JP2007163982A - Microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microscope incorporating an automatic focusing device which reduces complication of work of setting a front focal position of an objective lens to a desired observation position. <P>SOLUTION: The microscope includes: a focus detection optical system 7 which images an optical image based on light from a light source 20, on an object through an objective lens 12 and images a reflected image of the optical image from the object through the objective lens; a photoelectric transducer 30 which is provided in an imaging position of the focus detection optical system and detects the reflected image; an observation optical system imaging adjustment means 52 which adjusts an imaging position of an observation optical system 3 including the objective lens on the basis of a signal of the reflected image obtained by the photoelectric transducer; a focus detection optical system imaging adjustment means 8 which adjusts an imaging position of the focus detection optical system on the basis of the signal of the reflected image obtained by the photoelectric transducer; and a switching control means 41 which switches the signal from the photoelectric transducer to the observation optical system imaging adjustment means 52 or the focus detection optical system imaging adjustment means 8. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a microscope incorporating an automatic focusing device.

Conventionally, when fluorescent observation of a biological specimen is performed with an optical microscope (biological microscope), after focusing on the boundary surface between the cover glass on which the specimen is placed and the specimen, the autofocus device is turned on, and then the focus detection optical system The focus position adjustment lens (hereinafter referred to as an offset lens in this specification) disposed in the lens is moved so that the focus position of the observation optical system (the front focus position of the objective lens) is shifted to the position within the sample to be observed. A microscope having a built-in automatic focusing device for forming a sample image is known (see, for example, Patent Document 1).
JP 2005-128493 A

  However, in the microscope disclosed in Patent Document 1, the amount of movement of the focal position of the observation optical system (the front focal position of the objective lens) with respect to the amount of movement of the offset lens varies depending on the magnification of the objective lens used for observation, etc. There is a problem that the amount of movement of the offset lens must be readjusted for each objective lens, and the work of setting the front focal position of the objective lens at a desired observation position becomes complicated.

  The present invention has been made in view of the above problems, and provides a microscope incorporating an automatic focusing device that improves the complexity of the operation of setting the front focal position of the objective lens at a desired observation position. Objective.

  In order to solve the above problems, the present invention forms an optical image based on light from a light source on an object via an objective lens, and reflects the reflected light of the optical image from the object on the objective lens. A focus detection optical system that forms a reflection image of the optical image via the optical sensor, a photoelectric converter that is provided at an image formation position of the focus detection optical system and detects the reflection image, and obtained by the photoelectric converter An observation optical system imaging adjustment means for adjusting the imaging position of the observation optical system including the objective lens based on the reflected image signal, and the focus based on the reflected image signal obtained by the photoelectric converter. Focus detection optical system imaging adjustment means for adjusting the imaging position of the detection optical system, and switching control for switching the signal from the photoelectric converter to the observation optical system imaging adjustment means or the focus detection optical system imaging adjustment means Providing a microscope characterized by having means That.

  ADVANTAGE OF THE INVENTION According to this invention, the microscope which incorporates the automatic focus adjustment apparatus which improved the complexity of the operation | work which sets the front side focus position of an objective lens to a desired observation position can be provided.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 is a schematic configuration diagram of a microscope according to an embodiment of the present invention. FIGS. 2A and 2B are diagrams illustrating a focus state of the focus adjustment slit image when the offset lens is moved, in which FIG. 2A is a state in which the offset amount is zero, and FIG. 2B is a state in which the offset lens is moved. (C) is a state in which the focal position is adjusted. FIG. 3 is a diagram schematically illustrating a state in which the focus position of the slit image is adjusted by the offset lens.

  In FIG. 1, the microscope according to the present invention includes an observation optical system 3 for observing an optical image or fluorescent image of a specimen 18, a focus detection illumination optical system 5, a focus detection optical system 7, and a microscope control device (CPU) 41. It is configured.

  The focus detection illumination optical system 5 includes a first collector lens 21, a slit plate 22, a second collector lens 23, a first pupil limiting mask 24, a first half mirror 25, in order from the LED light source 20 along the optical axis. An offset lens 8 and an optical filter 10 (for example, a visible light cut filter), which are focus detection optical system imaging position adjusting means, are arranged.

  A rectangular elongated slit aperture 22a is formed at the center of the slit plate 22, and the slit plate 22 is centered on the optical axis so that the longitudinal direction of the slit aperture 22a extends in a direction perpendicular to the paper surface in FIG. It is arranged.

