JP2007159358A - Variable capacity capacitor, high voltage generating method and high voltage generator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a high voltage generating method and device which produces a DC or pulse high voltage by an efficient electrostatic step-up mechanism having a compact and simple movement mechanism. <P>SOLUTION: The variable capacity capacitor controls the distance between the electrodes of a capacitor by utilizing mechanical movement and varies the capacitance of the capacitor periodically to generate a high voltage pulse or a DC high voltage according to that period. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a movable capacitor, a high voltage generation method, and an apparatus therefor. More specifically, the electrostatic capacity is periodically changed by a mechanical force, whereby a high voltage pulse or a voltage according to this cycle is obtained. The present invention relates to a movable capacitor that generates a DC voltage, a high voltage generation method using the movable capacitor, and a high voltage generator thereof.

  The present invention realizes a high voltage generating means capable of obtaining a direct current or a pulse high voltage by an efficient electrostatic boosting mechanism having a compact and simple mechanical motion mechanism. The present invention uses a movable capacitance type capacitor that utilizes mechanical motion, and periodically changes the capacitance by mechanical force, whereby a high voltage that can be pulsed according to this cycle can be obtained. The present invention provides a voltage generator and a high voltage generator that can be used as a high-voltage power source for equipment that requires a high voltage, such as a charged particle accelerator and a film forming apparatus.

  In particle accelerators for generating high-energy electron beams and ion beams, and film deposition systems based on ion engineering techniques, several kilovolts (hereinafter abbreviated as kV) to several megavolts (hereinafter abbreviated as MV). DC or pulsed high voltage may be required. Mechanisms that generate high voltage include transformer boosting, voltage rectification and multistage cascade rectification circuits such as Cockcroft-Walton circuits, and electrostatic generators with mechanical motion such as belt generators. A combined apparatus is used as a power source for a particle accelerator or the like (see Non-Patent Document 1).

  As these high-voltage generators, for example, a DC high-voltage generator (see Patent Document 1) in which the polarity switching of the DC high-voltage generator composed of the Cockcroft-Walton circuit is rationalized and miniaturized, or a simple circuit configuration is arbitrary. There has been proposed a DC high voltage generator (see Patent Document 2) that can generate a positive and negative DC high voltage and can achieve miniaturization and power saving.

  An electrostatic generator represented by a belt generator used in a van de Graaff type particle accelerator or the like generates a high voltage on the order of megavolts using mechanical motion. That is, in the belt generator, a high voltage can be obtained by charging a charge on the insulating belt and moving the charge to a higher potential by mechanical force by operating the belt.

  In this electrostatic power generation method, for example, all of the generated charges are eliminated from the drawbacks of the conventional electrostatic generator that uses only a part of the generated charges or requires a large amount of mechanical energy to carry the charges. An electrostatic power generation method and apparatus that can be eliminated by charging the conductive sphere and making the charged conductive sphere reach the charge absorbing electrode to eliminate the need for mechanical energy for conveyance (Patent Document 3) 4) has been proposed. However, conventionally, it has been difficult to downsize a high voltage generator using mechanical force.

JP-A-5-252759 JP 2000-299987 A JP 2002-165468 A JP 2004-104864 A Hiroo Kumagai “Accelerator” Laboratory Physics Course 28, Kyoritsu Shuppan, Chapters 6 and 7 (81-183 pages), 1982

  Under such circumstances, the present inventor, in view of the above-described prior art, is able to generate direct current or pulse high voltage by an efficient electrostatic boosting mechanism having a compact and simple motion mechanism. As a result of intensive research aimed at developing a voltage generator, it was found that the intended purpose can be achieved by combining a movable capacitor and a high voltage diode, and the present invention is completed. It came to.

  It is an object of the present invention to provide a high voltage generation method and apparatus capable of obtaining a direct current or pulse high voltage by an efficient electrostatic boosting mechanism having a compact and simple motion mechanism. . In addition, the present invention can make a high voltage generator using mechanical force more compact by using a movable capacitor that can periodically change its capacitance by mechanical force. An object of the present invention is to provide a high voltage generator. In addition, the present invention provides a high voltage generator capable of operating in a vacuum, such as a device that requires a high voltage in a vacuum, such as a high-performance film deposition apparatus using a charged particle accelerator or an ion engineering technique. An object of the present invention is to provide a high voltage generator that can be used as a voltage power source.

