JP2007178002A - Sliding device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve assembling workability of a sliding device, in which a feed screw mechanism for letting a slider slide on a track rail is attached to an upper face of the track rail through a screw shaft supporting body. <P>SOLUTION: The slider 3 slides on the track rail 2 by a screw shaft 4 fitted and inserted into a U-shaped recessed part 5 of the track rail 2, driven by a driving motor, and screw-fitted into a nut body 17 removable from the slider 3. The screw shaft supporting bodies 11, 12 supporting an end part of the screw shaft 4 rotatably are put and attached on/to the upper face of the track rail 2. When changing lead of the feeding screw mechanism and performing maintenance, the screw shaft supporting bodies 11, 12 are removed from the track rail 2 to remove the screw shaft 4 and the nut body 17 from the slider 3 and improve workability. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a slide device applied to a linear sliding portion of, for example, a machine tool, various assembly devices, or a test device.

  In recent years, the development of mechatronics technology has been remarkable, and there is a slide device as a basic and general-purpose device that supports the technology. Currently, slide devices are widely used by being incorporated in devices in various technical fields such as machine tools, semiconductor manufacturing devices, transport devices, and industrial robots, but their applications are expanding with the development of technology. Further, demands for high accuracy, high speed sliding, ease of assembly, generalization, etc. are increasing for the sliding device itself.

  In general, the slide device has a track rail having a track groove, a slider slidable on the track rail, a screw shaft that is screwed into a screw portion provided on the slider, and supports both ends of the screw shaft. A support motor is provided which is attached to one of the support plates and rotates the screw shaft. This slide device is controlled electrically and electronically, and guides positioning on a straight line.

  A conventional XY positioning table device as shown in FIG. 17 is known. The XY positioning table device includes a track rail 106 fixed on a bed 105, an X table 102 reciprocating on the track rail 106 via a slider 113, and a track rail 108 fixed to a support base 114 on the X table 102. , Y table 101 reciprocating on track rail 108 via slider 107, X-axis drive motor 104 attached to bed 105, and Y-axis drive motor 103 attached to X table 102. Further, the XY positioning table device includes a ball screw shaft 112 rotatably supported via a bearing 111 on a support table 114 on an X table 102 that is rotationally driven by a Y-axis drive motor 103, and an X-axis drive motor. A ball screw shaft 109 is rotatably supported via a bearing 110 on a bed 105 that is rotationally driven at 104. The X table 102 moves on the ball screw shaft 109 according to the rotation of the ball screw shaft 109, and the Y table 101 moves on the ball screw shaft 112 according to the rotation of the ball screw shaft 112.

  Conventionally, a ball screw integrated linear guide device in which a ball screw and a linear guide device are integrally combined is known. The ball screw integrated linear guide device includes a guide rail having a concave groove and ball rolling grooves on both inner side surfaces of the concave groove, and an axial direction in the concave groove via the ball rolling on the guide rail. A nut that is loosely fitted to the nut, a ball screw shaft that is screwed to the nut, a support unit that supports both ends of the screw shaft, and a drive motor that is attached to one of the support units and rotates the screw shaft It has. The concave groove functions as an oil reservoir for lubricating and cooling oil, and the support unit has a sealing material at the end face against the guide rail to prevent this oil from leaking. It is fixed with bolts. Further, the cover fixed to the nut has a sufficient length so as to cover the groove of the guide rail (see, for example, Patent Document 1).

  There is also known a table transfer device that supports a table movably by a guide and transfers the table by a feed screw shaft. The table transfer device has a U-shaped cross section and a guide rail having two upper and lower rolling element rolling surfaces on the inner surface, and the guide rail is sandwiched by the inner surface of the guide rail via ball rolling. The table is movably supported, and a feed screw shaft that is screwed to the table. The feed screw shaft is rotationally driven by a motor, one end of the feed screw shaft is rotatably supported by a bearing provided at one end of the guide rail, and the other end of the feed screw shaft is the other of the guide rail. It is operatively connected to a motor attached to the end via a joint (for example, see Patent Document 2 or 3).