  Infrared light (near infrared light) emitted from the LED light source 20 is collected by the first collector lens 21 and enters the slit plate 22, and the specimen surface (the medium in which the cover glass 14 and the specimen 18 are immersed) It passes through the slit aperture 22a of the slit plate 22 arranged at the conjugate position with the boundary surface), is converted into parallel light by the second collector lens 23, and is irradiated onto the first pupil restriction mask 24. The first pupil restriction mask 24 shields half of the pupil, and is arranged so that half of the pupil is shielded along the longitudinal center line of the slit-shaped infrared light with the optical axis as the center. . The infrared light La that has passed through the first pupil restriction mask 24 passes through the first half mirror 25.

  The first half mirror 25 is disposed at a point where the optical axes of the focus detection illumination optical system 5 and the focus detection optical system 7 intersect, and reflects a part of the infrared light to provide another one. As will be described later, the focus detection optical system 7 is also used.

  A dichroic mirror 16 is disposed at a point where the optical axes of the focus detection illumination optical system 5 and the observation optical system 3 intersect, and is also shared by the observation optical system 3 as described later.

  The dichroic mirror 16 is disposed in an afocal system on the observation optical path of the observation optical system 3 and functions to reflect infrared light and transmit other light. The infrared light La that has passed through the first half mirror 25 passes through the offset lens 8, and after the wavelength components other than the infrared light La are removed by the optical filter 10, the first objective lens 12 (hereinafter, referred to as the dichroic mirror 16). , Simply referred to as an objective lens) (infrared light Lb), and is focused on the specimen 18 by the objective lens 12 and irradiated. The objective lens 12 is shared by the observation optical system 3 as will be described later. The offset lens 8 will be described later.

  The observation optical system 3 includes an objective lens 12, a dichroic mirror 16, a second half mirror 17, and a second eyepiece objective lens 13 in order from the specimen 18 side, and further a second objective lens for eyepiece. Although not shown, an eyepiece lens is disposed at the tip of 13.

  Although not shown, an illuminating device that illuminates the specimen 18 placed on the stage 11 is provided. This illuminating device is of a transmission type or an epi-illumination type, and is disposed below the stage 11 in the case of the transmissive illumination device, and is disposed above the stage 11 in the case of the epi-illumination type illumination device. Illumination light (or excitation light) emitted from the illumination device is transmitted or reflected through the specimen to become observation light (or fluorescence), collected by the objective lens 12, transmitted through the dichroic mirror 16, and predetermined by the fluorescence filter 118. The fluorescence having the wavelength is selected and is incident on the second objective lens 36 for camera, the relay lens 37 for camera, and the CCD sensor 38 for camera. Note that the second half mirror 17 is configured to be movable from the optical path during fluorescence observation.

  The focus detection optical system 7 receives slit-shaped infrared light that is irradiated and reflected on the specimen on the stage 11 by the focus detection illumination optical system 5. Here, since the specimen 18 placed on the slide glass 15 on the stage 11 is covered with the cover glass 14, the infrared light imaged by the objective lens 12 is reflected on the surface of the cover glass 14 or the cover glass 14. And the sample 18 is reflected at the boundary surface (sample surface 14b, see FIG. 3). Infrared light reflected by the cover glass 14 or the sample surface is converted into parallel light by the objective lens 12 (infrared light Lc), reflected by the dichroic mirror 16 to the LED light source 20 side (infrared light Ld), and further The light passes through the optical filter 10 and the offset lens 8 and is incident on the first half mirror 25 that is disposed at an inclination of about 45 degrees with respect to the optical axis.

  A part of the infrared light Ld incident on the first half mirror 25 is deflected approximately 90 degrees in the optical path and enters the focus detection optical system 7. The focus detection optical system 7 includes a first half mirror 25, a second focus detection objective lens 26, a focus detection relay lens 27, and a second pupil restriction mask 28 along the optical axis from the focus detection illumination optical system 5 side. The focus detection relay lens 27, the cylindrical lens 29, and the focus detection CCD sensor 30 are provided.

  The infrared light Ld reflected by the first half mirror 25 is condensed by the focus detection second objective lens 26 and converted into imaging light to form a slit image. The focus detection relay lens 27 relays a slit image (infrared light Le) formed by the focus detection second objective lens 26, passes through a cylindrical lens 29, and slits on the imaging surface of the autofocus CCD sensor 30. Reimage the image.

  The second pupil restriction mask 28 is disposed so as to shield half of the pupil, and the light-shielded area corresponds to the area shielded by the first pupil restriction mask 24 described above. . The cylindrical lens 29 is a lens having a refractive action only in a predetermined direction, and compresses the infrared light Le in a direction perpendicular to the paper surface (longitudinal direction of the slit image) in FIG. It acts to form an image on the imaging surface. Further, the focus detection CCD sensor 30 can be constituted by a line sensor in which a plurality of light receiving portions are arranged one-dimensionally or an area sensor arranged in a two-dimensional manner.