The present invention for solving the above-described problems comprises the following technical means.
(1) It is a movable capacitance type capacitor, which uses the mechanical motion to control the distance between the electrodes of the capacitor, and periodically changes the capacitance of the capacitor to follow this cycle. A movable capacitor that generates high-voltage pulses or DC high voltage.
(2) The variable capacitor according to (1), wherein the capacitance of the capacitor is periodically changed by controlling the distance between the electrodes by the reciprocating motion of the parallel plate electrodes.
(3) By rotating a cylindrical electrode having a rotational axis shifted from the axis with respect to the electrode facing the electrode, the distance between the facing electrodes is controlled, and the capacitance of the capacitor is periodically changed. The movable capacitor according to (1), which is changed.
(4) A high voltage generating device comprising a high voltage generating mechanism in which a movable capacitor and a high voltage diode are combined.
(5) The high voltage generating device according to (4), wherein the movable capacitor is the movable capacitor according to any one of (1) to (3).
(6) The high voltage generating device according to (4), further including a movable capacitance type multi-stage boosting mechanism in which a plurality of movable capacitance capacitors and high voltage diodes are combined in multiple stages in a column.
(7) The high-voltage generator according to (4) above, wherein movable capacitors whose capacitance changes periodically are arranged in multiple stages while shifting the cycle.
(8) The high voltage generator according to (4) above, wherein the high voltage generator is a high voltage generator of a device that requires a high voltage.
(9) The high voltage generator according to (8) above, wherein the device that requires high voltage is a charged particle accelerator or a film forming apparatus.
(10) A high voltage generation method characterized by generating a high voltage using a high voltage generation mechanism in which a movable capacitor type capacitor and a high voltage diode are combined.
(11) The high voltage generating method according to (10), wherein the movable capacitor is the movable capacitor according to any one of (1) to (3).

Next, the present invention will be described in more detail.
The present invention is a movable-capacitance type capacitor, which uses a mechanical motion to control the distance between the electrodes of the capacitor to periodically change the capacitance of the capacitor, thereby following this cycle. A movable capacitor that generates a high-voltage pulse or a DC voltage, a high-voltage generator that includes a high-voltage generator that combines the movable capacitor and a high-voltage diode, and the high-voltage generator. It is characterized by a high voltage generation method that uses it to generate a high voltage.

  The capacitor basically has a structure in which metal electrodes are opposed to each other. When a voltage is applied between the electrodes, charges are integrated in proportion to the voltage. When a battery is connected to the capacitor, free electrons begin to move between the two metal plates facing each other. Electrons on one metal plate are attracted to the positive electrode of the battery and flow toward the power source, and electrons flowing out from the negative electrode of the battery flow into the other metal plate of the capacitor.

  At this time, the electrode connected to the positive electrode of the capacitor is positively charged because of a shortage of electrons, and on the contrary, the negative electrode is negatively charged because of a large amount of electrons. Then, the flow of electrons stops until the potential difference between the two metal plates matches the voltage of the battery, and then stops, and the accumulation of charges ends. The capacitance of the capacitor is determined by the electrode area, the distance between the electrodes, and the like. Increasing the capacitance (C) is achieved by increasing the electrode area and decreasing the distance between the electrodes.

Therefore, when voltage V is applied to both poles of a capacitor with high breakdown voltage,
Q = CV
The charge (Q) indicated by the well-known relationship is accumulated. In this state, when the electrostatic capacity is reduced to C ′ (<C) by mechanical force such as separating both poles of the capacitor, the potential difference between both ends of the capacitor is
V '= Q / C'
Rises to the value indicated by. This is one form of the rising voltage method using mechanical motion.

  With this principle in mind, for example, after accumulating charges by applying a voltage to a capacitor consisting of a parallel plate with one side grounded, this period is changed by periodically changing the capacitance by mechanical force. A pulsed high voltage can be obtained. The present invention constructs a movable-capacitance type capacitor that can periodically change its electrostatic capacity by mechanical force, and combines this with a high-voltage power supply and a high-voltage diode, so that the number of original high-voltage power supplies It is a high voltage generating means that makes it possible to obtain a high voltage pulse or a DC high voltage having a voltage that is double to several hundred times. As the movable capacitor of the present invention, any capacitor can be used as long as it can change the capacitance of the capacitor.