A feed unit device in which a feed screw device and a linear guide device are integrated is known. The feed unit device has a long guide rail having an axial ball rolling groove opposed to each other on both inner side surfaces, and a ball rolling groove of the guide rail facing the ball rolling groove. A nut block having ball rolling grooves on both outer surfaces, a feed screw shaft that is screwed into the nut block, and a support unit that is fixed to the guide rail and supports the feed screw shaft so that the feed screw shaft can rotate and cannot move in the axial direction. I have. As for positioning of the support unit, the mounting of the support unit to the guide rail is simplified by engaging the pin implanted in the support unit with the ball rolling groove of the guide rail (for example, Patent Document 4). reference).
Japanese Utility Model Publication No. 63-193637 JP-A-2-298446 Japanese Examined Patent Publication No. 7-61587 Japanese Utility Model Publication No. 7-28444

  By the way, in recent years, as a slide device in which a feed screw device and a linear guide device are integrated, the use of a manufacturing device, a semiconductor manufacturing device, or the like is rapidly expanding with the development of the electronic industry. In addition, replacing the entire slide device in accordance with each application and its scale increases the cost, and the replacement work is complicated and requires a long work time. Therefore, in order to deal with changes in the size of the slide device and the performance of the table support / transport, etc., the slide can be freely changed in size and performance, and can be replaced quickly and inexpensively. A device is sought.

  In the XY table apparatus shown in FIG. 17, the bearing 110 of the ball screw shaft 109 is provided in the track rail 106 on the side where the motor is arranged, and on the end surface of the track rail 106 on the side where the motor is not arranged. Even if only the length of the track rail 106 and the ball screw shaft are changed, the formation of the bolt holes for mounting the bearing 110 and the mounting work thereof are complicated.

  Even in the devices disclosed in the above publications, the support (support plate, support unit) that supports both ends of the screw shaft is attached to the end surface of the guide rail. And alignment becomes complicated. Furthermore, when changing the length of the guide rail, it is necessary to use a fixing jig that fixes the guide rail to the support base when forming the bolt hole on the cut end face by tapping, which complicates the processing work. . In addition, in Japanese Utility Model Publication No. 7-28444, various mounting examples for fitting the support unit on the motor side to the guide rail are shown. However, forming the fitting portion makes the processing complicated. This means that the fitting position of the support unit means that the initial position cannot be changed in practice, so that the processing accuracy and the assembly work are complicated.

  SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problem, and a nut body screwed with a screw shaft for sliding a slider on a track rail can be removed from the slider and both ends of the screw shaft are supported. By attaching the screw shaft support to the upper surface of the track rail, the disassembly and assembly work can be simplified in response to maintenance of the slide device and the change of the length of the track rail. To provide a slide device capable of simplifying various operations.

The present invention provides a track rail having a pair of side portions connected to each other, a slider slidable on the track rail, and detachably attached to the slider, and for sliding the slider on the track rail. A nut body constituting a feed screw mechanism, a screw shaft screwed into the nut body, a pair of screw shafts attached to both ends of the screw shaft and mounted on the upper surfaces of the pair of side portions In a slide device comprising a support and a drive motor attached to one of the screw shaft support and rotating the screw shaft,
The track rail has a U-shaped recess formed by the pair of side portions and a bottom portion connecting the pair of side portions, and the slider is a track groove corresponding to a track groove provided on the pair of side portions. A rolling element that rolls between the raceway grooves, an end cap fixed to the end surface of the casing, and an end seal attached to the end surface of the end cap, and the slider is the track rail The feed screw mechanism includes a nut interposed between the nut body, the screw shaft, and a spiral groove of the nut body and a spiral groove of the screw shaft. A bearing support fitting made of a thin steel plate to which a bearing for supporting at least one end of the screw shaft is fitted is fixed to the screw shaft support body. Above Flip being supported about a slide and wherein the relative axial support.

  Since this slide device is configured as described above, when it is necessary to remove the feed screw mechanism from the slide device, such as when changing the feed screw mechanism for maintenance or changing the lead or screw diameter, The pair of screw shaft supports attached in a state of being placed on the upper surfaces of the side portions are removed from the track rail by operation from above the pair of side portions in a state where the shaft support of the screw shaft is released. Since the nut body that constitutes the feed screw mechanism together with the screw shaft is detachable from the slider, the nut body that remains screwed to the screw shaft can be removed from the slider without removing or replacing the entire slider from the slide device. , Maintenance can be performed or replaced with a screw shaft and nut body having a different lead or screw diameter.

  In this slide device, the feed screw mechanism constituted by a ball screw has a rolling element called a ball in a spiral spiral groove formed oppositely between the male screw portion of the screw shaft and the female screw portion of the nut body. Therefore, when the screw shaft is driven, the relative movement between the screw shaft and the slider becomes smooth, and the position and speed of the slider can be determined with high accuracy. The slider is inserted between the pair of side portions constituting the track rail without rattling through the rolling elements. Since the slider has the basic structure of a linear motion rolling guide mechanism, it can move smoothly with respect to the track rail, and the position and speed of the slider can be determined with high accuracy. Furthermore, the shaft support structure using the bearing support bracket made of a thin steel plate is easy to process the bearing support bracket and to assemble the screw shaft support.

