JP2007183226A - Method and device of inspecting vacancy of product - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspecting method for quickly performing both the inspections of penetration inspection and inspection, such as foreign matters when performing both the inspections of the penetration inspection of vacancy in a product and the inspection, such as the foreign matters, and to provide an inspecting device. <P>SOLUTION: The inspection method includes a process for mounting the product in a ventilation hole of a work stage; a process for penetration inspection for determining the presence of a through hole, on the basis of a pressure reduction state in product vacancy in a prescribed time, by supplying compressed air toward the vacancy inside from a compressed air supply means of a penetration inspection system and closing a valve so as to prevent leak from the inside of the vacancy; and a process of the inspection, such as foreign matters for determining the presence of the foreign matters or the like of the vacancy on the basis of a measured wind state, by drawing the air in the vacancy by a vacuum means of foreign matters or the like inspection system and measuring the state of wind introduced inside of the vacancy from a second opening part with a sensor. After performing either the process of penetration inspection process or the foreign matters or the like inspection, a ventilation tube, used for the remaining other, is changed over to the ventilation hole so as to communicate with the ventilation hole of the work stage, and the remaining process is performed. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an inspection method and an inspection apparatus for a hole in an article, and more particularly to an inspection method and an inspection apparatus for a hole in an article having an internal hole such as a turbine housing.

Conventionally, in the case of performing a penetration inspection for inspecting the presence or absence of penetration between a hole in an article, for example, a turbine housing, and the outside, the following is performed.
First, the opening of the turbine housing is sealed so that the holes in the turbine housing are airtight with respect to the outside. Next, compressed air is sent into the holes.
After the inside of the hole reaches a predetermined atmospheric pressure, the supplied compressed air is prevented from leaking from the hole through the opening. Check the depressurized state in the hole of the article with a pressure gauge. When there is no pressure reduction, it is determined that there is no penetration, and when there is pressure reduction, it is determined that there is penetration.
In this way, the presence or absence of penetration between the holes and the outside of the article was inspected.

Next, in the case of inspecting a foreign substance or the like for inspecting the presence or absence of defects inside the hole (burrs and foreign substances inside the hole) in the article, the following is performed.
Method 1: Insert a wire or the like to check the state of occlusion / stenosis caused by burrs or foreign matter.
Method 2: An endoscope and an optical fiber light source, or a borescope are inserted and examined visually.
Method 3: An ultrasonic wave is radiated from one opening, and the volume and the stenosis state by a burr | flash or a foreign material are determined by detecting the sound volume in another opening (for example, refer patent document 1).

JP 2000-338090 A

In this conventional foreign matter inspection, there are problems in that the above method 1 and method 2 require a lot of labor and are often inaccurate due to low accuracy.
Furthermore, when the shape of the hole in the article is complicated, a great deal of labor is required and the accuracy may be further lowered.
Furthermore, when the shape of the hole in the article is complicated, there is a problem that the method 3 also increases the loss during transmission of ultrasonic waves and the degree of noise mixing, making accurate determination difficult. It was.

An object of the present application is to provide an inspection method and an inspection apparatus capable of inspecting the presence or absence of penetration between a hole in an article and the outside when the penetration inspection of the hole in the article is performed.
Another object of the present invention is to provide an inspection method and an inspection apparatus capable of inspecting the presence or absence of burrs and foreign matters in the pores when inspecting the foreign matters in the pores of the article.
Another object of the present invention is to provide an inspection method and an inspection apparatus capable of inspecting in a short time and with high accuracy even when the shape of the hole of the article is complicated in the inspection of the foreign matter etc. of the hole of the article. It is something to be offered.
Another object of the present invention is to provide an inspection method and an inspection apparatus capable of promptly performing both the penetration inspection and the inspection of foreign matter, etc., when both the hole penetration inspection and the foreign matter inspection are performed on the article. To do.
Other objects and advantages will be readily apparent from the drawings and the following description associated therewith.