A high voltage generator having a high voltage generating mechanism using a movable capacitor will be described. As a movable capacitor, for example, two metal plates (electrodes) facing each other are arranged with a space therebetween, The electrode is connected to the positive electrode of a battery having a voltage V ₀ through a diode, and the other electrode is grounded. The capacitor has the same potential of V ₀ as the battery. If the capacitance at this time is C _a , increasing the distance between the electrodes of the capacitor decreases the capacitance of the capacitor, and the capacitance of C _b Value.

As a result, the potential between both electrodes of the capacitor changes in proportion to the capacitance ratio C _a / C _b (R) to V ₁ = V ₀ * R, and the voltage that was initially V ₀ becomes V ₁ . Increase. As the capacitance of the capacitor changes periodically, the potential between the electrodes changes periodically from V ₀ to V ₁ . As a result of actually measuring the voltage change using the variable capacitor of the present invention, a pulse high voltage was generated, and the voltage increased from −8 kv to −2 kv.

  In the present invention, a movable capacitance type multistage boosting mechanism can be formed by combining a plurality of movable capacitance capacitors and diodes in tandem. The number of stages in which the movable capacitor and the diode are combined is arbitrary, and the higher the number of stages, the higher the voltage can be obtained. As an example, an example in which parallel plate type movable capacitor type capacitors are combined in four stages will be described. This high voltage generator is a parallel plate type movable capacitor type pulse high voltage generator that changes in vibrations shifted by half a cycle. It is an apparatus for generating a DC high voltage in which mechanisms are alternately stacked in multiple stages.

A set of movable capacitance type capacitors and diodes are joined in four stages in a column, and are composed of four capacitors C _{1 to} C ₄ and diodes. Each capacitor is controlled so that its capacitance changes from C _{a to} C _b according to a change in the distance between the electrodes, and every other capacitor simultaneously has the same capacitance. The movable capacitive capacitor of the last stage is connected to the final electrode with a capacitance C _f of the fixed via the diode. Generation of a high voltage by this movable capacity type multistage boosting mechanism is performed through the following process.

First, in the initial stage, a voltage V ₀ is applied from the power source to the movable capacitor, and all capacitors are charged to V ₀ . At this time, the capacitances of the capacitors C ₁ and C ₃ are set to C _a , and the capacitances of the capacitors C ₂ and C ₄ are set to C _b . However, C _a > C _b . As a result, the capacitor of C ₁ and C ₃ has a charge of Q = C _a * V ₀ , the capacitor of C ₃ and C ₄ has a charge of Q = C _b * V ₀ , and the final electrode Accumulates a charge of Q = C _f * V ₀ .

Then, by controlling the distance between the plates changes the capacitance of the capacitor of C ₁ -C _4. When the capacitances of C ₁ and C ₃ are reduced to C _{a to} C _b and the capacitances of C ₂ and C ₄ are increased to C _{b to} C _a , part of the charge accumulated in the capacitors of C ₁ and C ₃ but each will be moved to the _{C 2} and _{C 4,} the voltage _{V 0} which as a whole does not change.

Furthermore, when the distance between the electrode plates is controlled and returned to the initial state, the movement of charges is as follows by the diode. Capacitance of the capacitor _{C 1} increases to _C b -C _a, charge from the power source is supplied. Further, part of the electric charge of _{C 2} is moved to _{C 3,} this voltage is also _{V 0.} On the other hand, the capacity of C ₄ decreases to C _{a to} C _b , and a part of the accumulated charge moves to the final electrode. Since the capacity of the final electrode is fixed, as a result, the voltage of both electrodes rises to V = V ₀ * (C _a + C _f ) / (C _b + C _f ). If the calculation is made assuming that C _f = C _a = 2C _b , V = 1.33 * V ₀ .

In the next step, the charges accumulated in C ₁ and C ₃ move to C ₂ and C ₄ respectively. From the same consideration as above, V ₁ = V ₂ = V ₀ , V ₃ = V ₄ = 1.11 * V ₀ and V _f = 1.33 * V ₀ . In this way, by changing the capacitance of the series of capacitors, the electric charge sequentially moves in the direction of the final electrode, and the voltage can be increased stepwise. Voltage _{V n} finally obtained by the step-up mechanism of the n stages _can be expressed by ^{_{V n = V 0 * R c}} n.