  In the above description, in the focus detection illumination optical system 5, the light emitted from the LED light source 20 is formed into a slit shape through the slit aperture 22 a of the slit plate 22 and the sample 18 is irradiated with the image of the slit aperture 22 a. This is because when spot light is used, if there is a step on the sample surface, the reflected light is scattered and an ideal light quantity signal cannot be obtained. It is also possible to eliminate the plate 22 and perform autofocus control by irradiating the sample with the image of the LED light source 20 by the method described above. Note that this can be realized without the first collector lens 21.

  Next, the offset lens 8 used for offset addition will be described. As shown in FIG. 1, the offset lens 8 is located between the dichroic mirror 16 and the first half mirror 25, that is, on the common optical path of the focus detection illumination optical system 5 and the focus detection optical system 7, and is arranged in the afocal system. It is installed. An offset lens driving unit 9 is attached to the offset lens 8, and although not shown, an offset lens DC motor that allows the offset lens 8 to move back and forth along the optical axis and a plurality of offset lenses having different magnifications. 8 is configured with an electric lens turret for an offset lens that can be exchanged.

  Further, the input unit 43 described later is provided with an offset adjustment dial 51 for moving the offset lens 8 along the optical axis and an offset lens changeover switch (not shown). When the observer operates the offset adjustment dial 51, the offset lens 8 can be moved back and forth along the optical axis, and a plurality of offset lenses 8 mounted on the offset lens electric turret by the offset lens changeover switch. Any offset lens 8 can be selected and switched.

  The operation of the offset lens 8 will be described with reference to FIGS. 2 and 3 show only components necessary for the description. In the figure, the illumination light for focus detection is indicated by a solid line, and the observation light in the observation optical system 3 is indicated by a dotted line. The offset lens 8 shifts the imaging position a of the slit image focused and irradiated on the sample 18 by the objective lens 12 along the optical axis, and at the same time, reflects the sample 18 to the imaging surface of the CCD sensor 30 for focus detection. It functions to shift the imaging position of the slit image to be re-imaged along the optical axis.

  Hereinafter, while performing objective lens autofocus control (hereinafter referred to as objective lens AF control), the focal position of the observation optical system 3 of the objective lens 12 (the front focal position of the objective lens) is set at the position where the specimen 18 is actually observed. A method of combining them will be described. The offset lens 8 includes a convex lens 8a and a concave lens 8b. One lens is fixed on the optical axis, and the other lens is configured to be movable along the optical axis. As a modification, the convex lens 8a and the concave lens 8b may be configured to be movable along the optical axis. In the following description, a case will be described in which the convex lens 8a is fixedly disposed on the object side, and the concave lens 8b is disposed behind the convex lens 8b so as to be movable along the optical axis.

  First, as shown in FIG. 2A, in the state where the front focal point f of the objective lens 12 is aligned with the boundary surface between the cover glass 14 and the sample 18 (hereinafter referred to as “sample surface 14b”), the slit opening is performed. The offset lens 8 (concave lens) is arranged so that the focal point a of the focus detection slit image irradiated to the specimen 18 through 22a is also aligned with the specimen surface 14b and the reflected image is focused on the imaging surface of the focus detection CCD sensor 30. 8b) is adjusted (this position is called the “offset zero position” of the slit image by the offset lens 8). In this state, the slit image is formed on the front focal point f of the objective lens 12, that is, the sample surface 14 b, and the reflected light is formed on the imaging surface of the focus detection CCD sensor 30. In this state, the offset lens 8 is simply a telephoto system, and the focus detection illumination light is a parallel light beam before and after the offset lens 8. When the objective lens AF control is applied in this state, the specimen surface 14b is always controlled so that the front focus f of the objective lens 12 and the focus a of the focus detection optical system 7 are in focus.

  Next, the offset lens 8 (concave lens 8b) is moved back and forth along the optical axis to move the imaging position of the focus detection slit image, and the imaging position f (solid line) of the focus detection slit image in the objective lens 12. ) And the position of the focal position a (broken line) of the observation optical system 3 are shifted (offset). For example, as shown in FIG. 2B, when the concave lens 8b is moved backward (in a direction away from the convex lens 8a) by a distance x, the focal point a of the focus detection slit image is a predetermined distance from the sample surface 14b to the objective lens 12 side. Move by a distance (this distance is referred to as “offset amount OS”). When the objective lens AF control is performed in this state, the objective lens 12 moves toward the sample 18, and the focus a of the focus detection slit image coincides with the sample surface 14b as shown in FIG. . Therefore, the front focal point f of the objective lens 12 moves into the sample 18 by the offset amount OS, and can be made to coincide with a point P in the sample 18 as shown in FIG.