The method for inspecting a hole of an article in the present invention includes an installation area 6a on the surface of which the article W is mounted, and the ventilation hole 7 leading to the first opening 4b of the article W to be installed in the installation area 6a. A penetration inspection system 2 including a work stage 1 provided and a vent pipe 15 communicating with the vent hole 7 in the work stage 1, wherein the penetration inspection system 2 is configured to empty an article through the vent pipe 15 and the vent hole 7. Compressed air supply means 10 for sending compressed air into the hole 4a, a valve for preventing the air sent into the hole 4a from leaking through the vent pipe 15, and a decompressed state in the hole 4a Penetrating inspection system 2 comprising pressure measuring means 12 for measuring
A foreign matter inspection system 3 including a vent pipe 24 communicating with the vent hole 7 in the work stage 1, wherein the foreign matter test system 3 draws air in the hole through the vent hole 7 and the vent pipe 24. The vacuum means 20 and a sensor 34 for measuring the state of the wind introduced into the hole 4a from the second opening 4c of the article W by the air in the hole 4a being drawn out by the vacuum means 20; Using the foreign matter inspection system 3 provided with the determination means 35 for determining the presence or absence of foreign matter or the like in the hole 4a based on the value measured by the sensor 34, the inside of the hole of the article W having the hole 4a is used. A hole inspection method for detecting defects, wherein the hole inspection method includes a step of mounting the article W in a state where the first opening 4b of the article W is aligned with the vent hole 7 of the work stage 1, and the penetration inspection described above. From the compressed air supply means 10 in the system 2 to the inside of the hole 4a A process of penetrating inspection that feeds compressed air, closes the valve so that the fed air does not leak out of the holes 4a, and determines whether there is penetration based on the reduced pressure state in the article holes within a predetermined time; In the foreign matter inspection system 3, the air in the air holes is drawn out by the vacuum means 20, and the state of the wind introduced into the air holes 4 a from the second opening 4 c is measured by the sensor 34. A foreign matter inspection step for determining the presence or absence of foreign matter etc. in the air holes 4a based on the state of the wind, and after performing either one of the penetration inspection step or the foreign matter inspection step. Then, the remaining process is performed by switching the ventilation pipe used in the other process to communicate with the vent hole 7 of the work stage 1.

  Preferably, the work stage 1 is provided with an installation area 6a for mounting the article W on the surface, and has a vent hole 7 communicating with the first opening of the article W to be installed in the installation area 6a. 1 is a penetration inspection system 2 including a ventilation pipe 15 communicating with the ventilation hole 7 in FIG. 1, and the penetration inspection system 2 sends compressed air through the ventilation pipe 15 and the ventilation hole 7 and into the air holes 4 a of the article. Compressed air supply means 10, a valve for preventing the air sent into the hole 4a from leaking through the vent pipe 15, and a pressure measuring means 12 for measuring the reduced pressure state in the hole 4a. A foreign substance inspection system 3 including a through inspection system 2 including a vent pipe 24 communicating with the vent hole 7 in the work stage 1, wherein the foreign substance inspection system 3 includes the vent hole 7 and the vent pipe 24. To draw out air in the hole 4a through The vacuum means 20 and a sensor 34 for measuring the state of the wind introduced into the hole 4a from the second opening 4c of the article W by the air in the hole 4a being drawn out by the vacuum means 20; A foreign substance inspection system 3 including a determination means 35 for determining the presence or absence of a foreign substance or the like in the hole 4a based on a value measured by the sensor 34, and a through inspection that communicates with the vent hole 7 of the work stage 1 Any system can be used as long as the system 2 and the foreign matter inspection system 3 are selectively switched so as to be able to inspect both the penetration of the article having the holes 4a and the defect such as the foreign matter.

  As described above, in the present invention, when performing a penetration inspection of a hole in an article, after sending compressed air into the hole, the pressure is reduced by checking whether the pressure in the hole is reduced in an airtight state. In this case, it is determined that there is penetration, and when there is no pressure reduction, it is determined that there is no penetration. Therefore, it is possible to accurately inspect the presence or absence of penetration between the voids in the article and the outside, and to provide a good quality article.