  As a high-voltage generator using other movable capacitance capacitors, a multistage movable capacitance type capacitor whose capacitance is periodically changed at a high speed by rotation of a plurality of cylinders having rotational axes shifted from each other, and A multi-stage DC high voltage generation mechanism using this is exemplified. By this mechanism, it is possible to move at a high frequency capacity change, and an efficient voltage rise can be realized.

  Since the high voltage generator of the present invention can generate a DC high voltage and a pulse high voltage, for example, based on a particle accelerator or ion engineering technique for generating a high energy electron beam or ion beam. It can be suitably used as a high voltage power source for a vacuum apparatus such as a film forming apparatus. Moreover, since the high voltage generator of the present invention is compact, it is possible to construct equipment such as a particle accelerator using this as a power supply device in a compact manner.

Furthermore, since the high voltage generator of the present invention operates in a high vacuum field of, for example, 10 ⁻⁴ Pa or less, it is installed in a vacuum chamber such as a particle accelerator and the vacuum field in the chamber is used as an insulator. It becomes possible to do. When a high voltage is supplied from a power supply device in a vacuum chamber to a device such as a particle accelerator, many parts such as an insulated cable and a connector can be omitted, resulting in a significant cost reduction of the entire device. Examples of these devices include arbitrary devices that require a high voltage and a high vacuum, such as an electron beam irradiation device, an ion deposition device, a mass analyzer, and a charged particle accelerator.

  Conventionally, various electrostatic generators with mechanical motion have been developed, but in conventional devices, DC or pulse high voltage can be generated efficiently and at low cost by making the device compact and using it in a vacuum. It was difficult to realize. On the other hand, in the present invention, a movable capacitance type capacitor capable of generating a high-voltage pulse or a DC high voltage according to this cycle by periodically changing its capacitance by mechanical force, It is possible to provide a high voltage generation method and a high voltage generation device using a movable capacitance type capacitor, and a DC or pulse high voltage can be provided by an efficient electrostatic boosting mechanism having a compact and simple mechanical motion mechanism. It is possible to realize a high voltage generator capable of obtaining the above. In the present invention, the high voltage generator itself can be made compact and the cost can be reduced accordingly.

The following effects are exhibited by the present invention.
(1) A high voltage generator using mechanical force can be made more compact.
(2) A high voltage generator capable of periodically generating a high voltage by periodically changing the capacitance of the capacitor can be provided.
(3) By combining a high-voltage power supply and a high-voltage diode with the movable capacitor, a high-voltage pulse or a DC high voltage having a voltage several to several hundred times that of the original high-voltage power supply can be obtained.
(4) Since high voltage generation by this method can also be performed in a vacuum, equipment that requires a high voltage in a vacuum, for example, a film formation apparatus using a charged particle accelerator or an ion engineering method Such a significant cost reduction can be realized.
(5) A device capable of obtaining direct current or pulse high voltage can be realized by an efficient electrostatic boosting mechanism having a compact and simple motion mechanism.

  EXAMPLES Next, although this invention is demonstrated concretely based on an Example, this invention is not limited at all by the following Examples.

  In the present embodiment, a movable capacitor with an amplitude of several pF to 100 pF and a capacitance of about several tens of Hz to about 1,000 kHz is prepared, and a DC high-voltage power source of several kV to several tens of kV is provided. A movable capacitance type pulse high voltage generator using a parallel plate that periodically changes and uses a plurality of diodes having a withstand voltage of several tens of kV was constructed. As a result, it has been found that it can operate as a high voltage pulse power source having a voltage several times to several tens of times that of a DC high voltage power source, or a DC high voltage power source.

In this apparatus, the structure uses a mechanism in which one end of a long bar supported movably at a fulcrum is supported by a rotating disk with its axis shifted, and the other end is coupled to one electrode of a capacitor. By rotating the disk with a motor, the rotational movement of the long rod end is converted to the vertical movement of the capacitor electrode via the fulcrum, and the capacitance between the two electrodes of the capacitor is changed to change the capacitance of the capacitor. Changed. When the capacity ratio due to the decrease / increase in capacity is R = C _a / C _b , the generated voltage is represented by V ₁ = V ₀ * R. FIG. 2 shows the parallel plate type movable capacitance type pulse high voltage generator experimentally produced in this example and the measurement result of the pulse high voltage measured thereby.

