of the vacuum resistant camera 10 provided in the vacuum chamber 1 together with the above-described vacuum resistant flexible composite cable 20 is shown in FIGS. The external appearance structure of the vacuum resistant camera 10 is shown in FIG. 4, the assembly structure of the camera head portion of the vacuum resistant camera 10 is shown in FIGS. 5 and 6, and the vacuum resistant penetration connector and the jacket portion covering this connector are attached. The structure is shown in FIGS. 7 and 8, and the assembly structure of the vacuum-resistant through connector is shown in FIGS.

真空室１内に設けられる耐真空用カメラ１０は、図４乃至図８に示すように、撮像素子（この実施形態ではＣＣＤ）で構成したカメラ本体１１を収容するカメラ筐体１２と、撮像素子に結像するレンズを装着するレンズマウント１３と、撮像素子を回路接続する耐真空用貫通コネクタ１４およびこの貫通コネクタ１４を覆うコネクタジャケット（コネクタケース）１５とを有して構成される。   As shown in FIGS. 4 to 8, the vacuum-resistant camera 10 provided in the vacuum chamber 1 includes a camera housing 12 that houses a camera body 11 that is configured by an image sensor (CCD in this embodiment), and an image sensor. A lens mount 13 for mounting a lens for forming an image, a vacuum-proof through connector 14 for connecting an image pickup device in a circuit, and a connector jacket (connector case) 15 for covering the through connector 14.

さらにカメラ筐体１２の外周部には、図４に示すように、真空室１内において、耐真空用カメラ１０を図示しないカメラ移動機構（マニピュレータ）に装着するためのクランプ金具１８が取り付けられる。この図４では、コネクタジャケット１５内に設けられた耐真空用貫通コネクタ１４に、耐真空用可撓性複合ケーブル２０の一端に設けたケーブルコネクタ２８が嵌着された状態を例示している。   Further, as shown in FIG. 4, a clamp fitting 18 for attaching the vacuum-resistant camera 10 to a camera moving mechanism (manipulator) (not shown) is attached to the outer peripheral portion of the camera housing 12. FIG. 4 illustrates a state in which a cable connector 28 provided at one end of the vacuum resistant flexible composite cable 20 is fitted to the vacuum resistant penetration connector 14 provided in the connector jacket 15.

これら耐真空用カメラ１０の外筐を構成するカメラ筐体１２、レンズマウント１３、およびコネクタジャケット１５と、クランプ金具１８、およびケーブルコネクタ２８の外筐等、真空域に晒される金属材部分は、それぞれステンレス鋼により構成される。なお、図ではレンズマウント１３に装着されるレンズおよびレンズケースを示していないが、レンズマウント１３に装着されるレンズケースについてもステンレス鋼により構成される。   The metal parts exposed to the vacuum region, such as the outer casing of the camera casing 12, the lens mount 13, and the connector jacket 15, the clamp fitting 18, and the cable connector 28, which constitute the outer casing of the vacuum resistant camera 10, Each is made of stainless steel. Although the lens and the lens case attached to the lens mount 13 are not shown in the figure, the lens case attached to the lens mount 13 is also made of stainless steel.

図５および図６に示すように、レンズマウント１３の撮像面部１３ｂに、機密保持用のＯリング１３３、フロントガラス１３４、スリップ板１３５を配置してガラス押さえ１３２を撮像面部１３ｂに螺合することで、レンズマウント１３にフロントガラス１３４が取着される。さらにレンズマウント１３の撮像面部１３ｂに、図６に示すように、レンズケース（図示せず）を装着するためのマウントアダプタ１３６を螺合し締め付けねじで固定することにより、レンズマウント１３にマウントアダプタ１３６が取着される。このレンズマウント１３を撮像面側からみた取付状態を図６（ｂ）に示している。   As shown in FIGS. 5 and 6, an O-ring 133 for maintaining confidentiality, a windshield 134, and a slip plate 135 are arranged on the imaging surface portion 13b of the lens mount 13, and the glass presser 132 is screwed to the imaging surface portion 13b. Thus, the windshield 134 is attached to the lens mount 13. Further, as shown in FIG. 6, a mount adapter 136 for mounting a lens case (not shown) is screwed onto the imaging surface portion 13b of the lens mount 13 and fixed with a tightening screw. 136 is attached. FIG. 6B shows an attachment state when the lens mount 13 is viewed from the imaging surface side.