Further, according to the present invention, when inspecting foreign matter etc. in the hole of the article, the state of the wind passing through the hole is measured by a sensor, and the presence / absence of the foreign matter is determined based on the measured wind state.
Therefore, there is an operational effect that can correctly inspect the presence or absence of burrs and foreign matters in the holes in a short time without requiring much labor as in the conventional inspection.
Furthermore, this has an operational effect that allows inspection in a short time even when inspecting an article having a complicated hole shape.

  Furthermore, in the present invention, when both the penetration inspection of the hole of the article and the inspection of the foreign matter are inspected, after setting the article on the work stage, either the penetration inspection or the foreign matter inspection is performed, and thereafter Since the other ventilation pipe is used by switching the ventilation pipe of the system used for the remaining inspection to communicate with the work stage ventilation hole, the other inspection can be performed following the one inspection. There is an operational effect that can quickly perform two inspections, a penetration inspection and a foreign matter inspection.

  Embodiments of the present invention will be described below with reference to the drawings. 1 to 6, W indicates a work (also referred to as an article) having a hole 4a to be inspected, for example, a known turbine housing. 4b shows the 1st opening part which leads to the hole 4a, 4c shows the 2nd opening part which leads to the hole 4a.

Next, A shows an inspection device for detecting penetration of the workpiece W inside the hole 4a and defects such as foreign matters.
Reference numeral 1 denotes a work stage in the inspection apparatus A, and 6 denotes a fixed base made of hard material. Reference numeral 6 a denotes an installation area for mounting the workpiece W provided on the surface of the base 6. The installation area 6a is formed of an airtight material. As the airtight material, it is sufficient that the installation area 6a and the first opening 4b are airtight in a state where the workpiece W is mounted. For example, the installation area 6a may be formed of a rubber material. Good. Reference numeral 7 denotes a ventilation hole penetrating the base 6 opened in the installation area 6a. As shown in FIG. 2, reference numeral 8 denotes a known clamp that is provided on the surface of the base 6 as needed, and is for mounting and fixing the workpiece W to the workpiece stage 1. Reference numeral 9 denotes a common pipe communicating with the vent hole 7.

Next, 2 shows a penetration inspection system, which is used for inspecting a penetration defect in the hole 4a of the workpiece W. The penetration inspection system 2 will be described.
Reference numeral 15 denotes a common pipe 9 and a vent pipe communicating with the vent hole 7. Reference numeral 10 denotes compressed air supply means for sending compressed air into the air holes 4a of the workpiece W through the vent pipe 15, the common pipe 9, and the vent hole 7 as shown in FIGS. The compressed air supply means 10 only needs to have a function capable of setting the air pressure in the holes 4a to a predetermined pressure, for example, 1.0 to 10 atmospheres in the holes 4a when performing a penetration inspection. An air compressor may be used. Reference numeral 11 denotes a valve disposed in the vent pipe 15. For example, a well-known manual valve may be used, but a well-known electromagnetic valve may be used. Reference numeral 12 denotes a pressure measuring means disposed in the vent pipe 15 as long as it can measure the atmospheric pressure state in the work hole 4a, and a known pressure gauge may be used. Reference numeral 13 denotes a well-known pressure adjusting valve disposed in the vent pipe 15, and the pressure of the compressed air sent out from the compressed air supply means 10 through the vent pipe 15 can be adjusted, for example, in the hole 4a. The pressure can be adjusted to 1.0 to 10 atm. Reference numeral 14 denotes a known check valve, which allows air to pass in the direction of the vent hole 7 and not to flow back in the opposite direction.
Note that a valve may be interposed in the common pipe 9. In that case, after the inside of the hole 4a is pressurized to a constant pressure in the penetration inspection, the valve interposed in the common pipe 9 may be closed to perform the pressure reduction inspection. In that case, a pressure gauge may be arranged on the side of the hole 4a rather than the valve interposed in the common pipe 9.
Further, an arbitrary electromagnetic switching valve for selectively switching and communicating the ventilation pipe 15 or the ventilation pipe 24 with respect to the common pipe 9 is disposed at the three-way position indicated by reference numeral 9a in FIG. 11 (or valves 21, 23) may be interlocked with the control unit 36 as needed, for example, in conjunction with the valve.

