JP2007180582A - Semiconductor manufacturing equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide semiconductor manufacturing equipment capable of solving a problem in that it is inconvenient because a screen for issuing a command is different from a screen for displaying equipment condition, displaying the equipment condition and the command on the same screen in module unit, inputting the command while watching the equipment condition, and improving efficiency of maintenance work. <P>SOLUTION: The semiconductor manufacturing equipment includes a monitor screen table 15 provided with data for graphically displaying the equipment condition and the command in module unit, a number screen table 16 provided with data for displaying a entry screen of a number entry command in module unit, and a screen selection table 17 for specifying a combination of the monitor screen table 15 and the number screen table 16; and in a maintenance mode, a central control unit 1 reads data by identifying the monitor screen table 15 and the number screen table 16 with reference to the screen selection table 17, and displays a maintenance command screen for displaying the equipment condition and the command in module unit. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a semiconductor manufacturing apparatus such as a CVD apparatus, and more particularly to a semiconductor manufacturing apparatus capable of improving the efficiency and safety of maintenance work.

  A semiconductor manufacturing apparatus such as a CVD apparatus uses many actuators (parts), and the operation of the entire apparatus is controlled by sending instructions to the actuators from the control apparatus and driving them. .

  Specifically, a semiconductor manufacturing apparatus controls an individual actuator in response to an instruction input by an operator and a central control unit composed of a personal computer for controlling the entire apparatus and an instruction from the central control unit. And a plurality of actuators to be controlled. In addition, an input unit for inputting data and a display unit for displaying data are connected to the central control unit.

  In the semiconductor manufacturing apparatus having the above configuration, the central control unit sends an instruction to the control controller according to the instruction input from the input unit, and each control controller actually issues an instruction to the actuator to perform control. It has become. Conversely, each control controller monitors the operation state of the actuator and sends the operation state data to the central control unit. The central control unit summarizes the data from each control controller and The operating status is displayed as a monitor screen.

  In conventional semiconductor manufacturing equipment, when performing maintenance work such as equipment start-up or equipment trouble, the central control unit for some actuators operates a semi-auto command for maintenance inspection ( There was a method of issuing a manual command) and operating the actuator accordingly.

  Further, in the case of an actuator that cannot be controlled by a semi-auto command, the operator operates the actuator by directly operating the control controller of each actuator without using the central control unit.

  Here, a semi-auto command issue screen in a conventional semiconductor manufacturing apparatus will be described with reference to FIG. FIG. 9 is an explanatory diagram of a semi-auto command issuance screen in a conventional semiconductor manufacturing apparatus. As shown in FIG. 9, the semi-auto command issuing screen of the conventional semiconductor manufacturing apparatus is like a list of commands (actuator commands) for operating the actuator, and the operator can select an appropriate command from these commands. A command was selected and issued.

  However, in the conventional semiconductor manufacturing apparatus and its control method, when a semi-auto command is issued from the central control unit, only the semi-auto command issue screen is displayed on the display unit, and a monitor screen for monitoring the device status cannot be displayed. Inconvenient, in order to know the device status, the operator has to frequently switch between the semi-auto command issue screen and the monitor screen to display them, and there is a problem that the operation is complicated and the work efficiency is lowered.

  Further, in the conventional semiconductor manufacturing apparatus and its control method, the actuator commands are not classified by chamber on the semi-auto command issuing screen, so that it is difficult for an operator to select a command to be issued, which is inconvenient. It was.

  Furthermore, the semiconductor manufacturing apparatus itself is huge (about 10 m × 10 m), and in the conventional semiconductor manufacturing apparatus and its control method, it is not clear whether maintenance is in progress or normal operation. There is a problem that an accident may occur if another worker starts operating the apparatus while performing maintenance work.

  The present invention has been made in view of the above circumstances, and at the time of maintenance inspection work, the actuator command and the device status are simultaneously displayed on the display screen of the chamber unit so that the command can be input while viewing the device status. Another object of the present invention is to provide a semiconductor manufacturing apparatus capable of improving the efficiency of work and switching the input mouse between maintenance and normal operation to improve safety during maintenance work.