図５及び図６に示すように、カメラ本体１１をレンズマウント１３のカメラ装着部１３ａに嵌挿し、カメラ押さえ１３１をレンズマウント１３に螺合して、レンズマウント１３のカメラ装着部１３ａにカメラ本体１１を装着した後、図７に示すように、レンズマウント１３の筐体接合部１３ｃに、機密保持用のＯリング１３７を介在して、筒状カメラ筐体１２の一端をねじ止めし、カメラ本体１１の周囲にカメラ筐体１２を取り付けることにより、耐真空用カメラ１０のカメラヘッド部が構成される。さらに、図７および図８に示すように、カメラ筐体１２の他端に、機密保持用のＯリング１５１を介在して、耐真空用貫通コネクタ１４を設けたコネクタジャケット１５をねじ止めし、カメラ筐体１２にコネクタジャケット１５を取着することにより、カメラ筐体１２を密閉構造にした耐真空用カメラ１０が構成される。なお、図７に示す符号１９は、耐真空用カメラ１０内でカメラ本体１１と耐真空用貫通コネクタ１４とを回路接続する内部配線である。   As shown in FIGS. 5 and 6, the camera body 11 is inserted into the camera mounting portion 13 a of the lens mount 13, the camera holder 131 is screwed into the lens mount 13, and the camera body is attached to the camera mounting portion 13 a of the lens mount 13. 7, as shown in FIG. 7, one end of the cylindrical camera housing 12 is screwed to the housing joint portion 13 c of the lens mount 13 with an O-ring 137 for maintaining confidentiality interposed therebetween. By attaching the camera housing 12 around the main body 11, the camera head portion of the vacuum resistant camera 10 is configured. Further, as shown in FIG. 7 and FIG. 8, the connector jacket 15 provided with the vacuum-proof through connector 14 is screwed to the other end of the camera housing 12 with an O-ring 151 for maintaining confidentiality interposed therebetween, By attaching the connector jacket 15 to the camera housing 12, the vacuum resistant camera 10 in which the camera housing 12 has a sealed structure is configured. Reference numeral 19 shown in FIG. 7 is an internal wiring that connects the camera body 11 and the vacuum-proof through connector 14 in the vacuum-proof camera 10.

コネクタジャケット１５に設けられる耐真空用貫通コネクタ１４は、図９乃至図１１に示すように、複数の孔ａ，…を有する一対のインシュレータ１４１，１４２と、このインシュレータ１４１，１４２の孔ａ，…を貫通した複数のピンコンタクト１４３，…と、インシュレータ１４１，１４２の相互の間に充填された接着剤１４５とにより構成される。インシュレータ１４１，１４２は、ポリエーテル・エーテル・ケトン樹脂により成形される。ピンコンタクト１４３，…には、金メッキ若しくは無電解ニッケルメッキが施されている。接着剤１４５には二液混合型エポキシ系接着剤が用いられる。   As shown in FIGS. 9 to 11, the vacuum-resistant through connector 14 provided in the connector jacket 15 includes a pair of insulators 141, 142 having a plurality of holes a, and holes a,. , And a plurality of pin contacts 143... And an adhesive 145 filled between the insulators 141 and 142. The insulators 141 and 142 are formed of a polyether / ether / ketone resin. The pin contacts 143,... Are plated with gold or electroless nickel. As the adhesive 145, a two-component mixed epoxy adhesive is used.