  At this time, the moving amount x of the concave lens 8b constituting the offset lens 8 and the offset amount OS on the sample surface 14b are determined according to the magnification (focal length) of the objective lens 12. The offset amount OS necessary for the microscope apparatus is required to be about 50 μm due to the configuration of the specimen 18. In the case of the immersion objective lens, the reflectance of the incident surface 14a of the cover glass is almost 0 when the medium is oil, and the reflectance is the same as that of the sample surface 14b when water is used, and the numerical aperture is generally higher than 40 times. Furthermore, since the focal depth on the specimen side is very shallow, the reflection on the cover glass incident surface 14b does not hinder the focus detection control.

  In addition, offset addition can be applied to a general so-called dry objective lens, but in the case of a dry system, the reflectance of the cover glass incident surface 14a is 10 times or more that of the sample surface 14b and the depth of focus is relatively deep. Therefore, it is difficult to use the original cover glass specimen surface 14b as the focus detection reference surface. Accordingly, it is appropriate to use the cover glass incident surface 14a which is 10 times or more as a signal as the reference surface. In this case, the offset amount is much larger than the offset amount (50 μm) of the high magnification / immersion objective lens (for example, the cover glass thickness is 170 μm + 50 μm). A large offset amount can be set.

  As described above, by incorporating the offset lens 8 in the focus detection optical system 7, the imaging position (focus a) of the focus detection illumination light and the front focus position (focus f) of the objective lens 12 are offset (OS). The front focal position (focal point f) of the observation optical system 3 can be set at a predetermined position inside the sample 18.

  Since the distance that can be offset by the offset lens 8 is physically limited by the focal length of the offset lens 8, the offset lens 8 is replaced when it is desired to shift beyond the physical limit. This can be done. For example, it is possible to realize a long shift amount by exchanging with a long focal length.

  In the above configuration, the offset lens 8 is disposed between the dichroic mirror 16 and the first half mirror 25, that is, on the common optical path of the focus detection illumination optical system 5 and the focus detection optical system 7, and the sample 18 is focused and irradiated. The focal positions of both the slit image and the slit image reflected by the sample 18 (sample surface 14b) and re-imaged on the imaging surface of the focus detection CCD sensor 30 are shifted in the optical axis direction. It is also possible to dispose the offset lens 8 between the mirror 25 and the first pupil restriction mask 24 and shift the focal position of the slit image focused and irradiated on the specimen 18 in the optical axis direction. Further, the offset lens 8 is disposed between the first half mirror 25 and the second objective lens 26 for focus detection, and the focal position of the slit image re-imaged on the imaging surface of the focus detection CCD sensor 30 is set in the optical axis direction. It is also possible to realize by shifting to

  Next, the control system of the microscope will be described. The control system of the microscope moves the objective lens 12 up and down based on the signal from the focus detection signal processing unit 31 for detecting the focus detection position, the focusing ring 54 that moves the objective lens 12 up and down, and the signal from the focus detection optical system 7. An objective lens driving unit 52 that is a part of an observation optical system imaging adjustment unit that performs objective lens AF control, an encoder 53 that detects a position (Z direction position) along the optical axis of the objective lens 12, and the stage 11 in the XY directions A stage drive unit 34 to be moved to the motor, an electric revolver drive unit 35 for driving an electric revolver for exchanging the objective lens 12, a CPU 41 for controlling them, a memory 42, and an input unit 43. The position of the objective lens 12 in the optical axis direction is sent from the focusing ring 54 to the CPU 41 via an encoder (not shown).

  The slit image signal detected by the focus detection CCD sensor 30 is output to the focus detection signal processing unit 31 and processed by the observation optical system signal processing unit which is a part of the observation optical system imaging adjustment means of the CPU 41. The focus information of the specimen with respect to the objective lens 12 is detected. A signal related to the focus information is sent to the objective lens driving unit 52 via the observation optical system signal processing unit of the CPU 41, and the objective lens AF by the objective lens 12 is moved up and down along the optical axis. Control is achieved.

  The position where the slit image is formed on the imaging surface of the focus detection CCD sensor 30 is adjusted according to the vertical movement of the objective lens 12 along the optical axis when the position of the specimen 18 or the cover glass 14 changes. Move in the short direction of the slit image. The position value of the objective lens 12 in the optical axis direction is controlled from the slit image detected by the focus detection CCD sensor 30. It becomes possible to adjust the focus f of the objective lens 12 to the specimen 18 using such objective lens AF control.