  The drive motor is attached to a motor attachment arranged according to the mounting specification of the drive motor, and a press-fitting ring press-fitted and fixed to the motor attachment is attached to an attachment hole formed in the screw shaft support. By engaging, the drive motor is positioned on the screw shaft support. The motor model is also changed according to the usage of the slide device. The mounting specifications such as the position and size of the mounting holes formed corresponding to the drive motor also differ depending on the model. Therefore, when mounting the screw shaft support, a motor attachment is interposed so that the mounting specifications differ depending on the specifications. Since the difference is absorbed, the structure for replacing and mounting the motor is simplified and the workability for that is improved. Further, since the press-fitting ring press-fitted and fixed to the motor attachment is fitted to the screw shaft support, positioning on the screw shaft support of the drive motor is easy.

  Further, a stopper having a buffering action composed of a core metal of a thin steel plate and a rubber baked on the core metal is attached to at least one of the opposing end surfaces of the screw shaft support and the slider. . In order to avoid an impact when the slider and the bearing support plate collide with each other, a stopper made of an elastic body is generally fixed to the surface facing the slider or the bearing support plate with an adhesive or the like. In this sliding device, the stopper composed of a thin metal core and rubber baked onto the core can be secured as a single part with bolts, making it easy to install and remove the stopper, and to replace and install the stopper. Workability is improved.

  Further, in the slide device, a cover portion that covers between the track rail and the slider, and a sensor that is integrally formed outside the cover portion and detects the position of the slider are attached to the track rail. A sensor rail having a sensor mounting rail portion is disposed. Since the sensor can be attached to the sensor rail at any required position in the longitudinal direction, the change of the sensor attachment position and the sensor attachment work are simplified. By attaching the sensor rail to the track rail, the cover portion covers the space between the track rail and the slider, so that foreign matter is prevented from entering between the track rail and the slider.

  The upper part of the slider and the screw shaft is covered with a dust-proof cover spanned between the screw-shaft supports, and the slider extends upward from the side edge of the dust-proof cover. It has a flange for mounting. The dustproof cover covers the upper part of the slider and the screw shaft, which are the drive part of the slide device, and thus protects the drive part from falling and intrusion of foreign matter from above. In particular, since the slider is fitted in the U-shaped concave portion of the track rail constituted by a pair of side portions and the bottom portion, a protective structure is obtained in which the upper portion of the groove is substantially covered with a dustproof cover. When a dustproof cover is used, the slider has a structure having a flange portion for mounting a load that extends upward from the side edge portion of the dustproof cover to support the load (conveyed item).

  Since the slide device according to the present invention is configured as described above, it has the following effects. That is, this slide device has a slider that is slidable on a track rail having a pair of side portions that are connected to each other, a nut body that constitutes the feed screw mechanism is detachably attached, and the screw shaft is attached to the nut body. A pair of screw shaft supports that are screwed together and mounted on the upper surfaces of the pair of side portions are pivotally supported at both ends of the screw shaft, and a drive motor that rotationally drives the screw shaft is mounted on the screw shaft support. When it is necessary to remove the feed screw mechanism from the slide device, for example, for maintenance or when changing the lead screw mechanism to change the lead or screw diameter, When the pair of screw shaft supports mounted on the upper surface of the shaft is removed from the track rail by operating from above the pair of side portions with the shaft support of the screw shaft released, the screw shaft and And removed nut from Ida can be easily removed from the sliding device. Therefore, various maintenance can be performed by removing only the screw shaft and nut body without changing the slide device itself, or removing or replacing the entire slider from the slide device, and feeding with different leads or screw diameters. Can be replaced with a screw mechanism.

Embodiments of a slide device according to the present invention will be described below with reference to the drawings. As shown in FIG. 1 , the slide device 1 is basically movably fitted in a U-shaped recess 5 of the track rail 2 and the track rail 2 having a U-shaped cross section with an open top surface. The slider 3 is composed of a screw shaft 4 screwed to the slider 3 and a drive motor 60 described later. The track rail 2 is fixed to a support base (not shown) by fixing means such as a mounting bolt inserted through a mounting hole 87 (described later), and the slider 3 fixes a load (not shown) by fixing means such as a mounting bolt. When the slider 3 moves with respect to the track rail 2, the mounted object can move with respect to the support base. The slider 3 is slidable between the track rail 2 via a linear motion rolling guide mechanism. The U-shaped concave portion 5 of the track rail 2 is constituted by a bottom portion 6 and a pair of side portions 7 rising from both sides thereof. That is, the pair of side parts 7 has a structure connected by the bottom part 6. A pair of raceway grooves 8 are formed on the opposing inner surfaces of the pair of side portions 7 so as to extend in parallel in the longitudinal direction so as to perform smooth and accurate linear travel via a plurality of balls 10 on which the slider 3 rolls. The pair of raceway grooves 8 and the balls 10 constitute a linear motion rolling guide mechanism.