Next, reference numeral 3 denotes an inspection system for foreign matters and the like, which is used for inspecting burrs and foreign matter defects in the holes 4a of the workpiece W. The foreign matter inspection system 3 includes a drawing system B for drawing air from the holes of the workpiece W, a supply system S for supplying air into the holes of the workpiece W, and a burrs inside the holes of the workpiece W. And a determination system J for determining the presence or absence of foreign matter.
First, the lead-in system B will be described.
Reference numeral 24 denotes a common pipe 9 and a vent pipe communicating with the vent hole 7. Reference numeral 20 denotes a vacuum means for drawing out air in the air holes 4a of the workpiece W through the vent pipe 24. As the vacuum means 20, for example, a known comb (ejector type vacuum generator) may be used. As is well known, the convert 20 generates a vacuum using compressed air as a drive source. The compressed air supplied to the convert 20 may be supplied using the compressed air supply device 10 in the penetration inspection system 2 described above.
Reference numerals 21 and 23 denote valves disposed in the vent pipe 24. For example, a known manual or electromagnetic valve may be used. 22 is a well-known flow meter / regulator valve installed in the vent pipe 24. As is widely known, the flow rate of the air flowing through the vent pipe 24 is measured and adjusted so that the air at a predetermined flow rate is constant. It passes through the vent pipe 24.

Next, the supply system S will be described.
Reference numeral 26 denotes an installation member for installing an air tank 27 to be described later, which is fixed to the second opening 4c side of the workpiece W as shown in the figure. Reference numeral 27 denotes a known air tank mounted on the installation member 26 so as to freely advance and retreat in the directions of arrows 43a and 43b, and the installation moves laterally (depth direction in FIG. 2) on the installation member. There has been no such thing. The capacity of the air tank 27 is sufficiently large so as to function as a buffer for air introduced into the air holes 4a of the workpiece W. Reference numeral 28 denotes a well-known filter provided in the air tank 27 for removing dust and oil mist contained in the outside air flowing into the air tank 27 from the outside. Reference numeral 42 denotes a rod of a well-known air cylinder (not shown) that is movably moved in the directions of arrows 43a and 43b shown in FIG. This rod 42 is used when the packing 30 is desired to be airtight with respect to the second opening 4c in the workpiece W. As shown in the drawing, the contact portion 42a protruding in a bifurcated shape provided at the front portion is provided on the air tank 27. It is good to make it contact | abut to the rear-end part side, and to carry out the press operation | movement in the arrow 43a direction. Air is introduced into the filter 28 from both sides. Reference numeral 30 denotes a packing, in which the work W as shown in FIGS. 1 and 2 is attached, and the second opening 4c of the work can be freely attached and detached. It is formed of a known elastic material such as a rubber material. Reference numeral 31 denotes a vent pipe. As shown in FIG. 2, one end communicates with the opening 27a of the air tank 27, and the other end is connected to the packing 30. It communicates with the hole 4a. Reference numeral 29 denotes a valve disposed in the vent pipe 31. For example, a known electromagnetic valve may be used.

Next, the determination system J will be described.
Reference numeral 34 denotes a sensor for measuring the state of air (wind) passing through the hole 4a. The sensor 34 measures the state of the wind introduced into the hole 4a from the second opening 4c of the workpiece W when the air in the hole 4a is drawn out by the vacuum means 20. The sensor 34 is disposed in the vicinity of the opening 27a in the air tank 27 as shown in FIG. 2, and is disposed at a position where laminar flow can be measured. Since the sensor 34 measures near the second opening 4c of the work W (upward side of the wind flowing through the hole 4a), the wind speed can be measured with high accuracy.
As the sensor 34, for example, a well-known MEMS (Micro Electro Mechanical System) wind speed sensor may be used. A known thermistor type anemometer may be used as the sensor 34.
Further, the sensor 34 may be any sensor that can measure the state of the air (wind) passing through the vent pipe 31, and may be one that measures the state of the wind using an air flow meter, for example.
Further, as the installation position of the sensor 34, it is only necessary to measure the flow of air passing through the hole 4a as described above. Therefore, the sensor 34 may be disposed near the first opening 4b, for example, in the passage of the common pipe 9.