  Although not shown in FIG. 1, the objective lens driving unit 53 includes an objective lens driving DC motor attached to the objective lens 12, an objective lens driving motor driver that rotates the objective lens driving DC motor, and an objective lens driving motor. An encoder 53 (for example, a rotary encoder) that detects the rotation angle of the DC motor and an up / down counter that counts the vertical movement of the objective lens 12 based on the detection result of the encoder 53 are configured. The objective lens AF control is processed by the CPU 41, and the control signal is output to the objective lens driving motor driver as a vertical movement control signal and a speed control signal, and the objective lens driving DC motor is driven based on these signals. The count result of the up / down counter is output to the CPU 41 as a vertical movement position signal. When the objective lens driving DC motor rotates, the objective lens 12 moves up and down along the optical axis according to the rotation angle. Then, the objective lens 12 moves up and down, and the positional relationship between the sample 18 placed on the stage 11 and the objective lens 12 is adjusted.

  Although only one objective lens 12 is shown in FIG. 1, the microscope according to the present embodiment can be configured by a plurality of objective lenses 12 having different magnifications. Although not shown, the plurality of objective lenses 12 are attached to an electric revolver, and the electric revolver is connected to an electric revolver driving unit 35 that rotationally drives the objective lens. Although not shown, the electric revolver driving unit 35 includes an electric revolver driving DC motor attached to the electric revolver, and an electric revolver driving motor driver that rotates the electric revolver driving DC motor based on a rotation control signal from the CPU 41. Is provided. The electric revolver rotates according to the rotation of the electric revolver driving DC motor. The plurality of objective lenses 12 mounted on the electric revolver also rotate together, and any one of the first objective lenses 12 is positioned on the observation optical path of the microscope. The electric revolver driving unit 35 is provided with a sensor (not shown) for detecting the number (1 to 6) of the revolver holes positioned on the observation optical path of the microscope among the revolver holes (for example, six) of the electric revolver. It has been.

  The input unit 43 will be described. The input unit 43 includes an offset lens adjustment dial 51 that gives an amount of movement of the offset lens 8, a keyboard, an objective lens changeover switch, a focus detection signal changeover switch, an autofocus control start switch, an in-focus position storage switch, up (not shown). / Down fine adjustment switch and various switches are provided.

  The keyboard is used when inputting information of the objective lens 12. Data relating to the objective lens 12 input from the keyboard is stored in the memory 42. In-focus position information acquired by the in-focus position storage switch is also stored in the memory 42.

  The objective lens switching switch is used when switching the objective lens 12 positioned on the observation optical path of the microscope to another objective lens 12. The CPU 41 controls the electric revolver driving unit 35 based on the switching signal input from the objective lens switching switch, and positions the revolver hole designated by the switching signal on the observation optical path of the microscope.

  The focus detection signal switching switch is a switch for switching between driving the objective lens 12 and the offset lens 8 with a signal from a focus detection signal processing unit 31 described later.

  The autofocus control start switch is used when an instruction to start autofocus control of objective lens AF control in a microscope or offset lens AF control described later is used. When the autofocus control start switch is operated, the CPU 41 starts execution of the slit projection type objective lens autofocus control described above, and the specimen 18 is positioned at the focal point of the first objective lens 12 or an offset lens described later. The execution of AF control is started.

  The up / down fine adjustment switch is used to finely adjust the vertical movement of the objective lens 12 by manual operation. The CPU 41 positions the objective lens 12 based on the fine adjustment signal input from the up / down fine adjustment switch. The operation of the up / down fine adjustment switch is performed while the operator observes an image of the specimen through a second objective lens for eyepiece and an eyepiece (not shown) of the microscope. When an image with high contrast can be observed well for the operator, the operation of the up / down fine adjustment switch is finished, and the objective lens 12 is positioned. At this time, in the microscope of this embodiment, an arbitrary surface in the specimen 18 coincides with the front focal position of the objective lens 12. Thus, the microscope according to the embodiment of the present invention is configured.

  Hereinafter, control when observing an optical image of a microscope according to an embodiment of the present invention will be described.

  Steps S1 to S5 in FIG. 4 show steps until the focal position (focal point f) of the observation optical system is set at a desired observation position of the specimen 18. Hereinafter, each step will be described.