  The slider 3 includes a nut body 17 having a spiral groove (not shown) in which a screw shaft 4 having a spiral groove on the outer periphery is screwed. The screw shaft 4 and the nut body 17 are configured to rotate the screw shaft 4. Accordingly, a feed screw mechanism that linearly moves the slider 3 in the axial direction of the track rail 2 is configured. In this embodiment, a ball is slidably interposed between the spiral grooves so that the slider 3 is smoothly and accurately linearly fed. The feed screw mechanism includes a screw shaft 4, a nut body 17 and a ball. It consists of a ball screw provided. A ball circulation path (not shown) is formed in the nut body 17 so that the balls fitted in both the spiral grooves can circulate. The detailed structure of the slider 3 will be described later.

  A motor-side screw shaft support 11 and an end-side screw shaft support 12 (each of which will be described later) for rotatably supporting each end of the screw shaft 4 are made of an aluminum alloy, and the track rail 2 The upper surface 13 of each side portion 7 is fixed by a mounting screw that is screwed into a screw hole formed by tapping. The track groove 8 and the upper surface 13 of the track rail 2 are processed in parallel with each other. Therefore, if the motor-side screw shaft support 11 and the end-side screw shaft support 12 are fixed to the upper surface 13 of the track rail 2 as they are, it is not necessary to align in the vertical direction (vertical direction). If the motor-side screw shaft support 11 and the end-side screw shaft support 12 are attached only by being aligned with respect to the track rail 2 in the horizontal direction (left-right direction), the track groove 9 on the slider 3 side is formed into the track rail 2. The screw shaft 4 arranged on the track rail 2 can be accurately arranged in the slider 3 and in the sliding direction of the slider 3 in a state corresponding to the track groove 8 on the side. As a result, it is possible to easily align the motor side screw shaft support 11 and the end side screw shaft support 12 with respect to the track rail 2.

  The motor-side screw shaft support 11 and the end-side screw shaft support 12 are attached to the track rail 2 by attaching the mounting bolt 14 and the mounting bolt 15 to the motor-side screw shaft support 11 and the end-side screw shaft support, respectively. 12 and screwing into a screw hole formed in the track rail 2 through a mounting through hole provided in the track rail 2. The screw hole is formed by tapping the upper surface 13 of the track rail 2 from above, including the case where the length is adjusted by cutting the track rail 2 in the middle. Therefore, the machining work efficiency is improved as compared with the conventional case where the screw holes are machined from the lateral direction on the end surfaces of the side portions 7 and 7 of the track rail 2 with the track rail 2 fixed by the fixing jig as in the prior art. Is done. Further, in order to attach the motor side screw shaft support 11 and the end side screw shaft support 12 to the track rail 2, the mounting bolts are mounted with the screw shaft supports 11 and 12 mounted on the upper surface 13 of the track rail 2. The operation of screwing 14 and 15 into the track rail 2 may be performed, and the vertical alignment is not necessary, and only the horizontal alignment is performed. Therefore, the workability of the mounting work is improved as compared with the conventional mounting work that is performed while simultaneously aligning the vertical direction (height position) and the horizontal direction (left-right position) on the side surface of the track rail 2. In addition, about the code | symbol on the drawing of various mounting bolts or mounting holes (holes) like the mounting bolts 14 and 15, in order to avoid the complexity in drawing, on behalf of one. It is described.

  FIG. 2 is an exploded perspective view in which a main part of the slide device 1 shown in FIG. 1 is partially cut away. A cylindrical portion 18 of a nut body 17 having a spiral groove that is screwed into the screw shaft 4 is fitted in the through hole 16 formed in the slider 3, and a flange portion 19 formed integrally with the cylindrical portion 18 is fitted. The nut body 17 is attached to the slider 3 together with the screw shaft 4 by screwing the screw shaft mounting bolt 20 into the slider 3 through the mounting holes provided at the four corners. Therefore, when it is necessary to remove the screw shaft 4 from the slide device 1 such as when changing the lead of the screw shaft 4 or when performing maintenance work, the nut body 17 is separated from the slider 3 and the screw shaft 4 is removed from the nut body 17. The entire slider 3 or the track rail 2 need not be removed. In addition, when the screw shaft 4 is replaced and the screw shaft 4 is returned to the slide device 1 after the maintenance is completed, the slider 3 remains fitted to the track rail 2, so that the work of loading the ball screw into the slider 3 is simplified. Is done.