この耐真空用貫通コネクタ１４は、複数のピンコンタクトが貫通する孔を有した一対のインシュレータ１４１，１４２のうち、カメラ本体側の一方のインシュレータ１４１にエポキシ系接着剤１４５を塗布する第１の工程と、接着剤１４５が塗布されたインシュレータ１４１の孔ａ，…に、鍔つきのピンコンタクト１４３，…を嵌挿する第２の工程と、インシュレータ１４１の孔ａ，…に嵌挿されたピンコンタクト１４３，…を他方のインシュレータ１４２の孔ａ，…に嵌挿して、一対のインシュレータ１４１，１４２を密着させ、一対のインシュレータ１４１，１４２の間、およびピンコンタクト１４３，…とインシュレータ１４１，１４２との間にエポキシ系接着剤１４５を充填させる第３の工程と、ピンコンタクト１４３，…に付着した接着剤１４５およびインシュレータ１４１，１４２の周部から食み出た接着剤１４５を除去し、接着剤１４５を硬化させる第４の工程とを経ることによって製造される。   This vacuum-resistant through connector 14 is a first step of applying an epoxy adhesive 145 to one of the insulators 141 on the camera body side out of a pair of insulators 141 and 142 having holes through which a plurality of pin contacts penetrate. Are inserted into the holes a of the insulator 141 coated with the adhesive 145, and the pin contacts 143 are inserted into the holes a of the insulator 141. Are inserted into the holes a of the other insulator 142 so that the pair of insulators 141 and 142 are brought into close contact with each other, and between the pair of insulators 141 and 142, and between the pin contacts 143 and the insulators 141, 142. The third step of filling the epoxy adhesive 145 with the pin contacts 143,. The adhesive 145 exiting run off from the peripheral portion of the adhesive 145 and the insulator 141 and 142 is removed, is prepared by passing through a fourth step of curing the adhesive 145.

上記一対のインシュレータ１４１，１４２のうち、カメラ本体側の一方のインシュレータ１４１には、図９に示すように、他方のインシュレータ１４２と接合する面側に凹陥部Ａが形成され、この凹陥部Ａの底部にピンコンタクト取付用の複数の孔ａ，…が設けられている。凹陥部Ａには高い鍔部Ｂと、低い鍔部Ｃが形成され、鍔部Ｃが、上記凹陥部Ａに塗布した接着剤１４５の余剰分の逃げ溝となる。   Of the pair of insulators 141 and 142, one insulator 141 on the camera body side is formed with a recessed portion A on the surface side to be joined to the other insulator 142 as shown in FIG. A plurality of holes a for attaching pin contacts are provided at the bottom. The recessed part A is formed with a high collar part B and a low collar part C, and the collar part C serves as a relief groove for an excess of the adhesive 145 applied to the concave part A.

上記第１の工程では、インシュレータ１４１の凹陥部Ａに、鍔部Ｃを超える程度の高さまで接着剤１４５を塗布する。   In the first step, the adhesive 145 is applied to the recessed portion A of the insulator 141 to a height that exceeds the flange portion C.

上記第２の工程では、インシュレータ１４１の凹陥部Ａの底部に設けられた孔ａ，…に、鍔つきのピンコンタクト１４３，…を嵌挿する。   In the second step, pinned pin contacts 143,... Are inserted into holes a,... Provided in the bottom of the recessed portion A of the insulator 141.