(Step 1)
After the cover glass 14 is set on the specimen 18 placed on the slide glass 15 and set on the stage 11, the objective lens 12 is moved up and down the focusing dial 54 to the specimen 18 and the specimen surface 14 b of the cover glass 14. The focal point f of the objective lens 12 is positioned. At this time, the position of the offset lens 8 is set to the offset zero position, and the focus position f (shown by a broken line) of the observation optical system 3 and the focus position a (shown by a solid line) of the focus detection optical system 7 coincide. ing.

(Step 2)
After setting in this state, the autofocus control start switch is turned on to start objective lens AF control, and control is performed to maintain the focal position of the objective lens 12 at a predetermined position.

(Steps 3 and 4)
Subsequently, in order to move the focal position f of the observation optical system of the objective lens 12 to a desired position in the sample 18, the offset adjustment dial 51 is rotated to move the offset lens 8 along the optical axis. When the offset lens 8 is moved (for example, the movement amount x), the focal position a of the focus detection optical system 7 is shifted from the specimen surface 14b. The focal position a of the detection optical system 7 coincides with the sample surface 14b.

(Step 5)
As a result of the objective lens 12 moving the distance OS in the specimen direction, the focal position f of the observation optical system 3 moves into the specimen 18 so that an optical image at a desired position can be observed, and the focal position is maintained by objective lens AF control. Is done.

  When the objective lens 12 is replaced with an objective lens having a different magnification in the conventional microscope, the offset lens OS of the offset lens 8 for positioning the focal position f of the observation optical system 3 at the same position in the specimen 18 is the objective lens before and after the replacement. Is different. For this reason, when exchanging the objective lens, after turning off the objective lens AF control switch at one end, the objective lens is switched via the electric revolver driving unit 35, the autofocus control start switch is turned on, and the optical image is visually checked. After positioning on the sample surface 14b while observing, a complicated operation of adjusting the offset amount of the offset lens 8 again is necessary. If the focal points of the objective lenses to be exchanged are deviated, the offset lens 8 is returned to the offset zero position before turning on the autofocus control start switch, and then visually observed on the boundary surface 14b. It was necessary to set the focal position, turn on the autofocus control start switch, and again adjust the offset amount of the offset lens 8 while visually observing the optical image.

  The microscope according to the embodiment of the present invention is configured to be able to automatically perform various adjustments when the objective lens is replaced. Hereinafter, a control step when the objective lens is replaced will be described.

  In step S6 of FIG. 4, it is determined whether or not to switch the objective lens.

(Step 6)
It is determined whether the objective lens 12 is switched. If not switched, return to Step 3. When switching the objective lens, the “objective lens switching sequence” in step S7 is executed.

  FIG. 5 shows a control flowchart of the microscope accompanying the objective lens switching.

(Step 7-1)
A command for switching the objective lens 12 is input from the input unit 42. At this time, the input unit 43 instructs to select the objective lens 12 positioned on the electric revolver (for example, the hole number of the electric revolver is input).

(Steps 7-2 to 7-4)
While performing the objective lens AF control by the objective lens 12 (S7-2), the offset lens 8 is fixed (S7-3), and the Z position (Za) along the optical axis of the objective lens 12 currently inserted in the optical path. Value) is read through the encoder 53, sent to the CPU 41, and stored in the memory 42 (S7-4).

(Steps 7-5 to 7-7)
While performing the objective lens AF control (S7-5) by the objective lens 12, the offset lens 8 is moved to the offset zero position (offset reference position) (S7-6), and the Z position (Zb value) of the objective lens 12 at this time Is sent to the CPU 41 via the encoder 53 and stored in the memory 42 (S7-7). At the offset reference position, the focal positions f and a are positioned on the sample surface 14b.

(Step 7-8)
The autofocus control start switch of the objective lens 12 is turned off via the CPU 41, the objective lens AF control is released, and a rotation instruction is sent from the CPU 41 to the electric revolver driving unit 35, and the designated objective lens 12 is driven by the electric revolver. It is selected via the unit 35 and inserted into the optical path.

(Step 7-9)
In response to the exchange completion signal from the electric revolver driving unit 35, the objective lens AF control of the objective lens 12 after the exchange is started. Since the offset lens 8 is fixed at the offset reference position, the objective lens B is controlled so that the focal position a of the focus detection optical system 7 of the objective lens 12 is positioned on the specimen surface 14b.

(Step 7-10)
In this state, the Z position (Zc value) along the optical axis of the objective lens 12 is read via the encoder 53, sent to the CPU 41, and stored in the memory 42.

(Step 7-11)
In the CPU 41, a correction value (Za− (Zb−Zc)) of the Z position of the objective lens before replacement and the objective lens after replacement is calculated from the Za value, Zb value, and Zc value. Here, (Zb−Zc) corresponds to the same focal shift between the objective lens before replacement and the objective lens after replacement. The objective lens 12 is moved based on the calculated correction value for the Z position. At this time, the objective lens AF control for the objective lens 12 is moved OFF by the correction value in the Z direction.