In the present embodiment, a device for generating a DC high voltage was constructed by alternately stacking parallel plate type movable capacitive pulsed high voltage generating mechanisms that change in vibration shifted by half a cycle. A conceptual diagram of this movable multi-stage boosting mechanism is shown in FIG. In this apparatus, when the capacitance ratio is _{R c = C a / C b} , the voltage generated _{is ^{V n = V 0 * R c}} n, was found to significantly improve the generation voltage is provided.

  A high-voltage generator for generating DC high voltage was constructed using a multistage movable capacitor that periodically changes the capacitance at high speeds by rotating a cylinder with a rotating shaft whose axis is shifted. A conceptual diagram of this multistage DC high voltage generator is shown in FIG. It has been found that this device enables operation at higher frequency capacity changes and realizes an efficient voltage rise.

  As described above in detail, the present invention relates to a high voltage generation method and a high voltage generation device, and according to the present invention, the capacitance is periodically changed by a mechanical force, and this cycle is followed. In addition, a movable capacitance type capacitor capable of generating a high voltage pulse or a direct current high voltage, a high voltage generation method using the movable capacitance type capacitor, and a high voltage generation apparatus thereof can be provided. In addition, according to the present invention, it is possible to provide a compact high-voltage generator that has been difficult to realize until now by using the movable capacitor. In the present invention, a high voltage pulse or a DC high voltage having a voltage several to several hundred times that of the original high voltage power supply can be obtained by combining the movable capacitor with a high voltage power supply and a high voltage diode. New technologies and new products related to high pressure generation means can be provided.

  Further, by adopting the high voltage generator of the present invention as a high voltage power source for ion accelerators or ion engineering-based film forming apparatuses that require high voltages of several kV to several MV, the apparatus itself can be made compact. As a result, cost reduction can be realized. Furthermore, the present invention is useful for realizing a high voltage generator capable of obtaining a direct current or pulse high voltage by an efficient electrostatic boosting mechanism having a compact and simple motion mechanism.

The generation mechanism of the pulse high voltage by the movable capacitor and the change in the capacitance of the capacitor and the change in the generated potential over time are shown. The measurement result of the generated pulse high voltage and the high voltage generator are shown. The conceptual diagram of the apparatus for generate | occur | producing DC high voltage with the movable capacity | capacitance type multistage type pressure | voltage rise mechanism by a parallel plate system is shown. The conceptual diagram of the apparatus for generating the direct-current voltage by the multistage direct-current high voltage generator by a rotary movable capacity type | mold capacitor is shown.

Claims (11)

  A movable-capacitance type capacitor that uses mechanical motion to control the distance between the electrodes of the capacitor and periodically change the capacitance of the capacitor. Or a movable capacitor characterized by generating a high DC voltage.   The variable capacitor according to claim 1, wherein the capacitance of the capacitor is periodically changed by controlling the distance between the electrodes by reciprocating movement of the parallel plate electrodes.   By controlling the distance between the opposing electrodes by rotating a cylindrical electrode having a rotation axis shifted from the axis with respect to the electrode facing the electrode, the capacitance of the capacitor is periodically changed. The movable capacitor according to claim 1.   A high voltage generating device comprising a high voltage generating mechanism in which a movable capacitor and a high voltage diode are combined.   The high voltage generator according to claim 4, wherein the movable capacitor is the movable capacitor according to any one of claims 1 to 3.   The high-voltage generator according to claim 4, comprising a movable-capacitance multi-stage boosting mechanism in which a plurality of movable-capacitance capacitors and high-voltage diodes are combined in cascade in multiple stages.   The high voltage generator according to claim 4, wherein the movable capacitor whose capacitance changes periodically is installed in multiple stages while shifting the cycle.   The high voltage generator according to claim 4, wherein the high voltage generator is a high voltage generator of a device that requires a high voltage.   The high voltage generator according to claim 8, wherein the device that requires high voltage is a charged particle accelerator or a film forming apparatus.   A high voltage generation method characterized by generating a high voltage using a high voltage generation mechanism in which a movable capacitor type capacitor and a high voltage diode are combined.   The high voltage generating method according to claim 10, wherein the movable capacitor is the movable capacitor according to claim 1.