  The motor side screw shaft support 11 is provided with the following bearing support structure in order to support the motor side end portion 21 of the screw shaft 4 having a reduced diameter. That is, the motor-side screw shaft support 11 is formed with a bearing hole 23 corresponding to the motor-side end 21, and a pair of angular bearings 24, 24 are incorporated into the bearing hole 23 with a shim 25 interposed. It is. In order to prevent the angular bearings 24 and 24 from being pulled out, bearing retainers 26 and 27 are arranged on both sides of the bearing hole 23. The motor-side end 21 of the screw shaft 4 passing through the bearing retainer 26, the angular bearings 24 and 24, and the bearing retainer 27 further penetrates the collar 28 and is tightened by the lock nut 29. As a result, the bearing support structure is completed. At the same time, the motor side end 21 is rotatably supported by the bearing support structure. As will be described later, the bearing retainer 26 also serves as a stopper for reducing the impact when the slider 3 collides with the motor-side screw shaft support 11.

  The end side end portion 22 of the screw shaft 4 is also reduced in diameter in the same manner as the motor side end portion 21, and the following bearing support structure is provided. That is, the end-side screw shaft support 12 is formed with a bearing hole 30 corresponding to the end-side end 22, and a bearing support fitting 34 is fitted into the bearing hole 30 from the outside. A bearing 31 and an E-type retaining ring 32 are attached in a bearing support fitting 34 fitted in the bearing hole 30. The bearing support bracket 34 is attached to the end-side screw shaft support 12 by a bearing support bracket mounting bolt 35.

  Next, details of the slider 3 will be described. FIG. 3 is an exploded perspective view of the slider 3. The slider 3 includes a casing 40 having a raceway groove 9 in which the ball 10 rolls in a lower side surface and a through hole 16 in the central longitudinal direction. A gap between the upper surface of the track groove 9 and the track rail 2 is sealed by an upper surface seal 41. In order to infinitely circulate a large number of balls 10 from each raceway groove 9 through each ball circulation path 42 formed in the casing 40 or in the opposite direction, a pair of circulation groove spacers 43 are provided for each infinite circulation path, A pair of end caps 44 including a circulation groove spacer 43 and having a direction change path are provided on the end face in the longitudinal direction with respect to the casing 40. A pair of end seals 45 are provided on the outside of the end caps 44, 44 to seal the gap with the track rail 2. The end cap 44 and the end seal 45 pass through the end cap 44 and the end seal 45 and are attached to the casing 40 by bolts 46. A grease nipple 47 is connected to the end cap 44 through at least one end seal 45, and lubricating oil from the outside is supplied into each infinite circulation path. Further, in this case, the other end cap 44 and the end seal 45 are provided with stopper plugs 48 for sealing the leakage of the lubricating oil.

  Next, the support structure of the end 22 of the screw shaft 4 in the end-side screw shaft support 12 will be described. As shown in FIG. 4, when viewed from a cross-sectional view of the end-side screw shaft support 12 taken along a vertical plane including the axis of the screw shaft 4, the bearing support bracket 34 has a cylindrical portion 50 into which the outer ring of the bearing 31 is fitted. And a flange portion 51 that is radially expanded from the outside of the cylindrical portion 50, and when assembled to the end-side screw shaft support 12, one side of the flange portion 51 is the end-side screw shaft support 12. It is contact | abutted to the end surface. Both lateral portions of the flange portion 51 are enlarged to form insertion holes 52 through which the mounting bolts 35 are inserted. Corresponding to the insertion hole 52, an insertion hole through which the mounting bolt 35 is inserted is formed in the end side screw shaft support 12. A step portion 53 is formed at the center of the stopper 33, and the step portion 53 is fitted in the bearing hole 30 of the end side screw shaft support 12.