(Step 7-12)
Since the objective lens 12 is moved in step 7-11, the focus position a of the focus detection optical system 7 is shifted. In order to correct this, focus adjustment using a signal from the focus detection signal processing unit 31 is given to the offset lens driving unit 9 to perform focus control by the offset lens 8 (this is referred to as offset lens AF control). Thus, the CPU 41 switches the signal. As a result, the offset lens 8 is moved along the optical axis so that there is no image blur on the focus detection CCD sensor 30, and the focus position a of the focus detection optical system 7 is positioned on the boundary surface 14b. The correction of the same focal shift of the objective lens is completed by the above steps.

(Step 7-13)
Thereafter, the CPU 41 switches the autofocus control from the offset lens AF control to the objective lens AF control, and further gives a predetermined offset amount in the objective lens 12 to the offset lens 8, thereby observing the observation optical with the objective lens before replacement. The focal position f of the observation optical system in the objective lens 12 can be positioned at the focal position f of the system 3. The relationship between the amount of movement of the offset lens 8 of the objective lens after replacement and the amount of offset is stored in the memory 42 in advance, and the amount of movement of the offset lens 8 in the objective lens 12 after replacement is calculated from this data. It becomes possible to position at the focal position.

(Step 7-14)
When the offset lens 8 is set at a predetermined position, the offset lens 8 is fixed. Thereafter, the objective lens AF control is continued and the focal position f of the observation optical system 3 is maintained at a desired observation position.

  As described above, in the microscope according to the embodiment of the present invention, it is possible to detect and correct the defocusing of the objective lens before and after replacement, and to have the amount of movement of the offset lens 8 according to the objective lens after replacement. Therefore, even after the objective lens is replaced, it can be easily positioned at the focal position f of the observation optical system 3 before the replacement of the objective lens.

  Note that when a plurality of objective lenses having no defocus are fixed to the revolver, the above steps are simplified and the objective lenses can be exchanged in the steps shown in FIG. As shown in FIG. 6, when it is known in advance that the objective lens before and after replacement is free from the same focal shift, among the processing steps shown in FIG. 5, step 7-2 to step 7-6, and step The steps 7-9 to 7-10 can be omitted, and the objective lens can be exchanged with simpler processing steps.

  Next, another control of the microscope according to the embodiment of the present invention will be described.

  In the above-described microscope, when the observation position is positioned at a desired position in the specimen, the focal position f of the observation optical system 3 is placed on the specimen 18 and the specimen surface 14b of the cover glass 14 while observing the specimen image through the eyepiece. First, the focus position a of the focus detection optical system 7 is positioned, and then the offset lens 8 is moved along the optical axis to give an offset amount OS, and the focus position f of the observation optical system 3 is set inside the sample 18. Positioning is performed at a desired position. Such an operation has a problem that it is necessary to search a large number of points in order to find a desired observation position, and the operation of positioning the focal position f of the observation optical system 3 at the observation position becomes complicated.

  The microscope according to the present embodiment has a function capable of easily positioning the focal position f of the observation optical system 3 at a desired observation position of the specimen 18. Hereinafter, the operation of the microscope will be described with reference to the flowchart shown in FIG. Steps similar to those in FIG.

(Step 1-1)
After setting the specimen 18 on the stage 11, the position of the offset lens 8 is set to the offset zero position. In this state, as shown in FIG. 2A, the focus position f (shown by a broken line) of the observation optical system 3 and the focus position a (shown by a solid line) of the focus detection optical system 7 coincide.

(Step 2-1)
The CPU 41 receives a signal from the focus detection signal processing unit 31, and starts offset lens AF control based on this signal. The offset lens AF control is the same as described above.

(Steps 3-1, 4-1)
Offset lens AF control is performed, and the focus ring 53 of the microscope is operated to position the focal position f of the observation optical system 3 at a desired observation position in the specimen 18 while observing the specimen image through the eyepiece. At this time, since the offset lens AF control is performed, the focus position a of the focus detection optical system 7 is moved back and forth along the optical axis by the offset lens drive unit 9 so as to be positioned on the sample surface 14b.

(Step 5-1)
Switching from the offset lens AF control to the objective lens AF control is performed via the CPU 41. This makes it possible to keep the focal position f of the observation optical system 3 at the desired position of the specimen 18 at the desired position. Note that switching between the offset AF control and the objective lens AF control can be performed manually by switching with a focus detection signal switch of the input unit 43. Further, the automatic switching can be performed by the CPU 41 detecting the input signal from the focusing dial 54 and automatically switching when the signal from the focusing dial 54 has not changed for a predetermined time.