Next, reference numeral 35 denotes a determination means for determining the presence or absence of burrs or foreign matter in the air holes 4a based on the values measured by the sensor 34. This determination means 35 includes determination of the presence or absence of penetration of holes using the penetration inspection system 2. The determination means 35 will be described with reference to FIG.
A control unit 36 in the determination unit 35 is configured to control operations of the compressed air supply unit 10, the valve 11, the pressure measurement unit 12, the pressure adjustment valve 13, and the like in the penetration inspection system 2 described above. Furthermore, the operation of the vacuum means 20, valves 21, 23, flow meter / regulator valve 22, valve 29, sensor 34, etc. in the foreign matter inspection system 3 is controlled.
Next, reference numeral 37 denotes a determination unit in the determination means 35 for determining the presence or absence of a defect based on the measurement result of the sensor 34. The determination unit 37 is configured to compare the value measured by the sensor 34 with a reference value stored in advance in the determination unit 37 to determine whether there is a defect inside the hole 4a. The reference value is a value actually measured using a non-defective product having the same shape as the workpiece W to be inspected and having no defect inside the hole.
The determination may be made as a defective product (defective product) when the measured value (wind speed or air volume) by the sensor 34 is different from a reference value by a predetermined threshold value or more. It may be determined as 5%. In the penetration inspection system 2, when the numerical value of the pressure measuring means 12 falls below the planned value (in the case of a defective product), it may be determined by the determination unit 37.

Next, reference numeral 38 denotes a notification unit for notifying the outside of the determination result by the determination means 35, which includes an alarm buzzer and a warning light. If the determination means 35 determines that there is a defect, the alarm buzzer is sounded. Or the warning light blinks.
In addition, in arrangement | positioning of the ventilation pipes 24 and 31 etc. in the foreign material inspection system 3, it is good to comprise at a gentle obtuse angle so that the curved part 24a may not become an acute angle. Further, it is preferable that the inner diameters of the ventilation pipes used are all the same. When the vent pipe is configured in this way, the air flow becomes a laminar flow, and the value measured by the sensor 34 can be measured with high accuracy without variation.

Next, reference numeral 40 denotes a blind cover that is detachably attached to the third opening 4d of the workpiece W.
Reference numeral 41 denotes a rod of a well-known air cylinder (not shown) connected to the blind lid 40, which appears well in FIG. 2, and moves forward and backward in the directions of arrows 41a and 41b.
When the air cylinder connected to the blind cover 40 presses the blind cover 40, the first opening 4b of the workpiece W and the installation area 6a of the workpiece stage 1 are hermetically pressed, and the workpiece W is In the case of the fixed state, the above-described clamp 8 may not be provided.
Furthermore, in the blind cover 40 shown in FIG. 2, the description has been made on the assumption that the third opening 4 d exists at a position opposite to the first opening 4 b in the workpiece W, but the first opening 4 b and the first opening 4 b In the case where one or a plurality of openings are present in addition to the two openings 4c, these openings may be closed with a blind cover in advance by any means, or after the work W is installed in the installation area 6a, You may make it mount | wear with a blind cover by arbitrary means. In this case, the pressing direction of the rod 41 may be set so that the first opening 4b of the work W and the installation area 6a of the work stage 1 are in airtight pressure contact.