  With the bearing support bracket 34 assembled to the end-side screw shaft support 12, the mounting bolt 35 is inserted into the insertion-side hole 52 of the bearing support bracket 34 and screwed into the end-side screw shaft support 12. Is fixed to the end-side screw shaft support 12. Since the stopper 33 has a shock absorbing material that reduces the impact, the stopper 33 is bonded and fixed to the end-side screw shaft support 12. The E-type retaining ring 32 is locked in a groove 54 formed in the end side end portion 22 of the screw shaft 4 to prevent the bearing 31 from coming out of the end side end portion 22. Further, the upper edge portion of the flange portion 51 of the bearing support bracket 34 is a flat edge 55 so as not to protrude from the upper edge of the end-side screw shaft support 12. Since this shaft support structure uses a bearing support bracket 34 made of a thin steel plate having a simple structure, the processing of the bearing support bracket 34 itself is simple, and alignment with the end-side screw shaft support 12 is possible. Assembling can be easily performed.

  7 to 11, the same components as those shown in FIGS. 1 to 6 are denoted by the same reference numerals, and the description thereof will not be repeated. A plurality of sliders 3 are arranged on one track rail 2 in accordance with the position and load of the load supported by the slider 3. FIG. 7 shows an example in which two sliders 3 are used for the same screw shaft 4 to support the load. In FIG. 7, two sliders 3 and 3a are arranged side by side so that one slider 3 is indicated by a solid line and the other slider 3a is indicated by an imaginary line. The support load per slider does not become excessive, and the support point and load of the load can be supported in a well-balanced manner. The end plate 70 of the motor-side screw shaft support 11 will be described in detail in connection with the subsequent mounting of the drive motor. At the bottom portion 6 of the track rail 2, mounting holes 87 through which mounting bolts (not shown) for fixing the track rail 2 to the support base are inserted are formed in two rows at predetermined intervals. As shown in FIG. 9 to FIG. 11, the bending moment of the track rail 2 is increased by increasing the cross-sectional secondary moment around the horizontal axis and the vertical axis in the cross section of the track rail 2 of the slide device 1. Therefore, even if a downward load on the table supported by the slider 3 is applied, for example, a displacement that occurs in the track rail 2 at a position where the displacement between the two mounting holes 87, 87 adjacent in the longitudinal direction is the largest. The amount can be suppressed.

  A driving motor and a sensor for the main parts including the track rail 2, slider 3, screw shaft 4, motor side screw shaft support 11 and end side screw shaft support 12 of the slide device 1 shown in FIGS. And are attached. FIG. 12 is a perspective view showing a state in which the assembly of the slide device 1 is completed by attaching the drive motor and the sensor to the main part of the slide device 1. The drive motor 60 is a stepping motor, which receives a control current from a controller (not shown) via a motor connector 61 and outputs rotation to an output shaft 63 (see FIG. 13). The drive motor 60 is attached by a mounting bolt 65 to a motor attachment 64 that is attached to the motor-side screw shaft support 11 by a mounting bolt (not shown; attached in a direction parallel to the axial direction of the screw shaft 4). As described above, the drive motor 60 is attached to the motor side screw shaft support 11 via the motor attachment 64 according to the mounting specifications of various drive motors. Thus, various drive motors having different outputs and the like can be easily attached in accordance with the intended use of the slide device 1.

  Further, since the drive motor 60 is attached to the motor-side screw shaft support 11 mounted on the upper surface 13 of the track rail 2 via the motor attachment 64, the motor side is attached to the end surface of the track rail 2. Compared with the structure in which the screw shaft support is attached and the drive motor is attached to the motor side screw shaft support, the drive motor does not protrude greatly from the track rail 2, and the track rail 2 is attached to the support base (base). In addition, the track rail 2 can support the load with good balance.

  FIG. 13 is a side view of a motor attachment used in the slide device 1 shown in FIG. As shown in FIG. 13, a through hole 67 is formed at the center of the motor attachment 64, and a part of the press-fitting ring 68 is press-fitted and fixed halfway through the through-hole 67. The remaining portion of the press-fitting ring 68 protrudes from the through hole 67 of the motor attachment 64, and this portion is in a mounting hole 71 (see FIGS. 1 and 2) formed in the end plate 70 of the motor side screw shaft support 11. It is mated. Further, the mounting convex portion 62 of the drive motor 60 is fitted into the remaining portion of the through hole 67. Rather than forming the ring part integrally with the motor attachment 64, the press-fitting ring formed separately is press-fitted and fixed as described above, and the processing can be facilitated and the accuracy can be improved. The output shaft 63 of the drive motor 60 passes through the press-fitting ring 68, and the output shaft 63 of the drive motor 60 and the motor side end 21 of the screw shaft 4 are coupled in the motor side screw shaft support 11 with a coupling 69. Are connected by

  Since the motor side screw shaft support 11 or the end side screw shaft support 12 is mounted in a state of being placed on the upper surface 13 of the track rail 2, the motor of the track rail 2 with respect to the U-shaped recess 5. From the outside of the side or end side, the slider 3 can be accessed in the longitudinal direction through the space between the track rail 2 and the screw shaft supports 11 and 12. This access is particularly easy and advantageous on the end side. Therefore, when an oil supply is to be connected to the grease nipple 47 provided in the end cap 44 in order to supply oil to the ball circulation path 42 of the slider 3, the oil supply is connected to the slider 3 as in the prior art. The oil supply device can be connected to the grease nipple 47 without difficulty without accessing it in an oblique posture.