  The present invention for solving the problems of the above conventional example includes a storage unit for storing data, a display unit for displaying data, an input unit, a plurality of actuators as operation units, and instructions for the actuators as commands. This is a semiconductor manufacturing device with a control unit that sends out, receives the operating status of the actuator as monitor data, edits the monitor data and sends it to the display unit, and the control unit corresponds to a module centered on the chamber And a table having data for displaying a schematic diagram of the module, data for a command for controlling an actuator corresponding to the module, and data for associating the input position on the screen with the input command. It is said.

Further, the present invention for solving the problems of the conventional example includes a storage unit for storing data, a display unit for displaying data, an input unit, and a plurality of actuators as operation units,
A semiconductor manufacturing apparatus comprising: a control unit that sends an instruction to the actuator as a command, receives the operation status of the actuator as monitor data, edits the monitor data, and sends the monitor data to a display unit. Corresponding to the central module, data for displaying a schematic diagram of the module, monitor data, command data for controlling the actuator corresponding to the module, data for associating the input position on the screen with the input command, A table with a module is provided, and data for displaying a schematic diagram of the module, monitor data, and command data are read from the table, and the device status and command corresponding to the module are displayed on the same screen. It is said.

  According to the present invention, the control unit corresponds to the module centered on the chamber, the data for displaying the schematic diagram of the module, the data for the command for controlling the actuator corresponding to the module, the input position on the screen, Since the semiconductor manufacturing equipment is provided with a table that includes data that correlates input commands, the equipment status and commands corresponding to the modules are displayed on the same screen for easy viewing, and commands can be entered on the screen. Thus, the operator can easily select a command and input the command while viewing the apparatus status, thereby improving the efficiency of maintenance work.

  Further, according to the present invention, the control unit corresponds to the module centered on the chamber, data for displaying a schematic diagram of the module, monitor data, data of a command for controlling an actuator corresponding to the module, An apparatus corresponding to a module provided with a table having data for associating an input position on the screen with an input command, reading data for displaying a schematic diagram of the module, monitor data, and command data from the table Since the semiconductor manufacturing device displays the status and command on the same screen, the device status and command corresponding to the module can be displayed on the same screen in an easy-to-read manner, and the command can be input on the screen. You can easily select commands and enter commands while watching the device status. There is an effect that can be improved.

  Embodiments of the present invention will be described with reference to the drawings. The semiconductor manufacturing apparatus (this apparatus) according to the embodiment of the present invention is particularly different in operation during maintenance and inspection of the apparatus, and includes a monitor screen for graphically displaying the apparatus status, and an actuator command (command). ) Is displayed on the same screen as a maintenance command screen, and commands can be easily entered on the screen to improve maintenance work efficiency. A change-over switch for switching the input mouse is provided so that normal operation cannot be performed during maintenance so as to prevent accidents during maintenance.

  A configuration of a semiconductor manufacturing apparatus (this apparatus) according to an embodiment of the present invention will be described with reference to FIG. FIG. 1 is a block diagram showing the configuration of a semiconductor manufacturing apparatus (this apparatus) according to an embodiment of the present invention. As shown in FIG. 1, a semiconductor manufacturing apparatus according to an embodiment of the present invention is basically the same as a conventional semiconductor manufacturing apparatus, and includes a central control unit 1 including a personal computer and a sequencer for distributing signals. 2, an actuator (parts) group 4 such as a heater, a valve, and a pin, a plurality of control controllers 3 a to 3 n that control the actuator group 4, and a display unit 5 that is connected to the central control unit 1 and displays data A mouse 6 and a keyboard 7 as input means, a storage unit (fixed disk) 8 for storing data, and a floppy disk (floppy) 9 as auxiliary storage means.