(Step 6)
It is determined whether the objective lens 12 is switched. If not switched, return to Step 3. When switching the objective lens, the “objective lens switching sequence” in step S7 is executed. The sequence after step S7 is the same as that in FIG. 5 and FIG. By executing these similar sequences, the same effects can be obtained.

  As described above, the microscope according to the embodiment of the present invention can appropriately switch the signal from the focus detection signal processing unit 31 between the objective lens AF control and the offset lens AF control. It is possible to easily perform exchange and selection of an observation position.

  Although the above description has been given for the case of an upright microscope, the same effect can be obtained with an inverted microscope. Further, although the case of the objective lens AF control in which the automatic focus adjustment control is driven up and down is described, the same control as the objective lens AF control can be performed by driving the stage 11 up and down.

  The above-described embodiment is merely an example, and is not limited to the above-described configuration and shape, and can be appropriately modified and changed within the scope of the present invention.

1 is a schematic configuration diagram of a microscope according to an embodiment of the present invention. It is a figure showing the focusing state of the slit image for a focus adjustment when an offset lens is moved, (a) is a state where offset amount is zero, (b) is a state when moving an offset lens, (c) is a focus. Each of the positions is adjusted. It is a figure which shows typically the state by which the focus position of the slit image was adjusted with the offset lens. The sequence until it observes a sample in the microscope concerning embodiment of this invention is shown. The sequence at the time of replacement of an objective lens having the same defocus is shown. The sequence at the time of objective lens exchange without the same focus shift is shown. Another sequence until it observes a sample in the microscope concerning embodiment of this invention is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 3 Observation optical system 5 Illumination optical system for focus detection 7 Focus detection optical system 8 Offset lens 9 Offset lens drive part 10 Optical filter 11 Stage 12 1st objective lens (objective lens)
13 Second Eye Lens for Eyepiece 14 Cover Glass 15 Slide Glass 16 Dichroic Mirror 17 Second Half Mirror 18 Specimen 20 LED Light Source 21 First Collector Lens 22 Slit Plate 23 Second Collector Lens 24 First Pupil Restriction Mask 25 First Half Mirror 26 focus detection second objective lens 27 focus detection relay lens 28 second pupil restriction mask 29 cylindrical lens 30 focus detection CCD sensor 31 focus detection signal processing unit 34 stage drive unit 35 electric revolver drive unit 36 second camera Objective lens 37 Camera relay lens 38 Camera CCD sensor 41 Microscope control unit (CPU)
42 Memory 43 Input Unit 51 Offset Lens Position Adjustment Dial 52 Objective Lens Drive Unit 53 Encoder 54 Focusing Dial 118 Fluorescence Filter

Claims (4)

A light image based on the light from the light source is formed on the object via the objective lens, and the reflected light of the light image from the object is formed as a reflected image of the light image via the objective lens. A focus detection optical system;
A photoelectric converter that is provided at an imaging position of the focus detection optical system and detects the reflected image;
Observation optical system imaging adjustment means for adjusting the imaging position of the observation optical system including the objective lens based on the signal of the reflected image obtained by the photoelectric converter;
Focus detection optical system imaging adjustment means for adjusting the imaging position of the focus detection optical system based on the signal of the reflected image obtained by the photoelectric converter;
A microscope having switching control means for switching a signal from the photoelectric converter to the observation optical system imaging adjustment means or the focus detection optical system imaging adjustment means. The objective lens is disposed in an objective lens switching unit that switches a plurality of objective lenses having different magnifications.
When the objective lens is switched by the objective lens switching means, the switching control means switches the signal from the photoelectric converter from the observation optical system imaging adjustment means to the focus detection optical system imaging adjustment means, 2. The microscope according to claim 1, wherein the imaging position of the focus detection optical system is adjusted by an observation optical system imaging adjustment unit, and then the observation optical system imaging adjustment unit is switched.   2. The apparatus according to claim 1, further comprising a confocal deviation correction unit configured to detect a confocal deviation of the objective lens before and after switching when the objective lens is switched by the objective lens switching unit, and correct the confocal deviation. The microscope according to 1 or 2. The same defocus correction by the same defocus correction means is performed before the start of adjustment of the imaging position of the focus detection imaging optical system by the focus detection optical system imaging adjustment means with respect to the replaced objective lens. The microscope according to any one of claims 1 to 3, wherein the microscope is performed through an optical system image adjusting unit.

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