上記第３の工程では、ピンコンタクト１４３，…を他方のインシュレータ１４２の孔ａ，…に嵌挿して、一対のインシュレータ１４１，１４２を密着させることにより、一対のインシュレータ１４１，１４２の間、およびピンコンタクト１４３，…とインシュレータ１４１，１４２との間にエポキシ系接着剤１４５が充填されるが、この際、余剰接着剤が鍔部Ｃを逃げ溝にしてインシュレータ１４１，１４２の周部から食み出る。この食み出た接着剤１４５を上記第４工程で拭き取る。さらに第４の工程では、図１１に示すように、耐真空用可撓性複合ケーブル２０に接続して用いるケーブルコネクタ２８を利用して、一対のインシュレータ１４１，１４２の間、およびピンコンタクト１４３，…とインシュレータ１４１，１４２との間の各間隙に充填されたエポキシ系接着剤１４５を硬化させる。これにより、後に嵌着されるケーブルコネクタ２８に馴染んだ、円滑に脱着可能な耐真空用貫通コネクタ１４が製造できる。   In the third step, the pin contacts 143,... Are inserted into the holes a,... Of the other insulator 142 and the pair of insulators 141, 142 are brought into close contact with each other. The epoxy adhesive 145 is filled between the contacts 143,... And the insulators 141, 142. At this time, the excess adhesive protrudes from the peripheral portions of the insulators 141, 142 using the flange C as a relief groove. . The protruding adhesive 145 is wiped off in the fourth step. Further, in the fourth step, as shown in FIG. 11, the cable connector 28 used by being connected to the vacuum-resistant flexible composite cable 20 is used to connect between the pair of insulators 141 and 142 and the pin contacts 143 and 143. The epoxy adhesive 145 filled in the gaps between the insulators 141 and 142 is cured. As a result, the vacuum-resistant through connector 14 that can be smoothly attached and detached, which is familiar with the cable connector 28 to be fitted later, can be manufactured.

このような製造工程を経て図１１に示すような耐真空用貫通コネクタ１４が製造される。
この耐真空用貫通コネクタ１４のインシュレータ周部にエポキシ系接着剤を塗布し、耐真空用貫通コネクタ１４を、図７および図８に示すように、コネクタジャケット１５のコネクタ装着部１５ａに嵌挿して、コネクタ押さえ１５３をコネクタ装着部１５ａに螺合することにより、耐真空用貫通コネクタ１４とコネクタ装着部１５ａとの間隙にエポキシ系接着剤が充填された状態で耐真空用貫通コネクタ１４がコネクタジャケット１５に取着される。 Through such a manufacturing process, the vacuum-resistant through connector 14 as shown in FIG. 11 is manufactured.
An epoxy adhesive is applied to the insulator peripheral portion of the vacuum-resistant through connector 14, and the vacuum-resistant through connector 14 is inserted into the connector mounting portion 15a of the connector jacket 15 as shown in FIGS. The connector holder 153 is screwed into the connector mounting portion 15a, so that the vacuum-resistant through-connector 14 is connected to the connector jacket while the gap between the vacuum-resistant through-connector 14 and the connector mounting portion 15a is filled with epoxy adhesive 15 is attached.

これにより真空側と大気側とを耐真空用貫通コネクタ１４で隔離したコネクタジャケット１５が構成される。なお、上記した耐真空用貫通コネクタ１４の構造は、耐真空用カメラ１０の貫通コネクタだけでなく、例えば密閉構造のフランジ４０に設けられた貫通コネクタ３０にも適用することができる。   As a result, a connector jacket 15 is formed in which the vacuum side and the atmosphere side are separated by the vacuum-proof through connector 14. The structure of the vacuum-resistant through connector 14 described above can be applied not only to the through-connector of the vacuum-resistant camera 10, but also to, for example, the through connector 30 provided on the flange 40 having a sealed structure.

上記した耐真空用可撓性複合ケーブル２０を用いた耐真空用カメラ１０を真空域内の監視・観察用カメラとして用いることにより、真空域内における被検査体（被写体）の位置合わせ、アライメント調整等、被検査体近傍での自由な位置取り、角度設定を可能にした、経済的に有利な構成の監視・観察用テレビカメラを実現することができる。この耐真空用可撓性複合ケーブル２０を用いた耐真空用カメラ１０は、例えば、真空成膜装置（成膜蒸着、スパッタリングなど）やその他の真空設備など各種の産業用真空装置に適用できる。   By using the vacuum-resistant camera 10 using the above-described vacuum-resistant flexible composite cable 20 as a monitoring / observation camera in the vacuum region, alignment of the object to be inspected (subject) in the vacuum region, alignment adjustment, etc. It is possible to realize a monitoring / observation television camera having an economically advantageous configuration that enables free positioning and angle setting in the vicinity of the object to be inspected. The vacuum-resistant camera 10 using the vacuum-resistant flexible composite cable 20 can be applied to various industrial vacuum apparatuses such as a vacuum film forming apparatus (deposition deposition, sputtering, etc.) and other vacuum equipment.