Next, a description will be given of an operation for performing a penetration inspection in the hole 4a of the workpiece W using the above-described configuration.
First, the first opening 4b of the workpiece W is placed on the installation area 6a.
Next, the rod 41 is lowered, and the blind lid 40 is correspondingly fitted to the third opening 4d as shown in the figure. Thereby, the adhesion between the installation area 6a and the periphery of the first opening 4b and the sealing with respect to the third opening 4d are performed. Next, the packing 30 is brought into close contact with the periphery of the second opening 4c by pressing the rod 42 in the direction of the arrow 43a. Meanwhile, the opening of the valve 11 controlled by the control unit 36 (or manually operated) and the closing of the valves 21, 23, 29 are confirmed.
Next, the compressed air supply means 10 is operated, compressed air is sent as shown by the arrow in FIG. 4A, and the air pressure in the holes 4a in the workpiece W is increased (for example, 1.1 to 10 atmospheres). Thereafter, the valve 11 is closed, and after a predetermined time has elapsed, the pressure gauge instruction of the pressure measuring means 12 is viewed. As a result, if the pressure is reduced, there is a defect. If the pressure is not reduced, the inspection is completed with no defect (non-defective product).
In the penetration inspection, when a defective product is generated, the workpiece W is removed from the work stage 1 and processed as a defective product, and the inspection is finished.
If there is no defect in the penetration inspection (non-defective product), the workpiece W with respect to the workpiece stage 1 is left as it is, and a foreign object inspection is subsequently performed.

Next, a case where a foreign matter inspection is performed will be described. When this foreign object inspection is performed, since the workpiece W is already mounted on the installation area 6a in the penetration inspection, the foreign object inspection immediately starts without the trouble of installing the workpiece W on the installation area 6a. be able to.
Accordingly, the valves 21, 23, and 29 are immediately opened, the blockage of the valve 11 is confirmed, and the switching operation is performed so that the vent pipe 24 and the air tank 27 communicate with each other.
Next, as is well known, the compressed air supply means 10 is operated to operate the vacuum means (combum) 20. As a result, the air in the holes 4a of the workpiece W is drawn, and an air path (air path) is formed from the filter 28 to the convert 20 via the air tank 27, the holes 4a, and the ventilation pipe 24 (FIG. 4). (See thick arrow in (B)). The flow rate of the wind flowing through the hole 4a is set to an appropriate amount by the flow meter / regulating valve 22 (for example, the flow rate is about 0.1 to 2 liters / min in the flow meter / regulating valve 22).
In such a state, the state of the air flow from the air tank 27 into the hole 4a of the workpiece W is measured by the sensor 34, and the data is sent to the determination unit 37.
Next, the determination unit 37 compares the wind speed value measured by the sensor 34 with the reference value stored in advance in the determination unit 37 as described above. As a result, when the difference is less than 5%, it is determined that there is no defect (non-defective product), and when it is 5% or more, it is determined that there is a defect (defective product), and the inspection of foreign matters is completed.

This completes both the penetration inspection and the inspection of foreign matters. After completion of the inspection, the rod 41 is moved in the direction of the arrow 41b and the rod 42 is moved in the direction of the arrow 43b, and the workpiece W is removed from the workpiece stage 1.
Furthermore, when the next workpiece W is inspected continuously as necessary, the same inspection work as described above may be repeated.
In the description of the work for inspecting both the penetration in the hole 4a of the workpiece W and the defect such as the foreign matter, the case where the foreign matter is inspected after the penetration inspection has been described. Alternatively, the penetration inspection may be performed after the foreign matter inspection.

As described above, according to the above method, the article set on the work stage in the preceding inspection has a labor-saving effect that can be utilized in the subsequent inspection without changing the set as it is. Further, after the workpiece W is mounted on the workpiece stage 1 and subjected to the penetration inspection, it is possible to inspect the foreign matter by simply switching the ventilation pipe 15 communicating with the ventilation hole 7 to the ventilation pipe 24. Two inspections such as inspection of foreign matters can be performed quickly.
Further, as shown in FIG. 2, the sensor 34 for measuring the state of the wind in the hole 4a of the work W is located near the second opening 4c of the work W (the wind of the wind flowing in the hole 4a). The wind speed can be measured with high accuracy.