  In the slide device, even if the slider 3 should collide with each screw shaft support 11, the stopper 26, which is also a bearing retainer, is made of a steel plate like the bearing retainer 27 in order to prevent damage due to the impact at that time. The core plate is preliminarily configured as a baked rubber. Thus, since the stopper 26 is configured as an impact absorbing member in which rubber is baked on the core plate, the stopper 26 is attached to the screw shaft support 11 with bolts. Therefore, conventionally, a rubber stopper made of an elastic material cannot be directly fixed by a bolt, so that it is a stopper as an impact absorbing member as compared with the case where it is stuck by an adhesive. 26 can be easily attached to the screw shaft support 11 with bolts while the core plate is also used as the bearing retainer 27. When the bearing retainer 27 is provided for the screw shaft support 11, the stopper 26 may be provided on the slider 3 side.

  14 is a cross-sectional view of the slide device 1 shown in FIG. 12 as viewed in the same position and direction as the arrow AA shown in FIG. 8, that is, at a position between the slider 3 and the screw shaft support 11. 3 is a cross-sectional view taken along a plane orthogonal to the screw shaft 4. FIG. Referring to FIGS. 12 and 14, sensor rails 74 are attached to the outer surfaces of the pair of side walls 7 of the track rail 2 by attachment bolts 75, respectively. Each sensor rail 74 is provided with sensors 76 to 79 at arbitrary positions whose positions need to be specified. For example, the sensor 76 is for detecting the origin, and the sensor 78 is for detecting the position before the origin. Detection signals detected by the sensors 76 to 79 are input from a sensor connector 80 to a controller (not shown) via a lead wire 81. On the other hand, a dog 83 is attached to the side surface of the slider 3 by a dog mounting bolt 84, and when the slider 3 moves along the track rail 2 by the rotation of the screw shaft 4, the sensors 76 to 79 are connected to the dog 83. And information on the position of the slider 3 is transmitted to the controller. The lead wire 81 connecting the sensors 76 to 79 and the sensor connector 80 can be locked to the motor attachment 64 by the nylon clamp 85.

  By connecting the motor connector 61 and the sensor connector 80 to a driver (not shown) and a controller, the controller can detect a stepping motor as a drive motor based on a detection signal detected from the sensor connector 80. A control signal is output to 60 to control its output rotation. As shown in FIG. 14, a lead wire groove 86 extending in the longitudinal direction is formed in the sensor rail 74, and the lead wire 81 connected to the sensors 76 to 79 can be accommodated. The sensor rail 74 is also a dust-proof cover that covers the track rail 2, the slider 3, and the side surface portion, and a wide cover portion 88 and a sensor mounting rail portion 89 are integrally formed. In this figure, mounting holes 87 through which mounting bolts for mounting the track rail 2 to a support base (not shown) are inserted are formed in two rows at predetermined intervals on the bottom 6 of the track rail 2.

  FIG. 15 is a perspective view showing a slide device 90 according to a second embodiment of the present invention, which is provided with a dustproof cover 91 that protects the slider 3 and the screw shaft 4 accommodated in the track rail 2 from the outside. FIG. 16 is a cross-sectional view of the slide device shown in FIG. 15 viewed in the same position and direction as the arrow AA shown in FIG. 8, that is, between the slider 93 and the screw shaft support 11. It is sectional drawing cut | disconnected by the plane orthogonal to the screw shaft 4 in a position. In the second embodiment, the structure of the slide device 1 shown in the first embodiment is the same as that of the first embodiment except that the slider has a different structure. Therefore, components having the same structure and the same function are denoted by the same reference numerals. They are not described again. The slider 93 has a pair of flange portions 94, 94 extending upward from the lateral direction of the track rail 2 so as to bypass both sides of the dust-proof cover 91 in order to avoid interference with the dust-proof cover 91. The mounted object (not shown) is attached to the flange portions 94, 94 by attachment bolts (not shown) screwed into the attachment screw holes 95. The flange portions 94 and 94 also have a function of the dog 83 in the slide device 1. The dust cover 91 is attached to the motor side screw shaft support 11 and the end side screw shaft support 12 from above by means of mounting bolts 92.