上記した実施形態では、耐真空用カメラ１０の外筐を構成する、カメラ本体１２、レンズマウント１３、ジャケット１５をすべてステンレス鋼を用いて構成しているが、真空中に於いてガス放出が非常に少ない、例えばアルミニウム等の金属材料を用いて構成することも可能である。   In the above-described embodiment, the camera body 12, the lens mount 13, and the jacket 15 that constitute the outer casing of the vacuum resistant camera 10 are all made of stainless steel. For example, it is possible to use a metal material such as aluminum.

また、上記耐真空用可撓性複合ケーブル２０に照明用配線を設け、上記レンズマウント１３にＬＥＤ設けることで、照明機能をもつ耐真空用カメラ１０を提供することができる。   Further, by providing illumination wiring on the vacuum resistant flexible composite cable 20 and providing LEDs on the lens mount 13, the vacuum resistant camera 10 having an illumination function can be provided.

本発明の実施形態に係る耐真空用カメラの構成を示すブロック図。1 is a block diagram showing a configuration of a vacuum-resistant camera according to an embodiment of the present invention. 上記実施形態に係る耐真空用カメラに適用される耐真空用可撓性複合ケーブルの断面構造を示す図。The figure which shows the cross-section of the vacuum-resistant flexible composite cable applied to the vacuum-resistant camera which concerns on the said embodiment. 上記図２に示す耐真空用可撓性複合ケーブルに含まれる同軸芯線の断面構造を示す図。The figure which shows the cross-section of the coaxial core wire contained in the flexible composite cable for vacuum resistance shown in the said FIG. 上記実施形態に係る耐真空用カメラの外観構造を示す図。The figure which shows the external appearance structure of the camera for vacuum resistant which concerns on the said embodiment. 上記実施形態に係る耐真空用カメラのカメラヘッド部の組立構造を示す図。The figure which shows the assembly structure of the camera head part of the vacuum-resistant camera which concerns on the said embodiment. 上記実施形態に係る耐真空用カメラのカメラヘッド部の組立構造を示す図。The figure which shows the assembly structure of the camera head part of the vacuum-resistant camera which concerns on the said embodiment. 上記実施形態に係る耐真空用カメラの組立構造を示す図。The figure which shows the assembly structure of the vacuum-resistant camera which concerns on the said embodiment. 上記実施形態に係る耐真空用カメラの組立構造を示す図。The figure which shows the assembly structure of the vacuum-resistant camera which concerns on the said embodiment. 上記実施形態に係る耐真空用カメラの耐真空用貫通コネクタ部の組立構造を示す図。The figure which shows the assembly structure of the vacuum-proof penetration connector part of the vacuum-proof camera which concerns on the said embodiment. 上記実施形態に係る耐真空用カメラの耐真空用貫通コネクタ部の組立構造を示す図。The figure which shows the assembly structure of the vacuum-proof penetration connector part of the vacuum-proof camera which concerns on the said embodiment. 上記実施形態に係る耐真空用カメラの耐真空用貫通コネクタ部の外観構造を示す図。The figure which shows the external appearance structure of the vacuum-proof penetration connector part of the vacuum-proof camera which concerns on the said embodiment.