Next, FIG. 5 will be described. FIG. 5 is for explaining a different example in that a well-known vacuum pump 20 is used in place of the convert 20 as the vacuum means in the foreign matter inspection system 3 in FIG.
In the description of FIG. 5, as for the configuration of the hole inspection apparatus A of FIG. 5, it is considered that many things can be identified in terms of the configuration and functions corresponding to the above-described FIG. 1 and FIG. The same reference numerals as those used in FIGS. 1 and 4 are attached to the configurations, and the description overlapping with FIGS. 1 and 4 is omitted.
In addition, for the operation of inspecting both the penetration of the workpiece W in the hole 4a and the defect such as foreign matter using the structure of the hole inspection apparatus A of FIG. 5, the convert 20 is simply changed to the vacuum pump 20 as a vacuum means. This is substantially the same as the work for inspecting both the penetration of the workpiece W in the hole 4a and the defect such as a foreign substance using the configuration of FIG.
In FIG. 4, the compressed air supply means 10 is used as the drive source of the convert 20; however, in FIG. 5, the compressed air supply means 10 is not necessary because the vacuum pump 20 is used.
Therefore, the piping 24 for communicating the compressed air supply means 10 and the convum 20 is not required, and furthermore, the capacity of the vacuum pump 20 is not required to be excessive as a drive source for the convam 20. The vacuum pump 20 is preferably an oil-free pump.

Next, FIG. 6 which shows the air tank 27 to which the MEMS type wind speed sensor 34 of FIG. 2 is attached will be described. When the air hole inspection device A is temporarily not used after the air tank 27 provided with the MEMS type wind speed sensor 34 is attached to the air hole inspection device A, the temperature of the surrounding environment or There is a need to protect the sensor 34 from the influence of humidity on the sensor 34 (for example, condensation occurring inside the sensor). Therefore, the protection method will be described below.
As one means, when the sensor 34 is energized at all times, the sensor 34 is heated by the internal heater of the sensor 34, and condensation of itself is prevented.
As another means, as shown in FIG. 6, an arbitrarily small dehumidifier 46 is attached to prevent dew condensation. For example, the configuration shown in FIG. In FIG. 6, reference numeral 44 denotes a mounting material formed of an arbitrary hard material formed in an L shape for mounting on the air tank 27, and 44 a denotes a through hole in the mounting material 44. Reference numeral 49 denotes a mounting magnet provided inside the mounting material 44 in order to mount the mounting material 44 on the metal air tank 27.
Reference numeral 45 denotes a dehumidifier fixing material for fixing a dehumidifier 46 to be described later to the mounting material 44, which is provided on the surface of the mounting material 44 as shown. Reference numeral 46 denotes a known dehumidifier, for example, a Peltier heat exchange type dehumidifying element. Reference numeral 47 denotes a known annular packing provided in the mounting material 44. In the illustrated mounting state, the air tank opening 27a and the through hole 44a of the mounting material are provided so as to be in airtight communication. Reference numeral 48 denotes a known microswitch for turning on / off the operation of the dehumidifier 46 by attaching / detaching the mounting material 44. Reference numeral 50 denotes a humidity control fan mounted in place of the filter 28 as required, and air can be fed into or sucked out from the air tank.

Next, the mounting operation and operation of the above configuration will be described.
First, the air tank 27 shown in FIG. Next, the mounting material 44 is mounted on the air tank 27 using the magnetic force of the mounting magnet 49 as shown in FIG.
Simultaneously with the mounting, the micro switch 48 is turned on, and the dehumidifier 46 automatically starts operation.
By the operation of the dehumidifier 46, the peripheral portion of the sensor 34 is dehumidified. Also, if necessary, the humidity control fan is activated to distribute the air in the air tank.
As described above, the periphery of the sensor 34 is dehumidified, and condensation inside the sensor can be prevented.

The schematic block diagram for demonstrating the relationship between a workpiece | work and a void | hole inspection apparatus. FIG. 2 is a partially enlarged view of FIG. 1 partially illustrating a relationship between a work hole, an air tank, and a sensor. The block diagram for demonstrating a determination means. FIG. 5A is a schematic block diagram for explaining inspection work, FIG. 5A is a schematic diagram for explaining penetration inspection, and FIG. The schematic block diagram for demonstrating the example different from FIG. 1, FIG. Schematic for demonstrating the example where a dehumidifier is attached.

Explanation of symbols

A ... Hole inspection device, 1 ... Work stage, 2 ... Penetration inspection system, 3 ... Foreign matter inspection system, W ... Work, 4a ... Hole, 4b ... 1st opening, 4c ... 2nd opening, 6 ... Base, 7 ... Vent, 8 ... Clamp, 9 ... Shared pipe, 10 ... Compressed air supply means , 11 ... Valve, 12 ... Pressure measuring means, 13 ... Pressure regulating valve, 14 ... Check valve, 15 ... Vent pipe, 20 ... Vacuum means, 21 ... Valve , 22 ... Flow meter / regulating valve, 23 ... Valve, 24 ... Vent pipe, 26 ... Installation member, 27 ... Air tank, 28 ... Filter, 29 ... Valve, 30 ... Packing, 31 ... Ventilation pipe, 34 ... Sensor, 35 ... Determination means, 36 ... Control unit, 37 ... Determination unit, 38 ... Notification unit, 40 ... Blind lid, 46 ... Dehumidifier.

Claims (2)

Provided with an installation area for mounting an article on the surface, and a work stage having a vent hole leading to the first opening of the article to be installed in the installation area, and a vent pipe communicating with the vent hole in the work stage A penetration inspection system,
The penetration inspection system includes compressed air supply means for sending compressed air into the air holes of the article through the vent pipe and the vent hole,
A valve for preventing air sent into the air hole from leaking through the vent pipe;
A penetration inspection system comprising a pressure measuring means for measuring the reduced pressure state in the air holes;
A foreign matter inspection system comprising a vent pipe communicating with the vent hole in the work stage, wherein the foreign matter inspection system includes a vacuum means for drawing out air in the hole through the vent hole and the vent pipe;
A sensor for measuring the state of the wind introduced into the hole from the second opening of the article by the air in the hole being drawn out by the vacuum means;
A hole for detecting a defect inside a hole of an article having a hole using a foreign matter inspection system including a determination unit that determines the presence or absence of a foreign substance in the hole based on a value measured by the sensor An inspection method,
The hole inspection method includes a step of mounting an article in a state where the first opening of the article is aligned with a vent of the work stage;
Compressed air is sent from the compressed air supply means in the penetration inspection system toward the inside of the hole, the valve is closed so that the sent air does not leak out from the hole, and the decompressed state in the article hole within a predetermined time A step of penetration inspection for determining the presence or absence of penetration based on
The air in the hole is drawn out by the vacuum means in the foreign matter inspection system, and the state of the wind introduced into the hole from the second opening by being pulled out is measured by the sensor, and the measured wind state is obtained. And a foreign matter inspection process for determining the presence or absence of foreign matter etc. in the holes based on
After performing one of the penetration inspection process or the foreign matter inspection process, the ventilation pipe used in the other remaining process is switched so as to communicate with the work stage ventilation hole, and the remaining process is performed. A method for inspecting holes in an article. A work stage having an installation area for mounting an article on the surface, and a vent hole leading to the first opening of the article to be installed in the installation area;
A penetration inspection system comprising a vent pipe communicating with the vent hole in the work stage,
The penetration inspection system includes compressed air supply means for sending compressed air into the air holes of the article through the vent pipe and the vent hole,
A valve for preventing air sent into the air hole from leaking through the vent pipe;
A penetration inspection system comprising a pressure measuring means for measuring the reduced pressure state in the air holes;
A foreign matter inspection system comprising a vent pipe communicating with the vent hole in the work stage, wherein the foreign matter inspection system includes a vacuum means for drawing out air in the hole through the vent hole and the vent pipe;
A sensor for measuring the state of the wind introduced into the hole from the second opening of the article by the air in the hole being drawn out by the vacuum means;
A foreign matter inspection system comprising a determination means for determining the presence or absence of foreign matter in the hole based on the value measured by the sensor,
By selectively switching between the penetration inspection system communicating with the vent of the work stage and the foreign matter inspection system, it was possible to inspect both the penetration inside the hole of the article having the hole and the defect such as the foreign object. A device for inspecting vacancies in articles.

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