  As a feature of this apparatus, the central control unit 1 is provided with a changeover switch 11 for switching the operation mode to automatic (normal operation) or maintenance. The display unit 5 includes a central control display unit 5a used during normal operation and a maintenance display unit 5b used during maintenance work (maintenance). The mouse 6 includes a central control mouse 6a, And a maintenance mouse 6b.

  Among the above-described components, the sequencer 2, the controller 3 for control, and the actuator 4 are the same as those in the prior art, and the operation is the same as in the prior art. That is, when an instruction is sent from the central control unit 1, the sequencer 2 distributes the instruction signal to the control controller 3, and the control controller 3 controls each actuator 4 according to the instruction signal.

  The operation state of the apparatus (apparatus condition) is also monitored in the same manner as before, and each control controller 3 monitors the operation state of the actuator 4 and sends the apparatus condition data via the sequencer 2 to the central control unit 1. The central control unit 1 stores data from each control controller 3 in the storage unit 8, edits the data, and displays the status of the semiconductor manufacturing apparatus on the display unit.

  Before describing the configuration of each part, a display example of a maintenance command screen and a command input method, which are features of a semiconductor manufacturing apparatus (this apparatus) according to an embodiment of the present invention, will be described with reference to FIG. FIG. 2 is an explanatory diagram showing a display example of the maintenance command screen of the present apparatus. In this apparatus, when the operation mode is switched to “maintenance” with the changeover switch 11 and the operation mode of the central control unit 1 is switched to “maintenance”, a maintenance command screen as shown in FIG. 2 is displayed on the maintenance display unit 5b. indicate. The maintenance command screen is a screen in which a monitor screen and a numerical screen are displayed in an overlapping manner, and an operator can input a command while viewing the apparatus status.

  Among the maintenance command screens, the monitor screen schematically shows the connection state between the chamber which is a reaction chamber and the actuator 4 associated therewith, and further displays the operation state of the actuator 4 by color display or the like. Is. The monitor screen is classified according to systems such as a gas system and a transport system, and is a monitor screen in module units. The monitor screen of FIG. 2 is a gas system screen related to the chamber R1, and the large square at the upper right of the screen indicates the chamber R1, and shows the connection relationship between the mass flow controller (MFC) that controls the gas flow rate and the actuator 4 such as a valve. This is shown schematically. The operation state of the chamber, valve, etc. is displayed by a display pattern or display color corresponding to the operation state.

  Further, as a feature of this apparatus, as shown in FIG. 2, a command input unit 53 is provided beside the image of each actuator 4, and a condition selection unit 54 for designating the content of the command is further provided. Then, by clicking the command input unit 53 with the mouse 6b, the actuator 4 to be controlled is specified, and further, by setting the condition with the condition selection unit 54, the central control unit 1 applies the specified actuator 4 to the specified actuator 4. Instructions are sent out. For example, by clicking the command input unit 53 next to an arbitrary valve, an “open” or “close” command of the valve can be designated and sent. The result of the operation of the actuator 4 in response to the command is also displayed on the monitor screen as the device status.

  The numerical screen is a window screen that is displayed on the monitor screen. The setting value for each command is displayed on the left side of the numerical screen, and the result of actual monitoring of the operating status of the device is displayed on the right side. It is supposed to be displayed.

  The numerical value screen is also provided with a command input unit 53. By clicking the command input unit 53 with the mouse 6b, specifying a command, and inputting a set value from the processing condition selection unit 54, the central control unit 1 An instruction is sent to the actuator 4. The commands on the numerical screen are commands for setting numerical values such as temperature and RF power.

  In this way, on the maintenance command screen of this apparatus, the apparatus status and command can be displayed on one screen for each module of the semiconductor manufacturing apparatus, and the operator can command each actuator 4 while observing the apparatus status. Can be sent out and the efficiency of maintenance work can be improved.

  Next, the configuration and operation of the characteristic part of the present embodiment will be specifically described. The storage unit 8 composed of a fixed disk is provided with data for displaying a control program in the central control unit 1 and a maintenance command screen which is a feature of this apparatus. As the control program, a program for performing normal operation (central control program) and a maintenance program (maintenance program) are provided. The maintenance program is a characteristic part of this apparatus, and the central control program for normal operation is the same as the conventional one.

  The maintenance command screen data stored in the storage unit 8 will be described with reference to FIG. FIG. 3 is an explanatory diagram showing a list of maintenance command screens displayed on the apparatus. As shown in FIG. 3, in the storage unit 8 of the present apparatus, eight types of maintenance command screen data are stored for each of the gas systems of five film forming chambers (chambers), the transfer chamber, the substrate spare chamber, and the like. Is provided. These maintenance command screens are displayed in the maintenance program, and the display can be cyclically switched by inputting a screen switching instruction.

  Data for displaying these maintenance command screens will be specifically described. The storage unit 8 of the present apparatus is provided with a monitor screen table 15 and a numerical screen table 16, and further includes a screen selection table 17 for selecting a screen to be displayed on each maintenance command screen, and a device status. Device status display data for display is provided.

  First, the monitor screen table 15 will be described with reference to FIG. FIG. 4 is a schematic explanatory diagram of the monitor screen table 15. The monitor screen table 15 includes data necessary for screen display and command data that can be input from the monitor screen. As shown in FIG. 4, the monitor screen table 15 includes, for each monitor screen, schematic diagram data for displaying a schematic diagram in module units (chamber units), monitor data that is a result of actually monitoring the apparatus status, , Input position data that associates the input coordinates clicked with the mouse with the input command. There are eight types of monitor screen tables 15 corresponding to the maintenance command screen shown in FIG.

  The schematic diagram of the module unit schematically represents the connection state of the actuators 4 for each system as described above. In addition, the command of the monitor screen table 15 stores only the actuator command related to the corresponding module. As a result, actuator commands are organized by module, and command selection and input are simplified. The monitor data is written by the central control unit 1 when device status data is received from the sequencer 2.

  When an input is made on the monitor screen, the central control unit 1 reads the input command with reference to the monitor screen table 15 and sends it to the sequencer 2.

  The device status display data is data for representing the device status, and is combined with schematic diagram data to display a monitor screen. An example of device status display data will be briefly described with reference to FIG. FIG. 5 is an explanatory diagram showing data representing the chamber status in the apparatus status display data. In the example of FIG. 5, various display patterns are set corresponding to the state in the chamber, and the central control unit 1 selects from the display patterns of FIG. 5 based on the monitor data obtained by monitoring the state of the chamber. An appropriate pattern is selected, and the image of the chamber in the monitor screen shown in FIG. 2 is displayed in the selected pattern. For example, when the inside of the chamber is atmospheric pressure, the internal display color of the image of the chamber is displayed as light blue.

  Similarly, device status display data is set for other actuator states (valve “open”, “closed”, etc.), and is displayed in combination with schematic diagram data on the monitor screen. .

  Next, the numerical screen table 16 will be described with reference to FIG. FIG. 6 is a schematic explanatory diagram showing an example of the numerical screen table 16. As shown in FIG. 6, the numerical screen table 16 includes a display format for displaying command names and the like, monitor data corresponding to the command, and input position data that associates the input position with the input command. Is. For example, in the case of a gas screen, command data for setting numerical values such as RF power and gas flow rate is stored. When there are a plurality of types of numerical screens, a similar table is provided for each numerical screen.

  The device status on the numerical screen is stored in the numerical screen table 16 by monitoring the device status monitor data received by the central control unit 1 and displayed as a number in accordance with the format specified in the numerical screen table 16. It has become.

  Next, the screen selection table 17 will be described with reference to FIG. FIG. 7 is a schematic explanatory diagram of the screen selection table 17. As shown in FIG. 7, the screen selection table 17 stores a monitor screen and a numerical screen that are displayed in an overlapping manner for each maintenance command screen. As shown in FIGS. 4 to 7, the data related to the maintenance command screen has a hierarchical data structure, and when the operator selects the maintenance command screen, the corresponding monitor screen and numerical screen are displayed in an overlapping manner. It is something that can be done.

  As a result, the device status of the module to be controlled and the command related to the module are displayed on the same screen, and the command can be input on the screen, thereby improving the work efficiency at the time of maintenance inspection. It is something that can be done.

  Next, the central control unit 1 will be described. When the power is turned on, the central control unit 1 of this apparatus reads a control program from the storage unit 8 and stores it in a work area (not shown). The operation mode designated by the changeover switch 11, the keyboard 7 and the mouse 6 are stored. According to the operation mode of the central control unit 1 specified by the above, the central control program or the maintenance program for normal operation is started to perform control. That is, normally, the control is performed by the central control program, but when the changeover switch 11 is switched to the operation mode “maintenance” and the operation mode of the central control unit 1 is set to “maintenance”, the central control unit 1 transfers control to the maintenance program.

  The operation mode is set by the operator inputting “job” and “maintenance” with the menu command displayed at the bottom of the display screen of FIG. To the maintenance program as a maintenance mode.

  When the operation mode is switched to “maintenance”, the input mouse is switched from the central control mouse 6a to the maintenance mouse 6b, and the central control unit 1 receives an input signal from the maintenance mouse 6b. The display unit 5 is switched from the central control display unit 5a to the maintenance display unit 5b. Here, the mice 6a and 6b are exclusively controlled to accept only one of the inputs, and cannot be used simultaneously. Thereby, it is possible to prevent another worker from performing normal operation during maintenance, and to improve safety.

  When the operation mode and the operation mode are switched to “maintenance”, the central control unit 1 refers to the screen selection table 17 and monitors screen data and numerical screen data corresponding to the selected maintenance command screen. Are read out, the maintenance command screen display data is created, and displayed on the display unit 5. The device status on the monitor screen is displayed in a picture or display color according to the device status display data as shown in FIG.

  When a command is input on the maintenance command screen, the central control unit 1 reads the command input with reference to the monitor screen table 15 or the numerical screen table 16 and sends it to the sequencer 2. Then, a command is transmitted from the sequencer 2 to the control controller 3, and the actuator 4 is controlled.

  Next, the operation of the central control unit 1 in the maintenance mode will be specifically described with reference to FIG. FIG. 8 is a flowchart showing the operation of the central control unit 1 of the present apparatus in the maintenance mode. As shown in FIG. 8, the central control unit 1 maintains control when the changeover switch 11 is set to “maintenance” (100) and the operation mode of the central control unit 1 is set to “maintenance” (102). The program shifts to a program, and the maintenance command screen described at the top of the screen selection table 17 is displayed (104).

  Specifically, when the operator switches the changeover switch 11 to “maintenance” and inputs “job” and “maintenance” with menu commands, the central control unit 1 shifts to the maintenance program with the operation mode as the maintenance mode. Then, the monitor screen and numerical screen corresponding to the first maintenance command screen are read from the screen selection table 17, and the corresponding screen data are read from the monitor screen table 15 and numerical screen table 16, respectively, and displayed.

  Then, the central control unit 1 determines whether or not there is an input (106). If there is no input, the central control unit 1 returns to the processing 104 and displays the same maintenance command screen. When there is an input and a screen switching instruction is input, the central control unit 1 moves to the process 104, reads the next maintenance command screen from the screen selection table 17, and displays the monitor screen table. 15 and the numerical screen table 16, the next maintenance command screen is displayed.

  When an actuator command is input in the process 108, the central control unit 1 reads the input command with reference to the monitor screen table 15 or the numerical screen table 16 (110), and performs control via the sequencer 2. A command is sent to the controller 3 (112).

  When the monitor data of the apparatus status is newly received in the process 108, the central control unit 1 updates the monitor data of the monitor screen table 15 or the numerical screen table 16 (116), and refers to the apparatus status display data. The device status is displayed (118).

  Then, it is determined whether or not an operation mode designation has been input (120). If the operation mode has not been input, the process returns to processing 104 to display a maintenance command screen. Further, when the operation mode designation is input in the process 120, the central control unit 1 shifts the control to the designated operation mode. In this way, the processing of the central control unit 1 in the maintenance mode is performed.

  In the semiconductor manufacturing apparatus and the control method thereof according to the embodiment of the present invention, the storage unit 8 includes a monitor screen table 15 having data for graphically displaying the apparatus status and commands in module units (chamber units), and module units. A numerical screen table 16 having data for displaying an input screen for numerical input commands and a screen selection table 17 for defining a combination of the monitor screen table 15 and the numerical screen table 16 are provided. In the maintenance mode, the central controller 1 However, by referring to the screen selection table 17, the monitor screen table 15 and the numerical screen table 16 are specified, the data is read, and the maintenance command screen for displaying the device status and command in units of modules is displayed. Can input commands while watching the device status, Command selection becomes easier, there is an effect that it is possible to improve the working efficiency of the maintenance work.

  Further, a changeover switch 11 for setting the operation mode to either “automatic” or “maintenance” is provided, and a central control mouse 6a and a maintenance mouse 6b are provided as input mice. 1 designates the input mouse as either the central control mouse 6a or the maintenance mouse 6b according to the signal from the changeover switch 11 and the designated operation mode. In the maintenance mode, the maintenance mouse Since only 6b is used, it is possible to prevent another operator from erroneously performing normal operation during maintenance, and there is an effect that safety during maintenance work can be improved.

  The present invention is suitable for a semiconductor manufacturing apparatus capable of improving the efficiency and safety of maintenance work.

1 is a block diagram illustrating a configuration of a semiconductor manufacturing apparatus according to an embodiment of the present invention. It is explanatory drawing which shows the example of a display of the maintenance command screen of this apparatus. It is explanatory drawing which shows the list of the maintenance command screen displayed with this apparatus. 4 is a schematic explanatory diagram of a monitor screen table 15. FIG. It is explanatory drawing which shows the data showing the condition of a chamber among apparatus status display data. FIG. 6 is a schematic explanatory diagram illustrating an example of a numerical screen table 16. 6 is a schematic explanatory diagram of a screen selection table 17. FIG. It is a flowchart figure which shows the operation | movement in the maintenance mode of the central control part 1. FIG. It is explanatory drawing of the issuing screen of the semi-auto command in the conventional semiconductor manufacturing apparatus.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Central control part, 2 ... Sequencer, 3 ... Controller for control, 4 ... Actuator, 5 ... Display part, 6 ... Mouse, 7 ... Keyboard, 8 ... Memory | storage part, 9 ... Floppy disk, 11 ... Changeover switch, 15 ... Monitor screen table, 16 ... Numerical screen table, 17 ... Screen selection table, 53 ... Command input section, 54 ... Condition selection section

Claims (2)

A storage unit for storing data, a display unit for displaying data, an input unit, and a plurality of actuators as operation units;
A semiconductor manufacturing apparatus comprising: a control unit that transmits an instruction to the actuator as a command, receives an operation state of the actuator as monitor data, edits the monitor data, and transmits the monitor data to the display unit;
The control unit corresponds to a module centered on the chamber, data for displaying a schematic diagram of the module, data for a command for controlling an actuator corresponding to the module, an input position on the screen, and an input command. A semiconductor manufacturing apparatus, characterized in that a table having data corresponding to each other is provided. A storage unit for storing data, a display unit for displaying data, an input unit, and a plurality of actuators as operation units;
A semiconductor manufacturing apparatus comprising: a control unit that transmits an instruction to the actuator as a command, receives an operation state of the actuator as monitor data, edits the monitor data, and transmits the monitor data to the display unit;
The control unit corresponds to a module centered on the chamber, displays data for displaying a schematic diagram of the module, monitor data, data for a command for controlling an actuator corresponding to the module, and input on a screen. An apparatus corresponding to the module provided with a table having data for associating a position with an input command, reading data for displaying a schematic diagram of the module, monitor data, and command data from the table A semiconductor manufacturing apparatus that displays a status and a command on the same screen.

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