符号の説明Explanation of symbols

１…真空チャンバー（例えば真空室）、２…被検査体（被写体）、１０…耐真空用カメラ、１１…カメラ本体（ＣＣＤユニット）、１２…カメラ筐体、１３…レンズマウント、１４…耐真空用貫通コネクタ、１５…コネクタジャケット（コネクタケース）、１８…クランプ金具、２０…耐真空用可撓性複合ケーブル、２８…ケーブルコネクタ、３０…貫通コネクタ、４０…フランジ、５０…制御器。   DESCRIPTION OF SYMBOLS 1 ... Vacuum chamber (for example, vacuum chamber), 2 ... Test object (subject), 10 ... Vacuum resistant camera, 11 ... Camera body (CCD unit), 12 ... Camera housing, 13 ... Lens mount, 14 ... Vacuum resistant Through connector, 15 ... Connector jacket (connector case), 18 ... Clamp fitting, 20 ... Flexible composite cable for vacuum resistance, 28 ... Cable connector, 30 ... Through connector, 40 ... Flange, 50 ... Controller.

Claims (7)

ステンレス鋼で構成したカメラ筐体に撮像素子を収容し、前記カメラ筐体の一端に前記撮像素子に結像するレンズを装着するレンズマウントを設け、前記カメラ筐体の他端に前記撮像素子を回路接続するコネクタおよびコネクタを覆うジャケットを設けて、前記カメラ筐体を密閉構造にしたことを特徴とする耐真空用カメラ。   The image sensor is housed in a camera case made of stainless steel, a lens mount for mounting a lens that forms an image on the image sensor is provided at one end of the camera case, and the image sensor is provided at the other end of the camera case. A vacuum-proof camera, characterized in that a connector for circuit connection and a jacket for covering the connector are provided, and the camera housing has a sealed structure. 前記レンズマウントおよび前記ジャケットの少なくとも真空域に晒される部分をステンレス鋼で構成したことを特徴とする請求項１記載の耐真空用カメラ。   2. The vacuum-resistant camera according to claim 1, wherein at least a portion of the lens mount and the jacket exposed to a vacuum region is made of stainless steel. 前記コネクタは、真空側と大気側を隔離する多ピン構造の貫通コネクタであることを特徴とする請求項２記載の耐真空用カメラ。   The vacuum-resistant camera according to claim 2, wherein the connector is a multi-pin penetration connector that separates the vacuum side and the atmosphere side. 前記コネクタには、フッ素系樹脂を絶縁材に用い真空ベーキングを施して不要なガス成分を除去した可撓性多芯ケーブルが接続可能であることを特徴とする請求項３記載の耐真空用カメラ。   4. The vacuum-proof camera according to claim 3, wherein a flexible multi-core cable from which unnecessary gas components are removed by vacuum baking using fluorine resin as an insulating material can be connected to the connector. . 前記コネクタのインシュレータを真空域と大気側との隔壁に用いたことを特徴とする請求項４記載の耐真空用カメラ。   5. The vacuum-proof camera according to claim 4, wherein the insulator of the connector is used as a partition wall between a vacuum region and an atmosphere side. 前記コネクタは、前記可撓性多芯ケーブルを接続する側の端子接合面部に、空気溜まりを排除するインシュレータ構造を具備したことを特徴とする請求項５記載の耐真空用カメラ。   6. The vacuum-resistant camera according to claim 5, wherein the connector includes an insulator structure that eliminates air accumulation at a terminal joint surface portion on a side to which the flexible multicore cable is connected. 前記カメラ本体に、カメラを真空雰囲気内で移動する機構の把持部を設けたことを特徴とする請求項４記載の耐真空用カメラ。   5. The vacuum-proof camera according to claim 4, wherein a grip portion of a mechanism for moving the camera in a vacuum atmosphere is provided on the camera body.
JP2006009955A 2006-01-18 2006-01-18 Vacuum resistant camera Expired - Fee Related JP4192181B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006009955A JP4192181B2 (en) 2006-01-18 2006-01-18 Vacuum resistant camera

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006009955A JP4192181B2 (en) 2006-01-18 2006-01-18 Vacuum resistant camera

Publications (2)

Publication Number Publication Date
JP2007194831A true JP2007194831A (en) 2007-08-02
JP4192181B2 JP4192181B2 (en) 2008-12-03

Family

ID=38450180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006009955A Expired - Fee Related JP4192181B2 (en) 2006-01-18 2006-01-18 Vacuum resistant camera

Country Status (1)