  The slide device according to the present invention is preferably applied to a linear sliding portion of, for example, a machine tool, various assembly devices, or a test device.

It is a perspective view which cuts off some principal parts of one Example of the slide apparatus by this invention, and shows it. It is a disassembled perspective view of the principal part of one Example of the slide apparatus shown in FIG. It is a disassembled perspective view of the slider in the slide apparatus shown in FIG. It is sectional drawing which shows the support structure of the end side edge part of the screw shaft in the slide apparatus shown in FIG. It is a front view of the bearing support metal fitting used for the support structure shown in FIG. It is a side view of the bearing support metal fitting shown in FIG. It is a top view of the principal part of the slide apparatus shown in FIG. FIG. 2 is a side view showing a main part of the slide device shown in FIG. 1 with a part of a track rail cut away. It is an end view by the side of the motor of the principal part of the slide apparatus shown in FIG. It is an end elevation of the end side of the principal part of the slide device shown in FIG. It is sectional drawing in the arrow AA in FIG. It is a perspective view which shows one Example of the slide apparatus by this invention. It is a side view of the motor attachment used for the slide apparatus shown in FIG. It is sectional drawing which looked at the slide apparatus shown in FIG. 12 in the same position and direction as arrow AA shown in FIG. It is a perspective view which shows another Example of the slide apparatus by this invention. It is sectional drawing which looked at the slide apparatus shown in FIG. 15 in the same position and direction as arrow AA shown in FIG. It is a perspective view which shows the conventional XY positioning table apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,90 Slide apparatus 2 Track rail 3, 3a, 93 Slider 4 Screw shaft 5 U-shaped recessed part 6 Bottom part 7 Side part 8, 9 Track groove 10 Ball 11 Motor side screw shaft support body 12 End side screw shaft support body 13 Upper surface 16 Through-hole 17 Nut body 21 Motor side end 22 End side end 27 Bearing retainer 24, 31 Bearing 26, 33 Stopper 34 Bearing support bracket 40 Casing 42 Ball circulation path 44 End cap 45 End seal 47 Grease nipple 60 Drive motor 64 Motor attachment 68 Press-fit ring 71 Mounting hole 74 Sensor rail 76 to 79 Sensor 81 Lead wire 83 Dog 88 Cover part 89 Sensor mounting rail part 91 Dustproof cover 94 Flange part

Claims (5)

A track rail having a pair of side portions connected to each other, a slider slidable on the track rail, a removably attached to the slider, and a feed screw mechanism for sliding the slider on the track rail A nut body to be configured, a screw shaft that is screwed into the nut body, a pair of screw shaft supports attached to both ends of the screw shaft and mounted on the upper surfaces of the pair of side portions, and In a slide device comprising a drive motor attached to any one of the screw shaft supports and rotationally driving the screw shaft,
The track rail has a U-shaped recess formed by the pair of side portions and a bottom portion connecting the pair of side portions, and the slider is a track groove corresponding to a track groove provided on the pair of side portions. A rolling element that rolls between the raceway grooves, an end cap fixed to the end surface of the casing, and an end seal attached to the end surface of the end cap, and the slider is the track rail The feed screw mechanism includes a nut interposed between the nut body, the screw shaft, and a spiral groove of the nut body and a spiral groove of the screw shaft. A bearing support fitting made of a thin steel plate to which a bearing for supporting at least one end of the screw shaft is fitted is fixed to the screw shaft support body. Above Flip slide apparatus characterized by being supported with respect to the shaft support. The drive motor is attached to a motor attachment arranged according to the mounting specification of the drive motor, and a press-fitting ring press-fitted and fixed to the motor attachment is fitted into an attachment hole formed in the screw shaft support. The slide device according to claim 1, wherein the drive motor is positioned on the screw shaft support. A stopper having a buffering action composed of a core of a thin steel plate and rubber baked on the core is attached to at least one of the opposing end surfaces of the screw shaft support and the slider. The slide device according to claim 1, wherein the slide device is characterized. The track rail includes a cover portion that covers between the track rail and the slider, and a sensor mounting rail portion that is integrally formed on the outside of the cover portion and to which a sensor that detects the position of the slider is attached. The slide device according to any one of claims 1 to 3, wherein a sensor rail is provided. The upper part of the slider and the screw shaft is covered with a dust-proof cover that is spanned between the screw-shaft supports, and the slider extends upward from the side edge of the dust-proof cover and is used for mounting a load. The slide device according to claim 1, wherein the slide device has a flange portion.

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