Country Link
JP (1) JP4192181B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012032798A1 (en) * 2010-09-09 2012-03-15 株式会社エイブイシー Lighting apparatus for vacuum apparatus
CN115720286A (en) * 2021-08-23 2023-02-28 西科里特有限公司 Vacuum camera for large-capacity chamber

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6311967B2 (en) 2014-03-06 2018-04-18 Ｔｉａｎｍａ Ｊａｐａｎ株式会社 Substrate bonding apparatus and substrate bonding method

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012032798A1 (en) * 2010-09-09 2012-03-15 株式会社エイブイシー Lighting apparatus for vacuum apparatus
JP2012059538A (en) * 2010-09-09 2012-03-22 Avc Co Ltd Lighting fixture for vacuum device
CN103097802A (en) * 2010-09-09 2013-05-08 株式会社Avc Lighting apparatus for vacuum apparatus
US20130222572A1 (en) * 2010-09-09 2013-08-29 Avc Co., Ltd. Lighting apparatus for vacuum apparatus
KR101455549B1 (en) * 2010-09-09 2014-10-27 가부시키가이샤 에이브이씨 Lighting apparatus for vacuum apparatus
US9360205B2 (en) 2010-09-09 2016-06-07 Avc Co., Ltd. Lighting apparatus for vacuum apparatus
CN115720286A (en) * 2021-08-23 2023-02-28 西科里特有限公司 Vacuum camera for large-capacity chamber
KR20230028987A (en) * 2021-08-23 2023-03-03 씨큐리티(주) Vacuum camera for large rooms
KR102567175B1 (en) 2021-08-23 2023-08-16 씨큐리티(주) Vacuum camera for large rooms
CN115720286B (en) * 2021-08-23 2024-03-05 西科里特有限公司 Vacuum camera for high-capacity chamber

Also Published As

Publication number Publication date
JP4192181B2 (en) 2008-12-03

Similar Documents

Publication Publication Date Title
US20240168277A1 (en) Photoelectric composite module, camera head, and endoscopic device
US9325881B2 (en) Imaging mechanism and endoscope apparatus
US10898060B2 (en) Cable connection structure, endoscope system, and method of manufacturing cable connection structure
JP5192559B2 (en) Endoscope
US20190069767A1 (en) Cable connection substrate, imaging apparatus, endoscope, and method of manufacturing imaging apparatus
US10090611B2 (en) Cable, cable connection structure, and imaging apparatus
JP5603650B2 (en) Cable connection structure and endoscope apparatus
EP3264535A1 (en) Connector and camera device equipped therewith
JP4192181B2 (en) Vacuum resistant camera
US11957305B2 (en) Endoscope distal end structure and endoscope
US20110170835A1 (en) Opto-electro hybrid harness and method of manufacturing the same
WO2018158897A1 (en) Cable mounting structure and endoscope
ES2687051T3 (en) Plug-in connection with a plug-in connector and a cable connected to it
US20200405136A1 (en) Endoscope
US8298008B2 (en) Mounting assembly and cable assembly
JP4287859B2 (en) Vacuum resistant camera and method for manufacturing vacuum resistant multi-pole through connector used for vacuum resistant camera
JP2007007429A (en) Imaging device
JP4224495B2 (en) Method for producing flexible composite cable for vacuum resistance and flexible composite cable for vacuum resistance
US10980408B2 (en) Medical camera head and medical camera apparatus
JP2008053007A (en) Multicore current introduction terminal and cable
WO2017187621A1 (en) Cable connection structure, imaging device, and endoscope
JP5148763B1 (en) Camera head, imaging device
JP7183323B2 (en) Plug connection for video endoscope, video endoscope and method for manufacturing the plug connection
US20220409032A1 (en) Distal end portion of endoscope, distal end frame, endoscope, and electric conduction confirmation method
US20220322918A1 (en) Endoscope

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060118

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20080916

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20080919

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110926

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110926

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120926

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120926

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130926

Year of fee payment: 5

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees